TWI832872B - 深冷空氣分離裝置 - Google Patents

深冷空氣分離裝置 Download PDF

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Publication number
TWI832872B
TWI832872B TW108123353A TW108123353A TWI832872B TW I832872 B TWI832872 B TW I832872B TW 108123353 A TW108123353 A TW 108123353A TW 108123353 A TW108123353 A TW 108123353A TW I832872 B TWI832872 B TW I832872B
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Taiwan
Prior art keywords
tower
nitrogen
rectification
oxygen
gas
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TW108123353A
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English (en)
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TW202037865A (zh
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廣瀬献児
富田伸二
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法商液態空氣喬治斯克勞帝方法研究開發股份有限公司
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04254—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using the cold stored in external cryogenic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006—Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04048—Providing pressurised feed air or process streams within or from the air fractionation unit by compression of cold gaseous streams, e.g. intermediate or oxygen enriched (waste) streams
    • F25J3/0406—Providing pressurised feed air or process streams within or from the air fractionation unit by compression of cold gaseous streams, e.g. intermediate or oxygen enriched (waste) streams of nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006—Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04109—Arrangements of compressors and /or their drivers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
    • F25J3/04309—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams of nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
    • F25J3/04309—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams of nitrogen
    • F25J3/04315—Lowest pressure or impure nitrogen, so-called waste nitrogen expansion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
    • F25J3/04321—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams of oxygen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04333—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams
    • F25J3/04351—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams of nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04406—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system
