TWI769463B

TWI769463B - Dehumidification system and method for reducing space humidity

Info

Publication number: TWI769463B
Application number: TW109119093A
Authority: TW
Inventors: 黃仰田; 梁嘉益; 李育齊; 莊豐鍵; 蔡慶隆; 王喬智; 劉銘哲; 陳奕全; 吳銘偉
Original assignee: 日月光半導體製造股份有限公司
Priority date: 2020-06-05
Filing date: 2020-06-05
Publication date: 2022-07-01
Also published as: TW202146101A

Abstract

A dehumidification system includes at least one fan filter unit (FFU) and air whose humidity is adjusted by drying. The fan filter unit includes a fan and a filter. The filter corresponds to the fan. The air whose humidity is adjusted by drying is blown to the fan of the fan filter unit, and then enters into an accommodating space larger than the fan filter unit.

Description

除濕系統及降低空間濕度的方法Dehumidification system and method for reducing space humidity

本發明是有關於除濕系統及降低空間濕度的方法，且更具體言之，是有關於使用經乾燥調節濕度之空氣的除濕系統及降低空間濕度的方法。The present invention relates to a dehumidification system and a method of reducing the humidity of a space, and more particularly, to a dehumidification system and a method of reducing the humidity of a space using air dried to adjust the humidity.

在自動化生產環境中，普遍有建置可供存放電子產品的乾燥室，以獲得受控制的溫度與濕度，進而避免電子產品受潮而發生不必要的功能異常。In an automated production environment, a drying room for storing electronic products is generally built to obtain controlled temperature and humidity, so as to avoid unnecessary malfunction of electronic products due to moisture.

現行業界大多以低溫冰水機、化學除濕輪或特規除濕輪等方式來達到小坪數乾燥室的溫濕度控制。其中最常使用方式為化學除濕輪，其係利用除濕輪的吸濕特性，將空氣中的水分吸附在轉輪上，以獲得環境所需的乾燥空氣。然而，不論是使用除濕輪，還是使用冰水機，都存在造價成本高、佔地面積大、建置時間長及運轉維護成本高等諸多缺點。In the current industry, most of the low-temperature ice water machines, chemical dehumidification wheels or special dehumidification wheels are used to achieve the temperature and humidity control of small-scale drying rooms. The most commonly used method is the chemical dehumidification wheel, which uses the moisture absorption characteristics of the dehumidification wheel to absorb the moisture in the air on the runner to obtain the dry air required by the environment. However, whether it is using a dehumidifier wheel or an ice water machine, there are many disadvantages such as high cost, large floor space, long construction time, and high operation and maintenance costs.

在一實施例中，一種除濕系統包括至少一風扇過濾單元及經乾燥調節濕度之空氣。所述風扇過濾單元包括一風扇及一過濾件。所述過濾件對應所述風扇。所述經乾燥調節濕度之空氣吹向所述風扇過濾單元之所述風扇，再進入較所述風扇過濾單元為大之一容置空間中。In one embodiment, a dehumidification system includes at least one fan filter unit and air dried to adjust humidity. The fan filter unit includes a fan and a filter element. The filter element corresponds to the fan. The air whose humidity has been dried and adjusted is blown toward the fan of the fan filter unit, and then enters into an accommodating space larger than the fan filter unit.

在一實施例中，一種降低空間濕度的方法包括：提供一容置空間；從所述容置空間之外部導入經乾燥調節濕度之空氣至所述容置空間內；及通過至少一風扇過濾單元將所述經乾燥調節濕度之空氣分散於所述容置空間中，以降低所述容置空間的濕度。In one embodiment, a method for reducing space humidity includes: providing an accommodating space; introducing dried and humidity-adjusted air into the accommodating space from outside the accommodating space; and passing at least one fan filter unit The dried and humidity-regulated air is dispersed in the accommodating space to reduce the humidity of the accommodating space.

貫穿圖式及實施方式使用共同參考編號以指示相同或相似組件。自結合附圖的以下詳細描述將更容易理解本發明之實施例。Common reference numbers are used throughout the drawings and the embodiments to refer to the same or similar components. Embodiments of the present invention will be more readily understood from the following detailed description taken in conjunction with the accompanying drawings.

以下揭示內容提供用於實施所提供主題之不同特徵的許多不同實施例或實例。在下文描述組件及配置之特定實例以闡明本發明之特定態樣。當然，此等組件、值、操作、材料及配置僅為實例且不意欲為限制性的。舉例而言，在本文中所提供之描述中，第一特徵在第二特徵上方或上的形成可包括第一特徵以及第二特徵直接接觸地形成或安置的實施例，且亦可包括額外特徵可在第一特徵與第二特徵之間形成或安置使得第一特徵與第二特徵可不直接接觸的實施例。另外，本發明可在本文中所提供之各種實例中重複參考數字及/或字母。此重複係出於簡化及清楚之目的，且本身並不指示所論述各種實施例及/或組態之間的關係。The following disclosure provides many different embodiments or examples for implementing different features of the provided subject matter. Specific examples of components and configurations are described below to illustrate particular aspects of the invention. Of course, these components, values, operations, materials and configurations are examples only and are not intended to be limiting. For example, in the description provided herein, the formation of a first feature over or over a second feature may include embodiments in which the first feature and the second feature are formed or disposed in direct contact, and may also include additional features Embodiments may be formed or positioned between the first and second features such that the first and second features may not be in direct contact. Additionally, the present disclosure may repeat reference numerals and/or letters in the various examples provided herein. This repetition is for the purpose of simplicity and clarity, and does not in itself indicate a relationship between the various embodiments and/or configurations discussed.

圖1顯示本發明之除濕系統1的系統架構圖。圖2顯示本發明之主導管、次導管及風扇過濾單元之配置示意圖。配合參閱圖1及圖2，本發明之除濕系統1包括一容置空間90、一迴風牆60、至少一風扇過濾單元10、經乾燥調節濕度之空氣20、至少一導管30、至少一消音器40、一氣體流量控制閥50、至少一溫度感測器65、至少一濕度感測器66、一吸附式乾燥機71、一減壓閥72及至少一乾燥冷卻器（dry cooler）80。FIG. 1 shows a system architecture diagram of a dehumidification system 1 of the present invention. FIG. 2 shows a schematic diagram of the configuration of the main duct, the secondary duct and the fan filter unit of the present invention. Referring to FIG. 1 and FIG. 2, the dehumidification system 1 of the present invention includes an accommodating space 90, a return air wall 60, at least one fan filter unit 10, dried air 20 to adjust humidity, at least one duct 30, and at least one muffler 40 , a gas flow control valve 50 , at least one temperature sensor 65 , at least one humidity sensor 66 , an adsorption dryer 71 , a pressure reducing valve 72 and at least one dry cooler 80 .

