TWI776656B - Flexible pressure sensing device - Google Patents

Flexible pressure sensing device Download PDF

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TWI776656B
TWI776656B TW110131484A TW110131484A TWI776656B TW I776656 B TWI776656 B TW I776656B TW 110131484 A TW110131484 A TW 110131484A TW 110131484 A TW110131484 A TW 110131484A TW I776656 B TWI776656 B TW I776656B
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pressure sensing
sensing device
flexible
pressure
flexible pressure
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TW202309730A (en
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楊啟榮
林明鋒
王亮均
張淑芳
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國立臺灣師範大學
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一種可撓式壓力感測裝置，包含二可撓式基材、二導電層及一複合介電結構。該等可撓式基材彼此相互間隔。該等導電層分別設置於該等可撓式基材的內表面。該複合介電結構夾設於該等導電層之間，且在受撓曲壓擠後能恢復原狀。該複合介電結構包括層狀構造、柱狀構造、纖維構造、多孔構造的至少三者。A flexible pressure sensing device includes two flexible substrates, two conductive layers and a composite dielectric structure. The flexible substrates are spaced apart from each other. The conductive layers are respectively disposed on the inner surfaces of the flexible substrates. The composite dielectric structure is sandwiched between the conductive layers, and can return to its original shape after being flexed and squeezed. The composite dielectric structure includes at least three of a layered structure, a columnar structure, a fibrous structure, and a porous structure.

Description

可撓式壓力感測裝置Flexible pressure sensing device

本發明是有關於一種壓力感測裝置，特別是指一種可撓式壓力感測裝置。The present invention relates to a pressure sensing device, in particular to a flexible pressure sensing device.

壓力感測器在觸控螢幕、人機介面、智慧機器人、電子皮膚、生醫儀器等各種應用領域中，都具有不可或缺的重要性。就運作原理來說，壓力感測器可分為壓阻(piezoresistive)、壓電(piezoelectric)、電容(capacitive)、摩擦電(triboelectric)等不同類型。無論是何種類型壓力感測器，都朝向可撓曲、高靈敏度、高響應速度、高可靠度及耐用性等方向發展。Pressure sensors are of indispensable importance in various application fields such as touch screens, human-machine interfaces, smart robots, electronic skins, and biomedical instruments. In terms of operation principle, pressure sensors can be classified into different types such as piezoresistive, piezoelectric (piezoelectric), capacitive (capacitive), and triboelectric. No matter what type of pressure sensor it is, it develops in the direction of flexibility, high sensitivity, high response speed, high reliability and durability.

因此，本發明之其中一目的，即在提供一種能實現前述要求的可撓式壓力感測裝置。Therefore, one of the objectives of the present invention is to provide a flexible pressure sensing device that can achieve the aforementioned requirements.

於是，本發明可撓式壓力感測裝置在一些實施態樣中，包含二可撓式基材、二導電層及一複合介電結構。該等可撓式基材彼此相互間隔。該等導電層分別設置於該等可撓式基材的內表面。該複合介電結構夾設於該等導電層之間，且在受撓曲壓擠後能恢復原狀。該複合介電結構包括層狀構造、柱狀構造、纖維構造、多孔構造的至少三者。Therefore, in some embodiments, the flexible pressure sensing device of the present invention includes two flexible substrates, two conductive layers and a composite dielectric structure. The flexible substrates are spaced apart from each other. The conductive layers are respectively disposed on the inner surfaces of the flexible substrates. The composite dielectric structure is sandwiched between the conductive layers, and can return to its original shape after being flexed and squeezed. The composite dielectric structure includes at least three of a layered structure, a columnar structure, a fibrous structure, and a porous structure.

在一些實施態樣中，該複合介電結構包括柱狀構造及纖維構造，纖維構造夾設於柱狀構造及其中一導電層之間。In some embodiments, the composite dielectric structure includes a columnar structure and a fiber structure, and the fiber structure is sandwiched between the columnar structure and one of the conductive layers.

在一些實施態樣中，該複合介電結構包括層狀構造、柱狀構造及纖維構造，柱狀構造分別設置於層狀構造的兩相反側並分別往該等導電層延伸，纖維構造分別夾設在柱狀構造及該等導電層之間。In some embodiments, the composite dielectric structure includes a layered structure, a columnar structure and a fiber structure, the columnar structures are respectively disposed on opposite sides of the layered structure and extend toward the conductive layers, respectively, and the fiber structures are sandwiched between between the columnar structure and the conductive layers.

在一些實施態樣中，該複合介電結構包括層狀構造、柱狀構造及多孔構造，柱狀構造設置於層狀構造上，多孔構造形成於層狀構造及柱狀構造中。In some embodiments, the composite dielectric structure includes a layered structure, a columnar structure and a porous structure, the columnar structure is disposed on the layered structure, and the porous structure is formed in the layered structure and the columnar structure.

在一些實施態樣中，柱狀構造具有多個間隔並排的圓柱，各圓柱的直徑介於15微米至40微米。In some embodiments, the columnar structure has a plurality of cylinders spaced side by side, each cylinder having a diameter ranging from 15 microns to 40 microns.

在一些實施態樣中，層狀構造及柱狀構造的材質包括聚二甲基矽氧烷。In some embodiments, the material of the layered structure and the columnar structure includes polydimethylsiloxane.

在一些實施態樣中，纖維構造是以靜電紡絲方式製作之含鈦酸鋇成分的聚偏二氟乙烯材質纖維。In some embodiments, the fiber structure is made of polyvinylidene fluoride fiber containing barium titanate by electrospinning.

在一些實施態樣中，纖維構造的鈦酸鋇成分的重量百分比範圍為5~25%。In some embodiments, the weight percentage of the barium titanate component of the fiber structure ranges from 5 to 25%.

在一些實施態樣中，該等可撓式基材的材質包含聚醯亞胺，該等導電層的材質包含石墨烯。In some embodiments, the material of the flexible substrates includes polyimide, and the material of the conductive layers includes graphene.

本發明至少具有以下功效：藉由該複合介電結構的結構配置及材質選用，能夠實現高靈敏度、高響應速度、高可靠度及耐用性的可撓式壓力感測裝置。此外，該可撓式壓力感測裝置整體為可撓式結構，適合整合於不同的應用領域中。The present invention has at least the following effects: through the structural configuration and material selection of the composite dielectric structure, a flexible pressure sensing device with high sensitivity, high response speed, high reliability and durability can be realized. In addition, the flexible pressure sensing device has a flexible structure as a whole, which is suitable for integration in different application fields.

參閱圖1及圖2，為本發明可撓式壓力感測裝置100的第一實施例。其中，圖1為側視示意圖，圖2為光學顯微鏡拍攝的側剖視圖。該可撓式壓力感測裝置100為一平行板式電容之壓力感測器，可製作各種尺寸，並包含二可撓式基材1、二導電層2及一複合介電結構3。Referring to FIG. 1 and FIG. 2 , it is a first embodiment of the flexible pressure sensing device 100 of the present invention. Wherein, FIG. 1 is a schematic side view, and FIG. 2 is a side cross-sectional view taken by an optical microscope. The flexible pressure sensing device 100 is a parallel-plate capacitive pressure sensor, which can be manufactured in various sizes, and includes two flexible substrates 1 , two conductive layers 2 and a composite dielectric structure 3 .

