TWI720693B

TWI720693B - Reticle container

Info

Publication number: TWI720693B
Application number: TW108141709A
Authority: TW
Inventors: 邱銘乾; 潘詠晉; 洪智盛
Original assignee: 家登精密工業股份有限公司
Priority date: 2019-11-18
Filing date: 2019-11-18
Publication date: 2021-03-01
Also published as: TW202121564A

Abstract

The present invention discloses a reticle container which comprises an upper cover and a lower cover. A plurality of identification modules is disposed on the side edge of the reticle container. Therefore, the user can quickly identify the usage of the reticle container or number per se. On the other hand, the reticle container of the present invention further comprises a support member, a holding member and a locking module. The reticle container of the present invention is able to satisfy various structural requirements and conditions for carrying the reticle in a sealed environment.

Description

光罩容器Mask container

本發明提供了一種光罩容器，由指一種具有多種不同可調整部位，進一步達到提高攜帶、運輸或傳送光罩便利性與安全性的光罩容器。 The present invention provides a photomask container, which refers to a photomask container with multiple different adjustable positions to further improve the convenience and safety of carrying, transporting or transmitting the photomask.

在半導體產業中，光罩在製程上扮演非常重要的角色。無論是傳統的黃光微影或蝕刻等技術，甚至到近年來的極紫外光刻(Extreme ultraviolet lithography,EUVL)製程，皆無法脫離光罩的使用。 In the semiconductor industry, photomasks play a very important role in the manufacturing process. Whether it is traditional yellow light lithography or etching techniques, and even the extreme ultraviolet lithography (EUVL) process in recent years, they cannot be separated from the use of photomasks.

在眾多半導體的直接或間接相關產業中，涉及光電相關的產業亦屬於相當重要的一塊。在製作大尺寸的面板時，其製程上所運用到的光罩尺寸亦隨著面板的尺寸改變。在科技進步的前提之下，現有的面板產業所能製作的面板尺寸逐步增大，伴隨而來的是，其製程上所需要的光罩尺寸亦同步增大。 Among the many directly or indirectly related industries of semiconductors, industries related to optoelectronics also belong to a very important piece. When making large-size panels, the size of the mask used in the manufacturing process also changes with the size of the panel. Under the premise of technological advancement, the size of the panels that can be produced by the existing panel industry is gradually increasing, and with it, the size of the mask required for its manufacturing process has also increased.

有別於製造處理器或晶片等半導體產業，面板產業所用的光罩因其尺寸可寬幅至800毫米比960毫米之故，並無法用傳統小型的光罩盒進行傳送或儲存；相對的必須使用專規的大尺寸光罩盒。 Different from the semiconductor industry such as the manufacture of processors or chips, the size of the mask used in the panel industry can be as wide as 800 mm to 960 mm, and therefore cannot be transported or stored with traditional small mask boxes; relatively necessary Use a special large-size mask box.

但在光罩盒中承載的光罩尺寸如此巨大的狀況下，伴隨的慣性運動也會越發嚴重。如此巨大尺寸的光罩在搬運或傳送的過程中，也更容易因為運送精度不足的問題，更容易產生搖晃、撞擊甚至造成整個光罩容器發生傾倒。進一步，導致大尺寸光罩的損壞。 But under the condition that the size of the reticle carried in the reticle box is so huge, the accompanying inertial motion will become more serious. In the process of handling or conveying such a huge size of the mask, it is also more likely to cause shaking, impact or even toppling of the entire mask container due to insufficient transportation accuracy. Further, damage to the large-size photomask is caused.

而針對不同的運送和儲存條件，各家面板或半導體廠的運輸規格也不見得一致。舉例來說，有些廠區的運送過程容易產生左右的擺動；而有些廠區則是會有高低落差的移動，導致大尺寸光罩會有位移刮磨的現象發生。因此，各種廠區用途的光罩容器，其所需要的需求均不盡相同，以現有的技術來說，目前的光罩容器仍難以克服這一點。 For different transportation and storage conditions, the transportation specifications of each panel or semiconductor factory are not necessarily consistent. For example, in some factories, the transportation process is prone to swing from side to side; while in some factories, there will be high and low movements, which will cause the phenomenon of displacement and scraping of large-size masks. Therefore, the requirements of the photomask containers for various factory uses are not the same. With the existing technology, the current photomask containers are still difficult to overcome this point.

為了解決先前技術中所提及的問題，本發明提供了一種光罩容器。進一步來說，所述光罩容器主要包含複數個組裝件、一上蓋以及一下蓋。該上蓋與該下蓋蓋合，形成一側緣。 In order to solve the problems mentioned in the prior art, the present invention provides a photomask container. Furthermore, the photomask container mainly includes a plurality of assembly parts, an upper cover and a lower cover. The upper cover is covered with the lower cover to form a side edge.

其中，該上蓋包含一第一左蓋部以及一第一右蓋部，該第一左蓋部透過一第一左連接區與其中一個該組裝件連接固定；而該第一右蓋部透過一第一右連接區與該第一左蓋部連接的該組裝件連接固定。 Wherein, the upper cover includes a first left cover portion and a first right cover portion, the first left cover portion is connected and fixed to one of the assembling parts through a first left connecting area; and the first right cover portion penetrates a The first right connecting area is connected and fixed to the assembly piece connected to the first left cover part.

