TWI792154B - Vacuum pumping system and risk management device thereof - Google Patents
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本發明涉及一種抽真空系統,特別是涉及一種抽真空系統及其風險管理裝置。The invention relates to a vacuum pumping system, in particular to a vacuum pumping system and a risk management device thereof.
在半導體的製程(例如:曝光機、乾式蝕刻、化學氣相沉積CVD、物理氣相沉積PVD等)都需要在高真空狀態的製程腔體內進行。因此,渦輪分子真空系統通常是配備應用於半導體製程中,用以創造出真空環境。The semiconductor manufacturing process (for example: exposure machine, dry etching, chemical vapor deposition CVD, physical vapor deposition PVD, etc.) needs to be carried out in a process chamber in a high vacuum state. Therefore, turbomolecular vacuum systems are usually equipped in semiconductor manufacturing processes to create a vacuum environment.
在半導體製程的整體設備與系統中,每一個子設備(例如:渦輪分子泵、真空隔離閥門、初級真空泵等)都會配置有一個專屬的子設備控制器,該些子設備控制器會回報子設備的運作狀況給一主控制器,再由操作人員通過主控制器對子設備控制器發出指令控制子設備。在該些子設備當中,因為渦輪分子泵需要處於高轉速運行的狀態,屬於高危險性。一旦渦輪分子泵的轉子耗損而發生翼片破損碎裂,很可能會彈射至費用昂貴的製程腔體中,造成嚴重的成本損失。然而,當渦輪分子泵發生異常,經由子設備控制器通報給主控制器,再由操作人員通過主控制器下指令關閉系統作業時,訊息傳遞的延遲往往已來不及保護到製程腔體。In the overall equipment and system of the semiconductor manufacturing process, each sub-equipment (for example: turbomolecular pump, vacuum isolation valve, primary vacuum pump, etc.) will be equipped with a dedicated sub-equipment controller, and these sub-equipment controllers will report back to the sub-equipment The operating status of the equipment is sent to a main controller, and then the operator sends instructions to the sub-equipment controller through the main controller to control the sub-equipment. Among these sub-equipment, because the turbomolecular pump needs to run at a high speed, it is a high risk. Once the rotor of the turbomolecular pump is worn out and the fins are damaged and fragmented, they are likely to be ejected into the expensive process chamber, resulting in serious cost losses. However, when an abnormality occurs in the turbomolecular pump, it is notified to the main controller through the sub-equipment controller, and then the operator orders to shut down the system through the main controller, the delay in message transmission is often too late to protect the process chamber.
因此,如何通過設計改良,即時偵測到渦輪分子泵的運行狀態,並且即時作出應變措施,降低製程成本嚴重損失的風險,已成為該項事業所欲解決的重要課題之一。Therefore, how to detect the operating status of the turbomolecular pump in real time through design improvement, and take immediate contingency measures to reduce the risk of serious loss of process cost has become one of the important issues that this business wants to solve.
本發明所要解決的技術問題在於,針對現有技術的不足提供一種抽真空系統及其風險管理裝置,其可以直接偵測真空泵的運行狀態,當真空泵被判定發生異常時,緊急關閉製程腔體與真空泵之間的隔離閥,藉以降低設備損壞的風險。The technical problem to be solved by the present invention is to provide a vacuum pumping system and its risk management device for the deficiencies of the prior art, which can directly detect the operation status of the vacuum pump, and when the vacuum pump is judged to be abnormal, shut down the process chamber and the vacuum pump urgently Isolation valves between the valves, thereby reducing the risk of equipment damage.
