TWI660116B - Exhaust gas treatment equipment - Google Patents
Exhaust gas treatment equipment Download PDFInfo
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- TWI660116B TWI660116B TW106134300A TW106134300A TWI660116B TW I660116 B TWI660116 B TW I660116B TW 106134300 A TW106134300 A TW 106134300A TW 106134300 A TW106134300 A TW 106134300A TW I660116 B TWI660116 B TW I660116B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/10—Capture or disposal of greenhouse gases of nitrous oxide (N2O)
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Abstract
一種尾氣處理設備，適用於以甲烷處理一氧化二氮廢氣，並包含一條廢氣輸氣管、一條甲烷輸入管，以及一個加熱部。該廢氣輸氣管用於輸送該一氧化二氮廢氣。該甲烷輸入管用於提供甲烷。該個加熱部包括一個反應爐、一條貫穿該反應爐底壁的預熱管，及數根設於該反應爐內且彼此角度相間隔地圍繞該預熱管的垂直加熱棒。該廢氣輸氣管內的一氧化二氮廢氣與該甲烷輸入管內的甲烷混合後流入該預熱管預熱，繼而進入該反應爐內被所述加熱棒加熱，以在一個預定溫度下進行加熱分解反應。 An exhaust gas treatment device for treating nitrous oxide exhaust gas with methane, and comprising an exhaust gas delivery pipe, a methane input pipe, and a heating portion. The exhaust gas delivery pipe is used to deliver the nitrous oxide exhaust gas. The methane input tube is used to supply methane. The heating portion includes a reaction furnace, a preheating tube extending through the bottom wall of the reaction furnace, and a plurality of vertical heating rods disposed in the reaction furnace and surrounding the preheating tubes at an angle to each other. The nitrous oxide waste gas in the exhaust gas supply pipe is mixed with the methane in the methane input pipe, and then flows into the preheating pipe to be preheated, and then enters the reaction furnace and is heated by the heating rod to be heated at a predetermined temperature. Decomposition reaction.
Description
本發明是有關於一種廢氣處理設備，特別是指一種尾氣處理設備。 The present invention relates to an exhaust gas treatment device, and more particularly to an exhaust gas treatment device.
一氧化二氮(N2O)廣泛應用於半導體工業製程上，其濃度可高達99.999%。然而，一氧化二氮與二氧化碳(CO2)同樣都是溫室氣體，且一氧化二氮所能造成的溫度效應效果大約是二氧化碳的296倍。因此，基於環境保護及地球永續發展的理念，有必要設法降低工業製造過程中所排放的一氧化二氮濃度。 Nitrous oxide (N 2 O) is widely used in the semiconductor industry process and can be as high as 99.999%. However, nitrous oxide and carbon dioxide (CO 2 ) are both greenhouse gases, and the effect of nitrous oxide is about 296 times that of carbon dioxide. Therefore, based on the concept of environmental protection and sustainable development of the earth, it is necessary to find ways to reduce the concentration of nitrous oxide emitted in industrial manufacturing processes.
參閱圖1現有廢氣處理設備1，其包括一與前端製造設備(圖未示)連通的入口洗滌單元11、一與該入口洗滌單元11連通的反應單元12、一與該反應單元12連通的出口洗滌單元13，及一用於盛接洗滌廢水的水槽14。 Referring to Figure 1, a prior art exhaust gas treatment apparatus 1 includes an inlet scrubbing unit 11 in communication with a front end manufacturing apparatus (not shown), a reaction unit 12 in communication with the inlet scrubbing unit 11, and an outlet in communication with the reaction unit 12. The washing unit 13 and a water tank 14 for holding the washing wastewater.
該入口洗滌單元11引入外界水源，利用直接噴灑水的方式，使廢氣與水進行初步反應，以除去廢氣中的可溶於水或能與水 反應的成分。接著，洗滌後產生的廢水被引導至該水槽14中。 The inlet washing unit 11 introduces an external water source, and uses a direct spray of water to react the exhaust gas with water to remove water soluble or water in the exhaust gas. The components of the reaction. Then, the wastewater generated after the washing is guided into the water tank 14.