同樣地，該下蓋包含一第二左蓋部及一第二右蓋部。該第二左蓋部透過一第二左連接區與另一個該組裝件連接固定；而該第二右蓋部透過一第二右連接區與該第二左蓋部連接的該組裝件連接固定。 Similarly, the lower cover includes a second left cover portion and a second right cover portion. The second left cover part is connected and fixed to another assembly part through a second left connection area; and the second right cover part is connected and fixed to the assembly part connected to the second left cover part through a second right connection area .

其中，該側緣上更設有至少一識別監控模組，且該上蓋及該下蓋的內面四角共構為一固持區域，該下蓋的內面周緣共構為一支撐區域。 Wherein, at least one identification monitoring module is further provided on the side edge, and four corners of the inner surface of the upper cover and the lower cover jointly constitute a holding area, and the inner periphery of the lower cover jointly constitutes a supporting area.

以上對本發明的簡述，目的在於對本發明之數種面向和技術特徵作一基本說明。發明簡述並非對本發明的詳細表述，因此其目的不在特別列舉本發明的關鍵性或重要元件，也不是用來界定本發明的範圍，僅為以簡明的方式呈現本發明的數種概念而已。 The above brief description of the present invention aims to provide a basic description of several aspects and technical features of the present invention. The brief description of the invention is not a detailed description of the invention. Therefore, its purpose is not to specifically enumerate the key or important elements of the invention, nor to define the scope of the invention. It merely presents several concepts of the invention in a concise manner.

10:光罩容器 10: Mask container

100:上蓋 100: upper cover

101:第一左蓋部 101: The first left cover

1011:第一左連接區 1011: The first left connection area

102:第一右蓋部 102: The first right cover

1021:第一右連接區 1021: The first right connection area

200:下蓋 200: lower cover

201:第二左蓋部 201: The second left cover

202:第二右蓋部 202: second right cover

300:組裝件 300: Assembled parts

301:接合板 301: Joint plate

302:主支架 302: main stand

400:識別監控模組 400: Identify the monitoring module

401:容置槽 401: Containment Slot

402:識別元件 402: identification component

4021:保護蓋 4021: Protective cover

403:監控器 403: Monitor

404:蓋板 404: cover

405:接合件 405: Joint

406:接合孔 406: Joint hole

407:扣合部 407: Fastening part

500:鎖固模組 500: Locking module

501:螺栓 501: Bolt

502:栓鎖柱 502: Latch Column

5021:螺紋孔 5021: threaded hole

503a:氣密槽 503a: airtight groove

503b:定位翼槽 503b: Positioning wing groove

504:穿鎖件 504: wear lock

5041:螺紋柱 5041: threaded column

600:固持件 600: Holder

601:條狀支持件 601: Strip support

602:彈性本體 602: Elastic Body

6021:開孔 6021: Hole

603:固定孔 603: fixed hole

700a:支撐件 700a: Support

700b:支撐件 700b: Support

701:支撐柱 701: support column

702:頂接區 702: top connection area

703:調整固定部 703: Adjust the fixed part

704:支持件 704: Support

705:橋接件 705: Bridge

M:主肋 M: main rib

W:側肋 W: side rib

G:固持溝 G: fixed groove

S:固持區域 S: Holding area

R:支撐區域 R: Support area

RP:支撐點 RP: support point

圖1係本發明實施例之外觀結構示意圖。 FIG. 1 is a schematic diagram of the appearance structure of an embodiment of the present invention.

圖2係本發明實施例之上蓋組成結構示意圖。 Fig. 2 is a schematic diagram of the composition structure of the upper cover of the embodiment of the present invention.

圖3係本發明實施例之內部結構示意圖。 Fig. 3 is a schematic diagram of the internal structure of an embodiment of the present invention.

圖4係本發明實施例之下蓋結構拆解示意圖。 Fig. 4 is a schematic diagram of the disassembly of the lower cover structure of the embodiment of the present invention.

圖5係本發明實施例之固持區域與支撐區域示意圖。 FIG. 5 is a schematic diagram of the holding area and the supporting area of the embodiment of the present invention.

圖6係本發明實施例之鎖固模組結構示意圖。 FIG. 6 is a schematic diagram of the structure of the locking module according to the embodiment of the present invention.

圖7係本發明實施例之螺栓結構示意圖。 Fig. 7 is a schematic diagram of the bolt structure of the embodiment of the present invention.

圖8係本發明實施例之固持件安裝示意圖。 Fig. 8 is a schematic diagram of the mounting of the holding member according to the embodiment of the present invention.

圖9係本發明實施例之固持件結構示意圖。 FIG. 9 is a schematic diagram of the structure of the holder of the embodiment of the present invention.

圖10係本發明實施例之支撐件結構示意圖。 FIG. 10 is a schematic diagram of the structure of the supporting member according to the embodiment of the present invention.

圖11係本發明實施例之另一支撐件結構示意圖。 Fig. 11 is a schematic diagram of another support structure according to an embodiment of the present invention.

圖12係本發明實施例之支持件與橋接件結構示意圖。 Fig. 12 is a schematic diagram of the structure of the supporting member and the bridging member of the embodiment of the present invention.

