TWI741575B - Pumping system - Google Patents
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- TWI741575B TWI741575B TW109114289A TW109114289A TWI741575B TW I741575 B TWI741575 B TW I741575B TW 109114289 A TW109114289 A TW 109114289A TW 109114289 A TW109114289 A TW 109114289A TW I741575 B TWI741575 B TW I741575B
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Abstract
本發明提供一種抽液系統,包括一基座、至少一助動件、複數個固持件以及一夾具。基座定義一承載面以及一旋轉軸,其中旋轉軸垂直於承載面,且基座可相對於旋轉軸旋轉;助動件配置於承載面上;夾具與承載面相對配置,且基座以及夾具共同定義一容置空間,且容置空間適於容置一儲液桶;固持件活動地連接於基座且相對於基座對稱配置。 The invention provides a liquid pumping system, which includes a base, at least one assisting part, a plurality of holding parts and a clamp. The base defines a bearing surface and a rotation axis, wherein the rotation axis is perpendicular to the bearing surface, and the base can rotate relative to the rotation axis; the assist element is arranged on the bearing surface; the fixture and the bearing surface are arranged oppositely, and the base and the fixture A accommodating space is defined together, and the accommodating space is suitable for accommodating a liquid storage barrel; the holding member is movably connected to the base and is symmetrically arranged with respect to the base.
Description
本發明提供一種抽液系統,尤指一種可輔助儲液桶移動至承載面上特定位置的抽液系統。 The invention provides a liquid pumping system, especially a pumping system that can assist the liquid storage barrel to move to a specific position on a bearing surface.
在半導體及精密電子產業的製程當中,經常需要使用例如研磨液或清潔藥劑等化學液體,以提供平坦化製程或相關製造裝置的清潔用途。這些化學液體在使用後會暫時儲存於化液桶中,並在累積一定容量後透過抽液或人工等方式進行移除。然而,由於裝滿化學殘留液體的儲液桶具有相當大的重量,若直接透過人力將儲液桶移動至抽液專用的承載平台上將會相當吃力;另一方面,目前市面上的承載平台多半為固定型式,一旦儲液桶的桶蓋以及抽液用的夾具的相對位置產生誤差,就必須要在產生偏移的方向上進行人工修正,以將儲液桶移動至能使夾具順利抽液的位置,這也造成了作業上的諸多不便。 In the manufacturing processes of the semiconductor and precision electronics industries, chemical liquids such as polishing fluids or cleaning agents are often used to provide cleaning applications for the planarization process or related manufacturing devices. These chemical liquids will be temporarily stored in the chemical liquid tank after use, and will be removed by pumping or manual methods after accumulating a certain volume. However, because the liquid storage tank filled with chemical residual liquid has a considerable weight, it will be quite difficult to move the liquid storage tank directly to the carrying platform dedicated to pumping liquid by human. On the other hand, the carrying platform currently on the market Mostly it is a fixed type. Once the relative position of the lid of the liquid storage barrel and the fixture for pumping liquid has an error, it must be manually corrected in the direction of the deviation, so that the liquid storage barrel can be moved to enable the fixture to be pumped smoothly. The location of the liquid also caused many inconveniences in the operation.
發明人遂竭其心智悉心研究,進而研發出一種可輔助儲液桶移動至承載面上特定位置的抽液系統,以期達到節省人力以及提高作業便利性的效果。 The inventor then exhausted his mind and painstaking research, and then developed a liquid pumping system that can assist the liquid storage barrel to move to a specific position on the bearing surface, in order to achieve the effects of saving manpower and improving operation convenience.
本發明的第一態樣提供一種抽液系統,包括一基座、至少一助動件、複數個固持件以及一夾具。基座定義一承載面以及一旋轉軸,其中旋轉軸垂直於承載面,且基座可相對於旋轉軸旋轉;助動件配置於承載面上;固持件活動 地連接於基座且相對於基座對稱配置;夾具與承載面相對配置,基座以及夾具共同定義一容置空間,且容置空間適於容置一儲液桶。 The first aspect of the present invention provides a liquid pumping system, which includes a base, at least one assisting member, a plurality of holding members, and a clamp. The base defines a bearing surface and a rotation axis, wherein the rotation axis is perpendicular to the bearing surface, and the base can rotate relative to the rotation axis; the auxiliary member is arranged on the bearing surface; the holding member is movable The ground is connected to the base and is arranged symmetrically with respect to the base; the clamp and the bearing surface are arranged oppositely, the base and the clamp jointly define an accommodating space, and the accommodating space is suitable for accommodating a liquid storage barrel.
