TWI821509B - Organic solvent recovery system - Google Patents
Organic solvent recovery system Download PDFInfo
- Publication number
- TWI821509B TWI821509B TW109102074A TW109102074A TWI821509B TW I821509 B TWI821509 B TW I821509B TW 109102074 A TW109102074 A TW 109102074A TW 109102074 A TW109102074 A TW 109102074A TW I821509 B TWI821509 B TW I821509B
- Authority
- TW
- Taiwan
- Prior art keywords
- flow path
- organic solvent
- gas
- adsorption
- solvent recovery
- Prior art date
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- 239000003960 organic solvent Substances 0.000 title claims abstract description 198
- 238000011084 recovery Methods 0.000 title claims abstract description 84
- 238000001179 sorption measurement Methods 0.000 claims abstract description 123
- 239000003463 adsorbent Substances 0.000 claims abstract description 77
- 239000000463 material Substances 0.000 claims abstract description 66
- 238000003795 desorption Methods 0.000 claims abstract description 64
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 38
- 238000010790 dilution Methods 0.000 claims abstract description 23
- 239000012895 dilution Substances 0.000 claims abstract description 23
- 239000003085 diluting agent Substances 0.000 claims description 23
- 238000011144 upstream manufacturing Methods 0.000 claims description 15
- 239000007789 gas Substances 0.000 description 250
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 18
- 238000001035 drying Methods 0.000 description 12
- 238000005273 aeration Methods 0.000 description 11
- 238000007865 diluting Methods 0.000 description 9
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical class C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000007791 liquid phase Substances 0.000 description 5
- 239000002351 wastewater Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 229910021536 Zeolite Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000010457 zeolite Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical compound CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- -1 trichloroethylene, tetrachloroethylene, o-dichlorobenzene Chemical class 0.000 description 3
- AUHZEENZYGFFBQ-UHFFFAOYSA-N 1,3,5-trimethylbenzene Chemical compound CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 description 2
- BBMCTIGTTCKYKF-UHFFFAOYSA-N 1-heptanol Chemical compound CCCCCCCO BBMCTIGTTCKYKF-UHFFFAOYSA-N 0.000 description 2
- AFABGHUZZDYHJO-UHFFFAOYSA-N 2-Methylpentane Chemical compound CCCC(C)C AFABGHUZZDYHJO-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical group CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical group CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- XXROGKLTLUQVRX-UHFFFAOYSA-N allyl alcohol Chemical compound OCC=C XXROGKLTLUQVRX-UHFFFAOYSA-N 0.000 description 2
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 2
- NNBZCPXTIHJBJL-UHFFFAOYSA-N decalin Chemical compound C1CCCC2CCCCC21 NNBZCPXTIHJBJL-UHFFFAOYSA-N 0.000 description 2
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 2
- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- ZUBZATZOEPUUQF-UHFFFAOYSA-N isononane Chemical compound CCCCCCC(C)C ZUBZATZOEPUUQF-UHFFFAOYSA-N 0.000 description 2
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 2
- IVSZLXZYQVIEFR-UHFFFAOYSA-N m-xylene Chemical group CC1=CC=CC(C)=C1 IVSZLXZYQVIEFR-UHFFFAOYSA-N 0.000 description 2
- UAEPNZWRGJTJPN-UHFFFAOYSA-N methylcyclohexane Chemical compound CC1CCCCC1 UAEPNZWRGJTJPN-UHFFFAOYSA-N 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 2
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 2
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- BGHCVCJVXZWKCC-UHFFFAOYSA-N tetradecane Chemical compound CCCCCCCCCCCCCC BGHCVCJVXZWKCC-UHFFFAOYSA-N 0.000 description 2
- RSJKGSCJYJTIGS-UHFFFAOYSA-N undecane Chemical compound CCCCCCCCCCC RSJKGSCJYJTIGS-UHFFFAOYSA-N 0.000 description 2
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- ZPQOPVIELGIULI-UHFFFAOYSA-N 1,3-dichlorobenzene Chemical compound ClC1=CC=CC(Cl)=C1 ZPQOPVIELGIULI-UHFFFAOYSA-N 0.000 description 1
- CYNYIHKIEHGYOZ-UHFFFAOYSA-N 1-bromopropane Chemical compound CCCBr CYNYIHKIEHGYOZ-UHFFFAOYSA-N 0.000 description 1
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- OIFBSDVPJOWBCH-UHFFFAOYSA-N Diethyl carbonate Chemical compound CCOC(=O)OCC OIFBSDVPJOWBCH-UHFFFAOYSA-N 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- RJUFJBKOKNCXHH-UHFFFAOYSA-N Methyl propionate Chemical compound CCC(=O)OC RJUFJBKOKNCXHH-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- KFVUXNKQQOUCAH-UHFFFAOYSA-N butan-1-ol;propan-2-ol Chemical compound CC(C)O.CCCCO KFVUXNKQQOUCAH-UHFFFAOYSA-N 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- KMGBZBJJOKUPIA-UHFFFAOYSA-N butyl iodide Chemical compound CCCCI KMGBZBJJOKUPIA-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007791 dehumidification Methods 0.000 description 1
- POLCUAVZOMRGSN-UHFFFAOYSA-N dipropyl ether Chemical compound CCCOCCC POLCUAVZOMRGSN-UHFFFAOYSA-N 0.000 description 1
- 239000003657 drainage water Substances 0.000 description 1
- ILEDWLMCKZNDJK-UHFFFAOYSA-N esculetin Chemical compound C1=CC(=O)OC2=C1C=C(O)C(O)=C2 ILEDWLMCKZNDJK-UHFFFAOYSA-N 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- WBJINCZRORDGAQ-UHFFFAOYSA-N formic acid ethyl ester Natural products CCOC=O WBJINCZRORDGAQ-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 1
- 229940017219 methyl propionate Drugs 0.000 description 1
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 1
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 1
- BKIMMITUMNQMOS-UHFFFAOYSA-N nonane Chemical compound CCCCCCCCC BKIMMITUMNQMOS-UHFFFAOYSA-N 0.000 description 1
- 229940078552 o-xylene Drugs 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- MTZWHHIREPJPTG-UHFFFAOYSA-N phorone Chemical compound CC(C)=CC(=O)C=C(C)C MTZWHHIREPJPTG-UHFFFAOYSA-N 0.000 description 1
- 229930193351 phorone Natural products 0.000 description 1
- 229940090181 propyl acetate Drugs 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- PXXNTAGJWPJAGM-UHFFFAOYSA-N vertaline Natural products C1C2C=3C=C(OC)C(OC)=CC=3OC(C=C3)=CC=C3CCC(=O)OC1CC1N2CCCC1 PXXNTAGJWPJAGM-UHFFFAOYSA-N 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
- 125000002256 xylenyl group Chemical class C1(C(C=CC=C1)C)(C)* 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
- B01D53/0438—Cooling or heating systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0454—Controlling adsorption
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Cyclones (AREA)
Abstract
一種有機溶劑回收系統具有：有機溶劑回收裝置，其具有：分別地包含第一吸附材之至少3個處理槽、水蒸氣供給部、連結流路、取出流路及稀釋氣體供給流路；有機溶劑濃縮裝置，其包含第二吸附材且具有吸附部及脫附部；及返回流路，其使濃縮氣體返回稀釋氣體供給流路。An organic solvent recovery system has: an organic solvent recovery device, which has: at least three treatment tanks each including a first adsorbent material, a water vapor supply part, a connecting flow path, a take-out flow path, and a dilution gas supply flow path; organic solvent A concentration device includes a second adsorbent material and has an adsorption part and a desorption part; and a return flow path that returns the concentrated gas to the dilution gas supply flow path.
Description
本發明係關於有機溶劑回收系統。The present invention relates to an organic solvent recovery system.
以往，由含有有機溶劑之氣體回收有機溶劑之系統是習知的。例如，日本特開2014-147863號公報(以下稱為「專利文獻1」)揭示具有3個處理槽、被處理氣體供給部、連結流路、水蒸氣供給部及稀釋氣體供給流路之氣體處理裝置。被處理氣體供給部將含有有機溶劑之被處理氣體(原氣體)供給至各處理槽。各處理槽具有可吸附被處理氣體中含有之有機溶劑的吸附材(活性碳纖維等)。連結流路串聯地連結3個處理槽中之2個處理槽。具體而言，在第一吸附步驟中使用之處理槽處理的被處理氣體通過連結流路並導入至在第二吸附步驟中使用之處理槽，藉此進一步由被處理氣體回收有機溶劑。接著，將在第二吸附步驟中處理後之氣體取出至系統外作為清淨空氣。水蒸氣供給部將用以由該吸附材脫附吸附在吸附材中之有機溶劑的水蒸氣供給至各處理槽。水蒸氣供給部將水蒸氣供給至未在第一吸附步驟及第二吸附步驟中使用之剩餘處理槽。即，專利文獻1記載之氣體處理裝置在2個處理槽中連續地實施吸附步驟，在其間，在剩餘處理槽中實施脫附步驟。實施脫附步驟後之處理槽接著在第二吸附步驟中使用，然後，在第一吸附步驟中使用。稀釋氣體供給流路係用以供給稀釋氣體(外氣及氮氣等)至連結流路的流路。稀釋氣體供給至該處理槽，用以使在脫附步驟後之第二吸附步驟中使用之處理槽的吸附材乾燥。In the past, systems for recovering organic solvents from gases containing organic solvents have been known. For example, Japanese Patent Application Publication No. 2014-147863 (hereinafter referred to as "Patent Document 1") discloses a gas treatment including three processing tanks, a gas supply part to be processed, a connecting flow path, a water vapor supply part, and a dilution gas supply flow path. device. The to-be-processed gas supply part supplies the to-be-processed gas (original gas) containing an organic solvent to each processing tank. Each treatment tank has an adsorbent (activated carbon fiber, etc.) that can adsorb organic solvents contained in the gas to be treated. The connection flow path connects two of the three treatment tanks in series. Specifically, the gas to be processed processed in the processing tank used in the first adsorption step is introduced into the processing tank used in the second adsorption step through the connecting flow path, thereby further recovering the organic solvent from the gas to be processed. Then, the gas treated in the second adsorption step is taken out of the system as clean air. The water vapor supply unit supplies water vapor for desorbing the organic solvent adsorbed in the adsorbent from the adsorbent to each treatment tank. The water vapor supply unit supplies water vapor to the remaining treatment tanks not used in the first adsorption step and the second adsorption step. That is, the gas treatment apparatus described in Patent Document 1 continuously performs the adsorption step in two treatment tanks, and in the meantime, performs the desorption step in the remaining treatment tanks. The treatment tank after performing the desorption step is then used in the second adsorption step and then in the first adsorption step. The dilution gas supply channel is a channel for supplying dilution gas (outdoor air, nitrogen, etc.) to the connecting channel. The diluting gas is supplied to the treatment tank to dry the adsorbent material in the treatment tank used in the second adsorption step after the desorption step.
