TWI689807B - Manufacturing method of flexible panel, flexible panel and display device - Google Patents

Manufacturing method of flexible panel, flexible panel and display device Download PDF

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TWI689807B
TWI689807B TW107139742A TW107139742A TWI689807B TW I689807 B TWI689807 B TW I689807B TW 107139742 A TW107139742 A TW 107139742A TW 107139742 A TW107139742 A TW 107139742A TW I689807 B TWI689807 B TW I689807B
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protective film
substrate
flexible
flexible panel
rigid substrate
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TW201918823A (en
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周啟豪
葉昱均
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大陸商深圳市柔宇科技有限公司
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/165Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on translational movement of particles in a fluid under the influence of an applied field
    • G02F1/166Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on translational movement of particles in a fluid under the influence of an applied field characterised by the electro-optical or magneto-optical effect
    • G02F1/167Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on translational movement of particles in a fluid under the influence of an applied field characterised by the electro-optical or magneto-optical effect by electrophoresis

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Abstract

A manufacturing method of flexible panel(10), a flexible panel(10) and a display device. The manufacturing method of flexible panel(10) includes the following steps: providing a rigid substrate(20), the rigid substrate(20) including a first surface(22) and a second surface(24) opposite to the first surface(22), and forming a flexible substrate(12) on the first surface(22); forming a device layer(14) on the flexible substrate(12), and forming a protective film(16) on the device layer(14), the protective film(16) attached to the rigid substrate(20), the flexible substrate(12), the device layer(14) and the protective film(16) forming a flexible panel(10); performing a laser lift-off process from one side of the second surface(24) to separate the flexible substrate(12) from the first surface(22); cooling the protective film(16) to separate the protective film(16) from the first surface(22); separating the flexible panel(10) from the rigid substrate(20).

Description

柔性面板之製作方法、柔性面板和顯示裝置 Manufacturing method of flexible panel, flexible panel and display device

本發明涉及顯示技術領域,特別涉及一種柔性面板之製作方法、柔性面板和顯示裝置。 The invention relates to the field of display technology, in particular to a method for manufacturing a flexible panel, a flexible panel and a display device.

在相關技術中,柔性面板一般需要在剛性基板上製作一層柔性基底,並在柔性基底上製備裝置層以及覆蓋保護膜,最後再採用鐳射掃描方法將柔性基底與剛性基板分離,從而形成柔性面板。在鐳射掃描後,柔性基底已經與剛性基板分離,但是由於保護膜之黏性不受鐳射之影響並且覆蓋在柔性基底之上方,使得柔性基底、裝置層以及保護膜仍貼附在剛性基板上。為了將柔性基底、裝置層以及保護膜徹底與玻璃基板分離,一般使用刀片切開保護膜與剛性基板之間之膠層,但是,這種操作需要精確對位且存在刀片刮傷柔性面板之風險。 In the related art, a flexible panel generally needs to make a layer of flexible substrate on a rigid substrate, prepare a device layer on the flexible substrate and cover a protective film, and finally use a laser scanning method to separate the flexible substrate from the rigid substrate to form a flexible panel. After laser scanning, the flexible substrate has been separated from the rigid substrate, but because the viscosity of the protective film is not affected by the laser and covers the flexible substrate, the flexible substrate, the device layer, and the protective film are still attached to the rigid substrate. In order to completely separate the flexible substrate, the device layer, and the protective film from the glass substrate, a blade is generally used to cut the adhesive layer between the protective film and the rigid substrate. However, this operation requires precise alignment and there is a risk of the blade scratching the flexible panel.

本發明之實施方式提供一種柔性面板之製作方法、柔性面板和顯示裝置。 Embodiments of the present invention provide a method for manufacturing a flexible panel, a flexible panel, and a display device.

本發明實施方式之柔性面板之製作方法,包括: 提供剛性基板,該剛性基板包括第一面和與該第一面相背之第二面,在該第一面上形成柔性基底;在該柔性基底上形成裝置層,並在該裝置層上形成保護膜,該保護膜貼附該剛性基板,該柔性基底、該裝置層和該保護膜形成該柔性面板;從該第二面之一側進行鐳射剝離製程以使該柔性基底與該第一面分離;冷卻該保護膜使該保護膜與該第一面分離;和分離該柔性面板與該剛性基板。 The manufacturing method of the flexible panel according to the embodiment of the present invention includes: A rigid substrate is provided, the rigid substrate includes a first surface and a second surface opposite to the first surface, a flexible substrate is formed on the first surface; a device layer is formed on the flexible substrate, and protection is formed on the device layer Film, the protective film is attached to the rigid substrate, the flexible substrate, the device layer and the protective film form the flexible panel; a laser peeling process is performed from one side of the second surface to separate the flexible substrate from the first surface Cooling the protective film to separate the protective film from the first surface; and separating the flexible panel from the rigid substrate.

