TWI669178B - Processing device for collecting laser light by using droplets and processing method thereof - Google Patents
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Abstract
本發明係包括一工作部及一雷射光源。工作部係具有一工作空間，用以設一待加工物。待加工物具有一工作表面，用以披覆一工作液，工作液係為一高分子材料及一溶劑之混合液。利用呼吸圖法，使工作液於溶劑揮發後變成一高分子膜，並於高分子膜上冷凝出複數液滴，而形成一透鏡部。雷射光源用以朝透鏡部發出一雷射光，進而聚集於工作表面上，使工作表面形成至少一雷射加工凹部。故，本案達到改變液滴形狀或排列方式即可輕易控制改變雷射聚集或加工條件，及非平面結構也可進行雷射加工微奈米孔洞等優點。The invention includes a working portion and a laser source. The working department has a working space for setting a workpiece to be processed. The workpiece has a working surface for covering a working fluid, and the working fluid is a mixture of a polymer material and a solvent. The respiratory diagram method is used to convert the working solution into a polymer film after volatilization of the solvent, and a plurality of droplets are condensed on the polymer film to form a lens portion. The laser light source emits a laser light toward the lens portion to be concentrated on the working surface, so that the working surface forms at least one laser processing recess. Therefore, the case can change the shape or arrangement of the droplets to easily control the laser aggregation or processing conditions, and the non-planar structure can also perform the advantages of laser processing micro-nano holes.
Description
本發明係有關一種利用液滴聚集雷射光之加工裝置及其加工方法，尤指一種兼具改變液滴形狀或排列方式即可輕易控制改變雷射聚集或加工條件，及非平面結構也可進行雷射加工微奈米孔洞或表面紋理之利用液滴聚集雷射光之加工裝置及其加工方法。 The invention relates to a processing device for collecting laser light by using droplets and a processing method thereof, in particular, a method for changing the shape or arrangement of droplets can be easily controlled to change laser gathering or processing conditions, and a non-planar structure can also be carried out. Laser processing micro-nano holes or surface texture processing devices using droplets to concentrate laser light and processing methods thereof.
傳統之呼吸圖法(breath figure method)，常應用於生成規則排列微孔洞之高分子薄膜，例如日本專利公開號2011-105730所揭露之呼吸圖法中，主要是藉由蒸發之有機溶液所吸收之潛熱，來冷卻高分子塗層，及在經冷卻之該高分子塗層上，將濕氣凝結成複數個微形小水液，以便在該高分子塗層上形成複數個凹面或球狀凹面。並當該有機溶劑蒸發完全之後，該高分子塗層硬化且所凝結之水液蒸發完畢，即可得到一具有規則排列微孔洞之高分子膜。 The conventional breath figure method is often applied to the production of a polymer film having a regular arrangement of micropores. For example, in the respiratory diagram method disclosed in Japanese Patent Publication No. 2011-105730, the organic solution is mainly evaporated. Absorbing latent heat to cool the polymer coating, and on the cooled polymer coating, condensing moisture into a plurality of micro-shaped small water liquids to form a plurality of concave surfaces or balls on the polymer coating layer Concave surface. And after the organic solvent is completely evaporated, the polymer coating is hardened and the condensed water liquid is evaporated to obtain a polymer film having regularly arranged micropores.
其次，中華民國專利公開編號201434889之「用以製造在膜表面上有奈米結構之膜的方法」，也是利用呼吸圖法，以在一膜表面上形成有奈米結構之膜。 Next, the method of "manufacturing a film having a nanostructure on a film surface" of the Republic of China Patent Publication No. 201434889 is also a film in which a nanostructure is formed on a film surface by a respiratory diagram method.
雖然此呼吸圖法已是習知技術，主要是應用於多孔膜之製造。在呼吸圖法之製程中，因凝結之液滴迅速消失而無法作為透鏡，因此，無法將其應用於雷射加工上。 Although this breath pattern method is a well-known technique, it is mainly applied to the manufacture of a porous film. In the process of the respiratory diagram method, since the condensed droplets quickly disappear and cannot be used as a lens, they cannot be applied to laser processing.