所述容置空間90界定一存放區域91及一頂部區域92，所述存放區域91與所述頂部區域92以一隔板93分隔。在一實施例中，所述容置空間90係可為乾燥室、無塵室或模具室。所述存放區域91可用以存放對濕度敏感的物件（例如：電子產品或模具）。所述頂部區域92係位於所述存放區域91上方，用以提供處理空氣或分配空氣之空間。The accommodating space 90 defines a storage area 91 and a top area 92 , and the storage area 91 and the top area 92 are separated by a partition 93 . In one embodiment, the accommodating space 90 can be a drying room, a clean room or a mold room. The storage area 91 can be used to store humidity-sensitive items (eg, electronic products or molds). The top area 92 is located above the storage area 91 to provide a space for processing air or distributing air.

所述迴風牆60包圍所述存放區域91與所述頂部區域92。所述迴風牆60具有一內部迴風空間62及複數個迴風孔63。所述內部迴風空間62通過該等迴風孔63連通所述存放區域91與所述頂部區域92。在一實施例中，該等迴風孔63可包括複數個第一迴風孔631及複數個第二迴風孔632。所述內部迴風空間62係可通過該等第一迴風孔631連通所述存放區域91，以及通過該等第二迴風孔632連通所述頂部區域92。The air return wall 60 surrounds the storage area 91 and the top area 92 . The air return wall 60 has an internal air return space 62 and a plurality of air return holes 63 . The inner air return space 62 communicates with the storage area 91 and the top area 92 through the air return holes 63 . In one embodiment, the air return holes 63 may include a plurality of first air return holes 631 and a plurality of second air return holes 632 . The inner air return space 62 can communicate with the storage area 91 through the first air return holes 631 and communicate with the top area 92 through the second air return holes 632 .

所述至少一風扇過濾單元10設置於所述隔板93上，且所述至少一風扇過濾單元10連通所述存放區域91與所述頂部區域92。在一實施例中，所述容置空間90較所述風扇過濾單元10為大。所述存放區域91較所述風扇過濾單元10為大，且所述頂部區域92較所述風扇過濾單元10為大。The at least one fan filter unit 10 is disposed on the partition plate 93 , and the at least one fan filter unit 10 communicates with the storage area 91 and the top area 92 . In one embodiment, the accommodating space 90 is larger than the fan filter unit 10 . The storage area 91 is larger than the fan filter unit 10 , and the top area 92 is larger than the fan filter unit 10 .

在一實施例中，所述至少一風扇過濾單元10包括一風扇11及一過濾件12。所述風扇11具有一進氣側112及一出氣側114。所述出氣側114相對於所述進氣側112。所述過濾件12對應所述風扇11。在一實施例中，所述過濾件12係可設置於所述風扇11之所述出氣側114。在一實施例中，所述至少一風扇過濾單元10係位於所述隔板93上，且所述過濾件12係面向所述存放區域91。In one embodiment, the at least one fan filter unit 10 includes a fan 11 and a filter element 12 . The fan 11 has an inlet side 112 and an outlet side 114 . The outlet side 114 is opposite to the inlet side 112 . The filter element 12 corresponds to the fan 11 . In one embodiment, the filter element 12 may be disposed on the air outlet side 114 of the fan 11 . In one embodiment, the at least one fan filter unit 10 is located on the partition plate 93 , and the filter element 12 faces the storage area 91 .

所述經乾燥調節濕度之空氣20係從所述容置空間90之外部導入至所述容置空間90（例如：所述頂部區域92）內，並吹向所述風扇過濾單元10之所述風扇11的中央位置，再進入較所述風扇過濾單元10為大之所述容置空間90（例如：所述存放區域91）中，以降低所述容置空間90（例如：所述存放區域91）的濕度。在一實施例中，所述經乾燥調節濕度之空氣20係吹向所述風扇11之所述進氣側112，並通過所述風扇11之所述出氣側114及所述過濾件12進入所述容置空間90之所述存放區域91中。The dried air 20 with humidity adjustment is introduced into the accommodating space 90 (eg, the top area 92 ) from the outside of the accommodating space 90 , and blows to the air of the fan filter unit 10 The central position of the fan 11 enters the accommodating space 90 (eg, the storage area 91 ) that is larger than the fan filter unit 10 to lower the accommodating space 90 (eg, the storage area 91 ). 91) humidity. In one embodiment, the dried air 20 with humidity adjustment is blown toward the intake side 112 of the fan 11 , and enters the air through the exhaust side 114 of the fan 11 and the filter element 12 . in the storage area 91 of the accommodating space 90 .

在一實施例中，所述至少一風扇過濾單元10係可包括複數個風扇過濾單元10。該等風扇過濾單元10呈間隔設置，且所述經乾燥調節濕度之空氣20係可吹向各所述風扇過濾單元10之各所述風扇11之所述進氣側112，並通過各所述風扇11之所述出氣側114及各所述過濾件12分散進入所述容置空間90之所述存放區域91中。此外，由於所述迴風牆60之所述內部迴風空間62通過該等第一迴風孔631連通所述存放區域91以及通過該等第二迴風孔632連通所述頂部區域92，因此，所述經乾燥調節濕度之空氣20可循環流動於所述頂部區域92、所述存放區域91及所述迴風牆60之所述內部迴風空間62。In one embodiment, the at least one fan filter unit 10 may include a plurality of fan filter units 10 . The fan filter units 10 are arranged at intervals, and the air 20 whose humidity has been dried and adjusted can be blown toward the intake side 112 of each of the fans 11 of each of the fan filter units 10, and passes through each of the The air outlet side 114 of the fan 11 and each of the filter elements 12 are dispersed into the storage area 91 of the accommodating space 90 . In addition, since the inner air return space 62 of the air return wall 60 communicates with the storage area 91 through the first air return holes 631 and communicates with the top area 92 through the second air return holes 632 , therefore , the air 20 whose humidity has been dried and adjusted can circulate in the top area 92 , the storage area 91 and the inner air return space 62 of the air return wall 60 .

