TWI681116B - Miniature fluid transportation device - Google Patents

Abstract

A miniature fluid transportation device is disclosed and comprises a converging plate, two valve plates, two chamber plates and two miniature pumps. The converging plate has a converging channel and a converging outlet, and the converging channel is in communication with the converging outlet. Each of the two valve plate comprises a valve hole respectively. Each of the two chamber plates respectively comprises a groove, a communicating channel and a protrusion, wherein the groove is in communication with the communicating channel, and the protrusion contacts with the valve plate and closes the valve hole of the valve plate. By driving the two miniature pumps simultaneously, the two miniature pumps transmit fluid to the two grooves of the two chamber plates, and then fluid flows through the two communicating channels and pushes the two valve plates, thereby the two valve plates away from the two protrusions of the two chamber plates, and fluid could be transmitted through the two valve holes of the two valve plates, so as to flow into the converging channel of the converging plate, and to be collected, finally, fluid is discharged via the converging outlet.

Description

微型流體輸送裝置Miniature fluid delivery device

本案關於一種微型流體輸送裝置，尤指一種微型、靜音及快速傳輸高流量流體之微型流體傳輸裝置。 This case relates to a micro-fluid delivery device, in particular to a micro-fluid transmission device that transfers high-flow fluids in a miniature, silent, and rapid manner.

目前於各領域中，無論是醫藥、電腦科技、列印、能源等產業，產品均朝精緻化及微小化方向發展，其中，微型流體輸送裝置為其關鍵技術。因此，如何藉由創新結構突破其技術瓶頸，為發展之重要內容。舉例來說，於醫藥產業中，許多需要採用流體動力驅動之儀器或設備，例如，血壓器，通常採用傳統馬達以及流體閥來達成其流體輸送之目的。然而，由於受限於傳統傳統馬達以及流體閥之體積限制，使得此類的儀器設備難以縮小其整體裝置的體積，故難以實現薄型化之目標，更無法達成可攜式之目的。此外，傳統馬達以及流體閥有著於作動時會產生噪音的問題，因而導致使用上的不便利及不舒適。 At present, in all fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization, of which, micro-fluid delivery devices are its key technology. Therefore, how to break through its technical bottlenecks through innovative structure is an important part of development. For example, in the pharmaceutical industry, many instruments or devices that need to be driven by fluid power, such as blood pressure devices, usually use traditional motors and fluid valves to achieve their fluid delivery purposes. However, due to the volume limitations of traditional motors and fluid valves, it is difficult for such instruments to reduce the volume of their overall devices, so it is difficult to achieve the goal of thinning, and it is impossible to achieve the purpose of being portable. In addition, conventional motors and fluid valves have the problem of generating noise when actuated, which leads to inconvenience and uncomfortable use.

為了發展一種可改善上述習知技術缺失，使採用流體傳輸裝置的儀器或設備達到體積小、微型化、靜音，且能同時具備快速傳輸高流量流體的功效，本案提供一種微型流體輸送裝置，以供產業上利用。 In order to develop a technology that can improve the lack of the above-mentioned conventional technology, so that instruments or equipment using fluid transmission devices can achieve small size, miniaturization, and quietness, and can simultaneously have the effect of quickly transmitting high-flow fluids, this case provides a micro-fluid delivery device to For industrial use.

本案之主要目的係提供一種微型流體輸送裝置，藉由一匯流板在其相對兩側整合相互對應之兩閥片、兩腔板以及兩微型泵，以快速輸出高流量之流體。利用微型泵，以壓電制動器的高頻振動來產生流體波動， 並在微型泵內之流道產生壓力梯度，使流體高速流動。此外，微型泵以壓電制動器驅動流體傳輸時所產生的噪音非常小。再者，閥片為可動薄片，藉由搭配匯流板之結構設計，閥片可因壓力差而被動作為流道之開關，使流體可單方向流動，並且流體可在流道內累積壓力後於匯流板集流輸出。當微型泵未被驅動時，流體可藉由匯流板及閥片的配合，快速被排出至匯流板外部以完成洩壓作業。如此，本案所提供之微型流體輸送裝置暨能達到薄型化且噪音小的功效，又具備快速傳輸高流量之流體的效益。 The main objective of this case is to provide a micro-fluid conveying device, which integrates two valve plates, two chamber plates and two micro-pumps on opposite sides of a manifold to quickly output high-flow fluid. Using a micro-pump, the high frequency vibration of the piezoelectric brake generates fluid fluctuations, And a pressure gradient is generated in the flow channel in the micropump to make the fluid flow at high speed. In addition, the noise generated when the micro pump uses a piezoelectric brake to drive fluid transmission is very small. In addition, the valve plate is a movable sheet. With the structural design of the manifold, the valve plate can be passively used as a switch of the flow channel due to the pressure difference, so that the fluid can flow in one direction, and the fluid can accumulate in the flow channel after Collector board collector output. When the micro pump is not driven, the fluid can be quickly discharged to the outside of the manifold by the cooperation of the manifold and the valve plate to complete the pressure relief operation. In this way, the micro-fluid delivery device provided in this case can achieve the effect of thinning and low noise, and has the benefit of quickly transmitting high-flow fluid.

本案之一較廣義實施態樣為一種微型流體輸送裝置，包含：一匯流板、兩閥片、兩腔板以及兩微型泵。匯流板具有一第一表面、一第二表面、一匯流通道以及一洩流通道。匯流板之第二表面與匯流板之第一表面相對設置。匯流板之第一表面設置有一第一匯流槽、一第一洩流板凸部以及一第一洩流槽。第一洩流板凸部凸設於第一洩流槽中且周圍由第一洩流槽圍繞。第一匯流槽與第一洩流槽之間具有一第一連通槽供與連通。第二表面設置有一第二匯流槽、一第二洩流板凸部以及一第二洩流槽。第二洩流板凸部凸設於第二洩流槽中且周圍由第二洩流槽圍繞。第二匯流槽與第二洩流槽之間具有一第二連通槽供與連通。匯流通道連通一匯流出口，並連通在第一匯流槽及第二匯流槽之間。又洩流通道連通一洩流出口，並連通在第一洩流板凸部及第二洩流板凸部相互對應中心處。兩閥片分別為第一閥片及第二閥片。第一閥片承置於匯流板之第一表面上，且對應於第一匯流槽處設有一第一閥孔。第一閥片抵觸於第一洩流板凸部而封閉洩流通道。而第二閥片承置於匯流板之第二表面上，且對應於第二洩流槽處設有一第二閥孔。第二閥片抵觸於第二匯流板凸部而封閉洩流通道。兩腔板分別為第一腔板 及第二腔板。第一腔板具有一第一組接表面、一第一腔板凹槽、一第一腔板凸部以及至少一第一連通道。第一腔板凸部設置於第一組接表面上，且第一組接表面承置於第一閥片上，使得第一腔板凸部抵觸第一閥片而封閉第一閥孔。第一連通道自第一組接表面貫穿至第一腔板凹槽。第二腔板具有一第二組接表面、一第二腔板凹槽、一第二腔板凸部以及至少一第二連通道。第二腔板凸部設置於第二組接表面上，且第二組接表面承置於第二閥片上，使得第二腔板凸部抵觸第二閥片而封閉第二閥孔。第二連通道自第二組接表面貫穿至第二腔板凹槽。兩微型泵分別為第一微型泵及第二微型泵。第一微型泵置設定位於第一腔板之第一腔板凹槽中，並封閉第一腔板凹槽，供以運作並輸送流體至其中。第二微型泵置設定位於第二腔板之第二腔板凹槽中，並封閉第二腔板凹槽，供以運作並輸送流體至其中。藉此，第一微型泵以及第二微型泵同時運作時，分別供輸流體至第一腔板之第一腔板凹槽中以及第二腔板之第二腔板凹槽中。接著，流體通過第一腔板以及第二腔板之第一連通道及第二連通道後分別推動第一閥片及第二閥片，促使第一閥片自第一腔板之第一腔板凸部分離，以及促使第二閥片自第二腔板之第二腔板凸部分離，使得流體得以分別通過第一閥片之第一閥孔以及第二閥片之第二閥孔，進而流通至匯流板之匯流通道中以集壓於匯流出口流出。 One of the broader implementation aspects of this case is a micro-fluid delivery device, which includes: a manifold, two valve plates, two chamber plates and two micro-pumps. The collector plate has a first surface, a second surface, a collector channel and a drain channel. The second surface of the busbar is opposite to the first surface of the busbar. The first surface of the collector plate is provided with a first collector groove, a first drain plate protrusion and a first drain groove. The convex portion of the first drain plate is convexly arranged in the first drain groove and is surrounded by the first drain groove. A first communication groove is provided between the first merger groove and the first drain groove for communication. The second surface is provided with a second confluent groove, a second drain plate protrusion and a second drain groove. The convex portion of the second drain plate is convexly disposed in the second drain groove and is surrounded by the second drain groove. A second communication groove is provided between the second merger groove and the second drain groove for communication. The confluence channel communicates with a confluence outlet and communicates between the first confluence groove and the second confluence groove. The drain channel communicates with a drain outlet and communicates with the center of the first drain plate convex portion and the second drain plate convex portion corresponding to each other. The two valve plates are the first valve plate and the second valve plate respectively. The first valve piece is supported on the first surface of the bus plate, and a first valve hole is provided at the position corresponding to the first bus groove. The first valve piece abuts against the convex portion of the first drain plate to close the drain channel. The second valve plate is supported on the second surface of the confluence plate, and is provided with a second valve hole corresponding to the second drain groove. The second valve piece abuts against the convex portion of the second manifold plate to close the drain passage. The two chamber plates are the first chamber plate And the second cavity plate. The first cavity plate has a first assembly surface, a first cavity plate groove, a first cavity plate protrusion and at least one first connecting channel. The convex portion of the first cavity plate is disposed on the first assembly surface, and the first assembly surface bears on the first valve plate, so that the convex portion of the first cavity plate contacts the first valve plate to close the first valve hole. The first connecting channel penetrates from the first assembly surface to the first cavity plate groove. The second cavity plate has a second assembly surface, a second cavity plate groove, a second cavity plate protrusion and at least one second connecting channel. The second cavity plate convex portion is disposed on the second assembly surface, and the second assembly surface is placed on the second valve plate, so that the second cavity plate convex portion abuts the second valve plate to close the second valve hole. The second connecting channel penetrates from the second assembly surface to the second cavity plate groove. The two micropumps are the first micropump and the second micropump. The first micropump is set in the first cavity plate groove of the first cavity plate and closes the first cavity plate groove for operation and delivery of fluid to it. The second micropump is set in the groove of the second chamber plate of the second chamber plate and closes the groove of the second chamber plate for operation and delivery of fluid into it. Thereby, when the first micropump and the second micropump operate simultaneously, fluid is supplied to the first cavity plate groove of the first cavity plate and the second cavity plate groove of the second cavity plate, respectively. Then, after the fluid passes through the first and second connecting channels of the first cavity plate and the second cavity plate, it pushes the first valve plate and the second valve plate, respectively, so as to urge the first valve plate from the first cavity of the first cavity plate The separation of the plate protrusions and the separation of the second valve plate from the second cavity plate protrusions of the second cavity plate, so that the fluid can pass through the first valve hole of the first valve plate and the second valve hole of the second valve plate, Furthermore, it flows into the confluence channel of the confluence plate to collect pressure at the confluence outlet and flow out.