該反應單元12用於對廢氣進行加熱分解反應，使廢氣中受熱產生結晶的成分得以析出。而部分成分析出後產生的結晶鹽可直接以物理方式刮除，並另外進行針對性的處理。 The reaction unit 12 is for performing a heating decomposition reaction on the exhaust gas to precipitate a component which is heated and crystallized in the exhaust gas. The crystalline salt produced after the partial analysis can be directly physically scraped off and additionally subjected to targeted treatment.
該出口洗滌單元13同樣引入外界水源對經過加熱分解反應後的廢氣再一次洗滌，以再一次去除廢氣中可溶於水或能與水反應的成分。洗滌廢氣後的廢水同樣被引導至該水槽14，並經過特定處理後方可排放。至於，以該出口洗滌單元13洗滌後的廢氣則是藉助風扇15提供的動力而排出至外界。 The outlet washing unit 13 also introduces an external water source to wash the exhaust gas after the thermal decomposition reaction again to remove the components of the exhaust gas which are soluble in water or reactive with water. The waste water after washing the exhaust gas is also guided to the water tank 14 and discharged after being subjected to specific treatment. As a result, the exhaust gas washed by the outlet washing unit 13 is discharged to the outside by the power supplied from the fan 15.
然而，隨著環保意識抬頭，廢氣的可排放標準也日漸提高，因而單純對一氧化二氮廢氣進行洗滌及加熱分解反應，已逐漸無法符合排放標準。因此，如圖2中華民國第M528512號新型專利案所示，其揭示一種以甲烷處理一氧化二氮廢氣的氣體處理裝置9100，包含一管路單元91、一反應腔座92，及一加熱單元93。該管路單元91包括一甲烷輸送管911、一空氣輸送管912、一能供一氧化二氮通入的製程氣體輸送管913，及一端部9141連接該甲烷輸送管911、該空氣輸送管912與該製程氣體輸送管913的匯流管914。該匯流管914界定出一預混合流道9140。該反應腔座92連接該匯流管914的另一端部9142，並包括一界定出一反應空間9210 的腔壁921、一貫穿該腔壁921且與該預混合流道9140相連通的進氣口922，及一貫穿該腔壁921的排氣口923。該加熱單元93鄰近該反應腔座92並能用以加熱該反應空間9210，使該反應空間9210溫度不低於攝氏600度。然而，上述中華民國第M528512號新型專利案所示的氣體處理裝置9100的反應效率不高，因而無法有效降低一氧化二氮排放濃度。因此，有必要尋求解決方案。 However, as the awareness of environmental protection rises, the emission standards for exhaust gas are also increasing. Therefore, the washing and heating decomposition reactions of nitrous oxide exhaust gas have gradually failed to meet the emission standards. Therefore, as shown in the novel patent No. M528512 of FIG. 2, a gas treatment device 9100 for treating nitrous oxide waste gas with methane is disclosed, which comprises a pipe unit 91, a reaction chamber seat 92, and a heating unit. 93. The pipe unit 91 includes a methane conveying pipe 911, an air conveying pipe 912, a process gas conveying pipe 913 capable of supplying nitrous oxide, and an end portion 9141 connecting the methane conveying pipe 911, the air conveying pipe 912. A manifold 914 with the process gas delivery tube 913. The manifold 914 defines a premixing runner 9140. The reaction chamber holder 92 is connected to the other end portion 9142 of the manifold 914 and includes a reaction space 9210 defined The cavity wall 921, an air inlet 922 extending through the cavity wall 921 and communicating with the premixing flow path 9140, and an exhaust port 923 extending through the cavity wall 921. The heating unit 93 is adjacent to the reaction chamber 92 and can be used to heat the reaction space 9210 such that the temperature of the reaction space 9210 is not lower than 600 degrees Celsius. However, the gas treatment device 9100 shown in the above-mentioned new patent No. M528512 of the Republic of China has a low reaction efficiency, and thus cannot effectively reduce the nitrous oxide emission concentration. Therefore, it is necessary to find a solution.
