TWI670475B - Multi-axis load cell and manufacturing method thereof - Google Patents

Multi-axis load cell and manufacturing method thereof Download PDF

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TWI670475B
TWI670475B TW107112423A TW107112423A TWI670475B TW I670475 B TWI670475 B TW I670475B TW 107112423 A TW107112423 A TW 107112423A TW 107112423 A TW107112423 A TW 107112423A TW I670475 B TWI670475 B TW I670475B
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force gauge
axial
axial direction
axis
uniaxial
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TW107112423A
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TW201944040A (en
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王逸民
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逸奇科技股份有限公司
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Abstract

本發明揭露一種多軸力規,其包含三個單軸力規以及一凝膠。三個單軸力規分別第一軸向單軸力規、第二軸向單軸力規以及第三軸向單軸力規,並且於空間中互相垂直。凝膠包含一金屬成分,並且用於灌封該等單軸向力規以形成一多軸力規。相較於習知技術,本發明利用單軸力規價格大幅低於多軸力規的特點,將三個單軸力規組合以取代價格昂貴的多軸力規,並且使用含有金屬成分之凝膠封進行封裝,使本發明之多軸力規具有防油、防水、防震以及防電磁干擾(Electromagnetic Interference,EMI)之功效。 The present invention discloses a multiaxial force gauge comprising three uniaxial force gauges and a gel. The three single-axis force gauges are respectively a first axial single-axis force gauge, a second axial single-axis force gauge, and a third axial single-axis force gauge, and are perpendicular to each other in space. The gel contains a metallic component and is used to pot seal the uniaxial force gauges to form a multiaxial force gauge. Compared with the prior art, the present invention utilizes the characteristics that the uniaxial force gauge is substantially lower than the multiaxial force gauge, and combines three uniaxial force gauges to replace the expensive multiaxial force gauge, and uses the condensation containing the metal component. The rubber seal is packaged to make the multi-axis force gauge of the present invention have the functions of oil-proof, waterproof, shockproof and electromagnetic interference (EMI).

Description

多軸力規與其製造方法 Multiaxial force gauge and its manufacturing method

本發明係關於一種多軸力規,並且特別地,關於一種利用三個單軸力規所組合而成的多軸力規。 The present invention relates to a multiaxial force gauge and, in particular, to a multiaxial force gauge that utilizes a combination of three uniaxial force gauges.

力規又稱為荷重元(Load Cell),一般廣泛被應用於製作各種感測器,力規的工作原理通常分為兩類,其一為壓電晶體式,壓電材料受力後,自然產生電位差,量測其電位差,經過校準後,可得受力值;其二為應力規式,將應力規(strain gauge)貼在材料上,可測得材料因受力大小而改變的變形量,應力規將此變形量轉換成電阻差輸出,經過校準後,可得受力值。 Force gauge, also known as Load Cell, is widely used in the production of various sensors. The working principle of force gauges is usually divided into two types, one is piezoelectric crystal type, and the piezoelectric material is stressed. The potential difference is generated, the potential difference is measured, and after being calibrated, the force value is obtained; the second is the stress gauge type, and the strain gauge is attached to the material, and the deformation amount of the material due to the force is measured. The stress gauge converts this deformation into a resistance difference output, and after calibration, the force value is obtained.

力規發展至今,從最原始的單軸向力規,發展到三軸力規(FX、FY、FZ)甚至是六軸(FX、FY、FZ、MX、MY、MZ)力規,然而,不論是三軸力規或是六軸力規,價格都比單軸力規昂貴許多,而且多軸力規的每一根軸向互相連動,意味著若需要維修時可能必須將多軸同時維修並且校正,非常不符合經濟成本。 The development of force gauges has evolved from the most primitive uniaxial force gauges to three-axis force gauges (FX, FY, FZ) and even six-axis (FX, FY, FZ, MX, MY, MZ) force gauges, however, Whether it is a three-axis force gauge or a six-axis force gauge, the price is much more expensive than a single-axis force gauge, and each axial direction of the multi-axis force gauge is interlocked with each other, meaning that multiple shafts must be repaired simultaneously if maintenance is required. And correction, very inconsistent with economic costs.

有鑑於此,本發明提供一種多軸力規,其包含三個單軸力規以及一凝膠。三個單軸力規分別為一第一軸向單軸力規、一第二軸向單軸力規以及一第三軸向單軸力規,且第一軸向單軸力規、第二軸向單軸力規以及第三軸向單軸力規互相垂直。凝膠用於灌封該等單軸力規以形成多軸力規。 In view of this, the present invention provides a multiaxial force gauge comprising three uniaxial force gauges and a gel. The three single-axis force gauges are a first axial single-axis force gauge, a second axial single-axis force gauge, and a third axial single-axis force gauge, and the first axial single-axis force gauge and the second The axial uniaxial force gauge and the third axial uniaxial force gauge are perpendicular to each other. The gel is used to pot seal the uniaxial force gauges to form a multiaxial force gauge.

於一具體實施例中,多軸力規進一步包含一第一基板以及一第二基板,且第一基板具有一溝槽。第一軸向單軸力規以及第二軸向單軸力規設置於第一基板,第三軸向單軸力規設置於第二基板,且第二基板卡合於第一基板之溝槽,以使第二基板垂直於第一基板。 In one embodiment, the multi-axis force gauge further includes a first substrate and a second substrate, and the first substrate has a trench. The first axial uniaxial force gauge and the second axial uniaxial force gauge are disposed on the first substrate, the third axial uniaxial force gauge is disposed on the second substrate, and the second substrate is engaged with the groove of the first substrate So that the second substrate is perpendicular to the first substrate.

於另一具體實施例中,多軸力規進一步包含一可撓式基板,第一軸向單軸力規、第二軸向單軸力規設置於可撓式基板之一第一端,第三軸向單軸力規設置於可撓式基板之一第二端,其中可撓式基板之第二端被垂直彎折向第一端,使第一軸向單軸力規、第二軸向單軸力規以及第三軸向單軸力規互相垂直。 In another embodiment, the multi-axis force gauge further includes a flexible substrate, and the first axial single-axis force gauge and the second axial single-axis force gauge are disposed on the first end of the flexible substrate, The three-axis single-axis force gauge is disposed on one of the second ends of the flexible substrate, wherein the second end of the flexible substrate is vertically bent toward the first end, so that the first axial single-axis force gauge and the second axis The uniaxial force gauge and the third axial uniaxial force gauge are perpendicular to each other.

