TWI657524B - Substrate transport apparatus - Google Patents

Abstract

本發明提供一種轉移設備包括：框架；多個臂，連接至該框架，每一臂具有末端執行器及獨立驅動軸，用於各別臂相對於該多個臂之其它者的伸展和收縮；線性軌，為至少一臂的伸展和收縮界定出該獨立驅動軸的自由度；及共同驅動軸，被每一臂所共用且配置成使該多個臂繞著共同樞轉軸而樞轉；其中該多個臂的至少一者具有另一驅動軸，相對於該多個臂的其它者界定出獨立自由度。 The present invention provides a transfer apparatus comprising: a frame; a plurality of arms coupled to the frame, each arm having an end effector and an independent drive shaft for extension and contraction of the respective arms relative to the other of the plurality of arms; a linear track defining a degree of freedom of the independent drive shaft for at least one arm extension and contraction; and a common drive shaft shared by each arm and configured to pivot the plurality of arms about a common pivot axis; At least one of the plurality of arms has another drive shaft defining an independent degree of freedom with respect to the other of the plurality of arms.

Description

基板搬運設備 Substrate handling equipment

示範性實施例通常關於機器人系統且特別地關於機器人搬運設備。 The exemplary embodiments are generally related to robotic systems and in particular to robotic handling equipment.

於例如半導體製造工業中，工件或半導體基板可於具有並列基板保持站之線性工具系統及/或群組工具系統中進行處理。通常，於具有並列基板保持站的這些系統中，半導體製造者要求獨立放射狀機器人，其能夠在大致相同時間或獨立地將基板轉移至和自並列基板保持站。通常，這已透過提供二個轉移臂而完成，其具有間距於轉移臂之間，該間距係大致相同如並列基板保持站之間的間距。這些轉移臂可安裝在底臂或線性軌上。這些轉移臂亦可使用線性驅動器用於延長和縮回該等臂至和自基板保持站。 In, for example, the semiconductor manufacturing industry, a workpiece or semiconductor substrate can be processed in a linear tool system and/or a group tool system having a parallel substrate holding station. Generally, in these systems with parallel substrate holding stations, semiconductor manufacturers require independent radial robots that are capable of transferring substrates to and from a parallel substrate holding station at substantially the same time or independently. Typically, this has been accomplished by providing two transfer arms having a spacing between the transfer arms that are substantially the same as the spacing between the parallel substrate holding stations. These transfer arms can be mounted on a bottom arm or linear rail. These transfer arms can also use linear actuators for extending and retracting the arms to and from the substrate holding station.

將有利的是，提供配置有二個並列獨立臂的單一機器人，每一臂係配置成操作在共同旋轉軸上同時具有沿著各別徑向軸之獨立旋轉馬達致動。亦將有利的是， 提供配置有二個獨立臂的單一機器人，每一臂係配置成操作在共同旋轉軸上同時具有沿著各別徑向軸之獨立旋轉馬達致動。 It would be advantageous to provide a single robot configured with two parallel independent arms, each configured to operate on a common rotating shaft while having independent rotary motor actuation along respective radial axes. It would also be advantageous, A single robot is provided that is configured with two separate arms, each configured to operate on a common rotating shaft while having independent rotary motor actuation along respective radial axes.

