TWI704954B - Wet scrubber for capturing solid particles by using microbubbles - Google Patents
Wet scrubber for capturing solid particles by using microbubbles Download PDFInfo
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- TWI704954B TWI704954B TW109100248A TW109100248A TWI704954B TW I704954 B TWI704954 B TW I704954B TW 109100248 A TW109100248 A TW 109100248A TW 109100248 A TW109100248 A TW 109100248A TW I704954 B TWI704954 B TW I704954B
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本創作是有關於一種氣體及固體顆粒處理裝置，特別是有關於一種尾氣及微粒子的以微氣泡捕捉固體顆粒的濕式處理裝置。 This creation is about a gas and solid particle treatment device, especially a wet treatment device for tail gas and particles that uses microbubbles to capture solid particles.
工業廢氣等氣體通常被認為是各種環境問題的根源，例如臭氧層消耗，全球變暖和酸雨，尤其在受影響地區工作或居住的人的健康問題。例如，有機物質的焚燒經常導致二氧化碳和硝基氧化物的形成，其中更有導致城市地區煙霧問題的揮發性有機化合物等。這些污染會導致各種健康與環保的問題，例如肺病和癌症，以及對周圍植物產生負面影響。隨著環保意識的覺醒，政府開始制定更嚴格的排放要求，因此產業急需處理功能更強且在經濟上可行的解決方案。 Gases such as industrial waste gas are generally considered to be the source of various environmental problems, such as ozone layer depletion, global warming and acid rain, especially the health problems of people working or living in the affected areas. For example, the incineration of organic substances often leads to the formation of carbon dioxide and nitro oxides, among which there are volatile organic compounds that cause smog problems in urban areas. These pollutions can cause various health and environmental problems, such as lung disease and cancer, as well as negative effects on surrounding plants. With the awakening of environmental protection awareness, the government has begun to formulate stricter emission requirements, so the industry urgently needs solutions that are more powerful and economically feasible.
濕式洗滌裝置是現行普遍使用的尾氣淨化系統之一。傳統的濕式洗滌裝置通常需要高壓泵和鼓風機將溶液霧化以混合工業尾氣，藉以達到溶解尾氣及捕捉其中的固體微粒子的功能。舉例而言，台灣發明專利案第I644729號所揭示之「粉塵濾淨裝置」以及台灣發明專利案第I372075號所揭示之「直立型多平行平板洗滌塔」皆是屬於濕式洗滌裝置。此類型的濕式洗滌裝置所使用的 水通常被收集在容器中以便處理。然而，洗滌裝置每小時運行超過250加侖水(或每天6,000加侖)的情況並不少見。因此，傳統的濕式洗滌器不僅設備昂貴，而且操作費用高。 The wet scrubber is one of the exhaust gas purification systems currently in widespread use. Traditional wet scrubbers usually require high-pressure pumps and blowers to atomize the solution to mix industrial exhaust gas, so as to achieve the functions of dissolving the exhaust gas and capturing the solid particles therein. For example, the "dust filter device" disclosed in Taiwan Invention Patent No. I644729 and the "upright multi-parallel plate scrubber" disclosed in Taiwan Invention Patent No. I372075 are all wet scrubbing devices. Used in this type of wet scrubber Water is usually collected in containers for disposal. However, it is not uncommon for washing devices to run more than 250 gallons of water per hour (or 6,000 gallons per day). Therefore, the traditional wet scrubber is not only expensive in equipment, but also expensive in operation.
而且，工業製程中所產生有毒氣體會混雜微小粉塵等固體顆粒，因此傳統的濕式處理裝置會產生相當硬的粉末附著於尾氣(廢氣)輸送管的管壁，最終造成尾氣輸送管的出口被粉末所堵塞。因此，維修人員需要時常清理，又清理時需要拆除相當多構件，相當不方便且浪費人力物力。臺灣新型專利案第M535595號雖提出一種「輸送管組件及具有該組件的氣液混合攪拌器」，其係藉由撓性管隨著水流晃動而打落附著在撓性管管壁的粉末。然而，此種方式卻會導致撓性管或桿棒斷裂，甚至每隔幾天就需清理或更換一次，反而需要時常維修，而且造成成本增加。 Moreover, the toxic gas generated in the industrial process will be mixed with small dust and other solid particles. Therefore, the traditional wet treatment device will produce quite hard powder which adheres to the pipe wall of the exhaust gas (exhaust gas) conveying pipe, and finally causes the exit of the exhaust gas conveying pipe to be Blocked by powder. Therefore, maintenance personnel need to clean up from time to time, and need to dismantle many components during cleaning, which is quite inconvenient and wastes manpower and material resources. Although Taiwan Model Patent No. M535595 proposes a "conveying pipe assembly and gas-liquid mixing stirrer with the assembly", the flexible pipe shakes with the water flow to knock off the powder attached to the wall of the flexible pipe. However, this method will cause the flexible tube or the rod to break, and even need to be cleaned or replaced every few days. On the contrary, it requires frequent maintenance and increases the cost.