於一具體實施例中,本發明之多軸力規包含一雙軸力規、一單軸力規以及一凝膠。雙軸力規具有一第一軸向以及一第二軸向,第一軸向以及第二軸向形成一平面,且第一軸向與第二軸向在該平面上相互垂直。單軸力規具有一第三軸向,其中第三軸向平行於該平面之法向量。凝膠用於灌封單軸力規以 及雙軸力規以形成多軸力規。 In one embodiment, the multiaxial force gauge of the present invention comprises a biaxial force gauge, a uniaxial force gauge, and a gel. The biaxial force gauge has a first axial direction and a second axial direction, and the first axial direction and the second axial direction form a plane, and the first axial direction and the second axial direction are perpendicular to each other in the plane. The uniaxial force gauge has a third axial direction, wherein the third axial direction is parallel to the normal vector of the plane. Gel for potting uniaxial force gauges And a biaxial force gauge to form a multiaxial force gauge.

於一具體實施例中,本發明之多軸力規包含一第一雙軸力規、一第二雙軸力規以及一凝膠。第一雙軸力規具有一第一軸向以及一第二軸向,第一軸向以及第二軸向形成一平面,且第一軸向與第二軸向在該平面上相互垂直。第二雙軸力規具有一第三軸向以及一第四軸向,其中第三軸向或第四軸向平行於該平面之法向量。凝膠用於灌封第一雙軸力規以及第二雙軸力規以形成多軸力規。 In one embodiment, the multiaxial force gauge of the present invention comprises a first biaxial force gauge, a second biaxial force gauge, and a gel. The first biaxial force gauge has a first axial direction and a second axial direction, and the first axial direction and the second axial direction form a plane, and the first axial direction and the second axial direction are perpendicular to each other in the plane. The second biaxial force gauge has a third axial direction and a fourth axial direction, wherein the third axial or fourth axial direction is parallel to a normal vector of the plane. The gel is used to potting the first biaxial force gauge and the second biaxial force gauge to form a multiaxial force gauge.

實際應用上,第一基板、第二基板、以及可撓式基板為一印刷電路板(Printed Circuit Board,PCB)。 In practical applications, the first substrate, the second substrate, and the flexible substrate are printed circuit boards (PCBs).

於一具體實施例中,凝膠包含有一金屬成分以防止電磁干擾(Electromagnetic Interference,EMI),金屬成分可以為金屬絲、金屬粉或任意金屬成分。 In one embodiment, the gel comprises a metal component to prevent electromagnetic interference (EMI), and the metal component may be a wire, a metal powder or any metal component.

相較於習知技術,本發明之多軸力規以三個單軸力規組合而成,並且使用含有金屬成分之凝膠將該等單軸力規封裝成一多軸力規。本發明利用單軸力規價格大幅低於多軸力規的特點,將三個單軸力規組合以取代價格昂貴的多軸力規,大幅降低成本。並且,本發明使用含有金屬成分之凝膠封進行封裝,使本發明之多軸力規具有防油、防水、防震以及防電磁干擾(Electromagnetic Interference,EMI)之功效,相較於傳統多軸力規,不但價格較低且實用性更高。 Compared to the prior art, the multiaxial force gauge of the present invention is assembled by three uniaxial force gauges, and the uniaxial force gauges are packaged into a multiaxial force gauge using a gel containing a metal component. The invention utilizes the characteristics that the single-axis force gauge is substantially lower than the multi-axis force gauge, and combines three single-axis force gauges to replace the expensive multi-axis force gauge, thereby greatly reducing the cost. Moreover, the present invention uses a gel seal containing a metal component for encapsulation, so that the multiaxial force gauge of the present invention has the effects of oil, water, vibration, and electromagnetic interference (EMI), compared with the conventional multiaxial force. Regulations are not only cheaper but also more practical.

110‧‧‧第一基板 110‧‧‧First substrate

112‧‧‧溝槽 112‧‧‧ trench

120‧‧‧第二基板 120‧‧‧second substrate

122‧‧‧側邊 122‧‧‧ side

210、510‧‧‧第一軸向單軸力規 210, 510‧‧‧First axial uniaxial force gauge

220、520‧‧‧第二軸向單軸力規 220, 520‧‧‧Second axial uniaxial force gauge

230、530‧‧‧第三軸向單軸力規 230, 530‧‧‧ Third axial uniaxial force gauge

300‧‧‧鑄模 300‧‧‧ mould

310‧‧‧下開口 310‧‧‧ opening

320‧‧‧澆口 320‧‧‧gate

400‧‧‧可撓式基板 400‧‧‧Flexible substrate

410‧‧‧第一端 410‧‧‧ first end

420‧‧‧第二端 420‧‧‧ second end

430‧‧‧頸部 430‧‧‧ neck

600‧‧‧殼體 600‧‧‧shell

610‧‧‧電源孔 610‧‧‧Power hole

710‧‧‧雙軸力規 710‧‧‧Dual-axis force gauge

720‧‧‧單軸力規 720‧‧‧ uniaxial force gauge

810‧‧‧第一雙軸力規 810‧‧‧First double-axis force gauge

820‧‧‧第二雙軸力規 820‧‧‧Second biaxial force gauge

S100‧‧‧步驟 S100‧‧‧ steps

S200‧‧‧步驟 S200‧‧‧ steps

S300‧‧‧步驟 S300‧‧‧ steps

S400‧‧‧步驟 S400‧‧‧Steps

S410‧‧‧步驟 S410‧‧‧Steps

S420‧‧‧步驟 S420‧‧‧ steps

S1000‧‧‧步驟 S1000‧‧‧ steps

S1100‧‧‧步驟 S1100‧‧‧Steps

S1200‧‧‧步驟 S1200‧‧‧Steps

S1300‧‧‧步驟 S1300‧‧‧Steps

S1400‧‧‧步驟 S1400‧‧‧Steps

D‧‧‧方向 D‧‧‧ Direction

D1‧‧‧第一軸向 D 1 ‧‧‧first axial

D2‧‧‧第二軸向 D 2 ‧‧‧second axial

D3‧‧‧第三軸向 D 3 ‧‧‧third axial

D4‧‧‧第四軸向 D 4 ‧‧‧fourth axis

圖1係為本發明多軸力規之一具體實施例之第一基板示意圖。 1 is a schematic view of a first substrate of a specific embodiment of a multiaxial force gauge of the present invention.

