TWI681923B

TWI681923B - Microfluidic device

Info

Publication number: TWI681923B
Application number: TW108129262A
Authority: TW
Inventors: 陳冠宇; 楊家維; 陳昱瑋
Original assignee: 國立交通大學
Priority date: 2019-08-16
Filing date: 2019-08-16
Publication date: 2020-01-11
Also published as: TW202108496A

Abstract

This invention provides a microfluidic device, which includes a channel layer, a bulk layer, and a covering unit. The channel layer comprises a surface and a microchannel which form on the surface. The bulk layer comprises a body that disposed on the channel layer, and two through holes which form on the body and in communication with the microchannel. The covering unit comprises a magnetic film and a covering film that covered the trough holes, respectively.

Description

微流體裝置Microfluidic device

本發明是有關於一種微流體裝置，特別是指一種透過磁驅動的微流體裝置。The invention relates to a microfluidic device, in particular to a microfluidic device driven by magnetism.

現有微流體系統的內部流體驅動，主要是使用注射式幫浦或蠕動式幫浦作為流體驅動的動力源，以提供微流體系統內部具備穩定的液體灌流環境，從而模擬人體組織中液體流動的方式，創造出仿生的體內環境。The internal fluid drive of the existing microfluidic system mainly uses an injection pump or a peristaltic pump as the power source of the fluid drive to provide a stable liquid perfusion environment inside the microfluidic system, thereby simulating the way of liquid flow in human tissue To create a bionic internal environment.

然而，其動力源所使用的幫浦設備是需要許多適配器與管線來與微流體晶片及細胞培養液等容器相互連接，才能完成整個微流體系統架構，且管線與適配器的前置處理也相當複雜，需要經過高溫滅菌處理，除了連接的過程非常容易產生氣泡與洩漏等問題，導致流體在微流體晶片內部的不穩定性，同時幫浦的擠壓也會造成管線的脆化與不穩定性。However, the pump equipment used in its power source requires many adapters and pipelines to interconnect with microfluidic wafers and cell culture fluid containers to complete the entire microfluidic system architecture, and the pre-processing of pipelines and adapters is also quite complicated It needs to be sterilized by high temperature. In addition to the connection process, it is very easy to produce bubbles and leaks, which leads to the instability of the fluid inside the microfluidic wafer. At the same time, the pump extrusion will also cause embrittlement and instability of the pipeline.

此外，當使用的管線越長，其流速值與實際晶片中的流速也會有所差異，這樣的培養系統往往需要許多輔助裝置，因此，如何安置這些輔助元件，使微流體晶片所有的外在因素與人為因素降至最低，是現有微流體系統的一大挑戰。In addition, when the pipeline used is longer, the flow rate value will be different from the actual flow rate in the wafer. Such a culture system often requires many auxiliary devices. Therefore, how to arrange these auxiliary components to make the microfluidic wafer all external The minimization of factors and human factors is a major challenge for existing microfluidic systems.

為了解決現有微流體系統中所面臨到的繁瑣步驟與問題，如何開發出整合性單一系統為目前本領域技術人員所待解決的問題。In order to solve the cumbersome steps and problems faced in the existing microfluidic system, how to develop an integrated single system is currently a problem to be solved by those skilled in the art.

因此，本發明的目的，即在提供一種透過磁驅動的微流體裝置。Therefore, the object of the present invention is to provide a magnetically driven microfluidic device.

於是，本發明微流體裝置，包含一流道層、一主體層，及一覆蓋單元。Therefore, the microfluidic device of the present invention includes a channel layer, a body layer, and a cover unit.

該流道層包括一表面，及一由該表面凹陷的微流道。The flow channel layer includes a surface, and a micro flow channel recessed from the surface.

該主體層包括一設置在該流道層的該表面上的本體，及二分別位於該本體相反兩端並貫穿而該本體的穿孔，該等穿孔與該微流道連通。The main body layer includes a body disposed on the surface of the flow channel layer, and two perforations at the opposite ends of the body and penetrating through the body, the perforations communicating with the micro flow channel.

