本發明提供了一種流體容納構件,該流體容納構件抑制因兩個容納室之間的分離膜的破損而引起的兩個容納室中容納的流體的混合。The present invention provides a fluid accommodating member that suppresses mixing of fluids accommodated in two accommodating chambers due to breakage of a separation membrane between the two accommodating chambers.
以下說明用來實現本發明的實施例。The following describes embodiments for implementing the present invention.
圖1示出了範例性流體容納構件。流體容納構件13包括殼體11和殼體12,並且是包括排出頭14的匣式收容構件。排出頭14具有排出口15,並且能夠從排出口15排出容納於流體容納構件的流體。排出頭14不需要設置於流體容納構件13。例如,排出頭14可以與流體容納構件13分離地佈置並且經由例如連通管連接到流體容納構件13。Figure 1 shows an exemplary fluid containment member. The fluid accommodating member 13 includes a housing 11 and a housing 12 and is a cassette-type accommodating member including a discharge head 14. The discharge head 14 has a discharge port 15 and can discharge the fluid contained in the fluid containing member from the discharge port 15. The discharge head 14 need not be provided in the fluid containing member 13. For example, the discharge head 14 may be arranged separately from the fluid containing member 13 and connected to the fluid containing member 13 via, for example, a communication pipe.
圖2中示出了排出頭14的放大圖。排出口15是以每英寸大約500個至1000個孔的密度形成於排出頭14的表面的孔。流體表面的彎液面17形成於各排出口15。排出口15與對應的壓力室19連通。用於產生排出流體用的能量的能量產生元件(未示出)設置於對應的壓力室19。壓電元件或加熱元件可以被用作能量產生元件。當使用壓電元件時,藉由在對應的排出口15的壓力室19中驅動和控制壓電元件,壓力室19內的容積改變以將壓力室中的流體排出到外部。可以藉由使用例如MEMS(微機電系統)技術來製造壓電元件。排出頭在壓力室19與容納從排出頭14排出的流體的第一容納室5之間未設置控制閥。因此,藉由將第一容納室5的內壓控制為相對於外壓(大氣壓)例如小大約0.3kPa至0.5kPa的負壓,流體在各排出口15的開口面處形成彎液面17,以抑制流體在不期望的時刻滴下。An enlarged view of the discharge head 14 is shown in FIG. 2. The discharge port 15 is a hole formed on the surface of the discharge head 14 with a density of about 500 to 1000 holes per inch. The meniscus 17 on the fluid surface is formed in each discharge port 15. The discharge port 15 communicates with the corresponding pressure chamber 19. An energy generating element (not shown) for generating energy for discharging fluid is provided in the corresponding pressure chamber 19. Piezoelectric elements or heating elements can be used as energy generating elements. When a piezoelectric element is used, by driving and controlling the piezoelectric element in the pressure chamber 19 of the corresponding discharge port 15, the volume in the pressure chamber 19 changes to discharge the fluid in the pressure chamber to the outside. The piezoelectric element can be manufactured by using, for example, MEMS (Micro Electro Mechanical System) technology. The discharge head is not provided with a control valve between the pressure chamber 19 and the first containing chamber 5 containing the fluid discharged from the discharge head 14. Therefore, by controlling the internal pressure of the first storage chamber 5 to a negative pressure that is smaller than the external pressure (atmospheric pressure) by about 0.3 kPa to 0.5 kPa, for example, the fluid forms a meniscus 17 at the opening surface of each discharge port 15, To prevent the fluid from dripping at undesirable moments.
再次參照圖1,說明流體容納構件的結構。流體容納構件包括容納第一流體的第一容納室5和容納第二流體的第二容納室6。在本結構中,藉由用第一分離膜1封閉殼體11的凹部的開口使第一容納室5形成於殼體11(第一容納室5包括由第一分離膜1封閉的殼體的凹部,並且第二容納室6包括由第二分離膜2封閉的殼體的凹部)。藉由用第二分離膜2封閉殼體12的凹部的開口來形成殼體12中的第二容納室6。藉由組合殼體11和殼體12,分離第一容納室5和第二容納室6的第一分離膜1和第二分離膜2設置於第一容納室5與第二容納室6之間。即,藉由位於第一容納室5的一側的第一分離膜1和位於第二容納室6的一側的第二分離膜2分離第一容納室5和第二容納室6。換言之,第一分離膜1是第一容納室5的與第一流體直接接觸的部分。如將在之後說明的,第一分離膜1可以在任一方向上移動,使第一容納室5的容積膨脹或收縮,這相應地使第一容納室5的內壓改變。類似地,第二分離膜2是第二容納室6的與第二流體直接接觸的部分。如將在之後說明的,第二分離膜2可以與第一分離膜1在任一方向上一起移動,使第二容納室6的容積膨脹或收縮,這相應地使第二容納室6的內壓改變。如將在之後說明的,在一個實施例中,第一分離膜1和第二分離膜2可以由間隙或空間4分離,並且可以由橋3連接。1 again, the structure of the fluid containing member will be described. The fluid containing member includes a first containing chamber 5 containing a first fluid and a second containing chamber 6 containing a second fluid. In this structure, the first housing chamber 5 is formed in the housing 11 by closing the opening of the concave portion of the housing 11 with the first separation membrane 1 (the first housing chamber 5 includes the housing closed by the first separation membrane 1 A concave portion, and the second accommodating chamber 6 includes a concave portion of the housing closed by the second separation membrane 2). The second storage chamber 6 in the casing 12 is formed by closing the opening of the concave portion of the casing 12 with the second separation membrane 2. By combining the housing 11 and the housing 12, the first separation membrane 1 and the second separation membrane 2 separating the first storage chamber 5 and the second storage chamber 6 are provided between the first storage chamber 5 and the second storage chamber 6 . That is, the first storage chamber 5 and the second storage chamber 6 are separated by the first separation membrane 1 located on the side of the first storage chamber 5 and the second separation membrane 2 located on the side of the second storage chamber 6. In other words, the first separation membrane 1 is a portion of the first storage chamber 5 that directly contacts the first fluid. As will be explained later, the first separation membrane 1 can be moved in any direction to expand or contract the volume of the first storage chamber 5, which accordingly changes the internal pressure of the first storage chamber 5. Similarly, the second separation membrane 2 is a portion of the second containing chamber 6 that directly contacts the second fluid. As will be explained later, the second separation membrane 2 can move together with the first separation membrane 1 in either direction, expanding or contracting the volume of the second storage chamber 6, which accordingly changes the internal pressure of the second storage chamber 6 . As will be explained later, in one embodiment, the first separation membrane 1 and the second separation membrane 2 may be separated by a gap or space 4 and may be connected by a bridge 3.
第一容納室5與排出頭14連通,並且經由排出頭14與外部空間連通。第二容納室6藉由連接管24連接到副儲槽。The first storage chamber 5 communicates with the discharge head 14 and communicates with the external space via the discharge head 14. The second accommodating chamber 6 is connected to the auxiliary storage tank by a connecting pipe 24.
第一分離膜1和第二分離膜2彼此部分地連接或彼此部分地接觸。首先,說明第一分離膜1和第二分離膜2彼此部分地連接的範例。在圖1中,第一分離膜1和第二分離膜2藉由橋3而彼此部分地連接。The first separation membrane 1 and the second separation membrane 2 are partially connected to each other or partially in contact with each other. First, an example in which the first separation membrane 1 and the second separation membrane 2 are partially connected to each other is explained. In FIG. 1, the first separation membrane 1 and the second separation membrane 2 are partially connected to each other by a bridge 3.
在本實施例中,藉由兩個分離膜、即第一分離膜1和第二分離膜2來分離第一容納室5和第二容納室6。因此,即使分離膜中的一者破損,只要另一分離膜繼續存在,就能夠抑制容納於第一容納室5的第一流體和容納於第二容納室6的第二流體的混合。In this embodiment, the first storage chamber 5 and the second storage chamber 6 are separated by two separation membranes, namely the first separation membrane 1 and the second separation membrane 2. Therefore, even if one of the separation membranes is damaged, as long as the other separation membrane continues to exist, the mixing of the first fluid contained in the first storage chamber 5 and the second fluid contained in the second storage chamber 6 can be suppressed.
