TWI752533B - maintenance device - Google Patents

maintenance device Download PDF

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TWI752533B
TWI752533B TW109120724A TW109120724A TWI752533B TW I752533 B TWI752533 B TW I752533B TW 109120724 A TW109120724 A TW 109120724A TW 109120724 A TW109120724 A TW 109120724A TW I752533 B TWI752533 B TW I752533B
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measurement information
ray
detection
unit
tube voltage
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TW202133788A (en
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米川栄
斯里哈莎 拉
艾尼爾 奈爾
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日商東芝股份有限公司
日商東芝基礎設施系統股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M99/00—Subject matter not provided for in other groups of this subclass
    • G01M99/008—Subject matter not provided for in other groups of this subclass by doing functionality tests

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

[課題]使X線厚度測定裝置的異常位準的判定精度提升。 [解決手段]實施形態的維護裝置係具備診斷部。診斷部係檢測包含：藉由來自X線控制電源的電力放出電子的電絲與藉由從該電絲被放出的電子的衝撞而對厚度的測定對象照射X線的靶材間的管電壓的檢測結果、流至電絲與靶材間的管電流的檢測結果、對應通過測定對象的X線的強度的檢測電壓及檢測電流的至少一方的檢測訊號的檢測結果、將來自X線控制電源的電力變壓而供給至電絲的變壓器的一次側的驅動電壓的檢測結果、及流至變壓器的一次側的驅動電流的檢測結果之中至少1個的測定資訊的突波。此外，診斷部係根據突波的發生頻度、與該突波的大小的積，判定根據檢測訊號來算出測定對象的厚度的X線厚度測定裝置的異常位準。 [Problem] To improve the determination accuracy of the abnormal level of the X-ray thickness measuring device. [Solution] The maintenance device of the embodiment includes a diagnosis unit. The diagnosis section detects a tube voltage including a tube voltage between an electric wire that emits electrons by electric power from an X-ray control power supply and a target that irradiates a thickness measurement object with X-rays by collision of the electrons emitted from the electric wire. The detection result, the detection result of the tube current flowing between the wire and the target material, the detection result of the detection signal corresponding to at least one of the detection voltage and the detection current of the intensity of the X-ray passing through the measurement object, and the detection result of the detection signal from the X-ray control power supply. A surge of measurement information of at least one of the detection result of the driving voltage on the primary side of the transformer in which the power is transformed and supplied to the wire, and the detection result of the driving current flowing to the primary side of the transformer. Further, the diagnosis unit determines the abnormal level of the X-ray thickness measuring apparatus that calculates the thickness of the measurement object from the detection signal based on the product of the frequency of occurrence of the surge and the magnitude of the surge.

Description

維護裝置maintenance device

本發明之實施形態係關於維護裝置。Embodiments of the present invention relate to maintenance devices.

以厚度計的一種而言，在各種鋼板的製造線中，有測定作為測定對象的鋼板的板厚的X線厚度測定裝置。X線厚度測定裝置係在24小時運轉的鐵/非鐵的壓延線中，以連線測定測定對象的板厚。 [先前技術文獻] [專利文獻] As one kind of thickness, there are X-ray thickness measuring apparatuses that measure the thickness of the steel sheet to be measured in various steel sheet production lines. The X-ray thickness measuring apparatus is used in a 24-hour ferrous/non-ferrous rolling line, and the thickness of the measurement object is measured by connecting the line. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本特開2010-167282號公報[Patent Document 1] Japanese Patent Laid-Open No. 2010-167282

[發明所欲解決之問題)[The problem to be solved by the invention)

但是，X線厚度測定裝置係具有對鋼板等測定對象照射X線的X線發生器，但是若該X線發生器故障，變得無法測定測定對象的板厚，且變得無法進行製造線中的測定對象的板厚的控制及監視。因此，圖求在X線發生器故障之前，替換X線發生器，以減少因X線發生器故障所致之對製造線的影響。 (解決問題之技術手段) However, the X-ray thickness measuring apparatus has an X-ray generator for irradiating X-rays to a measurement object such as a steel sheet. However, if the X-ray generator fails, it becomes impossible to measure the plate thickness of the measurement object, and it becomes impossible to perform the operation in the production line. Control and monitor the thickness of the measurement object. Therefore, the figure seeks to replace the X-ray generator before the failure of the X-ray generator to reduce the impact on the manufacturing line caused by the failure of the X-ray generator. (Technical means to solve problems)

實施形態的維護裝置係具備診斷部。診斷部係檢測包含：藉由來自X線控制電源的電力放出電子的電絲與藉由從該電絲被放出的電子的衝撞而對厚度的測定對象照射X線的靶材間的管電壓的檢測結果、流至電絲與靶材間的管電流的檢測結果、對應通過測定對象的X線的強度的檢測電壓及檢測電流的至少一方的檢測訊號的檢測結果、將來自X線控制電源的電力變壓而供給至電絲的變壓器的一次側的驅動電壓的檢測結果、及流至變壓器的一次側的驅動電流的檢測結果之中至少1個的測定資訊的突波。此外，診斷部係根據突波的發生頻度、與該突波的大小的積，判定根據檢測訊號來算出測定對象的厚度的X線厚度測定裝置的異常位準。The maintenance device of the embodiment includes a diagnosis unit. The diagnosis section detects a tube voltage including a tube voltage between an electric wire that emits electrons by electric power from an X-ray control power supply and a target that irradiates a thickness measurement object with X-rays by collision of the electrons emitted from the electric wire. The detection result, the detection result of the tube current flowing between the wire and the target material, the detection result of the detection signal corresponding to at least one of the detection voltage and the detection current of the intensity of the X-ray passing through the measurement object, and the detection result of the detection signal from the X-ray control power supply. A surge of measurement information of at least one of the detection result of the driving voltage on the primary side of the transformer in which the power is transformed and supplied to the wire, and the detection result of the driving current flowing to the primary side of the transformer. Further, the diagnosis unit determines the abnormal level of the X-ray thickness measuring apparatus that calculates the thickness of the measurement object from the detection signal based on the product of the frequency of occurrence of the surge and the magnitude of the surge.

在以下例示的實施形態或變形例中係包含有相同的構成要素。因此，以下係對相同的構成要素係標註共通的符號，並且部分省略重複的說明。實施形態或變形例所包含的部分係可與其他實施形態或變形例所對應的部分作置換而構成。此外，實施形態或變形例所包含的部分的構成或位置等，只要沒有特別提及，係與其他實施形態或變形例相同。The same constituent elements are included in the embodiments and modifications exemplified below. Therefore, the same components are denoted by the same reference numerals below, and overlapping descriptions are partially omitted. The part included in the embodiment or the modification can be constituted by substituting the part corresponding to the other embodiment or the modification. In addition, the structure, position, etc. of the part included in the embodiment or the modified example are the same as those of the other embodiment or the modified example, unless otherwise specified.

圖1係顯示本實施形態之X線厚度測定系統的全體構成之一例的概略圖。FIG. 1 is a schematic diagram showing an example of the overall configuration of the X-ray thickness measurement system of the present embodiment.

首先，使用圖1，說明本實施形態之X線厚度測定系統的全體構成之一例。First, an example of the overall configuration of the X-ray thickness measurement system of the present embodiment will be described with reference to FIG. 1 .

X線厚度測定系統10係藉由X線厚度測定裝置12來測定測定對象90(例如鋼板)的厚度，並且生成診斷X線厚度測定裝置12的異常所需的預兆資料68(參照圖2)而蓄積，且診斷X線厚度測定裝置12的異常。The X-ray thickness measurement system 10 measures the thickness of the measurement object 90 (for example, a steel plate) by the X-ray thickness measurement device 12, and generates warning data 68 (refer to FIG. 2) necessary for diagnosing the abnormality of the X-ray thickness measurement device 12. It accumulates, and the abnormality of the X-ray thickness measuring apparatus 12 is diagnosed.

如圖1所示，本實施形態的X線厚度測定系統10係具備：X線厚度測定裝置12、預兆資料伺服器14、維護裝置16、及網路18。網路18係彼此可傳送接收資訊地連接X線厚度測定裝置12、預兆資料伺服器14、及維護裝置16的LAN(Local Area Network，區域網路)等。此外，本實施形態的X線厚度測定系統10係可按照TCP/IP等通訊規格，透過網際網路等網路，而與設在該X線厚度測定系統10的外部的上位裝置進行通訊。As shown in FIG. 1 , the X-ray thickness measurement system 10 of the present embodiment includes an X-ray thickness measurement device 12 , a warning data server 14 , a maintenance device 16 , and a network 18 . The network 18 connects the X-ray thickness measuring device 12 , the warning data server 14 , and a LAN (Local Area Network) of the maintenance device 16 and the like so that information can be transmitted and received. In addition, the X-ray thickness measurement system 10 of the present embodiment can communicate with a host device provided outside the X-ray thickness measurement system 10 through a network such as the Internet in accordance with communication standards such as TCP/IP.

X線厚度測定裝置12係對厚度的測定對象90照射X線，藉由通過測定對象90的X線的量，來測定測定對象90的厚度。X線厚度測定裝置12係具備：測定部20、X線控制電源22、及板厚運算部(控制裝置)24。The X-ray thickness measuring device 12 measures the thickness of the measuring object 90 by irradiating X-rays to the measuring object 90 of thickness, and measuring the thickness of the measuring object 90 by the amount of X-rays passing through the measuring object 90 . The X-ray thickness measurement device 12 includes a measurement unit 20 , an X-ray control power supply 22 , and a plate thickness calculation unit (control device) 24 .

測定部20係對測定對象90照射X線，將用以算出測定對象90的厚度的檢測電壓或檢測電流的至少任一者作為檢測值，而輸出至板厚運算部24。本實施形態的測定部20係具有：保持部26、變壓器28、X線發生器30、檢測器32、輸出檢測部34、電阻35、變壓器37、及昇壓電路39a、39b。The measurement unit 20 irradiates the measurement object 90 with X-rays, and outputs at least one of a detection voltage or a detection current for calculating the thickness of the measurement object 90 to the plate thickness calculation unit 24 as a detection value. The measuring unit 20 of the present embodiment includes a holding unit 26, a transformer 28, an X-ray generator 30, a detector 32, an output detection unit 34, a resistor 35, a transformer 37, and booster circuits 39a and 39b.

保持部26係保持：變壓器28、X線發生器30、檢測器32、輸出檢測部34、電阻35、變壓器37、及昇壓電路39a、39b。The holding unit 26 holds the transformer 28 , the X-ray generator 30 , the detector 32 , the output detection unit 34 , the resistor 35 , the transformer 37 , and the booster circuits 39 a and 39 b.

變壓器28係將X線控制電源22所輸出的電力進行變壓(例如昇壓)，而供給至後述之X線發生器30的電絲(Filament)38。The transformer 28 transforms (for example, boosts) the power output from the X-ray control power supply 22, and supplies it to a wire (filament) 38 of the X-ray generator 30 to be described later.

變壓器37係將電阻35的兩端的電壓進行變壓(昇壓)的變壓器。The transformer 37 is a transformer that transforms (steps up) the voltage across the resistor 35 .

昇壓電路39a係將被施加至變壓器37的一端(電絲38側之端)的電壓進行昇壓的昇壓電路。The booster circuit 39a is a booster circuit that boosts the voltage applied to one end of the transformer 37 (the end on the wire 38 side).

昇壓電路39b係將被施加至變壓器37的另一端(靶材40側之端)的電壓進行昇壓的昇壓電路。The booster circuit 39b is a booster circuit that boosts the voltage applied to the other end of the transformer 37 (the end on the target 40 side).

X線發生器30係藉由從X線控制電源22所被供給的電力，使X線發生，而照射至測定對象90。本實施形態的X線發生器30係具有：X線管36、電絲38、及靶材40。The X-ray generator 30 generates X-rays by the electric power supplied from the X-ray control power supply 22 and irradiates the measurement object 90 . The X-ray generator 30 of the present embodiment includes an X-ray tube 36 , an electric wire 38 , and a target 40 .

X線管36係例如將內部維持為真空狀態之密閉的管。X線管36係在內部收容電絲38及靶材40而進行保持。電絲38係藉由透過變壓器28而從X線控制電源22所被供給的電力，將電子放出至靶材40。靶材40係藉由電絲38所放出的電子的衝撞，將X線朝測定對象90照射。The X-ray tube 36 is, for example, a hermetically sealed tube that maintains the inside in a vacuum state. The X-ray tube 36 accommodates and holds the wire 38 and the target 40 inside. The wire 38 emits electrons to the target 40 by the electric power supplied from the X-ray control power source 22 through the transformer 28 . The target 40 irradiates the measurement object 90 with X-rays by collision of electrons emitted from the wire 38 .