在一實施例中，所述經乾燥調節濕度之空氣20係可來源於製程氣體20'，且所述製程氣體20'係可儲存於一儲氣裝置25內。此外，為有效降低所述容置空間90之濕度，所述經乾燥調節濕度之空氣20係可為經乾燥調節濕度之壓縮空氣，且所述經乾燥調節濕度之空氣20的露點係為-5.26℃至0.37℃。In one embodiment, the dried and humidity-adjusted air 20 can be derived from a process gas 20 ′, and the process gas 20 ′ can be stored in a gas storage device 25 . In addition, in order to effectively reduce the humidity of the accommodating space 90, the air 20 dried to adjust humidity can be compressed air dried to adjust humidity, and the dew point of the air 20 dried to adjust humidity is -5.26 °C to 0.37 °C.

所述至少一導管30用以將所述經乾燥調節濕度之空氣20從所述容置空間90之外部導入至所述容置空間90（例如：所述頂部區域92）內，即所述經乾燥調節濕度之空氣20係於所述導管30內流動。在一實施例中，所述至少一導管30係可包括一主導管31及複數個次導管32。The at least one duct 30 is used to introduce the dried and humidity-regulated air 20 from the outside of the accommodating space 90 into the accommodating space 90 (eg, the top area 92 ), that is, the accommodating space 90 . The air 20 for drying and adjusting humidity flows in the duct 30 . In one embodiment, the at least one conduit 30 may include a main conduit 31 and a plurality of secondary conduits 32 .

所述主導管31從所述容置空間90之外部導入所述經乾燥調節濕度之空氣20，因此，如圖1所示，所述主導管31之一部份是設置於所述容置空間90之外部，而其另一部分是設置於所述容置空間90之所述頂部區域92內。The main duct 31 is introduced into the dried air 20 from the outside of the accommodating space 90 . Therefore, as shown in FIG. 1 , a part of the main duct 31 is disposed in the accommodating space. 90 , and another part thereof is disposed in the top area 92 of the accommodating space 90 .

再參閱圖1及圖2，該等次導管32呈間隔設置，且該等次導管32連通所述主導管31，以分散所述經乾燥調節濕度之空氣20。在一實施例中，各所述次導管32係分別對應各所述風扇過濾單元10之各所述風扇11的中央位置。Referring to FIG. 1 and FIG. 2 again, the secondary ducts 32 are arranged at intervals, and the secondary ducts 32 are connected to the main duct 31 to disperse the air 20 whose humidity has been dried and adjusted. In one embodiment, each of the secondary ducts 32 corresponds to the central position of each of the fans 11 of each of the fan filter units 10 .

所述消音器40對應所述風扇11之所述進氣側112，且所述經乾燥調節濕度之空氣20係通過所述消音器40，以減小所述經乾燥調節濕度之空氣20產生之噪音。The muffler 40 corresponds to the intake side 112 of the fan 11 , and the air 20 dried and adjusted to humidity passes through the muffler 40 to reduce the generation of the air 20 of the dried and adjusted humidity. noise.

在一實施例中，如圖1所示，所述除濕系統1係可包括複數個消音器40，各所述消音器40係分別設置於各所述次導管32的出口處，以減小所述經乾燥調節濕度之空氣20從各所述次導管32吹出時之噪音。In one embodiment, as shown in FIG. 1 , the dehumidification system 1 may include a plurality of mufflers 40 , and each muffler 40 is respectively disposed at the outlet of each of the secondary conduits 32 to reduce the Noise when the air 20 whose humidity is adjusted and dried is blown out from each of the secondary ducts 32 .

所述氣體流量控制閥50設置於所述導管30上，用以調整所述經乾燥調節濕度之空氣20的流量。在一實施例中，所述氣體流量控制閥50係可設置於所述主導管31上，且所述氣體流量控制閥50係可為比例式電動閥。The gas flow control valve 50 is disposed on the conduit 30 to adjust the flow rate of the air 20 that has been dried and adjusted for humidity. In one embodiment, the gas flow control valve 50 may be disposed on the main conduit 31 , and the gas flow control valve 50 may be a proportional electric valve.

所述溫度感測器65及所述濕度感測器66設置於所述迴風牆60之所述內部迴風空間62中，用以感測所述經乾燥調節濕度之空氣20的溫度及濕度變化。在一實施例中，所述氣體流量控制閥50係可依據所述濕度感測器66所測得之濕度，即時調整所述經乾燥調節濕度之空氣20的流量。The temperature sensor 65 and the humidity sensor 66 are disposed in the inner air return space 62 of the air return wall 60 to sense the temperature and humidity of the air 20 whose humidity has been dried and adjusted Variety. In one embodiment, the gas flow control valve 50 can adjust the flow rate of the air 20 whose humidity is adjusted in real time according to the humidity measured by the humidity sensor 66 .

所述吸附式乾燥機71連接所述儲氣裝置25之出口，所述經乾燥調節濕度之空氣20可通過所述吸附式乾燥機71，以吸附所述經乾燥調節濕度之空氣20中的多餘水分。The adsorption dryer 71 is connected to the outlet of the air storage device 25 , and the air 20 dried and adjusted to humidity can pass through the adsorption dryer 71 to absorb the excess in the air 20 dried to adjust the humidity moisture.

所述減壓閥72設置於所述氣體流量控制閥50與所述吸附式乾燥機71之間，所述經乾燥調節濕度之空氣20可通過所述減壓閥72，以減低所述經乾燥調節濕度之空氣20的氣壓。這是由於所述經乾燥調節濕度之空氣20可能為高壓之壓縮空氣，因此，減低所述經乾燥調節濕度之空氣20的氣壓，可減小所述經乾燥調節濕度之空氣20產生之噪音及避免所述經乾燥調節濕度之空氣20衝擊損壞所述存放區域91內的物件。The pressure reducing valve 72 is disposed between the gas flow control valve 50 and the adsorption dryer 71 , and the dried air 20 with humidity adjustment can pass through the pressure reducing valve 72 to reduce the drying rate. The air pressure of the humidity-regulated air 20 is adjusted. This is because the air 20 dried to adjust humidity may be compressed air with high pressure, therefore, reducing the air pressure of the air 20 dried to adjust humidity can reduce the noise and noise generated by the air 20 dried to adjust humidity. The objects in the storage area 91 are prevented from being impacted and damaged by the air 20 , which is dried and adjusted to the humidity.

