TWI820271B - Rooftop truck - Google Patents

Rooftop truck Download PDF

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Publication number
TWI820271B
TWI820271B TW108145896A TW108145896A TWI820271B TW I820271 B TWI820271 B TW I820271B TW 108145896 A TW108145896 A TW 108145896A TW 108145896 A TW108145896 A TW 108145896A TW I820271 B TWI820271 B TW I820271B
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rail
branch
guide
guide roller
main
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TW108145896A
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TW202031571A (en
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鈴木正美
大洋
衣川知孝
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日商大福股份有限公司
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Engine Equipment That Uses Special Cycles (AREA)
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Abstract

於本發明的實施形態的一例的屋頂搬送車10，於沿著包含主軌道與分支軌道的搬送軌道而移行的屋頂搬送車10上方，分別於移行方向的左側與右側至少各設置一個的引導輥32L、引導輥32R，於主軌道的主導軌40M或分支軌道的分支導軌40B的外表面被導引。所述主導軌40M或分支導軌40B，設置於屋頂搬送車10的至少一對左右移行車輪18L、移行車輪18R所通過的區域的上方。In the roof transfer vehicle 10 according to an example of the embodiment of the present invention, above the roof transfer vehicle 10 moving along the transfer track including the main track and the branch track, at least one guide roller is provided on the left and right sides of the moving direction. 32L and guide roller 32R are guided on the outer surface of the main rail 40M of the main rail or the branch guide rail 40B of the branch rail. The main rail 40M or the branch guide rail 40B is provided above an area through which at least a pair of left and right traveling wheels 18L and 18R of the roof transport vehicle 10 pass.

Description

屋頂搬送車Rooftop truck

本發明是有關於一種屋頂搬送車，特別是有關於一種沿著包含主軌道與分支軌道的搬送軌道而移行的屋頂搬送車。The present invention relates to a roof transfer vehicle, and in particular to a roof transfer vehicle that moves along a transfer track including a main track and a branch track.

先前，於半導體製造工廠等的進行包含將物品予以搬送的步驟的作業的設備中，有時為了搬送物品而使用如圖5所示的屋頂搬送車80。再者，圖5是表示將屋頂搬送車80自其移行方向的後方進行觀察的樣態的後視圖。所述屋頂搬送車80具有：移行台車86、側輥（side roller）89L、側輥89R、以及引導輥（guide roller）87。移行台車86包括左右一對車輪88。側輥89L、側輥89R於移行台車86的下方設置左右一對。引導輥87設置為於移行台車86的上方能夠左右滑動。而且，如圖5中由假想線所示般，於移行台車86的下方，連接有物品保持部84，所述物品保持部84保持作為搬送對象的物品82（例如收納半導體基板的筐體等）。Conventionally, in equipment that performs operations including a step of transporting articles, such as a semiconductor manufacturing factory, a rooftop transfer vehicle 80 as shown in FIG. 5 is sometimes used to transport articles. In addition, FIG. 5 is a rear view showing the state in which the roof transport vehicle 80 is viewed from the rear in the moving direction. The roof transfer vehicle 80 includes a moving trolley 86 , side rollers 89L, 89R, and a guide roller 87 . The moving trolley 86 includes a pair of left and right wheels 88 . A pair of left and right side rollers 89L and 89R are provided below the moving trolley 86 . The guide roller 87 is provided above the moving trolley 86 so as to be able to slide left and right. Furthermore, as shown by the imaginary line in FIG. 5 , an article holding portion 84 holding an article 82 to be transported (for example, a housing housing a semiconductor substrate, etc.) is connected below the transfer cart 86 . .

移行台車86的車輪88由左右一對移行軌（rail）92、移行軌94支撐。所述移行軌92、移行軌94利用自設備的屋頂藉由懸吊裝置90懸吊等的方法設置於設備的屋頂側。而且，移行軌92、移行軌94沿著預先決定的搬送軌道而形成屋頂搬送車80的移行路線（route）。車輪88於所述移行軌92、移行軌94上滾動，且側輥89L、側輥89R沿著移行軌92、移行軌94的內表面（圖中內側的側面），藉此移行台車86可沿著搬送軌道在設備內移行。如此般藉由移行台車86移行，而保持於與移行台車86連接的物品保持部84的物品82沿著搬送軌道被搬送。The wheels 88 of the traveling trolley 86 are supported by a pair of left and right traveling rails 92 and 94 . The moving rails 92 and 94 are installed on the roof side of the equipment by being suspended from the roof of the equipment through a suspension device 90 or the like. Furthermore, the moving rails 92 and 94 form a moving route (route) of the roof transport vehicle 80 along a predetermined transport track. The wheels 88 roll on the moving rails 92 and 94 , and the side rollers 89L and 89R follow the inner surfaces of the moving rails 92 and 94 (the inner side in the figure), whereby the moving trolley 86 can move along the Move inside the equipment along the conveyor rail. As the transfer trolley 86 moves in this way, the article 82 held by the article holding part 84 connected to the transfer trolley 86 is conveyed along the conveyance rail.

然而，搬送軌道有在設備內沿兩個方向以上分岔（分支）的情況。於此種情形下，為了將屋頂搬送車80朝適當的分岔目的地（方向）引導，而於分支地點的附近，於移行軌92、移行軌94的上方設置有導軌（guide rail）96。此處雖未圖示，但所述導軌96於分支地點設置為兩岔狀。藉由引導輥87相對於所述兩岔狀導軌96的哪一者相接並滾動（被導引），而屋頂搬送車80的移行方向變化。However, the conveyance rail may bifurcate (branch) in two or more directions within the facility. In this case, in order to guide the roof transport vehicle 80 to an appropriate branching destination (direction), a guide rail 96 is provided above the moving rails 92 and 94 near the branching point. Although not shown here, the guide rail 96 is provided in a bifurcated shape at the branch point. The moving direction of the roof transport vehicle 80 changes as the guide roller 87 contacts and rolls (is guided) with respect to which one of the two forked guide rails 96 is in contact.

圖5所示的引導輥87如所述般能夠沿圖中左右滑動，從而能夠選擇與導軌96的圖中右側的側面及左側的側面哪一側面相接。控制屋頂搬送車80的動作的控制器（未圖示）使引導輥87左右滑動（slide），藉此選擇與物品82應被搬送的目的地相應的適當的分岔目的地。The guide roller 87 shown in FIG. 5 can slide left and right in the figure as described above, and can select which side of the guide rail 96 contacts the right side or the left side in the figure. A controller (not shown) that controls the operation of the roof transport vehicle 80 slides the guide roller 87 left and right, thereby selecting an appropriate branch destination corresponding to the destination to which the article 82 is to be transported.