檢測器32係被配置在夾著測定對象90而與X線發生器30相對向的位置。本實施形態的檢測器32係將對應由X線發生器30被照射且通過測定對象90的X線的強度的檢測電壓及檢測電流的至少任一者的值作為檢測訊號而輸出至輸出檢測部34。檢測器32亦可為例如輸出對應所入射的X線的檢測電壓及檢測電流的電離箱。The detector 32 is arranged at a position facing the X-ray generator 30 with the object to be measured 90 interposed therebetween. The detector 32 of the present embodiment outputs, as a detection signal, a value of at least one of a detection voltage and a detection current corresponding to the intensity of X-rays irradiated by the X-ray generator 30 and passing through the measurement object 90 to the output detection unit 34. The detector 32 may be, for example, an ionization box that outputs a detection voltage and a detection current corresponding to the incident X-rays.

輸出檢測部34係將檢測器32所輸出的檢測訊號進行轉換處理而輸出至板厚運算部24。例如，輸出檢測部34亦可具有AD轉換器等，將已將類比訊號的檢測訊號作數位轉換後的值，輸出作為用以算出測定對象90的厚度的檢測值。The output detection unit 34 converts the detection signal output by the detector 32 and outputs it to the plate thickness calculation unit 24 . For example, the output detection unit 34 may include an AD converter or the like, and output a value obtained by digitizing the detection signal of the analog signal as a detection value for calculating the thickness of the measurement object 90 .

X線控制電源22係電源之一例，根據來自板厚運算部24的電源控制訊號，透過變壓器28而對X線發生器30的電絲38供給電力。X線控制電源22亦可例如連接於商用電源等外部電源。此外，X線控制電源22係具有：驅動檢測部42、及管檢測部44。The X-ray control power supply 22 is an example of the power supply, and supplies power to the wires 38 of the X-ray generator 30 through the transformer 28 according to the power supply control signal from the plate thickness calculating unit 24 . The X-ray control power supply 22 may be connected to an external power supply such as a commercial power supply, for example. In addition, the X-ray control power supply 22 includes a drive detection unit 42 and a tube detection unit 44 .

驅動檢測部42係檢測驅動電壓及驅動電流。驅動電壓係變壓器28的一次側的電壓的值，且為X線控制電源22所供給的電力的電壓的值。驅動電流係流至變壓器28的一次側的電流的值，且為X線控制電源22所供給的電力的電流的值。驅動檢測部42係將所感測(檢測)到的驅動電壓及驅動電流輸出至板厚運算部24。The drive detection unit 42 detects the drive voltage and the drive current. The drive voltage is the value of the voltage on the primary side of the transformer 28 , and is the value of the voltage of the electric power supplied by the X-ray control power supply 22 . The drive current is the value of the current flowing to the primary side of the transformer 28 , and is the value of the current of the electric power supplied by the X-ray control power supply 22 . The drive detection unit 42 outputs the sensed (detected) drive voltage and drive current to the plate thickness calculation unit 24 .

在本實施形態中，驅動檢測部42係由X線控制電源22所具有的未圖示的RTC(Real Time Clock，即時時脈)，取得驅動電壓及驅動電流的檢測時的時間戳記亦即時刻資料。接著，驅動檢測部42係對所檢測到的驅動電壓及驅動電流附加所取得的時刻資料，而輸出至板厚運算部24。In the present embodiment, the drive detection unit 42 obtains the time stamp, that is, the time when the drive voltage and drive current are detected, from an RTC (Real Time Clock) (not shown) that the X-ray control power supply 22 has. material. Next, the drive detection unit 42 adds the acquired time data to the detected drive voltage and drive current, and outputs it to the plate thickness calculation unit 24 .

管檢測部44係檢測管電壓及管電流。管電壓係變壓器28的二次側的電壓的值，且為電絲38與靶材40間的電壓的值。管電流係在X線發生器30的二次側流通的電流的值，且為在電絲38與靶材40間流通的電流的值。The tube detection unit 44 detects the tube voltage and the tube current. The tube voltage is the value of the voltage on the secondary side of the transformer 28 , and is the value of the voltage between the wire 38 and the target 40 . The tube current is the value of the current flowing on the secondary side of the X-ray generator 30 , and is the value of the current flowing between the wire 38 and the target 40 .

在本實施形態中，管檢測部44係將電阻35的兩端的電壓作為管電壓進行檢測，將流至電阻35的電流的值作為管電流進行檢測。接著，管檢測部44係將所感測(檢測)到的管電壓及管電流輸出至板厚運算部24。In the present embodiment, the tube detection unit 44 detects the voltage across the resistor 35 as the tube voltage, and detects the value of the current flowing to the resistor 35 as the tube current. Next, the tube detection unit 44 outputs the sensed (detected) tube voltage and tube current to the plate thickness calculation unit 24 .

在本實施形態中，管檢測部44係由X線控制電源22所具有的未圖示的RTC，取得管電壓及管電流的檢測時的時間戳記亦即時刻資料。接著，管檢測部44係在所檢測到的管電壓及管電流附加所取得的時刻資料，而輸出至板厚運算部24。In the present embodiment, the tube detection unit 44 acquires time stamps, that is, time data at the time of detection of tube voltage and tube current, from an RTC (not shown) included in the X-ray control power supply 22 . Next, the tube detection unit 44 adds the acquired time data to the detected tube voltage and tube current, and outputs it to the plate thickness calculation unit 24 .

板厚運算部24係掌管X線厚度測定裝置12的控制全面。板厚運算部24亦可為藉由X線厚度測定裝置12來測定測定對象90的厚度的操作者等所使用的電腦。The plate thickness calculation unit 24 is in charge of the overall control of the X-ray thickness measuring device 12 . The plate thickness calculation unit 24 may be a computer used by an operator or the like who measures the thickness of the measurement object 90 by the X-ray thickness measurement device 12 .

具體而言，板厚運算部24係根據由輸出檢測部34所取得的檢測值，算出測定對象90的厚度。Specifically, the plate thickness calculation unit 24 calculates the thickness of the measurement object 90 based on the detection value acquired by the output detection unit 34 .

此外，板厚運算部24係將指示對應供給至X線發生器30的電力的管電壓的驅動電壓的電源控制訊號輸出至X線控制電源22。板厚運算部24亦可生成指示根據由管檢測部44所取得的管電壓所設定的驅動電壓的電源控制訊號。In addition, the plate thickness calculation unit 24 outputs a power supply control signal indicating a drive voltage corresponding to the tube voltage of the power supplied to the X-ray generator 30 to the X-ray control power supply 22 . The plate thickness calculation unit 24 may also generate a power supply control signal instructing a drive voltage set based on the tube voltage acquired by the tube detection unit 44 .

此外，板厚運算部24係將包含：由輸出檢測部34被輸出的檢測值的檢測結果、藉由驅動檢測部42所得之驅動電壓的檢測結果、藉由驅動檢測部42所得之驅動電流的檢測結果、藉由管檢測部44所得之管電壓的檢測結果、及藉由管檢測部44所得之管電流的檢測結果之中至少1個的測定資訊56(參照圖2)輸出至網路18。在本實施形態中，板厚運算部24係將包含預先設定的每個周期(例如100ms)的檢測值、驅動電壓、驅動電流、管電壓、及管電流的各個的最大值、最小值、及平均值的測定資訊56輸出至網路18。板厚運算部24亦可例如藉由廣播來輸出測定資訊56。In addition, the plate thickness calculation unit 24 includes the detection result of the detection value output by the output detection unit 34 , the detection result of the driving voltage obtained by the driving detection unit 42 , and the driving current obtained by the driving detection unit 42 . The measurement information 56 (see FIG. 2 ) of at least one of the detection result, the detection result of the tube voltage obtained by the tube detection unit 44 , and the detection result of the tube current obtained by the tube detection unit 44 is output to the network 18 . In the present embodiment, the plate thickness calculation unit 24 includes the detection value, the maximum value, the minimum value, and The measurement information 56 of the average value is output to the network 18 . The plate thickness calculation unit 24 may output the measurement information 56 by, for example, broadcasting.

在本實施形態中，板厚運算部24係在由輸出檢測部34所取得的檢測值及測定對象90的厚度之中，輸出包含檢測值的測定資訊56，惟若為輸出包含檢測值及測定對象90的厚度的至少任一者的測定資訊56者，並非為限定於此者。例如，板厚運算部24亦可輸出包含檢測值及測定對象90的厚度之雙方的測定資訊56，亦可取代檢測值，而輸出包含測定對象90的厚度的測定資訊56。In the present embodiment, the plate thickness calculation unit 24 outputs the measurement information 56 including the detection value among the detection value acquired by the output detection unit 34 and the thickness of the measurement object 90, but if the output includes the detection value and the measurement The measurement information 56 of at least any one of the thicknesses of the object 90 is not limited to this. For example, the plate thickness calculation unit 24 may output the measurement information 56 including both the detection value and the thickness of the measurement object 90 , or output the measurement information 56 including the thickness of the measurement object 90 instead of the detection value.

此外，在本實施形態中，板厚運算部24係將包含檢測值、驅動電壓、驅動電流、管電壓、及管電流的各個的最大值、最小值、及平均值的測定資訊56輸出至網路18，惟若為將檢測值、驅動電壓、驅動電流、管電壓、及管電流的各個的最大值、最小值、及平均值之中至少包含最大值及最小值的測定資訊56輸出至網路18者即可。In addition, in the present embodiment, the plate thickness calculation unit 24 outputs the measurement information 56 including the maximum value, the minimum value, and the average value of the detection value, drive voltage, drive current, tube voltage, and tube current to the network Circuit 18, only if the measurement information 56 including at least the maximum value and the minimum value among the maximum value, minimum value and average value of each of the detected value, driving voltage, driving current, tube voltage, and tube current is output to the network Route 18 will do.

預兆資料伺服器14係由板厚運算部24反覆複數次取得測定資訊56，記憶表示由複數測定資訊56所生成的X線厚度測定裝置12的異常的預兆的資料68(以下稱為預兆資料。參照圖2)而進行蓄積。在此，預兆資料68係由X線厚度測定裝置12所取得的測定資訊56的統計。接著，預兆資料伺服器14係按照來自維護裝置16的要求而輸出測定資訊56及預兆資料68。The omen data server 14 repeatedly acquires the measurement information 56 from the plate thickness calculating unit 24 , and stores data 68 (hereinafter referred to as omen data) indicating signs of abnormality of the X-ray thickness measuring apparatus 12 generated from the plural pieces of measurement information 56 . Referring to Fig. 2), accumulation is performed. Here, the omen data 68 is the statistics of the measurement information 56 acquired by the X-ray thickness measurement device 12 . Next, the omen data server 14 outputs the measurement information 56 and the omen data 68 in accordance with the request from the maintenance device 16 .

維護裝置16係例如維護X線厚度測定裝置12的維護承辦者等所使用的電腦。維護裝置16係根據由預兆資料伺服器14所取得的測定資訊56及預兆資料68，診斷X線厚度測定裝置12的異常，且藉由畫像等，輸出所診斷出的結果。The maintenance device 16 is, for example, a computer used by a maintenance contractor or the like who maintains the X-ray thickness measurement device 12 . The maintenance apparatus 16 diagnoses the abnormality of the X-ray thickness measuring apparatus 12 based on the measurement information 56 and the sign data 68 acquired by the sign data server 14, and outputs the diagnosed result by an image or the like.

圖2係顯示本實施形態之X線厚度測定系統的控制系的功能構成之一例的區塊圖。FIG. 2 is a block diagram showing an example of the functional configuration of the control system of the X-ray thickness measurement system of the present embodiment.

首先，使用圖2，說明X線厚度測定裝置12所具有的板厚運算部24的功能構成之一例。First, an example of the functional configuration of the plate thickness calculation unit 24 included in the X-ray thickness measurement device 12 will be described with reference to FIG. 2 .

如圖2所示，板厚運算部24係具有：控制側處理部46、及控制側記憶部48。As shown in FIG. 2 , the plate thickness calculation unit 24 includes a control-side processing unit 46 and a control-side memory unit 48 .