該覆蓋單元位於該主體層之反向該流道層的表面，包括一覆蓋其中一該穿孔的磁薄膜，及一覆蓋其中另一該穿孔的覆蓋膜。The covering unit is located on the surface of the main body layer opposite to the flow channel layer, and includes a magnetic film covering one of the perforations and a covering film covering the other of the perforations.

本發明的功效在於，透過在與該微流道連通的該穿孔上直接覆蓋磁薄膜，使微流體裝置能透過磁力驅動方式控制微流道中的流體流動，提供簡便且可控的流體動態環境，重現出培養液流動的仿生情況，不需如現有微流體系統設置的幫浦及管線等繁瑣架構，達到簡化裝置之優勢。The effect of the present invention is that, by directly covering the perforation in communication with the micro-channel, a magnetic film is directly applied to the micro-fluidic device to control the fluid flow in the micro-channel through the magnetic drive mode, providing a simple and controllable fluid dynamic environment, Reproduce the bionic situation of the culture fluid flow, without the need for cumbersome structures such as pumps and pipelines provided in the existing microfluidic system, to achieve the advantage of simplified equipment.

在本發明被詳細描述之前，應當注意在以下的說明內容中，類似的元件是以相同的編號來表示。Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same numbers.

參閱圖1至圖3，本發明微流體裝置的一實施例，包含一微流體晶片2、一用以固定該微流體晶片2的固定基座3、一覆蓋在該固定基座3與該微流體晶片2上的蓋板4、多個連接該固定基座3與該蓋板4的固定件5、一與該微流體晶片2間隔設置的電磁鐵模組6(見圖4)，及一電連接於該電磁鐵模組6的控制板7(見圖4)。1 to 3, an embodiment of the microfluidic device of the present invention includes a microfluidic chip 2, a fixed base 3 for fixing the microfluidic chip 2, a cover over the fixed base 3 and the microfluidic device The cover plate 4 on the fluid chip 2, a plurality of fixing pieces 5 connecting the fixing base 3 and the cover plate 4, an electromagnet module 6 (see FIG. 4) spaced apart from the microfluidic chip 2, and a It is electrically connected to the control board 7 of the electromagnet module 6 (see FIG. 4).

具體地說，該微流體晶片2包括一流道層21、一設置在該流道層21的主體層22、一覆蓋在該主體層22上的覆蓋單元23，及一設置在該流道層21底部的支撐層24。Specifically, the microfluidic wafer 2 includes a flow channel layer 21, a body layer 22 disposed on the flow channel layer 21, a covering unit 23 covering the body layer 22, and a flow channel layer 21 The bottom of the support layer 24.

該流道層21包括一表面210，及一由該表面210凹陷的微流道211。該主體層22包一括設置在該微流道21的該表面210上的本體221，及二分別位於該本體221相反兩端並貫穿該本體221的穿孔220，且該等穿孔220與該微流道221連通。The flow channel layer 21 includes a surface 210 and a micro flow channel 211 recessed from the surface 210. The body layer 22 includes a body 221 disposed on the surface 210 of the microchannel 21, and two through holes 220 at opposite ends of the body 221 and penetrating through the body 221, and the through holes 220 and the microflow Road 221 is connected.

詳細地說，該流道層21與該主體層22是使用包含高分子有機矽化合物材料所製成，於本實施例中，是以聚二甲基矽氧烷(Polydimethylsiloxane，PDMS)與固化劑作相混合並置於模具中，再透過真空處理且配合高溫烘烤固化，從而透過翻模技術製作出具有該微流道211的該流道層21及具有該等穿孔220的該主體層22；其中，該等穿孔220的大小並沒有特別限制，只要能貫穿該本體221而與該微流道221連通即可，於本實施例中，是以大小不同的該等穿孔220為例做說明。In detail, the flow channel layer 21 and the main body layer 22 are made of a material containing a polymer organosilicon compound. In this embodiment, polydimethylsiloxane (PDMS) and curing agent are used Mix the phases and place them in the mold, and then through vacuum treatment and high temperature baking and curing, so that the flow channel layer 21 with the micro flow channel 211 and the main body layer 22 with the perforations 220 are manufactured through the mold-over technology; The size of the perforations 220 is not particularly limited, as long as it can penetrate the body 221 and communicate with the micro flow channel 221. In this embodiment, the perforations 220 with different sizes are used as an example for description.

