TWI737508B - Gripper for transferring wafer pod - Google Patents

Gripper for transferring wafer pod Download PDF

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Publication number
TWI737508B
TWI737508B TW109134042A TW109134042A TWI737508B TW I737508 B TWI737508 B TW I737508B TW 109134042 A TW109134042 A TW 109134042A TW 109134042 A TW109134042 A TW 109134042A TW I737508 B TWI737508 B TW I737508B
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Taiwan
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wafer cassette
exhaust device
gear set
carrier
cassette handling
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TW109134042A
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Chinese (zh)
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TW202215593A (en
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陳宏銘
練懿洲
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力晶積成電子製造股份有限公司
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Priority to TW109134042A priority Critical patent/TWI737508B/en
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Publication of TWI737508B publication Critical patent/TWI737508B/en
Publication of TW202215593A publication Critical patent/TW202215593A/en

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Abstract

A gripper for transferring a wafer box including a carrier, a driver, a gear set, connecting elements, fingers, a pumping exhaust device, and a suction cup is provided. The drive is disposed on the carrier. The gear set is disposed on the carrier and connected to the driver. The connecting elements are connected to the gear set. The finger is fixed on the connecting element. The pumping exhaust device is disposed on the carrier. The pumping exhaust device includes a piston connected to the gear set. The suction cup is disposed on the carrier and has a hole. The hole is communicated with the pumping exhaust device.

Description

晶圓盒搬運夾具Wafer box handling fixture

本發明是有關於一種搬運夾具，且特別是有關於一種晶圓盒搬運夾具。The present invention relates to a handling fixture, and more particularly to a wafer cassette handling fixture.

在晶圓盒的搬運裝置中，搬運夾具的夾爪為消耗品。在進行晶圓盒的搬運時，夾爪斷裂會導致晶圓盒摔落，而造成產品損失。此外，搬運裝置在升降運行時所產生的振動會加速耗損夾爪的使用壽命。因此，如何提升夾爪的使用壽命為目前亟待解決的課題。In the wafer cassette transport device, the jaws of the transport jig are consumables. When the wafer cassette is being transported, the broken jaws will cause the wafer cassette to fall, resulting in product loss. In addition, the vibration generated during the lifting operation of the handling device will accelerate the service life of the jaws. Therefore, how to improve the service life of the clamping jaws is an urgent issue to be solved at present.

本發明提供一種晶圓盒搬運夾具，其可有效地提升夾爪的使用壽命。The present invention provides a wafer cassette handling clamp, which can effectively increase the service life of clamping jaws.

本發明提出一種晶圓盒搬運夾具，包括載具、驅動器、齒輪組、多個連接件、多個夾爪、抽排氣裝置與吸盤。驅動器設置在載具上。齒輪組設置在載具上，且連接至驅動器。連接件連接至齒輪組。夾爪固定在連接件上。抽排氣裝置設置在載具上。抽排氣裝置包括連接至齒輪組的活塞。吸盤設置在載具上，且具有孔洞。孔洞連通至抽排氣裝置。The present invention provides a wafer cassette handling fixture, which includes a carrier, a driver, a gear set, a plurality of connecting pieces, a plurality of clamping jaws, an exhaust device and a suction cup. The drive is set on the vehicle. The gear set is arranged on the carrier and connected to the driver. The connecting piece is connected to the gear set. The clamping jaw is fixed on the connecting piece. The exhaust device is arranged on the carrier. The exhaust device includes a piston connected to the gear set. The suction cup is arranged on the carrier and has holes. The hole is connected to the exhaust device.

依照本發明的一實施例所述，在上述晶圓盒搬運夾具中，驅動器例如是馬達。According to an embodiment of the present invention, in the above-mentioned cassette transport fixture, the driver is, for example, a motor.

依照本發明的一實施例所述，在上述晶圓盒搬運夾具中，齒輪組可包括齒輪、螺桿與齒條中的至少一者。According to an embodiment of the present invention, in the above-mentioned cassette handling fixture, the gear set may include at least one of a gear, a screw, and a rack.

依照本發明的一實施例所述，在上述晶圓盒搬運夾具中，螺桿例如是滾珠螺桿(ball screw)或導螺桿(lead screw)。According to an embodiment of the present invention, in the above-mentioned wafer cassette handling fixture, the screw is, for example, a ball screw or a lead screw.