控制側處理部46係掌管X線厚度測定裝置12的控制全面。控制側處理部46亦可為執行運算處理等的CPU(Central Processing Unit，中央處理單元)及GPU(Graphics Processing Unit，圖形處理單元)等硬體處理器。控制側處理部46係讀人被儲存在控制側記憶部48的程式，且將所讀入的程式在控制側記憶部48展開，藉此執行各種運算處理。The control-side processing unit 46 is in charge of the overall control of the X-ray thickness measuring apparatus 12 . The control-side processing unit 46 may also be a hardware processor such as a CPU (Central Processing Unit, central processing unit) or a GPU (Graphics Processing Unit, graphics processing unit) that performs arithmetic processing or the like. The control-side processing unit 46 reads a program stored in the control-side memory unit 48 , and expands the read program in the control-side memory unit 48 , thereby executing various arithmetic processing.

控制側處理部46係讀入例如測定程式54，作為受理部50及算出部52來發揮功能。其中，受理部50及算出部52的一部分或全部亦可藉由包含ASIC(Application Specific Integrated Circuit，特殊應用積體電路)或FPGA(Field-Programmable Gate Array，現場可程式邏輯閘陣列)的電路等硬體來構成。The control-side processing unit 46 reads, for example, the measurement program 54 , and functions as the receiving unit 50 and the calculating unit 52 . Among them, some or all of the receiving unit 50 and the calculating unit 52 may be implemented by a circuit including an ASIC (Application Specific Integrated Circuit) or an FPGA (Field-Programmable Gate Array), or the like. hardware to form.

受理部50係受理測定資訊56，而輸出至算出部52。受理部50係例如受理由輸出檢測部34被輸出的檢測值、藉由驅動檢測部42所檢測的驅動電壓、藉由驅動檢測部42所檢測的驅動電流、藉由管檢測部44所檢測的管電壓、及藉由管檢測部44所檢測的管電流，作為測定資訊56。The accepting unit 50 accepts the measurement information 56 and outputs it to the calculating unit 52 . The receiving unit 50 receives, for example, the detection value output by the output detecting unit 34 , the driving voltage detected by the driving detecting unit 42 , the driving current detected by the driving detecting unit 42 , and the voltage detected by the tube detecting unit 44 . The tube voltage and the tube current detected by the tube detection unit 44 are used as the measurement information 56 .

算出部52若由受理部50取得測定資訊56，根據該測定資訊56，算出測定對象90的厚度，並且控制X線厚度測定裝置12。例如，算出部52係根據檢測值，算出測定對象90的厚度。在本實施形態中，算出部52係由輸出檢測部34取得檢測值，每逢取得該檢測值，即算出測定對象90的厚度。When the calculation unit 52 acquires the measurement information 56 from the reception unit 50 , based on the measurement information 56 , the calculation unit 52 calculates the thickness of the measurement object 90 and controls the X-ray thickness measurement device 12 . For example, the calculation unit 52 calculates the thickness of the measurement object 90 based on the detected value. In the present embodiment, the calculation unit 52 obtains the detection value from the output detection unit 34, and calculates the thickness of the measurement object 90 every time the detection value is obtained.

此外，在本實施形態中，算出部52係由板厚運算部24所具有的未圖示的RTC，取得檢測值檢測時的時間戳記亦即時刻資料。接著，算出部52係在所取得的檢測值及所算出的測定對象90的厚度，附加所取得的時刻資料。此外，算出部52係以管電壓及管電流成為預先設定的設定電壓的方式，生成對X線控制電源22指示驅動電壓的電源控制訊號而輸出。此外，算出部52係以廣播，將測定資訊56輸出至網路18。In addition, in this embodiment, the calculation part 52 acquires the time stamp at the time of detection value detection, ie, time data, from the RTC which is not shown in the plate thickness calculation part 24. Next, the calculation unit 52 adds the acquired time data to the acquired detection value and the calculated thickness of the measurement object 90 . Further, the calculation unit 52 generates and outputs a power control signal instructing the drive voltage to the X-ray control power source 22 so that the tube voltage and the tube current become preset voltages. In addition, the calculation unit 52 outputs the measurement information 56 to the network 18 by broadcasting.

控制側記憶部48係具有ROM(Read Only Memory，唯讀記憶體)、RAM(Random Access Memory，隨機存取記憶體)、及HDD(Hard Disk Drive，硬碟驅動機)等主記憶裝置及輔助記憶裝置。控制側記憶部48係記憶控制側處理部46所執行的測定程式54、及為了執行測定程式54所取得的測定資訊56等。測定程式54亦可被記憶在CD-ROM(Compact Disc Read Only Memory，光碟唯讀記憶體)或DVD-ROM(Digital Versatile Disc Read Only Memory，數位影音光碟唯讀記憶體)等可藉由電腦讀取的記憶媒體來提供，亦可透過網際網路等網路來提供。The control-side memory unit 48 has main memory devices such as ROM (Read Only Memory), RAM (Random Access Memory), and HDD (Hard Disk Drive) and auxiliary devices. memory device. The control-side storage unit 48 stores the measurement program 54 executed by the control-side processing unit 46 , the measurement information 56 acquired for executing the measurement program 54 , and the like. The measurement program 54 can also be stored in CD-ROM (Compact Disc Read Only Memory) or DVD-ROM (Digital Versatile Disc Read Only Memory), etc., which can be read by a computer. It can also be provided by the memory media taken from the computer, or through a network such as the Internet.

接著，使用圖2，說明預兆資料伺服器14的功能構成之一例。預兆資料伺服器14係如圖2所示，具有：預兆側處理部58、及預兆側記憶部60。Next, an example of the functional configuration of the omen data server 14 will be described with reference to FIG. 2 . As shown in FIG. 2 , the omen data server 14 includes an omen-side processing unit 58 and an omen-side memory unit 60 .

預兆側處理部58係掌管預兆資料伺服器14的控制全面。預兆側處理部58亦可為CPU及GPU等硬體處理器。預兆側處理部58係讀入被儲存在預兆側記憶部60的程式，且將所讀入的程式在預兆側記憶部60展開，藉此執行各種運算處理。預兆側處理部58係例如讀入預兆程式66，作為取得部62及預兆部64來發揮功能。取得部62及預兆部64的一部分或全部亦可藉由包含ASIC或FPGA的電路等硬體所構成。The omen-side processing unit 58 is in charge of the overall control of the omen data server 14 . The omen-side processing unit 58 may also be a hardware processor such as a CPU and a GPU. The omen-side processing unit 58 reads the program stored in the omen-side memory unit 60 , and expands the read program in the omen-side memory unit 60 to execute various arithmetic processing. The omen-side processing unit 58 reads the omen program 66 , for example, and functions as the acquisition unit 62 and the omen unit 64 . A part or all of the acquisition unit 62 and the foreshadowing unit 64 may be constituted by hardware such as a circuit including an ASIC or an FPGA.

取得部62係由X線厚度測定裝置12取得測定資訊56。本實施形態之取得部62係取得複數次包含流至網路18上的驅動電壓、驅動電流、管電壓、管電流、及檢測值之中至少1個參數(檢測結果)而且附加有該參數檢測時或算出時的時刻資料的測定資訊56，而輸出至預兆部64。The acquisition unit 62 acquires the measurement information 56 from the X-ray thickness measurement device 12 . The acquisition unit 62 of the present embodiment acquires at least one parameter (detection result) including the driving voltage, driving current, tube voltage, tube current, and detection value flowing to the network 18 multiple times, and additionally detects the parameter The measurement information 56 of the time data of the time or the calculated time is output to the foreshadowing unit 64 .

本實施形態之取得部62係以比後述之藉由預兆部64所為之預兆資料68的生成所需的時間為更長的周期，由X線厚度測定裝置12取得測定資訊56。亦即，假設藉由取得部62取得測定資訊56的周期比藉由預兆部64所為之預兆資料68的生成所需的時間為更長者。藉此，可防止因藉由預兆部64所為之預兆資料68的生成而施加於預兆資料伺服器14的處理負荷變大，而來自X線厚度測定裝置12的測定資訊56的取得失敗的情形。The acquisition unit 62 of the present embodiment acquires the measurement information 56 from the X-ray thickness measuring device 12 at a cycle longer than the time required for the generation of the omen data 68 by the omen unit 64 to be described later. That is, it is assumed that the cycle of acquiring the measurement information 56 by the acquiring unit 62 is longer than the time required for the generation of the omen data 68 by the omen unit 64 . This can prevent the failure to acquire the measurement information 56 from the X-ray thickness measuring device 12 due to the increased processing load imposed on the omen data server 14 by the omen data 68 generated by the omen unit 64 .

預兆部64係將藉由取得部62所取得的測定資訊56寫入至預兆側記憶部60。接著，預兆部64係生成測定資訊56的統計作為預兆資料68。接著，預兆部64係將所生成的預兆資料68寫入至預兆側記憶部60。The omen unit 64 writes the measurement information 56 acquired by the acquisition unit 62 into the omen-side memory unit 60 . Next, the omen unit 64 generates statistics of the measurement information 56 as the omen data 68 . Next, the omen unit 64 writes the generated omen data 68 into the omen-side memory unit 60 .

此外，預兆部64係按照來自維護裝置16的要求，輸出蓄積在預兆側記憶部60的測定資訊56及預兆資料68。此外，預兆部64係將所生成的預兆資料68，按照類比或TCP/IP等通訊規格而通知外部的上位裝置。In addition, the omen unit 64 outputs the measurement information 56 and the omen data 68 stored in the omen-side memory unit 60 in accordance with a request from the maintenance device 16 . In addition, the omen unit 64 notifies the external host device of the generated omen data 68 in accordance with communication standards such as analog or TCP/IP.

預兆側記憶部60係具有ROM、RAM、及HDD等主記憶裝置及輔助記憶裝置。預兆側記憶部60係記憶預兆側處理部58所執行的預兆程式66、及藉由預兆程式66的執行所生成的預兆資料68等。預兆程式66亦可為記憶在CD-ROM或DVD-ROM等可藉由電腦讀取的記憶媒體來提供，亦可透過網際網路等網路來提供。The sign-side memory unit 60 includes a main memory device such as a ROM, a RAM, and an HDD, and an auxiliary memory device. The omen-side storage unit 60 stores the omen program 66 executed by the omen-side processing unit 58 , the omen data 68 generated by the execution of the omen program 66 , and the like. The omen program 66 may also be provided by a computer-readable storage medium such as CD-ROM or DVD-ROM, or provided through a network such as the Internet.

接著，使用圖2，說明維護裝置16的功能構成之一例。Next, an example of the functional configuration of the maintenance device 16 will be described with reference to FIG. 2 .

維護裝置16係如圖2所示，具有：維護側處理部70、維護側記憶部72、及顯示部73。As shown in FIG. 2 , the maintenance device 16 includes a maintenance-side processing unit 70 , a maintenance-side memory unit 72 , and a display unit 73 .

維護側處理部70係掌管維護裝置16的控制全面。維護側處理部70亦可為CPU及GPU等硬體處理器。維護側處理部70係讀入被儲存在維護側記憶部72的程式，將所讀入的程式在維護側記憶部72展開，藉此執行各種運算處理。維護側處理部70係例如讀入維護程式76，作為診斷部74來發揮功能。診斷部74的一部分或全部亦可藉由包含ASIC或FPGA的電路等硬體所構成。The maintenance-side processing unit 70 is in charge of the overall control of the maintenance device 16 . The maintenance-side processing unit 70 may also be a hardware processor such as a CPU and a GPU. The maintenance-side processing unit 70 reads the program stored in the maintenance-side memory unit 72 , and expands the read program in the maintenance-side memory unit 72 , thereby executing various arithmetic processing. The maintenance-side processing unit 70 reads, for example, a maintenance program 76 and functions as a diagnosis unit 74 . A part or all of the diagnosis unit 74 may be constituted by hardware such as a circuit including an ASIC or an FPGA.

診斷部74係取得預兆資料伺服器14所輸出的測定資訊56及預兆資料68。在本實施形態中，診斷部74係取得由預兆資料伺服器14所輸出的測定資訊56，但是並非為限定於此者，亦可取得由X線厚度測定裝置12(板厚運算部24)所輸出的測定資訊56。The diagnosis unit 74 acquires the measurement information 56 and the omen data 68 output from the omen data server 14 . In the present embodiment, the diagnosis unit 74 acquires the measurement information 56 output from the omen data server 14, but it is not limited to this, and the diagnosis unit 74 may acquire the measurement information 56 output by the X-ray thickness measurement device 12 (the plate thickness calculation unit 24). Output measurement information 56 .