此外，日本特開2014-240052號公報(以下稱為「專利文獻2」)揭示有機溶劑回收系統，該有機溶劑回收系統具有：第一吸脫附裝置，其具有2個處理槽；及第二吸脫附裝置，其回收由第一吸脫附裝置之任一處理槽排出之被處理氣體中含有的有機溶劑。各處理槽具有可吸附被處理氣體中含有之有機溶劑的第一吸脫附元件(活性碳纖維等)。各處理槽交互地進行吸附步驟及脫附步驟。第二吸脫附裝置具有可吸附由處理槽排出之被處理氣體中含有之有機溶劑的第二吸脫附元件。第二吸脫附裝置具有：第一處理部，其藉由第二吸脫附元件吸附被處理氣體中含有之有機溶劑；及第二處理部，由第二吸脫附元件脫附吸附在第二吸脫附元件中之有機溶劑。由第二處理部排出之被處理氣體返回將被處理氣體(原氣體)供給至第一吸脫附裝置之各處理槽的流路。 [先前技術文獻] [專利文獻]In addition, Japanese Patent Application Laid-Open No. 2014-240052 (hereinafter referred to as "Patent Document 2") discloses an organic solvent recovery system including a first adsorption and desorption device having two treatment tanks; and a second An adsorption and desorption device recovers the organic solvent contained in the gas to be processed discharged from any treatment tank of the first adsorption and desorption device. Each treatment tank has a first adsorption and desorption element (activated carbon fiber, etc.) capable of adsorbing the organic solvent contained in the gas to be processed. Each treatment tank performs an adsorption step and a desorption step alternately. The second adsorption and desorption device has a second adsorption and desorption element capable of adsorbing the organic solvent contained in the gas to be processed discharged from the treatment tank. The second adsorption and desorption device has: a first treatment part that adsorbs the organic solvent contained in the gas to be processed by the second adsorption and desorption element; and a second treatment part that desorbs and adsorbs the organic solvent contained in the gas to be processed by the second adsorption and desorption element. Organic solvent in the second adsorption and desorption element. The gas to be processed discharged from the second processing unit returns to the flow path that supplies the gas to be processed (original gas) to each processing tank of the first adsorption and desorption device. [Prior technical literature] [Patent Document]
[專利文獻1]日本特開2014-147863號公報 [專利文獻2]日本特開2014-240052號公報[Patent Document 1] Japanese Patent Application Publication No. 2014-147863 [Patent Document 2] Japanese Patent Application Publication No. 2014-240052
專利文獻1記載之氣體處理裝置中藉由在2個處理槽中連續地實施吸附步驟，提高有機溶劑之去除率，且專利文獻2記載之有機溶劑回收系統藉由在第一吸脫附裝置之任一處理槽及第二吸脫附元件之第一處理部中連續地實施吸附步驟，提高有機溶劑之去除率。但是，在如此有機溶劑回收系統中，需要進一步提高有機溶劑之去除率。In the gas treatment device described in Patent Document 1, the removal rate of the organic solvent is improved by continuously performing adsorption steps in two treatment tanks, and in the organic solvent recovery system described in Patent Document 2, the removal rate of the organic solvent is improved by performing an adsorption step in the first adsorption and desorption device. The adsorption step is continuously performed in any treatment tank and the first treatment part of the second adsorption and desorption element to improve the removal rate of the organic solvent. However, in such an organic solvent recovery system, the organic solvent removal rate needs to be further improved.
因應如此需要，例如，考慮如專利文獻1記載地在2個處理槽中連續地實施吸附步驟後，如專利文獻2記載地藉由第二吸附材進一步實施吸附步驟。此時，包含由第二吸附材脫附之有機溶劑的被處理氣體返回將被處理氣體(原氣體)供給至處理槽的流路。To meet such needs, for example, it is conceivable to continuously implement the adsorption step in two treatment tanks as described in Patent Document 1, and then further implement the adsorption step using a second adsorbent material as described in Patent Document 2. At this time, the gas to be processed including the organic solvent desorbed by the second adsorbent material returns to the flow path that supplies the gas to be processed (original gas) to the treatment tank.
但是，此時，原氣體及包含由第二吸附材脫附之有機溶劑的被處理氣體兩者都供給至在第一吸附步驟中使用之處理槽且進一步追加地將稀釋氣體供給至在第二吸附步驟中使用之處理槽，因此供給至各處理槽之風量增大。因為必須配合該風量設計使各處理槽大型化，所以設備全體大型化亦無法避免。However, at this time, both the original gas and the gas to be processed including the organic solvent desorbed by the second adsorbent are supplied to the treatment tank used in the first adsorption step, and the diluent gas is additionally supplied to the treatment tank used in the second adsorption step. Since the treatment tank is used in the adsorption step, the air volume supplied to each treatment tank is increased. Since each treatment tank must be enlarged to match this air volume design, it is inevitable that the entire equipment will be enlarged.
本發明之目的係提供一種在提高有機溶劑之去除率時可抑制設備全體大型化的有機溶劑回收系統。An object of the present invention is to provide an organic solvent recovery system that can suppress the enlargement of the entire equipment while improving the removal rate of the organic solvent.
在此，本發明提供以下之有機溶劑回收系統。具體而言，依據本發明之有機溶劑回收系統，包含：有機溶劑回收裝置，具有：至少3個處理槽，分別包含可吸脫附被處理氣體中所含有之有機溶劑的第一吸附材，且交互地進行該有機溶劑對該第一吸附材之吸附及藉由水蒸氣由該第一吸附材脫附該有機溶劑；水蒸氣供給部，將該水蒸氣導入至由多數該處理槽選擇之該處理槽；連結流路，串聯地多段連接剩餘之多數該處理槽；取出流路，由配置於該串聯地多段連接之多數該處理槽下游的該處理槽，將由配置於該串聯地多段連接之多數該處理槽上游的該處理槽導入的該被處理氣體排出，作為藉由該串聯地多段連接之多數該處理槽的該第一吸附材吸附該有機溶劑的第一處理氣體；與稀釋氣體供給流路，將稀釋氣體供給至該連結流路；有機溶劑濃縮裝置，具有：吸附部，包含可吸附及脫附該有機溶劑之第二吸附材，且藉由該第二吸附材吸附來自該取出流路之該第一處理氣體中含有的該有機溶劑，並排出第二處理氣體；及脫附部，將吸附在該第二吸附材中之該有機溶劑由該第二吸附材脫附並排出作為濃縮氣體；及返回流路，使該濃縮氣體返回該稀釋氣體供給流路。Here, the present invention provides the following organic solvent recovery system. Specifically, the organic solvent recovery system according to the present invention includes: an organic solvent recovery device having: at least 3 treatment tanks, each containing a first adsorbent material capable of adsorbing and desorbing the organic solvent contained in the gas to be processed, and The organic solvent is alternately adsorbed to the first adsorbent material and the organic solvent is desorbed from the first adsorbent material through water vapor; the water vapor supply part introduces the water vapor into the plurality of treatment tanks selected. Treatment tanks; connect the flow path, and connect the remaining plurality of treatment tanks in series in multiple stages; take out the flow path, and the processing tanks downstream of the plurality of treatment tanks arranged in the series multi-stage connection will be connected by the treatment tanks arranged in the series multi-stage connection. The treated gas introduced into the plurality of treatment tanks upstream of the treatment tank is discharged as the first treatment gas adsorbing the organic solvent by the first adsorbent of the plurality of treatment tanks connected in series; and the dilution gas supply The flow path supplies the dilution gas to the connecting flow path; the organic solvent concentration device has: an adsorption part, including a second adsorption material that can adsorb and desorb the organic solvent, and the second adsorption material adsorbs the taken-out gas. The organic solvent contained in the first processing gas in the flow path is discharged from the second processing gas; and the desorption part is used to desorb and discharge the organic solvent adsorbed in the second adsorbent material from the second adsorbent material. as a concentrated gas; and a return flow path for returning the concentrated gas to the diluent gas supply flow path.
藉由該發明，可提供在提高有機溶劑之去除率時可抑制設備全體大型化的有機溶劑回收系統。According to this invention, it is possible to provide an organic solvent recovery system that can suppress the enlargement of the entire equipment while improving the removal rate of the organic solvent.
以下參照圖式說明該發明之實施形態。此外，以下參照之圖式中，相同或與其相當之構件賦予相同號碼。Embodiments of this invention will be described below with reference to the drawings. In addition, in the drawings referred to below, the same or equivalent members are assigned the same numbers.
圖1係概略地顯示本發明一實施形態之有機溶劑回收系統結構的圖。如圖1所示地，有機溶劑回收系統1具有：有機溶劑回收裝置100、有機溶劑濃縮裝置200、輸送流路300及返回流路400。有機溶劑回收系統1係在有機溶劑回收裝置100中由包含有機溶劑之被處理氣體進行有機溶劑之去除及回收後，在有機溶劑濃縮裝置200中對由有機溶劑回收裝置100排出之第一處理氣體進一步進行有機溶劑之去除及濃縮，並且使由有機溶劑濃縮裝置200排出之濃縮氣體通過返回流路400再返回有機溶劑回收裝置100的系統。FIG. 1 is a diagram schematically showing the structure of an organic solvent recovery system according to an embodiment of the present invention. As shown in FIG. 1 , the organic solvent recovery system 1 includes an organic solvent recovery device 100 , an organic solvent concentration device 200 , a transport channel 300 , and a return channel 400 . The organic solvent recovery system 1 removes and recovers the organic solvent from the treated gas containing the organic solvent in the organic solvent recovery device 100, and then processes the first treatment gas discharged from the organic solvent recovery device 100 in the organic solvent concentration device 200. The organic solvent is further removed and concentrated, and the concentrated gas discharged from the organic solvent concentration device 200 is returned to the organic solvent recovery device 100 through the return flow path 400 .
