TWI682484B - Cassette adaptor - Google Patents
Cassette adaptor Download PDFInfo
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- TWI682484B TWI682484B TW106113289A TW106113289A TWI682484B TW I682484 B TWI682484 B TW I682484B TW 106113289 A TW106113289 A TW 106113289A TW 106113289 A TW106113289 A TW 106113289A TW I682484 B TWI682484 B TW I682484B
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Description
一種卡匣結構轉載容器,尤指一種可以將小尺寸的卡匣裝載於大尺寸晶圓盒中的卡匣結構轉載容器。 The invention relates to a cassette structure transfer container, in particular to a cassette structure transfer container which can load a small-size cassette into a large-size wafer box.
在半導體半成品的製造傳輸領域中,對於各種尺寸晶圓的傳輸及傳送屬於相當重要的一環。無論是自動化的控管,或是產線的潔淨維護等等,都屬於產線或傳送線上需要特別關注的重點。 In the field of manufacturing and transmission of semi-finished semiconductor products, the transmission and transmission of wafers of various sizes is a very important part. Whether it is automated control, or cleanliness of the production line, etc., all belong to the focus of special attention on the production line or the transmission line.
此外,對於各種尺寸的晶圓傳送,必須依照各種廠房、設備的需求來考量。由於科技發展快速的緣故,通常單一尺寸的晶圓已經難以滿足現在半導體產業研發或製造時的需求。往往經過一段時間,會導致特定尺寸的晶圓需求大增。 In addition, for the transfer of wafers of various sizes, it must be considered in accordance with the needs of various plants and equipment. Due to the rapid development of science and technology, single-size wafers are generally difficult to meet the needs of the semiconductor industry in research and development or manufacturing. Often after a period of time, it will lead to a large increase in demand for wafers of a specific size.
因此,在原有的產線或傳送線中,只能夠用以傳輸特定尺寸之晶圓將不敷使用,勢必會需要設置新的產線,用以傳送特定尺寸的晶圓。然而如此一來,勢必增加半導體廠的生產及設備維運成本等。 Therefore, in the original production line or transmission line, wafers that can only be used to transfer specific sizes will not be used. It is bound to require the establishment of new production lines to transfer wafers of specific sizes. However, as a result, it is bound to increase the production and equipment maintenance costs of semiconductor factories.
在現有的技術中,如中華民國公告專利編號第TWI283452(半導體晶圓輸送容器用之晶圓支撐連接件)所載的技術,係以一連串的彈性機構設計用以乘載晶圓,防止晶圓因運送中之晃動碰撞產生損壞。但 縱使是這樣的技術,其保護能力依然會比直接裝載於卡匣中來的低落。且其片狀機構設計亦存在著損壞不易維修之缺點,因此在這個前提之下,透過單薄且包覆性差的機構直接乘載晶圓並不是最理想之技術。 In the existing technology, such as the technology contained in the published patent number TWI283452 (wafer support connector for semiconductor wafer transport container) of the Republic of China, it is designed with a series of elastic mechanisms to carry the wafer to prevent the wafer Damage caused by shaking and collision during transportation. But even with this kind of technology, its protection capacity will still be lower than that directly loaded in the cassette. Moreover, the design of the sheet-like mechanism also has the disadvantage that it is not easy to damage and repair. Therefore, under this premise, directly loading the wafer through a thin and poorly covered mechanism is not the most ideal technology.
而在中華民國公開專利編號TW201222704(卡匣轉接器)中所載之技術中,雖描述了包覆式的卡匣轉接結構,但該案仍未有效地解決不同尺寸卡匣與晶圓盒之間如何安全且順利地乘載及固定的方式。 In the technology contained in the published patent number TW201222704 (cassette adapter) of the Republic of China, although the covered cassette conversion structure is described, the case has not effectively solved the different sizes of cassettes and wafers How to carry and fix between boxes safely and smoothly.
又於日本公開特許編號-特開2002-231802(具有相容性的晶圓搬運容器(互換性備搬送容器))一案所提出方案中,雖已運用包覆式的卡匣結構轉載晶圓,但該案仍具有定位不易以及卡匣容易滑出之缺點。因此,該案選用防止卡匣滑出之卡榫結構也僅能適用於特製的晶圓盒中,不具有泛用性。 Also published in Japan Patent No.-JP 2002-231802 (wafer transfer container with compatibility (interchangeability Prepare In the solution proposed in the case of "Transport Container"), although the wafer cassette has been transferred using the cladding cassette structure, the case still has the disadvantages of not easy positioning and easy slide-out of the cassette. Therefore, the tenon structure used to prevent the cassette from slipping out in this case can only be applied to the specially-made wafer box, and is not universal.
