TWI828194B - Array ultrasonic imaging device and control method thereof - Google Patents

Array ultrasonic imaging device and control method thereof Download PDF

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TWI828194B
TWI828194B TW111122211A TW111122211A TWI828194B TW I828194 B TWI828194 B TW I828194B TW 111122211 A TW111122211 A TW 111122211A TW 111122211 A TW111122211 A TW 111122211A TW I828194 B TWI828194 B TW I828194B
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ultrasonic
scanning
probe
ultrasonic beam
array
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TW202300911A (en
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岸本卓弥
北見薫
神長誠
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日商日立電力解決方案股份有限公司
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/06Visualisation of the interior, e.g. acoustic microscopy
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/26Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G01N29/265Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • G01N29/341Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor with time characteristics
    • G01N29/343Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor with time characteristics pulse waves, e.g. particular sequence of pulses, bursts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/36Detecting the response signal, e.g. electronic circuits specially adapted therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/028Material parameters
    • G01N2291/0289Internal structure, e.g. defects, grain size, texture
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/10Number of transducers
    • G01N2291/102Number of transducers one emitter, one receiver

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
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  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)

Abstract

本發明之目的在於提供一種圖像偏差較少之陣列式超音波影像裝置及其控制方法。 本發明為陣列式超音波影像裝置(1),其係藉由一面進行以特定之掃描順序對被檢體(8)照射超音波光束之電子掃描,一面於垂直於振子之排設方向之方向上往復移動之掃描動作、及與振子之排設方向平行地移動超音波陣列探針之移位動作,使複數個振子直線排設之超音波陣列探針(4)進行平面掃描,且對被檢體之表面或積層邊界面照射超音波光束,顯示來自被檢體之超音波反射波之信號強度者,且以於電子掃描之一端之照射點照射超音波光束,接著於對向之另一端之照射點照射超音波光束,成為自各個端部逐一向中央部交替依序照射超音波光束之掃描順序之方式,選擇複數個振子照射超音波光束而進行電子掃描。 The object of the present invention is to provide an array ultrasonic imaging device with less image deviation and a control method thereof. The present invention is an array type ultrasonic imaging device (1), which performs electronic scanning by irradiating an ultrasonic beam to an object (8) in a specific scanning sequence in a direction perpendicular to the arrangement direction of transducers. The scanning action of reciprocating upwards and the shifting action of moving the ultrasonic array probe parallel to the arrangement direction of the transducers cause the ultrasonic array probe (4) with a plurality of transducers arranged in a straight line to perform a planar scan and scan the object. The surface or laminated boundary surface of the specimen is irradiated with an ultrasonic beam to display the signal strength of the ultrasonic reflected wave from the specimen, and the ultrasonic beam is irradiated from the irradiation point at one end of the electronic scan, and then at the opposite end The irradiation point irradiates the ultrasonic beam, and becomes a scanning sequence in which the ultrasonic beam is irradiated alternately from each end to the center one by one, and a plurality of oscillators are selected to irradiate the ultrasonic beam for electronic scanning.

Description

陣列式超音波影像裝置及其控制方法Array ultrasonic imaging device and control method thereof

本發明係關於一種陣列式超音波影像裝置及其控制方法。 The invention relates to an array ultrasonic imaging device and a control method thereof.

有對半導體等被檢體照射超音波,基於其之反射波產生被檢體內部之圖像資訊,而檢測被檢體內部之缺陷之超音波影像裝置。根據該超音波影像裝置,可進行非破壞之高分解能檢查,可確保電子零件之可靠性。 There is an ultrasonic imaging device that irradiates an object such as a semiconductor with ultrasonic waves, generates image information inside the object based on the reflected wave, and detects defects inside the object. According to this ultrasonic imaging device, non-destructive high-resolution inspection can be performed to ensure the reliability of electronic parts.

於超音波影像裝置之一形態,有具有由單一之振子構成之單探針之超音波影像裝置。於具有該單探針之超音波影像裝置中,使單探針於被檢體之表面或積層界面之特定區域之X方向/Y方向進行機械性掃描,而進行對被檢體照射超音波與反射波之檢測。 One type of ultrasonic imaging device is an ultrasonic imaging device having a single probe composed of a single vibrator. In an ultrasonic imaging device having the single probe, the single probe is mechanically scanned in the X direction/Y direction of a specific area on the surface of the subject or the lamination interface, and the subject is irradiated with ultrasonic waves and Detection of reflected waves.

為縮短該超音波影像裝置之作業時間,需加快單探針之掃描速度。但,於將被檢體與單探針浸水之超音波影像裝置,若加快單探針之掃描速度,則會產生出現夾帶氣泡或波紋等引起圖像劣化之現象之問題。 In order to shorten the operating time of the ultrasonic imaging device, the scanning speed of the single probe needs to be accelerated. However, in an ultrasonic imaging device that immerses the subject and a single probe in water, if the scanning speed of the single probe is accelerated, problems such as entrained bubbles or ripples may occur, causing image degradation.

因此,例如,有一種超音波檢查裝置,其具備具有複數個壓電振動元件之陣列式超音波感測器,且藉由於陣列排列方向上進行電子掃描,進 而於陣列排列之法線方向上進行機械掃描,而使用來自檢查對象內部之反射信號產生檢查圖像(參考專利文獻1)。 Therefore, for example, there is an ultrasonic inspection device that is equipped with an array ultrasonic sensor having a plurality of piezoelectric vibration elements, and performs electronic scanning in the array arrangement direction. Mechanical scanning is performed in the normal direction of the array arrangement, and an inspection image is generated using reflected signals from inside the inspection object (see Patent Document 1).

[先前技術文獻] [Prior technical literature] [專利文獻] [Patent Document]

[專利文獻1]日本專利特開2007-263780號公報 [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-263780

根據上述先前技術,由於可降低探針之掃描速度,故可降低出現夾帶氣泡或波紋等引起圖像劣化之現象之發生。但,於對陣列式超音波探針進行往復機械掃描而產生被檢體之大範圍之反射波圖像時,於機械掃描之端部,即,於切換機械掃描之去路與返路之位置等,有時會於超音波反射波之圖像產生偏差。於專利文獻1中,未記載對陣列式超音波探針進行往復機械掃描,且未考慮該問題。 According to the above-mentioned prior art, since the scanning speed of the probe can be reduced, the occurrence of phenomena such as entrained bubbles or ripples that cause image degradation can be reduced. However, when the array type ultrasonic probe is mechanically scanned back and forth to generate a large-scale reflected wave image of the subject, at the end of the mechanical scan, that is, at the position where the forward and return paths of the mechanical scan are switched, etc. , sometimes causing deviations in the image of the ultrasonic reflected wave. Patent Document 1 does not describe reciprocating mechanical scanning of the array ultrasonic probe, and this problem is not considered.

本發明之目的在於提供一種於使陣列式超音波探針進行往復掃描而產生被檢體之反射波圖像之陣列式超音波影像裝置中,圖像偏差較少之陣列式超音波影像裝置及其控制方法。 An object of the present invention is to provide an array ultrasonic imaging device with less image deviation in an array ultrasonic imaging device that performs reciprocating scanning of an array ultrasonic probe to generate a reflected wave image of an object. its control method.

為解決上述問題,本發明之陣列式超音波影像裝置,係藉由一面進行以特定之掃描順序對被檢體照射超音波光束之電子掃描一面於垂直於上 述振子之排設方向之方向上往復移動之掃描動作、及與上述振子之排設方向平行地移動超音波陣列探針之移位動作,使複數個振子直線排設之超音波陣列探針進行平面掃描,且對被檢體之表面或積層邊界面照射超音波光束,顯示來自被檢體之超音波反射波之信號強度者,且以於電子掃描之一端之照射點照射超音波光束,接著於對向之另一端之照射點照射超音波光束,成為自各個端部逐一向中央部交替依序照射超音波光束之掃描順序之方式選擇上述複數個振子照射超音波光束而進行上述電子掃描。 In order to solve the above problems, the array type ultrasonic imaging device of the present invention performs electronic scanning on one side perpendicular to the upper side by irradiating ultrasonic beams to the subject in a specific scanning sequence. The scanning operation of reciprocating in the direction of the arrangement direction of the transducers and the shifting operation of moving the ultrasonic array probe parallel to the arrangement direction of the above-mentioned transducers enable the ultrasonic array probe with a plurality of linearly arranged transducers to perform Plane scanning, and irradiating the ultrasonic beam on the surface or layer boundary surface of the object to be examined, and displaying the signal strength of the ultrasonic reflected wave from the object, and irradiating the ultrasonic beam from the irradiation point at one end of the electronic scan, and then The ultrasonic beam is irradiated at the irradiation point at the opposite end, and the plurality of transducers are selected to irradiate the ultrasonic beam to perform the electronic scanning in a scanning sequence in which the ultrasonic beam is irradiated alternately from each end to the center.

