TWI835530B

TWI835530B - Adjust system of transfering device and adjusting method thereof

Info

Publication number: TWI835530B
Application number: TW112102412A
Authority: TW
Inventors: 吳章呈; 蘇銘忠; 盧炫達
Original assignee: 力晶積成電子製造股份有限公司
Priority date: 2023-01-18
Filing date: 2023-01-18
Publication date: 2024-03-11

Abstract

An adjust system for a transfer device and an adjust method thereof. The transfer device includes a manufacturing system, an adjust system, and a monitoring system. The manufacturing system manages the production process of a process equipment. The adjust system is coupled to the manufacturing system. The adjust system adjusts the priority of transferring instructions based on at least one of a real-time production status of the process equipment and a real-time production status of the wafer. The monitoring system is coupled to the adjust system and the manufacturing system. The monitoring system predicts the operation condition of the process equipment based on the real-time production status of the process equipment.

Description

傳送裝置的調整系統及其調整方法Adjustment system of conveyor and adjustment method thereof

本發明是有關於一種傳送裝置的調整系統及其調整方法，且特別是有關於一種在資源受限下動態調整傳送裝置的任務調整系統及其調整方法。 The present invention relates to an adjustment system for a transmission device and an adjustment method thereof, and in particular, to a task adjustment system and an adjustment method for dynamically adjusting a transmission device under limited resources.

一般半導體廠，使用各種自動化系統，以傳送物料和控制貨品製造的過程。其中，半導體廠可於此處簡稱為工廠和晶圓廠。在晶圓廠內的各種自動化系統，包含共同協作的硬體和軟體，以在晶圓廠之中藉由傳送裝置來傳送物料、製程資料及控制機台自動化。傳送裝置的傳送指令其優先權的指定方式是依照相同優先權的傳送指令以先進先出(First In First Out，FIFO)的方式來處理。通常傳送指令的優先權是依照貨品(或批貨，lot)等級進行分類以及依照機台(equipment)的等級進行設定。然而，當傳送資源有限或不足的情況下，可能會因為部分貨品無法獲得傳送資源而增加機台閒置(equipment idle)的風險。或者，因為堆貨機台無法有效優先取得傳送資源，造成半製品(或，在製品)(Work-In-Process， WIP)堆貨更嚴重，導致貨品的生產週期(cycle time)大幅增加。 Generally, semiconductor factories use various automation systems to transport materials and control the manufacturing process of goods. Among them, semiconductor factories may be referred to as factories and fabs here. Various automation systems in the wafer fab include hardware and software that work together to transmit materials, process data and control machine automation through conveyor devices in the wafer fab. The priority of the transmission instructions of the transmission device is specified in a first-in-first-out (FIFO) manner according to the transmission instructions of the same priority. Usually, the priority of transmitting instructions is classified according to the level of goods (or batches, lot) and set according to the level of equipment (equipment). However, when transmission resources are limited or insufficient, there may be an increased risk of equipment idleness because some goods cannot obtain transmission resources. Or, because the stacker machine cannot effectively obtain the transmission resources first, the work-in-process (work-in-process) is caused. WIP) stockpiling is more serious, resulting in a significant increase in the production cycle time of goods.

目前在傳送裝置的傳送資源不足的狀況下，僅以固定式的貨品等級來設定傳送優先權。也就是說，傳送優先權的設定方式通常是依據堆貨機台的等級以對接收貨品的機台或派工目標機台來設定傳送指令優先權。或者，對於瓶頸或關鍵的機台設定較高的傳送指令優先權。此舉雖能確保高等級的貨品能夠優先獲得傳送資源，卻仍會造成機台閒置的問題發生。除此之外，固定式的設定傳送指令優先權無法貼近實際生產狀況，在半製品的生產狀況不佳時，堆貨的機台皆可能因為半製品的流動或生產時程不同，導致堆貨的機台無法有效優先取得傳送資源，造成半製品堆貨更嚴重，進而使得貨品的生產週期增加。 Currently, when the transmission resources of the transmission device are insufficient, transmission priorities are only set based on fixed product levels. That is to say, the transmission priority is usually set based on the level of the stacker machine to set the transmission instruction priority for the machine that receives the goods or the target machine for dispatching work. Or, set a higher priority for transmission instructions for bottlenecks or critical machines. Although this can ensure that high-grade goods can receive transmission resources first, it will still cause the problem of idle machines. In addition, the fixed priority setting of transmission instructions cannot be close to the actual production situation. When the production status of semi-finished products is not good, the stacking machines may cause stacking due to the flow of semi-finished products or different production schedules. The machine cannot effectively obtain transmission resources first, resulting in a more serious pile of semi-finished products, which in turn increases the production cycle of the goods.

因此為了減少機台閒置的危機和風險，達到貨品穩定生產及在預定時程內準時出貨的需求，如何有效地動態調整貨品的生產優先順序，並即時監測機台派工後的狀況就成為重要的議題。 Therefore, in order to reduce the crisis and risk of idle machines and achieve the need for stable production of goods and on-time shipment within the scheduled time, how to effectively and dynamically adjust the production priority of goods and real-time monitor the status of machines after dispatch has become important issues.

本發明提供一種傳送裝置的調整系統及其調整方法，且特別是有關於一種在資源受限下動態調整傳送裝置的任務調整系統及其調整方法，以改善傳送指令優先權的指定方式。 The present invention provides an adjustment system for a transmission device and an adjustment method thereof, and in particular, relates to a task adjustment system and an adjustment method for dynamically adjusting a transmission device under resource constraints, so as to improve the designation method of priority of transmission instructions.

根據本公開的一些實施例，提供一種傳送裝置的調整系統及其調整方法。傳送裝置包括製造系統、調整系統以及監控系統。製造系統管理一製程機台的生產流程。調整系統與製造系統耦接。調整系統根據製程機台的即時生產狀況以及貨品的即時生產狀況的其中至少一者調整傳送指令的優先權。監控系統與調整系統及製造系統耦接。監控系統根據製程機台的即時生產狀況預估製程機台的運行狀況。 According to some embodiments of the present disclosure, an adjustment system for a conveyor and an adjustment method thereof are provided. The conveyor includes manufacturing systems, adjustment systems, and monitoring systems. The manufacturing system manages the production process of a process machine. Adjustment system coupled with manufacturing system catch. The adjustment system adjusts the priority of the transmission instructions according to at least one of the real-time production status of the process machine and the real-time production status of the goods. The monitoring system is coupled with the adjustment system and the manufacturing system. The monitoring system estimates the operating status of the process machine based on the real-time production status of the process machine.

根據本公開的一些實施例，提供一種傳送裝置的調整方法，包括：取得製程機台的資訊；判斷製程機台的傳送模式；取得已派工的貨品，並根據已派工的貨品的預約時間進行排序；評估已派工的貨品的優先權；取得已派工的貨品的即時生產狀況；根據即時生產狀態計算該優先權；根據製程機台的即時生產狀況預估製程機台的運行狀況；以及根據製程機台的即時生產狀況以及已派工的貨品的即時生產狀況的其中至少一者調整傳送指令的優先權。 According to some embodiments of the present disclosure, a method for adjusting a conveyor device is provided, including: obtaining information on a process machine; determining the conveyor mode of the process machine; obtaining dispatched goods, and based on the reservation time of the dispatched goods Sort; evaluate the priority of dispatched goods; obtain the real-time production status of dispatched goods; calculate the priority based on the real-time production status; estimate the operating status of the process machine based on the real-time production status of the process machine; and adjusting the priority of transmitting instructions based on at least one of the real-time production status of the process machine and the real-time production status of the dispatched goods.

基於上述，本發明的傳送裝置的調整系統及調整系統的優先權調整方法採用了動態調整傳送指令的優先權等級，依照貨品生產的即時狀況動態調整貨品傳送優先權及機台傳送指令的優先權，依機台的閒置風險動態提高貨品傳送指令的優先權，並且可在閒置危機解除後立即降低，以免過度佔用傳送資源，因而可達到更好的派工及傳送效果，並可確保在有限傳送設備資源下，可以根據生產線的即時狀況，讓生產線上的貨品或物料能夠於預定的時程規劃內取得傳送資源，以符合最佳化資源分配的生產需求。 Based on the above, the adjustment system of the conveyor device and the priority adjustment method of the adjustment system of the present invention adopt the dynamic adjustment of the priority level of the transmission instructions, and dynamically adjust the priority of the goods transmission and the priority of the machine transmission instructions according to the real-time status of the production of goods. , the priority of goods delivery instructions is dynamically increased according to the idle risk of the machine, and can be lowered immediately after the idle crisis is resolved, so as to avoid excessive occupation of transmission resources, thus achieving better dispatch and delivery effects, and ensuring limited delivery. Under equipment resources, according to the real-time status of the production line, the goods or materials on the production line can obtain transmission resources within the predetermined schedule to meet the production needs of optimal resource allocation.

為讓本發明的上述特徵和優點能更明顯易懂，下文特舉實施例，並配合所附圖式作詳細說明如下。 In order to make the above-mentioned features and advantages of the present invention more obvious and easy to understand, embodiments are given below and described in detail with reference to the accompanying drawings.

100、200:傳送裝置 100, 200: Transmission device

102:製造系統 102:Manufacturing Systems

104、804:調整系統 104, 804: Adjust the system

106:監控系統 106:Monitoring system

108:自動化程式 108:Automation program

1081:機台控制系統 1081:Machine control system

110:物料傳送控制系統 110:Material transfer control system

112:派遣系統、派工系統 112: Dispatch system, labor dispatch system

114:物料傳送系統 114:Material conveying system

1142:無人搬運車 1142:Unmanned guided vehicle

1144:天車 1144:Crane

1146:儲存貨架 1146:Storage shelves

1148:導引載具 1148:Guiding vehicle

116:機台 116:Machine

700:流程圖 700:Flowchart

800:權重調整順序圖 800: Weight adjustment sequence diagram

S402~S434、S502~S520、S602~S612、S702~S710:步驟 S402~S434, S502~S520, S602~S612, S702~S710: steps

W1、W2、W3:權重 W1, W2, W3: weight

圖1繪示本發明一實施例的調整系統的示意圖。 FIG. 1 is a schematic diagram of an adjustment system according to an embodiment of the present invention.

圖2繪示本發明一實施例的傳送裝置的示意圖。 FIG. 2 is a schematic diagram of a transmission device according to an embodiment of the present invention.

圖3繪示本發明一實施例的物料傳送系統的示意圖。 FIG. 3 is a schematic diagram of a material conveying system according to an embodiment of the present invention.

圖4繪示本發明一實施例的調整系統的操作流程圖。 FIG. 4 illustrates an operation flow chart of the adjustment system according to an embodiment of the present invention.

圖5繪示本發明一實施例的監控系統的操作流程圖。 FIG. 5 illustrates an operation flow chart of the monitoring system according to an embodiment of the present invention.