因此,如果可以利用現有的傳送設備來執行晶圓傳送方案,並且同時能克服現有技術中所提及的所有缺失,將對於半導體廠的生產及設備維運成本有顯著的幫助。 Therefore, if the existing transfer equipment can be used to execute the wafer transfer scheme, and at the same time all the defects mentioned in the prior art can be overcome, it will have a significant help for the production and equipment maintenance costs of the semiconductor factory.
為解決先前技術所提及的問題,本發明提供了一種卡匣結構轉載容器。所述卡匣結構轉載容器主要包含一盒體、至少二第一肋條、至少二第二肋條以及至少二第三肋條。 In order to solve the problems mentioned in the prior art, the present invention provides a transfer container with a cassette structure. The transfer container of the cassette structure mainly includes a box body, at least two first ribs, at least two second ribs, and at least two third ribs.
其中該盒體具有一定位開口,且該定位開口為喇叭狀,該盒體容置一卡匣。而該至少二第一肋條對稱設於該盒體內部上緣兩側,並卡合該卡匣之上端。 The box body has a positioning opening, and the positioning opening is trumpet-shaped, and the box body houses a cassette. The at least two first ribs are symmetrically arranged on both sides of the inner upper edge of the box body, and are engaged with the upper end of the cassette.
該至少二第二肋條對稱設於該盒體內部左右兩側,並卡合該 卡匣之左右兩側。最後該至少二第三肋條,設於該盒體之底部,並卡合該卡匣之底部。其中,該定位開口係用以定位並引導該卡匣進入該卡匣結構轉載容器中。 The at least two second ribs are symmetrically arranged on the left and right sides of the box body, and are engaged with the left and right sides of the cassette. Finally, the at least two third ribs are arranged at the bottom of the box body and are engaged with the bottom of the cassette. Wherein, the positioning opening is used to position and guide the cassette into the transfer container of the cassette structure.
以上對本發明的簡述,目的在於對本發明之數種面向和技術特徵作一基本說明。發明簡述並非對本發明的詳細表述,因此其目的不在特別列舉本發明的關鍵性或重要元件,也不是用來界定本發明的範圍,僅為以簡明的方式呈現本發明的數種概念而已。 The above brief description of the present invention aims to provide a basic description of several aspects and technical features of the present invention. The brief description of the invention is not a detailed description of the invention, so its purpose is not to specifically list the key or important elements of the invention, nor to define the scope of the invention, but to present several concepts of the invention in a concise manner.
10‧‧‧卡匣結構轉載容器 10‧‧‧Container transfer container
100‧‧‧盒體 100‧‧‧Box
101‧‧‧第一肋條 101‧‧‧The first rib
102‧‧‧第二肋條 102‧‧‧The second rib
103‧‧‧第三肋條 103‧‧‧ third rib
104‧‧‧定位開口 104‧‧‧positioning opening
105‧‧‧第一擋止件 105‧‧‧ First stop
106‧‧‧第二檔止件 106‧‧‧Second stop
107‧‧‧定位孔 107‧‧‧Locating hole
108‧‧‧門鎖 108‧‧‧door lock
109‧‧‧傾角元件 109‧‧‧inclination element
11‧‧‧卡匣 11‧‧‧Cassette
12‧‧‧上蓋 12‧‧‧Top cover
121‧‧‧固定元件 121‧‧‧Fixed components
13‧‧‧彈性元件 13‧‧‧Elastic element
131‧‧‧彈性肋條 131‧‧‧Elastic ribs
20‧‧‧晶圓盒 20‧‧‧ Wafer box
21‧‧‧晶圓盒蓋 21‧‧‧ Wafer box cover
θ‧‧‧防滑角度 θ‧‧‧Slip angle
圖1係本發明實施例之結構示意圖。 FIG. 1 is a schematic structural diagram of an embodiment of the present invention.
圖2係本發明實施例轉載於前開式晶圓盒之示意圖。 FIG. 2 is a schematic diagram of an embodiment of the present invention reproduced in a front opening wafer cassette.
圖3係本發明實施例裝載卡匣於前開式晶圓盒之剖面圖。 FIG. 3 is a cross-sectional view of loading a cassette on a front opening wafer cassette according to an embodiment of the invention.
圖4係本發明實施例裝載卡匣時之正面示意圖。 4 is a schematic front view of the present invention when loading a cassette.
