TWI804074B - Isolation membrane member and gas capture device having the isolation membrane member - Google Patents

Isolation membrane member and gas capture device having the isolation membrane member Download PDF

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TWI804074B
TWI804074B TW110144388A TW110144388A TWI804074B TW I804074 B TWI804074 B TW I804074B TW 110144388 A TW110144388 A TW 110144388A TW 110144388 A TW110144388 A TW 110144388A TW I804074 B TWI804074 B TW I804074B
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gas
delivery pipeline
present
isolation membrane
chamber
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TW110144388A
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TW202320905A (en
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江德明
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樂盟科技有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/54—Particle separators, e.g. dust precipitators, using ultra-fine filter sheets or diaphragms
    • B01D46/543—Particle separators, e.g. dust precipitators, using ultra-fine filter sheets or diaphragms using membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/50—Inorganic acids

Abstract

一種隔離膜構件及具有隔離膜構件的氣體捕捉裝置，隔離膜構件包含：至少一半透膜層、一硝酸溶液層及一固定部，半透膜層允許氣體通過，硝酸溶液層披覆於半透膜層，固定部設置於半透膜層的外圍。本發明還提供一種氣體捕捉裝置，具有一第一瓶體、連接管路及前述的隔離膜構件。本發明的隔離膜構件及具有隔離膜構件的氣體捕捉裝置可防止金屬與大顆的氣膠逃逸，使氣體通過變困難，因而促進氣體捕捉的反應速率。 An isolation membrane component and a gas capture device with the isolation membrane component, the isolation membrane component includes: at least a semi-permeable membrane layer, a nitric acid solution layer and a fixing part, the semi-permeable membrane layer allows gas to pass through, and the nitric acid solution layer covers the semi-permeable For the membrane layer, the fixing part is arranged on the periphery of the semi-permeable membrane layer. The present invention also provides a gas capture device, which has a first bottle body, a connecting pipeline and the aforementioned isolation membrane member. The isolation membrane component and the gas capture device with the isolation membrane component of the present invention can prevent metal and large particles of aerosol from escaping, making it difficult for gas to pass through, thereby promoting the reaction rate of gas capture.

Description

隔離膜構件及具有隔離膜構件的氣體捕捉裝置 Isolation membrane member and gas capture device having the isolation membrane member

本發明係關於一種隔離膜構件及具有隔離膜構件的氣體捕捉裝置，更特別的是關於一種高效且精準的隔離膜構件及具有隔離膜構件的氣體捕捉裝置。 The present invention relates to an isolation membrane component and a gas capture device with the isolation membrane component, more particularly to an efficient and precise isolation membrane component and a gas capture device with the isolation membrane component.

工業用的氣體無論是反應前或反應後，皆需要進行成份測量，特別是確認氣體中是否夾帶對環境會產生污染的重金屬或不溶解的奈米顆粒。因此需要取一段氣體作為樣品以捕捉其所含的重金屬或奈米顆粒，再利用感應耦合電漿質譜儀(Inductively Coupled Plasma Mass Spectrometry，ICP-MS)等儀器測定所捕捉到的物質的成分。 Whether the gas used in industry is before or after the reaction, it is necessary to measure the composition, especially to confirm whether the gas is entrained with heavy metals or insoluble nanoparticles that will pollute the environment. Therefore, it is necessary to take a section of gas as a sample to capture the heavy metals or nanoparticles contained in it, and then use an inductively coupled plasma mass spectrometer (Inductively Coupled Plasma Mass Spectrometry, ICP-MS) and other instruments to determine the composition of the captured substances.

然而，樣品氣體中含有未知成分，與捕捉用溶液(例如氫氟酸溶液)可能產生劇烈反應，以至測定實驗並不安全。若為了安全考量改以減壓的方式混合樣品氣體與捕捉用溶液，則可能混合不充分，待捕捉成分未與捕捉用溶液產生反應即逃逸，則導致分析不準確。 However, the sample gas contains unknown components, which may react violently with the capture solution (such as hydrofluoric acid solution), so that the measurement experiment is not safe. If the sample gas and the capture solution are mixed under reduced pressure for safety reasons, the mixing may not be sufficient, and the components to be captured escape without reacting with the capture solution, resulting in inaccurate analysis.

因此，為解決習知的氣體捕捉裝置的種種問題，本發明提出一種高效且精準的隔離膜構件及具有隔離膜構件的氣體捕捉裝置。 Therefore, in order to solve various problems of the conventional gas capture device, the present invention proposes an efficient and precise isolation membrane component and a gas capture device with the isolation membrane component.

為達上述目的及其他目的，本發明提出一種隔離膜構件，其包含：至少一半透膜層，該半透膜層允許氣體通過；一硝酸溶液層，披覆於該半透膜層；以及一固定部，設置於該半透膜層的外圍。 In order to achieve the above purpose and other purposes, the present invention proposes an isolation membrane member, which includes: at least a semipermeable membrane layer, which allows gas to pass through; a nitric acid solution layer, coated on the semipermeable membrane layer; and a The fixing part is arranged on the periphery of the semi-permeable membrane layer.

於本發明之一實施例中，該硝酸溶液層為王水。 In one embodiment of the present invention, the nitric acid solution layer is aqua regia.

於本發明之一實施例中，該半透膜層為PFA半透膜。 In one embodiment of the present invention, the semipermeable membrane layer is a PFA semipermeable membrane.

於本發明之一實施例中，該半透膜層的數量為二，該硝酸溶液層設置於該二半透膜層之間。 In one embodiment of the present invention, the number of the semipermeable membrane layers is two, and the nitric acid solution layer is arranged between the two semipermeable membrane layers.