接下來,說明第一容納室5與第二容納室6的內壓(第一和第二流體的壓力)之間的關係以及對應的容納室的形狀改變。當第一容納室5的內壓和第二容納室6的內壓彼此相等時,各容納室的形狀被維持。相比之下,當第一容納室5的內壓與第二容納室6的內壓之間產生差異時,第一分離膜1和第二分離膜2向低內壓的一側一起移動(同時在同向上移動)。當內壓之間的差異變為零時,停止移動。該迴圈(移動和停止)反復。因此,第一容納室5的內壓和第二容納室6的內壓能夠保持彼此相等。更具體地,由於第一容納室5內部的容積隨著第一流體從排出頭14排出而減小,所以內壓相應地降低。此時,由於第二容納室6內部的容積未改變,所以第二容納室6的內壓變得比第一容納室5的內壓相對地高。在本文中,第一分離膜1和第二分離膜2彼此部分地連接。因此,在流體容納構件13中,第一分離膜1和第二分離膜2朝向第一容納室5的一側一起移動了對應於所排出的第一流體的體積的量。同時,作為第二分離膜2移動的結果,第二流體經由連接管24從副儲槽26被抽吸到第二容納室6中。這使第一容納室5的內壓和第二容納室6的內壓再次彼此相等,並且處於平衡狀態。以該方式,藉由收容於第二容納室6的第二流體調節第一容納室5的內壓。即,當第一容納室5和第二容納室6中任一者的內壓改變時,第一分離膜1和第二分離膜2根據內壓的改變一起移動。為了使第一分離膜1和第二分離膜2一起移動,第一分離膜1和第二分離膜2藉由橋3彼此部分地連接。Next, the relationship between the internal pressures (pressures of the first and second fluids) of the first storage chamber 5 and the second storage chamber 6 and the corresponding changes in the shape of the storage chamber will be explained. When the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6 are equal to each other, the shape of each storage chamber is maintained. In contrast, when there is a difference between the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6, the first separation membrane 1 and the second separation membrane 2 move together to the side with low internal pressure ( Move in the same direction at the same time). When the difference between the internal pressures becomes zero, it stops moving. The loop (moving and stopping) is repeated. Therefore, the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6 can be kept equal to each other. More specifically, since the volume inside the first storage chamber 5 decreases as the first fluid is discharged from the discharge head 14, the internal pressure decreases accordingly. At this time, since the volume inside the second storage chamber 6 has not changed, the internal pressure of the second storage chamber 6 becomes relatively higher than the internal pressure of the first storage chamber 5. Here, the first separation membrane 1 and the second separation membrane 2 are partially connected to each other. Therefore, in the fluid accommodating member 13, the first separation membrane 1 and the second separation membrane 2 move together toward the side of the first accommodating chamber 5 by an amount corresponding to the volume of the discharged first fluid. At the same time, as a result of the movement of the second separation membrane 2, the second fluid is drawn into the second storage chamber 6 from the auxiliary reservoir 26 via the connection pipe 24. This makes the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6 equal to each other again, and is in a balanced state. In this way, the internal pressure of the first storage chamber 5 is adjusted by the second fluid contained in the second storage chamber 6. That is, when the internal pressure of any one of the first storage chamber 5 and the second storage chamber 6 changes, the first separation membrane 1 and the second separation membrane 2 move together according to the change in internal pressure. In order to move the first separation membrane 1 and the second separation membrane 2 together, the first separation membrane 1 and the second separation membrane 2 are partially connected to each other by a bridge 3.
第一分離膜1和第二分離膜2各為撓性膜。期望的是,第一分離膜1由耐受第一分離膜1接觸的第一流體的材料形成並且第二分離膜2由耐受第二分離膜2接觸的第二流體的材料形成。第一分離膜1和第二分離膜2各可以由諸如PTFE(聚四氟乙烯)的氟樹脂形成。然而,由於存在許多具有高硬度的氟樹脂,所以將第一分離膜1和第二分離膜2形成得薄在技術上是困難的。由於第一分離膜1接觸從排出頭14排出的第一流體,所以第一分離膜1由諸如PTFE的氟樹脂形成。另一方面,第二分離膜2基本上不接觸第一流體。因此,第二分離膜2的材料的範例包括PE(聚乙烯)、PVC(聚氯乙烯)、PET(聚對苯二甲酸乙二醇酯)、PVAL(聚乙烯醇)和PVDC(聚偏二氯乙烯)。其它範例為諸如尼龍的聚醯胺合成樹脂。以該方式,第一分離膜1和第二分離膜2可以根據其所期望的特性由不同的材料形成。The first separation membrane 1 and the second separation membrane 2 are each flexible membranes. It is desirable that the first separation membrane 1 is formed of a material resistant to the first fluid contacted by the first separation membrane 1 and the second separation membrane 2 is formed of a material resistant to the second fluid contacted by the second separation membrane 2. The first separation membrane 1 and the second separation membrane 2 may each be formed of a fluororesin such as PTFE (polytetrafluoroethylene). However, since there are many fluororesins with high hardness, it is technically difficult to form the first separation membrane 1 and the second separation membrane 2 to be thin. Since the first separation membrane 1 contacts the first fluid discharged from the discharge head 14, the first separation membrane 1 is formed of a fluororesin such as PTFE. On the other hand, the second separation membrane 2 does not substantially contact the first fluid. Therefore, examples of the material of the second separation membrane 2 include PE (polyethylene), PVC (polyvinyl chloride), PET (polyethylene terephthalate), PVAL (polyvinyl alcohol), and PVDC (polyvinylidene dichloride) Vinyl chloride). Other examples are polyamide synthetic resins such as nylon. In this way, the first separation membrane 1 and the second separation membrane 2 can be formed of different materials according to their desired characteristics.
如圖1所示,第二容納室6經由連接管24連接到副儲槽26。由於副儲槽26容納第二流體27,所以第二流體27的介面(液面)在重力方向上處於排出頭14的排出口15的下方的位置。圖3示出了該狀態。第二流體27的液面處於排出口15下方ΔH的位置。這裡,排出頭14的各排出口15是直徑為10μm的圓形,並且假定以1pL排出密度與水的密度大致相等的一滴墨的情況。在該情況下,為了維持圖2中示出的各彎液面17的狀態,期望的是將第一容納室5的內壓控制成比外壓低0.40±0.04kPa的壓力。因此,期望的是ΔH為41±4mm。液面感測器41佈置於副儲槽26的側面。當液面相對於作為基準的液面的高度(排出口15下方41mm的高度)超過±4mm的範圍時,啟動校正操作。即,驅動液體供給泵32和控制閥31以從主儲槽34向副儲槽26供給第二流體,或者從副儲槽26向主儲槽34返還第二流體。這將液面控制在了期望區域中。即,藉由第二流體調節第一流體的壓力。藉由壓力調節單元(諸如與第二容納室6連通的液體供給泵32、副儲槽26、主儲槽34)調節第二流體的壓力。As shown in FIG. 1, the second storage chamber 6 is connected to the auxiliary storage tank 26 via a connection pipe 24. Since the secondary reservoir 26 contains the second fluid 27, the interface (liquid surface) of the second fluid 27 is located below the discharge port 15 of the discharge head 14 in the direction of gravity. Fig. 3 shows this state. The liquid level of the second fluid 27 is at the position ΔH below the discharge port 15. Here, each discharge port 15 of the discharge head 14 is circular with a diameter of 10 μm, and it is assumed that a drop of ink having a density approximately equal to the density of water is discharged at 1 pL. In this case, in order to maintain the state of each meniscus 17 shown in FIG. 2, it is desirable to control the internal pressure of the first storage chamber 5 to a pressure lower than the external pressure by 0.40±0.04 kPa. Therefore, it is desirable that ΔH is 41±4 mm. The liquid level sensor 41 is arranged on the side of the auxiliary reservoir 26. When the height of the liquid surface relative to the reference liquid surface (the height of 41 mm below the discharge port 15) exceeds the range of ±4 mm, the correction operation is started. That is, the liquid supply pump 32 and the control valve 31 are driven to supply the second fluid from the main tank 34 to the sub tank 26 or return the second fluid from the sub tank 26 to the main tank 34. This controls the liquid level in the desired area. That is, the pressure of the first fluid is adjusted by the second fluid. The pressure of the second fluid is adjusted by a pressure adjustment unit (such as the liquid supply pump 32, the auxiliary reservoir 26, and the main reservoir 34 in communication with the second storage chamber 6).