圖2係為本發明多軸力規之一具體實施例之第二基板示意圖。 2 is a schematic view of a second substrate of a specific embodiment of the multiaxial force gauge of the present invention.

圖3係為本發明多軸力規之一具體實施例之第一基板與第二基板之組合示意圖。 3 is a schematic view showing the combination of a first substrate and a second substrate in one embodiment of the multiaxial force gauge of the present invention.

圖4係為本發明多軸力規之一具體實施例之鑄模示意圖。 Fig. 4 is a schematic view showing a mold of a specific embodiment of the multiaxial force gauge of the present invention.

圖5係為本發明多軸力規之一具體實施例之封灌示意圖。 Fig. 5 is a schematic view showing the sealing of a specific embodiment of the multiaxial force gauge of the present invention.

圖6係為本發明多軸力規之一具體實施例之製作流程圖。 Fig. 6 is a flow chart showing the manufacture of a specific embodiment of the multiaxial force gauge of the present invention.

圖7係為本發明多軸力規之一具體實施例之進階流程圖。 Figure 7 is an advanced flow chart of one embodiment of the multi-axis force gauge of the present invention.

圖8係為本發明多軸力規之一具體實施例之可撓式基板示意圖。 FIG. 8 is a schematic view of a flexible substrate according to a specific embodiment of the multi-axis force gauge of the present invention.

圖9係為本發明多軸力規之一具體實施例之可撓式基板彎折示意圖。 9 is a schematic view showing a flexible substrate bending according to a specific embodiment of the multi-axis force gauge of the present invention.

圖10係為本發明多軸力規之一具體實施例之殼體示意圖。 Figure 10 is a schematic view of a housing of a specific embodiment of the multi-axis force gauge of the present invention.

圖11係為本發明多軸力規之一具體實施例之可撓式基板與殼體之組合示意圖。 11 is a schematic view showing the combination of a flexible substrate and a casing according to an embodiment of the multiaxial force gauge of the present invention.

圖12係為本發明多軸力規之一具體實施例之製作流程圖。 Fig. 12 is a flow chart showing the manufacture of a specific embodiment of the multiaxial force gauge of the present invention.

圖13係為本發明多軸力規之一具體實施例之示意圖。 Figure 13 is a schematic illustration of one embodiment of a multi-axis force gauge of the present invention.

圖14係為本發明多軸力規之一具體實施例之示意圖。 Figure 14 is a schematic illustration of one embodiment of a multiaxial force gauge of the present invention.

為了讓本發明的優點,精神與特徵可以更容易且明確地了解,後續將以具體實施例並參照所附圖式進行詳述與討論。值得注意的是,這些具體實施例僅為本發明代表性的具體實施例,其中所舉例的特定方法、裝置、條件、材質等並非用以限定本發明或對應的具體實施例。又,圖中各裝置僅係用於表達其相對位置且未按其實際比例繪述,合先敘明。 The spirit and features of the present invention will be more readily and clearly understood, and will be described and discussed in detail in the Detailed Description. It is noted that the specific embodiments are merely representative of the specific embodiments of the present invention, and the specific methods, devices, conditions, materials, and the like are not intended to limit the invention or the corresponding embodiments. Moreover, the devices in the figures are only used to express their relative positions and are not drawn in their actual proportions.

請一併參考圖1以及圖6,圖1係為本發明多軸力規之一具體實施例之第一基板110示意圖,圖6係為本發明多軸力規之一具體實施例之製作流程圖。於一具體實施例中,本發明之多軸力規包含一第一基板110、一第一軸向單軸力規210以及一第二軸向單軸力規220。首先,於步驟S100中將第一軸向單軸力規210以及第二軸向單軸力規 220固定於第一基板110。第一基板110具有一溝槽112,如圖1所示,將第一軸向單軸力規210的側邊貼合於溝槽112並且固定於第一基板110,然後將第二軸向單軸力規220固定於第一基板110,且第一軸向單軸力規210與第二軸向單軸力規220互相垂直。 Referring to FIG. 1 and FIG. 6 together, FIG. 1 is a schematic diagram of a first substrate 110 according to a specific embodiment of the multi-axis force gauge of the present invention, and FIG. 6 is a flow chart of a specific embodiment of the multi-axis force gauge of the present invention. In one embodiment, the multi-axis force gauge of the present invention includes a first substrate 110, a first axial uniaxial force gauge 210, and a second axial uniaxial force gauge 220. First, in step S100, the first axial uniaxial force gauge 210 and the second axial uniaxial force gauge are 220 is fixed to the first substrate 110. The first substrate 110 has a groove 112. As shown in FIG. 1, the side of the first axial uniaxial force gauge 210 is attached to the groove 112 and fixed to the first substrate 110, and then the second axial direction is single. The axial force gauge 220 is fixed to the first substrate 110, and the first axial single-axis force gauge 210 and the second axial single-axis force gauge 220 are perpendicular to each other.