此外，傳統濕式洗滌器對於微小的固體粒子的捕捉能力不足的主要原因在於水霧中水珠的大小必須和微粒子大小接近，同時速度必須加大才能有好的捕捉效果。然而，但要達到這兩項並不容易。有鑑於此，本創作主要目的是提供一種以微氣泡捕捉固體顆粒的濕式處理裝置，其可產生高負壓吸收氣體，不僅可避免粉塵等固體顆粒堵塞氣體輸送管的出口處且可有效產生氣液混合。接著，氣液混合後的流體因壓力變化被切割為微氣泡(平均直徑小於約1.0毫米)，藉由單位體積的表面積(表面積除以體積)大幅提升的微氣泡，提高氣體溶解度及固體顆粒捕捉率，尤其針對小於PM 2.5的固體微粒。 In addition, the main reason for the insufficient ability of traditional wet scrubbers to capture tiny solid particles is that the size of the water droplets in the mist must be close to the size of the particles, and the speed must be increased to have a good capture effect. However, it is not easy to achieve these two items. In view of this, the main purpose of this creation is to provide a wet processing device that uses microbubbles to capture solid particles, which can generate high negative pressure to absorb gas, which not only prevents solid particles such as dust from clogging the outlet of the gas delivery pipe, but also effectively produces Gas-liquid mixing. Then, the fluid after gas-liquid mixing is cut into microbubbles (with an average diameter of less than about 1.0 mm) due to pressure changes. The surface area per unit volume (surface area divided by volume) is greatly increased by microbubbles to improve gas solubility and solid particle capture. Rate, especially for solid particles smaller than PM 2.5.
不同於傳統的濕式洗滌器，本創作採用微氣泡的技術提升氣體及固體顆粒的處理效率。由於微氣泡的表面積和體積比大幅提升，因此氣體和洗滌液的反應效率也會提高。同時在微氣泡中，氣體分子及微粒子高速熱運動，在微氣泡空間大幅縮小下更可增加與洗滌液的反應機率。此外，微氣泡的浮力小，所以停留於洗滌液中的時間也會增加許多。因此，基於以上因素，本創作的以微氣泡捕捉固體顆粒的濕式處理裝置可以大幅提高氣體分子的溶解及粒子捕捉率。此外，此濕式處理裝置相對便宜且操作簡單。 Unlike traditional wet scrubbers, this creation uses microbubble technology to improve the efficiency of gas and solid particle processing. Since the surface area and volume ratio of the microbubbles are greatly increased, the reaction efficiency of the gas and the scrubbing liquid will also be improved. At the same time, in the microbubbles, the gas molecules and microparticles move at high speed, which can increase the reaction probability with the washing liquid when the space of the microbubbles is greatly reduced. In addition, the buoyancy of microbubbles is small, so the time to stay in the washing liquid will increase a lot. Therefore, based on the above factors, the wet processing device created by this invention that captures solid particles with microbubbles can greatly increase the dissolution of gas molecules and the rate of particle capture. In addition, this wet processing device is relatively inexpensive and simple to operate.
為達前述之目的，本創作提出一種以微氣泡捕捉固體顆粒的濕式處理裝置，用以去除氣體及/或氣體中的固體顆粒，至少包含處理槽及射流管，其中處理槽係用以盛裝洗滌液。射流管係設於處理槽中，用以注入洗滌液以吸入氣體，且使得洗滌液與氣體混合後直接注入處理槽所盛裝的洗滌液中，藉以於洗滌液中形成複數個微氣泡溶解氣體及捕捉氣體中的固體顆粒。 In order to achieve the aforementioned purpose, this creation proposes a wet treatment device that uses microbubbles to capture solid particles to remove solid particles in gas and/or gas. It includes at least a treatment tank and a jet tube, where the treatment tank is used to contain detergent. The jet pipe is set in the processing tank for injecting the washing liquid to suck in the gas, and the washing liquid and the gas are mixed and directly injected into the washing liquid contained in the processing tank, thereby forming a plurality of microbubbles dissolved gas and Capture solid particles in the gas.
其中，更包含噴霧組件設於處理槽中且位於處理槽所盛裝的洗滌液上方，噴霧組件係噴灑出霧化後的洗滌液，以溶解處理槽所盛裝的洗滌液上方的氣體及/或捕捉氣體中的固體顆粒。 Among them, the spray assembly is arranged in the treatment tank and is located above the washing liquid contained in the treatment tank. The spray assembly sprays the atomized washing liquid to dissolve and/or capture the gas above the washing liquid contained in the treatment tank. Solid particles in the gas.
其中，更包含氣液分離組件設於處理槽中，用以過濾並降低處理槽所盛裝的洗滌液上方的氣體中的水霧成分。 Among them, the gas-liquid separation component is arranged in the processing tank to filter and reduce the water mist components in the gas above the washing liquid contained in the processing tank.
其中，更包含冷卻組件用以降低處理槽所盛裝的洗滌液之溫度。 Among them, a cooling component is further included to lower the temperature of the washing liquid contained in the processing tank.
其中，處理槽由內槽及外槽組成，洗滌液係經由射流管注入處理槽的內槽中且溢流至外槽。 Among them, the treatment tank is composed of an inner tank and an outer tank, and the washing liquid is injected into the inner tank of the treatment tank through a jet pipe and overflows to the outer tank.
其中，更包含循環管路，循環管路的一端連通處理槽以排出並過濾洗滌液，循環管路的另一端連通射流管，其中洗滌液係經由循環管路注入射流管中。 Among them, it further includes a circulation pipeline, one end of the circulation pipeline is connected to the processing tank to discharge and filter the washing liquid, and the other end of the circulation pipeline is connected to the jet pipe, wherein the washing liquid is injected into the jet pipe through the circulation pipe.
