TWI720693B - Reticle container - Google Patents
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- TWI720693B TWI720693B TW108141709A TW108141709A TWI720693B TW I720693 B TWI720693 B TW I720693B TW 108141709 A TW108141709 A TW 108141709A TW 108141709 A TW108141709 A TW 108141709A TW I720693 B TWI720693 B TW I720693B
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Abstract
Description
本發明提供了一種光罩容器,由指一種具有多種不同可調整部位,進一步達到提高攜帶、運輸或傳送光罩便利性與安全性的光罩容器。 The present invention provides a photomask container, which refers to a photomask container with multiple different adjustable positions to further improve the convenience and safety of carrying, transporting or transmitting the photomask.
在半導體產業中,光罩在製程上扮演非常重要的角色。無論是傳統的黃光微影或蝕刻等技術,甚至到近年來的極紫外光刻(Extreme ultraviolet lithography,EUVL)製程,皆無法脫離光罩的使用。 In the semiconductor industry, photomasks play a very important role in the manufacturing process. Whether it is traditional yellow light lithography or etching techniques, and even the extreme ultraviolet lithography (EUVL) process in recent years, they cannot be separated from the use of photomasks.
在眾多半導體的直接或間接相關產業中,涉及光電相關的產業亦屬於相當重要的一塊。在製作大尺寸的面板時,其製程上所運用到的光罩尺寸亦隨著面板的尺寸改變。在科技進步的前提之下,現有的面板產業所能製作的面板尺寸逐步增大,伴隨而來的是,其製程上所需要的光罩尺寸亦同步增大。 Among the many directly or indirectly related industries of semiconductors, industries related to optoelectronics also belong to a very important piece. When making large-size panels, the size of the mask used in the manufacturing process also changes with the size of the panel. Under the premise of technological advancement, the size of the panels that can be produced by the existing panel industry is gradually increasing, and with it, the size of the mask required for its manufacturing process has also increased.
有別於製造處理器或晶片等半導體產業,面板產業所用的光罩因其尺寸可寬幅至800毫米比960毫米之故,並無法用傳統小型的光罩盒進行傳送或儲存;相對的必須使用專規的大尺寸光罩盒。 Different from the semiconductor industry such as the manufacture of processors or chips, the size of the mask used in the panel industry can be as wide as 800 mm to 960 mm, and therefore cannot be transported or stored with traditional small mask boxes; relatively necessary Use a special large-size mask box.
但在光罩盒中承載的光罩尺寸如此巨大的狀況下,伴隨的慣性運動也會越發嚴重。如此巨大尺寸的光罩在搬運或傳送的過程中,也更容易因為運送精度不足的問題,更容易產生搖晃、撞擊甚至造成整個光罩容器發生傾倒。進一步,導致大尺寸光罩的損壞。 But under the condition that the size of the reticle carried in the reticle box is so huge, the accompanying inertial motion will become more serious. In the process of handling or conveying such a huge size of the mask, it is also more likely to cause shaking, impact or even toppling of the entire mask container due to insufficient transportation accuracy. Further, damage to the large-size photomask is caused.
而針對不同的運送和儲存條件,各家面板或半導體廠的運輸規格也不見得一致。舉例來說,有些廠區的運送過程容易產生左右的擺動;而有些廠區則是會有高低落差的移動,導致大尺寸光罩會有位移刮磨的現象發生。因此,各種廠區用途的光罩容器,其所需要的需求均不盡相同,以現有的技術來說,目前的光罩容器仍難以克服這一點。 For different transportation and storage conditions, the transportation specifications of each panel or semiconductor factory are not necessarily consistent. For example, in some factories, the transportation process is prone to swing from side to side; while in some factories, there will be high and low movements, which will cause the phenomenon of displacement and scraping of large-size masks. Therefore, the requirements of the photomask containers for various factory uses are not the same. With the existing technology, the current photomask containers are still difficult to overcome this point.