該覆蓋單元23包括一覆蓋在其中一該穿孔220上的磁薄膜231，及一覆蓋在其中另一該穿孔的覆蓋膜232。該支撐層24設置在該流道層21之反向該主體層22的底部，用以支撐並保護該流道層21。The covering unit 23 includes a magnetic thin film 231 covering one of the through holes 220 and a covering film 232 covering the other of the through holes. The supporting layer 24 is disposed at the bottom of the flow channel layer 21 opposite to the main body layer 22, and is used to support and protect the flow channel layer 21.

於本實施例中，該磁薄膜231是使用羰基鐵粉(carbonyl-Iron powder，CI-powder)加入聚二甲基矽氧烷(PDMS)溶液中，以預定比例相混合並充分攪拌後倒入模具中，再透過真空處理且配合高溫烘烤固化，從而透過翻模技術製作出該磁薄膜231。透過使用具有較高的飽和磁化強度(saturation magnetization)羰基鐵粉(CI-powder)，使該磁薄膜231於較低的磁場中有能具有較好的響應，且此鐵粉經過羰基的修飾處理，能讓鐵粉具有良好的分散性而避免聚集的現象發生。In this embodiment, the magnetic thin film 231 is added to a polydimethylsiloxane (PDMS) solution using carbonyl-iron powder (CI-powder), mixed in a predetermined ratio and fully stirred, and then poured into In the mold, the magnetic thin film 231 is fabricated through vacuum processing and high-temperature baking and curing, so as to produce the magnetic thin film 231 through the mold-turning technology. By using CI-powder with higher saturation magnetization (CI-powder), the magnetic thin film 231 can have a better response in a lower magnetic field, and the iron powder has been modified by carbonyl , Can make the iron powder have good dispersion and avoid the phenomenon of aggregation.

該覆蓋膜232則是不具有羰基鐵粉(CI-powder)，而是使用與該流道層21及該主體層22的相同材料與方式製作而成，該支撐層24是使用玻璃基板為例做說明，其中，該覆蓋膜232與該支撐層24的材料使用均不限於此，該覆蓋膜232只要能覆蓋其對應的該穿孔220即可，而該支撐層24只要能用以保護並支撐該流道層21即可。The cover film 232 does not have a carbonyl iron powder (CI-powder), but is made of the same material and method as the flow channel layer 21 and the main body layer 22, and the support layer 24 uses a glass substrate as an example For illustration, the materials of the cover film 232 and the support layer 24 are not limited to this. The cover film 232 only needs to cover the corresponding through-hole 220, and the support layer 24 only needs to protect and support The flow channel layer 21 is sufficient.