102E‧‧‧負載鎖 102E‧‧‧Load lock

100E1‧‧‧端 100E1‧‧‧

100E2‧‧‧端 100E2‧‧‧

R1‧‧‧伸縮 R1‧‧‧Flex

R2‧‧‧伸縮 R2‧‧‧Flex

210E‧‧‧末端執行器 210E‧‧‧End Actuator

211E‧‧‧末端執行器 211E‧‧‧End Actuator

212E‧‧‧末端執行器 212E‧‧‧End Actuator

213E‧‧‧末端執行器 213E‧‧‧End Actuator

GM1‧‧‧導軌構件 GM1‧‧‧rail components

GM2‧‧‧導軌構件 GM2‧‧‧ rail components

GM3‧‧‧導軌構件 GM3‧‧‧rail components

GM4‧‧‧導軌構件 GM4‧‧‧rail components

510E‧‧‧編碼器 510E‧‧‧Encoder

520E‧‧‧編碼器 520E‧‧‧Encoder

BE1‧‧‧一端 BE1‧‧‧ end

BE2‧‧‧相對端 BE2‧‧‧ opposite end

BE3‧‧‧一端 BE3‧‧‧ end

BE4‧‧‧相對端 BE4‧‧‧ opposite end

810EM‧‧‧末端執行器伸展構件 810EM‧‧‧End effector extension member

811EM‧‧‧末端執行器伸展構件 811EM‧‧‧End effector extension member

812EM‧‧‧末端執行器伸展構件 812EM‧‧‧End effector extension member

813EM‧‧‧末端執行器伸展構件 813EM‧‧‧End effector extension member

810E‧‧‧末端執行器 810E‧‧‧End Actuator

813E‧‧‧末端執行器 813E‧‧‧End Actuator

811E‧‧‧末端執行器 811E‧‧‧End Actuator

812E‧‧‧末端執行器 812E‧‧‧End Actuator

SP‧‧‧末端執行器配座平面 SP‧‧‧End effector with seat plane

100A‧‧‧處理設備 100A‧‧‧Processing equipment

100B‧‧‧處理設備 100B‧‧‧Processing equipment

100C‧‧‧處理設備 100C‧‧‧Processing equipment

100D‧‧‧處理設備 100D‧‧‧Processing equipment

100F1‧‧‧小面 100F1‧‧‧ facets

100S1‧‧‧側 100S1‧‧‧ side

100S2‧‧‧側 100S2‧‧‧ side

100F8‧‧‧小面 100F8‧‧‧ facets

100F2‧‧‧小面 100F2‧‧‧ facets

100F3‧‧‧小面 100F3‧‧‧ facets

101‧‧‧氣氛前端 101‧‧‧ atmosphere front end

102‧‧‧真空負載鎖 102‧‧‧Vacuum load lock

102A‧‧‧真空負載鎖 102A‧‧‧Vacuum load lock

102B‧‧‧真空負載鎖 102B‧‧‧Vacuum load lock

102C‧‧‧真空負載鎖 102C‧‧‧Vacuum load lock

102D‧‧‧真空負載鎖 102D‧‧‧Vacuum load lock

103‧‧‧真空後端 103‧‧‧vacuum backend

104‧‧‧轉移單元模組 104‧‧‧Transfer unit module

104’‧‧‧搬運單元模組 104’‧‧‧Transport unit module

104”‧‧‧轉移單元模組 104”‧‧‧Transfer unit module

104’’’‧‧‧轉移單元模組 104’’’‧‧‧Transfer unit module

105‧‧‧負載埠模組 105‧‧‧Load 埠 Module

106‧‧‧迷你環境 106‧‧‧Mini environment

107‧‧‧負載埠 107‧‧‧Load埠

108‧‧‧機器人 108‧‧‧Robot

110‧‧‧控制器 110‧‧‧ Controller

110A‧‧‧控制器 110A‧‧‧ controller

110B‧‧‧控制器 110B‧‧‧ Controller

123A‧‧‧感測器 123A‧‧‧Sensor

123B‧‧‧感測器 123B‧‧‧Sensor

125A‧‧‧搬運室 125A‧‧・Transportation room

125B‧‧‧搬運室 125B‧‧・Transportation room

125C‧‧‧搬運室 125C‧‧·Transportation room

125D‧‧‧搬運室 125D‧‧‧Transportation room

125‧‧‧搬運室 125‧‧‧Transportation room

130‧‧‧處理站 130‧‧‧Processing station

130T1‧‧‧並列處理站 130T1‧‧‧ parallel processing station

130T2‧‧‧並列處理站 130T2‧‧‧ parallel processing station

130S‧‧‧單處理站 130S‧‧‧ single processing station

143‧‧‧吊臂 143‧‧‧Boom

144‧‧‧線性支架 144‧‧‧linear bracket

200‧‧‧驅動部 200‧‧‧ Drive Department

200F‧‧‧框架 200F‧‧‧ framework

200FI‧‧‧內部 200FI‧‧‧ internal

201‧‧‧驅動部 201‧‧‧ Drive Department

201’‧‧‧驅動部 201’‧‧‧ Drive Department

210‧‧‧轉移臂 210‧‧‧Transfer arm

210B‧‧‧底構件 210B‧‧‧ bottom member

210R‧‧‧轉子 210R‧‧‧Rotor

210S‧‧‧定子 210S‧‧‧ Stator

211‧‧‧轉移臂 211‧‧‧Transfer arm

211B‧‧‧底構件 211B‧‧‧ bottom member

212‧‧‧轉移臂 212‧‧‧Transfer arm

213‧‧‧轉移臂 213‧‧‧Transfer arm

214‧‧‧線性滑動臂 214‧‧‧Linear sliding arm

215‧‧‧SCARA臂 215‧‧‧SCARA arm

216‧‧‧蛙腿式臂 216‧‧‧frog legs

217‧‧‧跳蛙式臂 217‧‧‧frog frog arm

218‧‧‧雙對稱臂 218‧‧‧Doubly symmetric arms

220R‧‧‧轉子 220R‧‧‧Rotor

220S‧‧‧定子 220S‧‧‧ Stator

250‧‧‧底構件 250‧‧‧ bottom member

250P‧‧‧內部室 250P‧‧‧Internal room

250C‧‧‧外蓋 250C‧‧‧ Cover

251‧‧‧驅動部 251‧‧‧ Drive Department

251F‧‧‧框架 251F‧‧‧Frame

251F2‧‧‧第二框架構件 251F2‧‧‧Second frame member

251F1‧‧‧第一框架構件 251F1‧‧‧ first frame member

251M‧‧‧開口 251M‧‧‧ openings

251’‧‧‧驅動部 251’‧‧‧ Drive Department

251F’‧‧‧框架 251F’‧‧‧Frame

252‧‧‧驅動部 252‧‧‧ Drive Department

252F‧‧‧框架 252F‧‧‧Frame

252’‧‧‧驅動部 252’‧‧‧ Drive Department

270‧‧‧Z軸驅動 270‧‧‧Z-axis drive

270C‧‧‧支架 270C‧‧‧ bracket

275‧‧‧伸縮密封 275‧‧‧Flexible seal

276‧‧‧磁性流體密封 276‧‧‧Magnetic fluid seal

277‧‧‧磁性流體密封 277‧‧‧Magnetic fluid seal

280‧‧‧簡諧驅動馬達 280‧‧‧harmonic drive motor

280S‧‧‧驅動軸 280S‧‧‧ drive shaft

281‧‧‧外殼 281‧‧‧ Shell

282‧‧‧旋轉驅動部 282‧‧‧Rotary drive department

290‧‧‧引線 290‧‧‧ lead

296‧‧‧編碼器 296‧‧‧Encoder

300P‧‧‧內部室 300P‧‧‧Internal room

310‧‧‧線性軌或滑軌 310‧‧‧Linear rails or rails

310A‧‧‧第一線性軌或滑軌 310A‧‧‧First linear rail or rail

310B‧‧‧第二線性軌或滑軌 310B‧‧‧Second linear rail or rail

311A‧‧‧第一線性軌或滑軌 311A‧‧‧First linear rail or rail

311‧‧‧線性軌或滑軌 311‧‧‧Linear rails or rails