為了解決先前技術中所提及的問題,本發明提供了一種光罩容器。進一步來說,所述光罩容器主要包含複數個組裝件、一上蓋以及一下蓋。該上蓋與該下蓋蓋合,形成一側緣。 In order to solve the problems mentioned in the prior art, the present invention provides a photomask container. Furthermore, the photomask container mainly includes a plurality of assembly parts, an upper cover and a lower cover. The upper cover is covered with the lower cover to form a side edge.
其中,該上蓋包含一第一左蓋部以及一第一右蓋部,該第一左蓋部透過一第一左連接區與其中一個該組裝件連接固定;而該第一右蓋部透過一第一右連接區與該第一左蓋部連接的該組裝件連接固定。 Wherein, the upper cover includes a first left cover portion and a first right cover portion, the first left cover portion is connected and fixed to one of the assembling parts through a first left connecting area; and the first right cover portion penetrates a The first right connecting area is connected and fixed to the assembly piece connected to the first left cover part.
同樣地,該下蓋包含一第二左蓋部及一第二右蓋部。該第二左蓋部透過一第二左連接區與另一個該組裝件連接固定;而該第二右蓋部透過一第二右連接區與該第二左蓋部連接的該組裝件連接固定。 Similarly, the lower cover includes a second left cover portion and a second right cover portion. The second left cover part is connected and fixed to another assembly part through a second left connection area; and the second right cover part is connected and fixed to the assembly part connected to the second left cover part through a second right connection area .
其中,該側緣上更設有至少一識別監控模組,且該上蓋及該下蓋的內面四角共構為一固持區域,該下蓋的內面周緣共構為一支撐區域。 Wherein, at least one identification monitoring module is further provided on the side edge, and four corners of the inner surface of the upper cover and the lower cover jointly constitute a holding area, and the inner periphery of the lower cover jointly constitutes a supporting area.
以上對本發明的簡述,目的在於對本發明之數種面向和技術特徵作一基本說明。發明簡述並非對本發明的詳細表述,因此其目的不在特別列舉本發明的關鍵性或重要元件,也不是用來界定本發明的範圍,僅為以簡明的方式呈現本發明的數種概念而已。 The above brief description of the present invention aims to provide a basic description of several aspects and technical features of the present invention. The brief description of the invention is not a detailed description of the invention. Therefore, its purpose is not to specifically enumerate the key or important elements of the invention, nor to define the scope of the invention. It merely presents several concepts of the invention in a concise manner.
10:光罩容器 10: Mask container
100:上蓋 100: upper cover
101:第一左蓋部 101: The first left cover
1011:第一左連接區 1011: The first left connection area
102:第一右蓋部 102: The first right cover
1021:第一右連接區 1021: The first right connection area
200:下蓋 200: lower cover
201:第二左蓋部 201: The second left cover
202:第二右蓋部 202: second right cover
300:組裝件 300: Assembled parts
301:接合板 301: Joint plate
302:主支架 302: main stand
400:識別監控模組 400: Identify the monitoring module
401:容置槽 401: Containment Slot
402:識別元件 402: identification component
4021:保護蓋 4021: Protective cover
403:監控器 403: Monitor
404:蓋板 404: cover
405:接合件 405: Joint
406:接合孔 406: Joint hole
407:扣合部 407: Fastening part
500:鎖固模組 500: Locking module
501:螺栓 501: Bolt
502:栓鎖柱 502: Latch Column
5021:螺紋孔 5021: threaded hole
503a:氣密槽 503a: airtight groove
503b:定位翼槽 503b: Positioning wing groove
504:穿鎖件 504: wear lock
5041:螺紋柱 5041: threaded column
600:固持件 600: Holder
601:條狀支持件 601: Strip support
602:彈性本體 602: Elastic Body
6021:開孔 6021: Hole
603:固定孔 603: fixed hole
700a:支撐件 700a: Support
700b:支撐件 700b: Support
701:支撐柱 701: support column
702:頂接區 702: top connection area
703:調整固定部 703: Adjust the fixed part
704:支持件 704: Support
705:橋接件 705: Bridge
M:主肋 M: main rib
W:側肋 W: side rib
G:固持溝 G: fixed groove
S:固持區域 S: Holding area
R:支撐區域 R: Support area
RP:支撐點 RP: support point
圖1係本發明實施例之外觀結構示意圖。 FIG. 1 is a schematic diagram of the appearance structure of an embodiment of the present invention.