此外，診斷部74係根據所取得的測定資訊56，診斷X線厚度測定裝置12的異常。具體而言，診斷部74係根據測定資訊56，求出測定資訊56的突波的發生頻度、與該突波的大小的積。接著，診斷部74係根據所求出的積，判定X線厚度測定裝置12的異常位準。在此，異常位準係X線厚度測定裝置12接近故障狀態的位準。Further, the diagnosis unit 74 diagnoses the abnormality of the X-ray thickness measurement device 12 based on the acquired measurement information 56 . Specifically, based on the measurement information 56 , the diagnosis unit 74 obtains the product of the frequency of occurrence of the surge in the measurement information 56 and the magnitude of the surge. Next, the diagnosis unit 74 determines the abnormal level of the X-ray thickness measuring apparatus 12 based on the obtained product. Here, the abnormal level is a level at which the X-ray thickness measuring apparatus 12 is close to the failure state.

藉由實驗結果，可知在測定資訊56的突波係存在離散發生的非常大的突波、及連續發生的較小的突波等2個類型的突波。因此，X線厚度測定裝置12的異常位準係以考慮測定資訊56的突波的發生頻度、與該突波的大小之雙方來進行判定為佳。From the experimental results, it was found that there are two types of surges in the surge system of the measurement information 56, namely, a very large surge that occurs discretely, and a smaller surge that occurs continuously. Therefore, the abnormal level of the X-ray thickness measuring apparatus 12 is preferably determined in consideration of both the frequency of occurrence of the surge in the measurement information 56 and the magnitude of the surge.

因此，診斷部74係如上所述，根據測定資訊56的突波的發生頻度、與該突波的大小的積，判定X線厚度測定裝置12的異常位準。藉此，即使在測定資訊56發生離散發生之非常大的突波、及連續發生之較小的突波的任何類型的突波的情形下，亦可使雙方的類型的突波的檢測結果反映在X線厚度測定裝置12的異常位準的判定。結果，可使X線厚度測定裝置12的異常位準的判定精度提升。Therefore, the diagnosis unit 74 determines the abnormal level of the X-ray thickness measuring apparatus 12 based on the product of the frequency of occurrence of the spurious wave in the measurement information 56 and the magnitude of the spurious wave as described above. In this way, even when the measurement information 56 generates a very large surge that occurs discretely and a small surge that occurs continuously, the detection results of both types of surges can be reflected. Determination of abnormal level in the X-ray thickness measuring device 12 . As a result, the determination accuracy of the abnormal level of the X-ray thickness measuring device 12 can be improved.

在本實施形態中，診斷部74係首先由所取得的測定資訊56，將移行期間資料去除。在此，移行期間資料係使測定資訊56(例如管電壓)改變的移行期間內的測定資訊56。例如，診斷部74係在所取得的測定資訊56之中，由初期的測定資訊56將移行期間資料去除。在此，初期的測定資訊56係例如X線厚度測定裝置12起動後，至經過預先設定的時間(例如1分鐘、10分鐘)為止的測定資訊56。In the present embodiment, the diagnosis unit 74 first removes the transition period data from the acquired measurement information 56 . Here, the transition period data is the measurement information 56 in the transition period in which the measurement information 56 (eg, the tube voltage) is changed. For example, the diagnosis unit 74 removes the transition period data from the initial measurement information 56 in the acquired measurement information 56 . Here, the initial measurement information 56 is, for example, the measurement information 56 until a preset time (eg, 1 minute, 10 minutes) elapses after the X-ray thickness measurement device 12 is activated.

接著，診斷部74係如下述式(1)所示，將去除移行期間資料後的初期的測定資訊56所包含的最大值與最小值的差，設定在測定資訊56的變動範圍。在本實施形態中，診斷部74係每100ms設定測定資訊56的變動範圍。此外，診斷部74係由測定資訊56的變動範圍將離群值去除。接著，診斷部74係作成將離群值去除後的變動範圍的修華特管制圖或R管制圖，而且對該修華特管制圖或R管制圖進行失真補正。 變動範圍=(測定資訊56的最大值)-(測定資訊56的最小值)…(1) Next, the diagnosis unit 74 sets the difference between the maximum value and the minimum value included in the initial measurement information 56 after removing the transition period data as the following formula (1) as the variation range of the measurement information 56 . In the present embodiment, the diagnosis unit 74 sets the fluctuation range of the measurement information 56 every 100 ms. In addition, the diagnosis unit 74 removes outliers from the variation range of the measurement information 56 . Next, the diagnosis unit 74 creates a Schwart control map or an R control map of the fluctuation range after removing the outliers, and performs distortion correction on the Schwart control map or the R control map. Variation range = (maximum value of measurement information 56) - (minimum value of measurement information 56)...(1)

接著，診斷部74係根據已進行失真補正的修華特管制圖或R管制圖，求出測定資訊56的變動範圍的上限管理界限UCL及下限管理界限LCL。藉此，即使在測定資訊56包含有不需要的資料、或在測定資訊56包含有失真的情形下，亦可使用已進行失真補正的修華特管制圖或R管制圖，求出適當的上限管理界限UCL及下限管理界限LCL，且檢測測定資訊56的突波。結果，可使X線厚度測定裝置的異常位準的判定精度提升。診斷部74係針對測定資訊56所包含的驅動電壓、驅動電流、管電壓、管電流、及檢測值的各個的變動範圍，求出上限管理界限UCL及下限管理界限LCL者。Next, the diagnosis unit 74 obtains the upper limit management limit UCL and the lower limit management limit LCL of the fluctuation range of the measurement information 56 based on the distortion-corrected Schwart control chart or the R control chart. In this way, even when the measurement information 56 includes unnecessary data or the measurement information 56 includes distortion, it is possible to obtain an appropriate upper limit by using the distortion-corrected Schwart chart or R chart. The management limit UCL and the lower limit management limit LCL are detected, and the surge of the measurement information 56 is detected. As a result, the determination accuracy of the abnormal level of the X-ray thickness measuring apparatus can be improved. The diagnosis unit 74 obtains the upper limit management limit UCL and the lower limit management limit LCL for each variation range of the drive voltage, drive current, tube voltage, tube current, and detection value included in the measurement information 56 .

之後，診斷部74係在突波的檢測對象的測定資訊56之中，檢測變動範圍超過上限管理界限UCL或下限管理界限LCL的測定資訊56作為突波。在此，突波的檢測對象的測定資訊56係例如X線厚度測定裝置12起動後，經過預先設定的時間後的測定資訊56。After that, the diagnosis unit 74 detects the measurement information 56 whose fluctuation range exceeds the upper limit management limit UCL or the lower limit management limit LCL as a surge among the measurement information 56 of the detection target of the surge. Here, the measurement information 56 of the detection target of the spurious wave is, for example, the measurement information 56 after a predetermined time has elapsed after the X-ray thickness measurement device 12 is activated.

此外，診斷部74係生成表示X線厚度測定裝置12的異常位準的指示器(indicator)(以下稱為位準計)，且使顯示部73顯示該所生成的位準計。顯示部73係顯示由預兆資料伺服器14被輸出的預兆資料68、或位準計等各種資訊。In addition, the diagnosis unit 74 generates an indicator (hereinafter referred to as a level gauge) indicating an abnormal level of the X-ray thickness measuring device 12 , and causes the display unit 73 to display the generated level gauge. The display unit 73 displays various information such as the omen data 68 output from the omen data server 14 and a level meter.

維護側記憶部72係具有：ROM、RAM、及HDD等主記憶裝置及輔助記憶裝置。維護側記憶部72係記憶維護側處理部70所執行的維護程式76等。維護程式76亦可記憶在CD-ROM或DVD-ROM等可藉由電腦讀取的記憶媒體來提供，亦可透過網際網路等網路來提供。The maintenance-side memory unit 72 includes a main memory device such as a ROM, a RAM, and an HDD, and an auxiliary memory device. The maintenance-side storage unit 72 stores the maintenance program 76 and the like executed by the maintenance-side processing unit 70 . The maintenance program 76 may be stored in a memory medium such as CD-ROM or DVD-ROM, which can be read by a computer, and may be provided through a network such as the Internet.

接著，說明藉由維護裝置16的診斷部74，算出上限管理界限UCL及下限管理界限LCL的處理的具體例。在以下說明中，係說明診斷部74算出作為測定資訊56之一例的管電壓TV的上限管理界限UCL及下限管理界限LCL之例，惟由管電流、驅動電壓、驅動電流、及檢測值，亦同樣地算出上限管理界限UCL及下限管理界限LCL。Next, a specific example of processing for calculating the upper limit management limit UCL and the lower limit management limit LCL by the diagnosis unit 74 of the maintenance device 16 will be described. In the following description, an example in which the diagnosis unit 74 calculates the upper limit management limit UCL and the lower limit management limit LCL of the tube voltage TV as an example of the measurement information 56 will be described. Similarly, the upper limit management limit UCL and the lower limit management limit LCL are calculated.

首先，說明藉由診斷部74，由初期的管電壓TV(初期的測定資訊56之一例)，將移行期間資料去除的處理。First, the process of removing the transition period data from the initial tube voltage TV (an example of the initial measurement information 56 ) by the diagnosis unit 74 will be described.

當將管電壓TV由某設定值變更為別的設定值時，至使藉由管檢測部44所檢測的管電壓TV安定為止，有耗費數秒的情形。因此，診斷部74係當變更管電壓TV的設定值時，將至藉由管檢測部44所檢測的管電壓TV安定為止所需的移行期間的管電壓TV(移行期間資料之一例)，由使用在上限管理界限UCL及下限管理界限LCL的算出的管電壓TV去除。但是，若由從預兆資料伺服器14所取得的管電壓TV已去除移行期間資料時，診斷部74亦可未進行由管電壓TV將移行期間資料去除的處理。When the tube voltage TV is changed from a certain set value to another set value, it may take several seconds until the tube voltage TV detected by the tube detection unit 44 is stabilized. Therefore, when the set value of the tube voltage TV is changed, the diagnosis unit 74 sets the tube voltage TV (an example of the transition period data) during the transition period required until the tube voltage TV detected by the tube detection unit 44 is stabilized by It is removed using the calculated tube voltage TV at the upper limit management limit UCL and the lower limit management limit LCL. However, if the transition period data has been removed from the tube voltage TV acquired from the omen data server 14, the diagnosis unit 74 may not perform the process of removing the transition period data from the tube voltage TV.

在本實施形態中，診斷部74係使用局部最大值(Local Maxima)，由管電壓TV將移行期間資料去除。具體而言，診斷部74係將管電壓TV的平均轉換為絕對梯度值，且根據該絕對梯度值，設定判斷為移行期間資料的管電壓TV的臨限值。接著，診斷部74係在管電壓TV之中，抽出超過該所設定的臨限值的管電壓TV，且在所抽出的管電壓TV之中，將與鄰接的管電壓TV為不同的管電壓TV的集合作為移行期間資料而去除。在此，鄰接的管電壓TV係在可施加於電絲38與靶材40間的管電壓TV的設定值之中，最接近所抽出的管電壓TV的管電壓TV的設定值。In the present embodiment, the diagnosis unit 74 uses the local maxima to remove the transition period data from the tube voltage TV. Specifically, the diagnosis unit 74 converts the average of the tube voltage TV into an absolute gradient value, and sets the threshold value of the tube voltage TV determined as the transition period data based on the absolute gradient value. Next, the diagnosing unit 74 extracts the tube voltage TV exceeding the set threshold value among the tube voltages TV, and sets the tube voltage TV to be different from the adjacent tube voltage TV among the extracted tube voltages TV. The set of TVs is removed as transition period data. Here, the adjacent tube voltage TV is the set value of the tube voltage TV that is closest to the extracted tube voltage TV among the set values of the tube voltage TV that can be applied between the wire 38 and the target 40 .

或者，在本實施形態中，診斷部74係使用批次平均，由管電壓TV，將移行期間資料去除。具體而言，若存在複數可施加於電絲38與靶材40間的管電壓TV的設定值(例如，60kV、80kV、100kV、110kV、120kV、130kV、及140kV)，而且各設定值的容許界限為±1kV時，診斷部74係按每個管電壓TV的設定值，算出藉由管檢測部44而實際檢測的管電壓TV(例如200個管電壓TV)的平均。接著，診斷部74係將與針對各管電壓TV的設定值所算出的管電壓TV的平均不相一致的管電壓TV，作為移行期間資料而去除。Alternatively, in the present embodiment, the diagnosis unit 74 uses the batch average to remove the transition period data from the tube voltage TV. Specifically, if there are plural set values of the tube voltage TV that can be applied between the wire 38 and the target 40 (for example, 60kV, 80kV, 100kV, 110kV, 120kV, 130kV, and 140kV), and the allowable value of each set value When the limit is ±1kV, the diagnosis unit 74 calculates the average of the tube voltages TV actually detected by the tube detection unit 44 (eg, 200 tube voltages TV) for each set value of the tube voltage TV. Next, the diagnosis unit 74 removes, as the transition period data, the tube voltages TV that do not match the average of the tube voltages TV calculated for the set values of the tube voltages TV.

