TWI727524B - Multi-dimensional vibration grinding cavity - Google Patents

Multi-dimensional vibration grinding cavity Download PDF

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TWI727524B
TWI727524B TW108143557A TW108143557A TWI727524B TW I727524 B TWI727524 B TW I727524B TW 108143557 A TW108143557 A TW 108143557A TW 108143557 A TW108143557 A TW 108143557A TW I727524 B TWI727524 B TW I727524B
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cavity
grinding
vibration
ultrasonic vibration
dimensional
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TW202120190A (en
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林柏伸
劉明瑋
陳志鵬
任國光
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國家中山科學研究院
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Abstract

本發明係提供一種多維震動研磨腔體，透過多維超音波震動源的振幅功率以及頻率控制，使震動介質在保有原先微小震動的特性時，可在研磨液體介質所在的腔體內形成更多方向/維度的巨觀流(移)動現象，增進研磨效率。 The present invention provides a multi-dimensional vibration grinding cavity. Through the amplitude power and frequency control of the multi-dimensional ultrasonic vibration source, the vibration medium can form more directions in the cavity where the grinding liquid medium is located while maintaining the characteristics of the original small vibration. The macroscopic flow (movement) phenomenon of dimensions improves the grinding efficiency.

Description

多維震動研磨腔體 Multi-dimensional vibration grinding cavity

本發明係與震動研磨技術有關，特別係指一種可用於積層製造工件的複雜表面及複雜流路的表面處理之多維震動研磨腔體。 The present invention is related to vibration grinding technology, and particularly refers to a multi-dimensional vibration grinding cavity that can be used for surface treatment of complex surfaces and complex flow paths of laminated manufacturing workpieces.

為讓各式加工工件表面粗糙度符合使用需求，目前有許多設備與技術可進行表面處理作業，例如：噴砂機、超音波研磨機、流體研磨機、震動研磨機...等，讓工件因製造程序時產生的不平整表面，可經由各種研磨技術獲得較佳的表面粗糙度。在加工前因工件表面粗糙度高呈現霧面狀態，經過研磨處理後，明顯降低表面粗糙度呈現光亮表面，精細的表面粗糙度可達工件使用要求。 In order to make the surface roughness of all kinds of processed workpieces meet the requirements of use, there are many equipment and technologies available for surface treatment, such as sandblasting machines, ultrasonic grinders, fluid grinders, vibration grinders... etc. The uneven surface produced during the manufacturing process can be used to obtain better surface roughness through various grinding techniques. Before processing, the surface roughness of the workpiece is high and presents a matte state. After grinding treatment, the surface roughness is obviously reduced and the surface is bright, and the fine surface roughness can meet the requirements of the workpiece.

在眾多表面研磨設備，震動研磨機是常用的方法之一。震動研磨機主要架構有一腔體，在腔體外部設有震動源，而腔體內部放置震動介質(磨料-可為固體或液體)及待研磨工件，開啟震動源後，利用震動磨料與待研磨工件，讓兩者之間產生微小震動的相對位置移動，造成兩者之間彼此磨擦，使待處理件表面凸起之材料被移除，進而達到待處理件表面研磨之效果。 Among many surface grinding equipment, vibration grinding machine is one of the commonly used methods. The main structure of the vibratory grinder is a cavity with a vibration source outside the cavity, and a vibrating medium (abrasive material-solid or liquid) and the workpiece to be ground are placed in the cavity. After the vibration source is turned on, the vibrating abrasive is used to be ground. The workpiece is moved to the relative position that produces a small vibration between the two, causing the two to rub against each other, so that the protruding material on the surface of the workpiece to be processed is removed, and the effect of grinding the surface of the workpiece to be processed is achieved.