    • F25J3/04412—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system in a classical double column flowsheet, i.e. with thermal coupling by a main reboiler-condenser in the bottom of low pressure respectively top of high pressure column
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04406—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system
    • F25J3/0443—A main column system not otherwise provided, e.g. a modified double column flowsheet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04436—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using at least a triple pressure main column system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04642—Recovering noble gases from air
    • F25J3/04648—Recovering noble gases from air argon
    • F25J3/04654—Producing crude argon in a crude argon column
    • F25J3/04666—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system
    • F25J3/04672—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system having a top condenser
    • F25J3/04678—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system having a top condenser cooled by oxygen enriched liquid from high pressure column bottoms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04642—Recovering noble gases from air
    • F25J3/04648—Recovering noble gases from air argon
    • F25J3/04654—Producing crude argon in a crude argon column
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
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    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04642—Recovering noble gases from air
    • F25J3/04648—Recovering noble gases from air argon
    • F25J3/04654—Producing crude argon in a crude argon column
    • F25J3/04709—Producing crude argon in a crude argon column as an auxiliary column system in at least a dual pressure main column system
    • F25J3/04715—The auxiliary column system simultaneously produces oxygen
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
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    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04763—Start-up or control of the process; Details of the apparatus used
    • F25J3/04866—Construction and layout of air fractionation equipments, e.g. valves, machines
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04763—Start-up or control of the process; Details of the apparatus used
    • F25J3/04866—Construction and layout of air fractionation equipments, e.g. valves, machines
    • F25J3/04872—Vertical layout of cold equipments within in the cold box, e.g. columns, heat exchangers etc.