請一併參考圖2以及圖6,圖2係為本發明多軸力規之一具體實施例之第二基板120示意圖。於一具體實施例中,本發明之多軸力規包含一第二基板120以及一第三軸向單軸力規230,並且於步驟S200中,將第三軸向單軸力規230固定於第二基板120。如圖2所示,第二基板120具有一側邊122,第三軸向單軸力規230靠近於側邊122並且貼合於第二基板120,值得注意的事,第三軸向單軸力規230並不貼合於側邊122,且第三軸向單軸力規230與側邊122的距離與第一基板110之溝槽112深度相同。 Referring to FIG. 2 and FIG. 6, FIG. 2 is a schematic diagram of a second substrate 120 according to one embodiment of the multi-axis force gauge of the present invention. In a specific embodiment, the multi-axis force gauge of the present invention includes a second substrate 120 and a third axial uniaxial force gauge 230, and in step S200, the third axial uniaxial force gauge 230 is fixed to The second substrate 120. As shown in FIG. 2, the second substrate 120 has a side 122, and the third axial uniaxial force gauge 230 is adjacent to the side 122 and is attached to the second substrate 120. It is worth noting that the third axial single axis The force gauge 230 does not conform to the side edge 122, and the distance between the third axial uniaxial force gauge 230 and the side edge 122 is the same as the depth of the groove 112 of the first substrate 110.

於上述具體實施例中,第一基板110以及第二基板120為印刷電路板(Printed Circuit Board,PCB),且第一軸向單軸力規210、第二軸向單軸力規220以及第三軸向單軸力規230以焊接方式固定於印刷電路板。 In the above embodiment, the first substrate 110 and the second substrate 120 are printed circuit boards (PCBs), and the first axial single-axis force gauge 210, the second axial single-axis force gauge 220, and the first The three-axis single-axis force gauge 230 is soldered to the printed circuit board.

請一併參考圖3以及圖6,圖3係為本發明多軸力規之一具體實施例之第一基板110與第二基板120之組合示意圖。於步驟S300中,將第二基板120垂直固定於第一基板110,其中,固定方式是將第二基板120之側邊122卡合於第一基板110之溝槽112,使第二基板120可以與第一基板110互相垂直,同時,也使第一軸向單軸力規210、第二 軸向單軸力規220以及第三軸向單軸力規230於空間中互相垂直。於實際應用上,可以於溝槽112中塗佈黏著劑,使第二基板120可以更牢固的固定於第一基板110上。 Referring to FIG. 3 and FIG. 6 together, FIG. 3 is a schematic diagram of a combination of a first substrate 110 and a second substrate 120 according to a specific embodiment of the multi-axis force gauge of the present invention. In the step S300, the second substrate 120 is vertically fixed to the first substrate 110. The fixing method is to engage the side 122 of the second substrate 120 with the groove 112 of the first substrate 110, so that the second substrate 120 can be And the first substrate 110 is perpendicular to each other, and at the same time, the first axial uniaxial force gauge 210 and the second The axial uniaxial force gauge 220 and the third axial uniaxial force gauge 230 are perpendicular to each other in space. In practical applications, the adhesive may be applied to the trench 112 so that the second substrate 120 can be more firmly fixed on the first substrate 110.

請一併參考圖4、圖5、圖6以及圖7,圖4係為本發明多軸力規之一具體實施例之鑄模300示意圖,圖5係為本發明多軸力規之一具體實施例之封灌示意圖,圖7係為本發明多軸力規之一具體實施例之進階流程圖。於步驟S400中,使用凝膠封灌第一基板110以及第二基板120,其中,又可細分為步驟S410,使用鑄模300覆蓋第一基板以及第二基板,並且注入凝膠;以及步驟S420,待凝膠冷卻後,移除鑄模300。於S400封灌凝膠的步驟中,使用到一鑄模300,鑄模300具有一下開口310以及一澆口320,鑄模300的邊長必須大於等於第一基板110之邊長,而高度必須大於等於第二基板120垂直擺放時的高度。如圖5所示,鑄模300利用下開口310覆蓋罩住第一基板110以及第二基板120的組合體,並且由澆口320灌入凝膠。凝膠本身具有防水、防油以及防震的功能,並且,於本實施例中將凝膠添加一金屬成分,利用添加金屬成分使凝膠具有屏蔽隔離的功用,以防止電磁干擾(Electromagnetic Interference,EMI),其中金屬成分可以為金屬絲、金屬粉或是金屬粒,但不限於此。之後,待凝膠冷卻後移除鑄模300,並且修整澆道口320處多餘的凝膠,以形成一個封裝完成的多軸力規,其中,鑄模300可以是單次使用的鑄模或著是可重複使用之鑄模。 Referring to FIG. 4, FIG. 5, FIG. 6 and FIG. 7, FIG. 4 is a schematic view of a mold 300 according to a specific embodiment of the multi-axis force gauge of the present invention, and FIG. 5 is a specific embodiment of the multi-axis force gauge of the present invention. FIG. 7 is an advanced flow chart of a specific embodiment of the multi-axis force gauge of the present invention. In step S400, the first substrate 110 and the second substrate 120 are sealed with a gel, wherein the step S410 may be further subdivided, the first substrate and the second substrate are covered with the mold 300, and the gel is injected; and step S420, After the gel is cooled, the mold 300 is removed. In the step of sealing the gel in S400, a mold 300 is used. The mold 300 has a lower opening 310 and a gate 320. The side length of the mold 300 must be greater than or equal to the side length of the first substrate 110, and the height must be greater than or equal to the first The height at which the two substrates 120 are vertically placed. As shown in FIG. 5, the mold 300 covers the assembly covering the first substrate 110 and the second substrate 120 with the lower opening 310, and the gel is poured from the gate 320. The gel itself has the functions of waterproofing, oil proofing and shockproof, and in the present embodiment, the gel is added with a metal component, and the metal is added to make the gel have a shielding function to prevent electromagnetic interference (Electromagnetic Interference, EMI). The metal component may be a metal wire, a metal powder or a metal particle, but is not limited thereto. Thereafter, the mold 300 is removed after the gel is cooled, and the excess gel at the sprue opening 320 is trimmed to form a packaged multi-axis force gauge, wherein the mold 300 can be a single-use mold or can be repeated The mold used.

