TWI827816B - 有機溶媒的處理方法 - Google Patents
有機溶媒的處理方法 Download PDFInfo
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- TWI827816B TWI827816B TW109109032A TW109109032A TWI827816B TW I827816 B TWI827816 B TW I827816B TW 109109032 A TW109109032 A TW 109109032A TW 109109032 A TW109109032 A TW 109109032A TW I827816 B TWI827816 B TW I827816B
- Authority
- TW
- Taiwan
- Prior art keywords
- organic solvent
- treatment material
- water
- ultrapure water
- fine particles
- Prior art date
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- 239000003960 organic solvent Substances 0.000 title claims abstract description 53
- 239000000463 material Substances 0.000 claims abstract description 59
- 238000000034 method Methods 0.000 claims abstract description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 claims abstract description 13
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 22
- 239000012498 ultrapure water Substances 0.000 claims description 22
- 239000000835 fiber Substances 0.000 claims description 6
- 229920000642 polymer Polymers 0.000 claims description 6
- 238000005349 anion exchange Methods 0.000 claims description 4
- 239000011859 microparticle Substances 0.000 claims description 4
- 238000003672 processing method Methods 0.000 claims description 3
- 239000010419 fine particle Substances 0.000 abstract description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 22
- -1 and in particular Substances 0.000 description 12
- 239000000377 silicon dioxide Substances 0.000 description 11
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 9
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 8
- 125000000524 functional group Chemical group 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 238000005342 ion exchange Methods 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- RFFLAFLAYFXFSW-UHFFFAOYSA-N 1,2-dichlorobenzene Chemical compound ClC1=CC=CC=C1Cl RFFLAFLAYFXFSW-UHFFFAOYSA-N 0.000 description 2
- JKNCOURZONDCGV-UHFFFAOYSA-N 2-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical compound CN(C)CCOC(=O)C(C)=C JKNCOURZONDCGV-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- HGINCPLSRVDWNT-UHFFFAOYSA-N Acrolein Chemical compound C=CC=O HGINCPLSRVDWNT-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 2
- 229920001774 Perfluoroether Polymers 0.000 description 2
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical group FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920000570 polyether Polymers 0.000 description 2
- 229920000098 polyolefin Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 125000000542 sulfonic acid group Chemical group 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- ZPQOPVIELGIULI-UHFFFAOYSA-N 1,3-dichlorobenzene Chemical compound ClC1=CC=CC(Cl)=C1 ZPQOPVIELGIULI-UHFFFAOYSA-N 0.000 description 1