因此，本專利之發明人便研發如何利用呼吸圖法所產生之液滴，作為透鏡而可應用於雷射加工上之技術。 Therefore, the inventors of the present patent have developed a technique for applying laser droplets generated by a breath pattern method as a lens to laser processing.
本發明之目的，在於提供一種利用液滴聚集雷射光之加工裝置及其加工方法，其兼具改變液滴形狀或排列方式即可輕易控制改變雷射聚集或加工條件， 及非平面結構也可進行雷射加工微奈米孔洞等優點。特別是，本發明所欲解決之問題係在於目前對於以雷射加工基板產生微奈米孔洞之技術中，因熔渣飛濺及熱影響區而可能產生之成品瑕疵等問題。而使用液滴作為透鏡，則可解決這些問題。同時，目前尚沒有將呼吸圖法應用於雷射加工微奈米孔洞上之技術。 The object of the present invention is to provide a processing device for collecting laser light by using droplets and a processing method thereof, which can easily control the change of laser aggregation or processing conditions by changing the shape or arrangement of droplets. And non-planar structures can also perform the advantages of laser processing micro-nano holes. In particular, the problem to be solved by the present invention is the problem of the finished product defects which may occur due to slag splashing and heat-affected zones in the technique of producing micro-nano holes by laser processing of substrates. These problems can be solved by using droplets as lenses. At the same time, there is currently no technique for applying the respiratory map method to laser processing micro-nano holes.
解決上述問題之技術手段係提供一種利用液滴聚集雷射光之加工裝置及其加工方法，其加工裝置包括：一工作部，係具有一工作空間，其內設一待加工物；該待加工物具有一工作表面，該工作表面上披覆一工作液；該工作液係為一高分子材料及一溶劑之混合液；利用呼吸圖法，使該工作液於該溶劑揮發後變成一高分子膜，並可於該高分子膜及該工作表面上，冷凝出複數液滴，該複數液滴係用以形成一透鏡部，該透鏡部係呈接觸該工作表面、位於該高分子膜內、位於該高分子膜上其中至少一者，前述之呼吸圖法係被定義為在該工作空間內供入並供出濕氣，該濕氣與複數液滴係為相同成份，且該濕氣之一部份係冷凝為該複數液滴；又，該高分子膜及該液滴之透光率係高於90%，且該液滴之相對揮發速度係低於水；一雷射光源，係用以朝該透鏡部發出一雷射光，該透鏡部使雷射能量聚集於該工作表面上，進而使該工作表面形成至少一雷射加工凹部。 The technical means for solving the above problems is to provide a processing device for collecting laser light by using a droplet, and a processing method thereof, the processing device comprising: a working portion having a working space, wherein a workpiece to be processed is provided; Having a working surface, the working surface is coated with a working fluid; the working fluid is a mixture of a polymer material and a solvent; and the working fluid is volatilized into a polymer film by the respiratory diagram method And condensing a plurality of droplets on the polymer film and the working surface, wherein the plurality of droplets are used to form a lens portion, the lens portion is in contact with the working surface, is located in the polymer film, and is located At least one of the polymer films, the breathing pattern method is defined as supplying and supplying moisture in the working space, the moisture and the plurality of droplets being the same component, and one part of the moisture The portion is condensed into the plurality of droplets; further, the transmittance of the polymer film and the droplet is higher than 90%, and the relative volatilization velocity of the droplet is lower than water; a laser source is used for Send a ray to the lens Light, the laser energy concentration making the lens portion on the working surface, the working surface is formed thereby enabling laser processing at least a concave portion.
其加工方法包括下列步驟：一．準備步驟；二．液滴形成步驟；三．雷射加工步驟。 The processing method includes the following steps: Preparation steps; two. Droplet formation step; three. Laser processing steps.
本發明之上述目的與優點，不難從下述所選用實施例之詳細說明與附圖中，獲得深入瞭解。 The above objects and advantages of the present invention will be readily understood from the following detailed description of the preferred embodiments illustrated herein.