有機溶劑係：二氯甲烷、三氯甲烷、四氯化碳、1,2-二氯乙烷、三氯乙烯、四氯乙烯、鄰二氯苯、間二氯苯、Freon-112、Freon-113、HCFC、HFC、溴丙烷、碘丁烷、乙酸甲酯、乙酸乙酯、乙酸丙酯、乙酸丁酯、乙酸乙烯酯、丙酸甲酯、丙烯酸甲酯、丙烯酸乙酯、丙烯酸丁酯、甲基丙烯酸甲酯、碳酸二乙酯、甲酸乙酯、二***、二丙醚、四氫呋喃、二丁醚、苯甲醚、甲醇、乙醇、異丙醇、正丁醇、2-丁醇、異丁醇、三級丁醇、烯丙醇、戊醇、庚醇、乙二醇、二乙二醇、酚、鄰甲酚、間甲酚、對甲酚、二甲苯酚、丙酮、甲基乙基酮、甲基異丁基酮、環己烷、果樹根皮酮(phorone)、丙烯腈、正己烷、異己烷、環己烷、甲基環己烷、正庚烷、正辛烷、正壬烷、異壬烷、癸烷、十二烷、十一烷、十四烷、十氫萘、苯、甲苯、間二甲苯、對二甲苯、鄰二甲苯、乙苯、1,3,5-三甲苯、N-甲基吡咯啶酮、二甲基甲醯胺、二甲基乙醯胺及二甲基亞碸等。Organic solvent system: methylene chloride, chloroform, carbon tetrachloride, 1,2-dichloroethane, trichloroethylene, tetrachloroethylene, o-dichlorobenzene, m-dichlorobenzene, Freon-112, Freon- 113. HCFC, HFC, bromopropane, iodobutane, methyl acetate, ethyl acetate, propyl acetate, butyl acetate, vinyl acetate, methyl propionate, methyl acrylate, ethyl acrylate, butyl acrylate, Methyl methacrylate, diethyl carbonate, ethyl formate, diethyl ether, dipropyl ether, tetrahydrofuran, dibutyl ether, anisole, methanol, ethanol, isopropyl alcohol, n-butanol, 2-butanol, isopropanol Butanol, tertiary butanol, allyl alcohol, pentanol, heptanol, ethylene glycol, diethylene glycol, phenol, o-cresol, m-cresol, p-cresol, xylenol, acetone, methyl ethyl alcohol Ketone, methyl isobutyl ketone, cyclohexane, phorone, acrylonitrile, n-hexane, isohexane, cyclohexane, methylcyclohexane, n-heptane, n-octane, n- Nonane, isononane, decane, dodecane, undecane, tetradecane, decalin, benzene, toluene, m-xylene, p-xylene, o-xylene, ethylbenzene, 1,3,5 -Trimethylbenzene, N-methylpyrrolidone, dimethylformamide, dimethylacetamide and dimethylsulfoxide, etc.
有機溶劑回收裝置100係由被處理氣體去除及回收有機溶劑之設備。此外，被處理氣體由設置於有機溶劑回收裝置100之系統外的被處理氣體供給源(省略圖示)供給至有機溶劑回收裝置100。有機溶劑回收裝置100具有：3個處理槽101至103、被處理氣體供給流路L10、連結流路L21至L23、取出流路L31至L33、水蒸氣供給流路L41至L43、有機溶劑回收流路L51至L53、分離器120、再供給流路L60、稀釋氣體供給流路L70、加熱器140、開關閥V70及控制部150。The organic solvent recovery device 100 is a device for removing and recovering organic solvents from the gas to be processed. In addition, the gas to be processed is supplied to the organic solvent recovery device 100 from a gas supply source (not shown) provided outside the system of the organic solvent recovery device 100 . The organic solvent recovery device 100 includes three treatment tanks 101 to 103, a gas to be processed supply channel L10, a connecting channel L21 to L23, a take-out channel L31 to L33, a water vapor supply channel L41 to L43, and an organic solvent recovery stream. Passes L51 to L53, separator 120, resupply flow path L60, diluent gas supply flow path L70, heater 140, on/off valve V70, and control unit 150.
各處理槽101至103具有可吸附有機溶劑且可脫附有機溶劑之第一吸附材101A至103A。第一吸附材101A至103A包括：粒狀活性碳、蜂巢狀活性碳、沸石、活性碳纖維，但宜使用由活性碳纖維形成者。各處理槽101至103具有：開關阻尼器V101至V103，其切換被處理氣體對被處理氣體供給口之供給/非供給；及開關阻尼器V201至V203，其切換第一吸附材101A至103A通過後之處理氣體排出口的排出/非排出。Each of the treatment tanks 101 to 103 has first adsorbent materials 101A to 103A that can adsorb organic solvents and desorb organic solvents. The first adsorbent materials 101A to 103A include granular activated carbon, honeycomb activated carbon, zeolite, and activated carbon fiber, but those formed of activated carbon fiber are preferably used. Each of the processing tanks 101 to 103 has switching dampers V101 to V103 for switching the supply/non-supply of the gas to be processed to the gas supply port to be processed, and switching dampers V201 to V203 for switching the passage of the first adsorbent materials 101A to 103A. Then deal with the discharge/non-discharge of the gas discharge port.
在各處理槽101至103中交互地進行有機溶劑藉由第一吸附材101A至103A之吸附及有機溶劑由第一吸附材101A至103A之脫附。詳細情形如下。即，在3個處理槽101至103中之一處理槽中進行藉由第一吸附材由被處理氣體供給源供給之被處理氣體吸附有機溶劑的第一吸附步驟，並且在3個處理槽101至103中之另一處理槽中進行藉由第一吸附材由在第一吸附步驟中使用之處理槽中處理後的被處理氣體(第一吸附步驟氣體)吸附有機溶劑並排出第一處理氣體的第二吸附步驟，在其間，在剩餘之1個處理槽中進行由第一吸附材脫附有機溶劑之脫附步驟。在各處理槽101至103中依序重複進行脫附步驟、第二吸附步驟、第一吸附步驟及脫附步驟。此外，圖1顯示在第一處理槽101中進行第一吸附步驟，在第二處理槽102中進行第二吸附步驟且在第三處理槽103中進行脫附步驟的狀態。In each of the treatment tanks 101 to 103, adsorption of the organic solvent by the first adsorbent materials 101A to 103A and desorption of the organic solvent from the first adsorbent materials 101A to 103A are alternately performed. The details are as follows. That is, the first adsorption step of adsorbing the organic solvent to the gas to be processed supplied from the gas to be processed supply source via the first adsorbent is performed in one of the three processing tanks 101 to 103, and in the three processing tanks 101 To another treatment tank in 103, the organic solvent is adsorbed by the first adsorbent material from the treated gas (first adsorption step gas) treated in the treatment tank used in the first adsorption step and the first treatment gas is discharged. During the second adsorption step, a desorption step of desorbing the organic solvent from the first adsorbent material is performed in the remaining treatment tank. The desorption step, the second adsorption step, the first adsorption step and the desorption step are sequentially repeated in each of the treatment tanks 101 to 103. In addition, FIG. 1 shows a state in which the first adsorption step is performed in the first treatment tank 101, the second adsorption step is performed in the second treatment tank 102, and the desorption step is performed in the third treatment tank 103.
被處理氣體供給流路L10係用以供給被處理氣體至各處理槽101至103之流路。被處理氣體供給流路L10之上游側的端部連接於被處理氣體供給源。送風機F1設置在被處理氣體供給流路L10中。用以將流入各處理槽101至103之被處理氣體的溫度及濕度調整至所希望範圍的冷卻器C1及加熱器H1設置在被處理氣體供給流路L10中送風機F1之上游側的部位。該等裝置機器可按照被處理氣體之壓力、溫度及濕度來適當設置。The gas to be processed supply channel L10 is a channel for supplying the gas to be processed to each of the processing tanks 101 to 103. The upstream end of the gas to be processed supply channel L10 is connected to a gas supply source to be processed. The air blower F1 is provided in the gas supply channel L10. A cooler C1 and a heater H1 for adjusting the temperature and humidity of the gas to be processed flowing into each of the processing tanks 101 to 103 to a desired range are provided in a position upstream of the blower F1 in the gas to be processed supply channel L10. These devices can be appropriately set according to the pressure, temperature and humidity of the gas being processed.
被處理氣體供給流路L10具有將被處理氣體供給至各處理槽101至103之分歧流路L11至L13。開關閥V11設置在分歧流路L11中。開關閥V12設置在分歧流路L12中。開關閥V13設置在分歧流路L13中。The gas to be processed supply channel L10 has branch channels L11 to L13 for supplying the gas to be processed to the respective processing tanks 101 to 103. The on-off valve V11 is provided in the branch flow path L11. The on-off valve V12 is provided in the branch flow path L12. The on-off valve V13 is provided in the branch flow path L13.
各連結流路L21至L23連結一處理槽及另一處理槽，使有機溶劑吸附在3個處理槽101至103中之一處理槽(在第一吸附步驟中使用之處理槽)的第一吸附材後的處理氣體可導入至與3個處理槽101至103中之一處理槽不同的另一處理槽(在第二吸附步驟中使用之處理槽)中的被處理氣體供給口。具體而言，第一連結流路L21連結第一處理槽101之處理氣體排出口及第二處理槽102之被處理氣體供給口。第二連結流路L22連結第二處理槽102之處理氣體排出口及第三處理槽103之被處理氣體供給口。第三連結流路L23連結第三處理槽103之處理氣體排出口及第一處理槽101之被處理氣體供給口。Each connection flow path L21 to L23 connects one treatment tank and another treatment tank, allowing the organic solvent to be adsorbed in the first adsorption of one of the three treatment tanks 101 to 103 (the treatment tank used in the first adsorption step). The processing gas after the material can be introduced into the gas supply port to be processed in another processing tank (the processing tank used in the second adsorption step) different from one of the three processing tanks 101 to 103. Specifically, the first connecting flow path L21 connects the processing gas discharge port of the first processing tank 101 and the to-be-processed gas supply port of the second processing tank 102 . The second connection flow path L22 connects the processing gas discharge port of the second processing tank 102 and the to-be-processed gas supply port of the third processing tank 103 . The third connection flow path L23 connects the processing gas discharge port of the third processing tank 103 and the to-be-processed gas supply port of the first processing tank 101 .