圖2係本發明實施例之上蓋組成結構示意圖。 Fig. 2 is a schematic diagram of the composition structure of the upper cover of the embodiment of the present invention.
圖3係本發明實施例之內部結構示意圖。 Fig. 3 is a schematic diagram of the internal structure of an embodiment of the present invention.
圖4係本發明實施例之下蓋結構拆解示意圖。 Fig. 4 is a schematic diagram of the disassembly of the lower cover structure of the embodiment of the present invention.
圖5係本發明實施例之固持區域與支撐區域示意圖。 FIG. 5 is a schematic diagram of the holding area and the supporting area of the embodiment of the present invention.
圖6係本發明實施例之鎖固模組結構示意圖。 FIG. 6 is a schematic diagram of the structure of the locking module according to the embodiment of the present invention.
圖7係本發明實施例之螺栓結構示意圖。 Fig. 7 is a schematic diagram of the bolt structure of the embodiment of the present invention.
圖8係本發明實施例之固持件安裝示意圖。 Fig. 8 is a schematic diagram of the mounting of the holding member according to the embodiment of the present invention.
圖9係本發明實施例之固持件結構示意圖。 FIG. 9 is a schematic diagram of the structure of the holder of the embodiment of the present invention.
圖10係本發明實施例之支撐件結構示意圖。 FIG. 10 is a schematic diagram of the structure of the supporting member according to the embodiment of the present invention.
圖11係本發明實施例之另一支撐件結構示意圖。 Fig. 11 is a schematic diagram of another support structure according to an embodiment of the present invention.
圖12係本發明實施例之支持件與橋接件結構示意圖。 Fig. 12 is a schematic diagram of the structure of the supporting member and the bridging member of the embodiment of the present invention.
為能瞭解本發明的技術特徵及實用功效,並可依照說明書的內容來實施,茲進一步以如圖式所示的較佳實施例,詳細說明如後:請同時參照圖1-3,圖1係本發明實施例之外觀結構示意圖;圖2係本發明實施例之上蓋組成結構示意圖;圖3係本發明實施例之內部結構示意圖。 In order to understand the technical features and practical effects of the present invention, and implement it in accordance with the content of the specification, the preferred embodiment shown in the figure is further used, and the detailed description is as follows: please refer to Figures 1-3 and Figure 1 at the same time. It is a schematic diagram of the external structure of the embodiment of the present invention; FIG. 2 is a schematic diagram of the structure of the top cover of the embodiment of the present invention; FIG. 3 is a schematic diagram of the internal structure of the embodiment of the present invention.
