TWI761694B - Micro particle inspection apparatus - Google Patents

Micro particle inspection apparatus Download PDF

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TWI761694B
TWI761694B TW108127007A TW108127007A TWI761694B TW I761694 B TWI761694 B TW I761694B TW 108127007 A TW108127007 A TW 108127007A TW 108127007 A TW108127007 A TW 108127007A TW I761694 B TWI761694 B TW I761694B
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target object
detection device
optical system
focusing element
light source
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TW202104877A (en
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黃冠勳
張勛豪
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由田新技股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation

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Abstract

A micro particle inspection apparatus adapted to detect a plurality of micro particles of a target object is provided. The micro particle inspection apparatus includes a light source, an optical system and an image capturing device. The light source is adapted to provide an illumination beam. The optical system is disposed on the transmission path of the illumination beam. The optical system includes an optical focusing element having a depth of field value. The optical system provides a detection beam onto the target object to produce an image beam. The image capturing device is disposed on the transmission path of the image beam, wherein the detecting beam is a collimated light beam, and a focal plane of the optical focusing element does not overlap with a surface of the target object having the micro particles.

Description

微粒子檢測裝置Microparticle detection device

本發明是有關於一種照明裝置，且特別是有關於一種微粒子檢測裝置。The present invention relates to an illumination device, and particularly to a particle detection device.

隨著科技發展，人們對於電子產品中電子構件的精密程度及品質需求越來越高。舉例來說，電子產品中電路板上之各種元件的品質及外觀檢測為製造及檢驗過程中的重要步驟，以確保電路板的功能正常。在目前電路板的製作過程中，具有上導電粒子漿後將銅箔基板黏合的步驟。因此，為求電路板具有良好的製作過程，在製作過程中或製作過程後，需以檢測設備觀察微小的導電粒子結構，以對導電粒子的密度進行計算。With the development of science and technology, people have higher and higher demands for the precision and quality of electronic components in electronic products. For example, quality and appearance inspection of various components on circuit boards in electronic products is an important step in the manufacturing and inspection process to ensure that the circuit boards function properly. In the current manufacturing process of the circuit board, there is a step of bonding the copper foil substrate after applying the conductive particle paste. Therefore, in order to ensure that the circuit board has a good manufacturing process, it is necessary to observe the structure of tiny conductive particles with a detection device during or after the manufacturing process to calculate the density of the conductive particles.

然而，在目前的作法當中，常以光學檢測設備中距離物鏡較近的一端搭配上一微分干涉相差（Differential interference contrast ，DIC）顯微鏡模組以進行對導電粒子的觀察。但是若使用此種作法，不但需要配置較多的光學元件之外，還會進一步提升成本。此外，增加光學元件也將導致整體的照明亮度衰減一半以上。因此，若需達到良好的光學效果，需進一步增加照明亮度。再者，使用微分干涉相差顯微鏡模組的光學檢測設備具有較複雜的操作程序。因此，如何設計或改良現有光學檢測設備以不需額外配置微分干涉相差顯微鏡模組的方式，增加微粒子所呈現的對比度，是本領域技術人員共同致力於研究的。However, in the current practice, a differential interference contrast (DIC) microscope module is often used at the end of the optical detection device that is closer to the objective lens to observe conductive particles. However, if this method is used, not only more optical elements need to be configured, but also the cost will be further increased. In addition, adding optical elements will also cause the overall illumination brightness to be reduced by more than half. Therefore, in order to achieve a good optical effect, it is necessary to further increase the illumination brightness. Furthermore, the optical inspection equipment using the differential interference phase contrast microscope module has a relatively complicated operation procedure. Therefore, how to design or improve the existing optical detection equipment to increase the contrast presented by the microparticles without additionally configuring the differential interference phase contrast microscope module is a joint research by those skilled in the art.

本發明提供一種微粒子檢測裝置，可提高微粒子在影像中的對比度。The invention provides a microparticle detection device, which can improve the contrast of microparticles in an image.

