TWI680207B - Plating bath composition and method for electroless plating of palladium - Google Patents

Plating bath composition and method for electroless plating of palladium Download PDF

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TWI680207B
TWI680207B TW104142555A TW104142555A TWI680207B TW I680207 B TWI680207 B TW I680207B TW 104142555 A TW104142555 A TW 104142555A TW 104142555 A TW104142555 A TW 104142555A TW I680207 B TWI680207 B TW I680207B
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palladium
electroless
bath composition
aqueous
deposition
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TW104142555A
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TW201627531A (en
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湯瑪士 貝克
Thomas Beck
吉哈德 史坦伯格
Gerhard Steinberger
安德瑞絲 華特
Andreas Walter
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德商德國艾托特克公司
Atotech Deutschland Gmbh
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/42—Coating with noble metals
    • C23C18/44—Coating with noble metals using reducing agents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1617—Purification and regeneration of coating baths
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1646—Characteristics of the product obtained
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1646—Characteristics of the product obtained
    • C23C18/165—Multilayered product
    • C23C18/1651—Two or more layers only obtained by electroless plating

Abstract

本發明係關於一種水性電鍍浴組合物及藉由無電電鍍在基板上沈積鈀層之方法。本發明之水性電鍍浴組合物包含鈀離子源、鈀離子還原劑及醛化合物。該水性電鍍浴組合物具有增加之鈀沈積速率，同時維持浴液穩定性。該水性電鍍浴組合物亦具有延長之壽命。本發明之醛化合物允許在該浴液壽命期間將該沈積速率調節至恆定範圍且允許在較低溫度下無電沈積鈀層。本發明之醛化合物使沈積速率較低之無電鈀電鍍浴活化且使老化的無電鈀電鍍浴再活化。 The invention relates to an aqueous plating bath composition and a method for depositing a palladium layer on a substrate by electroless plating. The aqueous plating bath composition of the present invention includes a palladium ion source, a palladium ion reducing agent, and an aldehyde compound. The aqueous plating bath composition has an increased palladium deposition rate while maintaining bath stability. The aqueous plating bath composition also has an extended life. The aldehyde compound of the present invention allows the deposition rate to be adjusted to a constant range during the life of the bath and allows electroless deposition of a palladium layer at lower temperatures. The aldehyde compound of the present invention activates an electroless palladium plating bath with a lower deposition rate and reactivates an aged electroless palladium plating bath.

Description

鈀之電鍍浴組合物及無電電鍍方法 Palladium plating bath composition and electroless plating method

本發明係關於鈀之水性電鍍浴組合物及無電電鍍方法，其用於製造印刷電路板、IC基板及半導體晶圓之金屬化。 The invention relates to an aqueous electroplating bath composition and electroless plating method for palladium, which are used for the metallization of printed circuit boards, IC substrates and semiconductor wafers.

在印刷電路板、IC基板及其類似物之製造以及半導體晶圓之金屬化中，鈀之無電沈積為已建立之技術。鈀層用作例如障壁層及/或線可接合及可焊接面層。 Electroless deposition of palladium is an established technology in the manufacture of printed circuit boards, IC substrates and the like, and in the metallization of semiconductor wafers. The palladium layer is used as, for example, a barrier layer and / or a wire-bondable and solderable surface layer.

US 5,882,736中揭示無電鈀電鍍浴組合物，其包含鈀離子源、氮化錯合劑及選自甲酸及其衍生物之還原劑。該等無電鈀電鍍浴組合物適於沈積純鈀，相比之下，含有次磷酸鹽作為還原劑之電鍍浴組合物產生鈀-磷合金層。 US 5,882,736 discloses an electroless palladium plating bath composition comprising a source of palladium ions, a nitriding complex, and a reducing agent selected from formic acid and its derivatives. These electroless palladium plating bath compositions are suitable for depositing pure palladium, in contrast, plating bath compositions containing hypophosphite as a reducing agent produce a palladium-phosphorus alloy layer.

美國專利4,424,241描述一種無電電鍍溶液，其包含鈀、有機配位體及還原劑(亦即甲醛及甲酸)。還原劑以較高濃度使用。根據美國專利4,424,241，濃度過低會使沈積速率減慢。 US Patent 4,424,241 describes an electroless plating solution comprising palladium, an organic ligand, and a reducing agent (ie, formaldehyde and formic acid). The reducing agent is used at a higher concentration. According to U.S. Patent 4,424,241, too low a concentration will slow the deposition rate.

儘管許多先前技術文獻教示鈀電鍍浴組合物，但用其獲得之電鍍速率無法滿足當前為達成經濟製造所需之不斷增加電鍍速率的需求。 Although many prior art documents teach palladium electroplating bath compositions, the electroplating rates obtained with them do not meet the current demand for increasing electroplating rates needed to achieve economic manufacturing.

另外，沈積速率在浴液壽命期間不斷減小，且沈積速率過低最終使無電鈀電鍍浴壽命終止。此歸因於已沈積之鈀之催化作用及自催 化沈積機制。通常，改變無電鈀電鍍浴溫度係用於調節沈積速率及浴液壽命之持續時間。提高浴溫亦增加沈積速率。但在較高溫度下操作浴液同時增加浴液不穩定之風險。 In addition, the deposition rate decreases continuously during the life of the bath, and the too low deposition rate eventually ends the life of the electroless palladium plating bath. This is due to the catalysis and self-catalysis of the deposited palladium Chemical deposition mechanism. Generally, changing the temperature of the electroless palladium plating bath is used to adjust the deposition rate and the duration of the bath life. Increasing the bath temperature also increases the deposition rate. But operating the bath at higher temperatures increases the risk of bath instability.

此類電鍍浴之穩定性意謂電鍍浴穩定免於分解，亦即電鍍浴自身中金屬鈀之不當沈澱。因此，無電鈀電鍍浴不穩定又縮短浴液壽命。由於鈀價格較高，故出於經濟原因，較早丟棄無電鈀電鍍浴亦為不當的。 The stability of this type of plating bath means that the plating bath is stable from decomposition, that is, improper precipitation of metal palladium in the plating bath itself. Therefore, the electroless palladium plating bath is unstable and shortens the bath life. Due to the high price of palladium, it is not appropriate to discard the electroless palladium plating bath earlier for economic reasons.

本發明之目標Object of the invention

本發明之一目標為提供一種電鍍浴組合物及一種用於無電電鍍鈀之方法，其中沈積速率進一步增加。本發明之另一目標為提供一種電鍍浴組合物及一種用於無電電鍍鈀之方法，其允許將沈積速率調節至所需較高值。本發明之另一目標為提供一種電鍍浴組合物及一種用於無電電鍍鈀之方法，其中沈積速率進一步增加，同時浴液仍保持穩定。本發明之一具體目標為提供一種電鍍浴組合物及一種用於無電電鍍鈀之方法，其允許在電鍍浴壽命期間維持恆定較高沈積速率。本發明之另一目標為提供一種電鍍浴組合物及一種用於無電電鍍鈀之方法，其允許延長電鍍浴之壽命。 An object of the present invention is to provide a plating bath composition and a method for electroless plating of palladium, wherein the deposition rate is further increased. Another object of the present invention is to provide a plating bath composition and a method for electroless plating of palladium, which allow the deposition rate to be adjusted to a desired higher value. Another object of the present invention is to provide a plating bath composition and a method for electroless plating of palladium, in which the deposition rate is further increased while the bath liquid remains stable. A specific object of the present invention is to provide a plating bath composition and a method for electroless plating of palladium, which allow a constant high deposition rate to be maintained during the life of the plating bath. Another object of the present invention is to provide a plating bath composition and a method for electroless plating of palladium, which allow to extend the life of the plating bath.

此等目標用一種用於鈀之無電沈積的水性電鍍浴組合物解決，該水性電鍍浴組合物包含(i)至少一種鈀離子源，(ii)至少一種鈀離子還原劑，及(iii)至少一種式(I)之醛化合物

Figure TWI680207B_D0001
其中R係選自由以下組成之群：未經取代或經取代之包含1至10個碳原子之直鏈烷基；及未經取代或經取代之包含3至10個碳原子之分支鏈烷基；及未經取代或經取代之芳基；且其中該至少一種式(I)之醛化合物之濃度在0.01至25mg/l範圍內。 These objectives are solved with an aqueous electroplating bath composition for electroless deposition of palladium, which comprises (i) at least one source of palladium ions, (ii) at least one palladium ion reducing agent, and (iii) at least An aldehyde compound of formula (I)
Figure TWI680207B_D0001
 Wherein R is selected from the group consisting of: unsubstituted or substituted straight-chain alkyl groups containing 1 to 10 carbon atoms; and unsubstituted or substituted branched-chain alkyl groups containing 3 to 10 carbon atoms ; And an unsubstituted or substituted aryl group; and wherein the concentration of the at least one aldehyde compound of formula (I) is in the range of 0.01 to 25 mg / l.

此等目標利用一種無電鈀電鍍方法進一步解決，該方法包含以下步驟：(a)提供基板，(b)使該基板與如上文所述之水性電鍍浴組合物接觸，且藉此將鈀層沈積至基板之至少一部分上。 These objectives are further solved by an electroless palladium plating method that includes the steps of (a) providing a substrate, (b) contacting the substrate with an aqueous plating bath composition as described above, and thereby depositing a palladium layer Onto at least a portion of the substrate.

本發明之水性電鍍浴組合物在本文中稱為組合物或本發明之組合物。術語「電鍍」與「沈積」在本文中可互換使用。 The aqueous plating bath composition of the present invention is referred to herein as a composition or a composition of the present invention. The terms "plating" and "deposition" are used interchangeably herein.

