TWI714103B - Apparatus for checking pin contact pressure using z-axial feeder of flat panel display inspection device - Google Patents

Apparatus for checking pin contact pressure using z-axial feeder of flat panel display inspection device Download PDF

Info

Publication number
TWI714103B
TWI714103B TW108118412A TW108118412A TWI714103B TW I714103 B TWI714103 B TW I714103B TW 108118412 A TW108118412 A TW 108118412A TW 108118412 A TW108118412 A TW 108118412A TW I714103 B TWI714103 B TW I714103B
Authority
TW
Taiwan
Prior art keywords
probe
contact
panel display
moving block
moving
Prior art date
Application number
TW108118412A
Other languages
Chinese (zh)
Other versions
TW202043777A (en
Inventor
楊潤善
Original Assignee
楊潤善
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 楊潤善 filed Critical 楊潤善
Priority to TW108118412A priority Critical patent/TWI714103B/en
Publication of TW202043777A publication Critical patent/TW202043777A/en
Application granted granted Critical
Publication of TWI714103B publication Critical patent/TWI714103B/en

Links

Images

Landscapes

  • Liquid Crystal (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)

Abstract

The present disclosure relates to an apparatus for checking pin contact pressure using a z-axial feeder of a flat panel display inspection device. The present disclosure provides an apparatus for checking pin contact pressure using a z-axial feeder of a flat panel display inspection device, the apparatus being able to minimize an error and pressure in contact by vertically sliding contact pins of a probe card without friction using frictionless vertical moving members when the top of a flat panel display and the contact pins of the probe card come in contact with each other in a flat panel display inspection process.

Description

一種使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置Device for checking contact pressure of probe using Z-axis feeder of flat panel display checking device

本發明涉及一種使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置，尤指一種使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置，該裝置物理地將探針與在所需位置上的圖案相接觸，然後將數據傳送到測試儀設備，以通過在檢查過程中固定在狀態的平板顯示器上驅動饋線來檢查數據。該檢查過程是製造平板顯示器產品的最終過程。The present invention relates to a device that uses a z-axis feeder of a flat-panel display inspection device to check the contact pressure of a probe, in particular to a device that uses a z-axis feeder of a flat-panel display inspection device to check the contact pressure of the probe. The device physically The probe contacts the pattern at the desired position and then transmits the data to the tester device to check the data by driving the feeder on the flat panel display fixed in the state during the inspection. This inspection process is the final process of manufacturing flat panel display products.

通常，平板顯示器包括液晶顯示器（LCD），等離子顯示板（PDP）和場發射顯示器（FED）。Generally, flat panel displays include liquid crystal displays (LCD), plasma display panels (PDP), and field emission displays (FED).

製造底部基板的製程，製造頂部基板的製程，粘合底部基板和頂部基板的製程等，這些製程被執行，以製造這種平板顯示器。具體地，在用於製造底部基板的玻璃盤上形成多個單元，在單元上以矩陣形狀彼此交叉地形成多條水平線和垂直線，並且在包括透明像素電極的像素單元形成於水平線和垂直線的交叉點，連接到水平線，垂直線和像素電極的薄膜晶體管形成在像素單元上。The process of manufacturing the bottom substrate, the process of manufacturing the top substrate, the process of bonding the bottom substrate and the top substrate, etc., are performed to manufacture such flat panel displays. Specifically, a plurality of cells are formed on the glass disk used to manufacture the bottom substrate, a plurality of horizontal lines and vertical lines are formed on the cells to cross each other in a matrix shape, and the pixel cells including transparent pixel electrodes are formed on the horizontal and vertical lines. The intersections of the thin film transistors connected to the horizontal line, the vertical line and the pixel electrode are formed on the pixel unit.

在檢查過程之後，在劃線過程中切割在玻璃盤上形成的單元，從玻璃盤切下單元，也就是說，底部基板分別粘合到在製造頂部基板的過程中形成的頂部基板，然後組合驅動電路和用於驅動像素單元的若干元件，從而實現平板顯示器。After the inspection process, the cells formed on the glass disk are cut during the scribing process, and the cells are cut from the glass disk, that is, the bottom substrate is respectively bonded to the top substrate formed in the process of manufacturing the top substrate, and then combined The driving circuit and several elements used to drive the pixel unit to realize the flat panel display.