該等可撓式基材1為該可撓式壓力感測裝置100表層的承載封裝結構，可採用例如厚度0.175公釐之聚醯亞胺(polyimide, PI)薄膜裁切為1.5公分×1.5之尺寸。然而，視實際需要，該等可撓式基材1的材質選用及尺寸大小均可對應調整，不以上述實施方式為限。The flexible substrates 1 are the carrier and packaging structures for the surface layer of the flexible pressure sensing device 100 , and can be cut into a thickness of 1.5 cm×1.5 by using, for example, a polyimide (PI) film with a thickness of 0.175 mm. size. However, depending on actual needs, the selection of materials and sizes of the flexible substrates 1 can be adjusted accordingly, which is not limited to the above-mentioned embodiment.

該等導電層2分別設置於該等可撓式基材1的內表面，可藉由與外部系統(例如阻抗分析儀)的電性連接來進行該可撓式壓力感測裝置100的電容變化偵測，以作為壓力感測的判斷依據。該導電層2的製作方式例如可以藉由在2 wt% PDDA (Polydimethyldiallylammonium chloride)溶液中添加2 wt%的多層還原氧化石墨烯 (multilayer reduced oxide graphene, rGO)而形成石墨烯漿料，再藉由例如滴塗等方式將石墨烯漿料塗佈於該可撓式基材1的原料(聚醯亞胺薄膜)上，後續藉由加熱方式固化石墨烯漿料便能形成該等導電層2。各導電層2的厚度例如可以是50微米，其面電阻 (sheet resistance) 約為7.5-20 Ω/cm 2，足以提供電性量測之性能所需，並且具備一定程度的可撓曲性。 The conductive layers 2 are respectively disposed on the inner surfaces of the flexible substrates 1, and the capacitance change of the flexible pressure sensing device 100 can be performed by electrical connection with an external system (eg, an impedance analyzer) Detection is used as the judgment basis for pressure sensing. The conductive layer 2 can be fabricated, for example, by adding 2 wt % of multilayer reduced oxide graphene (rGO) to a 2 wt % PDDA (Polydimethyldiallylammonium chloride) solution to form a graphene slurry, and then by adding 2 wt % of multilayer reduced oxide graphene (rGO) For example, the graphene slurry is coated on the raw material (polyimide film) of the flexible substrate 1 by means of drop coating, and then the conductive layers 2 can be formed by curing the graphene slurry by heating. The thickness of each conductive layer 2 can be, for example, 50 microns, and its sheet resistance is about 7.5-20 Ω/cm 2 , which is sufficient to provide the performance required for electrical measurement, and has a certain degree of flexibility.

該複合介電結構3夾設於該等導電層2之間，且在受撓曲壓擠後能自行恢復原狀。該複合介電結構3包括層狀構造31、柱狀構造32、纖維構造33、多孔構造34的至少三者。本實施例中，該複合介電結構3包括層狀構造31、柱狀構造32及纖維構造33，柱狀構造32分別設置於層狀構造31的兩相反側並分別往該等導電層2延伸，纖維構造33分別夾設在柱狀構造32及該等導電層2之間。就製作過程來說，層狀構造31、柱狀構造32是一體式結構而在同一製作過程中形成，纖維構造33則未與層狀構造31、柱狀構造32一體形成而藉由另一方式製備。The composite dielectric structure 3 is sandwiched between the conductive layers 2, and can return to its original shape after being flexed and squeezed. The composite dielectric structure 3 includes at least three of a layered structure 31 , a columnar structure 32 , a fibrous structure 33 and a porous structure 34 . In this embodiment, the composite dielectric structure 3 includes a layered structure 31 , a columnar structure 32 and a fiber structure 33 . The columnar structures 32 are respectively disposed on opposite sides of the layered structure 31 and extend toward the conductive layers 2 respectively. , the fiber structures 33 are respectively sandwiched between the columnar structures 32 and the conductive layers 2 . As far as the production process is concerned, the layered structure 31 and the columnar structure 32 are an integral structure and are formed in the same production process, while the fiber structure 33 is not integrally formed with the layered structure 31 and the columnar structure 32 and is formed by another method. preparation.

以下舉例說明本實施例中層狀構造31、柱狀構造32的製作方式。首先，可在矽晶圓上形成厚度55微米的光阻層，光阻層具有深度55微米、直徑介於15微米至40微米的陣列式排列的圓孔狀凹孔。接著，可將液態之聚二甲基矽氧烷(PDMS)透過例如旋塗方式，塗佈在前述具有凹孔的光阻層上，並讓聚二甲基矽氧烷充分填充於凹孔中。隨後，可透過一平坦的片材壓合於聚二甲基矽氧烷表面，並將包含矽晶圓、光阻、聚二甲基矽氧烷、片材的層疊結構進行加熱處理而使聚二甲基矽氧烷固化，然後再將前述層疊結構置入丙酮溶液中使光阻溶解，便能讓固化的聚二甲基矽氧烷脫離矽晶圓，而完成圖1中該複合介電結構3的半數結構(包含一半厚度的層狀構造31及其中一側的柱狀構造32，如圖13所示)的製作。在上述製作過程中，層狀構造31是由光阻及片材夾壓形成，柱狀構造32是由光阻的凹孔所界定。而後，可再重複上述方式，製作該複合介電結構3的另一半結構(即另一半厚度的層狀構造31及另一側的柱狀構造32)，並在第二次聚二甲基矽氧烷的加熱固化過程中以對稱方式將兩個結構結合，便完成層狀構造31、柱狀構造32的整體結構製作。藉由上述方式製作的柱狀構造32，其尺寸會跟光阻層的凹孔相對應，也就是具有15微米至40微米的直徑並且呈圓柱狀，在此尺寸範圍內能讓該可撓式壓力感測裝置100具有良好的性能表現，特別是直徑25微米的柱狀構造32能夠讓可撓式壓力感測裝置100具有最佳的壓力感測靈敏度。此外，本實施例藉由聚二甲基矽氧烷製作層狀構造31、柱狀構造32，可與標準半導體製程技術相容而利於批量製作，且固化後的聚二甲基矽氧烷具有相當程度的可撓曲性，適用於可撓式裝置的製作。The manufacturing method of the layered structure 31 and the columnar structure 32 in this embodiment is described below by way of example. First, a photoresist layer with a thickness of 55 microns can be formed on a silicon wafer. The photoresist layer has circular hole-shaped concave holes with a depth of 55 microns and diameters ranging from 15 microns to 40 microns. Then, liquid polydimethylsiloxane (PDMS) can be coated on the aforementioned photoresist layer with concave holes by, for example, spin coating, and the polydimethylsiloxane can be fully filled in the concave holes . Then, a flat sheet can be pressed on the surface of polydimethylsiloxane, and the laminated structure including silicon wafer, photoresist, polydimethylsiloxane, and sheet can be heated to make the polydimethylsiloxane. Dimethylsiloxane is cured, and then the above-mentioned laminated structure is placed in an acetone solution to dissolve the photoresist, so that the cured polydimethylsiloxane can be released from the silicon wafer, and the composite dielectric shown in Figure 1 is completed. Fabrication of a half-structure of structure 3 (including a half-thick layered structure 31 and a columnar structure 32 on one side thereof, as shown in FIG. 13 ). In the above manufacturing process, the layered structure 31 is formed by sandwiching a photoresist and a sheet, and the columnar structure 32 is defined by the concave holes of the photoresist. Then, the above method can be repeated to fabricate the other half of the composite dielectric structure 3 (ie, the layered structure 31 with the other half thickness and the columnar structure 32 on the other side), and the second polydimethylsilicon During the heating and curing process of the oxane, the two structures are combined in a symmetrical manner to complete the fabrication of the overall structure of the layered structure 31 and the columnar structure 32 . The size of the columnar structure 32 produced by the above method corresponds to the concave hole of the photoresist layer, that is, it has a diameter of 15 μm to 40 μm and is cylindrical. Within this size range, the flexible The pressure sensing device 100 has good performance, especially the columnar structure 32 with a diameter of 25 μm enables the flexible pressure sensing device 100 to have the best pressure sensing sensitivity. In addition, in this embodiment, the layered structure 31 and the columnar structure 32 are made of polydimethylsiloxane, which is compatible with standard semiconductor process technology and facilitates mass production, and the cured polydimethylsiloxane has A considerable degree of flexibility, suitable for the production of flexible devices.