其中，更包含注水組件以供應洗滌液至處理槽中。 Among them, a water injection component is further included to supply washing liquid to the treatment tank.
其中，更包含至少一液面偵測組件偵測處理槽所盛裝的洗滌液的液面。 Wherein, it further includes at least one liquid level detecting component for detecting the liquid level of the washing liquid contained in the processing tank.
其中，更包含控制組件，用以控制洗滌液注入射流管的流量及/或氣體導入射流管的流量。 Among them, it further includes a control component for controlling the flow rate of the washing liquid into the jet tube and/or the flow rate of the gas into the jet tube.
其中，處理槽更具有維修埠。 Among them, the processing tank has a maintenance port.
其中，射流管包含氣液混合管及輸送管組件。氣液混合管包含連通的中空腔體及喉管，其中洗滌液由喉管的頂端的一注液口注入且由喉管的一開***出至中空腔體中，中空腔體的側面具有氣體吸入口用以吸入氣體。輸送管組件連通中空腔體的底端，輸送管組件包含連通的中空管體及中空擴散管，其中中空擴散管的射出口沉浸於處理槽所盛裝的洗滌液中。 Among them, the jet tube includes a gas-liquid mixing tube and a delivery tube assembly. The gas-liquid mixing pipe includes a connected hollow cavity and a throat pipe. The washing liquid is injected from a liquid injection port at the top of the throat pipe and ejected into the hollow cavity from an opening of the throat pipe. The side of the hollow cavity has gas suction The mouth is used to inhale gas. The delivery tube assembly is connected to the bottom end of the hollow cavity. The delivery tube assembly includes a connected hollow tube body and a hollow diffusion tube, wherein the ejection outlet of the hollow diffusion tube is immersed in the washing liquid contained in the processing tank.
其中，內槽的頂側具有槽口且側面具有通孔連通至外槽。 Wherein, the top side of the inner tank has a notch and the side surface has a through hole connected to the outer tank.
其中，循環管路更設有過濾組件以過濾被排出處理槽的洗滌液。 Among them, the circulation pipeline is further provided with a filter assembly to filter the washing liquid discharged from the processing tank.
其中，循環管路於過濾組件的兩側更連通有旁路管路。 Wherein, the circulation pipeline is further connected with a bypass pipeline on both sides of the filter assembly.
其中，循環管路更利用泵浦將排出處理槽的洗滌液經由射流管回收至處理槽中。 Among them, the circulation pipeline further uses a pump to recover the washing liquid discharged from the treatment tank to the treatment tank via the jet pipe.
為達前述之目的，本創作另提出一種以微氣泡捕捉固體顆粒的濕式處理裝置，用以去除氣體及/或氣體中的固體顆粒，至少包含：一處理槽用以盛裝洗滌液；一射流管設於處理槽中，射流管係將氣體與洗滌液混合後直接注 入處理槽所盛裝的洗滌液中，藉以於洗滌液中形成複數個微氣泡溶解氣體及捕捉氣體中的固體顆粒；一氣液分離組件設於處理槽中且位於處理槽所盛裝的洗滌液上方；以及一噴霧組件設於處理槽中，以噴灑出霧化後的洗滌液。 In order to achieve the aforementioned purpose, this creation also proposes a wet processing device that uses microbubbles to capture solid particles to remove solid particles in gas and/or gas, and at least includes: a processing tank for containing washing liquid; and a jet The pipe is set in the processing tank, and the jet pipe system mixes the gas with the scrubbing liquid and directly injects Into the washing liquid contained in the treatment tank, so as to form a plurality of microbubbles in the washing liquid to dissolve the gas and capture the solid particles in the gas; a gas-liquid separation component is arranged in the treatment tank and above the washing liquid contained in the treatment tank; And a spray assembly is arranged in the treatment tank to spray the atomized washing liquid.
其中，處理槽由一內槽及一外槽組成，洗滌液係經由射流管注入處理槽的內槽中且溢流至外槽。 The treatment tank is composed of an inner tank and an outer tank, and the washing liquid is injected into the inner tank of the treatment tank through the jet pipe and overflows to the outer tank.
其中，更包含一循環管路，循環管路的一端連通處理槽以排出並過濾洗滌液，循環管路的另一端連通射流管，其中洗滌液係經由循環管路注入射流管中。 Among them, it further includes a circulation pipeline, one end of the circulation pipeline is connected to the processing tank to discharge and filter the washing liquid, and the other end of the circulation pipeline is connected to the jet tube, wherein the washing liquid is injected into the jet tube through the circulation pipeline.
其中，循環管路更設有過濾組件以過濾被排出處理槽的洗滌液。 Among them, the circulation pipeline is further provided with a filter assembly to filter the washing liquid discharged from the processing tank.
其中，更包含一冷卻組件用以降低處理槽所盛裝的洗滌液之溫度。 Among them, a cooling component is further included to reduce the temperature of the washing liquid contained in the processing tank.