- OCJBOOLMMGQPQU-UHFFFAOYSA-N 1,4-dichlorobenzene Chemical compound ClC1=CC=C(Cl)C=C1 OCJBOOLMMGQPQU-UHFFFAOYSA-N 0.000 description 1
- IBSQPLPBRSHTTG-UHFFFAOYSA-N 1-chloro-2-methylbenzene Chemical compound CC1=CC=CC=C1Cl IBSQPLPBRSHTTG-UHFFFAOYSA-N 0.000 description 1
- OSOUNOBYRMOXQQ-UHFFFAOYSA-N 1-chloro-3-methylbenzene Chemical compound CC1=CC=CC(Cl)=C1 OSOUNOBYRMOXQQ-UHFFFAOYSA-N 0.000 description 1
- KMBMQZQZBOLJHN-UHFFFAOYSA-N 2-methyloxirane;oxolane Chemical compound CC1CO1.C1CCOC1 KMBMQZQZBOLJHN-UHFFFAOYSA-N 0.000 description 1
- KGIGUEBEKRSTEW-UHFFFAOYSA-N 2-vinylpyridine Chemical compound C=CC1=CC=CC=N1 KGIGUEBEKRSTEW-UHFFFAOYSA-N 0.000 description 1
- IWTYTFSSTWXZFU-UHFFFAOYSA-N 3-chloroprop-1-enylbenzene Chemical compound ClCC=CC1=CC=CC=C1 IWTYTFSSTWXZFU-UHFFFAOYSA-N 0.000 description 1
- NPDACUSDTOMAMK-UHFFFAOYSA-N 4-Chlorotoluene Chemical compound CC1=CC=C(Cl)C=C1 NPDACUSDTOMAMK-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical compound OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 229920002292 Nylon 6 Polymers 0.000 description 1
- 229920002302 Nylon 6,6 Polymers 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229930040373 Paraformaldehyde Natural products 0.000 description 1
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004693 Polybenzimidazole Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- FJWGYAHXMCUOOM-QHOUIDNNSA-N [(2s,3r,4s,5r,6r)-2-[(2r,3r,4s,5r,6s)-4,5-dinitrooxy-2-(nitrooxymethyl)-6-[(2r,3r,4s,5r,6s)-4,5,6-trinitrooxy-2-(nitrooxymethyl)oxan-3-yl]oxyoxan-3-yl]oxy-3,5-dinitrooxy-6-(nitrooxymethyl)oxan-4-yl] nitrate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O)O[C@H]1[C@@H]([C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@@H](CO[N+]([O-])=O)O1)O[N+]([O-])=O)CO[N+](=O)[O-])[C@@H]1[C@@H](CO[N+]([O-])=O)O[C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O FJWGYAHXMCUOOM-QHOUIDNNSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000003368 amide group Chemical group 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000003011 anion exchange membrane Substances 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 125000002843 carboxylic acid group Chemical group 0.000 description 1
- 238000005341 cation exchange Methods 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 229920002866 paraformaldehyde Polymers 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 125000002467 phosphate group Chemical group [H]OP(=O)(O[H])O[*] 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical group O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 1