為了解決上述的技術問題,本發明所採用的其中一技術方案是提供一種抽真空系統。所述抽真空系統控制一隔離閥、一製程腔體以及一通過所述隔離閥與所述製程腔體連通的真空泵,用於將所述製程腔體抽真空至一目標真空度。所述抽真空系統包括一主控制器以及一風險管理裝置。所述主控制器是用以控制所述製程腔體,所述主控制包括一隔離閥控制器以及一真空泵控制器;所述隔離閥控制器是用以控制所述隔離閥,以及所述真空泵控制器偵測所述真空泵的一內部運行狀態而產生對應的一控制訊號,並控制所述真空泵。所述風險管理裝置偵測並根據所述真空泵的一運行狀態,以即時關閉所述隔離閥,藉以保護所述製程腔體。In order to solve the above technical problems, one of the technical solutions adopted by the present invention is to provide a vacuum pumping system. The vacuum system controls an isolation valve, a process chamber, and a vacuum pump communicated with the process chamber through the isolation valve, and is used to vacuum the process chamber to a target vacuum degree. The vacuum system includes a main controller and a risk management device. The main controller is used to control the process chamber, the main control includes an isolation valve controller and a vacuum pump controller; the isolation valve controller is used to control the isolation valve, and the vacuum pump The controller detects an internal operation state of the vacuum pump and generates a corresponding control signal to control the vacuum pump. The risk management device detects and closes the isolation valve immediately according to an operating state of the vacuum pump, so as to protect the process chamber.
為了解決上述的技術問題,本發明所採用的另外一技術方案是提供一種風險管理裝置,其是用於一抽真空系統。所述抽真空系統控制一隔離閥、一製程腔體以及一通過所述隔離閥與所述製程腔體連通的真空泵。所述風險管理裝置包括一異常偵測模組以及一緊急應變模組。所述異常偵測模組用以偵測所述真空泵的至少一運行狀態訊號,以及所述緊急應變模組電性連接所述異常偵測模組、所述隔離閥以及所述抽真空系統的一主控制器,用以判斷所述至少一運行狀態訊號是否超出一預設值。當判斷所述至少一運行狀態訊號超出所述預設值時,所述緊急應變模組即關閉所述隔離閥,並發出一告警訊息至所述主控制器。In order to solve the above technical problems, another technical solution adopted by the present invention is to provide a risk management device, which is used in a vacuum system. The vacuum system controls an isolation valve, a process chamber and a vacuum pump communicated with the process chamber through the isolation valve. The risk management device includes an abnormality detection module and an emergency response module. The abnormality detection module is used to detect at least one operation status signal of the vacuum pump, and the emergency response module is electrically connected to the abnormality detection module, the isolation valve and the vacuum pumping system. A main controller is used for judging whether the at least one running status signal exceeds a preset value. When judging that the at least one operating status signal exceeds the preset value, the emergency response module closes the isolation valve and sends an alarm message to the main controller.
在本發明的一實施例中,所述至少一運行狀態訊號為溫度訊號、振動訊號或轉速訊號。In an embodiment of the present invention, the at least one operating state signal is a temperature signal, a vibration signal or a rotational speed signal.
在本發明的一實施例中,所述異常偵測模組包括一偵測單元,其設置於所述真空泵上,用以偵測所述真空泵的運行狀態,得到所述至少一運行狀態訊號。In an embodiment of the present invention, the abnormality detection module includes a detection unit, which is disposed on the vacuum pump, to detect the operation state of the vacuum pump, and obtain the at least one operation state signal.
在本發明的一實施例中,所述異常偵測模組電性連接所述抽真空系統的所述真空泵控制器,以從所述真空泵控制器接收所述控制訊號,並將所述控制訊號轉換成其中一所述運行狀態訊號;以及,所述異常偵測模組進一步包括一設置於所述真空泵上的偵測單元,用以偵測所述真空泵的運行狀態,得到另一所述運行狀態訊號。In an embodiment of the present invention, the abnormality detection module is electrically connected to the vacuum pump controller of the vacuum pumping system to receive the control signal from the vacuum pump controller and transmit the control signal converted into one of the operation status signals; and, the abnormality detection module further includes a detection unit arranged on the vacuum pump to detect the operation status of the vacuum pump to obtain another operation status signal. status signal.