本發明的一實施例提出一種微粒子檢測裝置，用於檢測一目標物件的多個微粒子。微粒子檢測裝置包括一光源、一光學系統以及一影像擷取裝置。光源適於提供一照明光束。光學系統配置於照明光束的傳遞路徑上。光學系統包括一光學聚焦元件，具有一景深值。光學系統提供一檢測光束至目標物件上以產生一影像光束。影像擷取裝置配置於影像光束的傳遞路徑上，且光學聚焦元件的一焦平面與目標物件中具有微粒子的一表面不重疊。An embodiment of the present invention provides a particle detection device for detecting a plurality of particles of a target object. The particle detection device includes a light source, an optical system and an image capturing device. The light source is adapted to provide an illumination beam. The optical system is arranged on the transmission path of the illumination beam. The optical system includes an optical focusing element with a depth of field value. The optical system provides a detection beam to the target object to generate an image beam. The image capturing device is disposed on the transmission path of the image beam, and a focal plane of the optical focusing element does not overlap with a surface of the target object with the particles.

在本發明的一實施例中，上述的微粒子檢測裝置還包括一調整模組。光源配置於調整模組上，且調整模組適於移動光源以改變光源與光學系統的距離。In an embodiment of the present invention, the above-mentioned particle detection device further includes an adjustment module. The light source is disposed on the adjustment module, and the adjustment module is suitable for moving the light source to change the distance between the light source and the optical system.

在本發明的一實施例中，上述的光學聚焦元件的焦平面與目標物件中具有微粒子的表面的距離介於四分之一倍的景深值至兩倍的景深值之間。In an embodiment of the present invention, the distance between the focal plane of the optical focusing element and the surface of the target object with the fine particles is between a quarter of the depth of field value to twice the depth of field value.

在本發明的一實施例中，上述的光學系統還包括一離焦模組。光學聚焦元件配置於離焦模組上，離焦模組適於移動光學聚焦元件以使光學聚焦元件對目標物件產生微離焦。In an embodiment of the present invention, the above-mentioned optical system further includes a defocusing module. The optical focusing element is disposed on the defocusing module, and the defocusing module is suitable for moving the optical focusing element to cause the optical focusing element to slightly defocus the target object.

在本發明的一實施例中，上述的光源所提供的照明光束為準直光束。In an embodiment of the present invention, the illumination beam provided by the above-mentioned light source is a collimated beam.

在本發明的一實施例中，上述的光源為點光源。In an embodiment of the present invention, the above-mentioned light source is a point light source.

在本發明的一實施例中，上述的微粒子檢測裝置還包括一處理單元，電性連接影像擷取裝置，適於依據影像擷取裝置對目標物件進行分析。In an embodiment of the present invention, the above-mentioned particle detection device further includes a processing unit electrically connected to the image capture device, adapted to analyze the target object according to the image capture device.

在本發明的一實施例中，上述的微粒子檢測裝置還包括一移動載台，適於承載目標物件，且移動載台適於移動目標物件以使光學聚焦元件對目標物件產生微離焦。In an embodiment of the present invention, the above-mentioned particle detection device further includes a moving stage suitable for carrying the target object, and the moving stage is suitable for moving the target object to cause the optical focusing element to slightly defocus the target object.

在本發明的一實施例中，上述的光學系統為反射式光學系統。In an embodiment of the present invention, the above-mentioned optical system is a reflective optical system.

在本發明的一實施例中，上述的目標物件的微粒子為帶電粒子。In an embodiment of the present invention, the fine particles of the target object are charged particles.

在本發明的一實施例中，上述的檢測光束為準直光束。In an embodiment of the present invention, the above-mentioned detection beam is a collimated beam.

