TWI773235B - Rotor structure for long-term effective operation - Google Patents

Rotor structure for long-term effective operation Download PDF

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TWI773235B
TWI773235B TW110112662A TW110112662A TWI773235B TW I773235 B TWI773235 B TW I773235B TW 110112662 A TW110112662 A TW 110112662A TW 110112662 A TW110112662 A TW 110112662A TW I773235 B TWI773235 B TW I773235B
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rotor blade
rotor
layer
chamber
blade layer
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TW110112662A
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TW202240076A (en
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孫世源
方志強
陳建勳
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日揚科技股份有限公司
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Priority to JP2021095166A priority patent/JP2022161786A/en
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Publication of TW202240076A publication Critical patent/TW202240076A/en

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Abstract

A rotor structure for long-term effective operation is disclosed. The rotor structure comprises: a rotor body and a plurality of rotor blades. The rotor blades are disposed around the outer side of the rotor body and vertically distributed to form a plurality of rotor blade layers. The rotor blade layers have at least one first rotor blade layer and a plurality of second rotor blade layers. The end of the first rotor blade layer is located at a first horizontal distance from the side wall of a containing space of a turbo molecular vacuum pump, and the end of the second rotor blade layers are located at a second horizontal distance from the side wall of the containing space. The first horizontal distance is substantially greater than the second horizontal distance such that the rotor blades are protected from contacting the deposits generated on the ladder section of the containing space during the rotation process under the condition of maintaining the pumping efficiency, thus effectively preventing the rotor blades from breaking due to impact by vibration and reducing the maintenance frequency such that the purpose of long-term effective operation can be achieved.

Description

長效運轉的轉子結構Rotor structure for long-term operation

本創作是有關於一種轉子結構，特別是有關於一種長效運轉的轉子結構。This creation is about a rotor structure, especially a long-lasting rotor structure.

近年來由於半導體產業蓬勃發展，因而造成半導體前段製程之相關設備需求量大增，其中高真空系統中的心臟元件─渦輪分子式真空泵更成為需求量極大之高真空系統元件。目前的渦輪分子式真空泵，係可驅動連結於其上之轉子以進行真空抽氣之製程，氣體分子經由轉子葉片之帶動而進入下一層之定子葉片，而氣體分子經由撞擊定子葉片而轉向之後，便可進入下一層之轉子葉片。渦輪分子式真空泵之作用原理係利用高速旋轉之傾斜葉片使系統中原本混亂運動之氣體分子朝出口運動，並利用多層轉子葉片與定子葉片之交錯排列來提高其壓縮比。故渦輪分子式真空泵具有高真空度、高排氣效率以及無油氣污染等特性。惟，在渦輪分子式真空泵的容室中，還是有少量空間，例如階梯段，特別容易積存粉塵顆粒。因此，傳統半導體等製程中時常需要停機清除沉積物，否則轉子葉片容易因碰觸沉積物而在高速旋轉時產生晃動現象，進而撞擊其他葉片而發生碎裂現象，故傳統維修週期相當短。In recent years, due to the booming development of the semiconductor industry, the demand for equipment related to the front-end semiconductor process has greatly increased. Among them, the turbomolecular vacuum pump, the heart component of the high vacuum system, has become a high vacuum system component in great demand. The current turbomolecular vacuum pump can drive the rotor connected to it to carry out the vacuum pumping process. The gas molecules are driven by the rotor blades and enter the stator blades of the next layer, and after the gas molecules are turned by hitting the stator blades, the Access to the rotor blades of the next layer. The working principle of the turbomolecular vacuum pump is to use the high-speed rotating inclined blades to make the gas molecules in the system move toward the outlet, and use the staggered arrangement of the multi-layer rotor blades and the stator blades to improve its compression ratio. Therefore, the turbo molecular vacuum pump has the characteristics of high vacuum degree, high exhaust efficiency and no oil and gas pollution. However, in the chamber of the turbomolecular vacuum pump, there is still a small amount of space, such as the step section, which is particularly prone to accumulation of dust particles. Therefore, in traditional semiconductor processes, it is often necessary to stop the process to remove the deposits. Otherwise, the rotor blades are prone to shaking due to contact with the deposits when they rotate at high speed, and then hit other blades to cause fragmentation. Therefore, the traditional maintenance cycle is quite short.

有鑑於上述習知技藝之問題，本創作之一目的就是在提供一種長效運轉的轉子結構，以解決轉子葉片因碰觸真空泵之腔室內的沉積物所產生的問題。In view of the above-mentioned problems in the prior art, one objective of the present invention is to provide a rotor structure with long-term operation, so as to solve the problem caused by the rotor blades touching the sediment in the chamber of the vacuum pump.

為達前述目的，本創作提出一種長效運轉的轉子結構，適用於裝設在一渦輪分子式真空泵之一容室中，該渦輪分子式真空泵之該容室中設有一驅動裝置，該轉子結構包含：一轉子本體，設於該渦輪分子式真空泵之該容室中，且套定於該驅動裝置之一旋轉軸上，其中該驅動裝置係轉動該轉子本體；以及複數個轉子葉片，環設於該轉子本體之外側且縱向分佈形成複數個轉子葉片層，其中該些轉子葉片層具有至少一第一轉子葉片層以及複數個第二轉子葉片層，其中該第一轉子葉片層之尾端係以一第一橫向距離相距該容室之一側壁，該些第二轉子葉片層之尾端係以一第二橫向距離相距該容室之該側壁，該第一橫向距離係實質大於該第二橫向距離，藉以在保持抽氣效率的情況下，防止第一轉子葉片層在旋轉過程中摩擦碰觸容室之階梯段上之沉積物而產生晃動，能有效防止第一轉子葉片層因撞擊其他葉片而碎裂，故能減少維修頻率，達到長效運轉的目的。In order to achieve the aforementioned purpose, the present invention proposes a rotor structure with long-term operation, which is suitable for being installed in a chamber of a turbomolecular vacuum pump, and a drive device is arranged in the chamber of the turbomolecular vacuum pump, and the rotor structure includes: a rotor body, disposed in the chamber of the turbomolecular vacuum pump, and sleeved on a rotating shaft of the driving device, wherein the driving device rotates the rotor body; and a plurality of rotor blades, which are arranged around the rotor The outer side of the body is distributed longitudinally to form a plurality of rotor blade layers, wherein the rotor blade layers have at least a first rotor blade layer and a plurality of second rotor blade layers, wherein the rear end of the first rotor blade layer is tied with a first rotor blade layer. A lateral distance is apart from a side wall of the chamber, the trailing ends of the second rotor blade layers are apart from the side wall of the chamber by a second lateral distance, the first lateral distance is substantially greater than the second lateral distance, In order to maintain the suction efficiency, the first rotor blade layer can be prevented from swaying due to friction and contact with the sediment on the stepped section of the chamber during the rotation process, and the first rotor blade layer can be effectively prevented from being broken by impacting other blades. Therefore, it can reduce the maintenance frequency and achieve the purpose of long-term operation.