圖6繪示本發明一實施例的機台監控系統的預測模型的操作流程圖。 FIG. 6 illustrates an operation flow chart of the prediction model of the machine monitoring system according to an embodiment of the present invention.

圖7繪示本發明一實施例的閒置危機的機率計算模型的操作流程圖。 FIG. 7 illustrates an operation flow chart of the probabilistic calculation model of idle crisis according to an embodiment of the present invention.

圖8A繪示本發明一實施例的調整系統的權重調整順序圖。 FIG. 8A illustrates a weight adjustment sequence diagram of the adjustment system according to an embodiment of the present invention.

圖8B繪示本發明一實施例的調整系統的傳送分數表的建構方式。 FIG. 8B illustrates the construction method of the transmission score table of the adjustment system according to an embodiment of the present invention.

本發明概念的特徵和實現所述特徵的方法可通過參考實施例的以下詳細描述和隨附圖式更容易地加以理解。下文中，將參考隨附圖式更詳細地描述實施例，在所述隨附圖式中，相同參考標號通篇指代相同元件。然而，本發明可以各種不同形式體現，且不應理解為受限於僅本文中說明的實施例。相反，將這些實施例作為實例來提供以使得本揭露將透徹且完整，且將向本領域的技術人員充分地傳達本發明的各方面和特徵。因此，可能並不描述對於本領域普通技術人員對本發明的方面和特徵的完整理解非必要的工藝、元件以及技術。除非另外指出，否則相同參考標號貫穿隨附圖式和書面描述表示相同元件，且因此將不重複其描述。在圖式中，為清楚起見，可能放大元件、層以及區域的相對大小。 Features of the inventive concept and methods of implementing said features may be more readily understood with reference to the following detailed description of embodiments and the accompanying drawings. Hereinafter, embodiments will be described in more detail with reference to the accompanying drawings, in which like reference numerals refer to like elements throughout. This invention may, however, be embodied in various different forms and should not be construed as limited to the only embodiments set forth herein. Rather, these embodiments are provided as examples so that this disclosure will be thorough and complete, and will convey to those skilled in the art fully convey the various aspects and features of the present invention. Accordingly, processes, elements, and techniques that are not necessary for a person of ordinary skill in the art to fully understand aspects and features of the invention may not be described. Unless otherwise indicated, the same reference numerals refer to the same elements throughout the accompanying drawings and written description, and therefore the description thereof will not be repeated. In the drawings, the relative sizes of components, layers and regions may be exaggerated for clarity.

在以下描述中，出於解釋的目的，闡述許多特定細節以提供對各種實施例的透徹理解。然而，顯而易知，可在沒有這些具體細節或有一或多種等效佈置的情況下實踐各種實施例。在其它情況下，以框圖的形式示出眾所周知的結構和裝置以便避免不必要地混淆各種實施例。 In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the various embodiments. It will be apparent, however, that various embodiments may be practiced without these specific details or with one or more equivalent arrangements. In other instances, well-known structures and devices are shown in block diagram form in order to avoid unnecessarily obscuring the various embodiments.

本文中使用的術語僅用於描述特定實施例的目的，且並不希望限制本發明。如本文中所使用，除非上下文另作明確指示，否則單數形式“一(a/an)”也意欲包含複數形式。將進一步理解，術語“包括(comprises/comprising)”、“具有(have/having)”、“包含(includes/including)”當在本說明書中使用時，表示所陳述特徵、整體、步驟、操作、元件和/或元件的存在，但不排除一或多個其它特徵、整體、步驟、操作、元件、元件和/或其群組的存在或增加。如本文中所使用，術語“和/或”包含相關聯的所列項中的一或多個的任何和所有組合。 The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular form "a/an" is intended to include the plural form as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises/comprising", "have/having", and "includes/including" when used in this specification mean stated features, integers, steps, operations, The presence of an element and/or element does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, elements and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

如本文中所使用，術語“大體上”、“約”、“大致”以及類似術語用作近似的術語且不用作程度的術語，且意圖考慮將由本領域普通技術人員識別的測量值或計算值中的固有偏差。考慮到所討論的測量和與特定量的測量相關聯的誤差(即，測量系統的限制)，如本文中所使用，“約”或“大致”包含所陳述值且意指在由本領域的普通技術人員確定的特定值的偏差的可接受範圍內。舉例來說，“約”可意味著在一或多個標準差內，或在所陳述值的±30%、20%、10%、5%內。此外，當描述本發明的實施例時，使用“可”是指“本發明的一或多個實施例”。 As used herein, the terms "substantially," "about," "approximately," and similar terms are used as terms of approximation and not as terms of degree, and are intended to contemplate measurements or calculations that would be recognized by one of ordinary skill in the art inherent bias in. taking into account all The measurements discussed and the errors associated with the measurement of a particular quantity (i.e., the limitations of the measurement system), as used herein, "about" or "approximately" encompass the stated value and are meant to be determined by one of ordinary skill in the art. The deviation from a specific value is within the acceptable range. For example, "about" can mean within one or more standard deviations, or within ±30%, 20%, 10%, 5% of the stated value. Additionally, when describing embodiments of the invention, the use of "may" means "one or more embodiments of the invention."

當某一實施例可以不同方式實施時，特定處理次序可與所描述次序不同地執行。舉例來說，兩個連續描述的工藝可實質上同時執行或以與所描述次序相反的次序執行。 While an embodiment may be implemented differently, the specific order of processing may be performed differently than described. For example, two consecutively described processes may be performed substantially concurrently or in the reverse order of that described.

除非另外定義，否則本文中所使用的所有術語(包含技術和科學術語)具有本發明所屬領域的普通技術人員所通常理解的相同意義。將進一步理解，術語(例如常用詞典中所定義的那些術語)應解釋為具有與其在相關技術的上下文和/或本說明書中的含義一致的含義，且不應在理想化或過分形式化的意義上進行解釋，除非在本文中這樣明確地定義。 Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms (such as those defined in commonly used dictionaries) should be interpreted to have a meaning consistent with their meaning in the context of the relevant technology and/or this specification, and should not be interpreted in an idealized or overly formalized sense. unless otherwise explicitly defined herein.

圖1繪示本發明一實施例的傳送裝置100的調整系統的示意圖。請參照圖1，傳送裝置100可包括：製造系統102、調整系統104以及監控系統106。製造系統102與調整系統104以及監控系統106互相耦接，調整系統104與監控系統106互相耦接。 FIG. 1 is a schematic diagram of an adjustment system of a transmission device 100 according to an embodiment of the present invention. Referring to FIG. 1 , the conveying device 100 may include: a manufacturing system 102 , an adjustment system 104 and a monitoring system 106 . The manufacturing system 102 is coupled to the adjustment system 104 and the monitoring system 106, and the adjustment system 104 and the monitoring system 106 are coupled to each other.

在一實施例中，製造系統102可為製造執行系統(Manufacturing Execution System，MES)。製造系統102用於追蹤、控管製造流程中關於半製品(或，在製品，WIP)、原物料、機台狀況、生產目標與實際產出結果等資料，以滿足製造現場(例如，晶圓廠)的需求。在一實施例中，製造系統102整合物聯網(IOT)技術，提供在製品即時訊息，如品質管理、設備運作、庫存狀況等資訊，並針對異常情形進行通報，而可達到有效因應不同貨品生產需求，提高產品良率、縮短生產週期以及降低庫存的技術功效。製造系統102通過生產線上的生產資訊的傳送，從訂單下達到產品完成的整個生產週期中獲得有效的貨品生產資訊。當工廠生產線中有生產事件發生時，製造系統102能夠即時對該事件做出反應與處理，並且利用製造系統102中設定的基本資訊以對生產線上發生的生產事件進行處理和調度。由於製造系統102具有當生產狀態產生改變即可動態調整迅速回應的能力，因而得以透過製造系統102減少內部生產損失的發生，同時能夠透過製造系統102有效安排生產線的生產調度運作，進而提高工廠的效能與及時交貨的能力、改善工廠整體物料供應與生產達成率。 In one embodiment, the manufacturing system 102 may be a Manufacturing Execution System (MES). Manufacturing system 102 is used to track Track and control information on semi-finished products (or work-in-progress, WIP), raw materials, machine status, production targets and actual output results in the manufacturing process to meet the needs of the manufacturing site (e.g., wafer fab). In one embodiment, the manufacturing system 102 integrates Internet of Things (IOT) technology to provide real-time information on work-in-progress, such as quality management, equipment operation, inventory status and other information, and to report abnormal situations, thereby effectively responding to the production of different goods. demand, improve product yield, shorten production cycle and reduce the technical effectiveness of inventory. The manufacturing system 102 obtains effective product production information from the entire production cycle from order placement to product completion through the transmission of production information on the production line. When a production event occurs in the factory production line, the manufacturing system 102 can react and process the event immediately, and use the basic information set in the manufacturing system 102 to process and schedule the production event that occurs on the production line. Since the manufacturing system 102 has the ability to dynamically adjust and respond quickly when the production status changes, the occurrence of internal production losses can be reduced through the manufacturing system 102. At the same time, the production scheduling operation of the production line can be effectively arranged through the manufacturing system 102, thereby improving the efficiency of the factory. Efficiency and timely delivery capabilities, improve the factory's overall material supply and production achievement rate.

