TWI839755B - Electronic device and method of manufacturing the same - Google Patents
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Abstract
Description
本揭露係有關於電子裝置,且特別係有關於電子裝置的封裝結構以及其製造方法。The present disclosure relates to electronic devices, and more particularly to packaging structures of electronic devices and methods of manufacturing the same.
扇出型面板級封裝(fan-out panel level package,FOPLP)技術可於給定的區域中提升電子元件(例如,電晶體、二極體、電阻器、電容器等)的整合密度,近年來廣泛地應用電子裝置的生產製造。Fan-out panel level package (FOPLP) technology can improve the integration density of electronic components (e.g., transistors, diodes, resistors, capacitors, etc.) in a given area and has been widely used in the production and manufacturing of electronic devices in recent years.
扇出型面板級封裝製程中,模塑製程(molding process)容易造成晶片偏移。對於具有單一種晶片的產品設計,雖然偏移量可藉由後續製程進行補償,但若偏移量過大仍須報廢而造成良率損失。再者,對於多晶片或進階2.5D/3D異質整合(heterogeneous integration)的產品設計,減少晶片偏移之良率損失為大面板FOPLP開發製程中須要克服的重要課題。In the fan-out panel-level packaging process, the molding process can easily cause chip shift. For product designs with a single chip, although the shift can be compensated by subsequent processes, if the shift is too large, it still needs to be scrapped, resulting in yield loss. Furthermore, for multi-chip or advanced 2.5D/3D heterogeneous integration product designs, reducing the yield loss caused by chip shift is an important issue that needs to be overcome in the large-panel FOPLP development process.
承前述,開發可以改善電子裝置的封裝良率的結構及製程設計仍為目前業界致力研究的課題之一。As mentioned above, developing structures and process designs that can improve the packaging yield of electronic devices is still one of the topics that the industry is currently committed to researching.
根據本揭露一些實施例,提供一種電子裝置,包含複數個間隔元件、第一電子單元以及第二電子單元、保護層以及連接件;第一電子單元以及第二電子單元分別設置於複數個間隔元件中相鄰的兩者之間;保護層圍繞複數個間隔元件、第一電子單元以及第二電子單元;第一電子單元藉由連接件與第二電子單元電性連接;電子裝置具有法線方向,於垂直於法線方向的方向上,第一電子單元具有第一寬度,複數個間隔元件中相鄰的兩者之間具有第一距離,並且,第一距離與第一寬度的比值大於等於1且小於等於1.3。According to some embodiments of the present disclosure, an electronic device is provided, comprising a plurality of spacer elements, a first electronic unit and a second electronic unit, a protective layer and a connector; the first electronic unit and the second electronic unit are respectively arranged between two adjacent ones of the plurality of spacer elements; the protective layer surrounds the plurality of spacer elements, the first electronic unit and the second electronic unit; the first electronic unit is electrically connected to the second electronic unit via the connector; the electronic device has a normal direction, the first electronic unit has a first width in a direction perpendicular to the normal direction, two adjacent ones of the plurality of spacer elements have a first distance, and a ratio of the first distance to the first width is greater than or equal to 1 and less than or equal to 1.3.
根據本揭露一些實施例,提供一種電子裝置的製造方法,包含以下步驟:提供基板;形成光阻層於基板上,光阻層具有複數個開口;形成複數個第一間隔元件於複數個開口中;移除光阻層;以及提供第一電子單元以及第二電子單元,第一電子單元以及第二電子單元分別設置於複數個第一間隔元件中相鄰的兩者之間。再者,電子裝置具有法線方向,於垂直於法線方向的方向上,第一電子單元具有第一寬度,複數個第一間隔元件中相鄰的兩者之間具有第一距離,並且,第一距離與第一寬度的比值大於等於1且小於等於1.3。According to some embodiments of the present disclosure, a method for manufacturing an electronic device is provided, comprising the following steps: providing a substrate; forming a photoresist layer on the substrate, the photoresist layer having a plurality of openings; forming a plurality of first spacer elements in the plurality of openings; removing the photoresist layer; and providing a first electronic unit and a second electronic unit, the first electronic unit and the second electronic unit being respectively disposed between two adjacent ones of the plurality of first spacer elements. Furthermore, the electronic device has a normal direction, in a direction perpendicular to the normal direction, the first electronic unit has a first width, two adjacent ones of the plurality of first spacer elements have a first distance, and the ratio of the first distance to the first width is greater than or equal to 1 and less than or equal to 1.3.
為讓本揭露之特徵或優點能更明顯易懂,下文特舉出一些實施例,並配合所附圖式,作詳細說明如下。In order to make the features and advantages of the present disclosure more clearly understood, some embodiments are specifically cited below and described in detail with reference to the accompanying drawings.
以下針對本揭露實施例的電子裝置以及其製造方法作詳細說明。應了解的是,以下之敘述提供許多不同的實施例,用以實施本揭露一些實施例之不同態樣。以下所述特定的元件及排列方式僅為簡單清楚描述本揭露一些實施例。當然,這些僅用以舉例而非本揭露之限定。此外,在不同實施例中可能使用類似及/或對應的標號標示類似及/或對應的元件,以清楚描述本揭露。然而,這些類似及/或對應的標號的使用僅為了簡單清楚地敘述本揭露一些實施例,不代表所討論之不同實施例及/或結構之間具有任何關連性。The following is a detailed description of the electronic device and its manufacturing method of the disclosed embodiment. It should be understood that the following description provides many different embodiments for implementing different aspects of some embodiments of the disclosed embodiment. The specific elements and arrangements described below are only for simple and clear description of some embodiments of the disclosed embodiment. Of course, these are only used for exemplification and are not limitations of the disclosed embodiment. In addition, similar and/or corresponding numbers may be used in different embodiments to indicate similar and/or corresponding elements to clearly describe the disclosed embodiment. However, the use of these similar and/or corresponding numbers is only for simple and clear description of some embodiments of the disclosed embodiment, and does not represent any correlation between the different embodiments and/or structures discussed.
應理解的是,實施例中可能使用相對性用語,例如「較低」或「底部」或「較高」或「頂部」,以描述圖式的一個元件對於另一元件的相對關係。可理解的是,如果將圖式的裝置翻轉使其上下顛倒,則所敘述在「較低」側的元件將會成為在「較高」側的元件。本揭露實施例可配合圖式一併理解,本揭露之圖式亦被視為揭露說明之一部分。應理解的是,本揭露之圖式並未按照比例繪製,事實上,可能任意的放大或縮小元件的尺寸以便清楚表現出本揭露的特徵。It should be understood that relative terms, such as "lower" or "bottom" or "higher" or "top", may be used in the embodiments to describe the relative relationship of one element of the diagram to another element. It is understood that if the device of the diagram is turned upside down, the element described on the "lower" side will become the element on the "higher" side. The embodiments of the present disclosure can be understood in conjunction with the drawings, and the drawings of the present disclosure are also considered to be part of the disclosure. It should be understood that the drawings of the present disclosure are not drawn to scale, and in fact, the size of the elements may be arbitrarily enlarged or reduced in order to clearly show the features of the present disclosure.
再者,當述及一第一材料層位於一第二材料層上或之上時,可能包含第一材料層與第二材料層直接接觸之情形或第一材料層與第二材料層之間可能不直接接觸,亦即第一材料層與第二材料層之間可能間隔有一或更多其它材料層之情形。但若第一材料層直接位於第二材料層上時,即表示第一材料層與第二材料層直接接觸之情形。Furthermore, when a first material layer is mentioned as being located on or above a second material layer, it may include a situation where the first material layer is in direct contact with the second material layer or the first material layer and the second material layer may not be in direct contact, that is, there may be one or more other material layers between the first material layer and the second material layer. However, if the first material layer is directly located on the second material layer, it means that the first material layer and the second material layer are in direct contact.
此外,應理解的是,說明書與申請專利範圍中所使用的序數例如「第一」、「第二」等之用詞用以修飾元件,其本身並不意涵及代表該(或該些)元件有任何之前的序數,也不代表某一元件與另一元件的順序、或是製造方法上的順序,該些序數的使用僅用來使具有某命名的元件得以和另一具有相同命名的元件能作出清楚區分。申請專利範圍與說明書中可不使用相同用詞,例如,說明書中的第一元件在申請專利範圍中可能為第二元件。In addition, it should be understood that the ordinal numbers used in the specification and the patent application, such as "first", "second", etc., are used to modify the elements, and they do not imply or represent any previous ordinal numbers of the (or those) elements, nor do they represent the order of one element and another element, or the order of the manufacturing method. The use of these ordinal numbers is only used to make a component with a certain name clearly distinguishable from another component with the same name. The patent application and the specification may not use the same terms, for example, the first element in the specification may be the second element in the patent application.