1‧‧‧匯流板 1‧‧‧Combination board

10a‧‧‧第一表面 10a‧‧‧First surface

10b‧‧‧第二表面 10b‧‧‧Second surface

11‧‧‧匯流通道 11‧‧‧Confluence channel

12‧‧‧洩流通道 12‧‧‧Discharge channel

13a‧‧‧第一匯流槽 13a‧‧‧First Confluence Trough

13b‧‧‧第二匯流槽 13b‧‧‧Secondary manifold

14a‧‧‧第一洩流板凸部 14a‧‧‧The first spout convex part

14b‧‧‧第二洩流板凸部 14b‧‧‧Second spout convex

15a‧‧‧第一洩流槽 15a‧‧‧First chute

15b‧‧‧第二洩流槽 15b‧‧‧Second chute

16a‧‧‧第一連通槽 16a‧‧‧The first communication slot

16b‧‧‧第二連通槽 16b‧‧‧Second communication groove

17‧‧‧匯流出口 17‧‧‧ Confluence exit

18‧‧‧洩流出口 18‧‧‧ Outlet

19‧‧‧卡榫孔 19‧‧‧ tenon hole

2a‧‧‧第一閥片 2a‧‧‧First valve

2b‧‧‧第二閥片 2b‧‧‧Second valve plate

20‧‧‧第一接觸面 20‧‧‧First contact surface

21‧‧‧第二接觸面 21‧‧‧Second contact surface

22a‧‧‧第一閥孔 22a‧‧‧First valve hole

22b‧‧‧第二閥孔 22b‧‧‧Second valve hole

23a‧‧‧第一匯流凹部片 23a‧‧‧First Concave Recess

23b‧‧‧第二匯流凹部片 23b‧‧‧Second Convergence Recess

24a‧‧‧第一洩流凹部片 24a‧‧‧The first relief concave piece

24b‧‧‧第二洩流凹部片 24b‧‧‧Second drain recess

25‧‧‧定位孔 25‧‧‧Locating hole

3a‧‧‧第一腔板 3a‧‧‧First chamber plate

3b‧‧‧第二腔板 3b‧‧‧Second cavity plate

30a‧‧‧第一組接表面 30a‧‧‧The first group of connecting surface

30b‧‧‧第二組接表面 30b‧‧‧Second group connection surface

31a‧‧‧第一腔板凹槽 31a‧‧‧The first cavity plate groove

31b‧‧‧第二腔板凹槽 31b‧‧‧The second cavity plate groove

32a‧‧‧第一腔板凸部 32a‧‧‧The convex part of the first cavity plate

32b‧‧‧第二腔板凸部 32b‧‧‧Convex part of the second cavity

33a‧‧‧第一連通道 33a‧‧‧The first channel

33b‧‧‧第二連通道 33b‧‧‧The second channel

34‧‧‧卡榫 34‧‧‧ tenon

4a‧‧‧第一微型泵 4a‧‧‧First micropump

4b‧‧‧第二微型泵 4b‧‧‧Second micropump

41‧‧‧進流板 41‧‧‧Inflow board

41a‧‧‧進流孔 41a‧‧‧Inflow hole

41b‧‧‧匯流排孔 41b‧‧‧Bus hole

41c‧‧‧匯流腔室 41c‧‧‧Confluence chamber

42‧‧‧共振片 42‧‧‧Resonance

42a‧‧‧中空孔洞 42a‧‧‧Hollow hole

42b‧‧‧可動部 42b‧‧‧Moving part

43‧‧‧壓電致動器 43‧‧‧ Piezo Actuator

43a‧‧‧懸浮板 43a‧‧‧Suspended board

43b‧‧‧外框 43b‧‧‧frame

43c‧‧‧支架 43c‧‧‧Bracket

43d‧‧‧壓電片 43d‧‧‧ Piezoelectric film

43e‧‧‧間隙 43e‧‧‧ gap

43f‧‧‧凸部 43f‧‧‧Convex

44‧‧‧第一絕緣片 44‧‧‧First insulation sheet

45‧‧‧導電片 45‧‧‧Conductive sheet

46‧‧‧第二絕緣片 46‧‧‧Second insulation sheet

47‧‧‧共振腔室 47‧‧‧Resonance chamber

第1圖所示為本案微型流體輸送裝置之立體外觀示意圖。 Figure 1 shows a schematic perspective view of the micro-fluid delivery device of this case.

第2圖所示為本案微型流體輸送裝置之俯視示意圖。 Figure 2 shows a schematic top view of the micro-fluid delivery device of this case.

第3圖所示為本案微型流體輸送裝置之立體分解示意圖。 Figure 3 shows a three-dimensional exploded schematic view of the micro-fluid delivery device of the present case.

第4圖所示為第2圖之微型流體輸送裝置於C-C剖面線所視得之剖面示意圖。 FIG. 4 is a schematic cross-sectional view of the micro-fluid delivery device of FIG. 2 taken along the line C-C.

第5A圖所示為本案微型流體輸送裝置之匯流板自俯視角度所視得之立體示意圖。 FIG. 5A is a perspective schematic view of the collector plate of the micro-fluid conveying device of the present invention as viewed from above.

第5B圖所示為本案微型流體輸送裝置之匯流板自仰視角度所視得之立體示意圖。 FIG. 5B is a perspective schematic view of the confluence plate of the micro-fluid delivery device of the present invention as viewed from above.

第6A圖所示為本案微型流體輸送裝置之第一閥片自俯視角度所視得之立體示意圖。 FIG. 6A is a schematic perspective view of the first valve piece of the micro-fluid delivery device of the present invention viewed from a top view.

第6B圖所示為本案微型流體輸送裝置之第一閥片自仰視角度所視得之立體示意圖。 FIG. 6B is a schematic perspective view of the first valve piece of the micro-fluid delivery device of the present invention viewed from an upward angle.

第7A圖所示為本案微型流體輸送裝置之第一腔板自俯視角度所視得之立體示意圖。 FIG. 7A is a schematic perspective view of the first chamber plate of the micro-fluid delivery device of the present invention viewed from a top view.

第7B圖所示為本案微型流體輸送裝置之第一腔板自仰視角度所視得之立體示意圖。 FIG. 7B is a schematic perspective view of the first chamber plate of the micro-fluid delivery device of the present invention viewed from an upward angle.