在一實施例中，調整系統104可配置為根據製程機台的即時狀況、貨品的即時狀況及機台閒置危機的狀況等的其中至少一者來動態調整貨品的派工順序或傳送順序。在一實施例中，調整系統104的傳送指令的優先權指定方式是可動態調整的傳送指令的優先權等級，並且當多個貨品具有相同優先權的傳送指令時，以先進先出(FIFO)的方式來指派或調整優先權。在一實施例中，傳送指令的優先權是根據貨品(或批貨，lot)等級進行分類。舉例來說，貨品等級可以區分為極重要貨品(super lot)、緊急貨品(rush lot)、標準貨品(normal lot)等，然本實施例不限於此。調整系統104可於貨品下線或出貨時，根據使用者需求設定或調整貨品的等級，而傳送指令則根據貨品的等級或排序而具有不同優先權。在貨品下線或出貨後(即，已派工)，調整系統104可配置為根據生產的即時狀況來動態調整貨品的傳送優先權。舉例來說，調整系統104可配置為根據產線上的貨品在不同製程步驟之間所需的最大等候時間(queue time，Q-time)、產線上的貨品在各個站點處可閒置的最大時間、產線上的貨品的初期先導生產(或，試產、初流，pilot run)時間、用於早期預警系統(Early Warning System，EWS)以及早期晶圓檢測(Early Wafer Sort，EWS)的貨品的其中至少一種的即時生產狀況來動態調整貨品的傳送優先權。也就是說，調整系統104可根據是否為Q-time貨品、pilot run貨品以及EWS貨品的其中至少一種來動態調整上述貨品的傳送優先權，以同時維持貨品在生產線上傳輸的負荷量以及貨品在生產線上的時間排程。換句話說，藉由調整系統104動態調整貨品的傳送優先權可以讓貨品可以及時在預定時程內被傳送至目標機台，因此可避免目標機台的閒置危機。 In one embodiment, the adjustment system 104 may be configured to dynamically adjust the dispatch sequence or delivery sequence of goods based on at least one of the real-time status of the process machine, the real-time status of the goods, and the idle crisis situation of the machine. In one embodiment, the priority designation method of the delivery instructions of the adjustment system 104 is a dynamically adjustable priority level of the delivery instructions, and when multiple goods have delivery instructions with the same priority, first-in-first-out (FIFO) is used. way to assign or adjust priorities. In one embodiment, the priority of transmitting instructions is classified according to the product (or lot) level. For example That is, the product levels can be divided into extremely important products (super lot), emergency products (rush lot), standard products (normal lot), etc., but this embodiment is not limited thereto. The adjustment system 104 can set or adjust the level of goods according to user needs when the goods are offline or shipped, and the transmission instructions have different priorities according to the level or sorting of the goods. After the goods are offline or shipped (ie, the work has been dispatched), the adjustment system 104 can be configured to dynamically adjust the delivery priority of the goods according to the real-time status of production. For example, the adjustment system 104 may be configured to determine the maximum waiting time (Q-time) required for goods on the production line between different process steps, and the maximum time that goods on the production line can be idle at each station. , the initial pilot production (or trial production, pilot run) time of goods on the production line, the time of goods used for Early Warning System (EWS) and Early Wafer Sort (EWS) The real-time production status of at least one of them is used to dynamically adjust the delivery priority of goods. That is to say, the adjustment system 104 can dynamically adjust the transmission priority of the above-mentioned goods according to whether they are at least one of Q-time goods, pilot run goods, and EWS goods, so as to maintain the load of the goods transmitted on the production line and the quality of the goods at the same time. Time scheduling on the production line. In other words, by dynamically adjusting the delivery priority of the goods through the adjustment system 104, the goods can be delivered to the target machine in a timely manner within a predetermined time period, thereby avoiding the idle crisis of the target machine.

在一實施例中，傳送指令的優先權是根據機台(equipment)的等級或排序進行設定。在一實施例中，在傳送裝置100的傳送資源不足的狀況下(例如，在有限的搬送設備或有限的傳送裝置資源下)，調整系統104對於傳送優先權的設定方式可依據目標機台的等級(例如，高階、中高階、中階、中低階、初階等)以對目標製程機台的來源及目的地(From/To EQP)來設定固定式的傳送指令優先權。舉例來說，高階機台(或關鍵機台(key machine))因為目前待處理的貨物較少或者等待送至下個站點處進行處理的堆貨較多而具有較高的閒置危機，因此需要設定較高的傳送優先權。另一方面，在傳送裝置100的傳送資源不足的狀況下，調整系統104對於傳送優先權的設定方式還可對於瓶頸或關鍵的目標機台設定較高的傳送固定式的指令優先權。除此之外，在傳送裝置100的傳送資源不足的狀況下，對於等待傳送貨品或正在接收傳送中的貨品的製程機台，調整系統104還可以根據生產線上的機台的即時生產狀況來動態調整傳送指令的優先權。舉例來說，機台的即時生產狀況包括：在製品的資訊(WIP profile)、機台上待生產的貨品數量(例如，機台待生產的貨品有1000批貨品)、貨品的目標生產量(move target)(例如，生產線上會預先設置每個時段需要產出的貨品數量，以符合產品生產的週期時間(cycle time))、生產線上正在進行維修或定期保養(period maintenance，PM)的機台數量(例如，原生產線上原本有10部機台，但有兩部機台發生狀況而需要進行維修，因此需要加速其餘八部機台的過貨速度，以加速傳送資源，維持目標生產量)以及機台生產貨品的時間(tact time，TC)(例如，不同的貨品在機台上的生產時間會隨著製程參數不同而有所差異，導致機台生產不同貨品的時間長短不同(即，TC不同)，若貨品生產時間較短，則機台傳送貨品的時間較快，可能造成下一批貨品來不及傳送至機台，進而導致機台產生閒置危機)。其中，生產貨品的時間(TC)為上一批貨品生產的結束時間到下一批貨品生產結束的時間區間(即，TC=Last End Time-Previous End Time))。在一實施例中，調整系統104還可以根據機台閒置危機的風險高低(例如，高閒置風險、低閒置風險、中閒置風險等，但不限於此)或閒置危機的等級(例如，高閒置危機、低閒置危機、中閒置危機等，但不限於此)動態提高該製程機台所對應的目標貨品的傳送指令的優先權，等到製程機台的閒置危機解除後，調整系統104立即將降低該製程機台所對應的目標貨品的傳送指令的優先權，以達到避免過度佔用傳送資源的功效。其中，閒置風險的高低或閒置危機的等級可為一預先設定的數值或數值範圍(例如，閒置風險為90~95%、閒置危機的等級為8)。在一實施例中，調整系統104可根據依據目標機台的等級、瓶頸或關鍵的目標機台、生產線上的機台的即時生產狀況以及機台閒置風險或閒置危機的其中至少一者或其組合動態調整目標貨品的傳送指令的優先權。特別注意的是，根據調整系統104動態調整傳送指令的優先權等級，除了可確保較高等級的貨品能夠優先獲得傳送資源，也可避免造成機台閒置的問題發生。此外，採用動態調整設定傳送指令的優先權也符合實際生產狀況。在半製品的生產狀況不佳時，堆貨的機台雖因為半製品的流動或生產時程不同，然而透過動態調整設定傳送指令的優先權也能夠讓堆貨的機台透過調整優先權而優先取得傳送資源，改善半製品堆貨的情形，進而使得貨品的生產週期不受影響。 In one embodiment, the priority of transmitting instructions is set according to the level or order of equipment (equipment). In one embodiment, when the transmission resources of the transmission device 100 are insufficient (for example, under limited transmission equipment or limited transmission device resources), the adjustment system 104 may set the transmission priority according to the target machine. The level (for example, high-end, mid-to-high-end, mid-level, mid-to-low-level, elementary level, etc.) is used to set fixed transmission command priorities for the source and destination (From/To EQP) of the target process machine. For example, high-end machines (or key machines) have a higher risk of being idle because they currently have fewer goods to be processed or more goods waiting to be sent to the next site for processing. A higher transmission priority needs to be set. On the other hand, when the transmission resources of the transmission device 100 are insufficient, the adjustment system 104 may also set a higher transmission fixed instruction priority for bottlenecks or critical target machines by adjusting the transmission priority setting method. In addition, when the transmission resources of the transmission device 100 are insufficient, the adjustment system 104 can also dynamically adjust the process machines that are waiting to transmit goods or are receiving goods being transported according to the real-time production status of the machines on the production line. Adjust the priority of transfer commands. For example, the real-time production status of the machine includes: work-in-progress information (WIP profile), the number of goods to be produced on the machine (for example, the machine has 1,000 batches of goods to be produced), and the target production volume of the goods ( move target) (for example, the production line will pre-set the quantity of goods that need to be produced in each period to comply with the cycle time of product production), machines undergoing maintenance or period maintenance (PM) on the production line Number of machines (for example, there were originally 10 machines on the original production line, but two machines encountered problems and required maintenance. Therefore, it is necessary to speed up the delivery speed of the remaining eight machines to speed up the transfer of resources and maintain the target production volume. ) and the time (tact time, TC) for the machine to produce goods (for example, the production time of different goods on the machine will vary with different process parameters, resulting in different lengths of time for the machine to produce different goods (i.e. , TC is different), if the production time of the goods is short, the time for the machine to transfer the goods is faster, you can This may cause the next batch of goods to be delivered to the machine too late, resulting in an idle crisis for the machine). Among them, the time to produce goods (TC) is the time interval from the end time of the production of the previous batch of goods to the end of the production of the next batch of goods (ie, TC=Last End Time-Previous End Time)). In one embodiment, the adjustment system 104 can also adjust the machine according to the risk level of the idle crisis (for example, high idle risk, low idle risk, medium idle risk, etc., but not limited to this) or the level of the idle crisis (for example, high idle risk). Crisis, low idle crisis, medium idle crisis, etc., but not limited to these) dynamically increase the priority of the transmission instructions of the target goods corresponding to the process machine. After the idle crisis of the process machine is relieved, the adjustment system 104 will immediately reduce the priority of the transmission instruction. The priority of the transmission instructions of the target goods corresponding to the processing machine is to avoid excessive occupation of transmission resources. Among them, the level of idle risk or the level of idle crisis can be a preset value or range of values (for example, the idle risk is 90~95% and the level of idle crisis is 8). In one embodiment, the adjustment system 104 may be based on at least one of the level of the target machine, the bottleneck or critical target machine, the real-time production status of the machine on the production line, and the machine idle risk or idle crisis, or other combinations thereof. The combination dynamically adjusts the priority of the delivery instructions of the target goods. It is particularly important to note that dynamically adjusting the priority level of transmission instructions according to the adjustment system 104 not only ensures that higher-level goods can obtain transmission resources first, but also avoids the problem of idle machines. In addition, the use of dynamic adjustment to set the priority of transmission instructions is also consistent with actual production conditions. When the production status of semi-finished products is not good, although the flow or production schedule of semi-finished products is different between the stacking machines, dynamically adjusting the priority of transmitting instructions can also allow the stacking machines to improve by adjusting the priority. Prioritize the acquisition of transmission resources, improve the situation of semi-finished goods stacking, and thus make the goods The production cycle is not affected.

在一實施例中，監控系統106根據製程機台即時生產狀況來監測並預估機台的運行狀況。舉例來說，監控系統106根據機台實際生產及過貨的狀況來監控或評估下一批待處理的貨品是否可在預定時間內及時傳送至目標機台的輸入埠(load port)，以進行下一批貨品的處理。在一實施例中，監控系統106可透過目標機台端所提供的資訊得知在目標機台上的貨品生產時間即將結束時，但下一批待處理(已預約或已派工)卻尚未傳送至目標機台的待生產位置(輸入埠)的貨品，並設法提高該已預約但尚未傳送至目標機台的待生產位置的貨品的傳送優先權，以加速傳送該貨品至目標機台，以降低機台閒置風險(或閒置危機)。 In one embodiment, the monitoring system 106 monitors and predicts the operating status of the process machine based on the real-time production status of the machine. For example, the monitoring system 106 monitors or evaluates whether the next batch of goods to be processed can be timely transmitted to the input port (load port) of the target machine within a predetermined time based on the actual production and delivery status of the machine for processing. Processing of the next batch of goods. In one embodiment, the monitoring system 106 can know through the information provided by the target machine that the production time of the goods on the target machine is about to end, but the next batch to be processed (reserved or dispatched) has not yet been sent. goods to the production-to-be-produced position (input port) of the target machine, and try to increase the delivery priority of the goods that have been reserved but have not yet been sent to the production-to-be-produced position of the target machine, so as to speed up the delivery of the goods to the target machine. Reduce the risk of idle machines (or idle crisis).