於一具體實施例中,第一基板210以及第二基板220可以 進一步包含一電源接孔以及一訊號傳輸孔,用於傳輸電力以及感測訊號,並且於封灌的過程中使用可移除材料封住電源接孔以及訊號傳輸孔,待封裝完成後移除該可移除材料,使完成封裝的多軸力規具有外露的電源接孔以及訊號傳輸孔。於另一具體實施例中,本發明之多軸力規具有一無線傳輸模組,並且運用無線傳輸方式傳輸感測訊號。 In a specific embodiment, the first substrate 210 and the second substrate 220 may be Further comprising a power supply hole and a signal transmission hole for transmitting power and sensing signals, and sealing the power supply hole and the signal transmission hole with a removable material during the sealing process, and removing the package after the package is completed The material can be removed so that the packaged multi-axis force gauge has exposed power supply holes and signal transmission holes. In another embodiment, the multi-axis force gauge of the present invention has a wireless transmission module and transmits the sensing signal by wireless transmission.

上述各種實施例之步驟流程,僅為方便閱讀及解釋之目的,並非限定製程順序,本領域通常知識者應能理解,步驟S100、S200以及步驟S300之順序任意調換並不影響本發明之技術特徵。 The steps of the above various embodiments are merely for the purpose of convenience of reading and explanation, and are not limited to the process sequence. Those skilled in the art should understand that the order of steps S100, S200 and step S300 can be arbitrarily changed without affecting the technical features of the present invention. .

請參閱圖8以及圖12,圖8係為本發明多軸力規之一具體實施例之可撓式基板400示意圖。圖12係為本發明多軸力規之一具體實施例之製作流程圖。於一具體實施例中,本發明之多軸力規包含一可撓式基板400、一第一軸向單軸力規510、一第二軸向單軸力規520、一第三軸向單軸力規530,可撓式基板可以為由軟硬複合版或薄板所構成的印刷電路板,且可撓式基板分為一第一端410、一第二端420、以及一頸部430。首先,於步驟S1000時將第一軸向單軸力規510以及第二軸向單軸力規520固定於可撓式基板400之第一端410,並且第一軸向單軸力規410與第二軸向單軸力規420於基板平面上設置方向互相垂直。步驟S1100,將第三軸向單軸力規530固定於可撓式基板400之第二端420。 Please refer to FIG. 8 and FIG. 12. FIG. 8 is a schematic diagram of a flexible substrate 400 according to one embodiment of the multi-axis force gauge of the present invention. Fig. 12 is a flow chart showing the manufacture of a specific embodiment of the multiaxial force gauge of the present invention. In a specific embodiment, the multi-axis force gauge of the present invention comprises a flexible substrate 400, a first axial single-axis force gauge 510, a second axial single-axis force gauge 520, and a third axial single The axial force gauge 530, the flexible substrate may be a printed circuit board composed of a soft and hard composite plate or a thin plate, and the flexible substrate is divided into a first end 410, a second end 420, and a neck 430. First, the first axial uniaxial force gauge 510 and the second axial uniaxial force gauge 520 are fixed to the first end 410 of the flexible substrate 400 at step S1000, and the first axial uniaxial force gauge 410 and The second axial uniaxial force gauges 420 are disposed perpendicular to each other in the plane of the substrate. In step S1100, the third axial uniaxial force gauge 530 is fixed to the second end 420 of the flexible substrate 400.

請參閱圖9以及圖12,圖9係為本發明多軸力規之一具體實施例之可撓式基板400彎折示意圖。承步驟S1100,於步驟S1200中將可撓式基板400之第二端420由頸部430垂直彎折向第一端410,使第一 軸向單軸力規510、第二軸向單軸力規520、以及第三軸向單軸力規530於空間中互相垂直。 Please refer to FIG. 9 and FIG. 12. FIG. 9 is a schematic diagram showing the bending of the flexible substrate 400 according to one embodiment of the multi-axis force gauge of the present invention. In step S1100, the second end 420 of the flexible substrate 400 is vertically bent from the neck 430 to the first end 410 in step S1200, so that the first The axial uniaxial force gauge 510, the second axial uniaxial force gauge 520, and the third axial uniaxial force gauge 530 are perpendicular to each other in space.

請參閱圖10以及圖12,圖10係為本發明多軸力規之一具體實施例之殼體600示意圖。於本具體實施例中,本發明之多軸力規另包含一殼體600,用於固定可撓式基板400,其中殼體600包含一電源孔610,用於***供電裝置以提供多軸力規電力來源。承步驟S1200,於步驟1300中將可撓式基板400由方向D放入殼體600中,並且加以固定,其中固定方式可以為螺絲鎖固或是黏膠固定,但不限於此。 Please refer to FIG. 10 and FIG. 12. FIG. 10 is a schematic view of a housing 600 according to one embodiment of the multi-axis force gauge of the present invention. In the present embodiment, the multi-axis force gauge of the present invention further includes a housing 600 for fixing the flexible substrate 400, wherein the housing 600 includes a power hole 610 for inserting a power supply device to provide multi-axis force. Regulated power source. In step S1200, the flexible substrate 400 is placed in the housing 600 from the direction D in the step 1300, and is fixed, wherein the fixing manner may be screw locking or adhesive fixing, but is not limited thereto.

值得注意的是,在圖8、圖9以及圖10中,第一軸向單軸力規510、第二軸向單軸力規520以及第三軸向單軸力規530上的箭頭方向僅為示意力規的測力方向,而非實體元件。 It should be noted that in FIG. 8, FIG. 9 and FIG. 10, the directions of the arrows on the first axial uniaxial force gauge 510, the second axial uniaxial force gauge 520 and the third axial uniaxial force gauge 530 are only To indicate the force direction of the force gauge, not the physical component.