承上所述，依本創作之以微氣泡捕捉固體顆粒的濕式處理裝置，其可具有一或多個下述優點： Based on the above, the wet processing device created according to the present invention that captures solid particles with microbubbles can have one or more of the following advantages:
(1)藉由射流管可產生大量微氣泡，以減小氣體氣泡的尺寸，可以顯著增加氣體與固體顆粒接觸洗滌液的表面積，因此能夠大幅提高氣體及固體顆粒與周圍洗滌液的反應效率。同時，因微氣泡的浮力小，故在溶液中移動的速度減緩，可增加氣體與固體顆粒停留在洗滌液中的時間，如此更能有效捕捉固體顆粒及使氣體溶解於洗滌液。 (1) A large number of microbubbles can be generated by the jet tube to reduce the size of the gas bubbles, which can significantly increase the surface area of the gas and solid particles in contact with the scrubbing liquid, thus greatly improving the reaction efficiency of the gas and solid particles with the surrounding scrubbing liquid. At the same time, because the buoyancy of the microbubbles is small, the speed of the movement in the solution is slowed down, which can increase the time that the gas and solid particles stay in the washing liquid, which can more effectively capture the solid particles and dissolve the gas in the washing liquid.
(2)藉由射流管可產生吸力有效吸出氣體輸送管中的氣體，避免氣體所攜帶的固體顆粒沉積。 (2) The jet tube can generate suction to effectively suck out the gas in the gas delivery tube, avoiding the deposition of solid particles carried by the gas.
(3)藉由設置冷卻組件可降低洗滌液的溫度，以提高氣體的溶解度，同時確保洗滌液不會因為化學反應而持續升溫。 (3) The temperature of the washing liquid can be lowered by installing a cooling component to improve the solubility of the gas, and at the same time, it is ensured that the washing liquid will not continue to rise due to chemical reactions.
(4)藉由設置氣液分離組件可將排出氣體的水霧成分降低。 (4) The mist composition of the exhaust gas can be reduced by installing a gas-liquid separation component.
(5)藉由設置噴霧組件可洗滌氣液分離組件且可溶解氣體及/或捕捉氣體所攜帶的固體顆粒。 (5) The gas-liquid separation component can be washed by setting the spray component and the gas can be dissolved and/or the solid particles carried by the gas can be captured.
(6)藉由設置旁路管路，維修人員替換過濾組件中的濾網時，可令洗滌液改變路徑而流經旁路管路，因此不須中斷整體洗滌過程。 (6) By setting the bypass pipeline, when the maintenance personnel replace the filter in the filter assembly, the washing liquid can change the path and flow through the bypass pipeline, so there is no need to interrupt the overall washing process.
(7)藉由設置維修埠，維修人員不須拆卸整個結構，就可進行處理槽內維修或維護。 (7) By setting up a maintenance port, maintenance personnel can perform repairs or maintenance in the treatment tank without disassembling the entire structure.
(8)藉由組接式設計處理槽，可不受限於濕式處理裝置的設置場地的高度限制。 (8) By designing the processing tank in combination, it is not limited to the height of the installation site of the wet processing device.
10:濕式處理裝置 10: Wet treatment device
20:處理槽 20: processing tank
21:腳架 21: Tripod
22:內槽 22: inner slot
23:槽口 23: Notch
24:外槽 24: Outer tank
25:通孔 25: Through hole
26:液面偵測組件 26: Liquid level detection component
27:蓋體 27: Lid
28:控制組件 28: Control components
29:維修埠 29: service port
30:射流管 30: Jet tube
31:注水組件 31: Water injection component
40:循環管路 40: Circulation line
42:泵浦 42: pump
44:過濾組件 44: filter components
46:旁路管路 46: Bypass line
50:氣液混合管 50: Gas-liquid mixing tube
51:氣體吸入口 51: Gas suction port
52:中空腔體 52: Hollow cavity
54:喉管 54: Throat
56:注液口 56: Liquid injection port
58:開口 58: opening
60:輸送管組件 60: Conveying pipe assembly
62:中空管體 62: Hollow tube body
64:中空擴散管 64: Hollow diffuser
65:射出口 65: Shot Out
70:氣體輸送管 70: Gas delivery pipe
80:氣液分離組件 80: Gas-liquid separation component
82:噴霧組件 82: Spray component
90:冷卻組件 90: Cooling components
92:排氣口 92: exhaust port
圖1為本創作之以微氣泡捕捉固體顆粒的濕式處理裝置之立體示㊣意㊣圖㊣㊣。 Figure 1 is a three-dimensional representation of the created wet processing device that uses microbubbles to capture solid particles.
圖2為本創作之以微氣泡捕捉固體顆粒的濕式處理裝置之側面示㊣意㊣圖㊣㊣。 Figure 2 is a side view of the created wet processing device that uses microbubbles to capture solid particles.
圖3為本創作之以微氣泡捕捉固體顆粒的濕式處理裝置之俯視圖。 Figure 3 is a top view of the created wet processing device that uses microbubbles to capture solid particles.
圖4為本創作中射流管之示意圖。 Figure 4 is a schematic diagram of the jet tube in the creation.
圖5為本創作中控制組件的電路方塊圖。 Figure 5 is the circuit block diagram of the control component in the creation.