在本發明的一實施例中,當所述異常偵測模組根據轉換所述真空泵控制器的所述控制訊號所得到的其中一所述運行狀態訊號與所述偵測單元所得到的另一所述運行狀態訊號各自都超過所述預設值時,所述緊急應變模組即關閉所述隔離閥,並發出所述告警訊息至所述主控制器。In an embodiment of the present invention, when the abnormality detection module converts one of the operation status signals obtained by converting the control signal of the vacuum pump controller and the other obtained by the detection unit When each of the operating status signals exceeds the preset value, the emergency response module closes the isolation valve and sends the alarm message to the main controller.
在本發明的一實施例中,當所述異常偵測模組根據轉換所述真空泵控制器的所述控制訊號所得到的其中一所述運行狀態訊號與所述偵測單元所得到的另一所述運行狀態訊號各自都超過所述預設值時,所述緊急應變模組即關閉所述隔離閥,並發出所述告警訊息至所述主控制器。In an embodiment of the present invention, when the abnormality detection module converts one of the operation status signals obtained by converting the control signal of the vacuum pump controller and the other obtained by the detection unit When each of the operating status signals exceeds the preset value, the emergency response module closes the isolation valve and sends the alarm message to the main controller.
本發明的其中一有益效果在於,本發明所提供的抽真空系統及其風險管理裝置,其能通過“所述風險管理裝置偵測並根據所述真空泵的所述運行狀態,以即時關閉所述隔離閥,藉以保護所述製程腔體”以及“當緊急應變模組判斷運行狀態訊號超出預設值時,緊急應變模組即關閉隔離閥,並發出所述告警訊息至主控制器”的技術方案,以有效降低設備損壞的風險。One of the beneficial effects of the present invention is that the vacuum pumping system and its risk management device provided by the present invention can immediately shut down the Isolation valve to protect the process chamber" and "when the emergency response module judges that the operating status signal exceeds the preset value, the emergency response module will close the isolation valve and send the alarm message to the main controller" technology program to effectively reduce the risk of equipment damage.
為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本發明加以限制。In order to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings related to the present invention. However, the provided drawings are only for reference and description, and are not intended to limit the present invention.
在半導體製程中,半導體製程機台(製程腔體)通常會與真空泵相連通,並且藉由真空泵來產生低壓真空的作業環境。在實際應用時,真空泵會處於高轉速的狀態下運行,一旦發生真空泵的轉子的翼片破損碎裂而導致高速的碎屑彈射到半導體製程機台內,會影響製程並且造成費用昂貴的設備嚴重損壞,造成成本損失。因此本發明提供一種抽真空系統及其風險管理裝置,此風險管理裝置可以輔助抽真空系統,主動偵測並判斷真空泵是否有異常,並且當真空泵發生異常時,跳過通知主系統的步驟,直接關閉隔離閥,以保護昂貴的製程設備與產品,降低損失。In the semiconductor process, the semiconductor process machine (process chamber) is usually connected with a vacuum pump, and the vacuum pump is used to generate a low-pressure vacuum working environment. In practical applications, the vacuum pump will run at a high speed. Once the vanes of the rotor of the vacuum pump are damaged and fragmented, high-speed debris will be ejected into the semiconductor process machine, which will affect the process and cause serious damage to expensive equipment. damage, resulting in cost losses. Therefore, the present invention provides a vacuum pumping system and its risk management device. The risk management device can assist the vacuum pumping system to actively detect and judge whether the vacuum pump is abnormal, and when the vacuum pump is abnormal, skip the step of notifying the main system and directly Close the isolation valve to protect expensive process equipment and products and reduce losses.
以下是通過特定的具體實施例來說明本發明所公開有關“抽真空系統及其風險管理裝置”的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不背離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。The following is an illustration of the implementation of the "vacuum pumping system and its risk management device" disclosed in the present invention through specific specific examples. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple illustration, and are not drawn according to the actual size, which is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention. In addition, the term "or" used herein may include any one or a combination of more of the associated listed items depending on the actual situation.