市售震動研磨機多半以一顆馬達做為震動源，設置於震動腔體下方，並以震動調整裝置調整振幅大小，此種架構所構成之震動研磨機其腔內磨料震動模態為將磨材朝向圓心方向翻攪，腔內磨料形成單一固定流態，因此磨材與待研磨工件僅能產生單一方向產生磨擦，需待工件因震動轉向後，才得以進行另一方向或另一角度的研磨，但由於工件轉向方向與幅度受介質流動方向與工件重心等條件影響，可能導致某一角度或方向無法被有效研磨，故此一架構下能改善整體研磨的效率較有限。 Most of the commercially available vibration grinders use a motor as the vibration source, which is placed under the vibration cavity, and the vibration adjustment device is used to adjust the amplitude. The vibration mode of the abrasive in the cavity of the vibration grinder composed of this structure is the grinding The material is turned towards the center of the circle, and the abrasive in the cavity forms a single fixed flow state. Therefore, the abrasive material and the workpiece to be ground can only generate friction in a single direction. After the workpiece is turned due to vibration, it can be moved in another direction or another angle. Grinding, but because the turning direction and amplitude of the workpiece are affected by the medium flow direction and the center of gravity of the workpiece, it may result in a certain angle or direction that cannot be effectively ground. Therefore, the efficiency of improving the overall grinding under this structure is limited.

此外，由於單一流態磨材運動方向固定，一旦需研磨工件為具備複雜表面時，研磨時間會拉長，甚至因為單一方向流態的磨材難以精準到達具彎角的深層表面，導致某些位置表面無法被有效研磨，降低研磨作業的成效。 In addition, because the direction of movement of the single-fluid abrasive material is fixed, once the workpiece to be polished has a complex surface, the grinding time will be prolonged. Even because the single-directional fluid abrasive material is difficult to accurately reach the deep surface with corners, some The location surface cannot be effectively ground, which reduces the effectiveness of the grinding operation.

另外，以單一馬達做為震動源所形成介質巨觀流(移)動，由於馬達震動頻率不高，僅能產生巨觀流動方向的研磨行為，無法讓磨材本體產生微幅震動，使研磨效能較為受限。 In addition, the macro-flow (movement) of the medium formed by a single motor as the vibration source, because the motor vibration frequency is not high, can only produce the grinding behavior in the macro-flow direction, and cannot make the grinding material body produce slight vibrations to make the grinding The performance is more limited.

為解決先前技術之缺點，並因應積層製造技術所產生的複雜表面及複雜流路的困難表面處理議題，本發明提供一個比傳統設備具更具效能之震動研磨設備。本發明係提供一種多維震動研磨腔體，透過多維超音波震動源的振幅功 率以及頻率控制，使震動介質在保有原先微小震動的特性時，可在研磨液體介質所在的腔體內形成更多方向/維度的巨觀流(移)動現象，增進液體研磨效率。 In order to solve the shortcomings of the prior art and cope with the difficult surface treatment issues of complex surfaces and complicated flow paths generated by the multilayer manufacturing technology, the present invention provides a vibrating polishing equipment that is more efficient than traditional equipment. The present invention provides a multi-dimensional vibration grinding cavity, which transmits the amplitude power of a multi-dimensional ultrasonic vibration source. Rate and frequency control enable the vibrating medium to form more directional/dimensional macro-flow (movement) phenomena in the cavity where the grinding liquid medium is located while maintaining the characteristics of the original micro-vibration, thereby improving the liquid grinding efficiency.

本發明係提供一種多維震動研磨腔體，該多維震動研磨腔體係包括：一圓筒形腔體，係用於盛裝具磨料之研磨液體；至少四超音波震動源，係平均環繞設置於該圓筒形腔體側壁，該些超音波震動源向該圓筒形腔體內部發出震波，該些超音波震動源發出之震波方向與其設置位置之該側壁切線平面間具有一夾角，該夾角範圍為15°~45°，該些超音波震動源發出之震波使該圓筒形腔體內之研磨液體呈現迴旋式的流態；一轉盤，係設置於該圓筒形腔體底部內側，該轉盤之旋轉方向與該些超音波震動源發出之震波方向相配合，加強該圓筒形腔體內之研磨液體的迴旋流動效果。 The present invention provides a multi-dimensional vibrating grinding cavity. The multi-dimensional vibrating grinding cavity system includes: a cylindrical cavity for containing grinding liquid with abrasive; at least four ultrasonic vibration sources are arranged around the cylinder on average The side wall of the shaped cavity, the ultrasonic vibration sources emit shock waves into the cylindrical cavity, and the direction of the shock waves emitted by the ultrasonic vibration sources and the tangent plane of the side wall at the position where they are set have an included angle, and the included angle range is 15 °~45°, the shock waves emitted by the ultrasonic vibration sources make the grinding liquid in the cylindrical cavity present a swirling flow state; a turntable is arranged inside the bottom of the cylindrical cavity, and the turntable rotates The direction is matched with the direction of the shock waves emitted by the ultrasonic vibration sources to enhance the whirling flow effect of the grinding liquid in the cylindrical cavity.