為利瞭解本創作之技術特徵、內容與優點及其所能達成之功效，茲將本創作配合圖式，並以實施例之表達形式詳細說明如下，而其中所使用之圖式，其主旨僅為示意及輔助說明書之用，未必為本創作實施後之真實比例與精準配置，故不應就所附之圖式的比例與配置關係解讀、侷限本創作於實際實施上的權利範圍。此外，為使便於理解，下述實施例中的相同元件係以相同的符號標示來說明。且圖式所示的組件的尺寸比例僅為便於解釋各元件及其結構，並非用以限定。 In order to help understand the technical features, content and advantages of this creation and its achievable effects, this creation is combined with the diagrams, and detailed descriptions are given in the form of embodiments as follows, and the diagrams used therein are only To illustrate and supplement the manual, it may not be the true proportions and precise configuration after the implementation of this creation. Therefore, the proportion and configuration relationship of the attached drawings should not be interpreted or limited to the scope of rights of the creation in actual implementation. In addition, in order to facilitate understanding, the same elements in the following embodiments are indicated by the same symbols. In addition, the size ratios of the components shown in the drawings are only for the convenience of explaining the components and their structures, and are not for limitation.
另外，在全篇說明書與申請專利範圍所使用的用詞，除有特別註 明外，通常具有每個用詞使用在此領域中、在此揭露的內容中與特殊內容中的平常意義。某些用以描述本創作的用詞將於下或在此說明書的別處討論，以提供本領域技術人員在有關本創作的描述上額外的引導。 In addition, the terms used in the entire specification and the scope of patent applications, unless otherwise noted In addition, it usually has the usual meaning of each word used in this field, in the content disclosed here, and in the special content. Some terms used to describe this creation will be discussed below or elsewhere in this specification to provide those skilled in the art with additional guidance on the description of this creation.
其次，在本文中如使用用詞“包含”、“包括”、“具有”、“含有”等，其均為開放性的用語，即意指包含但不限於。 Secondly, if the terms "including", "including", "having", "containing", etc. are used in this article, they are all open terms, which means including but not limited to.
本創作的以微氣泡捕捉固體顆粒的濕式處理裝置可產生高負壓吸入氣體，解決固體顆粒堵塞的問題，且能夠有效產生微氣泡。本創作藉由單位體積的表面積(表面積除以體積)大幅提升的微氣泡，能夠提高氣體溶解度及固體顆粒捕捉率。請一併參閱圖1至圖3，圖1為本創作之以微氣泡捕捉固體顆粒的濕式處理裝置之立體示意圖，圖2為本創作之以微氣泡捕捉固體顆粒的濕式處理裝置之側面示意圖，圖3為本創作之以微氣泡捕捉固體顆粒的濕式處理裝置之俯視圖。 The wet treatment device created by this invention that uses microbubbles to capture solid particles can generate high negative pressure inhalation of gas, solve the problem of solid particles clogging, and can effectively generate microbubbles. In this creation, the surface area per unit volume (surface area divided by volume) is greatly increased by microbubbles, which can improve gas solubility and solid particle capture rate. Please refer to Figures 1 to 3 together. Figure 1 is a three-dimensional schematic diagram of a wet processing device that uses microbubbles to capture solid particles. Figure 2 is a side view of a wet processing device that uses microbubbles to capture solid particles. Schematic diagram, Figure 3 is a top view of the created wet processing device that uses microbubbles to capture solid particles.
如圖1至圖3所示，本創作之以微氣泡捕捉固體顆粒的濕式處理裝置10至少包含處理槽20及射流管30。處理槽20係用以盛裝洗滌液，且洗滌液的
液面高度或其佔處理槽20的腔室體積比例可依據洗滌液的供應流量以及洗滌液的排出流量而調整。舉例而言，洗滌液的體積例如約占處理槽20的腔室體積的50%至90%，較佳為約占60%至80%，更佳為約佔70%。射流管30之一側係用以注入洗滌液，另一側則連通外部之氣體來源，藉以混合氣體與洗滌液，且在混合氣體與洗滌液後直接注入處理槽所盛裝的洗滌液中，藉以於洗滌液中形成複數個微氣泡溶解氣體及捕捉氣體中的固體顆粒。本創作之射流管30之特色在於，不僅可產生大量微氣泡，且可將微氣泡帶入處理槽20的洗滌液的深處，使得微氣泡通過洗滌液的時間例如約為1至20秒，較佳為約1至10秒，藉以有效溶解氣體及捕捉固體顆粒，且洗滌液流過射流管30的過程中可形成真空產生吸力有效吸出氣體輸送管70中的氣體，避免固體顆粒累積在氣體輸送管70的出口處及/或中空腔體52的氣體吸入口51處。
As shown in FIGS. 1 to 3, the
其中，洗滌液例如為水或其他洗滌液體，例如鹼性溶液，而氣體則例如為廢氣等尾氣，且例如為半導體製程中所產生的製程氣體。溶液的組成可以由需要被處理的氣體來決定。舉例而言，淡水所組成的洗滌液實際上已足以應用於捕捉許多灰塵或固體顆粒，其中洗滌液的水溶液可濕潤並捕捉灰塵或顆粒。此外，由淡水和氫氧化鈉或其他中和劑(如石灰)所組成的洗滌液，則可以有效地提取和中和大量的酸性物質，例如氫氯酸、硫酸或廢氣中的其他含酸成分。由於，氫氯酸及硫酸等酸性物質都非常容易溶於水，因此，水所組成的洗滌液中若存在合適的鹼，例如可溶解於水的氫氧化鈣(Ca(OH)2)、碳酸鈣(CaCO3)和/或碳酸氫鈉(NaHCO3)，則可吸收及中和各種生產來源中的酸性成分，以降低酸性溶液的形成。 Wherein, the washing liquid is, for example, water or other washing liquids, such as alkaline solutions, and the gas is, for example, exhaust gas such as exhaust gas, and is, for example, a process gas generated in a semiconductor process. The composition of the solution can be determined by the gas to be processed. For example, the washing liquid composed of fresh water is actually sufficient to capture many dust or solid particles, and the aqueous solution of the washing liquid can wet and capture the dust or particles. In addition, a washing liquid composed of fresh water and sodium hydroxide or other neutralizing agents (such as lime) can effectively extract and neutralize a large amount of acidic substances, such as hydrochloric acid, sulfuric acid or other acid-containing components in the exhaust gas. . Since acidic substances such as hydrochloric acid and sulfuric acid are very easy to dissolve in water, if there is a suitable alkali in the washing liquid composed of water, such as calcium hydroxide (Ca(OH) 2 ), carbonic acid that can be dissolved in water Calcium (CaCO 3 ) and/or sodium bicarbonate (NaHCO 3 ) can absorb and neutralize acidic components in various production sources to reduce the formation of acidic solutions.