依照本發明的一實施例所述，在上述晶圓盒搬運夾具中，連接件例如是滑塊。According to an embodiment of the present invention, in the above-mentioned cassette handling fixture, the connecting member is, for example, a slider.

依照本發明的一實施例所述，在上述晶圓盒搬運夾具中，抽排氣裝置例如是氣泵或針筒。According to an embodiment of the present invention, in the above-mentioned cassette handling fixture, the exhaust device is, for example, an air pump or a syringe.

依照本發明的一實施例所述，在上述晶圓盒搬運夾具中，抽排氣裝置更可包括套筒。活塞位在套筒中。According to an embodiment of the present invention, in the above-mentioned wafer cassette handling fixture, the exhaust device may further include a sleeve. The piston is located in the sleeve.

依照本發明的一實施例所述，在上述晶圓盒搬運夾具中，吸盤的數量可為多個。According to an embodiment of the present invention, in the above-mentioned cassette handling fixture, the number of suction cups may be multiple.

依照本發明的一實施例所述，在上述晶圓盒搬運夾具中，多個吸盤可採對稱的方式排列。According to an embodiment of the present invention, in the above-mentioned cassette handling fixture, a plurality of suction cups may be arranged in a symmetrical manner.

依照本發明的一實施例所述，在上述晶圓盒搬運夾具中，更可包括氣體管路。氣體管路連接於抽排氣裝置與活塞之間。According to an embodiment of the present invention, the above-mentioned cassette transport fixture may further include a gas pipeline. The gas pipeline is connected between the exhaust device and the piston.

基於上述，在本發明所提出的晶圓盒搬運夾具中，驅動器可經由齒輪組同時驅動夾爪與抽排氣裝置的活塞，且藉由活塞的作動可控制吸盤的吸附與脫附。如此一來，在進行晶圓盒的搬運時，除了可藉由夾爪夾固晶圓盒之外，更可藉由吸盤吸附晶圓盒，藉此可增加晶圓盒搬運夾具的受力點，以分擔夾爪的受力，進而增加夾爪的使用壽命。此外，由於吸盤可緩衝移動晶圓盒時所產生的振動，因此可增加夾爪的使用壽命。Based on the above, in the wafer cassette transport fixture proposed in the present invention, the driver can simultaneously drive the clamping jaws and the piston of the exhaust device through the gear set, and the suction and desorption of the suction cup can be controlled by the action of the piston. In this way, when carrying the wafer cassette, in addition to clamping the wafer cassette by the clamping jaws, the wafer cassette can also be sucked by the suction cup, thereby increasing the force point of the wafer cassette handling fixture , In order to share the force of the jaws, thereby increasing the service life of the jaws. In addition, since the suction cup can buffer the vibration generated when the wafer cassette is moved, the service life of the clamping jaws can be increased.

為讓本發明的上述特徵和優點能更明顯易懂，下文特舉實施例，並配合所附圖式作詳細說明如下。In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.

圖1A為根據本發明一實施例的晶圓盒搬運夾具在夾爪夾住晶圓盒時的側視示意圖。圖1B為根據本發明一實施例的晶圓盒搬運夾具在夾爪離開晶圓盒時的側視示意圖。在圖1A與圖1B中，以示意性的方塊來表示驅動器與齒輪組及其配置關係，以利於進行說明，但本發明並不以此為限。此外，在圖1A與圖1B中，省略圖2A與圖2B中的部分構件，以清楚地描述圖1A與圖1B中的構件之間的配置關係。圖3為根據本發明另一實施例的吸盤與凸緣的示意圖。FIG. 1A is a schematic side view of a wafer cassette handling fixture according to an embodiment of the present invention when the clamping jaws clamp the wafer cassette. FIG. 1B is a schematic side view of the wafer cassette handling fixture according to an embodiment of the present invention when the clamping jaws leave the wafer cassette. In FIG. 1A and FIG. 1B, schematic blocks are used to represent the driver, the gear set and the configuration relationship thereof for the convenience of description, but the present invention is not limited thereto. In addition, in FIGS. 1A and 1B, some components in FIGS. 2A and 2B are omitted to clearly describe the configuration relationship between the components in FIGS. 1A and 1B. Fig. 3 is a schematic diagram of a suction cup and a flange according to another embodiment of the present invention.