本發明係提供一種多維震動研磨腔體之另一實施例，該另一實施例之多維震動研磨腔體係包括：一方形腔體，係用於盛裝具磨料之研磨液體；至少四超音波震動源，係各自設置於該方形腔體之四面側壁、不在各側壁面之中軸上，該些超音波震動源向該方形腔體內部發出震波，使該方形腔體內之研磨液體呈現迴旋式的流態；一轉盤，係設置於該方形腔體底部內側，該轉盤之旋轉方向與該些超音波震動源發出之震波方向相配合，加強該方形腔體內之研磨液體的迴旋流動效果。 The present invention provides another embodiment of a multi-dimensional vibrating grinding cavity. The multi-dimensional vibrating grinding cavity system of the other embodiment includes: a square cavity for containing grinding liquid with abrasives; at least four ultrasonic vibration sources , Which are respectively arranged on the four side walls of the square cavity, not on the central axis of each side wall, the ultrasonic vibration sources emit shock waves into the square cavity, so that the grinding liquid in the square cavity presents a swirling flow state ; A turntable is set inside the bottom of the square cavity, the rotation direction of the turntable matches the direction of the shock waves emitted by the ultrasonic vibration sources to enhance the swirling flow effect of the grinding liquid in the square cavity.

本發明之一實施例中，該些超音波震動源之震動頻率為10KHz~50KHz，並可於震動研磨過程中改變各自超音波震動源之震動頻率與振幅，以適應不同工件與不同研磨介質之作業需求。 In an embodiment of the present invention, the vibration frequency of the ultrasonic vibration sources is 10KHz~50KHz, and the vibration frequency and amplitude of each ultrasonic vibration source can be changed during the vibration grinding process, so as to adapt to different workpieces and different grinding media. Job requirements.

本發明之一實施例中，其中更包括：一以上輔助超音波震動源，該輔助超音波震動源係設置於該圓筒形腔體或該方形腔體底部。 In an embodiment of the present invention, it further includes: one or more auxiliary ultrasonic vibration sources, and the auxiliary ultrasonic vibration sources are arranged at the bottom of the cylindrical cavity or the square cavity.

本發明之一實施例中，該輔助超音波震動源之震動頻率為10KHz~50KHz。 In an embodiment of the present invention, the vibration frequency of the auxiliary ultrasonic vibration source is 10KHz-50KHz.

本發明之一實施例中，該方形腔體係可替換為具有四邊以上之多邊形腔體。 In an embodiment of the present invention, the square cavity system can be replaced with a polygonal cavity with more than four sides.

以上之概述與接下來的詳細說明及附圖，皆是為了能進一步說明本發明達到預定目的所採取的方式、手段及功效。而有關本發明的其他目的及優點，將在後續的說明及圖示中加以闡述。 The above summary, the following detailed description and the accompanying drawings are all intended to further illustrate the methods, means and effects adopted by the present invention to achieve the intended purpose. The other objectives and advantages of the present invention will be described in the following description and drawings.

11‧‧‧方形腔體 11‧‧‧Square cavity

12、22‧‧‧超音波震動源 12, 22‧‧‧Ultrasonic vibration source

13、23‧‧‧轉盤 13, 23‧‧‧Turntable

14、24‧‧‧輔助超音波震動源 14, 24‧‧‧Auxiliary ultrasonic vibration source

21‧‧‧圓筒形腔體 21‧‧‧Cylindrical cavity

圖1至圖4係為本發明之多維震動研磨腔體第一實施例示意圖。 1 to 4 are schematic diagrams of the first embodiment of the multi-dimensional vibration grinding cavity of the present invention.