式(I)之醛化合物提供鈀(尤其純鈀)沈積速率增加且壽命延長的本發明之水性電鍍浴組合物。儘管增加沈積速率，但式(I)之醛化合物並不損害本發明之水性電鍍浴組合物免於不當分解的穩定性。將式(I)之醛化合物添加至無電鈀電鍍浴中允許在浴液壽命期間將沈積速率調節至恆定範圍。本發明之式(I)之醛化合物使沈積速率較低(即使在新鮮製備時)之無電鈀電鍍浴活化且使老化的無電鈀電鍍浴再活化。本發明之式(I)之醛化合物允許在較低溫度下無電沈積鈀層。 The aldehyde compound of formula (I) provides an aqueous plating bath composition of the present invention with an increased deposition rate and a longer life of palladium (especially pure palladium). Despite increasing the deposition rate, the aldehyde compound of formula (I) does not impair the stability of the aqueous plating bath composition of the present invention from undue decomposition. Adding an aldehyde compound of formula (I) to an electroless palladium plating bath allows the deposition rate to be adjusted to a constant range during the life of the bath. The aldehyde compound of formula (I) of the present invention activates an electroless palladium plating bath having a lower deposition rate (even when freshly prepared) and reactivates an aged electroless palladium plating bath. The aldehyde compound of formula (I) of the present invention allows electroless deposition of a palladium layer at a lower temperature.

圖1展示含有甲醛之水性電鍍浴組合物之沈積速率。 Figure 1 shows the deposition rate of an aqueous plating bath composition containing formaldehyde.

圖2展示含有正丙醛之水性電鍍浴組合物之沈積速率。 Figure 2 shows the deposition rate of an aqueous plating bath composition containing n-propionaldehyde.

圖3展示含有濃度在0.25至1.25mg/l範圍內之正戊醛之水性電鍍浴組合物之沈積速率。 Figure 3 shows the deposition rate of an aqueous plating bath composition containing n-valeraldehyde in a concentration ranging from 0.25 to 1.25 mg / l.

圖4展示含有濃度在1至10mg/l範圍內之正戊醛之水性電鍍浴組合物之沈積速率。 Figure 4 shows the deposition rate of an aqueous electroplating bath composition containing n-valeraldehyde in a concentration ranging from 1 to 10 mg / l.

水性電鍍浴組合物包含(iii)至少一種式(I)之醛化合物

Figure TWI680207B_D0002
其中R係選自由以下組成之群：未經取代或經取代之包含1至10個碳原子之直鏈烷基；及未經取代或經取代之包含3至10個碳原子之分支鏈烷基；及未經取代或經取代之芳基；且其中該至少一種式(I)之醛化合物之濃度在0.01至25mg/l範圍內。 Aqueous electroplating bath composition comprises (iii) at least one aldehyde compound of formula (I)
Figure TWI680207B_D0002
 Wherein R is selected from the group consisting of: unsubstituted or substituted straight-chain alkyl groups containing 1 to 10 carbon atoms; and unsubstituted or substituted branched-chain alkyl groups containing 3 to 10 carbon atoms ; And an unsubstituted or substituted aryl group; and wherein the concentration of the at least one aldehyde compound of formula (I) is in the range of 0.01 to 25 mg / l.

在一較佳實施例中，R係選自由以下組成之群：未經取代或經取代之包含1至10個碳原子之直鏈烷基；及未經取代或經取代之包含3至10個碳原子之分支鏈烷基。 In a preferred embodiment, R is selected from the group consisting of: unsubstituted or substituted linear alkyl groups containing 1 to 10 carbon atoms; and unsubstituted or substituted containing 3 to 10 groups. A branched alkyl group of carbon atoms.

在另一較佳實施例中，R係選自由以下組成之群：未經取代或經取代之包含1至10個碳原子之直鏈烷基；及未經取代或經取代之包含3至10個碳原子之分支鏈烷基。 In another preferred embodiment, R is selected from the group consisting of: unsubstituted or substituted straight-chain alkyl groups containing 1 to 10 carbon atoms; and unsubstituted or substituted containing 3 to 10 Carbon chain branched alkyl group.

在另一較佳實施例中，未經取代或經取代之直鏈烷基較佳選自包含1至8個碳原子、更佳1至5個碳原子、甚至更佳2至5個碳原子之未經取代或經取代之直鏈烷基。此外，未經取代或經取代之直鏈烷基較佳選自包含以下各者之群：正戊基、正丁基、正丙基、乙基及甲基；進一步更佳選自正丁基、正丙基、乙基及甲基；最佳選自正丁基、正丙基及乙基。 In another preferred embodiment, the unsubstituted or substituted straight-chain alkyl group is preferably selected from the group consisting of 1 to 8 carbon atoms, more preferably 1 to 5 carbon atoms, even more preferably 2 to 5 carbon atoms. Unsubstituted or substituted straight-chain alkyl. In addition, the unsubstituted or substituted linear alkyl group is preferably selected from the group consisting of n-pentyl, n-butyl, n-propyl, ethyl, and methyl; further more preferably selected from n-butyl. , N-propyl, ethyl and methyl; optimally selected from n-butyl, n-propyl and ethyl.

在另一實施例中，未經取代或經取代之分支鏈烷基較佳選自包含3至8個碳原子、更佳3至5個碳原子之未經取代或經取代之分支鏈烷基。未經取代或經取代之分支鏈烷基甚至更佳選自包含以下各者之群：2-戊基(第二戊基)、3-戊基、2-甲基丁基、3-甲基丁基(異戊基)、3-甲基丁-2-基、2-甲基丁-2-基；2,2-二甲基丙基(新戊基)、異丁基、 第二丁基、第三丁基及異丙基；最佳選自異丁基、第二丁基及異丙基。 In another embodiment, the unsubstituted or substituted branched chain alkyl group is preferably selected from unsubstituted or substituted branched chain alkyl groups containing 3 to 8 carbon atoms, more preferably 3 to 5 carbon atoms. . Unsubstituted or substituted branched chain alkyl groups are even more preferably selected from the group consisting of 2-pentyl (second pentyl), 3-pentyl, 2-methylbutyl, 3-methyl Butyl (isopentyl), 3-methylbut-2-yl, 2-methylbut-2-yl; 2,2-dimethylpropyl (neopentyl), isobutyl, Second butyl, third butyl and isopropyl; optimally selected from isobutyl, second butyl and isopropyl.

在另一實施例中，未經取代或經取代之芳基較佳選自未經取代或經取代之包含6至10個碳原子之芳基；更佳選自未經取代或經取代之苯基及未經取代或經取代之萘基；最佳選自未經取代或經取代之苯基。 In another embodiment, the unsubstituted or substituted aryl group is preferably selected from unsubstituted or substituted aryl groups containing 6 to 10 carbon atoms; more preferably selected from unsubstituted or substituted benzene And unsubstituted or substituted naphthyl; preferably selected from unsubstituted or substituted phenyl.

在另一實施例中，直鏈烷基、分支鏈烷基或芳基較佳經取代。取代基較佳地彼此獨立地選自包含以下各者之群：胺基、羧基、酯、巰基、羥基、甲氧基、乙氧基、甲基、乙基、鹵素(諸如氟、氯、溴、碘)、烯丙基、乙烯基及芳基；較佳選自胺基、羧基、酯、羥基、甲氧基、乙氧基、甲基、乙基、鹵素(諸如氟、氯、溴、碘)及芳基；甚至更佳選自羧基、酯、羥基、甲氧基、乙氧基、甲基、乙基、鹵素(諸如氟、氯、溴、碘)及芳基。 In another embodiment, a linear alkyl group, a branched alkyl group, or an aryl group is preferably substituted. The substituents are preferably independently selected from the group consisting of amine, carboxyl, ester, mercapto, hydroxyl, methoxy, ethoxy, methyl, ethyl, halogen (such as fluorine, chlorine, bromine) , Iodine), allyl, vinyl and aryl; preferably selected from amine, carboxyl, ester, hydroxyl, methoxy, ethoxy, methyl, ethyl, halogen (such as fluorine, chlorine, bromine, Iodo) and aryl; even more preferably selected from carboxyl, ester, hydroxyl, methoxy, ethoxy, methyl, ethyl, halogen (such as fluorine, chlorine, bromine, iodine) and aryl.

在一更佳實施例中，至少一種式(I)之醛化合物選自包含以下各者之群：己醛(hexanal/hexanaldehyde)、戊醛(pentanal/valeraldehyde)、丁醛(butanal/butyraldehyde)、丙醛(propanal/propionaldehyde)、乙醛(ethanal/acetaldehyde)、甲醛(methanal/formaldehyde)、苯甲醛(phenylmethanal/benzaldehyde)及2-苯乙醛；較佳選自正己醛、正戊醛、正丁醛、正丙醛及乙醛；更佳選自正戊醛、正丁醛、正丙醛及乙醛，甚至更佳選自正己醛、正戊醛、正丁醛及正丙醛。 In a more preferred embodiment, at least one aldehyde compound of formula (I) is selected from the group consisting of hexanal / hexanaldehyde, pentanal / valeraldehyde, butanal / butyraldehyde, Propanal / propionaldehyde, ethanal / acetaldehyde, methanal / formaldehyde, phenylmethanal / benzaldehyde and 2-phenylacetaldehyde; preferably selected from n-hexanal, n-valeraldehyde, n-butanal Aldehyde, n-propanal and acetaldehyde; more preferably selected from n-valeraldehyde, n-butyraldehyde, n-propanal and acetaldehyde, even more preferably selected from n-hexanal, n-valeraldehyde, n-butyraldehyde and n-propanal.