為能瞭解本發明的技術特徵及實用功效，並可依照說明書的內容來實施，茲進一步以如圖式所示的較佳實施例，詳細說明如後：請同時參照圖1-3，圖1係本發明實施例之外觀結構示意圖；圖2係本發明實施例之上蓋組成結構示意圖；圖3係本發明實施例之內部結構示意圖。 In order to understand the technical features and practical effects of the present invention, and implement it in accordance with the content of the specification, the preferred embodiment shown in the figure is further used, and the detailed description is as follows: please refer to Figures 1-3 and Figure 1 at the same time. It is a schematic diagram of the external structure of the embodiment of the present invention; FIG. 2 is a schematic diagram of the structure of the top cover of the embodiment of the present invention; FIG. 3 is a schematic diagram of the internal structure of the embodiment of the present invention.

如圖1所示，圖1中展示了本發明實施例之光罩容器10。由圖1可以得知本實施例之光罩容器10主要包含上蓋100以及下蓋200，且該上蓋100與該下蓋200蓋合，並形成具有側緣的光罩容器10。其進一步參照圖2，圖2中進一步以上蓋100作為主要的範例。然實質上，下蓋200也具有相應的類似結構。由圖2的資訊可以得知，在本實施例中，上蓋100及下蓋200皆由複數個組裝件300所拼接而成。以本實施例而言，組裝件300一共有兩個，一個嵌設於上蓋100中；另一個則嵌設於下蓋200中。本實施例之組裝件300係由首尾兩個接合板301裝設於主支架302所共構而成。當然，在其他可能的實施例中，組裝件300亦可以設計為一體成形的結構，本發明並不加以限制。 As shown in Fig. 1, Fig. 1 shows a mask container 10 according to an embodiment of the present invention. It can be seen from FIG. 1 that the photomask container 10 of this embodiment mainly includes an upper cover 100 and a lower cover 200, and the upper cover 100 and the lower cover 200 are closed to form the photomask container 10 with side edges. It further refers to Fig. 2, and in Fig. 2 further The upper cover 100 serves as the main example. However, in essence, the lower cover 200 also has a corresponding similar structure. It can be seen from the information in FIG. 2 that, in this embodiment, the upper cover 100 and the lower cover 200 are both assembled by a plurality of assembly parts 300. In this embodiment, there are two assembly parts 300, one is embedded in the upper cover 100; the other is embedded in the lower cover 200. The assembly 300 of this embodiment is co-constructed by two joint plates 301 mounted on the main bracket 302 at the end and the end. Of course, in other possible embodiments, the assembly 300 can also be designed as an integrally formed structure, which is not limited by the present invention.

在本實施例中，接合板301主要位於光罩容器10的側緣上。進一步根據圖2中所記載的訊息，可得知本實施例之上蓋100由第一左蓋部101以及第一右蓋部102拼接而成。第一左蓋部101透過第一左連接區1011與組裝件300連接固定；而第一右蓋部102則透過第一右連接區1021與第一左蓋部101連接的同個組裝件300連接固定。 In this embodiment, the joint plate 301 is mainly located on the side edge of the mask container 10. Further according to the information recorded in FIG. 2, it can be known that the top cover 100 of this embodiment is formed by splicing the first left cover portion 101 and the first right cover portion 102. The first left cover part 101 is connected and fixed to the assembly part 300 through the first left connection area 1011; and the first right cover part 102 is connected to the same assembly part 300 connected to the first left cover part 101 through the first right connection area 1021 fixed.

同樣地，本實施例之下蓋200也包含第二左蓋部201及第二右蓋部202。第二左蓋部201同樣可透過第二左連接區(圖未示，可參照第一左連接區1011的結構)與另一個組裝件300連接固定；而第二右蓋部202則透過第二右連接區(圖未示，可參照第一右連接區1021的結構)與第二左蓋部201連接的組裝件300連接固定。 Similarly, the lower cover 200 of this embodiment also includes a second left cover portion 201 and a second right cover portion 202. The second left cover part 201 can also be connected and fixed to another assembly 300 through the second left connection area (not shown, please refer to the structure of the first left connection area 1011); and the second right cover part 202 can be fixed through the second left connection area. The right connecting area (not shown in the figure, refer to the structure of the first right connecting area 1021) is connected and fixed to the assembly 300 connected to the second left cover 201.

綜上，完成本發明實施例的上蓋100與下蓋200，進一步讓其形成光罩容器10。接著，如圖3所示，由圖3便可看出本發明實施例之光罩容器10之側緣上更設有至少一識別監控模組400。接著請先參照圖5，圖5係本發明實施例之固持區域與支撐區域示意圖。如圖5所示，圖5係以下蓋200作為實例。然實際上本實施例之上蓋100或下蓋200之內面可設計為相同或相對應的功能區域(如固持區域S、支撐區域R)，本發明並不加以限制。如圖5所示，本實施例光罩容器10之下蓋200的內面四角共構為固持區域S，而內面周緣共構為支撐區域R。 In summary, the upper cover 100 and the lower cover 200 of the embodiment of the present invention are completed, and the mask container 10 is further formed. Next, as shown in FIG. 3, it can be seen from FIG. 3 that at least one identification monitoring module 400 is further provided on the side edge of the mask container 10 of the embodiment of the present invention. Please refer to FIG. 5 first, which is a schematic diagram of the holding area and the supporting area of the embodiment of the present invention. As shown in Fig. 5, Fig. 5 shows the lower cover 200 as an example. However, in fact, the inner surface of the upper cover 100 or the lower cover 200 of this embodiment can be designed as the same or corresponding functional areas (e.g. The holding area S and the supporting area R) are not limited by the present invention. As shown in FIG. 5, the four corners of the inner surface of the lower cover 200 of the mask container 10 of the present embodiment are co-constructed as a holding area S, and the periphery of the inner surface is co-constructed as a supporting area R.