    • F25J3/04878—Side by side arrangement of multiple vessels in a main column system, wherein the vessels are normally mounted one upon the other or forming different sections of the same column
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    • F25J5/00—Arrangements of cold exchangers or cold accumulators in separation or liquefaction plants
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/04—Processes or apparatus using separation by rectification in a dual pressure main column system
    • F25J2200/06—Processes or apparatus using separation by rectification in a dual pressure main column system in a classical double column flow-sheet, i.e. with thermal coupling by a main reboiler-condenser in the bottom of low pressure respectively top of high pressure column
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
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    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/20—Processes or apparatus using separation by rectification in an elevated pressure multiple column system wherein the lowest pressure column is at a pressure well above the minimum pressure needed to overcome pressure drop to reject the products to atmosphere
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/34—Processes or apparatus using separation by rectification using a side column fed by a stream from the low pressure column
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
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    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/50—Processes or apparatus using separation by rectification using multiple (re-)boiler-condensers at different heights of the column
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Abstract

本發明之目的為提供一種可以高回收率來回收氮、氬及高純度氧之深冷空氣分離裝置。深冷空氣分離裝置具備：熱交換器1、第一精餾塔2、第一冷凝器3、第二精餾塔5、第三精餾塔6、第二冷凝器7、高純度氧精餾塔8、第三冷凝器4、氮壓縮機10、以及用以將經氮壓縮機10所壓縮之製品氮氣作為壓縮再循環氣體而導入至超高純度氧蒸發器9之溫端(熱源)的壓縮再循環氣體管線L52。

Description

深冷空氣分離裝置
本發明係關於一種製造氮、氬及高純度氧之深冷空氣分離裝置。
在如相關半導體產業中需要不包含烴等高沸點成分之高純度氧。為了製造該高純度氧，例如專利文獻1所揭示般，存在深冷空氣分離裝置，其包含製造氮、氧、氬之中壓塔、低壓塔、粗氬塔之3個精餾塔。專利文獻1中，記載有將中壓氮氣作為再沸源，將從粗氬塔之中間獲得之已去除高沸點成分之富氧液進行濃縮之方法。除了中壓氮氣之外，如例如專利文獻2所揭示，亦記載有將原料空氣或從中壓塔之底部獲得之富氧液作為再沸源而獲得高純度氧之方法。
[現有技術文獻]
[專利文獻]
[專利文獻1]美國專利公報第5049173號公報
[專利文獻2]美國專利公報第5934104號公報
然而，若如現有技術般，為了將高純度氧進行再沸而使用中壓氮氣，則供給至低壓塔底部之中壓氮氣相應地減少。此導致低壓塔中之蒸氣流減 少，尤其使難以分離之氬之回收顯著減少。
空氣成分中，氬相對於氧、氮不過僅占物質量比1%，因此一般於深冷空氣分離裝置之設計中，以作為製品氧或製品氮之副產物而製造氬之方式來規劃是較為經濟的。但，若如上所述，為了高純度氧之回收而犧牲氬回收，則容易產生根據氬需要量來設計深冷空氣分離裝置之必要性，結果存在導致經濟性效率低之可能性。