又,本發明之陣列式超音波影像裝置之控制方法為將複數個振子直線排設之超音波陣列探針之超音波光束依序照射至被檢體而進行電子掃描,顯示來自上述被檢體之超音波反射波之信號強度之陣列式超音波影像裝置的控制方法;且該控制方法包含:第1步驟,其一面以於電子掃描之一端之照射點照射超音波光束,接著於對向之另一端之照射點照射超音波光束,成為自各個端部逐一向中央部交替依序照射超音波光束之掃描順序之方式選擇上述複數個振子,而對上述被檢體依特定之掃描順序照射超音波光束,一面於垂直於上述超音波陣列探針之振子之排設方向之方向上以特定速度連續移動上述超音波陣列探針;移位步驟,其於上述電子掃描之掃描寬度量,進行與上述振子之排設方向並行地移動上述超音波陣列探針之移位動作;及第2步驟,其一面以於電子掃描之一端之照射點照射超音波光束,接著於對向之另一端之照射點照射超音波光束,成為自各個端部逐一向中央部交替依序照射超音波光束之掃描順序之方式選擇上述複數個振子,而對上述被檢體依特定之掃描順序照射超音波光束,一面與上述第1步驟逆向地以特定速度連續移動上述超音波陣列探針;且藉由重複上述 第1步驟、上述移位步驟、及上述第2步驟,對被檢體整面進行電子掃描。 Furthermore, the control method of the array-type ultrasonic imaging device of the present invention is to sequentially irradiate the ultrasonic beams of the ultrasonic array probe with a plurality of transducers arranged in a straight line to the subject and perform electronic scanning to display the images from the subject. A method for controlling the signal strength of an ultrasonic reflected wave of an array ultrasonic imaging device; and the control method includes: the first step, irradiating an ultrasonic beam from an irradiation point at one end of the electronic scan, and then irradiating the ultrasonic beam at the opposite end The irradiation point at the other end irradiates the ultrasonic beam, and the above-mentioned plurality of transducers are selected in a scanning sequence such that the ultrasonic beam is irradiated alternately from each end to the center one by one, and the above-mentioned subject is irradiated with ultrasonic beam in a specific scanning sequence. The sonic beam continuously moves the ultrasonic array probe at a specific speed in a direction perpendicular to the arrangement direction of the transducers of the ultrasonic array probe; the shifting step is performed within the scanning width of the electronic scan. The transducer arrangement direction moves the ultrasonic array probe in parallel; and the second step is to irradiate the ultrasonic beam from an irradiation point at one end of the electronic scan, and then irradiate the opposite end. The above-mentioned plurality of transducers are selected in a scanning sequence such that the ultrasonic beam is irradiated at a point, and the ultrasonic beam is irradiated alternately from each end to the center one by one, and the ultrasonic beam is irradiated to the subject under examination in a specific scanning sequence. Continuously move the above-mentioned ultrasonic array probe at a specific speed in the opposite direction to the above-mentioned first step; and by repeating the above In the first step, the above-mentioned shifting step, and the above-mentioned second step, the entire surface of the subject is electronically scanned.

根據本發明,於使陣列式超音波探針進行平面掃描而產生被檢體之超音波反射圖像之陣列式超音波影像裝置中,可抑制於陣列式超音波探針之掃描之往復移動中產生之反射波圖像之圖像偏差。 According to the present invention, in an array ultrasonic imaging device that performs planar scanning of an array ultrasonic probe to generate an ultrasonic reflection image of an object, the reciprocating movement of the array ultrasonic probe during scanning can be suppressed. Image deviation of the resulting reflected wave image.

1:陣列式超音波影像裝置 1: Array ultrasound imaging device

2:3軸掃描器 2:3 axis scanner

3:感測器 3: Sensor

4:探針(超音波陣列探針) 4: Probe (ultrasonic array probe)

8:被檢體 8: Subject

10:控制裝置 10:Control device

11:掃描器控制部 11:Scanner control department

12:收發指令部 12:Sending and receiving instructions department

13:時序處理部 13: Timing processing department

14:振子動作信號產生部 14: Oscillator action signal generation part

15:反射波信號處理部 15:Reflected wave signal processing department

16:反射波圖像產生部 16: Reflected wave image generation unit

17:顯示部 17:Display part

21:X軸掃描器 21:X-axis scanner

22:Y軸掃描器 22:Y-axis scanner

23:Z軸掃描器 23:Z-axis scanner

24:保持器 24:Retainer

42:鍔部 42:E part

91:水槽 91:Sink

92:台 92:Taiwan

a~g:振子/照射點 a~g: vibrator/irradiation point

S81~S89,S810,S811:步驟 S81~S89,S810,S811: steps

S91~S95:步驟 S91~S95: steps

X:方向 X: direction

Xn:座標 Xn: coordinates

Y:方向 Y: direction

Z:方向 Z: direction

圖1係顯示實施形態之陣列式超音波影像裝置之整體構成之圖。 FIG. 1 is a diagram showing the overall structure of the array-type ultrasonic imaging device according to the embodiment.

圖2係說明陣列式超音波影像裝置中之探針之平面掃描之動作內容之圖。 FIG. 2 is a diagram illustrating the action content of the plane scanning of the probe in the array ultrasonic imaging device.

圖3A係對比較例之探針之超音波光束之照射點進行說明之圖。 FIG. 3A is a diagram illustrating the irradiation point of the ultrasonic beam of the probe of the comparative example.

圖3B係顯示比較例之探針之平面掃描中之超音波光束之照射點之位置的圖。 3B is a diagram showing the position of the irradiation point of the ultrasonic beam in planar scanning of the probe of the comparative example.

圖4A係顯示反射波中之信號強度之時間變化之一例之圖。 FIG. 4A is a diagram showing an example of time variation of signal intensity in reflected waves.

圖4B係說明將反射波之信號強度轉換為0~255之灰階度之圖。 Figure 4B is a diagram illustrating the conversion of the signal intensity of the reflected wave into a gray scale of 0~255.

圖4C係顯示超音波光束之照射點與短條狀具有3個反射率不同之區域之被檢體8之位置關係之圖。 FIG. 4C is a diagram showing the positional relationship between the irradiation point of the ultrasonic beam and the short strip-shaped subject 8 having three areas with different reflectivities.

圖4D係顯示圖4C中之電子掃描之超音波圖像之圖。 Figure 4D is a diagram showing the electronically scanned ultrasound image in Figure 4C.

圖5A係顯示比較例之藉由探針4將被檢體之外形設為掃描區域時之電子掃描之照射點之位置的圖。 FIG. 5A is a diagram showing the position of the irradiation point of electronic scanning when the outer shape of the subject is set as the scanning area by the probe 4 in the comparative example.

圖5B係顯示圖5A之電子掃描之超音波圖像之圖。 Figure 5B is a diagram showing the electronically scanned ultrasound image of Figure 5A.

圖6A係對實施形態之探針4之超音波光束之照射點進行說明之圖。 FIG. 6A is a diagram explaining the irradiation point of the ultrasonic beam of the probe 4 according to the embodiment.

圖6B係顯示探針之平面掃描中之超音波光束之照射點之位置之圖。 FIG. 6B is a diagram showing the position of the irradiation point of the ultrasonic beam in planar scanning of the probe.

圖7A係顯示實施形態之將被檢體之外形設為掃描區域時之電子掃描之照射點之位置的圖。 7A is a diagram showing the position of the irradiation point of electronic scanning when the outer shape of the subject is set as the scanning area according to the embodiment.

圖7B係顯示圖7A之電子掃描之超音波圖像之圖。 Figure 7B is a diagram showing the electronically scanned ultrasound image of Figure 7A.

圖8係說明陣列式超音波影像裝置之平面掃描之動作之流程圖。 FIG. 8 is a flow chart illustrating the plane scanning operation of the array ultrasonic imaging device.

圖9係顯示電子掃描之處理之細節之流程圖。 Figure 9 is a flow chart showing details of the electronic scanning process.

以下,對本發明之實施形態,一面參考圖式一面詳細地進行說明。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

圖1係顯示實施形態之陣列式超音波影像裝置之整體構成之圖。 FIG. 1 is a diagram showing the overall structure of the array-type ultrasonic imaging device according to the embodiment.

陣列式超音波影像裝置1具備3軸掃描器2(掃描機構)、與超音波陣列探針(以下記為探針4)。該3軸掃描器2使探針4對平面狀之被檢體8以X軸方向與Y軸方向之二維進行掃描(平面掃描)。藉此,陣列式超音波影像裝置1可藉由超音波將平面狀之被檢體8影像化。 The array ultrasonic imaging device 1 includes a three-axis scanner 2 (scanning mechanism) and an ultrasonic array probe (hereinafter referred to as probe 4). The three-axis scanner 2 causes the probe 4 to scan the planar subject 8 two-dimensionally in the X-axis direction and the Y-axis direction (planar scanning). Thereby, the array ultrasonic imaging device 1 can image the planar subject 8 using ultrasonic waves.