另一方面，纖維構造33於本實施例是藉由靜電紡絲方式製作之含鈦酸鋇(BaTiO 3, BTO)成分的聚偏二氟乙烯(PVDF)材質纖維。具體來說，可將1.8克之聚偏二氟乙烯粉末溶於6毫升之二甲基甲醯胺(Dimethylformamide, DMF)溶液中，並以15 wt%之鈦酸鋇加入前述含聚偏二氟乙烯的溶液中，再加入4毫升之丙酮作為稀釋劑，藉以初步製備一高分子漿料。上述鈦酸鋇的重量百分比範圍可以是5~25 %，當視實際需要而定。由於聚偏二氟乙烯、鈦酸鋇都具有相當高的介電常數，因此適合用於製作平行板式電容中的介電結構。完成高分子漿料的製備後，可將高分子漿料灌注於具有不銹鋼針頭(針頭內徑0.52毫米)的針筒內，以自動注射泵(syring pump)進行針筒的自動進給，並將電源供應器的正極連接不銹鋼針頭。隨後，可將前述已製作該導電層2的聚醯亞胺薄膜(即該可撓式基材1的原料)放置於以例如轉速100 rpm旋轉的收集板上，讓該導電層2朝向不銹鋼針頭的針口，在以例如12 kV、最大電流300 µA的電源條件下，讓自動注射泵以0.1毫升/小時的速度在該導電層2上逐步形成纖維構造33，最後再施以加熱處理，使二甲基甲醯胺、丙酮完全揮發，便完成纖維構造33的製作。依實際需要，可設定自動注射泵的製備時間以獲得所需厚度之纖維構造33，例如本實施例之纖維構造33是以厚度50微米為例，但不以此厚度為限。依照上述方式，便能將纖維構造33形成在其中一組可撓式基材1及導電層2所形成的層疊結構上，如此重複執行兩次上述過程，就能製備兩組該可撓式基材1/該導電層2/該纖維構造33所形成的結構。最終，只要將前述聚二甲基矽氧烷材質的層狀構造31、柱狀構造32夾設於兩組該可撓式基材1/該導電層2/該纖維構造33所形成的結構中，便完成該可撓式壓力感測裝置100的製作。該可撓式壓力感測裝置100的具體構造型態，可參見圖2之光學顯微鏡剖視圖。 On the other hand, the fiber structure 33 in this embodiment is a polyvinylidene fluoride (PVDF) material fiber containing barium titanate (BaTiO 3 , BTO) produced by electrospinning. Specifically, 1.8 g of polyvinylidene fluoride powder can be dissolved in 6 ml of dimethylformamide (DMF) solution, and 15 wt% of barium titanate can be added to the aforementioned polyvinylidene fluoride-containing solution. In the solution, 4 ml of acetone was added as a diluent to initially prepare a polymer slurry. The weight percentage range of the above-mentioned barium titanate can be 5~25%, depending on actual needs. Since both polyvinylidene fluoride and barium titanate have relatively high dielectric constants, they are suitable for making dielectric structures in parallel plate capacitors. After the preparation of the polymer slurry is completed, the polymer slurry can be poured into a syringe with a stainless steel needle (the inner diameter of the needle is 0.52 mm), and the syringe is automatically fed by an automatic syringe pump, and the The positive terminal of the power supply is connected to the stainless steel needle. Then, the aforementioned polyimide film (ie, the raw material of the flexible substrate 1 ) on which the conductive layer 2 has been fabricated can be placed on a collecting plate that rotates at, for example, 100 rpm, so that the conductive layer 2 faces the stainless steel needle Under the condition of the power supply of 12 kV and the maximum current of 300 µA, for example, let the automatic syringe pump gradually form a fiber structure 33 on the conductive layer 2 at a speed of 0.1 ml/hour, and finally apply heat treatment, so that the The dimethylformamide and acetone were completely volatilized, and the fiber structure 33 was completed. According to actual needs, the preparation time of the automatic syringe pump can be set to obtain the fiber structure 33 with the required thickness. According to the above method, the fiber structure 33 can be formed on the laminated structure formed by one set of the flexible base material 1 and the conductive layer 2. In this way, by repeating the above process twice, two sets of the flexible base material can be prepared. The structure formed by the material 1/the conductive layer 2/the fiber structure 33. Finally, as long as the layered structure 31 and the columnar structure 32 of the polydimethylsiloxane material are sandwiched in the structure formed by the two sets of the flexible substrate 1/the conductive layer 2/the fiber structure 33 , the fabrication of the flexible pressure sensing device 100 is completed. The specific structure of the flexible pressure sensing device 100 can be seen in the cross-sectional view of the optical microscope in FIG. 2 .

參閱圖3，為該第一實施例之該可撓式壓力感測裝置100的電容變化率(△C/C 0)對壓力的變化曲線圖。該曲線的量測方式是以阻抗分析儀測量由推拉力試驗機施加不同壓力於該可撓式壓力感測裝置100所對應的電容值，最終再彙整成曲線圖，可由此得知該可撓式壓力感測裝置100的壓力感測靈敏度。在本實施例中用於受測的該可撓式壓力感測裝置100的柱狀構造32的直徑為25微米，鈦酸鋇的重量百分比為15 %。 Referring to FIG. 3 , it is a graph showing the change in capacitance change rate (ΔC/C 0 ) versus pressure of the flexible pressure sensing device 100 according to the first embodiment. The measurement method of the curve is to measure the capacitance value corresponding to the flexible pressure sensing device 100 with different pressures applied by the push-pull testing machine with an impedance analyzer, and finally collect it into a curve graph, from which the flexible pressure sensing device 100 can be obtained. pressure sensing sensitivity of the pressure sensing device 100 . In this embodiment, the diameter of the column structure 32 of the flexible pressure sensing device 100 used for testing is 25 microns, and the weight percentage of barium titanate is 15%.