本發明又提出一種氣體捕捉裝置，其包括：一第一瓶體，具有一第一容室及連通該第一容室的一第一進氣口及一第一出氣口；一連接管路，一端連通該第一出氣口；以及如前所述之隔離膜構件，該固定部連接於該第一瓶體的內壁。 The present invention also proposes a gas capture device, which includes: a first bottle body with a first chamber and a first air inlet and a first gas outlet connected to the first chamber; a connecting pipeline, one end It communicates with the first air outlet; and the isolation membrane member as mentioned above, the fixing part is connected to the inner wall of the first bottle body.

於本發明之一實施例中，該固定部具有一穿孔，該第一瓶體的一進氣管路貫穿該穿孔。 In an embodiment of the present invention, the fixing part has a through hole, and an air inlet pipeline of the first bottle passes through the through hole.

於本發明之一實施例中，更包括一氣體稀釋器，設置於該第一進氣口，該氣體稀釋器包括一樣品氣體輸送管路及一保護氣體輸送管路，該保護氣體輸送管路的末端位於該第一容室中，該樣品氣體輸送管路的末端位於該保護氣體輸送管路中。 In one embodiment of the present invention, it further includes a gas diluter disposed at the first air inlet, the gas diluter includes a sample gas delivery pipeline and a protective gas delivery pipeline, the protective gas delivery pipeline The end of the sample gas delivery line is located in the first chamber, and the end of the sample gas delivery line is located in the shielding gas delivery line.

藉此，本發明的隔離膜構件僅允許氣體通過，防止金屬與大顆的氣膠逸出，硝酸溶液層還可進一步捕捉易揮發的元素，故可有效而精準地執行氣體捕捉，提高氣體捕捉的反應速率。 In this way, the isolation membrane member of the present invention only allows gas to pass through, preventing metal and large aerogels from escaping, and the nitric acid solution layer can further capture volatile elements, so it can effectively and accurately perform gas capture and improve gas capture the reaction rate.

100:氣體捕捉裝置 100: gas capture device

1:第一瓶體 1: The first bottle

11:第一容室 11: The first chamber

12:第一進氣口 12: The first air inlet

13:第一出氣口 13: The first air outlet

2:第二瓶體 2: The second bottle

21:第二容室 21: The second chamber

22:第二進氣口 22: Second air inlet

23:第二出氣口 23: Second air outlet

3:連接管路 3: Connect the pipeline

4:氣體稀釋器 4: Gas diluter

41:保護氣體輸送管路 41: Protective gas delivery pipeline

411:保護氣體輸送管路的末端 411: The end of the shielding gas delivery line

411a:保護氣體輸送管路的末端 411a: The end of the shielding gas delivery line

41a:保護氣體輸送管路 41a: Shielding gas delivery pipeline

42:樣品氣體輸送管路 42: Sample gas delivery pipeline

421:樣品氣體輸送管路的末端 421: End of sample gas delivery line

421a:勻氣室 421a: Uniform gas chamber

42a:樣品氣體輸送管路 42a: Sample gas delivery line

4a:氣體稀釋器 4a: Gas Diluter

5:隔離膜構件 5: Isolation membrane member

51:半透膜層 51: Semi-permeable membrane layer

52:硝酸溶液層 52: nitric acid solution layer

53:半透膜層 53: semi-permeable membrane layer

54:固定部 54: fixed part

541:穿孔 541: perforation

61:外管 61: outer tube

62:恆溫構件 62: Constant temperature component

63:保溫管 63: Insulation pipe

64:清潔氣體輸送管路 64: Cleaning the gas delivery pipeline

7:取樣構件 7: Sampling components

71:控制單元 71: Control unit

72:控制閥 72: Control valve

721:上游控制閥 721: Upstream control valve

722:下游控制閥 722: downstream control valve

73:U形管 73: U-shaped tube

74:測重單元 74: weighing unit

75:溫度控制單元 75:Temperature control unit

76:液面高度偵測單元 76: Liquid level detection unit

8:勻氣構件 8: Evening components

a:距離 a: distance

b:距離 b: distance

圖1係為根據本發明實施例之氣體捕捉裝置之示意圖。 FIG. 1 is a schematic diagram of a gas capture device according to an embodiment of the present invention.

圖2A係為根據本發明實施例之隔離膜構件之立體示意圖。 FIG. 2A is a schematic perspective view of an isolation membrane member according to an embodiment of the present invention.

圖2B係為根據本發明實施例之隔離膜構件之組裝示意圖。 FIG. 2B is a schematic diagram of the assembly of the isolation membrane member according to the embodiment of the present invention.

圖3係為根據本發明另一實施例之氣體稀釋器之示意圖。 Fig. 3 is a schematic diagram of a gas diluter according to another embodiment of the present invention.

為充分瞭解本發明，茲藉由下述具體之實施例，並配合所附之圖式，對本發明做一詳細說明。本領域技術人員可由本說明書所公開的內容瞭解本發明的目的、特徵及功效。須注意的是，本發明可透過其他不同的具體實施例加以施行或應用，本說明書中的各項細節亦可基於不同觀點與應用，在不悖離本發明的精神下進行各種修飾與變更。以下的實施方式將進一步詳細說明本發明的相關技術內容，但所公開的內容並非用以限制本發明的申請專利範圍。說明如後：如圖1所示，本發明實施例之氣體捕捉裝置100，其包含：一第一瓶體1、一連接管路3及一氣體稀釋器4。 In order to fully understand the present invention, the present invention will be described in detail by the following specific embodiments and accompanying drawings. Those skilled in the art can understand the purpose, features and effects of the present invention from the content disclosed in this specification. It should be noted that the present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the patent scope of the present invention. The description is as follows: as shown in FIG. 1 , the gas capture device 100 of the embodiment of the present invention includes: a first bottle body 1 , a connecting pipeline 3 and a gas diluter 4 .