圖5係本發明實施例上蓋暨固定元件結構示意圖。 5 is a schematic diagram of the structure of the upper cover and the fixing element according to the embodiment of the invention.
圖6係本發明實施例上蓋暨彈性元件裝設示意圖。 6 is a schematic diagram of the installation of the upper cover and the elastic element according to the embodiment of the invention.
圖7係本發明實施例彈性肋條結構示意圖。 7 is a schematic structural view of an elastic rib according to an embodiment of the invention.
為能瞭解本發明的技術特徵及實用功效,並可依照說明書的內容來實施,茲進一步以如圖式所示的較佳實施例,詳細說明如後:請同時參照圖1、圖2及圖3。圖1係本發明實施例之結構示意圖;圖2係本發明實施例轉載於前開式晶圓盒之示意圖;圖3係本發明實施例裝載卡匣於前開式晶圓盒之剖面圖。 In order to understand the technical features and practical effects of the present invention, and can be implemented in accordance with the content of the specification, the preferred embodiment shown in the drawings is further described in detail below: please refer to FIGS. 1, 2 and 3. FIG. 1 is a schematic structural view of an embodiment of the present invention; FIG. 2 is a schematic view of an embodiment of the present invention reproduced in a front-open wafer cassette; FIG. 3 is a cross-sectional view of an embodiment of the present invention loading a cassette in a front-open wafer cassette.
本實施例主要藉由八吋卡匣作為卡匣11之實施例,而晶圓盒20則為十二吋前開式晶圓盒。實際上對於卡匣11及晶圓盒20之種類並不加以限制,僅需卡匣11所裝載之晶圓W尺寸小於晶圓盒20即可。 This embodiment mainly uses an eight-inch cassette as the embodiment of the
如圖1所示,本實施例中,可將卡匣11轉載於晶圓盒20中之卡匣結構轉載容器10主要包含盒體100、至少二第一肋條101、至少二第二肋條102以及至少二第三肋條103。其中盒體100具有定位開口104,且定位開口104為喇叭狀。本實施例之定位開口設定為喇叭狀(亦可先參見圖3),主要係作為引導卡匣11進入盒體100內之用。 As shown in FIG. 1, in this embodiment, a cassette
透過定位開口104設計為喇叭狀的結構,可讓本實施例自然而然地形成導角之功能,讓卡匣11得以對位並收納入卡匣結構轉載容器10之盒體100中。 The design of the positioning opening 104 as a trumpet-shaped structure allows the present embodiment to naturally form the function of the guide angle, so that the
至少二第一肋條101對稱設於該盒體100內部上緣兩側,至少二第二肋條102則對稱設於該盒體100內部左右兩側,最後至少二第三肋條103,設於盒體100之底部。前述第一肋條101、第二肋條102以及第三肋條103的設置具有多種功效。本實施例之第一肋條101、第二肋條102以及第三肋條103靠近定位開口104一端之厚度較靠近盒體100內部之一端較厚。如此一來,除了發揮定位的功能之外,更可以減少卡匣11滑入盒體100內之摩擦力。 At least two
在其它可能的實施例中,第一肋條101、第二肋條102以及第三肋條103更可以配合卡匣11之外型作為滑軌式卡榫或是具夾合功能的固定結構,本發明並不加以限制。 In other possible embodiments, the
而在本實施例中,為了減輕盒體100之重量,定位開口104 於盒體100內部的對側設有第一擋止件105及第二擋止件106。其中第一擋止件105之寬幅大於第二擋止件106,且本實施例之第一擋止件105及第二擋止件106上更設有至少一擋止肋條。關於擋止肋條的設置可詳見圖3所示之剖面圖,所述擋止肋條可以方便人工或是機械搬運盒體100時,做為增加摩擦力或施力的著力點。 In this embodiment, in order to reduce the weight of the
待卡匣11滑入盒體100內後,本實施例為防止卡匣11滑出盒體100,除了第一擋止件105及第二擋止件106之使用外,本實施例盒體100更設有至少一門鎖108。門鎖108的形式可以是轉動式的門鎖,亦可以採用插銷式的門鎖,本發明並不加以限制。在可能的實施樣態中,更可以設計為卡匣11滑入盒體100底部時,撞擊第一擋止件105及第二擋止件106的同時拉動隱藏於盒體100內之至少一致動元件(圖未示),讓門鎖108自動上鎖。 After the
在可能的實施樣態中,亦可設計成當晶圓盒蓋21蓋上晶圓盒20後,於晶圓盒20上鎖的同時透過設於晶圓盒20中或其夾層間之另一至少一致動元件(圖未示),與門鎖108物理接觸後,使門鎖108上鎖。 In a possible implementation mode, after the
本實施例中,當盒體100裝設於晶圓盒20內並固定之後,僅卡匣11會碰觸晶圓盒蓋21。盒體100本身設計為縱使是定位開口104也不會觸碰到晶圓盒蓋21。 In this embodiment, after the