第8A圖所示為本案微型流體輸送裝置之第一微型泵自俯視角度所視得之立體分解示意圖。 Figure 8A shows a three-dimensional exploded schematic view of the first micro-pump of the micro-fluid delivery device of the present invention as viewed from above.

第8B圖所示為本案微型流體輸送裝置之第一微型泵自仰視角度所視得之立體分解示意圖。 FIG. 8B is a three-dimensional exploded schematic view of the first micro-pump of the micro-fluid delivery device of the present invention as viewed from above.

第9A圖所示為本案微型流體輸送裝置之第一微型泵之剖面示意圖。 Figure 9A shows a schematic cross-sectional view of the first micropump of the microfluidic delivery device of the present invention.

第9B至9D圖所示為第9A圖中本案微型流體輸送裝置之第一微型泵之作動示意圖。 Figures 9B to 9D are schematic diagrams of the operation of the first micropump of the microfluidic delivery device of Figure 9A.

第10A所示為第4圖之微型流體輸送裝置之作動示意圖。 FIG. 10A is a schematic diagram of the operation of the micro-fluid delivery device of FIG. 4.

第10B所示為第4圖之微型流體輸送裝置之作動後匯流板集流示意圖。 FIG. 10B is a schematic diagram of the collector of the micro-fluid delivery device of FIG. 4 after the actuation.

第10C圖所示為第4圖之微型流體輸送裝置之洩壓作業示意圖。 Figure 10C is a schematic diagram of the pressure relief operation of the micro-fluid delivery device of Figure 4.

體現本案特徵與優點的一些典型實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化，其皆不脫離本案的範圍，且其中的說明及圖示在本質上當作說明之用，而非用以限制本案。 Some typical embodiments embodying the characteristics and advantages of this case will be described in detail in the description in the following paragraphs. It should be understood that this case can have various changes in different forms, which all do not deviate from the scope of this case, and the descriptions and illustrations therein are essentially used for explanation rather than to limit this case.

請參閱第1圖、第2圖、第3圖、第5A圖以及第5B圖，本案提供一種微型流體輸送裝置，包含有一匯流板1、第一閥片2a、第二閥片2b、第一腔板3a、第二腔板3b及第一微型泵4a、第二微型泵4b。匯流板1具有一第一表面10a以及一第二表面10b，且第一表面10a及第二表面10b為相對設置之兩個表面。第一閥片2a、第一腔板3a及第一微型泵4a依序堆疊並定位組裝於匯流板1之第一表面10a上，以及第二閥片2b、第二腔板3b及第二微型泵4b依序堆疊並定位組裝於匯流板1之第二表面10b上，以組構成如第4圖所示微型流體輸送裝置之整體結構。第一微型泵4a及第二微型泵4b受驅動控制，用以輸送流體至匯流板1，並且流體在匯流板1內集流後，被快速地輸出。在本實施例中，匯流板1、第一閥片2a、第二閥片2b、第一腔板3a、第二腔板3b、第一微型泵4a以及第二微型泵4b皆為方形形態，但不以此為限。 Please refer to FIG. 1, FIG. 2, FIG. 3, FIG. 5A and FIG. 5B, this case provides a micro-fluid delivery device, including a manifold plate 1, a first valve plate 2a, a second valve plate 2b, the first The cavity plate 3a, the second cavity plate 3b, and the first micropump 4a and the second micropump 4b. The bus bar 1 has a first surface 10a and a second surface 10b, and the first surface 10a and the second surface 10b are oppositely disposed surfaces. The first valve disc 2a, the first cavity plate 3a and the first micropump 4a are sequentially stacked and positioned and assembled on the first surface 10a of the manifold plate 1, and the second valve disc 2b, the second cavity plate 3b and the second micropump The pumps 4b are sequentially stacked and positioned and assembled on the second surface 10b of the manifold 1 to form an overall structure of the micro-fluid delivery device as shown in FIG. The first micropump 4a and the second micropump 4b are driven and controlled to deliver fluid to the manifold plate 1, and after the fluid is collected in the manifold plate 1, it is quickly output. In this embodiment, the manifold plate 1, the first valve plate 2a, the second valve plate 2b, the first chamber plate 3a, the second chamber plate 3b, the first micropump 4a and the second micropump 4b are all in a square shape. But not limited to this.

值得注意的是，由於第一閥片2a與第二閥片2b的結構相同且其設置方式互相對應，第一腔板3a與第二腔板3b的結構相同且其設置方式互相對應，以及第一微型泵4a與第二微型泵4b的結構相同且其設置方式互相對應。因此，以下將只針對第一閥片2a、第一腔板3a以及做第一微型泵4a進一步的敘述。 It is worth noting that, since the structure of the first valve plate 2a and the second valve plate 2b are the same and the arrangement of them corresponds to each other, the structure of the first cavity plate 3a and the second cavity plate 3b are the same and the arrangement of each other corresponds, and the first The structure of one micro-pump 4a and the second micro-pump 4b are the same and the arrangement of them corresponds to each other. Therefore, in the following, only the first valve plate 2a, the first chamber plate 3a, and the first micropump 4a will be further described.

請參閱第3圖、第4圖、第5A圖以及第5B圖，匯流板1更具有一匯流通道11、一洩流通道12、一匯流出口17、一洩流出口18以及複數個卡榫 孔19。匯流通道11以及洩流通道12分別自第一表面10a貫穿至第二表面10b。第一表面10a設置有一第一匯流槽13a、一第一洩流板凸部14a、一第一洩流槽15a以及一第一連通槽16a。第一匯流槽13a、第一洩流槽15a以及第一連通槽16a凹陷設置在第一表面10a。第一洩流板凸部14a凸設於第一洩流槽15a中，且周圍由第一洩流槽15a圍繞。第一連通槽16a連通第一匯流槽13a以及第一洩流槽15a。匯流通道11連通設置在第一表面10a的第一匯流槽13a以及相對設置在第二表面10b的一第二匯流槽13b。洩流通道12連通設置在第一表面10a的第一洩流板凸部14a以及相對設置在第二表面10b的一第二洩流板凸部14b的相互對應中心處。匯流出口17連通匯流通道11以及微型流體輸送裝置的外部。洩流出口18連通洩流通道12以及微型流體輸送裝置的外部。部分的卡榫孔19凹設於第一表面10a上。在本實施例中，匯流板1具有四個卡榫孔19，且分別設置於匯流板1的四個角落處，但不以此為限。在其他實施例中，卡榫孔19的數量可依照實際需求變動。值得注意的是，由於第一表面10a所設置的結構與第二表面10b上所設置的結構相同且互相對應，因此，本揭露只針對第一表面10a所設置的結構做進一步的敘述，第二表面10b所對應設置的結構，例如：第二匯流槽13b、第二洩流板凸部14b、一第二洩流槽15b以及一第二連通槽16b，將不加贅述。 Please refer to FIG. 3, FIG. 4, FIG. 5A and FIG. 5B, the busbar 1 further has a confluent channel 11, a drain channel 12, a confluent outlet 17, a drain outlet 18 and a plurality of latches Hole 19. The confluence channel 11 and the drain channel 12 respectively penetrate from the first surface 10a to the second surface 10b. The first surface 10a is provided with a first confluence groove 13a, a first relief plate protrusion 14a, a first relief groove 15a, and a first communication groove 16a. The first merger groove 13a, the first drain groove 15a, and the first communication groove 16a are concavely provided on the first surface 10a. The first drain plate convex portion 14a is protruded in the first drain groove 15a, and is surrounded by the first drain groove 15a. The first communication groove 16a communicates with the first merger groove 13a and the first drain groove 15a. The bus channel 11 communicates with a first bus groove 13a provided on the first surface 10a and a second bus groove 13b oppositely provided on the second surface 10b. The drain channel 12 communicates with the corresponding center of the first drain plate protrusion 14a provided on the first surface 10a and a second drain plate protrusion 14b oppositely provided on the second surface 10b. The confluence outlet 17 communicates with the confluence channel 11 and the outside of the micro-fluid delivery device. The drain outlet 18 communicates with the drain channel 12 and the outside of the micro-fluid delivery device. Part of the locking holes 19 are recessed on the first surface 10a. In this embodiment, the busbar 1 has four latch holes 19, and is respectively disposed at the four corners of the busbar 1, but it is not limited thereto. In other embodiments, the number of the latch holes 19 can be changed according to actual needs. It is worth noting that since the structure provided on the first surface 10a is the same as and corresponding to the structure provided on the second surface 10b, this disclosure only further describes the structure provided on the first surface 10a. The structure corresponding to the surface 10b, for example, the second collecting groove 13b, the second drain plate convex portion 14b, a second drain groove 15b, and a second communication groove 16b, will not be described in detail.