其中，該渦輪分子式真空泵更包含一槽體以及複數個定子葉片，該槽體設於該渦輪分子式真空泵之一容置空間中，該些定子葉片係環設於複數個間隔板上，該些間隔板係依序堆疊於該槽體上，藉以使得該些定子葉片縱向分佈形成複數個定子葉片層，其中該些定子葉片層與該些轉子葉片層係縱向交錯設置，且該些間隔板及該槽體係共同圍繞出該容室，其中該階梯段位於該槽體上。Wherein, the turbomolecular vacuum pump further includes a groove body and a plurality of stator blades, the groove body is arranged in a accommodating space of the turbomolecular vacuum pump, the stator blades are tethered to a plurality of spacers, and the spacers The plates are sequentially stacked on the slot body, so that the stator blades are longitudinally distributed to form a plurality of stator blade layers, wherein the stator blade layers and the rotor blade layers are arranged longitudinally staggered, and the spacer plates and the The groove system together surrounds the container, wherein the stepped section is located on the groove body.

其中，該第一轉子葉片層為該些轉子葉片層中之一最底層轉子葉片層，該第一轉子葉片層之高度低於該些定子葉片層中之一最底層定子葉片層之高度，該第一轉子葉片層係經過移除程序，使得該第一轉子葉片層之尾端以該第一橫向距離相距該容室之該側壁。Wherein, the first rotor blade layer is a bottommost rotor blade layer among the rotor blade layers, the height of the first rotor blade layer is lower than the height of the bottommost stator blade layer among the stator blade layers, and the The first rotor blade layer is subjected to a removal process such that the trailing end of the first rotor blade layer is spaced from the side wall of the chamber by the first lateral distance.

其中，該第一橫向距離與該第二橫向距離之數值差為小於30mm。Wherein, the numerical difference between the first lateral distance and the second lateral distance is less than 30 mm.

其中，該第一橫向距離與該第二橫向距離之數值差小於或等於鄰接該第一轉子葉片層之該些第二轉子葉片層中之一者之長度值。Wherein, the numerical difference between the first lateral distance and the second lateral distance is less than or equal to a length value of one of the second rotor blade layers adjacent to the first rotor blade layer.

其中，該第一轉子葉片層之長度實質小於鄰接該第一轉子葉片層之該些第二轉子葉片層中之一者之長度。Wherein, the length of the first rotor blade layer is substantially less than the length of one of the second rotor blade layers adjacent to the first rotor blade layer.

其中，該第一轉子葉片層之長度實質相同於鄰接該第一轉子葉片層之該些第二轉子葉片層中之一者之長度。Wherein, the length of the first rotor blade layer is substantially the same as the length of one of the second rotor blade layers adjacent to the first rotor blade layer.

其中，該第一橫向距離係實質大於一第一數值，該第二橫向距離係實質相同於或小於該第一數值，該第一數值介於0.5 mm至3 mm之間。Wherein, the first lateral distance is substantially greater than a first value, the second lateral distance is substantially the same as or less than the first value, and the first value is between 0.5 mm and 3 mm.

其中，該第一轉子葉片層為該些轉子葉片層中之一最底層轉子葉片層，該第一轉子葉片層之底端係以一縱向距離相距該容室之該階梯段之頂緣，該縱向距離係實質大於或等於一第二數值，該第二數值介於2 mm至4.5 mm之間。Wherein, the first rotor blade layer is a bottommost rotor blade layer among the rotor blade layers, the bottom end of the first rotor blade layer is separated from the top edge of the stepped section of the chamber by a longitudinal distance, the The longitudinal distance is substantially greater than or equal to a second value, the second value being between 2 mm and 4.5 mm.

承上所述，本創作之長效運轉的轉子結構之優點在於僅增加最底層轉子葉片層與容室之側壁之第一橫向距離，即可在保持抽氣效率的情況下，有效防止最底層轉子葉片層在旋轉過程中碰觸容室之階梯段上之沉積物。此外，藉由進一步使轉子葉片層中之最底層轉子葉片層之底端相距容室之階梯段之頂緣之縱向距離實質大於上述之第二數值，也可有效防止最底層轉子葉片層在旋轉過程中摩擦碰觸容室之階梯段上之沉積物。或者，本創作增加最底層轉子葉片層與容室之側壁之橫向距離以及同時增加最底層轉子葉片層之底端相距容室之階梯段之頂緣之縱向距離，也可有效防止最底層轉子葉片層在旋轉過程中摩擦碰觸容室之階梯段上之沉積物，導致撞擊其他轉子葉片或定子葉片。故，本創作可藉由減少維修頻率，以達到長效運轉的目的。Continuing from the above, the advantage of the long-running rotor structure of the present invention is that only by increasing the first lateral distance between the bottommost rotor blade layer and the side wall of the chamber, it can effectively prevent the bottommost bottom layer from being effectively prevented while maintaining the pumping efficiency. The rotor blade layer touches the sediment on the stepped section of the chamber during the rotation. In addition, by further making the longitudinal distance between the bottom end of the bottommost rotor blade layer and the top edge of the stepped section of the chamber substantially greater than the above-mentioned second value, the bottommost rotor blade layer can also be effectively prevented from rotating During the process, friction touches the sediment on the stepped section of the chamber. Alternatively, the present invention increases the lateral distance between the bottommost rotor blade layer and the side wall of the chamber and at the same time increases the longitudinal distance between the bottom end of the bottommost rotor blade layer and the top edge of the stepped section of the chamber, which can also effectively prevent the bottommost rotor blade. The layer rubs against the deposits on the stepped sections of the chamber during rotation, resulting in striking other rotor blades or stator blades. Therefore, the present invention can achieve the purpose of long-term operation by reducing the maintenance frequency.

茲為使鈞審對本創作的技術特徵及所能達到的技術功效有更進一步的瞭解與認識，謹佐以較佳的實施例及配合詳細的說明如後。In order to enable Jun Shen to have a further understanding and understanding of the technical features of this creation and the technical effects that can be achieved, I would like to provide a preferred embodiment and a detailed description as follows.

為利瞭解本創作之技術特徵、內容與優點及其所能達成之功效，茲將本創作配合圖式，並以實施例之表達形式詳細說明如下，而其中所使用之圖式，其主旨僅為示意及輔助說明書之用，未必為本創作實施後之真實比例與精準配置，故不應就所附之圖式的比例與配置關係解讀、侷限本創作於實際實施上的權利範圍。此外，為使便於理解，下述實施例中的相同元件係以相同的符號標示來說明。In order to facilitate the understanding of the technical features, content and advantages of this creation and the effects that can be achieved, this creation is hereby matched with the drawings and described in detail as follows in the form of embodiment, and the drawings used therein are only for the purpose of For the purpose of illustration and auxiliary instructions, it may not necessarily be the real scale and precise configuration after the implementation of this creation. Therefore, the proportion and configuration relationship of the attached drawings should not be interpreted or limited to the scope of rights of this creation in actual implementation. In addition, to facilitate understanding, the same elements in the following embodiments are denoted by the same symbols.

