TWI763484B - Semiconductor automated storage cabinet - Google Patents
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一種儲存櫃,特别是一種半導體自動化儲存櫃。A storage cabinet, especially a semiconductor automatic storage cabinet.
半導體積體電路(Integrated circuit: IC)的發明,使得科技產業快速及先進的發展於現代生活中,使得人們獲得了更豐富以及便捷的生活,而半導體的應用層面不僅遍及了民生所用的智慧型手機、汽車及網路,隨著5G通訊、AI智能科技以及IOT物聯網的發展,半導體更成為了多項科技產業的關鍵應用基礎。The invention of semiconductor integrated circuit (IC) has enabled the rapid and advanced development of the technology industry in modern life, enabling people to obtain a richer and more convenient life, and the application level of semiconductors not only covers the intelligent With the development of 5G communication, AI smart technology and IoT Internet of Things, semiconductors have become the key application basis for many technology industries.
半導體中,一晶圓成品牽涉了整體一科技設備的運作,使得該晶圓成品的品質需求極其重要。當需要大量或有效率的製造該晶圓成品時,該晶圓於各步驟設備之間的傳遞便成為該晶圓成品的品質的關鍵。然而,當該晶圓正在於上下兩生產步驟設備之間的一準備期時,大多會以人工的方式存放於一臨時儲存櫃中等待,而此方式往往會產生人事與時間上成本的耗損以及因接觸而導致不良率的提升。In semiconductors, a finished wafer involves the operation of an entire technological device, which makes the quality requirements of the finished wafer extremely important. When the finished wafer needs to be manufactured in large quantities or efficiently, the transfer of the wafer between the various step equipment becomes the key to the quality of the finished wafer. However, when the wafer is in a preparation period between the upper and lower production step equipment, it is mostly stored manually in a temporary storage cabinet for waiting, which often results in personnel and time cost loss and Increase in defective rate due to contact.
有鑑於此,發展該晶圓存放於該臨時儲存櫃時可以達到降低人事與時間成本,減少不良率的產生,是相關製造產業極需發展的目標。In view of this, when the wafers are stored in the temporary storage cabinet, the cost of personnel and time can be reduced, and the generation of defective rates can be reduced, which is the goal that the related manufacturing industry needs to develop.
為了發展一晶圓存放於一儲存櫃時,可以達到降低人事與時間成本之技術,本發明提供一種半導體自動化儲存櫃,其包含一儲存空間以及位於該儲存空間中央的一自動手臂,其中,該自動手臂包含一夾取端以及一定點基座,該夾取端對該定點基座定義一個為類球形之一夾取範圍,該夾取範圍於任一投影面形成一夾取路徑;以及該儲存空間包含一個以上的連續表面以及設至於該連續表面的複數個儲存裝置,且該儲存裝置對應設於該夾取路徑上。In order to develop a technology that can reduce personnel and time costs when a wafer is stored in a storage cabinet, the present invention provides a semiconductor automated storage cabinet, which includes a storage space and an automatic arm located in the center of the storage space, wherein the The automatic arm includes a gripping end and a certain point base, the gripping end defines a sphere-like gripping range to the fixed-point base, and the gripping range forms a gripping path on any projection surface; and the The storage space includes more than one continuous surface and a plurality of storage devices arranged on the continuous surface, and the storage devices are correspondingly arranged on the clamping path.
其中,該自動手臂的至少一側面設置有一個該儲存裝置,該儲存裝置由上到下的包含有複數個儲存列,其中至少一個該儲存列,對應該夾取範圍的相較於其下方的該儲存列朝向該自動手臂方向突出設置。Wherein, at least one side of the automatic arm is provided with a storage device, and the storage device includes a plurality of storage rows from top to bottom, and at least one of the storage rows corresponds to the gripping range compared to the lower one. The storage row is protruded toward the direction of the automatic arm.
其中,定義該定點基座位置為一水平基準面,且該夾取端可以相對於該定點基座之上方形成該夾取範圍,於該水平基準面所對應的至少一個該儲存列之上方的各該儲存列,依序的相較於其下方的儲存列朝向該自動手臂方向突出設置。Wherein, the position of the fixed-point base is defined as a horizontal reference plane, and the gripping end can form the holding range relative to the top of the fixed-point base, and the position above at least one of the storage rows corresponding to the horizontal reference plane Each of the storage rows is sequentially arranged to protrude toward the automatic arm compared to the storage row below it.