請參照圖2，圖2繪示本發明一實施例的傳送裝置200的的系統示意圖。傳送裝置200可包括：製造系統102、調整系統104、監控系統106、自動化程式(或自動化程式系統)108、物料控制系統110、派遣系統112、物料傳送系統114以及機台116。製造系統102與調整系統104、自動化系統108、物料控制系統110以及派遣系統(或派工系統)112互相耦接。物料控制系統110與物料傳送系統114互相耦接。自動化程式108與監控系統106和機台116互相耦接。調整系統104與監控系統106互相耦接。 Please refer to FIG. 2 , which is a system schematic diagram of a transmission device 200 according to an embodiment of the present invention. The conveying device 200 may include: a manufacturing system 102, an adjustment system 104, a monitoring system 106, an automation program (or an automation program system) 108, a material control system 110, a dispatch system 112, a material delivery system 114, and a machine 116. The manufacturing system 102 is coupled to the adjustment system 104, the automation system 108, the material control system 110, and the dispatch system (or dispatch system) 112. The material control system 110 and the material transfer system 114 are coupled to each other. The automation program 108 is coupled to the monitoring system 106 and the machine 116 . The adjustment system 104 and the monitoring system 106 are coupled to each other.

在一實施例中，製造系統102用於追蹤、控管製造流程中關於半製品(或，在製品，WIP)、原物料、機台狀況、生產目標與實際產出結果等資料，以滿足製造現場的需求。其餘關於製造系統102之相關敘述請參見前文，此處不再贅述。 In one embodiment, the manufacturing system 102 is used to track and control semi-finished products (or work in progress, WIP), raw materials, machine status, and production targets in the manufacturing process. and actual output results to meet the needs of the manufacturing site. For other relevant descriptions about the manufacturing system 102, please refer to the previous section and will not be repeated here.

在一實施例中，調整系統104可配置為根據機台的即時狀況以及貨品的即時狀況的其中至少一者來動態調整貨品的派工順序或傳送順序。在一實施例中，調整系統104的傳送指令的優先權指定方式是可動態調整傳送指令的優先權等級，並且當貨品具有相同優先權的傳送指令時，以先進先出的方式來調整優先權。在一實施例中，傳送指令的優先權是根據貨品等級進行分類。在一實施例中，調整系統104可於貨品下線或出貨時，根據使用者需求設定或調整貨品的等級，而傳送指令則根據貨品的等級或排序而具有不同優先權。在貨品下線或出貨後(即，已派工)，調整系統104可配置為根據生產的即時狀況來動態調整貨品的傳送優先權。其餘關於調整系統104之相關敘述請參見前文，此處不再贅述。在一實施例中，調整系統104藉由調整傳送優先權以控制物料控制系統110。 In one embodiment, the adjustment system 104 may be configured to dynamically adjust the dispatch sequence or delivery sequence of goods based on at least one of the real-time status of the machine and the real-time status of the goods. In one embodiment, the priority designation method of the delivery instructions of the adjustment system 104 can dynamically adjust the priority level of the delivery instructions, and when the goods have delivery instructions with the same priority, the priority is adjusted in a first-in, first-out manner. . In one embodiment, the priority of transmitting instructions is classified according to the product level. In one embodiment, the adjustment system 104 can set or adjust the level of goods according to user needs when the goods are offline or shipped, and the transmission instructions have different priorities according to the level or sorting of the goods. After the goods are offline or shipped (ie, the work has been dispatched), the adjustment system 104 can be configured to dynamically adjust the delivery priority of the goods according to the real-time status of production. For other relevant descriptions about the adjustment system 104, please refer to the previous section and will not be repeated here. In one embodiment, the adjustment system 104 controls the material control system 110 by adjusting transmission priorities.

在一實施例中，監控系統106包括即時機台監控系統(Live Equipment Monitor System，LEMS)。在一實施例中，即時機台監控系統可即時監控機台116以及生產線上已預約(已派工)但尚未送達的貨品，並根據機台116的實際生產狀況來監測並預估機台與已派工的貨品的運行狀況。在一實施例中，即時機台監控系統可透過監控目標機台116所提供的資訊得知下一批已預約卻尚未傳送至目標機台116的待生產位置(輸入埠)的貨品，並設法提高該已預約但尚未傳送至目標機台116的傳送優先權，接著透過製程機台控制系統1081與製造系統102以加速傳送該貨品至目標機台116，降低機台116的閒置風險(或閒置危機)。在一些實施例中，即時機台監控系統提供機台116的相關資訊以及派工排程給製造系統102，並提供機台116使用狀況的稼動率分析，將機台的狀態予以細分，例如機台保養管理、機台閒置數目、機台消耗量等(但不限於此)，做為貨品排程及傳送指令優先權的評估考量，以及操作人員判定的參考，以提高機台116的使用率。 In one embodiment, the monitoring system 106 includes a Live Equipment Monitor System (LEMS). In one embodiment, the real-time machine monitoring system can real-time monitor the machine 116 and the goods on the production line that have been reserved (work has been dispatched) but have not yet been delivered, and can monitor and predict the machine and machine 116 according to the actual production status of the machine 116. The operating status of dispatched goods. In one embodiment, the real-time machine monitoring system can learn the next batch of goods that have been reserved but have not yet been sent to the production location (input port) of the target machine 116 by monitoring the information provided by the target machine 116, and try to Increase the delivery priority of the reserved but not yet delivered goods to the target machine 116, and then accelerate the delivery of the goods to the target machine 116 through the process machine control system 1081 and the manufacturing system 102, thereby reducing the idle risk (or idleness) of the machine 116 crisis). In some embodiments, the machine monitoring system provides relevant information of the machine 116 and work dispatch schedule to the manufacturing system 102, and provides utilization analysis of the usage status of the machine 116 to subdivide the status of the machine, such as machine Machine maintenance management, the number of idle machines, machine consumption, etc. (but not limited to these) are used as evaluation considerations for product scheduling and transmission instruction priority, and as a reference for operator judgment to improve the utilization rate of machine 116 .

在一些實施例中，自動化程式(Equipment Automation Program，EAP)108保括製程機台控制系統(Tool Control System，TCS)1081。自動化程式108為用於製程品質管制的程式，當每一批貨品生產前後，會經由自動化程式108進行確認動作，以管制物料與控制機台116操作，一旦發現異常情況(trouble shooting)時，這批貨品將不再進行生產，以防止錯誤的操作以及避免導致整批貨品報廢等情形。此外，自動化程式108與製造系統102進行資訊整合。在一些實施例中，自動化程式108提供製造系統102關於生產線上的機台116的相關資訊(例如：機台閒置(Idle)、機台保養管理(Process Maintenance，PM)以及機台下線(Down)等，但本實施例不限於此)，讓貨品根據該相關資訊進行排程與派工，提高機台116的使用效能，降低機台116的閒置危機和閒置成本，以提高機台116的生產率。同時自動化程式108提供一完整的自動化方案，在與機台116維持連線下，達到協助減少人為在量產時的疏失(例如：減少人為輸入錯誤與重覆性的工作(如資料收集))，提高產品良率及即時反應機台實際狀況的效果。在一些實施例中，自動化程式108可以自動選擇機台116的處理程序或管理由製造系統102所接收到的物料配方(recipe)，再下達指令至機台116，使機台116進行運作。在一些實施例中，製程機台控制系統1081可執行量產管制。舉例來說，製程機台控制系統1081可預先設定機台116的相關資訊，而可在機台116進行運作時(Run time)與機台116的生產即時狀況進行比對，以管制已派工的貨品進入機台116的正確性。 In some embodiments, the automation program (Equipment Automation Program, EAP) 108 includes a process tool control system (Tool Control System, TCS) 1081. The automation program 108 is a program used for process quality control. Before and after each batch of goods is produced, confirmation actions will be performed through the automation program 108 to control materials and control the operation of the machine 116. Once an abnormality (trouble shooting) is discovered, this The batch of goods will no longer be produced to prevent incorrect operation and avoid scrapping of the entire batch of goods. In addition, the automation program 108 integrates information with the manufacturing system 102 . In some embodiments, the automation program 108 provides the manufacturing system 102 with relevant information about the machine 116 on the production line (such as: machine idle (Idle), machine maintenance management (Process Maintenance, PM), and machine offline (Down) etc., but this embodiment is not limited to this), allowing goods to be scheduled and dispatched based on the relevant information, improving the efficiency of the machine 116, reducing the idle crisis and idle cost of the machine 116, and improving the productivity of the machine 116 . At the same time, the automation program 108 provides a complete automation solution that helps reduce manual labor during mass production while maintaining a connection with the machine 116. errors (for example: reducing human input errors and repetitive work (such as data collection)), improving product yield and immediately reflecting the actual status of the machine. In some embodiments, the automation program 108 can automatically select the processing program of the machine 116 or manage the material recipe received by the manufacturing system 102, and then issue instructions to the machine 116 to cause the machine 116 to operate. In some embodiments, the process tool control system 1081 can perform mass production control. For example, the process machine control system 1081 can pre-set the relevant information of the machine 116, and can compare it with the real-time production status of the machine 116 when the machine 116 is operating (Run time) to control the dispatched work. The correctness of the goods entering the machine 116.