在本揭露一些實施例中,關於接合、連接之用語例如「連接」、「互連」等,除非特別定義,否則可指兩個結構係直接接觸,或者亦可指兩個結構並非直接接觸,其中有其它結構設於此兩個結構之間。且此關於接合、連接之用語亦可包含兩個結構都可移動,或者兩個結構都固定之情況。此外,用語「電性連接」或「電性耦接」包含任何直接及間接的電性連接手段。In some embodiments of the present disclosure, terms such as "connected", "interconnected", etc., related to bonding and connection, unless otherwise specifically defined, may refer to two structures being in direct contact, or may also refer to two structures not being in direct contact, wherein other structures are disposed between the two structures. Moreover, such terms related to bonding and connection may also include situations where both structures are movable, or both structures are fixed. In addition, the terms "electrically connected" or "electrically coupled" include any direct and indirect electrical connection means.
於文中,「約」、「實質上」之用語通常表示在一給定值的10%內、或5%內、或3%之內、或2%之內、或1%之內、或0.5%之內的範圍。用語「範圍介於第一數值及第二數值之間」表示所述範圍包含第一數值、第二數值以及它們之間的其它數值。In the text, the terms "about" and "substantially" generally indicate a range within 10%, 5%, 3%, 2%, 1%, or 0.5% of a given value. The term "range between a first value and a second value" means that the range includes the first value, the second value, and other values therebetween.
應理解的是,以下所舉實施例可以在不脫離本揭露的精神下,可將數個不同實施例中的特徵進行替換、重組、結合以完成其它實施例。各實施例間特徵只要不違背發明精神或相衝突,均可任意結合搭配使用。It should be understood that the following embodiments may replace, reorganize, or combine features in several different embodiments to complete other embodiments without departing from the spirit of the present disclosure. Features between embodiments may be combined and used in any manner as long as they do not violate the spirit of the invention or conflict with each other.
除非另外定義,在此使用的全部用語(包含技術及科學用語)具有與本揭露所屬技術領域具有通常知者通常理解的相同涵義。能理解的是,這些用語例如在通常使用的字典中定義用語,應被解讀成具有與相關技術及本揭露的背景或上下文一致的意思,而不應以一理想化或過度正式的方式解讀,除非在本揭露實施例有特別定義。Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meanings as those commonly understood by those skilled in the art to which the present disclosure belongs. It is understood that these terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning consistent with the background or context of the relevant technology and the present disclosure, and should not be interpreted in an idealized or overly formal manner unless specifically defined in the embodiments of the present disclosure.
根據本揭露的一些實施例,提供一種電子裝置,包含可作為圍籬結構(fence structure)的間隔元件,電子單元設置於間隔元件之間,藉此可以控制電子單元於接合製程或模塑製程進行時產生的偏移量,進而改善封裝技術的良率。再者,間隔元件亦可作為提供元件之間電性連接的導電元件或提供散熱功能。此外,根據本揭露的一些實施例,電子裝置包含鄰近於間隔元件的對位記號,無須於基板上刻畫記號,使得基板可以重複使用,降低生產成本。According to some embodiments of the present disclosure, an electronic device is provided, including a spacer element that can be used as a fence structure, and an electronic unit is arranged between the spacer elements, thereby controlling the offset of the electronic unit during the bonding process or the molding process, thereby improving the yield of the packaging technology. Furthermore, the spacer element can also be used as a conductive element to provide electrical connection between components or provide a heat dissipation function. In addition, according to some embodiments of the present disclosure, the electronic device includes an alignment mark adjacent to the spacer element, and there is no need to engrave the mark on the substrate, so that the substrate can be reused, reducing the production cost.
根據本揭露的實施例,電子裝置可包含顯示裝置、背光裝置、天線裝置、觸控裝置、感測裝置或拼接裝置,但不以此為限。電子裝置可為可彎折或可撓式電子裝置。顯示裝置可為非自發光型顯示裝置或自發光型顯示裝置。天線裝置可為液晶型態的天線裝置或非液晶型態的天線裝置。感測裝置可為感測電容、光線、熱能或超聲波的感測裝置,但不以此為限。再者,電子裝置可例如包含液晶、量子點(quantum dot,QD)、螢光(fluorescence)、磷光(phosphor)、其他適合之材料或前述之組合。電子裝置可包含電子元件,電子元件可包含被動元件與主動元件,例如電容、電阻、電感、二極體、電晶體等。二極體可包含發光二極體或光電二極體。發光二極體可例如包含有機發光二極體(organic light emitting diode,OLED)、次毫米發光二極體(mini LED)、微發光二極體(micro LED)或量子點發光二極體(quantum dot LED),但不以此為限。根據一些實施例,電子裝置可包含面板及/或背光模組,面板例如可包含液晶面板或其他自發光面板,但不以此為限。拼接裝置例如可為顯示器拼接裝置或天線拼接裝置,但不以此為限。應理解的是,電子裝置可為前述之任意排列組合,但不以此為限。下文將以顯示裝置為例闡述電子裝置,但本揭露不以此為限。According to the embodiments of the present disclosure, the electronic device may include a display device, a backlight device, an antenna device, a touch device, a sensing device or a splicing device, but is not limited thereto. The electronic device may be a bendable or flexible electronic device. The display device may be a non-self-luminous display device or a self-luminous display device. The antenna device may be a liquid crystal antenna device or a non-liquid crystal antenna device. The sensing device may be a sensing device for sensing capacitance, light, heat or ultrasound, but is not limited thereto. Furthermore, the electronic device may, for example, include liquid crystal, quantum dot (QD), fluorescence, phosphor, other suitable materials or a combination of the foregoing. The electronic device may include electronic components, and the electronic components may include passive components and active components, such as capacitors, resistors, inductors, diodes, transistors, etc. The diode may include a light-emitting diode or a photodiode. The light-emitting diode may, for example, include an organic light emitting diode (OLED), a sub-millimeter light-emitting diode (mini LED), a micro LED, or a quantum dot light-emitting diode (quantum dot LED), but is not limited thereto. According to some embodiments, the electronic device may include a panel and/or a backlight module, and the panel may, for example, include a liquid crystal panel or other self-luminous panel, but is not limited thereto. The splicing device may, for example, be a display splicing device or an antenna splicing device, but is not limited thereto. It should be understood that the electronic device may be any combination of the aforementioned arrangements, but is not limited thereto. The electronic device will be described below using a display device as an example, but the present disclosure is not limited thereto.