至於術語「烷基」用於本說明書及申請專利範圍，其係指具有化學通式CnH2n+1之烴基，n為1至10之整數。本發明之烷基殘基可為直鏈及/或分支鏈的，且其較佳為飽和的。舉例而言，包含1至10個碳原子之直鏈烷基意謂總C原子數目分別在1至10範圍內之直鏈烷基。包含3至10個碳原子之分支鏈烷基意謂主鏈中C原子加分支鏈中C原子之 總和產生總C原子數目分別在3至10範圍內的分支鏈烷基。包含1至8個碳原子之直鏈烷基或包含3至8個碳原子之分支鏈烷基例如包括甲基、乙基、丙基、丁基、戊基、己基、庚基或辛基。包含1至5個碳原子之直鏈烷基或包含3至5個碳原子之分支鏈烷基例如包括甲基、乙基、丙基、丁基或戊基。 As for the term "alkyl" used in this specification and the scope of the patent application, which refers to hydrocarbon groups having a + 1, n is an integer of from 1 to 10 of the general chemical formula C n H 2n. The alkyl residue of the present invention may be linear and / or branched, and it is preferably saturated. For example, a straight-chain alkyl group containing 1 to 10 carbon atoms means a straight-chain alkyl group having a total number of C atoms in the range of 1 to 10, respectively. A branched chain alkyl group containing 3 to 10 carbon atoms means that the sum of C atoms in the main chain plus C atoms in the branched chain results in branched chain alkyl groups having a total number of C atoms in the range of 3 to 10, respectively. A straight-chain alkyl group containing 1 to 8 carbon atoms or a branched-chain alkyl group containing 3 to 8 carbon atoms includes, for example, methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, or octyl. Linear alkyl groups containing 1 to 5 carbon atoms or branched chain alkyl groups containing 3 to 5 carbon atoms include, for example, methyl, ethyl, propyl, butyl or pentyl.

當術語「芳基」用於本說明書及申請專利範圍中時，其係指環形芳族烴基，例如苯基或萘基。 When the term "aryl" is used in this specification and the scope of the patent application, it refers to a cyclic aromatic hydrocarbon group such as phenyl or naphthyl.

此外，烷基及/或芳基可藉由在各種情況下利用如上文針對直鏈烷基、分支鏈烷基及/或芳基概述之取代基置換H原子來經取代。 In addition, alkyl and / or aryl groups can be substituted by replacing the H atom in each case with a substituent as outlined above for straight-chain alkyl, branched-chain alkyl, and / or aryl groups.

至少一種式(I)之醛化合物在本發明之水性電鍍浴組合物中之濃度在0.01至25mg/l範圍內；較佳在0.01至10mg/l範圍內，更佳在0.1至10mg/l範圍內。 The concentration of at least one aldehyde compound of formula (I) in the aqueous plating bath composition of the present invention is in the range of 0.01 to 25 mg / l; preferably in the range of 0.01 to 10 mg / l, more preferably in the range of 0.1 to 10 mg / l Inside.

出人意料地且與先前技術形成對比，已發現，醛化合物當含於無電鈀電鍍浴中之濃度低於醛還原劑所用之濃度時，可增加無電鈀電鍍浴之沈積速率。 Surprisingly and in contrast to the prior art, it has been found that when the concentration of the aldehyde compound in the electroless palladium plating bath is lower than that used for the aldehyde reducing agent, the deposition rate of the electroless palladium bath can be increased.

本發明之水性電鍍浴組合物包含至少一種鈀離子源。該至少一種鈀離子源較佳為水溶性鈀化合物。該至少一種鈀離子源更佳選自包含以下各者之群：氯化鈀、乙酸鈀、硫酸鈀及過氯酸鈀。視情況，可將包含鈀離子及鈀離子之錯合劑(較佳氮化錯合劑)之錯合化合物添加至電鍍浴中，代替藉由將鈀鹽及該鈀離子之錯合劑以各別成分添加至電鍍浴中來在電鍍浴中形成此類錯合物。作為鈀離子源之適合的錯合化合物為例如包含以下各者之錯合化合物：鈀離子及錯合劑；較佳氮化錯合劑；更佳乙烷-1,2-二胺及/或經烷基取代之乙烷-1,2-二胺。適合的錯合化合物可進一步包含鈀離子之反離子；較佳氯離子、乙酸根、硫酸根或過氯酸根。適合的氮化錯合劑及烷基取代之乙烷-1,2-二胺在下文中定義為錯合劑。較佳地，作為鈀離子源之適合的錯合化合 物為例如二氯乙烷-1,2-二胺鈀二乙酸基乙烷-1,2-二胺鈀；二氯N1-甲基乙烷-1,2-二胺鈀；二乙酸基N1-甲基乙烷-1,2-二胺鈀；二氯N1,N2-二甲基乙烷-1,2-二胺鈀；二乙酸基N1,N2-二甲基乙烷-1,2-二胺鈀；二氯N1-乙基乙烷-1,2-二胺鈀；二乙酸基N1-乙基乙烷-1,2-二胺鈀、二氯N1,N2-二乙基乙烷-1,2-二胺鈀；及二乙酸基N1,N2-二乙基乙烷-1,2-二胺鈀。 The aqueous plating bath composition of the present invention comprises at least one source of palladium ion. The at least one palladium ion source is preferably a water-soluble palladium compound. The at least one palladium ion source is more preferably selected from the group consisting of palladium chloride, palladium acetate, palladium sulfate, and palladium perchlorate. Optionally, a complex compound containing a palladium ion and a palladium ion complexing agent (preferably a nitriding complexing agent) may be added to the plating bath instead of adding the palladium salt and the palladium ion complexing agent in separate components. This plating complex is formed in the plating bath. Suitable complex compounds as a source of palladium ions are, for example, complex compounds containing each of the following: palladium ions and complexing agents; preferred nitriding complexing agents; more preferably ethane-1,2-diamine and / or alkane -Substituted ethane-1,2-diamine. Suitable complex compounds may further comprise a counter ion of palladium ions; preferably chloride, acetate, sulfate or perchlorate. Suitable nitrided complexing agents and alkyl-substituted ethane-1,2-diamines are defined below as complexing agents. Preferably, a suitable complex compound as a source of palladium ion is, for example, dichloroethane-1,2-diamine palladium diacetate ethane-1,2-diamine palladium; dichloro N 1 -methylethyl Alkane-1,2-diamine palladium; diacetate N 1 -methylethane-1,2-diamine palladium; dichloro N 1 , N 2 -dimethylethane-1,2-diamine palladium ; Diacetate N 1 , N 2 -dimethylethane-1,2-diamine palladium; dichloro N 1 -ethylethane-1,2-diamine palladium; diacetate N 1 -ethyl Ethane-1,2-diamine palladium, dichloro N 1 , N 2 -diethylethane-1,2-diamine palladium; and diacetate N 1 , N 2 -diethylethane-1 , 2-diamine palladium.

組合物中鈀離子之濃度在0.5至500mmol/l範圍內，較佳在1至100mmol/l範圍內。 The concentration of palladium ion in the composition is in the range of 0.5 to 500 mmol / l, preferably in the range of 1 to 100 mmol / l.

本發明之水性電鍍浴組合物進一步包含至少一種鈀離子還原劑。還原劑使電鍍浴成為自催化(亦即無電極)電鍍浴。鈀離子在該還原劑存在下還原成金屬鈀。此電鍍機制將本發明之電鍍浴與1)不含有鈀離子還原劑之浸沒型鈀電鍍浴及2)需要外部電流以便沈積鈀層之用於鈀電鍍之電鍍浴區分開來。 The aqueous plating bath composition of the present invention further comprises at least one palladium ion reducing agent. The reducing agent makes the plating bath an autocatalytic (ie, electrodeless) plating bath. Palladium ions are reduced to metallic palladium in the presence of the reducing agent. This electroplating mechanism distinguishes the electroplating bath of the present invention from 1) an immersion type palladium electroplating bath that does not contain a palladium ion reducing agent and 2) an electroplating bath for palladium electroplating that requires external current to deposit a palladium layer.

至少一種還原劑較佳為化學還原劑。還原劑提供為將金屬離子還原成其金屬形式且藉此在基板上形成金屬沈積物所必需之電子。 The at least one reducing agent is preferably a chemical reducing agent. The reducing agent provides the electrons necessary to reduce the metal ions to their metal form and thereby form a metal deposit on the substrate.

至少一種還原劑更佳為用於沈積純鈀沈澱物之還原劑。純鈀沈澱物為鈀含量介於98.0至99.99重量%或99.99重量%以上、較佳99.0至99.99重量%或99.99重量%以上範圍內的沈澱物。 The at least one reducing agent is more preferably a reducing agent for depositing a pure palladium precipitate. The pure palladium precipitate is a precipitate having a palladium content within a range of 98.0 to 99.99% by weight or more, preferably 99.0 to 99.99% by weight or more.

至少一種鈀離子還原劑甚至更佳選自由以下組成之群：肼、甲酸、上述各者衍生物及其鹽。 The at least one palladium ion reducing agent is even more preferably selected from the group consisting of hydrazine, formic acid, each of the aforementioned derivatives, and salts thereof.

至少一種鈀離子還原劑甚至更佳選自由以下組成之群：甲酸、甲酸衍生物及上述各者之鹽。甲酸衍生物甚至更佳選自甲酸酯。甲酸酯甚至更佳選自由以下各者組成之群：甲酸甲酯、甲酸乙酯及甲酸丙酯。甲酸鹽之適合的反離子例如選自氫、鋰、鈉、鉀及銨。本發明之水性電鍍浴組合物尤其適用於在作為還原劑之甲酸、上述各者之衍生物及鹽存在下沈積鈀層。 The at least one palladium ion reducing agent is even more preferably selected from the group consisting of formic acid, formic acid derivatives, and salts of each of the foregoing. The formic acid derivative is even more preferably selected from formate. The formate is even more preferably selected from the group consisting of methyl formate, ethyl formate and propyl formate. Suitable counter ions of the formate are selected, for example, from hydrogen, lithium, sodium, potassium and ammonium. The aqueous plating bath composition of the present invention is particularly suitable for depositing a palladium layer in the presence of formic acid as a reducing agent, derivatives of each of the above, and salts.