在一些實施例中，物料控制系統(Material Control System，MCS)110可配置為指派傳送路徑(包括貨品路徑規劃、貨品路徑最佳化)、管理儲存設備(傳送歷史製程資料、傳送效率)、統整製造系統102的傳送命令以及負責物料傳送系統114的狀態監控與製程物料的資料查詢。在一些實施例中，物料控制系統110可設定製程路徑(route)、替代物料、物料使用優先權等相關參數，但本發明不限於此。在一些實施例中，物料控制系統110連接多種資料庫如Oracle、DB2、SQL Server等。在一些實施例中，物料控制系統110與製造系統102與物料傳送系統114互相耦接，且介面支援多種通訊介面(例如：IBM MQ、SEMI E30、HSMS等，但不限於此)，以進行製造系統102與物料傳送系統114資料間的交換與整合。在一些實施例中，物料控制系統110根據不同傳送規劃進行貨品路徑管理(Route Manager)，以確保貨品傳送正確。在一些實施例中，物料控制系統110根據傳輸載具(carrier)、輸入輸出埠(port)、時間戳記(Timestamp)、先進先出(FIFO)等不同條件的命令進行物料及貨品的傳送優先權管理。在一些實施例中，物料控制系統110提供使用者指定物料傳送的替代(alternate)設備。也就是說，使用者可以依照需求設定每一物料傳送系統114的替代設備及其替代優先順序。在一些實施例中，物料控制系統110可監控全生產線或全廠區的物料傳送系統114、傳送命令、載具位置等的即時狀態，以掌控整個生產線的運作。在一些實施例中，物料控制系統110可提供載具進出、警報訊息等歷史資料報表，以提供管理者查詢完整的歷史記錄及分析資訊，並且可提供系統、設備以及使用者設定等完整資料記錄，讓管理者可追蹤查詢及判斷生產線上的運作狀況。在一些實施例中，物料控制系統110由調整系統104的控制以提前預約物料或貨品。舉例來說，當目前處理中的機台即將運行結束的前10分鐘，物料控制系統110即可提前預約物料或貨品，以將預約的物料或貨品事先轉移至目前處理中的機台附近儲貨。 In some embodiments, the Material Control System (MCS) 110 can be configured to assign transmission paths (including product path planning, product path optimization), manage storage equipment (transfer historical process data, transmission efficiency), system It is responsible for the transmission commands of the entire manufacturing system 102 and is responsible for the status monitoring of the material transportation system 114 and the data query of process materials. In some embodiments, the material control system 110 can set relevant parameters such as process paths (route), substitute materials, material usage priorities, etc., but the invention is not limited thereto. In some embodiments, the material control system 110 is connected to multiple databases such as Oracle, DB2, SQL Server, etc. In some embodiments, the material control system 110, the manufacturing system 102, and the material delivery system 114 are coupled to each other, and the interface supports multiple communication interfaces (such as: IBM MQ, SEMI E30, HSMS, etc., but not limited thereto) for manufacturing. Exchange and integration of data between system 102 and material delivery system 114. In some embodiments, the material control system 110 performs route management (Route Manager) of goods according to different delivery plans to ensure correct delivery of goods. In a In some embodiments, the material control system 110 manages the transmission priority of materials and goods according to commands with different conditions such as carrier, input and output port, timestamp, first-in-first-out (FIFO), etc. . In some embodiments, the material control system 110 provides alternative equipment for user-specified material transfer. That is to say, the user can set the alternative equipment of each material conveying system 114 and its alternative priority according to the needs. In some embodiments, the material control system 110 can monitor the real-time status of the material transfer system 114, transfer orders, carrier positions, etc. of the entire production line or the entire factory to control the operation of the entire production line. In some embodiments, the material control system 110 can provide historical data reports such as vehicle entry and exit, alarm messages, etc., to provide managers with complete historical records and analysis information, and can provide complete data records such as systems, equipment, and user settings. , allowing managers to track, query and judge the operation status of the production line. In some embodiments, the material control system 110 is controlled by the adjustment system 104 to reserve materials or goods in advance. For example, 10 minutes before the machine currently being processed is about to end its operation, the material control system 110 can reserve materials or goods in advance to transfer the reserved materials or goods to storage near the machine currently being processed. .

在一些實施例中，派遣系統(或派工系統)(Real Time Dispatcher，RTD)112針對每一個機台116設定派工規則(RTD Rule)。舉例來說，派遣系統112會在派工列表查詢，並根據派工規則及生產的即時狀況將所有可預約(或，可派工)的貨品依照優先權進行排序，將優先權最高的貨品排在前面供操作員優先選擇。據此，每一個機台116都會優先處理優先權較高的貨品，除了可以提升機台116的生產率、產能和使用率，避免某些機台堆貨或形成機台閒置危機，還可以平衡同類機台116的運行負載，並避免機台116處理到不合適的貨品所造成的生產變異性，還可因此降低貨品生產的生產週期瓶頸。 In some embodiments, the dispatch system (or dispatch system) (Real Time Dispatcher, RTD) 112 sets a dispatch rule (RTD Rule) for each machine 116 . For example, the dispatch system 112 will query the dispatch list, and sort all the goods that can be reserved (or dispatched) according to the priority according to the dispatch rules and the real-time status of production, and arrange the goods with the highest priority. At the front for operator priority. Accordingly, each machine 116 will prioritize goods with higher priority. In addition to improving The productivity, capacity and utilization rate of the machine 116 can avoid certain machines from piling up goods or creating a machine idle crisis. It can also balance the operating load of similar machines 116 and avoid problems caused by the machine 116 processing inappropriate goods. Production variability can also reduce the production cycle bottleneck of goods production.

請參照圖3，圖3繪示本發明一實施例的物料傳送系統114的系統示意圖。在一實施例中，物料傳送系統114可例如是自動化物料搬送系統(Automatic Material Handling System，AMHS)，包括：空中走行式無人搬運車(Over Head Shuttle，OHS)1142、天車(Over Head Hoist Transport，OHT)1144、儲存貨架(Stocker)1146、自動導引載具(Auto Guide Vehicle，AGV)/軌道導引載具(Rail guided vehicle，RGV)1148以及軌道緩衝倉儲(OHB)(未示出)。在一實施例中，物料傳送系統114配置於無塵室、晶圓廠等，可自動搬運與儲存各類型的晶圓傳送盒(Front Opening Unified Pod，FOUP)。在一實施例中，物料傳送系統114搬運FOUP至各製程設備間的裝載及卸載埠。在一實施例中，OHT 1144夾取FOUP於高空軌道輸送系統上進行傳送，除可有效節省及利用空間外，更能大幅提高搬送效率，節省搬送時間。儲存貨架1146可提供OHS 1142、OHT 1144、AGV/RGV 1148及人工搬運進行上下物料、暫存及傳送FOUP。其中，AGV/RGV 1148上方裝載機械手臂，方便夾取Foup運送，節省人員搬運作業及製程等待時間。在一些實施例中，物料傳送系統114搭配物料控制系統110，可以串接廠區內的半導體製程傳送路徑，達成全廠區自動化運行的效果。 Please refer to FIG. 3 , which is a system schematic diagram of the material conveying system 114 according to an embodiment of the present invention. In one embodiment, the material transfer system 114 may be, for example, an Automatic Material Handling System (AMHS), including: an Overhead Shuttle (OHS) 1142, an Over Head Hoist Transport (Over Head Hoist Transport) , OHT) 1144, storage rack (Stocker) 1146, automatic guided vehicle (Auto Guide Vehicle, AGV)/rail guided vehicle (RGV) 1148, and rail buffer storage (OHB) (not shown) . In one embodiment, the material transfer system 114 is configured in a clean room, a wafer factory, etc., and can automatically transport and store various types of wafer transfer boxes (Front Opening Unified Pod, FOUP). In one embodiment, the material transfer system 114 transports FOUPs to loading and unloading ports between various process equipment. In one embodiment, the OHT 1144 clamps the FOUP and transports it on the high-altitude rail transport system. In addition to effectively saving and utilizing space, it can also greatly improve the transport efficiency and save transport time. Storage rack 1146 can provide OHS 1142, OHT 1144, AGV/RGV 1148 and manual handling for loading and unloading materials, temporary storage and transmission of FOUP. Among them, a robotic arm is mounted above the AGV/RGV 1148 to facilitate the picking and transportation of Foup, saving personnel handling operations and process waiting time. In some embodiments, the material transfer system 114 is combined with the material control system 110 to be connected in series within the factory. The semiconductor process transmission path achieves the effect of automated operation of the entire factory.

請參照圖4及圖2，圖4繪示本發明一實施例的傳送裝置200中的調整系統的操作流程圖400。調整系統104的操作流程圖400包括步驟S402~S434。在步驟S402中，調整系統104取得機台116的資訊(清單)(Get EQP list)(即，機台116的生產即時狀況資訊)。在步驟S404中，調整系統104判斷機台轉移(傳送)模式是否為“自動模式(AUTO/FULL)”。若機台轉移(傳送)模式並非“AUTO(FULL)”，則進入步驟S434繼續評估下一個製程機台(Judge next EQP)，並重新取得下一個製程機台的清單。若機台轉移(傳送)模式為“AUTO(FULL)”，則進入步驟S406。在步驟S406中，調整系統104取得已預約(已派工)的貨品或晶圓傳送盒(Get reserved FOUP)，並根據已預約的貨品或晶圓傳送盒的預約時間(派工時間)進行排序。在步驟S408中，調整系統104對已預約的貨品或晶圓傳送盒的優先權進行評估(Lot Priority Judge)。在步驟S410中，調整系統104取得貨品的即時生產狀態，例如，製造等候時間(Get Lot Qtime)。在步驟S412中，調整系統104取得貨品的即時生產狀態，例如，試產狀態(Get Lot Pi-Run Status)。在步驟S414中，調整系統104取得貨品的即時生產狀況，例如，預警系統狀態(Get Lot EWS Status)。在步驟S416中，調整系統104針對已派工但並非傳送到目標製程機台的貨品、已派工且等待傳送到目標機台的貨品以及已派工且正傳送至目標製程機台的貨品中的其中至少一者或其組合計算該已預約的貨品的優先權(Calculate Lot Priority)。在步驟S418中，調整系統104根據機台116的即時狀況對機台116進行優先權評估(EQP Priority Judge)。在步驟S420中，調整系統104取得關鍵設備清單(Get Key Machine List)。在步驟S422中，調整系統104取得機台116的資訊(Get EQP Info)。在步驟S424中，調整系統104取得機台內的半製品(在製品)資訊(Get EQP WIP Info)。在步驟S426中，調整系統104根據機台116的即時生產狀況所做出的優先權評估結果進行製程機台的優先權計算(Calculate EQP Priority)。在步驟S428中，調整系統104計算晶圓傳送盒(貨品)的傳送命令的優先權(Calculate FOUP Priority)。在步驟S430中，調整系統104判斷晶圓傳送盒(貨品)是否具有較高的優先權。若晶圓傳送盒(貨品)經調整系統104計算後不具有相對較高的優先權，則進入步驟S434繼續評估下一個製程機台，並重新取得下一個製程機台的清單。若晶圓傳送盒(貨品)經調整系統104計算後具有相對較高的優先權，則進入步驟S432，且調整系統104對物料控制系統110發出請求以改變晶圓傳送盒(貨品)傳送的優先權(Request MCS to change Lot transfer priority)。在一些實施例中，調整系統104根據預先設定的優先權表(Priority Define Table)計算晶圓傳送盒(貨品)的傳送命令的優先權並動態調整傳送指令優先權。在一些實施例中，調整系統104根據預先設定的優先權表對於即時的機台狀況及具有閒置危機的機台進行優先權計算並動態調整優先權。 Please refer to FIG. 4 and FIG. 2. FIG. 4 illustrates an operation flow chart 400 of the adjustment system in the conveyor device 200 according to an embodiment of the present invention. The operation flow diagram 400 of the adjustment system 104 includes steps S402 to S434. In step S402, the adjustment system 104 obtains the information (list) of the machine 116 (Get EQP list) (ie, the real-time production status information of the machine 116). In step S404, the adjustment system 104 determines whether the machine transfer (transmission) mode is "AUTO/FULL". If the machine transfer (transfer) mode is not "AUTO (FULL)", step S434 is entered to continue evaluating the next process machine (Judge next EQP), and re-obtain the list of the next process machine. If the machine transfer (transmission) mode is "AUTO (FULL)", step S406 is entered. In step S406, the adjustment system 104 obtains the reserved (dispatched) goods or wafer transfer boxes (Get reserved FOUP), and sorts them according to the reservation time (dispatch time) of the reserved goods or wafer transfer boxes. . In step S408, the adjustment system 104 evaluates the priority of the reserved goods or wafer transfer boxes (Lot Priority Judge). In step S410, the adjustment system 104 obtains the real-time production status of the goods, for example, the manufacturing waiting time (Get Lot Qtime). In step S412, the adjustment system 104 obtains the real-time production status of the goods, for example, trial production status (Get Lot Pi-Run Status). In step S414, the adjustment system 104 obtains the real-time production status of the goods, for example, the early warning system status (Get Lot EWS Status). In step S416, the adjustment system 104 adjusts the goods that have been dispatched but are not transferred to the target process machine, the goods that have been dispatched and are waiting to be transferred to the target machine, and the goods that have been dispatched and are being transferred to the target process. At least one or a combination of the goods on the machine calculates the priority of the reserved goods (Calculate Lot Priority). In step S418, the adjustment system 104 performs a priority evaluation (EQP Priority Judge) on the machine 116 based on the real-time status of the machine 116. In step S420, the adjustment system 104 obtains a key machine list (Get Key Machine List). In step S422, the adjustment system 104 obtains the information of the machine 116 (Get EQP Info). In step S424, the adjustment system 104 obtains the semi-finished product (work in progress) information in the machine (Get EQP WIP Info). In step S426, the adjustment system 104 performs a priority calculation (Calculate EQP Priority) of the process tool based on the priority evaluation result of the real-time production status of the tool 116. In step S428, the adjustment system 104 calculates the priority (Calculate FOUP Priority) of the transfer command of the wafer transfer box (goods). In step S430, the adjustment system 104 determines whether the wafer transfer box (goods) has a higher priority. If the wafer transfer box (goods) does not have a relatively high priority after calculation by the adjustment system 104, step S434 is entered to continue to evaluate the next process tool and re-obtain the list of the next process tool. If the wafer transfer box (goods) has a relatively high priority after calculation by the adjustment system 104, step S432 is entered, and the adjustment system 104 issues a request to the material control system 110 to change the priority of the wafer transfer box (goods). Right (Request MCS to change Lot transfer priority). In some embodiments, the adjustment system 104 calculates the priority of the transfer order of the wafer transfer box (goods) according to a preset priority table (Priority Define Table) and dynamically adjusts the priority of the transfer order. In some embodiments, the adjustment system 104 performs priority calculation on real-time machine conditions and machines with idle risks according to a preset priority list and dynamically adjusts the priorities.