本發明實施方式之柔性面板之製作方法,藉由冷卻保護膜,可使保護膜降低黏性並產生翹曲,這樣保護膜可與剛性基板之第一面分離,然後再分離柔性面板與剛性基板。如此,可實現快速、無損且無需精確對位之柔性面板分離方式,同時,也避免對柔性面板造成刮傷之風險。 In the method for manufacturing a flexible panel according to an embodiment of the present invention, by cooling the protective film, the protective film can be reduced in viscosity and warped, so that the protective film can be separated from the first surface of the rigid substrate, and then the flexible panel and the rigid substrate can be separated. . In this way, a fast, non-destructive flexible panel separation method that does not require precise alignment can be achieved, and at the same time, the risk of scratching the flexible panel is avoided.

本發明實施方式之柔性面板,該柔性面板採用上述實施方式任一項所述的製作方法製成。 A flexible panel according to an embodiment of the present invention is manufactured by the manufacturing method described in any one of the above embodiments.

本發明實施方式之柔性面板,柔性面板與剛性基板之分離無需精確對位,且可避免對柔性面板造成刮傷之風險。 In the flexible panel of the embodiment of the present invention, the separation of the flexible panel and the rigid substrate does not require precise alignment, and the risk of scratching the flexible panel can be avoided.

本發明實施方式之顯示裝置,包括上述實施方式所述的柔性面板。 A display device according to an embodiment of the present invention includes the flexible panel described in the above embodiment.

本發明實施方式之顯示裝置,柔性面板與剛性基板之分離無需精確對位,且可避免對柔性面板造成刮傷之風險。 In the display device according to the embodiment of the present invention, the flexible panel and the rigid substrate need not be accurately positioned, and the risk of scratching the flexible panel can be avoided.

本發明之實施方式之附加方面和優點將在下面之描述中部分給出,部分將從下面之描述中變得明顯,或藉由本發明之實施方式之實踐瞭解到。 Additional aspects and advantages of the embodiments of the present invention will be partially given in the following description, and some will become apparent from the following description, or will be understood by the practice of the embodiments of the present invention.

10:柔性面板 10: flexible panel

12:柔性基底 12: Flexible substrate

14:裝置層 14: Device layer

16:保護膜 16: Protective film

20:剛性基板 20: rigid substrate

22:第一面 22: The first side

24:第二面 24: second side

30:吸盤 30: suction cup

40:噴灑裝置 40: Spraying device

本發明之上述和/或附加之方面和優點從結合下面附圖對實施方式之描述中將變得明顯和容易理解,其中:第1圖是本發明實施方式之柔性面板之製作方法之流程示意圖;第2圖是本發明實施方式之柔性面板之結構示意圖;第3圖是本發明實施方式在剛性基板上形成柔性面板之示意圖;第4圖是本發明實施方式之鐳射剝離製程之示意圖;第5圖是本發明實施方式之柔性面板與剛性基板分離之示意圖;第6圖是本發明實施方式之噴灑裝置之運動軌跡之示意圖。 The above and/or additional aspects and advantages of the present invention will become apparent and easy to understand from the description of the embodiments in conjunction with the following drawings, wherein: FIG. 1 is a schematic flow chart of a method for manufacturing a flexible panel according to an embodiment of the present invention Figure 2 is a schematic structural view of a flexible panel according to an embodiment of the present invention; Figure 3 is a schematic view of forming a flexible panel on a rigid substrate according to an embodiment of the present invention; Figure 4 is a schematic diagram of a laser peeling process according to an embodiment of the present invention; FIG. 5 is a schematic diagram of the separation of the flexible panel and the rigid substrate according to the embodiment of the present invention; FIG. 6 is a schematic diagram of the movement trajectory of the spray device of the embodiment of the present invention.

主要元件符號附圖說明:柔性面板10、柔性基底12、裝置層14、保護膜16、剛性基板20、第一面22、第二面24、吸盤30、噴灑裝置40。 Description of the main element symbols: the flexible panel 10, the flexible substrate 12, the device layer 14, the protective film 16, the rigid substrate 20, the first surface 22, the second surface 24, the suction cup 30, and the spray device 40.

下面詳細描述本發明之實施方式,該實施方式之示例在附圖中示出,其中自始至終相同或類似之標號表示相同或類似之元件或具有相同或類似功能之元件。下面藉由參考附圖描述之實施方式是示例性之,僅用於解釋本發明,而不能理解為對本發明之限制。 An embodiment of the present invention will be described in detail below. An example of this embodiment is shown in the drawings, in which the same or similar reference numerals indicate the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the drawings are exemplary, and are only used to explain the present invention, and cannot be construed as limiting the present invention.

在本發明之描述中,需要理解的是,術語“中心”、“縱向”、“橫向”、“長度”、“寬度”、“厚度”、“上”、“下”、“前”、“後”、“左”、“右”、“垂直”、“水平”、“頂”、“底”、“內”、“外”、“順時針”、“逆時針”指示之方位或位置關係為基於附圖所示之方位或位置關係,僅是為了便於描述本發明和簡化描述,而不是指示或暗示所指之裝置或元件必須具有特定之方位、以特定之方位構造和操作,因此不能理解為對本發明之限制。此外,術語“第一”、“第二”僅用於描述目的,而不能理解為指示或暗示相對重要性或者隱含指 明所指示之技術特徵之數量。由此,限定有“第一”、“第二”之特徵可以明示或者隱含地包括一個或者更多個該特徵。在本發明之描述中,“多個”之含義是兩個或兩個以上,除非另有明確具體之限定。 In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Azimuth or position relationship indicated by "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" Based on the orientation or positional relationship shown in the drawings, it is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot It is understood as a limitation to the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implying The number of technical features indicated. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise specifically limited.