至少一種還原劑較佳不為甲醛。 The at least one reducing agent is preferably not formaldehyde.

至少一種還原劑在本發明之水性電鍍浴組合物中之濃度較佳在10至1000mmol/l範圍內。 The concentration of the at least one reducing agent in the aqueous plating bath composition of the present invention is preferably in the range of 10 to 1000 mmol / l.

本發明之組合物中的鈀離子還原劑與鈀離子之莫耳比較佳在1：10至10：1範圍內；更佳在1：5至5：1範圍內；甚至更佳在1：3至3：1範圍內。 The molar ratio of the palladium ion reducing agent and the palladium ion in the composition of the present invention is preferably in the range of 1:10 to 10: 1; more preferably in the range of 1: 5 to 5: 1; even more preferably 1: 3. To 3: 1 range.

本發明之水性電鍍浴組合物尤其適用於沈積純鈀層。純鈀層尤其適用於高溫應用，如在馬達控制單元中作為純鈀層，允許經接合或焊接之連接之足夠熱穩定性。 The aqueous plating bath composition of the present invention is particularly suitable for depositing a pure palladium layer. The pure palladium layer is particularly suitable for high temperature applications, such as a pure palladium layer in a motor control unit, allowing sufficient thermal stability of the joints or soldered connections.

次磷酸根離子及/或胺硼烷化合物及/或硼氫化鈉不適合用作還原劑，因為鈀合金層自該等電鍍浴組合物沈積。 Hypophosphite ions and / or amine borane compounds and / or sodium borohydride are not suitable for use as reducing agents because palladium alloy layers are deposited from these plating bath compositions.

本發明之水性電鍍浴組合物可進一步包含至少一種鈀離子錯合劑。錯合劑(有時亦稱為螯合劑)使金屬離子保持溶解且防止其自溶液中不當沈澱。 The aqueous plating bath composition of the present invention may further include at least one palladium ion complexing agent. The complexing agent (also sometimes called a chelating agent) keeps the metal ions dissolved and prevents them from precipitating from the solution.

至少一種錯合劑較佳為鈀離子之氮化錯合劑。至少一種氮化錯合劑更佳選自包含以下各者之群：一級胺、二級胺及三級胺。至少一種氮化錯合劑甚至更佳選自包含以下各者之群：二胺、三胺、四胺及其高碳同系物。 The at least one complexing agent is preferably a nitriding complexing agent of palladium ions. The at least one nitriding complex is more preferably selected from the group consisting of a primary amine, a secondary amine, and a tertiary amine. The at least one nitriding complex is even more preferably selected from the group consisting of diamines, triamines, tetraamines and their high-carbon homologues.

適合的胺為例如乙烷-1,2-二胺(NH2-CH2-CH2-NH2，乙二胺)；烷基取代之乙烷-1,2-二胺；1,3-二胺-丙烷；1,2-雙(3-胺基-丙基-胺基)-乙烷；二伸乙基-三胺；二伸乙基-三胺-五-乙酸；N-(2-羥基-乙基)-伸乙基-二胺；伸乙基-二胺-N,N-二乙酸；1,2-二胺-丙基-胺；1,3-二胺-丙基-胺；3-(甲基-胺基)-丙基-胺；3-(二甲基-胺基)-丙基-胺；3-(二乙基-胺基)-丙基-胺；雙-(3-胺基-丙基)-胺；1,2-雙(3-胺基-丙基)-烷基-胺；二伸乙基-三胺；三伸乙基-四胺；四-伸乙基-五胺；五-伸乙基-六胺及其混合物。 Suitable amines are, for example, ethane-1,2-diamine (NH 2 -CH 2 -CH 2 -NH 2 , ethylenediamine); alkyl-substituted ethane-1,2-diamine; 1,3- Diamine-propane; 1,2-bis (3-amino-propyl-amino) -ethane; bis-ethyl-triamine; bis-ethyl-triamine-penta-acetic acid; N- (2 -Hydroxy-ethyl) -ethylene-diamine; ethylene-diamine-N, N-diacetic acid; 1,2-diamine-propyl-amine; 1,3-diamine-propyl- Amine; 3- (methyl-amino) -propyl-amine; 3- (dimethyl-amino) -propyl-amine; 3- (diethyl-amino) -propyl-amine; bis -(3-Amino-propyl) -amine; 1,2-bis (3-Amino-propyl) -alkyl-amine; Diethylene-triamine; Triethylene-tetraamine; Tetraamine -Ethyl-pentamine; Penta-ethyl-hexamine and mixtures thereof.

適合的烷基取代之乙烷-1,2-二胺為例如N1-甲基乙烷-1,2-二胺(CH3-NH-CH2-CH2-NH2)；N1,N2-二甲基乙烷-1,2-二胺(CH3-NH-CH2- CH2-NH-CH3)；N1,N1-二甲基乙烷-1,2-二胺((CH3)2-N-CH2-CH2-NH2)；N1,N1,N2-三甲基乙烷-1,2-二胺((CH3)2-N-CH2-CH2-NH-CH3)；N1,N1,N2,N2-四甲基乙烷-1,2-二胺((CH3)2-N-CH2-CH2-N-(CH3)2)；N1-乙基乙烷-1,2-二胺(C2H5-NH-CH2-CH2-NH2)；N1,N2-二乙基乙烷-1,2-二胺(C2H5-NH-CH2-CH2-NH-C2H5)；N1-乙基-N2-甲基乙烷-1,2-二胺(C2H5-NH-CH2-CH2-NH-CH3)；N1-乙基-N1-甲基乙烷-1,2-二胺((CH3)(C2H5)-N-CH2-CH2-NH2)；N1,N1-二乙基乙烷-1,2-二胺((C2H5)2-N-CH2-CH2-NH2)；N1-乙基-N1,N2-二甲基乙烷-1,2-二胺((CH3)(C2H5)-N-CH2-CH2-NH-CH3)；N1,N2-二乙基-N1-甲基乙烷-1,2-二胺((CH3)(C2H5)-N-CH2-CH2-NH-(C2H5))；N1,N1-二乙基-N2-甲基乙烷-1,2-二胺((C2H5)2-N-CH2-CH2-NH-CH3)；N1,N1,N2-三乙基乙烷-1,2-二胺((C2H5)2-N-CH2-CH2-NH-C2H5)；N1-乙基-N1,N2,N2-三甲基乙烷-1,2-二胺((CH3)(C2H5)-N-CH2-CH2-N-(CH3)2)；N1,N2-二乙基-N1,N2-二甲基乙烷-1,2-二胺((CH3)(C2H5)-N-CH2-CH2-N-(CH3)(C2H5))；N1,N1-二乙基-N2,N2-二甲基乙烷-1,2-二胺((C2H5)2-N-CH2-CH2-N-(CH3)2)；N1,N1,N2-三乙基-N2-甲基乙烷-1,2-二胺((C2H5)2-N-CH2-CH2-N-(CH3)(C2H5))；N1,N1,N2,N2-四乙基乙烷-1,2-二胺((C2H5)2-N-CH2-CH2-N-(C2H5)2)及其混合物。 A suitable alkyl-substituted ethane-1,2-diamine is, for example, N 1 -methylethane-1,2-diamine (CH 3 -NH-CH 2 -CH 2 -NH 2 ); N 1 , N 2 -dimethylethane-1,2-diamine (CH 3 -NH-CH 2 -CH 2 -NH-CH 3 ); N 1 , N 1 -dimethylethane-1,2-di Amine ((CH 3 ) 2 -N-CH 2 -CH 2 -NH 2 ); N 1 , N 1 , N 2 -trimethylethane-1,2-diamine ((CH 3 ) 2 -N- CH 2 -CH 2 -NH-CH 3 ); N 1 , N 1 , N 2 , N 2 -tetramethylethane-1,2-diamine ((CH 3 ) 2 -N-CH 2 -CH 2 -N- (CH 3 ) 2 ); N 1 -ethylethane-1,2-diamine (C 2 H 5 -NH-CH 2 -CH 2 -NH 2 ); N 1 , N 2 -diethyl Ethane-1,2-diamine (C 2 H 5 -NH-CH 2 -CH 2 -NH-C 2 H 5 ); N 1 -ethyl-N 2 -methylethane-1,2- Diamine (C 2 H 5 -NH-CH 2 -CH 2 -NH-CH 3 ); N 1 -ethyl-N 1 -methylethane-1,2-diamine ((CH 3 ) (C 2 H 5 ) -N-CH 2 -CH 2 -NH 2 ); N 1 , N 1 -diethylethane-1,2-diamine ((C 2 H 5 ) 2 -N-CH 2 -CH 2 -NH 2 ); N 1 -ethyl-N 1 , N 2 -dimethylethane-1,2-diamine ((CH 3 ) (C 2 H 5 ) -N-CH 2 -CH 2 -NH -CH 3 ); N 1 , N 2 -diethyl-N 1 -methylethane-1,2-diamine ((CH 3 ) (C 2 H 5 ) -N-CH 2 -CH 2 -NH -(C 2 H 5 )); N 1 , N 1 -diethyl- N 2 -methylethane-1,2-diamine ((C 2 H 5 ) 2 -N-CH 2 -CH 2 -NH-CH 3 ); N 1 , N 1 , N 2 -triethylethyl Alkan-1,2-diamine ((C 2 H 5 ) 2 -N-CH 2 -CH 2 -NH-C 2 H 5 ); N 1 -ethyl-N 1 , N 2 , N 2 -trimethyl Ethane-1,2-diamine ((CH 3 ) (C 2 H 5 ) -N-CH 2 -CH 2 -N- (CH 3 ) 2 ); N 1 , N 2 -diethyl-N 1 , N 2 -dimethylethane-1,2-diamine ((CH 3 ) (C 2 H 5 ) -N-CH 2 -CH 2 -N- (CH 3 ) (C 2 H 5 )) ; N 1 , N 1 -diethyl-N 2 , N 2 -dimethylethane-1,2-diamine ((C 2 H 5 ) 2 -N-CH 2 -CH 2 -N- (CH 3 ) 2 ); N 1 , N 1 , N 2 -triethyl-N 2 -methylethane-1,2-diamine ((C 2 H 5 ) 2 -N-CH 2 -CH 2 -N -(CH 3 ) (C 2 H 5 )); N 1 , N 1 , N 2 , N 2 -tetraethylethane-1,2-diamine ((C 2 H 5 ) 2 -N-CH 2 -CH 2 -N- (C 2 H 5 ) 2 ) and mixtures thereof.