茲以下列實施例並配合圖式詳細說明本發明於後： The invention will be described in detail in the following examples in conjunction with the drawings:
10‧‧‧工作部 10‧‧‧Working Department
10A‧‧‧工作空間 10A‧‧‧Workspace
10B‧‧‧第一工作部 10B‧‧‧First Work Department
10C‧‧‧第二工作部 10C‧‧‧Second Work Department
101‧‧‧第一空間 101‧‧‧First space
102‧‧‧第二空間 102‧‧‧Second space
20‧‧‧雷射光源 20‧‧‧Laser light source
21‧‧‧雷射光 21‧‧‧Laser light
30‧‧‧工作液 30‧‧‧Working fluid
30A‧‧‧高分子膜 30A‧‧‧ polymer film
40、60A‧‧‧液滴 40, 60A‧‧‧ droplets
50‧‧‧水液 50‧‧‧Water
51‧‧‧孔洞部 51‧‧‧ hole department
60‧‧‧液 60‧‧‧ liquid
90‧‧‧待加工物 90‧‧‧Processing
91‧‧‧工作表面 91‧‧‧Work surface
911‧‧‧雷射加工凹部 911‧‧ ‧ laser processing recess
92‧‧‧3D工作曲面 92‧‧‧3D working surface
M‧‧‧透鏡部 M‧‧‧Lens Department
θ‧‧‧接觸角 Θ‧‧‧contact angle
W1、S1‧‧‧準備步驟 W1, S1‧‧‧ preparation steps
W2‧‧‧液滴形成步驟 W2‧‧‧ droplet formation steps
W3‧‧‧雷射加工步驟 W3‧‧‧ Laser processing steps
S2‧‧‧浸液步驟 S2‧‧‧ immersion step
S3‧‧‧旋轉塗覆步驟 S3‧‧‧Rotating coating step
S4‧‧‧旋轉移除步驟 S4‧‧‧Rotation removal step
S5‧‧‧完成透鏡部步驟 S5‧‧‧Complete lens step
第1圖係本發明之裝置之示意圖 Figure 1 is a schematic view of the apparatus of the present invention
第2圖係第1圖之局部剖視圖 Figure 2 is a partial cross-sectional view of Figure 1.
第3圖係本發明之第一種加工方法之過程之一之示意圖 Figure 3 is a schematic illustration of one of the processes of the first processing method of the present invention
第4圖係本發明之第一種加工方法之過程之二之示意圖 Figure 4 is a schematic view showing the second process of the first processing method of the present invention.
第5圖係本發明之第一種加工方法之過程之三之示意圖 Figure 5 is a schematic view showing the third process of the first processing method of the present invention.
第6A圖係本發明之第一種加工方法之過程之四之示意圖 Figure 6A is a schematic view of the fourth process of the first processing method of the present invention.
第6B圖係本發明之第一種加工方法之另一應用例之示意圖 6B is a schematic view showing another application example of the first processing method of the present invention.
第7圖係本發明之第一種加工方法之液滴聚焦雷射加工之過程之一之示意圖 Figure 7 is a schematic view showing one of the processes of droplet focusing laser processing of the first processing method of the present invention.
第8圖係本發明之第一種加工方法之液滴聚焦雷射加工之過程之二之示意圖 Figure 8 is a schematic view showing the second process of droplet focusing laser processing in the first processing method of the present invention.
第9圖係本發明之第二種加工方法之過程之一之示意圖 Figure 9 is a schematic illustration of one of the processes of the second processing method of the present invention
第10圖係本發明之第二種加工方法之過程之二之示意圖 Figure 10 is a schematic view showing the second process of the second processing method of the present invention.
第11圖係本發明之第二種加工方法之過程之三之示意圖 Figure 11 is a schematic view showing the third process of the second processing method of the present invention.
第12圖係本發明之第二種加工方法之過程之四之示意圖 Figure 12 is a schematic view showing the fourth process of the second processing method of the present invention.
第13圖係本發明之第二種加工方法之液滴聚焦雷射加工之示意圖 Figure 13 is a schematic view of droplet focusing laser processing of the second processing method of the present invention
第14圖係本發明之第三種加工方法之過程之一之示意圖 Figure 14 is a schematic view showing one of the processes of the third processing method of the present invention.
第15圖係本發明之第三種加工方法之過程之二之示意圖 Figure 15 is a schematic view showing the second process of the third processing method of the present invention.
第16圖係本發明之第三種加工方法之過程之三之示意圖 Figure 16 is a schematic view showing the third process of the third processing method of the present invention.