請參照第1A圖至第1F圖,第1A圖至第1F圖顯示根據本揭露一些實施例中,電子裝置10於製程的中間階段的剖面結構示意圖。第1A圖至第1F圖可為第2A圖以及第2B圖的截線A-A’所對應的電子裝置10的剖面結構示意圖。應理解的是,為了清楚說明,圖式中可能省略電子裝置10的部分元件,僅示意地繪示部分元件。根據一些實施例,可添加額外特徵於以下所述之電子裝置10。此外,應理解的是,根據一些實施例,可於電子裝置的製造方法進行前、進行中及/或進行後提供額外的操作步驟。根據一些實施例,所述的一些操作步驟可能被取代或省略,並且所述的一些操作步驟的順序為可互換的。Please refer to Figures 1A to 1F, which show schematic cross-sectional structures of the
根據一些實施例,第1A圖至第1F圖可為電子裝置10中的一個封裝區100A(例如,如第2A圖以及第2B圖所示)的結構示意圖。根據一些實施例,電子裝置10可包含複數個封裝區100A,且一個封裝區100A中可封裝一或多個電子單元。根據一些實施例,電子裝置10可以系統單晶片(System-on-Chip,SoP)、系統單封裝(System-in-Package,SiP)或其它合適的方式進行封裝。再者,根據一些實施例,電子裝置10的製造方法可應用於晶圓級封裝(wafer level package,WLP)或面板級封裝(panel level package,PLP)等,但本揭露不以此為限。According to some embodiments, FIGS. 1A to 1F may be structural schematic diagrams of a
請參照第1A圖,提供基板102,並且形成剝離層104於基板102上。基板102可為承載基板。根據一些實施例,基板102可包含玻璃承載基板、陶瓷承載基板或其它合適的基板,但不限於此。根據一些實施例,基板102可為晶片或晶圓,但不限於此。Referring to FIG. 1A , a
剝離層104可以將其與基板102一起從後續步驟中形成的上覆結構(例如,導電層106)移除。剝離層104可包含以聚合物為主的材料,但不限於此。根據一些實施例,剝離層104可包含以環氧樹脂為主的隔熱材料,其於加熱時會失去黏著性,例如,熱解膠(thermal release tape,HRT)、光熱轉換(light-to-heat-conversion,LTHC)剝離塗層。根據另一些實施例,剝離層104可包含紫外線(ultra-violet,UV)膠,當暴露於紫外光時失去黏著性。根據一些實施例,可藉由塗佈及固化製程、層壓製程、其它合適的製程、或前述之組合形成剝離層104。The
如第1A圖所示,可形成導電層106於剝離層104上,導電層106可作為晶種層(seed layer)。根據一些實施例,導電層106可為複合層,例如,包含子層106a以及形成於子層106a上的子層106b。根據一些實施例,子層106a以及子層106b分別可為鈦層(Titanium,Ti)以及銅層(Copper,Cu),但不限於此。根據一些實施例,可藉由物理氣相沉積(physical vapor deposition,PVD)製程、電鍍製程、無電電鍍製程、其它合適的方法或前述之組合形成導電層106。As shown in FIG. 1A , a
接著,可形成光阻層PR於導電層106上,使得導電層106位於基板102與光阻層PR之間。根據一些實施例,可藉由電鍍製程、旋轉塗佈製程、其它合適的方法或前述之組合形成光阻層PR,並且可將光阻層PR曝光以進行圖案化。具體而言,可將光阻層PR圖案化,使光阻層PR具有複數個開口,複數個開口可貫穿光阻層PR以暴露出金屬層106。Next, a photoresist layer PR may be formed on the
接著,可於光阻層PR的開口中以及金屬層106暴露出的部分上形成導電材料,亦即,形成複數個間隔元件200F以及複數個對位記號200M於光阻層PR的開口中。根據一些實施例,對位記號200M以及間隔元件200F於同一製程中形成。根據一些實施例,前述導電材料(即間隔元件200F及對位記號200M的材料)可包含銅(Cu)、鈦(Ti)、鋁(Al)、鎢(W)、銀(Ag)、金(Au)、錫(Sn)、鉬(Mo)、鉻(Cr)、鎳(Ni)、鉑(Pt)、前述任一之金屬合金、其它合適的材料或前述之組合,但不限於此。根據一些實施例,對位記號200M的材料與間隔元件200F的材料相同。根據一些實施例,可以藉由物理氣相沉積製程、電鍍製程、無電電鍍製程、其它合適的方法或前述之組合形成導電材料。Then, a conductive material may be formed in the opening of the photoresist layer PR and on the exposed portion of the
再者,於形成間隔元件200F以及對位記號200M之後,可移除光阻層PR。移除光阻層PR之後,可暴露出部分的導電層106。根據一些實施例,可藉由剝離(stripping)製程、灰化(ashing)製程或其它合適的方法將剩餘的光阻層PR移除。Furthermore, after forming the
請參照第1B圖,可提供電子單元50-1以及電子單元50-2,將電子單元50-1以及電子單元50-2放置於間隔元件200F之間,詳細而言,電子單元50-1以及電子單元50-2可分別設置於複數個間隔元件200F中相鄰的兩者之間。根據一些實施例,可藉由黏著層(未繪示)將電子單元50-1以及電子單元50-2固定於導電層106上。值得注意的是,於電子單元50-1以及電子單元50-2設置於基板102上之前,間隔元件200F已先形成,間隔元件200F可作為圍籬結構(fence structure),減少電子單元50-1以及電子單元50-2於接續的接合製程或模塑製程中產生偏移,進而改善封裝技術的良率。Referring to FIG. 1B , an electronic unit 50-1 and an electronic unit 50-2 may be provided and placed between the
具體而言,電子裝置10具有法線方向(例如,圖式中的Z方向),於垂直於法線方向的方向(例如,圖式中的X方向)上,電子單元50-1(或電子單元50-2)具有第一寬度W1,複數個間隔元件200F中相鄰的兩者之間具有第一距離W2,第一距離W2與第一寬度W1的比值可大於等於1且小於等於1.3(即,1 ≤ W2/W1 ≤ 1.3),例如,1.05、1.1、1.15、1.2或1.25。根據一些實施例,電子單元50-1(或電子單元50-2)與間隔元件200F之間的第二距離d可大於0微米且小於等於10微米(即,0μm < 第二距離d ≤ 10μm),例如,1μm、2μm、3μm、4μm、5μm、6μm、7μm、8μm或9μm。Specifically, the
根據本揭露的實施例,第一寬度W1指的是於與電子裝置10的法線方向垂直的方向(例如,圖式中的X方向)上,電子單元50-1(或電子單元50-2)的最大寬度,第一距離W2指的是於與電子裝置10的法線方向垂直的方向上,之間設置有電子單元50-1(或電子單元50-2)的兩個間隔元件200F之間的最小距離。再者,第二距離d指的是於與電子裝置10的法線方向垂直的方向(例如,圖式中的X方向)上,電子單元50-1(或電子單元50-2)與最鄰近的間隔元件200F之間的最小距離。According to the embodiment of the present disclosure, the first width W1 refers to the maximum width of the electronic unit 50-1 (or the electronic unit 50-2) in the direction perpendicular to the normal direction of the electronic device 10 (e.g., the X direction in the figure), and the first distance W2 refers to the minimum distance between two
再者,應理解的是,根據本揭露實施例,可以使用掃描式電子顯微鏡(scanning electron microscope,SEM)、光學顯微鏡(optical microscope,OM)、薄膜厚度輪廓測量儀(α-step)、橢圓測厚儀、或其它合適的方式量測各元件的寬度、厚度或高度、元件之間的間距或距離。詳細而言,根據一些實施例,可使用掃描式電子顯微鏡取得包含欲量測的元件的剖面結構影像,並量測各元件的寬度、厚度或高度、元件之間的間距或距離。Furthermore, it should be understood that according to the embodiments of the present disclosure, a scanning electron microscope (SEM), an optical microscope (OM), a film thickness profiler (α-step), an elliptical thickness gauge, or other suitable methods may be used to measure the width, thickness, or height of each component, and the spacing or distance between components. Specifically, according to some embodiments, a scanning electron microscope may be used to obtain a cross-sectional structural image including the components to be measured, and the width, thickness, or height of each component, and the spacing or distance between components may be measured.
此外,根據一些實施例,電子單元50-1以及電子單元50-2可包含積體電路(integrated circuit,IC)、電容器、感測器、電阻器、印刷電路板(PCB)、二極體、其它合適的電子元件或前述之組合,但不限於此。電子單元50-1以及電子單元50-2可為相同或不同種類的電子單元。電子單元50-1以及電子單元50-2可具有相同或不同的尺寸(例如,高度及/或寬度)。再者,電子單元的數量並不限於圖式中所繪示者,根據不同的實施例,電子裝置可具有任意合適數量的電子單元。In addition, according to some embodiments, the electronic unit 50-1 and the electronic unit 50-2 may include an integrated circuit (IC), a capacitor, a sensor, a resistor, a printed circuit board (PCB), a diode, other suitable electronic components or a combination thereof, but is not limited thereto. The electronic unit 50-1 and the electronic unit 50-2 may be the same or different types of electronic units. The electronic unit 50-1 and the electronic unit 50-2 may have the same or different sizes (e.g., height and/or width). Furthermore, the number of electronic units is not limited to those shown in the drawings, and according to different embodiments, the electronic device may have any suitable number of electronic units.