請參閱第4圖、第6A圖以及第6B圖，第一閥片2a具有一第一接觸面20、一第二接觸面21、一第一閥孔22a、一第一匯流凹部片23a、一第一洩流凹部片24a以及複數個定位孔25。第一接觸面20及第二接觸面21為相對設置之兩個表面。第一匯流凹部片23a以及第一洩流凹部片24a設置於第一閥片2a的第一接觸面20以及第二接觸面21之間，且第一匯流凹部片23a以及第一洩流凹部片24a不凸出於第一閥片2a的第一接觸面20 以及第二接觸面21。第一閥孔22a設置於並貫穿第一閥片2a的第一匯流凹部片23a，且與匯流板1之第一匯流槽13a相對應設置。第一閥片2a的第一洩流凹部片24a抵觸於匯流板1之第一洩流板凸部14a而常態封閉匯流板1之洩流通道12。定位孔25自第一閥片2a的第一接觸面20貫穿至第二接觸面21。定位孔25在位置上分別對準匯流板1的卡榫孔19。在本實施例中，第一閥片2a具有四個定位孔25，在其他實施例中，定位孔25的數量可依照實際需求變動。值得注意的是，由於第一閥片2a的結構與第二閥片2b的結構相同，且其細部結構之設置方式互相對應，因此，本案僅針對第一閥片2a結構做進一步的敘述，第二閥片2b的對應結構，例如：一第二閥孔22b、一第二匯流凹部片23b、一第二洩流凹部片24b及定位孔(未圖式)，將不加贅述。 Please refer to FIG. 4, FIG. 6A and FIG. 6B, the first valve plate 2a has a first contact surface 20, a second contact surface 21, a first valve hole 22a, a first bus recess 23a, a The first drain recess piece 24a and the plurality of positioning holes 25. The first contact surface 20 and the second contact surface 21 are two opposite surfaces. The first converging recessed piece 23a and the first drain recessed piece 24a are provided between the first contact surface 20 and the second contact surface 21 of the first valve piece 2a, and the first convergent recessed piece 23a and the first drain recessed piece 24a does not protrude from the first contact surface 20 of the first valve disc 2a 之间的第二contact面21。 And the second contact surface 21. The first valve hole 22a is provided in and penetrates the first converging recess piece 23a of the first valve piece 2a, and corresponds to the first confluent groove 13a of the confluent plate 1. The first relief recess piece 24a of the first valve disc 2a abuts against the first relief plate protrusion 14a of the manifold plate 1 and normally closes the drain passage 12 of the manifold plate 1. The positioning hole 25 penetrates from the first contact surface 20 of the first valve plate 2a to the second contact surface 21. The positioning holes 25 are respectively aligned with the locking holes 19 of the bus bar 1 in position. In this embodiment, the first valve plate 2a has four positioning holes 25. In other embodiments, the number of positioning holes 25 may vary according to actual needs. It is worth noting that, since the structure of the first valve disc 2a is the same as the structure of the second valve disc 2b, and the detailed structure of the arrangement corresponds to each other, therefore, this case will only further describe the structure of the first valve disc 2a. The corresponding structures of the two valve plates 2b, such as: a second valve hole 22b, a second convergent recessed piece 23b, a second drain recessed piece 24b, and a positioning hole (not shown), will not be described in detail.

請參閱第4圖、第7A圖及第7B圖，第一腔板3a具有一第一組接表面30a、一第一腔板凹槽31a、一第一腔板凸部32a、至少一第一連通道33a以及複數個卡榫34。第一組接表面30a與第一腔板凹槽31a分別設置在第一腔板3a的相對應兩側。第一腔板凸部32a凸出於第一組接表面30a，且第一組接表面30a承置第一閥片2a上，使得第一腔板凸部32a抵觸於第一閥片2a之第一匯流凹部片23a而常態封閉第一閥孔22a。至少一第一連通道33a自第一組接表面30a向第一腔板凹槽31a延伸並貫穿第一腔板3a，使得至少一第一連通道33a與第一腔板凹槽31a相連通。在本實施例中，第一腔板3a具有三個第一連通道33a，但不以此為限。在其他實施例中，至少一第一連通道33a的數量可依照實際需求變動。在本實施例中，三個第一連通道33a以等角度差排列圍繞第一腔板凸部32a設置。在其他實施例中，第一連通道3a之排列方式可以依照實際需求做不同的變化。 Please refer to FIG. 4, FIG. 7A and FIG. 7B, the first cavity plate 3a has a first assembly surface 30a, a first cavity plate groove 31a, a first cavity plate protrusion 32a, at least a first连channel 33a and a plurality of latches 34. The first connection surface 30a and the first cavity plate groove 31a are respectively disposed on the corresponding two sides of the first cavity plate 3a. The first cavity plate protrusion 32a protrudes from the first assembly surface 30a, and the first assembly surface 30a receives the first valve plate 2a, so that the first cavity plate protrusion 32a abuts the first valve plate 2a. A converging recessed piece 23a normally closes the first valve hole 22a. At least one first connecting channel 33a extends from the first assembly surface 30a toward the first cavity plate groove 31a and penetrates the first cavity plate 3a, so that the at least one first connecting channel 33a communicates with the first cavity plate groove 31a. In this embodiment, the first cavity plate 3a has three first connecting channels 33a, but it is not limited thereto. In other embodiments, the number of at least one first connecting channel 33a can be changed according to actual needs. In this embodiment, the three first connecting channels 33a are arranged around the first cavity plate convex portion 32a with an equal angular difference. In other embodiments, the arrangement of the first connecting channels 3a can be changed according to actual needs.

請參閱第4圖、第5A圖、第5B圖、第6A圖、第6B圖、第7A圖及第7B圖，卡榫34凸設於第一組接表面30a之上，且在位置上分別與匯流板1的卡榫孔19以及第一閥片2a的定位孔25相對準。利用第一腔板3a的卡榫34分別伸入第一閥片2a的定位孔25以及匯流板1的卡榫孔19，使第一閥片2a承置定位於匯流板1的第一表面10a上，以及使第一組接表面30a承置於第一閥片2a上。在本實施例中，第一腔板3a具有四個卡榫34，但不以此為限。在其他實施例中，卡榫34的數量可依照實際需求做變動。在本實施例中，匯流板1的卡榫孔19、第一閥片2a的定位孔25以及第一腔板3a的卡榫34的數量互相對應。在其他實施例中，匯流板1的卡榫孔19、第一閥片2a的定位孔25以及第一腔板3a的卡榫34的數量可以不互相對應。值得注意的是，由於第一腔板3a的結構與第二腔板3b的結構相同，且其細部結構之設置方式互相對應，因此，本案僅針對第一腔板3a結構做進一步的敘述，第二腔板3b的對應結構，例如：一第二組接表面30b、一第二腔板凹槽31b、一第二腔板凸部32b、至少一第二連通道33b，將不加贅述。 Please refer to Figure 4, Figure 5A, Figure 5B, Figure 6A, Figure 6B, Figure 7A and Figure 7B, the tongue 34 is protrudingly arranged on the first group of connection surfaces 30a, and the positions are respectively Align with the locking hole 19 of the manifold plate 1 and the positioning hole 25 of the first valve plate 2a. The latch 34 of the first cavity plate 3a extends into the positioning hole 25 of the first valve plate 2a and the latch hole 19 of the manifold plate 1, so that the first valve plate 2a bears and is positioned on the first surface 10a of the manifold plate 1 And the first assembly surface 30a is placed on the first valve plate 2a. In this embodiment, the first cavity plate 3a has four latches 34, but it is not limited thereto. In other embodiments, the number of latches 34 can be changed according to actual needs. In this embodiment, the number of the tenon holes 19 of the busbar 1, the positioning holes 25 of the first valve plate 2a, and the tenons 34 of the first cavity plate 3a correspond to each other. In other embodiments, the number of the tenon holes 19 of the busbar 1, the positioning holes 25 of the first valve plate 2a, and the tenons 34 of the first cavity plate 3a may not correspond to each other. It is worth noting that, since the structure of the first cavity plate 3a is the same as the structure of the second cavity plate 3b, and the details of the arrangement of the structure correspond to each other, therefore, this case will only further describe the structure of the first cavity plate 3a. The corresponding structures of the two cavity plates 3b, such as: a second assembly surface 30b, a second cavity plate groove 31b, a second cavity plate protrusion 32b, and at least one second connecting channel 33b, will not be described in detail.