將原料空氣用於高純度氧之再沸源之方法中，存在對中壓塔之原料空氣供給減少，氮之回收量減少之問題。
又，將從中壓塔底部供給之富氧液作為再沸源之方法中，僅能夠使用與富氧液和高純度氧之溫度差相當之有限顯熱(sensible heat)，因此僅能夠回收少量之高純度氧。
鑒於上述實際情況，本發明之目的為提供一種可以高回收率來回收氮、氬及高純度氧之深冷空氣分離裝置。
本發明之深冷空氣分離裝置具備：熱交換器(1)，其將原料空氣(Feed air)進行熱交換；第一精餾塔(中壓塔)(2)，其係導入通過上述熱交換器(1)之原料空氣者，其包括：積存富氧液之第一塔底部(21)、將上述原料空氣進行精餾之第一精餾部(22)、以及配置於上述第一精餾部(22)之上部且積存第一蒸發氣體之第一塔頂部(23)；第一冷凝器(氮冷凝器)(3)，其配置於上述第一塔頂部(23)之上方，且將上述第一塔頂部(23)之第一蒸發氣體進行冷凝；第二精餾塔(5)，其包括：第二塔底部(31)、第二精餾部(50)、及導出(可成為製品之)第一氮氣之第二塔頂部(54)； 第三精餾塔(6)，其係用以將氬進行精餾之第三精餾塔(粗氬塔)(6)，其包括：導入從上述第二精餾塔(5)之第二精餾部50之第二精餾部中間段(51)導出之粗氬原料氣體的第三塔底部(61)、將上述粗氬原料氣體進行精餾之第三精餾部(62)、以及積存氬之第三塔頂部(63)；第二冷凝器(粗氬冷凝器)(7)，其配置於上述第三塔頂部(63)之上方，且將上述第三塔頂部(63)之氬進行冷凝；高純度氧精餾塔(8)，其係用以將高純度氧進行精餾者，其包括：將高純度氧蒸發器(9)配置於其下方之高純度氧塔底部(81)、導入從上述第三精餾塔(6)之第三精餾部(62)之中間部導出之富氧液(中間部導出液)的高純度氧精餾部(82)、以及為了返往上述第三精餾塔(6)之第三精餾部(62)之中間部而導出氧蒸發氣體之高純度氧塔頂部(83)；第三冷凝器(高純度氧冷凝器)(4)，其配置於上述高純度氧塔頂部(83)之上方，且將上述高純度氧塔頂部(83)之氧蒸發氣體作為熱源；第一氮壓縮機(10)，其使從上述第三冷凝器(4)之上方(41)導出之(可成為製品之)第二氮氣、從上述第二精餾塔(5)之第二塔頂部(54)導出之(可成為製品之)第一氮氣經過上述熱交換器(1)後進行壓縮；以及壓縮再循環氣體管線(L52)，其用以將經上述第一氮壓縮機(10)所壓縮之製品氮氣作為壓縮再循環氣體，而導入至上述高純度氧蒸發器(9)之溫端(熱源)。
上述深冷空氣分離裝置亦可具備：氧導出管線(L3)，其用以從上述第二塔底部(31)導出而通過上述熱交換器(1)，取出(可成為製品之)氧；氬氣導出管線(L63)，其用以從上述第三塔頂部(63)中取出(可成為製品之)氬(氣體狀及/或液狀)； 含氬液導出管線(L61)，其用以將從上述第三塔底部(61)導出之含氬液導入至上述第二精餾塔(5)之第二精餾部中間段(51)；第二冷凝器蒸發氣體導入管線(L71)，其用以將從上述第二冷凝器(7)之上方(71)導出之第二冷凝器蒸發氣體導入至上述第二精餾部中間段(52)；高純度液態氧導出管線(L81)，其用以從上述高純度氧塔底部(81)取出(成為製品之)高純度液態氧；第一循環管線(L521)，其用以將從上述高純度氧蒸發器(9)之熱源導出的至少一部分經液化之壓縮再循環氣體，導入至上述第三冷凝器(4)之上方(41)；以及第二循環管線(L522)，其用以將從上述高純度氧蒸發器(9)之熱源導出的至少一部分經液化之壓縮再循環氣體，導入至上述第二精餾塔(低壓塔)(5)之上述第二塔頂部(54)。
上述深冷空氣分離裝置亦可具備：第一製品氮氣管線(L5)，其用以將從上述第二精餾塔(5)之第二塔頂部(54)導出之第一氮氣導入至上述熱交換器(1)中；以及第二製品氮氣管線(L84)，其用以將從上述第三冷凝器(4)之上方(41)導出之第二氮氣導入至熱交換器(1)中。
經第一氮壓縮機(10)所壓縮之壓縮氮氣亦可通過製品氮回收管線(L51)而取出。
上述深冷空氣分離裝置亦可具備：第二氮壓縮機(11)，其將藉由上述第二製品氮氣管線(L84)而通過上述熱交換器(1)之第二氮氣進行壓縮；並且將經上述第二氮壓縮機(11)所壓縮而獲得之壓縮再循環氣體，通過壓縮再循環氣體管線(L52)而導入至上述高純度氧蒸發器(9)之溫端(熱源)。
依據上述構成，從第三精餾塔(粗氬塔)(6)之中間部(精餾部62)中，已去除烴等較氧而言高沸點之成分之富氧液供給至高純度氧精餾塔(8)中以進行精餾，並從高純度氧塔底部(81)回收超高純度氧(UPOX)。作為用以將超高純度氧進行精餾之超高純度氧蒸發器(9)之再沸源，從熱交換器(1)之溫端回收之氮氣(第一氮氣及/或第二氮氣)係由第一氮壓縮機(10)或者第二氮壓縮機(11)進行升壓而供給。
又，藉由將經超高純度氧蒸發器(9)所冷凝之液態氮之至少一部分供給至第二精餾塔(低壓塔)(5)之第二塔頂部(54)中，可增加第二精餾塔(低壓塔)(5)之回流液，可使從第二塔頂部(54)回收之第一氮氣增量。
又，藉由將經超高純度氧蒸發器(9)所冷凝之液態氮之至少一部分，作為位於高純度氧精餾塔(8)之高純度氧塔頂部(83)中之第三冷凝器(高純度氧冷凝器)(4)之寒冷源而供給，將從第三冷凝器(4)之上方(41)導出之第二氮氣經過熱交換器(1)而供給至氮壓縮機(10)中，可改善高純度氧精餾塔(8)及第三精餾塔(粗氬塔)(6)之精餾，從而改善氬及超高純度氧之回收。
又，第二氮氣由於可以高於第一氮氣之壓力而從第三冷凝器之上方導出，故而若經過熱交換器(1)而供給至第二氮壓縮機(11)中，則可以低於第一氮壓縮機(10)之壓縮比進行壓縮，可削減與高純度氧精餾有關之氮壓縮動力。
上述深冷空氣分離裝置中，就將導入至高純度氧精餾塔(8)中之富氧液(中間部導出液)導出之方面而言，上述第三精餾塔(粗氬塔)(6)亦可分割為上部粗氬塔(620)及下部粗氬塔(610)。