請參照圖5及圖2，圖5繪示本發明一實施例的監控系統106的操作流程圖500。監控系統106的操作流程圖500包括步驟S502~S520。在步驟S502中，製程機台控制系統1081與監控系統106中的即時機台監控系統取得機台116的清單(Get EQP list)(即，取得機台116的即時生產狀況資訊)。在步驟S504中，製程機台控制系統1081與監控系統106中的即時機台監控系統即時機台監控系統讓符合關鍵機台(key machine)以及高優先權的半製品(high WIP)中的至少其中一者取得機台優先權資訊(Get EQP Priority)。在步驟S506中，製程機台控制系統1081與即時機台監控系統判斷機台轉移(傳送)模式是否為“AUTO(FULL)”。若機台轉移(傳送)模式並非“AUTO(FULL)”，則回到步驟S504並繼續評估下一個製程機台(Judge next EQP)，並重新取得下一個製程機台的優先權資訊。若機台轉移(傳送)模式為“AUTO(FULL)”，則進入步驟S508。在步驟S508中，即時機台監控系統執行智慧型的機台預測模型(Intelligence EQP Forecast Model)(可參考以下圖6之說明)。在步驟S510中，即時機台監控系統取得機台116和製程腔體的狀態(Get EQP/Chamber Status)。在步驟S512中，即時機台監控系統取得貨品或製程條件參數所對應的製程腔體路徑的運行資訊(Get Lot/Recipe Chamber Path Run Info)。在步驟S514中，即時機台監控系統根據機台或腔體發生閒置風險的機率計算模型(EQP/Chamber“IDLE CRISIS Probability” Calculate Model)來評估製程機台或製程腔體是否具有閒置危機。若製程機台或製程腔體不具有閒置危機，則前往步驟S520並繼續評估下一個製程機台(Judge next EQP)。相對地，若製程機台或製程腔體具有閒置危機，則前往步驟S516。在步驟S516中，即時機台監控系統根據：“是否為已預約但尚未抵達的晶圓傳送盒”、“是否為卸載中的晶圓傳送盒”以及“是否需要啟動已預約的晶圓傳送盒”的其中至少一項評估條件或其組合以評估是否提高傳送指令的優先權來加速傳輸(Judge If Speed Up XFR-Priority)。若即時機台監控系統評估不需要提高傳送指令的優先權，則前往步驟S520並繼續評估下一個製程機台(Judge next EQP)。相對地，若即時機台監控系統的評估結果為需要提高傳送指令的優先權，則前往步驟S518。在步驟S518中，即時機台監控系統向物料控制系統發出請求以改變晶圓傳送盒的傳送指令的優先權，並且提供較高的傳送指令優先權給卸載中的晶圓傳送盒(Unloading FOUP)以及事先已預約的晶圓傳送盒(Pre-Reserved FOUP)。 Please refer to FIG. 5 and FIG. 2. FIG. 5 illustrates an operation flow chart 500 of the monitoring system 106 according to an embodiment of the present invention. The operation flow chart 500 of the monitoring system 106 includes steps S502 to S520. In step S502, the process tool control system 1081 and the real-time machine monitoring system in the monitoring system 106 obtain the list of the machine 116 (Get EQP list) (ie, obtain the real-time production status information of the machine 116). In step S504, the process machine control system 1081 and the real-time machine monitoring system of the monitoring system 106 allow at least one of the key machine (key machine) and the high-priority work-in-progress (high WIP). One of them obtains machine priority information (Get EQP Priority). In step S506, the process tool control system 1081 and the instant machine monitoring system determine whether the tool transfer (transmission) mode is "AUTO (FULL)". If the machine transfer (transmission) mode is not "AUTO (FULL)", then return to step S504 and continue to evaluate the next process machine (Judge next EQP), and re-obtain the priority information of the next process machine. If the machine transfer (transmission) mode is "AUTO (FULL)", step S508 is entered. In step S508, the machine monitoring system executes an intelligent machine prediction model (Intelligence EQP Forecast Model) (please refer to the description of Figure 6 below). In step S510, the machine monitoring system obtains the status of the machine 116 and the process chamber (Get EQP/Chamber Status). In step S512, the machine monitoring system obtains the operation information of the process chamber path corresponding to the product or process condition parameter (Get Lot/Recipe Chamber Path Run Info). In step S514, the machine monitoring system calculates the model (EQP/Chamber "IDLE CRISIS Probability") based on the probability of idle risk of the machine or cavity. Calculate Model) to evaluate whether the process tool or process chamber has an idle crisis. If the process tool or the process chamber does not have an idle crisis, then go to step S520 and continue to evaluate the next process tool (Judge next EQP). On the other hand, if the process tool or the process chamber is in danger of being idle, the process proceeds to step S516. In step S516, the machine monitoring system determines whether the reserved wafer transfer box is a reserved but not yet arrived wafer transfer box, whether it is a wafer transfer box being unloaded, and whether the reserved wafer transfer box needs to be activated. "At least one of the evaluation conditions or a combination thereof is used to evaluate whether to increase the priority of the transmission instruction to speed up the transmission (Judge If Speed Up XFR-Priority). If the machine monitoring system evaluates that there is no need to increase the priority of the transmission instruction, then go to step S520 and continue to evaluate the next process machine (Judge next EQP). Correspondingly, if the evaluation result of the machine monitoring system is that it is necessary to increase the priority of the transmission instruction, then proceed to step S518. In step S518, the machine monitoring system sends a request to the material control system to change the priority of the transfer instruction of the wafer transfer box, and provides a higher transfer instruction priority to the unloading wafer transfer box (Unloading FOUP). And pre-reserved wafer transfer box (Pre-Reserved FOUP).

請參照圖6，圖6繪示本發明一實施例的即時機台監控系統的智慧型機台預測模型的操作流程圖600。智慧型機台預測模型的操作流程圖600包括步驟S602~S612。在步驟S602中，製程機台於不同時間點生產來自不同製程腔體路徑的貨品。例如，機台在第一時間點生產來自製程腔體路徑A的貨品1，在第二時間點生產來自製程腔體路徑B的貨品2，在第三時間點生產來自製程腔體路徑C的貨品3。在步驟S604中，即時機台監控系統監控與貨品相關的運行資訊(Lot’s Running Event Input)。舉例來說，與貨品相關的運行資訊包括但不限於貨品開始運行的時間(operation start)、即時機台監控系統開始執行控制工作的時間(control job start)、製程機台開始執行製程工作的時間(process job start)、初始的晶圓編號進入腔體的時間(wafer number start)、最後完成製程的晶圓編號離開腔體的時間(wafer number complete)、製程機台結束執行製程工作的時間(process job end)、即時機台監控系統結束執行控制工作的時間(control job)以及貨品結束運行的時間(operation end)等與時間相關的輸入參數。在一些實施例中，即時機台監控系統利用上述輸入參數進行大數據統計分析，以得到最佳化的貨品生產排程。在步驟S606中，即時機台監控系統取得貨品和機台的資訊。在一些實施例中，即時機台監控系統取得首批貨品或連續貨品的資訊，以判斷該貨品是否需要進行試產。在一些實施例中，即時機台監控系統取得批貨計數資訊(slot count)，以統計總生產的貨品數量。在一些實施例中，即時機台監控系統取得製程腔體路徑資訊(chamber path)，並根據輸入參數安排最佳化的製程腔體路徑，使貨品可沿該最佳化製程腔體路徑被傳送至對應的製程機台。在步驟S608中，即時機台監控系統取得生產時間(TC)和機台停留時間(Machine Time，TM)的資訊。其中，根據貨品等級(lot level)和晶圓等級(wafer level)不同，而有對應的貨品生產時間和貨品在機台內的停留時間。特別注意的是，在一些實施例中，貨品生產時間和貨品在機台內的停留時間並不相同。在步驟S610中，即時機台監控系統計算及預測製程腔體路徑上的可進行抽片的時間(chamber path available time)。換句話說，即時機台監控系統可預估貨品(或晶圓)進行置換的時間。舉例來說，當A貨品進入製程機台後，即時機台監控系統可預估A貨品完成製程的時間，而可預先安排已派工的B貨品進入對應的製程腔體路徑，以在A貨品結束製程之後取出A貨品並讓B貨品接續進入製程機台，而可降低機台閒置危機。在步驟S610中，即時機台監控系統可計算及預測不同製程腔體路徑上的對應貨品可進行抽片的時間。例如，製程腔體路徑A與製程腔體路徑B上的貨品可進行抽片的時間。 Please refer to FIG. 6 , which illustrates an operation flowchart 600 of the intelligent machine prediction model of the machine monitoring system according to an embodiment of the present invention. The operation flow chart 600 of the intelligent machine prediction model includes steps S602 to S612. In step S602, the process tool produces goods from different process cavity paths at different time points. For example, the machine produces product 1 from process cavity path A at the first point in time, and produces product 1 at the second point in time. The product 2 from the process chamber path B is produced, and the product 3 from the process chamber path C is produced at the third time point. In step S604, the machine monitoring system monitors the running information (Lot’s Running Event Input) related to the goods. For example, the operation information related to the goods includes but is not limited to the time when the goods start to run (operation start), the time when the machine monitoring system starts to perform control work (control job start), and the time when the process machine starts to perform process work. (process job start), the time when the initial wafer number enters the cavity (wafer number start), the time when the last wafer number that completes the process leaves the cavity (wafer number complete), and the time when the process machine finishes executing the process work ( time-related input parameters such as process job end), that is, the time when the machine monitoring system finishes executing the control job (control job), and the time when the goods finish running (operation end). In some embodiments, the machine monitoring system uses the above input parameters to perform big data statistical analysis to obtain an optimized product production schedule. In step S606, the machine monitoring system obtains product and machine information. In some embodiments, the machine monitoring system obtains information about the first batch of goods or consecutive goods to determine whether the goods need to be trial-produced. In some embodiments, the machine monitoring system obtains slot count information to count the total number of goods produced. In some embodiments, the machine monitoring system obtains the process chamber path information (chamber path) and arranges the optimized process chamber path according to the input parameters so that the goods can be transported along the optimized process chamber path. to the corresponding process machine. In step S608, the machine monitoring system obtains information on production time (TC) and machine time (Machine Time, TM). Among them, there are corresponding product productions based on different product levels (lot level) and wafer level (wafer level). time and the residence time of goods in the machine. It is particularly important to note that in some embodiments, the production time of the goods and the residence time of the goods in the machine are not the same. In step S610, the machine monitoring system calculates and predicts the chamber path available time on the process chamber path. In other words, the machine monitoring system can estimate the time when goods (or wafers) will be replaced. For example, when product A enters the process machine, the machine monitoring system can estimate the time it will take for product A to complete the process, and can pre-arrange the dispatched product B to enter the corresponding process cavity path so that product A can complete the process. After the process is completed, product A is taken out and product B continues to enter the process machine, which can reduce the risk of machine idleness. In step S610, the machine monitoring system can calculate and predict the time at which corresponding goods on different process cavity paths can be drawn. For example, the time when the products on the process chamber path A and the process chamber path B can be drawn.