所述至少一乾燥冷卻器80設置於所述容置空間90內，用以控制所述容置空間90的溫度。在一實施例中，所述至少一乾燥冷卻器80係可設置於所述容置空間90之所述頂部區域92內，且所述至少一乾燥冷卻器80的內部可流通冷水及熱水，以控制所述容置空間90的溫度。此外，所述至少一乾燥冷卻器80係可根據所述溫度感測器65所測得之溫度，即時調整其內部之冷水量及熱水量。在一實施例中，所述至少一乾燥冷卻器80係可將所述容置空間90的溫度控制在21℃至27℃之間。The at least one drying cooler 80 is disposed in the accommodating space 90 to control the temperature of the accommodating space 90 . In one embodiment, the at least one drying cooler 80 can be disposed in the top region 92 of the accommodating space 90, and cold water and hot water can flow through the interior of the at least one drying cooler 80, to control the temperature of the accommodating space 90 . In addition, the at least one drying cooler 80 can adjust the amount of cold water and hot water in it in real time according to the temperature measured by the temperature sensor 65 . In one embodiment, the at least one drying cooler 80 can control the temperature of the accommodating space 90 between 21°C and 27°C.

如圖1所示，從所述容置空間90之外部導入至所述容置空間90內之所述經乾燥調節濕度之空氣20，經所述風扇過濾單元10分散於所述容置空間90後，可大幅降低所述容置空間90的濕度至30%以下。此外，本發明之除濕系統1相較於習知之除濕輪或冰水機等除濕方式，具有造價成本低、佔地面積小、建置時間短及運轉維護成本低等優勢，可用以取代習知之除濕系統。As shown in FIG. 1 , the air 20 whose humidity is dried and adjusted into the accommodating space 90 from the outside of the accommodating space 90 is dispersed in the accommodating space 90 through the fan filter unit 10 Afterwards, the humidity of the accommodating space 90 can be greatly reduced to below 30%. In addition, the dehumidification system 1 of the present invention has the advantages of low cost, small footprint, short construction time, and low operation and maintenance cost compared with the conventional dehumidification methods such as the dehumidification wheel or the ice water machine, and can be used to replace the conventional dehumidification methods. Dehumidification system.

圖3至圖8顯示本發明之降低空間濕度的方法的一些實施例的一或多個階段。3-8 illustrate one or more stages of some embodiments of the method of reducing space humidity of the present invention.

參閱圖3，本發明之降低空間濕度的方法的步驟(a)是提供一容置空間90。在該步驟(a)中，所述容置空間90界定一存放區域91及一頂部區域92，所述存放區域91與所述頂部區域92以一隔板93分隔。在一實施例中，所述容置空間90係可為乾燥室、無塵室或模具室。所述存放區域91可用以存放對濕度敏感的物件（例如：電子產品或模具）。Referring to FIG. 3 , step (a) of the method for reducing space humidity of the present invention is to provide an accommodating space 90 . In step (a), the accommodating space 90 defines a storage area 91 and a top area 92 , and the storage area 91 and the top area 92 are separated by a partition 93 . In one embodiment, the accommodating space 90 can be a drying room, a clean room or a mold room. The storage area 91 can be used to store humidity-sensitive items (eg, electronic products or molds).

此外，如圖3所示，所述容置空間90係可與一迴風牆60、至少一風扇過濾單元10、製程氣體20'、至少一導管30、至少一消音器40、一氣體流量控制閥50、至少一溫度感測器65、至少一濕度感測器66、一吸附式乾燥機71、一減壓閥72及至少一乾燥冷卻器80構成一除濕系統1'。圖3之除濕系統1'係相同於圖1之除濕系統1。In addition, as shown in FIG. 3 , the accommodating space 90 can be connected with a return air wall 60 , at least one fan filter unit 10 , process gas 20 ′, at least one conduit 30 , at least one muffler 40 , and a gas flow control The valve 50 , at least one temperature sensor 65 , at least one humidity sensor 66 , an adsorption dryer 71 , a pressure reducing valve 72 and at least one drying cooler 80 constitute a dehumidification system 1 ′. The dehumidification system 1 ′ of FIG. 3 is the same as the dehumidification system 1 of FIG. 1 .

參閱圖4至圖7，本發明之降低空間濕度的方法的步驟(b)是從所述容置空間90之外部導入所述經乾燥調節濕度之空氣20至所述容置空間90內。如圖4所示，所述經乾燥調節濕度之空氣20係可來源於製程氣體20'，且所述經乾燥調節濕度之空氣20係可為經乾燥調節濕度之壓縮空氣。Referring to FIG. 4 to FIG. 7 , step (b) of the method for reducing room humidity of the present invention is to introduce the dried air 20 into the accommodating space 90 from the outside of the accommodating space 90 . As shown in FIG. 4 , the dried and humidity-conditioned air 20 may be derived from a process gas 20 ′, and the dried and humidity-conditioned air 20 may be dried and humidity-conditioned compressed air.

在該步驟(b)中，所述經乾燥調節濕度之空氣20係設置於所述至少一導管30內，且所述經乾燥調節濕度之空氣20係通過所述吸附式乾燥機71，以吸附所述經乾燥調節濕度之空氣20中的水分，並將所述經乾燥調節濕度之空氣20的露點調整為-5.26℃至0.37℃。In this step (b), the air 20 that has been dried and adjusted to humidity is set in the at least one conduit 30, and the air 20 that has been dried and adjusted to humidity is passed through the adsorption dryer 71 for adsorption The moisture in the dried humidity-adjusted air 20 is adjusted, and the dew point of the dried humidity-adjusted air 20 is adjusted to -5.26°C to 0.37°C.