當在上述製造平板顯示器的過程中測試平板顯示器時，探測裝置上下移動並且側攝像機用於在相關技術中準確且安全地使探針接觸，如圖一所示，將探測裝置D放在虛設平板顯示區域F上，然後通過側攝像機C計算探針A和平板顯示器接觸表面F之間的距離，並通過基於計算值向上和向下移動探測裝置D來嘗試探針接觸。在針接觸完成之後，使用設置在探測裝置D上的上部相機B執行檢查探針A是否已經成功地與平板顯示器接觸，然後，工人通過操控調節器E調節探針接觸壓力值來進行再接觸。最後通過重複該過程來設置最安全的探針接觸的條件，然後執行探針與測試平板顯示器的接觸，從而在平板顯示器上執行圖案檢查。When testing the flat panel display in the above process of manufacturing the flat panel display, the detection device moves up and down and the side camera is used to accurately and safely contact the probe in the related art. As shown in Figure 1, the detection device D is placed on the dummy flat panel. On the display area F, the distance between the probe A and the flat panel display contact surface F is then calculated by the side camera C, and probe contact is attempted by moving the detection device D up and down based on the calculated value. After the needle contact is completed, the upper camera B provided on the detection device D is used to check whether the probe A has successfully contacted the flat panel display. Then, the worker adjusts the probe contact pressure value by manipulating the regulator E to perform re-contact. Finally, the safest probe contact condition is set by repeating the process, and then the probe contact with the test flat panel display is performed, thereby performing pattern inspection on the flat panel display.

在上述平板顯示器的圖案檢查中，應該在保持精確測量點和精細接觸深度的情況下持續進行檢查。然而，根據現有技術的方法，設置操控值不可避免地取決於工人在檢查平板顯示器的熟練度。此外，要檢查的平板顯示器是不均勻的，因此每次都難以設置倍率值。 此外，即使設置完成，也會對探針卡施加衝擊並且倍率值設置時間很長。In the pattern inspection of the flat panel display described above, the inspection should be continued while maintaining accurate measurement points and fine contact depths. However, according to the prior art method, setting the manipulation value inevitably depends on the proficiency of the worker in inspecting the flat panel display. In addition, the flat panel display to be inspected is not uniform, so it is difficult to set the magnification value every time. In addition, even if the setting is completed, an impact is applied to the probe card and the magnification value setting time is long.

本發明的主要目的是提供一種使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置，當平板顯示器的頂部和探針卡的接觸探針在平板顯示器檢查過程中彼此接觸時，該裝置能夠使用無摩擦的垂直移動構件垂直地滑動探針卡的接觸探針而沒有摩擦。也就是說，本發明提供了一種使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置，該裝置能夠在平板顯示器檢查過程中沒有摩擦地垂直移動探針卡的接觸探針來最小化接觸中的誤差和壓力。The main purpose of the present invention is to provide a device for checking the contact pressure of the probe using the z-axis feeder of the flat-panel display inspection device. When the top of the flat-panel display and the contact probe of the probe card contact each other during the flat-panel display inspection process, The device can use a frictionless vertical moving member to vertically slide the contact probe of the probe card without friction. In other words, the present invention provides an apparatus for inspecting the contact pressure of a probe using a z-axis feeder of a flat-panel display inspection device, which can vertically move the contact probe of the probe card without friction during the inspection of the flat-panel display. Minimize the error and pressure in contact.

本發明的另一目的是提供一種使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置，該裝置能夠通過測量平板顯示器檢查裝置中探針卡的接觸探針接觸的壓力來提供更精確的探針接觸，然後根據壓力實時檢查和調整預定水平的操控設定值。Another object of the present invention is to provide an apparatus for inspecting the contact pressure of a probe using a z-axis feeder of a flat-panel display inspection device, which can measure the contact pressure of the contact probe of the probe card in the flat-panel display inspection device. More precise probe contact, and then real-time check and adjust the predetermined level of control settings based on the pressure.