圖2A為根據本發明一實施例的晶圓盒搬運夾具在夾爪關閉時的仰視示意圖。圖2B為根據本發明一實施例的晶圓盒搬運夾具在夾爪開啟時的仰視示意圖。在圖2A與圖2B中，省略圖1A與圖1B中的殼體，以清楚地描述圖2A與圖2B中的構件之間的配置關係。2A is a schematic bottom view of a wafer cassette handling fixture according to an embodiment of the present invention when the clamping jaws are closed. 2B is a schematic bottom view of the wafer cassette handling fixture when the clamping jaws are opened according to an embodiment of the present invention. In FIGS. 2A and 2B, the housings in FIGS. 1A and 1B are omitted to clearly describe the configuration relationship between the components in FIGS. 2A and 2B.

請參照圖1A、圖1B、圖2A與圖2B，晶圓盒搬運夾具100包括載具102、驅動器104、齒輪組106、多個連接件108、多個夾爪110、抽排氣裝置112與吸盤114。晶圓盒搬運夾具100可用於搬運晶圓盒200。舉例來說，晶圓盒搬運夾具100可夾住晶圓盒200的凸緣(亦可稱為「法蘭(flange)」)202，以進行運送。晶圓盒200例如是前開式晶圓傳送盒(Front-Opening Unified Pod，FOUP)或前開式晶圓運輸盒(Front-Opening Shipping Box，FOSB)。晶圓盒搬運夾具100例如是用於搬運晶圓的高空搬運車的搬運夾具。1A, 1B, 2A and 2B, the wafer cassette handling fixture 100 includes a carrier 102, a driver 104, a gear set 106, a plurality of connectors 108, a plurality of clamping jaws 110, an exhaust device 112, and吸盘114. The cassette transport jig 100 can be used to transport the cassette 200. For example, the wafer cassette handling fixture 100 can clamp the flange (also referred to as a “flange”) 202 of the wafer cassette 200 for transportation. The wafer cassette 200 is, for example, a front-opening unified pod (FOUP) or a front-opening shipping box (FOSB). The cassette transport jig 100 is, for example, a transport jig of an aerial transport vehicle for transporting wafers.

載具102可包括載台102a。載台102a的材料例如是金屬。載台102a可為板狀或框狀。此外，載具102更可包括殼體102b。殼體102b連接於載台102a。殼體102b的材料例如是塑膠。The carrier 102 may include a carrier 102a. The material of the stage 102a is, for example, metal. The carrier 102a may be plate-shaped or frame-shaped. In addition, the carrier 102 may further include a housing 102b. The housing 102b is connected to the carrier 102a. The material of the housing 102b is, for example, plastic.

驅動器104設置在載具102上。舉例來說，驅動器104可設置在載台102a上(圖2A與圖2B)。驅動器104例如是馬達。驅動器104可經由齒輪組106驅動連接件108而帶動夾爪110。另外，驅動器104可經由齒輪組106驅動抽排氣裝置112的活塞112a，藉此可同時驅動夾爪110與抽排氣裝置112的活塞112a。The driver 104 is arranged on the carrier 102. For example, the driver 104 may be disposed on the carrier 102a (FIG. 2A and FIG. 2B). The driver 104 is, for example, a motor. The driver 104 can drive the connecting member 108 via the gear set 106 to drive the clamping jaw 110. In addition, the driver 104 can drive the piston 112 a of the exhaust device 112 via the gear set 106, thereby driving the clamping jaw 110 and the piston 112 a of the exhaust device 112 at the same time.

齒輪組106設置在載具102上，且連接至驅動器104。舉例來說，齒輪組106可設置在載台102a上(圖2A與圖2B)，且驅動器104的驅動器軸心116可直接連接至齒輪組106，藉此驅動器104可驅動齒輪組106，但本發明並不以此為限。驅動器軸心116例如是馬達軸心。齒輪組106可包括齒輪、螺桿與齒條中的至少一者。舉例來說，齒輪組106可包括齒輪106a、齒輪106b、齒輪106c、螺桿106d與齒條106e，但本發明並不以此為限。齒輪106a連接於驅動器104的驅動器軸心116。齒輪106b與齒輪106c連接於齒輪106a。螺桿106d連接於齒輪106b。螺桿106d例如是滾珠螺桿或導螺桿。齒條106e連接於齒輪106c。The gear set 106 is disposed on the carrier 102 and connected to the driver 104. For example, the gear set 106 can be arranged on the carrier 102a (FIGS. 2A and 2B), and the driver axis 116 of the driver 104 can be directly connected to the gear set 106, so that the driver 104 can drive the gear set 106, but this The invention is not limited to this. The driver shaft 116 is, for example, a motor shaft. The gear set 106 may include at least one of a gear, a screw, and a rack. For example, the gear set 106 may include a gear 106a, a gear 106b, a gear 106c, a screw 106d, and a rack 106e, but the invention is not limited thereto. The gear 106 a is connected to the driver shaft 116 of the driver 104. The gear 106b and the gear 106c are connected to the gear 106a. The screw 106d is connected to the gear 106b. The screw 106d is, for example, a ball screw or a lead screw. The rack 106e is connected to the gear 106c.

