TWI763146B - Piezoresistive pressure sensor to realize a high-precision sensing system - Google Patents
Piezoresistive pressure sensor to realize a high-precision sensing system Download PDFInfo
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本發明係有關於一種壓阻式氣壓傳感器實現高精度感測系統，尤其是指一種不僅能獲得精確的氣壓數據，且令校正作業達到精準與簡化的功能，有效降低了校正作業的困難度，而在其整體施行使用上更增實用功效特性者。The invention relates to a piezoresistive air pressure sensor to realize a high-precision sensing system, in particular to a function that can not only obtain accurate air pressure data, but also achieve accurate and simplified calibration operations, effectively reducing the difficulty of calibration operations. And in its overall implementation and use, it has more practical efficacy characteristics.
按，近年來因自動化的蓬勃發展，氣動技術為實現許多自動控制的幕後推手，具有節能、無汙染及低成本等特點，常被廣泛應用在工業領域，也因此許多工廠因應需要而配置一些管線，以傳輸氣體使得設備能夠順利運作，而管線中的氣體壓力與工業安全息息相關，若管線內的壓力過大無法被及時的發現，極有可能會造成氣體的洩漏，發生不可挽回的意外；在工業領域方面，對於壓力感測要求精準度更高，且耗電更低，環境也更加嚴苛，但是伴隨著嚴苛的使用環境，經常導致壓力感測器因為環境的因素，使得感測器的誤差提升。Press, due to the vigorous development of automation in recent years, pneumatic technology is the driving force behind the realization of many automatic controls. It has the characteristics of energy saving, no pollution and low cost. It is often widely used in the industrial field. Therefore, many factories are equipped with some pipelines according to their needs. , to transmit gas to make the equipment operate smoothly, and the gas pressure in the pipeline is closely related to industrial safety. If the pressure in the pipeline is too large and cannot be detected in time, it is very likely to cause gas leakage and irreversible accidents; In the field, the pressure sensing requires higher accuracy, lower power consumption, and more severe environment. However, with the harsh use environment, the pressure sensor is often caused by environmental factors. Error increase.
典型的小型微機電系統［MEMS］主要是以壓阻測量建構，雖然具備著高靈敏度及製造成本低等特點，被廣泛應用，但也因為其易受環境溫度影響，而造成其輸出訊號有所誤差，在校正也較為複雜，當感測器接收到環境變化而產生的訊號，必須經過傳送器轉換為類比訊號；在早期的傳送器，大多是電壓型將量測訊號轉換為0-5V電壓輸出，主要是透過運算放大器直接輸出，但是在訊號需要在遠距離傳輸的情況，或者是環境干擾較大的場合，電壓型的缺點便會暴露出來，由於傳輸距離較長，電壓在線路中的耗損過大，經常會導致精準度降低，再加上其抗干擾能力極差，當輸出的直流電壓參雜著交流成分，經常會導致控制器產生錯誤，甚至可能導致設備損換，逐漸被電流型傳送器取代。A typical small-scale micro-electromechanical system (MEMS) is mainly constructed by piezoresistive measurement. Although it has the characteristics of high sensitivity and low manufacturing cost, it is widely used, but it is also easily affected by the ambient temperature, which causes its output signal to vary. The error is also more complicated to correct. When the sensor receives the signal generated by the environmental change, it must be converted into an analog signal by the transmitter; in the early transmitters, most of the voltage type converted the measurement signal into a 0-5V voltage The output is mainly output directly through the operational amplifier. However, when the signal needs to be transmitted over a long distance, or in the case of large environmental interference, the shortcomings of the voltage type will be exposed. Due to the long transmission distance, the voltage in the line Excessive loss will often lead to reduced accuracy, and its anti-interference ability is extremely poor. When the output DC voltage is mixed with AC components, it will often cause errors in the controller, and may even lead to equipment damage and replacement, which is gradually replaced by the current type. Teleporter replaced.
其中，該電流型傳送器採用4-20mA傳送訊號，主要因為其不易受到干擾、電流源的並聯內阻無限大，且串聯電阻在迴路中不影響訊號的精度，而該電流型傳送器又可分為兩線式、三線式及四線式等系統架構。Among them, the current type transmitter uses 4-20mA to transmit signals, mainly because it is not easily disturbed, the parallel internal resistance of the current source is infinite, and the series resistance does not affect the accuracy of the signal in the loop, and the current type transmitter can also be used. It is divided into two-wire, three-wire and four-wire system architectures.