請同時參照第1B圖以及第2C圖,第2C圖顯示根據本揭露一些實施例中,電子單元50-1(電子單元50-2)的局部剖面結構示意圖。應理解的是,第2C圖僅繪示局部的結構,未完全與第1B圖的結構對應。根據一些實施例,電子單元50-1(電子單元50-2)可包含晶片52、第一絕緣層54(第1B圖中未繪示)以及第二絕緣層56,晶片52可具有複數個接合墊58,第一絕緣層54可設置於晶片52上,第一絕緣層54可具有複數個第一開口54p,複數個第一開口54p可與複數個接合墊58對應設置,第二絕緣層56可設置於第一絕緣層54上,第二絕緣層56可具有複數個第二開口56p,複數個第二開口56p可與複數個接合墊58對應設置。關於電子單元50-1(電子單元50-2)的詳細結構將於下文進一步說明。根據一些實施例,晶片52可例如為已知良好的晶片(known-good die,KGD)、積體電路晶片(integrated circuit chip,IC)、二極體晶片(diode)等。Please refer to FIG. 1B and FIG. 2C at the same time. FIG. 2C shows a partial cross-sectional structure schematic diagram of the electronic unit 50-1 (electronic unit 50-2) according to some embodiments of the present disclosure. It should be understood that FIG. 2C only shows a partial structure and does not completely correspond to the structure of FIG. 1B. According to some embodiments, the electronic unit 50-1 (electronic unit 50-2) may include a
此外,於此實施例中,電子裝置10的製造方法採用晶片優先(chip first)且晶片面向下(face down)接合的製程,亦即,電子單元50-1以及電子單元50-2的接合墊58朝下,以接合墊58較靠近基板102的方式放置。In addition, in this embodiment, the manufacturing method of the
如第1B圖所示,於提供電子單元50-1以及電子單元50-2的步驟之後,可形成保護層108圍繞複數個間隔元件200F、電子單元50-1以及電子單元50-2。再者,保護層108亦可圍繞對位記號200M。根據一些實施例,於一剖面示意圖下,保護層108接觸複數個間隔元件200F、電子單元50-1、電子單元50-2與對位記號200M的至少兩個側表面。保護層108可為封裝材料,將間隔元件200F、對位記號200M、電子單元50-1以及電子單元50-2封裝整合於導電層106上。保護層108接觸複數個間隔元件200F、電子單元50-1以及電子單元50-2的至少一表面,可降低複數個間隔元件200F、電子單元50-1以及電子單元50-2受外在環境的水氧影響或可減少後續製程對複數個間隔元件200F、電子單元50-1以及電子單元50-2造成刮傷,但不以此為限。根據一些實施例,保護層108可包含模塑化合物(molding compound)、環氧樹脂(epoxy)、其它合適的封裝材料或前述之組合,但不限於此。根據一些實施例,可藉由壓縮模塑(compression molding)製程、轉移模塑(transfer molding)製程或其它合適的方法形成保護層108。根據一些實施例,保護層108可以液態或半液態的形式進行模塑製程,隨後被固化。As shown in FIG. 1B , after the step of providing the electronic unit 50-1 and the electronic unit 50-2, a
此外,根據一些實施例,保護層108可先覆蓋於間隔元件200F、對位記號200M、電子單元50-1以及電子單元50-2上,接著,可對保護層108進行平坦化製程以暴露出間隔元件200F以及對位記號200M。於平坦化製程之後,間隔元件200F、對位記號200M以及保護層108的表面108A可為共平面的。根據一些實施例,平坦化製程可包含磨削(grinding)製程、化學機械研磨(chemical-mechanical polish,CMP)製程、其它合適的平坦化製程或前述之組合。In addition, according to some embodiments, the
根據一些實施例,於一剖面示意圖下,間隔元件200F與對位記號200M之間有間距d’。進一步而言,間隔元件200F與對位記號200M彼此分離,間隔元件200F與對位記號200M彼此電性絕緣。根據一些實施例,於一剖面示意圖下,間隔元件200F具有寬度W3,對位記號200M具有寬度W4,其中W4 ≤ 1/2xW3。根據一些實施例,W4 ≤ 1/3xW3。透過上述設置,間隔元件200F與對位記號200M可利用相同製程形成,可減少製程步驟,並可提升對位精準度或者提供電性連接設計,提升電子裝置10的扇出(fan-out)設計,但不以此為限。According to some embodiments, in a cross-sectional view, there is a distance d' between the
再者,根據一些實施例,於電子裝置10的法線方向(例如,圖式中的Z方向)上,間隔元件200F具有第一高度H1,對位記號200M具有第二高度H2,且第二高度H2與第一高度H1的比值可大於等於0.5且小於等於1.2(即,0.5 ≤ H2/H1 ≤ 1.2),例如,0.6、0.7、0.8、0.9、1或1.1。Furthermore, according to some embodiments, in the normal direction of the electronic device 10 (for example, the Z direction in the figure), the
根據本揭露的實施例,第一高度H1指的是電子裝置10的法線方向(例如,圖式中的Z方向)上,位於保護層108中的間隔元件200F的最大高度,第二高度H2指的是於電子裝置10的法線方向上,位於保護層108中的對位記號200M的最大高度。並且,若有對保護層108進行平坦化製程,則前述第一高度H1及第二高度H2是平坦化製程進行後所量測。According to the embodiment of the present disclosure, the first height H1 refers to the maximum height of the
請參照第1C圖,於形成保護層108之後,可對剝離層104加熱,使得導電層106以及封裝整合於導電層106上的間隔元件200F、對位記號200M、電子單元50-1以及電子單元50-2與剝離層104以及基板102上分離。根據一些實施例,於移除基板102之後,可藉由蝕刻製程將導電層106移除,蝕刻製程可包含乾蝕刻製程或濕蝕刻製程,或其它合適的蝕刻製程。接著,可將前述經封裝整合的結構(間隔元件200F、對位記號200M、電子單元50-1以及電子單元50-2)翻轉,並且設置於另一個基板102’上,可將原先位於頂部的保護層108的表面108A設置於另一層剝離層104’上,將原先位於底部的保護層的表面108B暴露出來。1C , after forming the
接著,可移除一部分的第二絕緣層56以形成複數個第二開口56p,第二開口56p可暴露出接合墊58。於電子裝置10的法線方向(例如,圖式中的Z方向)上,第二開口56p與接合墊58至少部分地重疊。根據一些實施例,可藉由雷射鑽孔製程、或者一或多個光微影製程及/或蝕刻製程或其它合適的製程移除第二絕緣層56以形成第二開口56p。根據一些實施例,光微影製程可包含光阻塗佈(例如,旋轉塗佈)、軟烘烤、硬烘烤、遮罩對齊、曝光、曝光後烘烤、光阻顯影、清洗及乾燥等,但不限於此。蝕刻製程可包含乾蝕刻製程或濕蝕刻製程,但不限於此。根據一些實施例,接合墊58的材料可包括鋁、銅、錫、鎳、透明導電材料或其他合適的導電材料,但不以此為限。Next, a portion of the second insulating
請參照第1D圖,可形成圖案化導電層110a於保護層108上且位於電子單元50-1以及電子單元50-2上,圖案化導電層110a可填充於第二開口56p中並且與接合墊58接觸。此外,圖案化導電層110a亦可與間隔元件200F、保護層108的一表面以及第二絕緣層56的一表面接觸。如此一來,間隔元件200F可藉由圖案化導電層110a與電子單元50-1(電子單元50-2)電性連接。進一步而言,圖案化導電層110a可為連接件110(如第1E圖所示)的一部分,而連接件110可作為電子裝置10的重佈線結構(redistribution layer,RDL)。根據一些實施例,連接件110可包含電晶體、電容或電阻等電子元件,但不以此為限。根據一些實施例,圖案化導電層110a可包含導電材料,例如可包含銅(Cu)、鈦(Ti)、鋁(Al)、鎢(W)、銀(Ag)、金(Au)、錫(Sn)、鉬(Mo)、鉻(Cr)、鎳(Ni)、鉑(Pt)、前述任一之金屬合金、其它合適的材料或前述之組合,但不限於此。根據一些實施例,可以藉由物理氣相沉積製程、電鍍製程、無電電鍍製程、其它合適的方法或前述之組合形成導電材料。並且,可藉由一或多個光微影製程及/或蝕刻製程將導電材料圖案化以形成圖案化導電層110a。Referring to FIG. 1D , a patterned
請參照第1E圖,於形成圖案化導電層110a之後,可形成絕緣層112於圖案化導電層110a上。根據一些實施例,絕緣層112可包含聚合物材料,例如可包含聚苯並雙㗁唑polybenzoxazole (PBO)、聚醯亞胺(polyimide)、苯環丁烯(benzocyclobutene,BCB)、其它合適的聚合物材料或前述之組合,但不限於此。根據另一些實施例,絕緣層112可包含氮化矽、氧化矽、氮氧化矽、磷矽酸鹽玻璃(phosphosilicate glass,PSG)、硼矽酸鹽玻璃(borosilicate glass,BSG)、摻硼的磷矽酸鹽玻璃(boron-doped phosphosilicate glass,BPSG)、其它合適的材料或前述之組合,但不限於此。根據一些實施例,可藉由塗佈製程、旋轉塗佈製程、化學氣相沉積(chemical vapor deposition,CVD)製程、其它合適的方法或前述之組合形成絕緣層112。Referring to FIG. 1E , after forming the patterned
之後,可將絕緣層112圖案化以形成暴露出圖案化導電層110a的一部分的開口(未標示)。根據一些實施例,可藉由一或多個光微影製程及/或蝕刻製程將絕緣層112圖案化。接著,可形成圖案化導電層110b於絕緣層112上且位於電子單元50-1以及電子單元50-2上,圖案化導電層110b可填充於絕緣層112的開口中並且與圖案化導電層110a接觸,圖案化導電層110b進而與圖案化導電層110a電性連接。再者,圖案化導電層110b可為連接件110的一部分,而連接件110可作為重佈線結構,如此一來,電子單元50-1可藉由連接件110與電子單元50-2電性連接。此外,圖案化導電層110b的材料以及形成方法可與前述圖案化導電層110a的材料以及形成方法相同或相似,於此便不再重複。Afterwards, the insulating
值得注意的是,根據一些實施例,間隔元件200F可與作為重佈線結構的圖案化導電層110a以及圖案化導電層110b電性連接,進而與電子單元50-1(電子單元50-2)電性連接而作為訊號傳遞的元件之一。再者,間隔元件200F亦可提供散熱功能,間隔元件200F的熱傳導係數(heat transfer coefficient)例如可大於等於237小於等於429W/mK,但不以此為限。It is worth noting that, according to some embodiments, the
應理解的是,根據不同的實施例,重佈線結構可包含任意合適數量的絕緣層以及圖案化導電層,例如一或多層絕緣層以及圖案化導電層。若欲形成更多的絕緣層以及圖案化導電層,則可以重複前述步驟以及製程。It should be understood that, according to different embodiments, the redistribution structure may include any suitable number of insulating layers and patterned conductive layers, such as one or more insulating layers and patterned conductive layers. If more insulating layers and patterned conductive layers are to be formed, the aforementioned steps and processes may be repeated.