連接件108連接至齒輪組106。舉例來說，連接件108可連接於齒輪組106中的螺桿106d。連接件108例如是滑塊。連接件108的材料例如是金屬。連接件108的數量可依據夾爪110的數量來決定。在本實施例中，連接件108的數量是以兩個為例，但本發明並不以此為限。在其他實施例中，連接件108的數量亦可為三個以上。The connecting member 108 is connected to the gear set 106. For example, the connecting member 108 may be connected to the screw 106d in the gear set 106. The connecting member 108 is, for example, a slider. The material of the connecting member 108 is, for example, metal. The number of connecting members 108 can be determined according to the number of clamping jaws 110. In this embodiment, the number of connecting members 108 is two as an example, but the present invention is not limited to this. In other embodiments, the number of the connecting members 108 can also be more than three.

夾爪110固定在連接件108上。舉例來說，夾爪110可藉由固定件(如，螺絲(未示出))固定在連接件108上，但本發明並不以此為限。夾爪110的材料例如是塑膠或金屬。在本實施例中，夾爪110的數量是以兩個為例，但本發明並不以此為限。在其他實施例中，夾爪110的數量亦可為三個以上。在一些實施例中，夾爪110與連接件108可為各自獨立的構件，但本發明並不以此為限。在另一些實施例中，夾爪110與連接件108可為一體成型，且可省略用以將夾爪110固定在連接件108上的固定件(如，螺絲)。The clamping jaw 110 is fixed on the connecting piece 108. For example, the clamping jaw 110 can be fixed on the connecting member 108 by a fixing member (eg, a screw (not shown)), but the present invention is not limited to this. The material of the clamping jaw 110 is, for example, plastic or metal. In this embodiment, the number of clamping jaws 110 is two as an example, but the present invention is not limited to this. In other embodiments, the number of clamping jaws 110 can also be three or more. In some embodiments, the clamping jaw 110 and the connecting member 108 may be separate components, but the present invention is not limited to this. In other embodiments, the clamping jaw 110 and the connecting member 108 may be integrally formed, and a fixing member (such as a screw) for fixing the clamping jaw 110 to the connecting member 108 may be omitted.

抽排氣裝置112設置在載具102上。舉例來說，抽排氣裝置112可設置在載台102a上(圖2A與圖2B)。抽排氣裝置112包括連接至齒輪組106的活塞112a。舉例來說，活塞112a可連接至齒條106e。此外，抽排氣裝置112更可包括套筒112b。活塞112a位在套筒112b中。抽排氣裝置112例如是氣泵或針筒。The exhaust device 112 is provided on the carrier 102. For example, the exhaust device 112 may be provided on the carrier 102a (FIG. 2A and FIG. 2B). The exhaust device 112 includes a piston 112 a connected to the gear set 106. For example, the piston 112a may be connected to the rack 106e. In addition, the exhaust device 112 may further include a sleeve 112b. The piston 112a is located in the sleeve 112b. The exhaust device 112 is, for example, an air pump or a syringe.