在本發明之描述中,需要說明的是,除非另有明確之規定和限定,術語“安裝”、“相連”、“連接”應做廣義理解,例如,可以是固定連接,也可以是可拆卸連接,或一體地連接;可以是機械連接,也可以是電連接或可以相互通訊;可以是直接相連,也可以藉由中間媒介間接相連,可以是兩個元件內部之連通或兩個元件之相互作用關係。對於本領域之普通技術人員而言,可以根據具體情況理解上述術語在本發明中之具體含義。 In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connected", and "connection" should be understood in a broad sense, for example, it can be fixed or detachable Connected, or integrally connected; may be mechanical, electrical, or mutually communicating; may be directly connected, or may be indirectly connected through an intermediary, may be the interconnection of two components or the mutual connection of two components Role relationship. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

在本發明中,除非另有明確之規定和限定,第一特徵在第二特徵之“上”或之“下”可以包括第一和第二特徵直接接觸,也可以包括第一和第二特徵不是直接接觸而是藉由它們之間之另外之特徵接觸。而且,第一特徵在第二特徵“之上”、“上方”和“上面”包括第一特徵在第二特徵正上方和斜上方,或僅僅表示第一特徵水平高度高於第二特徵。第一特徵在第二特徵“之下”、“下方”和“下面”包括第一特徵在第二特徵正下方和斜下方,或僅僅表示第一特徵水平高度小於第二特徵。 In the present invention, unless otherwise clearly specified and defined, the first feature "above" or "below" the second feature may include the direct contact of the first and second features, or may include the first and second features Not by direct contact but by other features between them. Moreover, the first feature is “above”, “above” and “above” the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature is "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the first feature is less horizontal than the second feature.

下文之揭露提供了許多不同之實施方式或例子用來實現本發明之不同結構。為了簡化本發明之揭露,下文中對特定例子之部件和設置進行描述。當然,它們僅僅為示例,並且目的不在於限制本發明。此外,本發明可以在不同例子中重複參考數字和/或參考字母,這種重複是為了簡化和清楚之目的,其本身不指示所討論各種實施方式和/或設置之間之關係。此外,本發明提供了各種特定之製程和材料之例子,但是本領域普通技術人員可以意識到其他製程之應用和/或其他材料之使用。 The following disclosure provides many different implementations or examples for implementing different structures of the present invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples, and the purpose is not to limit the invention. In addition, the present invention may repeat reference numerals and/or reference letters in different examples. Such repetition is for the purpose of simplicity and clarity, and does not itself indicate the relationship between the various embodiments and/or settings discussed. In addition, the present invention provides various examples of specific processes and materials, but those of ordinary skill in the art may be aware of the application of other processes and/or the use of other materials.

請參閱第1圖至第5圖,本發明實施方式之柔性面板10之製作方法,包括:步驟S11:提供剛性基板20,剛性基板20包括第一面22和與第一面22相背之第二面24,在第一面22上形成柔性基底12;步驟S13:在柔性基底12上形成裝置層14,並在裝置層14上形成保護膜16,保護膜16貼附剛性基板20,柔性基底12、裝置層14和保護膜16形成柔性面板10;步驟S15:從第二面24之一側進行鐳射剝離製程以使柔性基底12與第一面22分離;步驟S17:冷卻保護膜16使保護膜16與第一面22分離;和步驟S19:分離柔性面板10與剛性基板20。 Please refer to FIG. 1 to FIG. 5, the manufacturing method of the flexible panel 10 according to the embodiment of the present invention includes: Step S11: providing a rigid substrate 20, the rigid substrate 20 includes a first surface 22 and a first surface 22 opposite to the first surface 22 Two sides 24, forming the flexible substrate 12 on the first side 22; Step S13: forming the device layer 14 on the flexible substrate 12, and forming a protective film 16 on the device layer 14, the protective film 16 is attached to the rigid substrate 20, the flexible substrate 12. The device layer 14 and the protective film 16 form the flexible panel 10; step S15: performing a laser peeling process from one side of the second surface 24 to separate the flexible substrate 12 from the first surface 22; step S17: cooling the protective film 16 to protect The film 16 is separated from the first face 22; and step S19: separating the flexible panel 10 from the rigid substrate 20.

本發明實施方式之柔性面板10之製作方法,藉由冷卻保護膜16,可使保護膜16降低黏性並產生翹曲,這樣保護膜16可與剛性基板20之第一面22分離,然後再分離柔性面板10與剛性基板20。如此,可實現快速、無損且無需精確對位之柔性面板10分離方式,同時,也避免對柔性面板10造成刮傷之風險。 In the manufacturing method of the flexible panel 10 according to the embodiment of the present invention, by cooling the protective film 16, the protective film 16 can be reduced in viscosity and warped, so that the protective film 16 can be separated from the first surface 22 of the rigid substrate 20, and then The flexible panel 10 and the rigid substrate 20 are separated. In this way, a fast, non-destructive flexible panel 10 separation method that does not require precise alignment can be achieved, and at the same time, the risk of scratching the flexible panel 10 is avoided.