上述上部粗氬塔(620)可包括塔下部(621)、塔中部(622)、及塔上部(623)，上述下部粗氬塔(610)亦可包括塔下部(611)、塔中部(612)、及塔上部(613)。
上述上部粗氬塔(620)配置於高純度氧精餾塔(8)之上部，高純度氧冷 凝器(4)配置於上部粗氬塔(620)之上部，高純度氧冷凝器(4)亦可將上部粗氬塔(620)之塔上部(623)之蒸發氣體進行冷凝。
藉由該構成，可將粗氬塔(6)與高純度氧精餾塔(8)之連接簡化，可使精餾塔之建造更簡單。
上述深冷空氣分離裝置亦可具備：膨脹渦輪機(24)，其將原料空氣氣體、從第二精餾塔(低壓塔)(5)回收之氮氣、從第一冷凝器(3)之上部(31)導出之氧氣、從第一精餾塔、第二精餾塔、第三精餾塔中之任一精餾塔排出之廢氣、包含該等氣體中之2種以上之混合氣體、由第一氮壓縮機(10)及/或第二氮壓縮機(11)進行升壓之氮氣中的至少1種以上之氣體膨脹。
利用該構成，於膨脹渦輪機中膨脹，產生寒冷，藉此可一面使用製程氣體一面維持裝置之寒冷平衡。
上述深冷空氣分離裝置亦可具備：供給管線(L9)，其用以將液態氮作為寒冷源而供給至第一精餾塔(中壓塔)(2)或者第二精餾塔(低壓塔)(5)中。
供給管線(L9)亦可於第一精餾塔(中壓塔)(2)之第一塔頂部(23)或者第二精餾塔(低壓塔)(5)之第二塔頂部(54)中供給液態氮。
藉由該構成，於欲以液體形式來大量回收製品之情形時，於未設置膨脹渦輪機9之構成、或膨脹渦輪機9產生故障之情形時，亦可維持深冷空氣分離裝置之寒冷平衡。
依據本發明，可以高產率來回收氮、氬及高純度氧。
1:熱交換器
2:第一精餾塔
3:第一冷凝器
4:第三冷凝器
5:第二精餾塔
6:第三精餾塔
7:第二冷凝器
8:高純度氧精餾塔
9:超高純度氧蒸發器
10:第一氮壓縮機
11:第二氮壓縮機
21:第一塔底部
22:第一精餾部
23:第一塔頂部
31:第二塔底部
41:第三冷凝器4之上方
50:第二精餾部
51、52、53:第二精餾部中間段
54:第二塔頂部
61:第三塔底部
62:第三精餾部
63:第三塔頂部
71:第二冷凝器7之上方
81:高純度氧塔底部
82:高純度氧精餾部
83:高純度氧塔頂部
100:深冷空氣分離裝置
L1:原料空氣導入管線
L2:主管線
L21:第一分支管線
L22:第二分支管線
L23:第一蒸發氣體導入管線
L3:氧導出管線
L31:中間部導出管線
L5:第一製品氮氣管線
L51:製品氮回收管線
L52:壓縮再循環氣體管線
L521:第一循環管線
L522:第二循環管線
L61:含氬液導出管線
L62:中間部導出管線
L63:氬氣導出管線
L631:分支循環管線
L71:第二冷凝器蒸發氣體導入管線
L81:高純度液態氧導出管線
L82:氧蒸發氣體導出管線
L83:循環管線
L84:第二製品氮氣管線
圖1係表示實施方式1之高純度氧及氮製造系統之圖。
圖2係表示實施方式1之變形例之圖。
圖3係表示實施方式2之高純度氧及氮製造系統之圖。
圖4係表示實施方式3之高純度氧及氮製造系統之圖。
圖5係表示實施方式4之高純度氧及氮製造系統之圖。
以下對本發明之若干實施方式進行說明。以下所說明之實施方式係對本發明之一例進行說明者。本發明不受以下實施方式之任何限定，亦包含於不變更本發明要旨之範圍內實施之各種變形形態。此外，以下所說明之構成並非全部為本發明之必需構成。
(實施方式1)
使用圖1，對實施方式1之深冷空氣分離裝置進行說明。
深冷空氣分離裝置100具備熱交換器1、第一精餾塔(中壓塔)2、第二精餾塔(低壓塔)5、第三精餾塔(粗氬塔)6、高純度氧精餾塔8等作為基本構成。
原料空氣(Feed air)經由原料空氣導入管線L1，通過熱交換器1而供給至第一精餾塔(中壓塔)2之第一塔底部21(或者第一精餾部22)。
第一精餾塔2包括：積存富氧液之第一塔底部21、將原料空氣進行精餾之第一精餾部22、以及配置於第一精餾部22之上部且積存第一蒸發氣體之第一塔頂部23。
第一冷凝器(氮冷凝器)3配置於第一塔頂部23之上方。第一冷凝器3將第一塔頂部23之第一蒸發氣體進行冷凝。
第二精餾塔5配置於第一冷凝器3之上方。第二精餾塔5包括：第 二精餾部50(第二精餾部中間段51、52、53)、以及導出(可成為製品之)第一氮氣之第二塔頂部54。
第三精餾塔6將氬進行精餾。第三精餾塔6包括：導入從第二精餾塔5之第二精餾部50之第二精餾部中間段51(較佳為較第二精餾部50之中央位置而言之下段)導出之粗氬原料氣體的第三塔底部61、將粗氬原料氣體進行精餾之第三精餾部62、以及積存氬(氣體狀及/或液狀)之第三塔頂部63。
第二冷凝器7配置於第三塔頂部63之上方。第二冷凝器7將第三塔頂部63之氬(氣體狀及/或液狀)進行冷凝。
高純度氧精餾塔8將超高純度氧進行精餾。高純度氧精餾塔8包括：將高純度氧蒸發器9配置於其下方之高純度氧塔底部81、導入從第三精餾塔6之第三精餾部62之中間部導出之富氧液(中間部導出液)的高純度氧精餾部82、以及為了返往第三精餾塔6之第三精餾部62之中間部而導出氧蒸發氣體之高純度氧塔頂部83。
第三冷凝器4配置於高純度氧塔頂部83之上方。第三冷凝器4將高純度氧塔頂部83之氧蒸發氣體用於熱源。
第一氮壓縮機10將從第三冷凝器4之上方41導出之第二氮氣、從第二精餾塔5之第二塔頂部54導出之第一氮氣經過熱交換器1後進行壓縮。
第一富氧液導入管線(主管線L2、第一分支管線L21)係用以將從第一精餾塔2之第一塔底部21導出之富氧液導入至第二精餾部50之第二精餾部中間段52(較佳為較第二精餾部50之中央位置而言之上段)中之管線。
第二富氧液導入管線(主管線L2、第二分支管線L22)係用以將從第一精餾塔2之第一塔底部21導出之富氧液導入至第二冷凝器7中之管線。
第一蒸發氣體導入管線L23係用以將從第一精餾塔2之第一塔頂部23導出之第一蒸發氣體，導入至第二精餾塔5之第二塔頂部54中之管線。
