TWI754257B - Test connector applicable at extremely low temperature - Google Patents

Test connector applicable at extremely low temperature Download PDF

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TWI754257B
TWI754257B TW109112925A TW109112925A TWI754257B TW I754257 B TWI754257 B TW I754257B TW 109112925 A TW109112925 A TW 109112925A TW 109112925 A TW109112925 A TW 109112925A TW I754257 B TWI754257 B TW I754257B
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rubber
fluoropolysiloxane
test connector
present
fluorine
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TW202107094A (en
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鄭永倍
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韓商Ｉｓｃ 股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416—Connectors, terminals
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04—Polysiloxanes
    • C08L83/08—Polysiloxanes containing silicon bound to organic groups containing atoms other than carbon, hydrogen and oxygen
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04—Polysiloxanes
    • C08G77/22—Polysiloxanes containing silicon bound to organic groups containing atoms other than carbon, hydrogen and oxygen
    • C08G77/24—Polysiloxanes containing silicon bound to organic groups containing atoms other than carbon, hydrogen and oxygen halogen-containing groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/42—Block-or graft-polymers containing polysiloxane sequences
    • C08G77/44—Block-or graft-polymers containing polysiloxane sequences containing only polysiloxane sequences
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    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/34—Silicon-containing compounds
    • C08K3/36—Silica
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K9/00—Use of pretreated ingredients
    • C08K9/04—Ingredients treated with organic substances
    • C08K9/06—Ingredients treated with organic substances with silicon-containing compounds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00—Compositions of unspecified macromolecular compounds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04—Polysiloxanes
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/10—Block- or graft-copolymers containing polysiloxane sequences
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G01R31/2877—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/16—Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring

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Abstract

A test connector, which includes a sheet containing fluorosilicone rubber; and a conductive part extending in the vertical direction in the sheet and allows a current to flow in the vertical direction, is provided. The test connector may have excellent cold resistance, flexibility, insulability and resistance stability at an extremely low temperature.

Description

應用於極低溫之測試連接器Test connectors for extremely low temperatures

本發明涉及一種應用於極低溫環境的測試連接器。The present invention relates to a test connector used in extremely low temperature environment.

半導體晶片在很寬的溫度範圍內使用，包括例如-40℃或更低的極低溫至150℃的高溫。因此，有必要檢查半導體晶片之電特性在極端溫度下是否滿足預定的目標性能。Semiconductor wafers are used over a wide temperature range, including extremely low temperatures such as -40°C or lower to high temperatures of 150°C. Therefore, it is necessary to check whether the electrical characteristics of semiconductor wafers meet predetermined target performance at extreme temperatures.

為測量電子產品或裝置之電特性，需要測量插槽以確保各種特性，包括絕緣性、耐候性、耐熱性、耐寒性、阻燃性、可撓性等。作為滿足耐熱性及耐寒性兩者，滿足熱收縮及膨脹之測量所需的範圍，並確保可撓性的材料，有聚矽氧烷。然而，難以將聚矽氧烷用作在極端溫度下使用的插槽的材料。例如，由於由液態聚矽氧橡膠(LSR)製成的用於聚甲基矽氧烷製成之插槽的測試插槽一般只能在-40至130℃的溫度下使用，因此很難在-40℃或更低的極低溫下使用。To measure electrical properties of electronic products or devices, it is necessary to measure sockets to ensure various properties, including insulation, weather resistance, heat resistance, cold resistance, flame resistance, flexibility, and more. As a material that satisfies both heat resistance and cold resistance, and satisfies the range required for the measurement of thermal shrinkage and expansion, and ensures flexibility, there is polysiloxane. However, it is difficult to use polysiloxane as a material for sockets used at extreme temperatures. For example, since test sockets made of liquid polysiloxane rubber (LSR) for sockets made of polymethylsiloxane can generally only be used at temperatures between -40 and 130°C, it is difficult to Use at extremely low temperatures of -40°C or lower.

同時，LSR可藉由具有乙烯基端基的聚甲基矽氧烷與具有氫端基的聚二甲基矽氧烷的加成反應來製備。在此種情況下，由於LSR的熱膨脹，黏接物(例如，導電粒子)不能精確地黏附至LSR，因此存在由黏附力差引起之副作用的問題。 [先前技術文件] [專利文件]Meanwhile, LSR can be prepared by the addition reaction of polymethylsiloxane with vinyl end groups and polydimethylsiloxane with hydrogen end groups. In this case, due to the thermal expansion of the LSR, the adhesive (eg, conductive particles) cannot be accurately adhered to the LSR, so there is a problem of side effects caused by poor adhesion. [PRIOR ART DOCUMENT] [patent document]

(專利文獻1)韓國專利申請公開案第10-2017-0030124號(2017年3月17日) (專利文件2)韓國專利案第10-1926588號(2018年12月10日) (專利文獻3)韓國專利申請公開案第10-2009-0105986號(2009年10月8日)(Patent Document 1) Korean Patent Application Publication No. 10-2017-0030124 (March 17, 2017) (Patent Document 2) Korean Patent Case No. 10-1926588 (December 10, 2018) (Patent Document 3) Korean Patent Application Publication No. 10-2009-0105986 (October 8, 2009)

本發明人發現，液態聚矽氧橡膠(LSR)一般具有在極低溫下可撓性顯著降低及電阻顯著提高的問題，此在先前從未認識到。例如，極低溫可為-40℃或更低，且可為約-70℃至-50℃。特定言之，本發明之測試連接器即使在-55℃下亦具有優異的耐寒性、可撓性、絕緣性及電阻穩定性。因此，本發明之各種實施例提供一種測試連接器，其在極低溫下具有優異的耐寒性、可撓性、絕緣性及電阻穩定性。The inventors have discovered that liquid polysiloxane rubber (LSR) generally suffers from a significant reduction in flexibility and a significant increase in electrical resistance at very low temperatures, which have never been recognized before. For example, the extremely low temperature may be -40°C or lower, and may be about -70°C to -50°C. Specifically, the test connector of the present invention has excellent cold resistance, flexibility, insulation and resistance stability even at -55°C. Accordingly, various embodiments of the present invention provide a test connector with excellent cold resistance, flexibility, insulation and resistance stability at extremely low temperatures.

根據本發明之一個實施例的測試連接器可包括包含氟聚矽氧橡膠的薄片。A test connector according to one embodiment of the present invention may include a sheet comprising fluoropolysiloxane.

本發明之氟聚矽氧橡膠可為在側鏈中包含一個或多個氟基團的聚有機矽氧烷。The fluoropolysiloxane rubber of the present invention may be a polyorganosiloxane containing one or more fluorine groups in the side chain.

本發明之氟聚矽氧橡膠可為1-液體組分的聚矽氧橡膠，且具有特別是測試連接器所需的物理性質。The fluoropolysiloxane rubber of the present invention can be a 1-liquid component polysiloxane rubber, and has physical properties particularly required for testing connectors.

根據本發明之一個實施例的測試連接器可用於液晶顯示器、半導體裝置、發光二極體、記憶體晶片等之封裝測試插槽。The test connector according to an embodiment of the present invention can be used for package test sockets of liquid crystal displays, semiconductor devices, light emitting diodes, memory chips, and the like.

相關申請案之交叉參考Cross-references to related applications

本申請案係基於在2019年4月17日申請之韓國專利申請案第10-2019-0045122號並主張其優先權，該案之全部內容係以引用之方式併入本文中。This application is based on and claims priority to Korean Patent Application No. 10-2019-0045122 filed on April 17, 2019, the entire contents of which are incorporated herein by reference.

為說明本發明之技術思想，示出本發明之實施例。根據本發明之權利範圍不限於下文呈現之實例或實施例或其詳細描述。To illustrate the technical idea of the present invention, embodiments of the present invention are shown. The scope of rights according to the invention is not limited to the examples or embodiments presented below or their detailed description.

除非另外定義，否則本發明中之所有技術術語及科學術語包括熟習此項技術者通常理解的含義或定義。選擇本發明中之所有術語是為了更清楚地描述本發明，而不是為了限制本發明之範圍而選擇。Unless otherwise defined, all technical and scientific terms in the present invention include the meanings or definitions commonly understood by those skilled in the art. All terms in the present invention have been chosen for the purpose of describing the present invention more clearly and not for the purpose of limiting the scope of the present invention.

如在本發明中所使用，諸如「包含」、「包括」、「具有」之類的表達應理解為具有涵蓋其他實施例之可能性的開放式術語，除非在包含此類表達的短語或句子中另有提及。As used in this disclosure, expressions such as "comprising," "including," "having," and the like are to be understood as open-ended terms with the possibility of encompassing other embodiments, unless a phrase containing such an expression or mentioned in the sentence.

如在本發明中所使用，諸如「僅由...組成」之類的表達應理解為封閉式術語，排除涵蓋除相應元件之外的其他元件的可能性。As used in the present invention, expressions such as "consisting only of" should be understood as closed terms, excluding the possibility of encompassing other elements than the corresponding elements.

除非另有說明，否則本發明中描述的單數表達可包括複數表達，其亦將適用於申請專利範圍中記載的單數表達。Unless otherwise specified, the singular expressions described in the present invention may include the plural expressions, which will also apply to the singular expressions recited in the scope of the application.