可以理解,柔性面板10包括柔性基底12、裝置層14和保護膜16。在本發明之實施方式中,進行鐳射剝離製程後,柔性基底12已經與剛性基板20分離,但是由於保護膜16貼附剛性基板20且保護膜16之黏性不受鐳射影響,保護膜16和剛性基板20仍未分離,從而導致柔性面板10仍貼附在剛性基板20上。由於保護膜16與剛性基板20之熱膨脹是數不一致,可藉由冷卻保護膜16,使保護膜16降低黏性並產生翹曲從而脫附剛性基板20。然後,將柔性面板10與剛性基板20徹底分離,並將柔性面板10移交至托盤中。保護膜16恢復常溫後會重新變得平整。如此,進行鐳射剝離製程後,無需使 用刀片切開保護膜16與剛性基本之間之膠層便可將柔性面板10與剛性基板20分離,從而實現了快速、無損且無需精確對位之柔性面板10分離方式,同時,也避免了對柔性面板10造成刮傷之危險。 It can be understood that the flexible panel 10 includes a flexible substrate 12, a device layer 14 and a protective film 16. In the embodiment of the present invention, after the laser peeling process, the flexible base 12 has been separated from the rigid substrate 20, but since the protective film 16 is attached to the rigid substrate 20 and the viscosity of the protective film 16 is not affected by the laser, the protective film 16 and The rigid substrate 20 is still not separated, so that the flexible panel 10 is still attached to the rigid substrate 20. Since the thermal expansions of the protective film 16 and the rigid substrate 20 are inconsistent, the protective film 16 can be cooled to reduce the viscosity of the protective film 16 and warp to desorb the rigid substrate 20. Then, the flexible panel 10 and the rigid substrate 20 are completely separated, and the flexible panel 10 is transferred to the tray. The protective film 16 will become flat after returning to normal temperature. In this way, after the laser stripping process, there is no need to use Cutting the adhesive layer between the protective film 16 and the rigid base with a blade can separate the flexible panel 10 from the rigid substrate 20, thereby achieving a quick, non-destructive flexible panel 10 separation method that does not require precise alignment, and at the same time, avoids The flexible panel 10 poses a risk of scratches.

在某些實施方式中,柔性面板10為柔性OLED面板。柔性OLED面板在柔性基底12上製作顯示裝置層14,裝置層14包括層疊設置之ITO陽極、有機功能層和金屬陰極。 In some embodiments, the flexible panel 10 is a flexible OLED panel. The flexible OLED panel produces a display device layer 14 on a flexible substrate 12, and the device layer 14 includes a layered ITO anode, an organic functional layer, and a metal cathode.

在某些實施方式中,在第一面22上形成柔性基底12,包括:在第一面22上塗佈聚醯亞胺液以形成柔性基底12。 In some embodiments, forming the flexible substrate 12 on the first side 22 includes: coating the first side 22 with a polyimide solution to form the flexible substrate 12.

可以理解,聚醯亞胺(PI)是一種有機高分子材料,其力學性能優異、耐高溫達400℃以上,長期使用溫度範圍為-200至300℃,是製作柔性基底12最常用之材料。因此,由聚醯亞胺液形成之柔性基底12耐撞擊、不易破碎且輕薄。在柔性面板10之製作程序中,柔性基底12不易受溫度變化之影響。 It can be understood that polyimide (PI) is an organic polymer material with excellent mechanical properties, high temperature resistance of more than 400°C, and a long-term use temperature range of -200 to 300°C. It is the most commonly used material for the flexible substrate 12. Therefore, the flexible substrate 12 formed of the polyimide liquid is impact resistant, hard to break, and thin. In the manufacturing process of the flexible panel 10, the flexible substrate 12 is not easily affected by temperature changes.

當然,柔性基底12可以不限於上述實施方式,而在其他實施方式中可以根據需求採用其他合適之材料,例如,聚對萘二甲酸乙二醇酯(PEN)、聚對苯二甲酸乙二酯(PET)。 Of course, the flexible substrate 12 may not be limited to the above-mentioned embodiments, and in other embodiments, other suitable materials may be used according to requirements, for example, polyethylene terephthalate (PEN), polyethylene terephthalate (PET).

在某些實施方式中,請參閱第3圖和第4圖,提供剛性基板20,包括:使第一面22朝上及第二面24朝下; 從第二面24之一側進行鐳射剝離製程以使柔性基底12與第一面22分離,包括:翻轉剛性基板20,使第一面22朝下及第二面24朝上,從第二面24之一側進行鐳射剝離製程以使柔性基底12與第一面22分離。 In some embodiments, referring to FIG. 3 and FIG. 4, a rigid substrate 20 is provided, including: making the first side 22 face up and the second side 24 face down; Perform a laser lift-off process from one side of the second surface 24 to separate the flexible substrate 12 from the first surface 22, including: flipping the rigid substrate 20 so that the first surface 22 faces downward and the second surface 24 faces upward from the second surface A laser peeling process is performed on one side of 24 to separate the flexible substrate 12 from the first surface 22.