藉由第一分離膜1和第二分離膜2來分離第一容納室5和第二容納室6。當第一分離膜1和第二分離膜2獨立地移動和變形時,即使調節副儲槽26中液面的高度,也難以控制排出頭14中的壓力。例如,即使嘗試將副儲槽26中的液面控制為在排出口15的下方,也僅有第二分離膜2在圖1中的X方向上持續移動、直到第二容納室6的內壓變得與外壓相等。另外,第二流體從副儲槽26的入口25溢出,或者以與因副儲槽26的液體調節功能而返還的第二流體的量對應的量使第二流體供給到主儲槽34。在任一情況下,第二容納室6最終耗盡第二流體,並且第二分離膜2困在殼體12的壁面。因此,第二分離膜2直接地困在殼體的壁面,並且第二分離膜2的形狀改變以貼合殼體的壁面。此時,由於第一分離膜1不與第二分離膜2一起移動,所以排出頭14中的壓力不回應於副儲槽26中的液面高度而改變。The first storage chamber 5 and the second storage chamber 6 are separated by the first separation membrane 1 and the second separation membrane 2. When the first separation membrane 1 and the second separation membrane 2 move and deform independently, even if the height of the liquid level in the sub tank 26 is adjusted, it is difficult to control the pressure in the discharge head 14. For example, even if an attempt is made to control the liquid level in the auxiliary storage tank 26 below the discharge port 15, only the second separation membrane 2 continues to move in the X direction in FIG. 1 until the internal pressure of the second storage chamber 6 Becomes equal to the external pressure. In addition, the second fluid overflows from the inlet 25 of the sub-tank 26 or the second fluid is supplied to the main tank 34 in an amount corresponding to the amount of the second fluid returned due to the liquid adjustment function of the sub-tank 26. In either case, the second containing chamber 6 eventually runs out of the second fluid, and the second separation membrane 2 is trapped on the wall surface of the housing 12. Therefore, the second separation membrane 2 is directly trapped on the wall surface of the casing, and the shape of the second separation membrane 2 is changed to fit the wall surface of the casing. At this time, since the first separation membrane 1 does not move together with the second separation membrane 2, the pressure in the discharge head 14 does not change in response to the liquid level in the sub tank 26.
相比之下,在本實施例中,第一分離膜1和第二分離膜2彼此部分地連接。在圖1中,第一分離膜1和第二分離膜2藉由多個橋3而彼此連接。因此,第一分離膜1和第二分離膜2一起移動,並且第一容納室5的內壓和第二容納室6的內壓保持彼此相等。這使容納室的內壓因各排出口15處的彎液面17產生的負壓而彼此相等。In contrast, in the present embodiment, the first separation membrane 1 and the second separation membrane 2 are partially connected to each other. In FIG. 1, the first separation membrane 1 and the second separation membrane 2 are connected to each other by a plurality of bridges 3. Therefore, the first separation membrane 1 and the second separation membrane 2 move together, and the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6 remain equal to each other. This makes the internal pressure of the storage chamber equal to each other due to the negative pressure generated by the meniscus 17 at each discharge port 15.
圖4A和圖4B示出了第一分離膜1的形狀和第二分離膜2的形狀的細節。藉由以匹配殼體的凹部的形狀的方式將撓性膜成型為凸出形狀來形成第一分離膜1和第二分離膜2。如圖4A所示,第一分離膜1和第二分離膜2彼此重疊以根據圖4B中示出的熔接線71藉由使用雷射處理器來利用雷射照射它們,並且熱熔接被照射的部分。熱熔接部分成為橋3。如圖1所示,第一分離膜1和第二分離膜2之間的部分以藉由通氣孔18連接到外部空氣的方式形成。這裡,第一容納室5和第二容納室6保持在負壓狀態等於外壓,使得兩個分離膜的未熔接的部分相對於容納室處於膨脹狀態,並且形成空間4。4A and 4B show details of the shape of the first separation membrane 1 and the shape of the second separation membrane 2. The first separation membrane 1 and the second separation membrane 2 are formed by molding the flexible membrane into a convex shape so as to match the shape of the concave portion of the case. As shown in FIG. 4A, the first separation membrane 1 and the second separation membrane 2 overlap each other to irradiate them with a laser by using a laser processor according to the weld line 71 shown in FIG. 4B, and the thermal fusion is irradiated section. The thermally welded portion becomes the bridge 3. As shown in FIG. 1, the portion between the first separation membrane 1 and the second separation membrane 2 is formed in such a manner as to be connected to outside air through the vent hole 18. Here, the first storage chamber 5 and the second storage chamber 6 are maintained in a negative pressure state equal to the external pressure, so that the unwelded portions of the two separation membranes are in an expanded state relative to the storage chamber, and a space 4 is formed.
期望的是,隨著第一流體的量減少,第一分離膜1和第二分離膜2平順移動。圖4A中示出的第一分離膜1包括:頂部分1a,其為凸出的頂且為平坦面;側面部分1c,其位於側面且相對於頂部分1a傾斜;以及圓角部分1b,其具有圓角形狀並且佈置於頂部分1a與側面部分1c之間。由於第二分離膜2具有與第一分離膜1的形狀一致的形狀,所以第二分離膜2的凸出部分貼合第一分離膜1的凸出部分的凹側內部。圓角形狀在這裡指的是具有不同曲率且在拐點處連接的至少兩個彎曲段的彎曲線,與字母“R”中的彎曲線相似。在這樣的分離膜中,期望的是每單位面積的橋3的配置密度在頂部分處高於在側面部分1c處和圓角部分1b處。另外,期望的是每單位面積的橋3的配置密度在圓角部分1b處為最低。這是因為,當在圓角部分1b和側面部分1c處存在太多橋3時,剛性增加,導致分離膜難以平順地移動。這裡,為橋佈置熔接線71。然而,期望的是熔接線71的數量為如下方式:圓角部分1b處的熔接線71的數量<側面部分1c處的熔接線71的數量<頂部分1a處的熔接線71的數量。It is desirable that as the amount of the first fluid decreases, the first separation membrane 1 and the second separation membrane 2 move smoothly. The first separation membrane 1 shown in FIG. 4A includes: a top portion 1a, which is a convex top and a flat surface; a side portion 1c, which is located on the side and inclined with respect to the top portion 1a; and a rounded portion 1b, which It has a rounded shape and is arranged between the top portion 1a and the side portion 1c. Since the second separation membrane 2 has a shape consistent with that of the first separation membrane 1, the convex portion of the second separation membrane 2 fits inside the concave side of the convex portion of the first separation membrane 1. The rounded shape here refers to a curved line of at least two curved segments having different curvatures and connected at an inflection point, similar to the curved line in the letter "R". In such a separation membrane, it is desirable that the arrangement density of the bridge 3 per unit area is higher at the top portion than at the side portion 1c and the rounded portion 1b. In addition, it is desirable that the arrangement density of the bridge 3 per unit area is the lowest at the rounded portion 1b. This is because when there are too many bridges 3 at the rounded portion 1b and the side portion 1c, the rigidity increases, making it difficult for the separation membrane to move smoothly. Here, a weld line 71 is arranged for the bridge. However, it is desirable that the number of weld lines 71 is as follows: the number of weld lines 71 at the rounded portion 1b <the number of weld lines 71 at the side portion 1c <the number of weld lines 71 at the top portion 1a.
期望的是,當第一分離膜1或第二分離膜2破損時,抑制容納於容納室的流體從匣滴下。因此,期望的是,在使用中的流體容納構件的方位(orientation)上,熔接線71(橋3)被形成為沿著Y軸線方向(在與重力方向正交的方向上)延伸。期望的是熔接線71(橋3)具有格子形式。使用中的流體容納構件的方位指的是在例如流體容納構件安裝於諸如噴墨印表機或壓印設備的記錄設備時流體容納構件的方位。It is desirable that when the first separation membrane 1 or the second separation membrane 2 is broken, the fluid contained in the storage chamber is suppressed from dripping from the cartridge. Therefore, it is desirable that the weld line 71 (bridge 3) is formed to extend in the Y-axis direction (in a direction orthogonal to the gravity direction) in the orientation of the fluid containing member in use. It is desirable that the weld line 71 (bridge 3) has a lattice form. The orientation of the fluid containing member in use refers to the orientation of the fluid containing member when, for example, the fluid containing member is installed in a recording device such as an inkjet printer or an imprinting apparatus.