本發明之組合物中的鈀離子錯合劑與鈀離子之莫耳比較佳在1：1至50：1範圍內。 The molar ratio of the palladium ion complexing agent and the palladium ion in the composition of the present invention is preferably in the range of 1: 1 to 50: 1.

本發明之水性電鍍浴組合物可進一步包含至少一種穩定劑。穩定劑(stabilizing agent)(亦稱為穩定劑(stabilizer))為使無電金屬電鍍液穩定免於本體溶液中之不當外鍍(outplating)及自發性分解的化合物。術語「外鍍」意謂金屬在除基板表面以外之表面上之不當及/或不受控制的沈積。 The aqueous plating bath composition of the present invention may further include at least one stabilizer. Stabilizing agents (also known as stabilizers) are compounds that stabilize electroless metal plating solutions from improper outplating and spontaneous decomposition in the bulk solution. The term "overplating" means improper and / or uncontrolled deposition of metal on a surface other than the substrate surface.

至少一種穩定劑可選自包含以下各者之群：元素硒、碲、銅、 鎳及鐵之化合物及/或巰基-苯并噻唑、硒基-氰酸酯、硫脲、糖精、鐵-氰酸酯；4-硝基苯甲酸；3,5-二硝基苯甲酸；2,4-二硝基苯甲酸；2-羥基-3,5-二硝基苯甲酸；2-乙醯基苯甲酸；4-硝基苯酚及其相應銨鹽、鈉鹽及鉀鹽。 The at least one stabilizer may be selected from the group consisting of the elements selenium, tellurium, copper, Compounds of nickel and iron and / or mercapto-benzothiazole, seleno-cyanate, thiourea, saccharin, iron-cyanate; 4-nitrobenzoic acid; 3,5-dinitrobenzoic acid; 2 , 4-dinitrobenzoic acid; 2-hydroxy-3,5-dinitrobenzoic acid; 2-acetamidobenzoic acid; 4-nitrophenol and its corresponding ammonium, sodium and potassium salts.

該等其他穩定劑在本發明之組合物中之濃度較佳在0.01至500mg/l範圍內，更佳在0.1至200mg/l範圍內，甚至更佳在1至200mg/l範圍內，且最佳在10至100mg/l範圍內。 The concentration of these other stabilizers in the composition of the present invention is preferably in the range of 0.01 to 500 mg / l, more preferably in the range of 0.1 to 200 mg / l, even more preferably in the range of 1 to 200 mg / l, and most It is preferably in the range of 10 to 100 mg / l.

本發明之水性電鍍浴組合物較佳為酸性電鍍浴。水性電鍍浴組合物之pH值更佳在4至7範圍內，因為組合物在低於4之pH值下不穩定。組合物之pH值甚至更佳在5至6範圍內。在高於7之pH值下，組合物易於藉由浸沒型電鍍將鈀沈積至基板上，引起鈀層與底下的基板之間的較弱黏著性。此外，pH值高於7之電鍍浴組合物將侵蝕有機抗蝕劑材料(諸如阻焊劑材料，其亦可為基板之一部分)。 The aqueous plating bath composition of the present invention is preferably an acidic plating bath. The pH of the aqueous plating bath composition is more preferably in the range of 4 to 7, because the composition is unstable at a pH value lower than 4. The pH of the composition is even more preferably in the range of 5 to 6. At pH values higher than 7, the composition can easily deposit palladium on the substrate by immersion plating, causing weak adhesion between the palladium layer and the underlying substrate. In addition, a plating bath composition having a pH value higher than 7 will attack organic resist materials (such as solder resist materials, which may also be part of the substrate).

本發明進一步關於一種無電鈀電鍍方法，其包含以下步驟：a)提供基板，b)使該基板與本發明之水性電鍍浴組合物接觸，且藉此將鈀層沈積至基板之至少一部分上。 The invention further relates to a method for electroless palladium electroplating, comprising the steps of: a) providing a substrate, b) contacting the substrate with the aqueous plating bath composition of the invention, and depositing a palladium layer on at least a portion of the substrate.

該等方法步驟較佳按上文所述之順序進行。基板較佳具有金屬表面。 The method steps are preferably performed in the order described above. The substrate preferably has a metal surface.

鈀電鍍或鈀沈積較佳藉由以下方式進行：使具有金屬表面之基板與本發明之組合物接觸，且藉此將鈀層沈積至基板之金屬表面之至少一部分上。待經鈀塗佈之金屬表面或其部分較佳選自包含以下各者之群：銅、銅合金、鎳、鎳合金、鈷、鈷合金、鉑、鉑合金、金、金合金及砷化鎵。待塗佈之金屬表面或其部分為例如印刷電路板、IC基板或半導電晶圓之一部分。鈀層例如在半導電晶圓上用作半導體晶片、發光二極體(LED)或太陽能電池之貴金屬、導線可接合且可焊的 整理劑。 Palladium plating or palladium deposition is preferably performed by contacting a substrate having a metal surface with the composition of the present invention, and thereby depositing a palladium layer on at least a portion of the metal surface of the substrate. The metal surface or part thereof to be coated with palladium is preferably selected from the group consisting of copper, copper alloy, nickel, nickel alloy, cobalt, cobalt alloy, platinum, platinum alloy, gold, gold alloy, and gallium arsenide . The metal surface or part thereof to be coated is, for example, a part of a printed circuit board, an IC substrate, or a semi-conductive wafer. The palladium layer is used as a precious metal on semiconductor wafers, light-emitting diodes (LEDs), or solar cells on semiconducting wafers, and the wires are bondable and solderable. Finishing agent.

適用於使基板與水性電鍍浴組合物接觸之方法為例如將基板浸漬至組合物中或將組合物噴霧至基板上。 A method suitable for bringing the substrate into contact with the aqueous plating bath composition is, for example, immersing the substrate in the composition or spraying the composition onto the substrate.

基板較佳根據步驟b)在30至95℃、更佳30至85℃、甚至更佳50至85℃、甚至更佳30至65℃之溫度下與水性電鍍浴組合物接觸。基板較佳與組合物接觸1至60分鐘，更佳10至20分鐘。基板較佳與水性電鍍浴組合物接觸，得到厚度在0.01至5.0μm、更佳0.02至2.0μm且甚至更佳0.05至0.5μm範圍內之鈀電鍍層。 The substrate is preferably contacted with the aqueous plating bath composition according to step b) at a temperature of 30 to 95 ° C, more preferably 30 to 85 ° C, even more preferably 50 to 85 ° C, even more preferably 30 to 65 ° C. The substrate is preferably in contact with the composition for 1 to 60 minutes, more preferably 10 to 20 minutes. The substrate is preferably in contact with the aqueous plating bath composition to obtain a palladium plating layer having a thickness in the range of 0.01 to 5.0 μm, more preferably 0.02 to 2.0 μm, and even more preferably 0.05 to 0.5 μm.

鈀層厚度係利用熟習此項技術者熟知的x射線螢光(XRF)量測。XRF量測利用自經x射線激發之樣品(基板、沈積物)發出的特徵性螢光輻射。藉由評估波長及強度且假設樣品之層狀結構，可計算層厚度。 The thickness of the palladium layer is measured using x-ray fluorescence (XRF), which is well known to those skilled in the art. XRF measurement uses characteristic fluorescent radiation emitted from x-ray excited samples (substrates, deposits). By evaluating the wavelength and intensity and assuming the layered structure of the sample, the layer thickness can be calculated.

在本發明之一個實施例中，鈀之薄活化層首先沈積至基板(較佳具有金屬表面之基板)上，藉由浸沒型電鍍法(交換反應)，接著自本發明之水性電鍍浴組合物沈積鈀來進行。 In one embodiment of the present invention, a thin active layer of palladium is first deposited on a substrate (preferably a substrate having a metal surface), by an immersion plating method (exchange reaction), and then from the aqueous plating bath composition of the present invention. Deposition of palladium is performed.