一般來說，壓力感測器的壓力感測靈敏度可由以下公式計算： S = δ(△C/C 0) / δP 其中，S為壓力感測靈敏度，C 0為未施加壓力時電容的初始值，△C為電容變化值(受壓後的電容值與C 0的差值)，P為施壓的壓力值。由圖3的量測結果可得知，在該可撓式壓力感測裝置100受壓值為0~9 kPa的區間中曲線呈現出較大的斜率，且在0~5 kPa的區間中曲線的斜率約為5.0(即壓力感測靈敏度S為5 .0kPa -1)，代表在此區間中每1 kPa的施壓會產生5.0的電容變化率，此電容變化率屬於相對較高的壓力感測靈敏度範疇，代表本實施例之可撓式壓力感測裝置100的壓力感測靈敏度具有良好的性能表現。而在9 kPa以上的區間中，壓力感測靈敏度則驟減，較不適宜運用在需要高度感測靈敏度的應用中。 Generally speaking, the pressure sensing sensitivity of a pressure sensor can be calculated by the following formula: S = δ(ΔC/C 0 ) / δP where S is the pressure sensing sensitivity, and C 0 is the initial value of the capacitance when no pressure is applied , △C is the capacitance change value (the difference between the capacitance value after pressure and C 0 ), and P is the pressure value of the pressure. It can be known from the measurement results in FIG. 3 that the curve shows a relatively large slope in the interval where the pressure value of the flexible pressure sensing device 100 is 0-9 kPa, and the curve in the interval of 0-5 kPa The slope is about 5.0 (that is, the pressure sensing sensitivity S is 5.0kPa -1 ), which means that every 1 kPa pressure in this interval will produce a capacitance change rate of 5.0, which is a relatively high pressure change rate. The measurement sensitivity category represents that the pressure sensing sensitivity of the flexible pressure sensing device 100 of this embodiment has good performance. In the range above 9 kPa, the pressure sensing sensitivity decreases sharply, which is not suitable for applications requiring high sensing sensitivity.

對於圖3之曲線特性，以下進一步說明其機制原理。本實施例之該可撓式壓力感測裝置100為平行板式電容，其電容值可由以下公式計算： C = ε × A / d ε = ε 0× ε rε r= ε air× V air+ ε sheet× V sheet+ε cylinder× V cylinder+ ε fiber× V fiber其中，C為電容值，ε為平行板(即該可撓式基材1、該導電層2形成的層狀結構)之間的介電物質及空氣的整體介電常數，A為平行板的面積，d為平行板之間的間距；ε 0為真空介電常數，ε r為相對介電常數；ε air為空氣的介電常數，V air為空氣的體積，ε sheet為層狀構造31的介電常數，V sheet為層狀構造31的體積，ε cylinder為柱狀構造32的介電常數，V cylinder為柱狀構造32的體積，ε fiber為纖維構造33的介電常數，V fiber為纖維構造33的體積。 Regarding the curve characteristics of FIG. 3 , the mechanism is further explained below. The flexible pressure sensing device 100 of this embodiment is a parallel-plate capacitor, and its capacitance can be calculated by the following formula: C = ε × A / d ε = ε 0 × ε r ε r = ε air × V air + ε sheet × V sheet +ε cylinder × V cylinder + ε fiber × V fiber , where C is the capacitance value, and ε is the distance between the parallel plates (that is, the layered structure formed by the flexible substrate 1 and the conductive layer 2 ). The overall permittivity of dielectric substances and air, A is the area of parallel plates, d is the distance between parallel plates; ε 0 is the vacuum permittivity, ε r is the relative permittivity; ε air is the dielectric constant of air Constant, V air is the volume of air, ε sheet is the dielectric constant of the layered structure 31 , V sheet is the volume of the layered structure 31 , ε cylinder is the dielectric constant of the columnar structure 32 , and V cylinder is the columnar structure 32 The volume of , ε fiber is the dielectric constant of the fiber structure 33 , and V fiber is the volume of the fiber structure 33 .

對本實施例之該可撓式壓力感測裝置100而言，由於纖維構造33為內部具有大量空隙且可大幅壓縮的結構，因此在0~9 kPa的範圍中纖維構造33內部的空氣可被大量的擠出而較大程度地影響相對介電常數，且纖維構造33的體積也會被壓縮而改變平行板之間的間距，如此一來在持續受壓下電容值就會產生較大幅度的改變，因而具有良好的壓力感測靈敏度。而在壓力大於9 kPa的範圍中，纖維構造33已經壓縮到相對較大的程度，此壓力範圍中會有相當部分的纖維構造33被壓入柱狀構造32的圓柱之間的間隙，即便持續加大施壓的力量也不容易對該複合介電結構3的體積及空氣含量造成大幅度的變化，此外平行板之間的間隙會受到層狀構造31、柱狀構造32的支撐而維持在相當小的變化程度內，因此壓力感測靈敏度便會大幅降低。For the flexible pressure sensing device 100 of the present embodiment, since the fiber structure 33 is a structure with a large number of voids and can be greatly compressed, the air inside the fiber structure 33 can be greatly compressed in the range of 0-9 kPa. Extrusion will greatly affect the relative permittivity, and the volume of the fiber structure 33 will also be compressed to change the distance between the parallel plates, so that the capacitance value will have a larger increase under continuous pressure. change, thus having good pressure sensing sensitivity. In the range of pressure greater than 9 kPa, the fiber structure 33 has been compressed to a relatively large degree, and a considerable part of the fiber structure 33 will be pressed into the gap between the cylinders of the columnar structure 32 in this pressure range, even if it continues It is not easy to increase the pressure force to cause a large change in the volume and air content of the composite dielectric structure 3. In addition, the gap between the parallel plates will be supported by the layered structure 31 and the columnar structure 32 and maintained at the same level. Within a relatively small degree of change, the pressure sensing sensitivity is greatly reduced.

參閱圖4及圖5，分別為該可撓式壓力感測裝置100之第1次(圖4)及第10000次(圖5)之壓力測試循環的電容變化量對壓力的變化曲線圖(遲滯響應曲線)。壓力測試循環是指施測過程壓力從0 kPa至5 kPa漸增(較粗的曲線)，然後再從5 kPa至0 kPa漸減(較細的曲線)，如此作為一次循環。從此種測試可以看出該可撓式壓力感測裝置100從逐漸增壓至逐漸減壓的過程中，電容變化量是否維持在穩定的狀態。從圖4來看，在第1次壓力循環測試循環中，增壓的曲線與減壓的曲線大致呈重合狀，代表電容變化量維持在很穩定的狀態，因此可知該可撓式壓力感測裝置100在增壓及減壓的過程中具有相當穩定的壓力感測表現性能。再觀察圖5的第10000次壓力循環測試的曲線，兩條曲線雖然存在一定落差，但落差保持在一定的範圍內，仍能提供可信賴的壓力感測性能。由此可知，雖然該可撓式壓力感測裝置100受壓會導致該複合介電結構3(特別是纖維構造33)的結構體被壓縮，但隨著壓力的釋放，該複合介電結構3仍大致能自行恢復到原來的狀態而維持內部結構的介電特性，如此能確保該可撓式壓力感測裝置100在長時間使用後仍具有良好的壓力感測靈敏度，具有可靠度高及耐用性佳的優點。Referring to FIG. 4 and FIG. 5 , it is a graph showing the change in capacitance versus pressure (hysteresis) of the pressure test cycle of the flexible pressure sensing device 100 for the 1st time ( FIG. 4 ) and the 10000th time ( FIG. 5 ), respectively. response curve). The pressure test cycle means that the pressure during the test is gradually increased from 0 kPa to 5 kPa (the thicker curve), and then gradually decreased from 5 kPa to 0 kPa (the thinner curve), which is regarded as a cycle. From this test, it can be seen whether the change in capacitance of the flexible pressure sensing device 100 is maintained in a stable state during the process of gradually increasing pressure to gradually reducing pressure. It can be seen from Figure 4 that in the first pressure cycle test cycle, the pressure increase curve and the pressure reduction curve roughly overlap, which means that the capacitance change is maintained in a very stable state. Therefore, it can be seen that the flexible pressure sensing The device 100 has relatively stable pressure sensing performance during pressurization and decompression. Looking at the curves of the 10,000th pressure cycle test in Figure 5, although there is a certain drop between the two curves, the drop remains within a certain range and can still provide reliable pressure sensing performance. It can be seen from this that although the flexible pressure sensing device 100 is compressed, the structure of the composite dielectric structure 3 (especially the fiber structure 33 ) will be compressed, but with the release of the pressure, the composite dielectric structure 3 will be compressed. It can still basically restore to its original state and maintain the dielectric properties of the internal structure, so that the flexible pressure sensing device 100 can still have good pressure sensing sensitivity after long-term use, and has high reliability and durability. Sexual advantages.