因此，本發明之目的，即在提供一種尾氣處理設備。 Accordingly, it is an object of the present invention to provide an exhaust gas treatment apparatus.
於是，本發明尾氣處理設備適用於以甲烷處理一氧化二氮廢氣，並包含一條廢氣輸氣管、一條甲烷輸入管，以及一個加熱部。該廢氣輸氣管用於輸送該一氧化二氮廢氣。該甲烷輸入管用於提供甲烷。該個加熱部包括一個反應爐、一條貫穿該反應爐底壁的預熱管，及數根設於該反應爐內且彼此角度相間隔地圍繞該預熱管的垂直加熱棒。該廢氣輸氣管內的一氧化二氮廢氣與該甲烷輸入管內的甲烷混合後流入該預熱管預熱，繼而進入該反應爐內被所述加熱棒加熱，以在一個預定溫度下進行加熱分解反應。 Accordingly, the exhaust gas treating apparatus of the present invention is suitable for treating nitrous oxide exhaust gas with methane, and comprises an exhaust gas delivery pipe, a methane input pipe, and a heating portion. The exhaust gas delivery pipe is used to deliver the nitrous oxide exhaust gas. The methane input tube is used to supply methane. The heating portion includes a reaction furnace, a preheating tube extending through the bottom wall of the reaction furnace, and a plurality of vertical heating rods disposed in the reaction furnace and surrounding the preheating tubes at an angle to each other. The nitrous oxide waste gas in the exhaust gas supply pipe is mixed with the methane in the methane input pipe, and then flows into the preheating pipe to be preheated, and then enters the reaction furnace and is heated by the heating rod to be heated at a predetermined temperature. Decomposition reaction.
本發明之功效在於：藉由設置於反應爐內的數根加熱棒對反應爐內進行加熱，使得產生極高的溫度，而使該一氧化二氮廢氣與甲烷氣體可在極高溫環境下同步進行熱分解與氧化還原反 應，因而能高效能地降低該一氧化二氮廢氣的濃度。 The utility model has the advantages that the inside of the reaction furnace is heated by a plurality of heating rods disposed in the reaction furnace to generate extremely high temperature, so that the nitrous oxide exhaust gas and the methane gas can be synchronized in an extremely high temperature environment. Thermal decomposition and redox reaction Therefore, the concentration of the nitrous oxide exhaust gas can be lowered with high efficiency.
2‧‧‧前段水洗部 2‧‧‧Pre-washing department
3‧‧‧加熱部 3‧‧‧ heating department
31‧‧‧反應爐 31‧‧‧Reaction furnace
311‧‧‧底壁 311‧‧‧ bottom wall
312‧‧‧圍繞壁 312‧‧‧ Around the wall
32‧‧‧預熱管 32‧‧‧Preheating tube
33‧‧‧加熱棒 33‧‧‧heating rod
34‧‧‧隔熱單元 34‧‧‧Insulation unit
341‧‧‧空氣層 341‧‧ Air layer
342‧‧‧陶瓷棉層 342‧‧‧Ceramic cotton layer
343‧‧‧水液層 343‧‧‧Water layer
4‧‧‧後段水洗部 4‧‧‧The latter part of the washing department
5‧‧‧廢氣輸氣管 5‧‧‧Exhaust gas pipeline
6‧‧‧甲烷輸入管 6‧‧‧methane input pipe
7‧‧‧入口部 7‧‧‧ Entrance Department
81‧‧‧排氣部 81‧‧‧Exhaust Department
82‧‧‧水槽 82‧‧‧Sink
本發明的其他的特徵及功效，將於參照圖式的實施方式中清楚地呈現，其中：圖1是一設備配置圖，說明一現有廢氣處理設備；圖2是一設備配置圖，說明中華民國第M528512號新型專利案；圖3是一示意圖，說明本發明尾氣處理設備的實施例中氣體的流動方向；圖4是一設備配置圖，說明該實施例；圖5是一立體圖，說明該實施例中該尾氣處理設備的加熱部；及圖6是一剖面圖，說明該加熱部。 Other features and effects of the present invention will be apparent from the following description of the drawings, wherein: FIG. 1 is a device configuration diagram illustrating a conventional exhaust gas treatment device; FIG. 2 is a device configuration diagram illustrating the Republic of China No. M528512; FIG. 3 is a schematic view showing the flow direction of the gas in the embodiment of the exhaust gas treating apparatus of the present invention; FIG. 4 is a device configuration diagram illustrating the embodiment; FIG. 5 is a perspective view illustrating the implementation In the example, the heating portion of the exhaust gas treatment device; and FIG. 6 is a cross-sectional view illustrating the heating portion.
