TWI827806B - 濾光器、濾光器之搬送支撐體、濾光器之製造方法 - Google Patents

濾光器、濾光器之搬送支撐體、濾光器之製造方法 Download PDF

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Publication number: TWI827806B
Authority: TW; Taiwan
Prior art keywords: optical filter; substrate; magnesium fluoride; optical; film
Prior art date: 2019-02-26

Application number

TW109106156A

Other languages

English (en)

Chinese (zh)

Other versions

TW202036045A (zh

Inventor

土屋千佳

Original Assignee

日商Ａｇｃ股份有限公司

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2019-02-26

Filing date

2020-02-26

Publication date

2024-01-01

2020-02-26 Application filed by 日商Ａｇｃ股份有限公司 filed Critical 日商Ａｇｃ股份有限公司

2020-10-01 Publication of TW202036045A publication Critical patent/TW202036045A/zh

2024-01-01 Application granted granted Critical

2024-01-01 Publication of TWI827806B publication Critical patent/TWI827806B/zh

Links

230000003287 optical effect Effects 0.000 title claims abstract description 237
238000004519 manufacturing process Methods 0.000 title claims description 28
239000000758 substrate Substances 0.000 claims abstract description 102
ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims abstract description 85
229910001635 magnesium fluoride Inorganic materials 0.000 claims abstract description 85
239000011777 magnesium Substances 0.000 claims abstract description 32
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims abstract description 29
229910052749 magnesium Inorganic materials 0.000 claims abstract description 29
238000010030 laminating Methods 0.000 claims abstract description 8
229920005989 resin Polymers 0.000 claims description 51
239000011347 resin Substances 0.000 claims description 51
238000000034 method Methods 0.000 claims description 40
238000005520 cutting process Methods 0.000 claims description 35
230000001681 protective effect Effects 0.000 claims description 18
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 17
230000003746 surface roughness Effects 0.000 claims description 16
239000011521 glass Substances 0.000 claims description 14
239000000049 pigment Substances 0.000 claims description 8
239000010408 film Substances 0.000 description 170
239000000843 powder Substances 0.000 description 29
239000000975 dye Substances 0.000 description 17
229910052751 metal Inorganic materials 0.000 description 17
239000002184 metal Substances 0.000 description 17
238000001704 evaporation Methods 0.000 description 14
239000000428 dust Substances 0.000 description 11
150000002500 ions Chemical class 0.000 description 10
238000011156 evaluation Methods 0.000 description 9
238000003384 imaging method Methods 0.000 description 9
238000005259 measurement Methods 0.000 description 6
-1 polyparaphenylene Polymers 0.000 description 6
239000010409 thin film Substances 0.000 description 6
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
230000000052 comparative effect Effects 0.000 description 5
230000005611 electricity Effects 0.000 description 5
230000008020 evaporation Effects 0.000 description 5
239000000463 material Substances 0.000 description 5
229910052760 oxygen Inorganic materials 0.000 description 5
239000001301 oxygen Substances 0.000 description 5
230000035945 sensitivity Effects 0.000 description 5
230000003068 static effect Effects 0.000 description 5
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 4
230000015572 biosynthetic process Effects 0.000 description 4
238000004140 cleaning Methods 0.000 description 4
238000010438 heat treatment Methods 0.000 description 4
239000000203 mixture Substances 0.000 description 4
238000012986 modification Methods 0.000 description 4
230000004048 modification Effects 0.000 description 4
229920001225 polyester resin Polymers 0.000 description 4
239000004645 polyester resin Substances 0.000 description 4
229920001721 polyimide Polymers 0.000 description 4
239000009719 polyimide resin Substances 0.000 description 4
238000004544 sputter deposition Methods 0.000 description 4
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
239000004721 Polyphenylene oxide Substances 0.000 description 3
229910004298 SiO 2 Inorganic materials 0.000 description 3
229910052802 copper Inorganic materials 0.000 description 3
239000010949 copper Substances 0.000 description 3
238000012937 correction Methods 0.000 description 3
239000005303 fluorophosphate glass Substances 0.000 description 3
238000000691 measurement method Methods 0.000 description 3
239000002245 particle Substances 0.000 description 3
229920000570 polyether Polymers 0.000 description 3
230000008569 process Effects 0.000 description 3
238000012545 processing Methods 0.000 description 3
239000005871 repellent Substances 0.000 description 3
239000000126 substance Substances 0.000 description 3
238000005406 washing Methods 0.000 description 3
YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
229910010413 TiO 2 Inorganic materials 0.000 description 2
239000000853 adhesive Substances 0.000 description 2
230000001070 adhesive effect Effects 0.000 description 2
230000003667 anti-reflective effect Effects 0.000 description 2
230000005540 biological transmission Effects 0.000 description 2
230000008859 change Effects 0.000 description 2
239000003822 epoxy resin Substances 0.000 description 2
239000011737 fluorine Substances 0.000 description 2
229910052731 fluorine Inorganic materials 0.000 description 2