作為一例而表示採用下述結構的情形，即：搬送軌道分支為直線前進的主軌道及前往右方向的分支軌道，導軌96沿著所述搬送軌道，分支為直線狀部分及朝右彎曲的部分此兩岔。若引導輥87如圖5所示般與導軌96的右側面相接而被導引，則屋頂搬送車80被朝導軌96的朝右彎曲的部分引導而前往右方向，從而被朝分支軌道引導。另一方面，若引導輥87如圖5中由假想線所示般與導軌96的左側面相接而被導引，則屋頂搬送車80被朝導軌96的直線狀部分引導而原樣直線前進，從而被朝主軌道引導。As an example, a structure is shown in which the conveyance track branches into a straight main track and a rightward branch track, and the guide rail 96 branches into a straight portion and a right-curving portion along the conveyance track. These two forks. When the guide roller 87 is in contact with the right side of the guide rail 96 and is guided as shown in FIG. 5 , the roof transport vehicle 80 is guided toward the rightward curved portion of the guide rail 96 and is guided toward the branch track. . On the other hand, when the guide roller 87 is in contact with the left side of the guide rail 96 and is guided as shown by the imaginary line in FIG. 5 , the roof transport vehicle 80 is guided toward the linear portion of the guide rail 96 and moves straight forward. thereby being guided towards the main track.

為了使所述的屋頂搬送車80以沿著預先決定的搬送軌道準確地、且儘量不引起振動的方式移行，而必須將移行軌92、移行軌94以及導軌96以準確的位置關係予以設置。於日本專利特開2018-062241號公報，揭示有用於檢查此種各軌的設置狀態的軌檢查裝置。In order for the roof transport vehicle 80 to move along the predetermined transport track accurately and without causing vibration as much as possible, the moving rail 92 , the moving rail 94 and the guide rail 96 must be set in an accurate positional relationship. Japanese Patent Application Laid-Open No. 2018-062241 discloses a rail inspection device for inspecting the installation status of such rails.

[發明所欲解決之課題] 然而，於先前技術中，即便使用如日本專利特開2018-062241號公報所記載的軌檢查裝置，仍難以準確地設置各軌。如圖5所記載般，用於導引先前的屋頂搬送車80的導軌96相對於左右一對移行軌92、移行軌94而設置於左右方向的中央上方。因此，在調整導軌96的位置時，作業者必須在移行軌92、移行軌94彼此間的寬廣範圍內進行調整。而且，如所述般，引導輥87既有可能與導軌96的左側面相接，亦有可能與右側面相接。因此，導軌96必須以所述左側面與右側面兩者位於準確的位置、方向的方式被設置。難以如此般以兩個側面的位置與方向成為準確的方式來設置導軌96。[Problem to be solved by the invention] However, in the prior art, even if the rail inspection device described in Japanese Patent Application Laid-Open No. 2018-062241 is used, it is still difficult to accurately set each rail. As shown in FIG. 5 , the guide rail 96 for guiding the previous roof transfer vehicle 80 is provided above the center in the left-right direction with respect to the pair of left and right moving rails 92 and 94 . Therefore, when adjusting the position of the guide rail 96, the operator must adjust within a wide range between the moving rails 92 and 94. Furthermore, as described above, the guide roller 87 may be in contact with the left side or the right side of the guide rail 96 . Therefore, the guide rail 96 must be installed so that both the left side and the right side are in accurate positions and directions. It is difficult to install the guide rail 96 in such a way that the positions and directions of the two side surfaces are accurate.

藉由日本專利特開2018-062241號公報所記載的軌檢查裝置，能夠檢查導軌96的一個側面與一條移行軌間的寬度方向（左右方向）間隔，但若不針對另一個側面重新檢查，則無法知道另一個側面的位置是否被準確地設置。而且，直至以任一個側面均位於準確的位置的方式而設置，要多次重覆軌位置的微調整及針對兩側面的檢查，從而需要非常耗費精力的作業。With the rail inspection device described in Japanese Patent Application Laid-Open No. 2018-062241, the width direction (left-right direction) interval between one side of the guide rail 96 and a moving rail can be inspected, but it cannot be inspected without re-inspecting the other side. Know if the position of the other side is set accurately. Furthermore, until both sides are installed at an accurate position, fine adjustment of the rail position and inspection of both sides must be repeated many times, which requires very laborious work.

又，於先前的屋頂搬送車80，亦有於搬送軌道的分支地點附近於引導輥87及導軌96產生磨耗的問題。於搬送軌道的分支地點附近，在自分支源至移行至分支目的地的區間，有時左右一對移行軌92、移行軌94的一個會暫時中斷。例如屋頂搬送車80於自直線前進的主軌道朝前往右方向的分支軌道分支的路徑前進的情形下，要暫時通過不存在圖5所示的左側的移行軌92的區間。於所述區間，不受移行軌92支撐的左側車輪88被重力吸引，從而作用有使屋頂搬送車80朝圖中的左下方向傾斜的力。然而，若如圖5所示般於導軌96的右側面相接有引導輥87，則欲將屋頂搬送車80朝圖中的左下方向傾斜的力被導軌96的右側面承接，而防止屋頂搬送車80掉落或傾斜。In addition, the conventional roof conveyance vehicle 80 also has a problem that the guide roller 87 and the guide rail 96 are worn near the branch point of the conveyance track. In the vicinity of the branch point of the conveyance rail, in the section from the branch source to the branch destination, one of the pair of left and right rails 92 and 94 may be temporarily interrupted. For example, when the roof transport vehicle 80 moves forward on a path branching from a straight main track to a rightward branch track, it temporarily passes through a section where the left transition rail 92 shown in FIG. 5 does not exist. In this section, the left wheel 88 which is not supported by the moving rail 92 is attracted by gravity, and a force acts to tilt the roof transport vehicle 80 in the lower left direction in the figure. However, if the guide roller 87 is in contact with the right side of the guide rail 96 as shown in FIG. 5 , the force intended to tilt the roof transfer vehicle 80 in the lower left direction in the figure is received by the right side of the guide rail 96 , preventing roof transfer. Car 80 falls or tilts.

然而，屋頂搬送車80欲朝左下方向傾斜的移動由於伴隨著以右側的車輪88與右側的移行軌94的接點為中心點的圖中的逆時針轉的力，故於自右側的車輪88與右側的移行軌94的接點沿左右方向離開的導軌96的右側面與引導輥87的接點，施加有前往圖中的左下方向的力。However, the tilting movement of the roof transport vehicle 80 in the lower left direction is accompanied by a counterclockwise force in the figure with the contact point between the right wheel 88 and the right transfer rail 94 as the center point. Therefore, the movement from the right wheel 88 The contact point between the right side surface of the guide rail 96 and the guide roller 87 that is separated from the contact point of the right transfer rail 94 in the left-right direction exerts a force in the lower left direction in the figure.

即，於導軌96與引導輥87間，不僅作用有左右方向的力，還作用有上下方向的力。引導輥87的左右方向的移動由導軌96限制，但上下方向的移動未受到限制，故因引導輥87被作用有上下方向的力而相對於導軌96的右側面朝上下滑動，而於引導輥87與導軌96間產生摩擦，從而有引導輥87及導軌96的表面磨耗的擔憂。又，若因所述磨耗而自引導輥87及導軌96產生粉塵，則滿足不了半導體製造工廠等的搬送設備所要求的高度清潔性。That is, not only the force in the left and right direction but also the force in the up and down direction acts between the guide rail 96 and the guide roller 87 . The left and right movement of the guide roller 87 is restricted by the guide rail 96, but the up and down movement is not restricted. Therefore, the guide roller 87 is acted on by an up and down force and slides up and down relative to the right side of the guide rail 96. There is a concern that friction occurs between the guide roller 87 and the guide rail 96 and the surfaces of the guide roller 87 and the guide rail 96 are worn. Furthermore, if dust is generated from the guide roller 87 and the guide rail 96 due to the wear, the high level of cleanliness required for transportation equipment such as a semiconductor manufacturing factory cannot be satisfied.