通過從第一蒸發氣體導入管線L23上分支之分支管線L23，第一蒸發氣體之一部分作為第一冷凝器3之熱源導入，放熱而冷卻，返往至第一塔頂部23中。
氧導出管線L3係用以使從第二精餾塔5之第二塔底部31導出之氧(氣體狀及/或液狀)通過熱交換器1，而取出(作為製品或廢氣之)氧之管線。
中間部導出管線L31係用以將從第二精餾部50之第二精餾部中間段52(較佳為較第二精餾部50之中央位置而言之下段)導出之粗氬原料氣體導入至第三精餾塔6之第三塔底部61中之管線。
第一製品氮氣管線L5係用以將從第二精餾塔5之第二塔頂部54導出之第一氮氣導入至熱交換器1中之管線。經第一氮壓縮機10所壓縮之壓縮氮氣係通過製品氮回收管線L51而取出。
壓縮再循環氣體管線L52將經第一氮壓縮機10所壓縮之製品氮氣作為壓縮再循環氣體而導入至超高純度氧蒸發器9之溫端(熱源)。
第一循環管線L521係從壓縮再循環氣體管線L52上分支，將從超高純度氧蒸發器9之熱源導出之壓縮再循環氣體導入至第三冷凝器4之上方41之管線。
第二循環管線L522係從壓縮再循環氣體管線L52上分支，將從超高純度氧蒸發器9之熱源導出之壓縮再循環氣體導入至第二精餾塔5之第二塔頂部54中之管線。
含氬液導出管線L61係用以將從第三塔底部61導出之含氬液導入至第二精餾塔5之第二精餾部50之第二精餾部中間段51(較佳為較第二精餾部50之中央位置而言之下段)中之管線。
中間部導出管線L62係用以將從第三精餾部62之中間部(較佳為較第三精餾部62之中央位置而言之下段)導出之富氧液(中間部導出液)，導入至高純度氧精餾部82之中間部(較佳為較高純度氧精餾部82之中央位置而言之下段)中之管線。
氬氣導出管線L63係用以從第三塔頂部63中取出氬(氣體狀及/或液狀)之管線。
氬(氣體狀及/或液狀)，通過從氬氣導出管線L63上分支之分支循環管線L631，並作為第二冷凝器7之熱源而導入，放熱而冷卻並液化，返往至第三塔頂部63中。
第二冷凝器蒸發氣體導入管線L71係用以將從第二冷凝器7之上方71導出之第二冷凝器蒸發氣體，導入至第二精餾部50之第二精餾部中間段52(較佳為較第二精餾部50之中央位置而言之上段)中之管線。
高純度液態氧導出管線L81係用以從高純度氧塔底部81中取出高純度液態氧之管線。
氧蒸發氣體導出管線L82係用以將從高純度氧塔頂部83導出之氧蒸發氣體，輸送至第三精餾塔6之精餾部62之中間部導出管線L62之較導出位置而言之上段之管線。
從高純度氧塔頂部83導出之氧蒸發氣體係經由循環管線L83，作為第三冷凝器4之熱源而導入，放熱而冷卻並液化，返往至高純度氧塔頂部83中。
第二製品氮氣管線L84係用以將從第三冷凝器4之上方41導出之第二氮氣導入至熱交換器1中之管線。
如圖1所示，第二製品氮氣管線L84於到達熱交換器1之前，向第一製品氮氣管線L5合流。第一製品氮氣管線L5到達熱交換器1，合流後之第一氮氣及第二氮氣係由第一氮壓縮機10進行壓縮。此外，作為其他實施方式，第二製品氮氣管線L84於通過熱交換器1之後向第一製品氮氣管線L5合流，合流後之第一氮氣及第二氮氣亦可由第一氮壓縮機10進行壓縮。
(實施方式1之變形例)
圖2中示出實施方式1之變形例。
深冷空氣分離裝置200中，第二製品氮氣管線L84不與第一製品氮氣管線L5合流，而是經過熱交換器1而到達第二氮壓縮機11。
於第二氮壓縮機11中，第二氮氣(再循環氮氣)進行壓縮。經壓縮之再循環氮氣係與經第一氮壓縮機10所壓縮之製品氮氣之一部分合流，經由壓縮再循環氣體管線L52而導入至超高純度氧蒸發器9之熱源。此外，亦可將經第一氮壓縮機10所壓縮之製品氮氣不輸送至壓縮再循環氣體管線L52中，而直接作為製品氮來回收，即，亦可僅第二氮氣為再循環氮氣之供給源。
(實施方式2)
使用圖3，對實施方式2之深冷空氣分離裝置進行說明。對與實施方式1之圖1不同之構成進行說明，對於相同之構成省略或簡化說明。
就將導入高純度氧精餾塔8中之富氧液(中間部導出液)導出之方面而言，深冷空氣分離裝置300之第三精餾塔6分割為上部粗氬塔620及下部粗氬塔610。
上部粗氬塔620包括塔下部621、塔中部622、及塔上部623。
下部粗氬塔610包括塔下部611、塔中部612、及塔上部613。
上部粗氬塔620配置於高純度氧精餾塔8之上部。
高純度氧冷凝器4配置於上部粗氬塔620之上部。高純度氧冷凝器4將上部粗氬塔620之塔上部623之蒸發氣體進行冷凝。
氬(氣體狀及/或液狀)經由氬氣導出管線L63而從塔上部623導出。又，通過從氬氣導出管線L63上分支之第一分支管線L631，氬(氣體狀及/或液狀)之一部分作為第二冷凝器7之熱源導入，放熱而冷卻並液化返往至塔上部623。又，通過從氬氣導出管線L63上分支之第二分支管線L632，氬(氣體狀及/或液狀)之一部分作為高純度氧冷凝器4之熱源導入，放熱而冷卻並液化，返往至塔上部623。
第二冷凝器7之設置場所並無特別限制，較佳為設置於第一精餾塔2、第二 精餾塔5、及上部粗氬塔620之附近。
高純度氧冷凝器4配置於上部粗氬塔620之上部，但第二冷凝器7亦可配置於上部粗氬塔620之上部。亦可於高純度氧冷凝器4之上部配置第二冷凝器7，亦可為其相反配置。
實施方式2以及其他實施方式中，「上部」及「下部」中，係並不限定於垂直方向，而亦包含傾斜方向之概念。
(實施方式3)
使用圖4，對實施方式3之深冷空氣分離裝置進行說明。對與實施方式2(圖3)不同之構成進行說明，對於相同之構成省略或簡化說明。
深冷空氣分離裝置400具備膨脹渦輪機24，其將原料空氣氣體、從第二精餾塔5回收之氮氣、從第一冷凝器3之上部31導出之氧氣、從第一精餾塔、第二精餾塔、第三精餾塔中之任一精餾塔排出之廢氣、包含該等氣體中之2種以上之混合氣體、經第一氮壓縮機10所升壓之氮氣中的至少1種以上之氣體膨脹。
圖3之一例中，從第二精餾塔5之第二塔底部31導出之氧(氣體狀及/或液狀)經由第一排出管線L33而經過熱交換器1，從熱交換器1之中間部導出而輸送至膨脹渦輪機24中。氧氣於膨脹渦輪機24中膨脹，通過熱交換器1而作為廢氣(氧氣)來回收。