除此之外,如圖3所示,為進一步防止卡匣11滑出盒體100之外,本實施例之盒體100上更可設有至少一定位孔107、至少一傾角元件109或其組合。在可能的實施樣態中,定位孔107可以用以和具有特殊卡榫結構的卡匣11配合固定,抑或用於使盒體100與晶圓盒20固定之。而傾角 元件109則可以用以配合定位開口104之喇叭狀結構,使卡匣結構轉載容器10之盒體100形成防滑角度θ。 In addition, as shown in FIG. 3, to further prevent the
本實施例中,傾角元件109使卡匣結構轉載容器10沿定位開口104之方向向上傾斜的防滑角度θ介於2°~6°之間。更精確來說本實施例採用之防滑角度θ為4°角。 In this embodiment, the
為了避免裝載於卡匣11內之晶圓W搖晃,卡匣11上更可裝設上蓋12。請參照圖4,圖4係本發明實施例裝載卡匣時之正面示意圖。如圖4所示,圖4中之實施例,至少二第一肋條101係用以卡合上蓋12,而上蓋12設置於卡匣11之上。其中,本實施例至少二第一肋條101卡合上蓋12時,第一肋條101與上蓋12間的間隙介於0.5~1.5毫米之間。 In order to prevent the wafer W loaded in the
請一併參照圖5,圖5係本發明實施例上蓋暨固定元件結構示意圖。如圖4及圖5所示,該實施例之上蓋12(以虛線表示,亦可參照圖1中之上蓋12結構)包含固定元件121。本實施例中之固定元件121為複數個固定翼所組成,所述固定元件121且具有一定的彈力,可用以固定卡匣11中之晶圓W。如圖5中特寫剖面圖的固定元件121所示,當固定元件121沿著圖5中箭頭方向蓋住後,得以固定晶圓W。 Please refer to FIG. 5 together. FIG. 5 is a schematic structural view of an upper cover and a fixing element according to an embodiment of the present invention. As shown in FIGS. 4 and 5, the
本實施例中,上蓋12之深度(即上蓋12與卡匣11重複交疊之部分)設計介於23~30毫米之間,可確保人員組裝過程中不至於觸碰到晶圓。 In this embodiment, the depth of the upper cover 12 (that is, the portion where the
在實際操作時,翼狀的固定元件121可與晶圓W直接碰觸,亦可不與晶圓W直接碰觸,僅限制晶圓W的運動幅度而已。 In actual operation, the wing-shaped
本實施例之上蓋12及固定元件121可以使用聚碳酸酯 (Polycarbonate,PC)、奈米碳管(Carbon Nanotube,CNT)、環烯烴共聚合物(Cyclic Olefin Copolymer,COC)或其組合。更精確來說本實施例可用以實施之材質組合為聚碳酸酯(Polycarbonate,PC)混合奈米碳管(Carbon Nanotube,CNT)或環烯烴共聚合物(Cyclic Olefin Copolymer,COC)混合奈米碳管(Carbon Nanotube,CNT)製成。使上蓋12及固定元件121具有表面阻抗介於104~109歐姆(Ω)以及彈力值介於5~100克力(gf)特性的上蓋12及固定元件121之特性。 In this embodiment, the
接著請同時參照圖6及圖7,圖6係本發明實施例上蓋暨彈性元件裝設示意圖;圖7係本發明實施例彈性肋條結構示意圖。如圖6所示,在圖6之實施例中,防止晶圓W晃動的手段係透過設置於上蓋12(以虛線表示)之彈性元件13固定之。本實施例中,彈性元件13可以透過卡合、嵌合、黏合甚至是一體成形的方式設置於上蓋12之上。本實施例中彈性元件13之材料可為泡棉或橡膠等彈性體,本發明並不加以限制。 Next, please refer to FIG. 6 and FIG. 7 at the same time. FIG. 6 is a schematic diagram of the upper cover and the installation of the elastic element according to the embodiment of the invention; FIG. 7 is a schematic diagram of the elastic rib structure according to the embodiment of the invention. As shown in FIG. 6, in the embodiment of FIG. 6, the means for preventing the wafer W from shaking is fixed through the
如圖7所示,本實施例彈性元件13更設有至少一彈性肋條131。為方便理解彈性肋條131之固定功效,因此以圖7中特寫彈性肋條131之部分說明之。圖7中特寫彈性肋條131之部分視角係從旁觀之。也就是彈性肋條131係沿著彈性元件13較長的一端線性設置。當晶圓W被彈性元件13咬合時,會使彈性肋條131有彈性地凹陷,以固定或防止晶圓W晃動。 As shown in FIG. 7, the
而彈性元件13之材質不同,會影響晶圓W嵌入彈性肋條131之深度;本實施例可以依照需求使前述嵌入深度介於1~3毫米之間,並對晶圓的作用力介於0.1~100克力(gf)之間。此外,為了讓彈性元件13有更多的功能,亦可使彈性元件13採用抗靜電泡棉。 The material of the
在可能的實施樣態中,亦可以在固定元件121的凹槽中增設與彈性元件13相同材質之抗震層,本發明並不加以限制。 In a possible implementation manner, an anti-seismic layer of the same material as the
惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即依本發明申請專利範圍及說明內容所作之簡單的等效變化與修飾,皆仍屬本發明涵蓋之範圍內。 However, the above are only preferred embodiments of the present invention, and the scope of implementation of the present invention cannot be limited by this, that is, simple equivalent changes and modifications made in accordance with the scope of patent application and description of the present invention are still It is within the scope of the present invention.