吸盤114設置在載具102上，且具有孔洞114a。舉例來說，吸盤114可設置在殼體102b上(圖1A與圖1B)。孔洞114a連通至抽排氣裝置112。吸盤114的數量可為一個以上。在本實施例中，吸盤114的數量是以一個為例，但本發明並不以此為限。吸盤114的材料例如是塑膠、橡膠或矽膠等。在另一些實施例中，如圖3所示，吸盤114的數量可為多個(如，4個)。此外，多個吸盤114可採對稱的方式排列，以使得吸盤114可平均地對晶圓盒200的凸緣202進行吸附，但本發明並不以此為限。在另一些實施例中，多個吸盤114亦可採不對稱的方式排列。The suction cup 114 is disposed on the carrier 102 and has a hole 114a. For example, the suction cup 114 may be provided on the housing 102b (FIG. 1A and FIG. 1B). The hole 114a is connected to the exhaust device 112. The number of the suction cup 114 may be more than one. In this embodiment, the number of the suction cup 114 is one as an example, but the invention is not limited to this. The material of the suction cup 114 is, for example, plastic, rubber, or silicone. In other embodiments, as shown in FIG. 3, the number of suction cups 114 may be more than one (for example, four). In addition, the plurality of suction cups 114 can be arranged in a symmetrical manner, so that the suction cups 114 can evenly suck the flange 202 of the wafer cassette 200, but the present invention is not limited to this. In other embodiments, the plurality of suction cups 114 may also be arranged in an asymmetric manner.

此外，晶圓盒搬運夾具100更可包括氣體管路118。氣體管路118連接於抽排氣裝置112與吸盤114的孔洞114a之間，藉此可將孔洞114a連通至抽排氣裝置112。氣體管路118的材料例如是塑膠、橡膠或矽膠等。In addition, the cassette handling fixture 100 may further include a gas pipeline 118. The gas pipeline 118 is connected between the exhaust device 112 and the hole 114 a of the suction cup 114, so that the hole 114 a can be connected to the exhaust device 112. The material of the gas pipeline 118 is, for example, plastic, rubber, or silicone.

以下，藉由圖1A與圖2A來說明在夾爪110夾住晶圓盒200時，晶圓盒搬運夾具100的作動機制。請參照圖1A與圖2A，在夾爪110夾住晶圓盒200時，驅動器104會經由驅動器軸心116與齒輪組106驅動連接件108而帶動夾爪110，且會經由齒輪組106同時驅動抽排氣裝置112的活塞112a。藉此，可使得齒輪組106、連接件108、夾爪110與活塞112a沿著圖1A與圖2A中的箭頭方向轉動或移動。如此一來，夾爪110可呈現關閉狀態，以夾住晶圓盒200的凸緣202。此外，藉由抽排氣裝置112的活塞112a的作動方式，可經由氣體管路118從吸盤114的孔洞114a進行抽氣，而使得吸盤114吸附晶圓盒200的凸緣202。Hereinafter, the action mechanism of the cassette transport jig 100 when the clamping jaws 110 clamp the cassette 200 will be described with reference to FIGS. 1A and 2A. 1A and 2A, when the clamping jaws 110 clamp the wafer cassette 200, the driver 104 drives the clamping jaws 110 via the drive shaft 116 and the gear set 106 to drive the connecting member 108, and drives the clamping jaws 110 simultaneously via the gear set 106 The piston 112a of the exhaust device 112 is exhausted. Thereby, the gear set 106, the connecting member 108, the clamping jaw 110 and the piston 112a can be rotated or moved along the arrow direction in FIG. 1A and FIG. 2A. In this way, the clamping jaw 110 can be in a closed state to clamp the flange 202 of the wafer cassette 200. In addition, by the action of the piston 112 a of the exhaust device 112, air can be drawn from the hole 114 a of the suction cup 114 through the gas pipe 118, so that the suction cup 114 can adsorb the flange 202 of the wafer cassette 200.

另外，藉由圖1B與圖2B來說明在夾爪110離開晶圓盒200時，晶圓盒搬運夾具100的作動機制。請參照圖1B與圖2B，在夾爪110離開晶圓盒200時，驅動器104會經由驅動器軸心116與齒輪組106驅動連接件108而帶動夾爪110，且會經由齒輪組106同時驅動抽排氣裝置112的活塞112a。藉此，可使得齒輪組106、連接件108、夾爪110與活塞112a沿著圖1B與圖2B中的箭頭方向轉動或移動。如此一來，夾爪110可呈開啟狀態，以離開晶圓盒200的凸緣202。此外，藉由抽排氣裝置112的活塞112a的作動方式，可經由氣體管路118從吸盤114的孔洞114a進行排氣，而使得吸盤114脫附晶圓盒200的凸緣202。In addition, with reference to FIGS. 1B and 2B, the action mechanism of the cassette transport jig 100 when the clamping jaw 110 leaves the cassette 200 will be described. 1B and 2B, when the clamping jaw 110 leaves the wafer cassette 200, the driver 104 drives the clamping jaw 110 via the drive shaft 116 and the gear set 106 to drive the connecting member 108, and simultaneously drives the clamping jaw 110 via the gear set 106 Piston 112a of exhaust device 112. Thereby, the gear set 106, the connecting member 108, the clamping jaw 110 and the piston 112a can be rotated or moved along the arrow direction in FIG. 1B and FIG. 2B. In this way, the clamping jaw 110 can be opened to leave the flange 202 of the wafer cassette 200. In addition, by the action of the piston 112 a of the exhaust device 112, exhaust can be exhausted from the hole 114 a of the suction cup 114 via the gas pipe 118, so that the suction cup 114 is detached from the flange 202 of the wafer cassette 200.