在一實施例中，所述至少一導管30係可包括一主導管31及複數個次導管32。所述主導管31可將所述經乾燥調節濕度之空氣20從所述容置空間90之外部導入所述容置空間90之所述頂部區域92內，因此，如圖4所示，所述主導管31之一部份是設置於所述容置空間90之外部，而其另一部分是設置於所述容置空間90之所述頂部區域92內。該等次導管32呈間隔設置，且該等次導管32連通所述主導管31，用以分散所述經乾燥調節濕度之空氣20。在一實施例中，各所述次導管32係分別對應各所述風扇過濾單元10之各所述風扇11的中央位置。In one embodiment, the at least one conduit 30 may include a main conduit 31 and a plurality of secondary conduits 32 . The main duct 31 can guide the dried and humidity-regulated air 20 from the outside of the accommodating space 90 into the top area 92 of the accommodating space 90. Therefore, as shown in FIG. 4 , the A part of the main pipe 31 is disposed outside the accommodating space 90 , and the other part is disposed in the top area 92 of the accommodating space 90 . The secondary ducts 32 are arranged at intervals, and the secondary ducts 32 are connected to the main duct 31 for dispersing the air 20 whose humidity has been dried and adjusted. In one embodiment, each of the secondary ducts 32 corresponds to the central position of each of the fans 11 of each of the fan filter units 10 .

如圖5所示，所述經乾燥調節濕度之空氣20在通過所述吸附式乾燥機71之後，可接續通過所述減壓閥72，以減低所述經乾燥調節濕度之空氣20的氣壓。這是由於所述經乾燥調節濕度之空氣20可能為高壓之壓縮空氣，而減低所述經乾燥調節濕度之空氣20的氣壓，可減小所述經乾燥調節濕度之空氣20產生之噪音。在一實施例中，所述經乾燥調節濕度之空氣20的氣壓係可減低至小於或等於2 Kg/cm² 。As shown in FIG. 5 , after passing through the adsorption dryer 71 , the air 20 dried to adjust humidity may pass through the pressure reducing valve 72 to reduce the air pressure of the air 20 dried to adjust humidity. This is because the dried and adjusted humidity air 20 may be high-pressure compressed air, and reducing the air pressure of the dried and adjusted humidity air 20 can reduce the noise generated by the dried and adjusted humidity air 20 . In one embodiment, the air pressure of the dried air 20 with adjusted humidity can be reduced to less than or equal to 2 Kg/cm ² .

如圖6所示，所述經乾燥調節濕度之空氣20在通過所述減壓閥72之後，可接續通過所述氣體流量控制閥50，以調整所述經乾燥調節濕度之空氣20的流量。在一實施例中，所述氣體流量控制閥50係可為比例式電動閥，且所述氣體流量控制閥50係可依據所述濕度感測器66所測得之濕度，即時調整所述經乾燥調節濕度之空氣20的流量。As shown in FIG. 6 , after passing through the pressure reducing valve 72 , the air 20 dried and adjusted to humidity may pass through the gas flow control valve 50 to adjust the flow rate of the air 20 dried to adjust humidity. In one embodiment, the gas flow control valve 50 can be a proportional electric valve, and the gas flow control valve 50 can adjust the flow rate in real time according to the humidity measured by the humidity sensor 66 . The flow rate of the dry humidity-adjusted air 20 .

如圖7所示，所述經乾燥調節濕度之空氣20在通過所述氣體流量控制閥50之後，依序進入所述次導管32、通過所述消音器40進行消音處理及吹向所述風扇過濾單元10。在一實施例中，所述消音器40係設置於所述次導管32的出口處，以減小所述經乾燥調節濕度之空氣20從所述次導管32吹出時之噪音。As shown in FIG. 7 , after passing through the gas flow control valve 50 , the dried air 20 enters the secondary duct 32 in sequence, passes through the muffler 40 for silencing treatment, and blows to the fan Filter unit 10. In one embodiment, the muffler 40 is disposed at the outlet of the secondary duct 32 to reduce the noise when the air 20 whose humidity is dried and adjusted is blown out from the secondary duct 32 .

參閱圖8，本發明之降低空間濕度的方法的步驟(c)是通過所述至少一風扇過濾單元10將所述經乾燥調節濕度之空氣20分散於所述容置空間90中，以降低所述容置空間90的濕度。在該步驟(c)中，所述至少一風扇過濾單元10係將所述經乾燥調節濕度之空氣20從所述頂部區域92吹向所述存放區域91。Referring to FIG. 8 , step (c) of the method for reducing space humidity of the present invention is to disperse the dried and humidity-adjusted air 20 in the accommodating space 90 through the at least one fan filter unit 10 to reduce the Describe the humidity of the accommodating space 90 . In this step (c), the at least one fan filter unit 10 blows the dried and humidity-adjusted air 20 from the top area 92 to the storage area 91 .

在一實施例中，所述至少一風扇過濾單元10可包括一風扇11及一過濾件12。所風扇11可將所述經乾燥調節濕度之空氣20吹向所述存放區域91。所述過濾件12對應所述風扇11，且所述經乾燥調節濕度之空氣20可通過所述過濾件12進入所述存放區域91。在一實施例中，所述過濾件12係可設置於所述風扇11之所述出氣側114。In one embodiment, the at least one fan filter unit 10 may include a fan 11 and a filter element 12 . The fan 11 can blow the dried and humidity-adjusted air 20 toward the storage area 91 . The filter element 12 corresponds to the fan 11 , and the air 20 whose humidity has been dried and adjusted can enter the storage area 91 through the filter element 12 . In one embodiment, the filter element 12 may be disposed on the air outlet side 114 of the fan 11 .

再參閱圖1，進入所述存放區域91之所述經乾燥調節濕度之空氣20可進一步通過所述迴風牆60之該等第一迴風孔631進入所述內部迴風空間62，並通過該等第二迴風孔632進入所述頂部區域92。也就是說，所述經乾燥調節濕度之空氣20可循環流動於所述頂部區域92、所述存放區域91及所述迴風牆60之所述內部迴風空間62。Referring again to FIG. 1 , the dried air 20 entering the storage area 91 can further enter the inner air return space 62 through the first air return holes 631 of the air return wall 60 , and pass through the air return space 62 . The second air return holes 632 enter the top area 92 . That is to say, the air 20 whose humidity has been dried and adjusted can circulate in the top area 92 , the storage area 91 and the inner air return space 62 of the air return wall 60 .