請再一併參閱第三圖現有之兩線式電流型傳送器架構示意圖所示，該兩線式電流型傳送器(2)主要係令傳感器(21)電性連接有傳送器(22)，而該傳送器(22)與外部電源(23)及測量錶頭(24)以串聯方式電性連接，使得該傳送器(22)在電流回路中可視為一個特別的負載，該傳送器(22)耗電電流控制在4~20mA之間，且根據該傳感器(21)的輸出大小而變化；請再一併參閱第四圖現有之三線式電流型傳送器架構示意圖所示，該三線式電流型傳送器(3)主要係令傳感器(31)電性連接有傳送器(32)，而該傳送器(32)與外部電源(33)呈並聯方式電性連接，再令該外部電源(33)另以一導線與測量錶頭(34)一端電性連接，該測量錶頭(34)另一端則與該傳送器(32)電性連接；請再一併參閱第五圖現有之四線式電流型傳送器架構示意圖所示，該四線式電流型傳送器(4)主要係令傳感器(41)連接有傳送器(42)，而該傳送器(42)與外部電源(43)呈並聯方式電性連接，且令該傳送器(42)與測量錶頭(44)亦呈並聯方式電性連接。Please also refer to the schematic diagram of the structure of the existing two-wire current mode transmitter in Fig. 3. The two-wire current mode transmitter (2) mainly makes the sensor (21) electrically connected with the transmitter (22). The transmitter (22) is electrically connected in series with the external power supply (23) and the measuring head (24), so that the transmitter (22) can be regarded as a special load in the current loop. ) The power consumption current is controlled between 4 and 20 mA, and varies according to the output of the sensor (21). The type transmitter (3) mainly makes the sensor (31) electrically connected with the transmitter (32), and the transmitter (32) is electrically connected with the external power source (33) in parallel, and then the external power source (33) is electrically connected. ) is electrically connected to one end of the measuring head (34) by a wire, and the other end of the measuring head (34) is electrically connected to the transmitter (32); please refer to the existing four wires in Figure 5. As shown in the schematic diagram of the structure of the type current type transmitter, the four-wire type current type transmitter (4) mainly connects the sensor (41) with the transmitter (42), and the transmitter (42) is connected to the external power supply (43) The parallel connection is electrically connected, and the transmitter (42) and the measuring head (44) are also electrically connected in parallel.
而考慮到電流傳送器在使用時必須安裝在現場設備的管線上，監測系統則會在距離現場較遠的監控室中，兩者相距可能超過數十米甚至數百米，由於使用抗雜訊干擾的雙絞線，且該四線式電流型傳送器(4)和該三線式電流型傳送器(3)的常因為導線內電流不對稱，而必須使用昂貴的遮罩線，在成本的考量上大多都使用該兩線式電流型傳送器(2)，以節省昂貴的線材費用。Considering that the current transmitter must be installed on the pipeline of the field equipment, the monitoring system will be in the monitoring room far away from the field, and the distance between the two may exceed tens of meters or even hundreds of meters. Interfering twisted pair wires, and the four-wire current type transmitter (4) and the three-wire type current type transmitter (3) often have to use expensive shielding wires because of the current asymmetry in the wires. Considering that most of the two-wire current-type transmitters (2) are used, the cost of expensive wires can be saved.
然而，上述各類型傳送器雖可達到將訊號轉換為類比訊號進行傳送之預期功效，但也其實際操作施行使用上發現，一般該類傳送器在校正參數上，大多是由原廠設定好固定的參數並安裝，當機房內需要更換氣壓範圍，或者是需要重新校正時，便需要請廠商到現場處理，無法透過廠內的管理者自行校正並且修改參數，可能導致現場的傳送器出問題時，無法即時的排除，嚴重可能導致現場的機台因此而損壞，致令其在整體結構設計上仍存有改進之空間。However, although the above-mentioned types of transmitters can achieve the expected effect of converting the signal into an analog signal for transmission, it is also found in the actual operation and use that the calibration parameters of these types of transmitters are generally set and fixed by the original factory. When the air pressure range needs to be replaced in the computer room, or when it needs to be re-calibrated, it is necessary to ask the manufacturer to deal with it on site. It is impossible to calibrate and modify the parameters through the factory administrator, which may lead to problems with the transmitter on site. , it cannot be eliminated immediately, and it may seriously damage the machine on site, so that there is still room for improvement in the overall structural design.