- ABLZXFCXXLZCGV-UHFFFAOYSA-N phosphonic acid group Chemical group P(O)(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920001652 poly(etherketoneketone) Polymers 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920002480 polybenzimidazole Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 150000003141 primary amines Chemical group 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 125000004076 pyridyl group Chemical group 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 125000001302 tertiary amino group Chemical group 0.000 description 1
- 239000012085 test solution Substances 0.000 description 1
- 229950011008 tetrachloroethylene Drugs 0.000 description 1
- 125000005369 trialkoxysilyl group Chemical group 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J47/00—Ion-exchange processes in general; Apparatus therefor
- B01J47/014—Ion-exchange processes in general; Apparatus therefor in which the adsorbent properties of the ion-exchanger are involved, e.g. recovery of proteins or other high-molecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J41/00—Anion exchange; Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/04—Processes using organic exchangers
- B01J41/05—Processes using organic exchangers in the strongly basic form
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
- B01D15/08—Selective adsorption, e.g. chromatography
- B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
- B01D15/36—Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction
- B01D15/361—Ion-exchange
- B01D15/363—Anion-exchange
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J39/00—Cation exchange; Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
- B01J39/04—Processes using organic exchangers
- B01J39/05—Processes using organic exchangers in the strongly acidic form
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J41/00—Anion exchange; Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/04—Processes using organic exchangers
- B01J41/07—Processes using organic exchangers in the weakly basic form
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J41/00—Anion exchange; Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/08—Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/12—Macromolecular compounds
- B01J41/13—Macromolecular compounds obtained otherwise than by reactions only involving unsaturated carbon-to-carbon bonds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J41/00—Anion exchange; Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/08—Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/12—Macromolecular compounds
- B01J41/14—Macromolecular compounds obtained by reactions only involving unsaturated carbon-to-carbon bonds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J47/00—Ion-exchange processes in general; Apparatus therefor