圖5至圖7係為本發明之多維震動研磨腔體第二實施例示意圖。 5 to 7 are schematic diagrams of the second embodiment of the multi-dimensional vibration grinding cavity of the present invention.

以下係藉由特定的具體實例說明本發明之實施方式，熟悉此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之其他優點與功效。 The following is a specific example to illustrate the implementation of the present invention. Those familiar with the art can easily understand the other advantages and effects of the present invention from the content disclosed in this specification.

圖1~4係為本發明之多維震動研磨腔體第一實施例示意圖，請參閱圖1A，該第一實施例係包括：一方形腔體11，係用於盛裝具磨料之研磨液體；至少四超音波震動源12，係各自設置於該腔體11之四面側壁、不在各側壁面之中軸上，該些超音波震動源12向該方形腔體11內部發出震波；一轉盤13，係設置於該方形腔體11底部內側。 Figures 1 to 4 are schematic diagrams of the first embodiment of the multi-dimensional vibrating grinding cavity of the present invention. Please refer to Fig. 1A. The first embodiment includes: a square cavity 11 for holding grinding liquid with abrasives; at least Four ultrasonic vibration sources 12 are respectively arranged on the four side walls of the cavity 11, not on the central axis of each side wall surface. The ultrasonic vibration sources 12 emit shock waves into the square cavity 11; a turntable 13 is arranged Inside the bottom of the square cavity 11.

請參閱圖2，本發明之第一實施例中，該至少四超音波震動源12發出的震波會引導該方形腔體11內部的研磨液體流動、產生迴旋渦流，使研磨液體中的磨料介質可以更深入放置在該方形腔體11內部的待研磨工件(圖未示)的複雜表面，增進研磨效果。該轉盤13之旋轉方向係可與該些超音波震動源12發出之震波方向相配合，加強該方形腔體11內之研磨液體的迴旋流動效果。該超音波震動源12的數量、功率、震波頻率可依使用者需求自行變化，數量以4的倍數為主，震波(震動)頻率為10KHz~50KHz。 Please refer to FIG. 2, in the first embodiment of the present invention, the shock waves emitted by the at least four ultrasonic vibration sources 12 will guide the grinding liquid inside the square cavity 11 to flow and generate a swirling vortex, so that the abrasive medium in the grinding liquid can be The complex surface of the workpiece (not shown in the figure) to be ground placed in the square cavity 11 further improves the grinding effect. The rotation direction of the turntable 13 can be matched with the direction of the shock waves emitted by the ultrasonic vibration sources 12 to enhance the whirling flow effect of the grinding liquid in the square cavity 11. The number, power, and frequency of the ultrasonic vibration source 12 can be changed according to the needs of the user. The number is mainly a multiple of 4, and the frequency of the vibration (vibration) is 10KHz~50KHz.

請參閱圖3，本發明之第一實施例中，該超音波震動源12與該方形腔體11側壁間具有一夾角θ，該夾角之範圍為15°~45°，使該超音波震動源12可向垂直或水平方向偏轉，以對方形腔體11內的介質(研磨液體)施加左右水平或上下 垂直的流動分量，以解決流動性低的介質震動能不均之議題，讓整體介質(研磨液體)的流動樣態保持均勻。 Please refer to FIG. 3, in the first embodiment of the present invention, there is an included angle θ between the ultrasonic vibration source 12 and the side wall of the square cavity 11, and the included angle ranges from 15° to 45°, so that the ultrasonic vibration source 12 can be deflected to the vertical or horizontal direction to apply left and right horizontal or up and down to the medium (grinding liquid) in the square cavity 11 The vertical flow component is used to solve the problem of uneven vibration energy of the medium with low fluidity, so that the flow of the whole medium (grinding liquid) is kept uniform.

請參閱圖4，本發明之第一實施例中，可在該方形腔體11底部附加一或多個輔助超音波震動源14，利用該輔助超音波震動源14的震動輸出，可使整體震動流態增加上下流動現況，並利用各個介質所需不同的功率、頻率調整，達成如圖4之四種流態狀況，增加設備介質流態之多樣性，以適合不同工件之需求。 4, in the first embodiment of the present invention, one or more auxiliary ultrasonic vibration sources 14 can be added to the bottom of the rectangular cavity 11, and the vibration output of the auxiliary ultrasonic vibration source 14 can be used to vibrate the whole The flow pattern increases the current state of the up and down flow, and uses the different power and frequency adjustments required by each medium to achieve the four flow state states shown in Figure 4, increasing the diversity of the equipment medium flow state to suit the needs of different workpieces.