根據本發明的一特徵，提供了一種使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置，該裝置被配置成通過垂直移動單元操作選擇性地與放置在平台上的平板顯示器的頂部接觸，該垂直移動單元被配置為利用施加z軸外力的預定驅動單元相操作。該裝置包括有：According to a feature of the present invention, there is provided an apparatus for inspecting the contact pressure of a probe using a z-axis feeder of a flat-panel display inspection apparatus. The apparatus is configured to selectively interact with a flat-panel display placed on a platform by operating a vertical moving unit. The vertical moving unit is configured to operate with a predetermined driving unit that applies a z-axis external force. The device includes:

複數個導向塊，固定在垂直移動單元上以便一起垂直移動；Multiple guide blocks are fixed on the vertical moving unit to move vertically together;

一移動塊，用以沿導向塊垂直移動；A moving block to move vertically along the guide block;

複數個無摩擦垂直移動構件***導向塊中並設置在移動塊的側面，使得移動塊在沒有摩擦的情況下通過從外部注入的壓縮空氣移動;A plurality of frictionless vertical moving members are inserted into the guide block and arranged on the side of the moving block, so that the moving block moves by compressed air injected from the outside without friction;

一探測單元，具有一探針卡，該探針卡與待檢查的平板顯示器的頂部接觸，並一體地設置在移動塊的下部;A detection unit, having a probe card, the probe card is in contact with the top of the flat panel display to be inspected, and is integrally provided in the lower part of the moving block;

一探針接觸檢查傳感器測量接觸探針的接觸壓力，當移動塊通過探針卡的接觸探壓力向上移動時產生與接觸壓力相對應的信號；及A probe contact inspection sensor measures the contact pressure of the contact probe, and generates a signal corresponding to the contact pressure when the moving block moves upward by the contact probe pressure of the probe card; and

複數個壓縮彈簧，當向下移動的垂直移動單元返回時，壓縮彈簧施加外力用以返回已向上移動的移動塊。A plurality of compression springs, when the vertical moving unit that moves downward returns, the compression spring applies external force to return the moving block that has moved upward.

根據本發明，如上所述，當接觸針和平板顯示器的頂部彼此接觸時，在平板顯示器的檢查過程中，可以通過無摩擦垂直移動構件垂直地滑動探針卡的接觸探針而沒有摩擦，因此可以最小化與探針接觸的誤差，因此可以更精確地使探針卡接觸探針與平板顯示器的頂部接觸。According to the present invention, as described above, when the contact pin and the top of the flat panel display are in contact with each other, during the inspection process of the flat panel display, the contact probe of the probe card can be vertically slid by the frictionless vertical moving member without friction, so The error of contact with the probe can be minimized, so the probe card can be contacted with the probe to the top of the flat panel display more accurately.

因此，當檢查平板顯示器並實現具有更優異性能的設備時，可以提供更準確的測量結果和一致性。此外，可以提高測試精度並獲得高可靠性的數據。Therefore, when inspecting flat panel displays and realizing devices with better performance, more accurate measurement results and consistency can be provided. In addition, the test accuracy can be improved and highly reliable data can be obtained.

在下文中，將參考附圖詳細描述具有上述配置的本公開。Hereinafter, the present disclosure having the above-mentioned configuration will be described in detail with reference to the accompanying drawings.

請參閱第二圖至第四圖所示，依據本發明一種使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置，該裝置被配置為當平板顯示器6的頂部和探針卡50的接觸探針52平板顯示器6的圖案檢查過程中接觸時，能夠使用無摩擦的垂直移動構件40在沒有摩擦的情況下垂直地滑動探針卡50的接觸探針52。為此，在使用根據本發明使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置中，探針卡50的接觸探針52可以在移除摩擦的情況下垂直移動，其通過預定的驅動單元，選擇性地與平板顯示器6頂部接觸。Please refer to Figures 2 to 4, according to the present invention, a device for inspecting the contact pressure of the probe using the z-axis feeder of the flat panel display inspection device is configured to act as the top of the flat panel display 6 and the probe card When the contact probes 52 of 50 are contacted during pattern inspection of the flat panel display 6, the frictionless vertical movement member 40 can be used to vertically slide the contact probes 52 of the probe card 50 without friction. For this reason, in the device for inspecting the contact pressure of the probe using the z-axis feeder of the flat-panel display inspection device according to the present invention, the contact probe 52 of the probe card 50 can move vertically with friction removed, which passes The predetermined driving unit selectively contacts the top of the flat panel display 6.

該驅動單元包括提供垂直驅動力的驅動馬達12，並且能夠與驅動單元一起操作的預定結構的垂直移動單元10。該垂直移動單元10安裝在驅動單元上，以通過來自驅動馬達12的驅動力選擇性地垂直移動。因此，當垂直移動單元10垂直移動時，探針卡50的接觸探針52通過導向塊20，移動塊30及無摩擦垂直移動構件40，選擇性地與平板顯示器6的表面接觸。The driving unit includes a driving motor 12 that provides a vertical driving force, and a vertical moving unit 10 of a predetermined structure capable of operating with the driving unit. The vertical moving unit 10 is installed on a driving unit to selectively move vertically by the driving force from the driving motor 12. Therefore, when the vertical moving unit 10 moves vertically, the contact probe 52 of the probe card 50 selectively contacts the surface of the flat panel display 6 through the guide block 20, the moving block 30 and the frictionless vertical moving member 40.