緣是，發明人有鑑於此，秉持多年該相關行業之豐富設計開發及實際製作經驗，再予以研究改良，提供一種壓阻式氣壓傳感器實現高精度感測系統，以期達到更佳實用價值性之目的者。The reason is that the inventors, in view of this, uphold many years of rich experience in design, development and actual production in the related industry, and then conduct research and improvement to provide a piezoresistive air pressure sensor to achieve a high-precision sensing system, in order to achieve better practical value. target person.
本發明之主要目的在於提供一種壓阻式氣壓傳感器實現高精度感測系統，其主要係不僅能獲得精確的氣壓數據，且令校正作業達到精準與簡化的功能，有效降低了校正作業的困難度，而在其整體施行使用上更增實用功效特性者。The main purpose of the present invention is to provide a piezoresistive air pressure sensor to realize a high-precision sensing system, which can not only obtain accurate air pressure data, but also achieve accurate and simplified calibration operations, effectively reducing the difficulty of calibration operations. , and in its overall implementation and use, it will increase the practical efficacy characteristics.
本發明壓阻式氣壓傳感器實現高精度感測系統之主要目的與功效，係由以下具體技術手段所達成：The main purpose and effect of the piezoresistive air pressure sensor of the present invention to achieve a high-precision sensing system are achieved by the following specific technical means:
其主要係包括有感測系統；其中：Its main systems include sensing systems; of which:
該感測系統，其設有壓力感測器，於該壓力感測器電性連接有類比/數位轉換器［ADC］，該類比/數位轉換器電性連接有微控制器，該微控制器分別電性連接有數位/類比轉換器［DAC］及連接埠，該數位/類比轉換器電性連接有電流環，而該連接埠則電性連接有人機介面［HMI］，令該微控制器主要負責計算該類比/數位轉換器的數位訊號，並將其轉換為正確的氣壓值及校正值，提供給該數位/類比轉換器準確的數據，以讓該電流環輸出穩定的電流訊號，並利用該連接埠讓該微控制器與該人機介面進行溝通。The sensing system is provided with a pressure sensor, an analog/digital converter (ADC) is electrically connected to the pressure sensor, and a microcontroller is electrically connected to the analog/digital converter, and the microcontroller is electrically connected to the pressure sensor. A digital/analog converter [DAC] and a connecting port are respectively electrically connected, the digital/analog converter is electrically connected with a current loop, and the connecting port is electrically connected with a human-machine interface [HMI], so that the microcontroller It is mainly responsible for calculating the digital signal of the analog/digital converter, and converting it into the correct pressure value and correction value, providing accurate data to the digital/analog converter, so that the current loop can output a stable current signal, and Using the port allows the microcontroller to communicate with the human-machine interface.
本發明壓阻式氣壓傳感器實現高精度感測系統的較佳實施例，其中，該壓力感測器係為壓阻式氣壓感測器。The piezoresistive air pressure sensor of the present invention is a preferred embodiment for realizing a high-precision sensing system, wherein the pressure sensor is a piezoresistive air pressure sensor.
本發明壓阻式氣壓傳感器實現高精度感測系統的較佳實施例，其中，該壓力感測器具有溫度補償，其溫度補償範圍為-20℃~80℃。The piezoresistive air pressure sensor of the present invention is a preferred embodiment for realizing a high-precision sensing system, wherein the pressure sensor has temperature compensation, and the temperature compensation range is -20°C to 80°C.
本發明壓阻式氣壓傳感器實現高精度感測系統的較佳實施例，其中，該連接埠係為RS-485。A preferred embodiment of the piezoresistive air pressure sensor of the present invention to realize a high-precision sensing system, wherein the connection port is RS-485.