另外，在全篇說明書與申請專利範圍所使用的用詞，除有特別註明外，通常具有每個用詞使用在此領域中、在此揭露的內容中與特殊內容中的平常意義。某些用以描述本創作的用詞將於下或在此說明書的別處討論，以提供本領域技術人員在有關本創作的描述上額外的引導。In addition, the terms used in the whole specification and the scope of the patent application, unless otherwise specified, usually have the ordinary meaning of each term used in this field, in the content disclosed herein and in the special content. Certain terms used to describe the present creations are discussed below or elsewhere in this specification to provide those skilled in the art with additional guidance in the description of the present creations.

關於本文中如使用“第一”、“第二”、“第三”等，並非特別指稱次序或順位的意思，亦非用以限定本創作，其僅僅是為了區別以相同技術用語描述的組件或操作而已。Regarding the use of "first", "second", "third", etc. in this document, it does not specifically refer to the order or order, nor is it used to limit the creation, it is only to distinguish components described in the same technical terms or operation only.

其次，在本文中如使用用詞“包含”、“包括”、“具有”、“含有”等，其均為開放性的用語，即意指包含但不限於。Secondly, if the words "comprising", "including", "having", "containing" and the like are used herein, they are all open-ended words, that is, they mean including but not limited to.

請一併參閱圖1至圖4，圖1為本創作之長效運轉的轉子結構與渦輪分子式真空泵之組合剖面圖，圖2為本創作之長效運轉的轉子結構之剖面示意圖，圖3為圖1之局部放大示意圖，圖4為本創作中轉子葉片層之局部外觀示意圖。Please refer to FIG. 1 to FIG. 4 together. FIG. 1 is a cross-sectional view of the long-term operation rotor structure and the turbomolecular vacuum pump of the invention. FIG. 2 is a cross-sectional schematic diagram of the long-term operation rotor structure of the invention. FIG. 1 is a partial enlarged schematic view, and FIG. 4 is a partial appearance schematic view of the rotor blade layer in the creation.

本創作之長效運轉的轉子結構10係適用於裝設在渦輪分子式真空泵100之容室130中。其中，渦輪分子式真空泵100係經由泵體之一側之進氣口抽取製程室之製程氣體，且從泵體之另一側之出氣口排出製程氣體。其中，製程氣體例如為，但不限於，H 2、Ar、N 2、SbF 4、SBF 3、SBF 5及/或Sb 2O 3，上述製程氣體僅為舉例，並非用以限定本創作。渦輪分子式真空泵100之容室130中設有驅動裝置160。驅動裝置160可例如為，但不限於，機械式、磁浮式或混合軸承式等電力驅動設計。由於本創作之長效運轉的轉子結構10可適用於各種結構設計之渦輪分子式真空泵100及其驅動裝置160，且渦輪分子式真空泵100及其驅動裝置160之結構設計並非本創作之重點所在，故此處不另贅述。 The long-running rotor structure 10 of the present invention is suitable for being installed in the chamber 130 of the turbomolecular vacuum pump 100 . The turbomolecular vacuum pump 100 extracts the process gas in the process chamber through the air inlet on one side of the pump body, and discharges the process gas from the air outlet on the other side of the pump body. Wherein, the process gas is, for example, but not limited to, H 2 , Ar, N 2 , SbF 4 , SBF 3 , SBF 5 and/or Sb 2 O 3 . The above-mentioned process gas is only an example and is not intended to limit the present invention. A driving device 160 is provided in the chamber 130 of the turbomolecular vacuum pump 100 . The drive device 160 may be, for example, but not limited to, an electric drive design such as mechanical, magnetic, or hybrid bearing. Since the long-running rotor structure 10 of the present invention can be applied to the turbomolecular vacuum pump 100 and its driving device 160 of various structural designs, and the structural design of the turbomolecular vacuum pump 100 and its driving device 160 is not the focus of the present invention, it is here No further description.

本創作之長效運轉的轉子結構10包含轉子本體20及轉子葉片30，其中轉子本體20設於渦輪分子式真空泵100之容室130中，且套定於驅動裝置160之旋轉軸162上，藉此可透過驅動裝置160的運轉而帶動轉子本體20以一轉速轉動。轉子葉片30環設於轉子本體20之外側且縱向分佈形成複數個轉子葉片層32。轉子葉片層32具有至少一第一轉子葉片層32a以及複數個第二轉子葉片層32b(見圖2)。以Edwards P033轉子為例，第二轉子葉片層32b之數量可例如為10，但不加以限定。其中，在本創作之一實施態樣中，如圖3所示，第一轉子葉片層32a之尾端係以第一橫向距離d1相距容室130之側壁，第二轉子葉片層32b之尾端係以第二橫向距離d2相距容室130之側壁，其中本創作係使第一轉子葉片層32a為橫向內縮或縱向內縮，或者同時橫向及縱向內縮。The long-term operation rotor structure 10 of the present invention includes a rotor body 20 and rotor blades 30 , wherein the rotor body 20 is disposed in the chamber 130 of the turbomolecular vacuum pump 100 and is sleeved on the rotating shaft 162 of the driving device 160 , thereby The rotor body 20 can be driven to rotate at a rotational speed through the operation of the driving device 160 . The rotor blades 30 are arranged on the outer side of the rotor body 20 and are longitudinally distributed to form a plurality of rotor blade layers 32 . The rotor blade layer 32 has at least one first rotor blade layer 32a and a plurality of second rotor blade layers 32b (see FIG. 2 ). Taking the Edwards P033 rotor as an example, the number of the second rotor blade layers 32b may be, for example, 10, but not limited thereto. Wherein, in one embodiment of the present invention, as shown in FIG. 3 , the rear end of the first rotor blade layer 32a is separated from the side wall of the chamber 130 by a first lateral distance d1, and the rear end of the second rotor blade layer 32b It is separated from the side wall of the chamber 130 by a second lateral distance d2, wherein in the present invention, the first rotor blade layer 32a is retracted laterally or vertically, or both laterally and vertically retracted.