第一瓶體1具有一第一容室11及連通第一容室11的一第一進氣口12及一第一出氣口13。第一瓶體1較佳為氣密瓶，例如是台灣專利號I586588的自我壓力密封蓋與瓶身之結合。這樣的氣密瓶可以防止氣體不預期地外洩，且結構輕巧、組裝方便。 The first bottle body 1 has a first chamber 11 and a first air inlet 12 and a first air outlet 13 communicating with the first chamber 11 . The first bottle body 1 is preferably an airtight bottle, such as the combination of the self-pressure sealing cap and the bottle body of Taiwan Patent No. I586588. Such an airtight bottle can prevent unexpected leakage of gas, and has a lightweight structure and convenient assembly.

氣體捕捉裝置100還可以選擇性地包括一第二瓶體2。相似地，第二瓶體2具有一第二容室21及連通第二容室21的一第二進氣口22及一第二出 氣口23。第二瓶體2亦較佳為氣密瓶，例如是台灣專利號I586588的自我壓力密封蓋與瓶身之結合。這樣的氣密瓶可以防止氣體不預期地外洩，且結構輕巧、組裝方便。在本實施例中，第二瓶體2用於容置來自第一瓶體1的氣體，故在其他實施例中第二瓶體2為非必要，第二出氣口23也為非必要。在其他實施例中，第二瓶體2可不具有第二出氣口23，而僅具有第二進氣口22。 The gas capture device 100 may also optionally include a second bottle body 2 . Similarly, the second bottle body 2 has a second chamber 21 and a second air inlet 22 and a second outlet connected to the second chamber 21. Air port 23. The second bottle body 2 is also preferably an airtight bottle, such as the combination of the self-pressure sealing cap and the bottle body of Taiwan Patent No. I586588. Such an airtight bottle can prevent unexpected leakage of gas, and has a lightweight structure and convenient assembly. In this embodiment, the second bottle body 2 is used to accommodate the gas from the first bottle body 1 , so in other embodiments, the second bottle body 2 is unnecessary, and the second gas outlet 23 is also unnecessary. In other embodiments, the second bottle body 2 may not have the second air outlet 23 , but only have the second air inlet 22 .

連接管路3一端連通第一出氣口13，另一端連通第二瓶體2的第二進氣口22，以使氣體由第一出氣口13進入到第二容室21。 One end of the connecting pipeline 3 communicates with the first gas outlet 13 , and the other end communicates with the second air inlet 22 of the second bottle body 2 , so that gas enters the second chamber 21 from the first gas outlet 13 .

氣體稀釋器4設置於第一進氣口12。氣體稀釋器4包括一樣品氣體輸送管路42及一保護氣體輸送管路41，保護氣體輸送管路41的末端411位於第一容室11中，樣品氣體輸送管路42的末端421位於保護氣體輸送管路41中，使樣品氣體輸送管路42所輸送的樣品氣體被保護氣體輸送管路41所輸送的保護氣體包覆並稀釋。 The gas diluter 4 is disposed at the first air inlet 12 . The gas diluter 4 includes a sample gas delivery pipeline 42 and a shielding gas delivery pipeline 41. The end 411 of the shielding gas delivery pipeline 41 is located in the first chamber 11, and the end 421 of the sample gas delivery pipeline 42 is located in the shielding gas delivery pipeline 41. In the delivery pipeline 41 , the sample gas delivered by the sample gas delivery pipeline 42 is covered and diluted by the protective gas delivered by the protective gas delivery pipeline 41 .

在本實施例中，保護氣體輸送管路41所輸送的保護氣體為氬氣，然而本發明不限於此，保護氣體可以為其他惰性氣體或氮氣等化性不活潑之氣體，或上述氣體之組合。 In this embodiment, the shielding gas transported by the shielding gas delivery pipeline 41 is argon, but the present invention is not limited thereto, and the shielding gas can be other inert gases or chemically inert gases such as nitrogen, or a combination of the above gases .

接下來說明本發明的氣體捕捉裝置100如何執行氣體捕捉。 Next, how the gas capture device 100 of the present invention performs gas capture will be described.

第一瓶體1的第一容室11裝有捕捉用溶液，在本實施例中為氫氟酸溶液，實際上捕捉用溶液的成分可以視捕捉需要而改變。 The first chamber 11 of the first bottle body 1 is filled with a capture solution, which in this embodiment is a hydrofluoric acid solution, but actually the composition of the capture solution can be changed according to the capture requirements.

待捕捉的樣品氣體(以代矽烷樣品為主，為含重金屬的半導體工業用之特殊氣體，然而不限於此)由樣品氣體輸送管路42輸送，同時保護氣體輸送管路41也輸送保護氣體。 The sample gas to be captured (mainly the silane sample, which is a special gas used in the semiconductor industry containing heavy metals, but not limited to this) is delivered by the sample gas delivery pipeline 42, and the protective gas delivery pipeline 41 also delivers the protective gas.

如圖1所示，樣品氣體輸送管路42的末端421位於保護氣體輸送管路41中，保護氣體輸送管路41的末端411位於第一容室11中且位於捕捉用溶液的水平面下，因此樣品氣體離開樣品氣體輸送管路42的末端421後先被保護氣體所包覆、稀釋，才進入氫氟酸溶液並反應生成反應混合物。樣品氣體中無法與氫氟酸溶液進行反應的成分才離開液面，由第一出氣口13排出並進入第二瓶體2的第二容室21。 As shown in Figure 1, the end 421 of the sample gas delivery pipeline 42 is located in the shielding gas delivery pipeline 41, and the end 411 of the shielding gas delivery pipeline 41 is located in the first chamber 11 and below the level of the capture solution, so After the sample gas leaves the end 421 of the sample gas delivery pipeline 42, it is covered and diluted by the protective gas, and then enters the hydrofluoric acid solution and reacts to form a reaction mixture. The components in the sample gas that cannot react with the hydrofluoric acid solution leave the liquid surface, are discharged from the first gas outlet 13 and enter the second chamber 21 of the second bottle body 2 .