參照圖6，為該可撓式壓力感測裝置100在多次受壓(9 kPa)時之電容變化量對響應時間的變化曲線圖，每一個脈衝波形代表一次從施壓到釋壓的過程。從檢測數據可得知，在施壓的過程中，電容變化量的響應時間(從0至峰值所花費的時間)約為25毫秒，在釋壓的過程中，電容變化量的響應時間(從峰值至0所花費的時間)約為50毫秒，此數據表示該可撓式壓力感測裝置100在受壓、釋壓的過程中電量變化量的反應量都相當迅捷，具有良好的時間響應特性。Referring to FIG. 6 , it is a graph showing the change in capacitance versus response time of the flexible pressure sensing device 100 under multiple pressures (9 kPa). Each pulse waveform represents a process from pressure application to pressure release. . It can be known from the test data that the response time of the capacitance change (the time it takes to go from 0 to the peak value) during the pressure release process is about 25 milliseconds. During the pressure release process, the response time of the capacitance change (from The time it takes for the peak value to reach 0) is about 50 milliseconds. This data indicates that the flexible pressure sensing device 100 responds very quickly to the amount of change in electricity during the process of pressurization and depressurization, and has good time response characteristics. .

參閱圖7及圖8，為透過9 kPa之壓力對該可撓式壓力感測裝置100施壓第1~10次(圖7)以及第9991~10000次(圖8)之電容變化量曲線圖。從圖中的波形可知，在10000次的反覆施壓過程中，該可撓式壓力感測裝置100的電容變化量基本上處於穩定的數值範圍中，最大值與最小值的落差僅約4%，代表經長時間反覆施壓後，該可撓式壓力感測裝置100仍能維持良好且可靠的壓力感測靈敏度表現。Referring to FIG. 7 and FIG. 8 , it is a graph showing the capacitance change of the flexible pressure sensing device 100 for the 1st to 10th times ( FIG. 7 ) and the 9991st to 10,000th times ( FIG. 8 ) to press the flexible pressure sensing device 100 with a pressure of 9 kPa . It can be seen from the waveforms in the figure that during 10,000 repeated pressure applications, the capacitance change of the flexible pressure sensing device 100 is basically in a stable numerical range, and the drop between the maximum value and the minimum value is only about 4%. , which means that the flexible pressure sensing device 100 can still maintain a good and reliable pressure sensing sensitivity performance after repeated pressure application for a long time.

參閱圖9及圖10，為將該可撓式壓力感測裝置100以50度的角度彎折，並以9 kPa之壓力施壓之第1~10次(圖9)及第4991~5000次(圖10)的電容變化量曲線圖。從圖中的波形看以看出，在5000次的反覆施壓過程中，該可撓式壓力感測裝置100的電容變化量基本上處於穩定的數值範圍中，最大值與最小值的落差約5%，代表在彎折狀態下經長時間反覆施壓後，該可撓式壓力感測裝置100仍能保持良好且可靠的壓力感測靈敏度表現。除此之外，將該可撓式壓力感測裝置100恢復為非彎折狀態後，該可撓式壓力感測裝置100的壓力感測靈敏性大致維持與彎折測試前相近，表示該可撓式壓力感測裝置100的整體結構確實不會因為長時間彎折使用而受到破壞。Referring to FIG. 9 and FIG. 10 , the flexible pressure sensing device 100 is bent at an angle of 50 degrees, and the pressure is applied with a pressure of 9 kPa for the 1st to 10th times ( FIG. 9 ) and the 4991st to 5000th times (Fig. 10) is a graph of capacitance change. It can be seen from the waveforms in the figure that during 5000 times of repeated pressure application, the capacitance change of the flexible pressure sensing device 100 is basically in a stable numerical range, and the drop between the maximum value and the minimum value is about 5%, which means that the flexible pressure sensing device 100 can still maintain a good and reliable pressure sensing sensitivity performance after being repeatedly pressed for a long time in a bent state. In addition, after the flexible pressure sensing device 100 is restored to a non-bending state, the pressure sensing sensitivity of the flexible pressure sensing device 100 remains approximately the same as before the bending test, indicating that the flexible pressure sensing device 100 can The overall structure of the flexible pressure sensing device 100 will not be damaged due to prolonged bending and use.

參閱圖11及圖12，為將該可撓式壓力感測裝置100以略為撓曲的方式貼附於一受試者的手腕上，記錄心動圖(apex cardiogram, ACG)所獲得之電容變化量對時間的波形圖，從該圖可獲得之血液動力學變化訊息。其中，圖12是圖11之虛線方框處的放大圖，標示P1處為收縮壓峰值，P2處為反射收縮壓峰值，P3處為重搏波，P4處為舒張期峰值，P5處為舒張末端。從圖11及圖12處可得知，該可撓式壓力感測裝置100能穩定且準確地量測出心動圖的波形，並能從中清楚得知P1~P5的量測數據以供評估檢測結果，如此可證明該可撓式壓力感測裝置100確實可運用於須具備可撓曲性、高靈敏性、響應時間快等性能之穿戴式生醫量測裝置，並且基於裝置特性亦能運用於其他各式不同類型的裝置。Referring to FIG. 11 and FIG. 12 , in order to attach the flexible pressure sensing device 100 to the wrist of a subject in a slightly flexed manner, record the capacitance change obtained by apex cardiogram (ACG) A waveform graph over time from which information on hemodynamic changes can be obtained. Among them, Fig. 12 is an enlarged view of the dotted box in Fig. 11, indicating that P1 is the peak systolic blood pressure, P2 is the peak reflected systolic blood pressure, P3 is the diastolic wave, P4 is the diastolic peak, and P5 is the diastolic end. . It can be seen from FIG. 11 and FIG. 12 that the flexible pressure sensing device 100 can stably and accurately measure the waveform of the cardiogram, and can clearly know the measurement data of P1 to P5 for evaluation and detection. As a result, it can be proved that the flexible pressure sensing device 100 can indeed be used in a wearable biomedical measurement device that requires flexibility, high sensitivity, and fast response time, and can also be used based on device characteristics. on various other types of devices.