該導向塊20是呈一對，分別固定在垂直移動單元10底部兩側，具有弧度形狀的平面，並具有向內側突出的延伸部22。一對安裝孔24垂直地穿過導向塊20的每個延伸部22，使得無摩擦垂直移動構件40安裝在其中。The guide blocks 20 are in a pair, respectively fixed on both sides of the bottom of the vertical moving unit 10, have a curved plane, and have an extension 22 protruding inward. A pair of mounting holes 24 vertically pass through each extension 22 of the guide block 20 so that the frictionless vertical moving member 40 is mounted therein.

用於限制移動塊30向上移動的位置的止擋件26設置在導向塊20的延伸部22的頂部上。止擋件26具有基本上成L形狀的前部。通孔26a形成在止擋件26的頂部，使得自動操控調節器80的下端穿過通孔26a。A stopper 26 for restricting the position where the moving block 30 moves upward is provided on the top of the extension 22 of the guide block 20. The stopper 26 has a front portion that is substantially L-shaped. A through hole 26a is formed at the top of the stopper 26 so that the lower end of the automatic control adjuster 80 passes through the through hole 26a.

移動塊30可以由與無摩擦垂直移動構件40結合的導向塊20垂直移動和引導。移動塊30具有基本上為圓盤形狀的基部32，其中具有基本上矩形框架形狀並具有弧度形狀平面的一對垂直部分34一體地形成在基部32的兩個邊緣處。The moving block 30 may be vertically moved and guided by the guide block 20 combined with the frictionless vertical moving member 40. The moving block 30 has a substantially disc-shaped base 32 in which a pair of vertical portions 34 having a substantially rectangular frame shape and having an arc-shaped plane are integrally formed at both edges of the base 32.

導向塊20的延伸部22***移動塊30的垂直部分34內，留一預定間隙於其間。導向軸42通過***延伸部22中的無摩擦垂直移動構件40垂直安裝在垂直部分34中。The extending portion 22 of the guide block 20 is inserted into the vertical portion 34 of the moving block 30, leaving a predetermined gap therebetween. The guide shaft 42 is vertically installed in the vertical portion 34 by the frictionless vertical moving member 40 inserted into the extension 22.

操作無摩擦垂直移動構件40以通過從外部注入的壓縮空氣執行與軸承相同的功能而不摩擦，使得移動塊30能夠在導向軸42上平穩地上下移動。The frictionless vertical moving member 40 is operated to perform the same function as a bearing by compressed air injected from the outside without friction, so that the moving block 30 can move up and down smoothly on the guide shaft 42.

一探針卡50設置在移動塊30的基部32的中心，以在垂直移動單元10移動時與移動塊30垂直移動。探針卡50在中心處具有接觸探針52，接觸探針52與放置在檢查裝置的平台上的平板顯示器6接觸。A probe card 50 is provided at the center of the base 32 of the moving block 30 to move vertically with the moving block 30 when the vertical moving unit 10 moves. The probe card 50 has a contact probe 52 at the center, and the contact probe 52 is in contact with the flat panel display 6 placed on the platform of the inspection device.

一接觸突起38形成在移動塊30的一個垂直部分34處，並且固定在裝置上的預定位置處的探針接觸檢查傳感器60設置成與接觸突起38接觸，從而測量當移動塊30向上移動並通過探針卡50的接觸探針52及平板顯示器6的物理接觸而返回時施加到接觸探針52的壓力，並根據壓力產生電信號。A contact protrusion 38 is formed at a vertical portion 34 of the moving block 30, and a probe contact inspection sensor 60 fixed at a predetermined position on the device is arranged to contact the contact protrusion 38 to measure when the moving block 30 moves upward and passes The pressure applied to the contact probe 52 when the contact probe 52 of the probe card 50 and the flat panel display 6 are physically contacted and returned, and an electrical signal is generated according to the pressure.