接著，說明藉由診斷部74，設定初期的管電壓TV的變動範圍的處理之一例。Next, an example of the process of setting the fluctuation range of the initial tube voltage TV by the diagnosis unit 74 will be described.

在本實施形態中，診斷部74係將由預兆資料伺服器14所取得的每100ms的管電壓TV的最小值與最大值的差，設定在管電壓TV的變動範圍。In the present embodiment, the diagnosis unit 74 sets the difference between the minimum value and the maximum value of the tube voltage TV acquired by the omen data server 14 every 100 ms in the variation range of the tube voltage TV.

圖3係用以說明藉由本實施形態之X線厚度測定系統所為之變動範圍的設定處理之一例的圖。在圖3中，縱軸係表示管電壓TV的變動範圍，橫軸係表示可識別按每個預先設定的周期(例如100ms)的管電壓TV的檢測結果的資料點。FIG. 3 is a diagram for explaining an example of the setting process of the variation range by the X-ray thickness measurement system of the present embodiment. In FIG. 3 , the vertical axis represents the fluctuation range of the tube voltage TV, and the horizontal axis represents the data points that can identify the detection result of the tube voltage TV every predetermined period (eg, 100 ms).

在本實施形態中，診斷部74係如圖3所示，將各資料點中的管電壓TV的最大值TVmax與最小值TVmin之間(差)，設定在管電壓TV的變動範圍。In this embodiment, as shown in FIG. 3, the diagnosis unit 74 sets the difference (difference) between the maximum value TVmax and the minimum value TVmin of the tube voltage TV in each data point within the range of variation of the tube voltage TV.

接著，說明藉由診斷部74，由初期的管電壓TV的變動範圍中將離群值去除的處理之一例。Next, an example of the process of removing outliers from the fluctuation range of the initial tube voltage TV by the diagnosis unit 74 will be described.

在本實施形態中，診斷部74係由在替換X線發生器30之後經過預先設定的期間為止的管電壓TV的變動範圍，使用四分位數範圍(IQR：Interquartile Range)，將離群值去除。具體而言，診斷部74係在管電壓TV的變動範圍之中，將75百分位數(第3四分位數)及25百分位數(第1四分位數)的各個的1.5*IQR的外側的變動範圍作為離群值(異常值)而去除。In the present embodiment, the diagnosis unit 74 uses an interquartile range (IQR: Interquartile Range) to classify outliers from the fluctuation range of the tube voltage TV until a preset period elapses after the X-ray generator 30 is replaced. remove. Specifically, the diagnosis unit 74 sets the 75th percentile (third quartile) and the 25th percentile (first quartile) to 1.5 within the range of variation of the tube voltage TV. *The variation range outside the IQR is removed as an outlier (outlier).

圖4係用以說明藉由本實施形態之X線厚度測定系統所為之離群值的去除處理之一例的圖。在圖4中，縱軸係表示管電壓TV的變動範圍，橫軸係表示可識別按每個預先設定的周期的管電壓TV的檢測結果的資料點。FIG. 4 is a diagram for explaining an example of outlier removal processing by the X-ray thickness measurement system of the present embodiment. In FIG. 4 , the vertical axis represents the fluctuation range of the tube voltage TV, and the horizontal axis represents the data points that can identify the detection result of the tube voltage TV for each preset period.

診斷部74係在管電壓TV的變動範圍之中，將75百分位數及25百分位數的各個1.5*IQR的外側的變動範圍作為離群值而去除。藉此，如圖4所示，可知在將離群值去除的前後，管電壓TV的變動範圍改變，在平常的管電壓TV中亦可能發生的突波由使用在上限管理界限UCL及下限管理界限LCL的算出的管電壓TV被刪除。The diagnosing unit 74 removes, as outliers, the variation ranges outside of each of the 75th percentile and the 25th percentile of 1.5*IQR in the variation range of the tube voltage TV. Thereby, as shown in FIG. 4 , it can be seen that the fluctuation range of the tube voltage TV changes before and after the outliers are removed, and the surge that may occur in the normal tube voltage TV is managed by using the upper limit control limit UCL and the lower limit. The calculated tube voltage TV of the limit LCL is deleted.

此外，在本實施形態中，診斷部74係由在替換X線發生器30之後經過預先設定的時間經過後的管電壓TV的變動範圍，使用截尾平均數(trimmed mean)，將離群值去除。具體而言，診斷部74係在將管電壓TV的變動範圍以升序作排序之後，將由最小值及最大值的各個所預先設定的比例的管電壓TV的變動範圍，作為離群值而去除。若藉由取得部62所取得的管電壓TV的資料集為不安定的資料集時、或該管電壓TV的資料集具有極端偏頗的分布時，診斷部74係使用截尾平均數，由管電壓TV的變動範圍將離群值去除。藉此，可作成具有目的的標準差界限的修華特管制圖或R管制圖。In addition, in the present embodiment, the diagnosis unit 74 uses a trimmed mean to classify outliers from the fluctuation range of the tube voltage TV after a predetermined time has elapsed after the replacement of the X-ray generator 30. remove. Specifically, the diagnosing unit 74 sorts the fluctuation range of the tube voltage TV in ascending order, and then removes the fluctuation range of the tube voltage TV with the preset ratio of each of the minimum value and the maximum value as outliers. If the data set of the tube voltage TV acquired by the acquisition unit 62 is an unstable data set, or if the data set of the tube voltage TV has an extremely biased distribution, the diagnosis unit 74 uses the truncated mean to calculate the data from the tube voltage TV. The variation range of the voltage TV removes outliers. Thereby, a Shewart control chart or an R control chart with a target standard deviation limit can be created.

由管電壓TV的變動範圍去除離群值時，係可使用上述2個方法的任一者。至經過X線發生器30的生命週期的初期期間為止的管電壓TV係突波非常小，可藉由IQR來去除其離群值。因此，診斷部74係由替換X線發生器30之後經過預先設定的期間為止的管電壓TV的變動範圍，藉由IQR來將離群值去除。When removing outliers from the variation range of the tube voltage TV, either of the two methods described above can be used. The tube voltage TV system surge until the initial period of the life cycle of the X-ray generator 30 has passed is very small, and the outlier value can be removed by IQR. Therefore, the diagnosing unit 74 removes outliers by IQR based on the fluctuation range of the tube voltage TV until a predetermined period elapses after the replacement of the X-ray generator 30 .

另一方面，若由X線發生器30的生命週期的後半的管電壓TV的變動範圍，藉由IQR將離群值去除時，突波數增加，在上限管理界限UCL及下限管理界限LCL的算出，有被考慮在判定因X線發生器30的生命週期成為後半所致之突波為異常位準的可能性。因此，診斷部74係由替換X線發生器30之後經過預先設定的期間之後的管電壓TV的變動範圍，使用截尾平均數，將離群值去除。On the other hand, if outliers are removed by the IQR in the fluctuation range of the tube voltage TV in the second half of the life cycle of the X-ray generator 30, the number of surges increases, and the upper limit management limit UCL and the lower limit management limit LCL It is calculated that there is a possibility that the surge due to the second half of the life cycle of the X-ray generator 30 is determined to be an abnormal level. Therefore, the diagnosing unit 74 removes outliers using the trimmed mean from the fluctuation range of the tube voltage TV after a predetermined period has elapsed after the replacement of the X-ray generator 30 .

接著，說明藉由診斷部74，作成初期的管電壓TV的變動範圍的修華特管制圖或R管制圖的處理。Next, processing by the diagnosis unit 74 to create a Showwart control map or an R control map of the fluctuation range of the initial tube voltage TV will be described.

首先，診斷部74係作成將離群值去除後的變動範圍的修華特管制圖或R管制圖。修華特管制圖及R管制圖係在測定資訊56的統計上的管理中，可簡單使用而且強力的工具。此外，修華特管制圖及R管制圖係廣被利用，且在產業領域中被應用。First, the diagnosing unit 74 creates a Shewart control map or an R control map of the fluctuation range after removing outliers. The Shewart Control Chart and the R Control Chart are simple and powerful tools for the statistical management of the measurement information 56 . In addition, the Shewart control chart and the R control chart are widely used and applied in the industrial field.

但是，修華特管制圖及R管制圖係基於在統計上作管理的測定資訊56的分布為常態分布或大致常態分布的假定。但是，測定資訊56係表示X線發生器30的生命週期的資訊。因此，某期間(例如，X線發生器30的生命週期的後半)的測定資訊56係因X線發生器30劣化，雜訊數增大。因此，測定資訊56的資料集的確率分布常常被表示為傾右的伽瑪分布(gamma distribution)或韋伯分布(Weibull distribution)。However, the Shewart chart and the R chart are based on the assumption that the distribution of the statistically managed measurement information 56 is a normal distribution or a substantially normal distribution. However, the measurement information 56 is information indicating the life cycle of the X-ray generator 30 . Therefore, the measurement information 56 for a certain period (for example, the second half of the life cycle of the X-ray generator 30 ) is caused by the deterioration of the X-ray generator 30, and the number of noises increases. Therefore, the probability distribution of the data set of measurement information 56 is often expressed as a right-leaning gamma distribution or a Weibull distribution.

圖5係用以說明藉由本實施形態之X線厚度測定系統所為之修華特管制圖或R管制圖的偏度的補正處理之一例的圖。在圖5中，縱軸係表示管電壓TV的檢測結果的數，橫軸係表示管電壓TV的變動範圍。FIG. 5 is a diagram for explaining an example of the correction processing of the skewness of the Wart tube chart or the R tube chart by the X-ray thickness measurement system of the present embodiment. In FIG. 5 , the vertical axis represents the number of detection results of the tube voltage TV, and the horizontal axis represents the fluctuation range of the tube voltage TV.

如圖5所示，離群值已被去除的管電壓TV的變動範圍的分布係藉由比管電壓TV的變動範圍的平均為更大的管電壓TV的變動範圍變多的伽瑪分布或韋伯分布來表示。因此，無須補正修華特管制圖或R管制圖的偏度，而若使用該修華特管制圖或R管制圖來算出上限管理界限UCL及下限管理界限LCL時，有因X線厚度測定裝置12異常所致之突波的檢測精度降低的可能性。As shown in FIG. 5 , the distribution of the variation range of the tube voltage TV from which the outliers have been removed is a gamma distribution or Weber in which the variation range of the tube voltage TV is larger than the average of the variation range of the tube voltage TV. distribution to represent. Therefore, it is not necessary to correct the skewness of the modified Wart control map or the R control map, and if the upper control limit UCL and the lower limit control limit LCL are calculated using the Shewart control map or the R control map, the X-ray thickness measuring device 12. There is a possibility that the detection accuracy of the surge caused by the abnormality will decrease.

因此，在本實施形態中，診斷部74係補正管電壓TV的修華特管制圖或R管制圖的偏度。藉此，可使用根據測定資訊56成為常態分布或大致常態分布的假定所作成的修華特管制圖或R管制圖，算出上限管理界限UCL及下限管理界限LCL。結果，可更高精度檢測因X線厚度測定裝置12的異常所致之突波。Therefore, in the present embodiment, the diagnosing unit 74 corrects the skewness of the Schwart chart or the R chart of the tube voltage TV. Thereby, the upper limit management limit UCL and the lower limit management limit LCL can be calculated using the Schwart control chart or the R control chart created on the assumption that the measurement information 56 becomes a normal distribution or a substantially normal distribution. As a result, the surge due to the abnormality of the X-ray thickness measuring apparatus 12 can be detected with higher accuracy.