如圖1所示,圖1中展示了本發明實施例之光罩容器10。由圖1可以得知本實施例之光罩容器10主要包含上蓋100以及下蓋200,且該上蓋100與該下蓋200蓋合,並形成具有側緣的光罩容器10。其進一步參照圖2,圖2中進一步以
上蓋100作為主要的範例。然實質上,下蓋200也具有相應的類似結構。由圖2的資訊可以得知,在本實施例中,上蓋100及下蓋200皆由複數個組裝件300所拼接而成。以本實施例而言,組裝件300一共有兩個,一個嵌設於上蓋100中;另一個則嵌設於下蓋200中。本實施例之組裝件300係由首尾兩個接合板301裝設於主支架302所共構而成。當然,在其他可能的實施例中,組裝件300亦可以設計為一體成形的結構,本發明並不加以限制。
As shown in Fig. 1, Fig. 1 shows a
在本實施例中,接合板301主要位於光罩容器10的側緣上。進一步根據圖2中所記載的訊息,可得知本實施例之上蓋100由第一左蓋部101以及第一右蓋部102拼接而成。第一左蓋部101透過第一左連接區1011與組裝件300連接固定;而第一右蓋部102則透過第一右連接區1021與第一左蓋部101連接的同個組裝件300連接固定。
In this embodiment, the
同樣地,本實施例之下蓋200也包含第二左蓋部201及第二右蓋部202。第二左蓋部201同樣可透過第二左連接區(圖未示,可參照第一左連接區1011的結構)與另一個組裝件300連接固定;而第二右蓋部202則透過第二右連接區(圖未示,可參照第一右連接區1021的結構)與第二左蓋部201連接的組裝件300連接固定。
Similarly, the
綜上,完成本發明實施例的上蓋100與下蓋200,進一步讓其形成光罩容器10。接著,如圖3所示,由圖3便可看出本發明實施例之光罩容器10之側緣上更設有至少一識別監控模組400。接著請先參照圖5,圖5係本發明實施例之固持區域與支撐區域示意圖。如圖5所示,圖5係以下蓋200作為實例。然實際上本實施例之上蓋100或下蓋200之內面可設計為相同或相對應的功能區域(如
固持區域S、支撐區域R),本發明並不加以限制。如圖5所示,本實施例光罩容器10之下蓋200的內面四角共構為固持區域S,而內面周緣共構為支撐區域R。
In summary, the
在本實施例中,下蓋200的用途主要在光罩容器10平放的時候,必須達到同時能夠防止光罩位移並且平均地支撐光罩重量的目的。由於本實施例之光罩容器10係屬於大尺寸光罩(即面板產業所用的光罩,因其尺寸可寬幅至800毫米比960毫米,故稱為大尺寸光罩),具有較大的重量。搬運或儲存時更容易受到慣性作用影響而產生晃動、碰撞或是破裂,甚至導致整個光罩容器10傾倒的可能發生。因此,本實施例特別在光罩容器10之下蓋200(亦可於上蓋100中相對應的位置同時設置對應的功能區域)的內面四角共構區域定義為固持區域S,而內面周緣共構的部份定義為支撐區域R,用以設置相關的元件,據以解決大尺寸光罩的相關問題。
In this embodiment, the purpose of the
接著請同時參照圖3-5,其中圖4係本發明實施例之下蓋結構拆解示意圖。如圖3所示,在本實施例光罩容器10的側緣設有至少一識別監控模組400。更進一步來說,為了能夠同時控管到第一左蓋部101、第一右蓋部102、第二左蓋部201和第二右蓋部202,甚至是包含其組合完畢後上蓋100及下蓋200之個別狀態以及使用狀態下光罩容器10內部的參數(包含濕度、潔淨度等),每個第一左蓋部101、第一右蓋部102、第二左蓋部201和第二右蓋部202上皆可設有至少一組識別監控模組400。
Please refer to FIGS. 3-5 at the same time. FIG. 4 is a schematic diagram of disassembling the lower cover structure according to the embodiment of the present invention. As shown in FIG. 3, at least one
在本實施例中,每組組識別監控模組400包含容置槽401、識別元件402、監控器403以及蓋板404。其中,容置槽401包含可用以容納監控器403的開口。識別元件402則設置於光罩容器10側緣上鄰接容置槽401處。如圖3所示,在本實施例中,識別元件402由於為無線射頻標籤(RFID Tag)之故,係以保護
蓋4021蓋合後保護在下蓋200內部。至於監控器403上面可以包含小型的顯示器,用以顯示光罩容器10內部的參數(如濕度、潔淨度等);前述光罩容器10內部的參數(如濕度、潔淨度等)之讀數可以來自於儀器或光罩容器10內部的感測器測量,並以無線通訊的方式將測量的結果參數傳送至監控器403上顯示,讓相關操作人員可以馬上得知光罩容器10目前的狀態。
In this embodiment, each group of
而本實施例中,監控器403上更設有至少一接合件405,並與設置於容置槽401中的至少一接合孔406相應卡合,最後再如圖4一般,由蓋板404與容置槽401的開口蓋合,用以保護監控器403。
In this embodiment, the