基於上述，本發明的微粒子檢測裝置可在進行檢測時，藉由投射具有準直特性的檢測光束至目標物件中具有微粒子的表面上，以及藉由光學系統中作為物鏡的一光學聚焦元件產生微離焦狀態，提高目標物件上多個微粒子在影像擷取裝置所呈現的影像對比度，使其具有良好的光學顯示效果，進而可檢測出目標物件上微粒子的單位密度。Based on the above, the microparticle detection device of the present invention can perform detection by projecting a detection beam with collimated characteristics on the surface of the target object with microparticles, and generating microparticles by an optical focusing element serving as an objective lens in the optical system. The out-of-focus state improves the image contrast presented by the plurality of particles on the target object in the image capture device, so that it has a good optical display effect, and then the unit density of the particles on the target object can be detected.

為讓本發明的上述特徵和優點能更明顯易懂，下文特舉實施例，並配合所附圖式作詳細說明如下。In order to make the above-mentioned features and advantages of the present invention more obvious and easy to understand, the following embodiments are given and described in detail with the accompanying drawings as follows.

圖1為本發明一實施例的微粒子檢測裝置的示意圖。請參考圖1。本實施例提供一種微粒子檢測裝置100，用於檢測一目標物件10的多個微粒子P。舉例而言，目標物件10例如是電路板，而多個微粒子P例如是在電路板上的導電粒子。但微粒子檢測裝置100實際上可應用於檢測不同種類的突起微粒子，本發明並不限於此。FIG. 1 is a schematic diagram of a microparticle detection device according to an embodiment of the present invention. Please refer to Figure 1. This embodiment provides a particle detection device 100 for detecting a plurality of particles P of a target object 10 . For example, the target object 10 is, for example, a circuit board, and the plurality of fine particles P are, for example, conductive particles on the circuit board. However, the microparticle detection device 100 can actually be applied to detect different kinds of protruding microparticles, and the present invention is not limited thereto.

微粒子檢測裝置100包括一光源110、一光學系統120以及一影像擷取裝置130。具體而言，在本實施例中，微粒子檢測裝置100還包括處理單元140。光源110適於提供一照明光束L1至光學系統120中。光源110例如為鹵素燈、可見光雷射裝置、紅外雷射裝置或發光二極體光源，照明光束L1可以是白光、單波長可見光、近紅外光或短波長紅外光或其他波長光等，本發明並不限於此。The particle detection device 100 includes a light source 110 , an optical system 120 and an image capture device 130 . Specifically, in this embodiment, the particle detection apparatus 100 further includes a processing unit 140 . The light source 110 is adapted to provide an illumination beam L1 into the optical system 120 . The light source 110 is, for example, a halogen lamp, a visible light laser device, an infrared laser device or a light-emitting diode light source, and the illumination beam L1 can be white light, single-wavelength visible light, near-infrared light, short-wavelength infrared light, or other wavelengths of light, etc. The present invention It is not limited to this.

光學系統120例如是具有聚焦透鏡、反射鏡、分光鏡或其他光學元件等構件組合的光學鏡頭或光學裝置。在本實施例中，光學系統120為反射式光學系統。光學系統120適於接收光源110所提供的照明光束L1，並藉由光學系統120內部的光學元件的光學作用以提供一檢測光束L2至目標物件10上，以產生一影像光束L3並傳遞至光學系統120，其中傳遞至目標物件10的檢測光束L2為準直光束或具準直特性的光束。在本實施例中，光源110所提供的照明光束L1即為準直光束。但在不同的實施例中，檢測光束L2實質上可等同於或不同於照明光束L1，例如是藉由光學系統120的光學效果將非準直的照明光束L1轉化為具有準直特性的檢測光束L2，本發明並不於此。The optical system 120 is, for example, an optical lens or an optical device having a combination of components such as a focusing lens, a mirror, a beam splitter, or other optical elements. In this embodiment, the optical system 120 is a reflective optical system. The optical system 120 is adapted to receive the illumination beam L1 provided by the light source 110, and provide a detection beam L2 to the target object 10 through the optical action of the optical elements inside the optical system 120, so as to generate an image beam L3 and transmit it to the optical system The system 120, wherein the detection light beam L2 transmitted to the target object 10 is a collimated light beam or a light beam with a collimated characteristic. In this embodiment, the illumination light beam L1 provided by the light source 110 is a collimated light beam. However, in different embodiments, the detection beam L2 can be substantially the same as or different from the illumination beam L1, for example, the non-collimated illumination beam L1 is converted into a detection beam with collimated characteristics by the optical effect of the optical system 120 L2, the present invention is not so.

