TWI742225B - Inspection system - Google Patents

Inspection system Download PDF

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TWI742225B
TWI742225B TW107101553A TW107101553A TWI742225B TW I742225 B TWI742225 B TW I742225B TW 107101553 A TW107101553 A TW 107101553A TW 107101553 A TW107101553 A TW 107101553A TW I742225 B TWI742225 B TW I742225B
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wheel
wheels
aforementioned
transport vehicle
identification mark
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TW107101553A
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Chinese (zh)
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TW201834115A (en
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村上龍也
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日商大福股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/02—Control devices, e.g. for safety, warning or fault-correcting detecting dangerous physical condition of load carriers, e.g. for interrupting the drive in the event of overheating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61K—AUXILIARY EQUIPMENT SPECIALLY ADAPTED FOR RAILWAYS, NOT OTHERWISE PROVIDED FOR
    • B61K9/00—Railway vehicle profile gauges; Detecting or indicating overheating of components; Apparatus on locomotives or cars to indicate bad track sections; General design of track recording vehicles
    • B61K9/12—Measuring or surveying wheel-rims
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

[課題]實現一種能夠將沿著行走路徑行走的搬送車作為對象，來有效率地檢查設置於該搬送車的車輪的摩耗的程度之檢查系統。 [解決手段]一種檢查系統，是檢查沿著行走路徑行走的搬送車的車輪的劣化的程度，並具備：識別標記，是附加於車輪的側面之每個車輪各自特有之識別標記；攝影裝置，從行走路徑的側邊進行攝影以將車輪的整體像攝進攝影範圍内；及檢查部，根據車輪的側面的圖像資料，檢查車輪的摩耗的程度，並一併進行已成為檢查對象的車輪的個體特定。[Problem] To realize an inspection system capable of efficiently inspecting the degree of wear of wheels installed on the transport vehicle by targeting a transport vehicle that runs along a traveling path. [Solution] An inspection system that inspects the degree of deterioration of the wheels of a transport vehicle traveling along a traveling path, and is equipped with: identification marks, which are unique identification marks for each wheel attached to the side of the wheel; photographing device, Take pictures from the side of the walking path to take the overall image of the wheel into the photographing range; and the inspection department, based on the image data of the side of the wheel, inspect the degree of wear of the wheel, and also carry out the inspection of the wheel that has become the object of inspection. Individual specific.

Description

檢查系統Check the system

發明領域 本發明是有關於一種檢查系統。FIELD OF THE INVENTION The present invention relates to an inspection system.

發明背景 在例如製造物品的物品製造設備等之中，為了在步驟間搬送材料或中間品，而利用有具有複數個車輪且沿著預定的行走路徑行走的搬送車。在這樣的搬送車中，較理想的是，因為無法避免車體各部位的長期劣化，而在將例如不良狀況的發生防範於未然等的目的下，實施以搬送車為對象的檢查。此時，從檢查效率的觀點來看，較理想的是形成為能夠以自動方式實施該種檢查。Background of the Invention For example, in article manufacturing equipment for manufacturing articles, in order to transport materials or intermediate products between steps, a transport vehicle that has a plurality of wheels and runs along a predetermined traveling path is used. In such a transport vehicle, it is desirable that long-term deterioration of various parts of the vehicle body cannot be avoided, and for the purpose of preventing the occurrence of malfunctions in the first place, for example, inspections targeting the transport vehicle are carried out. At this time, from the viewpoint of inspection efficiency, it is desirable to form such inspections in an automatic manner.

在例如日文專利特開2005-61933號公報(專利文獻1)中，已揭示有一種檢查系統[軸承部劣化檢查裝置1]，其是以自動方式針對配備於搬送車[吊運車2]的車輪的軸承部[支撐滾輪5的軸承部6]檢查其劣化的程度。在專利文獻1的檢查系統中，是在搬送車行走的左右的軌道上設置偏向斜面，並且從斜上方朝向通過該偏向斜面的車輪[滾輪5]的側面來照射光，而藉由測定該照射光的光軸的傾斜來檢查軸承部的劣化的程度。For example, in Japanese Patent Laid-Open No. 2005-61933 (Patent Document 1), an inspection system [Bearing Deterioration Inspection Device 1] has been disclosed, which automatically targets equipment installed in a transport vehicle [Trolley 2] The bearing part of the wheel [the bearing part 6 supporting the roller 5] is checked for the degree of deterioration. In the inspection system of Patent Document 1, deflection slopes are provided on the left and right rails on which the transport vehicle runs, and light is irradiated from obliquely above toward the side of the wheel [roller 5] that passes through the deflection slope. The tilt of the optical axis of the light is used to check the degree of deterioration of the bearing.

然而，作為劣化的程度可能對搬送車的行走造成影響之物件而應進行檢查的對象，並不限於軸承部。例如若車輪的摩耗加重時，會因車輪的外徑變小而使實際行走距離相較於推測行走距離變短，而有搬送車的控制精度(例如停止精度)降低的情況。此點在專利文獻1中並沒有關於檢查車輪的摩耗的程度之必要性的記載，當然關於如何對其進行檢查的記載也完全不存在。 先前技術文獻 專利文獻However, the object to be inspected as an object whose degree of deterioration may affect the traveling of the transport vehicle is not limited to the bearing portion. For example, if the wear of the wheels is aggravated, the actual travel distance will be shorter than the estimated travel distance due to the decrease in the outer diameter of the wheel, and the control accuracy (for example, stopping accuracy) of the transport vehicle may be reduced. In this regard, Patent Document 1 does not describe the necessity of inspecting the degree of wear of the wheel, and of course there is no description of how to inspect it. Prior Art Documents Patent Documents

專利文獻1：日本專利特開2005-61933號公報Patent Document 1: Japanese Patent Laid-Open No. 2005-61933

發明概要 發明欲解決之課題 所期望的是能夠將沿著行走路徑行走的搬送車作為對象，並有效率地檢查設置於該搬送車的車輪的摩耗的程度之檢查系統的實現。 用以解決課題之手段Summary of the Invention Problems to be Solved by the Invention What is desired is the realization of an inspection system that can target a transport vehicle that runs along a traveling path and efficiently inspect the degree of wear of wheels installed on the transport vehicle. Means to solve the problem

本揭示之檢查系統，是將具有複數個車輪並且沿著預定的行走路徑行走的搬送車作為對象，來檢查前述車輪的劣化的程度之檢查系統，並具備： 識別標記，是附加於複數個前述車輪的每一個的側面之每個前述車輪各自特有之識別標記； 攝影裝置，從前述行走路徑的側邊，對行走於前述行走路徑的前述搬送車的前述車輪進行攝影，以將該車輪的整體像攝進攝影範圍内；及 檢查部，根據藉由前述攝影裝置得到的前述車輪的側面的圖像資料，檢查前述車輪的摩耗的程度，並一併進行已成為檢查對象的前述車輪的個體特定。The inspection system of the present disclosure is an inspection system for inspecting the degree of deterioration of the aforementioned wheels with a transport vehicle that has a plurality of wheels and traveling along a predetermined traveling path, and includes: an identification mark is attached to the plurality of aforementioned Each wheel has its own unique identification mark on the side of each wheel; a photographing device, from the side of the travel path, photographs the wheel of the transport vehicle that is walking on the travel path, so that the entire wheel The image is taken within the photographing range; and the inspection section, based on the image data of the side of the wheel obtained by the photographing device, inspects the degree of wear of the wheel, and also performs the individual identification of the wheel that has been inspected .

根據此構成，只要以設置在行走路徑的側邊的攝影裝置來對已附加有識別標記的車輪的側面進行攝影，就可以根據所得到的圖像資料，一面進行車輪的個體特定一面檢查該車輪的摩耗的程度。據此，可以有效率地檢查關於各個的車輪的摩耗的程度，並且將該結果與該車輪建立關連。又，由於可根據以共通的攝影裝置所攝影的圖像資料，來進行摩耗檢查與個體特定兩方面，所以在那樣的情況下可以謀求系統構成的簡單化。According to this configuration, as long as the imaging device installed on the side of the walking path is used to photograph the side of the wheel to which the identification mark has been attached, it is possible to inspect the wheel while identifying the individual wheel based on the obtained image data. The degree of wear. According to this, it is possible to efficiently check the degree of wear of each wheel, and to correlate the result with the wheel. In addition, since it is possible to perform both abrasion inspection and individual identification based on image data captured by a common imaging device, it is possible to simplify the system configuration in such a case.

本揭示之技術的更進一步之特徵與優點，透過參照圖式所記述之以下的例示性且非限定的實施形態之說明應可變得更加明確。The further features and advantages of the technology of the present disclosure should be made clearer by referring to the description of the following exemplary and non-limiting embodiments described in the drawings.

用以實施發明之形態 針對檢查系統之實施形態進行說明。在本實施形態中，作為一例是針對例如已組裝在各種製品的製造設備(工廠)等所使用之物品搬送設備2中的檢查系統1進行說明。物品搬送設備2具備有搬送車10，該搬送車10具有複數個車輪13並且沿著預定的行走路徑R行走。檢查系統1是將該搬送車10作為對象而對配備於該搬送車10的車輪13之劣化的程度進行檢查。以下，針對本實施形態之檢查系統1及物品搬送設備2詳細地説明。Mode for implementing the invention The following describes the mode for implementing the inspection system. In the present embodiment, as an example, the inspection system 1 is described, for example, in an article transport facility 2 used in a manufacturing facility (factory) of various products. The article transport facility 2 includes a transport vehicle 10 that has a plurality of wheels 13 and travels along a predetermined traveling path R. The inspection system 1 inspects the degree of deterioration of the wheels 13 provided on the transport vehicle 10 with the transport vehicle 10 as a target. Hereinafter, the inspection system 1 and the article transport facility 2 of this embodiment will be described in detail.