根據本發明之一個實施例，術語「氟聚矽氧橡膠」可與「氟聚矽氧聚合物」互換使用，且可係指矽橡膠，其為包含僅由矽(Si)與碳、氫或氧組成且在側鏈中包含一個或多個氟原子的彈性體或聚矽氧的聚合物。此處，氟聚矽氧橡膠可為(i)僅由在側鏈中含有一個或多個氟原子的重複單元組成的聚矽氧聚合物，或(ii)由總共兩種或更多種重複單元組成的共聚物或嵌段共聚物，該重複單元包括在側鏈中含有一個或多個氟原子的重複單元及不含氟原子的重複單元，且可(iii)由一般技術者根據相應領域的常識來選擇。氟聚矽氧橡膠可廣義地解釋為包括不損害根據本發明之測試連接器的物理性質的其他類型的聚合物及藉由使(i)聚合物或(ii)共聚物交聯製備的聚合物的概念。According to one embodiment of the present invention, the term "fluoropolysiloxane" may be used interchangeably with "fluoropolysiloxane" and may refer to silicone rubber, which is composed of only silicon (Si) and carbon, hydrogen or Elastomer or polysiloxane polymer composed of oxygen and containing one or more fluorine atoms in the side chain. Here, the fluorosilicone rubber may be (i) a polysiloxane polymer composed of only repeating units containing one or more fluorine atoms in the side chain, or (ii) a total of two or more repeating units Copolymers or block copolymers composed of units, the repeating units including repeating units containing one or more fluorine atoms in side chains and repeating units not containing fluorine atoms, and can be (iii) by those of ordinary skill according to the corresponding field common sense to choose. Fluorosilicone rubber can be broadly interpreted to include other types of polymers that do not impair the physical properties of the test connectors according to the present invention and polymers prepared by crosslinking (i) polymers or (ii) copolymers the concept of.

根據本發明之一個實施例，聚矽氧橡膠可為液態聚矽氧橡膠(LSR)。此處，根據本發明之一個實施例的最終測試連接器中構成薄片的聚矽氧橡膠可藉由使LSR固化來製備。一般而言，LSR可以1-液體組分類型及2-液體組分類型存在。1-液體組分聚矽氧橡膠即使不添加單獨的固化劑下，亦可利用空氣中之水分藉由縮合反應而固化。因此，當待製備之聚矽氧橡膠具有較大的厚度時，固化速度慢，且由於其藉由縮合反應而固化，因此聚矽氧橡膠過度收縮，從而尺寸穩定性差且難以用作測試插槽。另一方面，2-液體組分聚矽氧橡膠係指主要材料及固化劑(或觸媒)分離，且意味著必須在固化之前將此等組分混合。在相應的技術領域中，用於製備測試連接器之LSR由於其特性而一般使用以特定比例混合之2-液體組分橡膠。然而，即使是2-液體組分橡膠，亦不一定滿足測試連接器所需之物理性質，且因為1-液體組分橡膠係室溫可固化密封劑，因此除以上所列理由以外，其不用於測試插槽。另外，在室溫或更低溫度下儲存的1-液體組分加成反應型LSR可藉由將固化阻滯劑添加至2-液體組分LSR中來製備。然而，由於此類2-液體組分LSR具有儲存限制，且由於在熱介導之固化反應期間使用的固化阻滯劑的揮發而導致聚矽氧固化時會產生氣泡，因此不能形成具有用於插槽之適當物理性質的2-液體組分LSR。According to one embodiment of the present invention, the silicone rubber may be liquid silicone rubber (LSR). Here, the polysiloxane rubber constituting the sheet in the final test connector according to one embodiment of the present invention may be prepared by curing the LSR. In general, LSRs can exist in a 1-liquid component type and a 2-liquid component type. 1-Liquid component polysiloxane rubber can be cured by condensation reaction using moisture in the air even without adding a separate curing agent. Therefore, when the polysiloxane rubber to be prepared has a large thickness, the curing speed is slow, and since it is cured by condensation reaction, the polysiloxane rubber shrinks excessively, so that the dimensional stability is poor and it is difficult to be used as a test socket . On the other hand, 2-liquid component silicone rubber means that the main material and curing agent (or catalyst) are separated, and means that these components must be mixed before curing. In the corresponding technical field, the LSR used to prepare the test connector generally uses a 2-liquid component rubber mixed in a specific ratio due to its characteristics. However, even 2-liquid component rubber does not necessarily meet the physical properties required for testing connectors, and since 1-liquid component rubber is a room temperature curable sealant, it is not used for the reasons listed above. in the test slot. In addition, the 1-liquid component addition reaction type LSR stored at room temperature or lower can be prepared by adding a curing retarder to the 2-liquid component LSR. However, due to storage limitations of such 2-liquid component LSRs and the generation of air bubbles when polysiloxane is cured due to volatilization of the curing retarder used during the heat-mediated curing reaction, it cannot be formed with 2-liquid component LSR of suitable physical properties of the slot.

類似地，氟聚矽氧橡膠亦以1-液體組分類型及2-液體組分類型存在，且使此類聚矽氧橡膠固化以製造最終的測試連接器產品。然而，習知上已知的1-液體組分氟聚矽氧橡膠及2-液體組分氟聚矽氧不具有用於測試連接器所必需的物理性質。為應用於測試連接器，聚矽氧橡膠必須表現出200,000至400,000 cPs的黏度及磁平滑性，商業化及習知使用的2-液體組分聚矽氧橡膠不能滿足所有此等物理性質。然而，本發明人發現，可使用由氟聚矽氧聚合物合成的LSR來製造包括薄片的測試連接器，從而完成本發明。Similarly, fluorosilicone rubbers also exist in 1-liquid component types and 2-liquid component types, and such silicone rubbers are cured to make final test connector products. However, the conventionally known 1-liquid component fluoropolysiloxane rubber and 2-liquid component fluoropolysiloxane do not have the necessary physical properties for testing connectors. For use in testing connectors, silicone rubbers must exhibit viscosities and magnetic smoothness of 200,000 to 400,000 cPs, all of which are not met by commercial and conventionally used 2-liquid component silicone rubbers. However, the present inventors found that LSRs synthesized from fluoropolysiloxane polymers can be used to fabricate test connectors including sheets, thereby completing the present invention.

根據本發明之一個實施例，使用術語「約」或「近似地」係為了包括對包括在特定數值或包括在本發明之技術思想的範圍內的數值在內的製造程序誤差的輕微調整。例如，術語「約」或「近似地」意指所涉及之值的±10%，在一個實施例中為其±5%，在另一實施例中為其±2%的範圍。在本發明之領域中，該程度的近似值是適當的，除非明確地指出需要更窄範圍的值。According to one embodiment of the present invention, the term "about" or "approximately" is used to include slight adjustments for manufacturing process errors included in a specific numerical value or a numerical value included in the scope of the technical idea of the present invention. For example, the terms "about" or "approximately" mean ±10% of the referenced value, which is ±5% in one embodiment, and ±2% in another embodiment. In the field of the invention, approximations of this degree are appropriate unless a narrower range of values is expressly indicated.

本文使用的方向指示術語「上」或「向上」意指基於測試連接器100佈置待測試之裝置10的端子11的方向，且方向指示術語「下」或「向下」意指相對於測試連接器100佈置測試裝置20之端子21的方向。本發明中所述之測試連接器100的「厚度方向」意指垂直方向。此係用於解釋本發明以促進清楚理解的參考，且術語「上」及「下」亦可根據參考的放置位置不同地定義。As used herein, the directional term "up" or "upward" means the direction in which the terminals 11 of the device 10 to be tested are arranged based on the test connector 100, and the directional term "down" or "downward" means relative to the test connection The tester 100 arranges the direction of the terminals 21 of the test device 20 . The "thickness direction" of the test connector 100 described in the present invention means the vertical direction. This is a reference used to explain the present invention to facilitate a clear understanding, and the terms "upper" and "lower" may also be defined differently depending on where the reference is placed.

根據本發明之一個實施例，本發明可涉及一種測試連接器，其佈置在待測試之裝置與測試設備之間以使其電連接，該測試連接器包括含有氟聚矽氧橡膠的薄片；及導電部分，該導電部分在薄片中沿垂直方向延伸，以允許電流沿垂直方向流動。此處，薄片可表現出絕緣性能。According to one embodiment of the present invention, the present invention may relate to a test connector arranged between a device to be tested and a test equipment to electrically connect them, the test connector comprising a sheet containing fluoropolysiloxane; and A conductive portion that extends in a vertical direction in the sheet to allow current to flow in a vertical direction. Here, the flakes can exhibit insulating properties.

根據本發明之一個實施例，氟聚矽氧橡膠可為聚有機矽氧烷，其中經一個或多個氟原子取代之側鏈包含在重複單元中。According to one embodiment of the present invention, the fluoropolysiloxane rubber may be a polyorganosiloxane in which side chains substituted with one or more fluorine atoms are included in repeating units.

根據本發明之一個實施例，氟聚矽氧橡膠可具有以下式1之結構。According to an embodiment of the present invention, the fluoropolysiloxane rubber may have the structure of the following formula 1.

[式1][Formula 1]

Figure 02_image001
Figure 02_image001

在該式中，R、R1 、R2 及R3 可各獨立地選自氫、具有1至10個碳原子之直鏈或分支鏈烷基、具有1至10個碳原子之羥烷基、具有3至15個碳原子之環烷基、具有6至12個碳原子之芳基、具有7至20個碳原子之芳烷基、及具有2至20個碳原子之烯基，其中不存在氫原子及乙烯基作為同一矽原子之取代基；R4 為氟或具有一個或多個氟原子的取代基； m及n各為0至10,000或0至1,000的整數，且o可為1至10,000或1至1,000的整數。In this formula , R, R1, R2 and R3 can each be independently selected from hydrogen, straight or branched chain alkyl groups having 1 to 10 carbon atoms, hydroxyalkyl groups having 1 to 10 carbon atoms , cycloalkyl groups having 3 to 15 carbon atoms, aryl groups having 6 to 12 carbon atoms, aralkyl groups having 7 to 20 carbon atoms, and alkenyl groups having 2 to 20 carbon atoms, none of which A hydrogen atom and a vinyl group are present as substituents on the same silicon atom; R4 is fluorine or a substituent with one or more fluorine atoms; m and n are each an integer from 0 to 10,000 or 0 to 1,000, and o can be 1 to 10,000 or an integer from 1 to 1,000.