在本實施例中，下蓋200的用途主要在光罩容器10平放的時候，必須達到同時能夠防止光罩位移並且平均地支撐光罩重量的目的。由於本實施例之光罩容器10係屬於大尺寸光罩(即面板產業所用的光罩，因其尺寸可寬幅至800毫米比960毫米，故稱為大尺寸光罩)，具有較大的重量。搬運或儲存時更容易受到慣性作用影響而產生晃動、碰撞或是破裂，甚至導致整個光罩容器10傾倒的可能發生。因此，本實施例特別在光罩容器10之下蓋200(亦可於上蓋100中相對應的位置同時設置對應的功能區域)的內面四角共構區域定義為固持區域S，而內面周緣共構的部份定義為支撐區域R，用以設置相關的元件，據以解決大尺寸光罩的相關問題。 In this embodiment, the purpose of the lower cover 200 is mainly when the photomask container 10 is placed flat, and must achieve the purpose of preventing the displacement of the photomask and evenly supporting the weight of the photomask. Since the mask container 10 of this embodiment belongs to a large-size mask (that is, a mask used in the panel industry, it is called a large-size mask because its size can be as wide as 800 mm to 960 mm). weight. During transportation or storage, it is more susceptible to shaking, collision or rupture due to inertial effects, and even the entire photomask container 10 may fall over. Therefore, in this embodiment, the inner four-corner co-structured area of the lower cover 200 of the mask container 10 (the corresponding functional area can also be provided at the corresponding position in the upper cover 100) is defined as the holding area S, and the inner peripheral edge The co-structured part is defined as the support area R, which is used to set up related components to solve the related problems of the large-size photomask.

接著請同時參照圖3-5，其中圖4係本發明實施例之下蓋結構拆解示意圖。如圖3所示，在本實施例光罩容器10的側緣設有至少一識別監控模組400。更進一步來說，為了能夠同時控管到第一左蓋部101、第一右蓋部102、第二左蓋部201和第二右蓋部202，甚至是包含其組合完畢後上蓋100及下蓋200之個別狀態以及使用狀態下光罩容器10內部的參數(包含濕度、潔淨度等)，每個第一左蓋部101、第一右蓋部102、第二左蓋部201和第二右蓋部202上皆可設有至少一組識別監控模組400。 Please refer to FIGS. 3-5 at the same time. FIG. 4 is a schematic diagram of disassembling the lower cover structure according to the embodiment of the present invention. As shown in FIG. 3, at least one identification monitoring module 400 is provided on the side edge of the mask container 10 of this embodiment. Furthermore, in order to be able to simultaneously control the first left cover part 101, the first right cover part 102, the second left cover part 201 and the second right cover part 202, even including the upper cover 100 and the lower cover after the combination is completed. The individual status of the cover 200 and the parameters (including humidity, cleanliness, etc.) inside the mask container 10 in the use status, each of the first left cover 101, the first right cover 102, the second left cover 201, and the second At least one set of identification and monitoring modules 400 can be provided on the right cover 202.

在本實施例中，每組組識別監控模組400包含容置槽401、識別元件402、監控器403以及蓋板404。其中，容置槽401包含可用以容納監控器403的開口。識別元件402則設置於光罩容器10側緣上鄰接容置槽401處。如圖3所示，在本實施例中，識別元件402由於為無線射頻標籤(RFID Tag)之故，係以保護蓋4021蓋合後保護在下蓋200內部。至於監控器403上面可以包含小型的顯示器，用以顯示光罩容器10內部的參數(如濕度、潔淨度等)；前述光罩容器10內部的參數(如濕度、潔淨度等)之讀數可以來自於儀器或光罩容器10內部的感測器測量，並以無線通訊的方式將測量的結果參數傳送至監控器403上顯示，讓相關操作人員可以馬上得知光罩容器10目前的狀態。 In this embodiment, each group of identification monitoring modules 400 includes a receiving slot 401, an identification element 402, a monitor 403, and a cover 404. Wherein, the accommodating groove 401 includes an opening for accommodating the monitor 403. The identification element 402 is arranged on the side edge of the mask container 10 adjacent to the accommodating groove 401. As shown in FIG. 3, in this embodiment, the identification element 402 is a radio frequency tag (RFID Tag), so it is protected After the cover 4021 is closed, the inside of the lower cover 200 is protected. As for the monitor 403, a small display can be included to display the parameters (such as humidity, cleanliness, etc.) inside the photomask container 10; the readings of the aforementioned parameters (such as humidity, cleanliness, etc.) in the photomask container 10 can come from The measurement is performed by a sensor inside the instrument or the reticle container 10, and the measured result parameters are transmitted to the monitor 403 by wireless communication for display, so that the relevant operator can immediately know the current state of the reticle container 10.

而本實施例中，監控器403上更設有至少一接合件405，並與設置於容置槽401中的至少一接合孔406相應卡合，最後再如圖4一般，由蓋板404與容置槽401的開口蓋合，用以保護監控器403。 In this embodiment, the monitor 403 is further provided with at least one engaging member 405, which is correspondingly engaged with the at least one engaging hole 406 provided in the accommodating groove 401. Finally, as shown in FIG. 4, the cover plate 404 and The opening of the accommodating slot 401 is covered to protect the monitor 403.