請參閱第4圖、第8A圖、第8B圖以及第9A圖，在本實施例中，第一微型泵4a以及第二微型泵4b分別為一流體泵浦，但不以此為限。值得注意的是，由於第一微型泵4a的結構與第二微型泵4b的結構相同，且其細部結構之設置方式互相對應，因此，以下將只針對第一微型泵4a結構做進一步的敘述，第二微型泵4b的結構在此將不加贅述。第一微型泵4a設置在第一腔板3a之第一腔板凹槽31a中，並封閉第一腔板凹槽31a，供以運作並輸送流體至第一腔板3a中。第一微型泵4a包括一進流板41、一共振片42、一壓電致動器43、一第一絕緣片44、一導電片45 以及一第二絕緣片46。進流板41、共振片42、壓電致動器43、第一絕緣片44、導電片45以及第二絕緣片46是依序堆疊組合。 Please refer to FIG. 4, FIG. 8A, FIG. 8B and FIG. 9A. In this embodiment, the first micropump 4a and the second micropump 4b are respectively a fluid pump, but not limited to this. It is worth noting that, since the structure of the first micropump 4a is the same as the structure of the second micropump 4b, and the detailed structure of the arrangement corresponds to each other, the following will only further describe the structure of the first micropump 4a, The structure of the second micropump 4b will not be repeated here. The first micropump 4a is disposed in the first cavity plate groove 31a of the first cavity plate 3a and closes the first cavity plate groove 31a for operation and delivery of fluid into the first cavity plate 3a. The first micropump 4a includes an inflow plate 41, a resonance plate 42, a piezoelectric actuator 43, a first insulating plate 44, and a conductive plate 45 与一个第一 insulating片46。 And a second insulating sheet 46. The inflow plate 41, the resonance sheet 42, the piezoelectric actuator 43, the first insulating sheet 44, the conductive sheet 45, and the second insulating sheet 46 are sequentially stacked and combined.

請繼續參閱第4圖、第8A圖、第8B圖以及第9A圖，進流板41具有至少一進流孔41a、至少一匯流排孔41b以及一匯流腔室41c。至少一匯流排孔41b是對應至少一進流孔41a而設置。進流孔41a供導入流體，匯流排孔41b引導自進流孔41a導入之流體匯流至匯流腔室41c。共振片42具有一中空孔洞42a以及一可動部42b。中空孔洞42a對應於進流板41之匯流腔室41c而設置。可動部42b圍繞中空孔洞42a而設置。共振片42與壓電致動器43共同形成一共振腔室47於其之間。因此，當壓電致動器43被驅動時，流體會由進流板41的至少一進流孔41a導入，流經至少一匯流排孔41b匯集至匯流腔室41c，再流經共振片42的中空孔洞42a，使得壓電致動器43與共振片42的可動部42b產生共振以傳輸流體。 Please continue to refer to FIG. 4, FIG. 8A, FIG. 8B, and FIG. 9A. The inlet plate 41 has at least one inlet hole 41a, at least one bus bar hole 41b, and a manifold chamber 41c. At least one bus bar hole 41b is provided corresponding to at least one inlet hole 41a. The inlet hole 41a is provided for introducing fluid, and the busbar hole 41b guides the fluid introduced from the inlet hole 41a to converge to the confluence chamber 41c. The resonance plate 42 has a hollow hole 42a and a movable portion 42b. The hollow hole 42 a is provided corresponding to the confluence chamber 41 c of the inlet plate 41. The movable portion 42b is provided around the hollow hole 42a. The resonance plate 42 and the piezoelectric actuator 43 together form a resonance chamber 47 therebetween. Therefore, when the piezoelectric actuator 43 is driven, the fluid will be introduced through at least one inlet hole 41a of the inlet plate 41, flow through at least one busbar hole 41b and be collected into the manifold chamber 41c, and then flow through the resonance plate 42 The hollow hole 42a causes the piezoelectric actuator 43 to resonate with the movable portion 42b of the resonance piece 42 to transmit the fluid.

請參閱第8A圖、第8B圖以及第9A圖，壓電致動器43包括一懸浮板43a、一外框43b、至少一支架43c以及一壓電片43d。在本實施例中，懸浮板43a具有一正方形形態，並可彎曲振動，但不以此為限。懸浮板43a具有一凸部43f。在本實施例中，懸浮板43a之所以採用正方形形態設計，乃由於相較於圓形的形態，正方形懸浮板43a之結構明顯具有省電之優勢。在共振頻率下操作之電容性負載，其消耗功率會隨共振頻率之上升而增加，因正方形懸浮板43a之共振頻率較圓形懸浮板低，故所消耗的功率亦會較低。然而，在其他實施例中，懸浮板的43a形態可依實際需求而變化。外框43b環繞設置於懸浮板43a之外側。至少一支架43c連接於懸浮板43a以及外框43b之間，以提供彈性支撐懸浮板43a的支撐力。壓電片43d具有一邊長，其小於或等於懸浮板43a之一邊長。且壓電片43d貼附於懸浮板43a之一表面上，用以施加驅動電壓以驅動懸浮 板43a彎曲振動。懸浮板43a、外框43b與至少一支架43c之間形成至少一間隙43e，用以供流體通過。凸部43f凸設於懸浮板43a之另一表面上。在本實施例中，懸浮片43a與凸部43f為利用一蝕刻製程製出的一體成型結構，但不以此為限。 Please refer to FIG. 8A, FIG. 8B and FIG. 9A, the piezoelectric actuator 43 includes a floating plate 43a, an outer frame 43b, at least one bracket 43c and a piezoelectric sheet 43d. In this embodiment, the suspension plate 43a has a square shape and can be flexed and vibrated, but not limited to this. The floating plate 43a has a convex portion 43f. In this embodiment, the reason why the suspension plate 43a adopts the square shape design is that compared to the circular shape, the structure of the square suspension plate 43a obviously has the advantage of power saving. For a capacitive load operating at a resonant frequency, its power consumption will increase with the increase of the resonant frequency. Since the resonant frequency of the square suspension plate 43a is lower than that of the circular suspension plate, the power consumption will also be lower. However, in other embodiments, the shape of 43a of the suspension plate may vary according to actual needs. The outer frame 43b is arranged around the outer side of the suspension plate 43a. At least one bracket 43c is connected between the suspension plate 43a and the outer frame 43b to provide a supporting force for elastically supporting the suspension plate 43a. The piezoelectric piece 43d has a side length that is less than or equal to one side length of the floating plate 43a. And the piezoelectric piece 43d is attached to a surface of the suspension plate 43a for applying a driving voltage to drive the suspension The plate 43a bends and vibrates. At least one gap 43e is formed between the floating plate 43a, the outer frame 43b and the at least one bracket 43c for the fluid to pass through. The convex portion 43f is convexly provided on the other surface of the floating plate 43a. In this embodiment, the suspension piece 43a and the convex portion 43f are an integrally formed structure manufactured by an etching process, but not limited to this.

請參閱第9A圖，在本實施例中，共振腔室47可利用在共振片42及壓電致動器43之外框43b之間所產生的間隙填充一材質，例如導電膠，但不以此為限，使得共振片42與懸浮板43a之間可維持一定的深度，進而可導引流體更迅速地流動。此外，因懸浮板43a與共振片42保持適當距離，使彼此的接觸干涉減少，噪音的產生也可被降低。在其他實施例中，可藉由增加壓電致動器43的外框43b的高度來減少填充在共振片42及壓電致動器43之外框43b之間的間隙之中的導電膠厚度。如此，在仍可使得懸浮板43a與共振片42保持適當距離的情況下，以避免第一微型泵4a的整體組裝過程因熱壓溫度及冷卻溫度而影響導電膠之填充厚度，更避免導電膠因熱脹冷縮因素影響到共振腔室47在組裝完成後的實際大小。在其他實施例中，懸浮板43a可以採以沖壓方式成形，使懸浮板43a的凸部43f遠離壓電片43d的一表面與外框43b的遠離壓電片43d的一表面形成非共平面，亦即凸部43f遠離壓電片43d的表面將高於外框43b遠離壓電片43d的表面。利用於外框43b遠離壓電片43d的表面上塗佈少量填充材質，例如：導電膠，以熱壓方式使壓電致動器43貼合於共振片42，進而使得壓電致動器43得以與共振片42組配結合。如此直接藉由將上述壓電致動器43之懸浮板43a採以沖壓方式成形，以構成共振腔室47的結構改良，共振腔室47得以透過調整壓電致動器43之懸浮板43a沖壓成形距離來完成，有效地簡化了調整共振腔室47的結構設計步驟。同時也達成簡化製程，縮短製程時間等優點。在本實施例中， 第一絕緣片44、導電片45及第二絕緣片46皆為框型的薄型片體，但不以此為限。 Please refer to FIG. 9A. In this embodiment, the resonance chamber 47 may be filled with a material, such as conductive glue, using the gap generated between the resonance plate 42 and the piezoelectric actuator 43 and the outer frame 43b. This limit is limited, so that a certain depth can be maintained between the resonance plate 42 and the suspension plate 43a, which can guide the fluid to flow more quickly. In addition, since the suspension plate 43a and the resonance sheet 42 are kept at an appropriate distance, the contact interference between them is reduced, and the generation of noise can also be reduced. In other embodiments, the thickness of the conductive adhesive filled in the gap between the resonance plate 42 and the piezoelectric actuator 43 outer frame 43b can be reduced by increasing the height of the outer frame 43b of the piezoelectric actuator 43 . In this way, under the condition that the suspension plate 43a and the resonance plate 42 can be kept at an appropriate distance, the entire assembly process of the first micropump 4a is prevented from affecting the filling thickness of the conductive adhesive due to the hot pressing temperature and the cooling temperature, and the conductive adhesive is also avoided. The actual size of the resonance chamber 47 after the assembly is completed due to the factors of thermal expansion and contraction. In other embodiments, the suspension plate 43a may be stamped to form a non-coplanar surface of the protrusion 43f of the suspension plate 43a away from the piezoelectric sheet 43d and the surface of the outer frame 43b away from the piezoelectric sheet 43d. That is, the surface of the convex portion 43f away from the piezoelectric sheet 43d will be higher than the surface of the outer frame 43b away from the piezoelectric sheet 43d. A small amount of filling material is applied to the surface of the outer frame 43b away from the piezoelectric sheet 43d, for example: conductive adhesive, and the piezoelectric actuator 43 is bonded to the resonance sheet 42 by hot pressing, so that the piezoelectric actuator 43 It can be combined with the resonance plate 42 in combination. In this way, by directly forming the suspension plate 43a of the piezoelectric actuator 43 by stamping to improve the structure of the resonance chamber 47, the resonance chamber 47 can be stamped by adjusting the suspension plate 43a of the piezoelectric actuator 43 The forming distance is completed, which effectively simplifies the structural design step of adjusting the resonance chamber 47. At the same time, it also has the advantages of simplifying the process and shortening the process time. In this embodiment, The first insulating sheet 44, the conductive sheet 45, and the second insulating sheet 46 are all frame-shaped thin sheets, but not limited thereto.