在完成製作該流道層21、該主體層22、該磁薄膜231及該覆蓋膜232後，先透過氧氣電漿反應器對該流道層21的該表面210及該主體層22的其中一表面進行氧氣電漿處理，在氧氣電漿反應結束後迅速取出，即可將該流道層21與該主體層22具有氧氣電漿處理的表面相互結合；接著，同樣地將該磁薄膜231、該覆蓋膜232，及該主體層22的該等穿孔220周圍進行氧氣電漿處理，再將該磁薄膜231覆蓋結合至該主體層22的較大尺寸的該穿孔220上，而將該覆蓋膜232覆蓋結合至該主體層22的較小尺寸的該穿孔220上，最後再將該支撐層24結合於該流道層21底部後即可完成該微流體晶片2的製作。After the flow channel layer 21, the main body layer 22, the magnetic thin film 231, and the cover film 232 are completed, one of the surface 210 and the main body layer 22 of the flow channel layer 21 is firstly passed through an oxygen plasma reactor Oxygen plasma treatment is performed on the surface, and after the oxygen plasma reaction is completed, it is quickly taken out, and the surface of the flow channel layer 21 and the body layer 22 with oxygen plasma treatment can be combined with each other; then, the magnetic thin film 231, Oxygen plasma treatment is performed around the cover film 232 and the through holes 220 of the body layer 22, and then the magnetic thin film 231 is covered and bonded to the larger size through holes 220 of the body layer 22, and the cover film 232 covers the smaller size of the through hole 220 bonded to the body layer 22, and finally the support layer 24 is bonded to the bottom of the flow channel layer 21 to complete the fabrication of the microfluidic wafer 2.

該固定基座3具有一能供該微流體晶片2容置的容槽30，而該蓋板4是可分離地設置在該固定基座3上，並令該磁薄膜231與該覆蓋膜232位在該主體層22與該蓋板4之間，並透過該等固定件5連接該蓋板4與該固定基座3而同時用以固定該磁薄膜231與該覆蓋膜232，較佳地，該蓋板4能讓該磁薄膜231部分露出。The fixed base 3 has a container 30 for accommodating the microfluidic wafer 2, and the cover plate 4 is detachably disposed on the fixed base 3 and allows the magnetic thin film 231 and the cover film 232 It is located between the main body layer 22 and the cover plate 4 and connects the cover plate 4 and the fixing base 3 through the fixing members 5 and is used to fix the magnetic thin film 231 and the cover film 232 at the same time, preferably , The cover plate 4 can partially expose the magnetic film 231.

詳細地說，該固定基座3可透過3D列表機輸出，而該固定件5的形式並沒有任何局限，只要能將該蓋板4與該固定基座3連接並夾置該磁薄膜231即可，於本實施例中，該等固定件5是以螺絲為例做說明，本實施例是透過六個螺絲貫穿該蓋板4而鎖固在該固定基座3上，並且可進一步的調整該等固定件5鎖固的緊度，使其鎖固力道均勻，而讓夾於該蓋板4與該固定基座3之間的磁薄膜231能受力均勻，較佳地，可透過電動扭力起子以相同的施力鎖上該等固定件5，透過該固定基座3、該蓋板4及該等固定件5的配合，讓該微流體晶片2達到封閉效果。In detail, the fixed base 3 can be output through the 3D list machine, and the form of the fixed member 5 is not limited, as long as the cover 4 can be connected to the fixed base 3 and the magnetic film 231 is sandwiched. Yes, in this embodiment, the fixing members 5 are described with screws as an example. In this embodiment, six screws are inserted through the cover plate 4 to lock the fixing base 3, and further adjustments are possible. The tightening tightness of the fixing members 5 makes the locking force even, and the magnetic film 231 sandwiched between the cover plate 4 and the fixing base 3 can be evenly stressed, preferably, it can be driven by electric The torsion screwdriver locks the fixing members 5 with the same force, and through the cooperation of the fixing base 3, the cover plate 4 and the fixing members 5, the microfluidic chip 2 achieves a sealing effect.

參閱圖4與圖5，實際使用該微流體晶片2時，在未覆蓋該磁薄膜231及該覆蓋膜232前，可先由其中一該穿孔220注入一流體(圖未示)至該微流道211中，再覆蓋該磁薄膜231及該覆蓋膜232，並透過該等固定件5及該蓋板4固定該磁薄膜231及該覆蓋膜232。Referring to FIGS. 4 and 5, when the microfluidic wafer 2 is actually used, a fluid (not shown) may be injected into the microfluid from one of the through holes 220 before the magnetic thin film 231 and the cover film 232 are covered. In the track 211, the magnetic thin film 231 and the cover film 232 are covered, and the magnetic thin film 231 and the cover film 232 are fixed through the fixing members 5 and the cover plate 4.