壓縮彈簧70，其兩端分別固定在導向塊20和移動塊30用以連接的壓縮彈簧70的凸部(28、36)的，以通過施加外力來保持初始位置值。這樣，當通過垂直移動單元10向下移動預定距離的導向塊20向上移動時，通過探針卡50的接觸探針52的物理接觸壓力向上移動的移動塊30可以返回到初始位置。The two ends of the compression spring 70 are respectively fixed to the convex portions (28, 36) of the compression spring 70 for connecting the guide block 20 and the moving block 30 to maintain the initial position value by applying an external force. In this way, when the guide block 20 moved downward by a predetermined distance by the vertical moving unit 10 moves upward, the moving block 30 moved upward by the physical contact pressure of the contact probe 52 of the probe card 50 can return to the initial position.

一對自動操控調節器80安裝在垂直移動單元10上，其端部與移動塊30的頂部接觸。當由探針接觸檢查傳感器60檢測到的壓力值被轉換成電信號並實時輸入時，自動操控調節器80可以根據該信息自動控制探針卡50接觸探針52的操控。A pair of automatic control adjusters 80 are installed on the vertical moving unit 10, and their ends are in contact with the top of the moving block 30. When the pressure value detected by the probe contact inspection sensor 60 is converted into an electric signal and input in real time, the automatic manipulation regulator 80 can automatically control the manipulation of the probe card 50 contacting the probe 52 according to the information.

用於檢查探針卡50接觸探針52與平板顯示器6接觸時的狀態的相機2，佈置有包括驅動馬達12的垂直移動單元10的殼體100。The camera 2 for checking the state when the probe card 50 contacts the probe 52 and the flat panel display 6 is provided with a housing 100 of a vertical movement unit 10 including a drive motor 12.

下面詳細描述具有上述配置的本發明的操作。The operation of the present invention having the above-mentioned configuration is described in detail below.

首先，在使用配備有用於使用z軸進給器檢查銷接觸壓力的裝置的探針檢查裝置測試預定平板顯示器6的過程中，包括設置在探針檢查裝置上的探針卡50的探測單元移動到平板顯示器6上方的測試位置。然後，操作用於沿z軸方向饋送探針卡50的驅動馬達12，從而將垂直移動單元10向下移動一預定距離（如第5A圖所示），當垂直移動單元10向下移動時，導向塊20和構造成與垂直移動單元10一起操作的移動塊30也整體向下移動。此外，設置在移動塊30的基部32的中心處的探針卡50的接觸探針52與平板顯示器6的頂部接觸（如第五B圖所示）。當探針卡50的接觸探針52與平板顯示器6的頂部接觸時，被配置為與探針卡50的接觸探針52一起操作的移動塊30受到接觸壓力而沿著無摩擦垂直移動構件40向上移動。在該過程中，移動塊30可以通過注入無摩擦垂直移動構件40的壓縮空氣沿著通過無摩擦垂直移動構件40***的導向軸42平滑地向上移動而沒有摩擦。通過移動塊30的物理接觸測量力來產生電信號的針接觸檢查傳感器60測量隨著移動塊30的上移而改變的輸入值（第六圖中的（A）部分改變成（B）部分）並產生一個信號。當信號超出作為操控設定值的預定參考值時，控制驅動馬達12停止。此時，根據預定的測試信號，可以通過相機2等在平板顯示器6的信號線和像素電極上執行預定的檢查處理（如第五C圖所示）。First, in the process of testing a predetermined flat panel display 6 using a probe inspection device equipped with a device for inspecting pin contact pressure using a z-axis feeder, the detection unit including the probe card 50 provided on the probe inspection device moves Go to the test position above the flat panel display 6. Then, the drive motor 12 for feeding the probe card 50 in the z-axis direction is operated to move the vertical moving unit 10 downward a predetermined distance (as shown in FIG. 5A). When the vertical moving unit 10 moves downward, The guide block 20 and the moving block 30 configured to operate together with the vertical moving unit 10 also move downward as a whole. In addition, the contact probe 52 of the probe card 50 disposed at the center of the base 32 of the moving block 30 is in contact with the top of the flat panel display 6 (as shown in the fifth figure B). When the contact probe 52 of the probe card 50 is in contact with the top of the flat panel display 6, the moving block 30 configured to operate together with the contact probe 52 of the probe card 50 is subjected to contact pressure to move the member 40 along the frictionless vertical direction. Move up. In this process, the moving block 30 may smoothly move upwards without friction along the guide shaft 42 inserted through the frictionless vertical moving member 40 by injecting compressed air into the frictionless vertical moving member 40. The needle contact check sensor 60 that generates an electrical signal by measuring the force of the physical contact of the moving block 30 measures the input value that changes as the moving block 30 moves up (part (A) in the sixth figure is changed to part (B)) And generate a signal. When the signal exceeds a predetermined reference value as a manipulation setting value, the driving motor 12 is controlled to stop. At this time, according to a predetermined test signal, a predetermined inspection process can be performed on the signal lines and pixel electrodes of the flat panel display 6 by the camera 2 or the like (as shown in FIG. 5C).