為令本發明所運用之技術內容、發明目的及其達成之功效有更完整且清楚的揭露，茲於下詳細說明之，並請一併參閱所揭之圖式及圖號：In order to make the technical content used in the present invention, the purpose of the invention and the effect achieved by the present invention more completely and clearly disclosed, it is explained in detail below, and please refer to the disclosed drawings and drawing numbers together:
首先，請參閱第一圖本發明之架構示意圖所示，本發明主要係包括有感測系統(1)；其中：First of all, please refer to the schematic diagram of the structure of the present invention in Figure 1. The present invention mainly includes a sensing system (1); wherein:
該感測系統(1)，其設有壓力感測器(11)，於該壓力感測器(11)電性連接有類比/數位轉換器［ADC］(12)，該類比/數位轉換器(12)電性連接有微控制器(13)，該微控制器(13)分別電性連接有數位/類比轉換器［DAC］(14)及連接埠(15)，該數位/類比轉換器(14)電性連接有電流環(16)，而該連接埠(15)則電性連接有人機介面［HMI］(17)；The sensing system (1) is provided with a pressure sensor (11), an analog/digital converter [ADC] (12) is electrically connected to the pressure sensor (11), and the analog/digital converter is (12) A microcontroller (13) is electrically connected, the microcontroller (13) is electrically connected with a digital/analog converter [DAC] (14) and a connection port (15), respectively, and the digital/analog converter (14) A current loop (16) is electrically connected, and the connection port (15) is electrically connected to a human-machine interface [HMI] (17);
該壓力感測器(11)，其係為壓阻式氣壓感測器，利用感測器薄膜上的壓阻感測元件［Piezoresistive Sensing Device］，偵測薄膜受壓力後產生型變，將機械能的變化轉換成電子的訊號輸出，且於該壓力感測器(11)具有溫度補償，其溫度補償範圍為-20℃~80℃；The pressure sensor (11), which is a piezoresistive air pressure sensor, utilizes a piezoresistive Sensing Device on the sensor film to detect the deformation of the film after being subjected to pressure, and convert the mechanical The energy change is converted into an electronic signal output, and the pressure sensor (11) has temperature compensation, and the temperature compensation range is -20°C~80°C;
該類比/數位轉換器［ADC］(12)，其係將由該壓力感測器(11)所傳輸之類比訊號轉換為數位訊號；the analog/digital converter [ADC] (12), which converts the analog signal transmitted by the pressure sensor (11) into a digital signal;
該微控制器(13)，其主要負責計算該類比/數位轉換器(12)的數位訊號，並將其轉換為正確的氣壓值及校正值，提供給該數位/類比轉換器(14)準確的數據，以讓該電流環(16)能夠輸出穩定的電流訊號；The microcontroller (13) is mainly responsible for calculating the digital signal of the analog/digital converter (12), converting it into a correct air pressure value and a correction value, and providing it to the digital/analog converter (14) accurately data, so that the current loop (16) can output a stable current signal;
該數位/類比轉換器［DAC］(14)，其係將該微控制器(13)所傳輸之數位訊號轉換為類比訊號；the digital/analog converter [DAC] (14), which converts the digital signal transmitted by the microcontroller (13) into an analog signal;
該連接埠(15)，其可為RS-485，以讓該微控制器(13)與該人機介面(17)進行溝通；the connection port (15), which can be RS-485, to allow the microcontroller (13) to communicate with the human-machine interface (17);
該電流環(16)，其為電流增益的發送器，透過該電流環(16)的轉換，能夠得到精確的訊號輸出；The current loop (16) is a transmitter of current gain, and accurate signal output can be obtained through the conversion of the current loop (16);
該人機介面(17)，其供操作人員操作與該微控制器(13)進行溝通。The man-machine interface (17) is used by the operator to communicate with the microcontroller (13).