得到的反應混合物的液體是高基質的溶液，可進一步在受控溫度和壓力條件下減壓蒸發，待至接近乾燥的狀態，所剩餘之物可利用ICP-MS分析其成分。 The liquid of the obtained reaction mixture is a high-matrix solution, which can be further evaporated under reduced pressure under controlled temperature and pressure conditions until it is nearly dry, and the remaining substance can be analyzed for its composition by ICP-MS.

綜上所述，本發明的氣體捕捉裝置100利用保護氣體先行包覆、稀釋樣品氣體，才輸送至捕捉用溶液進行反應，使欲捕捉的重金屬或不溶解的奈米顆粒滯留於捕捉用溶液中。本發明的氣體捕捉裝置100相對先前技術更為安全，且瓶體內為對外氣密且高壓，在保障安全的同時更一併確保效率與準確度。 To sum up, the gas capture device 100 of the present invention uses the protective gas to cover and dilute the sample gas first, and then transport it to the capture solution for reaction, so that the heavy metals or insoluble nanoparticles to be captured stay in the capture solution . Compared with the prior art, the gas capture device 100 of the present invention is safer, and the inside of the bottle is airtight and high-pressure, which not only ensures safety but also ensures efficiency and accuracy.

進一步地，在本發明實施例中，如圖1所示，樣品氣體輸送管路42套於保護氣體輸送管路41中，保護氣體輸送管路41的末端411至第一瓶體1的瓶底的距離為a，樣品氣體輸送管路42的末端421至第一瓶體1的瓶底的距離為b，又a大於零且b>a。如此可使樣品氣體離開樣品氣體輸送管路42時被保護氣體所包覆，且樣品氣體必定先被保護氣體包覆、稀釋才接觸捕捉用溶液。在本發明實施例中，a為1.5公分，b為4公分，然而本發明不限於此，可根據元件的尺寸及配置而相應地調整改變。 Further, in the embodiment of the present invention, as shown in FIG. 1 , the sample gas delivery pipeline 42 is sleeved in the protective gas delivery pipeline 41, and the end 411 of the protective gas delivery pipeline 41 reaches the bottom of the first bottle body 1 The distance is a, the distance from the end 421 of the sample gas delivery pipeline 42 to the bottom of the first bottle body 1 is b, and a is greater than zero and b>a. In this way, the sample gas is covered by the protective gas when it leaves the sample gas delivery pipeline 42 , and the sample gas must be covered and diluted by the protective gas before contacting the capture solution. In the embodiment of the present invention, a is 1.5 cm, and b is 4 cm. However, the present invention is not limited thereto, and can be adjusted accordingly according to the size and configuration of the components.

進一步地，在本發明實施例中，連接管路3、樣品氣體輸送管路42及保護氣體輸送管路41較佳為鐵氟龍製的硬管，每個管路皆為雙層管，同時兼具化性低與高機械強度的特性，並可防止氣體外洩。 Further, in the embodiment of the present invention, the connecting pipeline 3, the sample gas delivery pipeline 42 and the shielding gas delivery pipeline 41 are preferably hard tubes made of Teflon, and each pipeline is a double-layer tube. It has the characteristics of low chemical resistance and high mechanical strength, and can prevent gas leakage.

進一步地，在本發明實施例中，第一瓶體1的體積小於第二瓶體2的體積，較佳為第二瓶體2的體積是第一瓶體1的兩倍以上，以使第一瓶體1的壓力增加時，第二瓶體2仍較能維持常態的壓力，使氣體從第一瓶體1自然流向第二瓶體2。 Further, in the embodiment of the present invention, the volume of the first bottle body 1 is smaller than the volume of the second bottle body 2, preferably the volume of the second bottle body 2 is more than twice that of the first bottle body 1, so that the volume of the second bottle body 2 When the pressure of the first bottle body 1 increases, the second bottle body 2 can still relatively maintain the normal pressure, so that the gas flows naturally from the first bottle body 1 to the second bottle body 2 .

進一步地，在本發明實施例中，第一出氣口13的口徑小於第一進氣口12的口徑。其目的是為了使第一容室11的壓力增加，氣體容易進第一容室11但相對難離開第一容室11。讓氣體與液體多次碰撞才能自第一出氣口13逸出，以提高樣品氣體與捕捉用溶液的反應效率。第一進氣口12所插設之管(圖1中為氣體稀釋器4)的管徑例如為1/8”，則第一出氣口13所插設之管的管徑例如為1/16”。 Further, in the embodiment of the present invention, the diameter of the first air outlet 13 is smaller than the diameter of the first air inlet 12 . The purpose is to increase the pressure of the first chamber 11 , so that the gas can easily enter the first chamber 11 but is relatively difficult to leave the first chamber 11 . Gas and liquid can escape from the first gas outlet 13 only after multiple collisions, so as to improve the reaction efficiency between the sample gas and the capture solution. The pipe diameter of the pipe inserted into the first air inlet 12 (gas diluter 4 in Fig. 1) is, for example, 1/8", and the pipe diameter of the pipe inserted into the first gas outlet 13 is, for example, 1/16 ".