另一方面,本發明的第二態樣提供另一種抽液系統,包括一基座、至少一助動件以及複數個固持件。基座定義一承載面以及一旋轉軸,其中旋轉軸垂直於承載面,且基座可相對於旋轉軸旋轉;助動件配置於承載面上;固持件活動地連接於基座且相對於基座對稱配置。 On the other hand, the second aspect of the present invention provides another liquid pumping system, which includes a base, at least one assisting member, and a plurality of holding members. The base defines a bearing surface and a rotation axis, wherein the rotation axis is perpendicular to the bearing surface and the base can rotate relative to the rotation axis; the assisting member is arranged on the bearing surface; the holding member is movably connected to the base and relative to the base. Seat symmetrical configuration.
在一實施例中,抽液系統還包括複數個螺桿,這些螺桿沿基座的徑向配置,且旋轉軸通過平分這些固持件的距離的一中心。這些固持件各包括一中央部以及複數個端部,螺桿連接於基座以及這些固持件的各中央部,其中各中央部與中心的距離小於各端部與中心的距離,各端部上配置有一轉動件,且各轉動件相對於承載面具有一高度差。 In an embodiment, the liquid pumping system further includes a plurality of screws, the screws are arranged along the radial direction of the base, and the rotating shaft passes through a center that bisects the distance of the holding members. Each of these holding parts includes a central part and a plurality of end parts. The screw is connected to the base and each central part of these holding parts. The distance between each central part and the center is smaller than the distance between each end and the center, and each end is arranged There is a rotating part, and each rotating part has a height difference with respect to the bearing surface.
在一實施例中,上述的助動件為單向滾輪、萬向滾輪、輥件或履帶。 In one embodiment, the aforementioned assisting member is a one-way roller, a universal roller, a roller or a crawler.
在一實施例中,抽液系統還包括一限位件,限位件連接於基座以及夾具,且限位件的形狀對應於儲液桶。 In one embodiment, the liquid pumping system further includes a limiting member, which is connected to the base and the clamp, and the shape of the limiting member corresponds to the liquid storage barrel.
在一實施例中,抽液系統還包括一傾斜機構,傾斜機構相對於地面樞接,且基座配置於傾斜機構上。 In an embodiment, the liquid pumping system further includes a tilting mechanism, the tilting mechanism is pivotally connected to the ground, and the base is disposed on the tilting mechanism.
在一實施例中,上述的傾斜機構的一端上形成有一連接部,且基座配置於傾斜機構遠離這端的一部份上。當這端接觸地面時,基座以及傾斜機構與地面夾一角度。 In one embodiment, a connecting portion is formed on one end of the above-mentioned tilting mechanism, and the base is disposed on a part of the tilting mechanism away from this end. When this end touches the ground, the base and the tilt mechanism make an angle with the ground.
在一實施例中,上述的承載面適於承載一儲液桶,且基座還包括一感測單元。當承載面承載儲液桶時,感測單元發生物理形變或產生一電子訊號。 In one embodiment, the above-mentioned carrying surface is suitable for carrying a liquid storage tank, and the base further includes a sensing unit. When the bearing surface carries the liquid storage barrel, the sensing unit is physically deformed or generates an electronic signal.
在一實施例中,抽液系統還包括一限位件,限位件連接於基座,其中承載面適於承載一儲液桶,且限位件的形狀對應於儲液桶。 In an embodiment, the liquid pumping system further includes a limiting member connected to the base, wherein the bearing surface is adapted to carry a liquid storage barrel, and the shape of the limiting member corresponds to the liquid storage barrel.