請參閱圖11以及圖12,圖11係為本發明多軸力規之一具體實施例之可撓式基板400與殼體600之組合示意圖。承步驟S1300,將可撓式基板400放入殼體600中如圖11所示,最後接著步驟S1400,於殼體600中倒入凝膠封灌殼體600,使殼體600與可撓式基板400結合成一多軸力規。凝膠本身具有防水、防油以及防震的功能,並且,於本實施例中將凝膠添加一金屬成分,利用添加金屬成分使凝膠具有屏蔽隔離的功用,以防止電磁干擾(Electromagnetic Interference,EMI),其中金屬成分可以為金屬絲、金屬粉或是金屬粒,但不限於此。 Please refer to FIG. 11 and FIG. 12. FIG. 11 is a schematic diagram showing the combination of the flexible substrate 400 and the housing 600 according to one embodiment of the multi-axis force gauge of the present invention. In step S1300, the flexible substrate 400 is placed in the housing 600 as shown in FIG. 11, and finally, in step S1400, the gel sealing housing 600 is poured into the housing 600 to make the housing 600 and the flexible housing. The substrate 400 is combined into a multi-axis force gauge. The gel itself has the functions of waterproofing, oil proofing and shockproof, and in the present embodiment, the gel is added with a metal component, and the metal is added to make the gel have a shielding function to prevent electromagnetic interference (Electromagnetic Interference, EMI). The metal component may be a metal wire, a metal powder or a metal particle, but is not limited thereto.

上述各種實施例之步驟流程,僅為方便閱讀及解釋之目的,並非限定製程順序,本領域通常知識者應能理解,步驟S1000、 S1100、S1200以及步驟S1300之順序任意調換並不影響本發明之技術特徵。 The steps of the above various embodiments are for the purpose of convenience of reading and explanation, and are not limited to the process sequence. Those skilled in the art should understand that step S1000, Any exchange of the sequences of S1100, S1200, and step S1300 does not affect the technical features of the present invention.

請參考圖13,圖13係為本發明多軸力規之一具體實施例之示意圖。於一具體實施例中,本發明之多軸力規包含一雙軸力規710,一單軸力規720以及一凝膠。雙軸力規710具有一第一軸向D1以及一第二軸向D2,第一軸向D1以及第二軸向D2形成一平面,且第一軸向D1與第二軸向D2在該平面上相互垂直。單軸力規720具有一第三軸向D3,其中第三軸向D3平行於該平面之法向量,亦即第一軸向D1、第二軸向D2、以及第三軸向D3設置兩兩互相垂直。之後,再使用凝膠灌封固定單軸力規以及雙軸力規以形成一多軸力規。其中,本實施例精神在於使用雙軸力規替代上述實施例之第一軸向單軸力規以及第二軸向單軸力規,其固定方式以及凝膠封灌方式於本實施例中並不限定,可參考使用上述實施例所使用之固定方式以及灌封方式。 Please refer to FIG. 13, which is a schematic diagram of a specific embodiment of the multi-axis force gauge of the present invention. In one embodiment, the multiaxial force gauge of the present invention comprises a biaxial force gauge 710, a uniaxial force gauge 720, and a gel. The biaxial force gauge 710 has a first axial direction D 1 and a second axial direction D 2 , and the first axial direction D 1 and the second axial direction D 2 form a plane, and the first axial direction D 1 and the second axial axis The directions D 2 are perpendicular to each other on the plane. The uniaxial force gauge 720 has a third axial direction D 3 , wherein the third axial direction D 3 is parallel to the normal vector of the plane, that is, the first axial direction D 1 , the second axial direction D 2 , and the third axial direction D 3 sets the two perpendicular to each other. Thereafter, the uniaxial force gauge and the biaxial force gauge are fixed using a gel potting to form a multiaxial force gauge. The spirit of the embodiment is to replace the first axial uniaxial force gauge and the second axial uniaxial force gauge of the above embodiment by using a biaxial force gauge, and the fixing manner thereof and the gel sealing method are in the embodiment. Without limitation, reference may be made to the fixing method and the potting method used in the above embodiments.

請參考圖14,圖14係為本發明多軸力規之一具體實施例之示意圖。於一具體實施例中,本發明之多軸力規包含一第一雙軸力規810,一第二軸力規820以及一凝膠。第一雙軸力規810具有一第一軸向D1以及一第二軸向D2,第一軸向D1以及第二軸向D2形成一平面,且第一軸向D1與第二軸向D2在該平面上相互垂直。第二雙軸力規820具有一第三軸向D3以及一第四軸向D4,其中第三軸向D3平行於該平面之法向量,亦即第一軸向D1、第 二軸向D2與第三軸向D3在空間中互相垂直,此外,雖然圖14之實施例以第三軸向D3平行於該平面之法向量,但在實際應用上,亦可以以第四軸向D4平行於該平面之法向量,使第一軸向D1、第二軸向D2與第四軸向D4在空間中互相垂直。之後,再使用凝膠灌封固定第一雙軸力規以及第二雙軸力規以形成一多軸力規。如圖14所示,第一雙軸力規810之第二軸向D2與第二雙軸力規820之第四軸向D4相互平行,因此第二軸向D2及第四軸向D4所量測之訊號應相同或是相似,因此可以把其中一軸所量測之值當做基準值,另一軸則做為校正之用途。此外,雖然圖14之實施例以第二軸向D2與第四軸向D4相互平行,於實際應用上並不限於此配置方式,亦可以第一軸向D1和第三軸向D3互相平行,或其他的排列組合。其中,本實施例精神在於使用兩個雙軸力組合成一三軸力規,其固定方式以及凝膠封灌方式於本實施例中並不限定,可參考使用上述實施例所使用之固定方式以及灌封方式。 Please refer to FIG. 14, which is a schematic diagram of a specific embodiment of the multi-axis force gauge of the present invention. In one embodiment, the multiaxial force gauge of the present invention comprises a first biaxial force gauge 810, a second axial force gauge 820, and a gel. The first biaxial force gauge 810 has a first axial direction D 1 and a second axial direction D 2 , and the first axial direction D 1 and the second axial direction D 2 form a plane, and the first axial direction D 1 and the first The two axial directions D 2 are perpendicular to each other in this plane. The second biaxial force gauge 820 has a third axial direction D 3 and a fourth axial direction D 4 , wherein the third axial direction D 3 is parallel to the normal vector of the plane, that is, the first axial direction D 1 , the second The axial direction D 2 and the third axial direction D 3 are perpendicular to each other in space. Further, although the embodiment of FIG. 14 is parallel to the normal vector of the plane in the third axial direction D 3 , in practical applications, The four axial directions D 4 are parallel to the normal vector of the plane such that the first axial direction D 1 , the second axial direction D 2 and the fourth axial direction D 4 are perpendicular to each other in space. Thereafter, the first biaxial force gauge and the second biaxial force gauge are fixed using a gel potting to form a multiaxial force gauge. As shown in FIG. 14, the second axial direction D 2 of the first biaxial force gauge 810 and the fourth axial direction D 4 of the second biaxial force gauge 820 are parallel to each other, and thus the second axial direction D 2 and the fourth axial direction The signals measured by D 4 should be the same or similar, so the value measured by one axis can be used as the reference value and the other axis can be used for calibration purposes. In addition, although the embodiment of FIG. 14 is parallel to the second axial direction D 2 and the fourth axial direction D 4 , it is not limited to this configuration in practical applications, and may also be the first axial direction D 1 and the third axial direction D. 3 parallel to each other, or other arrangements. The spirit of the embodiment is that the two biaxial forces are combined into a three-axis force gauge, and the fixing manner and the gel sealing method are not limited in this embodiment, and the fixing manner used in the above embodiment can be referred to. And the method of potting.