探針4為將多個振子短條狀排列之相控陣列超音波探針。詳細而言,藉由控制多個振子中之一部分之複數個振子(振子群)各者之振盪時序製作超音光波收斂光束(超音波光束),並對其進行電子切換,改變照射位置而照射超音波光束,對被檢體8進行一維掃描。於本說明書中,將相控陣列超音波探針之電子超音波光束之掃描記為電子掃描。 Probe 4 is a phased array ultrasonic probe in which a plurality of vibrators are arranged in short strips. Specifically, an ultrasonic light wave convergence beam (ultrasonic beam) is produced by controlling the oscillation timing of each of a plurality of vibrators (a group of vibrators) of a part of the plurality of vibrators, and is electronically switched to change the irradiation position and irradiate. The ultrasonic beam performs one-dimensional scanning on the subject 8. In this specification, the scanning of the electronic ultrasonic beam of the phased array ultrasonic probe is referred to as electronic scanning.

超音波光束之反射波之接收控制亦控制振子群而進行。 The reception control of the reflected wave of the ultrasonic beam is also performed by controlling the vibrator group.

又,探針4可將由單一之振子產生之超音波以聲透鏡(acoustic lens)聚焦而照射至被檢體,並將複數個該振子構成短條狀。於該構成中,亦藉由對振子進行電子切換,而改變超音波光束之照射位置,進行被檢體8之電子掃描。 In addition, the probe 4 can focus the ultrasonic wave generated by a single vibrator with an acoustic lens and irradiate it to the subject, and form a plurality of the vibrators into a short strip shape. In this configuration, the oscillator is also electronically switched to change the irradiation position of the ultrasonic beam, and the subject 8 is electronically scanned.

探針4配置為浸漬於注滿水槽91之水中,探針4之前端與被檢體8對向。探針4藉由保持器24安裝於3軸掃描器2。 The probe 4 is disposed so as to be immersed in water filled with the water tank 91 , and the front end of the probe 4 faces the subject 8 . The probe 4 is mounted on the 3-axis scanner 2 via the holder 24 .

水槽91載置於台92上。 The water tank 91 is placed on the stand 92 .

該3軸掃描器2於使探針4二維掃描時,基於藉由內置之檢測位置變化之編碼器檢測出之直線位置或旋轉位置(角度位置),檢測其之掃描位置。藉此,陣列式超音波影像裝置1可將被檢體8之各掃描位置(掃描點)與回波之關係二維影像化。 When the three-axis scanner 2 two-dimensionally scans the probe 4, it detects the scanning position based on the linear position or rotational position (angular position) detected by a built-in encoder that detects position changes. Thereby, the array ultrasonic imaging device 1 can two-dimensionally image the relationship between each scanning position (scanning point) of the subject 8 and the echo.

3軸掃描器2具備使探針4進行掃描之X軸掃描器21及Y軸掃描器22、可改變探針4與被檢體8之間隔之Z軸掃描器23、及固持探針4之保持器24。 The 3-axis scanner 2 includes an X-axis scanner 21 and a Y-axis scanner 22 that scan the probe 4, a Z-axis scanner 23 that can change the distance between the probe 4 and the subject 8, and a device that holds the probe 4. Retainer 24.

又,探針4於檢查前藉由台92調整高度,且藉由Z軸掃描器23調整與被檢體8之間隔。 In addition, the height of the probe 4 is adjusted by the stage 92 before inspection, and the distance from the subject 8 is adjusted by the Z-axis scanner 23 .

探針4於與複數個振子直線排設之方向垂直之方向(以下,將該方向稱為X軸方向)上,藉由3軸掃描器2之X軸掃描器21以特定速度連續移動(掃描動作),其後,藉由3軸掃描器2之Y軸掃描器22,與複數個振子之排 設方向並行地進行電子掃描之掃描寬度量之移動(移位動作)。 The probe 4 is continuously moved (scanned) at a specific speed by the X-axis scanner 21 of the 3-axis scanner 2 in a direction perpendicular to the direction in which the plurality of transducers are linearly arranged (hereinafter, this direction is referred to as the X-axis direction). action), and then, through the Y-axis scanner 22 of the 3-axis scanner 2 and the arrangement of a plurality of vibrators It is assumed that the movement (shifting operation) of the electronic scanning by the scanning width is performed in parallel in the direction.

該保持器24支持設置於探針4之上部之鍔部42,於對該探針4施加朝上之力時順利地朝上方向移動。於保持器24設置有感測器3,檢測探針4朝上方向移動之情況。 The holder 24 supports the flange portion 42 provided on the upper part of the probe 4 and smoothly moves upward when an upward force is applied to the probe 4 . The holder 24 is provided with a sensor 3 that detects movement of the probe 4 in the upward direction.

控制裝置10具備掃描器控制部11、收發指令部12、時序處理部13、振子動作信號產生部14、反射波信號處理部15、反射波圖像產生部16及顯示部17,且進行3軸掃描器之控制、探針4之收發控制、及來自被檢體8之回波之顯示控制。 The control device 10 includes a scanner control unit 11, a transmission and reception instruction unit 12, a timing processing unit 13, an oscillator operation signal generation unit 14, a reflected wave signal processing unit 15, a reflected wave image generation unit 16, and a display unit 17, and performs 3-axis The control of the scanner, the transmission and reception control of the probe 4, and the display control of the echo from the subject 8 are controlled.

掃描器控制部11為基於X軸掃描器21及Y軸掃描器22內置之編碼器輸出,驅動X軸掃描器21及Y軸掃描器22,而使探針4於被檢體8上進行平面掃描之控制部。 The scanner control part 11 drives the X-axis scanner 21 and the Y-axis scanner 22 based on the encoder output built in the X-axis scanner 21 and the Y-axis scanner 22, so that the probe 4 performs planar movement on the subject 8 Scan control section.

收發指令部12與自掃描器控制部11通知之X軸掃描器21之編碼器輸出同步,開始探針4之電子掃描。即,收發指令部12係與探針4之掃描動作同步開始電子掃描。因此,藉由探針4之電子掃描所產生被檢體8之X軸方向之掃描間距,與X軸掃描器21之編碼器輸出之間距相等。 The command sending and receiving unit 12 starts electronic scanning of the probe 4 in synchronization with the encoder output of the X-axis scanner 21 notified from the scanner control unit 11 . That is, the command transmitting and receiving unit 12 starts electronic scanning in synchronization with the scanning operation of the probe 4. Therefore, the scanning pitch in the X-axis direction of the subject 8 generated by the electronic scanning of the probe 4 is equal to the pitch of the encoder output of the X-axis scanner 21 .

時序處理部13選擇與電子掃描中之超音波光束之掃描順序對應之探針4之振子群。 The timing processing unit 13 selects the transducer group of the probe 4 corresponding to the scanning order of the ultrasonic beam in electronic scanning.

振子動作信號產生部14根據由時序處理部13選擇之振子群與掃描順序產生振子動作信號,並於每個掃描點,將其發送至探針4。 The transducer operation signal generating unit 14 generates a transducer operation signal based on the transducer group and the scanning order selected by the timing processing unit 13, and sends it to the probe 4 at each scanning point.

探針4根據振子動作信號產生部14之振子動作信號,照射超音波光束。 The probe 4 irradiates an ultrasonic beam based on the transducer operation signal from the transducer operation signal generating unit 14 .

反射波信號處理部15係於每個掃描點自探針4接收超音波光束之反射波之信號,設置閘極進行閘極處理,藉此求出反射波之位移(振幅),並根據該位移算出信號強度。 The reflected wave signal processing unit 15 receives the signal of the reflected wave of the ultrasonic beam from the probe 4 at each scanning point, sets a gate and performs gate processing, thereby obtaining the displacement (amplitude) of the reflected wave, and based on the displacement Figure out the signal strength.

反射波圖像產生部16例如將由反射波信號處理部15算出之每個照射點之反射波之信號強度轉換為0~255之灰階度。於被檢體8與水槽91之水之邊界或被檢體8內部之材料邊界、剝離部、空隙部等聲阻抗(密度)變化之邊界面,產生超音波光束之反射波。反射波圖像產生部16將無超音波光束之反射波之點設為灰階度255,反射波之信號強度越大,灰階度越小。 For example, the reflected wave image generating unit 16 converts the signal intensity of the reflected wave at each irradiation point calculated by the reflected wave signal processing unit 15 into a gray scale of 0 to 255. The reflected wave of the ultrasonic beam is generated at the boundary between the subject 8 and the water in the water tank 91 or at the boundary surface where the acoustic impedance (density) changes, such as material boundaries, peeling parts, and voids inside the subject 8 . The reflected wave image generating unit 16 sets the point where there is no reflected wave of the ultrasonic beam as a grayscale level of 255. The greater the signal intensity of the reflected wave, the smaller the grayscale level.