如圖1至圖2B所示，本發明還提出一種隔離膜構件5，設置於第一容室11中。隔離膜構件5包括至少一半透膜層51及一硝酸溶液層52，硝酸溶液層52披覆於半透膜層51。半透膜層51僅允許氣體通過，金屬與大顆的氣膠不會逸出，硝酸溶液層52還可進一步捕捉易揮發的元素，例如汞、鉛及硼等。半透膜層51較佳為四氟乙烯一全氟烷氧基乙烯基醚共聚物(Polyfluoroalkoxy，PFA)半透膜，然而本發明不限於此，亦可以為其他種類的半透膜。硝酸溶液層52為含硝酸之溶液，也可以加入其他種類溶液而形成硝酸基底的混合物，例如王水。 As shown in FIG. 1 to FIG. 2B , the present invention also proposes an isolation membrane member 5 disposed in the first chamber 11 . The isolation membrane member 5 includes at least a semipermeable membrane layer 51 and a nitric acid solution layer 52 , and the nitric acid solution layer 52 is coated on the semipermeable membrane layer 51 . The semi-permeable membrane layer 51 only allows gas to pass through, and metals and large aerosols cannot escape. The nitric acid solution layer 52 can further capture volatile elements such as mercury, lead, and boron. The semipermeable membrane layer 51 is preferably a tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer (Polyfluoroalkoxy, PFA) semipermeable membrane, but the present invention is not limited thereto, and can also be other types of semipermeable membranes. The nitric acid solution layer 52 is a solution containing nitric acid, and other types of solutions can also be added to form a nitric acid-based mixture, such as aqua regia.

本發明提出的隔離膜構件5並不僅限用於氣體捕捉裝置100，也可應用在其他需要防止氣體逃逸的裝置。換句話說，隔離膜構件5可自成一體單獨使用。 The isolation membrane member 5 proposed by the present invention is not limited to be used in the gas capture device 100 , and can also be applied to other devices that need to prevent gas from escaping. In other words, the separation film member 5 can be used alone as a whole.

進一步地，在本發明實施例中，隔離膜構件5還可進一步包括二半透膜層51、53及一硝酸溶液層52，硝酸溶液層52設置於二半透膜層51、53之間而上下皆被半透膜層所包覆。二半透膜層51、53與硝酸溶液層52的構造可更防止金屬與大顆的氣膠逃逸，使氣體通過變困難，因而導致第一容室11壓力變大而促進捕捉反應的速率。硝酸溶液層52被夾於二半透膜層51、53之間也可提高操作的安全性。 Further, in the embodiment of the present invention, the isolation membrane member 5 can further include two semipermeable membrane layers 51, 53 and a nitric acid solution layer 52, and the nitric acid solution layer 52 is arranged between the two semipermeable membrane layers 51, 53 and The top and bottom are covered by a semi-permeable membrane layer. The structure of the two semipermeable membrane layers 51, 53 and the nitric acid solution layer 52 can prevent metal and large particles of aerosol from escaping, making it difficult for the gas to pass through, thus increasing the pressure of the first chamber 11 and accelerating the capture reaction rate. The nitric acid solution layer 52 is sandwiched between the two semipermeable membrane layers 51, 53, which can also improve the safety of operation.

進一步地，在本發明實施例中，如圖2A及圖2B所示，隔離膜構件5還包括至少一固定部54，固定部54連接於第一瓶體1的內壁。固定部54的數量可為至少一(環繞半透膜層51)或為二(設置於半透膜層51的兩側)，或數量為更多，固定部54的數量與形態可視第一瓶體1做調整。 Further, in the embodiment of the present invention, as shown in FIG. 2A and FIG. 2B , the isolation membrane member 5 further includes at least one fixing portion 54 , and the fixing portion 54 is connected to the inner wall of the first bottle body 1 . The quantity of fixed part 54 can be at least one (around semi-permeable membrane layer 51) or be two (both sides that are arranged on semi-permeable membrane layer 51), or quantity is more, and the quantity and form of fixed part 54 can be seen the first bottle Body 1 is adjusted.

固定部54還具有一穿孔541，保護氣體輸送管路41貫穿穿孔541而延伸至液面下。 The fixing portion 54 also has a perforation 541 , through which the shielding gas delivery pipeline 41 extends below the liquid surface.

如圖3所示，本發明還提出另一種氣體稀釋器4a，其形態異於圖1所示的氣體稀釋器4，可直接替換圖1的氣體稀釋器4。 As shown in FIG. 3 , the present invention also proposes another gas diluter 4 a , which is different in form from the gas diluter 4 shown in FIG. 1 , and can directly replace the gas diluter 4 in FIG. 1 .

氣體稀釋器4a包含一保護氣體輸送管路41a、一樣品氣體輸送管路42a及一勻氣構件8。 The gas diluter 4 a includes a shielding gas delivery pipeline 41 a , a sample gas delivery pipeline 42 a and a gas uniform component 8 .

樣品氣體輸送管路42a的一段為勻氣室421a，勻氣室421a的下游連通一氣體捕捉瓶(即圖1的第一瓶體1)的第一進氣口12。 A section of the sample gas delivery pipeline 42a is a uniform gas chamber 421a, and the downstream of the uniform gas chamber 421a is connected to the first gas inlet 12 of a gas capture bottle (ie, the first bottle body 1 in FIG. 1 ).

保護氣體輸送管路41a為沿一方向(如圖箭頭所示)輸送保護氣體的管路，保護氣體輸送管路41a的末端411a連通於勻氣室421a，也就是說，樣品氣體輸送管路42a所輸送的樣品氣體在勻氣室421a中與保護氣體輸送管路41a輸送的保護氣體相混合。 The shielding gas delivery pipeline 41a is a pipeline for delivering shielding gas in one direction (as shown by the arrow), and the end 411a of the shielding gas delivery pipeline 41a communicates with the uniform gas chamber 421a, that is, the sample gas delivery pipeline 42a The delivered sample gas is mixed with the protective gas delivered by the protective gas delivery pipeline 41a in the uniform gas chamber 421a.