請參照第1F圖,接著可形成絕緣層114於絕緣層112上,且絕緣層114可覆蓋圖案化導電層110b。絕緣層114的材料以及形成方法可與前述絕緣層112的材料以及形成方法相同或相似,於此便不再重複。接著,可將絕緣層114圖案化以形成暴露出圖案化導電層110b的一部分的開口(未標示)。根據一些實施例,可藉由一或多個光微影製程及/或蝕刻製程將絕緣層114圖案化。之後,可形成圖案化導電層110c於絕緣層114上且位於電子單元50-1以及電子單元50-2上,圖案化導電層110c可填充於絕緣層114的開口中並且與圖案化導電層110b接觸,圖案化導電層110c進而與圖案化導電層110b電性連接。此外,圖案化導電層110c的材料以及形成方法可與前述圖案化導電層110a的材料以及形成方法相同或相似,於此便不再重複。Referring to FIG. 1F , an insulating
接著,可形成接合墊SB於絕緣層114上,且接合墊SB可對應圖案化導電層110c設置。根據一些實施例,接合墊SB可為接觸凸塊。詳細而言,圖案化導電層110c可作為凸塊下金屬層(under bump metallurgy,UBM),與接合墊SB電性連接,進而使得電子單元50-1(電子單元50-2)可與外部裝置(未繪示)電性連接。根據一些實施例,接合墊SB的材料可包含錫、銀、無鉛錫、銅、其它合適的材料或前述之組合,但不限於此。根據一些實施例,可藉由回焊製程、熔融接合製程、混合接合製程、金屬對金屬接合製程、其它合適的方法或前述之組合將接合墊SB接合於圖案化導電層110c上。根據一些實施例,凸塊下金屬層為與接合墊SB接觸的圖案化導電層。
Next, a bonding pad SB may be formed on the insulating
根據一些實施例,後續可對剝離層104’進行加熱製程,以移除剝離層104’以及基板102’,以得到電子裝置10。
According to some embodiments, the
如第1F圖所示,藉由前述製造方法形成的電子裝置10可包含複數個間隔元件200F、電子單元50-1以及電子單元50-2、保護層108以及連接件110。電子單元50-1以及電子單元50-2可分別設置於複數個間隔元件200F中相鄰的兩者之間。保護層108可圍繞複數個間隔元件200F、電子單元50-1以及電子單元50-2。電子單元50-1可藉由連接件110與電子單元50-2電性連接。電子裝置10具有法線方向(例如,圖式中的Z方向),於垂直於法線方向的方向(例如,圖式中的X方向)上,電子單元50-1(電子單元50-2)可具有第一寬度W1,複數個間隔元件200F中相鄰的兩者之間可具有第一距離W2,並且,第一距離W2與第一寬度W1的比值可大於等於1且小於等於1.3。透過第一距離W2與第一寬度W1設計,可以提升電子裝置的對位精準度或者降低對晶片的碰撞、刮傷風險,但不以此為限。As shown in FIG. 1F , the
根據一些實施例,複數個間隔元件200F中相鄰的兩者可藉由連接件110與電子單元50-1(電子單元50-2)電性連接。根據一些實施例,電子裝置10可進一步包含對位記號200M,保護層108可圍繞對位記號200M。根據一些實施例,對位記號200M的材料與間隔元件200F的材料相同。根據一些實施例,於電子裝置10的法線方向上,間隔元件200F可具有第一高度H1,對位記號200M可具有第二高度H2,且第二高度H2與第一高度H1的比值大於等於0.5且小於等於1.2。According to some embodiments, two adjacent ones of the plurality of
請參照第2A圖以及第2B圖,第2A圖以及第2B圖顯示根據本揭露一些實施例中,電子裝置10的上視結構示意圖。承前述,第2A圖以及第2B圖的截線A-A’可對應於第1A圖至第1F圖所示的電子裝置10的剖面結構示意圖。電子裝置10可包含複數個封裝區100A,且一個封裝區100A中可封裝複數個電子單元,例如,電子單元50-1以及電子單元50-2。如第2A圖所示,複數個封裝區100A可設置於同一剝離層104’以及基板(未繪示)上,且複數個封裝區100A可具有共同的對位記號200M,對位記號200M可設置於基板的四周,例如四個角落,但不限於此。再者,如第2B圖所示,於一個封裝區100A中,各個電子單元50-1(電子單元50-2)亦可另外具有對位記號200M,對位記號200M可鄰近設置於電子單元50-1(電子單元50-2)的四周,例如四個角落,但不限於此。對位記號200M可具有十字形、圓形、四邊形、矩形或任意合適的形狀,本揭露不以此為限。值得注意的是,對位記號200M於前述電子裝置的製造方法中以類似於圖案化導電層的方式形成,無須於基板上刻畫記號,使得基板可以重複使用,降低生產成本。Please refer to FIG. 2A and FIG. 2B, which show schematic diagrams of the top view of the
再者,間隔元件200F可環繞電子單元50-1(電子單元50-2)設置,間隔元件200F可作為圍籬結構,減少電子單元50-1以及電子單元50-2於接續的接合製程或模塑製程中產生偏移,進而改善封裝技術的良率。於上視圖中,間隔元件200F可具有圓形、四邊形、矩形或任意合適的形狀,本揭露不以此為限。間隔元件200F的數量可亦視需求調整。此外,於上視圖中,間隔元件200F所形成的內切區域FA的面積大於電子單元50-1(電子單元50-2)的面積,間隔元件200F所形成的內切區域FA可為矩形,但不限於此。於上視圖中,間隔元件200F所形成的內切區域FA例如為通過間隔元件200F的切線所環繞而成的區域。Furthermore, the
接著,請參照第2C圖,第2C圖針對電子單元50-1(電子單元50-2)的局部的結構進一步說明。承前述,根據一些實施例,晶片52可具有複數個接合墊58,第一絕緣層54可設置於晶片52上,第一絕緣層54的第一開口54p可與接合墊58對應設置,第二絕緣層56的第二開口56p亦可與接合墊58對應設置。亦即,於電子裝置的法線方向(例如,圖式中的Z方向)上,第一開口54p以及第二開口56p與接合墊58至少部分地重疊。此外,作為連接件110的一部分的圖案化導電層110a可設置於第二開口56p中。根據一些實施例,連接件110可延伸至第二開口56p以及第一開口54p中並且與接合墊58電性連接。根據一些實施例,第一絕緣層54以及第二絕緣層56的材料可為有機材料,例如可包含聚苯並雙㗁唑 (PBO)、聚醯亞胺(例如感光型聚醯亞胺(PSPI))、苯環丁烯(BCB)、增層材料 (Ajinomoto Build-up Film,ABF)或其它合適的有機材料或前述之組合,但不限於此。根據另一些實施例,第一絕緣層54以及第二絕緣層56的材料可為無機材料,例如可包含氮化矽、氧化矽、氮氧化矽、其它合適的無機材料或前述之組合,但不限於此。根據一些實施例,可藉由旋轉塗佈製程、化學氣相沉積(CVD)製程、其它合適的方法或前述之組合形成第一絕緣層54以及第二絕緣層56。Next, please refer to FIG. 2C , which further illustrates the local structure of the electronic unit 50-1 (electronic unit 50-2). As mentioned above, according to some embodiments, the
根據一些實施例,第一絕緣層54的材料不同於第二絕緣層56的材料。第一絕緣層54的熱膨脹係數(CTE)可不同於第二絕緣層56的熱膨脹係數。根據一些實施例,第一絕緣層54的熱膨脹係數(CTE)小於第二絕緣層56的熱膨脹係數。此外,第一絕緣層54的厚度T1可不同於第二絕緣層56的厚度T2,根據一些實施例,第一絕緣層54的厚度T1小於第二絕緣層56的厚度T2。根據本揭露的實施例,厚度T1指的是第一絕緣層54於電子裝置10的法線方向(例如,圖式中的Z方向)上的最大厚度,厚度T2指的是第二絕緣層56於基板的法線方向上的最大厚度。透過上述設置,可降低封裝製程中可能發生翹曲的問題或可以提升電子裝置的扇出能力,進而改善電子裝置的可靠度。According to some embodiments, the material of the first insulating