本實施例採用的保護蓋4021及蓋板404皆可以設計為彈片卡合或是任意的卡扣方式，本發明不加以限制。此外，本實施例為了防止較重的大尺寸光罩導致光罩容器10之上蓋100和下蓋200在直立運輸時會有上蓋100和下蓋200分離的風險產生，光罩容器10的側緣上更設有多個扣合部407(本實施例為單側兩個)，用以將上蓋100和下蓋200緊密結合。除了達到氣密的效果之外，也進一步加強整個光罩容器10的結構穩定性。 The protective cover 4021 and the cover plate 404 used in this embodiment can be designed to be snap-fitted or any snap-fitting method, which is not limited by the present invention. In addition, in this embodiment, in order to prevent the upper cover 100 and the lower cover 200 of the reticle container 10 from separating the upper cover 100 and the lower cover 200 during vertical transportation, the side edges of the reticle container 10 A plurality of buckling parts 407 (two on one side in this embodiment) are further provided on the upper cover for tightly connecting the upper cover 100 and the lower cover 200. In addition to achieving the air-tight effect, the structural stability of the entire mask container 10 is further enhanced.

接著請同時參照圖5及圖6，圖6係本發明實施例之鎖固模組結構示意圖。圖6中進一步解釋了本實施例圖2中的第一左連接區1011、第一右連接區1021以及圖2未示但結構類似的下蓋200之第二左連接區、第二右連接區係如何透過複數個鎖固模組500進行固定之細部結構。 Please refer to FIGS. 5 and 6 at the same time. FIG. 6 is a schematic diagram of the structure of the locking module according to the embodiment of the present invention. FIG. 6 further explains the first left connection area 1011, the first right connection area 1021 in FIG. 2 and the second left connection area and the second right connection area of the lower cover 200 that are not shown in FIG. 2 but have a similar structure in this embodiment. It is the detailed structure of how to fix by a plurality of locking modules 500.

更進一步來說，本實施例之第一左連接區1011、第一右連接區1021、第二左連接區(圖未示)及第二右連接區(圖未示)中各設有複數個鎖固模組500，每個鎖固模組500包含螺栓501以及穿鎖件504，且穿鎖件504係由光罩容器10外穿過組裝件300中的主支架302後與螺栓501固定。可先參照圖5，由圖5的範例中可得知第一左連接區1011、第一右連接區1021、第二左連接區(圖未示)及第二右連接區(圖未示)中實質上係由兩種肋條組成，其一為主肋M，以縱貫的方式設置於第一左連接區1011、第一右連接區1021、第二左連接區(圖未示)及第二右連接區(圖未示)中。每個主肋旁各設有多個側肋W。在本實施例中，翼狀的側肋W可以穩固主肋M的結構之外，側肋W與主肋M連接的點更屬於鎖固模組500的設置位置。 More specifically, the first left connection area 1011, the first right connection area 1021, the second left connection area (not shown) and the second right connection area (not shown) of this embodiment are each provided with a plurality of Each of the locking modules 500 includes a bolt 501 and a locking member 504, and the locking member 504 is fixed to the bolt 501 after passing through the main bracket 302 in the assembly 300 from the outside of the mask container 10. Refer to Figure 5 first, by In the example of FIG. 5, it can be seen that the first left connection area 1011, the first right connection area 1021, the second left connection area (not shown), and the second right connection area (not shown) are essentially two types The ribs are composed of one of the main ribs M, which are arranged longitudinally in the first left connecting area 1011, the first right connecting area 1021, the second left connecting area (not shown) and the second right connecting area (not shown) Show). Each main side is provided with multiple side ribs W. In this embodiment, the wing-shaped side rib W can stabilize the structure of the main rib M, and the connection point between the side rib W and the main rib M belongs to the setting position of the locking module 500.

請進一步參照圖7，圖7係本發明實施例之螺栓結構示意圖。將圖5-7同時參照時，可得知本實施例鎖固模組500中的螺栓501構造係配合主肋M與側肋W的物理結構進行定位，具有安裝時可防呆的功能。本實施例之螺栓501主要由栓鎖柱502、氣密槽503a以及至少一定位翼槽503b共構而成。該栓鎖柱502具有螺紋孔5021。而氣密槽503a則環設於栓鎖柱502底部。最後至少一定位翼槽503b則設置於氣密槽503a外緣。 Please further refer to FIG. 7, which is a schematic diagram of the bolt structure of the embodiment of the present invention. When referring to FIGS. 5-7 at the same time, it can be seen that the structure of the bolt 501 in the locking module 500 of this embodiment is positioned in accordance with the physical structure of the main rib M and the side rib W, and has the function of preventing fools during installation. The bolt 501 of this embodiment is mainly composed of a bolt 502, an airtight groove 503a, and at least one positioning wing groove 503b. The bolt 502 has a threaded hole 5021. The airtight groove 503a is ringed at the bottom of the bolt 502. Finally, at least one positioning wing groove 503b is disposed on the outer edge of the airtight groove 503a.