詳細而言，光學系統120包括一光學聚焦元件122，例如是一物鏡，而此光學聚焦元件122具有一景深值。在本實施例中，光學聚焦元件122的一焦平面與目標物件10中具有微粒子P的一表面不重疊。換句話說，光學聚焦元件122對於目標物件10中具有微粒子P的表面處於微離焦狀態。在本實施例中，光學聚焦元件122的焦平面與目標物件10中具有微粒子P的表面的距離介於四分之一倍的光學聚焦元件122景深值至兩倍的光學聚焦元件122景深值之間。In detail, the optical system 120 includes an optical focusing element 122, such as an objective lens, and the optical focusing element 122 has a depth of field value. In this embodiment, a focal plane of the optical focusing element 122 does not overlap with a surface of the target object 10 having the microparticles P. In other words, the optical focusing element 122 is in a slightly defocused state with respect to the surface of the target object 10 having the fine particles P. In this embodiment, the distance between the focal plane of the optical focusing element 122 and the surface with the microparticles P in the target object 10 is between one quarter of the depth of field value of the optical focusing element 122 to twice the depth of field value of the optical focusing element 122 between.

影像擷取裝置130配置於影像光束LI的傳遞路徑上，適於接收影像光束LI，將影像光束LI的光學圖像轉換為電子訊號。具體而言，紅外線影像擷取裝置130包含一感光元件132，適於接收影像光束LI以轉換為一影像資訊。感光元件132例如是電荷耦合器件（Charge-coupled Device，CCD）。在本實施例中，影像擷取裝置130例如為線型掃瞄相機或面型掃描相機。在一些實施例中，影像擷取裝置130可視需求配置具有屈光度的一或多個光學鏡片的組合，例如包含雙凹透鏡、雙凸透鏡、凹凸透鏡、凸凹透鏡、平凸透鏡以及平凹透鏡等非平面鏡片的各種組合，以協助引導影像光束LI，但本發明並不限於此。處理單元140則電性連接影像擷取裝置130，適於依據感光元件132所轉換得出的影像資訊對目標物件10進行分析。The image capturing device 130 is disposed on the transmission path of the image beam LI, and is suitable for receiving the image beam LI, and converting the optical image of the image beam LI into an electronic signal. Specifically, the infrared image capturing device 130 includes a photosensitive element 132, which is suitable for receiving the image light beam LI to convert it into an image information. The photosensitive element 132 is, for example, a charge-coupled device (Charge-coupled Device, CCD). In this embodiment, the image capturing device 130 is, for example, a line scan camera or an area scan camera. In some embodiments, the image capturing device 130 may be configured with a combination of one or more optical lenses having dioptric powers as required, for example, a combination of non-planar lenses including bi-concave lenses, bi-convex lenses, meniscus lenses, convex-concave lenses, plano-convex lenses, and plano-concave lenses. Various combinations can be used to assist in guiding the image beam LI, but the invention is not limited thereto. The processing unit 140 is electrically connected to the image capturing device 130 and is adapted to analyze the target object 10 according to the image information converted by the photosensitive element 132 .

因此，在進行檢測時，微粒子檢測裝置100可藉由投射具有準直特性的檢測光束L2至目標物件10中的具有微粒子P的表面上，以及藉由光學系統120中作為物鏡的一光學聚焦元件122產生微離焦，提高目標物件10上微粒子P在影像擷取裝置130所呈現的影像對比度，使其具有良好的光學顯示效果，進而可檢測出目標物件10上在微粒子P的單位密度。Therefore, during detection, the particle detection device 100 can project the detection beam L2 with collimated properties on the surface of the target object 10 with the particles P, and use an optical focusing element as an objective lens in the optical system 120 122 generates a slight defocus to improve the image contrast of the particles P on the target object 10 in the image capture device 130 , so that it has a good optical display effect, and then the unit density of the particles P on the target object 10 can be detected.