以下方法是結合第一分離膜1和第二分離膜2的範例。首先,第一分離膜1和第二分離膜2被成型為沿著殼體11的內壁面延伸的凸出形狀。接下來,在流體容納構件13中結合它們時,它們以沿著殼體12的內壁面在相反方向凸出的方式暫時變形。此後,使第一分離膜1和第二分離膜2夾在殼體11與殼體12之間。間隔件可以夾在第一分離膜1與第二分離膜2之間,以使第一分離膜1和第二分離膜2除了在橋處之外彼此不接觸。間隔件可以與至少一個分離膜至少一體地成型。The following method is an example of combining the first separation membrane 1 and the second separation membrane 2. First, the first separation membrane 1 and the second separation membrane 2 are formed into a convex shape extending along the inner wall surface of the casing 11. Next, when they are combined in the fluid accommodating member 13, they are temporarily deformed in such a manner as to project in the opposite direction along the inner wall surface of the housing 12. Thereafter, the first separation membrane 1 and the second separation membrane 2 are sandwiched between the casing 11 and the casing 12. The spacer may be sandwiched between the first separation membrane 1 and the second separation membrane 2 so that the first separation membrane 1 and the second separation membrane 2 do not contact each other except at the bridge. The spacer may be at least integrally formed with at least one separation membrane.
殼體11和殼體12可以相對於以第一分離膜1或第二分離膜2的安裝部分為邊界的平面形成為對稱的形狀。例如,第一分離膜1的凸出形狀與第二分離膜2的凸出形狀可以以在相反方向上凸出的方式形成。由此,當第一流體被消耗時,第一容納室5中的第一流體能夠被充分地消耗、直到第一分離膜1和第二分離膜2沿著殼體11的內壁面變形。The casing 11 and the casing 12 may be formed in a symmetrical shape with respect to a plane bounded by the mounting portion of the first separation membrane 1 or the second separation membrane 2. For example, the convex shape of the first separation membrane 1 and the convex shape of the second separation membrane 2 may be formed so as to be convex in opposite directions. Thus, when the first fluid is consumed, the first fluid in the first storage chamber 5 can be sufficiently consumed until the first separation membrane 1 and the second separation membrane 2 are deformed along the inner wall surface of the housing 11.
為了平順地移動第一分離膜1和第二分離膜2,期望的是在側面部分上進行點熔接(諸如圓點熔接)。期望的是在與第一分離膜1和第二分離膜2的移動方向正交的方向上進行線熔接。即,期望的是以點(諸如圓點)或線的形狀形成橋3。當形狀為線時,第一分離膜1和第二分離膜2藉由線狀的橋彼此連接。In order to smoothly move the first separation membrane 1 and the second separation membrane 2, it is desirable to perform spot welding (such as round spot welding) on the side portion. It is desirable to perform line welding in a direction orthogonal to the moving directions of the first separation membrane 1 and the second separation membrane 2. That is, it is desirable to form the bridge 3 in the shape of dots (such as dots) or lines. When the shape is a line, the first separation membrane 1 and the second separation membrane 2 are connected to each other by a linear bridge.
以上說明了第一分離膜1和第二分離膜2藉由圖1中示出的橋3彼此部分地連接的結構。然而,在本實施例中,第一分離膜1和第二分離膜2可以彼此部分地接觸。即,橋3不需要是從第一分離膜1的表面和第二分離膜2的表面凸出的部分。例如,第一分離膜1和第二分離膜2的部分熔合且僅彼此接觸的部分也可以是橋3。The structure in which the first separation membrane 1 and the second separation membrane 2 are partially connected to each other by the bridge 3 shown in FIG. 1 has been explained above. However, in the present embodiment, the first separation membrane 1 and the second separation membrane 2 may partially contact each other. That is, the bridge 3 need not be a portion protruding from the surface of the first separation membrane 1 and the surface of the second separation membrane 2. For example, the portions of the first separation membrane 1 and the second separation membrane 2 are fused and only contact with each other may be the bridge 3.
在圖4A和圖4B中,例如,藉由使用PTFE膜作為第一分離膜1和第二分離膜2,按照熔接線71利用雷射照射它們,並且熱熔接它們,第一分離膜1和第二分離膜2彼此部分地連接(或彼此部分地接觸)。雷射熔接是在將相同材料的兩個部件接合在一起時經常使用的技術。另一方面,本實施例的流體容納構件可以容納光敏抗蝕劑作為第一流體。特別是,當光敏抗蝕劑是壓印材料時,需要最小化金屬離子的污染。因此,分離膜例如為PTFE膜。然而,考慮到能夠進行雷射熔接的容易性,部件中的一個部件需要使雷射光束透過。因此,期望的是透明的PTFE膜被用於第一分離膜1。另一方面,期望的是待被熔接的介面是使熱量藉由雷射照射容易地產生的不透明表面。因此,期望的是不透明的PTFE膜被用於第二分離膜2。當第二分離膜2是PTFE膜時,由於難以進行第二分離膜2表面的塗覆,所以藉由將碳粉添加到材料和降低透過率,能夠實現不透明的表面。由於第一分離膜1是直接接觸光敏抗蝕劑的分離膜,所以第一分離膜1的材料需要是具有小量添加劑的材料。因此,期望的是第一分離膜1不含有添加劑。另一方面,當由薄膜樹脂構件形成時,易於產生靜電,其結果是將碳添加到第二分離膜2並且接地,以使電荷逃逸。In FIGS. 4A and 4B, for example, by using PTFE membranes as the first separation membrane 1 and the second separation membrane 2, they are irradiated with laser light according to the weld line 71, and they are thermally welded, the first separation membrane 1 and the first The two separation membranes 2 are partially connected to each other (or partially in contact with each other). Laser welding is a technique often used when joining two parts of the same material together. On the other hand, the fluid containing member of this embodiment can contain a photoresist as the first fluid. In particular, when the photoresist is an imprint material, it is necessary to minimize the contamination of metal ions. Therefore, the separation membrane is, for example, a PTFE membrane. However, considering the ease of laser welding, one of the components needs to transmit the laser beam. Therefore, it is desirable that a transparent PTFE membrane is used for the first separation membrane 1. On the other hand, it is desirable that the interface to be welded is an opaque surface that allows heat to be easily generated by laser irradiation. Therefore, it is desirable that an opaque PTFE membrane is used for the second separation membrane 2. When the second separation membrane 2 is a PTFE membrane, since it is difficult to coat the surface of the second separation membrane 2, by adding carbon powder to the material and reducing the transmittance, an opaque surface can be achieved. Since the first separation film 1 is a separation film that directly contacts the photoresist, the material of the first separation film 1 needs to be a material with a small amount of additives. Therefore, it is desirable that the first separation membrane 1 does not contain additives. On the other hand, when formed of a thin-film resin member, static electricity is easily generated, and as a result, carbon is added to the second separation membrane 2 and grounded to allow charge to escape.
圖4A和圖4B示出了藉由使用雷射將第一分離膜1和第二分離膜2熱熔接並且熔接部分成為橋3,即第一分離膜1和第二分離膜2彼此接觸(或它們彼此連接)的部分的範例。可以藉由其它方法使第一分離膜1和第二分離膜2彼此部分地接觸(或彼此部分地連接)。其範例為圖5A至圖5C中示出的連接。如圖5A所示,與圖4A和圖4B相同,利用凸出形狀成型第一分離膜1和第二分離膜2並且使它們平行地彼此重疊。然而,如圖5B所示,第二分離膜2的表面設置有凸出部分72。凸出部分72可以藉由成型和加工第二分離膜2而以部分凸出的方式形成,或者可以藉由形成不同的凸出構件(諸如PTFE)而形成。藉由相對於第一分離膜1熔接或熔合凸出部分72來固定和連接它們,形成了橋3。可選地,如圖5C所示,藉由將諸如線狀凸出部分的凸出部分72作為不同的構件佈置於第一分離膜1和第二分離膜2之間,並且熔接或熔合來使它們固定並接觸(連接),也能夠形成橋3(當凸出部分72與第一分離膜1和第二分離膜2熔接在一起時,凸出部分72成為橋3)。當藉由成型第二分離膜2來形成凸出部分72時,第一分離膜1和第二分離膜2彼此接觸。當分別從第一分離膜1和第二分離膜2形成凸出部分72時,第一分離膜1和第二分離膜2彼此連接。4A and 4B show that the first separation membrane 1 and the second separation membrane 2 are thermally welded by using a laser and the welded portion becomes a bridge 3, that is, the first separation membrane 1 and the second separation membrane 2 are in contact with each other (or They are connected to each other). The first separation membrane 1 and the second separation membrane 2 may be partially in contact with each other (or partially connected to each other) by other methods. An example of this is the connection shown in FIGS. 5A to 5C. As shown in FIG. 5A, as in FIGS. 4A and 4B, the first separation membrane 1 and the second separation membrane 2 are molded with a convex shape and overlapped with each other in parallel. However, as shown in FIG. 5B, the surface of the second separation membrane 2 is provided with a convex portion 72. The convex portion 72 may be formed in a partially convex manner by molding and processing the second separation membrane 2 or may be formed by forming a different convex member such as PTFE. The bridge 3 is formed by welding and fusing the protruding portions 72 with respect to the first separation membrane 1 to fix and connect them. Alternatively, as shown in FIG. 5C, by arranging the convex portion 72 such as a linear convex portion as a different member between the first separation membrane 1 and the second separation membrane 2, and welding or fusing They are fixed and contacted (connected), and can also form a bridge 3 (when the protruding portion 72 is welded to the first separation membrane 1 and the second separation membrane 2, the protruding portion 72 becomes the bridge 3). When the convex portion 72 is formed by molding the second separation membrane 2, the first separation membrane 1 and the second separation membrane 2 are in contact with each other. When the convex portions 72 are formed from the first separation membrane 1 and the second separation membrane 2, respectively, the first separation membrane 1 and the second separation membrane 2 are connected to each other.