[第一實施例][first embodiment]
參閱圖1所示,本發明第一實施例提供一種用於一抽真空系統S的風險管理裝置10。抽真空系統S控制一隔離閥V、一製程腔體M以及一通過所述隔離閥V與製程腔體M連通的真空泵P。風險管理裝置10主要包括一異常偵測模組11以及一緊急應變模組12。異常偵測模組11用以偵測真空泵P的至少一運行狀態訊號。緊急應變模組12電性連接異常偵測模組11、隔離閥V以及抽真空系統S的一主控制器100,用以判斷至少一運行狀態訊號是否超出一預設值。使用時,當緊急應變模組12判斷所述至少一運行狀態訊號超出預設值時,緊急應變模組12即關閉隔離閥V,並發出一告警訊息至主控制器100。Referring to FIG. 1 , the first embodiment of the present invention provides a
舉例來說,真空泵P的至少一運行狀態訊號可以是真空泵P的溫度訊號、振動訊號或轉速訊號。然而,本創作不以上述所舉的例子為限。For example, the at least one operating state signal of the vacuum pump P may be a temperature signal, a vibration signal or a rotation speed signal of the vacuum pump P. However, the present invention is not limited to the examples cited above.
參閱圖2至圖4所示,本發明的風險管理裝置10的異常偵測模組11可以具有以下三種態樣。首先,參閱圖2所示,異常偵測模組11的第一態樣可進一步包括一偵測單元111,其設置於真空泵P上,用以偵測真空泵P的運行狀態並得到運行狀態訊號。詳細而言,偵測單元111可以是溫度感測器、振動感測器、加速規等。偵測單元111所偵測到的運行狀態訊號可以透過無線或有線通訊連接傳送至緊急應變模組12。接著,緊急應變模組12會根據接收到的運行狀態訊號來判斷其是否大於一預設值,預設值可以是一基礎值加上一裕度值。值得注意的是,每一種運行狀態訊號會有相對應的預設值,舉例而言,當運行狀態訊號是偵測真空泵P的溫度,其會有一相對應的真空泵P溫度的預設值。若運行狀態訊號(例如:溫度訊號)大於預設值30%以上,代表真空泵P可能發生過熱的現象,判斷為真空泵P異常。因此,緊急應變模組12會緊急關閉隔離閥V,以將真空泵P與製程腔體M彼此相分隔,避免製程腔體M被破壞。此外,緊急應變模組12會發出一告警訊息至抽真空系統S的主控制器100。最後,抽真空系統S可以進一步控制真空泵P以及製程腔體M關閉。此態樣的優點在於:不需要繁瑣的安裝軟體系統,即可以使用直接附加安裝的方式偵測真空泵P,藉以獲得真空泵P的運行狀態。然而,上述所舉的例子只是其中一可行的實施例而並非用以限定本發明。Referring to FIG. 2 to FIG. 4 , the
參閱圖3所示,異常偵測模組11的第二態樣是電性連接抽真空系統S的一真空泵控制器102,從真空泵控制器102接收一控制訊號,並將控制訊號轉換成真空泵P的運行狀態訊號。舉例而言,真空泵控制器102是一電流感測器,可以偵測真空泵P的電流訊號(類比訊號或數位訊號),異常偵測模組11經過無線或有線通訊連線接收到真空泵控制器102的電流訊號後,再轉換成運行狀態訊號(類比訊號或數位訊號),並傳送給緊急應變模組12進行分析判斷。在此態樣中,緊急應變模組12的判斷方式與前述相同,於此不再贅述。此態樣的優點在於:可以連接到現有的真空泵控制器102的訊號,不需要額外安裝偵測單元偵測真空泵P,藉以獲得真空泵P的運行狀態。然而,上述所舉的例子只是其中一可行的實施例而並非用以限定本發明。Referring to FIG. 3, the second aspect of the
參閱圖4所示,異常偵測模組11的第三態樣是電性連接抽真空系統S的一真空泵控制器102,從真空泵控制器102接收一控制訊號,並將控制訊號轉換成真空泵P的其中一運行狀態訊號(以下稱作“內部訊號”),以及,進一步包括一設置於所述真空泵P上的偵測單元111,用以偵測所述真空泵P的運行狀態,得到另一所述運行狀態訊號(以下稱作“外部訊號”)。Referring to FIG. 4, the third aspect of the
在此態樣中,緊急應變模組12可進一步設定為嚴謹模式或非嚴謹模式。在嚴謹模式中,緊急應變模組12會通過無線或有線通訊連接接收到內部訊號以及外部訊號,並且判斷兩者是否皆大於一預設值,當內部訊號與外部訊號皆大於預設值時,緊急應變模組12緊急關閉隔離閥V,以將真空泵P與製程腔體M彼此相分隔,避免製程腔體M被破壞。此外,緊急應變模組12會發出一告警訊息至抽真空系統S的主控制器100。最後,抽真空系統S可以進一步控制抽真空泵P以及製程腔體M關閉。另外,在嚴謹模式中,當內部訊號與外部訊號只有其中一個大於預設值時,緊急應變模組12可以進一步發出一通知訊息至抽真空系統S的主控制器100,操作人員就可以進一步排除偵測單元111或真空泵控制器102是否故障。嚴謹模式的優點在於:可以雙重確定真空泵P的運行狀態發生異常再關閉隔離閥V,避免耽誤製程。然而,上述所舉的例子只是其中一可行的實施例而並非用以限定本發明。In this aspect, the