以橫向內縮為例，本創作可例如採用移除方式以移除部分或幾乎全部的第一轉子葉片層32a之原葉片長度，藉以使得上述之第一橫向距離d1實質大於第二橫向距離d2，或者是在製作轉子葉片時直接使得上述之第一橫向距離d1實質大於第二橫向距離d2。因此，本創作可使得渦輪分子式真空泵100在保持抽氣效率的情況下，防止轉子葉片30碰觸容室130中所產生的沉積物，特別是可防止第一轉子葉片層32a碰觸容室130之階梯段114上的沉積物。其中，第一橫向距離d1與第二橫向距離d2之數值差較佳為小於約30mm，上述之數值差可為小於鄰接第一轉子葉片層32a之第二轉子葉片層32b之長度或者為幾乎相同於此第二轉子葉片層32b之長度。第一轉子葉片層32a可為轉子葉片層32中之任一層或複數層，較佳為轉子葉片層32中之底層轉子葉片層，且更佳為最底層轉子葉片層。然而，上述數值差僅為舉例，只要第一橫向距離與第二橫向距離之數值差小於或等於鄰接第一轉子葉片層32a之第二轉子葉片層32b中之一者之長度值均可適用於本創作。Taking the lateral indentation as an example, the present invention can, for example, use a removal method to remove part or almost all of the original blade length of the first rotor blade layer 32a, so that the above-mentioned first lateral distance d1 is substantially greater than the second lateral distance d2. , or directly make the above-mentioned first lateral distance d1 substantially greater than the second lateral distance d2 when manufacturing the rotor blade. Therefore, the present invention enables the turbomolecular vacuum pump 100 to prevent the rotor blades 30 from touching the deposits generated in the chamber 130 while maintaining the pumping efficiency, and in particular, prevents the first rotor blade layer 32 a from touching the chamber 130 sediment on the stepped section 114. Wherein, the numerical difference between the first lateral distance d1 and the second lateral distance d2 is preferably less than about 30 mm, and the above numerical difference may be less than the length of the second rotor blade layer 32b adjacent to the first rotor blade layer 32a or almost the same The length of the second rotor blade layer 32b. The first rotor blade layer 32a may be any one or multiple layers of the rotor blade layers 32 , preferably the bottom rotor blade layer of the rotor blade layers 32 , and more preferably the bottommost rotor blade layer. However, the above numerical differences are only examples, as long as the numerical difference between the first lateral distance and the second lateral distance is less than or equal to the length value of one of the second rotor blade layers 32b adjacent to the first rotor blade layer 32a This creation.

在本創作之轉子結構10所適用之渦輪分子式真空泵100中，轉子結構10之轉速可達到約32,500 rpm，惟本創作不限於此，轉子結構10之轉速也可為小於約32,500 rpm。依據本創作之結構設計，轉子結構10之維修週期例如介於1~5個月之間，意即在本創作中可長達5個月不須拆卸轉子結構10以清除沉積或累積的固體顆粒或氣體反應物等沉積物，故能延長維修週期，意即減少維修頻率，達到長效運轉的目的。本創作之轉子結構10之型號例如為Edwards P033，而渦輪分子式真空泵100則為適用此轉子結構10之型號，例如: Edwards STP-H803或STP-H1303。上述轉子結構10之型號及其所適用之渦輪分子式真空泵100僅為舉例，並非用以限定本創作。經實際檢測入口壓力(torr)與氣體流量(sccm)，可發現本創作與傳統之轉子結構在入口壓力介於1x10 -5torr至1 torr之間的氣體流量(sccm)之數值曲線幾乎重疊。由此可知，相較於傳統技術，本創作確實可在保持抽氣效率的情況下，有效防止轉子葉片摩擦碰觸渦輪分子式真空泵之容室中之沉積物，進而避免產生碰撞或碎裂等情形，其中上述之沉積物例如，但不限於，製程氣體中所攜帶的固體顆粒或製程氣體之反應物。 In the turbomolecular vacuum pump 100 to which the rotor structure 10 of the present invention is applied, the rotational speed of the rotor structure 10 can reach about 32,500 rpm, but the present invention is not limited to this, and the rotational speed of the rotor structure 10 can also be less than about 32,500 rpm. According to the structural design of the present invention, the maintenance period of the rotor structure 10 is, for example, between 1 and 5 months, which means that the rotor structure 10 does not need to be disassembled for 5 months in the present invention to remove the deposited or accumulated solid particles. Or gas reactant and other deposits, so it can prolong the maintenance cycle, which means to reduce the maintenance frequency and achieve the purpose of long-term operation. The model of the rotor structure 10 in the present invention is, for example, Edwards P033, and the turbomolecular vacuum pump 100 is a model suitable for the rotor structure 10, such as Edwards STP-H803 or STP-H1303. The model of the rotor structure 10 and the turbomolecular vacuum pump 100 to which it is applicable are merely examples, and are not intended to limit the present invention. The actual detection of the inlet pressure (torr) and the gas flow rate (sccm) shows that the numerical curve of the gas flow rate (sccm) between the present invention and the conventional rotor structure almost overlaps when the inlet pressure is between 1x10 -5 torr and 1 torr. It can be seen that, compared with the traditional technology, the present invention can effectively prevent the rotor blades from rubbing against the sediment in the chamber of the turbomolecular vacuum pump while maintaining the pumping efficiency, thereby avoiding collision or fragmentation. , wherein the above-mentioned deposits are, for example, but not limited to, the solid particles carried in the process gas or the reactants of the process gas.

渦輪分子式真空泵100更包含槽體110以及複數個定子葉片120。槽體110係設於渦輪分子式真空泵100之泵體之容置空間102中。槽體110之內側面較佳為具有導流槽112(見圖5)。定子葉片120係環設於複數個間隔板126上，這些間隔板126係依序堆疊於槽體110之頂緣上，藉以使得定子葉片120縱向分佈形成複數個定子葉片層122。其中，間隔板126及槽體110係共同圍繞出上述之容室130，最下層之間隔板126與槽體110之頂緣之交接處形成一階梯段114。本創作可效防止轉子葉片30碰觸階梯段114上之固體顆粒或氣體反應物等沉積物。The turbomolecular vacuum pump 100 further includes a groove body 110 and a plurality of stator vanes 120 . The tank body 110 is disposed in the accommodating space 102 of the pump body of the turbomolecular vacuum pump 100 . The inner side of the groove body 110 preferably has a guide groove 112 (see FIG. 5 ). The stator blades 120 are annularly disposed on a plurality of spacer plates 126 . The spacer plates 126 are sequentially stacked on the top edge of the slot body 110 , so that the stator blades 120 are longitudinally distributed to form a plurality of stator blade layers 122 . The spacer plate 126 and the groove body 110 together surround the above-mentioned chamber 130 , and a step 114 is formed at the intersection of the spacer plate 126 and the top edge of the groove body 110 at the lowermost layer. The present invention can effectively prevent the rotor blades 30 from touching the solid particles or gas reactants and other deposits on the stepped section 114 .