各連結流路L21至L23具有互相合流之合流流路L20。送風機F2設置在合流流路L20中。開關閥V21設置在第一連結流路L21中由合流流路L20再分歧之部位。開關閥V22設置在第二連結流路L22中由合流流路L20再分歧之部位。開關閥V23設置在第三連結流路L23中由合流流路L20再分歧之部位。Each of the connecting flow paths L21 to L23 has a merged flow path L20 that merges with each other. The air blower F2 is provided in the merged flow path L20. The on-off valve V21 is provided in a portion of the first connection flow path L21 where the merged flow path L20 branches again. The on-off valve V22 is provided in a portion of the second connecting flow path L22 where the merged flow path L20 branches again. The on-off valve V23 is provided in a portion of the third connecting flow path L23 where the merged flow path L20 branches again.
取出流路L31至L33係用以取出在各處理槽101至103中吸附處理後之被處理氣體，即第一處理氣體的流路。取出流路L31至L33連接於各處理槽101至103中之處理氣體排出口。開關閥V31設置在第一取出流路L31中。開關閥V32設置在第二取出流路L32中。開關閥V33設置在第三取出流路L33中。各取出流路L31至L33具有互相合流之合流流路L30。The take-out flow paths L31 to L33 are flow paths for taking out the gas to be processed after the adsorption process in each of the treatment tanks 101 to 103, that is, the first processing gas. The take-out flow paths L31 to L33 are connected to the processing gas discharge ports in each of the processing tanks 101 to 103. The on-off valve V31 is provided in the first take-out flow path L31. The on-off valve V32 is provided in the second take-out flow path L32. The on-off valve V33 is provided in the third take-out flow path L33. Each of the take-out flow paths L31 to L33 has a merging flow path L30 that merges with each other.
水蒸氣供給流路L41至L43係用以供給水蒸氣至各處理槽101至103之流路，該水蒸氣係用以由第一吸附材101A至103A脫附吸附在第一吸附材101A至103A中之有機溶劑。水蒸氣係由水蒸氣供給部110供給。此外，水蒸氣供給部110可設置在有機溶劑回收裝置100內或設置在有機溶劑回收裝置100之系統外。The water vapor supply flow paths L41 to L43 are flow paths for supplying water vapor to each of the treatment tanks 101 to 103. The water vapor is used for desorption and adsorption from the first adsorption materials 101A to 103A to the first adsorption materials 101A to 103A. of organic solvents. Water vapor is supplied from the water vapor supply part 110 . In addition, the water vapor supply unit 110 may be provided within the organic solvent recovery device 100 or outside the system of the organic solvent recovery device 100 .
第一水蒸氣供給流路L41連接水蒸氣供給部110及第一處理槽101。開關閥V41設置在第一水蒸氣供給流路L41中。第二水蒸氣供給流路L42連接水蒸氣供給部110及第二處理槽102。開關閥V42設置在第二水蒸氣供給流路L42中。第三水蒸氣供給流路L43連接水蒸氣供給部110及第三處理槽103。開關閥V43設置在第三水蒸氣供給流路L43中。The first steam supply channel L41 connects the steam supply part 110 and the first treatment tank 101 . The on-off valve V41 is provided in the first steam supply flow path L41. The second steam supply channel L42 connects the steam supply part 110 and the second treatment tank 102 . The on-off valve V42 is provided in the second steam supply flow path L42. The third steam supply channel L43 connects the steam supply part 110 and the third treatment tank 103 . The on-off valve V43 is provided in the third water vapor supply flow path L43.
有機溶劑回收流路L51至L53係用以回收包含由第一吸附材101A至103A脫附之有機溶劑的水蒸氣(脫附氣體)的流路。各有機溶劑回收流路L51至L53連接於各處理槽101至103。各有機溶劑回收流路L51至L53具有互相合流之合流流路L50。冷凝器122設置在合流流路L50中。冷凝器122藉由冷卻流過合流流路L50之脫附氣體使該脫附氣體冷凝，接著排出冷凝液(藉由冷凝脫附氣體而生成之水分及液相之有機溶劑的混合液)。The organic solvent recovery channels L51 to L53 are channels for recovering water vapor (desorption gas) containing the organic solvent desorbed by the first adsorbent materials 101A to 103A. Each of the organic solvent recovery channels L51 to L53 is connected to each of the treatment tanks 101 to 103. Each organic solvent recovery flow path L51 to L53 has a merge flow path L50 that merges with each other. The condenser 122 is provided in the combined flow path L50. The condenser 122 condenses the desorbed gas flowing through the combined flow path L50 by cooling the desorbed gas, and then discharges the condensate (a mixed liquid of water and a liquid-phase organic solvent generated by condensing the desorbed gas).
分離器120設置在合流流路L50之下游側的端部。冷凝液流入分離器120中。然後，在分離器120內，冷凝液相分離成分離排水之液相(亦包含若干有機溶劑之水蒸氣的冷凝液)及回收溶劑之液相，接著取出回收溶劑至有機溶劑回收裝置100之系統外。此外，氣相有機溶劑存在之空間(排出氣體)形成在分離器120之上部。The separator 120 is provided at the downstream end of the merged flow path L50. The condensate flows into separator 120. Then, in the separator 120, the condensed liquid phase is separated into a liquid phase of separated drainage (a condensate that also contains some water vapor of organic solvent) and a liquid phase of recovered solvent, and then the recovered solvent is taken out to the system of the organic solvent recovery device 100 outside. In addition, a space (exhaust gas) in which the gas phase organic solvent exists is formed in the upper part of the separator 120 .
再供給流路L60係連接分離器120及被處理氣體供給流路L10之流路。再供給流路L60之上游側的端部連接於分離器120之上部(分離器120之氣相有機溶劑存在的部位)。再供給流路L60之下游側的端部連接於被處理氣體供給流路L10中冷卻器C1之上游側的部位。因此，存在分離器120內之氣相有機溶劑較佳地通過再供給流路L60及被處理氣體供給流路L10並再供給至各處理槽101至103。The resupply channel L60 is a channel connecting the separator 120 and the gas to be processed supply channel L10. The upstream end of the resupply flow path L60 is connected to the upper part of the separator 120 (a portion of the separator 120 where the gas-phase organic solvent exists). The downstream end of the resupply flow path L60 is connected to the upstream side of the cooler C1 in the gas to be processed supply flow path L10. Therefore, the gas phase organic solvent present in the separator 120 is preferably resupplied to each of the treatment tanks 101 to 103 through the resupply channel L60 and the gas to be processed supply channel L10.
排水處理設備130係去除前述分離排水中含有之有機溶劑的設備。由分離器120之分離排水的液相供給，接著由分離排水去除有機溶劑並將處理水排出至有機溶劑回收裝置100之系統外。具體之排水處理設備130可舉例如：藉由曝氣處理分離排水使分離排水中含有之有機溶劑揮發以分離成包含有機溶劑之曝氣氣體及處理水的曝氣設備等。此外，曝氣氣體透過曝氣氣體供給流路L61連接於被處理氣體供給流路L10中冷卻器C1之上游側的部位。雖然未圖示，但曝氣氣體供給流路中可設置用以去除曝氣氣體中之水分的除濕裝置。The drainage treatment device 130 is a device for removing the organic solvent contained in the separated drainage water. The liquid phase is supplied from the separated wastewater of the separator 120 , and then the organic solvent is removed from the separated wastewater and the treated water is discharged out of the system of the organic solvent recovery device 100 . Specific examples of the wastewater treatment equipment 130 include, for example, an aeration equipment that volatilizes the organic solvent contained in the separated wastewater and separates it into aeration gas containing the organic solvent and treated water through aeration treatment of the separated wastewater. In addition, the aeration gas passes through the aeration gas supply channel L61 and is connected to a portion of the target gas supply channel L10 on the upstream side of the cooler C1. Although not shown in the figure, a dehumidification device for removing moisture in the aeration gas may be provided in the aeration gas supply flow path.
稀釋氣體供給流路L70係用以將稀釋氣體供給至連結流路L21至L23之流路，該稀釋氣體係用以促進脫附步驟後之第一吸附材101A至103A的乾燥。稀釋氣體係由包含外氣、儀器空氣、氮氣、氬氣中之至少一者的氣體構成。此外，稀釋氣體係由有機溶劑回收裝置100之系統外供給。The diluting gas supply flow path L70 is used to supply the diluting gas to the flow path connecting the flow paths L21 to L23. The diluting gas system is used to promote the drying of the first adsorbent materials 101A to 103A after the desorption step. The diluent gas system is composed of gases including at least one of external air, instrument air, nitrogen, and argon. In addition, the diluent gas system is supplied from outside the system of the organic solvent recovery device 100 .
加熱器140設置在稀釋氣體供給流路L70中。加熱器140加熱稀釋氣體，使稀釋氣體之溫度比流過連結流路L21至L23之被處理氣體的溫度(大約40℃)高。The heater 140 is provided in the dilution gas supply flow path L70. The heater 140 heats the dilution gas so that the temperature of the dilution gas is higher than the temperature (approximately 40° C.) of the gas to be processed flowing through the connecting flow paths L21 to L23.
開關閥V70設置在稀釋氣體供給流路L70中。開關閥V70可調整開度。The switching valve V70 is provided in the dilution gas supply flow path L70. The opening of the switch valve V70 can be adjusted.
接著，說明有機溶劑濃縮裝置200。有機溶劑濃縮裝置200係由有機溶劑回收裝置100排出之第一處理氣體進一步去除有機溶劑的設備。有機溶劑濃縮裝置200具有吸附體201。Next, the organic solvent concentration device 200 will be described. The organic solvent concentration device 200 is a device for further removing organic solvent from the first treatment gas discharged from the organic solvent recovery device 100 . The organic solvent concentration device 200 has an adsorbent 201 .