150000002222 fluorine compounds Chemical class 0.000 description 2
AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
229910052742 iron Inorganic materials 0.000 description 2
239000000395 magnesium oxide Substances 0.000 description 2
CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
229910044991 metal oxide Inorganic materials 0.000 description 2
150000004706 metal oxides Chemical class 0.000 description 2
229920001230 polyarylate Polymers 0.000 description 2
229920005668 polycarbonate resin Polymers 0.000 description 2
239000004431 polycarbonate resin Substances 0.000 description 2
229920000647 polyepoxide Polymers 0.000 description 2
230000003595 spectral effect Effects 0.000 description 2
238000002834 transmittance Methods 0.000 description 2
239000004925 Acrylic resin Substances 0.000 description 1
229920000178 Acrylic resin Polymers 0.000 description 1
229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
229910052691 Erbium Inorganic materials 0.000 description 1
229910019440 Mg(OH) Inorganic materials 0.000 description 1
229930192627 Naphthoquinone Natural products 0.000 description 1
229910052779 Neodymium Inorganic materials 0.000 description 1
239000004962 Polyamide-imide Substances 0.000 description 1
229920000265 Polyparaphenylene Polymers 0.000 description 1
239000005354 aluminosilicate glass Substances 0.000 description 1
PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
150000004056 anthraquinones Chemical class 0.000 description 1
230000003373 anti-fouling effect Effects 0.000 description 1
239000006117 anti-reflective coating Substances 0.000 description 1
150000001540 azides Chemical class 0.000 description 1
238000005452 bending Methods 0.000 description 1
230000008901 benefit Effects 0.000 description 1
239000005388 borosilicate glass Substances 0.000 description 1
229910052799 carbon Inorganic materials 0.000 description 1
230000003749 cleanliness Effects 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
238000000576 coating method Methods 0.000 description 1
230000000295 complement effect Effects 0.000 description 1
239000002131 composite material Substances 0.000 description 1
150000001875 compounds Chemical class 0.000 description 1
238000012790 confirmation Methods 0.000 description 1
229910001431 copper ion Inorganic materials 0.000 description 1
150000001925 cycloalkenes Chemical class 0.000 description 1
230000002542 deteriorative effect Effects 0.000 description 1
238000011161 development Methods 0.000 description 1
238000010586 diagram Methods 0.000 description 1
238000007598 dipping method Methods 0.000 description 1
238000009826 distribution Methods 0.000 description 1
150000004662 dithiols Chemical class 0.000 description 1
230000009977 dual effect Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
230000009477 glass transition Effects 0.000 description 1
210000003692 ilium Anatomy 0.000 description 1
239000012535 impurity Substances 0.000 description 1
QWDJLDTYWNBUKE-UHFFFAOYSA-L magnesium bicarbonate Chemical compound [Mg+2].OC([O-])=O.OC([O-])=O QWDJLDTYWNBUKE-UHFFFAOYSA-L 0.000 description 1
239000002370 magnesium bicarbonate Substances 0.000 description 1
229910000022 magnesium bicarbonate Inorganic materials 0.000 description 1
235000014824 magnesium bicarbonate Nutrition 0.000 description 1
ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
239000000347 magnesium hydroxide Substances 0.000 description 1
229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
239000011159 matrix material Substances 0.000 description 1
239000012528 membrane Substances 0.000 description 1
229910021645 metal ion Inorganic materials 0.000 description 1
150000002791 naphthoquinones Chemical class 0.000 description 1
239000005365 phosphate glass Substances 0.000 description 1
IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
239000004033 plastic Substances 0.000 description 1
229920003023 plastic Polymers 0.000 description 1
229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
229920002312 polyamide-imide Polymers 0.000 description 1
239000011112 polyethylene naphthalate Substances 0.000 description 1
229920000139 polyethylene terephthalate Polymers 0.000 description 1
239000005020 polyethylene terephthalate Substances 0.000 description 1
229920005672 polyolefin resin Polymers 0.000 description 1
229920005990 polystyrene resin Polymers 0.000 description 1
WVIICGIFSIBFOG-UHFFFAOYSA-N pyrylium Chemical compound C1=CC=[O+]C=C1 WVIICGIFSIBFOG-UHFFFAOYSA-N 0.000 description 1
230000009467 reduction Effects 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
239000005361 soda-lime glass Substances 0.000 description 1
238000001179 sorption measurement Methods 0.000 description 1
238000001228 spectrum Methods 0.000 description 1
229910001220 stainless steel Inorganic materials 0.000 description 1
239000010935 stainless steel Substances 0.000 description 1
230000002195 synergetic effect Effects 0.000 description 1
238000010998 test method Methods 0.000 description 1
ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 1
239000010936 titanium Substances 0.000 description 1
229910052719 titanium Inorganic materials 0.000 description 1
238000004506 ultrasonic cleaning Methods 0.000 description 1
238000001771 vacuum deposition Methods 0.000 description 1
230000000007 visual effect Effects 0.000 description 1