藉此,本發明的抽液系統可藉由承載面上的助動件輔助儲液桶移動至承載面上,且由於基座可相對於旋轉軸旋轉,因此使用者無需移動到各個方位,可結合旋轉的基座施力將儲液桶移動至特定位置,大幅節省人力以及提高作業的便利性。 Thereby, the liquid pumping system of the present invention can assist the liquid storage barrel to move to the bearing surface by the assisting member on the bearing surface, and since the base can rotate relative to the rotation axis, the user does not need to move to various positions, Combined with the force of the rotating base, the liquid storage tank is moved to a specific position, which greatly saves manpower and improves the convenience of operation.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.
1:抽液系統 1: Pumping system
110:基座 110: Pedestal
112:承載面 112: bearing surface
114:感測單元 114: sensing unit
120、120a、120b:助動件 120, 120a, 120b: auxiliary parts
130:固持件 130: Holder
132:中央部 132: Central
134:端部 134: End
136:轉動件 136: Rotating Parts
140:夾具 140: Fixture
150:限位件 150: limit piece
160:螺桿 160: screw
170:傾斜機構 170: Tilt mechanism
172:連接部 172: Connection
2:儲液桶 2: liquid storage tank
C:中心 C: Center
H:高度差 H: height difference
S:容置空間 S: accommodating space
X:旋轉軸 X: Rotation axis
θ:角度 θ: Angle
圖1為本發明的抽液系統的一實施例與一儲液桶協同作用的示意圖。 Fig. 1 is a schematic diagram of the synergy between an embodiment of the pumping system of the present invention and a liquid storage tank.
圖2為圖1所示的抽液系統的立體示意圖。 Fig. 2 is a three-dimensional schematic diagram of the pumping system shown in Fig. 1.
圖3為圖2所示的抽液系統下方元件的立體示意圖。 Fig. 3 is a three-dimensional schematic diagram of the lower components of the liquid pumping system shown in Fig. 2.
圖4為圖3所示的下方元件的前視示意圖。 Fig. 4 is a schematic front view of the lower component shown in Fig. 3.
圖5為當圖3所示的下方元件當固持件相對於基座展開時的俯視示意圖。 Fig. 5 is a schematic top view of the lower element shown in Fig. 3 when the holder is expanded relative to the base.
圖6為圖5當固持件相對於基座收合且基座旋轉一方位時的俯視示意圖。 Fig. 6 is a schematic top view of Fig. 5 when the holding member is folded relative to the base and the base is rotated to one position.
圖7為本發明的抽液系統的另一實施例的下方元件當固持件相對於基座展開時的俯視示意圖。 Fig. 7 is a schematic top view of the lower element of another embodiment of the liquid pumping system of the present invention when the holder is deployed relative to the base.
圖8為圖7當固持件相對於基座收合且基座旋轉一方位時的俯視示意圖。 Fig. 8 is a schematic top view of Fig. 7 when the holding member is folded relative to the base and the base is rotated to one position.
圖9為本發明的抽液系統的再一實施例的下方元件當固持件相對於基座展開時的俯視示意圖。 Fig. 9 is a schematic top view of the lower element of still another embodiment of the liquid pumping system of the present invention when the holder is deployed relative to the base.
圖10為圖9當固持件相對於基座收合且基座旋轉一方位時的俯視示意圖。 Fig. 10 is a schematic top view of Fig. 9 when the holding member is folded relative to the base and the base is rotated to one position.
圖11為圖3所示的下方元件的側視示意圖。 Fig. 11 is a schematic side view of the lower component shown in Fig. 3.
圖12為圖11所示的下方元件承載儲液桶且傾斜一角度時的示意圖。 Fig. 12 is a schematic diagram when the lower element shown in Fig. 11 carries the liquid storage barrel and is inclined at an angle.
有關本發明之前述及其它技術內容、特點與功效,在以下配合參考圖式之較佳實施例的詳細說明中,將可清楚地呈現。值得一提的是,以下實施例所提到的方向用語,例如:上、下、左、右、前或後等,僅是參考附加圖式的方向。因此,使用的方向用語是用以說明,而非對本發明加以限制。此外,在下列各實施例中,相同或相似的元件將採用相同或相似的標號。 The foregoing and other technical content, features, and effects of the present invention will be clearly presented in the following detailed description of the preferred embodiment with reference to the drawings. It is worth mentioning that the directional terms mentioned in the following embodiments, for example: up, down, left, right, front or back, etc., only refer to the directions of the attached drawings. Therefore, the directional terms used are for illustration, not for limiting the present invention. In addition, in the following embodiments, the same or similar elements will use the same or similar reference numerals.