在無電鈀沈積之前活化金屬表面之方法為此項技術中已知且可應用於本發明中之工作中。適合的水性活化浴可包含鈀鹽(諸如乙酸鈀、硫酸鈀及硝酸鈀)、鈀離子錯合劑(諸如一級胺、二級胺、三級胺及乙醇胺)及酸(諸如硝酸、硫酸及甲磺酸)。視情況，此類活化浴進一步含有氧化劑，諸如硝酸根離子、過氯酸根離子、氯酸根離子、過硼酸根離子、過碘酸根離子、過硫酸根離子及過氧化物離子。 Methods for activating metal surfaces prior to electroless palladium deposition are known in the art and can be applied to work in the present invention. Suitable aqueous activation baths may include palladium salts (such as palladium acetate, palladium sulfate, and palladium nitrate), palladium ion complexing agents (such as primary, secondary, tertiary, and ethanolamine) and acids (such as nitric acid, sulfuric acid, and methylsulfonate) acid). Optionally, such activation baths further contain oxidants such as nitrate ions, perchlorate ions, chlorate ions, perborate ions, periodate ions, persulfate ions, and peroxide ions.

鈀鹽在水性活化浴中之濃度在0.005至20g/l範圍內，較佳在0.05至2.0g/l範圍內。鈀離子錯合劑之濃度在0.01至80g/l範圍內，較佳在0.1至8g/l範圍內。 The concentration of the palladium salt in the aqueous activation bath is in the range of 0.005 to 20 g / l, preferably in the range of 0.05 to 2.0 g / l. The concentration of the palladium ion complexing agent is in the range of 0.01 to 80 g / l, preferably in the range of 0.1 to 8 g / l.

水性活化浴之pH值較佳在0至5範圍內，較佳在1至4範圍內。 The pH of the aqueous activation bath is preferably in the range of 0 to 5, and more preferably in the range of 1 to 4.

基板通常在25至30℃下在水性活化浴中浸沒一至四分鐘。在將基板浸沒在水性活化浴中之前，基板之金屬表面經清潔。為此目的， 蝕刻清潔通常在氧化酸性溶液(例如硫酸及過氧化氫之溶液)中進行。此後較佳為在酸性溶液(諸如硫酸溶液)中的另一清潔。 The substrate is usually immersed in an aqueous activation bath for one to four minutes at 25 to 30 ° C. Before immersing the substrate in an aqueous activation bath, the metal surface of the substrate is cleaned. To this end, Etching cleaning is usually performed in an oxidizing acidic solution, such as a solution of sulfuric acid and hydrogen peroxide. This is preferably followed by another cleaning in an acidic solution, such as a sulfuric acid solution.

本發明之式(I)之醛化合物增加水性電鍍浴組合物用於鈀無電沈積、尤其純鈀無電沈積之沈積速率。因此，水性電鍍浴組合物經活化，且沈積製程經加速。此有助於製造製程之加速。 The aldehyde compound of formula (I) of the present invention increases the deposition rate of an aqueous electroplating bath composition for palladium electroless deposition, especially pure palladium electroless deposition. Therefore, the aqueous plating bath composition is activated and the deposition process is accelerated. This helps speed up the manufacturing process.

已知的無電鈀沈積浴之沈積速率通常在浴液壽命期間不斷減小。因此，與新鮮製備的鈀沈積浴相比，當用老化的鈀沈積浴電鍍時，需要較長電鍍時間來獲得相同厚度及品質之鈀層。將式(I)之醛化合物添加至無電鈀電鍍浴中允許在浴液壽命期間將沈積速率調節至恆定範圍，尤其在浴液壽命期間調節至恆定較高沈積速率範圍。此確保在整個無電鈀電鍍浴壽命中沈積恆定厚度之鈀層，且有助於製造製程之製程控制。 The deposition rate of known electroless palladium deposition baths generally decreases continuously over the life of the bath. Therefore, compared with a freshly prepared palladium deposition bath, when plating with an aged palladium deposition bath, a longer plating time is required to obtain a palladium layer of the same thickness and quality. Adding an aldehyde compound of formula (I) to an electroless palladium plating bath allows adjustment of the deposition rate to a constant range during the life of the bath, especially to a constant higher deposition rate range during the life of the bath. This ensures that a constant thickness of palladium layer is deposited throughout the life of the electroless palladium plating bath, and facilitates process control of the manufacturing process.

若已知的無電鈀沈積浴之沈積速率變得過低，則該沈積浴不再適合於沈積鈀且必須丟棄。在浴液壽命期間將沈積速率調節至恆定範圍(尤其恆定較高範圍)亦延長無電鈀電鍍浴之壽命。 If the deposition rate of a known electroless palladium deposition bath becomes too low, the deposition bath is no longer suitable for depositing palladium and must be discarded. Adjusting the deposition rate to a constant range (especially a constant higher range) during the bath life also extends the life of the electroless palladium plating bath.

另外，本發明之式(I)之醛化合物使沈積速率較低(即使在新鮮製備時)之無電鈀電鍍浴活化。另外，本發明之式(I)之醛化合物使老化的無電鈀電鍍浴再活化。老化的無電鈀電鍍浴在本文中意謂已用於電鍍且沈積速率在該使用期間已下降之無電鈀電鍍浴。再活化在本文中意謂式(I)之醛化合物亦增加老化的無電鈀電鍍浴之沈積速率。 In addition, the aldehyde compound of formula (I) of the present invention activates an electroless palladium plating bath with a lower deposition rate, even when freshly prepared. In addition, the aldehyde compound of formula (I) of the present invention reactivates an aged electroless palladium plating bath. An aged electroless palladium electroplating bath means herein an electroless palladium electroplating bath that has been used for electroplating and the deposition rate has decreased during this use. Reactivation herein means that the aldehyde compound of formula (I) also increases the deposition rate of an aged electroless palladium plating bath.

對於已知的無電鈀電鍍浴及沈積法，調節沈積速率及浴液壽命之持續時間藉由使浴溫在沈積期間升高至介於55至95℃之間來達成。但無電鈀電鍍浴之溫度升高具有數種缺點。在較高溫度下操作浴液增加浴液不穩定之風險。其需要較高能量消耗。其具有一些金屬層亦存在於待電鍍之基板上的缺點。舉例而言，鋁或銅層當存在於基板上時經歷腐蝕，該基板在較高溫度下用來自沈積浴之鈀電鍍。本發明之式 (I)之醛化合物允許在介於30至65℃範圍內之較低溫度下無電沈積鈀層。因此，本發明之水性電鍍浴組合物之穩定性得以維持，且防止在來自組合物之鈀之沈積期間亦存在於基板上之金屬層的腐蝕。 For known electroless palladium plating baths and sedimentation methods, adjusting the deposition rate and the duration of the bath life is achieved by increasing the bath temperature to between 55 and 95 ° C during the sedimentation period. However, the increased temperature of the electroless palladium plating bath has several disadvantages. Operating the bath at higher temperatures increases the risk of bath instability. It requires higher energy consumption. It has the disadvantage that some metal layers also exist on the substrate to be plated. For example, an aluminum or copper layer undergoes corrosion when present on a substrate that is plated at a higher temperature with palladium from a deposition bath. Formula of the invention The aldehyde compound of (I) allows electroless deposition of a palladium layer at a lower temperature ranging from 30 to 65 ° C. Therefore, the stability of the aqueous plating bath composition of the present invention is maintained, and the corrosion of the metal layer that is also present on the substrate during the deposition of palladium from the composition is prevented.

本發明進一步關於一種在任何無電鈀沈積浴之壽命期間將沈積速率調節至恆定範圍的方法，該方法包含以下步驟：c)提供任何無電鈀沈積浴，且d)將如上文所定義之至少一種式(I)之醛化合物添加至無電鈀沈積浴中。 The invention further relates to a method of adjusting the deposition rate to a constant range during the life of any electroless palladium deposition bath, the method comprising the steps of: c) providing any electroless palladium deposition bath, and d) at least one An aldehyde compound of formula (I) is added to an electroless palladium deposition bath.

無電鈀沈積浴可為任何無電鈀沈積浴，例如任何水性無電鈀沈積浴。在一個實施例中，無電鈀沈積浴為本發明之水性電鍍浴組合物。 The electroless palladium deposition bath can be any electroless palladium deposition bath, such as any aqueous electroless palladium deposition bath. In one embodiment, the electroless palladium deposition bath is an aqueous electroplating bath composition of the present invention.

在本發明之一個實施例中，無電鈀沈積浴可為新鮮製備的無電鈀沈積浴。 In one embodiment of the present invention, the electroless palladium deposition bath may be a freshly prepared electroless palladium deposition bath.

在另一實施例中，無電鈀沈積浴可已經用於電鍍持續一些時間。 In another embodiment, an electroless palladium deposition bath may have been used for electroplating for some time.

另外，在一較佳實施例中，無電鈀沈積浴為用於無電沈積純鈀之浴液。 In addition, in a preferred embodiment, the electroless palladium deposition bath is a bath liquid for electroless deposition of pure palladium.

可在電鍍或儲存期間測定沈積速率或至少一種式(I)之醛化合物之濃度。若沈積速率或至少一種式(I)之醛化合物之濃度低於臨限值，則補充該至少一種式(I)之醛化合物。補給藉由將至少一種式(I)之醛化合物添加至無電鈀沈積浴中來進行。 The deposition rate or the concentration of at least one aldehyde compound of formula (I) can be determined during plating or storage. If the deposition rate or the concentration of at least one aldehyde compound of formula (I) is below a threshold value, the at least one aldehyde compound of formula (I) is supplemented. Recharging is performed by adding at least one aldehyde compound of formula (I) to an electroless palladium deposition bath.

至少一種式(I)之醛化合物可以固體或粉末形式添加，或可溶解於溶劑中，隨後將其添加至無電鈀沈積浴中。適合的溶劑之實例為水；酸，如硫酸、鹽酸、磷酸；鹼性溶液，如氫氧化鈉或氫氧化鉀溶液；及有機溶劑，如丙醇、乙醇、甲醇。 At least one aldehyde compound of formula (I) may be added in solid or powder form, or may be dissolved in a solvent and subsequently added to an electroless palladium deposition bath. Examples of suitable solvents are water; acids, such as sulfuric acid, hydrochloric acid, phosphoric acid; alkaline solutions, such as sodium or potassium hydroxide solutions; and organic solvents, such as propanol, ethanol, methanol.