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/18—Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Chemical & Material Sciences (AREA)
Inorganic Chemistry (AREA)
Chemical Kinetics & Catalysis (AREA)
Surface Treatment Of Optical Elements (AREA)
Laminated Bodies (AREA)
Optical Filters (AREA)

TW109106156A 2019-02-26 2020-02-26 濾光器、濾光器之搬送支撐體、濾光器之製造方法 TWI827806B (zh)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2019032249		2019-02-26
JP2019-032249		2019-02-26

Publications (2)

Publication Number	Publication Date
TW202036045A TW202036045A (zh)	2020-10-01
TWI827806B true TWI827806B (zh)	2024-01-01

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ID=72239121

Family Applications (1)

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TW109106156A TWI827806B (zh)	2019-02-26	2020-02-26	濾光器、濾光器之搬送支撐體、濾光器之製造方法

Country Status (3)

Country	Link
JP (1)	JP7396346B2 (ja)
TW (1)	TWI827806B (ja)
WO (1)	WO2020175320A1 (ja)

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JP2011158909A (ja) *	2011-03-02	2011-08-18	Nippon Dempa Kogyo Co Ltd	光学多層膜フィルタ
TW201415091A (zh) *	2012-09-06	2014-04-16	Nippon Sheet Glass Co Ltd	紅外線截止濾光片及攝影裝置
TW201605616A (zh) *	2014-04-25	2016-02-16	Asahi Glass Co Ltd	玻璃積層體及電子裝置之製造方法

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JPS57114470A (en) *	1980-12-27	1982-07-16	Dainippon Printing Co Ltd	Method of packing optical filter
JP2008270516A (ja)	2007-04-20	2008-11-06	Seiko Epson Corp	基板の分割方法、半導体装置の製造方法、及び電気光学装置の製造方法
JP2013253895A (ja)	2012-06-08	2013-12-19	Seiko Epson Corp	電子デバイス、電子機器、移動体、および電子デバイスの製造方法
JP2015225154A (ja)	2014-05-27	2015-12-14	株式会社タナカ技研	近赤外線カットフィルター
JP6727948B2 (ja)	2015-07-24	2020-07-22	ソニーセミコンダクタソリューションズ株式会社	撮像素子、製造方法

2020
- 2020-02-20 WO PCT/JP2020/006836 patent/WO2020175320A1/ja active Application Filing
- 2020-02-20 JP JP2021502142A patent/JP7396346B2/ja active Active
- 2020-02-26 TW TW109106156A patent/TWI827806B/zh active

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2011158909A (ja) *	2011-03-02	2011-08-18	Nippon Dempa Kogyo Co Ltd	光学多層膜フィルタ
TW201415091A (zh) *	2012-09-06	2014-04-16	Nippon Sheet Glass Co Ltd	紅外線截止濾光片及攝影裝置
TW201605616A (zh) *	2014-04-25	2016-02-16	Asahi Glass Co Ltd	玻璃積層體及電子裝置之製造方法

Also Published As

Publication number	Publication date
JP7396346B2 (ja)	2023-12-12
WO2020175320A1 (ja)	2020-09-03
TW202036045A (zh)	2020-10-01
JPWO2020175320A1 (ja)	2021-12-23

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