如此一來，使得本發明在操作使用上，即可令該感測系統(1)透過該類比/數位轉換器(12)將該氣壓感測器(11)所量測到的微小訊號，經由其內部的放大器將訊號放大後轉換為數位訊號，經過該微控制器(13)計算氣壓值，來讓氣壓產生變化時能夠做出校正，並透過該數位/類比轉換器(14)的輸出電壓來驅動該電流環(16)，因而產生4-20mA的電流訊號，另亦能透過該連接埠(15)與該人機介面(17)進行溝通以顯示資料及進行氣壓值的校正。In this way, in the operation and use of the present invention, the sensing system (1) can use the analog/digital converter (12) to measure the small signal measured by the air pressure sensor (11), through the The internal amplifier amplifies the signal and converts it into a digital signal. The microcontroller (13) calculates the air pressure value, so that the air pressure can be corrected when the air pressure changes, and passes the output voltage of the digital/analog converter (14). to drive the current loop (16), thereby generating a current signal of 4-20mA, and can also communicate with the man-machine interface (17) through the connecting port (15) to display data and calibrate the air pressure value.
而由於該氣壓感測器(11)在製造時，其輸出訊號均會有些許誤差，加上該氣壓感測器(11)內部是透過惠斯頓電橋的變化產生感測訊號，因此在設計時必須要考慮該氣壓感測器(11)在沒有輸入氣壓時，電橋內部產生的初始偏移電壓，需要透過軟體進行補償，避免影響輸出端的電流精準度；因此在程式執行時，會先讀取氣壓校正值，並且透過設定氣壓值的範圍，可以依據使用者自行設定量測範圍的最大氣壓值及最小氣壓值，進行系統校正；當系統內無預先存取的校正值時，使用者必須直接輸入最大氣壓值及最小氣壓值做設定，透過系統內的校正公式，能夠計算出氣壓校正值，確保輸出之電流訊號精確度。Since the output signal of the air pressure sensor (11) will have some errors during manufacture, and the inside of the air pressure sensor (11) generates the sensing signal through the change of the Wheatstone bridge, therefore, in the When designing, it must be considered that the initial offset voltage generated inside the bridge when the air pressure sensor (11) has no input air pressure needs to be compensated by software to avoid affecting the current accuracy of the output end; therefore, when the program is executed, it will First read the air pressure calibration value, and by setting the range of the air pressure value, the system can be calibrated according to the maximum air pressure value and the minimum air pressure value of the measurement range set by the user; when there is no pre-stored calibration value in the system, use The user must directly input the maximum pressure value and the minimum pressure value for setting. Through the correction formula in the system, the pressure correction value can be calculated to ensure the accuracy of the output current signal.
請再一併參閱第二圖本發明之氣壓校正流程示意圖所示，為了能夠得到準確的氣壓值，可以透過該氣壓感測器(11)在最小氣壓及滿量程的情況下，量測其訊號經過該類比/數位轉換器(12)，經由該類比/數位轉換器(12)內部的放大器，將訊號放大之後轉換為數位訊號，藉由這些數位訊號即能夠計算出該氣壓感測器(11)的訊號誤差進行校正；當輸入氣壓為氣壓感測器的滿量程時，將ADC所量測到的數位值定義為High code，當輸入氣壓為氣壓感測器的最小氣壓值時，將ADC所量測到的數位值定義為Low code，將Count定義為氣壓量程範圍。將該氣壓感測器(11)滿量程時的ADC值減去該氣壓感測器(11)無應變時的ADC值，除以氣壓量測數據的資料筆數，可得到當ADC的值提升1階時，所對應到的數位值，並將此數位值設定為Val，可得到公式(4.1)。Please also refer to the second diagram of the air pressure calibration flow diagram of the present invention. In order to obtain an accurate air pressure value, the air pressure sensor (11) can be used to measure its signal under the condition of minimum air pressure and full scale. After the analog/digital converter (12) and the amplifier inside the analog/digital converter (12), the signal is amplified and then converted into a digital signal, and the air pressure sensor (11) can be calculated by using these digital signals. ) signal error for correction; when the input air pressure is the full scale of the air pressure sensor, the digital value measured by the ADC is defined as High code; when the input air pressure is the minimum air pressure value of the air pressure sensor, the ADC The measured digital value is defined as Low code, and Count is defined as the pressure range. Subtract the ADC value of the air pressure sensor (11) when the air pressure sensor (11) is in full scale from the ADC value of the air pressure sensor (11) when there is no strain, and divide it by the number of data records of air pressure measurement data to obtain when the ADC value increases When the first order is the corresponding digital value, and this digital value is set to Val, the formula (4.1) can be obtained.