根據本發明之一個實施例，具有1至10個碳原子之直鏈或分支鏈烷基可為選自由以下組成之群的一種或多種：甲基、乙基、正丙基、異丙基、正丁基、異丁基、第三丁基、正戊基、異戊基、新戊基、己基、庚基、辛基、壬基及癸基，但本發明不限於此。According to one embodiment of the present invention, the straight or branched chain alkyl group having 1 to 10 carbon atoms may be one or more selected from the group consisting of methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, n-pentyl, isopentyl, neopentyl, hexyl, heptyl, octyl, nonyl and decyl, but the present invention is not limited thereto.

根據本發明之一個實施例，具有1至10個碳原子之羥烷基可為選自由羥甲基、羥乙基及羥丙基組成之群的一種或多種，但本發明不限於此。According to an embodiment of the present invention, the hydroxyalkyl group having 1 to 10 carbon atoms may be one or more selected from the group consisting of hydroxymethyl, hydroxyethyl and hydroxypropyl, but the present invention is not limited thereto.

根據本發明之一個實施例，R4 可為具有1至20個碳原子之氟烷基。此處，氟烷基可為選自由三氟丙基、七氟戊基、七氟異戊基、十三氟辛基及十七氟癸基組成之群中的一種或多種，但本發明不限於此。According to one embodiment of the present invention, R 4 may be a fluoroalkyl group having 1 to 20 carbon atoms. Here, the fluoroalkyl group may be one or more selected from the group consisting of trifluoropropyl, heptafluoropentyl, heptafluoroisoamyl, tridecafluorooctyl and heptafluorodecyl, but the present invention does not limited to this.

根據本發明之一個實施例，具有3至15個碳原子之環烷基可為選自由環丙基、環丁基、環戊基、環己基、環庚基、環辛基、環壬基、環癸基、環十一烷基、環十二烷基、丁基環丙基、甲基環戊基、二甲基環己基、乙基二甲基環庚基及二甲基環辛基組成之群中的一種或多種，但本發明不限於此。According to one embodiment of the present invention, the cycloalkyl group having 3 to 15 carbon atoms may be selected from cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, Composed of cyclodecyl, cycloundecyl, cyclododecyl, butylcyclopropyl, methylcyclopentyl, dimethylcyclohexyl, ethyldimethylcycloheptyl and dimethylcyclooctyl One or more of the group, but the present invention is not limited thereto.

根據本發明之一個實施例，具有6至12個碳原子之芳基可為選自由苯基、甲苯基、二甲苯基及萘基組成之群中的一種或多種，但是本發明不限於此。According to an embodiment of the present invention, the aryl group having 6 to 12 carbon atoms may be one or more selected from the group consisting of phenyl, tolyl, xylyl and naphthyl, but the present invention is not limited thereto.

根據本發明之一個實施例，具有7至20個碳原子之芳烷基可為選自由甲基苯基、乙基苯基、甲基萘基及二甲基萘基組成之群中的一種或多種，但是本發明不限於此。According to an embodiment of the present invention, the aralkyl group having 7 to 20 carbon atoms may be one selected from the group consisting of methylphenyl, ethylphenyl, methylnaphthyl and dimethylnaphthyl, or Various, but the present invention is not limited to this.

根據本發明之一個實施例，具有2至20個碳原子之烯基可為選自由乙烯基、丙烯基、丁烯基、戊烯基、己烯基、辛烯基、癸烯基、十六碳烯基及十八碳烯基組成之群中的一種或多種，但是本發明不限於此。According to one embodiment of the present invention, the alkenyl group having 2 to 20 carbon atoms may be selected from vinyl, propenyl, butenyl, pentenyl, hexenyl, octenyl, decenyl, hexadecenyl One or more of the group consisting of carbenyl and octadecenyl, but the present invention is not limited thereto.

根據本發明之一個實施例，R、R2 及R3 可為甲基，R1 可為乙烯基，R4 可為三氟丙基，m及n之和可為300至500的整數，且o可為500至800的整數。According to one embodiment of the present invention, R, R 2 and R 3 can be methyl, R 1 can be vinyl, R 4 can be trifluoropropyl, the sum of m and n can be an integer from 300 to 500, and o can be an integer from 500 to 800.

根據本發明之一個實施例，隨著含氟原子之取代基的重量比或莫耳比相對於整個氟聚矽氧橡膠的增加，在極低溫下之極佳耐寒性、可撓性、絕緣性及電阻穩定性得以改善，且因此，為製造應用於-55℃的極低溫的插槽，含氟原子之氟取代基的重量比或莫耳比可較佳地為約30%或更多。該取代基可係指與用於製備氟聚矽氧橡膠之氟聚矽氧聚合物之重複單元中的矽原子結合的側鏈取代基。According to one embodiment of the present invention, with the increase of the weight ratio or molar ratio of the substituents containing fluorine atoms relative to the whole fluoropolysiloxane rubber, excellent cold resistance, flexibility, and insulation at extremely low temperatures And resistance stability is improved, and therefore, in order to manufacture a socket applied to an extremely low temperature of -55° C., the weight ratio or molar ratio of fluorine atom-containing fluorine substituents may preferably be about 30% or more. The substituent may refer to a side chain substituent bound to the silicon atom in the repeating unit of the fluoropolysiloxane polymer used to prepare the fluoropolysiloxane rubber.

根據本發明之一個實施例，氟聚矽氧橡膠可為LSR。According to one embodiment of the present invention, the fluorosilicone rubber may be LSR.

根據本發明之一個實施例，導電部分可以以除待暴露之部分之外被薄片圍繞且在與氟聚矽氧橡膠接觸的同時在薄片之垂直方向上延伸的形式存在。According to one embodiment of the present invention, the conductive portion may exist in a form surrounded by the sheet except for the portion to be exposed and extending in the vertical direction of the sheet while being in contact with the fluorosilicone rubber.

根據本發明之一個實施例，該薄片還可包含一種或多種不包含氟原子的矽橡膠及/或不包含氟原子的交聯的聚合物材料。此處，薄片可以由氟聚矽氧橡膠及不包含氟原子的矽橡膠及/或不包含氟原子的交聯聚合物材料中的一種或多種的混合物製成。在混合物中，相對於混合物的總重量，氟聚矽氧橡膠可為約30%或更多。在混合物中，相對於混合物的總重量，氟聚矽氧橡膠可包含約30%或更多的在聚合物中含有-Si(CH3 )(CH2 CH2 CF3 )-O-之氟基的聚合物聚合單元。According to one embodiment of the present invention, the sheet may further comprise one or more silicone rubbers that do not contain fluorine atoms and/or cross-linked polymer materials that do not contain fluorine atoms. Here, the sheet may be made of a mixture of one or more of fluoropolysiloxane rubber and silicone rubber that does not contain fluorine atoms and/or a cross-linked polymer material that does not contain fluorine atoms. In the mixture, the fluoropolysiloxane may be about 30% or more relative to the total weight of the mixture. In the mixture, the fluoropolysiloxane may contain about 30% or more of fluorine groups containing -Si(CH 3 )(CH 2 CH 2 CF 3 )-O- in the polymer relative to the total weight of the mixture of polymer polymer units.

根據本發明之一個實施例，作為可用於獲得不含氟原子之交聯聚合物材料的用於形成可固化聚合物材料的材料的實例包括聚丁二烯橡膠、天然橡膠、聚異戊二烯橡膠；共軛二烯基橡膠諸如苯乙烯-丁二烯共聚物橡膠或丙烯腈-丁二烯共聚物橡膠及其氫化產物；嵌段共聚物橡膠諸如苯乙烯-丁二烯-二烯嵌段共聚物橡膠或苯乙烯-異戊二烯嵌段共聚物及其氫化產物；氯丁二烯、胺基甲酸酯橡膠、聚酯基橡膠、環氧氯丙烷橡膠、聚矽氧橡膠、乙烯-丙烯共聚物橡膠、乙烯-丙烯-二烯共聚物橡膠等，但是本發明不限於此。According to one embodiment of the present invention, examples of the material for forming the curable polymer material that can be used to obtain a cross-linked polymer material free of fluorine atoms include polybutadiene rubber, natural rubber, polyisoprene Rubbers; conjugated diene-based rubbers such as styrene-butadiene copolymer rubbers or acrylonitrile-butadiene copolymer rubbers and hydrogenated products thereof; block copolymer rubbers such as styrene-butadiene-diene blocks Copolymer rubbers or styrene-isoprene block copolymers and their hydrogenated products; chloroprene, urethane rubber, polyester-based rubber, epichlorohydrin rubber, polysiloxane rubber, vinyl- propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, etc., but the present invention is not limited thereto.

根據本發明之一個實施例，不包含氟原子的聚矽氧橡膠可為聚矽氧烷，諸如縮合型聚矽氧烷、加成型聚矽氧烷或包含乙烯基或羥基的聚矽氧烷，例如，聚二甲基矽氧烷、聚甲基苯基矽氧烷或聚二苯基矽氧烷，但是本發明不限於此。可在本發明中使用的不含氟原子之聚矽氧橡膠在根據本發明之一個實施例的測試連接器的性能不會惡化的範圍內，可含有可由一般技術者用作絕緣材料的LSR。According to one embodiment of the present invention, the polysiloxane rubber that does not contain fluorine atoms can be a polysiloxane, such as a condensation type polysiloxane, an addition type polysiloxane, or a polysiloxane containing a vinyl group or a hydroxyl group, For example, polydimethylsiloxane, polymethylphenylsiloxane, or polydiphenylsiloxane, but the present invention is not limited thereto. The fluorine atom-free polysiloxane rubber that can be used in the present invention may contain LSR that can be used as an insulating material by those of ordinary skill within a range in which the performance of the test connector according to one embodiment of the present invention is not deteriorated.