因此，本發明的課題在於提供一種易於調整各軌的位置關係，且引導輥及導軌的磨耗的擔憂少的屋頂搬送車。 [解決課題之手段]Therefore, an object of the present invention is to provide a roof transport vehicle in which the positional relationship between the rails can be easily adjusted and there is little concern about wear of the guide rollers and the guide rails. [Means to solve the problem]

為了解決所述課題，本發明的屋頂搬送車的實施形態的一例為一種屋頂搬送車，其沿著搬送軌道而移行，所述搬送軌道包含多條主軌道及將所述多條主軌道彼此加以連接的分支軌道，且所述屋頂搬送車包括：至少一對左右移行車輪；以及引導輥，於所述移行車輪的上方分別於移行方向的左側與右側至少各設置一個；所述主軌道包括主軌與主導軌，所述主軌於其上表面支撐所述移行車輪，所述主導軌設置於所述主軌中所述移行車輪所通過的區域的上方而將所述引導輥予以導引；所述分支軌道包括分支軌及分支導軌，所述分支軌於其上表面支撐所述移行車輪，所述分支導軌設置於所述分支軌中所述移行車輪所通過的區域的上方而將所述引導輥予以導引；關於所述主導軌及所述分支導軌，在將所述主軌道及所述分支軌道的中心側的側面稱為內表面，將相反側的側面稱為外表面的情形下，所述引導輥於所述主導軌或所述分支導軌的外表面被導引。In order to solve the above problems, an example of an embodiment of the roof transport vehicle of the present invention is a roof transport vehicle that moves along a transport track that includes a plurality of main rails and that the plurality of main rails are interconnected. Connected branch rails, and the roof transport vehicle includes: at least a pair of left and right moving wheels; and at least one guide roller is provided above the moving wheels on the left and right sides of the moving direction; the main track includes a main Rail and main rail, the main rail supports the moving wheel on its upper surface, and the main rail is provided above the area in the main rail where the moving wheel passes to guide the guide roller; The branch rail includes a branch rail and a branch guide rail. The branch rail supports the moving wheel on its upper surface. The branch guide rail is disposed above the area where the moving wheel passes in the branch rail to connect the moving wheel. Guide rollers guide the main rail and the branch guide rails. The side surfaces on the center side of the main rail and the branch rails are called inner surfaces, and the side surfaces on the opposite side are called outer surfaces. , the guide roller is guided on the outer surface of the main rail or the branch guide rail.

又，較佳的是，所述屋頂搬送車可包括於所述移行車輪的下方分別設置於移行方向的左側與右側的側輥，且所述側輥於所述主軌及所述分支軌的內表面被導引。Furthermore, preferably, the roof transport vehicle may include side rollers respectively provided on the left and right sides of the moving direction below the moving wheels, and the side rollers are disposed between the main rail and the branch rail. The inner surface is guided.

又，較佳的是，所述側輥可相對於每一個所述引導輥於移行方向的前後以兩個為一組地設置。Furthermore, preferably, the side rollers may be provided in sets of two at the front and rear of each of the guide rollers in the moving direction.

又，較佳的是，所述引導輥可以在藉由所述主導軌或所述分支導軌導引時，與所述主導軌或所述分支導軌的接點在俯視時位於所述移行車輪的旋轉軸上的方式而設置。Furthermore, preferably, when the guide roller is guided by the main rail or the branch guide rail, the contact point with the main rail or the branch guide rail is located at the edge of the moving wheel when viewed from above. set on the axis of rotation.

又，較佳的是，所述主導軌及所述分支導軌可以其外表面在俯視時與所述移行車輪的移行方向中心線一致的方式而設置。 [發明的效果]Furthermore, preferably, the main rail and the branch guide rail may be disposed so that their outer surfaces coincide with the center line of the moving wheel in the moving direction when viewed from above. [Effects of the invention]

根據本發明的屋頂搬送車的實施形態的一例，分別設置有用於將引導輥朝主軌道導引的主導軌、及用於朝分支軌道導引的分支導軌。因此，在調整主導軌的位置時只要僅調整主軌的內表面與主導軌的外表面的位置關係即可，而不必考慮主導軌的內表面的位置與方向。同樣地，在調整分支導軌的位置時只要僅調整分支軌的內表面與分支導軌的外表面的位置關係即可，而不必考慮分支導軌的內表面的位置與方向。進而，由於主導軌設置於主軌的上方，分支導軌設置於分支軌的上方，故主導軌與主軌的距離、及分支導軌與分支軌的距離變短，而各軌的位置關係的調整成為在所述短距離內的調整。因此，易於進行各軌的位置關係的調整。According to an example of the embodiment of the roof transport vehicle of the present invention, a main rail for guiding the guide roller toward the main rail and a branch guide rail for guiding the guide roller toward the branch rail are respectively provided. Therefore, when adjusting the position of the main rail, you only need to adjust the positional relationship between the inner surface of the main rail and the outer surface of the main rail, without considering the position and direction of the inner surface of the main rail. Similarly, when adjusting the position of the branch guide rail, you only need to adjust the positional relationship between the inner surface of the branch rail and the outer surface of the branch guide rail, without considering the position and direction of the inner surface of the branch guide rail. Furthermore, since the main rail is arranged above the main rail and the branch rail is arranged above the branch rail, the distance between the main rail and the main rail and the distance between the branch rail and the branch rail become shorter, and the adjustment of the positional relationship of each rail becomes adjustment within said short distance. Therefore, it is easy to adjust the positional relationship of each rail.

又，引導輥由設置於移行車輪所通過的區域的上方的主導軌或分支導軌予以導引。因此，即便於分支軌道，左右一對移行車輪的任一個未被支撐的狀態下，自被支撐的移行車輪與進行支撐的軌的接點至引導輥相對於主導軌或分支導軌的接點為止的左右方向的距離變短。因此，施加於主導軌或分支導軌的上下方向的力變小，而引導輥、主導軌、分支導軌磨耗的擔憂及產生粉塵的擔憂少。In addition, the guide roller is guided by a main rail or a branch guide rail provided above the area through which the moving wheels pass. Therefore, even in the branch track, when either one of the left and right pair of traveling wheels is not supported, from the contact point between the supported traveling wheel and the supporting rail to the contact point of the guide roller with respect to the main rail or the branch guide rail The distance in the left and right directions becomes shorter. Therefore, the force exerted on the main rail or the branch guide rail in the vertical direction becomes smaller, and there is less concern about the wear of the guide roller, the main rail, and the branch guide rail and the concern about the generation of dust.

於圖1的平面圖中，概略地表示有在本發明的實施形態的一例中供屋頂搬送車10移行的搬送軌道。所述搬送軌道設置於例如半導體製造工廠等的、進行包含將作為搬送對象的物品12（例如收納半導體基板的筐體等）予以搬送的步驟的作業的設備內。The plan view of FIG. 1 schematically shows a transport rail on which the roof transport vehicle 10 moves in an example of the embodiment of the present invention. The conveyance rail is provided in a facility, such as a semiconductor manufacturing factory, that performs operations including a step of conveying the article 12 to be conveyed (eg, a casing for storing semiconductor substrates).