本創作之以微氣泡捕捉固體顆粒的濕式處理裝置10的處理槽20可由單槽組成，亦可由雙槽或多槽組成，較佳為由內槽22及外槽24組成，且為了方便解釋本創作之結構及其運作方式，以下將以雙槽舉例說明。其中，處理槽20的內槽22的剖面例如為U形，且內槽22的頂側具有槽口23，底側具有腳架21，且內槽22的側面(即側壁)具有至少一通孔25，使得洗滌液可經由通孔25由內槽22的內部流動至外槽24。而且，使用高壓將洗滌液經由射流管30高速注入內槽22中時(直接注入至處理槽20的內槽22中)，將會在洗滌液中產生大量體積縮小的微氣泡攪動並揚起洗滌液，使得洗滌液由內槽22溢流至外槽24中。此外，處理槽20的外槽24的剖面同樣例如為U形，且其頂側具有蓋體27，用以可拆式封閉外槽24的槽口。其中，射流管30及氣體輸送管70例如為穿過蓋體27以進入處理槽20中，且處理槽20的排氣口92例如為設於蓋體27上。處理槽20的外槽24的側面(即側壁)更選擇性具有維修埠29，藉由開啟維修埠29可使得外槽24的內部與外界連通，方便維修人員進行維修或維護。除此之外，處理槽20的外槽24可選擇性設計為組接式，亦即由U型槽及至少一中空管組接而成，如圖1及圖2所示地由位於下方的U型槽及位於U型槽上方的中空管組接而成，藉由組接式設計可不受限於濕式處理裝置10的設置場地的高度限制。中空管的數量並不加以限定，可例如為一或二以上，使用者可視實際需求選用適當數量及長度/尺寸的中空管。
The
本創作之以微氣泡捕捉固體顆粒的濕式處理裝置10之一項技術特徵在於將射流管30應用於製程廢氣等氣體處理，射流管30係縱向注入洗滌液以使洗滌液縱向流過射流管30，且射流管30係從側面吸入氣體，其中射流管30使用開口縮小的喉管54，藉由此設計可以加快流速以使周圍環境產生真空負壓
現象而吸出氣體輸送管70中的氣體，避免固體顆粒累積在氣體輸送管70的出口處。
One of the technical features of the
詳言之，本創作之以微氣泡捕捉固體顆粒的濕式處理裝置10的射流管30例如包含連通的氣液混合管50以及輸送管組件60。其中，氣液混合管50例如包含連通的中空腔體52及喉管54，其中洗滌液由喉管54的頂端的注液口56(口徑較大)注入且由喉管54的開口58(口徑較小)導出至中空腔體52中，中空腔體52的側面更具有氣體吸入口51用以從氣體輸送管70導入氣體。其中，喉管54的內部口徑係由注液口56往開口58逐漸縮小，因此當洗滌液由開口58輸出時，依據流體力學原理可加快流速並藉由真空負壓現象在氣體吸入口51產生吸力避免固體顆粒堵塞氣體吸入口51。或者，如圖4所示，喉管54的內部口徑也可以在注液口56及開口58之間的一區段從注液口56往開口58處逐漸縮小。為了獲得較佳的真空吸引效果，因此中空腔體52的氣體吸入口51的位置較佳為對應於喉管54的開口58的位置。
In detail, the
此外，本創作之以微氣泡捕捉固體顆粒的濕式處理裝置10的射流管30的輸送管組件60連通氣液混合管50的底端，亦即輸送管組件60連通中空腔體52的底端。其中，輸送管組件60例如包含連通的中空管體62及中空擴散管64，其中部分的中空擴散管64例如沉浸於處理槽20的洗滌液中。詳言之，由於處理槽20由內槽22與外槽24組成，因此中空擴散管64的射出口65係例如沉浸於處理槽20的內槽22的洗滌液的液面下一深度。其中，此深度的數值係例如依據洗滌液的液面高度而定。惟，上述僅為舉例，並非用以限定本創作。詳言之，在其他應用中，中空擴散管64的射出口65亦可選擇性設置於洗滌液上方。
In addition, the
其中，本創作的以微氣泡捕捉固體顆粒的濕式處理裝置10可選擇性設有液面偵測組件26偵測處理槽20所盛裝的洗滌液的液面的位置。液面偵測組件26的型式無特別限制，可例如採用槽內式或槽外式設計。舉例而言，槽外式設計可例如運用連通管連通處理槽20的上方及下方，且在連通管上設置至少一個水位感測器，藉此可得知處理槽20內的液面位置，以達到顯示或提醒功效。
Among them, the
除此之外，本創作的以微氣泡捕捉固體顆粒的濕式處理裝置更可選擇性設有電控裝置等控制組件28(見圖5)，此控制組件28係例如採用電性連接的方式接收液面偵測組件26的感測訊號及/或控制泵浦42的運作，藉以控制洗滌液經由循環管路40注入射流管30的流量及/或氣體導入射流管30的流量，以達到控制處理槽20所盛裝的洗滌液的液面的高度的效果。其中，泵浦42可採用防腐蝕材質，但不限定於此。同理，本創作的以微氣泡捕捉固體顆粒的濕式處理裝置更可選擇性具有注水組件31，此注水組件31可例如由控制組件28控制，用以供應或補充處理槽20中的洗滌液(例如水)。注水組件31的一端可例如連通處理槽20的外槽24，另一端則連通一供水端，以供應或補充處理槽20中的洗滌液。
In addition, the wet processing device that uses microbubbles to capture solid particles can optionally be equipped with a
本創作之以微氣泡捕捉固體顆粒的濕式處理裝置10的循環管路40係用以從處理槽20排出洗滌液，以及經由射流管30重複供應洗滌液注入處理槽20中，藉以達到循環使用的目的。其中，循環管路40的一端連通處理槽20，例如連通處理槽20的外槽24的底部，藉以利用泵浦42排出洗滌液。此外，循環管路40的另一端則由處理槽20的頂側將洗滌液注入處理槽20中。詳言之，循環管路40的另一端係連通射流管30，且係例如連通喉管54的的注液口56，藉以利用泵浦42的高壓將洗滌液高速注入射流管30中，且使得洗滌液重新進入處理槽20的內槽22中，藉以進一步由氣體輸送管70中吸出氣體並使洗滌液混合被吸入
射流管30的中空腔體52中的氣體。循環管路40更選擇性設有過濾組件44用以過濾被排出處理槽20的外槽24的洗滌液，其中過濾組件44例如為過濾棉等過濾網，且較佳為Y型過濾器(見圖3)，藉以過濾出洗滌液中的固體顆粒。
The