根據本發明之一個實施例，氟聚矽氧橡膠可為包含聚甲基三氟丙基矽氧烷及聚二甲基矽氧烷、聚甲基苯基矽氧烷及聚二苯基矽氧烷中的一種或多種的嵌段共聚物。According to one embodiment of the present invention, the fluoropolysiloxane rubber may include polymethyltrifluoropropylsiloxane and polydimethylsiloxane, polymethylphenylsiloxane and polydiphenylsiloxane A block copolymer of one or more of alkanes.

根據本發明之一個實施例，氟聚矽氧橡膠可包含氟基聚合物、氟基交聯劑及氟基增塑劑中的一種或多種；二氧化矽、經表面處理之疏水性二氧化矽、用氟聚合物或各種類型的矽烷進行表面處理的二氧化矽；及共交聯劑及交聯促進劑中的一種或多種。According to one embodiment of the present invention, the fluoropolysiloxane rubber may include one or more of a fluorine-based polymer, a fluorine-based crosslinking agent, and a fluorine-based plasticizer; silica, surface-treated hydrophobic silica , silica surface-treated with fluoropolymers or various types of silanes; and one or more of co-crosslinking agents and cross-linking accelerators.

根據本發明之一個實施例，可包含共交聯劑以在氟聚矽氧橡膠的交聯期間增加交聯效率及均勻的交聯。具體而言，作為共交聯劑，可使用三羥甲基丙烷三甲基丙烯酸酯(TMPTMA)、三羥甲基丙烷三丙烯酸酯(TMPTA)等，但是本發明不限於此。此等可單獨使用或以其兩種或更多種之組合使用。當使用共交聯劑時，交聯可以優異極佳交聯效率及均勻性進行。According to one embodiment of the present invention, a co-crosslinking agent may be included to increase crosslinking efficiency and uniform crosslinking during crosslinking of the fluoropolysiloxane rubber. Specifically, as the co-crosslinking agent, trimethylolpropane trimethacrylate (TMPTMA), trimethylolpropane triacrylate (TMPTA), or the like can be used, but the present invention is not limited thereto. These may be used alone or in combination of two or more thereof. When a co-crosslinking agent is used, crosslinking can be performed with excellent crosslinking efficiency and uniformity.

根據本發明之一個實施例，相對於100重量份之氟基聚合物，共交聯劑之含量可為0.1至30重量份。當在上述範圍內包含時，可在不抑制本發明之物理性質的情況下防止部份燃燒現象，且可以均勻地進行交聯。當共交聯劑的含量小於0.1重量份時，在本發明之絕緣體的形成中，外觀及機械性質可能劣化，且當共交聯劑的含量大於30重量份時，本發明之諸如耐熱性及耐寒性的物理性質可能劣化。例如，共交聯劑之含量可為1至25重量份。在另一個實例中，共交聯劑之含量可為2至20重量份。According to an embodiment of the present invention, the content of the co-crosslinking agent may be 0.1 to 30 parts by weight relative to 100 parts by weight of the fluorine-based polymer. When included in the above range, the partial combustion phenomenon can be prevented without inhibiting the physical properties of the present invention, and the crosslinking can be uniformly performed. When the content of the co-crosslinking agent is less than 0.1 parts by weight, in the formation of the insulator of the present invention, appearance and mechanical properties may be deteriorated, and when the content of the co-crosslinking agent is more than 30 parts by weight, such as heat resistance and Physical properties of cold resistance may deteriorate. For example, the content of the co-crosslinking agent may be 1 to 25 parts by weight. In another example, the content of the co-crosslinking agent may be 2 to 20 parts by weight.

根據本發明之一個實施例，可添加性質賦予劑以改善氟聚矽氧橡膠的耐熱性或散熱性。作為性質賦予劑，可使用氧化鋅(ZnO)、氧化鋁(Al2 O3 )及氧化鎂(MgO)。此等可單獨或以其兩種或更多種之組合包括在內。根據本發明之一個實施例，該性質賦予劑可以1:0.1至1:5的重量比包含氧化鋅、氧化鋁及氧化鎂。當在上述範圍內包含材料時，可表現出極佳耐熱性及散熱性。例如，材料可以1:0.5至1:1.5的重量比被包含。在本發明之一個實施例中，相對於100重量份的氟基聚合物，性質賦予劑(E)之含量可為1至500重量份的。在上述範圍內，可表現出極佳耐熱性或散熱效率而不會損害本發明之物理性質。例如，性質賦予劑之含量可為2至300重量份。在另一個實例中，性質賦予劑之含量可為5至150重量份。According to one embodiment of the present invention, a property imparting agent may be added to improve the heat resistance or heat dissipation of the fluoropolysiloxane rubber. As the property imparting agent, zinc oxide (ZnO), aluminum oxide (Al 2 O 3 ), and magnesium oxide (MgO) can be used. These may be included alone or in combination of two or more thereof. According to one embodiment of the present invention, the property imparting agent may comprise zinc oxide, aluminum oxide and magnesium oxide in a weight ratio of 1:0.1 to 1:5. When the material is contained within the above range, excellent heat resistance and heat dissipation can be exhibited. For example, the material may be included in a weight ratio of 1:0.5 to 1:1.5. In one embodiment of the present invention, the content of the property imparting agent (E) may be 1 to 500 parts by weight relative to 100 parts by weight of the fluorine-based polymer. Within the above range, excellent heat resistance or heat dissipation efficiency can be exhibited without impairing the physical properties of the present invention. For example, the content of the property imparting agent may be 2 to 300 parts by weight. In another example, the content of the property imparting agent may be 5 to 150 parts by weight.

根據本發明之一個實施例，氟聚矽氧橡膠可為2-液體組分聚矽氧橡膠。According to one embodiment of the present invention, the fluoropolysiloxane rubber may be a 2-liquid component polysiloxane rubber.

根據本發明之一個實施例，導電部分可包括導電粉末，該導電粉末包含選自由金、銀、鉑、銅、鈀、銠及包括其任何一種或多種之合金中的一種或多種。According to one embodiment of the present invention, the conductive portion may include conductive powder comprising one or more selected from the group consisting of gold, silver, platinum, copper, palladium, rhodium, and alloys including any one or more thereof.

根據本發明之一個實施例，合金可為藉由向導電粒子(金、銀、鉑、鈀及銠)中的任何一種添加不同的材料(例如，磷)而形成的合金，或由至少兩種或更多種導電粒子形成的合金。According to one embodiment of the present invention, the alloy may be an alloy formed by adding different materials (eg, phosphorus) to any one of the conductive particles (gold, silver, platinum, palladium, and rhodium), or by at least two or an alloy of more conductive particles.

根據本發明之一個實施例，導電粉末可包括磁性核粒子及覆蓋核粒子表面的導電粒子(選自由金、銀、鉑、銅、鈀、銠及包含其任何一種或多種的合金組成之群中的一種或多種)。According to an embodiment of the present invention, the conductive powder may include magnetic core particles and conductive particles (selected from the group consisting of gold, silver, platinum, copper, palladium, rhodium and alloys including any one or more of them) covering the surface of the core particles one or more of them).

根據本發明之一個實施例，磁性粒子可包括選自由鈷、鎳、鐵及包括其中的任何一種或多種的合金組成之群中的一種或多種，但是本發明不限於此。因此，根據以下製造方法，利用磁性粒子在磁場中被磁化的性質，可提高導電部分130的導電性，且可改善可製造性。根據本發明之一個實施例，合金可為藉由向磁性材料(鈷、鎳及鐵)中的任何一種添加不同的材料(例如，銅)而形成的合金，或為由至少兩種或更多種形成的其合金。According to one embodiment of the present invention, the magnetic particles may include one or more selected from the group consisting of cobalt, nickel, iron, and alloys including any one or more thereof, but the present invention is not limited thereto. Therefore, according to the following manufacturing method, the electrical conductivity of the conductive portion 130 can be improved and the manufacturability can be improved by utilizing the property of the magnetic particles to be magnetized in a magnetic field. According to one embodiment of the present invention, the alloy may be an alloy formed by adding a different material (eg, copper) to any one of the magnetic materials (cobalt, nickel, and iron), or may be formed of at least two or more its alloys formed.

根據本發明之一個實施例，參考圖1，待測試之裝置10可為半導體裝置等。待測試之裝置10包括複數個端子11。複數個端子11設置在待測試之裝置10的下表面上。當測試待測試之裝置10時，複數個端子11可與測試連接器100的上表面接觸。According to one embodiment of the present invention, referring to FIG. 1 , the device 10 to be tested may be a semiconductor device or the like. The device 10 to be tested includes a plurality of terminals 11 . A plurality of terminals 11 are provided on the lower surface of the device 10 to be tested. When testing the device 10 to be tested, the plurality of terminals 11 may be in contact with the upper surface of the test connector 100 .

測試設備20包括複數個端子21。複數個端子21對應於複數個端子11。複數個端子21設置在測試設備20的上表面上。在測試待測試之裝置10時，複數個端子21可與測試連接器100的下表面接觸。The test equipment 20 includes a plurality of terminals 21 . The plurality of terminals 21 correspond to the plurality of terminals 11 . A plurality of terminals 21 are provided on the upper surface of the test device 20 . When testing the device 10 to be tested, the plurality of terminals 21 may be in contact with the lower surface of the test connector 100 .