於圖1的搬送軌道包含多條主軌道RM。各主軌道RM為在設備內通過對物品12進行各種作業的區劃的軌道，根據針對物品12進行的作業的種類而設置有各自的主軌道RM。例如若為半導體製造工廠，則沿著主軌道RM設置有多個物品處理部，屋頂搬送車10根據所製造的半導體的種類、或加工階段而通過適當的主軌道RM。The conveyance track in FIG. 1 includes a plurality of main tracks RM. Each main rail RM is a sectioned rail through which various operations are performed on the article 12 in the facility, and each main rail RM is provided according to the type of operation performed on the article 12 . For example, in a semiconductor manufacturing factory, a plurality of article processing units are provided along the main rail RM, and the rooftop transport vehicle 10 passes through the appropriate main rail RM according to the type of semiconductor to be manufactured or the processing stage.

而且，於搬送軌道，設置有將所述多條主軌道RM彼此加以連接的分支軌道RB。於搬送軌道存在多個分岔為主軌道RM及分支軌道RB的分支區劃，在任一條主軌道RM移行的屋頂搬送車10於分支區劃內，根據其後應前往的主軌道RM（此藉由上位系統等而被指定），選擇是於當前移行的主軌道RM原樣移行，還是經由分支軌道RB前往其他主軌道RM。在以後的說明中，對於在圖1中由假想線包圍的分支區劃MB、即分支為直線狀主軌道RM與前往右方向的分支軌道RB的區劃進行說明。Furthermore, the transport rail is provided with a branch rail RB that connects the plurality of main rails RM to each other. There are multiple branch areas on the transport track that branch into the main track RM and the branch track RB. The roof transport vehicle 10 moving on any main track RM is in the branch area according to the main track RM to which it should go afterwards (this is done by the upper system, etc.), select whether to move to the current main track RM as it is, or to go to another main track RM via the branch track RB. In the following description, a branch section MB surrounded by a virtual line in FIG. 1 , that is, a section branched into a linear main track RM and a right-direction branch track RB will be described.

圖2表示自移行方向的後方觀察位於分支區劃MB的屋頂搬送車10的後視圖。又，圖3表示圖2中的A-A箭視圖。所述屋頂搬送車10藉由包括至少一對（如圖3所示，此處設為兩對）左右移行車輪18L、移行車輪18R的移行台車16而在設備內移行。而且，於移行台車16的下方，連接有保持作為搬送對象的物品12的物品保持部14。此處，雖未圖示，但物品保持部14包括使物品12升降的機構，藉此物品保持部14將物品12於在搬送軌道的下方對物品12進行作業的場所（半導體製造工廠的物品處理部等）、與在屋頂側的搬送軌道移行的屋頂搬送車10間進行移載。FIG. 2 shows a rear view of the roof transport vehicle 10 located in the branch area MB as viewed from the rear in the moving direction. In addition, FIG. 3 shows an arrow view A-A in FIG. 2 . The roof transport vehicle 10 moves within the facility using a moving trolley 16 including at least one pair (as shown in FIG. 3 , here it is assumed to be two pairs) of left and right moving wheels 18L and 18R. Moreover, the article holding part 14 which holds the article 12 to be conveyed is connected below the transfer trolley 16. Although not shown in the figure, the article holding part 14 includes a mechanism for raising and lowering the article 12, whereby the article holding part 14 holds the article 12 at a place where the article 12 is worked on (article processing in a semiconductor manufacturing plant) below the conveyor rail. Department, etc.), and the roof transfer vehicle 10 moving on the transfer rail on the roof side is transferred.

又，沿著搬送軌道配置有藉由具備倒U字狀框體25的懸吊裝置20自設備的屋頂予以懸吊支撐的主軌22與分支軌24，分支區劃MB內的屋頂搬送車10的移行台車16所具備的左右移行車輪18L、移行車輪18R，藉由所述主軌22及分支軌24而受到支撐。圖2中，左側的移行車輪18L支撐於主軌22上表面，右側的移行車輪18R支撐於分支軌24上表面。再者，於主軌道RM，左右兩條軌為主軌22，左右移行車輪18L、移行車輪18R任一者均藉由主軌22受到支撐。In addition, main rails 22 and branch rails 24, which are suspended and supported from the roof of the facility by a suspension device 20 having an inverted U-shaped frame 25, are arranged along the conveyance rail. The roof conveyance vehicles 10 in the branch area MB are The left and right traveling wheels 18L and 18R provided in the traveling trolley 16 are supported by the main rail 22 and the branch rail 24 . In FIG. 2 , the left traveling wheel 18L is supported on the upper surface of the main rail 22 , and the right traveling wheel 18R is supported on the upper surface of the branch rail 24 . In addition, in the main rail RM, the two left and right rails serve as the main rail 22, and both the left and right traveling wheels 18L and 18R are supported by the main rail 22.

圖3表示屋頂搬送車10自主軌道RM朝分支區劃MB進入的樣態。圖3中右側的軌在主軌道RM中為主軌22，在分支區劃MB中為分支軌24。在圖中將所述主軌22與分支軌24作為連續的軌來描述，但亦可將主軌22與分支軌24設為個別構體，而於其邊界具有微小的間隙。FIG. 3 shows a state in which the roof transport vehicle 10 enters the main track RM toward the branch area MB. The rail on the right side in FIG. 3 is the main rail 22 in the main rail RM and is the branch rail 24 in the branch area MB. In the figure, the main rail 22 and the branch rail 24 are described as continuous rails, but the main rail 22 and the branch rail 24 can also be set as individual structures with a slight gap at their boundaries.

於該些主軌22與分支軌24的內表面（圖2、圖3中的偏靠中央的側面，即主軌道RM或分支軌道RB的中心側的側面），設置於移行台車16的下方的左右側輥50L、側輥50R朝向滾動面（滾轉面）。於主軌道RM，該些側輥50L、側輥50R於主軌22的內表面被導引，而屋頂搬送車10沿著主軌道RM移行。On the inner surfaces of the main rails 22 and branch rails 24 (the side closer to the center in FIGS. 2 and 3 , that is, the side on the center side of the main rail RM or the branch rail RB), there are provided below the moving trolley 16 The left and right side rollers 50L and 50R face the rolling surface (rolling surface). On the main rail RM, these side rollers 50L and 50R are guided on the inner surface of the main rail 22, and the roof transport vehicle 10 moves along the main rail RM.