於實際應用上,本發明之多軸力規得應用於CNC(Computer Numerical Control)工具機振動量測,將多軸力規貼覆於CNC工具機上,量測工具機三維空間的震動,並且遠端監控以掌握機台狀況。由於本發明之多軸力規是使用第一基板110直接接觸待測物,而且沒有外殼(僅以凝膠包覆),因此受到的雜訊干擾遠小於傳統多軸力規,使量測數值更為精準。於其他實施例中,本發明之多軸力規亦可 以將溫度感測元件、聲音感測元件等其他裝置設置於基板上,形成一多功能多軸力規。 In practical application, the multi-axis force gauge of the present invention can be applied to the vibration measurement of a CNC (Computer Numerical Control) machine tool, and the multi-axis force gauge is attached to the CNC machine tool to measure the vibration of the three-dimensional space of the machine tool, and Remote monitoring to master the status of the machine. Since the multi-axis force gauge of the present invention directly contacts the object to be tested using the first substrate 110 and has no outer casing (coated only with a gel), the noise interference received is much smaller than that of the conventional multi-axis force gauge, so that the measurement value is made. More precise. In other embodiments, the multi-axis force gauge of the present invention may also A multi-functional multi-axis force gauge is formed by disposing a temperature sensing element, a sound sensing element, and the like on the substrate.

雖然本發明上述實施例以三軸力規為例,但使用相同的技術手段亦可以依客戶需求製作六軸力規或客製化特殊規格的多軸向力規,例如再結合三個測扭力的力規形成六軸力規,或是結合一個測扭力的力規形成客製化特殊規格的四軸力規。 Although the above embodiment of the present invention takes a three-axis force gauge as an example, the same technical means can also be used to manufacture a six-axis force gauge or a customized special-purpose multi-axial force gauge according to customer requirements, for example, combining three torque measuring forces. The force gauge forms a six-axis force gauge, or a force gauge that combines a torque measurement to form a customized four-axis force gauge.

相較於習知技術,本發明之多軸力規以三個單軸力規組合而成,並且使用含有金屬成分之凝膠將該等單軸力規封裝成一多軸力規。本發明利用單軸力規價格大幅低於多軸力規的特點,將三個單軸力規組合以取代價格昂貴的多軸力規,大幅降低成本。並且,本發明使用含有金屬成分之凝膠封進行封裝,使本發明之多軸力規具有防油、防水、防震以及防電磁干擾(Electromagnetic Interference,EMI)之功效,相較於傳統多軸力規,不但價格較低且實用性更高。 Compared to the prior art, the multiaxial force gauge of the present invention is assembled by three uniaxial force gauges, and the uniaxial force gauges are packaged into a multiaxial force gauge using a gel containing a metal component. The invention utilizes the characteristics that the single-axis force gauge is substantially lower than the multi-axis force gauge, and combines three single-axis force gauges to replace the expensive multi-axis force gauge, thereby greatly reducing the cost. Moreover, the present invention uses a gel seal containing a metal component for encapsulation, so that the multiaxial force gauge of the present invention has the effects of oil, water, vibration, and electromagnetic interference (EMI), compared with the conventional multiaxial force. Regulations are not only cheaper but also more practical.

藉由以上較佳具體實施例之詳述,係希望能更加清楚描述本發明之特徵與精神,而並非以上述所揭露的較佳具體實施例來對本發明之範疇加以限制。相反地,其目的是希望能涵蓋各種改變及具相等性的安排於本發明所欲申請之專利範圍的範疇內。因此,本發明所申請之專利範圍的範疇應根據上述的說明作最寬廣的解釋,以致使其涵蓋所有可能的改變以及具相等性的安排。 The features and spirit of the present invention will be more apparent from the detailed description of the preferred embodiments. On the contrary, the intention is to cover various modifications and equivalents within the scope of the invention as claimed. Therefore, the scope of the patented scope of the invention should be construed in the broadest

Claims (6)