根據本發明之一個實施例，複數個端子21中之各者在垂直方向上設置在面對複數個端子11中之各者的位置。儘管未示出，但是在其中複數個導電部分130相對於豎直方向傾斜的另一實施例中，複數個端子21中之各者可在複數個導電部分130傾斜的方向上設置在面對複數個端子11中之各者的位置。According to one embodiment of the present invention, each of the plurality of terminals 21 is disposed at a position facing each of the plurality of terminals 11 in the vertical direction. Although not shown, in another embodiment in which the plurality of conductive parts 130 are inclined with respect to the vertical direction, each of the plurality of terminals 21 may be disposed facing the plurality of terminals 21 in the direction in which the plurality of conductive parts 130 are inclined position of each of the terminals 11 .

根據本發明之一個實施例，測試連接器100形成為佈置在待測試之裝置10及待彼此電連接之測試設備20之間。測試連接器100包括薄片110及導電部分130，導電部分130被配置為電連接待測試之裝置10的端子11與測試設備20的端子21。According to one embodiment of the present invention, the test connector 100 is formed to be arranged between the device 10 to be tested and the test equipment 20 to be electrically connected to each other. The test connector 100 includes a sheet 110 and a conductive portion 130 configured to electrically connect the terminals 11 of the device 10 to be tested and the terminals 21 of the test equipment 20 .

根據本發明之一個實施例，薄片110在垂直方向上具有厚度。薄片110的厚度(沿厚度方向的長度)小於在垂直於薄片110的厚度方向的方向上的長度。According to one embodiment of the present invention, the sheet 110 has a thickness in the vertical direction. The thickness (length in the thickness direction) of the sheet 110 is smaller than the length in the direction perpendicular to the thickness direction of the sheet 110 .

根據本發明之一個實施例，薄片110可由氟聚矽氧橡膠形成。因而形成的薄片110表現出電絕緣及可彈性變形的特性。According to one embodiment of the present invention, the sheet 110 may be formed of fluoropolysiloxane. The thus formed sheet 110 exhibits electrical insulating and elastically deformable properties.

根據本發明之一個實施例，導電部分130可在垂直方向上延伸。導電部分130可在薄片110中在垂直方向上延伸，以允許電流在垂直方向上流動。According to an embodiment of the present invention, the conductive portion 130 may extend in a vertical direction. The conductive portion 130 may extend in the vertical direction in the sheet 110 to allow current to flow in the vertical direction.

根據本發明之一個實施例，導電部分130設置在薄片110中。導電部分130可由薄片110支撐。According to one embodiment of the present invention, the conductive portion 130 is provided in the sheet 110 . The conductive portion 130 may be supported by the sheet 110 .

根據本發明之一個實施例，複數個導電部分130在垂直於豎直方向的水平方向上彼此間隔開。複數個導電部分130可被佈置為以規則的間隔實質上間隔開。According to one embodiment of the present invention, the plurality of conductive parts 130 are spaced apart from each other in a horizontal direction perpendicular to the vertical direction. The plurality of conductive portions 130 may be arranged to be substantially spaced apart at regular intervals.

根據本發明之一個實施例，導電部分130的垂直端部暴露在薄片110的上表面及下表面。導電部分130的上部暴露在薄片110的上表面，且導電部分130的下部暴露在薄片110的下表面。導電部分130的上部形成為能夠接觸待測試之裝置10的端子11，且導電部分130的下部形成為能夠接觸測試設備20的端子21。According to an embodiment of the present invention, the vertical ends of the conductive portion 130 are exposed on the upper and lower surfaces of the sheet 110 . The upper portion of the conductive portion 130 is exposed on the upper surface of the sheet 110 , and the lower portion of the conductive portion 130 is exposed on the lower surface of the sheet 110 . The upper portion of the conductive portion 130 is formed to be able to contact the terminal 11 of the device 10 to be tested, and the lower portion of the conductive portion 130 is formed to be able to contact the terminal 21 of the testing apparatus 20 .

根據本發明之一個實施例，導電部分130包括暴露部分(未示出)，該暴露部分在薄片110的表面上暴露，此意味著導電部分130的表面。暴露部分設置在導電部分130之兩個端部。薄片110可形成為包圍除暴露部分之外的導電部分130。根據設計需要，可基於薄片110的上表面或下表面將導電部分130製造為突出或凹入的形狀。當導電部分130突出時，導電部分130的突出部分可能不會被薄片圍繞。此處，導電部分130可在被包圍的部分中與薄片110的部件(例如，氟聚矽氧橡膠)接觸。圖1示意性地示出設置在薄片110中的導電部分130，且導電部分的與薄片接觸的內接觸表面可具有不規則形狀。According to one embodiment of the present invention, the conductive portion 130 includes an exposed portion (not shown) that is exposed on the surface of the sheet 110 , which means the surface of the conductive portion 130 . Exposed portions are provided at both ends of the conductive portion 130 . The sheet 110 may be formed to surround the conductive portion 130 except for the exposed portion. According to design requirements, the conductive portion 130 may be fabricated into a protruding or concave shape based on the upper or lower surface of the sheet 110 . When the conductive part 130 protrudes, the protruding part of the conductive part 130 may not be surrounded by the sheet. Here, the conductive portion 130 may be in contact with a component of the sheet 110 (eg, fluoropolysiloxane) in the enclosed portion. FIG. 1 schematically shows a conductive portion 130 provided in the sheet 110, and the inner contact surface of the conductive portion in contact with the sheet may have an irregular shape.

根據本發明之一個實施例的測試連接器可藉由相應領域的一般技術者通常可應用的方法來製造。例如，可藉由以下方式形成及製造薄片110：將先前製造之導電部分130設置在模具中的特定位置，及然後將根據本發明之一個實施例的氟聚矽氧橡膠注入模具中並使模具固化。另外，代替使用模具，亦可應用如下方法：在聚矽氧橡膠薄片的垂直方向上形成複數個通孔，將在其中交聯材料及導電粒子之經攪拌混合物注入通孔中，然後固化。此處，交聯材料可為根據本發明之一個實施例的氟聚矽氧橡膠、不包含氟原子的聚矽氧橡膠或不包含氟原子的交聯聚合物。The test connector according to one embodiment of the present invention can be manufactured by a method generally applicable to those of ordinary skill in the corresponding field. For example, the sheet 110 may be formed and fabricated by placing the previously fabricated conductive portion 130 at a specific location in a mold, and then injecting the fluoropolysiloxane rubber according to one embodiment of the present invention into the mold and allowing the mold to cured. In addition, instead of using a mold, a method of forming a plurality of through holes in the vertical direction of the polysiloxane rubber sheet, injecting a stirred mixture of the crosslinking material and conductive particles therein into the through holes, and then curing. Here, the cross-linking material may be a fluoropolysiloxane rubber, a polysiloxane rubber that does not contain fluorine atoms, or a cross-linked polymer that does not contain fluorine atoms according to an embodiment of the present invention.

在另一實施例中，例如，測試連接器可藉由以下方法來製造，該方法包括：(a)將根據本發明之一個實施例的氟聚矽氧橡膠及導電粉末的混合物注入模具中；(b)產生磁場以將導電粉末佈置在預定位置；(c)藉由使氟聚矽氧橡膠固化形成薄片110。藉由步驟(b)中產生的磁場，導電粉末可在氟聚矽氧橡膠中流動以佈置在預定位置。經佈置的導電粉末在垂直方向上延伸並允許電流在垂直方向上流動，從而形成導電部分130。In another embodiment, for example, a test connector may be fabricated by a method comprising: (a) injecting a mixture of fluoropolysiloxane and conductive powder into a mold according to one embodiment of the present invention; (b) generating a magnetic field to dispose the conductive powder at predetermined positions; (c) forming the sheet 110 by curing the fluorosilicone rubber. By the magnetic field generated in the step (b), the conductive powder can flow in the fluorosilicone rubber to be arranged at a predetermined position. The arranged conductive powders extend in the vertical direction and allow current to flow in the vertical direction, thereby forming the conductive portion 130 .

根據製造方法，薄片110與導電部分130之間的邊界可能不清晰。例如，導電部分130中包含的聚矽氧橡膠可與薄片110的聚矽氧橡膠相同。另外，在將氟聚矽氧橡膠及導電粉末之混合物注入模具中並施加磁場的方法中，根據在薄片110的垂直方向上產生的磁場的密度變化及LSR的黏度，導電部分130可不被製造成光滑的圓柱形狀，一些部分可為凸的或凹的，且導電部分130的邊界可能不清晰。在本發明中，儘管此等部件由術語導電部分130及薄片110來區分，但此僅為解釋本發明之描述，而無意於限制權利範圍。本發明包括一體地製造導電部分130及薄片110的情況及藉由清晰邊界劃分導電部分130及薄片110的情況兩者。Depending on the manufacturing method, the boundary between the sheet 110 and the conductive portion 130 may not be clear. For example, the silicone rubber contained in the conductive portion 130 may be the same as the silicone rubber of the sheet 110 . In addition, in the method of injecting a mixture of fluoropolysiloxane and conductive powder into a mold and applying a magnetic field, the conductive portion 130 may not be fabricated according to the density change of the magnetic field generated in the vertical direction of the sheet 110 and the viscosity of the LSR. Smooth cylindrical shape, some parts may be convex or concave, and the boundary of the conductive part 130 may not be clear. In the present invention, although these components are distinguished by the terms conductive portion 130 and sheet 110, this is only a description for explaining the present invention, and is not intended to limit the scope of rights. The present invention includes both the case of integrally manufacturing the conductive portion 130 and the sheet 110 and the case of dividing the conductive portion 130 and the sheet 110 by clear boundaries.