在另一較佳實施例中，無電鈀沈積浴可已經用於電鍍持續一些 時間，且沈積速率相對於初始沈積速率已下降。在此實施例中，本發明係關於一種用於使水性無電鈀沈積浴再活化之方法，該方法包含步驟：e)提供已用過的水性無電鈀沈積浴，其中其沈積速率相對於其初始沈積速率已下降，且f)添加如上文所定義之至少一種式(I)之醛化合物，且藉此增加其沈積速率。 In another preferred embodiment, the electroless palladium deposition bath can already be used for electroplating for some time Time, and the deposition rate has decreased relative to the initial deposition rate. In this embodiment, the invention relates to a method for reactivating an aqueous electroless palladium deposition bath, the method comprising the steps of: e) providing a used aqueous electroless palladium deposition bath, wherein the deposition rate is relative to its initial rate The deposition rate has decreased, and f) at least one aldehyde compound of formula (I) as defined above is added and thereby increasing its deposition rate.

本發明進一步關於式(I)之醛化合物之用途，其用於加速鈀自任何無電鈀沈積浴沈積，及/或在任何無電鈀沈積浴之壽命期間將沈積速率調節至恆定範圍，及/或使已用於電鍍之無電鈀沈積浴再活化，其中其沈積速率相對於其初始沈積速率已下降。 The invention further relates to the use of an aldehyde compound of formula (I) for accelerating the deposition of palladium from any electroless palladium deposition bath, and / or adjusting the deposition rate to a constant range during the lifetime of any electroless palladium deposition bath, and / or The electroless palladium deposition bath that has been used for electroplating is reactivated, wherein its deposition rate has decreased relative to its initial deposition rate.

實例Examples

利用以下非限制性實例進一步闡述本發明。 The invention is further illustrated by the following non-limiting examples.

通用程序Universal program 基板及預處理： Substrate and pretreatment:

使用由經SiO2層覆蓋之矽製成且各自具有四個晶粒之測試晶片作為基板。各晶粒之表面上具有數個經分離之鋁-銅合金襯墊。該等襯墊具有直徑介於10μm至1000μm範圍內的不同大小及介於20μm至1000μm範圍內的襯墊間距離。 A test wafer made of silicon covered with a SiO 2 layer and each having four crystal grains was used as a substrate. Each grain has several separated aluminum-copper alloy pads on the surface. The pads have different sizes ranging from 10 μm to 1000 μm in diameter and the distance between the pads ranging from 20 μm to 1000 μm.

測試晶片已藉由雙重浸鋅進行預處理。隨後，測試晶片使用含有鎳(II)鹽、鎳離子還原劑、鎳離子錯合劑及穩定劑之無電鎳電鍍浴(Xenolyte Ni MP，Atotech Deutschland GmbH之產品)進行鎳電鍍。鎳電鍍浴具有4.5之pH值且在電鍍期間保持87℃。將測試晶片在鎳電鍍浴中浸沒10分鐘，且在測試晶片上電鍍3μm厚度之鎳層。隨後，測試 晶片在去離子水中沖洗且經歷鈀電鍍浴。 The test wafers have been pre-treated by double zinc leaching. Subsequently, the test wafer was subjected to nickel plating using an electroless nickel plating bath (Xenolyte Ni MP, product of Atotech Deutschland GmbH) containing a nickel (II) salt, a nickel ion reducing agent, a nickel ion complexing agent, and a stabilizer. The nickel plating bath had a pH of 4.5 and was maintained at 87 ° C during the plating. The test wafer was immersed in a nickel plating bath for 10 minutes, and a nickel layer having a thickness of 3 μm was plated on the test wafer. Then, test The wafer was rinsed in deionized water and subjected to a palladium plating bath.

鈀電鍍浴基質及鈀電鍍： Palladium plating bath substrate and palladium plating:

在所有實例中，使用pH值為5.5且包含水、鈀離子、甲酸鈉作為鈀離子還原劑及乙二胺作為鈀離子錯合劑之電鍍浴基質(Xenolyte Pd LL，Atotech Deutschland GmbH之產品)。實例中使用不同製造批次之具有不同純度之甲酸鈉。 In all examples, a plating bath substrate (Xenolyte Pd LL, product of Atotech Deutschland GmbH) having a pH of 5.5 and containing water, palladium ions, sodium formate as palladium ion reducing agent, and ethylenediamine as palladium ion complexing agent was used. The examples use different manufacturing batches of sodium formate with different purity.

在實例1至4中，將不同量之本發明式(I)之醛化合物添加至2l的個別鈀電鍍浴基質中。水性電鍍浴組合物在電鍍期間保持55℃。基板在水性電鍍浴組合物中浸沒6分鐘。隨後，基板用去離子水沖洗1分鐘，且用氣壓乾燥。 In Examples 1 to 4, different amounts of the aldehyde compound of formula (I) of the present invention were added to 2 l of an individual palladium plating bath matrix. The aqueous plating bath composition was maintained at 55 ° C during plating. The substrate was immersed in the aqueous plating bath composition for 6 minutes. Subsequently, the substrate was rinsed with deionized water for 1 minute, and dried with air pressure.

測定沈積速率： Determining the deposition rate:

在所測試之各種水性電鍍浴組合物中所沈積之鈀層厚度用X射線螢光方法(XRF；Fischer，Fischerscope® X射線XDV®-11)測定。量測各基板上之四個鈀襯墊的厚度。各種水性電鍍浴組合物之沈積速率藉由使所量測之鈀層沈積厚度除以6分鐘電鍍時間來計算。各基板之沈積速率之平均值呈現在以下實例1至4中。 The thickness of the palladium layer deposited in the various aqueous plating bath compositions tested was determined by X-ray fluorescence method (XRF; Fischer, Fischerscope® X-ray XDV®-11). Measure the thickness of the four palladium pads on each substrate. The deposition rate of various aqueous plating bath compositions was calculated by dividing the measured palladium layer deposition thickness by the 6 minute plating time. The average value of the deposition rate of each substrate is presented in Examples 1 to 4 below.

實例1Example 1

實例1用含有不同批次之甲酸鈉(亦即具有較高純度之批次2及具有較低純度之批次3)之電鍍浴基質進行。將0至10mg/l甲醛添加至電鍍浴基質中。水性電鍍浴組合物及電鍍結果概述在表1中且展示在圖1中。 Example 1 was performed using a plating bath matrix containing different batches of sodium formate (i.e., batch 2 with higher purity and batch 3 with lower purity). 0 to 10 mg / l formaldehyde is added to the plating bath matrix. The aqueous plating bath composition and plating results are summarized in Table 1 and shown in FIG. 1.

實例2Example 2

實例2用含有不同批次之甲酸鈉(亦即具有較高純度之批次2及具有較低純度之批次3)之電鍍浴基質進行。將0至10mg/l正丙醛添加至電鍍浴基質中。水性電鍍浴組合物及電鍍結果概述在表2中且展示在圖2中。 Example 2 was performed with a plating bath matrix containing different batches of sodium formate (i.e., batch 2 with higher purity and batch 3 with lower purity). 0 to 10 mg / l n-propionaldehyde is added to the plating bath matrix. The aqueous plating bath composition and plating results are summarized in Table 2 and shown in FIG. 2.

實例3Example 3

將0至1.25mg/l正戊醛添加至電鍍浴基質中。電鍍浴基質含有具有最高純度之製造批次1之甲酸鈉。水性電鍍浴組合物及電鍍結果概述在表3中且展示在圖3中。 0 to 1.25 mg / l n-valeraldehyde was added to the plating bath matrix. The plating bath matrix contains sodium formate of Manufacturing Batch 1 with the highest purity. The aqueous plating bath composition and plating results are summarized in Table 3 and shown in FIG. 3.

實例4Example 4

將0至10mg/l正戊醛添加至電鍍浴基質中。電鍍浴基質含有具有較高純度之製造批次2之甲酸鈉。水性電鍍浴組合物及電鍍結果概述在表4中且展示在圖4中。 0 to 10 mg / l of n-valeraldehyde was added to the plating bath matrix. The plating bath matrix contained sodium formate of Manufacturing Batch 2 with higher purity. The aqueous plating bath composition and plating results are summarized in Table 4 and shown in FIG. 4.

實例1至4之結果之概述Summary of results from examples 1 to 4

實例1至4展示出與缺乏式(I)之醛化合物之組合物相比，含有該 等醛化合物之水性電鍍浴組合物之沈積速率較高。沈積速率隨著醛化合物濃度增加而增加。其中不含有醛化合物之組合物(實例1至4之比較組合物)之沈積速率彼此不同，歸因於其中使用之不同批次的甲酸鈉。 Examples 1 to 4 show that compared to compositions lacking an aldehyde compound of formula (I), The deposition rate of an aqueous plating bath composition such as an aldehyde compound is higher. The deposition rate increases with increasing aldehyde compound concentration. The compositions (comparative compositions of Examples 1 to 4) in which the aldehyde compound was not contained had different deposition rates from each other due to the different batches of sodium formate used therein.

自具有或不具有式(I)之醛化合物之水性電鍍浴組合物獲得的沈澱物之純度在98至99.99重量%之間，有延性，顏色為灰色至白色，且極好地黏著至該等基板。 The precipitate obtained from an aqueous electroplating bath composition with or without an aldehyde compound of formula (I) has a purity of between 98 and 99.99% by weight, is ductile, has a color from gray to white, and adheres to these with excellent Substrate.