Val=
透過公式(4.1)所計算出來的Val值，可以藉由此數值計算出當該氣壓感測器(11)受到氣壓應變時，當下的ADC數值定義為ADC code，並將氣壓輸入為0時，透過ADC所量測到的ADC值定義為Zero code，為了能夠得到當前的氣壓，將ADC code減去Zero code所得到的差值，除以Val值即可推算出當前氣壓值的大小，即為公式(4.2)。Through the value of Val calculated by formula (4.1), it can be calculated from this value that when the air pressure sensor (11) is subjected to air pressure strain, the current ADC value is defined as ADC code, and when the air pressure input is 0, The ADC value measured by the ADC is defined as the Zero code. In order to obtain the current air pressure, the difference obtained by subtracting the Zero code from the ADC code is divided by the Val value to calculate the current air pressure value, which is Equation (4.2).
Bar=
當得到正確的氣壓值後，需透過DAC將數值轉換為驅動電壓，驅動該電流環(16)，由於系統需要控制輸出電流在4-20mA，必須先將輸出電流4mA的DAC值計算出來，該電流環(16)可採用德州儀器所生產的XTR115，以令該電流環(16)可得到100倍的電流增益，經由公式(4.3)可以計算出當輸出電流為4mA時，輸入電流為0.04mA，DAC的輸出電壓經由10K歐姆的電阻輸入為XTR115之該電流環(16)內，可由歐姆定律得知DAC的輸出電壓為400mV。When the correct air pressure value is obtained, it is necessary to convert the value into a driving voltage through the DAC to drive the current loop (16). Since the system needs to control the output current at 4-20mA, the DAC value of the output current of 4mA must be calculated first. The current loop (16) can use the XTR115 produced by Texas Instruments, so that the current loop (16) can obtain a current gain of 100 times. Through formula (4.3), it can be calculated that when the output current is 4mA, the input current is 0.04mA , the output voltage of the DAC is input into the current loop (16) of the XTR115 through a 10K ohm resistor, and the output voltage of the DAC is 400mV from Ohm's law.
為了求得當DAC輸出電壓為400mV時DAC的輸出數值，由於DAC的解析度為16位元的，設定的參考電壓為2.5V，可以藉由公式(4.4)求得DAC每一LSB所輸出的電壓，將400mV除以DAC每一LSB所輸出的電壓，可以得到在400mV時DAC的數值為10486。In order to obtain the output value of the DAC when the output voltage of the DAC is 400mV, since the resolution of the DAC is 16 bits and the set reference voltage is 2.5V, the voltage output by each LSB of the DAC can be obtained by formula (4.4). , divide 400mV by the voltage output by each LSB of the DAC, the value of the DAC at 400mV can be obtained as 10486.
其中n：DAC的位元解析度where n: the bit resolution of the DAC
DAC LSB =
為了使氣壓範圍對應到輸出的4-20mA，將DAC轉換的最大值65536對應到20mA，將20mA的DAC值65536減去4mA的DAC值10486，在除以DAC的解析度Count，即可得到4-20mA每一LSB的電壓值，再乘上氣壓值即可得到正確的電壓，公式(4.5)為DAC數值對應4-20mA。In order to make the air pressure range correspond to the output 4-20mA, the maximum value of DAC conversion 65536 corresponds to 20mA, the DAC value of 20mA 65536 minus the DAC value of 4mA 10486, and divided by the resolution Count of the DAC, you can get 4 The voltage value of each LSB of -20mA can be multiplied by the pressure value to obtain the correct voltage. The formula (4.5) is the DAC value corresponding to 4-20mA.