基於上述實施例可知，在晶圓盒搬運夾具100中，驅動器104可經由齒輪組106同時驅動夾爪110與抽排氣裝置112的活塞112a，且藉由活塞112a的作動可控制吸盤114的吸附與脫附。如此一來，在進行晶圓盒200的搬運時，除了可藉由夾爪110夾固晶圓盒200之外，更可藉由吸盤114吸附晶圓盒200，藉此可增加晶圓盒搬運夾具100的受力點，以分擔夾爪110的受力，進而增加夾爪110的使用壽命。此外，由於吸盤114可緩衝移動晶圓盒200時所產生的振動，因此可增加夾爪110的使用壽命。Based on the above-mentioned embodiment, it can be seen that in the wafer cassette handling fixture 100, the driver 104 can simultaneously drive the gripper 110 and the piston 112a of the exhaust device 112 through the gear set 106, and the action of the piston 112a can control the suction of the suction cup 114 And desorption. In this way, when the wafer cassette 200 is transported, in addition to clamping the wafer cassette 200 by the clamping jaws 110, the wafer cassette 200 can also be sucked by the suction cup 114, thereby increasing the wafer cassette transportation. The force point of the clamp 100 is used to share the force of the clamping jaw 110, thereby increasing the service life of the clamping jaw 110. In addition, since the suction cup 114 can buffer the vibration generated when the wafer cassette 200 is moved, the service life of the clamping jaw 110 can be increased.

綜上所述，在晶圓盒搬運夾具中，由於吸盤可分擔夾爪的受力且可緩衝移動晶圓盒時所產生的振動，因此有效地提升夾爪的使用壽命。In summary, in the wafer cassette handling fixture, since the suction cup can share the force of the clamping jaws and can buffer the vibration generated when the cassette is moved, the service life of the clamping jaws is effectively improved.

雖然本發明已以實施例揭露如上，然其並非用以限定本發明，任何所屬技術領域中具有通常知識者，在不脫離本發明的精神和範圍內，當可作些許的更動與潤飾，故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the relevant technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be subject to those defined by the attached patent application scope.

100:晶圓盒搬運夾具 102:載具 102a:載台 102b:殼體 104:驅動器 106:齒輪組 106a, 106b, 106c:齒輪 106d:螺桿 106e:齒條 108:連接件 110:夾爪 112:抽排氣裝置 112a:活塞 112b:套筒 114:吸盤 114a:孔洞 116:驅動器軸心 118:氣體管路 200:晶圓盒 202:凸緣 100: Wafer cassette handling fixture 102: Vehicle 102a: Stage 102b: shell 104: drive 106: gear set 106a, 106b, 106c: gears 106d: screw 106e: rack 108: connector 110: Gripper 112: Exhaust device 112a: Piston 112b: sleeve 114: Suction Cup 114a: Hole 116: Drive axis 118: Gas pipeline 200: Wafer box 202: flange

圖1A為根據本發明一實施例的晶圓盒搬運夾具在夾爪夾住晶圓盒時的側視示意圖。 圖1B為根據本發明一實施例的晶圓盒搬運夾具在夾爪離開晶圓盒時的側視示意圖。 圖2A為根據本發明一實施例的晶圓盒搬運夾具在夾爪關閉時的仰視示意圖。 圖2B為根據本發明一實施例的晶圓盒搬運夾具在夾爪開啟時的仰視示意圖。 圖3為根據本發明另一實施例的吸盤與凸緣的示意圖。 FIG. 1A is a schematic side view of a wafer cassette handling fixture according to an embodiment of the present invention when the clamping jaws clamp the wafer cassette. FIG. 1B is a schematic side view of the wafer cassette handling fixture according to an embodiment of the present invention when the clamping jaws leave the wafer cassette. 2A is a schematic bottom view of a wafer cassette handling fixture according to an embodiment of the present invention when the clamping jaws are closed. 2B is a schematic bottom view of the wafer cassette handling fixture when the clamping jaws are opened according to an embodiment of the present invention. Fig. 3 is a schematic diagram of a suction cup and a flange according to another embodiment of the present invention.