首先，針對物品搬送設備2的主要的構成進行說明。如圖1~圖4所示，物品搬送設備2具備有沿著行走路徑R而配設之行走軌道6、及沿著行走軌道6行走來搬送物品A之搬送車10。製造設備具有複數個站台(步驟)，行走路徑R(搬送車10的行走路徑)是包含設置於每個站台的站台内路徑Ra、與將複數個站台内路徑Ra彼此連接的站台間路徑Re而構成。沿著站台内路徑Ra而設置有複數個處理裝置21。在與各個處理裝置21相鄰，且在上下方向視角下與行走軌道6重複的位置(本例中是成為行走軌道6的正下方的位置)上設置有載置台22。處理裝置21亦可為例如進行半導體基板的加工等的半導體處理裝置等。First, the main configuration of the article transport facility 2 will be described. As shown in FIGS. 1 to 4, the article transport facility 2 includes a traveling rail 6 arranged along a traveling path R, and a transport vehicle 10 that runs along the traveling rail 6 to transport the article A. The manufacturing facility has a plurality of stations (steps), and the traveling path R (traveling path of the transport vehicle 10) includes an intra-station path Ra installed at each station and an inter-station path Re connecting the plurality of intra-platform paths Ra to each other. constitute. A plurality of processing devices 21 are provided along the route Ra in the station. A mounting table 22 is provided at a position adjacent to each processing device 21 and overlapping with the traveling rail 6 in the vertical viewing angle (in this example, a position directly below the traveling rail 6). The processing device 21 may be, for example, a semiconductor processing device that performs processing of a semiconductor substrate or the like.

如圖3所示，行走軌道6是於左右設置有一對並從天花板被懸吊支撐。搬送車10是構成為行走於此行走軌道6的上表面。亦即，本實施形態的搬送車10是作為有軌道式的天花板搬送車而構成。在行走路徑R的分歧點上設置有引導軌道8(亦可參照圖4)。引導軌道8是在左右一對的行走軌道6的寬度方向的中央位置上，設置在比行走軌道6更上方。引導軌道8是在分歧點分歧且形成為分叉狀。As shown in FIG. 3, the walking rail 6 is provided with a pair of left and right sides, and is suspended and supported from the ceiling. The transport vehicle 10 is configured to travel on the upper surface of the traveling rail 6. That is, the transport vehicle 10 of the present embodiment is configured as a rail-mounted ceiling transport vehicle. A guide rail 8 is provided at the branch point of the walking path R (refer also to FIG. 4). The guide rail 8 is provided above the traveling rail 6 at the center position in the width direction of the pair of left and right traveling rails 6. The guide rail 8 is branched at a branch point and formed in a bifurcated shape.

如圖2及圖3所示，搬送車10具備有行走體11與移載單元17。行走體11具有車體本體12、及旋轉自如地支撐於此車體本體12的複數個車輪13。車體本體12是設置有前後一對。車輪13是在前後一對車體本體12的每一個設置有左右一對。如此進行，本實施形態的行走體11具備有右前輪，左前輪，右後輪及左後輪之總計4個的車輪13。車輪13是在行走軌道6上滾動。複數個車輪13之中的至少1個是被驅動馬達所旋轉驅動的驅動輪，並且會對搬送車10賦與推進力。As shown in FIGS. 2 and 3, the transport vehicle 10 includes a traveling body 11 and a transfer unit 17. The traveling body 11 has a vehicle body 12 and a plurality of wheels 13 rotatably supported by the vehicle body 12. The vehicle body 12 is provided with a pair of front and rear. The wheels 13 are provided with a pair of left and right in each of a pair of front and rear body bodies 12. In this way, the traveling body 11 of the present embodiment is provided with a total of four wheels 13 of the right front wheel, the left front wheel, the right rear wheel, and the left rear wheel. The wheels 13 roll on the traveling track 6. At least one of the plurality of wheels 13 is a drive wheel that is rotationally driven by a drive motor, and provides propulsion force to the transport vehicle 10.

行走體11更具有導引滾輪14。導引滾輪14包含下部滾輪14D與上部滾輪14U。下部滾輪14D是在比車體本體12更下方，旋轉自如地支撐於該車體本體12。下部滾輪14D是接觸於行走軌道6的側面而滾動。上部滾輪14U是在比車體本體12更上方，旋轉自如地支撐於已設置於該車體本體12的切換機構上。切換機構是將上部滾輪14U的位置朝左右切換自如地構成。上部滾輪14U是在行走路徑R的分歧點因應於切換機構的狀態而接觸於引導軌道8的任一側面並滾動。The walking body 11 further has a guide roller 14. The guide roller 14 includes a lower roller 14D and an upper roller 14U. The lower roller 14D is below the vehicle body 12 and is rotatably supported by the vehicle body 12. The lower roller 14D rolls in contact with the side surface of the traveling rail 6. The upper roller 14U is above the vehicle body 12 and is rotatably supported by a switching mechanism provided on the vehicle body 12. The switching mechanism is configured to freely switch the position of the upper roller 14U to the left and right. The upper roller 14U rolls in contact with any side surface of the guide rail 8 in accordance with the state of the switching mechanism at the branch point of the traveling path R.

於前後一對的車體本體12的每一個上連結有連結軸15，並透過這些連結軸15，而將本體罩殼16懸吊支撐於行走體11。在本體罩殼16的内部收容有移載單元17，該移載單元17會把持物品A並進行該物品A的移載動作。移載單元17是在把持有物品A的狀態下，將該物品A升降自如地構成。A connecting shaft 15 is connected to each of the pair of front and rear vehicle body bodies 12, and the body cover 16 is suspended and supported on the traveling body 11 through these connecting shafts 15. A transfer unit 17 is housed in the main body cover 16, and the transfer unit 17 grips the article A and performs the transfer operation of the article A. The transfer unit 17 is configured to move the article A up and down while holding the article A.

在這樣的物品搬送設備2中，搬送車10是沿著行走路徑R(行走軌道6)行走，而在不同的載置台22彼此之間搬送物品A。在如上述地處理裝置21為半導體處理裝置的情況下，物品A亦可為例如收容半導體基板的容器(前開式晶圓傳送盒(Front Opening Unified Pod)，FOUP)等。In such an article transport facility 2, the transport vehicle 10 travels along the traveling path R (traveling rail 6 ), and transports the article A between different mounting platforms 22. In the case where the processing apparatus 21 is a semiconductor processing apparatus as described above, the article A may be, for example, a container (Front Opening Unified Pod (FOUP)) or the like for storing semiconductor substrates.

搬送車10的車輪13會隨時間(更具體來說，是隨著累積行走距離變長)而摩耗並逐漸磨損。若車輪13的摩耗加重時，會由於車輪13的外徑變小，而導致實際行走距離相較於依據該車輪13的旋轉角所推測之推測行走距離變得較短。其結果，導致搬送車10的控制精度(例如停止精度)降低。又，當車輪13的摩耗加重到某個程度時，會變得更加容易加重摩耗，且有塵埃的產生量増加的可能性。The wheels 13 of the transport vehicle 10 will wear and gradually wear over time (more specifically, as the cumulative travel distance becomes longer). If the wear of the wheel 13 increases, the outer diameter of the wheel 13 becomes smaller, and the actual travel distance becomes shorter than the estimated travel distance estimated based on the rotation angle of the wheel 13. As a result, the control accuracy (for example, stopping accuracy) of the transport vehicle 10 is reduced. In addition, when the wear of the wheels 13 increases to a certain level, it becomes easier to increase the wear, and there is a possibility that the amount of dust generated may increase.

於是，在本實施形態的物品搬送設備2中，組裝有檢查系統1，該檢查系統1是將搬送車10作為對象，來檢查該搬送車10所具備之車輪13的劣化的程度(具體而言是摩耗的程度)。檢查系統1是構成為能夠以自動方式檢查車輪13的摩耗的程度。檢查系統1具備有：攝影裝置32，設置於行走軌道6的附近(參照圖3)；識別標記40，附加於搬送車10所具有的複數個車輪13的每一個的側面(參照圖5)；及檢查部54，進行摩耗檢查的實質的處理(參照圖6)。再者，檢查部54可以利用安裝有檢查用的程式(應用程式)的電腦來構成。Therefore, in the article transport facility 2 of the present embodiment, an inspection system 1 is incorporated. The inspection system 1 uses the transport vehicle 10 as an object to inspect the degree of deterioration of the wheels 13 of the transport vehicle 10 (specifically, Is the degree of wear). The inspection system 1 is configured to be able to automatically inspect the degree of wear of the wheels 13. The inspection system 1 includes: a photographing device 32, which is installed near the traveling rail 6 (refer to FIG. 3); and an identification mark 40, which is attached to the side surface of each of the plurality of wheels 13 of the transport vehicle 10 (refer to FIG. 5); And the inspection part 54 performs the essential processing of the abrasion inspection (refer to FIG. 6). In addition, the inspection unit 54 may be constituted by a computer on which a program (application program) for inspection is installed.