第17圖係本發明之第三種加工方法之過程之四之示意圖 Figure 17 is a schematic view showing the fourth process of the third processing method of the present invention.
第18圖係本發明之第三種加工方法之過程之五之示意圖 Figure 18 is a schematic view showing the fifth process of the third processing method of the present invention.
第19圖係本發明之第三種加工方法之過程之六之示意圖 Figure 19 is a schematic view showing the sixth process of the third processing method of the present invention.
第20圖係本發明之第一種加工方法之流程圖 Figure 20 is a flow chart of the first processing method of the present invention.
第21圖係本發明之第三種加工方法之流程圖 Figure 21 is a flow chart of the third processing method of the present invention.
第22圖係本發明之加工成本之實際放大照片 Figure 22 is an actual enlarged photograph of the processing cost of the present invention.
第23圖係第22圖之局部放大照片 Figure 23 is a partial enlarged photo of Figure 22.
參閱第1及第2圖，本發明係為一種利用液滴聚集雷射光之加工裝置及其加工方法，其加工裝置係包括一工作部10及一雷射光源20。 Referring to Figures 1 and 2, the present invention is a processing apparatus for collecting laser light by using a droplet, and a processing method thereof, the processing apparatus comprising a working portion 10 and a laser light source 20.
關於該工作部10，係具有一工作空間10A，其內設一待加工物90；該待加工物90具有一工作表面91，該工作表面91上披覆一工作液30(參閱第3圖)；該工作液30係為一高分子材料及一溶劑之混合液；利用呼吸圖法(breath figure method)，使該工作液30於該溶劑揮發(參閱第4圖)後變成一高分子膜30A(參閱第5圖)，並可於該高分子膜30A及該工作表面91上，冷凝出複數液滴40，該複數液滴40係用以形成一透鏡部M，該透鏡部M(亦即該複數液滴40)係呈接觸該工作表面91、位於該高分子膜30A內、位於該高分子膜30A上其中至少一者，前述之呼吸圖法係被定義為在該工作空間10A內供入並供出濕氣(如第1圖所示，濕氣以空心箭頭表示，未予編號，合先陳明)，該濕氣與該複數液滴40係為相同成份，且該濕氣之一部份係冷凝為該複數液滴40；又，該高分子膜30A及該液滴40之透光率係高於90%，且該液滴40之相對揮發速度係低於水。 The working portion 10 has a working space 10A, and a workpiece 90 is disposed therein. The workpiece 90 has a working surface 91. The working surface 91 is covered with a working fluid 30 (see FIG. 3). The working fluid 30 is a mixture of a polymer material and a solvent; and the working fluid 30 is volatilized in the solvent (see FIG. 4) by a breath figure method to become a polymer film 30A. (refer to FIG. 5), and a plurality of droplets 40 are condensed on the polymer film 30A and the working surface 91, and the plurality of droplets 40 are used to form a lens portion M, that is, the lens portion M (ie, The plurality of droplets 40) are in contact with the working surface 91, located in the polymer film 30A, and at least one of the polymer film 30A. The respiratory pattern is defined as being provided in the working space 10A. Incorporating and supplying moisture (as shown in Fig. 1, the moisture is indicated by a hollow arrow, not numbered, and the first is clearly indicated), the moisture and the plurality of droplets 40 are the same component, and one of the moisture The portion is condensed into the plurality of droplets 40; further, the transmittance of the polymer film 30A and the droplets 40 is higher than 90%, and the The relative volatilization rate of the droplets 40 is lower than that of water.
關於該雷射光源20，係用以朝該透鏡部M發出一雷射光21(參閱第6A或第6B圖)，該透鏡部M係使雷射能量聚集(包括聚焦與離焦)於該工作表面91(包括該高分子膜30A)上，進而使該工作表面91形成至少一雷射加工凹部911(參閱第7及第8圖)。 The laser light source 20 is configured to emit a laser beam 21 (see FIG. 6A or FIG. 6B) toward the lens portion M, and the lens portion M concentrates laser energy (including focusing and defocusing) in the work. On the surface 91 (including the polymer film 30A), the working surface 91 is further formed with at least one laser processing recess 911 (see FIGS. 7 and 8).