圖2為本發明另一實施例的微粒子檢測裝置的示意圖。請參考圖2。本實施例的微粒子檢測裝置100A類似於圖1所繪示的微粒子檢測裝置100。兩者不同處在於，在本實施例中，微粒子檢測裝置100A還包括一調整模組150，適於配置光源110於其中，以使調整模組150移動光源110以改變光源110與光學系統120的距離。詳細而言，在本實施例中，調整模組150例如是具有容納並固定光源110的結構以及適於讓此結構沿方向D1來回移動的軌道或其他機構。如此一來，藉由調遠光源110（例如是移動至距離較遠的位置110’）的作動，可更進一步提高對比度以獲得較清晰的微粒子P呈現影像。此外，由於光源110與光學系統120的距離可被調整，因此本實施例的光源110可選用點光源。FIG. 2 is a schematic diagram of a microparticle detection device according to another embodiment of the present invention. Please refer to Figure 2. The microparticle detection apparatus 100A of this embodiment is similar to the microparticle detection apparatus 100 shown in FIG. 1 . The difference between the two is that, in this embodiment, the particle detection device 100A further includes an adjustment module 150 suitable for disposing the light source 110 therein, so that the adjustment module 150 moves the light source 110 to change the distance between the light source 110 and the optical system 120 . distance. In detail, in this embodiment, the adjustment module 150 has, for example, a structure for accommodating and fixing the light source 110 and a track or other mechanism suitable for allowing the structure to move back and forth along the direction D1. In this way, by adjusting the distance of the light source 110 (for example, moving to a farther position 110'), the contrast can be further improved to obtain a clearer image of the particles P. In addition, since the distance between the light source 110 and the optical system 120 can be adjusted, the light source 110 of this embodiment can be selected as a point light source.

圖3為本發明另一實施例的微粒子檢測裝置的示意圖。請參考圖3。本實施例的微粒子檢測裝置100B類似於圖2所繪示的微粒子檢測裝置100A。兩者不同處在於，在本實施例中，微粒子檢測裝置100B的光學系統120還包括一離焦模組124。光學聚焦元件122配置於離焦模組124上，且離焦模組124適於移動光學聚焦元件122以使光學聚焦元件122對目標物件10產生微離焦。換句話說，相較於上述的實施例，本實施例可藉由改變光學聚焦元件122的位置以達到微離焦狀態。此外，在非檢測微粒子P的情況下，微粒子檢測裝置100B也可藉由操作離焦模組124以移動光學聚焦元件122至對焦狀態，進而讓微粒子檢測裝置100B在不同的應用下具有可操作性。FIG. 3 is a schematic diagram of a microparticle detection device according to another embodiment of the present invention. Please refer to Figure 3. The microparticle detection apparatus 100B of this embodiment is similar to the microparticle detection apparatus 100A shown in FIG. 2 . The difference between the two is that, in this embodiment, the optical system 120 of the particle detection device 100B further includes a defocusing module 124 . The optical focusing element 122 is disposed on the defocusing module 124 , and the defocusing module 124 is adapted to move the optical focusing element 122 to cause the optical focusing element 122 to slightly defocus the target object 10 . In other words, compared with the above-mentioned embodiments, the present embodiment can achieve a slightly defocused state by changing the position of the optical focusing element 122 . In addition, in the case of non-detection of the particles P, the particle detection device 100B can also operate the defocusing module 124 to move the optical focusing element 122 to a focused state, so that the particle detection device 100B is operable in different applications .