吸附體201具有可吸附通過合流流路L30排出之第一處理氣體中含有之有機溶劑的第二吸附材201A。吸附體201具有：吸附部202，其藉由第二吸附材201A吸附第一處理氣體中含有之有機溶劑；及脫附部203，其由第二吸附材201A脫附吸附在第二吸附材201A中之有機溶劑。藉由使第一處理氣體通過吸附部202，可排出進一步去除有機溶劑之清淨氣體，即第二處理氣體，且吸附結束後藉由脫附部203使風量比第一處理氣體小之加熱氣體通過以使吸附在第二吸附材201A中之有機溶劑脫附，藉此排出濃縮有機溶劑之濃縮氣體。The adsorbent 201 has a second adsorbent 201A capable of adsorbing an organic solvent contained in the first process gas discharged through the merged flow path L30. The adsorbent 201 has an adsorption part 202 which adsorbs the organic solvent contained in the first process gas via the second adsorbent 201A; and a desorption part 203 which desorbs and adsorbs on the second adsorbent 201A through the second adsorbent 201A. of organic solvents. By passing the first processing gas through the adsorption part 202, the clean gas that further removes the organic solvent, that is, the second processing gas, can be discharged, and after the adsorption is completed, the heating gas with a smaller air volume than the first processing gas can pass through the desorption part 203. In order to desorb the organic solvent adsorbed in the second adsorbent material 201A, the concentrated gas of the concentrated organic solvent is discharged.
在本實施形態中，吸附體201係圓板狀(圓盤型)之轉子。藉由吸附體201旋轉通過吸附部202及脫附部203來切換吸附及脫附。該吸附體201之構造與專利文獻2之記載內容相同。此外，吸附體201可形成所謂圓柱體型。圓柱體型之吸附體201係將分割成塊狀之多數第二吸附材201A配置成圓筒狀。在該吸附體201中，第二吸附材201A之一部份構成吸附由第二吸附材201A外側向內側供給之第一處理氣體中含有的有機溶劑的吸附部202，並且第二吸附材201A之剩餘部分構成脫附部203，該脫附部203藉由從第二吸附材201A內側向外側供給加熱空氣而由第二吸附材201A脫附吸附在第二吸附材201A中之有機溶劑。In this embodiment, the adsorption body 201 is a disc-shaped (disk-shaped) rotor. The adsorption body 201 rotates through the adsorption part 202 and the desorption part 203 to switch between adsorption and desorption. The structure of the adsorbent body 201 is the same as that described in Patent Document 2. In addition, the adsorbent body 201 may be formed into a so-called cylindrical shape. The cylindrical adsorption body 201 has a plurality of second adsorption materials 201A divided into blocks arranged in a cylindrical shape. In this adsorbent 201, a part of the second adsorbent material 201A constitutes an adsorption part 202 for adsorbing the organic solvent contained in the first processing gas supplied from the outside to the inside of the second adsorbent material 201A, and a part of the second adsorbent material 201A is The remaining portion constitutes a desorption part 203 that desorbs the organic solvent adsorbed in the second adsorption material 201A from the second adsorption material 201A by supplying heated air from the inside to the outside of the second adsorption material 201A.
輸送流路300係用以由有機溶劑回收裝置100輸送被處理氣體至有機溶劑濃縮裝置200之流路。輸送流路300之上游側的端部連接於合流流路L30。輸送流路300之下游側的端部連接於吸附體201之吸附部202。即，輸送流路300係用以將第一處理氣體輸送至吸附部202之流路。The transport flow path 300 is a flow path for transporting the gas to be processed from the organic solvent recovery device 100 to the organic solvent concentration device 200 . The upstream end of the transport flow path 300 is connected to the merging flow path L30. The downstream end of the transport flow path 300 is connected to the adsorption part 202 of the adsorption body 201 . That is, the transport channel 300 is a channel for transporting the first processing gas to the adsorption part 202 .
送風機F3設置在輸送流路300中。用以將流入吸附部202之第一處理氣體的濕度調整至所希望範圍的冷卻器C2及加熱器H2設置在輸送流路300中送風機F3之上游側的部位。The air blower F3 is provided in the conveyance flow path 300 . The cooler C2 and the heater H2 for adjusting the humidity of the first process gas flowing into the adsorption part 202 to a desired range are provided in the transport flow path 300 at a position upstream of the blower F3.
返回流路400係用以使濃縮氣體由有機溶劑濃縮裝置200返回有機溶劑回收裝置100之流路。返回流路400連接脫附部203及稀釋氣體供給流路L70。具體而言，返回流路400之下游側的端部連接於稀釋氣體供給流路L70中加熱器140之下游側的部位。The return flow path 400 is a flow path for returning the concentrated gas from the organic solvent concentration device 200 to the organic solvent recovery device 100 . The return flow path 400 connects the desorption part 203 and the dilution gas supply flow path L70. Specifically, the downstream end of the return flow path 400 is connected to the downstream side of the heater 140 in the diluent gas supply flow path L70.
送風機F5設置在返回流路400中。送風機F5之風量設定為送風機F3之風量的例如大約10分之1。The blower F5 is provided in the return flow path 400 . The air volume of the blower F5 is set to, for example, approximately 1/10 of the air volume of the blower F3.
在本實施形態中，有機溶劑濃縮裝置200將由吸附部202排出之第二處理氣體(清淨氣體)由清淨氣體排出流路L202送出至外部。此外，有機溶劑濃縮裝置200更具有連接流路L80及加熱器H3。In this embodiment, the organic solvent concentration device 200 sends the second processing gas (pure gas) discharged from the adsorption part 202 to the outside through the purge gas discharge flow path L202. In addition, the organic solvent concentration device 200 further has a connection flow path L80 and a heater H3.
連接流路L80連接清淨氣體排出流路L202及脫附部203，且可將第二處理氣體之一部份使用於脫附部203的脫附。送風機F4設置在連接流路L80中。此外，亦可為將外氣使用於脫附部203之脫附的結構。The connection flow path L80 connects the clean gas discharge flow path L202 and the desorption part 203, and can use part of the second processing gas for desorption in the desorption part 203. The air blower F4 is provided in the connection flow path L80. In addition, the outside air may be used for desorption of the desorption part 203.
加熱器H3設置在連接流路L80中。更詳而言之，加熱器H3設置在連接流路L80中送風機F4之下游側的部位。該加熱器H3加熱流過連接流路L80之第二處理氣體，使流過返回流路400之濃縮氣體的溫度比流過連結流路L21至L23之被處理氣體的溫度高。例如，加熱器H3加熱第二處理氣體使流過連接流路L80之第二處理氣體的溫度為大約130℃至180℃。此時，由脫附部203排出之第二處理氣體的溫度為大約60℃至80℃。The heater H3 is provided in the connection flow path L80. More specifically, the heater H3 is provided at a downstream side of the air blower F4 in the connection flow path L80. The heater H3 heats the second processing gas flowing through the connecting flow path L80 so that the temperature of the concentrated gas flowing through the return flow path 400 is higher than the temperature of the gas to be processed flowing through the connecting flow paths L21 to L23. For example, the heater H3 heats the second processing gas so that the temperature of the second processing gas flowing through the connection flow path L80 is about 130°C to 180°C. At this time, the temperature of the second processing gas discharged from the desorption part 203 is approximately 60°C to 80°C.
控制部150控制開關閥V70之開度。具體而言，控制部150控制開關閥V70之開度，使流入第二吸附步驟使用之處理槽(藉由連結流路L21至L23連結之2個處理槽101至103中配置於被處理氣體流下游側的處理槽)的被處理氣體溫度維持在預定範圍(例如，60℃至80℃)。因為通過返回流路400導入稀釋氣體供給流路L70之第二處理氣體的溫度比稀釋氣體之溫度高，所以例如降低流入連結流路之混合氣體(稀釋氣體及第二處理氣體之混合氣體)的溫度時，控制部150增加開關閥V70之開度。The control unit 150 controls the opening of the on-off valve V70. Specifically, the control unit 150 controls the opening of the on-off valve V70 so that the flow of gas to be processed flows into the treatment tank used in the second adsorption step (the two treatment tanks 101 to 103 connected by the connecting flow paths L21 to L23). The temperature of the gas to be processed (the processing tank on the downstream side) is maintained in a predetermined range (for example, 60°C to 80°C). Since the temperature of the second process gas introduced into the diluent gas supply channel L70 through the return channel 400 is higher than the temperature of the diluent gas, for example, the temperature of the mixed gas (a mixed gas of the diluent gas and the second process gas) flowing into the connecting channel is reduced. When the temperature rises, the control unit 150 increases the opening of the on-off valve V70.
此外，藉由溫度感測器152檢測流入在第二吸附步驟中使用之處理槽之混合氣體的溫度。溫度感測器152設置在合流流路L20中。In addition, the temperature of the mixed gas flowing into the treatment tank used in the second adsorption step is detected by the temperature sensor 152 . The temperature sensor 152 is provided in the combined flow path L20.
控制部150宜控制開關閥V70之開度，使流過返回流路400之第二處理氣體的流量比稀釋氣體供給流路L70中流過稀釋氣體供給流路L70與返回流路400下游側端部之連接部上游側的稀釋氣體流量大。The control unit 150 preferably controls the opening of the on-off valve V70 so that the flow rate of the second processing gas flowing through the return flow path 400 is greater than the flow rate of the second processing gas flowing through the dilution gas supply flow path L70 and the downstream end of the return flow path 400. The diluting gas flow rate on the upstream side of the connection part is large.
控制部150控制各開關閥V11至V13、V21至V23、V41至V43及開關阻尼器V101至V103、V201至V203之開關，使各處理槽101至103如上所述地依序使用第二吸附步驟、第一吸附步驟及脫附步驟。The control unit 150 controls the switches of the switching valves V11 to V13, V21 to V23, V41 to V43 and the switching dampers V101 to V103, V201 to V203, so that each of the treatment tanks 101 to 103 sequentially uses the second adsorption step as described above. , the first adsorption step and the desorption step.
接著，說明有機溶劑回收系統1之動作。在此，一面參照圖2，一面說明有機溶劑回收系統1之動作的一例。圖2係概略地顯示在第一處理槽101進行第一吸附步驟，在第二處理槽102進行第二吸附步驟且在第三處理槽103進行脫附步驟之狀態的氣流。在圖2中，第一處理槽101、第二處理槽102及吸附體201中吸附處理之氣流用粗實線顯示，且包含由供給至第三處理槽103之水蒸氣及由第一吸附材103A脫附的有機溶劑的氣流用施加斜線剖面線之線顯示。Next, the operation of the organic solvent recovery system 1 will be described. Here, an example of the operation of the organic solvent recovery system 1 will be described with reference to FIG. 2 . FIG. 2 schematically shows the gas flow in a state where the first adsorption step is performed in the first treatment tank 101 , the second adsorption step is performed in the second treatment tank 102 , and the desorption step is performed in the third treatment tank 103 . In FIG. 2 , the gas flow of the adsorption treatment in the first treatment tank 101 , the second treatment tank 102 and the adsorbent 201 is shown with a thick solid line, and includes the water vapor supplied to the third treatment tank 103 and the air flow from the first adsorbent material. The gas flow of 103A desorbed organic solvent is shown with a hatched line.