實務上，該工作空間10A可以是開放也可以是密閉，只要能使濕氣的一部分於該高分子膜30A及該工作表面91上，冷凝出該複數液滴40即可。 In practice, the working space 10A may be open or sealed, and a part of moisture may be allowed to condense the plurality of droplets 40 on the polymer film 30A and the working surface 91.
該高分子膜30A係於1wt%中具有甲苯及聚甲基丙烯酸甲酯(英文為poly methyl methaerylate，簡稱PMMA)者。 The polymer film 30A has toluene and polymethylmethacrylate (in English, polymethyl methaerylate, PMMA for short) in 1 wt%.
該液滴40係為甘油、甘油與水之混合液、高表面張力不易揮發且高透光性之液體其中之一。 The droplet 40 is one of glycerin, a mixture of glycerin and water, and a liquid having a high surface tension which is not volatile and highly transparent.
關於本案之應用例，可參閱下表一及下表二：
參閱第22及第23圖，其係依表一及表二之參數進行加工得到之實際成品的照片。 Refer to Figures 22 and 23, which are photographs of actual finished products processed according to the parameters of Tables 1 and 2.
該每一液滴40係具有一接觸角θ(參閱第7圖)，其係大於90度。當然，此為舉例，實際上只要具有該透鏡部M即可。 Each of the droplets 40 has a contact angle θ (see Figure 7) which is greater than 90 degrees. Of course, this is an example, and it is only necessary to have the lens portion M.
該每一液滴40之透光率大於90%。 The light transmittance of each of the droplets 40 is greater than 90%.
該每一液滴40之相對揮發速度要低於水。 Each of the droplets 40 has a relative volatilization rate lower than that of water.
關於該加工方法的部分，係包括下列三種： The parts of the processing method include the following three types:
第一種加工方法係包括下列步驟(參閱第20圖)： The first processing method consists of the following steps (see Figure 20):
一．準備步驟W1：參閱第1、第2及第3圖，預先準備一工作部10及一雷射光源20。該工作部10係具有一工作空間10A，其內設一待加工物90；該待加 工物90具有一工作表面91，其係披覆一工作液30，該工作液30係為一高分子材料及一溶劑之混合液。 One. Preparation Step W1: Referring to Figures 1, 2, and 3, a working portion 10 and a laser light source 20 are prepared in advance. The working part 10 has a working space 10A, and a workpiece 90 is disposed therein; The workpiece 90 has a working surface 91 which is coated with a working fluid 30 which is a mixture of a polymer material and a solvent.
二．液滴形成步驟W2：利用呼吸圖法(breath figure method)，使該工作液30於該溶劑揮發(參閱第4圖)後變成一高分子膜30A(參閱第5圖)，並可於該高分子膜30A及該工作表面91上，冷凝出複數液滴40，該複數液滴40係用以形成一透鏡部M，該透鏡部M(亦即該複數液滴40)係呈接觸該工作表面91、位於該高分子膜30A內、位於該高分子膜30A上其中至少一者，前述之呼吸圖法係被定義為在該工作空間10A內供入並供出濕氣(如第1圖所示，濕氣以空心箭頭表示，未予編號，合先陳明)，該濕氣與該複數液滴40係為相同成份，且該濕氣之一部份係冷凝為該複數液滴40；又，該高分子膜30A及該液滴40之透光率係高於90%，且該液滴40之相對揮發速度係低於水。 two. The droplet formation step W2: using the breath figure method, the working solution 30 is volatilized in the solvent (see FIG. 4) to become a polymer film 30A (see FIG. 5), and can be at the height On the molecular film 30A and the working surface 91, a plurality of droplets 40 are condensed, and the plurality of droplets 40 are used to form a lens portion M, and the lens portion M (that is, the plurality of droplets 40) is in contact with the working surface. 91. At least one of the polymer film 30A located in the polymer film 30A, wherein the breath diagram method is defined as supplying and supplying moisture in the working space 10A (as shown in FIG. 1). , the moisture is indicated by a hollow arrow, which is not numbered, and the first and second droplets 40 are the same component, and one part of the moisture is condensed into the plurality of droplets 40; The light transmittance of the polymer film 30A and the liquid droplets 40 is higher than 90%, and the relative volatilization speed of the liquid droplets 40 is lower than that of water.