此外，圖3中，第二排出管線L32合流於第一排出管線L33中，但並不限定於此。
(實施方式4)
使用圖5，對實施方式4之深冷空氣分離裝置進行說明。對與實施方式3(圖4)不同之構成進行說明，對於相同之構成省略或簡化說明。
深冷空氣分離裝置500具備供給管線L9，其用以將液態氮作為寒冷源而供給至第一精餾塔2或第二精餾塔5中。
圖5中，供給管線L9向第二精餾塔5之第二塔頂部54中供給液態氮。
(實施例)
對上述實施方式1(圖1)之深冷空氣分離裝置100進行更具體之說明。
原料空氣係以5.8barA、20℃、1014Nm3/h而從熱交換器1之溫端供給。原料空氣冷卻至-172℃後供給至第一精餾塔2之第一塔底部21。中壓塔2之運轉壓為5.7barA，理論板數(number of theoretical plates)為50。
於第一精餾塔2中，原料空氣進行精餾，氮於第一塔頂部23中濃縮，富氧液從第一塔底部21回收。
氮從第一塔頂部23中供給至氮冷凝器3中，冷凝為液態氮而返送至第一塔頂部23。
經冷凝之液態氮之一部分供給至第二精餾塔5之第二塔頂部54。
從第一塔底部21導出之富氧液之至少一部分作為寒冷源而供給至粗氬冷凝器7中，殘留之富氧液供給至第二精餾塔5之第二精餾部中間段52。
第二精餾塔5係以1.45barA而運轉，理論板數為80。從第二塔頂部54回收氮氣，供給至熱交換器1之冷端而釋放出寒冷後，從溫端回收。
從第二精餾塔5之第二塔底部31回收氧。氧可以液體狀態來回收，亦可以氣體狀態導出，通過熱交換器1而釋放出寒冷後，作為氧氣來回收。
於第二精餾塔5之底部配置氮冷凝器3，液態氧藉由與中壓氮之熱交換而蒸發，藉此向第二精餾塔5中供給蒸氣流。
從第二精餾塔5之第二精餾部50導出粗氬原料氣體，供給至第三塔底部61中，進行精餾。第三精餾塔6係以1.4barA而運轉，理論板數為160。於塔之上部配置粗氬冷凝器7。從第三塔頂部63中以8.3Nm3/h來回收粗氬液。
從粗氬塔6之中間部62導出高純度氧進料液，供給至高純度氧精餾塔8之中間部或者塔頂部，進行精餾後，以7.3Nm3/h來回收超高純度氧液。高純度氧精 餾塔8之運轉壓為1.4barA，理論板數為80。
於高純度氧精餾塔8之高純度氧塔底部81中配置超高純度氧蒸發器9，以對高純度氧精餾塔8供給蒸氣流之方式來構成。於高純度氧精餾塔8之高純度氧塔頂部83中配置高純度氧冷凝器4，以對高純度氧精餾塔8供給回流液之方式來構成。
藉由第一氮壓縮機10而升壓至5.8barA之氮係以247Nm3/h而從熱交換器1之溫端供給，冷卻至-176℃後，作為再沸源而供給至超高純度氧蒸發器9中。
經冷凝之液態氮之至少一部分作為寒冷源而供給至超高純度氧冷凝器9中，蒸發後供給至熱交換器1之冷端，釋放出寒冷後從溫端回收。經回收之氮亦可再次於氮壓縮機中升壓。
藉由以上之構成，可於不增加原料空氣之量之情況下供給為了獲得超高純度氧而必需之熱源。如上所述，若從1014Nm3/h之原料空氣中以7.3Nm3/h來回收超高純度氧，則於現有技術中，氬回收率最大僅為4.2Nm3/h，但藉由該構成，可回收約2倍之8.3Nm3/h之氬，可大幅度改善裝置之經濟性。
(優越性評價)
與比較例1進行對比，對相當於實施方式1~3之實施例1~3之優越性進行說明。
比較例1：專利文獻1(美國專利公報第5049173號公報)
實施例1：實施方式1之圖1
實施例2：實施方式1之變形例之圖2
實施例3：實施方式3之圖3
將實施例1與比較例1進行對比。實施例1為了製造超高純度氧，並非如比較例般，將對於製品氬之產率維持而言不可欠缺之中壓氮氣等空氣深冷分離製程流體作為熱源而導入，而是藉由氮壓縮機10來供給用以進行高純度 氧精餾塔8之再沸及冷凝之氮，故而不僅可將製品氬之產率維持為高，而且可製造超高純度氧。如上所述，與現有技術相比可回收約2倍之高純度氧。
將實施例2與實施例1進行對比。
實施例1中，從高純度氧冷凝器4導出之氮氣、與從第二精餾塔之塔頂部54回收之氮氣一併導入至第一氮壓縮機10中。但是，超高純度氧蒸發器9之氮運轉壓未必需要為第一氮壓縮機10之噴出壓力、即製品氮氣壓力。高純度氧冷凝器4之氮運轉壓不必與第一氮壓縮機10之吸入壓力相等。相反，超高純度氧之蒸發或冷凝之各自之最佳氮壓力之比存在小於第一氮壓縮機10之壓縮比之情形，故而藉由為了超高純度氧精餾而應用最佳壓縮比之第二氮壓縮機11，可削減能量消耗。但，與超高純度氧蒸發器9相比，高純度氧冷凝器4所必需之氮量少，因此，經超高純度氧蒸發器9所冷凝之氮之一部分減壓，作為回流液而導入至第二精餾塔5之塔頂部54中，作為氮氣而回收，以第一氮壓縮機10進行壓縮，使其合流於第二氮壓縮機11之噴出管線中，藉此可高效率地維持用以進行高純度氧精餾之氮循環平衡。
一例中，假定低壓氮壓力為1.1barA且經氮壓縮機10所升壓之製品氮壓為5.6barA之情形。當高純度氧精餾塔8之運轉壓設為與第二精餾塔5大致相同之壓力，即1.2barA時，最佳之超高純度氧蒸發器9之氮壓力為5.6barA，高純度氧冷凝器4為2.7barA。將與該超高純度氧之精餾有關之氮以再循環氮壓縮機11進行壓縮之情形時之壓縮比為5.6/2.7=2.1倍，但以氮壓縮比進行壓縮之情形時之比為5.6/1.1=5.1，若應用再循環氮壓縮機11，則可削減約55%之壓縮動力。
將實施例3與實施例1進行對比。
粗氬塔6與高純度氧精餾塔8存在用以將氬與氧分離之功能重複之部分，故而可於同一精餾塔中進行氬與氧之分離。氬與氧之沸點非常接近，分離所需之理論板數變大，因此粗氬塔6與高純度氧精餾塔8存在塔高度變得非常大之傾 向，因此藉由設為將上部粗氬塔620與高純度氧精餾塔8加以組合之同一精餾塔，可利用由高之塔之根數減少所引起之材料削減效果，來削減成本。
實施例3中，供給至粗氬塔底部之含氬氣體由於包含烴等高沸點成分，故而將於下部粗氬塔610中去除該等之氣體供給至上部粗氬塔620。