顯示部17顯示由反射波圖像產生部16求出之超音波光束之反射波之信號強度,作為被檢體8之平面掃描之濃淡圖像。具體而言,於灰階度為255之情形時顯示黑色,於灰階度為0之情形時顯示白色,於灰階度為中間值之情形時根據灰階度顯示灰色。 The display unit 17 displays the signal intensity of the reflected wave of the ultrasonic beam obtained by the reflected wave image generating unit 16 as a gradation image of the plane scan of the subject 8 . Specifically, when the gray scale is 255, black is displayed, when the gray scale is 0, white is displayed, and when the gray scale is an intermediate value, gray is displayed according to the gray scale.

因此,陣列式超音波影像裝置1將經平面掃描之被檢體8之空洞(與周圍之密度差較大),顯示為白色圖像。 Therefore, the array ultrasonic imaging device 1 displays the cavity (which has a large density difference from the surroundings) of the subject 8 after planar scanning as a white image.

接著,藉由圖2,說明陣列式超音波影像裝置1中之探針4之平面掃描 之動作內容。 Next, the planar scanning of the probe 4 in the array ultrasonic imaging device 1 is explained with reference to FIG. 2 the action content.

探針4例如由192個振子直線排設而構成,但於圖2中,顯示探針4由振子a、b、c、d、e、f、g之7個振子構成之情形。 The probe 4 is composed of, for example, 192 transducers arranged in a straight line. However, FIG. 2 shows a case where the probe 4 is composed of seven transducers a, b, c, d, e, f, and g.

陣列式超音波影像裝置1將被檢體8之設定之位置設為掃描之原點(圖2之掃描區域之左上方),指定掃描區域之大小,進行探針4之平面掃描。 The array ultrasonic imaging device 1 sets the set position of the subject 8 as the origin of scanning (the upper left corner of the scanning area in Figure 2), specifies the size of the scanning area, and performs planar scanning of the probe 4.

首先,以探針4之電子掃描之開始點位於掃描原點之方式,驅動3軸掃描器2,來移動探針4。詳細而言,由於電子掃描於探針4之移動期間進行,故以探針4通過電子掃描之開始點時之移動速度成為特定值之方式,包含助跑部分而移動。 First, drive the 3-axis scanner 2 to move the probe 4 so that the starting point of the electronic scanning of the probe 4 is at the scanning origin. Specifically, since the electronic scanning is performed while the probe 4 is moving, the probe 4 moves including the run-up part so that the moving speed becomes a specific value when it passes the starting point of the electronic scanning.

於平面掃描之原點(開始位置),探針4利用振子a、b、c、d、e、f、g進行電子掃描,且藉由3軸掃描器2之X軸掃描器21,於與振子之排設方向垂直之方向移動。且,探針4與X軸掃描器21之編碼器輸出同步,進行下一個電子掃描。探針4於掃描區域之寬度量(X軸方向之大小量)重複上述動作。 At the origin (starting position) of plane scanning, the probe 4 uses the transducers a, b, c, d, e, f, and g to perform electronic scanning, and through the X-axis scanner 21 of the 3-axis scanner 2, The arrangement direction of the vibrators moves in the vertical direction. Furthermore, the probe 4 is synchronized with the encoder output of the X-axis scanner 21 to perform the next electronic scan. The probe 4 repeats the above action for the width of the scanning area (the large and small amount in the X-axis direction).

探針4如上所述,一面進行X軸方向之探針4之連續移動(掃描動作1),一面重複電子掃描,而對Y軸方向之長度為電子掃描之掃描寬度量,且X軸方向之長度為設定之掃描區域之寬度量之帶狀之掃描區域照射超音波光束,檢測來自被檢體8之反射波。 As described above, the probe 4 repeats electronic scanning while continuously moving the probe 4 in the X-axis direction (scanning operation 1). The length in the Y-axis direction is the scanning width of the electronic scanning, and the length in the X-axis direction is A strip-shaped scanning area with a length equal to the width of the set scanning area is irradiated with an ultrasonic beam, and the reflected wave from the subject 8 is detected.

此時,控制裝置10將以探針4之一次電子掃描檢測出之來自被檢體8 之反射波設為X軸方向之位置(掃描行)相同之超音波光束之反射波,算出反射波之信號強度,並顯示為濃淡圖像。 At this time, the control device 10 uses one electronic scan of the probe 4 to detect the signal from the subject 8 The reflected wave is set as the reflected wave of the ultrasonic beam with the same position (scanning line) in the X-axis direction. The signal strength of the reflected wave is calculated and displayed as a shaded image.

接著,探針4藉由3軸掃描器2之Y軸掃描器22,與複數個振子之排設方向並行地進行電子掃描之掃描寬度量之移動(移位動作)。且,以探針4之電子掃描之開始點與上述掃描動作1之最後之電子掃描之開始點於X軸方向上成為同一位置之方式,藉由X軸掃描器21移動探針4。 Next, the probe 4 is moved by the Y-axis scanner 22 of the three-axis scanner 2 by the scanning width of the electronic scanning in parallel with the arrangement direction of the plurality of transducers (shifting operation). Furthermore, the probe 4 is moved by the X-axis scanner 21 so that the starting point of the electronic scanning of the probe 4 and the starting point of the last electronic scanning of the above-mentioned scanning operation 1 become the same position in the X-axis direction.

探針4利用振子a、b、c、d、e、f、g進行電子掃描,且藉由3軸掃描器2之X軸掃描器21,於與掃描動作1為相反方向之垂直於振子之排設方向之方向移動。且,探針4與X軸掃描器21之編碼器輸出同步,進行下一個電子掃描。探針4於掃描區域之寬度量(X軸方向之大小量)重複上述動作。 The probe 4 uses the transducers a, b, c, d, e, f, and g to perform electronic scanning, and through the Move in the direction of the arrangement direction. Furthermore, the probe 4 is synchronized with the encoder output of the X-axis scanner 21 to perform the next electronic scan. The probe 4 repeats the above action for the width of the scanning area (the large and small amount in the X-axis direction).

探針4如上所述,一面進行X軸方向之探針4之連續移動(掃描動作2),一面重複電子掃描,而對Y軸方向之長度為電子掃描之掃描寬度量,且X軸方向之長度為設定之掃描區域之寬度量之帶狀之掃描區域照射超音波光束,檢測來自被檢體8之反射波。 As described above, the probe 4 repeats electronic scanning while continuously moving the probe 4 in the X-axis direction (scanning operation 2), and the length in the Y-axis direction is equal to the scanning width of the electronic scanning, and the length in the X-axis direction A strip-shaped scanning area with a length equal to the width of the set scanning area is irradiated with an ultrasonic beam, and the reflected wave from the subject 8 is detected.

控制裝置10係若可藉由上述探針4之掃描動作1與掃描動作2,覆蓋所指定之掃描區域,則結束平面掃描,但於不足之情形時,使探針4進行電子掃描之掃描寬度量之移位動作而移動,與進行電子掃描之同時進行與先前之動作同樣之掃描動作3、移位動作、掃描動作4。 If the specified scanning area can be covered by the scanning action 1 and scanning action 2 of the probe 4, the control device 10 will end the plane scanning, but if it is insufficient, the control device 10 will cause the probe 4 to perform electronic scanning of the scanning width. It moves according to the amount of shift action, and performs the same scanning action 3, shift action, and scan action 4 as the previous action while performing electronic scanning.

控制裝置10重複上述動作直至覆蓋所指定之掃描區域為止,進行被 檢體8之平面掃描。 The control device 10 repeats the above actions until the designated scanning area is covered. Plane scan of specimen 8.

於本說明書中,將探針4之掃描動作1、掃描動作3……記為正向移動掃描動作(第1掃描動作),將探針4之掃描動作2、掃描動作4……記為反向移動掃描動作(第2掃描動作)。 In this specification, the scanning actions 1, 3... of the probe 4 are referred to as the forward moving scanning action (the first scanning action), and the scanning actions 2, 4... of the probe 4 are referred to as the reverse movement. Moving scanning operation (second scanning operation).

由於探針4於上述掃描動作1、2、3、4中,一面連續移動,一面進行電子掃描,故詳細而言,因超音波光束之照射時序,超音波光束之照射點之X軸方向之位置產生偏移。接著,對超音波光束之照射時序與照射點之關係進行說明。 Since the probe 4 is electronically scanned while continuously moving during the above-mentioned scanning actions 1, 2, 3, and 4, in detail, due to the irradiation timing of the ultrasonic beam, the irradiation point of the ultrasonic beam in the X-axis direction The position is shifted. Next, the relationship between the irradiation timing of the ultrasonic beam and the irradiation point will be described.

圖3A係對比較例之探針4之超音波光束之照射點進行說明之圖。 FIG. 3A is a diagram illustrating the irradiation point of the ultrasonic beam of the probe 4 of the comparative example.