本實施例採用的保護蓋4021及蓋板404皆可以設計為彈片卡合或是任意的卡扣方式,本發明不加以限制。此外,本實施例為了防止較重的大尺寸光罩導致光罩容器10之上蓋100和下蓋200在直立運輸時會有上蓋100和下蓋200分離的風險產生,光罩容器10的側緣上更設有多個扣合部407(本實施例為單側兩個),用以將上蓋100和下蓋200緊密結合。除了達到氣密的效果之外,也進一步加強整個光罩容器10的結構穩定性。
The
接著請同時參照圖5及圖6,圖6係本發明實施例之鎖固模組結構示意圖。圖6中進一步解釋了本實施例圖2中的第一左連接區1011、第一右連接區1021以及圖2未示但結構類似的下蓋200之第二左連接區、第二右連接區係如何透過複數個鎖固模組500進行固定之細部結構。
Please refer to FIGS. 5 and 6 at the same time. FIG. 6 is a schematic diagram of the structure of the locking module according to the embodiment of the present invention. FIG. 6 further explains the first
更進一步來說,本實施例之第一左連接區1011、第一右連接區1021、第二左連接區(圖未示)及第二右連接區(圖未示)中各設有複數個鎖固模組500,每個鎖固模組500包含螺栓501以及穿鎖件504,且穿鎖件504係由光罩容器10外穿過組裝件300中的主支架302後與螺栓501固定。可先參照圖5,由
圖5的範例中可得知第一左連接區1011、第一右連接區1021、第二左連接區(圖未示)及第二右連接區(圖未示)中實質上係由兩種肋條組成,其一為主肋M,以縱貫的方式設置於第一左連接區1011、第一右連接區1021、第二左連接區(圖未示)及第二右連接區(圖未示)中。每個主肋旁各設有多個側肋W。在本實施例中,翼狀的側肋W可以穩固主肋M的結構之外,側肋W與主肋M連接的點更屬於鎖固模組500的設置位置。
More specifically, the first
請進一步參照圖7,圖7係本發明實施例之螺栓結構示意圖。將圖5-7同時參照時,可得知本實施例鎖固模組500中的螺栓501構造係配合主肋M與側肋W的物理結構進行定位,具有安裝時可防呆的功能。本實施例之螺栓501主要由栓鎖柱502、氣密槽503a以及至少一定位翼槽503b共構而成。該栓鎖柱502具有螺紋孔5021。而氣密槽503a則環設於栓鎖柱502底部。最後至少一定位翼槽503b則設置於氣密槽503a外緣。
Please further refer to FIG. 7, which is a schematic diagram of the bolt structure of the embodiment of the present invention. When referring to FIGS. 5-7 at the same time, it can be seen that the structure of the
透過上述結構,螺栓501往下蓋合時,氣密槽503a可以形成第一層的氣密結構,並配合主肋M的形狀達到氣密的效果。於此同時,定位翼槽503b在本實施例中為兩個,且彼此間共構為一直線。當安裝螺栓501時,共構為一直線的定位翼槽503b可以順應卡合在直線的主肋M上,除了能夠減少安裝的難度之外,也更能夠防止氣密槽503a和定位翼槽503b產稱偏移,進而減低光罩容器10氣密效果的風險產生。
Through the above structure, when the
在本實施例中,螺栓501會先安裝完成後,再由穿鎖件504自光罩容器10的外部向內穿過固定。如圖6所示,穿鎖件504之頂部實質上更設有半徑較小的螺紋柱5041,透過螺紋柱5041的結構,可與栓鎖柱502上螺紋孔5021相應
旋合,進一步達到穩固結構的效果。且本實施例之穿鎖件504,其暴露於光罩容器10外的一側呈現漏斗狀,更有助於整個光罩容器10的表面平整與氣密程度。
In this embodiment, the
接著,請同時參照圖5、圖8及圖9,圖8係本發明實施例之固持件安裝示意圖;圖9係本發明實施例之固持件結構示意圖。首先,如圖5所示,本實施例光罩容器10下蓋200的內面四角共構區域定義為固持區域S,其中如圖8所示,具有固持溝G得以設置固持件600。本實施例中的固持件600得以複數個的形式設置於各個固持區域S中,其目的主要在於穩固大尺寸光罩的四個角落,避免其偏移的前提下一併提供足夠的支撐力。
Next, please refer to FIGS. 5, 8 and 9 at the same time. FIG. 8 is a schematic diagram of the mounting of the holder according to the embodiment of the present invention; FIG. 9 is a schematic diagram of the structure of the holder of the embodiment of the present invention. First, as shown in FIG. 5, the four-corner co-structured area on the inner surface of the