本創作之長效運轉的轉子結構10係設於間隔板126及槽體110所共同圍繞出之容室130中，且轉子本體20係套定於旋轉軸162上。舉例而言，轉子結構10之一側係內凹形成一鎖接室，鎖接室底側貫穿有穿槽，驅動裝置160之旋轉軸162之一端經由穿槽穿入轉子結構10的鎖接室中，再以螺帽等固定元件於鎖接室中以將轉子本體20鎖接至旋轉軸162上。The long-running rotor structure 10 of the present invention is disposed in the chamber 130 surrounded by the partition plate 126 and the groove body 110 , and the rotor body 20 is sleeved on the rotating shaft 162 . For example, a side of the rotor structure 10 is recessed to form a locking chamber, a bottom side of the locking chamber is penetrated with a through slot, and one end of the rotating shaft 162 of the driving device 160 penetrates into the locking chamber of the rotor structure 10 through the through slot In the middle, fixing elements such as nuts are used in the locking chamber to lock the rotor body 20 to the rotating shaft 162 .

此外，轉子結構10之轉子葉片層32與定子葉片層122係縱向交錯設置，彼此保持不接觸。最下層之葉片可例如為轉子葉片30。轉子葉片30與定子葉片120之傾斜方向相反，其中每片轉子葉片30之傾斜方向相同，但傾斜角度可相同或不相同，且每片定子葉片120之傾斜方向相同，但傾斜角度可相同或不相同。由於轉子葉片30為橫向運動且具有傾斜角度，當氣體分子碰撞到呈旋轉狀態的轉子葉片30時，氣體分子可向下移動以遠離此層之轉子葉片層32，並朝著下一層之定子葉片層122的方向移動。而且，因為轉子葉片30與定子葉片120之傾斜方向相反，因此當氣體分子向下碰撞到呈靜止狀態的定子葉片120時，氣體分子可朝著遠離此層之定子葉片層122之方向移動，藉以碰撞下一層之轉子葉片層32，依此類推，可驅使氣體分子逐層向下移動，而不會逆向地向上移動。In addition, the rotor blade layers 32 and the stator blade layers 122 of the rotor structure 10 are longitudinally staggered and kept out of contact with each other. The lowermost blade may be, for example, the rotor blade 30 . The inclination directions of the rotor blades 30 and the stator blades 120 are opposite, wherein the inclination direction of each rotor blade 30 is the same, but the inclination angle may be the same or different, and the inclination direction of each stator blade 120 is the same, but the inclination angle may be the same or different. same. Since the rotor blades 30 move laterally and have an oblique angle, when gas molecules collide with the rotating rotor blades 30, the gas molecules can move downwards away from the rotor blade layer 32 of this layer and toward the stator blades of the next layer. The direction of layer 122 is shifted. Moreover, because the inclination directions of the rotor blades 30 and the stator blades 120 are opposite, when the gas molecules collide with the stationary stator blades 120 downward, the gas molecules can move in the direction away from the stator blade layer 122 of this layer, thereby A collision with the next rotor blade layer 32, and so on, can drive the gas molecules to move down layer by layer without moving upward in the opposite direction.

如圖3所示，在本創作之一實施態樣中，轉子結構10之轉子葉片層32中僅有第一轉子葉片層32a之尾端相距容室130之側壁之第一橫向距離d1係實質大於一第一數值，而轉子葉片層32中的第二轉子葉片層32b之尾端相距容室130之側壁之第二橫向距離d2則實質相同於或者小於上述之第一數值。上述之第一數值介於0.5 mm至3 mm之間。藉此，本創作可在第一轉子葉片層32a與槽體110之間形成防碰觸空間。其中，第二轉子葉片層32b之尾端相距容室130之側壁之第二橫向距離d2之數值雖較佳為彼此實質相同，但本創作不限於此，第二轉子葉片層32b之尾端相距容室130之側壁之第二橫向距離d2之數值也可為彼此不同。相較之下，在傳統的轉子結構中，由於從上到下每一片轉子葉片層之尾端相距容室之側壁之橫向距離均為實質相同，意即傳統的最底層轉子葉片層相距容室之側壁之橫向距離實質相同於上一層轉子葉片層之尾端相距容室之側壁之橫向距離。因此，相較於傳統轉子結構，本創作之轉子結構10可實質保持抽氣速率，且可有效防止轉子葉片30碰觸渦輪分子式真空泵100之容室130中的沉積物，特別是可防止最底層的第一轉子葉片層32a碰觸容室130之階梯段114上的沉積物，其中此階級段114係對應於最底層轉子葉片層(第一轉子葉片層32a)之尾端之位置，即間隔板126與槽體110之頂緣之交接處。As shown in FIG. 3 , in an embodiment of the present invention, in the rotor blade layers 32 of the rotor structure 10 , only the first lateral distance d1 between the rear end of the first rotor blade layer 32 a and the side wall of the chamber 130 is substantially is greater than a first value, and the second lateral distance d2 between the rear end of the second rotor blade layer 32b in the rotor blade layer 32 and the side wall of the chamber 130 is substantially the same as or smaller than the above-mentioned first value. The above first value is between 0.5 mm and 3 mm. Thereby, the present invention can form an anti-collision space between the first rotor blade layer 32a and the groove body 110 . Wherein, the value of the second lateral distance d2 between the rear end of the second rotor blade layer 32b and the side wall of the chamber 130 is preferably substantially the same, but the invention is not limited to this, the rear end of the second rotor blade layer 32b is separated from each other. The values of the second lateral distances d2 of the side walls of the chamber 130 may also be different from each other. In contrast, in the traditional rotor structure, since the lateral distance between the rear end of each rotor blade layer and the side wall of the chamber is substantially the same from top to bottom, it means that the traditional bottommost rotor blade layer is separated from the chamber. The lateral distance of the side wall is substantially the same as the lateral distance between the rear end of the upper rotor blade layer and the side wall of the chamber. Therefore, compared with the conventional rotor structure, the rotor structure 10 of the present invention can substantially maintain the pumping rate, and can effectively prevent the rotor blades 30 from touching the sediment in the chamber 130 of the turbomolecular vacuum pump 100 , especially to prevent the bottom layer The first rotor blade layer 32a of the first rotor blade layer 32a touches the sediment on the stepped section 114 of the chamber 130, wherein the first rotor blade layer 114 corresponds to the position of the rear end of the bottommost rotor blade layer (the first rotor blade layer 32a), that is, the interval The junction of the plate 126 and the top edge of the tank body 110 .