可以理解,在本發明之實施方式中,在剛性基板20之第一面22上層疊形成有柔性基底12、裝置層14和保護膜16,從剛性基板20之第二面24之一側進行鐳射剝離製程,既可使柔性基底12與第一面22分離,也可減弱 鐳射對裝置層14之影響。 It can be understood that in the embodiment of the present invention, the flexible base 12, the device layer 14, and the protective film 16 are laminated and formed on the first surface 22 of the rigid substrate 20, and laser is performed from one side of the second surface 24 of the rigid substrate 20 The peeling process can not only separate the flexible substrate 12 from the first surface 22, but also weaken The effect of laser on device layer 14.

在一個實施例中,在進行鐳射剝離製程時,將剛性基板20翻轉使第一面22朝下及第二面24朝上。此時,鐳射從上往下照射並由剛性基板20穿透至柔性基底12,柔性基底12與鐳射發生化學反應使柔性基底12脫離剛性基板20。當然,在另一個實施例中,在進行鐳射剝離製程時,也可不翻轉剛性基板20,保持第一面22朝上及第二面24朝下。此時,鐳射從下往上照射並由剛性基板20穿透至柔性基底12,柔性基底12與鐳射發生化學反應使柔性基底12脫離剛性基板20。 In one embodiment, during the laser lift-off process, the rigid substrate 20 is turned over with the first side 22 facing down and the second side 24 facing up. At this time, the laser is irradiated from top to bottom and penetrates from the rigid substrate 20 to the flexible substrate 12. The flexible substrate 12 reacts with the laser to cause the flexible substrate 12 to detach from the rigid substrate 20. Of course, in another embodiment, during the laser lift-off process, the rigid substrate 20 may not be turned over, and the first surface 22 may be kept facing upward and the second surface 24 may be kept facing downward. At this time, the laser is irradiated from bottom to top and penetrates from the rigid substrate 20 to the flexible substrate 12. The flexible substrate 12 and the laser chemically react to cause the flexible substrate 12 to detach from the rigid substrate 20.

在某些實施方式中,在冷卻保護膜16前,柔性面板10之製作方法包括:翻轉剛性基板20,使第一面22朝上及第二面24朝下。 In some embodiments, before cooling the protective film 16, the manufacturing method of the flexible panel 10 includes: turning the rigid substrate 20 so that the first surface 22 faces upward and the second surface 24 faces downward.

可以理解,在圖式之實施方式中,進行鐳射剝離製程前,翻轉了剛性基板20,因此,在冷卻保護膜16前,翻轉剛性基板20使第一面22朝上和第二面24朝下,方便冷卻保護膜16。 It can be understood that in the illustrated embodiment, the rigid substrate 20 is turned over before the laser lift-off process. Therefore, before cooling the protective film 16, the rigid substrate 20 is turned over so that the first side 22 faces up and the second side 24 faces down , To facilitate cooling the protective film 16.

在某些實施方式中,請參閱第5圖,冷卻保護膜16,包括:沿保護膜16之邊緣噴灑冷凍劑以冷卻保護膜16。 In some embodiments, referring to FIG. 5, cooling the protective film 16 includes spraying a refrigerant along the edge of the protective film 16 to cool the protective film 16.

如此,沿保護膜16之邊緣噴灑冷凍劑來冷卻保護膜16,方法簡單可行,成本低。 In this way, the refrigerant is sprayed along the edge of the protective film 16 to cool the protective film 16, the method is simple and feasible, and the cost is low.

在某些實施方式中,請參閱第6圖,沿保護膜16之邊緣噴灑冷凍劑以冷卻保護膜16,包括:沿保護膜16之邊緣360度噴灑冷凍劑以冷卻保護膜16。 In some embodiments, referring to FIG. 6, spraying the refrigerant along the edge of the protective film 16 to cool the protective film 16 includes spraying the refrigerant 360 degrees along the edge of the protective film 16 to cool the protective film 16.

可以理解,可藉由噴灑裝置40噴灑冷凍劑來冷卻保護膜16之邊緣,方法簡單且容易實現。在本發明實施方式中,噴灑裝置40可按第6圖中虛線軌跡運動,沿保護膜16之邊緣360度噴灑冷凍劑以冷卻保護膜16使其黏性降低。具體地,噴灑裝置40可按第6圖中虛線軌跡順時針運動或逆時針運動。 如此,皆可實現沿保護膜16之邊緣360度噴灑冷凍劑。 It can be understood that the edge of the protective film 16 can be cooled by spraying the refrigerant with the spraying device 40, the method is simple and easy to implement. In the embodiment of the present invention, the spraying device 40 can move according to the dashed line in FIG. 6 and spray the refrigerant 360 degrees along the edge of the protective film 16 to cool the protective film 16 to reduce its viscosity. Specifically, the spraying device 40 may move clockwise or counterclockwise according to the trajectory of the dotted line in FIG. 6. In this way, the refrigerant can be sprayed 360 degrees along the edge of the protective film 16.