透過上述結構，螺栓501往下蓋合時，氣密槽503a可以形成第一層的氣密結構，並配合主肋M的形狀達到氣密的效果。於此同時，定位翼槽503b在本實施例中為兩個，且彼此間共構為一直線。當安裝螺栓501時，共構為一直線的定位翼槽503b可以順應卡合在直線的主肋M上，除了能夠減少安裝的難度之外，也更能夠防止氣密槽503a和定位翼槽503b產稱偏移，進而減低光罩容器10氣密效果的風險產生。 Through the above structure, when the bolt 501 is closed downward, the airtight groove 503a can form a first layer of airtight structure, and cooperate with the shape of the main rib M to achieve an airtight effect. At the same time, there are two positioning wing grooves 503b in this embodiment, and they are co-constructed as a straight line. When the bolt 501 is installed, the positioning wing groove 503b co-constructed as a straight line can be compliantly snapped on the linear main rib M. In addition to reducing the difficulty of installation, it can also prevent the airtight groove 503a and the positioning wing groove 503b from being produced. Weighing offset, thereby reducing the risk of the airtight effect of the mask container 10 is reduced.

在本實施例中，螺栓501會先安裝完成後，再由穿鎖件504自光罩容器10的外部向內穿過固定。如圖6所示，穿鎖件504之頂部實質上更設有半徑較小的螺紋柱5041，透過螺紋柱5041的結構，可與栓鎖柱502上螺紋孔5021相應旋合，進一步達到穩固結構的效果。且本實施例之穿鎖件504，其暴露於光罩容器10外的一側呈現漏斗狀，更有助於整個光罩容器10的表面平整與氣密程度。 In this embodiment, the bolt 501 is installed first, and then the locking member 504 passes through and fixes the light shield container 10 from the outside to the inside. As shown in FIG. 6, the top of the lock-through member 504 is substantially further provided with a threaded post 5041 with a smaller radius. The structure of the threaded post 5041 can correspond to the threaded hole 5021 on the bolting post 502 Rotate to further achieve the effect of a stable structure. Moreover, the side of the piercing member 504 of this embodiment exposed to the outside of the mask container 10 is in the shape of a funnel, which is more conducive to the smoothness and airtightness of the entire surface of the mask container 10.

接著，請同時參照圖5、圖8及圖9，圖8係本發明實施例之固持件安裝示意圖；圖9係本發明實施例之固持件結構示意圖。首先，如圖5所示，本實施例光罩容器10下蓋200的內面四角共構區域定義為固持區域S，其中如圖8所示，具有固持溝G得以設置固持件600。本實施例中的固持件600得以複數個的形式設置於各個固持區域S中，其目的主要在於穩固大尺寸光罩的四個角落，避免其偏移的前提下一併提供足夠的支撐力。 Next, please refer to FIGS. 5, 8 and 9 at the same time. FIG. 8 is a schematic diagram of the mounting of the holder according to the embodiment of the present invention; FIG. 9 is a schematic diagram of the structure of the holder of the embodiment of the present invention. First, as shown in FIG. 5, the four-corner co-structured area on the inner surface of the lower cover 200 of the mask container 10 of the present embodiment is defined as the holding area S, and as shown in FIG. 8, the holding groove G is provided with the holding member 600. In this embodiment, the holding members 600 are arranged in multiple holding areas S, and the purpose is mainly to stabilize the four corners of the large-size photomask, avoid the deviation thereof, and provide sufficient supporting force.

在本實施例中，固持件600主要包含支持本體(圖未示，包埋於彈性本體中)、至少一條狀支持件601、彈性本體602以及至少一固定孔603。其中至少一條狀支持件601設於該支持本體(圖未示，包埋於彈性本體中)上；彈性本體602則具有與至少一條狀支持件601數量相等的至少一開孔6021。藉此，彈性本體602包覆支持本體並使每個條狀支持件601超出每個開孔6021向上延伸一距離。而至少一固定孔603則同時設於支持本體(圖未示，包埋於彈性本體中)及該彈性本體602上。在本實施例中，至少一固定孔603可以設置於固持件600的底部或是左右兩端的末端，並使固持件600固定於固持溝G中，本發明並不加以限制。 In this embodiment, the holding member 600 mainly includes a supporting body (not shown, embedded in the elastic body), at least a strip-shaped supporting member 601, an elastic body 602, and at least one fixing hole 603. At least one supporting member 601 is disposed on the supporting body (not shown, embedded in the elastic body); the elastic body 602 has at least one opening 6021 equal to the number of the at least one supporting member 601. Thereby, the elastic body 602 covers the supporting body and makes each strip-shaped supporting member 601 extend a distance upward beyond each opening 6021. At least one fixing hole 603 is provided on the supporting body (not shown, embedded in the elastic body) and the elastic body 602 at the same time. In this embodiment, at least one fixing hole 603 may be provided at the bottom of the holding member 600 or the ends of the left and right ends, and the holding member 600 is fixed in the holding groove G, which is not limited by the present invention.

請同時參照圖4-5及圖10-12，圖10係本發明實施例之支撐件結構示意圖；圖11係本發明實施例之另一支撐件結構示意圖；圖12係本發明實施例之支持件與橋接件結構示意圖。 Please refer to FIGS. 4-5 and 10-12 at the same time. FIG. 10 is a schematic diagram of the support structure of an embodiment of the present invention; FIG. 11 is a schematic diagram of another support structure of an embodiment of the present invention; FIG. 12 is a support of the embodiment of the present invention Schematic diagram of the structure of parts and bridging parts.