圖4為本發明另一實施例的微粒子檢測裝置的示意圖。請參考圖4。本實施例的微粒子檢測裝置100C類似於圖2所繪示的微粒子檢測裝置100A。兩者不同處在於，在本實施例中，微粒子檢測裝置100C還包括一移動載台160，適於承載目標物件10。移動載台160適於移動目標物件10以使光學聚焦元件122對目標物件10產生微離焦。換句話說，相較於上述的實施例，本實施例可藉由改變目標物件10的位置以達到微離焦狀態。此外，在非檢測微粒子P的情況下，微粒子檢測裝置100B也可藉由操作載台160以移動目標物件10至對焦狀態，進而讓微粒子檢測裝置100B在不同的應用下具有可操作性。FIG. 4 is a schematic diagram of a microparticle detection device according to another embodiment of the present invention. Please refer to Figure 4. The microparticle detection apparatus 100C of this embodiment is similar to the microparticle detection apparatus 100A shown in FIG. 2 . The difference between the two is that, in this embodiment, the particle detection device 100C further includes a moving stage 160 , which is suitable for carrying the target object 10 . The moving stage 160 is adapted to move the target object 10 to cause the optical focusing element 122 to slightly defocus the target object 10 . In other words, compared with the above-mentioned embodiments, the present embodiment can achieve a slightly defocused state by changing the position of the target object 10 . In addition, in the case of non-detection of microparticles P, the microparticle detection apparatus 100B can also operate the stage 160 to move the target object 10 to a focused state, thereby making the microparticle detection apparatus 100B operable in different applications.

綜上所述，本發明的微粒子檢測裝置可在進行檢測時，藉由投射具有準直特性的檢測光束至目標物件中具有微粒子的表面上，以及藉由光學系統中作為物鏡的一光學聚焦元件產生微離焦狀態，提高目標物件上多個微粒子在影像擷取裝置所呈現的影像對比度，使其具有良好的光學顯示效果，進而可檢測出目標物件上微粒子的單位密度。In summary, the particle detection device of the present invention can perform detection by projecting a detection beam with collimated characteristics onto the surface of the target object with particles, and by using an optical focusing element as an objective lens in the optical system A slightly defocused state is generated to improve the image contrast presented by a plurality of particles on the target object in the image capture device, so that it has a good optical display effect, and then the unit density of the particles on the target object can be detected.

雖然本發明已以實施例揭露如上，然其並非用以限定本發明，任何所屬技術領域中具有通常知識者，在不脫離本發明的精神和範圍內，當可作些許的更動與潤飾，故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed above by the embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, The protection scope of the present invention shall be determined by the scope of the appended patent application.

10:目標物件 100、100A、100B、100C:微粒子檢測裝置 110:光源 110’:位置 120:光學系統 122:光學聚焦元件 124:離焦模組 130:影像擷取裝置 132:感光元件 140:處理單元 150:調整模組 160:移動載台 D1:方向 L1:照光光束 L2:檢測光束 L3:影像光束 P:微粒子10: Target Object 100, 100A, 100B, 100C: Microparticle detection device 110: Light source 110': Location 120: Optical system 122: Optical focusing element 124: Defocus Module 130: Image capture device 132: Photosensitive element 140: Processing unit 150:Adjust Mods 160: Mobile stage D1: Direction L1: Lighting beam L2: Detection beam L3: Image beam P: microparticles

圖1為本發明一實施例的微粒子檢測裝置的示意圖。 圖2為本發明另一實施例的微粒子檢測裝置的示意圖。 圖3為本發明另一實施例的微粒子檢測裝置的示意圖。 圖4為本發明另一實施例的微粒子檢測裝置的示意圖。FIG. 1 is a schematic diagram of a microparticle detection device according to an embodiment of the present invention. FIG. 2 is a schematic diagram of a microparticle detection device according to another embodiment of the present invention. FIG. 3 is a schematic diagram of a microparticle detection device according to another embodiment of the present invention. FIG. 4 is a schematic diagram of a microparticle detection device according to another embodiment of the present invention.