其中,定義該定點基座位置為一水平基準面,且該夾取端可以相對於該定點基座之下方形成該夾取範圍,於該水平基準點所對應的至少一個該儲存列之下方的各該儲存列,依序的相較於其上方的儲存列朝向該自動手臂方向突出設置。Wherein, the position of the fixed-point base is defined as a horizontal reference plane, and the gripping end can form the gripping range relative to the bottom of the fixed-point base, and the position below at least one of the storage rows corresponding to the horizontal reference point Each of the storage rows is sequentially arranged to protrude toward the automatic arm compared to the storage row above it.
其中,該儲存列上間隔排列有複數個儲存位,該儲存裝置上至少部分的該儲存列兩端外側的該儲存位,相較於其內側的該儲存位朝向該自動手臂方向突出設置。Wherein, a plurality of storage positions are arranged at intervals on the storage row, and at least part of the storage positions on the outer sides of both ends of the storage row on the storage device are protruded toward the automatic arm direction compared with the storage positions on the inner side thereof.
其中,每一個該儲存列相較於位於下方或上方的該儲存列朝向該自動手臂方向突出其整體深度的五分之一至二分之一之間。Wherein, each of the storage rows protrudes from one-fifth to one-half of its overall depth in the direction of the automatic arm compared to the storage row located below or above the storage row.
其中,相對位於外側的該儲存位相較於其內側該儲存位朝向該自動手臂方向突出整體深度的五分之一至二分之一之間Wherein, the storage position relatively located on the outer side protrudes from one-fifth to one-half of the overall depth in the direction of the automatic arm compared to the inner side of the storage position
進一步地,該自動手臂的其中一側面的左右兩側設置有二個第二儲存裝置,該自動手臂的另外三個側面則各對應有一個該儲存裝置,其中,二個該第二儲存裝置中間產生一間隔距離,該間隔距離位置對應該自動手臂的一轉軸死角。Further, two second storage devices are provided on the left and right sides of one of the side surfaces of the automatic arm, and the other three side surfaces of the automatic arm are respectively provided with one of the storage devices, wherein the middle of the two second storage devices. An interval distance is generated, and the position of the interval distance corresponds to a dead angle of a rotation axis of the automatic arm.
進一步地,該自動手臂的四個側面皆對應設置有一該儲存裝置,該自動手臂位置與各該儲存裝置的垂直距離相同。Further, the storage device is correspondingly disposed on the four sides of the automatic arm, and the position of the automatic arm is the same as the vertical distance of each storage device.
進一步地,五個該儲存裝置以該自動手臂為中心等距的環繞設置。Further, five of the storage devices are equidistantly arranged around the automatic arm.
本發明所提供的半導體自動化儲存櫃可以達到的優勢為: 1. 各該儲存裝置以該自動手臂為中心等距的環繞設置,使得該儲存空間可以達到最佳的空間利用,提升整體儲存量。 2. 至少一個該儲存列順應該夾取範圍的相較於其下方或上方的該儲存列突出設置的結構特性,可以較佳的縮短該自動手臂的行程距離,提升該自動手臂的作業效率。 3. 於該儲存列的兩端外側的該儲存位,相較於其內側的該儲存位順應該夾取範圍的朝向該自動手臂方向突出設置,可以較佳的縮短該自動手臂的行程距離,提升該自動手臂的作業效率。 4.該儲存裝置可以設計成適應於各種型態的該自動手臂,如該轉軸死角,產生最大化的用途。 The advantages that the semiconductor automatic storage cabinet provided by the present invention can achieve are: 1. Each of the storage devices is equidistantly arranged around the automatic arm, so that the storage space can achieve the best space utilization and increase the overall storage capacity. 2. At least one of the storage rows conforming to the gripping range is protruded from the storage row below or above the storage row, which can better shorten the travel distance of the automatic arm and improve the operation efficiency of the automatic arm. 3. Compared with the storage position on the outer side of both ends of the storage row, the storage position on the inner side of the storage position conforms to the gripping range and protrudes toward the automatic arm, which can better shorten the travel distance of the automatic arm. Improve the working efficiency of the automatic arm. 4. The storage device can be designed to adapt to various types of the automatic arm, such as the dead angle of the rotating shaft, to maximize the use.