在本創作之一實施態樣中，第一轉子葉片層32a的原葉片係例如經過移除程序，藉以移除第一轉子葉片層32a的部分或幾乎全部的原葉片長度，其中第一轉子葉片層32a被移除的部分係以虛線表示，藉以使得第一轉子葉片層32a之尾端相距容室130之側壁之第一橫向距離d1係實質大於轉子葉片層32中的第二轉子葉片層32b之尾端相距容室130之側壁之第二橫向距離d2。上述之移除程序可例如為採用，但不限於，裁切、剪切、鋸切、刨除或其他可行之方式。所以，轉子葉片層32中之第一轉子葉片層32a之長度L1實質小於鄰接第一轉子葉片層32a之第二轉子葉片層32b之長度L2(見圖4)。或者，本創作也可不移除第一轉子葉片層32a的部分或幾乎全部的原葉片長度，而改為使得容室130之側壁於對應於第一轉子葉片層32a之位置例如為向外擴張(即此處的容室130的側壁截面積變大)，藉以使得上述之第一橫向距離d1係實質大於上述之第二橫向距離d2，且轉子葉片層32中之第一轉子葉片層32a之長度可實質相同於鄰接第一轉子葉片層32a之轉子葉片層32中之第二轉子葉片層32b之長度。In one embodiment of the present invention, the original blade system of the first rotor blade layer 32a is, for example, subjected to a removal process, so as to remove part or almost all of the original blade length of the first rotor blade layer 32a, wherein the first rotor blade The removed portion of the layer 32a is shown in dashed lines, so that the first lateral distance d1 between the trailing end of the first rotor blade layer 32a and the side wall of the chamber 130 is substantially greater than the second rotor blade layer 32b in the rotor blade layer 32 The rear end is separated from the side wall of the chamber 130 by a second lateral distance d2. The above-mentioned removal procedure may be, for example, but not limited to, cutting, shearing, sawing, planing or other feasible methods. Therefore, the length L1 of the first rotor blade layer 32a of the rotor blade layers 32 is substantially smaller than the length L2 of the second rotor blade layer 32b adjacent to the first rotor blade layer 32a (see FIG. 4). Alternatively, the present invention may not remove part or almost all of the original blade length of the first rotor blade layer 32a, but instead make the side wall of the chamber 130 expand outward at a position corresponding to the first rotor blade layer 32a ( That is, the cross-sectional area of the side wall of the chamber 130 becomes larger), so that the above-mentioned first lateral distance d1 is substantially greater than the above-mentioned second lateral distance d2, and the length of the first rotor blade layer 32a in the rotor blade layers 32 The length of the second rotor blade layer 32b in the rotor blade layers 32 adjacent to the first rotor blade layer 32a may be substantially the same.

以同時橫向內縮及縱向內縮為例，在本創作中，最下層之葉片較佳為轉子葉片，如圖3所示，即第一轉子葉片層32a之高度較佳為低於定子葉片層122中之最底層定子葉片層之高度。若本創作之第一轉子葉片層32a之尾端相距容室130之側壁之第一橫向距離d1係實質大於轉子葉片層32中的第二轉子葉片層32b之尾端相距容室130之側壁之第二橫向距離d2，則最下層之葉片，例如轉子葉片層32中之第一轉子葉片層32a之底端相距容室130之階梯段114之頂緣之縱向距離h1可實質等於一第二數值，第二數值例如介於2 mm至4.5 mm之間。或者，轉子葉片層32中之第一轉子葉片層32a之底端相距容室130之階梯段114之頂緣之縱向距離h1也可實質大於上述之第二數值。藉此，本創作可在第一轉子葉片層32a與槽體110(容室130之階梯段114)之間形成防碰觸空間。本創作可例如採用移除方式以達成上述之同時橫向內縮及縱向內縮。惟，本創作不限於使用移除程序，本創作亦可於製作轉子葉片30時，使得第一轉子葉片層32a相較於第二轉子葉片層32b同時呈橫向內縮及縱向內縮狀態。Taking the simultaneous horizontal retraction and vertical retraction as an example, in the present invention, the blades of the lowest layer are preferably rotor blades, as shown in FIG. 3 , that is, the height of the first rotor blade layer 32a is preferably lower than that of the stator blade layer The height of the bottommost stator blade layer in 122. If the first lateral distance d1 between the rear end of the first rotor blade layer 32a and the side wall of the chamber 130 in the present invention is substantially greater than the distance between the rear end of the second rotor blade layer 32b in the rotor blade layer 32 and the side wall of the chamber 130 With the second lateral distance d2, the longitudinal distance h1 between the bottom end of the lowermost blade, such as the first rotor blade layer 32a in the rotor blade layer 32 and the top edge of the stepped section 114 of the chamber 130, can be substantially equal to a second value , the second value is for example between 2 mm and 4.5 mm. Alternatively, the longitudinal distance h1 between the bottom end of the first rotor blade layer 32a of the rotor blade layers 32 and the top edge of the stepped section 114 of the chamber 130 may also be substantially greater than the above-mentioned second value. In this way, the present invention can form an anti-contact space between the first rotor blade layer 32a and the groove body 110 (the stepped section 114 of the accommodating chamber 130 ). The present creation can, for example, adopt the removal method to achieve the above-mentioned simultaneous horizontal indentation and vertical indentation. However, the present invention is not limited to the use of the removal procedure, and the present invention can also make the first rotor blade layer 32a in a laterally retracted and longitudinally retracted state compared to the second rotor blade layer 32b when manufacturing the rotor blade 30 .

惟，本創作不限於上述舉例。最下層之葉片層可為上述之轉子葉片層32，也可以是定子葉片層122。只要可在最底層之轉子葉片層32或定子葉片層122與槽體110(容室130之階梯段114)之間形成防碰觸空間，即可適用於本創作。在本創作之另一實施態樣中，如圖6所示，最下層之葉片層為定子葉片層122，且此定子葉片層122相距容室130之階梯段144之頂緣之距離為縱向距離h2，縱向距離h2實質大於一第二數值，第二數值例如介於2 mm至4.5 mm之間。另外，在本創作之又一實施態樣中，如圖7所示，前述態樣中的第一轉子葉片層32a及最下層之定子葉片層122已被幾乎全部或大部分移除，轉子葉片層32中之第一轉子葉片層32a之長度實質例如小於鄰接第一轉子葉片層32a之轉子葉片層32中之第二轉子葉片層32b之長度，而且鄰接最底層之第一轉子葉片層32a之第二轉子葉片層32b相距容室130之階梯段144之頂緣之距離為縱向距離h3，縱向距離h3實質大於一第二數值，第二數值例如，但不限於，介於2 mm至4.5 mm之間，其中此第二轉子葉片層32b之尾端相距容室130之側壁之第二橫向距離d2係實質相同於或者是大於其餘轉子葉片層之尾端相距容室130之側壁之橫向距離d2。However, this creation is not limited to the above examples. The lowermost blade layer may be the above-mentioned rotor blade layer 32 or the stator blade layer 122 . As long as an anti-contact space can be formed between the bottommost rotor blade layer 32 or the stator blade layer 122 and the groove body 110 (the stepped section 114 of the chamber 130 ), the present invention can be applied. In another embodiment of the present invention, as shown in FIG. 6 , the lowermost blade layer is the stator blade layer 122 , and the distance between the stator blade layer 122 and the top edge of the stepped section 144 of the chamber 130 is the longitudinal distance h2, the longitudinal distance h2 is substantially greater than a second value, and the second value is, for example, between 2 mm and 4.5 mm. In addition, in yet another implementation aspect of the present invention, as shown in FIG. 7 , the first rotor blade layer 32a and the lowermost stator blade layer 122 in the previous aspect have been almost completely or mostly removed, and the rotor blades have been removed. The length of the first rotor blade layer 32a in the layers 32 is substantially smaller than the length of the second rotor blade layer 32b in the rotor blade layer 32 adjacent to the first rotor blade layer 32a, and the length of the first rotor blade layer 32a adjacent to the bottommost layer. The distance between the second rotor blade layer 32b and the top edge of the stepped section 144 of the chamber 130 is the longitudinal distance h3, and the longitudinal distance h3 is substantially greater than a second value, such as, but not limited to, between 2 mm and 4.5 mm. The second lateral distance d2 between the trailing end of the second rotor blade layer 32b and the side wall of the chamber 130 is substantially the same as or greater than the lateral distance d2 between the trailing end of the other rotor blade layers and the side wall of the chamber 130 .