接著,請參照第3圖以及第4圖,第3圖以及第4圖顯示根據本揭露另一些實施例中,電子裝置10的局部上視結構示意圖。承前述,於上視圖中,對位記號200M以及間隔元件200F可具有任意合適的形狀,於第3圖所示的實施例中,對位記號200M具有十字形形狀,間隔元件200F具有矩形形狀。於第4圖所示的實施例中,對位記號200M亦具有十字形形狀,而一部分的間隔元件200F可具有矩形形狀,一部分的間隔元件200F可具有彎折形狀。根據一些實施例,間隔元件200F可具有彎曲的邊緣或弧角R等。透過弧角或彎曲邊緣的設置,可以降低不同材質的接觸面之間因熱膨脹係數不同產生的應力並進一步降低破裂的風險,但不以此為限。Next, please refer to FIG. 3 and FIG. 4, which show partial top view structural schematic diagrams of the
接著,請參照第5A圖至第5B圖,第5A圖至第5B圖顯示根據本揭露另一些實施例中,電子裝置10-1於製程的中間階段的剖面結構示意圖。應理解的是,後文中與前文相同或相似的組件或元件將以相同或相似之標號表示,其材料、製造方法與功能皆與前文所述相同或相似,故此部份於後文中將不再贅述。Next, please refer to FIG. 5A to FIG. 5B, which show cross-sectional structural schematic diagrams of an electronic device 10-1 at an intermediate stage of a manufacturing process in some other embodiments of the present disclosure. It should be understood that the same or similar components or elements as those in the previous text will be represented by the same or similar reference numerals, and their materials, manufacturing methods and functions are the same or similar to those described in the previous text, so this part will not be repeated in the following text.
於此實施例中,電子裝置10-1的製造方法採用晶片優先(chip first)且晶片面向上(face up)接合的製程。如第5A圖所示,電子單元50-1以及電子單元50-2的接合墊58朝上,以接合墊58較遠離基板102的方式放置。In this embodiment, the manufacturing method of the electronic device 10 - 1 adopts a chip first and chip face up bonding process. As shown in FIG. 5A , the
詳細而言,首先,與第1A圖所述的步驟相似,提供基板102,並且形成剝離層104於基板102上。接著,可形成導電層106於剝離層104上,導電層106可作為晶種層,之後,可形成光阻層PR於導電層106上,並且將光阻層PR圖案化,使光阻層PR具有複數個開口。接著,可於光阻層PR的開口中以及金屬層106暴露出的部分上形成導電材料,亦即,形成間隔元件200F以及對位記號200M於光阻層PR的開口中。於形成間隔元件200F以及對位記號200M之後,可移除光阻層PR。接著,如第5A圖所示,提供電子單元50-1以及電子單元50-2,將電子單元50-1以及電子單元50-2放置於間隔元件200F之間,且電子單元50-1以及電子單元50-2的接合墊58朝上,以較遠離基板102的方式放置。於放置電子單元50-1以及電子單元50-2之後,可形成保護層108圍繞間隔元件200F、電子單元50-1以及電子單元50-2。In detail, first, similar to the step described in FIG. 1A , a
接著,可對保護層108進行平坦化製程以暴露出電子單元50-1(電子單元50-2)的接合墊58。於此步驟中,亦移除了一部分的間隔元件200F以及對位記號200M。於平坦化製程之後,間隔元件200F、對位記號200M、接合墊58以及保護層108的頂表面可為共平面的。Next, the
請參照第5B圖,可形成圖案化導電層110a於保護層108上且位於電子單元50-1以及電子單元50-2上,圖案化導電層110a可接合墊58接觸,且圖案化導電層110a亦可與間隔元件200F接觸。間隔元件200F可藉由圖案化導電層110a與電子單元50-1(電子單元50-2)電性連接。再者,於形成圖案化導電層110a之後,可形成絕緣層112於圖案化導電層110a上,之後,可將絕緣層112圖案化以形成暴露出圖案化導電層110a的一部分的開口(未標示),並且形成圖案化導電層110b於絕緣層112上,圖案化導電層110b可填充於絕緣層112的開口中並且與圖案化導電層110a接觸,圖案化導電層110b進而與圖案化導電層110a電性連接。如此一來,電子單元50-1可藉由連接件110(圖案化導電層110a以及圖案化導電層110b)與電子單元50-2電性連接。Referring to FIG. 5B , a patterned
請參照第5B圖,接著可形成絕緣層114於絕緣層112上,且絕緣層114可覆蓋圖案化導電層110b。接著,可將絕緣層114圖案化以形成暴露出圖案化導電層110b的一部分的開口(未標示)。並且,可形成圖案化導電層110c於絕緣層114上,圖案化導電層110c可填充於絕緣層114的開口中並且與圖案化導電層110b接觸,圖案化導電層110c進而與圖案化導電層110b電性連接。接著,可形成接合墊SB於絕緣層114上,且接合墊SB可對應圖案化導電層110c設置。Referring to FIG. 5B , an insulating
根據一些實施例,後續可對剝離層104進行加熱製程,以移除剝離層104以及基板102,以得到電子裝置10-1。According to some embodiments, a heating process may be subsequently performed on the
接著,請參照第6A圖至第6D圖,第6A圖至第6D圖顯示根據本揭露另一些實施例中,電子裝置10-2於製程的中間階段的剖面結構示意圖。應理解的是,後文中與前文相同或相似的組件或元件將以相同或相似之標號表示,其材料、製造方法與功能皆與前文所述相同或相似,故此部份於後文中將不再贅述。Next, please refer to FIG. 6A to FIG. 6D, which show schematic cross-sectional structures of the electronic device 10-2 at the middle stage of the manufacturing process in some other embodiments of the present disclosure. It should be understood that the components or elements that are the same or similar to those in the previous text will be represented by the same or similar reference numerals, and their materials, manufacturing methods and functions are the same or similar to those described in the previous text, so this part will not be repeated in the following text.
於此實施例中,電子裝置10-2的製造方法採用晶片優先且晶片面向下(face down)接合結合晶片面向上(face up)接合的製程,可形成3D異質整合的結構。In this embodiment, the manufacturing method of the electronic device 10 - 2 adopts a chip-first and chip-face-down bonding combined with a chip-face-up bonding process to form a 3D heterogeneous integration structure.