此外，在各處理槽中，依第一吸附步驟、脫附步驟、第二吸附步驟、第一吸附步驟、…之順序重複處理。In addition, in each treatment tank, the processing is repeated in the order of the first adsorption step, the desorption step, the second adsorption step, the first adsorption step, ....
在圖2所示之狀態下，開關閥V11、V21、V32、V43及開關阻尼器V101、V102、V201、V202開啟，且開關閥V12、V13、V22、V23、V31、V33、V41、V42及開關阻尼器V103、V203關閉。In the state shown in Figure 2, the switching valves V11, V21, V32, V43 and the switching dampers V101, V102, V201, V202 are opened, and the switching valves V12, V13, V22, V23, V31, V33, V41, V42 and Switch dampers V103 and V203 are closed.
在圖2所示之狀態下，由被處理氣體供給源通過被處理氣體供給流路L10及分歧流路L11供給被處理氣體至第一處理槽101，接著在第一處理槽101之第一吸附材101A中吸附被處理氣體中含有的有機溶劑(第一吸附步驟)。然後，被處理氣體通過連結流路L21與通過返回流路400返回之第二處理氣體一起供給至第二處理槽102，接著進一步吸附供給至第二處理槽102之第一吸附材102A之氣體中含有的有機溶劑(第二吸附步驟)。在第二處理槽102中之第二吸附步驟(特別是初始之階段)中，藉由供給之氣體來乾燥第一吸附材102A。因為第二吸附步驟係在使用水蒸氣之脫附步驟後實施，所以第一吸附材102A含有水分，且為提高吸附性能必須乾燥。在後段會再說明該乾燥。此外，在該第二吸附步驟進行之乾燥係分開進行乾燥步驟之系統，即各處理槽係依第一吸附步驟、脫附步驟、乾燥步驟、第二吸附步驟、第一吸附步驟、…之順序處理的系統，亦可藉由本系統對應。In the state shown in FIG. 2 , the gas to be processed is supplied from the gas to be processed supply source to the first treatment tank 101 through the gas to be processed supply flow path L10 and the branch flow path L11 , and then the first adsorption in the first processing tank 101 The organic solvent contained in the gas to be processed is adsorbed into the material 101A (first adsorption step). Then, the gas to be processed is supplied to the second processing tank 102 through the connecting flow path L21 together with the second processing gas returned through the return flow path 400, and then is further adsorbed into the gas supplied to the first adsorbent 102A of the second processing tank 102. Contains organic solvent (second adsorption step). In the second adsorption step (especially the initial stage) in the second treatment tank 102, the first adsorption material 102A is dried by the supplied gas. Since the second adsorption step is performed after the desorption step using water vapor, the first adsorption material 102A contains moisture and must be dried in order to improve the adsorption performance. Drying will be explained in a later section. In addition, the drying performed in the second adsorption step is a system that performs separate drying steps, that is, each treatment tank follows the order of the first adsorption step, the desorption step, the drying step, the second adsorption step, the first adsorption step, ... The processing system can also be handled by this system.
接著，由第二處理槽102排出之第一處理氣體通過取出流路L32及輸送流路300輸送至有機溶劑濃縮裝置200之吸附體201，並在吸附部202中吸附第一處理氣體中含有之有機溶劑。然後，將由吸附部202排出之第二處理氣體取出至有機溶劑回收系統1之系統外，並將其一部份通過連接流路L80輸送至脫附部203。此時，藉由加熱器H3加熱輸送至脫附部203之第二處理氣體。Then, the first processing gas discharged from the second processing tank 102 is transported to the adsorbent 201 of the organic solvent concentration device 200 through the take-out flow path L32 and the transport flow path 300, and is adsorbed in the adsorption part 202 to contain the first processing gas. organic solvents. Then, the second processing gas discharged from the adsorption part 202 is taken out of the organic solvent recovery system 1, and part of it is sent to the desorption part 203 through the connection flow path L80. At this time, the second processing gas sent to the desorption part 203 is heated by the heater H3.
接著，由脫附部203排出之濃縮氣體通過返回流路400返回稀釋氣體供給流路L70。通過返回流路400返回之濃縮氣體與由第一處理槽101排出之被處理氣體及由系統外供給之稀釋氣體一起通過第一連結流路L21供給至第二處理槽102。此時，控制部150控制開關閥V70之開度(對第二處理槽102之氣體供給量)，使流入第二處理槽102之氣體的溫度維持在預定範圍內。Next, the concentrated gas discharged from the desorption part 203 returns to the diluent gas supply channel L70 through the return channel 400 . The concentrated gas returned through the return flow path 400 is supplied to the second processing tank 102 through the first connection flow path L21 together with the gas to be processed discharged from the first processing tank 101 and the diluent gas supplied from outside the system. At this time, the control unit 150 controls the opening of the on-off valve V70 (the amount of gas supplied to the second processing tank 102) to maintain the temperature of the gas flowing into the second processing tank 102 within a predetermined range.
另一方面，由水蒸氣供給部110通過水蒸氣供給流路L43供給水蒸氣至第三處理槽103，藉此由第一吸附材103A脫附有機溶劑(脫附步驟)。接著，包含由第一吸附材103A脫附之有機溶劑的水蒸氣通過有機溶劑回收流路L53，並在冷凝器122冷凝後流入分離器120。將藉由分離器120相分離之回收溶劑取出至有機溶劑回收裝置100之系統外，接著存在分離器120中之排出氣體通過再供給流路L60返回被處理氣體供給流路L10。藉由排水處理設備130處理分離排水並將處理水取出至有機溶劑回收裝置100之系統外，接著曝氣氣體通過曝氣氣體供給流路L61返回被處理氣體供給流路L10。On the other hand, the organic solvent is desorbed from the first adsorbent 103A by supplying water vapor from the water vapor supply unit 110 to the third treatment tank 103 through the water vapor supply channel L43 (desorption step). Next, the water vapor containing the organic solvent desorbed from the first adsorbent material 103A passes through the organic solvent recovery channel L53, is condensed in the condenser 122, and then flows into the separator 120. The recovered solvent phase-separated by the separator 120 is taken out of the system of the organic solvent recovery device 100, and then the exhaust gas existing in the separator 120 is returned to the gas to be processed supply channel L10 through the resupply channel L60. The separated wastewater is processed by the drainage treatment equipment 130 and the treated water is taken out of the system of the organic solvent recovery device 100, and then the aeration gas returns to the gas supply channel L10 through the aeration gas supply channel L61.
如上所述，在本實施形態之有機溶劑回收系統1中，由第二吸附材201A脫附之被處理氣體通過返回流路400返回稀釋氣體供給流路L70，因此，藉由減少供給至連結流路L21至L23之稀釋氣體的量，可避免顯著地增大供給至藉由連結流路L21至L23連結之2個處理槽中配置在下游側之處理槽的風量，並且可在2個處理槽及吸附體201之吸附部202中連續地回收被處理氣體中含有的有機溶劑。因此，本有機溶劑回收系統1可避免設備之大型化且可提高有機溶劑之回收率。As described above, in the organic solvent recovery system 1 of this embodiment, the gas to be processed desorbed by the second adsorbent 201A returns to the diluent gas supply flow path L70 through the return flow path 400. Therefore, by reducing the supply to the connecting flow The amount of diluting gas in the passages L21 to L23 can avoid significantly increasing the air volume supplied to the treatment tank arranged on the downstream side of the two treatment tanks connected by the connection passages L21 to L23, and can prevent the two treatment tanks from significantly increasing the amount of the dilution gas. The organic solvent contained in the gas to be processed is continuously recovered in the adsorption part 202 of the adsorbent 201. Therefore, the organic solvent recovery system 1 can avoid upsizing the equipment and improve the recovery rate of the organic solvent.
此外，此次揭示之實施形態應考慮為全部是例示而不是限制。本發明之範圍不是藉由上述實施形態之說明而是藉由申請專利範圍來表示，且更包含在與申請專利範圍均等之意味及範圍內的全部變更。In addition, the embodiments disclosed this time should be considered to be illustrative and not restrictive. The scope of the present invention is expressed not by the description of the above-mentioned embodiments but by the claimed scope, and includes all changes within the meaning and range that are equivalent to the claimed scope.
例如，有機溶劑回收裝置100可具有4個以上之處理槽。此時，在其中一處理槽中進行脫附步驟，在其間，在連結流路中互相連結成串聯之剩餘3個以上的處理槽中多階段地進行吸附步驟。For example, the organic solvent recovery device 100 may have four or more treatment tanks. At this time, the desorption step is performed in one of the treatment tanks, and in the meantime, the adsorption step is performed in multiple stages in the remaining three or more treatment tanks that are connected to each other in series in the connecting flow path.
此外，返回流路400之下游側的端部可例如連接於合流流路L20中溫度感測器152之上游側的部位。In addition, the downstream end of the return flow path 400 may be connected to a portion upstream of the temperature sensor 152 in the merged flow path L20, for example.
此外，亦可使用圖3所示之有機溶劑濃縮裝置500來取代有機溶劑濃縮裝置200。有機溶劑濃縮裝置500具有第四處理槽501及第五處理槽502。第四處理槽501及第五處理槽502係設置成互相並列在送風機F3之下游且在送風機F5之上游。第四處理槽501具有第四吸附材501A。第五處理槽502具有第五吸附材502A。開關閥V51至V58設置在連接於第四處理槽501及第五處理槽502之各流路中。In addition, the organic solvent concentration device 500 shown in FIG. 3 can also be used instead of the organic solvent concentration device 200 . The organic solvent concentration device 500 has a fourth treatment tank 501 and a fifth treatment tank 502 . The fourth treatment tank 501 and the fifth treatment tank 502 are arranged parallel to each other downstream of the air blower F3 and upstream of the air blower F5. The fourth treatment tank 501 has a fourth adsorbent material 501A. The fifth treatment tank 502 has a fifth adsorbent 502A. On-off valves V51 to V58 are provided in each flow path connected to the fourth treatment tank 501 and the fifth treatment tank 502 .