311B‧‧‧第二線性軌或滑軌 311B‧‧‧Second linear rail or rail

320‧‧‧第一驅動馬達 320‧‧‧First drive motor

320S‧‧‧密封 320S‧‧‧ Seal

321‧‧‧第二驅動馬達 321‧‧‧Second drive motor

321S‧‧‧密封 321S‧‧‧ Seal

330A‧‧‧帶 330A‧‧‧带

330B‧‧‧帶 330B‧‧‧带

331A‧‧‧帶 331A‧‧‧带

332B‧‧‧驅動滑輪 332B‧‧‧ drive pulley

332A‧‧‧從動滑輪 332A‧‧‧ driven pulley

333A‧‧‧驅動滑輪 333A‧‧‧ drive pulley

333B‧‧‧從動滑輪 333B‧‧‧driven pulley

331B‧‧‧帶 331B‧‧‧带

370‧‧‧驅動軸 370‧‧‧ drive shaft

371‧‧‧編碼器 371‧‧‧Encoder

400‧‧‧橋接構件 400‧‧‧Bridge components

410A‧‧‧線性軌或滑軌 410A‧‧‧linear rail or rail

410B‧‧‧線性軌或滑軌 410B‧‧‧Linear rail or rail

410‧‧‧滑輪 410‧‧‧ pulley

411‧‧‧滑輪 411‧‧‧ pulley

412‧‧‧傳動構件 412‧‧‧Transmission components

420‧‧‧滑輪 420‧‧‧ pulley

421‧‧‧滑輪 421‧‧‧ pulley

422‧‧‧傳動構件 422‧‧‧Transmission components

510S‧‧‧滾珠螺桿 510S‧‧·ball screw

510M‧‧‧馬達 510M‧‧‧ motor

510C‧‧‧滾珠螺帽轉接器或耦合器 510C‧‧• Ball Nut Adapter or Coupler

510‧‧‧驅動馬達 510‧‧‧Drive motor

520S‧‧‧滾珠螺桿 520S‧‧·ball screw

520M‧‧‧馬達 520M‧‧ motor

520C‧‧‧滾珠螺帽轉接器或耦合器 520C‧‧‧Ballnut nut adapter or coupler

520‧‧‧線性馬達 520‧‧‧Linear motor

550‧‧‧底構件 550‧‧‧ bottom member

550F‧‧‧框架 550F‧‧‧Frame

550C‧‧‧可移除蓋 550C‧‧‧Removable cover

550CS‧‧‧密封構件 550CS‧‧‧ Sealing components

551‧‧‧內部室 551‧‧‧Internal room

560‧‧‧伸縮或密封支承構件 560‧‧‧ Telescopic or sealed support members

560M‧‧‧安裝構件 560M‧‧‧Installation components

560S‧‧‧間隙構件 560S‧‧‧ gap components

560B‧‧‧伸縮密封 560B‧‧‧Flexible seal

560SP‧‧‧軸部 560SP‧‧‧Axis

561‧‧‧伸縮或密封支承構件 561‧‧‧ Telescopic or sealed support members

561M‧‧‧安裝構件 561M‧‧‧Installation components

561S‧‧‧間隙構件 561S‧‧‧ gap components

561B‧‧‧伸縮密封 561B‧‧‧Flexible seal

561SP‧‧‧軸部 561SP‧‧‧Axis

565A‧‧‧密封構件 565A‧‧‧ Sealing member

565B‧‧‧密封構件 565B‧‧‧ Sealing member

566A‧‧‧介面 566A‧‧ interface

566B‧‧‧介面 566B‧‧ interface

566S‧‧‧密封構件 566S‧‧‧ Sealing member

575A‧‧‧孔或開口 575A‧‧ hole or opening

575B‧‧‧孔或開口 575B‧‧ hole or opening

588A‧‧‧線性軌 588A‧‧‧linear track

588B‧‧‧線性軌 588B‧‧‧linear track

597‧‧‧潮落或保持構件 597‧‧‧Impact or retaining members

599‧‧‧箭頭 599‧‧‧ arrow

600‧‧‧旋轉驅動部 600‧‧‧Rotary Drive Department

600F‧‧‧框架或外殼 600F‧‧‧ frame or enclosure

601‧‧‧旋轉驅動部 601‧‧‧Rotary Drive Department

601F‧‧‧框架或外殼 601F‧‧‧Frame or casing

605‧‧‧轉移臂 605‧‧‧Transfer arm

606‧‧‧轉移臂 606‧‧‧Transfer arm

610‧‧‧第一驅動馬達 610‧‧‧First drive motor

610S‧‧‧定子 610S‧‧‧ Stator

610R‧‧‧轉子 610R‧‧‧Rotor

620‧‧‧第二驅動馬達 620‧‧‧Second drive motor

620S‧‧‧定子 620S‧‧‧ Stator

620R‧‧‧轉子 620R‧‧‧Rotor

640‧‧‧外驅動軸 640‧‧‧Outer drive shaft

645‧‧‧同軸驅動軸總成 645‧‧‧ coaxial drive shaft assembly

650‧‧‧內驅動軸 650‧‧‧ inner drive shaft

660‧‧‧密封 660‧‧‧ Seal

733A‧‧‧驅動滑輪 733A‧‧‧ drive pulley

733B‧‧‧驅動滑輪 733B‧‧‧ drive pulley

734A‧‧‧惰輪 734A‧‧‧ Idler

734B‧‧‧惰輪 734B‧‧‧ Idler

735A‧‧‧惰輪 735A‧‧‧ Idler

735B‧‧‧惰輪 735B‧‧‧ Idler

740‧‧‧皮帶或帶 740‧‧‧Belt or belt

741‧‧‧皮帶或帶 741‧‧‧ Belt or belt

800‧‧‧驅動部 800‧‧‧ Drive Department

801‧‧‧驅動部 801‧‧‧ Drive Department

801’‧‧‧驅動部 801’‧‧‧ Drive Department

810‧‧‧單階線性滑動臂 810‧‧‧ single-order linear sliding arm

811‧‧‧單階線性滑動臂 811‧‧‧ single-order linear sliding arm

812‧‧‧單階線性滑動臂 812‧‧‧Single-order linear sliding arm

813‧‧‧單階線性滑動臂 813‧‧‧ single-order linear sliding arm

850‧‧‧驅動部 850‧‧‧ Drive Department

851‧‧‧框架 851‧‧‧Frame

851C1‧‧‧外殼或外蓋 851C1‧‧‧Shell or cover

851M‧‧‧孔或開口 851M‧‧ hole or opening

851C3‧‧‧外蓋 851C3‧‧‧ Cover

851C2‧‧‧外蓋 851C2‧‧‧ Cover

851C1’‧‧‧外殼 851C1’‧‧‧ Shell

852‧‧‧框架 852‧‧‧Frame

853‧‧‧傳動部 853‧‧‧Transmission Department

860‧‧‧密封馬達部 860‧‧‧Seal Motor Division

860S‧‧‧密封構件 860S‧‧‧ Sealing member

861‧‧‧支承構件 861‧‧‧Support members

901‧‧‧中空間或開口 901‧‧‧ Space or opening

910A‧‧‧惰輪 910A‧‧‧ Idler

910B‧‧‧惰輪 910B‧‧‧ Idler

920‧‧‧滑輪 920‧‧‧ pulley

921‧‧‧驅動滑輪 921‧‧‧ drive pulley

930‧‧‧線性軌或導引構件 930‧‧‧Linear rail or guide member

931‧‧‧線性軌或導引構件 931‧‧‧Linear rail or guide member

940‧‧‧托架或臂支承 940‧‧‧ bracket or arm support

940M‧‧‧臂安裝部 940M‧‧‧ Arm Installation Department

940B1‧‧‧皮帶或帶 940B1‧‧‧ belt or belt

940B2‧‧‧皮帶或帶 940B2‧‧‧ belt or belt

941‧‧‧托架或臂支承 941‧‧‧ bracket or arm support

941M‧‧‧臂安裝部 941M‧‧‧ Arm Installation Department

941B1‧‧‧皮帶或帶 941B1‧‧‧ belt or belt

941B2‧‧‧皮帶或帶 941B2‧‧‧ belt or belt

973‧‧‧開口 973‧‧‧ openings