此外，由於所述濕度感測器66是設置於所述迴風牆60之所述內部迴風空間62中，因此，可即時取得所述容置空間90的濕度變化，且所述濕度感測器66所測得之濕度可即時反饋給所述氣體流量控制閥50，以使所述氣體流量控制閥50可根據所述容置空間90的濕度調整所述經乾燥調節濕度之空氣20的流量，進而降低所述容置空間90的濕度至30%以下。另外，設置於所述迴風牆60之所述內部迴風空間62中之所述溫度感測器65，亦可即時取得所述容置空間90的溫度變化，且所述溫度感測器65所測得之溫度可即時反饋給所述至少一乾燥冷卻器80，以使所述至少一乾燥冷卻器80可根據所述容置空間90的溫度調整其內部之冷水量及熱水量，進而將所述容置空間90的溫度控制在所需之溫度區間（例如：21℃至27℃之間）。In addition, since the humidity sensor 66 is disposed in the inner air return space 62 of the air return wall 60 , the humidity change of the accommodating space 90 can be obtained in real time, and the humidity sensor The humidity measured by the device 66 can be fed back to the gas flow control valve 50 in real time, so that the gas flow control valve 50 can adjust the flow rate of the dried air 20 according to the humidity of the accommodating space 90 , and further reduce the humidity of the accommodating space 90 to below 30%. In addition, the temperature sensor 65 disposed in the inner air return space 62 of the air return wall 60 can also obtain the temperature change of the accommodating space 90 in real time, and the temperature sensor 65 The measured temperature can be fed back to the at least one drying cooler 80 in real time, so that the at least one drying cooler 80 can adjust the amount of cold water and hot water inside the at least one drying cooler 80 according to the temperature of the accommodating space 90, and then The temperature of the accommodating space 90 is controlled within a required temperature range (eg, between 21°C and 27°C).

上述實施例僅為說明本發明之原理及其功效，並非限制本發明，因此習於此技術之人士對上述實施例進行修改及變化仍不脫本發明之精神。本發明之權利範圍應如後述之申請專利範圍所列。The above-mentioned embodiments are only to illustrate the principles and effects of the present invention, but not to limit the present invention. Therefore, those skilled in the art can modify and change the above-mentioned embodiments without departing from the spirit of the present invention. The scope of the rights of the present invention should be listed in the scope of the patent application described later.

1:除濕系統 1':除濕系統 10:風扇過濾單元 11:風扇 12:過濾件 20:經乾燥調節濕度之空氣 20':製程氣體 25:儲氣裝置 30:導管 31:主導管 32:次導管 40:消音器 50:氣體流量控制閥 60:迴風牆 62:內部迴風空間 63:迴風孔 65:溫度感測器 66:濕度感測器 71:吸附式乾燥機 72:減壓閥 80:乾燥冷卻器 90:容置空間 91:存放區域 92:頂部區域 93:隔板 112:進氣側 114:出氣側 631:第一迴風孔 632:第二迴風孔1: Dehumidification system 1': Dehumidification system 10: Fan filter unit 11: Fan 12: Filters 20: Dry air to adjust humidity 20': Process gas 25: Gas storage device 30: Catheter 31: Main tube 32: Secondary catheter 40: muffler 50: Gas flow control valve 60: Air return wall 62: Internal return air space 63: return air hole 65: temperature sensor 66: Humidity sensor 71: Adsorption dryer 72: Pressure reducing valve 80: Dry cooler 90: accommodating space 91: Storage area 92: Top area 93: Separator 112: Intake side 114: Outlet side 631: First return air hole 632: Second return air hole

當結合附圖閱讀時，自以下詳細描述易於理解本發明之一些實施例的態樣。應注意，各種結構可能未按比例繪製，且各種結構之尺寸可出於論述清晰起見任意增大或減小。Aspects of some embodiments of the invention will be readily understood from the following detailed description when read in conjunction with the accompanying drawings. It should be noted that the various structures may not be drawn to scale and that the dimensions of the various structures may be arbitrarily increased or decreased for clarity of discussion.

圖1顯示本發明之除濕系統的系統架構圖。FIG. 1 shows a system architecture diagram of the dehumidification system of the present invention.

圖2顯示本發明之主導管、次導管及風扇過濾單元之配置示意圖。FIG. 2 shows a schematic diagram of the configuration of the main duct, the secondary duct and the fan filter unit of the present invention.

圖3顯示本發明之降低空間濕度的方法的一些實施例的一或多個階段。Figure 3 shows one or more stages of some embodiments of the method of reducing space humidity of the present invention.

圖4顯示本發明之降低空間濕度的方法的一些實施例的一或多個階段。Figure 4 shows one or more stages of some embodiments of the method of reducing space humidity of the present invention.

圖5顯示本發明之降低空間濕度的方法的一些實施例的一或多個階段。Figure 5 shows one or more stages of some embodiments of the method of reducing space humidity of the present invention.

圖6顯示本發明之降低空間濕度的方法的一些實施例的一或多個階段。Figure 6 shows one or more stages of some embodiments of the method of reducing space humidity of the present invention.

圖7顯示本發明之降低空間濕度的方法的一些實施例的一或多個階段。Figure 7 shows one or more stages of some embodiments of the method of reducing space humidity of the present invention.

圖8顯示本發明之降低空間濕度的方法的一些實施例的一或多個階段。Figure 8 shows one or more stages of some embodiments of the method of reducing space humidity of the present invention.