或者，可使用國際公開第2013/187274號揭示之溶劑處理裝置來取代有機溶劑濃縮裝置200。Alternatively, the organic solvent concentration device 200 may be replaced by the solvent treatment device disclosed in International Publication No. 2013/187274.
在此，詳細說明關於濃縮氣體之使用。 在有機溶劑回收裝置100中，第一吸附材101A至103A在含有水分之狀態下無法獲得充分之吸附性能。因此，第一吸附步驟及第二吸附步驟都需要第一吸附材101A至103A之充分乾燥。在脫附步驟中，因為使用水蒸氣，所以脫附結束後之第一吸附材101A至103A含有來自水蒸氣之水分。因此，脫附結束後，即實施第二吸附步驟之第一吸附材101A至103A特別地需要乾燥。Here, the use of concentrated gas is explained in detail. In the organic solvent recovery device 100, the first adsorbent materials 101A to 103A cannot obtain sufficient adsorption performance when they contain moisture. Therefore, both the first adsorption step and the second adsorption step require sufficient drying of the first adsorption materials 101A to 103A. In the desorption step, since water vapor is used, the first adsorbent materials 101A to 103A after the desorption is completed contain moisture derived from the water vapor. Therefore, after the desorption is completed, that is, the first adsorbent materials 101A to 103A that perform the second adsorption step particularly need to be dried.
在第二吸附步驟中，雖然藉由通入第一吸附步驟排出之氣體而與吸附同時地進行乾燥，但有時無法獲得充分之乾燥。因此在本系統1中進一步供給濃縮氣體至稀釋氣體作為乾燥之輔助氣體使用。為獲得第一吸附材101A至103A之充分乾燥，有時亦併用上述記載之加熱器140。若可藉由第一吸附步驟排出之氣體及濃縮氣體充分乾燥，可不追加稀釋氣體。In the second adsorption step, drying is performed simultaneously with adsorption by passing the gas discharged from the first adsorption step, but sufficient drying may not be obtained in some cases. Therefore, in this system 1, the concentrated gas is further supplied to the diluent gas to be used as an auxiliary gas for drying. In order to obtain sufficient drying of the first adsorbent materials 101A to 103A, the heater 140 described above is sometimes used in combination. If the gas discharged from the first adsorption step and the concentrated gas can be sufficiently dried, no additional diluting gas is required.
如上所述之有機溶劑回收系統1係在有機溶劑回收裝置100中，第一吸附步驟、第二吸附步驟都有90%以上之有機溶劑去除率來設計。因此，第一處理氣體可對被處理氣體去除99%以上有機溶劑。此外，設計成在有機溶劑濃縮裝置200中亦可用90%以上之有機溶劑去除效率去除且獲得濃縮5倍以上之濃縮氣體。此時，可計算濃縮氣體中含有之有機溶劑濃度係有機溶劑回收裝置100中之第一吸附步驟後被處理氣體中的有機溶劑濃度以下。The organic solvent recovery system 1 as described above is in the organic solvent recovery device 100, and both the first adsorption step and the second adsorption step are designed to have an organic solvent removal rate of more than 90%. Therefore, the first treatment gas can remove more than 99% of the organic solvent from the gas being processed. In addition, the organic solvent concentration device 200 is designed to remove organic solvents with an organic solvent removal efficiency of more than 90% and obtain concentrated gas concentrated by more than 5 times. At this time, it can be calculated that the concentration of the organic solvent contained in the concentrated gas is lower than the concentration of the organic solvent in the gas to be processed after the first adsorption step in the organic solvent recovery device 100 .
若藉由專利文獻2記載之流路送回濃縮氣體時，因為濃縮氣體部分之風量在有機溶劑回收裝置100中產生負荷，所以流過被處理氣體供給流路L10之被處理氣體風量增加，因此裝置大型化。如前所述，因為濃縮氣體中含有之有機溶劑低，所以第一吸附材之搭載重量未顯著增加，但是處理風量增加，因此構成裝置之送風機F1、流路(L11至13等)、開關閥(V101至103等)對應濃縮氣體風量而大型化。伴隨而來的是稀釋氣體風量、有機溶劑濃縮裝置200尺寸亦大型化。相對於此，在本有機溶劑回收系統1中，因為使用濃縮氣體作為稀釋氣體之一部份，所以未增加流過有機溶劑回收裝置100之被處理氣體供給流路L10的被處理氣體風量，因此可抑制有機溶劑回收裝置100及有機溶劑濃縮裝置200之大型化。因此，本有機溶劑回收系統1可避免設備之大型化且可提高有機溶劑之回收率。When the concentrated gas is returned through the flow path described in Patent Document 2, the air volume of the concentrated gas portion creates a load in the organic solvent recovery device 100, so the air volume of the gas to be processed flowing through the gas to be processed supply channel L10 increases. Therefore, The device becomes larger. As mentioned above, since the organic solvent contained in the concentrated gas is low, the weight of the first adsorbent material does not increase significantly, but the treatment air volume increases. Therefore, the air blower F1, flow paths (L11 to 13, etc.), and on-off valves that constitute the device are (V101 to 103, etc.) are enlarged to correspond to the air volume of concentrated gas. Along with this, the dilution gas air volume and the size of the organic solvent concentration device 200 are also enlarged. In contrast, in the present organic solvent recovery system 1, since concentrated gas is used as part of the diluent gas, the air volume of the gas to be processed flowing through the gas to be processed supply channel L10 of the organic solvent recovery device 100 is not increased. Therefore, The organic solvent recovery device 100 and the organic solvent concentration device 200 can be prevented from being enlarged. Therefore, the organic solvent recovery system 1 can avoid upsizing the equipment and improve the recovery rate of the organic solvent.
在此，稀釋氣體大多使用外氣，且因為溫度、濕度容易隨著地域及天候等變動，所以藉由設置加熱器140可確保一定之乾燥能力。本有機溶劑回收系統1一部份使用有機溶劑濃縮裝置200之濃縮氣體，且不足部份由系統外供給外氣等作為稀釋氣體。濃縮氣體係用加熱器H3加熱之第二處理氣體通過脫附部203的加溫氣體，不僅具有一定之乾燥能力，溫、濕度亦穩定。因此，相較於稀釋氣體全部使用外氣之情形，具有加熱器140可小型化或可減少相關升溫能量且不易受到季節、天候變動影響的優點。Here, outdoor air is mostly used as the diluting gas, and since the temperature and humidity easily vary depending on the region and weather, a certain drying capability can be ensured by installing the heater 140 . The organic solvent recovery system 1 uses part of the concentrated gas from the organic solvent concentration device 200, and the remaining part is supplied with external air from outside the system as dilution gas. The second processing gas heated by the heater H3 in the concentrated gas system passes through the desorption part 203. The heated gas not only has a certain drying ability, but also has stable temperature and humidity. Therefore, compared with the case where all the diluent gas is used as outside air, there is an advantage that the heater 140 can be miniaturized or the relevant heating energy can be reduced and is not easily affected by changes in seasons and weather.
此外，返回流路400之下游側的端部宜連接於稀釋氣體供給流路L70中前述加熱器140之下游側的部位。In addition, it is preferable that the downstream end of the return flow path 400 is connected to the downstream side of the heater 140 in the diluent gas supply flow path L70.
在該態樣中，通過返回流路400返回稀釋氣體供給流路L70之被處理氣體未通過加熱器140，因此加熱器140可進一步小型化或省能。In this aspect, the gas to be processed that returns to the diluting gas supply flow path L70 through the return flow path 400 does not pass through the heater 140, so the heater 140 can be further miniaturized or energy-saving.
此外，在本有機溶劑回收系統1中，可更具有：開關閥，其設置在稀釋氣體供給流路L70中該稀釋氣體供給流路L70與返回流路400之下游側端部的連接部上游側的部位；及控制部，其控制開關閥之開度。此時，控制部宜控制前述開關閥之開度，使流入前述處理槽之前述被處理氣體的溫度維持在預定範圍內，前述被處理槽係藉由前述連結流路連結之2個前述處理槽中配置於前述被處理氣體流之下游側者。 [實施例]In addition, the present organic solvent recovery system 1 may further include an on-off valve provided in the dilution gas supply flow path L70 on the upstream side of the connection between the dilution gas supply flow path L70 and the downstream end of the return flow path 400 part; and the control part, which controls the opening of the switch valve. At this time, the control unit should control the opening of the on-off valve so that the temperature of the gas to be processed before flowing into the treatment tank is maintained within a predetermined range. The tank to be processed is the two treatment tanks connected by the connecting flow path. Among them, one is arranged on the downstream side of the aforementioned gas flow to be processed. [Example]
使用上述說明之圖1所示的有機溶劑回收系統1，實施以下之處理。 令作為被處理氣體一例之含有機溶劑氣體中包含26,000ppm二氯甲烷之25℃被處理氣體風量為5.3Nm3 /分，且排出至有機溶劑回收系統系統外之二氯甲烷的設計濃度為5ppm以下。此外，使用圓管連接各流路。Using the organic solvent recovery system 1 shown in FIG. 1 described above, the following processing is performed. As an example of the gas to be processed, the air volume of the gas to be processed at 25°C containing 26,000 ppm of methylene chloride in the organic solvent gas is 5.3 Nm 3 /min, and the design concentration of methylene chloride discharged out of the organic solvent recovery system is 5 ppm. the following. In addition, circular tubes are used to connect each flow path.
首先，藉由有機溶劑回收裝置100處理被處理氣體。第一吸附材使用活性碳纖維。用風量5.3Nm3 /分由送風機F1送風至第一吸附步驟之第一處理槽101。接著將由第一處理槽101排出之第一吸附步驟出口氣體送風至第二吸附步驟之第二處理槽102作為第二吸附入口氣體。此時，用稀釋氣體及濃縮氣體調節第二吸附入口氣體成7.5Nm3 /分、45℃。藉由第二處理槽102處理後之氣體排出作為第一處理氣體，接著通過第二取出流路L32及輸送流路300送風至有機溶劑濃縮裝置200。First, the gas to be processed is processed by the organic solvent recovery device 100 . The first adsorbent material uses activated carbon fiber. The air volume is 5.3Nm 3 /min. The air is supplied from the air blower F1 to the first treatment tank 101 of the first adsorption step. Then, the outlet gas of the first adsorption step discharged from the first treatment tank 101 is sent to the second treatment tank 102 of the second adsorption step as the second adsorption inlet gas. At this time, the second adsorption inlet gas was adjusted to 7.5 Nm 3 /min and 45°C using diluent gas and concentrated gas. The gas treated by the second treatment tank 102 is discharged as the first treatment gas, and then sent to the organic solvent concentration device 200 through the second extraction flow path L32 and the transport flow path 300 .