參閱圖3，本發明尾氣處理設備包含一個前段水洗部2、一個位於該前段水洗部2下游處的加熱部3、一個位於該加熱部3下游處的後段水洗部4，以及一個位於該前段水洗部2、該加熱部3及該後段水洗部4下方的水槽82，且是適用於以甲烷處理來自該前段水洗部2的一氧化二氮廢氣(如代表氣體流動方向的箭號所示)。 Referring to Fig. 3, the exhaust gas treating apparatus of the present invention comprises a front-stage water washing section 2, a heating section 3 located downstream of the front-stage water washing section 2, a rear-stage water washing section 4 located downstream of the heating section 3, and a water washing section located at the front section. The portion 2, the heating portion 3, and the water tank 82 below the rear water washing portion 4 are suitable for treating nitrous oxide exhaust gas from the front water washing portion 2 with methane (as indicated by an arrow indicating the flow direction of the gas).
參閱圖4，本發明尾氣處理設備的實施例包含一個入口部 7、該前段水洗部2、一條廢氣輸氣管5、一條甲烷輸入管6、該加熱部3、該後段水洗部4、一個排氣部81，及該水槽82。 Referring to Figure 4, an embodiment of the exhaust gas treatment apparatus of the present invention includes an inlet portion 7. The front stage water washing unit 2, an exhaust gas delivery pipe 5, a methane input pipe 6, the heating unit 3, the rear stage water washing unit 4, an exhaust unit 81, and the water tank 82.
該入口部7的進氣口連通至一個前端製造設備(圖未示)，且用於使來自該前端製造設備的一氧化二氮廢氣進入本發明尾氣處理設備。 The intake port of the inlet portion 7 communicates with a front end manufacturing apparatus (not shown) and serves to cause nitrous oxide exhaust gas from the front end manufacturing apparatus to enter the exhaust gas treating apparatus of the present invention.
該前段水洗部2的進氣口與該入口部7的出氣口相連通，且是利用濕式洗滌的方式，以清水沖洗去除該一氧化二氮廢氣中的粉塵、水溶性氣體等成分。 The intake port of the front-stage water washing unit 2 communicates with the air outlet of the inlet portion 7, and is flushed with fresh water to remove components such as dust and water-soluble gas in the nitrous oxide exhaust gas by means of wet washing.
接著，經過初步洗滌後的一氧化二氮廢氣離開該前段水洗部2並進入該廢氣輸氣管5。此時，甲烷氣體由該甲烷輸入管6進入而與該廢氣輸氣管5中的一氧化二氮廢氣混合後，流入該加熱部3。 Then, the nitrous oxide exhaust gas after the preliminary washing leaves the front stage water washing section 2 and enters the exhaust gas delivery pipe 5. At this time, the methane gas enters the methane inlet pipe 6 and is mixed with the nitrous oxide exhaust gas in the exhaust gas delivery pipe 5, and then flows into the heating portion 3.
參閱圖4、5、6，該加熱部3包括一個反應爐31、一條貫穿該反應爐31的底壁311的預熱管32、數根設於該反應爐31內且彼此角度相間隔地圍繞該預熱管32的垂直加熱棒33，及一個隔熱單元34。 Referring to Figures 4, 5 and 6, the heating portion 3 includes a reaction furnace 31, a preheating tube 32 extending through the bottom wall 311 of the reaction furnace 31, and a plurality of preheating tubes 32 disposed in the reaction furnace 31 and spaced around each other at an angle. The vertical heating rod 33 of the preheating tube 32 and an insulation unit 34.