勻氣構件8設置於勻氣室421a中，勻氣構件8可為具有葉片的風扇，可為有動力地主動旋轉加速樣品氣體與保護氣體的混合，也可以是無動力式的，利用保護氣體輸送管路41a穩定地輸送保護氣體作為動力而旋轉。然而本發明不限於此，勻氣構件8可以為其他適於幫助樣品氣體與保護氣體混合的構件。 The gas uniform component 8 is arranged in the gas uniform chamber 421a. The gas homogeneous component 8 can be a fan with blades, which can actively rotate and accelerate the mixing of the sample gas and the protective gas with power, or it can be unpowered, using the protective gas The transport pipeline 41a stably transports shielding gas to rotate as power. However, the present invention is not limited thereto, and the homogenizing member 8 may be other members suitable for helping the mixing of the sample gas and the shielding gas.

藉由本發明的氣體稀釋器4a，利用充分混合的保護氣體先行包覆、稀釋樣品氣體，才輸送至捕捉用溶液進行反應，使欲捕捉的重金屬或不溶解的奈米顆粒滯留於捕捉用溶液中。相對先前技術，利用本發明的氣體稀釋器4a更為安全，在保障安全的同時一並確保效率與準確度。 With the gas diluter 4a of the present invention, the well-mixed protective gas is used to cover and dilute the sample gas before being transported to the capture solution for reaction, so that the heavy metals or insoluble nanoparticles to be captured are retained in the capture solution . Compared with the prior art, the use of the gas diluter 4a of the present invention is safer, ensuring efficiency and accuracy while ensuring safety.

進一步地，在本發明實施例中，勻氣室421a的截面積大於樣品氣體輸送管路42a的其他段，使得勻氣室421a有足夠的空間與時間讓樣品氣體與保護氣體混合、稀釋。 Further, in the embodiment of the present invention, the cross-sectional area of the homogenization chamber 421a is larger than that of other sections of the sample gas delivery pipeline 42a, so that the homogenization chamber 421a has enough space and time for mixing and diluting the sample gas and the shielding gas.

進一步地，在本發明實施例中，保護氣體輸送管路41a的截面積大於樣品氣體輸送管路42a進入勻氣室421a之前的段的截面積，使樣品氣體可以以高壓、少量的方式進入勻氣室421a中，而確實地被保護氣體混合、包覆。較小的截面積也有利於精準控制樣品氣體進入勻氣室421a的總量。 Further, in the embodiment of the present invention, the cross-sectional area of the shielding gas delivery pipeline 41a is larger than that of the section before the sample gas delivery pipeline 42a enters the homogenization chamber 421a, so that the sample gas can enter the homogenization chamber 421a at high pressure and in a small amount. In the gas chamber 421a, it is definitely mixed and covered by the protective gas. The smaller cross-sectional area is also beneficial to accurately control the total amount of sample gas entering the uniform gas chamber 421a.

進一步地，在本發明實施例中，氣體稀釋器4a更包括一外管61及一恆溫構件62，外管61包覆勻氣室421a，恆溫構件62位於外管61及勻氣室 421a之間。恆溫構件62用以對勻氣室421a加熱，以增加氣體分子的運動速率及擴散效率。在本實施例中，如圖3所示，恆溫構件62為環形電熱件，然而本發明不限於此，在其他實施例中，恆溫構件62為填充於外管61及勻氣室421a之間的熱液層。熱液層(例如是熱水)經加熱後流入外管61中，以保持勻氣室421a內恆定的溫度。 Further, in the embodiment of the present invention, the gas diluter 4a further includes an outer tube 61 and a constant temperature component 62, the outer tube 61 covers the uniform gas chamber 421a, and the constant temperature component 62 is located at the outer tube 61 and the uniform gas chamber Between 421a. The constant temperature component 62 is used to heat the uniform gas chamber 421a to increase the movement speed and diffusion efficiency of gas molecules. In this embodiment, as shown in FIG. 3 , the constant temperature component 62 is an annular heating element, but the present invention is not limited thereto. hydrothermal layer. The hot liquid layer (such as hot water) flows into the outer tube 61 after being heated, so as to maintain a constant temperature in the uniform gas chamber 421a.

進一步地，在本發明實施例中，氣體稀釋器4a更包括一保溫管63，保溫管63包覆外管61。保護氣體輸送管路41a及樣品氣體輸送管路42a較佳為鐵氟龍製的硬管，每個管路皆為雙層管，兼具化性低與高機械強度的特性，並可防止氣體外洩。外管61亦為鐵氟龍管，保溫管63則為聚丙烯管，用以保溫隔熱。然而本發明不限於此，在其他實施例中，保溫管63可為其他隔熱材質所製成。 Further, in the embodiment of the present invention, the gas diluter 4 a further includes an insulation tube 63 , and the insulation tube 63 covers the outer tube 61 . The protective gas delivery pipeline 41a and the sample gas delivery pipeline 42a are preferably hard tubes made of Teflon, and each pipeline is a double-layer tube, which has the characteristics of low chemical resistance and high mechanical strength, and can prevent gas Leaked. The outer tube 61 is also a Teflon tube, and the insulation tube 63 is a polypropylene tube for thermal insulation. However, the present invention is not limited thereto. In other embodiments, the insulation pipe 63 can be made of other heat insulating materials.

進一步地，在本發明實施例中，氣體稀釋器4a更包括一取樣構件7。取樣構件7包括一控制單元71、一對控制閥72及一連通樣品氣體輸送管路42a的U形管73。 Further, in the embodiment of the present invention, the gas diluter 4 a further includes a sampling component 7 . The sampling component 7 includes a control unit 71 , a pair of control valves 72 and a U-shaped tube 73 communicating with the sample gas delivery pipeline 42 a.