參閱圖13，為第一實施例之該可撓式壓力感測裝置100的變化實施態樣。於此變化實施態樣中，該可撓式壓力感測裝置100的該複合介電結構3包括層狀構造31、柱狀構造32及纖維構造33，柱狀構造32形成於層狀構造31的一表面，纖維構造33夾設於柱狀構造32及其中一導電層2之間。就層狀構造31及柱狀構造32來說，兩者相較於前述圖1之實施方式僅有一半之結構。此外，於該變化實施態樣中該纖維構造33的成分未含鈦酸鋇。Referring to FIG. 13 , it is a modified implementation of the flexible pressure sensing device 100 of the first embodiment. In this variant embodiment, the composite dielectric structure 3 of the flexible pressure sensing device 100 includes a layered structure 31 , a columnar structure 32 and a fiber structure 33 , and the columnar structure 32 is formed in the layered structure 31 . On one surface, the fiber structure 33 is sandwiched between the columnar structure 32 and one of the conductive layers 2 . As for the layered structure 31 and the columnar structure 32, they are only half the structure compared to the above-mentioned embodiment of FIG. 1 . In addition, in this modified embodiment, the component of the fiber structure 33 does not contain barium titanate.

參閱圖14，為圖13之變化實施態樣的電容變化率對壓力的變化曲線圖，從圖中可得知，在0~6 kPa的壓力區間中，該可撓式壓力感測裝置100的壓力感測靈敏度約為0.6 kPa -1，此數值相對於圖1之實施方式較低，此乃因該纖維構造33的未含鈦酸鋇之故，但在整體結構上相對較為薄型，因而可運用於薄型化裝置的應用。 Referring to FIG. 14 , it is a graph showing the change of the capacitance change rate versus pressure of the variation of FIG. 13 . It can be seen from the figure that in the pressure range of 0-6 kPa, the flexible pressure sensing device 100 has a The pressure sensing sensitivity is about 0.6 kPa -1 , which is lower than the embodiment of FIG. 1 , because the fiber structure 33 does not contain barium titanate, but the overall structure is relatively thin, so it can be It is used in the application of thinning device.

參閱圖15，為本發明可撓式壓力感測裝置100的第二實施例。於第二實施例中，該可撓式壓力感測裝置100同樣包含二可撓式基材1、二導電層2及一複合介電結構3，然而該複合介電結構3的組成構造不同於第一實施例，係包括層狀構造31、柱狀構造32及多孔構造34。柱狀構造32是設置在層狀構造31的兩側，多孔構造34是形成於層狀構造31及柱狀構造32之中。就製作方式來說，層狀構造31及柱狀構造32的製作方式大致與前述第一實施例相同，主要差異在於製作過程中會將聚二甲基矽氧烷與水透過界面活性劑互溶，聚二甲基矽氧烷、界面活性劑與鈦酸鋇以1 : 0.05 : 0.2比例混和得到油相(oil phase)，以純水作為水相(water phase)，再將油相與水相以1 : 0.8比例油水互溶並攪拌均勻，而後以真空脫泡方式去除溶液內部的氣泡即可得到乳白色溶液。隨後，將此溶液旋塗至如0019段所述的具有凹孔的光阻層上，並在飽和蒸汽壓環境中烘烤80℃2小時，在不蒸發水分情況下固化聚二甲基矽氧烷，隨後再將經上述方式製得的半成品移出飽和蒸汽壓環境烤100℃來烤乾水分，而後浸泡至丙酮中使光阻層溶解，即可得到含層狀構造31及柱狀構造32且內部形成多孔構造34的複合介電結構3。類似於0019段所述，上述過程可製得圖15中所示的該複合介電結構3的半數結構，只要再重複執行上述製程步驟便可製得另一半結構，將兩結構結合便可完成圖15之該複合介電結構3的製作。上述製作過程中添加鈦酸鋇是為了提升該複合介電結構3之介電常數，以提升壓力感測之性能表現，但第二實施例中該複合介電結構3也可以如0030段的變化實施態樣般不加入鈦酸鋇成分，具體實施方式可視需要而定。如前述說明，由於該等可撓式基材1、該等導電層2之間的空氣體積以及間距會影響介電常數，在第二實施例中形成多孔構造34後，該可撓式壓力感測裝置100受壓時有可能會將多孔構造34中蘊含的空氣擠出，而且也會讓層狀構造31、柱狀構造32具有更大程度的可壓縮性，因而有助於壓力感測靈敏度的提升，並實現不同於第一實施例的壓力感測特性。Referring to FIG. 15 , it is a second embodiment of the flexible pressure sensing device 100 of the present invention. In the second embodiment, the flexible pressure sensing device 100 also includes two flexible substrates 1 , two conductive layers 2 and a composite dielectric structure 3 , but the composition structure of the composite dielectric structure 3 is different from The first embodiment includes a layered structure 31 , a columnar structure 32 and a porous structure 34 . The columnar structure 32 is provided on both sides of the layered structure 31 , and the porous structure 34 is formed in the layered structure 31 and the columnar structure 32 . As far as the manufacturing method is concerned, the manufacturing method of the layered structure 31 and the columnar structure 32 is basically the same as that of the aforementioned first embodiment. Polydimethylsiloxane, surfactant and barium titanate are mixed in a ratio of 1: 0.05: 0.2 to obtain an oil phase (oil phase), pure water is used as a water phase (water phase), and then the oil phase and the water phase are mixed with The 1:0.8 ratio of oil and water is mixed with each other and stirred evenly, and then the bubbles inside the solution are removed by vacuum defoaming to obtain a milky white solution. Subsequently, this solution was spin-coated onto the photoresist layer with concave holes as described in paragraph 0019, and baked at 80°C for 2 hours in a saturated vapor pressure environment to cure the polydimethylsiloxane without evaporating moisture Then, the semi-finished product prepared in the above method is removed from the saturated vapor pressure environment and baked at 100°C to dry the moisture, and then soaked in acetone to dissolve the photoresist layer, and the layered structure 31 and the columnar structure 32 can be obtained. The composite dielectric structure 3 of the porous structure 34 is formed inside. Similar to the description in paragraph 0019, the above process can produce half of the structure of the composite dielectric structure 3 shown in FIG. 15 , and the other half of the structure can be produced by repeating the above process steps, and the combination of the two structures can be completed. Fabrication of the composite dielectric structure 3 shown in FIG. 15 . The purpose of adding barium titanate in the above manufacturing process is to increase the dielectric constant of the composite dielectric structure 3 to improve the performance of pressure sensing, but in the second embodiment, the composite dielectric structure 3 can also be changed as in paragraph 0030 Generally, the barium titanate component is not added in the embodiment, and the specific embodiment can be determined according to the needs. As described above, since the volume of air and the distance between the flexible substrates 1 and the conductive layers 2 will affect the dielectric constant, after the porous structure 34 is formed in the second embodiment, the flexible pressure sensitive When the measuring device 100 is pressurized, the air contained in the porous structure 34 may be squeezed out, and the laminar structure 31 and the columnar structure 32 will have a greater degree of compressibility, thereby contributing to the pressure sensing sensitivity , and realizes pressure sensing characteristics different from those of the first embodiment.