具體而言，診斷部74係使用下述式(2)、(3)，算出經補正偏度的修華特管制圖的上限管理界限UCL及下限管理界限LCL。在式(2)、(3)中，在R之上橫槓係管電壓TV的變動範圍的平均，T係任意值，d R係修華特管制圖的偏度所補正的值(以下稱為偏度補正值)，CL係修華特管制圖的中心線，σ R係管電壓TV的標準偏差，K(R)係管電壓TV的偏度。

Figure 02_image001
Figure 02_image003
Specifically, the diagnosis unit 74 uses the following equations (2) and (3) to calculate the upper limit management limit UCL and the lower limit management limit LCL of the skewness-corrected Schwart control chart. In equations (2) and (3), the horizontal bar above R is the average of the fluctuation range of the tube voltage TV, T is an arbitrary value, and d R is the value corrected for the skewness of the Shewart tube diagram (hereinafter referred to as the is the skewness correction value), CL is the center line of the Schwart tube chart, σ R is the standard deviation of the tube voltage TV, and K(R) is the skewness of the tube voltage TV.
Figure 02_image001
Figure 02_image003

圖6係顯示藉由本實施形態之X線厚度測定系統所作成的管電壓的R管制圖之一例的圖。在圖6中，縱軸係表示管電壓TV的變動範圍，橫軸係表示可識別每個預先設定的周期的管電壓TV的檢測結果的資料點。FIG. 6 is a diagram showing an example of an R-control chart of tube voltage created by the X-ray thickness measurement system of the present embodiment. In FIG. 6 , the vertical axis represents the fluctuation range of the tube voltage TV, and the horizontal axis represents the data points that can identify the detection result of the tube voltage TV for each preset period.

如圖6所示，診斷部74係使用上述式(2)、(3)，算出管電壓TV的R管制圖的上限管理界限UCL及下限管理界限LCL。接著，診斷部74係在突波的檢測對象的管電壓TV之中，檢測變動範圍超過上限管理界限UCL或下限管理界限LCL的管電壓TV作為突波。As shown in FIG. 6 , the diagnosis unit 74 calculates the upper limit management limit UCL and the lower limit management limit LCL of the R control map of the tube voltage TV using the above equations (2) and (3). Next, the diagnosis unit 74 detects, as a surge, the tube voltage TV whose fluctuation range exceeds the upper limit management limit UCL or the lower limit management limit LCL among the tube voltages TV of the detection target of the surge.

接著，說明藉由診斷部74來判定X線厚度測定裝置12的異常位準的處理的具體例。在以下說明中，係說明診斷部74根據管電壓TV的檢測結果，判定X線厚度測定裝置12的異常位準之例，惟關於管電流、驅動電壓、驅動電流、及檢測值，亦同樣地判定X線厚度測定裝置12的異常位準。Next, a specific example of the process of determining the abnormal level of the X-ray thickness measuring apparatus 12 by the diagnosis unit 74 will be described. In the following description, an example in which the diagnosis unit 74 determines the abnormal level of the X-ray thickness measuring device 12 based on the detection result of the tube voltage TV will be described. However, the same applies to the tube current, driving voltage, driving current, and detection value. The abnormal level of the X-ray thickness measuring device 12 is determined.

圖7及圖8係顯示藉由本實施形態之X線厚度測定系統所檢測的管電壓TV的突波之一例的圖。在圖7及圖8中，縱軸係表示管電壓TV的變動範圍，橫軸係表示可識別每個預先設定的周期的管電壓TV的檢測結果的資料點。7 and 8 are diagrams showing an example of the surge of the tube voltage TV detected by the X-ray thickness measurement system of the present embodiment. In FIGS. 7 and 8 , the vertical axis represents the fluctuation range of the tube voltage TV, and the horizontal axis represents the data points that can identify the detection result of the tube voltage TV for each preset period.

管電壓TV的突波的類型主要分為2個類型。1類型係如圖7所示，離散發生較大突波的類型。另一類型係如圖8所示，連續發生較小突波的類型。因此，X線厚度測定裝置12的異常係藉由離散發生的大突波、及連續發生的小突波之雙方來表示。The types of surges of the tube voltage TV are mainly divided into two types. Type 1 is a type in which large surges are generated discretely as shown in Fig. 7 . Another type is a type in which small surges occur continuously as shown in FIG. 8 . Therefore, the abnormality of the X-ray thickness measuring apparatus 12 is indicated by both the large surge that occurs discretely and the small surge that occurs continuously.

因此，診斷部74係根據管電壓TV的突波的發生頻度、與該突波的大小(例如管電壓TV的變動範圍)的積，判定X線厚度測定裝置12的異常位準。藉此，即使在測定資訊56發生離散發生之非常大的突波、及連續發生的較小突波的任何類型的突波的情形下，亦可使雙方類型的突波的檢測結果反映在X線厚度測定裝置12的異常位準的判定。結果，可使X線厚度測定裝置12的異常位準的判定精度提升。Therefore, the diagnosis unit 74 determines the abnormal level of the X-ray thickness measuring apparatus 12 based on the product of the frequency of occurrence of the surge in the tube voltage TV and the magnitude of the surge (eg, the fluctuation range of the tube voltage TV). In this way, even when the measurement information 56 generates a very large surge that occurs discretely, and a small surge that occurs continuously, the detection results of both types of surges can be reflected in X. Determination of the abnormal level of the wire thickness measuring device 12 . As a result, the determination accuracy of the abnormal level of the X-ray thickness measuring device 12 can be improved.

圖9係顯示藉由本實施形態之X線厚度測定系統所檢測的管電壓的突波的發生頻度之一例的圖。在圖9中，縱軸係表示每個預定時間(例如1小時)的管電壓TV的突波的發生頻度，橫軸係表示檢測管電壓TV的突波的時間。FIG. 9 is a diagram showing an example of the frequency of occurrence of a surge in the tube voltage detected by the X-ray thickness measurement system of the present embodiment. In FIG. 9 , the vertical axis represents the frequency of occurrence of the surge of the tube voltage TV at each predetermined time (for example, 1 hour), and the horizontal axis represents the time at which the surge of the tube voltage TV was detected.

圖10係顯示藉由本實施形態之X線厚度測定系統所檢測的管電壓的突波的大小之一例的圖。在圖10中，縱軸係表示每個預定時間的管電壓TV的突波的大小，橫軸係表示檢測管電壓TV的突波的時間。FIG. 10 is a diagram showing an example of the magnitude of the surge of the tube voltage detected by the X-ray thickness measurement system of the present embodiment. In FIG. 10 , the vertical axis represents the magnitude of the surge of the tube voltage TV at each predetermined time, and the horizontal axis represents the time at which the surge of the tube voltage TV is detected.

診斷部74係在突波的檢測對象的管電壓TV之中，對其變動範圍超過上限管理界限UCL或下限管理界限LCL的管電壓TV的檢測結果建立旗標(以下稱為突波旗標)。接著，診斷部74係如圖9所示，算出每個預定時間的突波旗標的數的和，作為管電壓TV的突波的發生頻度。此外，診斷部74係如圖10所示，將每隔預定時間建立突波旗標的管電壓TV的檢測結果(例如管電壓TV的變動範圍)算出為突波的大小。The diagnosis unit 74 establishes a flag (hereinafter referred to as a surge flag) for the detection result of the tube voltage TV whose fluctuation range exceeds the upper limit management limit UCL or the lower limit management limit LCL among the tube voltage TV of the detection target of the surge. . Next, as shown in FIG. 9 , the diagnosis unit 74 calculates the sum of the number of the glitch flags per predetermined time as the frequency of occurrence of glitches in the tube voltage TV. Further, as shown in FIG. 10 , the diagnosis unit 74 calculates the detection result of the tube voltage TV (for example, the fluctuation range of the tube voltage TV) for which a glitch flag is established every predetermined time as the magnitude of the glitch.

圖11係顯示藉由本實施形態之X線厚度測定系統所致之管電壓的突波的發生頻度與大小的積的算出結果之一例的圖。在圖11中，縱軸係表示每個預定時間的管電壓TV的突波的發生頻度與大小的積，橫軸係表示檢測出管電壓TV的突波的時間。FIG. 11 is a diagram showing an example of the calculation result of the product of the frequency of occurrence and the magnitude of the surge in the tube voltage by the X-ray thickness measurement system of the present embodiment. In FIG. 11 , the vertical axis represents the product of the occurrence frequency and the magnitude of the surge in the tube voltage TV at each predetermined time, and the horizontal axis represents the time when the surge in the tube voltage TV was detected.

診斷部74係如圖11所示，按每個預定時間，算出管電壓TV的突波的發生頻度與大小的積，作為管電壓TV的突波的異常度。接著，診斷部74係將每個預定時間的異常度之中的最大值X，設定為最高的異常位準。接著，診斷部74係藉由峰值保持技術，將每個預定時間的管電壓TV的異常度，分類成複數異常位準(例如4個異常位準)。藉此，診斷部74係判定X線厚度測定裝置12的每個預定時間的異常位準。As shown in FIG. 11 , the diagnosis unit 74 calculates the product of the occurrence frequency and the magnitude of the surge of the tube voltage TV at each predetermined time as the abnormality of the surge of the tube voltage TV. Next, the diagnosis unit 74 sets the maximum value X among the abnormality degrees for each predetermined time as the highest abnormality level. Next, the diagnosis unit 74 classifies the degree of abnormality of the tube voltage TV at each predetermined time into plural abnormal levels (for example, four abnormal levels) by the peak hold technique. As a result, the diagnosis unit 74 determines the abnormal level of the X-ray thickness measuring apparatus 12 for each predetermined time.

診斷部74係例如下述表1所示，將最大值X以上的異常度的突波分類為最高的異常位準：4。此外，診斷部74係如下述表1所示，將3×(最大值X/4)以上而且最大值X以下的異常度的突波分類為異常位準：3。此外，診斷部74係如下述表1所示，將2×(最大值X/4)以上而且未達3×(最大值X/4)的異常度的突波分類為異常位準：2。此外，診斷部74係如下述表1所示，將最大值X/4以上而且未達2×(最大值X/4)的異常度的突波分類為異常位準：1。此外，診斷部74係如下述表1所示，將未達最大值X/4的異常度的突波分類為異常位準：0。

Figure 02_image005
For example, as shown in Table 1 below, the diagnosis unit 74 classifies a surge having an abnormality degree equal to or greater than the maximum value X as the highest abnormality level: 4. In addition, as shown in Table 1 below, the diagnosis unit 74 classifies the surge with the abnormality degree of 3×(maximum value X/4) or more and the maximum value X or less as abnormal level: 3. In addition, as shown in Table 1 below, the diagnosing unit 74 classifies the surge with an abnormality degree of 2×(maximum value X/4) or more and less than 3×(maximum value X/4) as abnormal level: 2. In addition, as shown in Table 1 below, the diagnosis unit 74 classifies a surge having an abnormality degree equal to or greater than the maximum value X/4 and less than 2×(maximum value X/4) as abnormal level: 1. In addition, as shown in Table 1 below, the diagnosis unit 74 classifies the spurious waves having an abnormality degree less than the maximum value X/4 as the abnormality level: 0.
Figure 02_image005

圖12係顯示藉由本實施形態之X線厚度測定系統所檢測的管電壓的突波的發生頻度的累積和之一例的圖。在圖12中，縱軸係表示每個預定時間的管電壓TV的突波的發生頻度的累積和，橫軸係表示檢測出管電壓TV的突波的時間。FIG. 12 is a diagram showing an example of the cumulative sum of the frequency of occurrence of surges in the tube voltage detected by the X-ray thickness measurement system of the present embodiment. In FIG. 12 , the vertical axis represents the cumulative sum of the frequency of occurrence of the surge in the tube voltage TV at each predetermined time, and the horizontal axis represents the time when the surge in the tube voltage TV was detected.

圖13係顯示藉由本實施形態之X線厚度測定系統所檢測的管電壓的突波的大小的和之一例的圖。在圖13中，縱軸係表示每個預定時間的管電壓TV的突波的大小的和，橫軸係表示檢測出管電壓TV的突波的時間。FIG. 13 is a diagram showing an example of the sum of the magnitudes of the surges of the tube voltage detected by the X-ray thickness measurement system of the present embodiment. In FIG. 13 , the vertical axis represents the sum of the magnitudes of the surges of the tube voltage TV at each predetermined time, and the horizontal axis represents the time when the surges of the tube voltage TV are detected.

診斷部74係如圖12所示，算出每個預定時間的管電壓TV的突波的發生頻度的累積和。此外，診斷部74係如圖13所示，算出每個預定時間的管電壓TV的大小的累積和。As shown in FIG. 12 , the diagnosis unit 74 calculates the cumulative sum of the frequency of occurrence of the surge in the tube voltage TV for each predetermined time. In addition, as shown in FIG. 13 , the diagnosis unit 74 calculates the cumulative sum of the magnitudes of the tube voltage TV for each predetermined time.