974‧‧‧開口 974‧‧‧ openings

997‧‧‧密封部 997‧‧‧ Sealing Department

998‧‧‧密封部 998‧‧‧ Sealing Department

1000‧‧‧固定支承構件 1000‧‧‧Fixed support members

1100‧‧‧驅動器 1100‧‧‧ drive

1100D‧‧‧驅動軸 1100D‧‧‧ drive shaft

1104‧‧‧轉移單元模組 1104‧‧‧Transfer unit module

1110‧‧‧線性驅動馬達 1110‧‧‧Linear drive motor

1130‧‧‧樞轉外殼 1130‧‧‧ pivot housing

1150‧‧‧底構件 1150‧‧‧ bottom member

1150’‧‧‧底構件 1150'‧‧‧ bottom member

1200‧‧‧驅動器 1200‧‧‧ drive

1200S‧‧‧驅動軸 1200S‧‧‧ drive shaft

1200B‧‧‧軸承 1200B‧‧‧ bearing

1220‧‧‧樞轉外殼 1220‧‧‧ pivot housing

1250‧‧‧密封驅動部外殼 1250‧‧‧Sealed drive housing

1251‧‧‧密封驅動部外殼 1251‧‧‧Sealed drive housing

本揭露實施例的上述態樣及其它特徵係針對附圖而敘述於以下說明中，其中：圖1A-1D係依據本揭露實施例的態樣之基板處理設備的示意圖；圖1E及1F係依據本揭露實施例的態樣之圖1A-1D的基板處理設備的部分的示意圖；圖2A-2D係依據本揭露實施例的態樣之基板搬運設備的示意圖；圖2E係依據本揭露實施例的態樣之驅動剖面的示意圖；圖2F-2J係依據本揭露實施例的態樣之搬運臂的示意圖；圖3A-3E係依據本揭露實施例的態樣之圖2A-2D中所示之基板搬運設備的一部分的示意圖；圖3F及3G係依據本揭露實施例的態樣之驅動剖面得示意圖；圖4A-4B係依據本揭露實施例的態樣之圖2A-2D中所示之基板搬運設備的一部分的示意圖；圖5A-5C係依據本揭露實施例的態樣之基板 搬運設備的示意圖；圖5D及5E係依據本揭露實施例的態樣之圖5A-5C中所示之基板搬運設備的一部分的示意圖；圖6A-6B係依據本揭露實施例的態樣之基板搬運設備的示意圖；圖7A-7B係依據本揭露實施例的態樣之基板搬運設備的示意圖；圖7C係依據本揭露實施例的態樣之基板搬運設備的示意圖；圖8A-8B係依據本揭露實施例的態樣之基板搬運設備的示意圖；圖9A-9F係依據本揭露實施例的態樣之圖8A-8B中所示之基板搬運設備的一部分的示意圖；圖10A-10B係依據本揭露實施例的態樣之基板搬運設備的示意圖；圖11A-11D係依據本揭露實施例的態樣之基板搬運設備的示意圖；及圖12A-12C係依據本揭露實施例的態樣之基板搬運設備的示意圖。 The above aspects and other features of the present disclosure are described in the following description with reference to the accompanying drawings in which: FIG. 1A-1D is a schematic diagram of a substrate processing apparatus according to an embodiment of the present disclosure; FIGS. 1E and 1F are based on 2A-2D are schematic views of a portion of a substrate processing apparatus according to an embodiment of the present disclosure; and FIG. 2E is a schematic view of a substrate handling apparatus according to an embodiment of the present disclosure; FIG. 2E is a schematic diagram of a substrate handling apparatus according to an embodiment of the present disclosure; 2F-2J is a schematic view of a carrier arm according to an embodiment of the present disclosure; FIGS. 3A-3E are diagrams of the substrate shown in FIGS. 2A-2D according to an embodiment of the present disclosure. FIG. 3F and FIG. 3G are schematic diagrams showing a driving profile according to an embodiment of the present disclosure; FIGS. 4A-4B are substrate handling shown in FIGS. 2A-2D according to an embodiment of the present disclosure. Schematic diagram of a portion of the device; FIGS. 5A-5C are substrates in accordance with an embodiment of the present disclosure 5D and 5E are schematic views of a portion of the substrate handling apparatus shown in FIGS. 5A-5C according to an embodiment of the present disclosure; FIGS. 6A-6B are diagrams of a substrate according to an embodiment of the present disclosure. FIG. 7A-7B are schematic views of a substrate carrying device according to an embodiment of the present disclosure; FIG. 7C is a schematic view of a substrate carrying device according to an embodiment of the present disclosure; FIGS. 8A-8B are based on the present invention; FIG. 9A-9F are schematic views of a portion of the substrate handling apparatus shown in FIGS. 8A-8B according to an embodiment of the present disclosure; FIGS. 10A-10B are based on the present invention; FIG. 11A-11D are schematic views of a substrate carrying apparatus according to an embodiment of the present disclosure; and FIGS. 12A-12C are diagrams of substrate handling according to an embodiment of the present disclosure. Schematic diagram of the device.

【發明內容及實施方式】 SUMMARY OF THE INVENTION AND EMBODIMENT

圖1A-1D係依據本揭露實施例的態樣之基板處理設備的示意圖。雖然本揭露實施例的態樣將參照圖式說明，應瞭解到，本揭露實施例的態樣可以許多形式實 施。而且，可使用任何適合尺寸、形狀或類型的元件或材料。 1A-1D are schematic views of a substrate processing apparatus in accordance with an embodiment of the present disclosure. Although the aspects of the disclosed embodiments will be described with reference to the drawings, it should be understood that the aspects of the disclosed embodiments may be in many forms. Shi. Moreover, any suitable size, shape or type of elements or materials can be used.