10‧‧‧卡匣結構轉載容器 10‧‧‧Container transfer container
100‧‧‧盒體 100‧‧‧Box
101‧‧‧第一肋條 101‧‧‧The first rib
102‧‧‧第二肋條 102‧‧‧The second rib
103‧‧‧第三肋條 103‧‧‧ third rib
104‧‧‧定位開口 104‧‧‧positioning opening
105‧‧‧第一擋止件 105‧‧‧ First stop
106‧‧‧第二檔止件 106‧‧‧Second stop
107‧‧‧定位孔 107‧‧‧Locating hole
108‧‧‧門鎖 108‧‧‧door lock
Claims (17)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW106113289A TWI682484B (en) | 2017-04-20 | 2017-04-20 | Cassette adaptor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW106113289A TWI682484B (en) | 2017-04-20 | 2017-04-20 | Cassette adaptor |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201839889A TW201839889A (en) | 2018-11-01 |
TWI682484B true TWI682484B (en) | 2020-01-11 |
Family
ID=65033879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106113289A TWI682484B (en) | 2017-04-20 | 2017-04-20 | Cassette adaptor |
Country Status (1)
Country | Link |
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TW (1) | TWI682484B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11322379B2 (en) | 2020-06-16 | 2022-05-03 | Dly Technologies Inc. | Wafer storage box, wafer transfer device and wafer storage and transfer assembly having the same |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11482430B2 (en) * | 2018-11-28 | 2022-10-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Space filling device for wet bench |
CN116031184A (en) | 2021-10-25 | 2023-04-28 | 大立钰科技有限公司 | Wafer access assembly, wafer access device and wafer carrier thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002231802A (en) * | 2001-01-31 | 2002-08-16 | Takehide Hayashi | Wafer carrier having compatibility |
TWI283452B (en) * | 2001-11-14 | 2007-07-01 | Entegris Inc | Wafer support attachment for a semi-conductor wafer transport container |
TWI538084B (en) * | 2010-09-17 | 2016-06-11 | 昕芙旎雅股份有限公司 | Cassette adapter |
-
2017
- 2017-04-20 TW TW106113289A patent/TWI682484B/en active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002231802A (en) * | 2001-01-31 | 2002-08-16 | Takehide Hayashi | Wafer carrier having compatibility |
TWI283452B (en) * | 2001-11-14 | 2007-07-01 | Entegris Inc | Wafer support attachment for a semi-conductor wafer transport container |
TWI538084B (en) * | 2010-09-17 | 2016-06-11 | 昕芙旎雅股份有限公司 | Cassette adapter |
TW201631692A (en) * | 2010-09-17 | 2016-09-01 | 昕芙旎雅股份有限公司 | Cassette adapter |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11322379B2 (en) | 2020-06-16 | 2022-05-03 | Dly Technologies Inc. | Wafer storage box, wafer transfer device and wafer storage and transfer assembly having the same |
Also Published As
Publication number | Publication date |
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TW201839889A (en) | 2018-11-01 |
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