在預定檢查過程結束之後，當操作導向塊20的垂直移動單元10通過操作驅動馬達12向上移動時，向上移動預定高度的移動塊30通過壓縮彈簧70的恢復力而向下移動並返回到初始位置。After the predetermined inspection process ends, when the vertical moving unit 10 of the operating guide block 20 moves upward by operating the drive motor 12, the moving block 30 moving upward by a predetermined height moves downward by the restoring force of the compression spring 70 and returns to the initial position .

在該過程中，移動塊30物理地與自動操控調節器80接觸，由物理接觸產生的力由探針接觸檢查傳感器60測量，而當接觸力達到預定壓力參考值時，裝置進入待機狀態。In this process, the moving block 30 physically contacts the automatic control regulator 80, the force generated by the physical contact is measured by the probe contact inspection sensor 60, and when the contact force reaches a predetermined pressure reference value, the device enters a standby state.

當返回的移動塊30沒有返回預定壓力值時，自動操控調節器80基於通過探針接觸檢查傳感器60實時傳輸的壓力值自動調節移動塊30的操控。When the returning moving block 30 does not return to the predetermined pressure value, the automatic manipulation regulator 80 automatically adjusts the manipulation of the moving block 30 based on the pressure value transmitted in real time through the probe contact inspection sensor 60.

上述詳細說明為針對本發明較佳之可行實施例說明而已,惟該實施例並非用以限定本發明之申請專利範圍,凡其他未脫離本發明所揭示之技藝精神下所完成之均等變化與修飾變更,均應包含於本發明所涵蓋之專利範圍中。The above detailed description is only for the description of the preferred feasible embodiments of the present invention, but the embodiment is not used to limit the scope of the patent application of the present invention, and all other equivalent changes and modifications completed without departing from the technical spirit of the present invention , Should be included in the scope of patent covered by the present invention.

殼體100 垂直移動單元10 驅動馬達12 相機2 導向塊20 延伸部22 安裝孔24 止擋件26 通孔26a 移動塊30 基部32 垂直部分34 凸部28、36 接觸突起38 垂直移動構件40 導向軸42 探針卡50 接觸探針52 平板顯示器6 探針接觸檢查傳感器60 壓縮彈簧70 自動操控調節器80 探針A 相機B 側攝像機C 探測裝置D 操控調節器E 虛設平板顯示區域F Shell 100 Vertical moving unit 10 Drive motor 12 Camera 2 Guide block 20 Extension 22 Mounting hole 24 Stop 26 Through hole 26a Move block 30 Base 32 Vertical part 34 Convex 28, 36 Contact protrusion 38 Vertical moving member 40 Guide shaft 42 Probe card 50 Contact probe 52 Flat panel display 6 Probe contact check sensor 60 Compression spring 70 Automatic control regulator 80 Probe A Camera B Side camera C Detection device D Control regulator E Dummy flat panel display area F

第一圖係表示現有技術的平板顯示器檢查裝置的概略結構圖。 第二圖係本發明之立體外觀圖。 第三圖係本發明置之立體配置圖。 第四圖係本發明之立體分解圖。 第五A圖至第五C圖係本發明檢查平板顯示器過程之示意圖。 第六圖係本發明探針接觸檢查傳感器的操作狀態之示意圖。 The first figure is a schematic configuration diagram showing a conventional flat panel display inspection device. The second figure is a perspective view of the present invention. The third figure is a three-dimensional configuration diagram of the present invention. The fourth figure is an exploded perspective view of the present invention. Figures 5A to 5C are schematic diagrams of the inspection process of the flat panel display of the present invention. The sixth figure is a schematic diagram of the operating state of the probe contact inspection sensor of the present invention.