首先，圖4中展示了支撐件700b的裝設，進一步參照圖5中的位置，可得知支撐件700b設置於右側的支撐區域R中。在本實施例中，由於光罩容器10 是大尺寸光罩盒的緣故，因此考量到各種不同的運輸或儲存狀況(如平放或直放)，實際使用的時候，用以支撐光罩容器10內的元件所需要的高低和位置有可能不盡相同。 First, FIG. 4 shows the installation of the support member 700b. Further referring to the position in FIG. 5, it can be seen that the support member 700b is disposed in the support area R on the right side. In this embodiment, since the mask container 10 It is due to the large size of the mask box, so various transportation or storage conditions (such as horizontal or vertical placement) are considered. In actual use, the height and position required to support the components in the mask container 10 are: It may not be the same.

因此，如圖5所示，本實施例之光罩容器10中，各個支撐區域R上設有彼此間具有固定間距的複數個支撐點RP，該複數個支撐點RP更與複數個支撐件(700a或700b)連接。換言之，基於本發明的精神，支撐件(700a或700b)的設置位置除了可以自由調整之外，也包含了可以互相支援需要支撐的重量或調整支撐位置高低等技術需求。 Therefore, as shown in FIG. 5, in the photomask container 10 of the present embodiment, each supporting region R is provided with a plurality of supporting points RP with a fixed distance between each other, and the plurality of supporting points RP is more connected to a plurality of supporting members ( 700a or 700b) connection. In other words, based on the spirit of the present invention, in addition to the free adjustment of the position of the support member (700a or 700b), it also includes technical requirements such as mutual support for the weight to be supported or adjustment of the support position.

因此，如圖10-12所示，本實施例中主要由兩種支撐件(700a或700b)構成，其中支撐件700a的形狀較為方正；而支撐件700b則較類似矩形。本實施例之支撐件(700a或700b)主要由支撐柱701和調整固定部703構成。其中支撐柱701包含頂接區702，所述頂接區702可以是螺絲孔或插銷孔等用以讓其他元件固定的設計，本發明並不加以限制。而調整固定部703則設置於支撐柱701底部，該調整固定部703對應可拆地與前述複數個支撐點RP固接。如圖12所示，在本實施例中，必要時，複數個支撐件701之間的頂接區702更透過至少一支持件704與至少一橋接件705連接。 Therefore, as shown in FIGS. 10-12, the present embodiment mainly consists of two types of support members (700a or 700b), where the support member 700a has a more square shape, and the support member 700b is more rectangular. The supporting member (700a or 700b) of this embodiment is mainly composed of a supporting column 701 and an adjusting and fixing portion 703. The supporting column 701 includes a top contact area 702, and the top contact area 702 may be a screw hole or a pin hole for fixing other elements, and the present invention is not limited. The adjusting and fixing portion 703 is disposed at the bottom of the supporting column 701, and the adjusting and fixing portion 703 is correspondingly detachably fixed to the plurality of supporting points RP. As shown in FIG. 12, in this embodiment, when necessary, the top contact area 702 between the plurality of support members 701 is further connected to at least one bridge member 705 through at least one support member 704.

更進一步來說，本實施例之支持件704底部係設技為螺紋狀，且頂部為齒輪狀的螺帽，以提供使用者轉動；在本實施例中，支持件704的螺帽為圓頂結構，據此可以將支持件704與大尺寸光罩接觸的面積降低，減少刮傷的機會。 Furthermore, the bottom of the support 704 of this embodiment is a threaded nut, and the top is a gear-shaped nut to provide the user with rotation; in this embodiment, the nut of the support 704 is a dome According to the structure, the contact area of the support member 704 and the large-size photomask can be reduced, and the chance of scratches can be reduced.

據此，本實施例可以任意調整支持件704的高低，用以適應各種不同的大尺寸光罩支撐高低需求。而橋接件705可讓支持件704穿過後再與頂接區702連接。橋接件705除了可以將重量分散給與橋接件705連接的複數個支撐件 (700a或700b)之外，更可以在支持件704轉緊至一定程度時，限制每個支持件704的高低程度相同。此外，如橋接件705跨過第一左蓋部101與第一右蓋部102，更具有進一步穩定光罩容器10結構的功效。 Accordingly, in this embodiment, the height of the supporting member 704 can be adjusted arbitrarily to adapt to various different large-size photomask supporting height requirements. The bridging member 705 allows the supporting member 704 to pass through and then connect to the top joint area 702. In addition to the bridge 705, the weight can be distributed to multiple supports connected to the bridge 705. In addition to (700a or 700b), when the support 704 is tightened to a certain degree, the height of each support 704 can be restricted to be the same. In addition, if the bridge 705 straddles the first left cover portion 101 and the first right cover portion 102, it has the effect of further stabilizing the structure of the mask container 10.

惟以上所述者，僅為本發明之較佳實施例而已，當不能以此限定本發明實施之範圍，即依本發明申請專利範圍及說明內容所作之簡單變化與修飾，皆仍屬本發明涵蓋之範圍內。 However, the above are only the preferred embodiments of the present invention, and should not be used to limit the scope of implementation of the present invention, that is, simple changes and modifications made in accordance with the scope of the patent application and the description of the present invention still belong to the present invention. Covered.