參閱圖16，在第二實施例之電容變化率對施壓壓力的測試中，可得知於0~5 kPa的壓力區間內，該可撓式壓力感測裝置100具有7.847 kPa -1之壓力感測靈敏度，與第一實施例的壓力感測靈敏度5.0kPa -1兩者都具備良好的壓力感測靈敏度表現。 Referring to FIG. 16 , in the test of the capacitance change rate against the applied pressure in the second embodiment, it can be known that the flexible pressure sensing device 100 has a pressure of 7.847 kPa −1 in the pressure range of 0 to 5 kPa Both the sensing sensitivity and the pressure sensing sensitivity 5.0 kPa -1 of the first embodiment have good pressure sensing sensitivity performance.

參閱圖17及圖18，分別為第二實施例之該可撓式壓力感測裝置100的第1次(圖17)及第10000次(圖18)之壓力測試循環的電容變化量對壓力的變化曲線圖(遲滯響應曲線)。如前述說明，壓力測試循環是指施測過程壓力從0 kPa至5 kPa漸增(線條較粗的曲線)，然後再從5 kPa至0 kPa漸減(線條較細的曲線)，如此作為一次循環。從圖17及圖18可得知，在經過大量的壓力循環測試後，該可撓式壓力感測裝置100的增壓曲線及減壓曲線仍大致維持一致，可得知在第二實施例中該可撓式壓力感測裝置100受壓會導致該複合介電結構(特別是多孔構造34)的結構體被壓縮，但隨著壓力的釋放，該複合介電結構3仍能恢復到壓縮前的狀態，如此可證明第二實施例之該可撓式壓力感測裝置100在長期使用後仍具有良好的壓力感測靈敏度。Referring to FIG. 17 and FIG. 18 , respectively, the capacitance variation versus pressure of the first ( FIG. 17 ) and 10,000 ( FIG. 18 ) pressure test cycles of the flexible pressure sensing device 100 of the second embodiment Variation graph (hysteresis response curve). As explained above, the pressure test cycle means that the pressure during the test is gradually increased from 0 kPa to 5 kPa (the curve with a thicker line), and then gradually decreased from 5 kPa to 0 kPa (the curve with a thinner line), which is regarded as a cycle. . It can be seen from FIG. 17 and FIG. 18 that after a large number of pressure cycle tests, the pressure-increasing curve and the pressure-reducing curve of the flexible pressure sensing device 100 are still roughly the same. It can be seen that in the second embodiment Compression of the flexible pressure sensing device 100 will cause the composite dielectric structure (especially the porous structure 34 ) to be compressed, but with the release of the pressure, the composite dielectric structure 3 can still recover to before compression It can be proved that the flexible pressure sensing device 100 of the second embodiment still has good pressure sensing sensitivity after long-term use.

參閱圖19及圖20，為以9 kPa之壓力對第二實施例之該可撓式壓力感測裝置100施壓第1~10次(圖19)以及第9991~10000次(圖20)之電容變化量曲線圖。從圖中的波形可知，在10000次的反覆施壓過程中，該可撓式壓力感測裝置100的電容變化量基本上處於穩定的數值範圍中，代表經長時間反覆施壓後，該第二實施例之可撓式壓力感測裝置100仍能保持良好且可靠的壓力感測靈敏度表現。Referring to FIG. 19 and FIG. 20 , it is the 1st to 10th times ( FIG. 19 ) and the 9991st to 10,000th times ( FIG. 20 ) of pressing the flexible pressure sensing device 100 of the second embodiment with a pressure of 9 kPa Capacitance change curve graph. It can be seen from the waveforms in the figure that during 10,000 repeated pressure applications, the capacitance change of the flexible pressure sensing device 100 is basically in a stable value range, which means that after repeated pressure application for a long time, the first The flexible pressure sensing device 100 of the second embodiment can still maintain a good and reliable pressure sensing sensitivity performance.

綜合前述說明，本發明藉由該複合介電結構3的結構配置及材質選用，能夠實現高靈敏度、高響應速度、高可靠度及耐用性的可撓式壓力感測裝置100。此外，該可撓式壓力感測裝置100整體為可撓式結構，適合整合於不同的應用領域。此外，前述實施例雖然揭露該可撓式壓力感測裝置100的各結構所使用的材料，但在實施上並不以此等材料為限，例如該等可撓式基材1可選用聚醯亞胺薄膜之外的任何可撓式絕緣膜材，該等導電層2可選用石墨烯以外的任何可撓式導電材質，該等複合介電結構3除了使用聚二甲基矽氧烷、鈦酸鋇、聚偏二氟乙烯等材質外，也可以選用其他具可撓性、高介電常數的材料來製作。因此，本發明可撓式壓力感測裝置100確實能達成本發明的目的。Based on the foregoing description, the present invention can realize the flexible pressure sensing device 100 with high sensitivity, high response speed, high reliability and durability through the structural configuration and material selection of the composite dielectric structure 3 . In addition, the flexible pressure sensing device 100 is a flexible structure as a whole, which is suitable for integration in different application fields. In addition, although the foregoing embodiments disclose the materials used in the structures of the flexible pressure sensing device 100 , the implementation is not limited to these materials. For example, the flexible substrates 1 can be made of polyamide Any flexible insulating film material other than imine film, these conductive layers 2 can be selected from any flexible conductive material other than graphene, these composite dielectric structures 3 are made of polydimethylsiloxane, titanium In addition to barium acid, polyvinylidene fluoride and other materials, other materials with flexibility and high dielectric constant can also be used. Therefore, the flexible pressure sensing device 100 of the present invention can indeed achieve the purpose of the present invention.

惟以上所述者，僅為本發明之實施例而已，當不能以此限定本發明實施之範圍，凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾，皆仍屬本發明專利涵蓋之範圍內。However, the above are only examples of the present invention, and should not limit the scope of the present invention. Any simple equivalent changes and modifications made according to the scope of the application for patent of the present invention and the content of the patent specification are still within the scope of the present invention. within the scope of the invention patent.

100:可撓式壓力感測裝置 1:可撓式基材 2:導電層 3:複合介電結構 31:層狀構造 32:柱狀構造 33:纖維構造 34:多孔構造 100: Flexible pressure sensing device 1: Flexible substrate 2: Conductive layer 3: Composite Dielectric Structure 31: Layered Structure 32: Columnar structure 33: Fiber Construction 34: Porous Structure