圖5~8係為本發明之多維震動研磨腔體第二實施例示意圖，請參閱圖5，係為該第二實施例之立體圖與上視圖，該第二實施例係包括：一圓筒形腔體21，係用於盛裝具磨料之研磨液體；至少四超音波震動源22，係平均環繞設置於該圓筒形腔體21側壁，該些超音波震動源22向該圓筒形腔體21內部發出震波，該些超音波震動源22發出之震波方向與其設置位置之該側壁切線平面間具有一夾角θ，該夾角範圍為15°~45°；一轉盤23，係設置於該圓筒形腔體21底部內側。 Figures 5 to 8 are schematic diagrams of the second embodiment of the multi-dimensional vibration grinding cavity of the present invention. Please refer to Figure 5, which is a perspective view and a top view of the second embodiment. The second embodiment includes: a cylindrical cavity The body 21 is used to contain the grinding liquid with abrasives; at least four ultrasonic vibration sources 22 are arranged on the side wall of the cylindrical cavity 21 on average, and the ultrasonic vibration sources 22 face the cylindrical cavity 21 There is a shock wave inside, and there is an included angle θ between the direction of the shock waves emitted by the ultrasonic vibration sources 22 and the tangent plane of the side wall of the setting position, and the included angle ranges from 15° to 45°; a turntable 23 is set on the cylindrical shape Inside the bottom of the cavity 21.

請參閱圖6，本發明之第二實施例中，該至少四超音波震動源22發出的震波會引導該圓筒形腔體21內部的研磨液體流動、產生迴旋渦流，使研磨液體中的磨料介質可以更深入放置在該圓筒形腔體21內部的待研磨工件(圖未示)的複雜表面，增進研磨效果。該轉盤23之旋轉方向與該些超音波震動源22發出之震波方向相配合，加強該圓筒形腔體21內之研 磨液體的迴旋流動效果。該超音波震動源22的數量、功率、震波頻率可依使用者需求自行變化，數量以4的倍數為主，震波(震動)頻率為10KHz~50KHz。 Please refer to FIG. 6, in the second embodiment of the present invention, the shock waves emitted by the at least four ultrasonic vibration sources 22 will guide the grinding liquid inside the cylindrical cavity 21 to flow and generate a swirling vortex, so that the abrasive The medium can be placed more deeply on the complex surface of the workpiece (not shown in the figure) inside the cylindrical cavity 21 to improve the grinding effect. The rotation direction of the turntable 23 matches the direction of the shock waves emitted by the ultrasonic vibration sources 22 to strengthen the research in the cylindrical cavity 21 The swirling flow effect of the grinding liquid. The number, power, and frequency of the ultrasonic vibration source 22 can be changed according to the needs of the user. The number is mainly a multiple of 4, and the frequency of the vibration (vibration) is 10KHz-50KHz.

請再次參閱圖5，本發明之第二實施例中，該超音波震動源22與該圓筒形腔體21側壁間具有一夾角θ，該夾角之範圍為15°~45°，使該超音波震動源22可向垂直或水平方向偏轉，以對圓筒形腔體21內的介質(研磨液體)施加左右水平或上下垂直的流動分量，以解決流動性低的介質震動能不均之議題，讓整體介質(研磨液體)的流動樣態保持均勻。 Please refer to FIG. 5 again. In the second embodiment of the present invention, there is an included angle θ between the ultrasonic vibration source 22 and the side wall of the cylindrical cavity 21, and the included angle ranges from 15° to 45°, so that the ultrasonic vibration source 22 and the side wall of the cylindrical cavity 21 have an included angle θ. The sonic vibration source 22 can be deflected in the vertical or horizontal direction to apply left and right horizontal or vertical flow components to the medium (grinding liquid) in the cylindrical cavity 21 to solve the problem of uneven vibration energy of the medium with low fluidity. , To keep the flow of the whole medium (grinding liquid) uniform.