100:上蓋 100: upper cover

101:第一左蓋部 101: The first left cover

102:第一右蓋部 102: The first right cover

200:下蓋 200: lower cover

201:第二左蓋部 201: The second left cover

202:第二右蓋部 202: second right cover

301:接合板 301: Joint plate

400:識別監控模組 400: Identify the monitoring module

401:容置槽 401: Containment Slot

4021:保護蓋 4021: Protective cover

404:蓋板 404: cover

406:接合孔 406: Joint hole

407:扣合部 407: Fastening part

600:固持件 600: Holder

700b:支撐件 700b: Support

Claims

一光罩容器，包含：複數個組裝件；一上蓋，包含：一第一左蓋部，透過一第一左連接區與其中一個該組裝件連接固定；一第一右蓋部，透過一第一右連接區與該第一左蓋部連接的該組裝件連接固定；一下蓋，包含：一第二左蓋部，透過一第二左連接區與另一個該組裝件連接固定；以及一第二右蓋部，透過一第二右連接區與該第二左蓋部連接的該組裝件連接固定；該上蓋與該下蓋蓋合，形成一側緣；其中，該側緣上更設有至少一識別監控模組，且該上蓋及該下蓋的內面四角共構為一固持區域，該下蓋的內面周緣共構為一支撐區域。 A mask container, including: a plurality of assembly parts; an upper cover, including: a first left cover part connected and fixed to one of the assembly parts through a first left connecting area; a first right cover part through a first A right connecting area is connected and fixed to the assembly part connected with the first left cover part; a lower cover includes: a second left cover part connected and fixed to another assembly part through a second left connecting area; and a first The two right cover parts are connected and fixed by the assembly connected to the second left cover part through a second right connecting area; the upper cover and the lower cover are covered to form a side edge; wherein, the side edge is further provided with There is at least one identification monitoring module, and the four corners of the inner surface of the upper cover and the lower cover are co-constructed as a holding area, and the inner peripheral edge of the lower cover is co-constructed as a supporting area.

如請求項1所述的光罩容器，其中該識別監控模組包含：一容置槽，包含一開口；一識別元件，設置於該側緣上鄰接該容置槽；一監控器，透過該開口容置於該容置槽中；以及一蓋板，與該開口蓋合。 The photo-mask container according to claim 1, wherein the identification monitoring module includes: a containing groove including an opening; an identification element arranged on the side edge adjacent to the containing groove; and a monitor through which The opening is accommodated in the accommodating groove; and a cover plate is used to cover the opening.

如請求項2所述的光罩容器，其中該監控器上更設有至少一接合件，與設置於該容置槽中的至少一接合孔相應卡合。 The light cover container according to claim 2, wherein the monitor is further provided with at least one engaging member, which is correspondingly engaged with the at least one engaging hole provided in the accommodating groove.

如請求項1所述的光罩容器，其中該第一左連接區、該第二左連接區、該第一右連接區及該第二右連接區中各設有複數個鎖固模組，每個該鎖固模組包含：一螺栓；以及一穿鎖件，由該光罩容器外穿過該組裝件後與該螺栓固定。 The photomask container according to claim 1, wherein the first left connection area, the second left connection area, the first right connection area and the second right connection area are each provided with a plurality of locking modules, Each of the locking modules includes: a bolt; and a through-locking part, which is fixed with the bolt after passing through the assembly part from the outside of the light cover container.

如請求項4所述的光罩容器，其中該螺栓包含：一栓鎖柱，具有一螺紋孔；一氣密槽，環設於該栓鎖柱底部；以及至少一定位翼槽，設置於該氣密槽外緣。 The photo-mask container according to claim 4, wherein the bolt includes: a latching post with a threaded hole; an airtight groove ringed at the bottom of the latching post; and at least one positioning wing groove disposed on the air Outer edge of dense groove.

如請求項5所述的光罩容器，其中該穿鎖件之頂部更設有一螺紋柱，與該螺紋孔相應旋合。 The light cover container according to claim 5, wherein a threaded post is further provided on the top of the locking member, which is screwed correspondingly with the threaded hole.

如請求項1所述的光罩容器，其中該固持區域內設有至少一固持件，該固持件包含：一支持本體；至少一條狀支持件，設於該支持本體上；一彈性本體，具有至少一開孔，該彈性本體包覆該支持本體並使每個該條狀支持件超出每個該開孔向上延伸一距離；以及至少一固定孔，設於該支持本體及該彈性本體上。 The light shield container according to claim 1, wherein the holding area is provided with at least one holding member, and the holding member includes: a supporting body; at least a strip-shaped supporting member arranged on the supporting body; and an elastic body having At least one opening, the elastic body covering the supporting body and making each strip-shaped supporting member extend a distance upward beyond each of the openings; and at least one fixing hole provided on the supporting body and the elastic body.

如請求項1所述的光罩容器，其中該支撐區域上設有彼此間具有一固定間距的複數個支撐點，該複數個支撐點更與複數個支撐件連接。 The photomask container according to claim 1, wherein the supporting area is provided with a plurality of supporting points with a fixed interval between each other, and the plurality of supporting points are further connected with a plurality of supporting members.

如請求項8所述的光罩容器，其中每個該支撐件包含：一支撐柱，包含一頂接區；以及調整固定部，設置於該支撐柱底部，該調整固定部對應可拆地與該複數個支撐點固接。 The light shield container according to claim 8, wherein each of the supporting members includes: a supporting column including a top contact area; and an adjusting and fixing part disposed at the bottom of the supporting column, and the adjusting and fixing part is correspondingly detachably connected with The plurality of supporting points are fixedly connected.

如請求項9所述的光罩容器，其中該複數個支撐件之間的複數個該頂接區更透過至少一支持件與至少一橋接件連接。 The photomask container according to claim 9, wherein a plurality of the top connecting areas between the plurality of supporting members are further connected to at least one bridge member through at least one supporting member.