如圖3所示，在行走軌道6(行走路徑R)的兩側邊中的與該行走軌道6相同高度的位置上分別設置有支撐台31。在此等兩側面的支撐台31上，分別將攝影裝置32設置成朝向行走軌道6側(亦即，可對行走軌道6側攝影)。攝影裝置32是從行走路徑R的側邊對沿著行走路徑R行走的搬送車10的車輪13進行攝影。攝影裝置32是設置成可將行走於行走路徑R的搬送車10的車輪13的整體像攝進該攝影裝置32的攝影範圍S(參照圖7)內。作為攝影裝置32，可使用例如以100萬左右的像素數在1秒期間進行2000幀以上的攝影之高速相機。當然，不一定要採用該種規格，攝影裝置32的性能亦可因應於要求等級而進行適當設定。As shown in FIG. 3, on both sides of the traveling rail 6 (traveling path R), a support platform 31 is respectively provided at a position with the same height as the traveling rail 6. On the support platforms 31 on these two sides, the photographing devices 32 are respectively arranged to face the side of the walking rail 6 (that is, the side of the walking rail 6 can be photographed). The imaging device 32 photographs the wheels 13 of the transport vehicle 10 traveling along the traveling path R from the side of the traveling path R. The photographing device 32 is installed so as to be able to photograph the entire image of the wheels 13 of the transport vehicle 10 traveling on the traveling path R into the photographing range S of the photographing device 32 (refer to FIG. 7 ). As the photographing device 32, for example, a high-speed camera capable of photographing 2000 frames or more in one second with a pixel count of approximately 1 million can be used. Of course, it is not necessary to adopt this type of specification, and the performance of the photographing device 32 can also be appropriately set according to the required level.

攝影裝置32的設置位置並未特別限定，可以將攝影裝置32設置在行走路徑R中的任意位置。但是，在行走路徑R形成為環狀，且包含直線區間與曲線區間的情況下，從設置空間的確保之觀點來看，攝影裝置32以設置於直線區間內為較理想。又，從對各個搬送車10的車輪13進行攝影時的效率的觀點來看，攝影裝置32以設置在相較於站台内路徑Ra有更多搬送車10行走的站台間路徑Re為較理想。The installation position of the imaging device 32 is not particularly limited, and the imaging device 32 can be installed at any position in the walking path R. However, when the walking path R is formed in a loop and includes a straight section and a curved section, from the viewpoint of securing the installation space, it is preferable that the imaging device 32 be installed in the straight section. In addition, from the viewpoint of efficiency when photographing the wheels 13 of the respective transport vehicles 10, the imaging device 32 is preferably installed on the inter-platform path Re where the transport vehicles 10 travel more than the intra-platform path Ra.

又，攝影裝置32以設置在行走路徑R中的搬送車10之預定的停止位置P(參照圖1)為較理想。在物品搬送設備2中，會有下述情況：在剛要從站台間路徑Re往站台内路徑Ra的分歧點的跟前，於即將從此進入的站台内路徑Ra存在其他搬送車10的情況下，設定使搬送車10停止並進行待機的待機位置W(參照圖1)。像這樣的待機位置W是例示作為停止位置P的一例。攝影裝置32以設置在設定於複數個地點的待機位置W(停止位置P)之中的任一地點為較理想。攝影裝置32的設置位置也可以稱為“檢查位置”。In addition, it is preferable that the imaging device 32 has a predetermined stop position P (refer to FIG. 1) of the transport vehicle 10 installed in the traveling path R. In the article transport facility 2, there may be the following situation: just before the divergence point from the inter-platform path Re to the intra-platform path Ra, there is another transport vehicle 10 in the intra-platform path Ra that is about to enter therefrom, The standby position W (refer to FIG. 1) where the transport vehicle 10 is stopped and waits is set. Such a waiting position W is exemplified as an example of the stop position P. The photographing device 32 is preferably installed at any one of the standby positions W (stop positions P) set in a plurality of places. The installation position of the imaging device 32 may also be referred to as an "examination position".

攝影裝置32是透過通訊纜線33而連接到檢查部54。亦即，攝影裝置32與檢查部54的資訊通訊是藉由有線通訊來進行。包含被攝影裝置32所攝影的搬送車10之車輪13的側面的圖像資料I(參照圖7)，是藉由透過通訊纜線33之有線通訊而傳送到檢查部54。攝影裝置32只要設置在距離設置有物品搬送設備2的廠房中的控制室或伺服器室最近位置的待機位置W(停止位置P)，就可讓有線LAN(區域網路(Local Area Network))的建構變得比較容易，因而較為理想。The imaging device 32 is connected to the inspection unit 54 through the communication cable 33. That is, the information communication between the photographing device 32 and the inspection unit 54 is performed by wired communication. The image data I (refer to FIG. 7) including the side surface of the wheel 13 of the transport vehicle 10 photographed by the photographing device 32 is transmitted to the inspection unit 54 by wired communication through the communication cable 33. As long as the photographing device 32 is installed in the standby position W (stop position P) closest to the control room or server room in the factory where the article handling equipment 2 is installed, a wired LAN (Local Area Network) can be used. The construction of has become easier, so it is more ideal.

如圖3所示，於左右一對的行走軌道6的一邊的下表面固定有向下突出的支撐構件35。支撐構件35是形成為沿著行走路徑R(行走軌道6)來看成為ㄈ之字形(稜角之U字形)。於此支撐構件35上固定有例如由投光部與受光部的組合所構成的光感測器36(在圖3中圖示省略，參照圖6)。ㄈ字形的支撐構件35的一邊的支撐脚上固定有投光部，另一邊的支撐脚上固定有受光部。As shown in FIG. 3, a supporting member 35 protruding downward is fixed to the lower surface of one side of the left and right pair of traveling rails 6. The support member 35 is formed to have a zigzag (angular U-shape) when viewed along the traveling path R (traveling rail 6). To this support member 35, a photo sensor 36 (not shown in FIG. 3, see FIG. 6) constituted by, for example, a combination of a light projecting part and a light receiving part is fixed. The U-shaped supporting member 35 has a light projection part fixed on one supporting leg, and a light receiving part fixed on the other supporting leg.

另一方面，於搬送車10的本體罩殼16的上表面固定有向上突出的不透明的遮蔽板38。遮蔽板38是固定成變得可通過已固定在行走軌道6上的ㄈ之字形的支撐構件35的一對支撐脚之間。當搬送車10沿著行走路徑R(行走軌道6)行走，且遮蔽板38通過支撐構件35時，來自投光部的光會被遮蔽板38所遮光，而變得無法藉由受光部檢測。利用此現象，攝影裝置32是因應於受光部中的由檢測至未檢測的變化，來進行一定時間的攝影。On the other hand, an opaque shielding plate 38 protruding upward is fixed to the upper surface of the main body cover 16 of the transport vehicle 10. The shielding plate 38 is fixed so as to pass between a pair of supporting legs of the zigzag supporting member 35 fixed to the traveling rail 6. When the transport vehicle 10 travels along the traveling path R (traveling rail 6) and the shielding plate 38 passes through the support member 35, the light from the light projecting part is shielded by the shielding plate 38 and cannot be detected by the light receiving part. Taking advantage of this phenomenon, the photographing device 32 performs photographing for a certain period of time in response to the change from detection to undetected in the light receiving unit.

如圖5所示，於搬送車10的車輪13上是按每個車輪13而附加有特有之識別標記40。於識別標記40嵌入有按每個車輪13而賦與之識別編號(車輪ID)的資訊。作為這樣的識別標記40，在本實施形態中是使用2維條碼41(2維條碼：例如QR碼(註冊商標)等)。由於只要是2維條碼41，則不論旋轉方向的傾斜如何都可讀取，所以即便是搬送車10的行走中(車輪13的旋轉中)也變得可讀取，因而較理想。在本實施形態中，是在全部的車輪13上均貼附有作為識別標記40的2維條碼41。As shown in FIG. 5, a unique identification mark 40 is attached to the wheels 13 of the transport vehicle 10 for each wheel 13. The identification mark 40 is embedded with information assigned an identification number (wheel ID) for each wheel 13. As such an identification mark 40, in this embodiment, a two-dimensional barcode 41 (two-dimensional barcode: for example, QR code (registered trademark), etc.) is used. As long as it is a two-dimensional barcode 41, it can be read regardless of the inclination of the rotation direction. Therefore, it can be read even when the transport vehicle 10 is traveling (while the wheels 13 are rotating), which is preferable. In this embodiment, a two-dimensional barcode 41 as an identification mark 40 is attached to all wheels 13.

又，2維條碼41的貼附位置並未特別限定，可以在車輪13的側面中的任意位置上貼附2維條碼41。在本實施形態中，是將2維條碼41貼附在車輪13的中心位置(車軸的位置)。如此一來，由於可將2維條碼41的旋轉軌跡的直徑抑制得較小，所以可以在狭窄的讀取區域中精度良好地讀取2維條碼41，因而較理想。In addition, the attachment position of the two-dimensional barcode 41 is not particularly limited, and the two-dimensional barcode 41 may be attached to any position on the side surface of the wheel 13. In this embodiment, the two-dimensional barcode 41 is attached to the center position of the wheel 13 (the position of the axle). In this way, since the diameter of the rotation trajectory of the two-dimensional barcode 41 can be suppressed to be small, the two-dimensional barcode 41 can be accurately read in a narrow reading area, which is ideal.

於圖6顯示檢查系統1及物品搬送設備2的控制系統。此控制系統具備有上位控制部50、搬送控制部52、及檢查部54。上位控制部50是統合控制搬送控制部52及檢查部54。搬送控制部52是控制搬送車10的動作。在本實施形態中，搬送控制部52與搬送車10的資訊通訊是藉由無線通訊來進行。在搬送控制部52所生成的搬送車10的控制指令是藉由無線通訊來傳送到各個搬送車10。The control system of the inspection system 1 and the article transport equipment 2 is shown in FIG. 6. This control system includes a higher-level control unit 50, a transport control unit 52, and an inspection unit 54. The upper control unit 50 controls the conveyance control unit 52 and the inspection unit 54 in an integrated manner. The transport control unit 52 controls the operation of the transport vehicle 10. In this embodiment, the information communication between the transport control unit 52 and the transport vehicle 10 is performed by wireless communication. The control command of the transport vehicle 10 generated by the transport control unit 52 is transmitted to each transport vehicle 10 by wireless communication.