該廢氣輸氣管5內的一氧化二氮廢氣與該甲烷輸入管6內的甲烷混合後流入該加熱部3的預熱管32預熱，繼而進入該反應爐31內被所述加熱棒33加熱，於一個預定溫度下進行加熱分解反 應，以破壞或氧化該一氧化二氮廢氣。在本實施例中，該預定溫度大於850℃~950℃，且所述加熱棒的數量可以為六根，但本發明不限於此。 The nitrous oxide waste gas in the exhaust gas delivery pipe 5 is mixed with the methane in the methane feed pipe 6 and then preheated into the preheating pipe 32 of the heating unit 3, and then enters the reaction furnace 31 and is heated by the heating rod 33. , heating decomposition at a predetermined temperature It should be used to destroy or oxidize the nitrous oxide waste gas. In the present embodiment, the predetermined temperature is greater than 850 ° C to 950 ° C, and the number of the heating bars may be six, but the invention is not limited thereto.
該隔熱單元34包覆於該反應爐31的圍繞壁312外表面，且是以隔熱套(Insulation Jacket)形式提供隔熱保溫效果。在本實施例中，該隔熱單元34具有由內向外排列的一個可保護該反應爐31的空氣層341、一個陶瓷棉(Ceramic Wool)層342，及一個水液層343。 The heat insulating unit 34 is coated on the outer surface of the surrounding wall 312 of the reaction furnace 31, and provides an insulation effect in the form of an insulating jacket. In the present embodiment, the heat insulating unit 34 has an air layer 341 which protects the reaction furnace 31, a ceramic wool layer 342, and a water liquid layer 343 which are arranged from the inside to the outside.
由於甲烷氣體的自燃溫度為約550℃，所以流入該反應爐31的甲烷氣體會與空氣進行燃燒反應而持續產生熱能使該反應爐31內的溫度持續升高，因而有助於反應爐31內的溫度達到該一氧化二氮廢氣本身的裂解溫度。接著，作為氧化劑的一氧化二氮氣體與作為還原劑的甲烷氣體進行氧化還原反應，其反應式如下所示：4N2O+CH4 → CO2+2H2O+4N2。 Since the self-ignition temperature of the methane gas is about 550 ° C, the methane gas flowing into the reaction furnace 31 undergoes a combustion reaction with the air to continuously generate heat, so that the temperature in the reaction furnace 31 is continuously increased, thereby contributing to the inside of the reaction furnace 31. The temperature reaches the cracking temperature of the nitrous oxide off gas itself. Next, the nitrous oxide gas as the oxidizing agent is subjected to a redox reaction with methane gas as a reducing agent, and the reaction formula is as follows: 4N 2 O+CH 4 → CO 2 + 2H 2 O + 4N 2 .
本實施例主要是藉由設置於反應爐31內的六根加熱棒33對反應爐31內進行加熱，使得產生溫度極高的該預定溫度(大於850℃~950℃)，而使該一氧化二氮廢氣與甲烷氣體同步進行熱分解與氧化還原反應，以在極高溫環境下打破分子鍵而分解成氮離 子、氧離子，及氫離子。由於各種離子鍵間的結合強度不同，例如，氧離子與氫離子間的結合性強於氧離子與氮離子間的結合性，所以後續於降溫後分子會進行重組，以高效能地降低該一氧化二氮廢氣的濃度。 In this embodiment, the inside of the reaction furnace 31 is mainly heated by the six heating rods 33 provided in the reaction furnace 31, so that the predetermined temperature (greater than 850 ° C to 950 ° C) which is extremely high in temperature is generated, and the oxidized second is generated. Nitrogen exhaust gas is thermally decomposed and redoxed simultaneously with methane gas to break down molecular bonds and decompose into nitrogen in an extremely high temperature environment. Sub, oxygen, and hydrogen ions. Since the bonding strength between the various ionic bonds is different, for example, the binding between the oxygen ions and the hydrogen ions is stronger than the binding between the oxygen ions and the nitrogen ions, the molecules are recombined after the cooling, so that the one is efficiently reduced. The concentration of the nitrous oxide exhaust gas.