作為橋3的範例,可以使用在支撐構件的兩面均具有黏接層的所謂的雙面膠帶。為了在即使當第一分離膜1或第二分離膜破損且流體從該處漏出時雙面膠帶也保持各分離膜,期望的是第一分離膜1和第二分離膜2分別由耐受第一流體的材料和耐受第二流體的材料形成。當流體容納構件被用作例如壓印設備的匣時,期望的是使用允許少的脫氣進入壓印設備的材料。根據這些觀點,期望的是黏接層由丙烯酸樹脂形成。As an example of the bridge 3, a so-called double-sided tape having adhesive layers on both sides of the support member can be used. In order to maintain each separation membrane even when the first separation membrane 1 or the second separation membrane is damaged and fluid leaks from there, it is desirable that the first separation membrane 1 and the second separation membrane 2 be separated by A fluid material and a material resistant to the second fluid are formed. When the fluid containing member is used as, for example, a cassette of an imprinting apparatus, it is desirable to use a material that allows little degassing to enter the imprinting apparatus. From these viewpoints, it is desirable that the adhesive layer is formed of acrylic resin.
第一分離膜1和第二分離膜2不必具有從其中央凸出的凸出形狀。圖6A示出了以袋的形式閉合第一分離膜1和第二分離膜2的流體容納構件13。圖6B是第一分離膜1和第二分離膜2的放大圖,並且示出了以吸管的形式從袋狀第二分離膜2的內部凸出到外部的連接管24。與圖1中示出的形式相似,連接管24貫通流體容納構件13的殼體並且到達副儲槽26,並且第二流體容納於袋狀第二分離膜2中。袋狀分離膜1以包裹第二分離膜2的方式佈置於第二分離膜2的外側。第一分離膜1和第二分離膜2藉由橋3彼此部分地接觸(彼此部分地連接)。通氣孔18從第一分離膜1與第二分離膜2之間的空間4貫通第一分離膜1並且從該處凸出。通氣孔18貫通流體容納構件13的殼體並且連接到外部。The first separation membrane 1 and the second separation membrane 2 do not have to have a convex shape protruding from the center thereof. FIG. 6A shows the fluid containing member 13 closing the first separation membrane 1 and the second separation membrane 2 in the form of a bag. FIG. 6B is an enlarged view of the first separation membrane 1 and the second separation membrane 2 and shows the connection pipe 24 protruding from the inside to the outside of the bag-shaped second separation membrane 2 in the form of a straw. Similar to the form shown in FIG. 1, the connection pipe 24 penetrates the housing of the fluid containing member 13 and reaches the auxiliary reservoir 26, and the second fluid is contained in the bag-shaped second separation membrane 2. The bag-shaped separation membrane 1 is arranged outside the second separation membrane 2 so as to wrap the second separation membrane 2. The first separation membrane 1 and the second separation membrane 2 are partially in contact with each other (partially connected to each other) by the bridge 3. The vent hole 18 penetrates the first separation membrane 1 from the space 4 between the first separation membrane 1 and the second separation membrane 2 and protrudes from there. The vent hole 18 penetrates the housing of the fluid accommodating member 13 and is connected to the outside.
在圖1中示出的形式中,殼體11和殼體12分別具有容納第一流體的容納室的外部分隔件和容納第二流體的容納室的外部分隔件的功能。然而,在圖6A示出的形式中,容納第二流體的袋在第一流體中浮動。其它方面與例如圖1中說明的那些相同。即使在圖6A示出的形式中,也能夠實現本實施例的效果。In the form shown in FIG. 1, the housing 11 and the housing 12 respectively have the functions of an external partition of the storage chamber that contains the first fluid and an external partition of the storage chamber that contains the second fluid. However, in the form shown in FIG. 6A, the bag containing the second fluid floats in the first fluid. Other aspects are the same as those illustrated in FIG. 1, for example. Even in the form shown in FIG. 6A, the effect of the present embodiment can be achieved.
期望的是第一分離膜1的厚度和第二分離膜2的厚度為大於或等於10μm且小於或等於100μm。第一分離膜1的厚度和第二分離膜2的厚度可以彼此不同。當第一分離膜1的厚度和第二分離膜2的厚度彼此不同時,分離膜整體的剛性減小,使得能夠隨著歸因於第一流體的排出導致第一流體的量減少而平順地移動第一分離膜1和第二分離膜2。考慮到第一分離膜1接觸第一流體,期望的是第一分離膜1比第二分離膜2厚。例如,期望的是第一分離膜1的厚度為大於或等於第二分離膜2的厚度的1.3倍且小於或等於2.5倍。然而,例如,當第一容納室5的內壓被保持為比外壓低0.4±0.04kPa的內壓時,期望的是第一分離膜1和第二分離膜2在0.01kPa或以下的壓力差的情況下無抵抗地自由變形和移動。這裡,假定第一分離膜1的厚度和第二分離膜2的厚度在其對應的分離膜中大致為均勻的厚度(至少頂部分1a的厚度、圓角部分1b的厚度和側面部分1c的厚度為大致均勻)。It is desirable that the thickness of the first separation membrane 1 and the thickness of the second separation membrane 2 are greater than or equal to 10 μm and less than or equal to 100 μm. The thickness of the first separation membrane 1 and the thickness of the second separation membrane 2 may be different from each other. When the thickness of the first separation membrane 1 and the thickness of the second separation membrane 2 are different from each other, the rigidity of the separation membrane as a whole is reduced, so that it is possible to smoothly as the amount of the first fluid decreases due to the discharge of the first fluid The first separation membrane 1 and the second separation membrane 2 are moved. Considering that the first separation membrane 1 contacts the first fluid, it is desirable that the first separation membrane 1 is thicker than the second separation membrane 2. For example, it is desirable that the thickness of the first separation membrane 1 is greater than or equal to 1.3 times and less than or equal to 2.5 times the thickness of the second separation membrane 2. However, for example, when the internal pressure of the first storage chamber 5 is maintained at an internal pressure lower than the external pressure by 0.4±0.04 kPa, it is desirable that the first separation membrane 1 and the second separation membrane 2 have a pressure difference of 0.01 kPa or less Freely deform and move without resistance. Here, it is assumed that the thickness of the first separation membrane 1 and the thickness of the second separation membrane 2 are approximately uniform in their corresponding separation membranes (at least the thickness of the top portion 1a, the thickness of the rounded portion 1b and the thickness of the side portion 1c Is roughly uniform).
另一方面,能夠使一個分離膜中的分離膜厚度不同。例如,圖7示出了第一分離膜1的結構。如圖7所示,期望的是第一分離膜1的外緣部7比第一分離膜1的頂部分8厚。這能夠抑制在熔接或黏接分離膜時分離膜的破損。當頂部分8的厚度大於圓角部分的厚度和側面部分的厚度時,能夠平順地移動分離膜。On the other hand, the separation membrane thickness in one separation membrane can be made different. For example, FIG. 7 shows the structure of the first separation membrane 1. As shown in FIG. 7, it is desirable that the outer edge portion 7 of the first separation membrane 1 is thicker than the top portion 8 of the first separation membrane 1. This can suppress the breakage of the separation membrane when welding or adhering the separation membrane. When the thickness of the top portion 8 is greater than the thickness of the rounded portion and the thickness of the side portion, the separation membrane can be smoothly moved.