接著，在該磁薄膜231上間隔地設置一電磁鐵模組(electromagnet)6，透過將該電磁鐵模組6設置在該磁薄膜231上方，並啟動該電磁鐵模組6使該磁薄膜231產生形變，使該微流道211中的流體發生變化，也就是說，當該磁薄膜231被該電磁鐵模組6吸引時(見圖4)，該微流道211中的流體會往該磁薄膜231方向移動，而關閉該電磁鐵模組6時，該磁薄膜231回復為原來態樣(見圖5)，使該微流道211中的流體反向該磁薄膜231方向移動。Next, an electromagnet module (electromagnet) 6 is arranged on the magnetic film 231 at intervals, and the magnetic film 231 is activated by arranging the electromagnet module 6 above the magnetic film 231 and activating the electromagnet module 6 The deformation causes the fluid in the micro-channel 211 to change, that is, when the magnetic film 231 is attracted by the electromagnet module 6 (see FIG. 4), the fluid in the micro-channel 211 will The magnetic film 231 moves in the direction, and when the electromagnet module 6 is closed, the magnetic film 231 returns to its original state (see FIG. 5), so that the fluid in the micro-channel 211 moves in the direction opposite to the magnetic film 231.

較佳地，該電磁鐵模組6是電連接一控制板7，而透過該控制板7以線性訊號(linear signal)、弦波訊號(sinusoidal signal)，或步階信號(step signal)等不同訊號方式控制該電磁鐵模組6的磁力，更佳地，可透過該控制板7的電流輸出形式來控制磁力的頻率，從而讓輸出的磁力模擬人體平均呼吸頻率，使該微流道211中的流體來回循環流動，相較於現有固定流動的微流體裝置，本實施例具備更靈活性流體流動的調控，於本實施例中，該控制板是以Arduino控制板為例作說明。Preferably, the electromagnet module 6 is electrically connected to a control board 7, and the control board 7 is different in linear signal, sinusoidal signal, step signal, etc. The signal mode controls the magnetic force of the electromagnet module 6, and more preferably, the frequency of the magnetic force can be controlled by the current output form of the control board 7, so that the output magnetic force simulates the average breathing frequency of the human body, so that the micro-channel 211 Compared with the existing fixed-flow microfluidic device, this embodiment has more flexible fluid flow control. In this embodiment, the control board uses the Arduino control board as an example for illustration.

更具體而言，本實施例可在該微流道211中培養肺泡細胞(HPAEpic)，並將組裝完成的該微流體裝置至於37℃恆溫培養箱(圖未式)中，再搭配該電磁鐵模組6與該控制板7改變該磁薄膜231的形變，從而該微流道211中的流體，以磁驅動方式在該微流道211中創造動態系統，模擬人體呼吸運動，以更貼近人體內的仿生動態環境，在後續添加二氧化矽粒子(silica nanoparticles)進行毒性測試時期量測更具有意義。More specifically, in this embodiment, the alveolar cells (HPAEpic) can be cultured in the microchannel 211, and the assembled microfluidic device can be placed in a constant temperature incubator at 37°C (not shown), and then equipped with the electromagnet The module 6 and the control board 7 change the deformation of the magnetic thin film 231, so that the fluid in the micro-channel 211 creates a dynamic system in the micro-channel 211 by magnetic driving, simulating the breathing motion of the human body to be closer to the human The bionic dynamic environment in the body, it is more meaningful to measure during the subsequent toxicity test by adding silica nanoparticles.