進一步地,噴灑裝置40之噴頭可控制噴灑量和噴灑距離,從而間接控制冷卻溫度。可以使用多個噴灑裝置40同時噴灑冷凍劑進行冷卻,從而加快冷卻速度。多個可以理解為兩個或兩個以上。 Further, the spray head of the spray device 40 can control the spray amount and spray distance, thereby indirectly controlling the cooling temperature. A plurality of spraying devices 40 may be used to spray the refrigerant simultaneously for cooling, thereby speeding up the cooling rate. Multiple can be understood as two or more.

當然,冷卻方式可以不限於上述實施方式,而在其他實施方式中可以根據需求採用其他合適之方式。例如,可以在保護膜16之邊緣旁邊放置管道,管道360度圍繞保護膜16之邊緣。進行冷卻時,向管道中通入冷凍劑。冷凍劑之溫度透過管道傳遞到保護膜16之邊緣,從而冷卻保護膜16之邊緣。 Of course, the cooling method may not be limited to the above-mentioned embodiment, and in other embodiments, other suitable methods may be adopted according to requirements. For example, a pipe may be placed next to the edge of the protective film 16, and the pipe surrounds the edge of the protective film 16 at 360 degrees. When cooling, the refrigerant is introduced into the pipe. The temperature of the refrigerant is transferred to the edge of the protective film 16 through the pipe, thereby cooling the edge of the protective film 16.

在某些實施方式中,冷凍劑包括液氮。 In some embodiments, the refrigerant includes liquid nitrogen.

可以理解,液氮是一種常見且應用比較多之冷凍劑。在常壓下,液氮之溫度為-196℃。如此,液氮可以迅速冷卻保護膜16之邊緣。 It can be understood that liquid nitrogen is a common and widely used refrigerant. Under normal pressure, the temperature of liquid nitrogen is -196°C. In this way, liquid nitrogen can quickly cool the edge of the protective film 16.

當然,冷凍劑可以不限於上述實施方式,而在其他實施方式中可以根據需求採用其他合適之冷凍劑。 Of course, the refrigerant may not be limited to the above embodiment, and in other embodiments, other suitable refrigerants may be used according to requirements.

在某些實施方式中,分離柔性面板10與剛性基板20包括:使用吸盤30吸附保護膜16使柔性面板10與剛性基板20分離。 In some embodiments, separating the flexible panel 10 from the rigid substrate 20 includes using a suction cup 30 to adsorb the protective film 16 to separate the flexible panel 10 from the rigid substrate 20.

可以理解,利用吸盤30吸附保護膜16使柔性面板10與剛性基板20分離,方便快捷。在本發明之一個示例中,吸盤30之數量是多個,多個吸盤30均勻間隔地吸附保護膜16。吸盤30利用內外大氣壓力之差別來吸附物體。多個吸盤30之吸附力更強。在吸盤30吸附保護膜16使柔性面板10與剛性基板20分離之程序中,多個吸盤30吸附保護膜16,確保柔性面板10不易掉落。多個吸盤30可以理解為兩個或兩個以上,可以根據實際需求選擇吸盤30之數量。 It can be understood that the suction panel 30 absorbs the protective film 16 to separate the flexible panel 10 from the rigid substrate 20, which is convenient and quick. In an example of the present invention, the number of the suction cups 30 is plural, and the plurality of suction cups 30 adsorb the protective film 16 at even intervals. The suction cup 30 utilizes the difference between the internal and external atmospheric pressure to attract objects. The suction force of the plurality of suction cups 30 is stronger. In the process in which the suction cup 30 adsorbs the protective film 16 to separate the flexible panel 10 from the rigid substrate 20, a plurality of suction cups 30 adsorb the protective film 16 to ensure that the flexible panel 10 is not easy to fall. The plurality of suction cups 30 can be understood as two or more, and the number of suction cups 30 can be selected according to actual needs.

在某些實施方式中,吸盤30可為真空吸盤。真空吸盤利用真空原 理,即真空負壓來吸附保護膜16以達到提起柔性面板10之目的。真空吸盤包括通氣口,通氣口與真空產生裝置連接。當真空產生裝置啟動後,通氣口通氣,將吸盤30內部之空氣抽走,形成了壓力為P2之真空狀態。此時,吸盤30內部之壓力P2低於吸盤30外部之大氣壓力P1,即P2<P1,保護膜16在外部壓力之作用下被吸附住。吸盤30內部之真空度越高,吸盤30與保護膜16之間貼的越緊。 In some embodiments, the suction cup 30 may be a vacuum suction cup. Vacuum suction cup uses vacuum In other words, the vacuum negative pressure absorbs the protective film 16 so as to lift the flexible panel 10. The vacuum chuck includes a vent, and the vent is connected to the vacuum generating device. When the vacuum generating device is activated, the vent is vented to draw the air inside the suction cup 30, forming a vacuum state with a pressure of P2. At this time, the pressure P2 inside the suction cup 30 is lower than the atmospheric pressure P1 outside the suction cup 30, that is, P2<P1, and the protective film 16 is adsorbed by the external pressure. The higher the degree of vacuum inside the suction cup 30, the tighter the suction cup 30 and the protective film 16 are attached.