10:目標物件 10: Target Object

100:微粒子檢測裝置 100: Microparticle detection device

110:光源 110: Light source

120:光學系統 120: Optical system

122:光學聚焦元件 122: Optical focusing element

130:影像擷取裝置 130: Image capture device

132:感光元件 132: Photosensitive element

140:處理單元 140: Processing unit

L1:照光光束 L1: Lighting beam

L2:檢測光束 L2: Detection beam

L3:影像光束 L3: Image beam

P:微粒子 P: microparticles

Claims (10)

一種微粒子檢測裝置，用於檢測一目標物件的多個微粒子，包括：一光源，適於提供一照明光束；一光學系統，配置於該照明光束的傳遞路徑上，該光學系統包括一光學聚焦元件，具有一景深值，該光學系統提供一檢測光束至該目標物件上以產生一影像光束，且該光學系統通過該光學聚焦元件對該目標物件產生微離焦狀態；一影像擷取裝置，配置於該影像光束的傳遞路徑上，且該光學聚焦元件的一焦平面與該目標物件中具有該些微粒子的一表面不重疊；以及一調整模組，該光源配置於該調整模組上，該調整模組適於移動該光源以改變該光源與該光學系統的距離。 A microparticle detection device for detecting a plurality of microparticles of a target object, comprising: a light source, suitable for providing an illuminating beam; an optical system, disposed on the transmission path of the illuminating beam, the optical system comprising an optical focusing element , has a depth of field value, the optical system provides a detection beam to the target object to generate an image beam, and the optical system generates a slightly defocused state on the target object through the optical focusing element; an image capture device, configured on the transmission path of the image beam, and a focal plane of the optical focusing element does not overlap with a surface of the target object with the fine particles; and an adjustment module, the light source is arranged on the adjustment module, the The adjustment module is suitable for moving the light source to change the distance between the light source and the optical system. 如申請專利範圍第1項所述的微粒子檢測裝置，其中該光學聚焦元件的該焦平面與該目標物件中具有該些微粒子的該表面的距離介於四分之一倍的該景深值至兩倍的該景深值之間。 The microparticle detection device as claimed in claim 1, wherein the distance between the focal plane of the optical focusing element and the surface of the target object having the microparticles is between one quarter of the depth of field value to two times the depth of field value. 如申請專利範圍第1項所述的微粒子檢測裝置，其中該光學系統還包括一離焦模組，該光學聚焦元件配置於該離焦模組上，該離焦模組適於移動該光學聚焦元件以使該光學聚焦元件對該目標物件產生微離焦。 The microparticle detection device according to claim 1, wherein the optical system further comprises a defocusing module, the optical focusing element is disposed on the defocusing module, and the defocusing module is adapted to move the optical focusing element to cause the optical focusing element to slightly defocus the target object. 如申請專利範圍第1項所述的微粒子檢測裝置，其中該光源所提供的該照明光束為準直光束。 The microparticle detection device according to claim 1, wherein the illumination beam provided by the light source is a collimated beam. 如申請專利範圍第1項所述的微粒子檢測裝置，其中該光源為點光源。 The microparticle detection device according to claim 1, wherein the light source is a point light source. 如申請專利範圍第1項所述的微粒子檢測裝置，還包括：一處理單元，電性連接該影像擷取裝置，適於依據該影像擷取裝置對該目標物件進行分析。 The particle detection device according to claim 1, further comprising: a processing unit electrically connected to the image capture device, adapted to analyze the target object according to the image capture device. 如申請專利範圍第1項所述的微粒子檢測裝置，還包括：一移動載台，適於承載該目標物件，且該移動載台適於移動該目標物件以使該光學聚焦元件對該目標物件產生微離焦。 The microparticle detection device as described in item 1 of the claimed scope further comprises: a moving stage suitable for carrying the target object, and the moving stage is suitable for moving the target object so that the optical focusing element is adapted to the target object produces a slight defocus. 如申請專利範圍第1項所述的微粒子檢測裝置，其中該光學系統為反射式光學系統。 The microparticle detection device according to claim 1, wherein the optical system is a reflective optical system. 如申請專利範圍第1項所述的微粒子檢測裝置，其中該目標物件的該些微粒子為帶電粒子。 The microparticle detection device of claim 1, wherein the microparticles of the target object are charged particles. 如申請專利範圍第1項所述的微粒子檢測裝置，其中該檢測光束為準直光束。The microparticle detection device according to claim 1, wherein the detection beam is a collimated beam.
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