值得注意的是，第一微型泵4a之進流板41、共振片42、壓電致動器43、第一絕緣片44、導電片45以及第二絕緣片46係透過微機電的面型微加工技術所製成，且第二微型泵4b之細部元件結構亦透過微機電的面型微加工技術所所製成，藉此使第一微型泵4a與第二微型泵4b的體積縮小，以構成一微機電系統之微型泵。 It is worth noting that the inlet plate 41, the resonance plate 42, the piezoelectric actuator 43, the first insulating sheet 44, the conductive sheet 45, and the second insulating sheet 46 of the first micro-pump 4a pass through the micro-electromechanical Manufactured by processing technology, and the detailed component structure of the second micropump 4b is also manufactured by the surface micromachining technology of the micro-electromechanics, thereby reducing the volume of the first micropump 4a and the second micropump 4b, A micro pump that constitutes a micro electro mechanical system.

請繼續參閱第9B圖，在壓電致動器43作動流程中，壓電致動器43的壓電片43d被施加驅動電壓後產生形變，帶動懸浮板43a向遠離進流板41的方向位移，此時共振腔室47的容積提升，於共振腔室47內形成了負壓，便汲取匯流腔室41c內的流體進入共振腔室47內。同時，共振片42產生共振同步向遠離進流板41的方向位移，連帶增加了匯流腔室41c的容積。且因匯流腔室41c內的流體進入共振腔室47的關係，造成匯流腔室41c內同樣為負壓狀態，進而通過進流孔41a以及匯流排孔41b來吸取流體進入匯流腔室41c內。接著，如第9C圖所示，壓電片43d帶動懸浮板43a朝向進流板41位移，壓縮共振腔室47，同樣的，共振片42被懸浮板43a制動，產生共振而朝向進流板41位移，迫使同步推擠共振腔室47內的流體往上通過間隙43e進一步傳輸，以達到傳輸流體的效果。最後，如第9D圖所示，當懸浮板43a被帶動回復到未被壓電片43d帶動的狀態時，共振片42也同時被帶動而向遠離進流板41的方向位移，此時的共振片42將壓縮共振腔室47內的流體向間隙43e移動，並且提升匯流腔室41c內的容積，讓流體能夠持續地通過進流孔41a以及匯流排孔41b來匯聚於匯流腔室41c內。透過不斷地重複上述第9B圖至第9D圖所示之 第一微型泵4a以及第二微型泵4b作動步驟，使第一微型泵4a及第二微型泵4b能夠連續使流體高速流動，達到傳輸與輸出流體的操作。 Please continue to refer to FIG. 9B. In the actuation process of the piezoelectric actuator 43, the piezoelectric piece 43d of the piezoelectric actuator 43 is deformed when a driving voltage is applied, causing the suspension plate 43a to move away from the inlet plate 41. At this time, the volume of the resonance chamber 47 increases, and a negative pressure is formed in the resonance chamber 47, and the fluid in the confluence chamber 41c is drawn into the resonance chamber 47. At the same time, the resonance piece 42 generates resonance and moves in a direction away from the inlet plate 41, which increases the volume of the confluence chamber 41c. And because the fluid in the confluence chamber 41c enters the resonance chamber 47, the confluence chamber 41c is also in a negative pressure state, and then the fluid is sucked into the confluence chamber 41c through the inlet hole 41a and the busbar hole 41b. Next, as shown in FIG. 9C, the piezoelectric plate 43d drives the suspension plate 43a to move toward the inlet plate 41, compressing the resonance chamber 47. Similarly, the resonance plate 42 is braked by the suspension plate 43a and generates resonance toward the inlet plate 41 The displacement forces the fluid in the synchronously pushing resonance chamber 47 to be further transmitted upward through the gap 43e to achieve the effect of transmitting the fluid. Finally, as shown in FIG. 9D, when the floating plate 43a is driven back to the state not driven by the piezoelectric plate 43d, the resonance plate 42 is also driven to move away from the inlet plate 41 at the same time, the resonance at this time The sheet 42 moves the fluid in the compression resonance chamber 47 toward the gap 43e, and raises the volume in the confluence chamber 41c, so that the fluid can continue to converge in the confluence chamber 41c through the inflow hole 41a and the confluence row hole 41b. By continuously repeating the above shown in Figure 9B to 9D The first micro-pump 4a and the second micro-pump 4b operate steps, so that the first micro-pump 4a and the second micro-pump 4b can continuously make the fluid flow at a high speed to achieve the operation of transmitting and outputting the fluid.

如第3圖以及第10A圖所示，當第一微型泵4a及第二微型泵4b的壓電致動器43被驅動時，流體自第一微型泵4a之壓電致動器43的間隙43e輸出至第一腔板凹槽31a中，接著，如第10B圖所示，流體自第一微型泵4a之壓電致動器43的間隙43e輸出至第一腔板凹槽31a中後，通過至少一第一連通道33a流向第一閥片2a，並推動第一閥片2a的第一匯流凹部片23a，使得第一閥片2a自第一腔板3a的第一腔板凸部32a分離。因此，流體得以通過第一閥片2a的第一閥孔22a而進入匯流通道11；同樣地，第二微型泵4b之作動方式與第一微型泵4a相同，流體自第二微型泵4b之壓電致動器43的間隙43e輸出至第二腔板凹槽31b中，接著，如第10B圖所示，流體自第二微型泵4b之壓電致動器43的間隙43e輸出至第二腔板凹槽31b中後，通過至少一第二連通道33b流向第二閥片2b，並推動第二閥片2b的第一匯流凹部片23a，使得第二閥片2b自第二腔板3b的第二腔板凸部32b分離。因此，流體得以通過第二閥片2b的第二閥孔22b而進入匯流通道11。流體在匯流通道11匯集後，再由匯流出口17輸出。最後，如第3圖以及10C圖所示，當第一微型泵4a及第二微型泵4b的壓電致動器43不再被驅動時，流體自匯流出口17回流至匯流通道11內，再分別依序流經設置在匯流板1的第一表面10a的第一匯流槽13a以及第一連通槽16a進入第一洩流槽15a，以及分別依序流經設置在匯流板1的第二表面10b的第二匯流槽13b以及第二連通槽16b進入第二洩流槽15b。流體進入第一洩流槽15a以及第二洩流槽15b後分別推開第一閥片2a之第一洩流凹部片24a及第二閥片2b的第二洩流凹部片24b，使得第一閥片2a及第二閥片2b自匯流板1的第一洩流板凸部14a、第二洩流板 凸部14b分離。因此，流體得以進入洩流通道12，並在洩流通道12內匯集後自洩流出口18排出。 As shown in FIGS. 3 and 10A, when the piezoelectric actuators 43 of the first micropump 4a and the second micropump 4b are driven, fluid flows from the gap of the piezoelectric actuator 43 of the first micropump 4a 43e is output into the first cavity plate groove 31a, and then, as shown in FIG. 10B, after the fluid is output from the gap 43e of the piezoelectric actuator 43 of the first micropump 4a into the first cavity plate groove 31a, Flow to the first valve plate 2a through at least one first connecting channel 33a, and push the first confluent recessed plate 23a of the first valve plate 2a, so that the first valve plate 2a is separated from the first cavity plate convex portion 32a of the first cavity plate 3a Separate. Therefore, the fluid can enter the confluence channel 11 through the first valve hole 22a of the first valve disc 2a; similarly, the second micropump 4b operates in the same manner as the first micropump 4a, and the fluid pressure from the second micropump 4b The gap 43e of the electric actuator 43 is output to the second cavity plate groove 31b, and then, as shown in FIG. 10B, the fluid is output from the gap 43e of the piezoelectric actuator 43 of the second micropump 4b to the second cavity After the plate groove 31b, through the at least one second connecting channel 33b flows to the second valve plate 2b, and pushes the first converging recessed plate 23a of the second valve plate 2b, so that the second valve plate 2b from the second cavity plate 3b The second cavity plate protrusion 32b is separated. Therefore, the fluid can enter the confluence passage 11 through the second valve hole 22b of the second valve plate 2b. After the fluid is collected in the confluence channel 11, it is output from the confluence outlet 17. Finally, as shown in FIGS. 3 and 10C, when the piezoelectric actuators 43 of the first micropump 4a and the second micropump 4b are no longer driven, fluid flows back from the confluence outlet 17 into the confluence channel 11, and then Respectively flow through the first confluent groove 13a and the first communication groove 16a provided on the first surface 10a of the bus plate 1 into the first drain groove 15a, and respectively flow through the second The second merge groove 13b and the second communication groove 16b of the surface 10b enter the second drain groove 15b. After the fluid enters the first drain groove 15a and the second drain groove 15b, it pushes away the first drain recess 24a of the first valve disc 2a and the second drain recess 24b of the second valve disc 2b, respectively. The valve plate 2a and the second valve plate 2b are separated from the first drain plate protrusion 14a and the second drain plate of the manifold 1 The convex portion 14b is separated. Therefore, the fluid enters the drain channel 12 and is collected in the drain channel 12 and discharged from the drain outlet 18.