照射點a、b、c、d、e、f、g為探針4之振子a、b、c、d、e、f、g之電子掃描之超音波光束之照射點。尤其,照射點a為與掃描區域之原點對應之照射點,且為掃描動作時,與X軸掃描器21之編碼器輸出同步之電子掃描之最初之超音波光束之照射點。 The irradiation points a, b, c, d, e, f, and g are the irradiation points of the ultrasonic beams electronically scanned by the transducers a, b, c, d, e, f, and g of the probe 4. In particular, the irradiation point a is the irradiation point corresponding to the origin of the scanning area, and is the irradiation point of the first ultrasonic beam of the electronic scanning synchronized with the encoder output of the X-axis scanner 21 during the scanning operation.

探針4之電子掃描於掃描動作之連續移動期間進行。圖3A之實線之矩形表示最初照射超音波光束時之探針4之位置,虛線之矩形表示最後照射超音波光束時之探針4之位置。 Electronic scanning of the probe 4 is performed during the continuous movement of the scanning action. The solid rectangle in Figure 3A represents the position of the probe 4 when the ultrasonic beam is first irradiated, and the dotted rectangle represents the position of the probe 4 when the ultrasonic beam is irradiated last.

於比較例之探針4中,自照射點a向探針4之另一端依序照射超音波光束。因此,照射點b、c、d、e、f、g成為於掃描方向上逐漸偏移之位置。 In the probe 4 of the comparative example, the ultrasonic beam is sequentially irradiated from the irradiation point a to the other end of the probe 4 . Therefore, the irradiation points b, c, d, e, f, and g are gradually shifted in the scanning direction.

圖3B係顯示比較例之探針4之掃描動作1與掃描動作2之平面掃描中之超音波光束之照射點之位置之圖。 FIG. 3B is a diagram showing the position of the irradiation point of the ultrasonic beam in the plane scanning of the scanning operation 1 and the scanning operation 2 of the probe 4 of the comparative example.

由於與X軸掃描器21之編碼器輸出同步進行電子掃描,故比較例之探針4之照射點a之X軸方向之位置於掃描動作1與掃描動作2中一致(例如,Xn座標)。但,照射點b、c、d、e、f、g成為根據掃描方向逐漸偏移之位置。 Since electronic scanning is performed in synchronization with the encoder output of the X-axis scanner 21, the position of the irradiation point a of the probe 4 in the comparative example in the X-axis direction coincides with the scanning action 1 and the scanning action 2 (for example, the Xn coordinate). However, the irradiation points b, c, d, e, f, and g gradually shift according to the scanning direction.

此處,對探針4照射之超音波光束之反射波之超音波圖像之顯示詳細地進行說明。 Here, the display of the ultrasonic image of the reflected wave of the ultrasonic beam irradiated by the probe 4 will be described in detail.

圖4A係顯示由反射波信號處理部15處理之反射波中之信號強度之時間變化之一例的圖。反射波信號處理部15求出以與要檢查之被檢體8之特定深度對應之時間為中心之特定時段之反射波之信號強度之位移(振幅)。 FIG. 4A is a diagram showing an example of temporal changes in the signal intensity in the reflected wave processed by the reflected wave signal processing unit 15 . The reflected wave signal processing unit 15 obtains the displacement (amplitude) of the signal intensity of the reflected wave in a specific period centered on the time corresponding to the specific depth of the subject 8 to be inspected.

圖4B係說明反射波圖像產生部16將每個照射點之反射波之信號強度轉換為0~255之灰階度之圖。將反射波之信號強度為0(位移為0)時設為灰階度255之黑色,將反射波之信號強度為最大(位移最大)時設為灰階度0之白色,且隨著反射波之信號強度(位移)變大,減小灰階度(中間值),而設為灰色。 FIG. 4B is a diagram illustrating how the reflected wave image generating unit 16 converts the signal intensity of the reflected wave at each irradiation point into a gray scale of 0 to 255. When the signal intensity of the reflected wave is 0 (displacement is 0), it is set to black with a grayscale of 255. When the signal intensity of the reflected wave is maximum (displacement is maximum), it is set to white with a grayscale of 0. As the reflected wave The signal strength (displacement) becomes larger, the gray scale is reduced (middle value), and is set to gray.

接著,利用圖4C、圖4D說明藉由比較例之探針4進行電子掃描時之超音波圖像。 Next, the ultrasonic image when electronic scanning is performed using the probe 4 of the comparative example will be described using FIG. 4C and FIG. 4D.

圖4C係顯示探針4之超音波光束之照射點與以如圖所示般之短條狀具有3個反射率不同之區域之被檢體8之位置關係的圖。雖探針4之電子掃描 之最初之照射點位於3個反射率不同之區域之各個區域,但由於在探針4之移動期間進行電子掃描,故電子掃描之最後之照射點進入相鄰之短條區域。 FIG. 4C is a diagram showing the positional relationship between the irradiation point of the ultrasonic beam of the probe 4 and the subject 8 having three areas with different reflectivities in a short strip shape as shown in the figure. Although the electronic scanning of probe 4 The initial irradiation point is located in each of the three areas with different reflectivities. However, since electronic scanning is performed during the movement of the probe 4, the last irradiation point of the electronic scanning enters the adjacent short strip area.

圖4D係顯示圖4C中之電子掃描之超音波圖像之圖。 Figure 4D is a diagram showing the electronically scanned ultrasound image in Figure 4C.

此時,反射波圖像產生部16將以探針4之一次電子掃描檢測出之來自被檢體8之反射波設為X軸方向之位置(掃描行)相同之超音波光束之反射波,算出反射波之信號強度,求出濃淡圖像,並由顯示部17顯示為超音波圖像。因此,顯示圖4C中說明之被檢體8之不同之反射率之分佈之濃淡圖像。 At this time, the reflected wave image generating unit 16 sets the reflected wave from the subject 8 detected by one electronic scan of the probe 4 as the reflected wave of the ultrasonic beam having the same position (scanning line) in the X-axis direction. The signal intensity of the reflected wave is calculated to obtain a shading image, which is displayed as an ultrasonic image on the display unit 17 . Therefore, a gradation image of different reflectivity distributions of the subject 8 described in FIG. 4C is displayed.

圖5A、圖5B係說明使比較例之探針4往復移動時之超音波圖像之顯示例之圖。 5A and 5B are diagrams illustrating a display example of an ultrasonic image when the probe 4 of the comparative example is reciprocated.

圖5A係顯示將被檢體8之外形設為掃描區域時之探針4之電子掃描之照射點之位置之圖。 FIG. 5A is a diagram showing the position of the irradiation point of the electronic scanning of the probe 4 when the outer shape of the subject 8 is set as the scanning area.

如圖3B所說明,由於與X軸掃描器21之編碼器輸出同步進行電子掃描,故X軸方向之位置於掃描動作1與掃描動作2中一致(例如,Xn座標)。但,照射點b、c、d、e、f、g成為根據掃描方向逐漸偏移之位置。因此,掃描動作1之最後之電子掃描之照射點e、f、g係於被檢體外照射超音波光束。 As illustrated in FIG. 3B , since the electronic scanning is performed in synchronization with the encoder output of the X-axis scanner 21 , the position in the X-axis direction coincides with the scanning action 1 and the scanning action 2 (for example, the Xn coordinate). However, the irradiation points b, c, d, e, f, and g gradually shift according to the scanning direction. Therefore, the irradiation points e, f, and g of the electronic scanning at the end of the scanning operation 1 are to irradiate the ultrasonic beam outside the subject.

圖5B係顯示圖5A之電子掃描之超音波圖像之圖。 Figure 5B is a diagram showing the electronically scanned ultrasound image of Figure 5A.

由於反射波圖像產生部16將以探針4之一次電子掃描檢測出之來自被檢體8之反射波顯示為X軸方向之位置(掃描行)相同之超音波光束之反射波,故將照射點e、f、g顯示為被檢體8之Xn座標之超音波圖像。 Since the reflected wave image generating unit 16 displays the reflected wave from the subject 8 detected by one electronic scan of the probe 4 as the reflected wave of the ultrasonic beam having the same position (scanning line) in the X-axis direction, The irradiation points e, f, and g are displayed as ultrasonic images of the Xn coordinates of the subject 8.

由於被檢體8之反射波與被檢體外之反射波之信號強度不同,故相當於照射點e、f、g之反射波圖像顯示為不同之濃淡圖像,並視認為圖像資訊之偏差。另,於圖5B中,為說明起見,將被檢體8之反射波圖像設為白色,將被檢體外之反射波圖像設為黑色。 Since the signal intensity of the reflected wave of the subject 8 is different from that of the reflected wave outside the subject, the reflected wave images corresponding to the irradiation points e, f, and g are displayed as different shades of images and are regarded as image information. deviation. In addition, in FIG. 5B , for the sake of explanation, the reflected wave image of the subject 8 is colored white, and the reflected wave image outside the subject is colored black.

以下,對實施形態之陣列式超音波影像裝置1進行說明。 Hereinafter, the array ultrasonic imaging device 1 according to the embodiment will be described.