請參閱圖7，本發明之第二實施例中，可在該圓筒形腔體21底部附加一或多個輔助超音波震動源24，利用該輔助超音波震動源24的震動輸出配合該些位於側壁上之超音波震動源22輸出之震波，可使整體震動流態增加上下流動現況，並利用各個介質所需不同的功率、頻率調整，達成如圖7之四種流態狀況，增加設備介質流態之多樣性，以適合不同工件之需求。 Please refer to FIG. 7, in the second embodiment of the present invention, one or more auxiliary ultrasonic vibration sources 24 can be attached to the bottom of the cylindrical cavity 21, and the vibration output of the auxiliary ultrasonic vibration source 24 is used to match the vibration output of the auxiliary ultrasonic vibration source 24. The shock wave output by the ultrasonic vibration source 22 located on the side wall can increase the overall vibration flow state up and down flow conditions, and use the different power and frequency adjustments required by each medium to achieve the four flow state conditions as shown in Figure 7, adding equipment Diversity of medium flow patterns to suit the needs of different workpieces.

藉此，本發明係提供一種多維震動研磨腔體，透過多維超音波震動源的振幅功率以及頻率控制，使震動介質在保有原先微小震動的特性時，可在研磨液體介質所在的腔體內形成更多方向/維度的巨觀流(移)動現象，增進液體研磨效率。本發明利用多維震動源的控制，形成更多方向介質流態(迴旋式)，可針對待磨工件的需求設定最適介質流態組合， 可縮短工件研磨時間，並精準控制研磨方向。多震動源可達成控制各面向的介質巨觀流(移)動方向，有利震動介質進入待處理工件之細微特徵結構。超音波震動源與轉盤配合使研磨液體產生具震動效果之迴旋流動態樣，除磨料巨觀移動形成之研磨行為，另可使磨料自身產生微幅震動，增加磨料與待磨工件研磨效益。 Thereby, the present invention provides a multi-dimensional vibration grinding cavity. Through the amplitude power and frequency control of the multi-dimensional ultrasonic vibration source, the vibration medium can be formed in the cavity where the grinding liquid medium is located while maintaining the characteristics of the original small vibration. Multi-directional/dimensional macro-flow (movement) phenomenon improves liquid grinding efficiency. The invention utilizes the control of the multi-dimensional vibration source to form more directional medium flow patterns (rotary type), and can set the most suitable medium flow pattern combination according to the needs of the workpiece to be ground. It can shorten the grinding time of the workpiece and precisely control the grinding direction. Multi-vibration sources can control the direction of the macro-flow (movement) of the medium on each side, which is advantageous for the vibrating medium to enter the fine feature structure of the workpiece to be processed. The combination of the ultrasonic vibration source and the turntable makes the grinding liquid produce a swirling flow dynamic with a vibration effect. In addition to the grinding behavior formed by the macroscopic movement of the abrasive, it can also cause the abrasive itself to vibrate slightly, increasing the grinding efficiency of the abrasive and the workpiece.

上述之實施例僅為例示性說明本發明之特點及其功效，而非用於限制本發明之實質技術內容的範圍。任何熟習此技藝之人士均可在不違背本發明之精神及範疇下，對上述實施例進行修飾與變化。因此，本發明之權利保護範圍，應如後述之申請專利範圍所列。 The above-mentioned embodiments are merely illustrative of the features and effects of the present invention, and are not used to limit the scope of the essential technical content of the present invention. Anyone who is familiar with this technique can modify and change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the rights of the present invention should be listed in the scope of patent application described later.