綜上所述，本案所提供一種微型流體輸送裝置，藉由一匯流板在其相對兩側整合相互對應之兩閥片、兩腔板以及兩微型泵，以集流並輸出高流量流體。利用微型泵以壓電致動器高頻振動作動產生流體波動，並在微型泵內流道產生壓力梯度，使流體高速流動。微型泵以壓電致動器傳輸流體所造成的噪音非常小，且閥片為可動薄片，並搭配集流板之集流洩壓流道的結構設計，可因壓力差而被動產生流道之開關，使流體單方向流動，並累積壓力於匯流板集流並輸出。當微型泵無運作時，流體可由匯流板之流道及閥片控制，快速排出匯流板外以完成洩壓作業。如此提供微型流體輸送裝置能達成薄型化、噪音小、同時具備快速傳輸高流量流體之效益。 In summary, the present invention provides a micro-fluid delivery device that integrates two valve plates, two chamber plates, and two micro-pumps on opposite sides of a manifold to collect and output high-flow fluid. The use of a micropump with high-frequency vibration of a piezoelectric actuator generates fluid fluctuations, and a pressure gradient is generated in the flow channel of the micropump to make the fluid flow at high speed. The noise caused by the transmission of fluid by the piezoelectric actuator is very small, and the valve plate is a movable sheet, and the structure design of the collector pressure relief flow channel of the collector plate can passively generate the flow channel due to the pressure difference. The switch makes the fluid flow in one direction and accumulates pressure on the manifold to collect and output. When the micro-pump is not in operation, the fluid can be controlled by the flow channel and valve plate of the manifold plate, and quickly discharged out of the manifold plate to complete the pressure relief operation. In this way, the provision of a micro-fluid delivery device can achieve thinness, low noise, and at the same time has the benefit of quickly transmitting high-flow fluids.

本案得由熟知此技術之人士任施匠思而為諸般修飾，然皆不脫如附申請專利範圍所欲保護者。 This case must be modified by anyone familiar with this technology, such as Shi Jiangsi, but none of them are as protected as the scope of the patent application.

1‧‧‧匯流板 1‧‧‧Combination board

3a‧‧‧第一腔板 3a‧‧‧First chamber plate

3b‧‧‧第二腔板 3b‧‧‧Second cavity plate

4a‧‧‧第一微型泵 4a‧‧‧First micropump

Claims (7)