圖6A係對實施形態之探針4之超音波光束之照射點進行說明之圖。 FIG. 6A is a diagram explaining the irradiation point of the ultrasonic beam of the probe 4 according to the embodiment.

照射點a、b、c、d、e、f、g為探針4之振子a、b、c、d、e、f、g之電子掃描之超音波光束之照射點。尤其,照射點a為與掃描區域之原點對應之照射點,且為掃描動作時,與X軸掃描器21之編碼器輸出同步之電子掃描之最初之超音波光束之照射點。 The irradiation points a, b, c, d, e, f, and g are the irradiation points of the ultrasonic beams electronically scanned by the transducers a, b, c, d, e, f, and g of the probe 4. In particular, the irradiation point a is the irradiation point corresponding to the origin of the scanning area, and is the irradiation point of the first ultrasonic beam of the electronic scanning synchronized with the encoder output of the X-axis scanner 21 during the scanning operation.

探針4之電子掃描於掃描動作之連續移動期間進行。圖6A之實線之矩形表示最初照射超音波光束時之探針4之位置,虛線之矩形表示最後照射超音波光束時之探針4之位置。 Electronic scanning of the probe 4 is performed during the continuous movement of the scanning action. The solid rectangle in FIG. 6A represents the position of the probe 4 when the ultrasonic beam is first irradiated, and the dotted rectangle represents the position of the probe 4 when the ultrasonic beam is irradiated last.

藉由時序處理部13(參考圖1),探針4於將超音波光束照射至照射點a後,於電子掃描之另一端之照射點g照射超音波光束。接著,於較照射點a 更靠近中央側之照射點b照射超音波光束。如此,探針4自對向之端部之照射點向中央部之照射點依序交替照射超音波光束而進行電子掃描。 Through the timing processing unit 13 (refer to FIG. 1 ), the probe 4 irradiates the ultrasonic beam to the irradiation point a, and then irradiates the ultrasonic beam to the irradiation point g at the other end of the electronic scan. Then, at the comparative illumination point a The irradiation point b closer to the center side irradiates the ultrasonic beam. In this way, the probe 4 sequentially and alternately irradiates the ultrasonic beam from the irradiation point at the opposite ends to the irradiation point at the center to perform electronic scanning.

換言之,探針4以隨著掃描動作之方向超音波光束之照射點成為ㄑ字狀或倒ㄑ字狀之方式照射超音波光束。 In other words, the probe 4 irradiates the ultrasonic beam so that the irradiation point of the ultrasonic beam becomes a U-shape or an inverted U-shape in accordance with the direction of the scanning operation.

圖6B係顯示探針4之掃描動作1與掃描動作2之掃描區域中之超音波光束之照射點之位置之圖。 FIG. 6B is a diagram showing the position of the irradiation point of the ultrasonic beam in the scanning area of the scanning action 1 and the scanning action 2 of the probe 4.

由於與X軸掃描器21之編碼器輸出同步進行電子掃描,故探針4之照射點a之X軸方向之位置於掃描動作1與掃描動作2中一致,照射點b、c、d、e、f、g成為根據掃描方向而逐漸偏移之位置。 Since the electronic scanning is performed in synchronization with the encoder output of the , f, and g become positions that gradually shift depending on the scanning direction.

圖7A、圖7B係說明使比較例之探針4往復移動時之超音波圖像之顯示例之圖。 7A and 7B are diagrams illustrating a display example of an ultrasonic image when the probe 4 of the comparative example is reciprocated.

圖7A係顯示將被檢體8之外形設為掃描區域時之探針4之電子掃描之照射點之位置之圖。 FIG. 7A is a diagram showing the position of the irradiation point of the electronic scanning of the probe 4 when the outer shape of the subject 8 is set as the scanning area.

如圖6B所說明,由於與X軸掃描器21之編碼器輸出同步進行電子掃描,故探針4之照射點a之X軸方向之位置於掃描動作1與掃描動作2中一致,照射點b、c、d、e、f、g根據掃描方向,超音波光束之照射點成為倒ㄑ字狀、或ㄑ字狀。藉此,掃描動作1之最後之電子掃描之照射點c、d、e於被檢體外照射超音波光束。 As illustrated in FIG. 6B , since electronic scanning is performed in synchronization with the encoder output of the , c, d, e, f, g Depending on the scanning direction, the irradiation point of the ultrasonic beam becomes an inverted U-shape or a U-shape. Thereby, the irradiation points c, d, and e of the last electronic scan of the scanning operation 1 irradiate the ultrasonic beam outside the subject.

圖7B係顯示圖7A之電子掃描之超音波圖像之圖。 Figure 7B is a diagram showing the electronically scanned ultrasound image of Figure 7A.

由於反射波圖像產生部16將以探針4之一次電子掃描檢測出之來自被檢體8之反射波顯示為X軸方向之位置(掃描行)相同之超音波光束之反射波,故將照射點c、d、e以黑色顯示為被檢體8之Xn座標之超音波圖像。另,為說明起見,將被檢體8之反射波圖像設為白色,將反射波之信號強度不同之被檢體外之反射波圖像設為黑色。 Since the reflected wave image generating unit 16 displays the reflected wave from the subject 8 detected by one electronic scan of the probe 4 as the reflected wave of the ultrasonic beam having the same position (scanning line) in the X-axis direction, The irradiation points c, d, and e are displayed in black as the ultrasonic image of the Xn coordinates of the subject 8. In addition, for the sake of explanation, the reflected wave image of the subject 8 is set to white, and the reflected wave image outside the subject with different signal intensities of the reflected waves is set to black.

如此,於移位處理之前一刻之正向移動處理之最終電子掃描中,與反向移動處理之端部邊緣附近之圖像顯示為白色,另一方面,反向移動處理之最初電子掃描之與正向移動處理之端部邊緣附近之圖像亦顯示為白色。其結果,正向移動與反向移動之端部邊緣附近之圖像以相同之灰階度即白色顯示。即,根據圖6A所說明之掃描動作之方向以超音波光束之照射點成為ㄑ字狀或倒ㄑ字狀之方式照射超音波光束,藉此於掃描動作之去路與返路之端部邊緣附近之圖像中,成為相同之灰階度,而可抑制產生之圖像資訊之偏差,顯示接近被檢體之實像之圖像。即,可修正切換掃描動作之去路與返路之位置處之超音波反射波之顯示偏差。 In this way, in the final electronic scan of the forward movement process just before the shift process, the image near the end edge of the reverse movement process appears white. On the other hand, the initial electronic scan of the reverse movement process and The image near the end edge of the forward motion process also appears in white. As a result, the images near the end edges of forward movement and reverse movement are displayed with the same gray scale, that is, white. That is, the ultrasonic beam is irradiated in such a manner that the irradiation point of the ultrasonic beam becomes a U-shape or an inverted U-shape according to the direction of the scanning operation illustrated in FIG. The image becomes the same gray scale, thereby suppressing the deviation of the generated image information and displaying an image close to the real image of the subject. That is, the display deviation of the ultrasonic reflected wave at the position of switching the forward path and the return path of the scanning operation can be corrected.

接著,藉由圖8,說明陣列式超音波影像裝置1之平面掃描之動作流程。 Next, the operation flow of planar scanning of the array ultrasonic imaging device 1 will be explained with reference to FIG. 8 .

於步驟S81中,控制裝置10取得掃描區域之原點之位置(XY座標)、寬度(X軸方向之長度)、高度(Y軸方向之長度)之掃描條件。 In step S81, the control device 10 obtains the scanning conditions of the position of the origin of the scanning area (XY coordinates), width (length in the X-axis direction), and height (length in the Y-axis direction).

於步驟S82中,控制裝置10之掃描器控制部11驅動3軸掃描器2將探針 4移動至掃描範圍之原點之位置。 In step S82, the scanner control unit 11 of the control device 10 drives the 3-axis scanner 2 to move the probe 4Move to the origin of the scanning range.

於步驟S83中,控制裝置10於掃描區域之高度量(Y軸方向),重複步驟S83至步驟S811之處理。 In step S83, the control device 10 repeats the processing from step S83 to step S811 within the height of the scanning area (Y-axis direction).

於步驟S84中,掃描器控制部11藉由X軸掃描器21開始掃描區域之X軸方向之探針4之掃描動作。 In step S84, the scanner control unit 11 uses the X-axis scanner 21 to start the scanning operation of the probe 4 in the X-axis direction of the scanning area.

於步驟S85中,控制裝置10於掃描區域之寬度量(X軸方向),重複步驟S86至步驟S88之處理。 In step S85, the control device 10 repeats the processing of steps S86 to S88 within the width of the scanning area (X-axis direction).