控制閥72包括上游控制閥721及下游控制閥722，分別設置於U形管73的上下游兩端。U形管73的上游連通樣品氣體源，U形管73的下游連通樣品氣體輸送管路42a。上游控制閥721及下游控制閥722用以控制樣品氣體的輸入。 The control valve 72 includes an upstream control valve 721 and a downstream control valve 722 , which are respectively arranged at the upstream and downstream ends of the U-shaped pipe 73 . The upstream of the U-shaped tube 73 communicates with the sample gas source, and the downstream of the U-shaped tube 73 communicates with the sample gas delivery pipeline 42a. The upstream control valve 721 and the downstream control valve 722 are used to control the input of sample gas.

控制單元71分別訊號連接上游控制閥721及下游控制閥722。控制單元71可控制上游控制閥721及下游控制閥722的開啟、關閉，而決定是否輸送樣品氣體至勻氣室421a、以及輸送多少量。控制單元71例如是控制晶片或控制電路。 The control unit 71 is respectively signally connected to the upstream control valve 721 and the downstream control valve 722 . The control unit 71 can control the opening and closing of the upstream control valve 721 and the downstream control valve 722 to determine whether to send the sample gas to the gas homogenization chamber 421 a and how much to send. The control unit 71 is, for example, a control chip or a control circuit.

進一步地，在本發明實施例中，取樣構件7更包括一液面高度偵測單元76及一溫度控制單元75。液面高度偵測單元76及溫度控制單元75分別訊號連接控制單元71，U形管73的底部設置於溫度控制單元75中。溫度控制單元75提供冷浴，以乾冰或其他冷液冷浴U形管73的底部。控制單元71控制上游控制閥721開啟，使樣品氣體輸入至U形管73，樣品氣體在U形管73的底部被冷凝成液體。液面高度偵測單元76偵測液態狀的樣品氣體在U形管73中的高度，並至達到一預設的高度後，控制單元71控制上游控制閥721關閉，並接著控制下游控制閥722開啟、溫度控制單元75升溫使液態狀的樣品氣體全部蒸發回氣態，而輸送至樣品氣體輸送管路42a及勻氣室421a。藉此，可精準地控制樣品氣體進入樣品氣體輸送管路42a的總量。液面高度偵測單元76可以例如是應用光學原理的偵測單元，偵測預設的高度的光學折射/反射變化；也可以是應用浮力原理的偵測單元，當液面升高至預設的高度後使浮球觸發/被觸發，且本發明不限於此，任何一般技術手段的液面高度偵測單元76都可應用於本發明的氣體稀釋器4a。 Further, in the embodiment of the present invention, the sampling component 7 further includes a liquid level detection unit 76 and a temperature control unit 75 . The liquid level detection unit 76 and the temperature control unit 75 are signally connected to the control unit 71 respectively, and the bottom of the U-shaped tube 73 is arranged in the temperature control unit 75 . The temperature control unit 75 provides a cooling bath, and the bottom of the U-shaped tube 73 is cooled with dry ice or other cold liquid. The control unit 71 controls the upstream control valve 721 to open, so that the sample gas is input into the U-shaped tube 73 , and the sample gas is condensed into liquid at the bottom of the U-shaped tube 73 . The liquid level detection unit 76 detects the height of the liquid sample gas in the U-shaped pipe 73, and when it reaches a preset height, the control unit 71 controls the upstream control valve 721 to close, and then controls the downstream control valve 722 When it is turned on, the temperature control unit 75 heats up so that all the sample gas in the liquid state is evaporated back to the gaseous state, and then sent to the sample gas delivery pipeline 42a and the uniform gas chamber 421a. In this way, the total amount of sample gas entering the sample gas delivery pipeline 42a can be precisely controlled. The liquid level detection unit 76 can be, for example, a detection unit that uses optical principles to detect optical refraction/reflection changes at a preset height; it can also be a detection unit that uses the principle of buoyancy. After the height of the floating ball is triggered/triggered, and the present invention is not limited thereto, any liquid level detection unit 76 of general technical means can be applied to the gas diluter 4a of the present invention.

進一步地，在本發明另一實施例中，取樣構件7更包括一測重單元74。測重單元74訊號連接控制單元71。與前一個實施例的差別在於，不以U形管73的液面高度計算樣品氣體的總量，而改以重量變化精準計算樣品氣體的輸出量。 Furthermore, in another embodiment of the present invention, the sampling member 7 further includes a weighing unit 74 . The weighing unit 74 is connected to the control unit 71 for signals. The difference from the previous embodiment is that the total amount of the sample gas is not calculated by the liquid level of the U-shaped tube 73 , but the output volume of the sample gas is accurately calculated by the weight change.

詳細來說，溫度控制單元75提供冷浴，以乾冰或其他冷液冷浴U形管73的底部。控制單元71控制上游控制閥721開啟，使樣品氣體輸入至U形管73，樣品氣體在U形管73的底部被冷凝。而接著控制單元71控制上游控制閥 721關閉，並控制下游控制閥722開啟，溫度控制單元75升溫而使樣品氣體蒸發，進入樣品氣體輸送管路42a及勻氣室421a。 In detail, the temperature control unit 75 provides a cold bath, and the bottom of the U-shaped tube 73 is cooled with dry ice or other cold liquid. The control unit 71 controls the upstream control valve 721 to open, so that the sample gas is input into the U-shaped tube 73 , and the sample gas is condensed at the bottom of the U-shaped tube 73 . And then the control unit 71 controls the upstream control valve 721 is closed, and the downstream control valve 722 is controlled to open, and the temperature control unit 75 heats up so that the sample gas evaporates and enters the sample gas delivery pipeline 42a and the uniform gas chamber 421a.