在下文中，將參考實例及實驗實例更詳細地描述本發明之構型及效果。然而，僅提供以下實例及實驗實例以說明本發明以促進對本發明之理解，且本發明之範圍不限於此。Hereinafter, the configuration and effects of the present invention will be described in more detail with reference to Examples and Experimental Examples. However, the following examples and experimental examples are only provided to illustrate the present invention to facilitate understanding of the present invention, and the scope of the present invention is not limited thereto.

另外，將參考附圖描述本發明之實例。在附圖中，相似的元件符號可分配給相同或相應的組件。此外，在以下實例的描述中，將省略相同或相應組件的重複描述。然而，儘管省略組件的描述，但是並不意圖在任何實施例中不包括此類組件。Additionally, examples of the present invention will be described with reference to the accompanying drawings. In the drawings, like reference numerals may be assigned to the same or corresponding components. Also, in the description of the following examples, repeated descriptions of the same or corresponding components will be omitted. However, although description of components is omitted, it is not intended that such components be excluded from any embodiment.

[[ 實例example ]] 製備氟聚矽氧聚合物及氟聚矽氧橡膠Preparation of fluoropolysiloxane polymer and fluoropolysiloxane rubber (LSR)(LSR)

將1莫耳之八甲基環四矽氧烷、2莫耳之1,3,5-參[(3,3,3-三氟丙基)甲基]環三矽氧烷、0.01莫耳之1,1,3,3-四甲基-1,3-二乙烯基二矽氧烷及0.01莫耳之HO- -Si(Me)2 -N-(CH3 )4+ (用作甲基種子)混合並反應，從而獲得氟聚矽氧聚合物Vi-Si(Me2 )-O-{[-Si(Me2 )-O]4 }100 -{[Si(Me)(三氟丙基)-O]3 }200 -Si(Me2 )-Vi聚合物。此處，「Vi」係指乙烯基。1 mole of octamethylcyclotetrasiloxane, 2 moles of 1,3,5-para[(3,3,3-trifluoropropyl)methyl]cyclotrisiloxane, 0.01 moles of 1,1,3,3-tetramethyl-1,3-divinyldisiloxane and 0.01 moles of HO - -Si(Me) 2 -N-(CH 3 ) 4+ (used as methyl fluoropolysiloxane polymer Vi-Si(Me 2 )-O-{[-Si(Me 2 )-O] 4 } 100 -{[Si(Me)(trifluoropropane) base)-O] 3 } 200 -Si(Me 2 )-Vi polymer. Here, "Vi" means vinyl.

將1莫耳之八甲基環四矽氧烷、2莫耳之1,3,5-參[(3,3,3-三氟丙基)甲基]環三矽氧烷、0.01莫耳之1,1,3,3-四甲基-1,3-二氫二矽氧烷及0.01莫耳之HO- -Si(Me)2 -N-(CH3 )4+ (用作甲基種子)混合並反應，從而獲得氟聚矽氧聚合物H-Si(Me2 )-O-{[-Si(Me2 )-O]4 }100 -{[Si(Me)(三氟丙基)-O]3 }200 -Si(Me2 )-H聚合物。1 mole of octamethylcyclotetrasiloxane, 2 moles of 1,3,5-para[(3,3,3-trifluoropropyl)methyl]cyclotrisiloxane, 0.01 moles of 1,1,3,3-tetramethyl-1,3-dihydrodisiloxane and 0.01 moles of HO - -Si(Me) 2 -N-(CH 3 ) 4+ (used as methyl seeds) were mixed and reacted to obtain a fluoropolysiloxane polymer H-Si(Me 2 )-O-{[-Si(Me 2 )-O] 4 } 100 -{[Si(Me)(trifluoropropyl )-O] 3 } 200 -Si(Me 2 )-H polymer.

用部分A(主要材料)及部分B(固化劑)製備2-液體組分橡膠的氟聚矽氧橡膠(LSR)，其中主要材料用Vi-Si(Me2 )-O-{[-Si(Me2 )-O]4 }100 -{[Si(Me)(三氟丙基)-O]3 }200 -Si(Me2 )-Vi聚合物、鉑基觸媒及二氧化矽以外之添加劑製備，且固化劑用Vi-Si(Me2 )-O-{[-Si(Me2 )-O]4 }100 -{[Si(Me)(三氟丙基)-O]3 }200 -Si(Me2 )-Vi聚合物及H-Si(Me2 )-O-{[-Si(Me2 )-O]4 }100 -{[Si(Me)(三氟丙基)-O]3 }200 -Si(Me2 )-H聚合物及二氧化矽以外的添加劑製備。加成反應型2-液體組分氟聚矽氧橡膠(LSR)用於製造藉由將主要材料及固化劑(已分為部分A及部分B)儲存並將其混合在一起而製備的插槽。此處，添加劑係指賦予黏接強度的偶聯劑等，且可根據需要使用。另外，乙烯基聚合物或氫聚合物可為分子量或黏度不同的多種聚合物之混合物。Fluoropolysiloxane rubber (LSR) of 2-liquid component rubber is prepared with part A (main material) and part B (curing agent), wherein the main material is Vi-Si(Me 2 )-O-{[-Si( Me 2 )-O] 4 } 100 -{[Si(Me)(trifluoropropyl)-O] 3 } 200 -Si(Me 2 )-Vi polymer, platinum-based catalyst and additives other than silica prepared, and the curing agent was Vi-Si(Me 2 )-O-{[-Si(Me 2 )-O] 4 } 100 -{[Si(Me)(trifluoropropyl)-O] 3 } 200 - Si(Me 2 )-Vi polymer and H-Si(Me 2 )-O-{[-Si(Me 2 )-O] 4 } 100 -{[Si(Me)(trifluoropropyl)-O] 3 } Preparation of 200 -Si(Me 2 )-H polymer and additives other than silica. Addition Reaction Type 2-Liquid Component Fluorosilicone Rubber (LSR) is used in the manufacture of sockets prepared by storing the main material and curing agent (already divided into Part A and Part B) and mixing them together . Here, the additive refers to a coupling agent or the like that imparts adhesive strength, and can be used as necessary. Alternatively, the vinyl polymer or hydrogen polymer may be a mixture of polymers of different molecular weights or viscosities.

[[ 比較實例Comparative example ]] 製備一般聚矽氧聚合物及聚矽氧橡膠Preparation of general polysiloxane polymers and polysiloxane rubber

藉由相同的方法製備具有乙烯基及氫基的矽氧烷，不同之處在於上述實例中的1,3,5-參[[3,3,3-三氟丙基)甲基]環三矽氧烷，並經使用作為LSR。Siloxanes with vinyl and hydrogen groups were prepared by the same method, except that 1,3,5-para[[3,3,3-trifluoropropyl)methyl]cyclotri Siloxane, and has been used as LSR.

比較實例之聚矽氧橡膠為加成反應型2-液體組分LSR。加成反應型2-液體組分用於藉由儲存已分為部分A及部分B的主要材料及固化材料，及然後將其混合在一起而製造插槽。此處，部分A為主要材料，由具有乙烯基的矽氧烷、鉑基觸媒、填料及添加劑組成，部分B則為固化劑，其為具有乙烯基之矽氧烷、具有氫基之矽氧烷、填料及添加劑的合適混合物。此處，添加劑係指賦予黏接強度的偶聯劑，且可根據需要使用。另外，乙烯基聚合物或氫聚合物可藉由將分子量或黏度不同的多種聚合物混合而使用。The silicone rubber of the comparative example is an addition reaction type 2-liquid component LSR. The addition reaction type 2-liquid component is used to make the sockets by storing the main material and the cured material that have been divided into parts A and B, and then mixing them together. Here, part A is the main material, which is composed of siloxane with vinyl group, platinum-based catalyst, filler and additives, and part B is the curing agent, which is siloxane with vinyl group and silicon with hydrogen group A suitable mixture of oxanes, fillers and additives. Here, the additive refers to a coupling agent that imparts adhesive strength, and can be used as necessary. In addition, vinyl polymers or hydrogen polymers can be used by mixing a plurality of polymers having different molecular weights or viscosities.

[[ 實驗實例Experimental example 1]1] 可撓性有關力特性的量測Measurement of Flexibility-Related Force Properties

使用實例及比較實例之聚矽氧作為絕緣薄片的組分，藉由常規方法製造測試連接器。Using the polysiloxanes of the Examples and Comparative Examples as a component of the insulating sheet, test connectors were fabricated by conventional methods.

具體而言，將以上實例及比較實例中的金粒子以適當的比例混合，從而在測試連接器上形成圖案。此處，為容易地形成圖案，將溫度調整至20至50℃以降低聚矽氧的黏度，並形成圖案，然後進行固化程序。測試連接器的類型為用於測試DDR 200-0.65x0.8p晶片的插槽。基本連接器包括PI膜、SUS框架、聚矽氧及導電粉末(金粒子)。Specifically, the gold particles in the above examples and comparative examples were mixed in an appropriate ratio to form patterns on the test connectors. Here, in order to easily form the pattern, the temperature is adjusted to 20 to 50° C. to reduce the viscosity of the polysiloxane, and the pattern is formed, and then the curing process is performed. The type of test connector is a socket for testing DDR 200-0.65x0.8p die. Basic connectors include PI film, SUS frame, polysiloxane and conductive powder (gold particles).