請參照圖7，圖7繪示本發明一實施例的閒置危機的機率計算模型的操作流程圖700。閒置危機的機率計算模型的操作流程圖700包括步驟S702~S710。在步驟S702中，即時機台監控系統取得前目標製程機台的製程腔體路徑上的最大可抽片時間(Max available time)。在步驟S704中，即時機台監控系統根據預估的機台的可抽片時間與目前時間的時間間距(時間差)以對機台及製程腔體路徑進行排序。在步驟S706中，即時機台監控系統根據製程腔體路徑的排序結果，將排序在前的製程腔體路徑中所對應的已預約而在傳送中的第一批貨品(晶圓傳送盒)進行加速，以在最大可抽片時間之內抵達目標製程機台，而可使該製程機台順利銜接後續貨品(即，被加速的第一批貨品)的生產過程。在步驟S708中，即時機台監控系統判斷第一批貨品(晶圓傳送盒)是否為正在傳送中，且滿足製程腔體路徑上的預估“可抽片時間”減去“目前的時間”的時間差是否小於一預定值(例如，預先設定貨品在對應的製程機台路徑上的傳輸時間)。若即時機台監控系統判斷結果為不滿足步驟S708中的條件，則回到步驟S704，動態調整傳送指令的優先權並對機台及製程腔體路徑進行排序。若即時機台監控系統判斷結果滿足步驟S708中的條件，則前往步驟S710。在步驟S710中，即時機台監控系統根據製程機台的閒置危機進行判斷後，輸入加速貨品(晶圓傳送盒)傳送的判斷。也就是說，即時機台監控系統根據製程機台的閒置危機進行判斷後，決定調整(調高)傳送指令的優先權。 Please refer to FIG. 7 , which illustrates an operation flowchart 700 of the probability calculation model of idle crisis according to an embodiment of the present invention. The operation flow chart 700 of the idle crisis probability calculation model includes steps S702 to S710. In step S702, the machine monitoring system obtains the maximum available time (Max available time) on the process cavity path of the previous target process machine. In step S704, the machine monitoring system sorts the machine and process cavity paths according to the time interval (time difference) between the estimated time when the machine can extract wafers and the current time. In step S706, the machine monitoring system, based on the sorting results of the process cavity paths, sorts the previously sorted process cavity paths corresponding to The first batch of goods (wafer transfer boxes) scheduled to be transferred are accelerated to arrive at the target process tool within the maximum pick-up time, so that the process tool can smoothly connect to subsequent goods (i.e., being accelerated the production process of the first batch of goods). In step S708, the machine monitoring system determines whether the first batch of goods (wafer transfer box) is being transferred and meets the estimated "available time" minus "current time" on the process cavity path. Whether the time difference is less than a predetermined value (for example, the transmission time of the goods on the corresponding process machine path is preset). If the machine monitoring system determines that the condition in step S708 is not met, the process returns to step S704 to dynamically adjust the priority of the transmission instructions and sort the machine and process cavity paths. If the machine monitoring system determines that the condition in step S708 is met, the process proceeds to step S710. In step S710, after the machine monitoring system makes a judgment based on the idle crisis of the process machine, it inputs a judgment to speed up the delivery of the goods (wafer transfer box). That is to say, after the machine monitoring system determines the idle crisis of the process machine, it decides to adjust (raise) the priority of the transmission instruction.

請參照圖8A，圖8A繪示本發明一實施例的實施例的調整系統的權重調整順序圖800。在一實施例中，動態調整系統804先調整機台優先權重W1，接著依序調整機台閒置危機權重W2以及貨品優先權權重W3，最後調整FOUP的轉移優先權。特別注意的是，其他優先權權重的設置順序亦在本文所設想的變化的實施例中，本發明不加以限制。 Please refer to FIG. 8A, which shows a weight adjustment sequence diagram 800 of an adjustment system of an embodiment of the present invention. In one embodiment, the dynamic adjustment system 804 first adjusts the machine priority weight W1, then sequentially adjusts the machine idle crisis weight W2 and the goods priority weight W3, and finally adjusts the FOUP transfer priority. It is particularly noted that the setting sequence of other priority weights is also in the embodiment of the variation envisioned herein, and the present invention is not limited thereto.

請參照圖8A-8B，圖8B繪示本發明一實施例的調整系統的傳送分數表的建構方式。在一實施例中，動態調整系統804調整及設定機台優先權權重W1、機台閒置危機權重W2及貨品優先權權重W3中的其中至少一者。在一實施例中，機台優先權權重W1、機台閒置危機權重W2及貨品優先權權重W3可為正或負數，本發明不加以限制。舉例來說，機台優先權權重W1可為1.5，機台閒置危機權重W2可為1.4，貨品優先權權重W3可為1.1。在一實施例中，動態調整系統804根據機台的即時狀況、貨品的等級以及機台的閒置危機設定不同的分數，其中分數可為正或負數，本發明不加以限制。在一實施例中，動態調整系統804根據機台的即時狀況將不同的製程關鍵機台依照重要性及順序性至少其中一者設定不同的分數。例如，關鍵模式(super mode)的機台相較於正常模式(normal mode)的機台較為重要，因而可設置較高的分數。舉例來說，機台1-5可分別將分數設置為EQP-1=9、EQP-2=8、EQP-3=5、EQP-4=9.5、EQP-5=5以及EQP-6=5。在一實施例中，動態調整系統804根據機台的閒置危機將其依照機台預估閒置時間以及機台已預約但未傳達的剩餘傳輸時間計算出機台閒置危機程度因子。舉例來說，機台1-6的機台預估閒置時間為EQP-1=5、EQP-2=20、EQP-3=2、EQP-4=20、EQP-5=0以及EQP-6=0。機台1-6的已預約但未傳達的剩餘傳輸時間為F1=10、F2=10、F3=4、 F4=8、F5=5以及F6=5。因此，動態調整系統804可透過計算而得到機台1-6的機台閒置危機程度因子分別為EQP-1=5、EQP-2=-10、EQP-3=2、EQP-4=-12、EQP-5=5以及EQP-6=5。在一實施例中，動態調整系統804根據貨品優先權權重W3依照Q-time是或不是小於30分鐘、是或不是關鍵貨品(hot lot)、是或不是正常貨品(normal lot)、是或不是EWS貨品以及是或不是pilot run貨品以分別將機台1-6的分數設置為EQP-1=9、EQP-2=8、EQP-3=3、EQP-4=7、EQP-5=3以及EQP-6=7。在一實施例中，動態調整系統804根據上述所設定之權重W1、W2、W3以及各機台所設定之分數建構傳送分數表(如圖8B所示出之表格)，並依照各機台所對應的分數高低來決定傳送優先權。特別注意的是，此傳送分數表僅為示例性實施例，其他設置方式亦在本文所設想的變化的實施例中。 Please refer to FIGS. 8A-8B. FIG. 8B illustrates the construction method of the transmission score table of the adjustment system according to an embodiment of the present invention. In one embodiment, the dynamic adjustment system 804 adjusts and sets at least one of the machine priority weight W1, the machine idle crisis weight W2, and the product priority weight W3. In one embodiment, the machine priority weight W1, the machine idle crisis weight W2 and the product priority weight W3 can be positive or negative numbers, which are not limited by the present invention. For example, the machine priority weight W1 can be 1.5, the machine idle crisis weight W2 can be 1.4, and the product priority weight W3 can be 1.1. In one embodiment, the dynamic adjustment system 804 sets different scores according to the real-time status of the machine, the level of the goods, and the idle risk of the machine. The score can be a positive or negative number, which is not limited by the present invention. In one embodiment, the dynamic adjustment system 804 sets different scores for different process-critical machines according to at least one of importance and sequence according to the real-time status of the machine. For example, a machine in super mode is more important than a machine in normal mode, so a higher score can be set. For example, the scores for machines 1-5 can be set to EQP-1=9, EQP-2=8, EQP-3=5, EQP-4=9.5, EQP-5=5 and EQP-6=5 respectively. . In one embodiment, the dynamic adjustment system 804 calculates the idle crisis factor of the machine based on the machine's estimated idle time and the machine's reserved but undelivered remaining transmission time. For example, the estimated idle time of machines 1-6 is EQP-1=5, EQP-2=20, EQP-3=2, EQP-4=20, EQP-5=0 and EQP-6 =0. The reserved but not communicated remaining transmission time of machines 1-6 is F1=10, F2=10, F3=4, F4=8, F5=5 and F6=5. Therefore, the dynamic adjustment system 804 can calculate the idle crisis factors of machines 1-6 as EQP-1=5, EQP-2=-10, EQP-3=2, and EQP-4=-12 respectively. , EQP-5=5 and EQP-6=5. In one embodiment, the dynamic adjustment system 804 determines whether the Q-time is less than 30 minutes, whether it is a hot lot, whether it is a normal lot, whether it is a normal lot, or whether the Q-time is less than 30 minutes. For EWS goods and whether or not pilot run goods, set the scores of machines 1-6 as EQP-1=9, EQP-2=8, EQP-3=3, EQP-4=7, EQP-5=3 respectively. and EQP-6=7. In one embodiment, the dynamic adjustment system 804 constructs a transmission score table (the table shown in FIG. 8B ) based on the weights W1, W2, and W3 set above and the scores set for each machine, and according to the corresponding score of each machine. The score determines the transmission priority. It is particularly noted that this delivery score table is only an exemplary embodiment, and other arrangements are also among the varied embodiments contemplated herein.