11‧‧‧方形腔體 11‧‧‧Square cavity

12‧‧‧超音波震動源 12‧‧‧Ultrasonic vibration source

13‧‧‧轉盤 13‧‧‧Turntable

Claims (8)

一種多維震動研磨腔體，係包括：一圓筒形腔體，係用於盛裝具磨料之研磨液體；至少四超音波震動源，係平均環繞設置於該圓筒形腔體側壁，該些超音波震動源向該圓筒形腔體內部發出震波，該些超音波震動源發出之震波方向與其設置位置之該側壁切線平面間具有一夾角，該夾角範圍為15°~45°，該些超音波震動源發出之震波使該圓筒形腔體內之研磨液體呈現迴旋式的流態；一轉盤，係設置於該圓筒形腔體底部內側，該轉盤之旋轉方向與該些超音波震動源發出之震波方向相配合，加強該圓筒形腔體內之研磨液體的迴旋流動效果。 A multi-dimensional vibration grinding cavity includes: a cylindrical cavity for containing grinding liquid with abrasives; at least four ultrasonic vibration sources are arranged on the side wall of the cylindrical cavity evenly around. The vibration source emits shock waves into the cylindrical cavity. The direction of the shock waves emitted by the ultrasonic vibration sources and the tangent plane of the side wall of the set position have an included angle. The included angle ranges from 15° to 45°. The shock wave emitted by the vibration source makes the grinding liquid in the cylindrical cavity present a swirling flow state; a turntable is arranged inside the bottom of the cylindrical cavity, the rotation direction of the turntable and the ultrasonic vibration sources emit The direction of the shock waves are matched to enhance the swirling flow effect of the grinding liquid in the cylindrical cavity. 如請求項1所述之多維震動研磨腔體，其中該超音波震動源之震動頻率為10KHz~50KHz。 The multi-dimensional vibration grinding cavity according to claim 1, wherein the vibration frequency of the ultrasonic vibration source is 10KHz~50KHz. 如請求項1所述之多維震動研磨腔體，其中更包括：一以上輔助超音波震動源，該輔助超音波震動源係設置於該圓筒形腔體底部。 The multi-dimensional vibration grinding cavity according to claim 1, which further includes: one or more auxiliary ultrasonic vibration sources, and the auxiliary ultrasonic vibration sources are arranged at the bottom of the cylindrical cavity. 如請求項3所述之多維震動研磨腔體，其中該輔助超音波震動源之震動頻率為10KHz~50KHz。 The multi-dimensional vibration grinding cavity according to claim 3, wherein the vibration frequency of the auxiliary ultrasonic vibration source is 10KHz~50KHz. 一種多維震動研磨腔體，係包括：一方形腔體，係用於盛裝具磨料之研磨液體； 至少四超音波震動源，係各自設置於該方形腔體之四面側壁、不在各側壁面之中軸上，該些超音波震動源向該方形腔體內部發出震波，使該方形腔體內之研磨液體呈現迴旋式的流態；一轉盤，係設置於該方形腔體底部內側，該轉盤之旋轉方向與該些超音波震動源發出之震波方向相配合，加強該方形腔體內之研磨液體的迴旋流動效果。 A multi-dimensional vibration grinding cavity includes: a square cavity, which is used to contain grinding liquid with abrasives; At least four ultrasonic vibration sources are each arranged on the four side walls of the square cavity, not on the central axis of each side wall. The ultrasonic vibration sources emit shock waves into the square cavity to make the grinding liquid in the square cavity It presents a swirling flow state; a turntable is arranged inside the bottom of the square cavity, and the rotation direction of the turntable matches the direction of the shock waves emitted by the ultrasonic vibration sources to strengthen the swirling flow of the grinding liquid in the square cavity effect. 如請求項5所述之多維震動研磨腔體，其中該超音波震動源之震動頻率為10KHz~50KHz。 The multi-dimensional vibration grinding cavity according to claim 5, wherein the vibration frequency of the ultrasonic vibration source is 10KHz~50KHz. 如請求項5所述之多維震動研磨腔體，其中更包括：一以上輔助超音波震動源，該輔助超音波震動源係設置於該方形腔體底部。 The multi-dimensional vibration grinding cavity according to claim 5, which further includes: one or more auxiliary ultrasonic vibration sources, and the auxiliary ultrasonic vibration sources are arranged at the bottom of the square cavity. 如請求項6所述之多維震動研磨腔體，其中該輔助超音波震動源之震動頻率為10KHz~50KHz。 The multi-dimensional vibration grinding cavity according to claim 6, wherein the vibration frequency of the auxiliary ultrasonic vibration source is 10KHz-50KHz.
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