實例5Example 5

將0至50mg/l正戊醛添加至電鍍浴基質中。電鍍浴基質含有具有較高純度之製造批次2之甲酸鈉。水性電鍍浴組合物及電鍍結果概述在表5中。 0 to 50 mg / l of n-valeraldehyde is added to the plating bath matrix. The plating bath matrix contained sodium formate of Manufacturing Batch 2 with higher purity. The aqueous plating bath composition and plating results are summarized in Table 5.

實例6Example 6

將0至1.25mg/l正己醛添加至電鍍浴基質中。電鍍浴基質含有具有最高純度之製造批次1之甲酸鈉。水性電鍍浴組合物及電鍍結果概述在表6中。 0 to 1.25 mg / l of n-hexanal is added to the plating bath matrix. The plating bath matrix contains sodium formate of Manufacturing Batch 1 with the highest purity. The aqueous plating bath composition and plating results are summarized in Table 6.

Claims (15)

一種用於鈀之無電沈積的水性電鍍浴組合物，其包含(i)至少一種鈀離子源，(ii)至少一種鈀離子還原劑，及(iii)至少一種式(I)之醛化合物
Figure TWI680207B_C0001
其中R係選自由以下組成之群：未經取代或經取代之包含1至10個碳原子之直鏈烷基；及未經取代或經取代之包含3至10個碳原子之分支鏈烷基；及經取代或未經取代之芳基；且其中該至少一種式(I)之醛化合物具有0.01至25mg/l範圍內之濃度。An aqueous electroplating bath composition for electroless deposition of palladium, comprising (i) at least one source of palladium ions, (ii) at least one palladium ion reducing agent, and (iii) at least one aldehyde compound of formula (I)
Figure TWI680207B_C0001
Wherein R is selected from the group consisting of: unsubstituted or substituted linear alkyl groups containing 1 to 10 carbon atoms; and unsubstituted or substituted branched alkyl groups containing 3 to 10 carbon atoms ; And substituted or unsubstituted aryl groups; and wherein the at least one aldehyde compound of formula (I) has a concentration in the range of 0.01 to 25 mg / l. 如請求項1之水性電鍍浴組合物，其中該等未經取代或經取代之直鏈烷基係選自包含以下各者之群：正戊基、正丁基、正丙基、乙基及甲基。The aqueous electroplating bath composition according to claim 1, wherein the unsubstituted or substituted linear alkyl groups are selected from the group consisting of n-pentyl, n-butyl, n-propyl, ethyl and methyl. 如請求項1之水性電鍍浴組合物，其中該等未經取代或經取代之分支鏈烷基係選自包含以下各者之群：2-戊基、3-戊基、2-甲基丁基、3-甲基丁基、3-甲基丁-2-基、2-甲基丁-2-基；2,2-二甲基丙基、異丁基、第二丁基、第三丁基及異丙基。The aqueous electroplating bath composition according to claim 1, wherein the unsubstituted or substituted branched chain alkyl group is selected from the group consisting of 2-pentyl, 3-pentyl, 2-methylbutyl Group, 3-methylbutyl, 3-methylbut-2-yl, 2-methylbut-2-yl; 2,2-dimethylpropyl, isobutyl, second butyl, third Butyl and isopropyl. 如請求項1之水性電鍍浴組合物，其中該等未經取代或經取代之芳基係選自未經取代或經取代之苯基及未經取代或經取代之萘基。The aqueous electroplating bath composition according to claim 1, wherein the unsubstituted or substituted aryl groups are selected from unsubstituted or substituted phenyl groups and unsubstituted or substituted naphthyl groups. 如請求項1至4中任一項之水性電鍍浴組合物，其中該等直鏈烷基、該等分支鏈烷基或該等芳基係經取代，且該等取代基係彼此獨立地選自包含以下各者之群：胺基、羧基、酯、巰基、羥基、甲氧基、乙氧基、甲基、乙基、鹵素、烯丙基、乙烯基及芳基。The aqueous electroplating bath composition according to any one of claims 1 to 4, wherein the linear alkyl groups, the branched chain alkyl groups, or the aryl groups are substituted, and the substituents are independently selected from each other Self-contained groups of: amine, carboxyl, ester, mercapto, hydroxyl, methoxy, ethoxy, methyl, ethyl, halogen, allyl, vinyl and aryl. 如請求項1至4中任一項之水性電鍍浴組合物，其中該至少一種式(I)之醛化合物係選自己醛、戊醛、丁醛、丙醛、乙醛、甲醛、苯甲醛及2-苯乙醛。The aqueous electroplating bath composition according to any one of claims 1 to 4, wherein the at least one aldehyde compound of formula (I) is selected from acetaldehyde, valeraldehyde, butyraldehyde, propionaldehyde, acetaldehyde, formaldehyde, benzaldehyde and 2-phenylacetaldehyde. 如請求項1至4中任一項之水性電鍍浴組合物，其中該至少一種鈀離子源係選自包含以下各者之群：氯化鈀、乙酸鈀、硫酸鈀、過氯酸鈀、二氯乙烷-1,2-二胺鈀、二乙酸根乙烷-1,2-二胺鈀；二氯N1-甲基乙烷-1,2-二胺鈀；二乙酸根N1-甲基乙烷-1,2-二胺鈀；二氯N1,N2-二甲基乙烷-1,2-二胺鈀；二乙酸根N1,N2-二甲基乙烷-1,2-二胺鈀；二氯N1-乙基乙烷-1,2-二胺鈀；二乙酸根N1-乙基乙烷-1,2-二胺鈀、二氯N1,N2-二乙基乙烷-1,2-二胺鈀；及二乙酸根N1,N2-二乙基乙烷-1,2-二胺鈀。The aqueous electroplating bath composition according to any one of claims 1 to 4, wherein the at least one palladium ion source is selected from the group consisting of palladium chloride, palladium acetate, palladium sulfate, palladium perchlorate, Ethyl chloride-1,2-diamine palladium, diacetate ethane-1,2-diamine palladium; dichloro N 1 -methylethane-1,2-diamine palladium; diacetate N 1- Methylethane-1,2-diamine palladium; dichloro N 1 , N 2 -dimethylethane-1,2-diamine palladium; diacetate N 1 , N 2 -dimethylethane- 1,2-diamine palladium; dichloro N 1 -ethylethane-1,2-diamine palladium; diacetate N 1 -ethylethane-1,2-diamine palladium, dichloro N 1 , N 2 -diethylethane-1,2-diamine palladium; and diacetate N 1 , N 2 -diethylethane-1,2-diamine palladium. 如請求項1至4中任一項之水性電鍍浴組合物，其進一步包含至少一種選自由以下組成之群的鈀離子錯合劑：一級胺、二級胺及三級胺。The aqueous electroplating bath composition according to any one of claims 1 to 4, further comprising at least one palladium ion complexing agent selected from the group consisting of primary amine, secondary amine, and tertiary amine. 如請求項1至4中任一項之水性電鍍浴組合物，其中該至少一種鈀離子還原劑係選自由以下組成之群：肼、甲酸、上述各者之衍生物及其鹽。The aqueous electroplating bath composition according to any one of claims 1 to 4, wherein the at least one palladium ion reducing agent is selected from the group consisting of hydrazine, formic acid, derivatives of the foregoing, and salts thereof. 如請求項9之水性電鍍浴組合物，其中該等甲酸衍生物係選自甲酸酯。The aqueous electroplating bath composition according to claim 9, wherein the formic acid derivatives are selected from formate. 如請求項1至4中任一項之水性電鍍浴組合物，其中該至少一種還原劑之濃度係在10至1000mmol/l範圍內。The aqueous electroplating bath composition according to any one of claims 1 to 4, wherein the concentration of the at least one reducing agent is in the range of 10 to 1000 mmol / l. 一種無電鈀電鍍方法，其包含以下步驟：(a)提供基板，(b)使該基板與如請求項1至11中任一項之水性電鍍浴組合物接觸，且藉此在該基板之至少一部分上沈積鈀層。An electroless palladium plating method comprising the following steps: (a) providing a substrate, (b) contacting the substrate with the aqueous plating bath composition according to any one of claims 1 to 11, and thereby at least at the substrate A palladium layer is deposited on a part. 如請求項12之無電鈀電鍍方法，其中在步驟(b)中，使該基板與該水性電鍍浴組合物在30至65℃之溫度下接觸。The electroless palladium plating method according to claim 12, wherein in step (b), the substrate is brought into contact with the aqueous plating bath composition at a temperature of 30 to 65 ° C. 一種用於在任何無電鈀沈積浴之壽命期間將沈積速率調節至恆定範圍之方法，該方法包含以下步驟：c)提供任何無電鈀沈積浴，及d)將至少一種如請求項1所定義之式(I)之醛化合物添加至該無電鈀沈積浴中。A method for adjusting the deposition rate to a constant range during the lifetime of any electroless palladium deposition bath, the method comprising the steps of: c) providing any electroless palladium deposition bath, and d) setting at least one as defined in claim 1 The aldehyde compound of formula (I) is added to the electroless palladium deposition bath. 一種用於使水性無電鈀沈積浴再活化之方法，該方法包含以下步驟：e)提供已用過的水性無電鈀沈積浴，其中其沈積速率已相對於其初始沈積速率下降，且f)添加至少一種如請求項1所定義之式(I)之醛化合物，且藉此增加其沈積速率。A method for reactivating an aqueous electroless palladium deposition bath, the method comprising the steps of: e) providing a used aqueous electroless palladium deposition bath, wherein its deposition rate has decreased relative to its initial deposition rate, and f) added At least one aldehyde compound of formula (I) as defined in claim 1, and thereby increase its deposition rate.
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