如第6A圖所示,首先,可先形成如第1E圖所示的結構,其中電子單元50-1以及電子單元50-2的接合墊58朝上,以接合墊58較遠離基板102的方式放置。接著,可形成圖案化導電層110c於絕緣層114上,圖案化導電層110c可填充於絕緣層114的開口中並且與圖案化導電層110b電性連接。於此實施例中,圖案化導電層110a、圖案化導電層110b及圖案化導電層110c可作為第一層的連接件110(重佈線結構)。接著,可形成絕緣層116以及圖案化導電層110d,絕緣層116以及圖案化導電層110d的材料及形成方法,可參照前述形成重佈線結構的絕緣層以及圖案化導電層之步驟及製程進行,於此便不再重複。根據一些實施例,圖案化導電層110d可包含焊球(solder ball),但不限於此。As shown in FIG. 6A , first, a structure as shown in FIG. 1E may be formed, wherein the
請參照第6B圖,接著,可形成複數個間隔元件200F’以及複數個對位記號200M’於連接件110上,間隔元件200F’可與圖案化導電層110d電性連接。間隔元件200F’以及對位記號200M’的材料以及形成方法與前述間隔元件200F以及對位記號200M的材料以及形成方法相同或相似,於此便不再重複。Referring to FIG. 6B , a plurality of
接著,可提供電子單元50-3,將電子單元50-3放置於間隔元件200F’之間,詳細而言,電子單元50-3可設置於間隔元件200F’中相鄰的兩者之間,且電子單元50-3的接合墊58朝上,以較遠離基板102的方式放置。再者,電子單元50-3於電子裝置(基板102)的法線方向(例如,圖式中的Z方向)上可與電子單元50-1及/或電子單元50-2至少部分地重疊。根據一些實施例,可藉由黏著層AD將電子單元50-3固定於絕緣層116上。黏著層AD可為任何合適的黏著劑。例如,根據一些實施例,黏著層AD可包含環氧樹脂、晶粒貼合膜(die attach film,DAF)、其它合適的黏著材料或前述之組合,但不限於此。根據一些實施例,黏著層AD可接觸晶片52的一表面,黏著層AD可包含具有散熱功能的材料,例如矽膠片,但不限於此。黏著層AD可包含具有散熱粒子的膠材,例如包含石墨粒子的環氧樹脂或包含陶瓷散熱粒子的環氧樹脂,但不限於此。Next, the electronic unit 50-3 may be provided and placed between the
值得注意的是,於電子單元50-3設置於絕緣層116上之前,間隔元件200F’已先形成,間隔元件200F’可作為圍籬結構,減少電子單元50-3於接續的接合製程或模塑製程中產生偏移,進而改善封裝技術的良率。It is noteworthy that before the electronic unit 50-3 is placed on the insulating
相似地,電子單元50-3亦可具有第一寬度W1,複數個間隔元件200F’中相鄰的兩者之間具有第一距離W2,第一距離W2與第一寬度W1的比值可大於等於1且小於等於1.3(即,1 ≤ W2/W1 ≤ 1.3),例如,1.05、1.1、1.15、1.2或1.25。根據一些實施例,電子單元50-3與間隔元件200F’之間的第二距離d可大於0微米且小於等於10微米(即,0μm < 第二距離d ≤ 10μm),例如,1μm、2μm、3μm、4μm、5μm、6μm、7μm、8μm或9μm。Similarly, the electronic unit 50-3 may also have a first width W1, and two adjacent ones of the plurality of
請參照第6C圖,於放置電子單元50-3之後,可形成保護層108圍繞間隔元件200F’、對位記號200M’以及電子單元50-3。再者,可對保護層108進行平坦化製程以暴露出電子單元50-3的接合墊58。於此步驟中,亦移除了一部分的間隔元件200F’以及對位記號200M’。於平坦化製程之後,間隔元件200F’、對位記號200M’、接合墊58以及保護層108的頂表面可為共平面的。Referring to FIG. 6C , after placing the electronic unit 50-3, a
請參照第6D圖,接著可依序形成圖案化導電層110e、絕緣層118、圖案化導電層110f以及絕緣層120於保護層108上。圖案化導電層110e以及圖案化導電層110f可作為第二層的連接件110’(重佈線結構)。之後,可形成圖案化導電層110g於圖案化導電層110f上,並且可形成接合墊SB於絕緣層120上,且接合墊SB可對應圖案化導電層110g設置。接合墊SB可為接觸凸塊,圖案化導電層110g可作為凸塊下金屬層(UBM)。絕緣層118、絕緣層120、圖案化導電層110e、圖案化導電層110f以及圖案化導電層110g的材料及形成方法,可參照前述形成重佈線結構的絕緣層以及圖案化導電層之步驟及製程進行,於此便不再重複。Please refer to FIG. 6D , then the patterned
根據一些實施例,後續可對剝離層104進行加熱製程,以移除剝離層104以及基板102,以得到電子裝置10-2。再者,根據一些實施例,可進一步於電子單元50-3上方堆疊更多合適數量的封裝結構,改善FOPLP製程的良率。According to some embodiments, the
接著,請參照第7A圖至第7B圖,第7A圖至第7B圖顯示根據本揭露另一些實施例中,電子裝置10-3於製程的中間階段的剖面結構示意圖。應理解的是,後文中與前文相同或相似的組件或元件將以相同或相似之標號表示,其材料、製造方法與功能皆與前文所述相同或相似,故此部份於後文中將不再贅述。Next, please refer to FIG. 7A to FIG. 7B, which show schematic cross-sectional structures of the electronic device 10-3 at the middle stage of the manufacturing process in some other embodiments of the present disclosure. It should be understood that the components or elements that are the same or similar to those in the previous text will be represented by the same or similar reference numerals, and their materials, manufacturing methods and functions are the same or similar to those described in the previous text, so this part will not be repeated in the following text.
於此實施例中,電子裝置10-3的製造方法採用晶片優先且晶片面向上(face up)接合結合晶片面向上(face up)接合的製程,可形成3D異質整合的結構。In this embodiment, the manufacturing method of the electronic device 10 - 3 adopts a chip-first and chip-face-up bonding combined with a chip-face-up bonding process to form a 3D heterogeneous integration structure.