於步驟S86中,控制裝置10之收發指令部12判定是否檢測到自掃描器控制部11通知之X軸掃描器21之編碼器輸出,於檢測到編碼器輸出之情形時(S86之是(Yes)),進行細節後述之步驟S87之探針4之電子掃描之處理。於無法檢測編碼器輸出之情形時,重複步驟S86之處理,等待檢測編碼器輸出。 In step S86, the command sending and receiving unit 12 of the control device 10 determines whether the encoder output of the X-axis scanner 21 notified from the scanner control unit 11 is detected. When the encoder output is detected (Yes in S86) )), perform the electronic scanning process of the probe 4 in step S87, which will be described in detail later. When the encoder output cannot be detected, the process of step S86 is repeated and waits for the encoder output to be detected.

於步驟S89中,控制裝置10之掃描器控制部11藉由3軸掃描器2之Y軸掃描器22,於Y軸方向上進行電子掃描之掃描寬度量之移動,而進行移位動作。 In step S89 , the scanner control unit 11 of the control device 10 performs a shifting operation by moving the Y-axis scanner 22 of the three-axis scanner 2 in the Y-axis direction by the scanning width of the electronic scanning.

於步驟S810中,掃描器控制部11係設定為將步驟S84開始之掃描動作中之探針4之移動方向(掃描方向)反轉。 In step S810, the scanner control unit 11 is set to reverse the moving direction (scanning direction) of the probe 4 in the scanning operation started in step S84.

藉由以上處理,陣列式超音波影像裝置1拍攝被檢體8之特定掃描區域之超音波影像。 Through the above processing, the array ultrasonic imaging device 1 captures an ultrasonic image of a specific scanning area of the subject 8 .

圖9係顯示圖8之步驟S87之探針4之電子掃描之處理之細節之流程圖。 FIG. 9 is a flowchart showing the details of the electronic scanning process of the probe 4 in step S87 of FIG. 8 .

於圖9中,將探針4之照射點數設為n個(奇數),將電子掃描之一端之照射點之序號設為1,並向另一端以升序進行編號。 In FIG. 9 , the number of irradiation points of the probe 4 is set to n (an odd number), the number of the irradiation points at one end of the electronic scan is set to 1, and the numbers are numbered in ascending order toward the other end.

於步驟S91中,時序處理部13(參考圖1)一面每次對變數i加1,一面重複步驟S92至步驟S94,直至變數i自1變為(n-1)/2為止。 In step S91, the timing processing unit 13 (refer to FIG. 1) repeats steps S92 to S94 while adding 1 to the variable i each time until the variable i changes from 1 to (n-1)/2.

於步驟S92中,時序處理部13選擇於照射點(i)照射超音波光束之振子群,並藉由振子動作信號產生部14(參考圖1)於探針4產生振子動作信號,於照射點(i)照射超音波光束。 In step S92, the timing processing unit 13 selects a group of transducers that irradiates the ultrasonic beam at the irradiation point (i), and generates a transducer operation signal on the probe 4 through the transducer operation signal generating unit 14 (refer to FIG. 1). (i) Irradiate ultrasonic beam.

於步驟S93中,時序處理部13選擇於照射點(n+1-i)照射超音波光束之振子群,並藉由振子動作信號產生部14(參考圖1)於探針4產生振子動作信號,於照射點(n+1-i)照射超音波光束。 In step S93, the timing processing unit 13 selects a group of transducers that irradiates the ultrasonic beam at the irradiation point (n+1-i), and generates a transducer operation signal on the probe 4 through the transducer operation signal generating unit 14 (refer to FIG. 1). , irradiate the ultrasonic beam at the irradiation point (n+1-i).

藉由重複步驟S92與步驟S93,時序處理部13自對向之端部之照射點向中央部之照射點,交替依序照射超音波光束。 By repeating steps S92 and S93, the timing processing unit 13 alternately and sequentially irradiates the ultrasonic beam from the irradiation point at the opposite ends to the irradiation point at the center.

於步驟S95中,時序處理部13於照射點((n+1)/2)照射超音波光束。即,於電子掃描之中央之照射點照射超音波光束。 In step S95, the timing processing unit 13 irradiates the ultrasonic beam at the irradiation point ((n+1)/2). That is, the ultrasonic beam is irradiated to the irradiation point in the center of the electronic scan.

藉由上述處理,於自電子掃描之一端朝向中心側之第1照射點、第3照射點……之位置、及自對向之另一端朝向中心側之第2照射點、第4照射點……之位置,依第1照射點、第2照射點、第3照射點、第4照射點之位置之順序照射超音波光束。 Through the above process, the positions of the first irradiation point, the third irradiation point... from one end of the electronic scanning toward the center side, and the second irradiation point, the fourth irradiation point... from the opposite end toward the center side. ... position, the ultrasonic beam is irradiated in the order of the positions of the first irradiation point, the second irradiation point, the third irradiation point, and the fourth irradiation point.

另,圖9已就探針4之照射點數為奇數個之情形進行說明,於偶數個之情形時,於步驟S91中,一面每次對變數i加1一面重複步驟S92至步驟S94直至變數i自1至n/2為止。且,只要刪除步驟S95之處理即可。 In addition, FIG. 9 has explained the case where the number of irradiation points of the probe 4 is an odd number. In the case of an even number, in step S91, steps S92 to step S94 are repeated while adding 1 to the variable i each time until the variable i i ranges from 1 to n/2. Moreover, the process of step S95 only needs to be deleted.

藉由上述處理,如圖6B所示,掃描動作1中之電子掃描之最後之超音波光束之照射點即照射點g之點列、與掃描動作2中之電子掃描之最初之超音波光束之照射點即照射點a之點列之偏差,較圖3B所示之情形小。 Through the above processing, as shown in FIG. 6B, the irradiation point of the last ultrasonic beam in the electronic scanning in the scanning operation 1, that is, the point sequence of the irradiation point g, and the first ultrasonic beam in the electronic scanning in the scanning operation 2 are The deviation of the irradiation point, that is, the point sequence of irradiation point a, is smaller than that shown in Figure 3B.

因此,控制裝置10將電子掃描之反射波設為X軸方向之位置(掃描行)相同之超音波光束之反射波,而可將算出反射波之信號強度並顯示為濃淡圖像時之、掃描動作1之顯示區域與掃描動作2之顯示區域之邊界部之濃淡圖像之偏差減小。 Therefore, the control device 10 sets the reflected wave of the electronic scanning to the reflected wave of the ultrasonic beam with the same position (scanning line) in the X-axis direction, and can calculate the signal intensity of the reflected wave and display it as a shading image. The deviation of the shading image at the boundary between the display area of operation 1 and the display area of scanning operation 2 is reduced.

又,由於探針4自對向之端部之照射點向中央部之照射點交替依序照射超音波光束來進行電子掃描,故可減小電子掃描之相鄰之照射點之位置偏移之惡化,可抑制掃描動作1之顯示區域內及掃描動作2之顯示區域內之濃淡圖像之偏差顯著化。 In addition, since the probe 4 irradiates the ultrasonic beam alternately and sequentially from the irradiation point at the opposite ends to the irradiation point at the center to perform electronic scanning, the positional deviation of adjacent irradiation points during electronic scanning can be reduced. Deterioration can suppress the deviation of the shading image in the display area of scanning operation 1 and the display area of scanning operation 2 from becoming conspicuous.

以上說明之實施形態之陣列式超音波影像裝置1可抑制於探針4之掃描之正向移動與反向移動中產生之反射波圖像之圖像偏差之發生,而可高速地取得降低被檢體8之圖像偏差之超音波圖像。 The array-type ultrasonic imaging device 1 of the embodiment described above can suppress the occurrence of image deviation in the reflected wave image generated during the forward movement and reverse movement of the scanning of the probe 4, and can achieve high-speed acquisition with reduced Ultrasonic image of image deviation of specimen 8.

本發明並非限定於上述之實施例者,而包含各種變化例。上述實施形態係為了易於理解地說明本發明而詳細說明者,並非限定於必須具備說明之所有構成者。 The present invention is not limited to the above-described embodiments, but includes various modifications. The above-mentioned embodiments are described in detail in order to explain the present invention in an easy-to-understand manner, and are not limited to those that must have all the components described.

a,g:照射點 a, g: irradiation point

Xn:座標 Xn: coordinates

Claims (9)

