TWI661176B - 三次元測定裝置、三次元測定方法及基板之製造方法 - Google Patents
三次元測定裝置、三次元測定方法及基板之製造方法 Download PDFInfo
- Publication number
- TWI661176B TWI661176B TW103132648A TW103132648A TWI661176B TW I661176 B TWI661176 B TW I661176B TW 103132648 A TW103132648 A TW 103132648A TW 103132648 A TW103132648 A TW 103132648A TW I661176 B TWI661176 B TW I661176B
- Authority
- TW
- Taiwan
- Prior art keywords
- measurement
- height
- unit
- dimensional shape
- image
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2504—Calibration devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
- G02B30/50—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images the image being built up from image elements distributed over a 3D volume, e.g. voxels
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Processing (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Image Analysis (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013-205182 | 2013-09-30 | ||
JP2013205182A JP6198312B2 (ja) | 2013-09-30 | 2013-09-30 | 3次元測定装置、3次元測定方法および基板の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201520511A TW201520511A (zh) | 2015-06-01 |
TWI661176B true TWI661176B (zh) | 2019-06-01 |
Family
ID=52791145
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103132648A TWI661176B (zh) | 2013-09-30 | 2014-09-22 | 三次元測定裝置、三次元測定方法及基板之製造方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6198312B2 (ja) |
KR (1) | KR102224699B1 (ja) |
CN (1) | CN104515477B (ja) |
TW (1) | TWI661176B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6682809B2 (ja) * | 2015-11-09 | 2020-04-15 | 大日本印刷株式会社 | 検査システムおよび検査方法 |
JP6831478B2 (ja) * | 2017-12-07 | 2021-02-24 | ヤマハ発動機株式会社 | 被実装物作業装置 |
JP7118776B2 (ja) * | 2018-06-29 | 2022-08-16 | キヤノン株式会社 | 撮像装置、画像処理方法、画像処理プログラムおよび記録媒体 |
JP7246943B2 (ja) * | 2019-01-24 | 2023-03-28 | キヤノン株式会社 | 画像処理方法、画像処理装置、画像処理システム、撮像装置、プログラム、および、記憶媒体 |
WO2022244367A1 (ja) * | 2021-05-21 | 2022-11-24 | 株式会社 レイマック | 非接触血管解析方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6072899A (en) * | 1997-01-23 | 2000-06-06 | Hitachi, Ltd. | Method and device of inspecting three-dimensional shape defect |
TWI296324B (ja) * | 2005-10-20 | 2008-05-01 | Omron Tateisi Electronics Co | |
US7808644B2 (en) * | 2005-03-24 | 2010-10-05 | Obe Ohnmacht & Baumgartner Gmbh & Co. Kg | Device for optically measuring the shapes of objects and surfaces |
JP2010237034A (ja) * | 2009-03-31 | 2010-10-21 | Sony Corp | 外観検査用照明装置および外観検査装置 |
TWI396823B (zh) * | 2009-01-20 | 2013-05-21 | Ckd Corp | 三維測量裝置 |
US20130201488A1 (en) * | 2012-02-03 | 2013-08-08 | Takaoka Electric Mfg. Co., Ltd. | Three-dimensional shape measuring apparatus |
JP2013186100A (ja) * | 2012-03-12 | 2013-09-19 | Hitachi Ltd | 形状検査方法およびその装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7019826B2 (en) * | 2003-03-20 | 2006-03-28 | Agilent Technologies, Inc. | Optical inspection system, apparatus and method for reconstructing three-dimensional images for printed circuit board and electronics manufacturing inspection |
KR101155816B1 (ko) * | 2005-06-17 | 2012-06-12 | 오므론 가부시키가이샤 | 3차원 계측을 행하는 화상 처리 장치 및 화상 처리 방법 |
JP5159594B2 (ja) * | 2008-12-24 | 2013-03-06 | キヤノン株式会社 | 画像形成装置 |
JP5170154B2 (ja) * | 2010-04-26 | 2013-03-27 | オムロン株式会社 | 形状計測装置およびキャリブレーション方法 |
JP5482411B2 (ja) * | 2010-04-30 | 2014-05-07 | ソニー株式会社 | 立体形状測定装置、検査装置及び立体形状測定用調整方法 |
JP5721072B2 (ja) * | 2011-03-31 | 2015-05-20 | Jukiオートメーションシステムズ株式会社 | 部品実装装置、情報処理装置、位置検出方法及び基板製造方法 |
JP6124237B2 (ja) * | 2012-01-31 | 2017-05-10 | Jukiオートメーションシステムズ株式会社 | 検査装置、検査方法及び基板の製造方法 |
JP5984284B2 (ja) * | 2012-02-28 | 2016-09-06 | Jukiオートメーションシステムズ株式会社 | 部品実装装置及び基板の製造方法 |
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2013
- 2013-09-30 JP JP2013205182A patent/JP6198312B2/ja active Active
-
2014
- 2014-09-19 KR KR1020140124912A patent/KR102224699B1/ko active IP Right Grant
- 2014-09-22 TW TW103132648A patent/TWI661176B/zh active
- 2014-09-30 CN CN201410520476.8A patent/CN104515477B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6072899A (en) * | 1997-01-23 | 2000-06-06 | Hitachi, Ltd. | Method and device of inspecting three-dimensional shape defect |
US7808644B2 (en) * | 2005-03-24 | 2010-10-05 | Obe Ohnmacht & Baumgartner Gmbh & Co. Kg | Device for optically measuring the shapes of objects and surfaces |
TWI296324B (ja) * | 2005-10-20 | 2008-05-01 | Omron Tateisi Electronics Co | |
TWI396823B (zh) * | 2009-01-20 | 2013-05-21 | Ckd Corp | 三維測量裝置 |
JP2010237034A (ja) * | 2009-03-31 | 2010-10-21 | Sony Corp | 外観検査用照明装置および外観検査装置 |
US20130201488A1 (en) * | 2012-02-03 | 2013-08-08 | Takaoka Electric Mfg. Co., Ltd. | Three-dimensional shape measuring apparatus |
JP2013186100A (ja) * | 2012-03-12 | 2013-09-19 | Hitachi Ltd | 形状検査方法およびその装置 |
Also Published As
Publication number | Publication date |
---|---|
CN104515477B (zh) | 2019-03-08 |
JP6198312B2 (ja) | 2017-09-20 |
CN104515477A (zh) | 2015-04-15 |
JP2015068779A (ja) | 2015-04-13 |
TW201520511A (zh) | 2015-06-01 |
KR20150037545A (ko) | 2015-04-08 |
KR102224699B1 (ko) | 2021-03-05 |
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