如第7A圖所示,首先,與第1A圖所述的步驟相似,提供基板102,並且形成剝離層104於基板102上。接著,可形成導電層106(晶種層,未繪示)於剝離層104上,之後,可形成光阻層PR(未繪示)於導電層106上,並且將光阻層PR圖案化,使光阻層PR具有複數個開口。接著,可於光阻層PR的開口中以及金屬層106暴露出的部分上形成導電材料,亦即,形成間隔元件200F、對位記號200M以及導電元件105於光阻層PR的開口中。值得注意的是,於此實施例中,導電元件105可作為散熱器(heat sink),導電元件105可於電子單元50-1放置前先形成於導電層104上。於形成間隔元件200F、對位記號200M以及導電元件105之後,可移除光阻層PR。根據一些實施例,導電元件105可透過接合墊SB電性連接電路板(PCB),但不以此為限。As shown in FIG. 7A , first, similar to the step described in FIG. 1A , a
接著,可提供電子單元50-1,將電子單元50-1放置於間隔元件200F之間以及導電元件105上,且電子單元50-1的接合墊58朝上,以較遠離基板102的方式放置。可藉由黏著層AD將電子單元50-1固定於導電元件105上。於放置電子單元50-1之後,可形成保護層108圍繞間隔元件200F、導電元件105以及電子單元50-1。接著可依序形成圖案化導電層110a、絕緣層112、圖案化導電層110b、絕緣層114、圖案化導電層110c、絕緣層116、圖案化導電層110d以及絕緣層118於保護層108上。圖案化導電層110a、圖案化導電層110b、圖案化導電層110c以及圖案化導電層110d可作為第一層的連接件110(重佈線結構)。Next, the electronic unit 50-1 may be provided and placed between the
請參照第7B圖,接著,可形成複數個間隔元件200F’以及複數個對位記號200M’於連接件110上,間隔元件200F’可與圖案化導電層110d電性連接。接著,可提供電子單元50-2以及電子單元50-3,將電子單元50-2以及電子單元50-3分別放置於間隔元件200F’中相鄰的兩者之間,且電子單元50-2以及電子單元50-3的接合墊58朝上,以較遠離基板102的方式放置。再者,電子單元50-2以及電子單元50-3於基板102的法線方向(例如,圖式中的Z方向)上可與電子單元50-1至少部分地重疊。根據一些實施例,可藉由黏著層AD將電子單元50-2以及電子單元50-3固定於絕緣層118上。Referring to FIG. 7B , a plurality of
於放置電子單元50-2以及電子單元50-3之後,可形成保護層108圍繞間隔元件200F’、對位記號200M’、電子單元50-2以及電子單元50-3。再者,可對保護層108進行平坦化製程以暴露出電子單元50-2以及電子單元50-3的接合墊58。於此步驟中,亦移除了一部分的間隔元件200F’以及對位記號200M’。於平坦化製程之後,間隔元件200F’、對位記號200M’、接合墊58以及保護層108的頂表面可為共平面的。After placing the electronic unit 50-2 and the electronic unit 50-3, a
請參照第7B圖,接著可依序形成圖案化導電層110f、絕緣層120、圖案化導電層110g以及絕緣層122於保護層108上。圖案化導電層110e、圖案化導電層110f以及圖案化導電層110g可作為第二層的連接件110’(重佈線結構)。之後,可形成圖案化導電層110h於圖案化導電層110g上,並且可形成接合墊SB於絕緣層122上,且接合墊SB可對應圖案化導電層110h設置。接合墊SB可為接觸凸塊,圖案化導電層110h可作為凸塊下金屬層(UBM)。絕緣層122以及圖案化導電層110f的材料及形成方法,可參照前述形成重佈線結構的絕緣層以及圖案化導電層之步驟及製程進行,於此便不再重複。Referring to FIG. 7B , a patterned
根據一些實施例,後續可對剝離層104進行加熱製程,以移除剝離層104以及基板102,以得到電子裝置10-3。再者,根據一些實施例,可進一步於電子單元50-2以及電子單元50-3上方堆疊更多合適數量的封裝結構,改善FOPLP製程的良率。According to some embodiments, the
綜上所述,根據本揭露的實施例,電子裝置包含可作為圍籬結構的間隔元件,電子單元設置於間隔元件之間,藉此可以控制電子單元於接合製程或模塑製程進行時產生的偏移量,進而改善封裝技術的良率。再者,間隔元件亦可作為提供元件之間電性連接的導電元件或提供散熱功能。此外,根據本揭露的一些實施例,電子裝置包含鄰近於間隔元件的對位記號,無須於基板上刻畫記號,使得基板可以重複使用,降低生產成本。In summary, according to the embodiments of the present disclosure, the electronic device includes a spacer element that can be used as a fence structure, and the electronic unit is arranged between the spacer elements, thereby controlling the offset of the electronic unit during the bonding process or the molding process, thereby improving the yield of the packaging technology. Furthermore, the spacer element can also be used as a conductive element to provide electrical connection between components or provide a heat dissipation function. In addition, according to some embodiments of the present disclosure, the electronic device includes an alignment mark adjacent to the spacer element, and there is no need to engrave the mark on the substrate, so that the substrate can be reused, reducing production costs.
雖然本揭露的實施例及其優點已揭露如上,但應該瞭解的是,任何所屬技術領域中具有通常知識者,在不脫離本揭露之精神和範圍內,當可作組合、更動、替代與潤飾。本揭露實施例之間的特徵只要不違背發明精神或相衝突,均可任意混合搭配使用。此外,本揭露之保護範圍並未侷限於說明書內所述特定實施例中的製程、機器、製造、物質組成、裝置、方法及步驟,任何所屬技術領域中具有通常知識者可從本揭露揭示內容中理解現行或未來所發展出的製程、機器、製造、物質組成、裝置、方法及步驟,只要可以在此處所述實施例中實施大抵相同功能或獲得大抵相同結果皆可根據本揭露使用。因此,本揭露之保護範圍包含上述製程、機器、製造、物質組成、裝置、方法及步驟。本揭露之保護範圍當視後附之申請專利範圍所界定者為準。本揭露的任一實施例或請求項不須達成本揭露所公開的全部目的、優點、特點。Although the embodiments and advantages of the present disclosure have been disclosed as above, it should be understood that any person with ordinary knowledge in the relevant technical field can make combinations, changes, substitutions and embellishments without departing from the spirit and scope of the present disclosure. The features between the embodiments of the present disclosure can be mixed and matched as long as they do not violate the spirit of the invention or conflict with each other. In addition, the scope of protection of the present disclosure is not limited to the processes, machines, manufacturing, material compositions, devices, methods and steps in the specific embodiments described in the specification. Any person with ordinary knowledge in the relevant technical field can understand the current or future developed processes, machines, manufacturing, material compositions, devices, methods and steps from the content of the present disclosure, as long as they can implement substantially the same functions or obtain substantially the same results in the embodiments described here, they can be used according to the present disclosure. Therefore, the protection scope of the present disclosure includes the above-mentioned process, machine, manufacture, material composition, device, method and step. The protection scope of the present disclosure shall be defined by the scope of the attached patent application. Any embodiment or claim of the present disclosure does not need to achieve all the purposes, advantages and features disclosed in the present disclosure.
10、10-1、10-2、10-3:電子裝置
50-1、50-2、50-3:電子單元
52:晶片
54:第一絕緣層
54p:第一開口
56:第二絕緣層
56p:第二開口
58:接合墊
100A:封裝區
102、102’:基板
104、104’:剝離層
105:導電元件
106:金屬層
106a、106b:子層
108:保護層
108A、108B:表面
110、110’:連接件
110a、110b、110c、110d、110e、110f、110g、110h:圖案化導電層
112、114、116、118、120、122:絕緣層
200M、200M’:對位記號
200F、200F’:間隔元件
A-A’:截線
AD:黏著層
d:第二距離
d’:間距
FA:內切區域
H1:第一高度
H2:第二高度
R:弧角
RP:光阻層
SB:接合墊
T1、T2:厚度
W1:第一寬度
W2:第一距離
W3、W4:寬度
10, 10-1, 10-2, 10-3: electronic device
50-1, 50-2, 50-3: electronic unit
52: chip
54: first insulating
第1A圖至第1F圖顯示根據本揭露一些實施例中,電子裝置於製程的中間階段的剖面結構示意圖; 第2A圖顯示根據本揭露一些實施例中,電子裝置的上視結構示意圖; 第2B圖顯示根據本揭露一些實施例中,電子裝置的局部上視結構示意圖; 第2C圖顯示根據本揭露一些實施例中,電子單元的局部剖面結構示意圖; 第3圖顯示根據本揭露一些實施例中,電子裝置的局部上視結構示意圖; 第4圖顯示根據本揭露一些實施例中,電子裝置的局部上視結構示意圖; 第5A圖至第5B圖顯示根據本揭露一些實施例中,電子裝置於製程的中間階段的剖面結構示意圖; 第6A圖至第6D圖顯示根據本揭露一些實施例中,電子裝置於製程的中間階段的剖面結構示意圖; 第7A圖至第7B圖顯示根據本揭露一些實施例中,電子裝置於製程的中間階段的剖面結構示意圖。 Figures 1A to 1F show schematic diagrams of cross-sectional structures of electronic devices in the middle stage of the manufacturing process according to some embodiments of the present disclosure; Figure 2A shows a schematic diagram of the top-view structure of the electronic device according to some embodiments of the present disclosure; Figure 2B shows a schematic diagram of the partial top-view structure of the electronic device according to some embodiments of the present disclosure; Figure 2C shows a schematic diagram of the partial cross-sectional structure of the electronic unit according to some embodiments of the present disclosure; Figure 3 shows a schematic diagram of the partial top-view structure of the electronic device according to some embodiments of the present disclosure; Figure 4 shows a schematic diagram of the partial top-view structure of the electronic device according to some embodiments of the present disclosure; Figures 5A to 5B show schematic diagrams of the cross-sectional structure of the electronic device in the middle stage of the manufacturing process according to some embodiments of the present disclosure; Figures 6A to 6D show schematic diagrams of cross-sectional structures of electronic devices at intermediate stages of the manufacturing process according to some embodiments of the present disclosure; Figures 7A to 7B show schematic diagrams of cross-sectional structures of electronic devices at intermediate stages of the manufacturing process according to some embodiments of the present disclosure.
10:電子裝置
50-1、50-2:電子單元
52:晶片
56:第二絕緣層
58:接合墊
108:保護層
110:連接件
110a、110b、110c:圖案化導電層
112、114:絕緣層
200M:對位記號
200F:間隔元件
d:距離
d’:間距
H1:第一高度
H2:第二高度
SB:接合墊
W1:第一寬度
W2: 第一距離
W3:寬度
W4:寬度
10: electronic device
50-1, 50-2: electronic unit
52: chip
56: second insulating layer
58: bonding pad
108: protective layer
110:
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