綜上所述，本發明傳送裝置的調整系統及調整系統的優先權調整方法採用了動態調整傳送指令的優先權等級，依照貨品生產的即時狀況動態調整貨品傳送優先權及機台傳送指令的優先權，依機台的閒置風險動態提高貨品傳送指令的優先權，並且可在閒置危機解除後立即降低，以免過度佔用傳送資源，因而可達到更好的派工及傳送效果，並可確保在有限傳送設備資源下，可以根據生產線的即時狀況，讓生產線上的貨品或物料能夠於預定的時程規劃內取得傳送資源，以符合最佳化資源分配的生產需求。 To sum up, the adjustment system of the conveyor device and the priority adjustment method of the adjustment system of the present invention adopt dynamic adjustment of the priority level of the transmission instructions, and dynamically adjust the priority of the goods transmission and the priority of the machine transmission instructions according to the real-time status of the production of goods. The priority of goods delivery instructions is dynamically increased according to the idle risk of the machine, and can be lowered immediately after the idle crisis is resolved to avoid excessive occupation of transmission resources, thus achieving better dispatch and delivery effects, and ensuring that within a limited time Under the transmission equipment resources, according to the real-time status of the production line, the goods or materials on the production line can obtain transmission resources within the predetermined schedule to meet the production needs of optimal resource allocation.

雖然本發明已以實施例揭露如上，然其並非用以限定本發明，任何所屬技術領域中具有通常知識者，在不脫離本發明的精神和範圍內，當可作些許的更動與潤飾，故本發明的保護範圍當視後附的申請專利範圍所界定者為準。 Although the present invention has been disclosed above through embodiments, it is not intended to limit the scope of the present invention. Any person with ordinary knowledge in the technical field may make slight changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of protection of the invention shall be deemed to be defined by the appended patent application scope. Accurate.

100:傳送裝置 100:Transmission device

102:製造系統 102:Manufacturing Systems

104:調整系統 104:Adjust the system

106:監控系統 106:Monitoring system

Claims

一種傳送裝置，包括：製造系統，管理一製程機台的生產流程；調整系統，耦接該製造系統，根據該製程機台的即時生產狀況以及貨品的即時生產狀況的其中至少一者調整傳送指令的優先權；以及監控系統，耦接該調整系統及該製造系統，該監控系統根據該製程機台的該即時生產狀況預估該製程機台的運行狀況，其中該監控系統監測已派工但並未傳送到該製程機台的貨品狀況，並藉由該調整系統動態調整該傳送指令的該優先權。 A transmission device, including: a manufacturing system that manages the production process of a process machine; an adjustment system that is coupled to the manufacturing system and adjusts transmission instructions according to at least one of the real-time production status of the process machine and the real-time production status of the goods. priority; and a monitoring system coupled to the adjustment system and the manufacturing system. The monitoring system estimates the operating status of the process machine based on the real-time production status of the process machine. The monitoring system monitors the dispatched work but The status of the goods that have not been sent to the process machine is dynamically adjusted through the adjustment system, and the priority of the transfer instruction is dynamically adjusted.

如請求項1所述的傳送裝置，其中該監控系統監測已派工但仍在等待傳送到該製程機台的貨品狀況，並藉由該調整系統動態調整該傳送指令的該優先權。 The transmission device of claim 1, wherein the monitoring system monitors the status of goods that have been dispatched but are still waiting to be transmitted to the process machine, and dynamically adjusts the priority of the transmission instruction through the adjustment system.

如請求項1所述的傳送裝置，其中該監控系統監測已派工且正傳送到該製程機台的貨品狀況，並藉由該調整系統動態調整該傳送指令的該優先權。 The transmission device of claim 1, wherein the monitoring system monitors the status of goods that have been dispatched and are being transmitted to the process machine, and dynamically adjusts the priority of the transmission instruction through the adjustment system.

如請求項1所述的傳送裝置，其中該傳送指令的該優先權根據貨品等級進行分類。 The transmission device of claim 1, wherein the priority of the transmission instruction is classified according to the grade of goods.

如請求項1所述的傳送裝置，其中當多個貨品具有相同優先權的傳送指令時，以先進先出的方式調整優先權。 The transmission device as claimed in claim 1, wherein when multiple goods have transmission instructions with the same priority, the priorities are adjusted in a first-in, first-out manner.

如請求項1所述的傳送裝置，其中該製程機台的即時生產狀況包括在製品資訊、機台上待生產的貨品數量、貨品的目標生產量以及機台生產貨品的時間的至少其中一者或其組合。 The conveyor device as described in claim 1, wherein the real-time production status of the process machine includes at least one of work-in-progress information, the number of goods to be produced on the machine, the target production volume of the goods, and the time the machine produces the goods. or combination thereof.

如請求項1所述的傳送裝置，其中該調整系統依據該製程機台的等級，對該製程機台的來源及目的地設定該傳送指令的該優先權。 The transmission device of claim 1, wherein the adjustment system sets the priority of the transmission instruction for the source and destination of the process tool based on the level of the process tool.

如請求項1所述的傳送裝置，其中該調整系統依據該製程機台閒置危機的等級，動態提高該製程機台所對應的貨品的傳送指令的優先權。 The transmission device as claimed in claim 1, wherein the adjustment system dynamically increases the priority of the transmission instructions of the goods corresponding to the process machine based on the idle crisis level of the process machine.

如請求項1所述的傳送裝置，其中該調整系統在該製程機台的閒置危機解除後，立即將降低該製程機台所對應的貨品的傳送指令的優先權。 The transmission device as described in claim 1, wherein the adjustment system will immediately reduce the priority of the transmission instructions of the goods corresponding to the processing machine after the idle crisis of the processing machine is resolved.

一種傳送裝置的調整方法，包括：取得製程機台的資訊；判斷該製程機台的傳送模式；取得已派工的貨品，並根據該已派工的貨品的預約時間進行排序；評估該已派工的貨品的優先權；取得該已派工的貨品的即時生產狀況；根據該即時生產狀態計算該優先權；根據該製程機台的即時生產狀況預估該製程機台的運行狀況；以及根據該製程機台的即時生產狀況以及該已派工的貨品的即時生產狀況的其中至少一者調整傳送指令的優先權。 A method for adjusting a conveyor device, including: obtaining information about a process machine; judging the conveyor mode of the process machine; obtaining dispatched goods, and sorting them according to the reservation time of the dispatched goods; and evaluating the dispatched goods. the priority of the goods being processed; obtain the real-time production status of the dispatched goods; calculate the priority based on the real-time production status; estimate the operating status of the process machine based on the real-time production status of the process machine; and The priority of transmitting instructions is adjusted according to at least one of the real-time production status of the process machine and the real-time production status of the dispatched goods.

如請求項10所述的方法，還包括：針對已派工但未傳送到該製程機台的貨品、已派工且等待傳送到該製程機台的貨品以及已派工且正傳送至該製程機台的貨品的其中至少一者或其組合計算該已派工的貨品的優先權。 The method described in claim 10 also includes: targeting goods that have been dispatched but not transferred to the process machine, goods that have been dispatched and are waiting to be transferred to the process machine, and goods that have been dispatched and are being transferred to the process At least one or a combination of the goods on the machine calculates the priority of the dispatched goods.

如請求項10所述的方法，還包括：根據該製程機台的即時狀況對該製程機台進行優先權評估；取得該製程機台的資訊；以及根據該製程機台的即時生產狀況所做出的優先權評估結果進行該製程機台的優先權計算。 The method described in claim 10 further includes: conducting a priority evaluation of the process machine based on the real-time status of the process machine; obtaining information about the process machine; and making an evaluation based on the real-time production status of the process machine. Based on the priority evaluation results, the priority of the process machine is calculated.

如請求項10所述的方法，還包括：監測已派工但並未傳送到該製程機台的貨品狀況，並藉由該調整系統動態調整該傳送指令的該優先權。 The method described in claim 10 further includes: monitoring the status of goods that have been dispatched but have not been sent to the process machine, and dynamically adjust the priority of the transfer instruction through the adjustment system.

如請求項10所述的方法，還包括：監測已派工但仍在等待傳送到該製程機台的貨品狀況，並藉由該調整系統動態調整該傳送指令的該優先權。 The method described in claim 10 further includes: monitoring the status of goods that have been dispatched but are still waiting to be transferred to the process machine, and dynamically adjust the priority of the transfer instruction through the adjustment system.

如請求項10所述的方法，還包括：監測已派工且正傳送到該製程機台的貨品狀況，並藉由該調整系統動態調整該傳送指令的該優先權。 The method described in claim 10 further includes: monitoring the status of goods that have been dispatched and are being transferred to the process machine, and dynamically adjust the priority of the transfer instruction through the adjustment system.

如請求項10所述的方法，其中該傳送指令的該優先權根據貨品等級進行分類。 The method of claim 10, wherein the priority of the transmission instruction is classified according to the grade of goods.

如請求項10所述的方法，其中當多個貨品具有相同優先權的傳送指令時，以先進先出的方式調整優先權。 The method of claim 10, wherein when multiple goods have transmission instructions with the same priority, the priorities are adjusted in a first-in, first-out manner.

如請求項10所述的方法，還包括：依據該製程機台閒置危機的等級，動態提高該製程機台所對應的貨品的傳送指令的優先權。 The method described in claim 10 further includes: dynamically increasing the priority of the transmission instructions of the goods corresponding to the process machine according to the idle crisis level of the process machine.

如請求項10所述的方法，還包括：在該製程機台的閒置危機解除後，立即將降低該製程機台所對應的貨品的傳送指令的優先權。 The method described in claim 10 further includes: immediately reducing the priority of the transmission instructions of the goods corresponding to the process machine after the idle crisis of the process machine is resolved.