TWI739712B - 生物晶片測試系統 - Google Patents
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Abstract
一種生物晶片測試系統包含一承載台、一注液裝置、一探針卡以及一測試器。承載台用以承載一生物晶片,其包含至少一生物場效電晶體以及與生物場效電晶體電性連接之一閘極導電接點、一汲極導電接點以及一源極導電接點。注液裝置供應一待測液體至生物晶片之一檢測區。探針卡包含多個探針,其用以與閘極導電接點、汲極導電接點以及源極導電接點選擇性接觸,其中與閘極導電接點接觸之探針未接觸待測液體。測試器量測生物場效電晶體之一電性訊號的變化。上述生物晶片測試系統無需頻繁更換閘極電極。
Description
本發明是有關一種晶片測試系統,特別是一種生物晶片之測試系統。
生物晶片(biochip)可利用電學及/或電化學等特性的變化來檢測生物或環境物質。生物場效電晶體(biological field-effect transistor,BioFET)是生物晶片之重要元件之一。當檢測目標物與生物場效電晶體之閘極或固定於閘極上之接受器結合時,生物場效電晶體之汲極電流會因閘極電壓產生改變,並變化量依檢測目標物的鍵結種類以及數量而有所不同,進而評估檢測目標物的種類及/或數量。
與一般半導體晶片相同,生物晶片在製程中或製作完成後需經過完整的測試以剔除不合格品。但與一般半導體晶片不同的是,生物晶片的檢測樣品大多為液體,因此生物晶片的測試過程需要在生物晶片的檢測區注入適當的液體進行測試。請參照圖1,生物晶片的習知測試方式是在生物晶片100之檢測區注入待測液體L,並以探針21、22分別接觸電性連接生物場效電晶體之源極以及汲極之導電接點101、102,以及以閘極電極23與待測液體L接觸。測試時經由閘極電極23提供閘極電壓,並量測生物場效電晶體之汲極電流。由於閘極電極23與待測液體L長時間接觸可能造成測試誤差,因此,多次測試之後即需更換閘極電極23以維持測試的穩定性。閘極電極23大多是由銀(Ag)或氯化銀(AgCl)組成,因此頻繁更換閘極電極23導致生物晶片的測試成本無法有效降低。
有鑑於此,如何降低生物晶片之測試成本便是目前極需努力的目標。
本發明提供一種生物晶片測試系統,其是以供應閘極電壓之探針與電性連接至生物場效電晶體之閘極結構之導電接點接觸進行測試,以避免探針與待測液體接觸,進而降低需頻繁更換閘極電極所產生的測試成本。
本發明一實施例之生物晶片測試系統包含一承載台、一注液裝置、一探針卡以及一測試器。承載台用以承載一生物晶片或一晶圓,其包含至少一生物晶片,其中生物晶片包含至少一檢測區以及一導電接點區,每一檢測區包含至少一生物場效電晶體,以及導電接點區包含與生物場效電晶體電性連接之一閘極導電接點、一汲極導電接點以及一源極導電接點。注液裝置供應一待測液體至生物晶片之檢測區以及自檢測區移除待測液體。探針卡包含多個探針,用以與導電接點區內之閘極導電接點、汲極導電接點以及源極導電接點選擇性接觸,其中與閘極導電接點接觸之探針未接觸待測液體。測試器與探針卡電性連接,用以供應一電壓至生物場效電晶體以及量測生物場效電晶體之一電性訊號的變化。
以下藉由具體實施例配合所附的圖式詳加說明,當更容易瞭解本發明之目的、技術內容、特點及其所達成之功效。
以下將詳述本發明之各實施例,並配合圖式作為例示。除了這些詳細說明之外,本發明亦可廣泛地施行於其它的實施例中,任何所述實施例的輕易替代、修改、等效變化都包含在本發明之範圍內,並以申請專利範圍為準。在說明書的描述中,為了使讀者對本發明有較完整的瞭解,提供了許多特定細節;然而,本發明可能在省略部分或全部特定細節的前提下,仍可實施。此外,眾所周知的步驟或元件並未描述於細節中,以避免對本發明形成不必要之限制。圖式中相同或類似之元件將以相同或類似符號來表示。特別注意的是,圖式僅為示意之用,並非代表元件實際之尺寸或數量,有些細節可能未完全繪出,以求圖式之簡潔。