諸如例如半導體工具站之處理設備100A、100B、100C、100D係依據本揭露實施例的態樣予以顯示。雖然半導體工具站係顯示於圖式中，文中所述之本揭露實施例的態樣可應用至任何工具站或使用機械臂之應用。於一態樣中，處理設備100A、100B、100C、100D係顯示為具有群組工具配置(例如，具有連接至中央室的基板保持站)而於其它態樣中處理設備可以是線性配置工具，然而本揭露實施例的態樣可應用至任何適合工具站。設備100A、100B、100C、100D通常包括氣氛前端101、至少一真空負載鎖102、102A、102B和真空後端103。至少一真空負載鎖102、102A、102B可以任何適合配置耦接到前端101及/或後端103的任何適合埠或開口。例如，於一態樣中，該至少一負載鎖102、102A、102B可以並列安排配置於共同水平平面中如圖1B-1C所見。於另一態樣中，至少一負載鎖可以方格格式配置使得至少二個負載鎖102A、102B、102C、102D係成列(例如，具有隔開的水平平面)和行(例如，具有隔開的垂直平面)而配置如圖1E所示。於其它態樣中，該至少一負載鎖可以是單一成行負載鎖102如圖1A所示。於另一態樣中，該至少一負載鎖102、102E可以堆疊成行安排配置如圖1F所示。應瞭解到，雖然負載鎖係解說在搬運室125A、125B、125C、125D的端100E1或小面100F1上，於其它 態樣中，一或數個負載鎖可配置在搬運室125A、125B、125C、125D的任何數量的側100S1、100S2、端100E1、100E2或小面100F1-100F8上。該至少一負載鎖的每一者亦可包括一或數個晶圓/基板停留平面WRP(圖1F)其中基板保持在各別負載鎖內的適合支承上。於其它態樣中，工具站可具有任何適合組態。前端101、至少一負載鎖102、102A、102B及後端103的每一者的組件可連接至控制器110，其可以是諸如例如，群組架構控制之任何適合控制架構的一部分。控制系統可以是具有主控制器、群組控制器及自主式遠程控制器之閉環控制器，諸如2011年3月8日發出案名為”可縮放運動控制系統”的美國專利號7,904,182中所揭示，其全部內容併入文中作為參考。於其它態樣中，可使用任何適合控制器及/或控制系統。 Processing devices 100A, 100B, 100C, 100D, such as, for example, semiconductor tool stations, are shown in accordance with aspects of the disclosed embodiments. Although the semiconductor tool station is shown in the drawings, the aspects of the disclosed embodiments described herein can be applied to any tool station or application using a robotic arm. In one aspect, the processing devices 100A, 100B, 100C, 100D are shown as having a group tool configuration (eg, having a substrate holding station connected to a central chamber) while in other aspects the processing device can be a linear configuration tool, However, aspects of the disclosed embodiments can be applied to any suitable tool station. Apparatus 100A, 100B, 100C, 100D typically includes an ambience front end 101, at least one vacuum load lock 102, 102A, 102B, and a vacuum back end 103. The at least one vacuum load lock 102, 102A, 102B can be coupled to any suitable port or opening of the front end 101 and/or the rear end 103 in any suitable configuration. For example, in one aspect, the at least one load lock 102, 102A, 102B can be arranged side by side in a common horizontal plane as seen in Figures 1B-1C. In another aspect, the at least one load lock can be configured in a grid format such that at least two load locks 102A, 102B, 102C, 102D are in columns (eg, with spaced horizontal planes) and rows (eg, separated) The vertical plane is configured as shown in Figure 1E. In other aspects, the at least one load lock can be a single row load lock 102 as shown in Figure 1A. In another aspect, the at least one load lock 102, 102E can be stacked in a row arrangement as shown in FIG. 1F. It should be understood that although the load lock is illustrated on the end 100E1 or facet 100F1 of the transfer chambers 125A, 125B, 125C, 125D, In one aspect, one or more load locks can be disposed on any number of sides 100S1, 100S2, end 100E1, 100E2, or facets 100F1-100F8 of the transfer chambers 125A, 125B, 125C, 125D. Each of the at least one load locks may also include one or more wafer/substrate retention planes WRP (Fig. 1F) with the substrates held in suitable supports within the respective load locks. In other aspects, the tool station can have any suitable configuration. The components of the front end 101, each of the at least one load lock 102, 102A, 102B, and the back end 103 can be coupled to the controller 110, which can be part of any suitable control architecture such as, for example, group architecture control. The control system can be a closed-loop controller having a master controller, a group controller, and an autonomous remote controller, such as disclosed in U.S. Patent No. 7,904,182, issued to Mar. , the entire contents of which is incorporated herein by reference. In other aspects, any suitable controller and/or control system can be used.

於一態樣中，前端101通常包括負載埠模組105及迷你環境106諸如例如，設備前端模組(EFEM)。負載埠模組105可以是箱開啟器/負載器工具標準(BOLTS)介面，其符合SEMI標準E15.1、E47.1、E62、E19.5或E1.9用於300mm負載埠、前開口或底開口箱/容器及匣。於其它態樣中，負載埠模組可配置為200mm晶圓/基板介面、450mm晶圓/基板介面或任何其它適合基板介面，諸如例如，更大或更小的半導體晶圓/基板、平面顯示器的平面面板、太陽能面板、標線片或任何其它適合物件。雖然三個負載埠模組105係顯示於圖1A-1D，於其它態樣中任何適量的負載埠模組可併入前端101中。負載埠 模組105可配置成自架空搬運系統、無人搬運車、個人搬運車、導軌車輛或以任何其它適合搬運方法來接收基板托架或匣C。負載埠模組105可通過負載埠107與迷你環境106接合。負載埠107可容許基板於基板匣及迷你環境106之間的通過。迷你環境106通常包括任何適合轉移機器人108，其可結合文中所述之揭示實施例的一或數個態樣。於一態樣中，機器人108可以是軌道安裝的機器人，例如，1999年12月14日發出的美國專利號6,002,840；2013年4月16日發出的美國專利號8,419,341、2010年1月19日發出的美國專利號7,648,327中所述，其所揭示全部內容併入文中作為參考。於其它態樣中，機器人108可以是大致類似於文中關於後端103所述。迷你環境106可提供控制清潔區用於多負載埠模組之間的基板轉移。 In one aspect, the front end 101 typically includes a load port module 105 and a mini environment 106 such as, for example, an equipment front end module (EFEM). The load port module 105 can be a box opener/loader tool standard (BOLTS) interface that complies with SEMI standards E15.1, E47.1, E62, E19.5, or E1.9 for 300mm load ports, front openings, or Bottom open box/container and bowl. In other aspects, the load port module can be configured as a 200 mm wafer/substrate interface, a 450 mm wafer/substrate interface, or any other suitable substrate interface such as, for example, a larger or smaller semiconductor wafer/substrate, flat panel display Flat panel, solar panel, reticle or any other suitable item. Although the three load port modules 105 are shown in FIGS. 1A-1D, in any other aspect, any suitable amount of load port modules can be incorporated into the front end 101. Load The module 105 can be configured to receive a substrate carrier or cassette C from an overhead handling system, an automated guided vehicle, a personal truck, a rail vehicle, or in any other suitable handling method. The load port module 105 can be coupled to the mini environment 106 via the load port 107. The load port 107 can permit passage of the substrate between the substrate cassette and the mini environment 106. The mini environment 106 generally includes any suitable transfer robot 108 that can incorporate one or more aspects of the disclosed embodiments described herein. In one aspect, the robot 108 can be a rail-mounted robot, for example, U.S. Patent No. 6,002,840 issued on December 14, 1999; U.S. Patent No. 8,419,341 issued on April 16, 2013, issued on January 19, 2010 The disclosure of U.S. Patent No. 7,648,327, the entire disclosure of which is incorporated herein by reference. In other aspects, the bot 108 can be substantially similar to that described with respect to the back end 103 herein. The mini environment 106 can provide control of the cleaning zone for substrate transfer between multiple load modules.