在本實施例中,固持件600主要包含支持本體(圖未示,包埋於彈性本體中)、至少一條狀支持件601、彈性本體602以及至少一固定孔603。其中至少一條狀支持件601設於該支持本體(圖未示,包埋於彈性本體中)上;彈性本體602則具有與至少一條狀支持件601數量相等的至少一開孔6021。藉此,彈性本體602包覆支持本體並使每個條狀支持件601超出每個開孔6021向上延伸一距離。而至少一固定孔603則同時設於支持本體(圖未示,包埋於彈性本體中)及該彈性本體602上。在本實施例中,至少一固定孔603可以設置於固持件600的底部或是左右兩端的末端,並使固持件600固定於固持溝G中,本發明並不加以限制。
In this embodiment, the holding
請同時參照圖4-5及圖10-12,圖10係本發明實施例之支撐件結構示意圖;圖11係本發明實施例之另一支撐件結構示意圖;圖12係本發明實施例之支持件與橋接件結構示意圖。 Please refer to FIGS. 4-5 and 10-12 at the same time. FIG. 10 is a schematic diagram of the support structure of an embodiment of the present invention; FIG. 11 is a schematic diagram of another support structure of an embodiment of the present invention; FIG. 12 is a support of the embodiment of the present invention Schematic diagram of the structure of parts and bridging parts.
首先,圖4中展示了支撐件700b的裝設,進一步參照圖5中的位置,可得知支撐件700b設置於右側的支撐區域R中。在本實施例中,由於光罩容器10
是大尺寸光罩盒的緣故,因此考量到各種不同的運輸或儲存狀況(如平放或直放),實際使用的時候,用以支撐光罩容器10內的元件所需要的高低和位置有可能不盡相同。
First, FIG. 4 shows the installation of the
因此,如圖5所示,本實施例之光罩容器10中,各個支撐區域R上設有彼此間具有固定間距的複數個支撐點RP,該複數個支撐點RP更與複數個支撐件(700a或700b)連接。換言之,基於本發明的精神,支撐件(700a或700b)的設置位置除了可以自由調整之外,也包含了可以互相支援需要支撐的重量或調整支撐位置高低等技術需求。
Therefore, as shown in FIG. 5, in the
因此,如圖10-12所示,本實施例中主要由兩種支撐件(700a或700b)構成,其中支撐件700a的形狀較為方正;而支撐件700b則較類似矩形。本實施例之支撐件(700a或700b)主要由支撐柱701和調整固定部703構成。其中支撐柱701包含頂接區702,所述頂接區702可以是螺絲孔或插銷孔等用以讓其他元件固定的設計,本發明並不加以限制。而調整固定部703則設置於支撐柱701底部,該調整固定部703對應可拆地與前述複數個支撐點RP固接。如圖12所示,在本實施例中,必要時,複數個支撐件701之間的頂接區702更透過至少一支持件704與至少一橋接件705連接。
Therefore, as shown in FIGS. 10-12, the present embodiment mainly consists of two types of support members (700a or 700b), where the
更進一步來說,本實施例之支持件704底部係設技為螺紋狀,且頂部為齒輪狀的螺帽,以提供使用者轉動;在本實施例中,支持件704的螺帽為圓頂結構,據此可以將支持件704與大尺寸光罩接觸的面積降低,減少刮傷的機會。
Furthermore, the bottom of the
據此,本實施例可以任意調整支持件704的高低,用以適應各種不同的大尺寸光罩支撐高低需求。而橋接件705可讓支持件704穿過後再與頂接區702連接。橋接件705除了可以將重量分散給與橋接件705連接的複數個支撐件
(700a或700b)之外,更可以在支持件704轉緊至一定程度時,限制每個支持件704的高低程度相同。此外,如橋接件705跨過第一左蓋部101與第一右蓋部102,更具有進一步穩定光罩容器10結構的功效。
Accordingly, in this embodiment, the height of the supporting
惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即依本發明申請專利範圍及說明內容所作之簡單變化與修飾,皆仍屬本發明涵蓋之範圍內。 However, the above are only the preferred embodiments of the present invention, and should not be used to limit the scope of implementation of the present invention, that is, simple changes and modifications made in accordance with the scope of the patent application and the description of the present invention still belong to the present invention. Covered.