檢查部54是根據藉由攝影裝置32所得到的車輪13的側面的圖像資料I，來檢查車輪13的摩耗的程度，並一併進行已成為檢查對象的車輪13的個體特定。為了實現這樣的機能，檢查部54具備有圖像資料取得部55、個體特定部56、圖像處理部57、及判定部58。又，本實施形態中，檢查部54更具備有通知部59，並且連接到顯示裝置60。The inspection unit 54 inspects the degree of wear of the wheel 13 based on the image data I of the side surface of the wheel 13 obtained by the imaging device 32, and also performs individual identification of the wheel 13 that has been the inspection target. In order to realize such a function, the inspection unit 54 includes an image data acquisition unit 55, an individual identification unit 56, an image processing unit 57, and a determination unit 58. In addition, in this embodiment, the inspection unit 54 further includes a notification unit 59 and is connected to the display device 60.

圖像資料取得部55會取得藉由攝影裝置32所得到之車輪13的側面的圖像資料I。圖像資料取得部55在當攝影裝置32對車輪13的側面進行攝影而生成圖像資料I時，是透過通訊纜線33來接收並取得該圖像資料I。所取得的圖像資料I宜儲存於快閃記憶體或硬碟等儲存裝置中。此車輪13的側面的圖像資料I(參照圖7)是為了檢查該車輪13的摩耗的程度而使用。The image data acquisition unit 55 acquires the image data I of the side surface of the wheel 13 obtained by the photographing device 32. The image data acquisition unit 55 receives and acquires the image data I through the communication cable 33 when the photographing device 32 photographs the side surface of the wheel 13 to generate the image data I. The acquired image data I should be stored in a storage device such as flash memory or hard disk. The image data I (refer to FIG. 7) of the side surface of the wheel 13 is used to check the degree of wear of the wheel 13.

個體特定部56是根據車輪13的側面的圖像資料I，進行已成為檢查對象的車輪13的個體特定。如圖7中的上段右側所示，個體特定部56是將圖像資料I中的包含車輪13的中心部之一定區域作為對象來進行讀取處理。由於在車輪13的中心部包含作為識別標記40的2維條碼41的圖像，所以個體特定部56是藉由讀取該2維條碼41來取得該車輪13的識別編號之資訊，並根據該識別編號來將檢查對象之車輪13唯一地特定。再者，於檢查部54中會針對於物品搬送設備2中所具備的全部的搬送車10具有的全部的車輪13，將其所在(哪台搬送車10中的哪個位置的車輪)之資訊與識別編號建立關連來儲存。因此，個體特定部56變得可特定檢查對象之車輪13是哪台搬送車10中的哪個位置的車輪。The individual identification unit 56 performs individual identification of the wheel 13 that has become the inspection target based on the image data I of the side surface of the wheel 13. As shown on the upper right side of FIG. 7, the individual identification unit 56 performs a reading process by taking a certain area including the center portion of the wheel 13 in the image data I as an object. Since the center of the wheel 13 contains the image of the two-dimensional bar code 41 as the identification mark 40, the individual identification section 56 obtains the information of the identification number of the wheel 13 by reading the two-dimensional bar code 41, and based on the The identification number uniquely identifies the wheel 13 to be inspected. Furthermore, in the inspection unit 54 for all the wheels 13 of all the transport vehicles 10 included in the article transport equipment 2, the information on their locations (which position of the wheels in which transport vehicle 10) is combined with The identification number is linked to store. Therefore, the individual identification unit 56 can identify the wheel 13 of the inspection object at which position in the transport vehicle 10.

圖像處理部57會進行對車輪13的側面的圖像資料I的圖像處理。如圖7中的下段所示，圖像處理部57是藉由進行例如二値化處理或邊緣檢測處理等，來提取包含於車輪13的側面的圖像資料I中的車輪13的輪廓線E。The image processing unit 57 performs image processing on the image data I of the side surface of the wheel 13. As shown in the lower part of FIG. 7, the image processing unit 57 extracts the contour line E of the wheel 13 included in the image data I of the side surface of the wheel 13 by performing, for example, binarization processing or edge detection processing. .

判定部58會判定檢查對象之車輪13的摩耗的程度。判定部58會根據所提取出的車輪13的輪廓線E之資訊，並藉由運算來取得檢查對象的車輪13的外徑D，而根據該推測値來判定檢查對象之車輪13的摩耗的程度。於檢查部54中儲存有各個車輪13的初始直徑之資訊。判定部58會將車輪13的外徑D的推測値，與預先設定在比初始直徑更小之値的基準直徑的大小關係進行比較，並在推測値為基準直徑以下的情況下，判定為該車輪13的摩耗已進行到無法忽視的程度。在這種情況下，基準直徑可以設定為例如初始直徑的95%~99%左右的外徑。The determination unit 58 determines the degree of wear of the wheel 13 to be inspected. The determining unit 58 obtains the outer diameter D of the inspected wheel 13 based on the extracted information of the contour E of the wheel 13 and calculates it, and determines the degree of wear of the inspected wheel 13 based on the estimated value . Information on the initial diameter of each wheel 13 is stored in the inspection unit 54. The judging unit 58 compares the estimated value of the outer diameter D of the wheel 13 with the size relationship of the reference diameter set in advance at a value smaller than the initial diameter, and if the estimated value is less than the reference diameter, it is judged to be this The wear of the wheels 13 has progressed to an extent that cannot be ignored. In this case, the reference diameter can be set to an outer diameter of about 95% to 99% of the initial diameter, for example.

並非限定於僅設定1個基準直徑之構成，亦可設定複數個基準直徑。亦可設定例如預先設定成比初始直徑更小之値的第一基準直徑、及預先設定成進一步比該第一基準直徑更小之値的第二基準直徑。在這種情況下，判定部58亦可構成為：將車輪13的外徑D的推測値與第一基準直徑及第二基準直徑的各自的大小關係作比較，在推測値為第一基準直徑以下時，判定為該車輪13的摩耗在持續進行中，而在推測値為第二基準直徑以下時，則判定為該車輪13的摩耗已進行到無法忽視的程度。在這種情況下，第一基準直徑可以設定為例如初始直徑的99%~99.5%左右的外徑，且第二基準直徑可以設定為例如初始直徑的95%~99%左右的外徑。It is not limited to a configuration in which only one reference diameter is set, and a plurality of reference diameters may be set. It is also possible to set, for example, a first reference diameter that is preset to a value smaller than the initial diameter, and a second reference diameter that is preset to a value that is further smaller than the first reference diameter. In this case, the determination unit 58 may also be configured to compare the estimated value of the outer diameter D of the wheel 13 with the respective magnitude relationships of the first reference diameter and the second reference diameter, and the estimated value is the first reference diameter. In the following cases, it is determined that the wear of the wheel 13 is continuing, and when the estimated value is less than the second reference diameter, it is determined that the wear of the wheel 13 has progressed to an extent that cannot be ignored. In this case, the first reference diameter may be set to, for example, an outer diameter of about 99% to 99.5% of the initial diameter, and the second reference diameter may be set to, for example, an outer diameter of about 95% to 99% of the initial diameter.

這樣一來，在本實施形態的檢查系統1中，檢查部54是根據藉由攝影裝置32所得到的車輪13的側面的圖像資料I，來檢查車輪13的摩耗的程度，並一併進行已成為檢查對象的車輪13的個體特定。更具體而言，檢查部54是藉由對圖像資料I的圖像處理來檢測車輪13的外徑，並根據該檢測値來檢查車輪13的摩耗的程度，並且藉由從圖像資料I之中檢測識別標記40來進行車輪13的個體特定。由於是根據以攝影裝置32攝影而得到的圖像資料I，而一面進行車輪13的個體特定一面檢查該車輪13的摩耗的程度，所以可以針對各個車輪13來有效率地檢查摩耗的程度。In this way, in the inspection system 1 of the present embodiment, the inspection unit 54 inspects the degree of wear of the wheel 13 based on the image data I of the side surface of the wheel 13 obtained by the photographing device 32, and performs it together. The individual identification of the wheel 13 that has become the object of inspection. More specifically, the inspection unit 54 detects the outer diameter of the wheel 13 by image processing on the image data I, and checks the degree of wear of the wheel 13 based on the detection value, and uses the image data I Among them, the identification mark 40 is detected to perform individual identification of the wheel 13. Since it is based on the image data I obtained by the imaging device 32, the degree of abrasion of the wheel 13 is checked while the individual identification of the wheel 13 is performed. Therefore, the degree of abrasion of each wheel 13 can be checked efficiently.

在通知部59判定為車輪13的外徑D的推測値在基準直徑以下(或者，第一基準直徑以下或第二基準直徑以下)的情況下，則進行因應此情況的内容之通知。例如通知部59會一面特定對象之車輪13的所在一面在已連接到構成檢查部54的電腦的監視器等之顯示裝置60上顯示警告訊息或注意提醒訊息。警告訊息可以是例如催促立刻更換該車輪13之訊息，注意提醒訊息可以是例如針對該車輪13而催促接受精密檢查之訊息。通知部59亦可例如將該車輪13的外徑D的推測値、或該車輪13的側面的圖像資料I也一併顯示於顯示裝置60。If the notification unit 59 determines that the estimated value of the outer diameter D of the wheel 13 is less than or equal to the reference diameter (or less than the first reference diameter or less than the second reference diameter), it will notify the content corresponding to the situation. For example, the notification unit 59 displays a warning message or a caution reminder message on a display device 60 such as a monitor connected to a computer constituting the inspection unit 54 while the wheel 13 of the specific object is located. The warning message can be, for example, a message urging the wheel 13 to be replaced immediately, and the attention reminding message can be, for example, a message urging the wheel 13 to undergo a close inspection. The notification unit 59 may also display the estimated value of the outer diameter D of the wheel 13 or the image data I of the side surface of the wheel 13 on the display device 60, for example.