本創作的另一技術特徵在於循環管路40於過濾組件44的兩側更連通有至少一旁路(by pass)管路46，且循環管路40於過濾組件44的兩側更例如設有閥門，使得洗滌液改變路徑而流經旁路管路46，藉以使得維修人員可替換過濾組件44中的濾網，不須中斷整體洗滌過程。
Another technical feature of the present creation is that the
本創作的以微氣泡捕捉固體顆粒的濕式處理裝置的又一技術特徵在於更選擇性設有氣液分離組件80設於處理槽20中的洗滌液上方，且較佳為設於內槽22的上方，藉以過濾並阻隔內槽22中被大量微氣泡所攪動而揚起的洗滌液，使得洗滌液經由內槽22的頂側的槽口23順利溢流至外槽24中。此外，氣液分離組件80可過濾並降低處理槽20所盛裝的洗滌液上方的氣體中的水霧成分。其中，氣液分離組件80係例如由直徑約為100微米至1微米玻璃纖維所組成的纖維床除霧器。
Another technical feature of the wet processing device using microbubbles to capture solid particles is that it is more selectively provided with a gas-
本創作的以微氣泡捕捉固體顆粒的濕式處理裝置更選擇性設有噴霧組件82位於處理槽20中的洗滌液上方。噴霧組件82係例如為噴霧器，且例如設於蓋體27上，用以將洗滌液霧化，且朝著處理槽20所盛裝的洗滌液上方的氣體噴灑霧化後的洗滌液，藉以溶解處理槽20所盛裝的洗滌液上方的氣體及/或捕捉氣體中的固體顆粒。由於，噴霧組件82較佳位於氣液分離組件80上方，且噴霧組件82係朝著氣液分離組件80的方向噴灑霧化後的洗滌液，因此也可同時洗滌氣液分離組件80上的固體顆粒，並使其落入處理槽20中。其中，噴霧組件82的數量無特別限定。在傳統技術中，纖維床除霧器不適合直接使用於處理含
有微粒子的氣流，其原因在於纖維床除霧器的玻璃纖維直徑相當細小(直徑約為100微米至1微米)，因此固體顆粒會迅速堵塞纖維床除霧器。相較之下，本創作之一技術特徵在於利用噴霧組件82噴灑霧化的洗滌液以洗滌纖維床除霧器，因此能高效率去除大多數的固體顆粒，長期操作也不至於堵塞纖維床除霧器。基於相同理由，本創作的處理槽20的排氣口92也可選擇性設置另一氣液分離組件(纖維床除霧器)，藉以進一步降低排氣口92所排出之氣體中的水霧成分。
The wet processing device of the present invention that uses microbubbles to capture solid particles is further optionally provided with a
本創作的以微氣泡捕捉固體顆粒的濕式處理裝置更選擇性設有冷卻組件90用以降低處理槽20所盛裝的洗滌液的溫度以提高氣體在洗滌液中的溶解度，同時可確保洗滌液不會因為化學反應而持續升溫，甚至達到沸點。其中，由於冷卻組件90的設置目的係降低洗滌的溫度，因此其設置位置與設置型態並無特別限定，只要可使處理槽20中的洗滌液溫度降低即可。舉例而言，冷卻組件90可例如直接設於處理槽20的內部，藉以直接降低洗滌液的溫度。此外，冷卻組件90亦可例如設於處理槽20的外部，且經由連通管連通至處理槽20的內部，使得處理槽20中的洗滌液通過冷卻組件90再返回處理槽20中，藉以降低洗滌液的溫度。同理，冷卻組件90亦可選擇性設置於循環管路40上，且例如設於循環管路40的內部或外部。此外，冷卻組件90可為任何形式的冷卻裝置，例如具有冷凝管藉以冷卻洗滌液的溫度。
The wet processing device of the invention that uses microbubbles to capture solid particles is more selectively provided with a
綜上所述，依本創作之以微氣泡捕捉固體顆粒的濕式處理裝置，其可具有一或多個下述優點：(1)藉由射流管可產生大量微氣泡，以減小氣體氣泡的尺寸，可以顯著增加氣體與固體顆粒接觸洗滌液的表面積，因此能夠大幅提高氣體及固體顆粒與周圍洗滌液的反應效率。同時，因微氣泡的浮力小，故在溶液中移動的速度減緩，可增加氣體與固體顆粒停留在洗滌液中的時間，如 此更能有效捕捉固體顆粒及使氣體溶解於洗滌液。(2)藉由射流管可產生吸力有效吸出氣體輸送管中的氣體，避免氣體所攜帶的固體顆粒沉積。(3)藉由設置冷卻組件可降低洗滌液的溫度，以提高氣體的溶解度，同時確保洗滌液不會因為化學反應而持續升溫。(4)藉由設置氣液分離組件可將排出氣體的水霧成分降低。(5)藉由設置噴霧組件可洗滌氣液分離組件且可溶解氣體及/或捕捉氣體所攜帶的固體顆粒。(6)藉由設置旁路管路，維修人員替換過濾組件中的濾網時，可令洗滌液改變路徑而流經旁路管路，因此不須中斷整體洗滌過程。(7)藉由設置維修埠，維修人員不須拆卸整個結構，就可進行處理槽內維修或維護。(8)藉由組接式設計處理槽，可不受限於濕式處理裝置的設置場地的高度限制。 In summary, the wet processing device created by this invention that uses microbubbles to capture solid particles can have one or more of the following advantages: (1) A large number of microbubbles can be generated by the jet tube to reduce gas bubbles The size can significantly increase the surface area of the gas and solid particles in contact with the scrubbing liquid, so it can greatly improve the reaction efficiency of the gas and solid particles with the surrounding scrubbing liquid. At the same