之後，在以下條件下測量根據溫度的力特性：Afterwards, the force characteristics as a function of temperature were measured under the following conditions:

-溫度：室溫(25℃)，低溫(-55℃)-Temperature: room temperature (25℃), low temperature (-55℃)

-測試樣品：E1類型(由聚矽氧施加)- Test sample: E1 type (applied by polysiloxane)

-實驗性PKG：200-0.65x0.8p- Experimental PKG: 200-0.65x0.8p

-實驗方法：根據衝程控制機構(SCM)(範圍：0至0.22mm/推薦：0.20mm)，藉由改變測試深度(衝程)來測量力。- Experimental method: The force is measured by changing the test depth (stroke) according to the stroke control mechanism (SCM) (range: 0 to 0.22 mm/recommended: 0.20 mm).

-飽和時間：在施加溫度下室顯示後1小時。- Saturation time: 1 hour after chamber display at applied temperature.

力的測量結果示於表1至表3及圖2至圖4中。The force measurements are shown in Tables 1-3 and Figures 2-4.

[表1] RT 聚矽氧 S (mm) 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 0.18 0.2 0.22 25℃ 比較實例 F (g/pin) 0.12 0.33 3.07 5.93 8.88 12.12 15.67 19.3 23.3 27.81 32.93 38.44 實例 1.04 1.4 2.65 5.47 8.82 12.59 16.79 21.16 25.81 31.28 37.18 43.58 [Table 1] RT polysiloxane S (mm) 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 0.18 0.2 0.22 25℃ Comparative example F (g/pin) 0.12 0.33 3.07 5.93 8.88 12.12 15.67 19.3 23.3 27.81 32.93 38.44 example 1.04 1.4 2.65 5.47 8.82 12.59 16.79 21.16 25.81 31.28 37.18 43.58

[表2] 冷 聚矽氧 S (mm) 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 0.18 0.2 0.22 -55℃ 比較實例 F (g/pin) -0.29 0.48 5.5 12.66 19.47 26.09 33.42 41.16 48.88 55.7 63.73 71.61 實例 0.29 0.95 3.65 7.83 12.22 16.95 21.69 27.46 33.68 40.37 47.43 54.52 [Table 2] cold polysiloxane S (mm) 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 0.18 0.2 0.22 -55℃ Comparative example F (g/pin) -0.29 0.48 5.5 12.66 19.47 26.09 33.42 41.16 48.88 55.7 63.73 71.61 Example 0.29 0.95 3.65 7.83 12.22 16.95 21.69 27.46 33.68 40.37 47.43 54.52

[表3] 　 比較實例 實例 25℃ 32.93 gf 37.18 gf -55℃ 63.73 gf 47.43 gf 變化率(%) 93.52 % 27.58 % [table 3] Comparative example Example 25℃ 32.93 gf 37.18 gf -55℃ 63.73 gf 47.43 gf Change rate (%) 93.52% 27.58%

根據以上結果，可以看出，當使用普通聚矽氧時，基於0.2 mm的衝程，在極低溫下的力變化率增加93.52%，且因此可撓性顯著降低。當可撓性如此降低時，當在極低溫下重複使用普通聚矽氧時，連接器的耐久性會迅速降低，且隨著其壽命變短，必須頻繁地更換連接器。另外，當絕緣薄片的可撓性降低時，存在於該薄片中的導電粒子可能會從聚矽氧橡膠上脫落，從而使得待測試之裝置不與測試設備電連接。另一方面，在使用根據本發明之一個實施例的氟聚矽氧橡膠的實例中，力變化率為27.58%，並與室溫相比，可確認在極低溫下顯著地保持可撓性，並可以確認，與比較實例相比，力變化率顯著並高度提高65%。From the above results, it can be seen that when ordinary polysiloxane is used, the force change rate at very low temperature is increased by 93.52% based on a stroke of 0.2 mm, and thus the flexibility is significantly reduced. When flexibility is so reduced, when common polysiloxane is reused at extremely low temperatures, the durability of the connector decreases rapidly, and as its life becomes shorter, the connector must be replaced frequently. In addition, when the flexibility of the insulating sheet is reduced, the conductive particles present in the sheet may be detached from the polysiloxane rubber, so that the device to be tested is not electrically connected to the test equipment. On the other hand, in the example using the fluoropolysiloxane rubber according to one embodiment of the present invention, the force change rate was 27.58%, and it was confirmed that the flexibility was remarkably maintained at extremely low temperature compared with room temperature, And it can be confirmed that the force change rate is remarkable and highly improved by 65% compared with the comparative example.

[[ 實驗實例Experimental example 2]2] 電阻測量Resistance measurement

使用連接器在以下條件及方法下測量如實驗實例1中所述製造的測試連接器的根據溫度的電阻特性。The resistance characteristics according to temperature of the test connector manufactured as described in Experimental Example 1 were measured using the connector under the following conditions and methods.

-溫度：室溫(25℃)，低溫(-55℃)-Temperature: room temperature (25℃), low temperature (-55℃)

-實驗樣品：E1類型(由聚矽氧施加)- Experimental sample: E1 type (applied by polysiloxane)

-實驗性PKG：200-0.65x0.8p- Experimental PKG: 200-0.65x0.8p

-實驗方法：根據力控制機構(FCM)，以相同方式施加30 g/pin以施加合適的力來測量連接器電阻。- Experimental method: According to the force control mechanism (FCM), 30 g/pin is applied in the same way to apply a suitable force to measure the connector resistance.

-飽和時間：在施加溫度下室顯示後1小時。- Saturation time: 1 hour after chamber display at applied temperature.

電阻測量結果示於表4及圖5中。以下所有電阻值的單位為mΩ。The resistance measurement results are shown in Table 4 and FIG. 5 . All resistance values below are in mΩ.

[表4]    室溫 極低溫 相對於室溫增加% (基於平均電阻)    實例 比較實例 實例 比較實例 實例 比較實例 最小電阻 21 23 30 104 77.4 257.3 平均電阻 31 48 55 171.5 最大電阻 47 71 90 385 [Table 4] room temperature very low temperature % increase relative to room temperature (based on average resistance) example Comparative example example Comparative example Example Comparative example Minimum resistance twenty one twenty three 30 104 77.4 257.3 Average resistance 31 48 55 171.5 Maximum resistance 47 71 90 385

根據以上結果，在使用普通聚矽氧的比較實例中，與室溫相比，在極低溫下平均電阻值增加約3.5倍，而在本發明之實例中，平均電阻值增加約1.7倍，從而確認在極低溫下表現出極佳導電性及電阻穩定性，及因此，優異且穩定地保持連接器的特性。另外，在本發明之實例中，與比較實例相比，最小及最大電阻值在室溫下更低，且甚至在極低溫下亦顯著更低。然而，在比較實例中，在極低溫下的最大電阻值一般超過測試連接器所需的300 mΩ，及因此不能滿足測試連接器的規格。According to the above results, in the comparative example using ordinary polysiloxane, the average resistance value at extremely low temperature increased by about 3.5 times compared with room temperature, while in the example of the present invention, the average resistance value increased by about 1.7 times, so that It was confirmed that excellent conductivity and resistance stability were exhibited at extremely low temperatures, and thus, the characteristics of the connector were excellent and stably maintained. In addition, in the examples of the present invention, the minimum and maximum resistance values were lower at room temperature, and significantly lower even at extremely low temperatures, as compared with the comparative examples. However, in the comparative example, the maximum resistance value at very low temperature generally exceeds the 300 mΩ required for the test connector, and thus cannot meet the specification of the test connector.

[[ 實驗實例Experimental example 3]3] 差示掃描量熱法Differential Scanning Calorimetry

為確認根據本發明之一個實施例的氟聚矽氧聚合物的物理性質，使用Netzsch-DSC200F3進行差示掃描量熱法。具體而言，將實例之氟聚矽氧聚合物放入分析儀中，並測量根據溫度的熱流，且結果示於圖6中。根據該結果，確認在根據本發明之一個實施例的氟聚矽氧橡膠中未觀察到加熱或冷卻時的結晶溫度(Tc)及熔融溫度(Tm)。由於此種性質，據認為，與普通聚矽氧相比，根據本發明之一個實施例的氟聚矽氧橡膠在極低溫下表現出極佳可撓性及電阻穩定性。To confirm the physical properties of the fluoropolysiloxane polymer according to one embodiment of the present invention, differential scanning calorimetry was performed using a Netzsch-DSC200F3. Specifically, the fluoropolysiloxane polymer of the example was put into the analyzer, and the heat flow according to the temperature was measured, and the results are shown in FIG. 6 . From this result, it was confirmed that the crystallization temperature (Tc) and melting temperature (Tm) upon heating or cooling were not observed in the fluoropolysiloxane rubber according to one example of the present invention. Due to this property, it is believed that the fluoropolysiloxane rubber according to one embodiment of the present invention exhibits excellent flexibility and resistance stability at very low temperatures compared to ordinary polysiloxanes.

當使用根據本發明之一個態樣的氟聚矽氧橡膠製造測試連接器時，可在極低溫下表現出極佳耐寒性、可撓性、絕緣性及電阻穩定性。例如，本發明之測試連接器在-40℃或更低的溫度範圍內，更具體而言，約-70至-50℃，及特別是在-55℃下具有極佳耐寒性、可撓性、絕緣性及電阻穩定性。另外，此種聚合物可在極低溫下具有高交聯密度及低收縮率。When the fluoropolysiloxane rubber according to one aspect of the present invention is used to manufacture a test connector, it can exhibit excellent cold resistance, flexibility, insulation and resistance stability at extremely low temperatures. For example, the test connector of the present invention has excellent cold resistance, flexibility in the temperature range of -40°C or lower, more specifically, about -70 to -50°C, and especially at -55°C , Insulation and resistance stability. In addition, such polymers can have high crosslink density and low shrinkage at very low temperatures.