一種陣列式超音波影像裝置,其特徵在於:藉由一面進行以特定之掃描順序對被檢體照射超音波光束之電子掃描一面於垂直於振子之排設方向之方向上往復移動之掃描動作、及與上述振子之排設方向平行地移動超音波陣列探針之移位動作,來使複數個上述振子直線排設之超音波陣列探針進行平面掃描,且對被檢體之表面或積層邊界面照射超音波光束,顯示來自被檢體之超音波反射波之信號強度;且 以於電子掃描之一端之照射點照射超音波光束,接著於對向之另一端之照射點照射超音波光束,成為自各個端部逐一向中央部交替依序照射超音波光束之掃描順序之方式,選擇上述複數個振子照射超音波光束來進行電子掃描。 An array type ultrasonic imaging device, characterized in that it performs a scanning operation of reciprocating in a direction perpendicular to the arrangement direction of transducers while performing electronic scanning of irradiating ultrasonic beams to a subject in a specific scanning sequence. And the shifting action of moving the ultrasonic array probe parallel to the arrangement direction of the above-mentioned transducers, so that a plurality of the ultrasonic array probes with the above-mentioned transducers arranged in a straight line can perform planar scanning, and scan the surface or laminated edge of the object to be examined. The interface illuminates the ultrasonic beam and displays the signal strength of the ultrasonic reflected wave from the subject; and The ultrasonic beam is irradiated from the irradiation point at one end of the electronic scan, and then the ultrasonic beam is irradiated from the irradiation point at the opposite end, forming a scanning sequence in which the ultrasonic beam is irradiated alternately from each end to the center one by one. , select the plurality of vibrators mentioned above to irradiate ultrasonic beams for electronic scanning. 如請求項1之陣列式超音波影像裝置,其包含: 振子動作信號產生部,其控制於上述超音波光束之每個照射位置之上述超音波陣列探針之振子群之超音波之收發; 時序處理部,其選擇與上述電子掃描之掃描順序對應之上述振子群; 收發指令部,其對上述振子動作信號產生部經由上述時序處理部指示產生振子動作信號,並開始上述超音波陣列探針之上述電子掃描;及 控制部,其與上述超音波陣列探針之掃描動作同步控制上述收發指令部。 For example, the array ultrasonic imaging device of claim 1 includes: A vibrator action signal generating unit that controls the transmission and reception of ultrasonic waves of the vibrator group of the ultrasonic array probe at each irradiation position of the ultrasonic beam; A timing processing unit that selects the above-mentioned oscillator group corresponding to the scanning order of the above-mentioned electronic scanning; a sending and receiving instruction unit that instructs the transducer operation signal generating unit to generate the transducer operation signal through the timing processing unit and starts the electronic scanning of the ultrasonic array probe; and A control unit that controls the sending and receiving command unit synchronously with the scanning action of the ultrasonic array probe. 如請求項2之陣列式超音波影像裝置,其中 上述時序處理部以朝向上述超音波陣列探針之移動之行進方向,超音波光束之照射點外觀上成為く字狀或倒く字狀之方式選擇上述振子群。 The array ultrasonic imaging device of claim 2, wherein The timing processing unit selects the transducer group so that the irradiation point of the ultrasonic beam becomes a U-shape or an inverted U-shape in appearance toward the moving direction of the ultrasonic array probe. 如請求項2之陣列式超音波影像裝置,其中 上述控制部係 於使上述超音波陣列探針對上述被檢體進行平面掃描之座標系中,將垂直於上述超音波陣列探針之振子之排設方向之方向設為X軸方向,將上述振子之排設方向設為Y軸方向,將進行平面掃描之超音波光束之最初之照射點設為座標原點之情形時, 使上述移位動作之前一刻之電子掃描之開始位置之X座標位置、與緊接著上述移位動作之後之電子掃描之開始位置之X座標位置相等。 The array ultrasonic imaging device of claim 2, wherein The above control departments In the coordinate system in which the ultrasonic array probe performs a planar scan of the subject, the direction perpendicular to the arrangement direction of the transducers of the ultrasonic array probe is the X-axis direction, and the arrangement direction of the transducers is When the Y-axis direction is set and the initial irradiation point of the ultrasonic beam for planar scanning is set as the coordinate origin, The X-coordinate position of the starting position of the electronic scanning immediately before the above-mentioned shifting action is equal to the X-coordinate position of the starting position of the electronic scanning immediately after the above-mentioned shifting action. 如請求項1之陣列式超音波影像裝置,其中 於超音波光束之每個照射位置接收來自被檢體之超音波反射波並求出反射波之信號強度,並於與上述平面掃描對應而劃分為矩形之顯示區域之特定位置,顯示與上述信號強度對應之濃度之圖像。 The array ultrasonic imaging device of claim 1, wherein Receive the ultrasonic reflected wave from the subject at each irradiation position of the ultrasonic beam and calculate the signal strength of the reflected wave, and display the above signal at a specific position in the display area divided into rectangles corresponding to the above-mentioned plane scan. An image of intensity corresponding to concentration. 如請求項1之陣列式超音波影像裝置,其包含: 反射波信號處理部,其算出藉由上述振子接收到之上述超音波光束之反射波之信號強度。 For example, the array ultrasonic imaging device of claim 1 includes: A reflected wave signal processing unit calculates the signal intensity of the reflected wave of the ultrasonic beam received by the transducer. 如請求項6之陣列式超音波影像裝置,其包含: 反射波圖像產生部,其將以超音波陣列探針之一次電子掃描檢測出之來自被檢體之反射波,作為X軸方向之位置相同之超音波光束之反射波而算出反射波之信號強度,求出濃淡圖像;及 顯示部,其將由上述反射波圖像產生部求出之濃淡圖像,顯示為被檢體之平面掃描後之超音波光束之反射波之濃淡圖像。 For example, the array ultrasonic imaging device of claim 6 includes: The reflected wave image generating unit uses the reflected wave from the subject detected by primary electronic scanning of the ultrasonic array probe as the reflected wave of the ultrasonic beam at the same position in the X-axis direction to calculate the reflected wave signal. Intensity, find the shaded image; and The display unit displays the gradation image obtained by the reflected wave image generating unit as a gradation image of the reflected wave of the ultrasonic beam after plane scanning of the subject. 一種陣列式超音波影像裝置之控制方法,其特徵在於其係將複數個振子直線排設之超音波陣列探針之超音波光束,依序照射至被檢體而進行電子掃描,顯示來自上述被檢體之超音波反射波之信號強度之陣列式超音波影像裝置的控制方法,且該控制方法包含: 第1步驟,其一面以於電子掃描之一端之照射點照射超音波光束,接著於對向之另一端之照射點照射超音波光束,成為自各個端部逐一向中央部交替依序照射超音波光束之掃描順序之方式選擇上述複數個振子,而對上述被檢體依特定之掃描順序照射超音波光束,一面於垂直於上述超音波陣列探針之振子之排設方向之方向上,以特定速度連續移動上述超音波陣列探針; 移位步驟,其於上述電子掃描之掃描寬度量,進行與上述振子之排設方向並行地移動上述超音波陣列探針之移位動作;及 第2步驟,其一面以於電子掃描之一端之照射點照射超音波光束,接著於對向之另一端之照射點照射超音波光束,成為自各個端部逐一向中央部交替依序照射超音波光束之掃描順序之方式選擇上述複數個振子,而對上述被檢體依特定之掃描順序照射超音波光束,一面與上述第1步驟逆向地以特定速度連續移動上述超音波陣列探針;且 藉由重複上述第1步驟、上述移位步驟、及上述第2步驟,對被檢體整面進行電子掃描。 A method for controlling an array-type ultrasonic imaging device, which is characterized in that the ultrasonic beam of an ultrasonic array probe with a plurality of vibrators arranged in a straight line is irradiated to the subject in sequence and electronically scanned to display images from the subject. A method for controlling the signal intensity of the ultrasonic reflected wave of the specimen using an array ultrasonic imaging device, and the control method includes: In the first step, one side is irradiated with an ultrasonic beam from the irradiation point at one end of the electronic scan, and then the ultrasonic beam is irradiated from the irradiation point at the opposite end, so that the ultrasonic wave is irradiated sequentially from each end to the center one by one. The scanning sequence of the light beam selects the above-mentioned plurality of vibrators, and irradiates the above-mentioned subject with the ultrasonic beam in a specific scanning order, with a specific direction in a direction perpendicular to the arrangement direction of the vibrators of the above-mentioned ultrasonic array probe. Continuously move the above-mentioned ultrasonic array probe at a high speed; A shifting step, which performs a shifting action of moving the ultrasonic array probe in parallel with the arrangement direction of the transducers within the scan width of the electronic scan; and In the second step, one side is irradiated with an ultrasonic beam from the irradiation point at one end of the electronic scan, and then the ultrasonic beam is irradiated from the irradiation point at the opposite end, so that the ultrasonic wave is irradiated sequentially from each end to the center one by one. The plurality of transducers are selected in a scanning order of the beam, and the ultrasonic beam is irradiated to the subject in a specific scanning order while continuously moving the ultrasonic array probe at a specific speed in the opposite direction to the first step; and By repeating the above-described first step, the above-described shifting step, and the above-described second step, the entire surface of the subject is electronically scanned. 如請求項8之陣列式超音波影像裝置之控制方法,其包含以下步驟: 檢測有無使上述超音波陣列探針進行掃描動作之X軸掃描之編碼器輸出;及 於檢測到上述編碼器輸出時,於電子掃描之一端之第1照射點照射超音波光束。 For example, the control method of the array ultrasonic imaging device of claim 8 includes the following steps: Detect whether there is an encoder output for X-axis scanning that causes the above-mentioned ultrasonic array probe to perform a scanning action; and When the encoder output is detected, the ultrasonic beam is irradiated at the first irradiation point at one end of the electronic scan.
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