成型頂部分8的方法的範例包括在加熱的同時真空成型、在加熱的同時吹塑成型以及在加熱的同時使用模具成型。在使用模具成型時,將處於平面狀態下的分離膜的外緣部1d固定到固定框架並且加熱該外緣部1d,並且藉由使用模具推出圖4A中示出的凸出部分(頂部分1a、圓角部分1b和側面部分1c)的方法是可用的。然而,方法不限於這樣的真空成型和使用模具成型,使得能夠選擇適合於成為分離膜的撓性構件的材料且適合於分離膜的所需要的形狀的成型方法。Examples of the method of molding the top portion 8 include vacuum molding while heating, blow molding while heating, and molding using a mold while heating. When molding using a mold, the outer edge portion 1d of the separation membrane in a planar state is fixed to the fixing frame and the outer edge portion 1d is heated, and the protruding portion (top portion 1a) shown in FIG. 4A is pushed out by using the mold , Fillet portion 1b and side portion 1c) methods are available. However, the method is not limited to such vacuum forming and forming using a mold, so that it is possible to select a forming method suitable for the material of the flexible member that becomes the separation membrane and for the required shape of the separation membrane.
作為分離膜,可以使用除了第一分離膜1和第二分離膜2之外的分離膜。例如,可以使用三個分離膜。即使在這樣的結構中,藉由使分離膜彼此部分連接或者彼此部分接觸,也能夠使分離膜一起移動並且提供本實施例的效果。As the separation membrane, a separation membrane other than the first separation membrane 1 and the second separation membrane 2 can be used. For example, three separation membranes can be used. Even in such a structure, by partially connecting or partially contacting the separation membranes, the separation membranes can be moved together and the effect of the present embodiment can be provided.
例如,當製造分離膜或者在分離膜的移動期間形成孔時,分離膜可能會破損。當第一流體和第二流體混合時,產生這樣的問題:第一流體困在排出頭中,並且即使第一流體從排出頭中排出,也不能形成好的圖像或圖案。相比之下,在本實施例中,如上所述,即使第一分離膜1和第二分離膜2中的一者破損,只要第一分離膜1和第二分離膜2中的另一者未破損,就能夠抑制第一流體和第二流體的混合。For example, when a separation membrane is manufactured or a hole is formed during the movement of the separation membrane, the separation membrane may be damaged. When the first fluid and the second fluid are mixed, there is a problem that the first fluid is trapped in the discharge head, and even if the first fluid is discharged from the discharge head, a good image or pattern cannot be formed. In contrast, in this embodiment, as described above, even if one of the first separation membrane 1 and the second separation membrane 2 breaks, as long as the other of the first separation membrane 1 and the second separation membrane 2 Without damage, the mixing of the first fluid and the second fluid can be suppressed.
圖8示出了第二分離膜2破損並且在第二分離膜2中形成了孔73的狀態。由於作為第一分離膜1與第二分離膜2之間的間隙的空間4與外部空氣連通,所以空間4中的壓力與大氣壓力相等。另一方面,如圖3所示,第一容納室5的壓力和第二容納室6的壓力各被調節到相對於大氣壓力小例如0.4kPa的負壓。由此,從壓力相對高的空間4朝向壓力相對低的第二容納室6,來自孔73的空氣轉換為氣泡74並且氣泡74被吸入。由於氣泡74的壓力等於大氣壓力,所以第二容納室6的內壓升高,並且第二流體經由連接管24被朝向副儲槽26推出。以該方式,即使第二分離膜2形成了孔73,也能夠防止容納於第一容納室5的第一流體和容納於第二容納室6的流體彼此接觸。FIG. 8 shows a state where the second separation membrane 2 is broken and holes 73 are formed in the second separation membrane 2. Since the space 4 that is a gap between the first separation membrane 1 and the second separation membrane 2 communicates with outside air, the pressure in the space 4 is equal to the atmospheric pressure. On the other hand, as shown in FIG. 3, the pressure of the first storage chamber 5 and the pressure of the second storage chamber 6 are each adjusted to a negative pressure that is smaller than the atmospheric pressure, for example, 0.4 kPa. Thereby, from the relatively high-pressure space 4 toward the relatively low-pressure second storage chamber 6, the air from the hole 73 is converted into bubbles 74 and the bubbles 74 are sucked in. Since the pressure of the air bubble 74 is equal to the atmospheric pressure, the internal pressure of the second accommodating chamber 6 rises, and the second fluid is pushed toward the auxiliary reservoir 26 via the connection pipe 24. In this way, even if the second separation membrane 2 is formed with the hole 73, it is possible to prevent the first fluid contained in the first storage chamber 5 and the fluid contained in the second storage chamber 6 from contacting each other.
另一方面,當第一分離膜1中形成了孔時,氣泡被吸入第一容納室5並且第一容納室5的內壓升高。結果,第一分離膜1和第二分離膜2朝向第二容納室6側移動,使得體積與已經移動的第二流體的體積相等的第二流體的量經由連接管24被朝向副儲槽26推出。另外,能夠防止容納於第一容納室5的第一流體和容納於第二容納室6的第二流體彼此接觸。On the other hand, when holes are formed in the first separation membrane 1, air bubbles are sucked into the first storage chamber 5 and the internal pressure of the first storage chamber 5 rises. As a result, the first separation membrane 1 and the second separation membrane 2 move toward the second storage chamber 6 side, so that the amount of the second fluid whose volume is equal to the volume of the second fluid that has moved is directed toward the auxiliary reservoir 26 via the connection pipe 24 roll out. In addition, it is possible to prevent the first fluid contained in the first storage chamber 5 and the second fluid contained in the second storage chamber 6 from contacting each other.
因為空間4連接到外部空氣,所以到目前為止的說明假定了第一分離膜1與第二分離膜2之間的空間4中的壓力與大氣壓力相等。然而,即使藉由作為先調節被設置為用於與外部空氣連通的閥的壓力、然後關閉該閥的結果而形成了氣密的空間,也能夠維持空間4中的壓力與第一容納室5和第二容納室6的壓力之間的差異。Since the space 4 is connected to outside air, the description so far assumes that the pressure in the space 4 between the first separation membrane 1 and the second separation membrane 2 is equal to the atmospheric pressure. However, even if an airtight space is formed as a result of first adjusting the pressure of a valve provided for communication with outside air and then closing the valve, the pressure in the space 4 and the first storage chamber 5 can be maintained And the difference between the pressure of the second storage chamber 6.
當孔形成於分離膜中的一者並且第二流體被朝向副儲槽26推出時,能夠藉由檢測第二流體的移動來檢測分離膜中的任何破損。When a hole is formed in one of the separation membranes and the second fluid is pushed toward the secondary reservoir 26, any damage in the separation membrane can be detected by detecting the movement of the second fluid.
這裡,更詳細地說明作為橋3的熔接線71。在圖4B中,熔接線71是獨立的線並且彼此不交叉。歸因於上述結構,未在第一分離膜1與第二分離膜2之間形成封閉空間。當第一分離膜1的整個表面和第二分離膜2的整個表面彼此緊密接觸時,或者熔接線形成封閉空間時,即使第一分離膜1或第二分離膜2破損,從外部供給形成圖8中示出的氣泡74的空氣的通路被阻斷。因此,離散地佈置橋3以使得即使流體容納構件13中的第一分離膜1和第二分離膜2中的各種位置破損,也保留用於將外部空氣供給到破損位置的路徑。Here, the weld line 71 as the bridge 3 will be described in more detail. In FIG. 4B, the weld line 71 is an independent line and does not cross each other. Due to the above structure, no closed space is formed between the first separation membrane 1 and the second separation membrane 2. When the entire surface of the first separation membrane 1 and the entire surface of the second separation membrane 2 are in close contact with each other, or when the weld line forms a closed space, even if the first separation membrane 1 or the second separation membrane 2 is damaged, it is supplied from the outside. The air path of the bubble 74 shown in 8 is blocked. Therefore, the bridge 3 is arranged discretely so that even if various positions in the first separation membrane 1 and the second separation membrane 2 in the fluid containing member 13 are damaged, a path for supplying external air to the damaged position is retained.