簡言之，該複數液滴40可以接觸工作表面91，也可以在該高分子膜30A內，也可以在工作表面91上，這會依該液滴40與該高分子膜30A之間的密度相比較而定，目前之實施例係為該複數液滴40接觸該高分子膜30A。 In short, the plurality of droplets 40 may contact the working surface 91, or may be in the polymer film 30A or on the working surface 91, depending on the density between the droplet 40 and the polymer film 30A. In comparison, the present embodiment is such that the plurality of droplets 40 contact the polymer film 30A.
三．雷射加工步驟W3：該雷射光源20係用以朝該透鏡部M發出一雷射光21(參閱第6A及第6B圖)，該透鏡部M係使雷射能量聚集於該工作表面91(包括高分子膜30A)上，使該工作表面91上形成至少一雷射加工凹部911(參閱第7及第8圖)。 three. Laser processing step W3: the laser light source 20 is configured to emit a laser beam 21 (see FIGS. 6A and 6B) toward the lens portion M, and the lens portion M concentrates the laser energy on the working surface 91 ( On the polymer film 30A), at least one laser processing recess 911 is formed on the working surface 91 (see FIGS. 7 and 8).
第二種加工方法(參閱第9、第10、第11、第12及第13圖)與第一種加工方法的差異，僅在於：於該液滴形成步驟W2中，藉由第一次呼吸圖法，使複數水液50冷凝於該高分子膜30A之中，而形成複數個孔洞部51(可為形成下部呈圓球狀之孔洞)；之後再於該複數個孔洞部51填入該液滴40，而形成該透鏡部M。該液滴40填入的方式可以外加氣壓或是旋轉塗佈等方式來進行。 The second processing method (see Figures 9, 10, 11, 12 and 13) differs from the first processing method only in that: in the droplet formation step W2, by the first breath In the drawing method, the plurality of water liquids 50 are condensed in the polymer film 30A to form a plurality of holes 51 (which may be formed into holes having a spherical shape in the lower portion); and then the plurality of holes 51 are filled in the holes The droplet 40 is formed to form the lens portion M. The manner in which the droplets 40 are filled can be carried out by applying air pressure or spin coating.
第三種加工方法(參閱第21圖)主要應用於非平面之該待加工物90，其與該第一、第二加工方法之差異處係在於： The third processing method (refer to FIG. 21) is mainly applied to the non-planar workpiece 90, and the difference from the first and second processing methods is:
[a]準備步驟S1：預先準備一第一工作部10B及一第二工作部10C(參閱第14、第15、第16及第17圖)。該第一工作部10B係具有一第一空間101，用以容納該工作液30；該第二工作部10C係具有一第二空間102，係用以容納一液60，該待加工物90係具有一3D(例如圓狀、柱狀、圓柱狀、任意不規則之3D表面形狀)工作曲面92。 [a] Preparation Step S1: A first working unit 10B and a second working unit 10C are prepared in advance (see FIGS. 14, 15, 16, and 17). The first working portion 10B has a first space 101 for accommodating the working fluid 30. The second working portion 10C has a second space 102 for accommodating a liquid 60. There is a 3D (eg, round, columnar, cylindrical, any irregular 3D surface shape) working surface 92.
[b]浸液步驟S2：將該待加工物90浸入該第一空間101，使該3D工作曲面92沾覆該工作液30後，取出該第一空間101，接著，利用呼吸圖法，配合水液50(此過程於第二加工方法中已明述，在這裡予以省略，合先陳明)於該工作液30所形成之該高分子膜30A上，形成複數個孔洞部51。 [b] immersion step S2: immersing the workpiece 90 into the first space 101, and after the 3D working surface 92 is immersed in the working fluid 30, the first space 101 is taken out, and then, by using the respiratory diagram method, The water liquid 50 (this process is clearly described in the second processing method, which is omitted here, and the same) is formed on the polymer film 30A formed by the working liquid 30 to form a plurality of holes 51.
[c]旋轉塗覆步驟S3：將該3D工作曲面92之其形成該複數個孔洞部51的位置浸入該液60，並以(低速)旋轉方式，使該液60填入該複數個孔洞部51。 [c] spin coating step S3: immersing the position of the 3D working curved surface 92 forming the plurality of holes 51 into the liquid 60, and filling the liquid 60 into the plurality of holes in a (low speed) rotation manner 51.