請參考圖1及圖2,其為本發明所提供的半導體自動化儲存櫃較佳實施例,包含一儲存空間10以及位於該儲存空間10中央的一自動手臂20。該儲存空間10包含一個以上的連續表面,對應該連續表面的設置有複數個儲存裝置11;該自動手臂20包含一夾取端21以及一定點基座22,該夾取端21對該應該定點基座22定義一個為類球形之一夾取範圍,其中,該夾取範圍於任一投影面形成一夾取路徑,且該夾取路徑與該儲存裝置對應設置。Please refer to FIG. 1 and FIG. 2 , which are preferred embodiments of the semiconductor automated storage cabinet provided by the present invention, including a
本實施例中,該自動手臂20的至少一側面包含有至少一個儲存裝置11,該儲存裝置11以層架的型式由上到下的包含有對應該夾取路徑設置的複數個儲存列111,每個該儲存列111上橫向的間隔排列有複數個儲存位1111,且各該儲存位1111以朝向該自動手臂20的側面為一開放端,各該儲存列111之該開方端對應該夾取路徑設置,該自動手臂20透過該夾取裝置21可以將一儲存盒至該開放端放置於其中一該儲存位1111中。進一步地,該自動臂20可連接至位於該儲存空間10外側的一外部設備,透過該外部設備可以操控該自動手臂20於該儲存空間10中任意移動形成該夾取路徑。In this embodiment, at least one side surface of the
較佳的,該自動手臂20的四個側面,皆設置有一個該儲存裝置11,且該自動手臂20位置與各該儲存裝置11的垂直距離相同,該儲存裝置11也並不限定只設置於該自動手臂20的其中四側面,亦可以將五個該儲存裝置11以該自動手臂20中心等距的環繞設置,使得該儲存空間10可以達到最佳的空間利用,提升整體儲存量。Preferably, the four sides of the
其中,各該儲存裝置11中至少一個該儲存列111,對應該夾取範圍的相較於其下方的該儲存列111朝向該自動手臂20方向突出設置,使得該儲存裝置11以側面角度觀察時,該儲存裝置11朝向該自動手臂20的一側面呈現沿上方方向的朝向該自動手臂20延伸的一類球形曲線,本實施例中,各該儲存裝置11由上到下的包含有8個該儲存列111,且每一該儲存列111之大小皆相同,其中位於最上方的3個該儲存列111各自相較於其下方之該儲存列111朝向該自動手臂20方向突出設置約整體三分之一的距離。Wherein, at least one of the
本實施例中,每一該儲存列111之大小並不限制需相同,複數個儲存列111之該開放端對應該夾取範圍類球形的朝向該自動手臂20方向設置皆可以達到本發明之特點。In this embodiment, the size of each of the
請配合參考圖3A,定義該定點基座22位置為一水平基準面A,且該夾取端21可以相對於該定點基座22之上方形成該夾取範圍D,於該水平基準面A所對應的至少一個該儲存列111之上方的各該儲存列111,依序的相較於其下方的儲存列111朝向該自動手臂20方向突出排列設置,且相對位於上的每一個該儲存列111相較於位於下方的該儲存列111朝向該自動手臂20方向突出整體深度的五分之一至二分之一之間。Please refer to FIG. 3A , define the position of the
各該儲存列111沿上方方向的相較於其下方的該儲存列111突出設置的結構特性,使得該自動手臂20移動至相對於水平基準點上方的各該儲存位1111時,可以較佳的縮短該自動手臂20的行程距離,提升該自動手臂20的作業效率。The protruding structure of each
請配合參考圖3B,其為本發明第二較佳實施例,各該儲存列111也可以不限定於沿上方方向的朝向該自動手臂20方向突出設置,本實施例中,定義該定點基座22位置為一水平基準面A,且該夾取端21可以相對於該定點基座22之下方形成該夾取範圍D,於該水平基準面A所對應的至少一個該儲存列111下方的各該儲存列111,依序的相較於其上方的儲存列111朝向該自動手臂20方向突出錯位排列設置,且相對位於下的每一個該儲存列111相較於位於上方的該儲存列111朝向該自動手臂20方向突出整體深度的五分之一至二分之一之間。Please refer to FIG. 3B , which is the second preferred embodiment of the present invention. Each