垂直移動單元10 驅動馬達12 相機2 導向塊20 止擋件26 移動塊30 凸部28、36 探針卡50 探針接觸檢查傳感器60 壓縮彈簧70 Vertical moving unit 10 Drive motor 12 Camera 2 Guide block 20 Stop 26 Move block 30 Convex 28, 36 Probe card 50 Probe contact check sensor 60 Compression spring 70

Claims (4)

一種使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置，該裝置被配置成通過垂直移動單元操作選擇性地與放置在平台上的平板顯示器的頂部接觸，該垂直移動單元被配置為利用施加z軸外力的驅動單元相操作，該裝置包括：複數個導向塊，固定在垂直移動單元上以便一起垂直移動；一移動塊，用以沿該導向塊垂直移動；複數個無摩擦垂直移動構件***該導向塊中並設置在該移動塊的側面，使得該移動塊在沒有摩擦的情況下通過從外部注入的壓縮空氣移動；一探測單元，具有一探針卡，該探針卡與待檢查的該平板顯示器的頂部接觸，並一體地設置在該移動塊的下部；一探針接觸檢查傳感器，測量接觸探針的接觸壓力，當該移動塊通過該探針卡的接觸探壓力向上移動時產生與接觸壓力相對應的信號；複數個自動操控調節器，設置在該移動塊上方，該自動操控調節器基於由該探針接觸檢查傳感器檢測到的壓力值來控制操控；及複數個壓縮彈簧，當向下移動的該垂直移動單元返回時，該壓縮彈簧施加外力以返回已向上移動的該移動塊。 An apparatus for inspecting the contact pressure of a probe using a z-axis feeder of a flat-panel display inspection apparatus, the apparatus being configured to selectively contact the top of a flat-panel display placed on a platform through the operation of a vertical moving unit, the vertical moving unit being It is configured to be operated by a driving unit that exerts an external force on the z-axis. The device includes: a plurality of guide blocks fixed on the vertical moving unit to move vertically together; a moving block for moving vertically along the guide block; a plurality of frictionless The vertical moving member is inserted into the guide block and arranged on the side of the moving block, so that the moving block is moved by compressed air injected from the outside without friction; a detection unit has a probe card, the probe card It is in contact with the top of the flat panel display to be inspected, and is integrally arranged at the lower part of the moving block; a probe contacts the inspection sensor to measure the contact pressure of the contact probe, when the moving block passes the contact probe pressure of the probe card When moving upward, a signal corresponding to the contact pressure is generated; a plurality of automatic control regulators are arranged above the moving block, and the automatic control regulator controls the control based on the pressure value detected by the probe contact check sensor; and A compression spring, when the vertical moving unit that moves downward returns, the compression spring applies an external force to return the moving block that has moved upward. 如請求項1所述之使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置，其中該移動塊具有圓盤形底座和一對垂直部分，這對垂直部分沿著底座頂部的兩個邊緣豎立成矩形框架形狀；穿過無摩擦該垂直移動構件的一對引導軸設置在該移動塊的每個垂直部分中。 The device for inspecting the contact pressure of the probe using the z-axis feeder of the flat-panel display inspection device as described in claim 1, wherein the moving block has a disk-shaped base and a pair of vertical parts along the top of the base The two edges are erected in a rectangular frame shape; a pair of guide shafts passing through the frictionless vertical moving member are provided in each vertical part of the moving block. 如請求項1所述之使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置，其中該壓縮彈簧是一對，而且該壓縮彈簧的上端固定到 該導向塊的彈簧安裝突起，該壓縮彈簧的下端固定到形成在該移動塊的基部上的彈簧安裝突起。 The device for checking the contact pressure of the probe using the z-axis feeder of the flat-panel display checking device as described in claim 1, wherein the compression spring is a pair, and the upper end of the compression spring is fixed to The spring mounting protrusion of the guide block, and the lower end of the compression spring is fixed to the spring mounting protrusion formed on the base of the moving block. 如請求項1所述之使用平板顯示器檢查裝置的z軸進給器檢查探針接觸壓力的裝置，其中用於限制該移動塊的向上位置的止擋件形成在該導向塊的預定位置處，位於該移動塊的垂直部分上方。 The device for checking the contact pressure of the probe using the z-axis feeder of the flat-panel display checking device as described in claim 1, wherein a stopper for restricting the upward position of the moving block is formed at a predetermined position of the guide block, Located above the vertical part of the moving block.
TW108118412A 2019-05-28 2019-05-28 Apparatus for checking pin contact pressure using z-axial feeder of flat panel display inspection device TWI714103B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW108118412A TWI714103B (en) 2019-05-28 2019-05-28 Apparatus for checking pin contact pressure using z-axial feeder of flat panel display inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW108118412A TWI714103B (en) 2019-05-28 2019-05-28 Apparatus for checking pin contact pressure using z-axial feeder of flat panel display inspection device