在由第一處理槽101排出之第一吸附步驟出口氣體的二氯甲烷濃度到達500ppm時切換各步驟。第一處理槽101進行第一吸附步驟及第二處理槽102進行第二吸附步驟時，進行將脫附用蒸氣導入至第三處理槽103之脫附步驟。Each step is switched when the methylene chloride concentration of the outlet gas of the first adsorption step discharged from the first treatment tank 101 reaches 500 ppm. When the first treatment tank 101 performs the first adsorption step and the second treatment tank 102 performs the second adsorption step, a desorption step of introducing desorption steam into the third treatment tank 103 is performed.
有機溶劑濃縮裝置200之第二吸附材201A使用沸石蜂巢。 使由有機溶劑回收裝置100排出之第一處理氣體通氣至吸附部202，接著排出第二處理氣體。此外，由連接流路L80供給第二處理氣體之一部份並加熱至130℃，接著供給至脫附部203並排出濃縮氣體。濃縮氣體之全量通過返回流路400供給至有機溶劑回收裝置100之稀釋氣體供給流路L70。The second adsorbent material 201A of the organic solvent concentration device 200 uses a zeolite honeycomb. The first processing gas discharged from the organic solvent recovery device 100 is ventilated to the adsorption part 202, and then the second processing gas is discharged. In addition, a part of the second processing gas is supplied from the connection flow path L80 and heated to 130° C., and then supplied to the desorption part 203 to discharge the concentrated gas. The entire amount of the concentrated gas is supplied to the diluent gas supply channel L70 of the organic solvent recovery device 100 through the return channel 400 .
此時，第二處理氣體(有機溶劑回收系統系統外排出氣體)之二氯甲烷濃度係5ppm以下。At this time, the methylene chloride concentration of the second processing gas (gas discharged from outside the organic solvent recovery system) is 5 ppm or less.
此外，有機溶劑回收裝置100之第一吸附材使用的活性碳纖維係3.8kg/槽，脫附一次所需之水蒸氣量係1.9kg且有機溶劑濃縮裝置200之第二吸附材201A使用之沸石係2kg。In addition, the activated carbon fiber used in the first adsorbent material of the organic solvent recovery device 100 is 3.8kg/tank, the amount of water vapor required for one desorption is 1.9kg, and the second adsorbent material 201A of the organic solvent concentration device 200 uses a zeolite system. 2kg.
>比較例> 與實施例同樣地藉由有機溶劑回收裝置100、有機溶劑濃縮裝置200處理與實施例相同之被處理氣體。但是，濃縮氣體全量送風至有機溶劑回收裝置100之送風機F1的上游側。>Comparative example> The same gas to be processed as in the embodiment is processed by the organic solvent recovery device 100 and the organic solvent concentration device 200 in the same manner as in the embodiment. However, the entire amount of the concentrated gas is blown to the upstream side of the blower F1 of the organic solvent recovery device 100 .
結果，第二處理氣體(有機溶劑回收系統系統外排出氣體)之二氯甲烷濃度為5ppm以下時，有機溶劑回收裝置100之第一吸附材使用的活性碳纖維係4.3kg/槽，脫附一次所需之水蒸氣量係1.9kg且有機溶劑濃縮裝置200之第二吸附材201A使用之沸石係2.2kg，因此相對實施例需要10%以上之各吸附材量。需要之吸附材量多，處理槽及吸附體亦必然大。As a result, when the methylene chloride concentration of the second treatment gas (gas discharged from outside the organic solvent recovery system) is 5 ppm or less, the activated carbon fiber used in the first adsorbent material of the organic solvent recovery device 100 is 4.3kg/tank, and desorption can be achieved once The required amount of water vapor is 1.9 kg and the zeolite used in the second adsorbent material 201A of the organic solvent concentration device 200 is 2.2 kg. Therefore, the amount of each adsorbent material is required to be more than 10% compared to the embodiment. A large amount of adsorbent material is required, and the treatment tank and adsorbent body must also be large.
此外，因為增加濃縮氣體，所以流過送風機F1之被處理氣體風量係6.5Nm3 /分，因此相對實施例，有機溶劑回收裝置100及有機溶劑濃縮裝置200以及有關連結之流路的圓管徑必須大型化10%以上。In addition, due to the increase in concentrated gas, the air volume of the gas to be processed flowing through the air blower F1 is 6.5 Nm 3 /min. Therefore, compared with the embodiment, the circular pipe diameters of the organic solvent recovery device 100 and the organic solvent concentration device 200 and the related connected flow paths are It must be enlarged by more than 10%.
由此可知，比較例為了具有與實施例相同之處理能力，比較例必須大型化。即，可了解的是實施例可避免設備之大型化且可提高有機溶劑之回收率。From this, it can be seen that in order for the comparative example to have the same processing capability as the embodiment, the comparative example must be enlarged. That is, it can be understood that the embodiment can avoid upsizing the equipment and improve the recovery rate of the organic solvent.
1:有機溶劑回收系統 100:有機溶劑回收裝置 101~103:處理槽 101A~103A:第一吸附材 110:水蒸氣供給部 120:分離器 122:冷凝器 130:排水處理設備 140,H1,H2,H3:加熱器 150:控制部 152:溫度感測器 200,500:有機溶劑濃縮裝置 201:吸附體 201A:第二吸附材 202:吸附部 203:脫附部 300:輸送流路 400:返回流路 501:第四處理槽 501A:第四吸附材 502:第五處理槽 502A:第五吸附材 C1,C2:冷卻器 F1,F2,F3,F4,F5:送風機 L10:被處理氣體供給流路 L11~L13:分歧流路 L20,L30,L50:合流流路 L21~L23:連結流路 L31~L33:取出流路 L41~L43:水蒸氣供給流路 L51~L53:有機溶劑回收流路 L60:再供給流路 L61:曝氣氣體供給流路 L70:稀釋氣體供給流路 L80:連接流路 L202:清淨氣體排出流路 V11~V13,V21~V23,V31~V33,V41~V43,V51~V58,V70:開關閥 V101~V103,V201~V203:開關阻尼器1: Organic solvent recovery system 100: Organic solvent recovery device 101~103: Processing tank 101A~103A: The first adsorbent material 110: Steam supply department 120:Separator 122:Condenser 130: Drainage treatment equipment 140,H1,H2,H3: heater 150:Control Department 152:Temperature sensor 200,500: Organic solvent concentration device 201:Adsorbent body 201A: Second adsorbent material 202:Adsorption part 203:Desorption Department 300:Conveying flow path 400: Return flow path 501: The fourth processing tank 501A: The fourth adsorbent material 502:Fifth processing tank 502A: The fifth adsorbent material C1,C2: Cooler F1, F2, F3, F4, F5: blower L10: To-be-processed gas supply flow path L11~L13: Different flow paths L20, L30, L50: combined flow path L21~L23: connecting flow path L31~L33: Take out the flow path L41~L43: Water vapor supply flow path L51~L53: Organic solvent recovery flow path L60: Resupply flow path L61: Aeration gas supply flow path L70: Dilution gas supply flow path L80: Connecting flow path L202: Clean gas discharge flow path V11~V13, V21~V23, V31~V33, V41~V43, V51~V58, V70: switch valve V101~V103, V201~V203: switching damper
[圖1]係概略地顯示本發明一實施形態之有機溶劑回收系統結構的圖。 [圖2]係概略地顯示在第一處理槽中進行吸附步驟，在第二處理槽進行第二吸附步驟且在第三處理槽進行脫附步驟之狀態的氣流的圖。 [圖3]係概略地顯示有機溶劑濃縮裝置之變形例的圖。[Fig. 1] is a diagram schematically showing the structure of an organic solvent recovery system according to an embodiment of the present invention. 2 is a diagram schematically showing the air flow in a state where the adsorption step is performed in the first treatment tank, the second adsorption step is performed in the second treatment tank, and the desorption step is performed in the third treatment tank. [Fig. 3] is a diagram schematically showing a modified example of the organic solvent concentration device.
1:有機溶劑回收系統 1: Organic solvent recovery system
100:有機溶劑回收裝置 100: Organic solvent recovery device
101~103:處理槽 101~103: Processing tank
101A~103A:第一吸附材 101A~103A: The first adsorbent material
110:水蒸氣供給部 110: Steam supply department
120:分離器 120:Separator
122:冷凝器 122:Condenser
130:排水處理設備 130: Drainage treatment equipment
140,H1,H2,H3:加熱器 140,H1,H2,H3: heater
150:控制部 150:Control Department
152:溫度感測器 152:Temperature sensor
200:有機溶劑濃縮裝置 200: Organic solvent concentration device
201:吸附體 201:Adsorbent body
201A:第二吸附材 201A: Second adsorbent material
202:吸附部 202:Adsorption part
203:脫附部 203:Desorption Department
300:輸送流路 300:Conveying flow path
400:返回流路 400: Return flow path
C1,C2:冷卻器 C1,C2: Cooler
F1,F2,F3,F4,F5:送風機 F1, F2, F3, F4, F5: blower
L10:被處理氣體供給流路 L10: To-be-processed gas supply flow path
L11~L13:分歧流路 L11~L13: Different flow paths
L20,L30,L50:合流流路 L20, L30, L50: combined flow path
L21~L23:連結流路 L21~L23: connecting flow path
L31~L33:取出流路 L31~L33: Take out the flow path
L41~L43:水蒸氣供給流路 L41~L43: Water vapor supply flow path
L51~L53:有機溶劑回收流路 L51~L53: Organic solvent recovery flow path
L60:再供給流路 L60: Resupply flow path
L61:曝氣氣體供給流路 L61: Aeration gas supply flow path
L70:稀釋氣體供給流路 L70: Dilution gas supply flow path
L80:連接流路 L80: Connecting flow path
L202:清淨氣體排出流路 L202: Clean gas discharge flow path
V11~V13,V21~V23,V31~V33,V41~V43,V70:開關閥 V11~V13, V21~V23, V31~V33, V41~V43, V70: switch valve
V101~V103,V201~V203:開關阻尼器 V101~V103, V201~V203: switching damper
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