綜上所述，本發明微流體裝置，透過在該微流道211連通的該穿孔220上覆蓋磁薄膜231，並搭配該電磁鐵模組6與該控制板7改變該磁薄膜231的形變，從而控制該微流道211中的流體，以磁驅動方式在該微流道211中創造動態系統，模擬人體呼吸運動，以更貼近人體內的仿生動態環境，提供簡便且可控的流體動態環境，不需如現有微流體裝置還額外設置幫浦及管線等繁瑣架構，達到簡化裝置之優勢，故確實能達成本發明的目的。In summary, in the microfluidic device of the present invention, the magnetic film 231 is covered on the perforation 220 communicating with the micro flow channel 211, and the deformation of the magnetic film 231 is changed with the electromagnet module 6 and the control board 7, In order to control the fluid in the micro flow channel 211, a dynamic system is created in the micro flow channel 211 in a magnetic drive mode, simulating human respiratory movement, to be closer to the bionic dynamic environment in the human body, providing a simple and controllable fluid dynamic environment There is no need for additional complicated structures such as pumps and pipelines as in the existing microfluidic device to achieve the advantage of simplifying the device, so it can indeed achieve the purpose of costing the invention.

惟以上所述者，僅為本發明的實施例而已，當不能以此限定本發明實施的範圍，凡是依本發明申請專利範圍及專利說明書內容所作的簡單的等效變化與修飾，皆仍屬本發明專利涵蓋的範圍內。However, the above are only examples of the present invention, and the scope of implementation of the present invention cannot be limited by this, any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the patent specification are still classified as Within the scope of the invention patent.

2‧‧‧微流體晶片 2‧‧‧Microfluidic chip

232‧‧‧覆蓋膜 232‧‧‧covering film

21‧‧‧流道層 21‧‧‧ Flow channel layer

24‧‧‧支撐層 24‧‧‧support layer

210‧‧‧表面 210‧‧‧Surface

3‧‧‧固定基座 3‧‧‧Fixed base

211‧‧‧微流道 211‧‧‧Micro channel

30‧‧‧容槽 30‧‧‧slot

22‧‧‧主體層 22‧‧‧Main layer

4‧‧‧蓋板 4‧‧‧cover

220‧‧‧穿孔 220‧‧‧Perforation

5‧‧‧固定件 5‧‧‧Fixed parts

221‧‧‧本體 221‧‧‧Body

6‧‧‧電磁鐵模組 6‧‧‧Electromagnetic module

23‧‧‧覆蓋單元 23‧‧‧Coverage unit

7‧‧‧控制板 7‧‧‧Control board

231‧‧‧磁薄膜 231‧‧‧ magnetic film

本發明的其他的特徵及功效，將於參照圖式的實施方式中清楚地呈現，其中：圖1是一立體分解圖，說明本發明微流體裝置的一微流體晶片；圖2是一立體分解圖，說明本發明微流體裝置的一實施例的該微流體晶片、一固定基座、一蓋板，及多個固定件的分解圖；圖3是一立體圖，說明本發明微流體裝置的該實施例的該微流體晶片、該固定基座、該蓋板，及該等固定件的的組合圖；圖4是一部分剖面圖，說明本發明微流體裝置的該實施例的一電磁鐵模組與一控制板對該微流體晶片的一磁薄膜施加磁力的態樣；及圖5是一部分剖面圖，說明本發明微流體裝置的該實施例的該電磁鐵模組與該控制板未對該微流體晶片施加磁力的態樣。 Other features and functions of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: FIG. 1 is an exploded perspective view illustrating a microfluidic wafer of the microfluidic device of the present invention; 2 is an exploded perspective view illustrating an exploded view of the microfluidic wafer, a fixed base, a cover plate, and a plurality of fixing members according to an embodiment of the microfluidic device of the present invention; 3 is a perspective view illustrating a combination view of the microfluidic wafer, the fixing base, the cover plate, and the fixing members of the embodiment of the microfluidic device of the present invention; 4 is a partial cross-sectional view illustrating a state in which an electromagnet module and a control board of the embodiment of the microfluidic device of the present invention apply magnetic force to a magnetic thin film of the microfluidic chip; and FIG. 5 is a partial cross-sectional view illustrating that the electromagnet module and the control board of the embodiment of the microfluidic device of the present invention do not apply a magnetic force to the microfluidic wafer.