Publications (2)

Publication Number Publication Date
TW202043777A TW202043777A (en) 2020-12-01
TWI714103B true TWI714103B (en) 2020-12-21

Family

ID=74668072

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108118412A TWI714103B (en) 2019-05-28 2019-05-28 Apparatus for checking pin contact pressure using z-axial feeder of flat panel display inspection device

Country Status (1)

Country Link
TW (1) TWI714103B (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61137082A (en) * 1984-12-07 1986-06-24 Nec Corp In-circuit test fixture
US20030173949A1 (en) * 2002-03-13 2003-09-18 Mirae Corporation Apparatus for recognizing working height of device transfer system in semiconductor device test handler and method thereof
US20130093453A1 (en) * 2010-08-17 2013-04-18 Advantest Corporation Connecting device, semiconductor wafer test apparatus comprising same, and connecting method
TW201432268A (en) * 2012-10-30 2014-08-16 Nihon Micronics Kk Inspection unit, probe card, inspection device, and control system for inspection device
US20150219710A1 (en) * 2014-02-06 2015-08-06 Samsung Electronics Co., Ltd. Wafer test apparatus
CN108459182A (en) * 2017-01-26 2018-08-28 塔工程有限公司 Probe apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61137082A (en) * 1984-12-07 1986-06-24 Nec Corp In-circuit test fixture
US20030173949A1 (en) * 2002-03-13 2003-09-18 Mirae Corporation Apparatus for recognizing working height of device transfer system in semiconductor device test handler and method thereof
US20130093453A1 (en) * 2010-08-17 2013-04-18 Advantest Corporation Connecting device, semiconductor wafer test apparatus comprising same, and connecting method
TW201432268A (en) * 2012-10-30 2014-08-16 Nihon Micronics Kk Inspection unit, probe card, inspection device, and control system for inspection device
US20150219710A1 (en) * 2014-02-06 2015-08-06 Samsung Electronics Co., Ltd. Wafer test apparatus
CN108459182A (en) * 2017-01-26 2018-08-28 塔工程有限公司 Probe apparatus

Also Published As

Publication number Publication date
TW202043777A (en) 2020-12-01

Similar Documents

Publication Publication Date Title
CN105445971B (en) The check device and its control method of liquid crystal display panel
KR101174860B1 (en) Display panel test device for aligning tested object with testing board
KR20070083503A (en) Microstructure probe card, and microstructure inspecting device, method, and computer program
CN105445972A (en) Probe movement device
CN107193139B (en) Display panel test equipment and test method
US20200348335A1 (en) Wafer prober
KR102038102B1 (en) Resistance measuring apparatus for inspecting compression quality and measuring method using the same
JP4566107B2 (en) Adhesive force / thickness measuring apparatus and measuring method thereof
KR200471343Y1 (en) Vertical manipulator
TWI714103B (en) Apparatus for checking pin contact pressure using z-axial feeder of flat panel display inspection device
KR102251805B1 (en) Rigidity test device of semiconductor inspection equipment module
US20050046437A1 (en) Apparatus for calibrating a probe station
JP6874053B2 (en) Pin contact pressure measuring device using the z-axis transfer device of the flat plate display inspection device
KR101248135B1 (en) Probe test apparatus using by air bearing
KR101380375B1 (en) Probe unit for inspectinon of flat display pannel
KR102244628B1 (en) Falling impact tester and method of falling impact test
CN112014657A (en) Apparatus for inspecting contact pressure of needle using z-axis feeder of flat panel display inspection apparatus
US20200355727A1 (en) Apparatus for checking pin contact pressure using z-axial feeder of flat panel display inspection device
KR102016076B1 (en) Testing apparatus and method for flat display device
KR20070116514A (en) Probe test apparatus of flat pannel display and probe test method using it
KR101242372B1 (en) Bump-type probe, glass block panels for testing
KR101917161B1 (en) Rotation and transfer apparatus for head part probe card of probe test apparatus for flat pannel display
KR20220148006A (en) System and method for battery module alignment inspection
KR20070108589A (en) Method of display substrate inspection and apparatus of display substrate inspection using the method
KR101588855B1 (en) Gate Unit Adjustment Device of liquid Crystal Display Panel Examination Apparatus