100:上蓋 100: upper cover
101:第一左蓋部 101: The first left cover
102:第一右蓋部 102: The first right cover
200:下蓋 200: lower cover
201:第二左蓋部 201: The second left cover
202:第二右蓋部 202: second right cover
301:接合板 301: Joint plate
400:識別監控模組 400: Identify the monitoring module
401:容置槽 401: Containment Slot
4021:保護蓋 4021: Protective cover
404:蓋板 404: cover
406:接合孔 406: Joint hole
407:扣合部 407: Fastening part
600:固持件 600: Holder
700b:支撐件 700b: Support
Claims (10)
Priority Applications (4)
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TW108141709A TWI720693B (en) | 2019-11-18 | 2019-11-18 | Reticle container |
CN201911235658.XA CN111290215A (en) | 2018-12-06 | 2019-12-05 | Light shield container |
KR1020190161342A KR102269715B1 (en) | 2018-12-06 | 2019-12-06 | Reticle container |
US16/706,612 US11333967B2 (en) | 2018-12-06 | 2019-12-06 | Reticle container |
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TW108141709A TWI720693B (en) | 2019-11-18 | 2019-11-18 | Reticle container |
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TWI720693B true TWI720693B (en) | 2021-03-01 |
TW202121564A TW202121564A (en) | 2021-06-01 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0817906A (en) * | 1994-06-27 | 1996-01-19 | Tanehashi Kikaiten:Kk | Board accommodation vessel |
TW463785U (en) * | 2000-10-30 | 2001-11-11 | Ju Tai Nan | Structure for storage box |
CN101169593A (en) * | 2006-10-25 | 2008-04-30 | 家登精密工业股份有限公司 | Metal lithographic mask box |
TWM492307U (en) * | 2013-03-29 | 2014-12-21 | Sekisui Plastics | Container for transporting panel |
-
2019
- 2019-11-18 TW TW108141709A patent/TWI720693B/en active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0817906A (en) * | 1994-06-27 | 1996-01-19 | Tanehashi Kikaiten:Kk | Board accommodation vessel |
TW463785U (en) * | 2000-10-30 | 2001-11-11 | Ju Tai Nan | Structure for storage box |
CN101169593A (en) * | 2006-10-25 | 2008-04-30 | 家登精密工业股份有限公司 | Metal lithographic mask box |
TWM492307U (en) * | 2013-03-29 | 2014-12-21 | Sekisui Plastics | Container for transporting panel |
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