亦或是,相對於該水平基準面A所對應的部分該儲存列111上方或下方的各該儲存列111沿其上方或下方方向的,相較於其下方或上方的該儲存列111朝向該自動手臂20方向突出設置。Or, each of the
較佳的,對應該夾取範圍的,該儲存裝置11至少一部分該儲存列111的兩端外側的該儲存位1111,相較於其內側的該儲存位1111朝向該自動手臂20方向突出設置,且相對位於外側的該儲存位1111相較於其內側該儲存位1111朝向該自動手臂20方向突出整體深度的五分之一至二分之一之間,使得該儲存裝置11可以更符合該夾取範圍的類球形樣態,該自動手臂20可以相對的縮短於該儲存裝置11兩側的各該儲存位1111時的行程距離,提升該自動手臂20的作業效率。Preferably, corresponding to the gripping range, the
進一步的,配合該自動手臂20的機械結構,於該自動手臂20對應一轉軸死角處的其中一側面設置有二個第二儲存裝置11A,而該自動手臂20的另外三個該側面則各對應有一個該儲存裝置11,二個該第二儲存裝置11A間隔設置於其中一該側面的左右兩側,使得二個該第二儲存裝置11A中間產生一間隔距離12,且該間隔距離12位置對應該轉軸死角。該間隔距離12的設置可以避免該儲存空間10無效使用,還可以在對應該間隔距離12的位置設置有可連通該儲存空間10外側的一開門,使得一人員可以透過該開門進出該儲存空間10,如此該儲存裝置11可以設計成適應於各種型態的該自動手臂20,產生最大化的用途。Further, in accordance with the mechanical structure of the
本發明所提供的半導體自動化儲存櫃可以達到的優勢為:
1. 各該儲存裝置11以該自動手臂20為中心等距的環繞設置,使得該儲存空間10可以達到最佳的空間利用,提升整體儲存量。
2. 至少一個該儲存列111順應該夾取範圍的的相較於其下方或上方的該儲存列111突出設置的結構特性,可以較佳的縮短該自動手臂20的行程距離,提升該自動手臂20的作業效率。
3. 於該儲存列111的兩端外側的該儲存位1111,順應該夾取範圍的相較於其內側的該儲存位1111朝向該自動手臂20方向突出設置,可以較佳的縮短該自動手臂20的行程距離,提升該自動手臂20的作業效率。
4.該儲存裝置11可以設計成適應於各種型態的該自動手臂20,如該轉軸死角,產生最大化的用途。
The advantages that the semiconductor automatic storage cabinet provided by the present invention can achieve are:
1. Each of the
10:儲存空間
11:儲存裝置
11A:第二儲存裝置
111:儲存列
1111:儲存位
12:間隔距離
20:自動手臂
21:夾取裝置
22:定點基座
D:夾取範圍
10: Storage space
11:
圖1為本發明較佳實施例第一立體示意圖 圖2為本發明較佳實施例第二立體示意圖 圖3為本發明較佳實施例示意圖 FIG. 1 is a first three-dimensional schematic diagram of a preferred embodiment of the present invention. FIG. 2 is a second perspective view of the preferred embodiment of the present invention. Figure 3 is a schematic diagram of a preferred embodiment of the present invention
10:儲存空間 10: Storage space
11:儲存裝置 11: Storage device
11A:第二儲存裝置 11A: Second storage device
111:儲存列 111: Storage column
1111:儲存位 1111: storage bit
12:間隔距離 12: separation distance
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TWM619869U (en) * | 2021-05-14 | 2021-11-21 | 銓發科技股份有限公司 | Automated semiconductor storage cabinet |
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