特別地,當第一分離膜1和第二分離膜2彼此緊密接觸時,彼此緊密接觸的分離膜具有的剛性與厚度等於在一起的兩個膜的厚度的薄膜的剛性相等。使該薄膜變形所需要的力是當兩分離膜一起移動並且變形時所需要的力的大約十倍。因此,該薄膜可能不再能夠響應微弱的壓力差。In particular, when the first separation membrane 1 and the second separation membrane 2 are in close contact with each other, the separation membrane in close contact with each other has a rigidity equal to that of a thin film having a thickness equal to the thickness of the two membranes together. The force required to deform the membrane is about ten times the force required when the two separation membranes move and deform together. Therefore, the membrane may no longer be able to respond to weak pressure differences.
到目前為止,說明了作為第一分離膜1與第二分離膜2之間的間隙的空間經由通氣孔18與外部空氣連通的情況。然而,第一分離膜1與第二分離膜2之間的空間不必填充空氣。如圖3所示,說明第一容納室5的內壓和第二容納室6的內壓彼此相等並且這些內壓被設定為相對於外部壓力小數kPa的負壓的情況。在該狀態下,當分離膜中的一者破損時,為了保持第一流體和第二流體彼此不接觸,填充空間4的流體不必是空氣。另外,空間4的壓力不必與外部壓力相等。即,通氣孔18不必與外部空氣連通。So far, the case where the space that is the gap between the first separation membrane 1 and the second separation membrane 2 communicates with the outside air via the vent hole 18 has been described. However, the space between the first separation membrane 1 and the second separation membrane 2 need not be filled with air. As shown in FIG. 3, the case where the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6 are equal to each other and these internal pressures are set to a negative pressure of a few kPa relative to the external pressure. In this state, when one of the separation membranes is broken, in order to keep the first fluid and the second fluid from contacting each other, the fluid filling the space 4 need not be air. In addition, the pressure of the space 4 need not be equal to the external pressure. That is, the vent hole 18 does not have to communicate with outside air.
圖9示出了通氣孔18與處於氣密狀態的氣儲槽37連通的流體容納構件13。氣儲槽37具有例如110kPa的壓力,該壓力大於或等於外部壓力。在氣儲槽37中密封化學清潔的氮氣。根據這樣的結構,例如,第一流體是光敏抗蝕劑,並且即使第一分離膜1破損,也能夠抑制因氧氣與第一流體接觸引起的光敏抗蝕劑的光敏性能的改變。由於化學清潔的氮氣不包含金屬離子,所以即使化學清潔的氮氣與第一流體接觸,第一流體也不會被金屬離子污染。此外,由於氮氣的內壓高於第一容納室5的內壓,所以當分離膜破損時,氮氣流入第一容納室5側比第一流體流出到空間4側發生得早。藉由升高第一容納室5的壓力和第二容納室6的壓力,能夠檢測分離膜的任何破損。9 shows the fluid containing member 13 in which the vent hole 18 communicates with the air reservoir 37 in an airtight state. The gas storage tank 37 has a pressure of, for example, 110 kPa, which is greater than or equal to the external pressure. The gas storage tank 37 is sealed with chemically cleaned nitrogen. According to such a structure, for example, the first fluid is a photoresist, and even if the first separation membrane 1 is damaged, it is possible to suppress the change in the photosensitive performance of the photoresist due to the contact of oxygen with the first fluid. Since the chemically cleaned nitrogen does not contain metal ions, even if the chemically cleaned nitrogen comes into contact with the first fluid, the first fluid will not be contaminated with metal ions. In addition, since the internal pressure of nitrogen gas is higher than the internal pressure of the first storage chamber 5, when the separation membrane is broken, the nitrogen gas flows into the first storage chamber 5 side earlier than the first fluid flows out to the space 4 side. By raising the pressure of the first storage chamber 5 and the pressure of the second storage chamber 6, any breakage of the separation membrane can be detected.
到目前為止,給出了關於第一分離膜1和第二分離膜2藉由橋3彼此部分地連接或彼此部分地接觸的結構的說明。代替藉由橋3使第一分離膜1和第二分離膜2接觸,可以藉由減小第一分離膜1與第二分離膜2之間的空間4的壓力(例如,藉由使它們的壓力比外部壓力(大氣壓力)低)而使第一分離膜1和第二分離膜2彼此接觸。更具體地,能夠氣密密封空間4、設置用於將空間4的壓力控制到預定壓力的壓力控制單元、藉由壓力控制單元調節空間4的壓力並且使第一分離膜1和第二分離膜2彼此接觸。根據該方法,歸因於例如當第一分離膜2和第二分離膜2彼此接觸時產生的褶皺或者第一分離膜1和第二分離膜原本具有的褶皺,能夠使第一分離膜1和第二分離膜2部分地接觸而不使它們的整個表面接觸。結果,與到目前為止已說明的相同,第一分離膜1和第二分離膜2能夠根據第一容納室5或第二容納室6的內壓改變而一起移動。與歸因於熱熔接使第一分離膜1和第二分離膜2接觸(第一分離膜1和第二分離膜2被熱熔接在一起)的方法相比,該方法能夠抑制分離膜的硬化和破損。與當藉由橋3(特別地,當橋3是雙面膠帶時)使第一分離膜和第二分離膜彼此接觸或彼此連接時相比,能夠抑制分離膜的剛性增加。為了實現理想的接觸狀態,期望的是第一分離膜1與第二分離膜2之間的空間4的壓力比外部壓力小,在大於或等於0.4kPa且小於或等於5.0kPa的範圍。更期望的是第一分離膜1與第二分離膜2之間的空間4的壓力比外部壓力小,在大於或等於0.5kPa且小於或等於3.0kPa的範圍。So far, a description has been given of a structure in which the first separation membrane 1 and the second separation membrane 2 are partially connected to each other or partially contact each other by the bridge 3. Instead of bringing the first separation membrane 1 and the second separation membrane 2 into contact through the bridge 3, it is possible to reduce the pressure of the space 4 between the first separation membrane 1 and the second separation membrane 2 (for example, by making their The pressure is lower than the external pressure (atmospheric pressure)) to bring the first separation membrane 1 and the second separation membrane 2 into contact with each other. More specifically, it is possible to hermetically seal the space 4, provide a pressure control unit for controlling the pressure of the space 4 to a predetermined pressure, adjust the pressure of the space 4 by the pressure control unit and make the first separation membrane 1 and the second separation membrane 2 touch each other. According to this method, due to, for example, wrinkles generated when the first separation membrane 2 and the second separation membrane 2 are in contact with each other or wrinkles originally possessed by the first separation membrane 1 and the second separation membrane, the first separation membrane 1 and The second separation membranes 2 are partially in contact without contacting their entire surfaces. As a result, as explained so far, the first separation membrane 1 and the second separation membrane 2 can move together according to the change in the internal pressure of the first storage chamber 5 or the second storage chamber 6. Compared with a method in which the first separation membrane 1 and the second separation membrane 2 are brought into contact due to thermal fusion (the first separation membrane 1 and the second separation membrane 2 are thermally welded together), this method can suppress the hardening of the separation membrane And damaged. Compared with when the first separation membrane and the second separation membrane are brought into contact with or connected to each other by the bridge 3 (in particular, when the bridge 3 is a double-sided tape), it is possible to suppress an increase in the rigidity of the separation membrane. In order to achieve an ideal contact state, it is desirable that the pressure of the space 4 between the first separation membrane 1 and the second separation membrane 2 is smaller than the external pressure, in the range of greater than or equal to 0.4 kPa and less than or equal to 5.0 kPa. It is more desirable that the pressure of the space 4 between the first separation membrane 1 and the second separation membrane 2 is smaller than the external pressure and is in the range of 0.5 kPa or more and 3.0 kPa or less.
儘管第一分離膜1和第二分離膜2可以基本上被形成為藉由彼此部分地連接或藉由彼此部分地接觸而一起移動,但是說明了更期望的範圍。根據它們是否彼此連接或彼此接觸,該更期望的範圍不同。Although the first separation membrane 1 and the second separation membrane 2 may be basically formed to move together by being partially connected to each other or by being in partial contact with each other, a more desirable range is illustrated. The more desirable range differs depending on whether they are connected to each other or contact each other.