而將該感測系統(1)以5Bar的該氣壓感測器(11)作為氣壓檢測的壓力範圍，並也利用手動氣壓泵當作標準氣壓源，氣壓輸出在0Bar、1Bar、2Bar、3Bar、4Bar、5Bar時，透過該電流環(16)將訊號輸出，同時由該人機介面(17)讀取資料，可獲得下表1之實驗數據，由表1可以看出，將該電流環(16)的理想輸出電流與實際輸出電流相減後，除以理想輸出電流並乘上100%，即可得到該電流環(16)的輸出誤差，而該電流環(16)的電流輸出訊號的誤差最高為0.475%。在實驗結果中，證明該感測系統(1)能夠在氣壓量程滿載0%~100%的壓力範圍內，準確的對應到4-20mA的工業標準電流輸出，且誤差值低於0.5%。
藉由以上所述，本發明之使用實施說明可知，本發明與現有技術手段相較之下，本發明主要係不僅能獲得精確的氣壓數據，且令校正作業達到精準與簡化的功能，有效降低了校正作業的困難度，而在整體施行使用上更增實用功效特性者。From the above, it can be seen from the description of the use and implementation of the present invention that, compared with the prior art means, the present invention can not only obtain accurate air pressure data, but also achieve the functions of precision and simplification of the calibration operation, effectively reducing the It reduces the difficulty of calibrating the operation, and increases the practical performance characteristics in the overall implementation and use.
然而前述之實施例或圖式並非限定本發明之產品結構或使用方式，任何所屬技術領域中具有通常知識者之適當變化或修飾，皆應視為不脫離本發明之專利範疇。However, the foregoing embodiments or drawings do not limit the product structure or usage of the present invention, and any appropriate changes or modifications made by those with ordinary knowledge in the technical field should be regarded as not departing from the scope of the present invention.
綜上所述，本發明實施例確能達到所預期之使用功效，又其所揭露之具體構造，不僅未曾見諸於同類產品中，亦未曾公開於申請前，誠已完全符合專利法之規定與要求，爰依法提出發明專利之申請，懇請惠予審查，並賜准專利，則實感德便。To sum up, the embodiment of the present invention can indeed achieve the expected use effect, and the specific structure disclosed is not only not seen in similar products, but also has not been disclosed before the application, which fully complies with the provisions of the patent law In accordance with the requirements, I would like to file an application for an invention patent in accordance with the law, and I urge you to review it and grant the patent.
1:感測系統1: Sensing system
11:壓力感測器11: Pressure sensor
12:類比/數位轉換器12: Analog/Digital Converter
13:微控制器13: Microcontroller
14:數位/類比轉換器14: Digital/Analog Converter
15:連接埠15: port
16:電流環16: Current loop
17:人機介面17: Human-Machine Interface
2:兩線式電流型傳送器2: Two-wire current type transmitter
21:傳感器21: Sensors
22:傳送器22: Teleporter
23:外部電源23: External power supply
24:測量錶頭24: Measuring head
3:三線式電流型傳送器3: Three-wire current type transmitter
31:傳感器31: Sensor
32:傳送器32: Teleporter
33:外部電源33: External power supply
34:測量錶頭34: Measuring head
4:四線式電流型傳送器4: Four-wire current type transmitter
41:傳感器41: Sensor
42:傳送器42: Teleporter
43:外部電源43: External power supply
44:測量錶頭44: Measuring head
第一圖：本發明之架構示意圖Figure 1: Schematic diagram of the structure of the present invention
第二圖：本發明之氣壓校正流程示意圖Figure 2: Schematic diagram of the air pressure calibration process of the present invention
第三圖：現有之兩線式電流型傳送器架構示意圖Figure 3: Schematic diagram of the existing two-wire current mode transmitter
第四圖：現有之三線式電流型傳送器架構示意圖Figure 4: Schematic diagram of the existing three-wire current mode transmitter
第五圖：現有之四線式電流型傳送器架構示意圖Figure 5: Schematic diagram of the existing four-wire current mode transmitter
1:感測系統 1: Sensing system
11:壓力感測器 11: Pressure sensor
12:類比/數位轉換器 12: Analog/Digital Converter
13:微控制器 13: Microcontroller
14:數位/類比轉換器 14: Digital/Analog Converter
15:連接埠 15: port
16:電流環 16: Current loop
17:人機介面 17: Human-Machine Interface
Claims (4)
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM379055U (en) * | 2009-11-05 | 2010-04-21 | Tsint | Pressure sensor |
| TWI516768B (en) * | 2011-03-11 | 2016-01-11 | Panasonic Ip Man Co Ltd | Sensor |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM379055U (en) * | 2009-11-05 | 2010-04-21 | Tsint | Pressure sensor |
| TWI516768B (en) * | 2011-03-11 | 2016-01-11 | Panasonic Ip Man Co Ltd | Sensor |
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