本創作之長效運轉的轉子結構之優點在於僅增加最底層轉子葉片層與容室之側壁之第一橫向距離，即可在保持抽氣效率的情況下，有效防止轉子葉片碰觸沉積或累積於渦輪分子式真空泵之容室中的沉積物，特別是可防止最底層轉子葉片層碰觸容室之階梯段上的沉積物。此外，藉由使轉子葉片層中之最底層轉子葉片層之底端相距容室之階梯段之頂緣之縱向距離實質大於上述之第二數值，也可有效防止轉子葉片碰觸沉積或累積於渦輪分子式真空泵之容室中的沉積物，特別是可防止最底層轉子葉片層碰觸容室之階梯段上的沉積物。除此之外，本創作增加最底層轉子葉片層與容室之側壁之橫向距離以及同時增加最底層轉子葉片層之底端相距容室之階梯段之頂緣之縱向距離可有效防止最底層轉子葉片層碰觸沉積或累積於渦輪分子式真空泵之容室中的沉積物，特別是可防止最底層轉子葉片層碰觸階梯段上的沉積物。故，本創作可藉由減少維修頻率，以達到長效運轉的目的。The advantage of the long-running rotor structure of the present invention is that only by increasing the first lateral distance between the bottommost rotor blade layer and the side wall of the chamber, it can effectively prevent the rotor blades from contacting and depositing or accumulating while maintaining the suction efficiency. The deposits in the chamber of the turbomolecular vacuum pump can especially prevent the bottommost rotor blade layer from touching the deposits on the steps of the chamber. In addition, by making the longitudinal distance between the bottom end of the bottommost rotor blade layer and the top edge of the stepped section of the chamber substantially greater than the above-mentioned second value, the rotor blades can also be effectively prevented from contacting and depositing or accumulating in The deposits in the chamber of the turbomolecular vacuum pump can especially prevent the bottommost rotor blade layer from touching the deposits on the steps of the chamber. In addition, the invention increases the lateral distance between the bottommost rotor blade layer and the side wall of the chamber and at the same time increases the longitudinal distance between the bottom end of the bottommost rotor blade layer and the top edge of the stepped section of the chamber, which can effectively prevent the bottommost rotor The blade layer touches the sediment deposited or accumulated in the chamber of the turbomolecular vacuum pump, in particular, the bottommost rotor blade layer can be prevented from contacting the sediment on the stepped section. Therefore, the present invention can achieve the purpose of long-term operation by reducing the maintenance frequency.

以上所述僅為舉例性，而非為限制性者。任何未脫離本創作之精神與範疇，而對其進行之等效修改或變更，均應包含於後附之申請專利範圍中。The above description is exemplary only, not limiting. Any equivalent modifications or changes that do not depart from the spirit and scope of this creation should be included in the scope of the appended patent application.

10:轉子結構 20:轉子本體 30:轉子葉片 32:轉子葉片層 32a:第一轉子葉片層 32b:第二轉子葉片層 100:渦輪分子式真空泵 102:容置空間 110:槽體 112:導流槽 114:階梯段 120:定子葉片 122:定子葉片層 126:間隔板 130:容室 160:驅動裝置 162:旋轉軸 d1:第一橫向距離 d2:第二橫向距離 h1、h2、h3:縱向距離 L1、L2:長度 10: Rotor structure 20: rotor body 30: Rotor blades 32: Rotor blade layer 32a: First rotor blade layer 32b: Second rotor blade layer 100: Turbo molecular vacuum pump 102: accommodating space 110: tank body 112: diversion groove 114: Ladder section 120: stator blades 122: stator blade layer 126: Spacer 130: Room 160: Drive 162: Rotary axis d1: first lateral distance d2: second lateral distance h1, h2, h3: longitudinal distance L1, L2: length

圖1為本創作之長效運轉的轉子結構與渦輪分子式真空泵之組合剖面圖。Figure 1 is a cross-sectional view of the combination of the rotor structure and the turbomolecular vacuum pump of the long-term operation of the invention.

圖2為本創作之長效運轉的轉子結構之剖面示意圖。FIG. 2 is a schematic cross-sectional view of the rotor structure for long-term operation of the invention.

圖3為圖1之局部放大示意圖。FIG. 3 is a partial enlarged schematic view of FIG. 1 .

圖4為本創作中轉子葉片層之局部外觀示意圖。FIG. 4 is a schematic diagram of the partial appearance of the rotor blade layer in the creation.

圖5為本創作中槽體之示意圖。Figure 5 is a schematic diagram of the tank body in the creation.

圖6為本創作之長效運轉的轉子結構之另一實施態樣之局部放大示意圖。FIG. 6 is a partial enlarged schematic view of another embodiment of the rotor structure for long-term operation of the invention.

圖7為本創作之長效運轉的轉子結構之又一實施態樣之局部放大示意圖。FIG. 7 is a partial enlarged schematic view of another embodiment of the rotor structure for long-term operation of the present invention.