請參照圖2以及圖3,本發明之一實施例之生物晶片測試系統包含一承載台31、一注液裝置32、一探針卡33以及一測試器34。承載台31用以承載一生物晶片11或包含至少一生物晶片11之一晶圓10。生物晶片11包含至少一檢測區111以及一導電接點區112。每一檢測區111包含至少一生物場效電晶體,其包含閘極結構、汲極以及源極。導電接點區112則設置多個導電接點1121,其包含與生物場效電晶體之閘極結構電性連接之一閘極導電接點、與生物場效電晶體之汲極區電性連接之一汲極導電接點以及與生物場效電晶體之源極區電性連接之一源極導電接點。可以理解的是,生物晶片可依據特定的檢測目標物而對閘極結構作相對應的處理。舉例而言,生物晶片可用於核酸雜交測定、聚合酶活性測定、核酸及蛋白質定序、免疫測定(例如抗體-抗原結合測定、ELISA)、用於檢測基因甲基化模式之亞硫酸氫鹽甲基化(bisulfite methylation)測定、蛋白質測定、蛋白質結合測定(例如蛋白質-蛋白質、蛋白質-核酸、蛋白質-配體結合測定)、酶測定、酶偶聯測定、酶抑制劑及活化劑篩選等,但不限於此。
接續上述說明,注液裝置32供應一待測液體至生物晶片11之檢測區111以及自檢測區111移除待測液體。舉例而言,注液裝置32包含一儲液槽321、一第一液體供應單元323以及一液體排出單元324。第一液體供應單元323與儲液槽321連接,並供應待測液體至儲液槽321。儲液槽321具有至少一出液口322,出液口322可依測試時之操作,選擇性抵靠於生物晶片11之檢測區111,儲存於儲液槽321內之待測液體即可接觸生物晶片11之檢測區111而不會溢流至導電接點區112。液體排出單元324同樣與儲液槽321連接。液體排出單元324可在測試完成後抽出儲液槽321內之液體。
接續上述說明,探針卡33包含多個探針331,其用以與相對應之閘極導電接點、汲極導電接點以及源極導電接點選擇性接觸,以利後續測試器34進行測試。於一實施例中,探針卡33包含一開孔333,其對應於儲液槽321之出液口322,使出液口322可經由開孔333穿過探針卡33而抵靠於生物晶片11之檢測區111。
接續上述說明,測試器34與探針卡33電性連接。舉例而言,測試器34可經由D型連接埠或其它適當之連接埠332與探針卡33電性連接。測試器34可透過探針卡33之多個探針331供應一電壓至生物晶片內之生物場效電晶體以及量測生物場效電晶體之一電性訊號的變化。舉例而言,測試器34可提供一閘極電極至生物場效電晶體之閘極,當檢測目標物與生物場效電晶體之閘極或固定於閘極上之接受器結合時,生物場效電晶體之汲極電流將因生物場效電晶體之通道特性改變而產生變化,測試器34即量測汲極電流的變化,並據以判斷生物晶片是否正常。或者,測試器34提供一偏壓至生物場效電晶體之源極以及汲極,並量測使生物場效電晶體之通道反轉之閘極電壓,並據以判斷生物晶片是否正常。
依據上述結構,生物場效電晶體之閘極導電接點是設置於生物晶片11之導電接點區112內,且待測液體不會溢流至導電接點區112,因此,測試時,用以與閘極導電接點接觸之探針不會與待測液體接觸,如此可提升測試之穩定度且無需頻繁地更換閘極電極。
請再參照圖1,於一實施例中,生物晶片測試系統更包含一升降裝置35,其與承載台31連接。升降裝置35可藉由控制承載台31的高度來調整承載台31以及探針卡33間之相對位置,並使探針卡33之探針311與生物晶片11之多個導電接點1121接觸以進行測試,或是使探針311與生物晶片11分離以更換待測試晶片。於圖1所示之實施例中,升降裝置35是與承載台31連接調整承載台31以及探針卡33間之距離,但不限於此,於一實施例中,升降裝置35亦可與探針卡33連接,並藉由控制探針卡33的高度來調整承載台31以及探針卡33間之距離。
請參照圖4,以說明本發明另一實施例之生物晶片測試系統。圖4所示之實施例中,與圖2所示之實施例相同之元件以相同的符號標示,且其功能與圖2相同,在此不再贅述。相較於圖2所示之實施例,圖4所示之注液裝置32更包含一第二液體供應單元325,其與儲液槽321連接。第二液體供應單元325可供應一清洗液體至儲液槽321,以在測試完成後對生物晶片11之檢測區111進行清洗,或者在測試之前清洗儲液槽321。