於移行台車16的上方安裝有引導輥裝置30。所述引導輥裝置30包括：左右引導輥32L、引導輥32R，被朝後述的主導軌40M或分支導軌40B導引；引導輥驅動部34，使該些引導輥32L、引導輥32R移動；及引導輥台座31，支撐引導輥驅動部34。引導輥驅動部34使左右引導輥32L、引導輥32R的位置相對於引導輥裝置30以及屋頂搬送車10整體變化，藉此可切換左側的引導輥32L被朝主導軌40M導引的狀態、與右側的引導輥32R被朝分支導軌40B導引的狀態。引導輥32L、引導輥32R以在移行車輪18L、移行車輪18R的上方分別於移行方向的左側與右側至少各存在一個的方式而設置。於圖3中，因與兩對移行車輪18L、移行車輪18R對應，而設置有兩個引導輥裝置30，故分別於左側與右側各存在兩個引導輥32L、引導輥32R。A guide roller device 30 is installed above the moving trolley 16 . The guide roller device 30 includes: left and right guide rollers 32L and 32R, which are guided toward a main rail 40M or a branch guide rail 40B described later; a guide roller drive unit 34 that moves the guide rollers 32L and 32R; and The guide roller base 31 supports the guide roller drive unit 34 . The guide roller drive unit 34 changes the positions of the left and right guide rollers 32L and 32R relative to the guide roller device 30 and the roof transport vehicle 10 as a whole, thereby switching between a state in which the left guide roller 32L is guided toward the main rail 40M, and a state in which the left guide roller 32L is guided toward the main rail 40M. The right guide roller 32R is guided toward the branch guide rail 40B. The guide rollers 32L and 32R are provided above the traveling wheels 18L and 18R, respectively, so that at least one guide roller 32L and one guide roller 32R are provided on the left and right sides of the traveling direction. In FIG. 3 , since two guide roller devices 30 are provided corresponding to the two pairs of traveling wheels 18L and 18R, there are two guide rollers 32L and 32R respectively on the left and right sides.

主導軌40M及分支導軌40B分別設置於主軌22及分支軌24的上方，位於較屋頂搬送車10更高的位置。此處，於懸吊支撐主軌22、分支軌24的倒U字狀框體25，於作為倒U字的上條邊的部位的下表面（藉由螺釘固定等）安裝有主導軌40M及分支導軌40B。The main rail 40M and the branch rail 40B are respectively provided above the main rail 22 and the branch rail 24 and are located at a higher position than the roof transport vehicle 10 . Here, on the inverted U-shaped frame 25 that suspends and supports the main rail 22 and the branch rails 24, the main rail 40M and the branch rails are attached to the lower surface (fixed with screws, etc.) of the upper side of the inverted U shape. Rail 40B.

主導軌40M及分支導軌40B具有板狀部分，所述板狀部分使兩個面分別面向相對於搬送方向的左右（圖2、圖3中的左右）。以主軌道RM及分支軌道RB的中心側（圖2、圖3中的中央側）的面為內表面，以相反側的面為外表面，以於外表面將引導輥32L、引導輥32R予以導引的方式而設置。圖2、圖3表示右側的引導輥32R朝分支導軌40B的外表面（於圖2、圖3中為右側的面）被導引的樣態。The main rail 40M and the branch guide rail 40B have plate-shaped portions with two surfaces facing the left and right (left and right in FIGS. 2 and 3 ) with respect to the conveyance direction. The surface on the center side (the center side in FIGS. 2 and 3 ) of the main rail RM and the branch rail RB is the inner surface, and the surface on the opposite side is the outer surface, so that the guide rollers 32L and 32R are connected to the outer surface. Set in a guiding manner. 2 and 3 show a state in which the right guide roller 32R is guided toward the outer surface of the branch guide rail 40B (right side in FIGS. 2 and 3 ).

於圖2、圖3所示的引導輥裝置30中，引導輥32L、引導輥32R分別安裝於以引導輥驅動部34為基部而在水平面內旋轉的臂的前端。所述臂形成下述尺寸，即：與自引導輥驅動部34中作為旋轉的基部的位置（圖3中搬送軌道的中心附近）至主導軌40M或分支導軌40B的直線距離相比，長出引導輥32L、引導輥32R的半徑部分。圖3所示的引導輥裝置30為下述狀態，即：左側的引導輥32L用的臂形成接近移行方向的角度（相對於移行方向為銳角），且右側的引導輥32R用的臂形成朝右方向的角度（相對於移行方向為直角）。In the guide roller device 30 shown in FIGS. 2 and 3 , the guide rollers 32L and 32R are respectively attached to the front ends of arms that rotate in a horizontal plane with the guide roller drive unit 34 as a base. The arm is formed to be longer than the linear distance from the position of the guide roller drive unit 34 as the base of rotation (near the center of the conveyance rail in FIG. 3 ) to the main rail 40M or the branch rail 40B. The radial portion of the guide roller 32L and the guide roller 32R. The guide roller device 30 shown in FIG. 3 is in a state in which the arm for the left guide roller 32L forms an angle close to the traveling direction (an acute angle with respect to the traveling direction), and the arm for the right guide roller 32R forms an angle toward the traveling direction. The angle to the right (right angle relative to the direction of travel).

屋頂搬送車10於此種狀態下移行，藉此屋頂搬送車10被朝前往右方向的分支軌道RB引導。圖4的平面圖概略地表示右側的引導輥32R被朝分支導軌40B導引的樣態。為了便於說明，而於圖4中針對屋頂搬送車10省略搬送台車16的圖示，僅表示引導輥裝置30中的引導輥驅動部34與左右引導輥32L、引導輥32R的位置。When the roof transport vehicle 10 moves in this state, the roof transport vehicle 10 is guided toward the rightward branch rail RB. The plan view of FIG. 4 schematically shows a state in which the right guide roller 32R is guided toward the branch guide rail 40B. For convenience of explanation, FIG. 4 omits the transportation trolley 16 of the roof transportation vehicle 10 , and only shows the positions of the guide roller drive unit 34 and the left and right guide rollers 32L and 32R in the guide roller device 30 .

分支導軌40B設置於沿著前往右方向的分支軌道RB的分支軌24的上方，如圖4所示，其俯視形狀為沿著分支軌道RB朝右方向彎曲的形狀。若預定前往分支軌道RB的屋頂搬送車10（圖4僅表示有引導輥裝置30）靠近分支區劃MB，則引導輥驅動部34使右側的引導輥32R用的臂朝前往右方向的角度旋轉，而引導輥裝置30形成圖4中由實線所示的狀態。若屋頂搬送車10於此種狀態下繼續前進，則右側的引導輥32R被導引至分支導軌40B的外表面（圖4中為右側的面），藉此包含引導輥裝置30的屋頂搬送車10被朝沿著分支導軌40B的俯視形狀的方向、即前往右方向的分支軌道RB引導。The branch rail 40B is provided above the branch rail 24 along the branch rail RB that goes to the right direction. As shown in FIG. 4 , its plan view shape is a shape that curves in the right direction along the branch rail RB. When the roof transport vehicle 10 scheduled to go to the branch track RB (only the guide roller device 30 is shown in FIG. 4 ) approaches the branch area MB, the guide roller drive unit 34 rotates the arm for the right guide roller 32R at an angle in the rightward direction. The guide roller device 30 is in the state shown by the solid line in FIG. 4 . If the roof transport vehicle 10 continues to move forward in this state, the right guide roller 32R is guided to the outer surface of the branch guide rail 40B (the right surface in FIG. 4 ), whereby the roof transport vehicle including the guide roller device 30 10 is guided toward the branch rail RB in a direction along the plan view shape of the branch guide rail 40B, that is, toward the right direction.