本發明之其他的特徵及功效，將於參照圖式的實施方式中清楚地呈現，其中： 圖1是 一側視示意圖，說明本發明可撓式壓力感測裝置的第一實施例； 圖2是藉由光學顯微鏡拍攝該可撓式壓力感測裝置之側剖視圖； 圖3是一曲線圖，說明該第一實施例之電容變化率對壓力的變化曲線； 圖4一曲線圖，說明該第一實施例之第1次壓力測試循環的電容變化量對壓力的變化曲線； 圖5是一對應於圖4之曲線圖，說明該第一實施例之第10000次壓力測試循環的電容變化量對壓力的變化曲線； 圖6是一曲線圖，說明該第一實施例在固定施壓下之電容變化量對響應時間的變化曲線； 圖7是一曲線圖，說明該第一實施例在固定施壓下之第1次至第10次的電容變化量的曲線狀態； 圖8是一對應於圖7之曲線圖，說明該第一實施例在固定施壓下之第9991次至第10000次的電容變化量的曲線狀態； 圖9是一曲線圖，說明該第一實施例處於彎折狀態下以固定壓力施壓之第1次至第10次的電容變化量的曲線狀態； 圖10是一對應於圖9之曲線圖，說明該第一實施例處於彎折狀態且以固定壓力施壓之第4991次至第5000次的電容變化量的曲線狀態； 圖11是一曲線圖，說明以該第一實施例量測心搏之電容變化量對響應時間的曲線狀態； 圖12是對應於圖11的虛線黑框處的放大曲線圖； 圖13是 一側視示意圖，說明該第一實施例的變化實施態樣； 圖14是一曲線圖，說明第一實施例的不同實施態樣的電容變化率對壓力的變化曲線； 圖15是一側視示意圖，說明本發明可撓式壓力感測裝置的第二實施例； 圖16是一曲線圖，說明該第二實施例之電容變化率對壓力的變化曲線； 圖17是一曲線圖，說明該第二實施例之第1次壓力測試循環的電容變化率對壓力的變化曲線； 圖18是一對應於圖17之曲線圖，說明該第一實施例之第10000次壓力測試循環的電容變化率對壓力的變化曲線； 圖19是一曲線圖，說明該第二實施例在固定施壓下之第1次至第10次的電容量的曲線狀態；及 圖20是一對應於圖19之曲線圖，說明該第二實施例在固定施壓下之第9991次至第10000次的電容變化量的曲線狀態。 Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein: 1 is a schematic side view illustrating a first embodiment of the flexible pressure sensing device of the present invention; 2 is a side cross-sectional view of the flexible pressure sensing device photographed by an optical microscope; FIG. 3 is a graph illustrating the change curve of the capacitance change rate versus pressure of the first embodiment; FIG. 4 is a graph illustrating the change curve of the capacitance change versus pressure in the first pressure test cycle of the first embodiment; FIG. 5 is a graph corresponding to FIG. 4 , illustrating a change curve of capacitance change versus pressure for the 10,000th pressure test cycle of the first embodiment; FIG. 6 is a graph illustrating the change curve of the capacitance change amount to the response time under the fixed pressure of the first embodiment; FIG. 7 is a graph illustrating the curve state of the capacitance variation from the 1st time to the 10th time under the fixed pressure of the first embodiment; FIG. 8 is a graph corresponding to FIG. 7 , illustrating the state of the curve of the capacitance change from the 9991st to the 10000th time under a fixed pressure application of the first embodiment; FIG. 9 is a graph illustrating the curve state of the capacitance change from the 1st to the 10th time when the first embodiment is pressed with a fixed pressure in a bent state; FIG. 10 is a graph corresponding to FIG. 9 , illustrating the curve state of the capacitance change from the 4991st to the 5000th time when the first embodiment is in a bent state and pressed with a constant pressure; FIG. 11 is a graph illustrating the state of the curve of the change in capacitance of the measured heartbeat versus the response time according to the first embodiment; FIG. 12 is an enlarged graph corresponding to the dashed black frame of FIG. 11; Figure 13 is a schematic side view illustrating a variant implementation of the first embodiment; FIG. 14 is a graph illustrating the change of capacitance change rate versus pressure for different implementations of the first embodiment; 15 is a schematic side view illustrating a second embodiment of the flexible pressure sensing device of the present invention; FIG. 16 is a graph illustrating the change curve of the capacitance change rate versus pressure of the second embodiment; FIG. 17 is a graph illustrating the rate of change of capacitance versus pressure for the first pressure test cycle of the second embodiment; FIG. 18 is a graph corresponding to FIG. 17 , illustrating the change of capacitance change rate versus pressure for the 10,000th pressure test cycle of the first embodiment; FIG. 19 is a graph illustrating the state of the capacitance curve for the 1st to 10th times under constant pressure application of the second embodiment; and FIG. FIG. 20 is a graph corresponding to FIG. 19 , illustrating the curve state of the capacitance change from the 9991st to the 10000th time under a constant pressure applied to the second embodiment.

100:可撓式壓力感測裝置 100: Flexible pressure sensing device

1:可撓式基材 1: Flexible substrate

2:導電層 2: Conductive layer

3:複合介電結構 3: Composite Dielectric Structure

31:層狀構造 31: Layered Structure

32:柱狀構造 32: Columnar structure

33:纖維構造 33: Fiber Construction

Claims (6)

一種可撓式壓力感測裝置，包含：二可撓式基材，彼此相互間隔；二導電層，分別設置於該等可撓式基材的內表面；及一複合介電結構，夾設於該等導電層之間，且在受撓曲壓擠後能恢復原狀，該複合介電結構包括層狀構造、柱狀構造及纖維構造，柱狀構造分別設置於層狀構造的兩相反側並分別往該等導電層延伸，纖維構造分別夾設在柱狀構造及該等導電層之間。 A flexible pressure sensing device, comprising: two flexible substrates, spaced apart from each other; two conductive layers, respectively disposed on the inner surfaces of the flexible substrates; and a composite dielectric structure sandwiched between Between the conductive layers, and after being flexed and squeezed, the composite dielectric structure includes a layered structure, a columnar structure and a fiber structure, and the columnar structures are respectively arranged on two opposite sides of the layered structure and Extending toward the conductive layers respectively, the fiber structures are respectively sandwiched between the columnar structures and the conductive layers. 如請求項1所述之可撓式壓力感測裝置，其中，柱狀構造具有多個間隔並排的圓柱，各圓柱的直徑介於15微米至40微米。 The flexible pressure sensing device according to claim 1, wherein the columnar structure has a plurality of cylinders arranged side by side at intervals, and the diameter of each cylinder is between 15 microns and 40 microns. 如請求項1所述之可撓式壓力感測裝置，其中，層狀構造及柱狀構造的材質包括聚二甲基矽氧烷。 The flexible pressure sensing device according to claim 1, wherein the material of the layered structure and the columnar structure comprises polydimethylsiloxane. 如請求項1所述之可撓式壓力感測裝置，其中，纖維構造是以靜電紡絲方式製作之含鈦酸鋇成分的聚偏二氟乙烯材質纖維。 The flexible pressure sensing device according to claim 1, wherein the fiber structure is a polyvinylidene fluoride material fiber containing barium titanate produced by electrospinning. 如請求項4所述之可撓式壓力感測裝置，其中，纖維構造的鈦酸鋇成分的重量百分比範圍為5~25%。 The flexible pressure sensing device according to claim 4, wherein the weight percentage of the barium titanate component of the fiber structure ranges from 5% to 25%. 如請求項1所述之可撓式壓力感測裝置，其中，該等可撓式基材的材質包含聚醯亞胺，該等導電層的材質包含石墨烯。 The flexible pressure sensing device according to claim 1, wherein the material of the flexible substrates comprises polyimide, and the material of the conductive layers comprises graphene.
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TWI615368B (en) * 2012-10-12 2018-02-21 康寧公司 Articles with a low-elastic modulus layer and retained strength
US20160033343A1 (en) * 2014-08-01 2016-02-04 The Board Of Trustees Of The Leland Stanford Junior University Methods and apparatus concerning multi-tactile sensitive (e-skin) pressure sensors
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