- B01J47/12—Ion-exchange processes in general; Apparatus therefor characterised by the use of ion-exchange material in the form of ribbons, filaments, fibres or sheets, e.g. membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J47/00—Ion-exchange processes in general; Apparatus therefor
- B01J47/12—Ion-exchange processes in general; Apparatus therefor characterised by the use of ion-exchange material in the form of ribbons, filaments, fibres or sheets, e.g. membranes
- B01J47/127—Ion-exchange processes in general; Apparatus therefor characterised by the use of ion-exchange material in the form of ribbons, filaments, fibres or sheets, e.g. membranes in the form of filaments or fibres
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
一種有機溶媒的處理方法,從電子零件製造步驟中使用的有機溶媒中去除微粒子,所述有機溶媒的處理方法的特徵在於包括使水中具有正電荷或負電荷且含水率為3質量%以上的處理材與所述有機溶媒接觸的步驟。一種面向電子零件製造步驟的有機溶媒處理材,藉由與電子零件製造步驟中使用的有機溶媒接觸而從有機溶媒中去除微粒子,且所述有機溶媒處理材在水中具有正電荷或負電荷。
Description
本發明是有關於一種從電子零件製造步驟中使用的有機溶媒中去除微粒子的處理方法及處理材。
近年來,隨著半導體製造製程的發展,水中的微粒子管理日益嚴格,例如在國際半導體技術指標(ITRS:International Technology Roadmap for Semiconductors)中,2019年作為粒徑>11.9nm的保證值,要求<1000個/L。與此相關,關於半導體製造時使用的溶媒中的微粒子去除,雖然如所述超純水般未設定明確的微粒子管理,但伴隨著半導體結構的微細化,為了防止圖案倒塌,在晶圓清洗時開始使用表面張力小的溶媒。其結果,溶媒中的微粒子等的去除需求提高。
作為從有機溶媒中去除微粒子的方法,自先前以來採用蒸餾法(專利文獻1、專利文獻2)。另外,亦採用利用過濾器過濾有機溶媒(專利文獻3)。
專利文獻4中記載了為了從異丙醇中去除微粒子,不僅進行蒸餾,而且進而使離子交換樹脂(陽離子性樹脂、陰離子性樹脂或它們的混合物)接觸。
再者,專利文獻5中記載了為了降低超純水中的二氧化
矽濃度,使具有陰離子交換基的陰離子吸附膜與水接觸。
[現有技術文獻]
[專利文獻]
專利文獻1:日本專利特開昭58-211000號公報
專利文獻2:日本專利特開2016-30233號公報
專利文獻3:日本專利特開平2-119901號公報
專利文獻4:日本專利特表2003-535836號公報
專利文獻5:日本專利特開平10-216721號公報
本發明的目的在於提供一種可從電子零件製造步驟中使用的有機溶媒中去除微粒子的有機溶媒的處理方法及處理材。
本發明的電子零件製造步驟中使用的有機溶媒的處理方法包括使水中具有正電荷或負電荷且含水率為3質量%以上的處理材與所述有機溶媒接觸的步驟。
本發明的一形態中,在所述接觸步驟之前,向所述有機溶媒中添加超純水。
本發明的一形態中,作為所述處理材,使用與水接觸處理過的處理材。
本發明的一形態中,所述處理材由具有陰離子交換基的聚合物構成。
本發明的一形態中,所述處理材為纖維的形態。
本發明的處理材是藉由與電子零件製造步驟中使用的有機溶媒接觸而從有機溶媒中去除微粒子的有機溶媒處理材,且在水中具有正電荷或負電荷。
根據本發明的處理方法及處理材,可使有機溶媒中的微粒子吸附於處理材上並去除。
以下,將更詳細地說明本發明。
本發明的方法中,使電子零件製造步驟中使用的有機溶媒在液體狀態下,與水中具有正電荷或負電荷且含水率為3質量%以上的處理材接觸,去除微粒子。作為微粒子,除了二氧化矽微粒子以外,可列舉各種無機物微粒子或有機物微粒子、尤其是具有負電荷或正電荷的微粒子。
本發明的一形態中,作為處理材,使用在與有機溶媒接觸前與水接觸者。
本發明的另一形態中,在向有機溶媒中添加超純水後,使其與所述處理材接觸。
所述處理材較佳為由賦予了陽離子交換基或陰離子交換基的聚合物構成。
作為聚合物,可使用聚乙烯、聚丙烯等聚烯烴、聚環氧乙烷、聚環氧丙烷等聚醚、聚四氟乙烯(Polytetrafluoro Ethylene,PTFE)、氯三氟乙烯(Chlorotrifluoroethylene,CTFE)、全氟烷氧基(Polyfluoroalkoxy,PFA)、聚偏二氟乙烯(Polyvinylidene Fluoride,PVDF)等氟樹脂、聚氯乙烯等鹵化聚烯烴、尼龍-6、尼龍-66等聚醯胺、脲樹脂、酚樹脂、三聚氰胺樹脂、聚苯乙烯、纖維素、乙酸纖維素、硝酸纖維素、聚醚酮、聚醚酮酮、聚醚醚酮、聚碸、聚醚碸、聚醯亞胺、聚醚醯亞胺、聚醯胺醯亞胺、聚苯並咪唑、聚碳酸酯、聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、聚苯硫醚、聚丙烯腈、聚醚腈、聚乙烯醇及它們的共聚物等素材,但不限於此。並不特別限定於一種素材,可根據需要選擇各種素材。但是,必須對有機溶媒具有耐性。
於對聚合物賦予離子交換能力時,作為離子交換基,有磺酸基、磷酸基、膦酸基、次膦酸基、羧酸基、羥基、酚基、四級銨基、一級胺基~三級胺基、吡啶基、醯胺基等,但不限於此。該些官能基不僅可為H型、OH型,而且亦可為Na等鹽型。本發明中,可導入至少一種以上該些官能基,亦可導入多種分別不同的離子交換基,形成具有不同的交換基的複合過濾器。