如此一來，可以在幾乎不耗費作業人員的特別的作業時間的情形下，在早期就更換摩耗持續進行的車輪13。據此，可以抑制伴隨於車輪13的摩耗而使搬送車10的控制精度降低之情形，又，可以將塵挨的產生量抑制得較少。In this way, it is possible to replace the wheel 13 whose wear continues at an early stage without consuming special work time of the worker. According to this, it is possible to suppress a decrease in the control accuracy of the transport vehicle 10 due to the wear of the wheels 13, and it is possible to suppress the amount of dust generation to a small amount.

[其他的實施形態] (1)在上述實施形態中，是以識別標記40僅為2維條碼41所構成，並且在全部的車輪13上均貼附有作為識別標記40的2維條碼41之構成為例而進行了說明。然而，並不限定為那樣的構成，亦可如例如圖8所示，將識別標記40按每台搬送車10，藉由第一識別標記40A與第二識別標記40B的組合來構成。第一識別標記40A是每台搬送車10各自特有之標記，且於第一識別標記40A上嵌入有按每台搬送車10賦與的識別編號(搬送車ID)之資訊。第一識別標記40A亦可為例如2維條碼44。第二識別標記40B是顯示搬送車10中的每個車輪13的設置位置的標記，而且是按每個設置位置而設為不同的形狀。第二識別標記40B亦可為例如幾何標記45，在圖示的例子中是設為1~4道的同心圓標記。第二識別標記40B是分別因應於該車輪13的設置位置而貼附在全部的車輪13的側面的中心位置上。第一識別標記40A是按每台搬送車10而貼附在該搬送車10所具有的全部的車輪13之中的1個車輪13的側面。在這樣的構成中，在行走路徑R的兩側邊之中，於車輪13僅貼附第二識別標記40B之側所設置的攝影裝置32，不須讀取2維條碼44，只要能夠判別互相為不同的幾何標記45即可。因此，有下述優點：可以使用較低規格的低速度相機來作為該攝影裝置32，而可謀求系統整體的低成本化。[Other Embodiments] (1) In the above embodiment, the identification mark 40 is constituted by only the two-dimensional barcode 41, and all the wheels 13 are affixed with the two-dimensional barcode 41 as the identification mark 40 The configuration is explained as an example. However, it is not limited to such a configuration, and as shown in, for example, FIG. 8, the identification mark 40 may be configured by a combination of the first identification mark 40A and the second identification mark 40B for each transport vehicle 10. The first identification mark 40A is a mark unique to each transport vehicle 10, and information of an identification number (transport vehicle ID) assigned to each transport vehicle 10 is embedded in the first identification mark 40A. The first identification mark 40A may also be a two-dimensional barcode 44, for example. The second identification mark 40B is a mark that shows the installation position of each wheel 13 in the transport vehicle 10, and has a different shape for each installation position. The second identification mark 40B may also be, for example, a geometric mark 45. In the example shown in the figure, it is a concentric circle mark with 1 to 4 lines. The second identification marks 40B are respectively attached to the center positions of the side surfaces of all the wheels 13 in accordance with the installation positions of the wheels 13. The first identification mark 40A is attached to the side surface of one wheel 13 among all the wheels 13 of the transport vehicle 10 for each transport vehicle 10. In this configuration, among the two sides of the walking path R, the imaging device 32 provided on the side where only the second identification mark 40B is attached to the wheel 13 does not need to read the two-dimensional barcode 44, as long as they can distinguish each other. Mark 45 for different geometries. Therefore, there is an advantage that a low-speed camera of a lower specification can be used as the photographing device 32, and the cost of the entire system can be reduced.

(2)在上述實施形態中，是以將攝影裝置32設置在行走路徑R(行走軌道6)的兩側邊之構成為例而進行了說明。然而，並不限定於那樣的構成，亦可如例如圖9所示，利用光學系統70，並且將攝影裝置32僅設置於行走路徑R的兩側邊之中的一側。此光學系統70是具備有2條光路(第一光路71及第二光路72)作為連結攝影裝置32與車輪13的光路。第一光路71是直線地連結攝影裝置32及設置有該當攝影裝置32之側的車輪13。第二光路72是藉由複數個(在本例中為3個)鏡子74而以折線狀的形式連結攝影裝置32、及與設置有該攝影裝置32之側為相反側的車輪13。第一光路71與第二光路72會共用攝影裝置32側的一部分，並且在分歧部B分歧為2條光路。並且，於第一光路71與第二光路72的分歧部B上設置有光路切換裝置76。光路切換裝置76可以由例如液晶快門來構成。在這樣的構成中，可以藉由以一定週期來切換伴隨液晶快門的開啟/關閉(On/Off)之光的穿透/不穿透，而利用1台攝影裝置32，對一對車輪13的每一個的側面的圖像資料I進行時間分割並且在同時期得到。在這樣的構成中，即便如例如圖10所示，在左右一對車輪13中使識別標記40的貼附位置有所不同亦可。如此一來，由於可將個體特定部56的讀取區域在左右的一對車輪13明確地區分，所以可以減少攝影裝置32的設置台數，並且抑制起因於該情形而使個體特定之精度降低的狀況。(2) In the above-mentioned embodiment, the configuration in which the imaging devices 32 are provided on both sides of the traveling path R (the traveling rail 6) has been described as an example. However, it is not limited to such a configuration, and as shown in, for example, FIG. This optical system 70 includes two optical paths (a first optical path 71 and a second optical path 72) as optical paths connecting the imaging device 32 and the wheels 13. The first optical path 71 linearly connects the photographing device 32 and the wheel 13 on the side where the photographing device 32 is provided. The second optical path 72 connects the photographing device 32 and the wheel 13 on the opposite side to the side on which the photographing device 32 is installed in a broken line by a plurality of (three in this example) mirrors 74. The first optical path 71 and the second optical path 72 share a part of the imaging device 32 side, and branch into two optical paths at the branch B. In addition, an optical path switching device 76 is provided on the branch B of the first optical path 71 and the second optical path 72. The optical path switching device 76 may be constituted by, for example, a liquid crystal shutter. In such a configuration, it is possible to switch the penetration/non-penetration of light accompanying the opening/closing (On/Off) of the liquid crystal shutter at a certain cycle, and a single camera 32 can be used to control a pair of wheels 13 The image data I of each side is time-divided and obtained at the same time. In such a configuration, even as shown in, for example, FIG. 10, the attachment positions of the identification marks 40 may be different in the pair of left and right wheels 13. In this way, since the reading area of the individual identification part 56 can be clearly distinguished between the left and right wheels 13, the number of imaging devices 32 installed can be reduced, and the reduction in the accuracy of individual identification due to this situation can be suppressed. Status.

(3)在上述實施形態中，是以作為識別標記40而使用有2維條碼41之構成為例而進行了說明。然而，並不限定於那樣的構成，識別標記40亦可為例如1維條碼，亦可為單純的文字列(例如，每個車輪13的識別編號本身)等。(3) In the above-mentioned embodiment, the configuration in which the two-dimensional barcode 41 is used as the identification mark 40 has been described as an example. However, it is not limited to such a configuration, and the identification mark 40 may be, for example, a one-dimensional bar code, or a simple character string (for example, the identification number of each wheel 13 itself), or the like.

(4)在上述實施形態中，是以將攝影裝置32的設置位置設為行走路徑R中的搬送車10的停止位置P，且進一步將該停止位置P設為待機位置W之構成為例而進行了說明，其中該待機位置W是設定在站台間路徑Re中的即將往站台内路徑Ra的分歧點的跟前。然而，並不限定於那樣的構成，亦可將攝影裝置32設置在例如用於進行對搬送車10之其他的檢查的維護位置、對每台搬送車10的個體差異進行補正的校正位置、或搬送車10搭載有電池的情況中的充電位置等。又，不限定於站台間路徑Re，亦可將攝影裝置32設置於設定在站台内路徑Ra的停止位置P。作為站台内路徑Ra的停止位置P，可以例示例如有時可在搬送車10的停止狀態下進行物品A的交接之載置台22的位置。或者，不限定於搬送車10的停止位置P，亦可將攝影裝置32設置在曲線區間，亦可在例如預先設定有慢行區間的情況下，將攝影裝置32設置在該慢行區間。(4) In the above embodiment, the installation position of the imaging device 32 is set as the stop position P of the transport vehicle 10 in the traveling path R, and the stop position P is further set as the standby position W as an example. It has been explained that the standby position W is set in the inter-station route Re before the branch point of the approaching intra-station route Ra. However, it is not limited to such a configuration, and the imaging device 32 may be installed in, for example, a maintenance position for performing other inspections of the transport vehicle 10, a correction position for correcting individual differences for each transport vehicle 10, or The charging position and the like in the case where the transport vehicle 10 is equipped with a battery. In addition, it is not limited to the inter-station path Re, and the imaging device 32 may be installed at the stop position P set in the intra-station path Ra. As the stop position P of the route Ra in the platform, for example, the position of the mounting table 22 where the article A can be delivered in the stopped state of the transport vehicle 10 can be exemplified. Alternatively, it is not limited to the stop position P of the transport vehicle 10, and the imaging device 32 may be installed in a curved section, or, for example, when a slow traveling section is set in advance, the imaging device 32 may be installed in the slow traveling section.