請參考圖1及圖2,圖1為本發明的抽液系統的一實施例與一儲液桶協同作用的示意圖,圖2為圖1所示的抽液系統的立體示意圖。本實施例的抽液系統1包括一基座110、至少一助動件120以及複數個固持件130,其中基座110定義一承載面112以及一旋轉軸X,旋轉軸X垂直於承載面112,且基座110可相對於旋轉軸X旋轉;助動件120配置於承載面112上;固持件130活動地連接於基座110且相對於基座110對稱配置。較佳地,抽液系統1還包括一夾具140,其中夾具140與承載面112相對配置,且基座110以及夾具140共同定義一容置空間S,且容置空間S適於容置儲液桶2。
Please refer to FIGS. 1 and 2. FIG. 1 is a schematic diagram of the synergy between an embodiment of the pumping system of the present invention and a liquid storage barrel, and FIG. 2 is a three-dimensional schematic diagram of the pumping system shown in FIG. The liquid pumping system 1 of this embodiment includes a
詳細而言,本實施例的基座110為一旋轉平台,可自由地相對於旋轉軸X在順時針或逆時針方向上旋轉,且承載面112適於承載儲液桶2。較佳地,本實施例的抽液系統1還包括一限位件150,且限位件150連接於基座110以及夾
具140,因此可作為基座110以及夾具140彼此之間的連接構件。在本實施例中,限位件150為一弧面擋板,形狀對應於儲液桶2,且基座110樞接於限位件150的底部,故當儲液桶2推上承載面112且不慎出力過大導致儲液桶2位置偏移時,限位件150可限制儲液桶2的位置以避免儲液桶2自基座110上滑落。
In detail, the
以下將具體說明本實施例的抽液系統1如何輔助使用者將儲液桶2移動至基座110上。請參考圖3及圖4,圖3為圖2所示的抽液系統下方元件的立體示意圖,圖4為圖3所示的下方元件的前視示意圖。承上所述,承載面112上配置有至少一助動件120,在本實施例中,助動件120為一維的方向滾輪,且數量為10個,當使用者從基座110的邊緣將儲液桶2的一部份倚靠在承載面112上時,透過助動件120的滾動,可以讓儲液桶2順利的滑移至承載面112上的特定位置(例如是正中央)。此外,由於基座110可相對於旋轉軸X自由旋轉,因此無論使用者欲從哪一個方位將儲液桶2移動至基座110上,均可以在移動前或移動的過程中旋轉基座110而得到正確滾動方向的助動件120輔助而使得搬運的工作變得更加順利。
The following will specifically describe how the liquid pumping system 1 of this embodiment assists the user to move the
值得一提的是,在本實施例中,基座110還包括一感測單元114,配置於承載面112的中央用以偵測裝載有化學殘留液體的儲液桶2的重量,其中感測單元114可以是一般的秤重彈簧,也可以是會產生數位或電子訊號的荷重計、應變規或壓電元件。當承載面112承載儲液桶2時,感測單元114將產生物理形變或產生一電子訊號,使抽液系統1或使用者得知目前儲液桶2的重量,以便進行抽液或卸載儲液桶2等程序。然而,在其它的實施例中,基座110也可以不包括感測單元114,且配置的位置及數量也可以依據儲液桶2的外型等實際需求進行調整,本發明對此不加以限制。
It is worth mentioning that, in this embodiment, the base 110 further includes a
另一方面,為了避免儲液桶2在承載過程中因為基座110旋轉或其它因素自基座110上掉落,固持件130對稱地配置在基座110周圍用以固持儲液桶2。具體而言,本實施例的抽液系統1還包括複數個螺桿160,其中螺桿160的數量對應於固持件130的數量,且沿基座110的徑向配置。更進一步而言,每個固持件130各包括一中央部132以及複數個端部134,其中這些端部134透過對應的中央部132彼此連接,且螺桿160連接於基座110以及這些固持件130的各中央部132。如圖4所示,旋轉軸X通過平分這些固持件130的距離的一中心C,使得螺接於螺桿160上的固持件130以旋轉軸X為中心做遠離或接近的移動。
On the other hand, in order to prevent the
除此之外,各端部134上配置有一轉動件136,其中轉動件136例如是一滾輪或一套筒,相對於承載面112具有一高度差H且樞接於對應的端部134上用以抵接並固持儲液桶2的桶身。詳細而言,如圖4所示,各中央部132與中心C的距離小於各端部134與中心C的距離。藉此,當螺桿160旋轉時,連接於螺桿160的中央部132會先行進入到基座110的底側內部,而仍在基座110外部的端部134上配置的轉動件136會朝徑向內側收緊,並抵接至儲液桶2的桶身。
In addition, each