在非嚴謹模式中,緊急應變模組12會通過無線或有線通訊連接接收並判斷內部訊號以及外部訊號,當內部訊號與外部訊號的其中一個或兩個都大於預設值時,緊急應變模組12即緊急關閉隔離閥V,以將真空泵P與製程腔體M彼此相分隔,避免製程腔體M被破壞。此外,緊急應變模組12會發出一告警訊息至抽真空系統S的主控制器100。最後,抽真空系統S可以進一步控制真空泵P以及製程腔體M關閉。非嚴謹模式的優點在於:可以確保製程設備的安全性。然而,上述所舉的例子只是其中一可行的實施例而並非用以限定本發明。In the non-rigorous mode, the
[第二實施例][Second embodiment]
參閱圖5所示,本發明第二實施例提供一種抽真空系統S,其控制一隔離閥V、一製程腔體M以及一通過隔離閥V與製程腔體M連通的真空泵P,用以將製程腔體M抽真空至一目標真空度。Referring to Fig. 5, the second embodiment of the present invention provides a vacuum pumping system S, which controls an isolation valve V, a process chamber M, and a vacuum pump P communicated with the process chamber M through the isolation valve V, so as to The process chamber M is evacuated to a target vacuum degree.
抽真空系統S主要包括一主控制器100以及一風險管理裝置10。主控制器100用以控制製程腔體M,主控制器100包括一用以控制隔離閥V的隔離閥控制器101,以及一真空泵控制器102,其偵測真空泵P的一內部運行狀態而產生對應的一控制訊號,並控制真空泵P。風險管理裝置10可以偵測並根據真空泵P的一運行狀態,以即時關閉隔離閥V,藉以保護所述製程腔體M。The vacuum system S mainly includes a
在本實施例中,抽真空系統S為一渦輪分子泵真空系統,其可應用於半導體製程。舉例而言,製程腔體M為一半導體產業的製程機台(例如:薄膜濺鍍設備或蝕刻設備),隔離閥V為一鐘擺閥,真空泵P為一渦輪分子泵,用以提供製程機台一真空環境。製程腔體M、隔離閥V以及真空泵P都配備有一專屬的控制器。然而,本創作不以上述所舉的例子為限。於其他一些實施例中,抽真空系統的主控制器可以進一步包括一初級真空泵控制器,用以控制一與真空泵相連通的初級真空泵。初級真空泵用於幫助真空泵進行排氣。In this embodiment, the vacuum system S is a turbomolecular pump vacuum system, which can be applied to semiconductor manufacturing process. For example, the process chamber M is a semiconductor industry process machine (for example: thin film sputtering equipment or etching equipment), the isolation valve V is a pendulum valve, and the vacuum pump P is a turbomolecular pump to provide the process machine A vacuum environment. The process chamber M, the isolation valve V and the vacuum pump P are all equipped with a dedicated controller. However, the present invention is not limited to the examples cited above. In some other embodiments, the main controller of the vacuum pumping system may further include a primary vacuum pump controller for controlling a primary vacuum pump communicated with the vacuum pump. The primary vacuum pump is used to assist the vacuum pump in venting.