(其他實施方式)
雖未特別明示，但亦可於各管線中設置壓力調整裝置、流量控制裝置等，來進行壓力調整或者流量調整。
1:熱交換器
2:第一精餾塔
21:第一塔底部
22:第一精餾部
23:第一塔頂部
3:第一冷凝器
31:第二塔底部
4:第三冷凝器
41:第三冷凝器4之上方
5:第二精餾塔
50:第二精餾部
51、52、53:第二精餾部中間段
54:第二塔頂部
6:第三精餾塔
61:第三塔底部
62:第三精餾部
63:第三塔頂部
7:第二冷凝器
71:第二冷凝器7之上方
8:高純度氧精餾塔
81:高純度氧塔底部
82:高純度氧精餾部
83:高純度氧塔頂部
9:超高純度氧蒸發器
10:第一氮壓縮機
100:深冷空氣分離裝置
L1:原料空氣導入管線
L2:主管線
L21:第一分支管線
L22:第二分支管線
L23:第一蒸發氣體導入管線
L3:氧導出管線
L31:中間部導出管線
L5:第一製品氮氣管線
L51:製品氮回收管線
L52:壓縮再循環氣體管線
L521:第一循環管線
L522:第二循環管線
L61:含氬液導出管線
L62:中間部導出管線
L63:氬氣導出管線
L631:分支循環管線
L71:第二冷凝器蒸發氣體導入管線
L81:高純度液態氧導出管線
L82:氧蒸發氣體導出管線
L83:循環管線
L84:第二製品氮氣管線

Claims (10)

  1. 一種深冷空氣分離裝置，其具備：熱交換器(1)，其將原料空氣進行熱交換；第一精餾塔(2)，其導入通過上述熱交換器(1)之原料空氣，其包括：積存富氧液之第一塔底部(21)、將上述原料空氣進行精餾之第一精餾部(22)、及配置於上述第一精餾部(22)之上部且積存第一蒸發氣體之第一塔頂部(23)；第一冷凝器(3)，其配置於上述第一塔頂部(23)之上方，且將上述第一塔頂部(23)之第一蒸發氣體作為熱源；第二精餾塔(5)，其包括第二塔底部(31)、第二精餾部(50)、以及導出第一氮氣之第二塔頂部(54)；第三精餾塔(6)，其係用以將氬進行精餾，包括：導入從上述第二精餾塔(5)之第二精餾部(50)之第二精餾部中間段(51)導出之粗氬原料氣體的第三塔底部(61)、將上述粗氬原料氣體進行精餾之第三精餾部(62)、以及積存氬之第三塔頂部(63)；第二冷凝器(7)，其配置於上述第三塔頂部(63)之上方，且將上述第三塔頂部(63)之氬作為熱源；高純度氧精餾塔(8)，其係用以將超高純度氧進行精餾，包括：將超高純度氧蒸發器(9)配置於其下方之高純度氧塔底部(81)、導入從上述第三精餾塔(6)之第三精餾部(62)之中間部導出之富氧液的高純度氧精餾部(82)、以及為了返往上述第三精餾塔(6)之第三精餾部(62)之中間部而導出氧蒸發氣體之高純度氧塔頂部(83)；第三冷凝器(4)，其配置於上述高純度氧塔頂部(83)之上方，且將上述高純度氧塔頂部(83)之氧蒸發氣體作為熱源；第一氮壓縮機(10)，其使從上述第三冷凝器(4)之上方(41)導出之第 二氮氣、及從上述第二精餾塔(5)之第二塔頂部(54)導出之第一氮氣經過上述熱交換器(1)後進行壓縮；以及壓縮再循環氣體管線(L52)，其用以將經上述第一氮壓縮機(10)所壓縮之製品氮氣作為壓縮再循環氣體，而導入至上述超高純度氧蒸發器(9)之溫端。
  2. 如請求項1所述之深冷空氣分離裝置，其具備：第二氮壓縮機(11)，其將從上述第三冷凝器(4)之上方(41)導出且通過上述熱交換器(1)之第二氮氣進行壓縮。
  3. 如請求項1或2所述之深冷空氣分離裝置，其中就將導入至高純度氧精餾塔(8)中之富氧液導出之方面而言，上述第三精餾塔(6)分割為上部粗氬塔(620)及下部粗氬塔(610)。
  4. 如請求項1所述之深冷空氣分離裝置，其具備：膨脹渦輪機(24)，其使原料空氣氣體、從第二精餾塔(5)回收之氮氣、從第一冷凝器(3)之上部(31)導出之氧氣、從第一精餾塔、第二精餾塔、第三精餾塔中之任一精餾塔排出之廢氣、包含該等氣體中之2種以上之混合氣體、經第一氮壓縮機(10)所升壓之氮氣中的至少1種以上之氣體膨脹。
  5. 如請求項2所述之深冷空氣分離裝置，其具備：膨脹渦輪機(24)，其使原料空氣氣體、從第二精餾塔(5)回收之氮氣、從第一冷凝器(3)之上部(31)導出之氧氣、從第一精餾塔、第二精餾塔、第三精餾塔中之任一精餾塔排出之廢氣、包含該等氣體中之2種以上之混合氣體、經第一氮壓縮機(10)及/或第二氮壓縮機(11)所升壓之氮氣中的至少1種以上之氣體膨脹。
  6. 如請求項2所述之深冷空氣分離裝置，其中就將導入至高純度氧精餾塔(8)中之富氧液導出之方面而言，上述第三精餾塔(6)分割為上部粗氬塔(620)及下部粗氬塔(610)； 上述深冷空氣分離裝置具備：膨脹渦輪機(24)，其使原料空氣氣體、從第二精餾塔(5)回收之氮氣、從第一冷凝器(3)之上部(31)導出之氧氣、從第一精餾塔、第二精餾塔、第三精餾塔中之任一精餾塔排出之廢氣、包含該等氣體中之2種以上之混合氣體、經第一氮壓縮機(10)及/或第二氮壓縮機(11)所升壓之氮氣中的至少1種以上之氣體膨脹。
  7. 如請求項1或2所述之深冷空氣分離裝置，其具備：供給管線(L9)，其用以將液態氮作為寒冷源而供給至第一精餾塔(2)或第二精餾塔(5)中。
  8. 如請求項3所述之深冷空氣分離裝置，其具備：供給管線(L9)，其用以將液態氮作為寒冷源而供給至第一精餾塔(2)或第二精餾塔(5)中。
  9. 如請求項4所述之深冷空氣分離裝置，其具備：供給管線(L9)，其用以將液態氮作為寒冷源而供給至第一精餾塔(2)或第二精餾塔(5)中。
  10. 如請求項6所述之深冷空氣分離裝置，其具備：供給管線(L9)，其用以將液態氮作為寒冷源而供給至第一精餾塔(2)或第二精餾塔(5)中。
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