至少一真空負載鎖102、102A、102B可定位於且連接至迷你環境106及後端103之間。於其它態樣中，負載埠105可實質直接地耦接到至少一負載鎖102、102A、102B或搬運室125A、125B、125C、125D，其中基板托架C係泵送回到搬運室125A、125B、125C、125D的真空及基板係直接地轉移於基板托架C與負載鎖或轉移室之間。於此態樣中，基板托架C可作用如負載鎖使得搬運室的處理真空伸入基板托架C。如可領會的，如果基板托架C係通過適合負載鎖實質直接地耦接至負載鎖，任何適合轉移設備可設置在負載鎖內或用其它方式進入托架C用於轉移基板至和自基板托架C。注意到，如文中所使用 的術語“真空”可表示諸如10^-5托或以下之高度真空，其中基板處理中。至少一負載鎖102、102A、102B通常包括氣氛和真空開槽閥。負載鎖102、102A、102B的開槽閥(以及用於處理站130)可提供環境隔離，使用以在自氣氛前端載入基板之後抽空負載鎖且在以諸如氮的惰性氣體使該鎖排氣時保持搬運室中的真空。如文中所述，處理設備100A、100B、100C、100D的開槽閥可定位於相同平面、不同垂直堆疊平面或定位於相同平面之開槽閥及定位於不同垂直堆疊平面之開槽閥的組合(如以上關於負載埠所述)以調節基板至和自至少處理站130及耦接至搬運室125A、125B、125C、125D的負載鎖102、102A、102B的轉移。至少一負載鎖102、102A、102B(及/或前端101)亦可包括用於對準基板的基準點至處理用所需位置之對準器或任何其它適合基板量測設備。於其它態樣中，真空負載鎖可定位於處理設備的任何適合位置且具有任何適合組態。 At least one vacuum load lock 102, 102A, 102B can be positioned and coupled between the mini environment 106 and the back end 103. In other aspects, the load port 105 can be substantially directly coupled to at least one of the load locks 102, 102A, 102B or the transfer chambers 125A, 125B, 125C, 125D, wherein the substrate carrier C is pumped back to the transfer chamber 125A, The vacuum and substrate of 125B, 125C, 125D are transferred directly between the substrate carrier C and the load lock or transfer chamber. In this aspect, the substrate holder C can act as a load lock so that the processing vacuum of the transfer chamber projects into the substrate holder C. As can be appreciated, if the substrate carrier C is directly coupled to the load lock by a suitable load lock, any suitable transfer device can be placed within the load lock or otherwise enter the carrier C for transferring the substrate to and from the substrate. Bracket C. It is noted that the term "vacuum" as used herein may mean a high vacuum such as 10 ^-5 Torr or less, in which the substrate is processed. At least one load lock 102, 102A, 102B typically includes an atmosphere and a vacuum slotted valve. The slotted valve of the load locks 102, 102A, 102B (and for the processing station 130) can provide environmental isolation for use to evacuate the load lock after loading the substrate from the front end of the atmosphere and to vent the lock with an inert gas such as nitrogen. Keep the vacuum in the chamber. As described herein, the slotted valves of the processing apparatus 100A, 100B, 100C, 100D can be positioned in the same plane, in different vertical stacking planes, or in a combination of slotted valves positioned in the same plane and slotted valves positioned in different vertical stacking planes. (As described above with respect to load )) to regulate substrate transfer to and from at least processing station 130 and load locks 102, 102A, 102B coupled to transfer chambers 125A, 125B, 125C, 125D. The at least one load lock 102, 102A, 102B (and/or the front end 101) may also include an aligner for aligning the reference point of the substrate to a desired location for processing or any other suitable substrate measuring device. In other aspects, the vacuum load lock can be positioned at any suitable location of the processing device and have any suitable configuration.

真空後端103通常包括搬運室125A、125B、125C、125D、一或數個處理站130及任何適量的轉移單元模組104，其包含可包括文中所述之揭示實施例的一或數個態樣之一或數個轉移機器人。搬運室125A、125B、125C、125D可具有任何適合形狀和尺寸，其例如，遵守SEMI標準E72規則。轉移單元模組104及一或數個轉移機器人將在以下說明且可至少部分地定位在搬運室125A、125B、125C、125D內以轉移基板於負載鎖102、 102A、102B(或於位在負載埠的匣C之間)與不同處理站130之間。於一態樣中，轉移單元模組104可移除自搬運室125A、125B、125C、125D作為模組單元使得轉移單元模組104遵守SEMI標準E72規則。 The vacuum back end 103 typically includes a transfer chamber 125A, 125B, 125C, 125D, one or more processing stations 130, and any suitable number of transfer unit modules 104, including one or more states that may include the disclosed embodiments described herein. One or several transfer robots. The transfer chambers 125A, 125B, 125C, 125D can have any suitable shape and size, for example, in compliance with the SEMI standard E72 rules. The transfer unit module 104 and one or more transfer robots will be described below and can be at least partially positioned within the transfer chambers 125A, 125B, 125C, 125D to transfer the substrate to the load lock 102, 102A, 102B (or between 匣C of the load )) and the different processing stations 130. In one aspect, the transfer unit module 104 can be removed from the transfer chambers 125A, 125B, 125C, 125D as modular units such that the transfer unit module 104 complies with the SEMI standard E72 rules.

處理站130可透過各種沉積、蝕刻或其它類型的過程操作在基板上以形成電路或其它所需結構在該基板上。標準過程包括但不限於薄膜過程，其使用諸如電漿蝕刻或其它蝕刻過程的真空、化學汽相沉積(CVD)、電漿汽相沉積(PVD)、諸如離子植入的植入、量測、快速熱處理(RTP)、乾條原子層沉積(ALD)、氧化/擴散、氮化物的形成、真空微影術、磊晶術(EPI)、銲線機和汽化或使用真空壓力之其它薄膜處理。處理站130係以任何適合方式可傳達地連接至搬運室125A、125B、125C、125D，諸如透過開槽閥SV，以容許基板自搬運室125傳至處理站130反之亦然。搬運室125的開槽閥SV可配置成容許雙(例如，位在共同外殼內之一個以上的基板處理站)或並列處理站130T1、130T2、單處理站130S及/或堆疊處理模組/負載鎖(圖1E及1F)。 Processing station 130 can be operated on a substrate through various deposition, etching or other types of processes to form circuits or other desired structures on the substrate. Standard processes include, but are not limited to, thin film processes that use vacuum such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation such as ion implantation, measurement, Rapid thermal processing (RTP), dry bar atomic layer deposition (ALD), oxidation/diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonding machines and vaporization or other thin film processing using vacuum pressure. The processing station 130 is communicably coupled to the handling chambers 125A, 125B, 125C, 125D in any suitable manner, such as through the slotting valve SV, to permit the substrate to pass from the handling chamber 125 to the processing station 130 and vice versa. The slotted valve SV of the handler 125 can be configured to allow dual (eg, more than one substrate processing station located within a common housing) or parallel processing stations 130T1, 130T2, single processing station 130S, and/or stacked processing modules/loads Lock (Figures 1E and 1F).