[d]旋轉移除步驟S4：參閱第18圖，利用(低速)旋轉方式，移除多餘之該液60，最後於該複數個孔洞部51內分別具有相對應之液滴60A。 [d] Rotation removal step S4: Referring to Fig. 18, the excess liquid 60 is removed by the (low speed) rotation method, and finally the corresponding droplets 60A are respectively provided in the plurality of holes 51.
[e]完成透鏡部步驟S5：參閱第19圖，該複數液滴60A係構成該透鏡部M，該透鏡部M可用以進行後續之雷射加工程序。 [e] Finishing the lens portion Step S5: Referring to Fig. 19, the plurality of droplets 60A constitute the lens portion M, which can be used for subsequent laser processing.
其中，該液60(包括該液滴60A)係為甘油、甘油與水之混合液、高表面張力不易揮發且高透光性之液體其中之一。 The liquid 60 (including the liquid droplets 60A) is one of glycerin, a mixture of glycerin and water, and a liquid having a high surface tension which is not volatile and highly transparent.
本發明之優點及功效係如下所述： The advantages and functions of the present invention are as follows:
[1]改變液滴形狀或排列方式即可輕易控制改變雷射聚集或加工條件。傳統進行雷射加工時，若要改變雷射聚集(包括聚焦與離焦)條件，則必需重新選用不同的透鏡組，時間及成本都相對偏高。本發明以液滴轉用作透鏡組，並巧妙利用呼吸圖法之現有技術，控制所要之液滴排列方式，或是利用液滴之不同組成 來改變液滴形狀、接觸角，即可輕易改變雷射聚集條件。因此，改變液滴組成或是呼吸圖法之參數條件，即可輕易控制改變雷射聚集或是液滴排列條件。故，改變液滴形狀或排列方式即可輕易控制改變雷射聚集或加工條件。 [1] Changing the shape or arrangement of droplets can easily control changes in laser agglomeration or processing conditions. In the traditional laser processing, if you want to change the laser concentration (including focus and defocus) conditions, you must re-select different lens groups, the time and cost are relatively high. The invention uses droplets to be used as a lens group, and skillfully utilizes the prior art of the respiratory diagram method to control the arrangement of droplets required, or to utilize different compositions of droplets. To change the shape of the droplet and the contact angle, the laser aggregation conditions can be easily changed. Therefore, changing the droplet composition or the parameter conditions of the respiratory pattern method can easily control the change of laser aggregation or droplet arrangement conditions. Therefore, changing the shape or arrangement of the droplets can easily control the changing of laser concentration or processing conditions.
[2]非平面結構也可進行雷射加工微奈米孔洞。傳統呼吸圖法主要用於平面之待加工物，當待加工物具有不規則表面時，並不易產生微小液滴來進行雷射(聚集)加工。然而，對於本發明而言，就算是曲面、圓柱表面、或是任意3D工作曲面之不規則表面等，也可輕易的塗覆工作液，再於待加工物之非平面(例如3D工作曲面)上，冷凝出複數液滴作為雷射光聚集用之透鏡部，以供進行雷射加工。故，非平面結構也可進行雷射加工微奈米孔洞。 [2] Non-planar structures can also be laser processed micro-nano holes. The traditional breathing diagram method is mainly used for the workpiece to be processed in a plane. When the object to be processed has an irregular surface, it is not easy to generate minute droplets for laser (aggregation) processing. However, for the present invention, even if it is a curved surface, a cylindrical surface, or an irregular surface of any 3D working surface, the working fluid can be easily applied, and then the non-planar (for example, 3D working surface) of the object to be processed. In the above, a plurality of droplets are condensed as a lens portion for collecting laser light for laser processing. Therefore, non-planar structures can also be laser processed micro-nano holes.
以上僅是藉由較佳實施例詳細說明本發明，對於該實施例所做的任何簡單修改與變化，皆不脫離本發明之精神與範圍。 The present invention has been described in detail with reference to the preferred embodiments of the present invention, without departing from the spirit and scope of the invention.
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