官能基的導入方法因聚合物材質而異,選擇適當的導入方法。例如,於聚苯乙烯的情況下,藉由向硫酸溶液中添加適量的多聚甲醛並進行加熱交聯,可導入磺酸基。於聚乙烯醇的情況下,藉由使三烷氧基矽烷基或三氯矽烷基或環氧基等作用於羥基
等,可導入官能基。於因材質無法直接導入官能基的情況下,可經過首先在導入苯乙烯等反應性高的單體(稱為反應性單體)後導入官能基的2階段以上的導入操作,導入目標官能基。作為該些的反應性單體,有甲基丙烯酸縮水甘油酯、苯乙烯、氯甲基苯乙烯、丙烯醛、乙烯基吡啶、丙烯腈等,但不限於此。官能基可在進行奈米纖維化之前導入,亦可在纖維集束時塗佈或混煉將具有離子交換能力的高分子或樹脂溶解或微粉碎而成者,或者利用化學反應使其結合,藉此導入離子交換基。
處理材的形態除了平面狀的膜以外,亦可為纖維狀、中空絲狀等的任一種。處理材亦可為多孔膜。
藉由在使處理材與有機溶媒接觸之前與水接觸,可提高處理材的微粒子去除性能。如此,較佳為於經處理的有機溶媒是未添加超純水的有機溶媒100%時進行使處理材與水(超純水)接觸的處理。再者,本發明中,以下有時將在使處理材與超純水接觸後使所述處理材與預定處理的有機溶媒接觸的處理稱為水接觸處理。
為了進行水接觸處理,例如將處理材與超純水收容在容器中並使其接觸後,向所述容器中注入預定處理的有機溶媒,然後排出有機溶媒。另外,亦可將處理材填充到管柱中,使超純水流通後,使預定處理的有機溶媒流通。於後者的情況下,可原樣繼續流動有機溶媒,轉移到有機溶媒處理步驟中。
為了使處理材與有機溶媒或添加了超純水的有機溶媒
(以下,有時稱為有機溶媒等)接觸,除了向收容有有機溶媒等的容器內投入處理材並使其浸漬的方法以外,可列舉於收容有處理材的管柱中流通有機溶媒等的方法、或者於處理材為多孔膜時在使有機溶媒等透過的形態下接觸的方法等,但並不限定於該些。
本發明作為處理對象的電子零件製造步驟中使用的有機溶媒並無特別限定,若列舉其代表性溶媒,則有以下溶媒。即、甲醇、乙醇、異丙醇等醇類;二氯甲烷、氯仿、四氯化碳、三氯乙烯、四氯乙烯、1,1,1-三氯乙烷、氟氯碳化物113、氯苯、鄰二氯苯、間二氯苯、對二氯苯、鄰氯甲苯、間氯甲苯、對氯甲苯等鹵化烴;***等醚類;環氧丙烷(Propylene Oxide,PO)、環氧丁烷(Propylene Oxide,BO)等環氧類;己烷、環己烷、苯、甲苯、二甲苯等烴類;丙酮、甲基乙基酮(methyl ethyl ketone,MEK)、甲基異丁基酮(methyl isobutyl ketone,MIBK)等酮類;乙酸乙酯、正丙基、異丙基、正丁基、第二丁基、第三丁基等酯類、N-甲基-2-吡咯啶酮(N-methyl pyrrolidone,NMP)。
本發明尤其適合於異丙醇(Isopropanol)(以下,有時記載為IPA)、N-甲基-2-吡咯啶酮(NMP)等半導體製造製程中使用的有機溶媒的處理。
於使添加了超純水的有機溶媒與處理材接觸來去除有機溶媒中的微粒子的情況下,超純水較佳為以相對於全部溶媒(有機溶媒與超純水的合計)為5質量%~80質量%、尤其是5質量%~50質量%的方式添加,但不限定於此。
[實施例]
以下,對實施例及比較例進行說明。
以下的實施例1~實施例4及比較例1中,利用下述接觸方法1使以下的IPA系試驗液與下述處理材接觸。
<試驗液>
試驗液1:在IPA(關東化學公司製造的高純度IPA)中添加了50mg/L的二氧化矽微粒子(科福倫特(Corefront)公司製造的西卡斯特(sicastar):粒徑30nm)而成者。
試驗液2:將所述IPA與超純水以50:50的比例混合並添加所述量的所述二氧化矽微粒子而成者。
<處理材>
處理材A:環境淨化研究所製造的離子交換纖維甲基丙烯酸二甲胺乙酯(Dimethyl amino ethyl methacrylate,DMAEMA)纖維20m(7.7g)
處理材B:阿斯特姆(astom)公司製造的陰離子交換膜AHA約30cm×20cm,厚度220μm(濕潤狀態下為16g)
<接觸方法>
將處理材填充到聚乙烯容器(250mL容量)中,注入100mL試驗液,浸漬30分鐘。
[實施例1~實施例4、比較例1、比較例2]
按照所述接觸方法1使所述試驗液1或試驗液2與以下述方式處理過的各處理材接觸。藉由鉬吸光光度法測定接觸後的二氧
化矽濃度,算出二氧化矽去除率。結果如表1所示。
實施例1:所述處理材A(不進行處理而於該狀態下使用)
實施例2:所述處理材B(不進行處理而於該狀態下使用)
實施例3:在聚乙烯容器(250mL容量)中收容處理材B及超純水100mL,浸漬30分鐘後,排出超純水的水接觸處理品
實施例4:所述處理材A(不進行處理而於該狀態下使用)
比較例1:將處理材A在110℃下乾燥了24小時的乾燥處理品
比較例2:將處理材B在110℃下乾燥了24小時的乾燥處理品
※含水率的計算方法
含水率=[1-(乾燥處理後的處理材重量/乾燥處理前的處理材重量)].100 (%)
[考察]
在含水率為3%以上的調節狀態下進行的實施例1、實施例2中,與比較例1、比較例2相比,可獲得更良好的二氧化矽去除率。
若進一步提高處理材的含水率(實施例3),則可獲得更高的二氧化矽去除率。
另外,藉由向IPA中添加超純水,即使未對處理材A實施水調節,亦可獲得非常良好的二氧化矽去除率。
[參考例1~參考例3]
依據接觸方法1使所述處理材A、處理材B與添加了二氧化矽微粒子的超純水(二氧化矽微粒子添加量為50μg/L)接觸,求出二氧化矽去除率。
結果如表2所示。
使用特定的形態詳細說明了本發明,但本領域技術人員明確可不脫離本發明的主旨與範圍而進行各種變更。
本申請案基於2019年3月27日提出申請的日本專利申請2019-060899,並藉由引用而援用其整體內容。
Claims (3)
- 一種有機溶媒的處理方法,從電子零件製造步驟中使用的有機溶媒中去除微粒子,所述有機溶媒的處理方法的特徵在於,包括:向所述有機溶媒中以超純水相對於有機溶媒與超純水的合計的比例為5質量%~80質量%的方式添加超純水的步驟;以及使水中具有正電荷或負電荷且含水率為3質量%以上的處理材與添加了超純水的所述有機溶媒接觸的接觸步驟,其中所述處理材由具有陰離子交換基的聚合物構成。
- 如請求項1所述的有機溶媒的處理方法,其中作為所述處理材,使用與水接觸處理過的處理材。
- 如請求項1或請求項2所述的有機溶媒的處理方法,其中所述處理材為纖維的形態。
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