注意到，當轉移單元模組104的一或數個臂與預定處理站130對準時，基板至和自處理站130、耦接至搬運室125A、125B、125C、125D的負載鎖102、102A、102B(或匣C)的轉移可能發生。依據揭示實施例的態樣，一或數個基板可單獨或實質同步地轉移至各別預定處理站130(例如，諸如當基板係選擇/放置自並列或串 列的處理站時如圖1B、1C及1D所示)。於一態樣中，轉移單元模組104可安裝在吊臂143(見例如，圖1D)或線性支架144上，諸如以下文件中所述，在2013年10月18日提出案名“處理設備”的美國臨時專利申請案61/892,849、在2013年11月15日提出案名“處理設備”的美國臨時專利申請案61/904,908及在2013年2月11日提出案名“基板處理設備”之國際專利申請案PCT/US13/25513，其全部內容併入文中作為參考。 It is noted that when one or more arms of the transfer unit module 104 are aligned with the predetermined processing station 130, the substrate to and from the processing station 130, the load locks 102, 102A coupled to the transfer chambers 125A, 125B, 125C, 125D, A transfer of 102B (or 匣C) may occur. In accordance with aspects of the disclosed embodiments, one or more substrates may be transferred separately or substantially synchronously to respective predetermined processing stations 130 (eg, such as when substrate substrates are selected/placed from juxtaposition or string) The processing stations of the columns are shown in Figures 1B, 1C and 1D). In one aspect, the transfer unit module 104 can be mounted on the boom 143 (see, for example, FIG. 1D) or the linear bracket 144, as described in the following document, filed on October 18, 2013, entitled "Processing Equipment" U.S. Provisional Patent Application No. 61/892,849, filed on November 15, 2013, the U.S. Provisional Patent Application No. 61/904,908, filed on November 15, 2013, and filed on February 11, 2013. International Patent Application No. PCT/US13/25513, the entire disclosure of which is incorporated herein by reference.

現參照圖2A-2D，於一態樣中，轉移單元模組104包括一或數個驅動部200、201及至少一轉移臂210、211、212、213。至少一驅動部200、201可包括共同的驅動部200，其包括容納一或數個的Z軸驅動270及旋轉驅動部282之框架200F。框架200F的內部200FI可以任何適合方式密封如以下將述。於一態樣中，Z軸驅動可以是配置沿著Z軸移動至少一轉移臂210、211、212、213之任何適合驅動。Z軸驅動係解釋為螺旋型驅動於圖2E中但於其它態樣中該驅動可以是諸如線性致動器、壓電馬達等之任何適合線性驅動。旋轉驅動部282可配置為諸如例如，簡諧驅動部之任何適合驅動部。例如，旋轉驅動部282可包括任何適量的簡諧驅動馬達280。於一態樣中，圖2E所示的旋轉驅動部282包括一簡諧驅動馬達280用於驅動軸280S，然而，於其它態樣中，驅動部可包括任何適量的簡諧驅動馬達對應於例如，同軸驅動系統中的任何適量的驅動軸。簡諧驅動馬達280可具有高容量輸 出軸承使得磁性流體密封276、277的組件片係透過具有充份穩定性和清除率的簡諧驅動馬達280同軸且支承至少部分地在轉移單元模組104的所需旋轉T和伸展R移動期間。注意到，磁性流體密封276、277可包括形成實質同心同軸密封的數個部件如以下將述。於此實例中，旋轉驅動部282包括以實質類似於以下專利中所述的方式容納驅動馬達280之外殼281，如美國專利號6,845,250、5,899,658、5,813,823及5,720,590，其全部內容併入文中作為參考。磁性流體密封276、277可容限以密封驅動軸總成中的驅動軸280S。注意到，驅動軸280S亦可具有中空架構(例如，具有沿著驅動軸的中央縱向運轉的孔)以容許引線290或任何適合項目通過驅動總成用於連接至例如安裝至驅動200之另一驅動部(例如，諸如驅動部201)及/或至少一轉移臂210、211、212、213。 Referring now to Figures 2A-2D, in one aspect, the transfer unit module 104 includes one or more drive units 200, 201 and at least one transfer arm 210, 211, 212, 213. The at least one drive portion 200, 201 can include a common drive portion 200 that includes a frame 200F that houses one or more Z-axis drives 270 and a rotary drive portion 282. The interior 200FI of the frame 200F can be sealed in any suitable manner as will be described below. In one aspect, the Z-axis drive can be any suitable drive configured to move at least one of the transfer arms 210, 211, 212, 213 along the Z-axis. The Z-axis drive train is explained as a helical drive in Figure 2E but in other aspects the drive may be any suitable linear drive such as a linear actuator, a piezo motor or the like. The rotary drive portion 282 can be configured as any suitable drive portion such as, for example, a simple harmonic drive. For example, the rotary drive 282 can include any suitable amount of simple harmonic drive motor 280. In one aspect, the rotary drive portion 282 shown in FIG. 2E includes a simple harmonic drive motor 280 for driving the shaft 280S. However, in other aspects, the drive portion can include any suitable amount of simple harmonic drive motor corresponding to, for example, Any suitable drive shaft in the coaxial drive system. The simple harmonic drive motor 280 can have a high capacity input The bearings are such that the component sheets of the magnetic fluid seals 276, 277 are coaxially coupled through the harmonic drive motor 280 having sufficient stability and clearance and are supported at least partially during the desired rotation T and extension R movement of the transfer unit module 104. . It is noted that the magnetic fluid seals 276, 277 can include several components that form a substantially concentric coaxial seal as will be described below. In this example, the rotary drive 282 includes a housing 281 that houses the drive motor 280 in a manner substantially similar to that described in the following patents, such as U.S. Patent Nos. 6,845,250, 5, 899, 658, 5, 813, 823, and 5, 720, 590, incorporated herein by reference. The magnetic fluid seals 276, 277 can be tolerated to seal the drive shaft 280S in the drive shaft assembly. It is noted that the drive shaft 280S can also have a hollow architecture (eg, having a bore that runs longitudinally along the center of the drive shaft) to allow the lead 290 or any suitable item to be used by the drive assembly for connection to, for example, another drive to the drive 200. A drive portion (eg, such as drive portion 201) and/or at least one transfer arm 210, 211, 212, 213.