1:除濕系統1: Dehumidification system

10:風扇過濾單元10: Fan filter unit

11:風扇11: Fan

12:過濾件12: Filters

20:經乾燥調節濕度之空氣20: Dry air to adjust humidity

20':製程氣體20': Process gas

25:儲氣裝置25: Gas storage device

30:導管30: Catheter

31:主導管31: Main pipe

32:次導管32: Secondary catheter

40:消音器40: muffler

50:氣體流量控制閥50: Gas flow control valve

60:迴風牆60: Air return wall

62:內部迴風空間62: Internal return air space

63:迴風孔63: return air hole

65:溫度感測器65: temperature sensor

66:濕度感測器66: Humidity sensor

71:吸附式乾燥機71: Adsorption dryer

72:減壓閥72: Pressure reducing valve

80:乾燥冷卻器80: Dry cooler

90:容置空間90: accommodating space

91:存放區域91: Storage area

92:頂部區域92: Top area

93:隔板93: Separator

112:進氣側112: Intake side

114:出氣側114: Outlet side

631:第一迴風孔631: First return air hole

632:第二迴風孔632: Second return air hole

Claims

一種除濕系統，包括：至少一風扇過濾單元，包括：一風扇；及一過濾件，對應所述風扇；經乾燥調節濕度之空氣，吹向所述風扇過濾單元之所述風扇，再進入較所述風扇過濾單元為大之一容置空間中，且所述經乾燥調節濕度之空氣來源於製程氣體，所述容置空間界定一存放區域及一頂部區域，所述存放區域與所述頂部區域以一隔板分隔，所述至少一風扇過濾單元設置於所述隔板上，且連通所述存放區域與所述頂部區域；一迴風牆，其包圍所述存放區域與所述頂部區域，且所述迴風牆之一內部迴風空間連通所述存放區域與所述頂部區域；及至少一溫度感測器及至少一濕度感測器，所述溫度感測器及所述濕度感測器設置於所述迴風牆之所述內部迴風空間中。 A dehumidification system, comprising: at least one fan filter unit, including: a fan; and a filter element corresponding to the fan; the air whose humidity has been dried and adjusted is blown toward the fan of the fan filter unit, and then enters the fan filter unit. The fan filter unit is in a large accommodating space, and the air whose humidity has been dried and adjusted comes from the process gas, the accommodating space defines a storage area and a top area, the storage area and the top area Separated by a partition, the at least one fan filter unit is arranged on the partition and communicates with the storage area and the top area; a return air wall surrounds the storage area and the top area, And an internal air return space of the air return wall is connected to the storage area and the top area; and at least one temperature sensor and at least one humidity sensor, the temperature sensor and the humidity sensor The device is arranged in the inner air return space of the air return wall.

如請求項1之除濕系統，其中所述風扇具有一進氣側及一出氣側，所述出氣側相對於所述進氣側，所述過濾件設置於所述風扇之所述出氣側，所述經乾燥調節濕度之空氣吹向所述風扇之所述進氣側。 The dehumidification system of claim 1, wherein the fan has an air intake side and an air outlet side, the air outlet side is opposite to the air intake side, and the filter element is disposed on the air outlet side of the fan, so The dried, humidity-adjusted air is blown toward the intake side of the fan.

如請求項1之除濕系統，另包括至少一消音器，所述消音器對應所述風扇之所述進氣側，且所述經乾燥調節濕度之空氣通過所述消音器。 The dehumidification system according to claim 1, further comprising at least one muffler, the muffler corresponds to the intake side of the fan, and the dried and humidity-adjusted air passes through the muffler.

如請求項1之除濕系統，其中所述至少一風扇過濾單元包括複數個風扇過濾單元，該等風扇過濾單元呈間隔設置，且所述經乾燥調節濕度之空氣吹向各所述風扇過濾單元之各所述風扇。 The dehumidification system of claim 1, wherein the at least one fan filter unit includes a plurality of fan filter units, the fan filter units are arranged at intervals, and the dried and humidity-adjusted air is blown toward each of the fan filter units. each of the fans.

如請求項1之除濕系統，其中所述經乾燥調節濕度之空氣的露點為-5.26℃至0.37℃。 The dehumidification system of claim 1, wherein the dew point of the air dried to adjust the humidity is -5.26°C to 0.37°C.

如請求項1之除濕系統，其中所述經乾燥調節濕度之空氣為經乾燥調節濕度之壓縮空氣。 The dehumidification system according to claim 1, wherein the air whose humidity is conditioned by drying is compressed air whose humidity is conditioned by drying.

如請求項1之除濕系統，其中所述經乾燥調節濕度之空氣吹向所述風扇的中央位置。 The dehumidification system of claim 1, wherein the dried and humidity-conditioned air is blown toward a central location of the fan.

如請求項1之除濕系統，另包括至少一導管，所述經乾燥調節濕度之空氣設置於所述導管內。 The dehumidification system according to claim 1, further comprising at least one conduit, and the air whose humidity has been dried and adjusted is arranged in the conduit.

如請求項8之除濕系統，其中所述至少一導管包括一主導管及複數個次導管，所述主導管導入所述經乾燥調節濕度之空氣，該等次導管呈間隔設置，且該等次導管連通所述主導管，以分散所述經乾燥調節濕度之空氣。 The dehumidification system of claim 8, wherein the at least one conduit comprises a main conduit and a plurality of secondary conduits, the main conduit introduces the dried and humidity-regulated air, the sub conduits are arranged at intervals, and the sub conduits are arranged at intervals. A conduit communicates with the main conduit to disperse the dried and humidity-conditioned air.

如請求項9之除濕系統，其中所述至少一風扇過濾單元包括複數個風扇過濾單元，該等風扇過濾單元呈間隔設置，且各所述次導管分別對應各所述風扇過濾單元之各所述風扇的中央位置。 The dehumidification system of claim 9, wherein the at least one fan filter unit includes a plurality of fans A fan filter unit, the fan filter units are arranged at intervals, and each of the secondary ducts respectively corresponds to the center position of each of the fans of each of the fan filter units.

如請求項9之除濕系統，另包括複數個消音器，各所述消音器分別設置於各所述次導管的出口處。 The dehumidification system according to claim 9, further comprising a plurality of mufflers, each of the mufflers is respectively disposed at the outlet of each of the secondary conduits.

如請求項8之除濕系統，另包括一氣體流量控制閥，所述氣體流量控制閥設置於所述導管上，用以調整所述經乾燥調節濕度之空氣的流量。 The dehumidification system of claim 8, further comprising a gas flow control valve, the gas flow control valve is arranged on the conduit, and is used to adjust the flow rate of the dried and humidity-adjusted air.

如請求項12之除濕系統，其中所述氣體流量控制閥係為比例式電動閥。 The dehumidification system of claim 12, wherein the gas flow control valve is a proportional electric valve.

如請求項1之除濕系統，另包括至少一乾燥冷卻器，所述至少一乾燥冷卻器設置於所述頂部區域內。 The dehumidification system according to claim 1, further comprising at least one drying cooler, and the at least one drying cooler is arranged in the top area.

如請求項1之除濕系統，其中所述迴風牆具有複數個迴風孔，所述內部迴風空間通過該等迴風孔連通所述存放區域與所述頂部區域。 The dehumidification system of claim 1, wherein the air return wall has a plurality of air return holes, and the internal air return space communicates with the storage area and the top area through the air return holes.

如請求項1之除濕系統，其中所述經乾燥調節濕度之空氣循環流動於所述頂部區域、所述存放區域及所述迴風牆之所述內部迴風空間。 The dehumidification system of claim 1 , wherein the dried and humidity-regulated air circulates in the top area, the storage area and the inner air return space of the air return wall.