以下將對固持件130固持儲液桶2的過程做詳細的介紹,請參考圖5及圖6,圖5為當圖3所示的下方元件當固持件相對於基座展開時的俯視示意圖,圖6為圖5當固持件相對於基座收合且基座旋轉一方位時的俯視示意圖。當想要移動儲液桶2時,會先將儲液桶2的一部份倚靠在承載面112上,此時固持件130相對於基座110如圖5所示為展開的狀態,使用者可以啟動螺桿160並帶動靠近儲液桶2倚靠側的固持件130,使得轉動件136抵接在儲液桶2上暫時性地固持,待儲液桶2藉由上述的助動件120以及基座110旋轉移動至預定的位置後,所有的固持件130再一同收緊直到轉動件136均抵接至儲液桶2的桶身上,成為如圖6所示的狀
態,藉此儲液桶2在基座110的各個方位均確保有轉動件136固持,而不會因為外力或其它因素自基座110上掉落,且因為轉動件136可順應儲液桶2的桶身曲線轉動,因此可以降低元件接觸軟質桶身時因壓力所造成的桶身變形。除此之外,當承載的儲液桶2具有不同規格的大小時,也可以藉由固持件130的收緊使儲液桶2的中心移動至預定的位置,因此可以對應不同規格及大小的儲液桶2。
The process of holding the
請參考圖7至圖10,圖7為本發明的抽液系統的另一實施例的下方元件當固持件相對於基座展開時的俯視示意圖,圖8為圖7當固持件相對於基座收合且基座旋轉一方位時的俯視示意圖,圖9為本發明的抽液系統的再一實施例的下方元件當固持件相對於基座展開時的俯視示意圖,圖10為圖9當固持件相對於基座收合且基座旋轉一方位時的俯視示意圖。除了上述的單向滾輪外,在其它的實施例中,助動件120也可以是其他的型式,例如利用履帶輔助移動的助動件120a(如圖7及圖8所示),或是利用萬向滾輪輔助移動的助動件120b(如圖9及圖10所示),又或者是利用長條形輥件鋪置在承載面112上的助動件(未繪示),甚至可以是上述型式的助動件搭配組合使用,本發明對此並不加以限制。
Please refer to FIGS. 7-10. FIG. 7 is a schematic top view of the lower element of another embodiment of the pumping system of the present invention when the holder is expanded relative to the base, and FIG. 8 is FIG. 7 when the holder is relative to the base. The top view schematic view when the base is folded and the base rotates to one position. FIG. 9 is a top view view of the lower element of another embodiment of the pumping system of the present invention when the holder is expanded relative to the base. FIG. 10 is the top view of FIG. 9 when it is held A schematic top view when the piece is folded relative to the base and the base rotates in one position. In addition to the one-way rollers mentioned above, in other embodiments, the assisting
請參考圖11及圖12,圖11為圖3所示的下方元件的側視示意圖,圖12為圖11所示的下方元件承載儲液桶且傾斜一角度時的示意圖。當抽液系統1上方的夾具140夾取桶蓋並且對儲液桶2抽液至一定程度時,桶內的殘餘液體會減少而使得探入儲液桶2內的抽取設備抽取不易。為了解決此問題,本實施例的抽液系統1還包括一傾斜機構170,其中傾斜機構170相對於地面樞接,且基座110配置於傾斜機構170上。
Please refer to FIGS. 11 and 12. FIG. 11 is a schematic side view of the lower component shown in FIG. 3, and FIG. 12 is a schematic diagram of the lower component shown in FIG. When the
詳細而言,如圖11所示,傾斜機構170的一端上形成有一連接部172,用以連接下壓傾斜機構170的支撐桿(未繪示),且基座110配置於傾斜機構
170遠離連接部172一端的一部份上。當在抽液過程中,抽液系統1或使用者透過例如上述的感測單元114得知儲液桶2內的化學殘留液體少於一定比例時,使用者可以將連接於連接部172的支撐桿下壓,使得傾斜機構170樞轉,從而讓連接部172的一端向下位移並接觸地面。當連接部172的一端接觸地面時,基座110、傾斜機構170以及承載於基座110上的儲液桶2的底面與地面夾一角度θ,藉此使得儲液桶2內的殘留液體能集中於儲液桶2底部的一區,有利於抽液系統1將殘留液體完全抽盡。經實際測試,當角度θ為5-10度的範圍時,能有效地讓抽液系統1抽盡殘留液體,且不會因為傾斜角度過大而使得桶身翻覆。
In detail, as shown in FIG. 11, a connecting