首先,說明了第一分離膜1和第二分離膜2彼此部分地連接的情況。期望的是它們在多個位置處連接。為了防止當第一分離膜1與第二分離膜2一起移動時在它們之間形成大的間隙,期望的是盡可能離散地佈置多個連接位置。因此,期望的是,在第一分離膜1與第二分離膜2彼此相對的平面中,多個連接位置至少佈置於靠***面的重心(在比起靠近外周更靠近重心的位置)以及靠近外周(在比起靠近重心更靠近外周的位置)。當第一分離膜1和第二分離膜2彼此部分地連接時,隨著連接位置的面積減小,能夠減小分離膜整體的剛性,並且能夠抑制第一分離膜1和第二分離膜2一起移動時的壓力改變。因此,在第一分離膜1和第二分離膜2彼此相對的平面中,多個連接位置的總面積期望為小於或等於整個平面的面積的40%,更期望為小於或等於整個平面的面積的10%,甚至更期望為小於或等於整個平面的面積的5%。另一方面,當連接位置的面積過小時,分離膜在連結位置處的連接力(附著力)小,其結果是分離膜易於從彼此剝離。因此,期望的是,在第一分離膜1和第二分離膜2彼此相對的平面中,連接位置的總面積為大於或等於整個平面的面積的1%。First, the case where the first separation membrane 1 and the second separation membrane 2 are partially connected to each other is explained. It is expected that they are connected at multiple locations. In order to prevent the formation of a large gap between the first separation membrane 1 and the second separation membrane 2 when they move together, it is desirable to arrange a plurality of connection positions as discretely as possible. Therefore, it is desirable that in the plane where the first separation membrane 1 and the second separation membrane 2 face each other, a plurality of connection positions are arranged at least near the center of gravity of the plane (at a position closer to the center of gravity than near the outer periphery) and close to the outer periphery (At a position closer to the periphery than to the center of gravity). When the first separation membrane 1 and the second separation membrane 2 are partially connected to each other, as the area of the connection position decreases, the rigidity of the entire separation membrane can be reduced, and the first separation membrane 1 and the second separation membrane 2 can be suppressed The pressure changes when moving together. Therefore, in the plane where the first separation membrane 1 and the second separation membrane 2 are opposed to each other, the total area of the plurality of connection positions is desirably 40% or less of the area of the entire plane, and more desirably less than or equal to the area of the entire plane 10%, even more desirably less than or equal to 5% of the area of the entire plane. On the other hand, when the area of the connection position is too small, the connection force (adhesion force) of the separation membrane at the connection position is small, and as a result, the separation membranes are easily peeled from each other. Therefore, it is desirable that in a plane where the first separation membrane 1 and the second separation membrane 2 face each other, the total area of the connection position is 1% or more of the area of the entire plane.
接下來,說明第一分離膜1和第二分離膜2彼此部分地接觸的情況。當藉由減小第一分離膜1與第二分離膜2之間的空間4的壓力使第一分離膜1和第二分離膜2彼此接觸時,接觸位置的面積相對大。當第一分離膜1和第二分離膜2彼此接觸時,隨著接觸位置的面積減小,分離膜難以一起移動。因此,在第一分離膜1和第二分離膜2彼此相對的平面中,接觸部分的總面積期望為大於或等於整個平面的面積的80%,更期望為大於或等於整個平面的面積的90%。儘管它們僅彼此接觸,但是,如果整個相對表面彼此接觸並且分離膜整體的剛性變得過高,則該狀態接近當僅一個分離膜的厚度增加時的狀態。因此,期望的是空間4的壓力與外部壓力(大氣壓力)之間的差異為小於或等於10kPa,並且能夠調節接觸程度。Next, the case where the first separation membrane 1 and the second separation membrane 2 are partially in contact with each other will be explained. When the first separation membrane 1 and the second separation membrane 2 are brought into contact with each other by reducing the pressure of the space 4 between the first separation membrane 1 and the second separation membrane 2, the area of the contact position is relatively large. When the first separation membrane 1 and the second separation membrane 2 are in contact with each other, as the area of the contact position decreases, it is difficult for the separation membranes to move together. Therefore, in the plane where the first separation membrane 1 and the second separation membrane 2 are opposed to each other, the total area of the contact portion is desirably 80% or more of the area of the entire plane, and more desirably 90% or more of the area of the entire plane %. Although they only contact each other, if the entire opposing surfaces contact each other and the rigidity of the separation membrane as a whole becomes too high, the state is close to the state when the thickness of only one separation membrane increases. Therefore, it is desirable that the difference between the pressure of the space 4 and the external pressure (atmospheric pressure) is less than or equal to 10 kPa, and the degree of contact can be adjusted.
能夠從排出頭14排出第一流體。因此,第一流體可以是例如噴墨印表機中使用的墨。The first fluid can be discharged from the discharge head 14. Therefore, the first fluid may be, for example, ink used in an inkjet printer.
第二流體是用於調節第一流體的壓力的流體。因此,第二流體不必是昂貴的墨。第二流體可以是例如通常具有接近於墨的比重的比重的水。然而,期望的是,為了抑制水的腐敗和抑制細菌繁殖的目的,使用添加了提供防腐效果的添加劑的水。The second fluid is a fluid for adjusting the pressure of the first fluid. Therefore, the second fluid need not be expensive ink. The second fluid may be, for example, water that generally has a specific gravity close to that of ink. However, it is desirable to use water added with additives that provide antiseptic effects for the purpose of inhibiting the spoilage of water and inhibiting the propagation of bacteria.
儘管期望的是第一流體和第二流體是液體,但是它們可以是黏性流體(或抗蝕材料)。特別地,由於第二流體調節第一流體的壓力,第二流體可以是氣體。Although it is desired that the first fluid and the second fluid are liquids, they may be viscous fluids (or corrosion-resistant materials). In particular, since the second fluid regulates the pressure of the first fluid, the second fluid may be a gas.
在流體容納構件中,更有效的是容納於第一容納室5的第一流體是壓印材料。理由如下。在例如半導體裝置的製造過程中,使具有圖案的模具與位於基板的壓印材料接觸並且模具的形狀被轉印到壓印材料以形成圖案的所謂的壓印技術是可用的。壓印材料作為第一流體容納於第一容納室5。由於壓印材料被用於形成非常微細的成型物,所以壓印材料不能與第二流體混合。取決於第二流體的組分,僅少量接觸就會改變第一流體(壓印材料)的組分。例如,第二流體中僅少量的金屬離子進入第一流體就引起第一流體被金屬離子污染,並且使第一流體難以被用作壓印材料。另外,僅少量異物進入第一流體就會影響圖案的形成。因此,當能夠抑制第一流體和第二流體混合的流體容納構件被用作壓印材料容納構件時,其效果非常大。當第一流體是壓印材料時,流體容納構件能夠被用作安裝於壓印設備的構件(匣)。In the fluid containing member, it is more effective that the first fluid contained in the first containing chamber 5 is an imprinting material. The reasons are as follows. In the manufacturing process of, for example, a semiconductor device, a so-called imprinting technique in which a mold having a pattern is brought into contact with an imprint material located on a substrate and the shape of the mold is transferred to the imprint material to form a pattern is available. The embossed material is contained in the first storage chamber 5 as the first fluid. Since the embossing material is used to form a very fine molding, the embossing material cannot be mixed with the second fluid. Depending on the composition of the second fluid, only a small amount of contact changes the composition of the first fluid (imprint material). For example, only a small amount of metal ions in the second fluid entering the first fluid causes the first fluid to be contaminated with metal ions, and makes it difficult for the first fluid to be used as an imprinting material. In addition, only a small amount of foreign matter entering the first fluid will affect the pattern formation. Therefore, when a fluid containing member capable of suppressing the mixing of the first fluid and the second fluid is used as the imprinting material containing member, its effect is very large. When the first fluid is an imprinting material, the fluid containing member can be used as a member (cassette) installed in the imprinting apparatus.
即使代替具有圖案的模具而在基板上對平坦模具(平坦化構件)加壓,流體容納構件也被有效地使用。這是因為,在該情況下,儘管第一流體例如為抗蝕劑,但是位於基板的抗蝕劑的組分與以上壓印材料的組分同樣重要。Even if the flat mold (flattening member) is pressurized on the substrate instead of the mold having the pattern, the fluid containing member is effectively used. This is because, in this case, although the first fluid is, for example, a resist, the composition of the resist located on the substrate is as important as the composition of the above imprint material.
儘管已經參照範例性實施例說明了本發明,但是應當理解的是,本發明不限於所公開的範例性實施例。所附申請專利範圍的範圍應符合最寬泛的解釋,以包含所有的這些變型、等同結構和功能。Although the present invention has been described with reference to exemplary embodiments, it should be understood that the present invention is not limited to the disclosed exemplary embodiments. The scope of the appended patent application should conform to the broadest interpretation to include all these variations, equivalent structures, and functions.