如請求項1之除濕系統，另包括一吸附式乾燥機，所述經乾燥調節濕度之空氣通過所述吸附式乾燥機，以吸附所述經乾燥調節濕度之空氣中的多餘水分。 The dehumidification system according to claim 1, further comprising an adsorption dryer, and the air whose humidity has been dried and adjusted is passed through the adsorption dryer to adsorb the air in the air that has been dried and adjusted in humidity. excess moisture.

如請求項1之除濕系統，另包括一減壓閥，所述經乾燥調節濕度之空氣通過所述減壓閥，以減低所述經乾燥調節濕度之空氣的氣壓。 The dehumidification system as claimed in claim 1 further comprises a pressure reducing valve, and the air whose humidity has been dried and adjusted passes through the pressure reducing valve, so as to reduce the air pressure of the air whose humidity has been dried and adjusted.

如請求項18之除濕系統，另包括一氣體流量控制閥及一吸附式乾燥機，所述減壓閥設置於所述氣體流量控制閥與所述吸附式乾燥機之間。 The dehumidification system of claim 18 further comprises a gas flow control valve and an adsorption dryer, and the pressure reducing valve is arranged between the gas flow control valve and the adsorption dryer.

一種降低空間濕度的方法，包括：(a)提供一容置空間、一迴風牆、至少一溫度感測器及至少一濕度感測器，所述容置空間界定一存放區域及一頂部區域，所述存放區域與所述頂部區域以一隔板分隔，所述迴風牆包圍所述存放區域與所述頂部區域，且所述迴風牆之一內部迴風空間連通所述存放區域與所述頂部區域，所述溫度感測器及所述濕度感測器設置於所述迴風牆之所述內部迴風空間中；(b)從所述容置空間之外部導入經乾燥調節濕度之空氣至所述容置空間內，所述經乾燥調節濕度之空氣來源於製程氣體；及(c)通過至少一風扇過濾單元將所述經乾燥調節濕度之空氣分散於所述容置空間中，以降低所述容置空間的濕度，所述至少一風扇過濾單元設置於所述隔板上，且連通所述存放區域與所述頂部區域。 A method for reducing space humidity, comprising: (a) providing an accommodating space, a return air wall, at least one temperature sensor and at least one humidity sensor, the accommodating space defining a storage area and a top area , the storage area and the top area are separated by a partition, the air return wall surrounds the storage area and the top area, and an internal air return space of the air return wall connects the storage area and the top area. In the top area, the temperature sensor and the humidity sensor are arranged in the inner air return space of the air air return wall; (b) the dried and adjusted humidity is introduced from the outside of the accommodating space and (c) dispersing the dried and humidity-adjusted air in the accommodating space through at least one fan filter unit , in order to reduce the humidity of the accommodating space, the at least one fan filter unit is arranged on the partition plate and communicates with the storage area and the top area.

如請求項20之降低空間濕度的方法，其中在該步驟(b)中，所述經乾燥調節濕度之空氣被導入所述頂部區域內；及在該步驟(c)中，所述至少一風扇過濾單元將所述經乾燥調節濕度之空氣從所述頂部區域吹向所述存放區域。 The method for reducing room humidity of claim 20, wherein in the step (b), the dried and humidity-adjusted air is introduced into the top area; and in the step (c), the at least A fan filter unit blows the dried, humidity-conditioned air from the top area to the storage area.

如請求項21之降低空間濕度的方法，其中在該步驟(c)中，所述至少一風扇過濾單元包括一風扇及一過濾件，所述風扇將所述經乾燥調節濕度之空氣吹向所述存放區域，所述過濾件對應所述風扇，且所述經乾燥調節濕度之空氣通過所述過濾件進入所述存放區域。 The method for reducing space humidity according to claim 21, wherein in the step (c), the at least one fan filter unit comprises a fan and a filter element, and the fan blows the dried and humidity-regulated air toward the In the storage area, the filter element corresponds to the fan, and the dried and humidity-regulated air enters the storage area through the filter element.

如請求項20之降低空間濕度的方法，其中在該步驟(b)中，所述經乾燥調節濕度之空氣的露點為-5.26℃至0.37℃。 The method for reducing space humidity according to claim 20, wherein in the step (b), the dew point of the air whose humidity is adjusted by drying is -5.26°C to 0.37°C.

如請求項20之降低空間濕度的方法，其中該步驟(b)包括：(b1)吸附所述經乾燥調節濕度之空氣中的水分；(b2)減低所述經乾燥調節濕度之空氣的氣壓；及(b3)調整所述經乾燥調節濕度之空氣的流量。 The method for reducing space humidity as claimed in claim 20, wherein the step (b) comprises: (b1) adsorbing moisture in the air whose humidity has been dried and adjusted; (b2) reducing the air pressure of the air whose humidity has been dried and adjusted; and (b3) adjusting the flow rate of the dried and humidity-adjusted air.

如請求項24之降低空間濕度的方法，其中在該步驟(b2)中，所述經乾燥調節濕度之空氣的氣壓係減低至小於或等於2Kg/cm²。 The method for reducing space humidity of claim 24, wherein in the step (b2), the air pressure system of the air whose humidity is adjusted by drying is reduced to less than or equal to 2Kg/cm ² .

如請求項24之降低空間濕度的方法，其中在該步驟(b3)之後，所述降低空間濕度的方法更包括：(b4)對所述經乾燥調節濕度之空氣進行消音處理。 The method for reducing space humidity as claimed in claim 24, wherein after the step (b3), the method for reducing space humidity further comprises: (b4) performing a noise reduction treatment on the air whose humidity has been dried and adjusted.

如請求項20之降低空間濕度的方法，其中在該步驟(c)中，所述經乾燥調節濕度之空氣係降低所述容置空間的濕度至30%以下。 The method for reducing space humidity according to claim 20, wherein in the step (c), the humidity of the accommodating space is reduced to below 30% by the air whose humidity is adjusted by drying.

如請求項20之降低空間濕度的方法，其中在該步驟(c)之後，所述降低空間濕度的方法更包括：(d)根據所述容置空間的濕度調整所述經乾燥調節濕度之空氣的流量。 The method for reducing space humidity according to claim 20, wherein after step (c), the method for reducing space humidity further comprises: (d) adjusting the dried and humidity-adjusted air according to the humidity of the accommodating space traffic.