在某些實施方式中,剛性基板20為玻璃基板、陶瓷基板或石英基板。 In some embodiments, the rigid substrate 20 is a glass substrate, a ceramic substrate, or a quartz substrate.

可以理解,多種剛性基板20可供選擇,當缺少某一類型之剛性基板20時,可以選擇另一類型替代。在本發明之實施方式中,較佳之剛性基板20為玻璃基板。 It can be understood that a variety of rigid substrates 20 are available, and when a certain type of rigid substrate 20 is lacking, another type may be selected instead. In the embodiment of the present invention, the preferred rigid substrate 20 is a glass substrate.

在某些實施方式中,柔性基底12之尺寸小於剛性基板20之尺寸。 In some embodiments, the size of the flexible base 12 is smaller than the size of the rigid substrate 20.

如此,確保能夠在剛性基板20上製作柔性面板10。 In this way, it is ensured that the flexible panel 10 can be produced on the rigid substrate 20.

在某些實施方式中,保護膜16覆蓋柔性基底12。 In some embodiments, the protective film 16 covers the flexible substrate 12.

可以理解,保護膜16覆蓋柔性基底12,且裝置層14之尺寸小於或等於柔性基底12之尺寸。如此,保護膜16可以防止空氣中之水氣和灰塵等雜質汙染裝置層14和柔性基底12。 It can be understood that the protective film 16 covers the flexible substrate 12 and the size of the device layer 14 is less than or equal to the size of the flexible substrate 12. In this way, the protective film 16 can prevent impurities such as moisture and dust in the air from contaminating the device layer 14 and the flexible substrate 12.

具體地,在第2圖之示例中,裝置層14之尺寸小於柔性基底12之尺寸,使得柔性基底12之上表面存在沒有裝置層14之邊緣部位,保護膜16覆蓋柔性基底12,使得保護膜16包覆柔性基底12之上表面沒有裝置層14之邊緣部位和柔性基底12之側面。 Specifically, in the example of FIG. 2, the size of the device layer 14 is smaller than the size of the flexible substrate 12, so that there is no edge portion of the upper surface of the flexible substrate 12 without the device layer 14, and the protective film 16 covers the flexible substrate 12 so that the protective film 16 The upper surface of the cladding flexible substrate 12 has no edge portion of the device layer 14 and the side surface of the flexible substrate 12.

在某些實施方式中,吸盤30包括透明軟膠吸盤。 In some embodiments, the suction cup 30 includes a transparent soft rubber suction cup.

可以理解,透明軟膠之成本低,其製成之吸盤30吸附力強。具體地,吸盤30將柔性面板10上方之保護膜16吸附住,然後將柔性面板10移交 至托盤。吸盤30之吸附力強,可避免柔性面板10掉落。 It can be understood that the cost of the transparent soft glue is low, and the suction cup 30 made of it has a strong adsorption force. Specifically, the suction cup 30 absorbs the protective film 16 above the flexible panel 10, and then the flexible panel 10 is handed over To the tray. The suction force of the suction cup 30 is strong, which can prevent the flexible panel 10 from falling.

本發明實施方式之一種柔性面板10採用上述任一實施方式之製作方法製成。 A flexible panel 10 according to an embodiment of the present invention is manufactured using the manufacturing method of any of the above embodiments.

本發明實施方式之柔性面板10,柔性面板10與剛性基板20之分離無需精確對位,且可避免對柔性面板10造成刮傷之風險。 In the flexible panel 10 according to the embodiment of the present invention, the separation of the flexible panel 10 and the rigid substrate 20 does not require precise alignment, and the risk of scratching the flexible panel 10 can be avoided.

本發明實施方式之一種顯示裝置,包括上述實施方式之柔性面板10。 A display device according to an embodiment of the present invention includes the flexible panel 10 of the above embodiment.

本發明實施方式之顯示裝置,柔性面板10與剛性基板20之分離無需精確對位,且可避免對柔性面板10造成刮傷之風險。 In the display device according to the embodiment of the present invention, the flexible panel 10 and the rigid substrate 20 need not be accurately positioned, and the risk of scratching the flexible panel 10 can be avoided.

具體地,顯示裝置包括但不限於手機、平板電腦、帶顯示功能之可穿戴式電子裝置。 Specifically, the display device includes but is not limited to a mobile phone, a tablet computer, and a wearable electronic device with a display function.

在本說明書之描述中,參考術語“某些實施方式”、“一個實施方式”、“一些實施方式”、“示意性實施方式”、“示例”、“具體示例”、或“一些示例”之描述意指結合實施方式或示例描述之具體特徵、結構、材料或者特點包含於本發明之至少一個實施方式或示例中。在本說明書中,對上述術語之示意性表述不一定指的是相同之實施方式或示例。而且,描述之具體特徵、結構、材料或者特點可以在任何之一個或多個實施方式或示例中以合適之方式結合。 In the description of this specification, reference is made to the terms "some embodiments", "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" The description means that the specific features, structures, materials, or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present invention. In this specification, the schematic expression of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

儘管上面已經示出和描述了本發明之實施例,可以理解的是,上述實施例是示例性之,不能理解為對本發明之限制,本領域之普通技術人員在本發明之範圍內可以對上述實施例進行變化、修改、替換和變型,本發明之範圍由申請專利範圍及其等同物限定。 Although the embodiments of the present invention have been shown and described above, it should be understood that the above-mentioned embodiments are exemplary and cannot be construed as limitations to the present invention, and those of ordinary skill in the art may understand the above within the scope of the present invention. The embodiments are subject to change, modification, replacement and modification, and the scope of the present invention is defined by the scope of patent applications and their equivalents.