time, because the buoyancy of the microbubbles is small, the speed of moving in the solution is slowed down, which can increase the time that the gas and solid particles stay in the washing liquid, such as This is more effective in capturing solid particles and dissolving gas in the scrubbing liquid. (2) The jet tube can generate suction to effectively suck out the gas in the gas delivery tube, avoiding the deposition of solid particles carried by the gas. (3) The temperature of the washing liquid can be lowered by installing a cooling component to improve the solubility of the gas, and at the same time, it is ensured that the washing liquid will not continue to rise due to chemical reactions. (4) The mist composition of the exhaust gas can be reduced by installing a gas-liquid separation component. (5) The gas-liquid separation component can be washed by setting the spray component and the gas can be dissolved and/or the solid particles carried by the gas can be captured. (6) By setting the bypass pipeline, when the maintenance personnel replace the filter in the filter assembly, the washing liquid can change the path and flow through the bypass pipeline, so there is no need to interrupt the overall washing process. (7) By setting up a maintenance port, maintenance personnel can perform repairs or maintenance in the treatment tank without disassembling the entire structure. (8) By designing the processing tank in combination, it is not limited to the height of the installation site of the wet processing device.
以上所述僅為舉例性，而非為限制性者。任何未脫離本創作之精神與範疇，而對其進行之等效修改或變更，均應包含於後附之申請專利範圍中。 The above description is only illustrative, and not restrictive. Any equivalent modifications or changes that do not depart from the spirit and scope of this creation should be included in the attached scope of patent application.
10:濕式處理裝置 10: Wet treatment device
20:處理槽 20: processing tank
21:腳架 21: Tripod
22:內槽 22: inner slot
23:槽口 23: Notch
24:外槽 24: Outer tank
25:通孔 25: Through hole
27:蓋體 27: Lid
30:射流管 30: Jet tube
40:循環管路 40: Circulation line
42:泵浦 42: pump
44:過濾組件 44: filter components
46:旁路管路 46: Bypass line
50:氣液混合管 50: Gas-liquid mixing tube
60:輸送管組件 60: Conveying pipe assembly
80:氣液分離組件 80: Gas-liquid separation component
82:噴霧組件 82: Spray component
92:排氣口 92: exhaust port
Claims (20)
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| TW109100248A TWI704954B (en) | 2019-02-27 | 2019-02-27 | Wet scrubber for capturing solid particles by using microbubbles |
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| TW202031339A (en) | 2020-09-01 |
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