另一方面，主導軌40M於分支區劃MB設置於沿著直線狀主軌道RM的主軌22的上方，如圖4所示，其俯視形狀亦沿著主軌22形成直線狀。若預定在主軌道RM直線前進的屋頂搬送車10靠近分支區劃MB，則如圖4中由假想線所示般，引導輥驅動部34使左側的引導輥32L用的臂向朝左方向的角度旋轉，且使右側的引導輥32R用的臂朝接近移行方向的角度旋轉。若為此種狀態的（由假想線所示的）引導輥裝置30，則左側的引導輥32L被主導軌40M的外表面（在圖4中為左側的面）導引，而右側的引導輥不被導引。若屋頂搬送車10於此種狀態下繼續前進，則左側的引導輥32L被朝主導軌40M的外表面導引，藉此包含引導輥裝置30的屋頂搬送車10被朝沿著主導軌40M的俯視形狀的方向、即直線狀主軌道RM引導。On the other hand, the main rail 40M is provided above the main rail 22 along the linear main rail RM in the branch area MB. As shown in FIG. 4 , its plan view shape also forms a linear shape along the main rail 22 . When the roof transport vehicle 10 scheduled to advance straight on the main rail RM approaches the branch area MB, the guide roller drive unit 34 angles the arm for the left guide roller 32L toward the left as shown by the imaginary line in FIG. 4 Rotate and rotate the arm for the right guide roller 32R toward an angle close to the moving direction. If the guide roller device 30 is in this state (shown by a phantom line), the left guide roller 32L is guided by the outer surface (the left side in FIG. 4 ) of the main rail 40M, and the right guide roller 32L is guided by the outer surface of the main rail 40M. Not to be guided. If the roof transfer vehicle 10 continues to move forward in this state, the left guide roller 32L is guided toward the outer surface of the main rail 40M, whereby the roof transfer vehicle 10 including the guide roller device 30 is guided along the main rail 40M. The direction of the plan view shape, that is, the linear main rail RM guides.

再者，為了不發生左右引導輥32L、引導輥32R一起被導引的狀態，即左側的引導輥32L被朝主導軌40M導引且右側的引導輥32R被朝分支導軌40B導引的狀態，較佳的是例如藉由兩臂的驅動機構被齒輪（gear）等連結，而左側的引導輥32L用的臂的移動與右側的引導輥32R用的臂的移動進行聯動。即，可為若其中一個臂與移行方向形成直角，則另一個臂形成與移行方向接近的角度，只要僅導引左側與右側的引導輥32L、引導輥32R其中一者即可。Furthermore, in order to prevent the left and right guide rollers 32L and 32R from being guided together, that is, the left guide roller 32L is guided toward the main rail 40M and the right guide roller 32R is guided toward the branch guide rail 40B, It is preferable that the movement of the arm for the left guide roller 32L is linked with the movement of the arm for the right guide roller 32R, for example, by a drive mechanism of both arms connected by a gear or the like. That is, if one of the arms forms a right angle to the moving direction, and the other arm forms an angle close to the moving direction, it may be sufficient to guide only one of the left and right guide rollers 32L and 32R.

與先前技術相比，根據如以上所述的本實施形態的屋頂搬送車10，易於調整各軌的位置關係。如圖2所示，由於分別設置有主導軌40M與分支導軌40B，故為了將屋頂搬送車10適當地朝主軌道RM引導，作業者只要調整主導軌40M的位置使得主導軌40M的外表面與主軌22的內表面的位置關係變得適當即可，而不必考慮主導軌40M的內表面的位置與方向。又，為了將屋頂搬送車10適當地朝分支軌道RB引導，作業者只要調整分支導軌40B的位置使得分支導軌40B的外表面與分支軌24的內表面的位置關係變得適當即可，而不必考慮分支導軌40B的內表面的位置與方向。Compared with the prior art, according to the roof transport vehicle 10 of this embodiment as described above, it is easier to adjust the positional relationship of each rail. As shown in FIG. 2 , since the main rail 40M and the branch rail 40B are respectively provided, in order to properly guide the roof transport vehicle 10 toward the main rail RM, the operator only needs to adjust the position of the main rail 40M so that the outer surface of the main rail 40M is in line with the main rail 40M. The positional relationship of the inner surface of the main rail 22 only needs to be appropriate, and there is no need to consider the position and direction of the inner surface of the main rail 40M. Furthermore, in order to properly guide the roof transport vehicle 10 to the branch rail RB, the operator only needs to adjust the position of the branch rail 40B so that the positional relationship between the outer surface of the branch rail 40B and the inner surface of the branch rail 24 becomes appropriate. Consider the position and direction of the inner surface of branch rail 40B.

進而，由於主導軌40M設置於主軌22的上方，分支導軌40B設置於分支軌24的上方，故主導軌40M與主軌22的距離、及分支導軌40B與分支軌24的距離變短，從而各軌的位置關係的調整成為在所述短距離內的調整。因此，易於調整各軌的位置關係。Furthermore, since the main rail 40M is disposed above the main rail 22 and the branch rail 40B is disposed above the branch rail 24, the distance between the main rail 40M and the main rail 22 and the distance between the branch rail 40B and the branch rail 24 are shortened. The adjustment of the positional relationship between the rails is an adjustment within the short distance. Therefore, it is easy to adjust the positional relationship of each rail.

又，於本實施形態的屋頂搬送車10中，即便在左右移行車輪18L、移行車輪18R任一者未被支撐的狀態下，引導輥32L、引導輥32R、主導軌40M、分支導軌40B磨耗的擔憂亦為少。例如於如圖4所示般將屋頂搬送車10朝前往右方向的分支軌道RB引導的情形下，在自主軌道RM朝分支軌道RB移行的中途，位於圖2的左側的移行車輪18L有暫時離開主軌22而懸於半空（不受支撐）的時期。此種情形下，左側的移行車輪18L被重力吸引，而作用有使屋頂搬送車10朝圖中的左下方向傾斜的力，但所述力於右側的引導輥32R與分支導軌40B外表面的接點，即圖2中所示的點P被承接。In addition, in the roof transport vehicle 10 of this embodiment, even when any of the left and right traveling wheels 18L and 18R is not supported, the guide roller 32L, the guide roller 32R, the main rail 40M, and the branch guide rail 40B are worn. There are also fewer worries. For example, when the roof transport vehicle 10 is guided toward the branch track RB in the right direction as shown in FIG. 4 , the moving wheels 18L on the left side of FIG. 2 temporarily leave while the main rail RM is moving toward the branch track RB. The period when the main rail 22 is suspended in mid-air (unsupported). In this case, the left moving wheel 18L is attracted by gravity, and a force acts to tilt the roof transport vehicle 10 in the lower left direction in the figure. However, the force is due to the contact between the right guide roller 32R and the outer surface of the branch guide rail 40B. point, namely point P shown in Figure 2, is taken over.

所述點P如圖2所示般位於與右側的移行車輪18R的移行方向中心線LZ1（穿過移行車輪18R的左右方向尺寸的中央的線）一致的位置。使屋頂搬送車10朝圖中的左下方向傾斜的力，以使屋頂搬送車10以右側的移行車輪18R與分支軌24的接點（位於移行方向中心線LZ1上）為中心朝逆時針旋轉的方式而作用，由於所述點P位於移行方向中心線LZ1上，故作用於點P的力僅相對於圖中的左右方向而作用，對分支導軌40B外表面不施加上下方向的力。因此，引導輥32R不會相對於分支導軌40B上下地滑動，從而引導輥32R與分支導軌40B磨耗的擔憂少。As shown in FIG. 2 , the point P is located at a position coinciding with the traveling direction center line LZ1 of the right traveling wheel 18R (a line passing through the center of the left-right direction dimension of the traveling wheel 18R). The force that causes the roof transfer vehicle 10 to tilt toward the lower left direction in the figure causes the roof transfer vehicle 10 to rotate counterclockwise around the contact point between the right transfer wheel 18R and the branch rail 24 (located on the transfer direction center line LZ1). Since the point P is located on the moving direction center line LZ1, the force acting on the point P only acts in the left-right direction in the figure, and no up-down force is exerted on the outer surface of the branch guide rail 40B. Therefore, the guide roller 32R does not slide up and down with respect to the branch guide rail 40B, and there is little concern that the guide roller 32R and the branch guide rail 40B are worn.