Claims (8)

一種柔性面板之製作方法,包括:提供一剛性基板,該剛性基板包括一第一面和與該第一面相背之一第二面,在該第一面上形成一柔性基底;在該柔性基底上形成一裝置層,並在該裝置層上形成一保護膜,該保護膜貼附該剛性基板,該柔性基底、該裝置層和該保護膜形成該柔性面板;從該第二面之一側進行鐳射剝離製程以使該柔性基底與該第一面分離;冷卻該保護膜使該保護膜與該第一面分離;和分離該柔性面板與該剛性基板;其中,提供該剛性基板,包括:使該第一面朝上及該第二面朝下;從該第二面之一側進行鐳射剝離製程以使該柔性基底與該第一面分離,包括:翻轉該剛性基板,使該第一面朝下及該第二面朝上,從該第二面之一側進行鐳射剝離製程以使該柔性基底與該第一面分離;其中,冷卻該保護膜,包括:沿該保護膜之邊緣噴灑一冷凍劑以冷卻該保護膜;其中,分離該柔性面板與該剛性基板,包括:使用一吸盤吸附該保護膜使該柔性面板與該剛性基板分離;其中,該保護膜覆蓋該柔性基底。 A method for manufacturing a flexible panel includes: providing a rigid substrate, the rigid substrate includes a first surface and a second surface opposite to the first surface, a flexible substrate is formed on the first surface; and the flexible substrate Forming a device layer on the device layer and forming a protective film on the device layer, the protective film is attached to the rigid substrate, the flexible substrate, the device layer and the protective film form the flexible panel; from one side of the second face Performing a laser lift-off process to separate the flexible substrate from the first surface; cooling the protective film to separate the protective film from the first surface; and separating the flexible panel from the rigid substrate; wherein providing the rigid substrate includes: Making the first face up and the second face down; performing a laser peeling process from one side of the second face to separate the flexible substrate from the first face, including: turning the rigid substrate over so that the first Face down and the second face up, performing a laser peeling process from one side of the second face to separate the flexible substrate from the first face; wherein cooling the protective film includes: along the edge of the protective film Spraying a refrigerant to cool the protective film; wherein separating the flexible panel from the rigid substrate includes: using a suction cup to adsorb the protective film to separate the flexible panel from the rigid substrate; wherein the protective film covers the flexible substrate. 如申請專利範圍第1項所述的柔性面板之製作方法,其中,在該第一面上形成該柔性基底,包括:在該第一面上塗佈聚醯亞胺液以形成該柔性基底。 The method for manufacturing a flexible panel as described in item 1 of the patent application range, wherein forming the flexible substrate on the first surface includes: coating a polyimide solution on the first surface to form the flexible substrate. 如申請專利範圍第1項所述的柔性面板之製作方法,其中,在冷卻該保護膜前,該柔性面板之製作方法包括:翻轉該剛性基板,使該第一面朝上及該第二面朝下。 The method for manufacturing a flexible panel as described in item 1 of the patent application scope, wherein, before cooling the protective film, the method for manufacturing the flexible panel includes: turning the rigid substrate so that the first side faces upward and the second side Face down. 如申請專利範圍第1項所述的柔性面板之製作方法,其中,沿該保護膜之邊緣噴灑該冷凍劑以冷卻該保護膜,包括:沿該保護膜之邊緣360度噴灑冷凍劑以冷卻該保護膜。 The method for manufacturing a flexible panel as described in item 1 of the patent application scope, wherein spraying the refrigerant along the edge of the protective film to cool the protective film includes: spraying the refrigerant 360 degrees along the edge of the protective film to cool the Protective film. 如申請專利範圍第1項所述的柔性面板之製作方法,其中,該冷凍劑包括一液氮。 The method for manufacturing a flexible panel as described in item 1 of the patent application scope, wherein the refrigerant includes a liquid nitrogen. 如申請專利範圍第1項所述的柔性面板之製作方法,其中,該剛性基板為一玻璃基板、一陶瓷基板或一石英基板。 The method for manufacturing a flexible panel as described in item 1 of the patent application range, wherein the rigid substrate is a glass substrate, a ceramic substrate or a quartz substrate. 如申請專利範圍第1項所述的柔性面板之製作方法,其中,該柔性基底之尺寸小於該剛性基板之尺寸。 The method for manufacturing a flexible panel as described in item 1 of the patent application scope, wherein the size of the flexible substrate is smaller than the size of the rigid substrate. 如申請專利範圍第1項所述的柔性面板之製作方法,其中,該吸盤包括一透明軟膠吸盤。 The method for manufacturing a flexible panel as described in item 1 of the patent application range, wherein the suction cup includes a transparent soft rubber suction cup.
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