(5)在上述實施形態中，亦可構成為例如上位控制部50根據摩耗檢查的結果來進行車輪13的零件管理。更具體而言，亦可構成為在例如已將某一車輪13的外徑D的推測値判定為在基準直徑以下的情況下，上位控制部50以自動方式進行導向訂購與該車輪13相同型號的車輪等、零件更換的安排。或者，亦可構成為例如上位控制部50根據摩耗檢查的結果來管理各台搬送車10的利用率。更具體而言，亦可構成為在例如已將某一車輪13的外徑D的推測値判定為在基準直徑以下的情況下，上位控制部50會在完成零件更換之前，讓具有該車輪13之搬送車10的利用率降低。(5) In the above-described embodiment, for example, the upper control unit 50 may be configured to perform parts management of the wheel 13 based on the result of the abrasion inspection. More specifically, for example, when the estimated value of the outer diameter D of a certain wheel 13 is determined to be less than the reference diameter, the upper control unit 50 automatically guides and orders the same model as the wheel 13 Arrangements for replacement of wheels, etc. and parts. Alternatively, for example, the upper control unit 50 may be configured to manage the utilization rate of each transport vehicle 10 based on the result of the abrasion inspection. More specifically, for example, when the estimated value of the outer diameter D of a certain wheel 13 has been determined to be less than the reference diameter, the upper control unit 50 may have the wheel 13 before completing the replacement of parts. The utilization rate of the transport vehicle 10 is reduced.

(6)上述實施形態中，是以攝影裝置32與檢查部54之資訊通訊是藉由有線通訊來進行之構成為例而進行了說明。然而，並不限定於那樣的構成，攝影裝置32與檢查部54的資訊通訊亦可藉由無線通訊來進行。(6) In the above-mentioned embodiment, the information communication between the photographing device 32 and the inspection unit 54 is described as an example in which the information communication is carried out by wired communication. However, it is not limited to such a configuration, and the information communication between the imaging device 32 and the inspection unit 54 may be performed by wireless communication.

(7)在上述實施形態中，是以檢查對象的搬送車10為有軌道式的天花板搬送車之構成為例而進行了說明。然而，並不限定於那樣的構成，例如有軌道式的地上搬送車也可以作為檢查系統1的檢查對象。此外，只要能沿著預定的行走路徑行走即可，例如無軌道式的地上搬送車也可以作為檢查系統1的檢查對象。(7) In the above-mentioned embodiment, the description has been given by taking as an example the configuration in which the transport vehicle 10 to be inspected is a rail-mounted ceiling transport vehicle. However, it is not limited to such a configuration. For example, a rail-type ground transport vehicle may be used as the inspection target of the inspection system 1. In addition, as long as it can walk along a predetermined walking path, for example, a trackless ground transport vehicle can also be used as the inspection object of the inspection system 1.

(8)在上述實施形態中，是以物品A為收容半導體基板之容器(FOUP)的構成為例而進行了說明。然而，並不限定於那樣的構成，物品A亦可為例如收容倍縮光罩的小型的倍縮光罩傳送盒(Reticle Pod)，亦可為收容食品或醫藥品等的容器。(8) In the above-mentioned embodiment, the article A is described as an example of the configuration of the container (FOUP) for accommodating the semiconductor substrate. However, it is not limited to such a configuration, and the article A may be, for example, a small-sized Reticle Pod that accommodates a retractable mask, or a container that accommodates food, medicines, and the like.

(9)在上述各實施形態(包含上述之實施形態及其他實施形態，以下相同)中所揭示之構成，只要不產生矛盾，與在其他實施形態所揭示之構成加以組合而應用也是可行的。關於其他構成，本說明書中所揭示之實施形態在各方面都僅是例示，且在不脫離本揭示內容之要旨的範圍內適當地改變是可行的。(9) The configuration disclosed in each of the above-mentioned embodiments (including the above-mentioned embodiment and other embodiments, the same hereinafter), as long as there is no contradiction, it is possible to combine and apply the configuration disclosed in the other embodiments. Regarding other configurations, the embodiments disclosed in this specification are merely examples in every respect, and it is possible to appropriately change them within a range that does not depart from the gist of the present disclosure.

[實施形態之概要] 彙整以上內容可知，較理想的是本揭示之檢查系統具備以下的各個構成。[Summary of Implementation Mode] In summary, it can be seen that the inspection system of the present disclosure preferably has the following configurations.

一種檢查系統，是將具有複數個車輪並且沿著預定的行走路徑行走的搬送車作為對象，來檢查前述車輪的劣化的程度之檢查系統，並具備： 識別標記，是附加於複數個前述車輪的每一個的側面之每個前述車輪各自特有之識別標記； 攝影裝置，從前述行走路徑的側邊，對行走於前述行走路徑的前述搬送車的前述車輪進行攝影，以將該車輪的整體像攝進攝影範圍内；及 檢查部，根據藉由前述攝影裝置得到的前述車輪的側面的圖像資料，檢查前述車輪的摩耗的程度，並一併進行已成為檢查對象的前述車輪的個體特定。An inspection system is an inspection system for inspecting the degree of deterioration of the wheels with a transport vehicle that has a plurality of wheels and runs along a predetermined traveling path, and includes: identification marks attached to the plurality of wheels Each of the aforementioned wheels on the side of each side has its own unique identification mark; a photographing device, from the side of the aforementioned walking path, photographs the aforementioned wheels of the aforementioned transport vehicle walking on the aforementioned walking path, so as to take the overall image of the wheel Into the imaging range; and the inspection unit, based on the image data of the side surface of the wheel obtained by the imaging device, inspects the degree of wear of the wheel, and also performs individual identification of the wheel that has been inspected.

根據此構成，只要以設置在行走路徑的側邊的攝影裝置來對已附加有識別標記的車輪的側面進行攝影，就可以根據所得到的圖像資料，一面進行車輪的個體特定一面檢查該車輪的摩耗的程度。據此，可以有效率地檢查關於各個車輪的摩耗的程度，並且將該結果與該車輪建立關連。又，由於可根據以共通的攝影裝置所攝影的圖像資料，來進行摩耗檢查與個體特定兩方面，所以在那樣的情況下可以謀求系統構成的簡單化。According to this configuration, as long as the imaging device installed on the side of the walking path is used to photograph the side of the wheel to which the identification mark has been attached, it is possible to inspect the wheel while identifying the individual wheel based on the obtained image data. The degree of wear. According to this, it is possible to efficiently check the degree of wear on each wheel, and to correlate the result with the wheel. In addition, since it is possible to perform both abrasion inspection and individual identification based on image data captured by a common imaging device, it is possible to simplify the system configuration in such a case.

較理想的是，作為一態樣，前述檢查部是藉由對前述圖像資料的圖像處理來檢測前述車輪的外徑，而根據該檢測値來檢查前述車輪的摩耗的程度，並且藉由從前述圖像資料之中檢測前述識別標記來進行前述車輪的個體特定。Preferably, as an aspect, the inspection unit detects the outer diameter of the wheel by image processing of the image data, and inspects the degree of wear of the wheel based on the detection value, and by The identification mark is detected from the image data to perform individual identification of the wheel.

根據此構成，可以利用對圖像資料的圖像處理技術、或圖像資料中的特定的標記的讀取技術，來一面進行車輪的個體特定，一面良好地檢查該車輪的摩耗的程度。According to this configuration, it is possible to use the image processing technology for the image data or the reading technology of the specific mark in the image data to perform the individual identification of the wheel and to check the degree of wear of the wheel well.

較理想的是，作為一態樣，前述識別標記包含2維條碼。Preferably, as an aspect, the aforementioned identification mark includes a two-dimensional barcode.

根據此構成，利用不論圖像資料中的傾斜如何都可讀取的2維條碼，即便在搬送車的行走中(車輪在旋轉中)，仍然可以適當地進行車輪的個體特定。According to this configuration, using a two-dimensional barcode that can be read regardless of the inclination of the image data, even when the transport vehicle is traveling (the wheel is rotating), the individual wheel can be appropriately identified.

較理想的是，作為一態樣，而將前述攝影裝置設置在前述行走路徑中的前述搬送車的預定的停止位置。Preferably, as one aspect, the photographing device is installed at a predetermined stop position of the transport vehicle in the traveling path.

根據此構成，可以在搬送車在停止位置上停止，且車輪也是已停止的狀態下，良好地讀取圖像資料中的特定的標記。據此，可以使用比較低成本的攝影裝置、或是提高車輪的個體特定之精度。According to this configuration, it is possible to read a specific mark in the image data well when the transport vehicle is stopped at the stop position and the wheels are also stopped. Accordingly, it is possible to use a relatively low-cost photographing device, or to improve the accuracy of individual identification of wheels.

較理想的是，作為一態樣，更具備控制前述搬送車的動作的搬送控制部，且藉由無線通訊來進行前述搬送控制部與前述搬送車的資訊通訊，並藉由有線通訊來進行前述攝影裝置與前述檢查部的資訊通訊。Preferably, as an aspect, it is further provided with a transport control unit that controls the operation of the transport vehicle, and performs information communication between the transport control unit and the transport vehicle through wireless communication, and performs the aforementioned information through wired communication. Information communication between the camera and the aforementioned inspection department.

根據此構成，可以對沿著行走路徑自如地行走的搬送車，藉由無線通訊而以不論其位置的方式適當地傳送來自搬送控制部的指令。關於攝影裝置，由於基本上是將其設置位置固定在特定位置，所以藉由攝影所得到的圖像資料之往檢查部的資料傳送即使是有線通訊也可以毫無問題地進行。進而，可以藉由實際地利用有線通訊，而在像是無線通訊用的頻帶受限的情況下，為了無線通訊的必要性較高的其他的機器來預先空出頻帶。According to this configuration, it is possible to appropriately transmit a command from the transport control unit by wireless communication regardless of the position of the transport vehicle that travels along the traveling path. Regarding the photographing device, since the installation position is basically fixed at a specific position, the image data obtained by photographing can be transmitted to the inspection section without any problem even if it is wired communication. Furthermore, by actually using wired communication, for example, when the frequency band for wireless communication is limited, the frequency band can be vacated in advance for other devices that require wireless communication.