測重單元74較佳地設置於U形管73的底部，用於量測U形管73重量變化。因此控制單元71藉由測重單元74，可精確地計算有多少樣品氣體進入U形管73並冷凝，以及有多少樣品氣體離開U形管73，從而精確地控制輸入至勻氣室421a的樣品氣體的質量。 The weighing unit 74 is preferably disposed at the bottom of the U-shaped tube 73 for measuring the weight change of the U-shaped tube 73 . Therefore, the control unit 71 can accurately calculate how much sample gas enters the U-shaped tube 73 and condenses through the weighing unit 74, and how much sample gas leaves the U-shaped tube 73, thereby accurately controlling the sample input to the uniform gas chamber 421a the mass of the gas.

本發明在上文中已以實施例揭露，然熟習本項技術者應理解的是，該實施例僅用於描繪本發明，而不應解讀為限制本發明之範圍。應注意的是，舉凡與該實施例等效之變化與置換，均應設為涵蓋於本發明之範疇內。因此，本發明之保護範圍當以申請專利範圍所界定者為準。 The present invention has been disclosed by the embodiments above, but those skilled in the art should understand that the embodiments are only for describing the present invention, and should not be construed as limiting the scope of the present invention. It should be noted that all changes and substitutions equivalent to the embodiment should be included in the scope of the present invention. Therefore, the scope of protection of the present invention should be defined by the scope of the patent application.

5:隔離膜構件 5: Isolation membrane member

51:半透膜層 51: Semi-permeable membrane layer

52:硝酸溶液層 52: nitric acid solution layer

54:固定部 54: fixed part

541:穿孔 541: perforation

Claims (7)

一種隔離膜構件，其包含：至少一半透膜層，該半透膜層允許氣體通過；一硝酸溶液層，披覆於該半透膜層的重力方向上的上方；以及一固定部，設置於該半透膜層的外圍。 An isolation membrane member, which comprises: at least a semi-permeable membrane layer, which allows gas to pass through; a nitric acid solution layer, which is coated above the semi-permeable membrane layer in the direction of gravity; and a fixing part, which is arranged on the periphery of the semi-permeable membrane layer. 如請求項1所述之隔離膜構件，其中該硝酸溶液層為王水。 The isolation membrane member according to claim 1, wherein the nitric acid solution layer is aqua regia. 如請求項1所述之隔離膜構件，其中該半透膜層為PFA半透膜。 The isolation membrane member according to claim 1, wherein the semipermeable membrane layer is a PFA semipermeable membrane. 如請求項1所述之隔離膜構件，其中該半透膜層的數量為二，該硝酸溶液層設置於該二半透膜層之間。 The isolation membrane member according to claim 1, wherein the number of the semipermeable membrane layers is two, and the nitric acid solution layer is arranged between the two semipermeable membrane layers. 一種氣體捕捉裝置，其包括：一第一瓶體，具有一第一容室及連通該第一容室的一第一進氣口及一第一出氣口；一連接管路，一端連通該第一出氣口；以及如請求項1至4任一項所述之隔離膜構件，該固定部連接於該第一瓶體的內壁。 A gas capture device, which includes: a first bottle body, having a first chamber and a first air inlet and a first gas outlet connected to the first chamber; a connecting pipeline, one end of which communicates with the first an air outlet; and the isolation membrane member according to any one of claims 1 to 4, wherein the fixing part is connected to the inner wall of the first bottle body. 如請求項5所述之氣體捕捉裝置，其中該固定部具有一穿孔，該第一瓶體的一進氣管路貫穿該穿孔。 The gas capture device according to claim 5, wherein the fixing part has a perforation, and an air inlet pipeline of the first bottle passes through the perforation. 如請求項5所述之氣體捕捉裝置，更包括一氣體稀釋器，設置於該第一進氣口，該氣體稀釋器包括一樣品氣體輸送管路及一保 護氣體輸送管路，該保護氣體輸送管路的末端位於該第一容室中，該樣品氣體輸送管路的末端位於該保護氣體輸送管路中。 The gas capture device as described in claim 5 further includes a gas diluter, which is arranged at the first air inlet, and the gas diluter includes a sample gas delivery pipeline and a protection A protective gas delivery pipeline, the end of the protective gas delivery pipeline is located in the first chamber, and the end of the sample gas delivery pipeline is located in the protective gas delivery pipeline.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2056148C1 (en) * 1992-01-30 1996-03-20 Игорь Николаевич Бекман Gas mixture membrane separation apparatus
WO1997040904A1 (en) * 1996-05-02 1997-11-06 Commodore Separation Technologies, Inc. Supported liquid membrane separation
TW201207916A (en) * 2010-04-28 2012-02-16 Tokyo Ohka Kogyo Co Ltd Method of cleaning support plate
CN110636897A (en) * 2017-05-18 2019-12-31 株式会社大赛璐 Laminate containing ionic liquid and method for producing same
CN110732160A (en) * 2019-11-26 2020-01-31 中国科学院过程工程研究所 method for dynamically adsorbing heavy metals in solution and application thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2056148C1 (en) * 1992-01-30 1996-03-20 Игорь Николаевич Бекман Gas mixture membrane separation apparatus
WO1997040904A1 (en) * 1996-05-02 1997-11-06 Commodore Separation Technologies, Inc. Supported liquid membrane separation
TW201207916A (en) * 2010-04-28 2012-02-16 Tokyo Ohka Kogyo Co Ltd Method of cleaning support plate
CN110636897A (en) * 2017-05-18 2019-12-31 株式会社大赛璐 Laminate containing ionic liquid and method for producing same
CN110732160A (en) * 2019-11-26 2020-01-31 中国科学院过程工程研究所 method for dynamically adsorbing heavy metals in solution and application thereof

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