一種多軸力規,其包含:三個單軸力規,其包含一第一軸向單軸力規、一第二軸向單軸力規以及一第三軸向單軸力規;一可撓式基板,該第一軸向單軸力規、該第二軸向單軸力規設置於該可撓式基板之一第一端並形成一平面,該第一軸向單軸力規與該第二軸向單軸力規於該平面上互相垂直,該第三軸向單軸力規設置於該可撓式基板之一第二端,其中該可撓式基板之該第二端被垂直彎折向該第一端,使該第三軸向單軸力規平行於該平面之法向量;以及一凝膠,用於灌封該可撓式基板與該等單軸力規以形成該多軸力規。 A multi-axis force gauge comprising: three single-axis force gauges, comprising a first axial single-axis force gauge, a second axial single-axis force gauge, and a third axial single-axis force gauge; a first axial uniaxial force gauge, the second axial uniaxial force gauge is disposed at one of the first ends of the flexible substrate and forms a plane, and the first axial uniaxial force gauge The second axial uniaxial force gauge is perpendicular to the plane. The third axial uniaxial force gauge is disposed at one of the second ends of the flexible substrate, wherein the second end of the flexible substrate is Vertically bending toward the first end such that the third axial uniaxial force gauge is parallel to a normal vector of the plane; and a gel for potting the flexible substrate and the uniaxial force gauges to form The multi-axis force gauge. 如請求項1所述之多軸力規,其中該凝膠包含有一金屬成分。 The multiaxial force gauge of claim 1, wherein the gel comprises a metal component. 一種多軸力規,其包含:一雙軸力規,其具有一第一軸向以及一第二軸向,該第一軸向以及該第二軸向形成一平面,且該第一軸向與該第二軸向在該平面上相互垂直;一單軸力規,其具有一第三軸向;一可撓式基板,該雙軸力規設置於該可撓式基板之一第一端,該單軸力規設置於該可撓式基板之一第二端, 其中該可撓式基板之該第二端被垂直彎折向該第一端,使該第三軸向平行於該平面之法向量;以及一凝膠,用於灌封該可撓式基板、該單軸力規以及該雙軸力規以形成該多軸力規。 A multi-axis force gauge comprising: a biaxial force gauge having a first axial direction and a second axial direction, the first axial direction and the second axial direction forming a plane, and the first axial direction And the second axial direction is perpendicular to the plane; a uniaxial force gauge having a third axial direction; a flexible substrate disposed on the first end of the flexible substrate The uniaxial force gauge is disposed on the second end of the flexible substrate. Wherein the second end of the flexible substrate is bent perpendicularly to the first end such that the third axis is parallel to a normal vector of the plane; and a gel is used for potting the flexible substrate, The uniaxial force gauge and the biaxial force gauge form the multiaxial force gauge. 一種多軸力規,其包含:一第一雙軸力規,具有一第一軸向以及一第二軸向,該第一軸向以及該第二軸向形成一平面,且該第一軸向與該第二軸向在該平面上相互垂直;一第二雙軸力規,其具有一第三軸向以及垂直於該第三軸向之一第四軸向;一可撓式基板,該第一雙軸力規設置於該可撓式基板之一第一端,該第二雙軸力規設置於該可撓式基板之一第二端,其中該可撓式基板之該第二端被垂直彎折向該第一端,使該第三軸向或該第四軸向平行於該平面之法向量;以及一凝膠,用於灌封該可撓式基板、該第一雙軸力規以及該第二雙軸力規以形成該多軸力規。 A multi-axis force gauge comprising: a first biaxial force gauge having a first axial direction and a second axial direction, the first axial direction and the second axial direction forming a plane, and the first axis a second biaxial force gauge having a third axial direction and a fourth axial direction perpendicular to the third axial direction; a flexible substrate, The first biaxial force gauge is disposed at one of the first ends of the flexible substrate, and the second biaxial force gauge is disposed at one of the second ends of the flexible substrate, wherein the second of the flexible substrate The end is vertically bent toward the first end such that the third axis or the fourth axis is parallel to a normal vector of the plane; and a gel for potting the flexible substrate, the first pair An axial force gauge and the second biaxial force gauge to form the multiaxial force gauge. 一種多軸力規之製造方法,其包含下列步驟:將一第一軸向單軸力規以及一第二軸向單軸力規固定於一可撓式基板之一第一端,並且該第一軸向單軸力規與該第二軸向單軸力規互相垂直;將一第三軸向單軸力規固定於該可撓式基板之一第 二端;將該可撓式基板之該第二端垂直度彎折向該第一端,使該第一軸向單軸力規、該第二軸向單軸力規以及該第三軸向單軸力規互相垂直;以及使用一凝膠灌封該可撓式基板以形成該多軸力規。 A method for manufacturing a multi-axis force gauge, comprising the steps of: fixing a first axial uniaxial force gauge and a second axial uniaxial force gauge to a first end of a flexible substrate, and the first The axial uniaxial force gauge and the second axial uniaxial force gauge are perpendicular to each other; and the third axial uniaxial force gauge is fixed to one of the flexible substrates a second end; bending the second end perpendicularity of the flexible substrate toward the first end, the first axial uniaxial force gauge, the second axial uniaxial force gauge, and the third axial direction The uniaxial force gauges are perpendicular to each other; and the flexible substrate is potted using a gel to form the multiaxial force gauge. 一種多軸力規之製造方法,其包含下列步驟:將一雙軸力規固定於一可撓式基板之一第一端,該雙軸力規具有一第一軸向以及一第二軸向,並且該第一軸向與該第二軸向互相垂直;將一單軸力規固定於該可撓式基板之一第二端,且其具有一第三軸向;將該可撓式基板之該第二端垂直度彎折向該第一端,使該第一軸向、該第二軸向以及該第三軸向互相垂直;以及使用一凝膠灌封該可撓式基板以形成該多軸力規。 A method for manufacturing a multi-axis force gauge, comprising the steps of: fixing a biaxial force gauge to a first end of a flexible substrate, the biaxial force gauge having a first axial direction and a second axial direction, And the first axial direction and the second axial direction are perpendicular to each other; a uniaxial force gauge is fixed to the second end of the flexible substrate, and has a third axial direction; the flexible substrate is The second end is bent perpendicularly to the first end such that the first axial direction, the second axial direction, and the third axial direction are perpendicular to each other; and the flexible substrate is potted using a gel to form the Multi-axis force gauge.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1192419B1 (en) * 1999-03-17 2007-04-18 Input/Output, Inc. Integrated and multi-axis sensor assembly and packaging
TWM434932U (en) * 2012-03-15 2012-08-01 An-Bang Cheng Cylindrical beam type xix-component force sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1192419B1 (en) * 1999-03-17 2007-04-18 Input/Output, Inc. Integrated and multi-axis sensor assembly and packaging
TWM434932U (en) * 2012-03-15 2012-08-01 An-Bang Cheng Cylindrical beam type xix-component force sensor

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