較理想的是，作為一態樣，前述識別標記是藉由每台前述搬送車各自特有的第一識別標記、及顯示前述搬送車中的每個前述車輪的設置位置的第二識別標記之組合所構成，並將前述第二識別標記於全部的前述車輪的側面因應於該車輪的設置位置而分別附加，且將前述第一識別標記按每台前述搬送車而附加於該搬送車所具有的全部的前述車輪當中的一部分之前述車輪的側面。Preferably, as an aspect, the identification mark is a combination of a first identification mark unique to each of the transport vehicles and a second identification mark that shows the placement position of each of the wheels in the transport vehicle. The second identification mark is attached to the side surfaces of all the wheels in accordance with the placement position of the wheel, and the first identification mark is added to the transport vehicle for each transport vehicle. A part of all the aforementioned wheels is the side surface of the aforementioned wheel.

根據此構成，可以讀取每台搬送車各自特有的第一識別標記，並且讀取顯示各搬送車中的每個車輪的設置位置的第二識別標記，並且組合由其等之中所得到的資訊，藉此適當地進行車輪的個體特定。又，變得可做到例如將可讀取第一識別標記的第1攝影裝置、及可讀取第二識別標記的第2攝影裝置分成兩部分來設置於行走路徑的兩側邊。在這種情況下，藉由使用相較於第1攝影裝置性能較低的攝影裝置來作為第2攝影裝置之作法，相較於在行走路徑的兩側邊都設置高性能的攝影裝置之構成，可以謀求系統整體的低成本化。According to this configuration, it is possible to read the first identification mark unique to each transport vehicle, and to read the second identification mark showing the installation position of each wheel in each transport vehicle, and to combine the obtained Information to appropriately identify individual wheels. In addition, for example, it becomes possible to divide the first imaging device that can read the first identification mark and the second imaging device that can read the second identification mark into two parts and install them on both sides of the walking path. In this case, by using a photographing device with lower performance than the first photographing device as the second photographing device, compared to the configuration of installing high-performance photographing devices on both sides of the walking path , It is possible to reduce the cost of the entire system.

較理想的是，作為一態樣，前述攝影裝置僅設置在前述行走路徑的兩側邊之中的一邊，並且具備： 第一光路，連結前述攝影裝置及設置有該攝影裝置之側的前述車輪； 第二光路，透過複數個鏡子而連結前述攝影裝置、及與設置有該攝影裝置之側為相反側的前述車輪；及 光路切換裝置，設置於前述第一光路與前述第二光路的分歧部， 藉由使用了前述光路切換裝置的時間分割以同時期地得到相對於前述搬送車的行進方向位於兩側之一對前述車輪的每一個的側面之圖像資料。Preferably, as an aspect, the photographing device is provided only on one side of the two sides of the walking path, and is provided with: a first optical path connecting the photographing device and the wheel on the side where the photographing device is installed The second optical path connects the photographing device through a plurality of mirrors and the wheel on the side opposite to the side where the photographing device is installed; and the optical path switching device is arranged at the branch of the first optical path and the second optical path , By using the time division of the optical path switching device to simultaneously obtain the image data of the side surfaces of each of the wheels on one of the two sides with respect to the traveling direction of the transport vehicle.

根據此構成，可以利用使用複數個鏡子與光路切換裝置來建構的光學系統，並以設置於行走路徑的其中一邊的側邊之共通的攝影裝置，來對相對於行進方向位於兩側之一對車輪的每一個的側面進行攝影。據此，相較於像是將2台攝影裝置分成兩部分來設置在行走路徑的兩側邊之構成，可以謀求系統整體的低成本化。According to this configuration, it is possible to use an optical system constructed using a plurality of mirrors and light path switching devices, and to use a common imaging device installed on one side of the walking path to pair one pair located on both sides with respect to the direction of travel. The side of each wheel is photographed. According to this, compared to a configuration in which two imaging devices are divided into two parts and installed on both sides of the walking path, the cost of the entire system can be reduced.

本揭示之檢查系統只要能夠達到上述之各個效果之中的至少1個即可。The inspection system of the present disclosure only needs to achieve at least one of the above-mentioned effects.

1‧‧‧檢查系統2‧‧‧物品搬送設備6‧‧‧行走軌道8‧‧‧引導軌道10‧‧‧搬送車11‧‧‧行走體12‧‧‧車體本體13‧‧‧車輪14‧‧‧導引滾輪14D‧‧‧下部滾輪14U‧‧‧上部滾輪15‧‧‧連結軸16‧‧‧本體罩殼17‧‧‧移載單元21‧‧‧處理裝置22‧‧‧載置台31‧‧‧支撐台32‧‧‧攝影裝置33‧‧‧通訊纜線35‧‧‧支撐構件36‧‧‧光感測器38‧‧‧遮蔽板40‧‧‧識別標記41、44‧‧‧2維條碼40A‧‧‧第一識別標記40B‧‧‧第二識別標記45‧‧‧幾何標記50‧‧‧上位控制部52‧‧‧搬送控制部54‧‧‧檢查部55‧‧‧圖像資料取得部56‧‧‧個體特定部57‧‧‧圖像處理部58‧‧‧判定部59‧‧‧通知部60‧‧‧顯示裝置70‧‧‧光學系統71‧‧‧第一光路72‧‧‧第二光路74‧‧‧鏡子76‧‧‧光路切換裝置A‧‧‧物品B‧‧‧分歧部D‧‧‧外徑E‧‧‧輪廓線P‧‧‧停止位置R‧‧‧行走路徑Ra‧‧‧站台内路徑Re‧‧‧站台間路徑S‧‧‧攝影範圍I‧‧‧圖像資料W‧‧‧待機位置1‧‧‧Inspection system2‧‧‧Item transport equipment6‧‧‧Traveling rail8‧‧‧Guiding rail10‧‧‧Transporting vehicle 11‧‧‧Traveling body12‧‧‧Car body 13‧‧‧Wheels 14 ‧‧‧Guide roller 14D. 31. ‧Two-dimensional barcode 40A‧‧‧First identification mark 40B‧‧‧Second identification mark 45‧‧‧Geometric mark 50 Image data acquisition unit 56‧‧‧Individual identification unit 57‧‧‧Image processing unit 58‧‧‧Determination unit 59‧‧‧Notification unit 60‧‧‧Display device 70‧‧‧Optical system 71‧‧‧First Light path 72‧‧‧Second light path 74‧‧‧Mirror 76‧‧‧Optical path switching device A‧‧‧Item B‧‧‧Branch D‧‧‧Outer diameter E‧‧‧Contour line P‧‧‧Stop position R ‧‧‧Walking path Ra‧‧‧Intra-platform path Re‧‧‧Inter-platform path S‧‧‧Shooting range I‧‧‧Image data W‧‧‧Standby position

圖1是顯示組裝有檢查系統之物品搬送設備的搬送路徑的示意圖。 圖2是天花板搬送車的側面圖。 圖3是在檢查位置上的天花板搬送車的正面圖。 圖4是顯示在搬送路徑的分歧點之天花板搬送車的狀態的平面圖。 圖5是顯示天花板搬送車的各個車輪的側面之情形的示意圖。 圖6是控制系統的方塊圖。 圖7是顯示車輪的摩耗檢查之原理的示意圖。 圖8是顯示其他態樣之天花板搬送車的各個車輪的側面的情形的示意圖。 圖9是其他態樣之檢查系統的示意圖。 圖10是顯示其他態樣之天花板搬送車的各個車輪的側面的情形的示意圖。Fig. 1 is a schematic diagram showing a conveying path of an article conveying device equipped with an inspection system. Fig. 2 is a side view of the ceiling transport vehicle. Fig. 3 is a front view of the ceiling transport vehicle at the inspection position. Fig. 4 is a plan view showing the state of the ceiling transport vehicle at the branch point of the transport path. Fig. 5 is a schematic diagram showing the state of the side surfaces of each wheel of the ceiling transport vehicle. Figure 6 is a block diagram of the control system. Fig. 7 is a schematic diagram showing the principle of wheel wear inspection. Fig. 8 is a schematic diagram showing the state of the side surfaces of each wheel of a ceiling transport vehicle in another aspect. Fig. 9 is a schematic diagram of another aspect of the inspection system. Fig. 10 is a schematic diagram showing the state of the side surface of each wheel of the ceiling transport vehicle of another aspect.