本發明在上文中已以較佳實施例揭露,然熟習本項技術者應理解的是,上述實施例僅用於描繪本發明,而不應解讀為限制本發明之範圍。且應注意的是,舉凡與上述實施例等效之變化與置換,均應設為涵蓋於本發明之範疇內。因此,本發明之保護範圍當以申請專利範圍所界定者為準。 The present invention has been disclosed in preferred embodiments above, but those skilled in the art should understand that the above-mentioned embodiments are only used to describe the present invention and should not be construed as limiting the scope of the present invention. And it should be noted that all changes and substitutions equivalent to the above-mentioned embodiments should be included in the scope of the present invention. Therefore, the protection scope of the present invention should be defined by the scope of the patent application.
1:抽液系統 1: Pumping system
110:基座 110: Pedestal
112:承載面 112: bearing surface
120:助動件 120: helper
130:固持件 130: Holder
140:夾具 140: Fixture
150:限位件 150: limit piece
170:傾斜機構 170: Tilt mechanism
Claims (10)
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TW109114289A TWI741575B (en) | 2020-04-29 | 2020-04-29 | Pumping system |
JP2021001069U JP3232269U (en) | 2020-04-29 | 2021-03-26 | Liquid absorption system |
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TW109114289A TWI741575B (en) | 2020-04-29 | 2020-04-29 | Pumping system |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201127737A (en) * | 2010-02-05 | 2011-08-16 | yao-zhang Liu | Liquid storage barrel holder structure |
CN208393395U (en) * | 2018-06-01 | 2019-01-18 | 河南豫德钻石科技有限公司 | Micro mist bucket carrier |
TWM588020U (en) * | 2019-06-28 | 2019-12-21 | 亞泰半導體設備股份有限公司 | Rotary bucket mixing device and rotating disk assembly |
TWM598293U (en) * | 2020-04-29 | 2020-07-11 | 亞泰半導體設備股份有限公司 | Liquid drawing system |
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2020
- 2020-04-29 TW TW109114289A patent/TWI741575B/en active
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- 2021-03-26 JP JP2021001069U patent/JP3232269U/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201127737A (en) * | 2010-02-05 | 2011-08-16 | yao-zhang Liu | Liquid storage barrel holder structure |
CN208393395U (en) * | 2018-06-01 | 2019-01-18 | 河南豫德钻石科技有限公司 | Micro mist bucket carrier |
TWM588020U (en) * | 2019-06-28 | 2019-12-21 | 亞泰半導體設備股份有限公司 | Rotary bucket mixing device and rotating disk assembly |
TWM598293U (en) * | 2020-04-29 | 2020-07-11 | 亞泰半導體設備股份有限公司 | Liquid drawing system |
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