一種微型流體輸送裝置，包含： 一匯流板，具有一第一表面、一第二表面、一匯流通道以及一洩流通道，其中該匯流板之該第二表面與該匯流板之該第一表面相對設置，該匯流板之該第一表面設置有一第一匯流槽、一第一洩流板凸部以及一第一洩流槽，該第一洩流板凸部凸設於該第一洩流槽中且周圍由該第一洩流槽圍繞，以及該第一匯流槽與該第一洩流槽之間具有一第一連通槽供與連通，而該第二表面設置有一第二匯流槽、一第二洩流板凸部以及一第二洩流槽，該第二洩流板凸部凸設於該第二洩流槽中且周圍由該第二洩流槽圍繞，以及該第二匯流槽與該第二洩流槽之間具有一第二連通槽供與連通，又該匯流通道連通一匯流出口，並連通在該第一匯流槽及該第二匯流槽之間，又該洩流通道連通一洩流出口，並連通在該第一洩流板凸部及該第二洩流板凸部相互對應中心處； 一第一閥片，承置於該匯流板之該第一表面上，且對應於該第一匯流槽處設有一第一閥孔，該第一閥片抵觸於該第一洩流板凸部而封閉該洩流通道； 一第二閥片，承置於該匯流板之該第二表面上，且對應於該第二匯流槽處設有一第二閥孔，該第二閥片抵觸於該第二洩流板凸部而封閉該洩流通道； 一第一腔板，具有一第一組接表面、一第一腔板凹槽、一第一腔板凸部以及至少一第一連通道，該第一腔板凸部設置於該第一組接表面上，且該第一組接表面承置於該第一閥片上，使得該第一腔板凸部抵觸該第一閥片而封閉該第一閥孔，又該第一連通道自該第一組接表面貫穿至該第一腔板凹槽； 一第二腔板，具有一第二組接表面、一第二腔板凹槽、一第二腔板凸部以及至少一第二連通道，該第二腔板凸部設置於該第二組接表面上，且該第二組接表面承置於該第二閥片上，使得該第二腔板凸部抵觸該第二閥片而封閉該第二閥孔，又該第二連通道自該第二組接表面貫穿至該第二腔板凹槽； 一第一微型泵，置設定位於該第一腔板之該第一腔板凹槽中，並封閉該第一腔板凹槽，供以運作並輸送流體至其中；以及 一第二微型泵，置設定位於該第二腔板之該第二腔板凹槽中，並封閉該第二腔板凹槽，供以運作並輸送流體至其中； 藉此，該第一微型泵以及該第二微型泵同時運作時，分別供輸流體至該第一腔板之該第一腔板凹槽中以及該第二腔板之該第二腔板凹槽中，接著，流體通過該第一腔板以及該第二腔板之該第一連通道及該第二連通道後分別推動該第一閥片及該第二閥片，使該第一閥片自該第一腔板之該第一腔板凸部分離，以及使該第二閥片自該第二腔板之該第二腔板凸部分離，使得流體得以分別通過該第一閥片之該第一閥孔以及該第二閥片之該第二閥孔，進而流通至該匯流板之該匯流通道中，以集壓於該匯流出口流出。A micro-fluid conveying device includes: a collector plate having a first surface, a second surface, a collector channel and a drain channel, wherein the second surface of the collector plate and the first surface of the collector plate Oppositely, the first surface of the collector plate is provided with a first collector groove, a first drain plate convex portion and a first drain groove, the first drain plate convex portion is convexly arranged on the first drain The groove is surrounded by the first drain groove, and there is a first communication groove between the first drain groove and the first drain groove for communication, and the second surface is provided with a second drain groove , A second drain plate protrusion and a second drain groove, the second drain plate protrusion is protruded in the second drain groove and surrounded by the second drain groove, and the second A second communication groove is provided for communication between the confluence tank and the second drain groove, and the confluence channel communicates with a confluence outlet, and is connected between the first confluence groove and the second confluence groove. The flow channel communicates with a drain outlet and communicates with the center of the convex portion of the first drain plate and the convex portion of the second drain plate; a first valve plate is placed on the first surface of the manifold There is a first valve hole corresponding to the first confluence groove, the first valve plate abuts against the convex portion of the first drain plate to close the drain channel; a second valve plate is placed on the A second valve hole is provided on the second surface of the manifold plate and corresponding to the second manifold groove, the second valve plate abuts against the convex portion of the second drain plate to close the drain channel; a first The cavity plate has a first assembly surface, a first cavity plate groove, a first cavity plate protrusion and at least one first connecting channel, the first cavity plate protrusion is disposed on the first assembly surface , And the first set of receiving surfaces is placed on the first valve plate, so that the first cavity plate convex portion touches the first valve plate to close the first valve hole, and the first connecting channel is from the first group The connection surface penetrates into the first cavity plate groove; a second cavity plate has a second assembly surface, a second cavity plate groove, a second cavity plate protrusion and at least one second connecting channel, the The second cavity plate convex portion is disposed on the second assembly surface, and the second assembly surface is received on the second valve plate, so that the second cavity plate convex portion interferes with the second valve plate to close the first Two valve holes, and the second connecting channel penetrates from the second assembly surface to the second cavity plate groove; a first micropump is set in the first cavity plate groove of the first cavity plate , And close the groove of the first cavity plate for operation and delivery of fluid to it; and a second micropump, set in the groove of the second cavity plate of the second cavity plate, and close the second Cavity plate grooves for operation and delivery of fluids; thereby, when the first micropump and the second micropump operate simultaneously, fluid is supplied to the first cavity plate grooves of the first cavity plate respectively In the groove of the second cavity plate of the second cavity plate, and then, the fluid passes through the first and second connecting channels of the first cavity plate and the second cavity plate, respectively, and pushes the first The valve plate and the second valve plate separate the first valve plate from the first cavity plate convex portion of the first cavity plate, and separate the second valve plate from the second cavity plate of the second cavity plate Convex Part separation, so that the fluid can pass through the first valve hole of the first valve plate and the second valve hole of the second valve plate respectively, and then circulate into the confluence channel of the confluence plate to collect pressure on the confluence Outflow. 如申請專利範圍第1項所述之微型流體輸送裝置，其中該匯流出口之流體在該第一微型泵以及該第二微型泵未運作時，透過該匯流板之該匯流通道分別流入該第一匯流槽以及該第二匯流槽，再透過該第一連通槽以及該第二連通槽分別流至該第一洩流槽以及該第二洩流槽中，以分別推動該第一閥片自該第一洩流板凸部分離以及該第二閥片自該第二洩流板凸部分離，流體再流入該洩流通道而由該洩流出口排出進行洩壓作業。The micro-fluid delivery device as described in item 1 of the patent scope, wherein the fluid of the confluent outlet flows into the first through the confluent channel of the confluent plate when the first micro-pump and the second micro-pump are not operating The confluence groove and the second confluence groove flow through the first communication groove and the second communication groove respectively to the first drain groove and the second drain groove to respectively push the first valve disc from The convex portion of the first drain plate is separated and the second valve plate is separated from the convex portion of the second drain plate, and the fluid flows into the drain channel again and is discharged from the drain outlet for pressure relief operation. 如申請專利範圍第1項所述之微型流體輸送裝置，其中該第一閥片以及該第二閥片分別設有一第一接觸面以及一第二接觸面，而在該第一接觸面及該第二接觸面之間也分別設有一匯流凹部片及一洩流凹部片，且該匯流凹部片及該洩流凹部片是不凸出於該第一接觸面及該第二接觸面之表面，而該第一閥片以及該第二閥片之該等匯流凹部片分別抵觸該第一腔板凸部以及該第二腔板凸部，且該第一閥片以及該第二閥片之該第一閥孔及該第二閥孔設置於該等匯流凹部片處，分別受該第一腔板凸部及該第二腔板凸部牴觸而封閉，而該第一閥片以及該第二閥片之該等洩流凹部片分別對應抵觸該第一洩流板凸部及該第二洩流板凸部而封閉該洩流通道。The micro-fluid delivery device as described in item 1 of the patent application scope, wherein the first valve plate and the second valve plate are respectively provided with a first contact surface and a second contact surface, and the first contact surface and the second Between the second contact surface, a convergent recessed piece and a drain recessed piece are also provided, and the convergent recessed piece and the drained recessed piece do not protrude from the surfaces of the first contact surface and the second contact surface, And the converging recessed pieces of the first valve piece and the second valve piece respectively interfere with the first cavity plate convex portion and the second cavity plate convex portion, and the first valve plate and the second valve plate The first valve hole and the second valve hole are provided at the converging recessed pieces, and are closed by the first cavity plate convex portion and the second cavity plate convex portion, respectively, and the first valve plate and the first valve plate are closed The leakage recessed pieces of the two valve plates respectively correspond to the first drain plate convex portion and the second drain plate convex portion to close the drain channel. 如申請專利範圍第1項所述之微型流體輸送裝置，其中該第一微型泵以及該第二微型泵分別為一流體泵浦，該流體泵浦包括： 一進流板，具有至少一進流孔、至少一匯流排孔以及一匯流腔室，其中該進流孔供導入流體，該匯流排孔對應該進流孔，且引導該進流孔之流體匯流至該匯流腔室； 一共振片，具有一中空孔洞對應該匯流腔室，且該中空孔洞之周圍為一可動部；以及 一壓電致動器，與該共振片相對應設置； 其中，該共振片與該壓電致動器之間形成一共振腔室，以使該壓電致動器受驅動時，使流體由該進流板之該進流孔導入，經該匯流排孔匯集至該匯流腔室，再流經該共振片之該中空孔洞，使得該壓電致動器與該共振片之該可動部產生共振以傳輸流體。The micro-fluid delivery device as described in item 1 of the patent application, wherein the first micro-pump and the second micro-pump are respectively a fluid pump, and the fluid pump includes: an inflow plate having at least one inflow A hole, at least one bus bar hole and a bus bar cavity, wherein the inlet hole is used to introduce fluid, the bus bar hole corresponds to the inlet hole, and the fluid of the inlet hole is guided to the bus bar chamber; a resonator plate , With a hollow hole corresponding to the confluence chamber, and around the hollow hole is a movable part; and a piezoelectric actuator, corresponding to the resonant plate; wherein, the resonant plate and the piezoelectric actuator A resonance chamber is formed between the piezoelectric actuator so that when the piezoelectric actuator is driven, fluid is introduced from the inflow hole of the inflow plate, collects to the confluence chamber through the busbar hole, and then flows through the The hollow hole of the resonance plate causes the piezoelectric actuator to resonate with the movable portion of the resonance plate to transmit fluid. 如申請專利範圍第4項所述之微型流體輸送裝置，其中該壓電致動器包括： 一懸浮板，具有一正方形形態，並且可彎曲振動； 一外框，環繞設置於該懸浮板之外側； 至少一支架，連接於該懸浮板與該外框之間，以提供彈性支撐；以及 一壓電片，具有一邊長，該邊長係小於或等於該懸浮板之一邊長，且該壓電片貼附於該懸浮板之一表面上，用以施加電壓以驅動該懸浮板彎曲振動。The micro-fluid conveying device as described in item 4 of the patent application scope, wherein the piezoelectric actuator includes: a floating plate having a square shape and being capable of bending vibration; an outer frame surrounding the outer side of the floating plate At least one bracket connected between the suspension plate and the outer frame to provide elastic support; and a piezoelectric sheet having a side length that is less than or equal to one side length of the suspension plate, and the piezoelectric The sheet is attached to a surface of the suspension board for applying voltage to drive the suspension board to flex and vibrate. 如申請專利範圍第4項所述之微型流體輸送裝置，其中該流體泵浦更包括一第一絕緣片、一導電片以及一第二絕緣片，其中該進流板、該共振片、該壓電致動器、該第一絕緣片、該導電片及該第二絕緣片係依序堆疊設置。The micro fluid delivery device as described in item 4 of the patent application scope, wherein the fluid pump further includes a first insulating sheet, a conductive sheet, and a second insulating sheet, wherein the inflow plate, the resonant sheet, and the pressure The electric actuator, the first insulating sheet, the conductive sheet and the second insulating sheet are sequentially stacked. 如申請專利範圍第1項所述之微型流體輸送裝置，其中該第一腔板之該第一組接表面以及該第二腔板之該第二組接表面上各設有複數個卡榫，該第一閥片以及該第二閥片對應該複數個卡榫位置也分別設有複數個定位孔，以及該匯流板之該第一表面以及該第二表面上對應該複數個卡榫位置也分別設有複數個卡榫孔，利用該第一腔板以及該第二腔板之該複數個卡榫分別穿伸入該第一閥片及該第二閥片上之該複數個定位孔及該匯流板之該第一表面及該第二表面上之該複數個卡榫孔中，使該第一閥片承置定位於該匯流板之該第一表面上，以及使該第二閥片承置定位於該匯流板之該第二表面上。The micro-fluid conveying device as described in item 1 of the scope of the patent application, wherein the first assembly surface of the first cavity plate and the second assembly surface of the second cavity plate are each provided with a plurality of tenons, The first valve piece and the second valve piece are also provided with a plurality of positioning holes corresponding to the plurality of latching positions, respectively, and the plurality of latching positions on the first surface and the second surface of the busbar are also A plurality of locking holes are respectively provided, and the plurality of locking holes of the first cavity plate and the second cavity plate respectively penetrate into the positioning holes and the positioning holes on the first valve plate and the second valve plate In the plurality of tenon holes on the first surface and the second surface of the manifold plate, the first valve plate bearing is positioned on the first surface of the manifold plate, and the second valve plate bearing It is positioned on the second surface of the busbar.

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