圖14係顯示藉由本實施形態之X線厚度測定系統所致之管電壓的突波的發生頻度的累積和與大小的累積和的積的算出結果之一例的圖。在圖14中，縱軸係表示每個預定時間的管電壓TV的突波的發生頻度的累積和與大小的累積和的積，橫軸係表示檢測出管電壓TV的突波的時間。FIG. 14 is a diagram showing an example of a calculation result of the cumulative sum of the frequency of occurrence of the surge in the tube voltage and the product of the cumulative sum of the magnitudes by the X-ray thickness measurement system of the present embodiment. In FIG. 14 , the vertical axis represents the product of the cumulative sum and the cumulative sum of magnitudes of the occurrence frequency of the surge in the tube voltage TV at each predetermined time, and the horizontal axis represents the time when the surge of the tube voltage TV was detected.

診斷部74係如圖14所示，算出每個預定時間的管電壓TV的突波的發生頻度的累積和、與該突波的大小的累積和的積，作為管電壓TV的突波的異常度。接著，診斷部74係在所算出的異常度之中，將最大值設定為最高的異常位準。接著，診斷部74係藉由峰值保持技術，將管電壓TV的異常度分類為複數異常位準(例如4個異常位準)。As shown in FIG. 14 , the diagnosis unit 74 calculates the cumulative sum of the frequency of occurrence of the surge in the tube voltage TV and the product of the cumulative sum of the magnitudes of the surge for each predetermined time period as the abnormality of the surge in the tube voltage TV. Spend. Next, the diagnosis unit 74 sets the maximum value as the highest abnormality level among the calculated abnormality degrees. Next, the diagnosis unit 74 classifies the abnormality of the tube voltage TV into a plurality of abnormal levels (for example, four abnormal levels) by the peak hold technique.

圖15係顯示藉由本實施形態之X線厚度測定系統所顯示的異常位準的位準計之一例的圖。FIG. 15 is a diagram showing an example of a level gauge of abnormal level displayed by the X-ray thickness measurement system of the present embodiment.

診斷部74係如圖15所示，使表示X線厚度測定裝置12的異常位準的位準計1500顯示在顯示部73。例如，若管電壓TV的突波的異常度被分類成4個異常位準，診斷部74係如圖15所示，使可顯示4個異常位準的位準計1500顯示在顯示部73。As shown in FIG. 15 , the diagnosis unit 74 displays a level gauge 1500 indicating an abnormal level of the X-ray thickness measuring apparatus 12 on the display unit 73 . For example, when the abnormality of the surge of the tube voltage TV is classified into four abnormal levels, the diagnosis unit 74 displays a level meter 1500 capable of displaying the four abnormal levels on the display unit 73 as shown in FIG. 15 .

圖16係顯示藉由本實施形態之X線厚度測定系統所致之上限管理界限及下限管理界限的算出處理流程之一例的流程圖。FIG. 16 is a flowchart showing an example of the processing flow for calculating the upper limit management limit and the lower limit management limit by the X-ray thickness measurement system of the present embodiment.

診斷部74係由預兆資料伺服器14取得X線厚度測定裝置12起動後，經過預先設定的時間為止的初期的測定資訊56(步驟S1601)。接著，診斷部74係判斷在所取得的測定資訊56是否包含移行期間內的測定資訊56(步驟S1602)。The diagnosis unit 74 acquires the initial measurement information 56 until a preset time elapses after the X-ray thickness measurement device 12 is activated from the omen data server 14 (step S1601 ). Next, the diagnosis unit 74 determines whether or not the acquired measurement information 56 includes the measurement information 56 within the transition period (step S1602).

若在所取得的測定資訊56包含移行期間內的測定資訊56(步驟S1602：Yes)，診斷部74係使用局部最大值或批次平均，由所取得的測定資訊56中將移行期間資料去除(步驟S1603)。接著，診斷部74係將已去除移行期間資料的測定資訊56的最大值與最小值的差，設定在測定資訊56的變動範圍(步驟S1604)。若所取得的測定資訊56為移行期間外的測定資訊56(步驟S1602：No)，診斷部74係將所取得的測定資訊56的最大值與最小值的差，設定在測定資訊56的變動範圍(步驟S1604)。If the acquired measurement information 56 includes the measurement information 56 within the transition period (step S1602: Yes), the diagnosis unit 74 removes the transition period data from the acquired measurement information 56 using the local maximum value or the batch average ( Step S1603). Next, the diagnosis unit 74 sets the difference between the maximum value and the minimum value of the measurement information 56 from which the transition period data has been removed into the variation range of the measurement information 56 (step S1604). If the acquired measurement information 56 is the measurement information 56 outside the transition period (step S1602 : No), the diagnosis unit 74 sets the difference between the maximum value and the minimum value of the acquired measurement information 56 in the variation range of the measurement information 56 (step S1604).

接著，診斷部74係使用IQR或截尾平均數，由測定資訊報56的變動範圍，將離群值去除(步驟S1605)。接著，診斷部74係對已去除離群值的變動範圍的修華特管制圖或R管制圖進行失真補正，且根據已進行失真補正的修華特管制圖或R管制圖，求出測定資訊56的變動範圍的上限管理界限UCL及下限管理界限LCL(步驟S1606)。Next, the diagnosis unit 74 removes outliers from the variation range of the measurement information report 56 using the IQR or the trimmed average (step S1605). Next, the diagnosis unit 74 performs distortion correction on the Schwart chart or the R chart from which the variation range of outliers has been removed, and obtains measurement information based on the distortion corrected Schwart chart or the R chart. The upper limit management limit UCL and the lower limit management limit LCL of the fluctuation range of 56 are determined (step S1606).

圖17係顯示本實施形態之X線厚度測定系統中的X線厚度測定裝置的異常位準的判定處理的流程之一例的流程圖。FIG. 17 is a flowchart showing an example of the flow of the determination process of the abnormal level of the X-ray thickness measurement device in the X-ray thickness measurement system of the present embodiment.

診斷部74係由預兆資料伺服器14，取得在X線厚度測定裝置12起動後，經過預先設定的時間後的測定資訊56(步驟S1701)。接著，診斷部74係判斷在所取得的測定資訊56是否包含移行期間內的測定資訊56(步驟S1702)。The diagnosis unit 74 acquires the measurement information 56 after a predetermined time has elapsed after the X-ray thickness measurement device 12 is activated from the omen data server 14 (step S1701 ). Next, the diagnosis unit 74 determines whether or not the acquired measurement information 56 includes the measurement information 56 within the transition period (step S1702).

若判斷出在所取得的測定資訊56包含移行期間內的測定資訊56(步驟S1702：Yes)，診斷部74係使用局部最大值或批次平均，由所取得的測定資訊56中將移行期間資料去除(步驟S1703)。接著，將已去除移行期間資料後的測定資訊56的最大值與最小值的差，設定在測定資訊56的變動範圍(步驟S1704)。若所取得的測定資訊56為移行期間外的測定資訊56(步驟S1702：No)，診斷部74係將所取得的測定資訊56的最大值與最小值的差，設定在測定資訊56的變動範圍(步驟S1704)。If it is determined that the acquired measurement information 56 includes the measurement information 56 within the transition period (step S1702 : Yes), the diagnosis unit 74 uses the local maximum value or the batch average to calculate the transition period data from the acquired measurement information 56 . removed (step S1703). Next, the difference between the maximum value and the minimum value of the measurement information 56 from which the transition period data has been removed is set in the variation range of the measurement information 56 (step S1704). If the acquired measurement information 56 is the measurement information 56 outside the transition period (step S1702 : No), the diagnosis unit 74 sets the difference between the maximum value and the minimum value of the acquired measurement information 56 in the variation range of the measurement information 56 (step S1704).

接著，診斷部74係比較測定資訊56的變動範圍、與上限管理界限UCL及下限管理界限LCL(步驟S1705)，判斷測定資訊56的變動範圍是否超過上限管理界限UCL或下限管理界限LCL(步驟S1706)。Next, the diagnosis unit 74 compares the variation range of the measurement information 56 with the upper limit management limit UCL and the lower limit management limit LCL (step S1705 ), and determines whether the variation range of the measurement information 56 exceeds the upper limit management limit UCL or the lower limit management limit LCL (step S1706 ). ).

接著，診斷部74係在測定資訊56之中，檢測該變動範圍超過上限管理界限UCL或下限管理界限LCL的測定資訊56作為突波(步驟S1707)。此外，診斷部74係算出按每個預定時間的測定資訊56的突波的發生頻度與大小(測定資訊56的變動範圍)的積作為異常度，且將對應所算出的異常度的異常位準，判定為X線厚度測定裝置12的異常位準(步驟S1708)。之後、診斷部74係根據X線厚度測定裝置12的異常位準的判定結果，使位準計顯示於顯示部73(步驟S1709)。Next, the diagnosis unit 74 detects, among the measurement information 56, the measurement information 56 whose fluctuation range exceeds the upper limit management limit UCL or the lower limit management limit LCL as a surge (step S1707). In addition, the diagnosis unit 74 calculates the product of the frequency of occurrence of the surge in the measurement information 56 and the magnitude (the variation range of the measurement information 56 ) for each predetermined time as the degree of abnormality, and sets the abnormality level corresponding to the calculated degree of abnormality , it is determined as an abnormal level of the X-ray thickness measuring device 12 (step S1708 ). After that, the diagnosis unit 74 displays the level gauge on the display unit 73 based on the determination result of the abnormal level of the X-ray thickness measuring device 12 (step S1709).

如上所示，藉由本實施形態之X線厚度測定系統，即使在測定資訊56發生離散發生的非常大的突波、及連續發生的較小突波的任一類型的突波的情形下，亦可使雙方類型的突波的檢測結果反映在X線厚度測定裝置12的異常位準的判定。結果，可使X線厚度測定裝置12的異常位準的判定精度提升。As described above, according to the X-ray thickness measurement system of the present embodiment, even when the measurement information 56 generates a very large surge that occurs discretely, or a small surge that occurs continuously, the measurement information 56 can be The detection results of both types of surges can be reflected in the determination of the abnormal level of the X-ray thickness measuring device 12 . As a result, the determination accuracy of the abnormal level of the X-ray thickness measuring device 12 can be improved.

以上說明了本發明之實施形態，惟該實施形態係提示為例者，並非意圖限定發明的範圍。該新穎的實施形態係可以其他各種形態實施，可在未脫離發明要旨的範圍內，進行各種省略、置換、變更。該實施形態係包含在發明的範圍或要旨，並且包含在申請專利範圍所記載的發明及其均等的範圍。The embodiments of the present invention have been described above, but the embodiments are presented as examples and are not intended to limit the scope of the invention. The novel embodiment can be implemented in other various forms, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. This embodiment is included in the scope or gist of the invention, and includes the invention described in the scope of the patent application and the equivalent scope thereof.

10:X線厚度測定系統 12:X線厚度測定裝置 14:預兆資料伺服器 16:維護裝置 18:網路 20:測定部 22:X線控制電源 24:板厚運算部 26:保持部 28,37:變壓器 30:X線發生器 32:檢測器 34:輸出檢測部 35:電阻 36:X線管 37:變壓器 38:電絲 39a,39b:昇壓電路 40:靶材 42:驅動檢測部 44:管檢測部 46:控制側處理部 48:控制側記憶部 50:受理部 52:算出部 54:測定程式 56:測定資訊 58:預兆側處理部 60:預兆側記憶部 62:取得部 64:預兆部 66:預兆程式 68:預兆資料 70:維護側處理部 72:維護側記憶部 73:顯示部 74:診斷部 76:維護程式 90:測定對象 1500:位準計 10: X-ray thickness measurement system 12: X-ray thickness measuring device 14: Omen Data Server 16: Maintenance device 18: Internet 20: Measurement Department 22: X-ray control power supply 24: Plate Thickness Calculation Department 26: Keeping Department 28, 37: Transformer 30: X-ray generator 32: Detector 34: Output detection section 35: Resistor 36: X-ray tube 37: Transformer 38: Electric wire 39a, 39b: Boost circuit 40: Target 42: Drive detection section 44: Tube Inspection Department 46: Control side processing unit 48: Control side memory 50: Reception Department 52: Calculation Department 54: Determination program 56: Measurement information 58: Omen side processing section 60: Omen side memory department 62: Acquiring Department 64: Omen Ministry 66: Omen Program 68: Omen Information 70: Maintenance side processing section 72: Maintenance side memory 73: Display part 74: Diagnostics Department 76: Maintenance Program 90: Measurement object 1500: Level meter