100:晶圓盒搬運夾具 100: Wafer cassette handling fixture

102:載具 102: Vehicle

102a:載台 102a: Stage

102b:殼體 102b: shell

104:驅動器 104: drive

106:齒輪組 106: gear set

108:連接件 108: connector

110:夾爪 110: Gripper

112:抽排氣裝置 112: Exhaust device

112a:活塞 112a: Piston

112b:套筒 112b: sleeve

114:吸盤 114: Suction Cup

114a:孔洞 114a: Hole

116:驅動器軸心 116: Drive axis

118:氣體管路 118: Gas pipeline

200:晶圓盒 200: Wafer box

202:凸緣 202: flange

Claims (10)

一種晶圓盒搬運夾具，包括： 載具； 驅動器，設置在所述載具上； 齒輪組，設置在所述載具上，且連接至所述驅動器； 多個連接件，連接至所述齒輪組； 多個夾爪，其中所述夾爪固定在所述連接件上； 抽排氣裝置，設置在所述載具上，且包括連接至所述齒輪組的活塞；以及 吸盤，設置在所述載具上，且具有孔洞，其中所述孔洞連通至所述抽排氣裝置。 A wafer cassette handling fixture, including: vehicle; The driver is arranged on the carrier; A gear set arranged on the carrier and connected to the driver; A plurality of connecting pieces connected to the gear set; A plurality of clamping jaws, wherein the clamping jaws are fixed on the connecting piece; An exhaust device, which is provided on the carrier and includes a piston connected to the gear set; and The suction cup is arranged on the carrier and has a hole, wherein the hole is connected to the exhaust device. 如請求項1所述的晶圓盒搬運夾具，其中所述驅動器包括馬達。The cassette handling jig according to claim 1, wherein the driver includes a motor. 如請求項1所述的晶圓盒搬運夾具，其中所述齒輪組包括齒輪、螺桿與齒條中的至少一者。The wafer cassette handling fixture according to claim 1, wherein the gear set includes at least one of a gear, a screw, and a rack. 如請求項3所述的晶圓盒搬運夾具，其中所述螺桿包括滾珠螺桿或導螺桿。The wafer cassette handling jig according to claim 3, wherein the screw includes a ball screw or a lead screw. 如請求項1所述的晶圓盒搬運夾具，其中所述連接件包括滑塊。The wafer cassette handling jig according to claim 1, wherein the connecting member includes a slider. 如請求項1所述的晶圓盒搬運夾具，其中所述抽排氣裝置包括氣泵或針筒。The wafer cassette handling fixture according to claim 1, wherein the exhaust device includes an air pump or a syringe. 如請求項1所述的晶圓盒搬運夾具，其中所述抽排氣裝置更包括： 套筒，其中所述活塞位在所述套筒中。 The wafer cassette handling fixture according to claim 1, wherein the exhaust device further includes: The sleeve, wherein the piston is located in the sleeve. 如請求項1所述的晶圓盒搬運夾具，其中所述吸盤的數量為多個。The wafer cassette handling jig according to claim 1, wherein the number of the suction cups is multiple. 如請求項8所述的晶圓盒搬運夾具，其中多個所述吸盤採對稱的方式排列。The wafer cassette handling jig according to claim 8, wherein a plurality of the suction cups are arranged in a symmetrical manner. 如請求項1所述的晶圓盒搬運夾具，更包括： 氣體管路，連接於所述抽排氣裝置與所述吸盤的所述孔洞之間。 The wafer cassette handling fixture as described in claim 1, further including: A gas pipeline is connected between the exhaust device and the hole of the suction cup.
TW109134042A 2020-09-30 2020-09-30 Gripper for transferring wafer pod TWI737508B (en)

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