10:轉子結構 10: Rotor structure

20:轉子本體 20: rotor body

30:轉子葉片 30: Rotor blades

100:渦輪分子式真空泵 100: Turbo molecular vacuum pump

102:容置空間 102: accommodating space

110:槽體 110: tank body

112:導流槽 112: diversion groove

114:階梯段 114: Ladder section

120:定子葉片 120: stator blades

122:定子葉片層 122: stator blade layer

126:間隔板 126: Spacer

130:容室 130: Room

160:驅動裝置 160: Drive

162:旋轉軸 162: Rotary axis

Claims (8)

一種長效運轉的轉子結構，適用於裝設在一渦輪分子式真空泵之一容室中，該渦輪分子式真空泵之該容室中設有一驅動裝置，該轉子結構包含：一轉子本體，設於該渦輪分子式真空泵之該容室中，且套定於該驅動裝置之一旋轉軸上，其中該驅動裝置係用以轉動該轉子本體；以及複數個轉子葉片，環設於該轉子本體之外側且縱向分佈形成複數個轉子葉片層，其中該些轉子葉片層具有至少一第一轉子葉片層以及複數個第二轉子葉片層，其中該第一轉子葉片層之尾端係以一第一橫向距離相距該容室之一側壁，該些第二轉子葉片層之尾端係以一第二橫向距離相距該容室之該側壁，該第一橫向距離係實質大於該第二橫向距離，其中該第一轉子葉片層之長度實質相同於鄰接該第一轉子葉片層之該些第二轉子葉片層中之一者之長度，藉以在保持抽氣效率的情況下，防止該第一轉子葉片層碰觸該容室之一階梯段上之沉積物。 A long-running rotor structure is suitable for being installed in a chamber of a turbomolecular vacuum pump, and a drive device is arranged in the chamber of the turbomolecular vacuum pump, and the rotor structure comprises: a rotor body, which is arranged in the turbine In the chamber of the molecular vacuum pump, and sleeved on a rotating shaft of the driving device, wherein the driving device is used to rotate the rotor body; and a plurality of rotor blades are arranged on the outer side of the rotor body and are longitudinally distributed A plurality of rotor blade layers are formed, wherein the rotor blade layers have at least a first rotor blade layer and a plurality of second rotor blade layers, wherein the trailing end of the first rotor blade layer is separated from the container by a first lateral distance. a side wall of the chamber, the rear ends of the second rotor blade layers are separated from the side wall of the chamber by a second lateral distance, the first lateral distance is substantially greater than the second lateral distance, wherein the first rotor blade The length of the layer is substantially the same as the length of one of the second rotor blade layers adjacent to the first rotor blade layer, thereby preventing the first rotor blade layer from touching the chamber while maintaining suction efficiency Sediment on one of the steps. 如請求項1所述之長效運轉的轉子結構，其中該渦輪分子式真空泵更包含：一槽體，設於該渦輪分子式真空泵之一容置空間中；以及複數個定子葉片，環設於複數個間隔板上，該些間隔板係依序堆疊於該槽體上，藉以使得該些定子葉片縱向分佈形成複數個定子葉片層，其中該些定子葉片層與該些轉子葉片層係縱向交錯設置，且該些間隔板及該槽體係共同圍繞出該容室，其中該階梯段位於該槽體上。 The rotor structure for long-term operation as claimed in claim 1, wherein the turbomolecular vacuum pump further comprises: a groove body disposed in an accommodating space of the turbomolecular vacuum pump; and a plurality of stator blades, which are arranged in the plurality of On the spacer plate, the spacer plates are sequentially stacked on the slot body, so that the stator blades are longitudinally distributed to form a plurality of stator blade layers, wherein the stator blade layers and the rotor blade layers are arranged longitudinally staggered, The spacers and the groove system together surround the chamber, wherein the stepped section is located on the groove body. 如請求項2所述之長效運轉的轉子結構，其中該第一轉子葉片層為該些轉子葉片層中之一最底層轉子葉片層，該第一轉子葉片層之高度低於該些定子葉片層中之一最底層定子葉片層之高度，該第一轉子葉片層係經過移除程序，使得該第一轉子葉片層之尾端以該第一橫向距離相距該容室之該側壁。 The long-lasting rotor structure of claim 2, wherein the first rotor blade layer is a bottommost rotor blade layer among the rotor blade layers, and the first rotor blade layer is lower in height than the stator blades The height of one of the bottommost stator blade layers in which the first rotor blade layer has undergone a removal process such that the trailing end of the first rotor blade layer is spaced from the side wall of the chamber by the first lateral distance. 如請求項1所述之長效運轉的轉子結構，其中該第一橫向距離與該第二橫向距離之數值差為小於30mm。 The long-running rotor structure as claimed in claim 1, wherein the numerical difference between the first lateral distance and the second lateral distance is less than 30 mm. 如請求項1所述之長效運轉的轉子結構，其中該第一橫向距離與該第二橫向距離之數值差小於或等於鄰接該第一轉子葉片層之該些第二轉子葉片層中之一者之長度值。 The long-lasting rotor structure of claim 1, wherein the difference in value between the first lateral distance and the second lateral distance is less than or equal to one of the second rotor blade layers adjacent to the first rotor blade layer The length of the value. 如請求項1所述之長效運轉的轉子結構，其中該第一橫向距離係實質大於一第一數值，該第二橫向距離係實質相同於或小於該第一數值，該第一數值介於0.5mm至3mm之間。 The long-running rotor structure of claim 1, wherein the first lateral distance is substantially greater than a first value, the second lateral distance is substantially the same as or less than the first value, and the first value is between Between 0.5mm and 3mm. 如請求項1或6所述之長效運轉的轉子結構，其中該第一轉子葉片層為該些轉子葉片層中之一最底層轉子葉片層，該第一轉子葉片層之底端係以一縱向距離相距該容室之該階梯段之頂緣，該縱向距離係實質為一第二數值，該第二數值介於2mm至4.5mm之間。 The long-lasting rotor structure as claimed in claim 1 or 6, wherein the first rotor blade layer is one of the bottommost rotor blade layers of the rotor blade layers, and the bottom end of the first rotor blade layer is fastened with a The longitudinal distance is from the top edge of the stepped section of the container, and the longitudinal distance is substantially a second value, and the second value is between 2 mm and 4.5 mm. 如請求項1或6所述之長效運轉的轉子結構，其中該第一轉子葉片層為該些轉子葉片層中之一最底層轉子葉片層，該第一轉子葉片層之底端係以一縱向距離相距該容室之該階梯段之頂緣，該縱向距離係實質大於一第二數值，該第二數值介於2mm至4.5mm之間。 The long-lasting rotor structure as claimed in claim 1 or 6, wherein the first rotor blade layer is one of the bottommost rotor blade layers of the rotor blade layers, and the bottom end of the first rotor blade layer is fastened with a The longitudinal distance is from the top edge of the stepped section of the container, and the longitudinal distance is substantially greater than a second value, and the second value is between 2 mm and 4.5 mm.
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TWM614790U (en) * 2021-04-08 2021-07-21 日揚科技股份有限公司 Rotor structure for long-term effective operation

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JP2004278500A (en) * 2003-03-19 2004-10-07 Boc Edwards Kk Molecular pump
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CN106015034A (en) * 2016-07-11 2016-10-12 中国工程物理研究院机械制造工艺研究所 High-pressure ratio compound molecular pump
US20200240421A1 (en) * 2019-01-30 2020-07-30 Shimadzu Corporation Turbo-molecular pump
TWM614790U (en) * 2021-04-08 2021-07-21 日揚科技股份有限公司 Rotor structure for long-term effective operation

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