本發明之此類效果被認為歸因於氟聚矽氧橡膠的特性，其中未觀察到結晶溫度(Tc)及熔融溫度(Tm)。Such effects of the present invention are believed to be attributable to the properties of the fluorosilicone rubber, in which the crystallization temperature (Tc) and melting temperature (Tm) were not observed.

雖然已經相對於一些實施例描述本發明，但是應注意，在不脫離本發明之精神及範圍的情況下，可進行各種修改及改變，其可為熟習此項技術者理解。另外，此類修改及改變應被解釋為屬於本文所附申請專利範圍的範圍。While the present invention has been described with respect to some embodiments, it should be noted that various modifications and changes, which will be apparent to those skilled in the art, can be made without departing from the spirit and scope of the invention. In addition, such modifications and changes should be construed as falling within the scope of the claims appended hereto.

10:待測試之裝置 11,21:端子 20:測試設備 100:測試連接器 110:薄片 130:導電部分10: Device to be tested 11,21: Terminals 20: Test Equipment 100: Test Connector 110: Flakes 130: Conductive part

結合說明書並構成說明書之一部分的附圖示出本發明之實施例，並與以上給出的一般描述及以下給出的實施例之詳細描述一起用於解釋本發明的原理。The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and together with the general description given above and the detailed description of the embodiments given below serve to explain the principles of the invention.

圖1為根據一個實施例之測試連接器(100)的局部橫截面視圖，其中測試連接器100設置在待測試之裝置(10)與測試設備(20)之間。Figure 1 is a partial cross-sectional view of a test connector (100) disposed between a device (10) to be tested and a test equipment (20) according to one embodiment.

圖2為示出根據本發明之一個實施例的實例及比較實例中，根據室溫下之深度的力特性之結果的圖。FIG. 2 is a graph showing the results of force characteristics according to depth at room temperature in an example according to an embodiment of the present invention and a comparative example.

圖3為示出根據本發明之一個實施例的實例及比較實例中，根據低溫下之深度的力特性之結果的圖。FIG. 3 is a graph showing the results of force characteristics according to depth at low temperature in an example according to an embodiment of the present invention and a comparative example.

圖4為比較根據本發明之一個實施例的實例及比較實例中在室溫及低溫下之力特性的圖。4 is a graph comparing force characteristics at room temperature and low temperature in an example according to an embodiment of the present invention and a comparative example.

圖5為示出根據本發明之一個實施例的實例及比較實例中在室溫及低溫下之電阻特性的圖。5 is a graph showing resistance characteristics at room temperature and low temperature in an example according to an embodiment of the present invention and a comparative example.

圖6為示出根據本發明之一個實施例的氟聚矽氧的差示掃描量熱法(DSC)之結果的圖。6 is a graph showing the results of differential scanning calorimetry (DSC) of fluoropolysiloxanes according to one embodiment of the present invention.

10:待測試之裝置 10: Device to be tested

11,21:端子 11,21: Terminals

20:測試設備 20: Test Equipment

100:測試連接器 100: Test Connector

110:薄片 110: Flakes

130:導電部分 130: Conductive part

Claims (12)

一種測試連接器，包括：含有氟聚矽氧橡膠之薄片；及導電部分，其在該薄片中沿垂直方向延伸，以允許電流沿該垂直方向流動，其中，相對於整個氟聚矽氧橡膠，該含氟原子的取代基的重量比或莫耳比為約30%或以上。 A test connector comprising: a sheet containing fluoropolysiloxane; and a conductive portion extending in a vertical direction in the sheet to allow current to flow in the vertical direction, wherein, with respect to the entire fluoropolysiloxane, The weight ratio or molar ratio of the fluorine atom-containing substituent is about 30% or more. 如請求項1之測試連接器，其中該氟聚矽氧橡膠係用含有在重複單元中經一個或多個氟原子取代的側鏈的聚有機矽氧烷製備。 The test connector of claim 1, wherein the fluoropolysiloxane rubber is prepared with a polyorganosiloxane containing side chains substituted with one or more fluorine atoms in the repeating unit. 如請求項1之測試連接器，其中該氟聚矽氧橡膠係用具有以下式1之結構的聚合物製備：
Figure 109112925-A0305-02-0023-1
 (其中R、R1、R2及R3各獨立地選自氫、具有1至10個碳原子之直鏈或分支鏈烷基、具有1至10個碳原子之羥烷基、具有3至15個碳原子之環烷基、具有6至12個碳原子之芳基、具有7至20個碳原子之芳烷基、及具有2至20個碳原子之烯基，且不存在作為同一矽原子之取代基的氫原子及乙烯基， R4為氟或具有一個或多個氟原子之取代基，m及n各為0至10,000或0至1,000的整數，及o為1至10,000或1至1,000的整數)。 The test connector of claim 1, wherein the fluoropolysiloxane rubber is prepared from a polymer having the structure of Formula 1 below:
Figure 109112925-A0305-02-0023-1
 (wherein R, R1, R2 and R3 are each independently selected from hydrogen , straight or branched chain alkyl having 1 to 10 carbon atoms, hydroxyalkyl having 1 to 10 carbon atoms, Cycloalkyl groups of 15 carbon atoms, aryl groups of 6 to 12 carbon atoms, aralkyl groups of 7 to 20 carbon atoms, and alkenyl groups of 2 to 20 carbon atoms, not present as the same silicon A hydrogen atom and a vinyl group of substituents of atoms, R 4 is fluorine or a substituent having one or more fluorine atoms, m and n are each an integer of 0 to 10,000 or 0 to 1,000, and o is 1 to 10,000 or 1 an integer to 1,000). 如請求項3之測試連接器，其中R4為具有1至20個碳原子的氟烷基。 The test connector of claim 3, wherein R 4 is a fluoroalkyl group having 1 to 20 carbon atoms. 如請求項3之測試連接器，其中：R、R2及R3為甲基；R1為乙烯基；R4為三氟丙基；m與n之和為300至500的整數；及o為500至800的整數。 The test connector of claim 3, wherein: R, R 2 and R 3 are methyl; R 1 is vinyl; R 4 is trifluoropropyl; the sum of m and n is an integer from 300 to 500; and o is an integer from 500 to 800. 如請求項1之測試連接器，其中該氟聚矽氧橡膠為液態聚矽氧橡膠(LSR)。 The test connector of claim 1, wherein the fluoropolysiloxane rubber is liquid polysiloxane rubber (LSR). 如請求項1之測試連接器，其中該薄片由氟聚矽氧橡膠及不包含氟原子之聚矽氧橡膠或不包含氟原子之交聯聚合物材料中的一種或多種的混合物形成，其中，在該混合物中，該氟聚矽氧橡膠具有含有-Si(CH3)(CH2CH2CF3)-O-之氟基團之聚合物的聚合單元，以相對於該混合物的總重量計約30%或更多在該聚合物中。 The test connector of claim 1, wherein the sheet is formed of a mixture of one or more of a fluoropolysiloxane rubber and a polysiloxane rubber that does not contain fluorine atoms or a cross-linked polymer material that does not contain fluorine atoms, wherein, In the mixture, the fluoropolysiloxane rubber has polymerized units of a polymer containing fluorine groups of -Si( CH3 ) ( CH2CH2CF3 ) -O-, relative to the total weight of the mixture About 30% or more is in the polymer. 如請求項1之測試連接器，其中該氟聚矽氧橡膠為用包含聚甲基三氟丙基矽氧烷及聚二烷基矽氧烷、聚烷基烯丙基矽氧烷及聚二烯丙基矽氧烷中之一種或多種的嵌段共聚物製備，或使用由其混合物組成的聚矽氧橡膠製備。 The test connector of claim 1, wherein the fluoropolysiloxane rubber is made of polymethyltrifluoropropylsiloxane, polydialkylsiloxane, polyalkylallylsiloxane, and polydialkylsiloxane. Prepared from block copolymers of one or more of allylsiloxanes, or using polysiloxane rubbers composed of mixtures thereof. 如請求項8之測試連接器，其中該聚二烷基矽氧烷為聚二甲基矽氧烷，該聚烷基烯丙基矽氧烷為聚甲基苯基矽氧烷，且該聚二烯丙基矽氧烷為聚二苯基矽氧烷。 The test connector of claim 8, wherein the polydialkylsiloxane is polydimethylsiloxane, the polyalkylallylsiloxane is polymethylphenylsiloxane, and the poly Diallylsiloxane is polydiphenylsiloxane. 如請求項1之測試連接器，其中該氟聚矽氧橡膠包括：氟基聚合物、氟基交聯劑及氟基增塑劑中之一種或多種；二氧化矽、經表面處理之疏水性二氧化矽或經氟聚合物或多種矽烷表面處理的二氧化矽；及共交聯劑及交聯促進劑中之一種或多種。 The test connector of claim 1, wherein the fluoropolysiloxane rubber comprises: one or more of a fluorine-based polymer, a fluorine-based crosslinking agent, and a fluorine-based plasticizer; silica, surface-treated hydrophobicity Silica or silica surface-treated with a fluoropolymer or various silanes; and one or more of a co-crosslinking agent and a crosslinking accelerator. 如請求項1之測試連接器，其中該氟聚矽氧橡膠為2-組分聚矽氧橡膠。 The test connector of claim 1, wherein the fluoropolysiloxane rubber is a 2-component polysiloxane rubber. 如請求項1之測試連接器，其中該導電部分包括一導電粉末，該導電粉末包含選自由金、銀、鉑、銅、鈀、銠及包括其任何一種或多種之合金組成之群中的一種或多種。 The test connector of claim 1, wherein the conductive portion comprises a conductive powder comprising one selected from the group consisting of gold, silver, platinum, copper, palladium, rhodium and alloys including any one or more thereof or more.
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