13‧‧‧車輪 13‧‧‧Wheel

40‧‧‧識別標記 40‧‧‧Identification mark

41‧‧‧2維條碼 41‧‧‧2-dimensional barcode

D‧‧‧外徑 D‧‧‧Outer diameter

E‧‧‧輪廓線 E‧‧‧Contour

I‧‧‧圖像資料 I‧‧‧Image data

S‧‧‧待機位置 S‧‧‧Standby position

Claims (6)

一種檢查系統，是將具有複數個車輪並且沿著預定的行走路徑行走的搬送車作為對象，來檢查前述車輪的劣化的程度之檢查系統，並具備以下：識別標記，是附加於複數個前述車輪的每一個的側面之每個前述車輪各自特有的識別標記；及攝影裝置，從前述行走路徑的側邊，對行走於前述行走路徑的前述搬送車的前述車輪進行攝影，以將該車輪的整體像攝進攝影範圍內，該檢查系統具有以下之特徵：具備檢查部，該檢查部是根據藉由前述攝影裝置得到的前述車輪的側面的圖像資料，檢查前述車輪的摩耗的程度，並一併進行已成為檢查對象的前述車輪的個體特定，前述檢查部是藉由對前述圖像資料的圖像處理來檢測前述車輪的外徑，並根據該檢測值來檢查前述車輪的摩耗的程度，並且藉由從前述圖像資料之中檢測前述識別標記，以進行前述車輪的個體特定。 An inspection system is an inspection system for inspecting the degree of deterioration of the wheels with a transport vehicle that has a plurality of wheels and traveling along a predetermined traveling path, and includes the following: an identification mark is attached to the plurality of wheels Each of the side surfaces of each of the aforementioned wheels has its own unique identification mark; and a photographing device, from the side of the aforementioned travel path, photographs the aforementioned wheels of the aforementioned transport vehicle walking on the aforementioned travel path, so as to capture the entirety of the wheel In the imaging range, the inspection system has the following characteristics: it has an inspection unit that inspects the degree of wear of the wheel based on the image data of the side surface of the wheel obtained by the photographing device, and In addition, the individual identification of the wheel that has been inspected is performed. The inspection unit detects the outer diameter of the wheel by image processing on the image data, and checks the degree of wear of the wheel based on the detection value. And by detecting the identification mark from the image data, the individual identification of the wheel is performed. 一種檢查系統，是將具有複數個車輪並且沿著預定的行走路徑行走的搬送車作為對象，來檢查前述車輪的劣化的程度之檢查系統，並具備以下：識別標記，是附加於複數個前述車輪的每一個的側面之每個前述車輪各自特有的識別標記；及攝影裝置，從前述行走路徑的側邊，對行走於前述行走路徑的前述搬送車的前述車輪進行攝影，以將該車輪的 整體像攝進攝影範圍內，該檢查系統具有以下之特徵：具備檢查部，該檢查部是根據藉由前述攝影裝置得到的前述車輪的側面的圖像資料，檢查前述車輪的摩耗的程度，並一併進行已成為檢查對象的前述車輪的個體特定，前述攝影裝置設置於前述行走路徑中的前述搬送車的預定的停止位置。 An inspection system is an inspection system for inspecting the degree of deterioration of the wheels with a transport vehicle that has a plurality of wheels and traveling along a predetermined traveling path, and includes the following: an identification mark is attached to the plurality of wheels Each of the side surfaces of each of the aforementioned wheels has its own unique identification mark; and a photographing device, from the side of the aforementioned walking path, photographs the aforementioned wheels of the aforementioned conveying vehicle walking on the aforementioned walking path, so as to The whole image is taken within the photographing range. The inspection system has the following characteristics: it has an inspection unit that inspects the degree of wear of the wheel based on the image data of the side of the wheel obtained by the photographing device, and The individual identification of the wheel that has been the inspection target is performed together, and the imaging device is installed at a predetermined stop position of the transport vehicle in the traveling path. 一種檢查系統，是將具有複數個車輪並且沿著預定的行走路徑行走的搬送車作為對象，來檢查前述車輪的劣化的程度之檢查系統，並具備以下：識別標記，是附加於複數個前述車輪的每一個的側面之每個前述車輪各自特有的識別標記；及攝影裝置，從前述行走路徑的側邊，對行走於前述行走路徑的前述搬送車的前述車輪進行攝影，以將該車輪的整體像攝進攝影範圍內，該檢查系統具有以下之特徵：具備檢查部，該檢查部是根據藉由前述攝影裝置得到的前述車輪的側面的圖像資料，檢查前述車輪的摩耗的程度，並一併進行已成為檢查對象的前述車輪的個體特定，前述檢查系統更具備控制前述搬送車的動作的搬送控制部，且藉由無線通訊來進行前述搬送控制部與前述搬送車的資訊通訊，並藉由有線通訊來進行前述攝影裝置與前述檢查部的資訊通訊。 An inspection system is an inspection system for inspecting the degree of deterioration of the wheels with a transport vehicle that has a plurality of wheels and traveling along a predetermined traveling path, and includes the following: an identification mark is attached to the plurality of wheels Each of the side surfaces of each of the aforementioned wheels has its own unique identification mark; and a photographing device, from the side of the aforementioned travel path, photographs the aforementioned wheels of the aforementioned transport vehicle walking on the aforementioned travel path, so as to capture the entirety of the wheel In the imaging range, the inspection system has the following characteristics: it has an inspection unit that inspects the degree of wear of the wheel based on the image data of the side surface of the wheel obtained by the photographing device, and In addition, the inspection system is further equipped with a transport control unit that controls the operation of the transport vehicle, and performs information communication between the transport control unit and the transport vehicle through wireless communication. The information communication between the photographing device and the inspection unit is carried out by wired communication. 一種檢查系統，是將具有複數個車輪並且 沿著預定的行走路徑行走的搬送車作為對象，來檢查前述車輪的劣化的程度之檢查系統，並具備以下：識別標記，是附加於複數個前述車輪的每一個的側面之每個前述車輪各自特有的識別標記；及攝影裝置，從前述行走路徑的側邊，對行走於前述行走路徑的前述搬送車的前述車輪進行攝影，以將該車輪的整體像攝進攝影範圍內，該檢查系統具有以下之特徵：具備檢查部，該檢查部是根據藉由前述攝影裝置得到的前述車輪的側面的圖像資料，檢查前述車輪的摩耗的程度，並一併進行已成為檢查對象的前述車輪的個體特定，前述識別標記是藉由每台前述搬送車各自特有的第一識別標記、及顯示前述搬送車中的每個前述車輪的設置位置的第二識別標記之組合所構成，並將前述第二識別標記於全部的前述車輪的側面因應於該車輪的設置位置而分別附加，且將前述第一識別標記按每台前述搬送車而附加於該搬送車所具有的全部的前述車輪當中的一部分之前述車輪的側面。 An inspection system that will have multiple wheels and An inspection system for a transport vehicle that runs along a predetermined traveling path to inspect the degree of deterioration of the aforementioned wheels, and is equipped with the following: an identification mark is attached to each of the plurality of the aforementioned wheels on the side of each of the aforementioned wheels. A unique identification mark; and a photographing device, which photographs the wheel of the transport vehicle walking on the travel path from the side of the travel path, so as to take the overall image of the wheel into the photographing range. The inspection system has The following feature: an inspection unit is provided, which inspects the degree of wear of the wheel based on the image data of the side surface of the wheel obtained by the photographing device, and also performs the individual inspection of the wheel that has been inspected Specifically, the aforementioned identification mark is composed of a combination of a first identification mark unique to each of the transport vehicles and a second identification mark showing the installation position of each of the aforementioned wheels in the transport vehicle, and combines the aforementioned second identification mark Identification marks are attached to the side surfaces of all the wheels in accordance with the installation positions of the wheels, and the first identification mark is attached to some of all the wheels of the transport vehicle for each transport vehicle. The side of the aforementioned wheel. 一種檢查系統，是將具有複數個車輪並且沿著預定的行走路徑行走的搬送車作為對象，來檢查前述車輪的劣化的程度之檢查系統，並具備以下：識別標記，是附加於複數個前述車輪的每一個的側面之每個前述車輪各自特有的識別標記；及攝影裝置，從前述行走路徑的側邊，對行走於前述行 走路徑的前述搬送車的前述車輪進行攝影，以將該車輪的整體像攝進攝影範圍內，該檢查系統具有以下之特徵：具備檢查部，該檢查部是根據藉由前述攝影裝置得到的前述車輪的側面的圖像資料，檢查前述車輪的摩耗的程度，並一併進行已成為檢查對象的前述車輪的個體特定，前述攝影裝置僅設置在前述行走路徑的兩側邊之中的一邊，且前述檢查系統具備：第一光路，連結前述攝影裝置及設置有該攝影裝置之側的前述車輪；第二光路，透過複數個鏡子而連結前述攝影裝置、及與設置有該攝影裝置之側為相反側的前述車輪；及光路切換裝置，設置於前述第一光路與前述第二光路的分歧部，藉由使用了前述光路切換裝置的時間分割以同時期地得到相對於前述搬送車的行進方向位於兩側之一對前述車輪的每一個的側面之圖像資料。 An inspection system is an inspection system for inspecting the degree of deterioration of the wheels with a transport vehicle that has a plurality of wheels and traveling along a predetermined traveling path, and includes the following: an identification mark is attached to the plurality of wheels Each of the side of each of the aforementioned wheels has its own unique identification mark; and the photographing device, from the side of the aforementioned walking path, to walk on the aforementioned row The wheels of the transport vehicle traveling along the path are photographed to capture the overall image of the wheels within the photographing range. The inspection system has the following characteristics: an inspection unit is provided, and the inspection unit is based on the aforementioned imaging device obtained by The image data of the side surface of the wheel is checked for the degree of wear of the wheel, and the individual identification of the wheel that has been the object of the inspection is also performed. The photographing device is only installed on one side of the two sides of the walking path, and The inspection system includes: a first optical path connecting the photographing device and the wheel on the side where the photographing device is installed; a second optical path connecting the photographing device through a plurality of mirrors and being opposite to the side where the photographing device is installed And the optical path switching device is provided at the branch of the first optical path and the second optical path, and by using the time division of the optical path switching device to simultaneously obtain the position relative to the traveling direction of the transport vehicle Image data of the side of each of the aforementioned wheels on one of the two sides. 如請求項1至5中任一項之檢查系統，其中，前述識別標記包含2維條碼。Such as the inspection system of any one of Claims 1 to 5, wherein the aforementioned identification mark includes a two-dimensional barcode.
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