同樣地，於屋頂搬送車10在分支區劃MB被朝主軌道RM引導的情形下，右側的移行車輪18R有懸於半空的時期，但即便於所述時期內，由於左側的引導輥32L與主導軌40M外表面的接點位於與左側的移行車輪18L的移行方向中心線LZ2一致的位置，故引導輥32L不會相對於主導軌40M上下地滑動，從而引導輥32R與主導軌40M磨耗的擔憂少。Similarly, when the roof transport vehicle 10 is guided toward the main rail RM in the branch area MB, the right rolling wheel 18R is suspended in the air for a period. However, even during this period, the left guide roller 32L and the main rail RM The contact point on the outer surface of the rail 40M is located at a position consistent with the center line LZ2 in the moving direction of the left moving wheel 18L. Therefore, the guide roller 32L does not slide up and down relative to the main rail 40M, thereby worrying about the wear of the guide roller 32R and the main rail 40M. few.

又，於本實施形態中，於左右移行車輪18L、移行車輪18R任一者未被支撐的狀態下，例如主軌22中斷而左側的移行車輪18L懸於半空的狀態（懸臂狀態）下，搬送台車16相對於移行方向左右地振動的（擺頭運動）的擔憂亦為少。這是由於，如圖3所示，相對於被朝分支導軌40B導引的右側的引導輥32R，於移行台車16下方被朝分支軌24內表面引導的側輥50R於移行方向的前後以兩個為一組地設置（在圖3中有兩個引導輥32R，故側輥50R存在兩組而為四個）。藉由如此般設置有側輥50R，懸臂狀態的移行台車16由分別配置於以點P為一個頂點的三角形的頂點的引導輥32R與兩個側輥50R支撐。於此種狀態下，以被圖中左方向的力與右方向的力此兩者夾著的方式被支撐，而更確實地防止掉落，且藉由被三個點支撐而亦防止以點P為中心的擺頭運動。Furthermore, in this embodiment, transportation is carried out in a state where either the left or right traveling wheel 18L or the traveling wheel 18R is not supported, for example, in a state where the main rail 22 is interrupted and the left traveling wheel 18L is suspended in mid-air (cantilever state). There is also little concern that the trolley 16 vibrates left and right with respect to the moving direction (a swinging motion). This is because, as shown in FIG. 3 , with respect to the right guide roller 32R that is guided toward the branch guide rail 40B, the side roller 50R that is guided toward the inner surface of the branch rail 24 under the moving trolley 16 is positioned on both sides in the forward and backward direction of the moving carriage. They are provided in groups (in FIG. 3 , there are two guide rollers 32R, so there are two sets of four side rollers 50R). By arranging the side rollers 50R in this way, the cantilevered traveling carriage 16 is supported by the guide roller 32R and the two side rollers 50R respectively arranged at the vertices of a triangle having point P as one vertex. In this state, it is supported by being sandwiched between the force in the left direction and the force in the right direction in the figure, thereby more reliably preventing falling, and being supported by three points also prevents it from falling. P is the center of the head swinging motion.

此處，點P在俯視時位於移行車輪18L、移行車輪18R的旋轉軸LX上，且若以與俯視時的移行車輪18L、移行車輪18R的移行方向中心線LY一致的方式配置有分支導軌40B，則藉由引導輥32R與兩個側輥50R支撐移行台車16的力以將點P作為中心於前後左右成為均等（不產生以點P為中心的旋轉）的方式作用，從而移行台車16的姿勢更穩定。Here, the point P is located on the rotation axis LX of the traveling wheels 18L and 18R in a plan view, and the branch guide rail 40B is arranged so as to coincide with the traveling direction center line LY of the traveling wheels 18L and 18R in a plan view. , then the force supporting the moving trolley 16 by the guide roller 32R and the two side rollers 50R acts in such a manner that the point P is used as the center in the front, rear, left, and right directions (no rotation occurs around the point P), so that the moving trolley 16 Posture is more stable.

以上關於分支導軌40B、右側的引導輥32R、右側的側輥50R的說明與左側的移行車輪18L懸於半空的狀態相關，但於右側的移行車輪18R懸於半空的狀態下，若主導軌40M、左側的引導輥32L、左側的側輥50L形成與如所述的位置關係相對應的配置，則移行台車16的姿勢穩定。The above description of the branch guide rail 40B, the right guide roller 32R, and the right side roller 50R is related to the state in which the left traveling wheel 18L is suspended in the air. However, in the state in which the right traveling wheel 18R is suspended in the air, if the main guide 40M When the left guide roller 32L and the left side roller 50L are arranged corresponding to the positional relationship as described above, the posture of the moving carriage 16 is stabilized.

然而，點P無需與旋轉軸LX、俯視時的移行方向中心線LY、後視時的移行方向中心線LZ1嚴格地一致，只要位於與該些線為某種程度接近的位置，則移行台車16的姿勢充分地穩定。However, the point P does not need to strictly coincide with the rotation axis LX, the moving direction center line LY when viewed from above, and the moving direction center line LZ1 when viewed from behind. As long as it is located at a position close to these lines to some extent, the moving trolley 16 The posture is fully stable.

再者，於本實施形態中，對自直線狀主軌道RM朝前往右方向的分支軌道RB分支的圖1中的分支區劃MB進行了說明，但即便為朝前往左方向的分支軌道RB分支的分支區劃，或為如自直線狀軌道分支為朝右彎曲的曲線與朝左彎曲的曲線此兩岔的分支區劃，只要於分支區劃，將引導輥32L、引導輥32R予以導引的導軌被設置於分別支撐移行車輪18L、移行車輪18R的移行用軌道的上方，而引導輥32L、引導輥32R根據屋頂搬送車10的前進目的地於適當的導軌的外表面被導引即可。Furthermore, in this embodiment, the branch section MB in FIG. 1 branches from the linear main track RM toward the rightward branch track RB. However, even if it branches toward the leftward branch track RB, The branch area may be a bifurcated branch area such as a straight rail that branches into a curve that curves to the right and a curve that bends to the left. In the branch area, guide rails that guide the guide rollers 32L and 32R are provided. It suffices that the guide rollers 32L and 32R are guided on the outer surfaces of appropriate guide rails according to the destination of the roof transport vehicle 10 above the moving rails that respectively support the moving wheels 18L and 18R.