該後段水洗部4設置於該加熱部3下游處，並用於對加熱分解反應後的產物進行再一次水洗並使其降低溫度。 The rear stage water washing portion 4 is disposed downstream of the heating portion 3, and is used to wash the product after the heat decomposition reaction again and to lower the temperature.
該排氣部81設置於該後段水洗部4下游處，並用於使經該後段水洗部4水洗過後的氣體與外界空氣混合，以降低所述氣體中各種成分的濃度。 The exhaust portion 81 is disposed downstream of the rear stage water washing portion 4, and is configured to mix the gas washed by the rear stage water washing portion 4 with the outside air to reduce the concentration of various components in the gas.
該水槽82設置於該加熱部3、該前段水洗部2以及該後段水洗部4下方，並用於盛接該前段水洗部2及該後段水洗部4進行濕式洗滌後所產生的廢液。 The water tank 82 is disposed under the heating unit 3, the front water washing unit 2, and the rear water washing unit 4, and is configured to receive the waste liquid generated after the wet washing of the front water washing unit 2 and the rear water washing unit 4.
在本實施例中，當對本發明尾氣處理設備進行反應效率測試後，測試結果為：當一氧化二氮的流量為5 LPM(公升/分鐘)且甲烷的流量為4 LPM時，破壞去除效率(Destruction Removal Efficiency，DRE)為91%；而當一氧化二氮的流量為16 LPM且甲烷的流量為3 LPM時，DRE為92%。也就是說，本發明實施例中若將一氧化二氮的使用量控制在3~4 LPM時，可獲得最佳處理效率。此外，與前述中華民國第M528512號新型專利公告案比較 下，本發明與該現有新型專利公告案若使用的甲烷量相同，則本發明能處理的一氧化二氮的量是該新型專利公告案的四倍，所以本發明顯然具有較高的反應效率，因而能較有效地降低一氧化二氮排放濃度。 In the present embodiment, after the reaction efficiency test of the exhaust gas treating apparatus of the present invention, the test result is: when the flow rate of nitrous oxide is 5 LPM (liter/min) and the flow rate of methane is 4 LPM, the destruction removal efficiency ( Destruction Removal Efficiency (DRE) was 91%; and when the flow rate of nitrous oxide was 16 LPM and the flow rate of methane was 3 LPM, the DRE was 92%. That is to say, in the embodiment of the present invention, if the amount of nitrous oxide used is controlled at 3 to 4 LPM, the optimum treatment efficiency can be obtained. In addition, compared with the aforementioned new patent announcement No. M528512 of the Republic of China In the present invention, if the amount of methane used in the prior art patent publication is the same, the amount of nitrous oxide which can be treated by the present invention is four times that of the novel patent publication, so that the invention obviously has high reaction efficiency. Therefore, the nitrous oxide emission concentration can be effectively reduced.
綜上所述，本發明藉由設置於反應爐31內的數根加熱棒33對反應爐31內進行加熱，使得產生極高的溫度(大於850℃~950℃)，而使該一氧化二氮廢氣與甲烷氣體可在極高溫環境下同步進行熱分解與氧化還原反應，因而能高效能地降低該一氧化二氮廢氣的濃度，所以確實能達成本發明的目的。 In summary, the present invention heats the inside of the reaction furnace 31 by a plurality of heating rods 33 disposed in the reaction furnace 31, so that an extremely high temperature (greater than 850 ° C to 950 ° C) is generated, and the oxidized second is produced. Since the nitrogen exhaust gas and the methane gas can be thermally decomposed and redox-reacted simultaneously in an extremely high temperature environment, the concentration of the nitrous oxide exhaust gas can be efficiently reduced, so that the object of the present invention can be achieved.
惟以上所述者，僅為本發明的實施例而已，當不能以此限定本發明實施的範圍，凡是依本發明申請專利範圍及專利說明書內容所作的簡單的等效變化與修飾，皆仍屬本發明專利涵蓋的範圍內。 However, the above is only the embodiment of the present invention, and the scope of the invention is not limited thereto, and all the simple equivalent changes and modifications according to the scope of the patent application and the patent specification of the present invention are still Within the scope of the invention patent.
Claims (7)
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