請再參照圖4,於一實施例中,注液裝置32更包含一緩衝件326,其設置於儲液槽321之出液口322之頂端。緩衝件326可在抵靠於生物晶片11之檢測區111時產生緩衝件的作用,以避免儲液槽321之出液口322對生物晶片11造成損壞,且緩衝件326可增加出液口322以及生物晶片11間之氣密度,以避免待測液體溢流出檢測區111。
綜合上述,本發明之生物晶片測試系統是以探針卡之探針與電性連接至生物場效電晶體之閘極結構之導電接點接觸來供應閘極電壓並進行測試,以避免探針與待測液體接觸,如此可避免閘極電極與待測液體接觸所造成的測試誤差,且可降低更換閘極電極所產生的測試成本。
以上所述之實施例僅是為說明本發明之技術思想及特點,其目的在使熟習此項技藝之人士能夠瞭解本發明之內容並據以實施,當不能以之限定本發明之專利範圍,即大凡依本發明所揭示之精神所作之均等變化或修飾,仍應涵蓋在本發明之專利範圍內。
10:晶圓
11:生物晶片
111:檢測區
112:導電接點區
1121:導電接點
100:生物晶片
101、102:導電接點
21、22:探針
23:閘極電極
31:承載台
32:注液裝置
321:儲液槽
322:出液口
323:第一液體供應單元
324:液體排出單元
325:第二液體供應單元
326:緩衝件
33:探針卡
331:探針
332:連接埠
333:開孔
34:測試器
35:升降裝置
L:待測液體
圖1為一示意圖,顯示習知之生物晶片之測試方法。
圖2為一示意圖,顯示本發明一實施例之生物晶片測試系統。
圖3為一示意圖,顯示一生物晶片之俯視結構。
圖4為一示意圖,顯示本發明另一實施例之生物晶片測試系統。
10:晶圓
31:承載台
32:注液裝置
321:儲液槽
322:出液口
323:第一液體供應單元
324:液體排出單元
33:探針卡
331:探針
332:連接埠
333:開孔
34:測試器
35:升降裝置
Claims (5)
- 一種生物晶片測試系統,包含: 一承載台,用以承載一生物晶片或一晶圓,其包含至少一該生物晶片,其中該生物晶片包含至少一檢測區以及一導電接點區,每一該檢測區包含至少一生物場效電晶體,以及該導電接點區包含與該生物場效電晶體電性連接之一閘極導電接點、一汲極導電接點以及一源極導電接點; 一注液裝置,其供應一待測液體至該生物晶片之該檢測區以及自該檢測區移除該待測液體; 一探針卡,其包含多個探針,用以與該導電接點區內之該閘極導電接點、該汲極導電接點以及該源極導電接點選擇性接觸,其中與該閘極導電接點接觸之探針未接觸該待測液體;以及 一測試器,其與該探針卡電性連接,用以供應一電壓至該生物場效電晶體以及量測該生物場效電晶體之一電性訊號的變化。
- 如請求項1所述之生物晶片測試系統,更包含: 一升降裝置,其與該承載台以及該探針卡至少其中之一連接,以調整該承載台以及該探針卡間之相對位置,使該多個探針與該閘極導電接點、該汲極導電接點以及該源極導電接點選擇性接觸。
- 如請求項1所述之生物晶片測試系統,其中該注液裝置包含: 一儲液槽,其用以儲存該待測液體,其中該儲液槽具有一出液口,用以選擇性抵靠於該生物晶片之該檢測區,使該待測液體接觸該檢測區; 一第一液體供應單元,其與該儲液槽連接,用以供應該待測液體至該儲液槽;以及 一液體排出單元,其與該儲液槽連接,用以抽出該儲液槽內之液體。
- 如請求項3所述之生物晶片測試系統,其中該注液裝置更包含: 一第二液體供應單元,其與該儲液槽連接,用以供應一清洗液體至該儲液槽。
- 如請求項3所述之生物晶片測試系統,其中該注液裝置更包含: 一緩衝件,其設置於該儲液槽之該出液口之頂端,用以抵靠於該生物晶片之該檢測區。
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