10、80:屋頂搬送車 12、82:物品 14、84:物品保持部 16:移行台車（搬送台車） 18L、18R:移行車輪 20、90:懸吊裝置 22:主軌 24:分支軌 25:框體 30:引導輥裝置 31:引導輥台座 32L、32R、87:引導輥 34:引導輥驅動部 40M:主導軌 40B:分支導軌 50L、50R、89L、89R:側輥 86:移行台車 88:車輪 92、94:移行軌 96:導軌 A-A:箭頭方向 RB:分支軌道 RM:主軌道 LX:移行車輪的旋轉軸（旋轉軸） LY:移行方向中心線 LZ1、LZ2:移行方向中心線 MB:分支區劃 P:點（右側的引導輥與分支導軌外表面的接點）10. 80: Rooftop truck 12. 82: Items 14. 84: Item Storage Department 16: Transfer trolley (transport trolley) 18L, 18R: Transition wheels 20, 90: Suspension device 22: Main track 24: Branch rail 25:Frame 30: Guide roller device 31: Guide roller base 32L, 32R, 87: Guide roller 34: Guide roller drive unit 40M: Main rail 40B: Branch guide rail 50L, 50R, 89L, 89R: Side roller 86:Transfer trolley 88:wheels 92, 94: Transition rail 96: Guide rail A-A: Arrow direction RB: branch track RM: main track LX: The rotation axis (rotation axis) of the moving wheel LY: center line of moving direction LZ1, LZ2: center line of moving direction MB: branch division P: point (the contact point between the right guide roller and the outer surface of the branch guide rail)

圖1是概略地表示本發明的實施形態的一例的屋頂搬送車所移行的一部分搬送路徑的平面圖。 圖2是表示屋頂搬送車的結構的後視圖。 圖3是圖2的A-A箭視圖。 圖4是概略地表示引導輥被朝分支導軌導引的樣態的平面圖。 圖5是表示先前的屋頂搬送車的結構的後視圖。FIG. 1 is a plan view schematically showing a part of the transportation path along which the roof transportation vehicle moves according to the embodiment of the present invention. FIG. 2 is a rear view showing the structure of the roof transport vehicle. FIG. 3 is a view of arrow A-A in FIG. 2 . FIG. 4 is a plan view schematically showing a state in which the guide roller is guided toward the branch guide rail. FIG. 5 is a rear view showing the structure of the conventional roof transport vehicle.

10:屋頂搬送車 10: Rooftop truck

12:物品 12:Items

14:物品保持部 14: Item retention department

16:移行台車(搬送台車) 16: Transfer trolley (transport trolley)

18L、18R:移行車輪 18L, 18R: Transition wheels

20:懸吊裝置 20: Suspension device

22:主軌 22: Main track

24:分支軌 24: Branch rail

25:框體 25:Frame

30:引導輥裝置 30: Guide roller device

31:引導輥台座 31: Guide roller base

32L、32R:引導輥 32L, 32R: Guide roller

34:引導輥驅動部 34: Guide roller drive section

40M:主導軌 40M: Main rail

40B:分支導軌 40B: Branch guide rail

50L、50R:側輥 50L, 50R: side roller

A-A:箭頭方向 A-A: Arrow direction

LZ1、LZ2:移行方向中心線 LZ1, LZ2: center line of moving direction

MB:分支區劃 MB: branch division

P:點(右側的引導輥與分支導軌外表面的接點) P: point (the contact point between the right guide roller and the outer surface of the branch guide rail)

Claims (4)

一種屋頂搬送車，沿著搬送軌道而移行，所述搬送軌道包含多條主軌道及將所述多條主軌道彼此加以連接的分支軌道，且所述屋頂搬送車的特徵在於包括：至少一對左右移行車輪；以及引導輥，於所述移行車輪的上方分別於移行方向的左側與右側至少各設置一個；所述主軌道包括主軌與主導軌，所述主軌於其上表面支撐所述移行車輪，所述主導軌設置於所述主軌中所述移行車輪所通過的區域的上方而將所述引導輥予以導引；所述分支軌道包括分支軌及分支導軌，所述分支軌於其上表面支撐所述移行車輪，所述分支導軌設置於所述分支軌中所述移行車輪所通過的區域的上方而將所述引導輥予以導引；關於所述主導軌及所述分支導軌，在將所述主軌道及所述分支軌道的中心側的側面稱為內表面，將相反側的側面稱為外表面的情形下，所述引導輥於所述主導軌或所述分支導軌的外表面被導引；在所述屋頂搬送車的移行台車的上方安裝有引導輥裝置，所述引導輥裝置具有：引導輥驅動部，使所述引導輥移動，右側與左側的所述引導輥，分別安裝於以所述引導輥驅動部為基部而在水平面內旋轉的臂的前端，所述引導輥驅動部將左側的所述引導輥用的臂的移動與右側 的所述引導輥用的臂的移動進行聯動，使得左側與右側的所述引導輥的僅其中一個由所述主導軌或所述分支導軌的外表面所引導；所述主導軌及所述分支導軌以其外表面在俯視時與所述移行車輪的移行方向中心線一致的方式而設置。 A roof transport vehicle moves along a transport track, the transport track includes a plurality of main rails and branch rails connecting the plurality of main rails to each other, and the roof transport vehicle is characterized by including: at least a pair of Left and right moving wheels; and guide rollers, at least one on the left and right sides of the moving direction above the moving wheels; the main rail includes a main rail and a main rail, and the main rail supports the Moving wheels, the main rail is disposed above the area where the moving wheels pass in the main rail to guide the guide rollers; the branch rails include branch rails and branch guide rails, and the branch rails are located on Its upper surface supports the moving wheel, and the branch guide rail is arranged above the area where the moving wheel passes in the branch rail to guide the guide roller; regarding the main rail and the branch guide rail , when the side on the center side of the main rail and the branch rail is called the inner surface, and the side on the opposite side is called the outer surface, the guide roller is on the main rail or the branch guide rail. The outer surface is guided; a guide roller device is installed above the moving trolley of the roof transport vehicle, and the guide roller device has a guide roller driving part to move the guide roller, and the guide rollers on the right and left sides , respectively installed on the front end of an arm that rotates in a horizontal plane with the guide roller driving unit as a base, and the guide roller driving unit combines the movement of the arm for the guide roller on the left side with the movement of the arm on the right side. The movement of the arm for the guide roller is linked, so that only one of the guide rollers on the left and the right is guided by the outer surface of the main rail or the branch guide rail; the main rail and the branch The guide rail is arranged so that its outer surface is consistent with the center line of the moving wheel in the moving direction when viewed from above. 如請求項1所述的屋頂搬送車，其中所述屋頂搬送車包括於所述移行車輪的下方分別設置於移行方向的左側與右側的側輥，且所述側輥於所述主軌及所述分支軌的內表面被導引。 The roof transfer vehicle according to claim 1, wherein the roof transfer vehicle includes side rollers respectively disposed on the left and right sides of the moving direction below the moving wheels, and the side rollers are on the main rail and the The inner surface of the branch rail is guided. 如請求項2所述的屋頂搬送車，其中所述側輥相對於每一個所述引導輥於移行方向的前後以兩個為一組地設置。 The roof transport vehicle according to claim 2, wherein the side rollers are arranged in groups of two at the front and rear of each of the guide rollers in the moving direction. 如請求項1至3中任一項所述的屋頂搬送車，其中所述引導輥以在藉由所述主導軌或所述分支導軌導引時，與所述主導軌或所述分支導軌的接點在俯視時位於所述移行車輪的旋轉軸上的方式而設置。 The roof transport vehicle according to any one of claims 1 to 3, wherein the guide roller is in contact with the main rail or the branch guide rail when being guided by the main rail or the branch guide rail. The contact point is positioned on the rotation axis of the moving wheel when viewed from above.
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