參閱圖5搭配圖4所示,在本實施例中,抽真空系統S的風險管理裝置10是第一實施例的風險管理裝置10,而風險管理裝置10具有第三態樣的異常偵測模組11。值得注意的是,緊急應變模組12是直接控制隔離閥控制器101關閉隔離閥V。藉此,能夠在風險管理裝置10能夠在真空泵P發生異常時,於最短的時間內作出應變措施。然而,上述所舉的例子只是其中一可行的實施例而並非用以限定本發明。Referring to FIG. 5 and shown in FIG. 4 , in this embodiment, the
[實施例的有益效果][Advantageous Effects of Embodiment]
本發明的其中一有益效果在於,本發明所提供的抽真空系統及其風險管理裝置,其能通過“所述風險管理裝置偵測並根據所述真空泵的所述運行狀態,以即時關閉所述隔離閥,藉以保護所述製程腔體”以及“當緊急應變模組判斷運行狀態訊號超出預設值時,緊急應變模組即關閉隔離閥,並發出所述告警訊息至主控制器”的技術方案,於真空泵發生異常時即時作出應變措施,以有效降低設備損壞的風險。One of the beneficial effects of the present invention is that the vacuum pumping system and its risk management device provided by the present invention can immediately shut down the Isolation valve to protect the process chamber" and "when the emergency response module judges that the operating status signal exceeds the preset value, the emergency response module will close the isolation valve and send the alarm message to the main controller" technology The solution is to take immediate contingency measures when the vacuum pump is abnormal, so as to effectively reduce the risk of equipment damage.
以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的申請專利範圍內。The content disclosed above is only a preferred feasible embodiment of the present invention, and does not therefore limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the application of the present invention. within the scope of the patent.
V:隔離閥 M:製程腔體 P:真空泵 S:抽真空系統 10:風險管理裝置 11:異常偵測模組 111:偵測單元 12:緊急應變模組 100:主控制器 101:隔離閥控制器 102:真空泵控制器 V: isolation valve M: process chamber P: vacuum pump S: vacuum system 10: Risk management device 11: Abnormal detection module 111: Detection unit 12:Emergency Response Module 100: main controller 101: Isolation valve controller 102: Vacuum pump controller
圖1為本發明第一實施例的風險管理裝置的功能方塊圖。FIG. 1 is a functional block diagram of a risk management device according to a first embodiment of the present invention.
圖2為本發明具有第一態樣的異常偵測模組的風險管理裝置的功能方塊圖。FIG. 2 is a functional block diagram of the risk management device with the anomaly detection module of the first aspect of the present invention.
圖3為本發明具有第二態樣的異常偵測模組的風險管理裝置的功能方塊圖。FIG. 3 is a functional block diagram of a risk management device having an anomaly detection module according to a second aspect of the present invention.
圖4為本發明具有第三態樣的異常偵測模組的風險管理裝置的功能方塊圖。FIG. 4 is a functional block diagram of a risk management device having an anomaly detection module according to a third aspect of the present invention.
圖5為本發明第二實施例的抽真空系統的功能方塊圖。FIG. 5 is a functional block diagram of a vacuum pumping system according to a second embodiment of the present invention.
V:隔離閥 V: isolation valve
M:製程腔體 M: process chamber
P:真空泵 P: vacuum pump
S:抽真空系統 S: vacuum system
10:風險管理裝置 10: Risk management device
11:異常偵測模組 11: Abnormal detection module
12:緊急應變模組 12:Emergency Response Module
100:主控制器 100: main controller
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