[圖1]係顯示本實施形態之X線厚度測定系統的全體構成之一例的概略圖。 [圖2]係顯示本實施形態之X線厚度測定系統的控制系的功能構成之一例的區塊圖。 [圖3]係用以說明藉由本實施形態之X線厚度測定系統所為之變動範圍的設定處理之一例的圖。 [圖4]係用以說明藉由本實施形態之X線厚度測定系統所為之離群值的去除處理之一例的圖。 [圖5]係用以說明藉由本實施形態之X線厚度測定系統所為之修華特管制圖(Shewhart control chart)或R管制圖的偏度的補正處理之一例的圖。 [圖6]係顯示藉由本實施形態之X線厚度測定系統所作成的管電壓的R管制圖之一例的圖。 [圖7]係顯示藉由本實施形態之X線厚度測定系統所檢測的管電壓TV的突波之一例的圖。 [圖8]係顯示藉由本實施形態之X線厚度測定系統所檢測的管電壓TV的突波之一例的圖。 [圖9]係顯示藉由本實施形態之X線厚度測定系統所檢測的管電壓的突波的發生頻度之一例的圖。 [圖10]係顯示藉由本實施形態之X線厚度測定系統所檢測的管電壓的突波的大小之一例的圖。 [圖11]係顯示藉由本實施形態之X線厚度測定系統所為之管電壓的突波的發生頻度與大小的積的算出結果之一例的圖。 [圖12]係顯示藉由本實施形態之X線厚度測定系統所檢測的管電壓的突波的發生頻度的累積和之一例的圖。 [圖13]係顯示藉由本實施形態之X線厚度測定系統所檢測的管電壓的突波的大小的和之一例的圖。 [圖14]係顯示藉由本實施形態之X線厚度測定系統所為之管電壓的突波的發生頻度的累積和與大小的累積和的積的算出結果之一例的圖。 [圖15]係顯示藉由本實施形態之X線厚度測定系統所顯示的異常位準的位準計之一例的圖。 [圖16]係顯示藉由本實施形態之X線厚度測定系統所為之上限管理界限及下限管理界限的算出處理流程之一例的流程圖。 [圖17]係顯示本實施形態之X線厚度測定系統中的X線厚度測定裝置的異常位準的判定處理流程之一例的流程圖。 FIG. 1 is a schematic diagram showing an example of the overall configuration of the X-ray thickness measurement system of the present embodiment. 2 is a block diagram showing an example of the functional configuration of the control system of the X-ray thickness measurement system of the present embodiment. [ Fig. 3] Fig. 3 is a diagram for explaining an example of the setting process of the variation range by the X-ray thickness measurement system of the present embodiment. 4] It is a figure for demonstrating an example of the removal process of the outlier by the X-ray thickness measurement system of this embodiment. [ Fig. 5] Fig. 5 is a diagram for explaining an example of the correction processing of the skewness of the Shewhart control chart or the R control chart by the X-ray thickness measurement system of the present embodiment. [ Fig. 6] Fig. 6 is a diagram showing an example of an R control chart of tube voltage created by the X-ray thickness measurement system of the present embodiment. FIG. 7 is a diagram showing an example of the surge of the tube voltage TV detected by the X-ray thickness measurement system of the present embodiment. [ Fig. 8] Fig. 8 is a diagram showing an example of a surge in the tube voltage TV detected by the X-ray thickness measurement system of the present embodiment. [ Fig. 9] Fig. 9 is a diagram showing an example of the frequency of occurrence of a surge in the tube voltage detected by the X-ray thickness measurement system of the present embodiment. 10 is a diagram showing an example of the magnitude of a surge in tube voltage detected by the X-ray thickness measurement system of the present embodiment. 11 is a diagram showing an example of a calculation result of the product of the frequency of occurrence and the magnitude of the surge in the tube voltage by the X-ray thickness measurement system of the present embodiment. 12 is a diagram showing an example of the cumulative sum of the frequency of occurrence of surges in the tube voltage detected by the X-ray thickness measurement system of the present embodiment. 13 is a diagram showing an example of the sum of the magnitudes of the surges of the tube voltage detected by the X-ray thickness measurement system of the present embodiment. 14 is a diagram showing an example of a calculation result of the product of the cumulative sum and the cumulative sum of the magnitudes of the occurrence frequency of the surge in the tube voltage by the X-ray thickness measurement system of the present embodiment. 15 is a diagram showing an example of a level gauge of abnormal level displayed by the X-ray thickness measurement system of the present embodiment. 16 is a flowchart showing an example of the processing flow for calculating the upper limit management limit and the lower limit management limit by the X-ray thickness measurement system of the present embodiment. 17 is a flowchart showing an example of the flow of determination processing of the abnormal level of the X-ray thickness measurement device in the X-ray thickness measurement system of the present embodiment.

10:X線厚度測定系統 12:X線厚度測定裝置 14:預兆資料伺服器 16:維護裝置 18:網路 22:X線控制電源 24:板厚運算部 34:輸出檢測部 42:驅動檢測部 44:管檢測部 46:控制側處理部 48:控制側記憶部 50:受理部 52:算出部 54:測定程式 56:測定資訊 58:預兆側處理部 60:預兆側記憶部 62:取得部 64:預兆部 66:預兆程式 68:預兆資料 70:維護側處理部 72:維護側記憶部 73:顯示部 74:診斷部 76:維護程式 10: X-ray thickness measurement system 12: X-ray thickness measuring device 14: Omen Data Server 16: Maintenance device 18: Internet 22: X-ray control power supply 24: Plate Thickness Calculation Department 34: Output detection section 42: Drive detection section 44: Tube Inspection Department 46: Control side processing unit 48: Control side memory 50: Reception Department 52: Calculation Department 54: Determination program 56: Measurement information 58: Omen side processing section 60: Omen side memory department 62: Acquiring Department 64: Omen Ministry 66: Omen Program 68: Omen Information 70: Maintenance side processing section 72: Maintenance side memory 73: Display part 74: Diagnostics Department 76: Maintenance Program

Claims (5)

一種維護裝置，其係具備： 診斷部，其係檢測包含：藉由來自X線控制電源的電力放出電子的電絲與藉由從該電絲被放出的電子的衝撞而對厚度的測定對象照射X線的靶材間的管電壓的檢測結果、流至前述電絲與前述靶材間的管電流的檢測結果、對應通過前述測定對象的前述X線的強度的檢測電壓及檢測電流的至少一方的檢測訊號的檢測結果、將來自前述X線控制電源的電力變壓而供給至前述電絲的變壓器的一次側的驅動電壓的檢測結果、及流至前述變壓器的一次側的驅動電流的檢測結果之中至少1個的測定資訊的突波，根據前述突波的發生頻度、與該突波的大小的積，判定根據前述檢測訊號來算出前述測定對象的厚度的X線厚度測定裝置的異常位準。 A maintenance device, which is provided with: A diagnostic unit that detects a tube between an electric wire that emits electrons by electric power from an X-ray control power supply and a target that irradiates X-rays to a measurement object of thickness by collision of the electrons emitted from the electric wire The detection result of the voltage, the detection result of the tube current flowing between the wire and the target, the detection result of the detection signal corresponding to at least one of the detection voltage and the detection current of the intensity of the X-ray passing through the measurement object, the Measurement information of at least one of the detection result of the drive voltage on the primary side of the transformer that is transformed from the X-ray control power supply and supplied to the wire, and the result of the detection of the drive current flowing to the primary side of the transformer The surge is determined based on the product of the frequency of occurrence of the surge and the magnitude of the surge to determine the abnormal level of the X-ray thickness measuring device that calculates the thickness of the measurement object based on the detection signal. 如請求項1之維護裝置，其中，前述測定資訊係包含：前述管電壓的檢測結果、前述管電流的檢測結果、前述檢測訊號的檢測結果、前述驅動電壓的檢測結果、及前述驅動電流的檢測結果之中至少1個的最大值及最小值， 前述診斷部係由前述測定資訊，將使前述測定資訊改變的移行期間內的前述測定資訊亦即移行期間資料去除，將已去除前述移行期間資料的前述測定資訊所包含的前述最大值與前述最小值的差，設定在前述測定資訊的變動範圍，且由前述變動範圍將離群值去除，對已去除離群值的前述變動範圍的修華特管制圖或R管制圖進行失真補正，根據已進行失真補正的前述修華特管制圖或前述R管制圖，求出前述變動範圍的上限管理界限及下限管理界限，檢測前述變動範圍超過前述上限管理界限或前述下限管理界限的前述測定資訊作為突波。 The maintenance device of claim 1, wherein the measurement information comprises: the detection result of the tube voltage, the detection result of the tube current, the detection result of the detection signal, the detection result of the driving voltage, and the detection of the driving current The maximum and minimum values of at least one of the results, Based on the measurement information, the diagnosis section removes the measurement information within the transition period in which the measurement information is changed, that is, the transition period data, and removes the maximum value and the minimum value included in the measurement information from which the transition period data has been removed. The difference between the values is set within the variation range of the aforementioned measurement information, and the outliers are removed from the aforementioned variation range, and distortion correction is performed on the Schwart or R control chart in the aforementioned variation range from which the outliers have been removed. The above-mentioned Schwart control map or the above-mentioned R control map for which distortion correction is performed, the upper limit management limit and the lower limit management limit of the above-mentioned fluctuation range are obtained, and the above-mentioned measurement information in which the above-mentioned fluctuation range exceeds the above-mentioned upper limit management limit or the above-mentioned lower limit management limit is detected as a highlight. Wave. 如請求項2之維護裝置，其中，前述診斷部係由前述測定資訊，使用局部最大值或批次平均，將前述移行期間資料去除。The maintenance device according to claim 2, wherein the diagnosis section removes the transition period data from the measurement information using a local maximum value or a batch average. 如請求項2或請求項3之維護裝置，其中，前述診斷部係替換具有前述電絲與前述靶材的X線發生器之後經過預先設定的期間為止，係使用IQR，由前述變動範圍將離群值去除。The maintenance device according to claim 2 or claim 3, wherein the diagnosis section uses the IQR until a preset period of time elapses after the X-ray generator having the wire and the target is replaced, and the distance from the range of the variation is reduced. Crowd removal. 如請求項4之維護裝置，其中，前述診斷部係在替換前述X線發生器之後經過前述預先設定的期間之後，使用截尾平均數，由前述變動範圍將離群值去除。The maintenance device according to claim 4, wherein the diagnosis unit removes outliers from the fluctuation range using a trimmed mean after the predetermined period has elapsed after the X-ray generator is replaced.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM418663U (en) * 2011-08-17 2011-12-21 Ye X Ray Mfg Corp Safety suspension carrier for use in X-ray inspection equipment
US9330879B2 (en) * 2011-08-04 2016-05-03 John Lewellen Bremstrahlung target for intensity modulated X-ray radiation therapy and stereotactic X-ray therapy
US9433515B2 (en) * 2001-02-14 2016-09-06 Advanced Bio Prosthetic Surfaces, Ltd. In vivo sensor and method of making same
CN106137239A (en) * 2015-03-11 2016-11-23 杭州与盟医疗技术有限公司 A kind of medicinal intelligent lead protection curtain system
CN209285539U (en) * 2018-08-23 2019-08-23 瑞津(中国)生物科技有限公司 One kind can multidirectional rotary Medical C arm X-ray machine detection system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7885384B2 (en) 2009-01-26 2011-02-08 General Electric Company System and method to manage maintenance of a radiological imaging system
JP2013156137A (en) * 2012-01-30 2013-08-15 Toshiba Corp Thickness measuring device, thickness measuring method and control program
JP2017215173A (en) * 2016-05-30 2017-12-07 株式会社東芝 Thickness measuring device
JP6890943B2 (en) * 2016-10-06 2021-06-18 キヤノンメディカルシステムズ株式会社 Radiation diagnostic equipment and method
CN110869756B (en) * 2017-07-10 2023-10-27 新东工业株式会社 Surface characteristic evaluation method, surface characteristic evaluation device, and surface characteristic evaluation system
WO2019230010A1 (en) * 2018-06-01 2019-12-05 株式会社東芝 Prediction data server and x-ray thickness measurement system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9433515B2 (en) * 2001-02-14 2016-09-06 Advanced Bio Prosthetic Surfaces, Ltd. In vivo sensor and method of making same
US9330879B2 (en) * 2011-08-04 2016-05-03 John Lewellen Bremstrahlung target for intensity modulated X-ray radiation therapy and stereotactic X-ray therapy
TWM418663U (en) * 2011-08-17 2011-12-21 Ye X Ray Mfg Corp Safety suspension carrier for use in X-ray inspection equipment
CN106137239A (en) * 2015-03-11 2016-11-23 杭州与盟医疗技术有限公司 A kind of medicinal intelligent lead protection curtain system
CN209285539U (en) * 2018-08-23 2019-08-23 瑞津(中国)生物科技有限公司 One kind can multidirectional rotary Medical C arm X-ray machine detection system

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