2‧‧‧微流體晶片 2‧‧‧Microfluidic chip

211‧‧‧微流道 211‧‧‧Micro channel

231‧‧‧磁薄膜 231‧‧‧ magnetic film

232‧‧‧覆蓋膜 232‧‧‧covering film

3‧‧‧固定基座 3‧‧‧Fixed base

30‧‧‧容槽 30‧‧‧slot

4‧‧‧蓋板 4‧‧‧cover

5‧‧‧固定件 5‧‧‧Fixed parts

Claims

一種微流體裝置，適用於注入一流體，該微流體裝置包含：一流道層，包括一表面，及一由該表面凹陷的微流道，該流體位於該微流道中；一主體層，包括一設置在該流道層的該表面上的本體，及二分別位於該本體相反兩端並貫穿而該本體的穿孔，該等穿孔與該微流道連通；及一覆蓋單元，位於該主體層之反向該流道層的表面，包括一覆蓋其中一該穿孔的磁薄膜，及一覆蓋其中另一該穿孔的覆蓋膜，當該磁薄膜受一磁力產生形變，驅動該微流道中的該流體流動。 A microfluidic device is suitable for injecting a fluid. The microfluidic device includes: a flow channel layer, including a surface, and a micro flow channel recessed by the surface, the fluid is located in the micro flow channel; a body layer includes a A body provided on the surface of the flow channel layer, and two at the opposite ends of the body and penetrating through the body, the perforations communicating with the micro flow channel; and a covering unit located on the body layer The surface of the reverse flow channel layer includes a magnetic film covering one of the perforations and a cover film covering the other of the perforations. When the magnetic film is deformed by a magnetic force, the fluid in the micro-channel is driven flow.

如請求項1所述的微流體裝置，其中，該磁薄膜包含高分子有機矽化合物及羰基鐵粉。 The microfluidic device according to claim 1, wherein the magnetic thin film comprises a high molecular organic silicon compound and carbonyl iron powder.

如請求項1所述的微流體裝置，其中，該流道層與該主體層是以氧氣電漿處理方式相互接合。 The microfluidic device according to claim 1, wherein the flow channel layer and the main body layer are joined to each other by oxygen plasma treatment.

如請求項1所述的微流體裝置，還包含一設置在該流道層相反該主體層一側的支撐層，該流道層、該主體層、該覆蓋單元，及該支撐層共同構成一微流體晶片。 The microfluidic device according to claim 1, further comprising a supporting layer disposed on the side of the flow channel layer opposite to the main body layer, the flow channel layer, the main body layer, the covering unit, and the supporting layer together constitute a Microfluidic wafer.

如請求項4所述的微流體裝置，還包含一固定基座，及一蓋板，該固定基座具有一能供該微流體晶片容置的容槽，該蓋板可分離地設置在該固定基座上，令該磁薄膜與該覆蓋膜位在該主體層與該蓋板之間。 The microfluidic device according to claim 4, further comprising a fixed base, and a cover plate, the fixed base has a receiving groove for accommodating the microfluidic wafer, and the cover plate is detachably disposed on the Fix the base so that the magnetic thin film and the cover film are located between the main body layer and the cover plate.

如請求項5所述的微流體裝置，還包含多個固定件，該等固定件連接該蓋板與該固定基座。 The microfluidic device according to claim 5, further comprising a plurality of fixing members, the fixing members are connected to the cover plate and the fixing base.

如請求項6所述的微流體裝置，還包含一對應該磁薄膜而與該磁薄膜間隔設置的電磁鐵模組，及一電連接該電磁鐵模組並可控制該電磁鐵模組的磁力的控制板。 The microfluidic device according to claim 6, further comprising a pair of electromagnet modules corresponding to the magnetic film and spaced apart from the magnetic film, and an electric connection to the electromagnet module and control of the magnetic force of the electromagnet module Control panel.