於一態樣中，外殼281可安裝至耦接至Z軸驅動270的支架270C使得Z軸驅動沿著Z軸移動支架(和位在其上的外殼281)。如可領會的，為了密封受控的氣氛其中至少一轉移臂210、211、212、213操作自驅動200的內部(其可操作在氣氛壓力ATM環境)可包括一或數個上述之磁性流體密封276、277及伸縮密封275。伸縮密封275可具有耦接至支架270C的一端及耦接至框架200F1的任何適合部分的另一端，使得框架200F的內部200FI係與其中有至少一轉移臂210、211、212、213操作之受控氣氛隔離。 In one aspect, the outer casing 281 can be mounted to a bracket 270C coupled to the Z-axis drive 270 such that the Z-axis drives the carriage (and the outer casing 281 positioned thereon) along the Z-axis. As can be appreciated, in order to seal a controlled atmosphere wherein at least one of the transfer arms 210, 211, 212, 213 operates from the interior of the drive 200 (which is operable in an atmospheric pressure ATM environment) may include one or more of the magnetic fluid seals described above 276, 277 and telescopic seal 275. The telescoping seal 275 can have one end coupled to the bracket 270C and the other end coupled to any suitable portion of the frame 200F1 such that the interior 200FI of the frame 200F and the operation of at least one of the transfer arms 210, 211, 212, 213 therein are subject to operation Control atmosphere isolation.

於此態樣中，驅動軸280S可耦接至驅動部201用於使驅動部201繞著至少一轉移臂210、211、212、213的每一者可共有之共同軸CAX旋轉於箭頭T的方向。在此，驅動部201可包括底構件250及至少一驅動部251、252。於此態樣中，有二個驅動部251、252但於其它態樣中任何適量的驅動部可被設置。底構件250包括形成內部室250P的框架。每一驅動部251、252亦包括形成內部室300P的框架251F、252F，內部室300P係與底構件250的內部室250P成密封相通。如可領會的，每一驅動部251、252可包括任何適合出入口，其可由例如，任何適合外蓋250C所密封。圖2B所見，底構件250可包括第一及第二端使得驅動部251、252係密封地耦接至該等端的各別一者。驅動部可配置在相對於彼此的任何適合角β以使安裝在其上的臂的伸/縮軸能夠伸展穿過該等臂所在之轉移室125A、125B、125C、125D的埠。例如，於一態樣中，角β(其可相當於驅動部251、252的伸/縮軸之間的角)可實質相同如或等於轉移室125A的小面100F1-100F8的角α(圖1A)。於其它態樣中角β可以是約0以使驅動部的伸/縮軸(和安裝在其上的臂)係實質地彼此平行用於伸展穿過例如轉移室125B(圖1B)、125C(圖1C)及125D(圖1D)的並列部。於仍其它態樣中角β可以是可調整的(手動或透過自動化，如以下將述)以使驅動部251、252的伸/縮軸可具有相對於彼此的任何適合角β。例如，角β可以是調整於0和θ的角之間用於 伸展穿過轉移室125C(圖1C)的埠及/或用於自動工件定心如下將述。於仍其它態樣中該等驅動部之間的角β及/或間距可固定使得轉移單元模組104的臂可透過共同驅動軸CAX的旋轉及每一驅動部251、252的獨立伸展或操作而伸展穿過具有斜角端面之轉移模組的埠。底構件250可具有任何適合長度L1以使每一驅動部251、252的伸/縮R1、R2的軸係固定距離分開其中，該固定距離可符合或不然系統工具組態所施加之匹配要求(例如，轉移單元模組104所在之模組的埠之間的距離)。 In this aspect, the driving shaft 280S can be coupled to the driving portion 201 for rotating the driving portion 201 around the common axis CAX common to each of the at least one transfer arm 210, 211, 212, 213 to the arrow T. direction. Here, the driving portion 201 may include a bottom member 250 and at least one driving portion 251, 252. In this aspect, there are two driving portions 251, 252, but in any other aspect, any suitable amount of driving portions can be provided. The bottom member 250 includes a frame that forms an interior chamber 250P. Each drive portion 251, 252 also includes a frame 251F, 252F that forms an interior chamber 300P that is in sealing communication with the interior chamber 250P of the bottom member 250. As can be appreciated, each drive portion 251, 252 can include any suitable access opening that can be sealed by, for example, any suitable outer cover 250C. As seen in Figure 2B, the bottom member 250 can include first and second ends such that the drive portions 251, 252 are sealingly coupled to each of the ends. The drive portions can be configured at any suitable angle β relative to each other such that the extension/retraction axes of the arms mounted thereon can extend through the turns of the transfer chambers 125A, 125B, 125C, 125D in which the arms are located. For example, in one aspect, the angle β (which may correspond to the angle between the extension/contraction axes of the driving portions 251, 252) may be substantially the same as or equal to the angle α of the facets 100F1 - 100F8 of the transfer chamber 125A (Fig. 1A). In other aspects, the angle β may be about 0 such that the extension/retraction axes of the drive portion (and the arms mounted thereon) are substantially parallel to each other for extending through, for example, the transfer chamber 125B (Fig. 1B), 125C ( The parallel portions of Figures 1C) and 125D (Figure 1D). In still other aspects the angle β may be adjustable (manually or by automation, as will be described below) such that the extension/contraction axes of the drive portions 251, 252 may have any suitable angle β with respect to each other. For example, the angle β can be adjusted between the angles of 0 and θ for The crucible extending through the transfer chamber 125C (Fig. 1C) and/or used for automatic workpiece centering will be described below. In still other aspects, the angles β and/or spacing between the drive portions may be fixed such that the arms of the transfer unit module 104 are permeable to rotation of the common drive shaft CAX and independent extension or operation of each of the drive portions 251, 252 And extending through the raft of the transfer module having the beveled end faces. The bottom member 250 can have any suitable length L1 to separate the shafting fixed distances of the extensions/retractions R1, R2 of each of the drive portions 251, 252, which can meet or match the matching requirements imposed by the system tool configuration ( For example, the distance between the turns of the module in which the transfer unit module 104 is located).

亦參照圖3A-3G，驅動部251、252將有關驅動部251予以說明。應瞭解到，驅動部252可以是實質相似於驅動部251。如以上所示，驅動部251包括框架251F，其可以是由以任何適合方式相互密封耦接的第一框架構件251F1及第二框架構件251F2。於其它態樣中，框架可具有任何適合組態且由任何適量的框架構件所組成。框架251F可包括孔或開口251M配置用於以任何適合方式將框架251F安裝至底構件250使得驅動部251的內部室300P係與底構件250的內部室250P密封相通以使共同氣氛環境係共用於內部室250P、300P與驅動部200的外殼281的內部之間。於這態樣中，驅動部251可配置用以支承和驅動二個轉移臂212、213但於其它態樣中，驅動部251可配置用以支承和驅動任何適量的轉移臂。驅動部251可包括第一線性軌或滑軌310A、310B(通常為線性軌或滑軌310)及第二線性軌或滑軌311A、311B(通常 為線性軌或滑軌311)，配置用以界定伸及縮各別轉移臂212、213的每一者之獨立驅動軸的自由度。於這態樣中，驅動部包括第一驅動馬達320及第二驅動馬達321用於透過例如帶滑輪驅動傳動來驅動各別臂212、213。雖然馬達係解說為旋轉馬達，於其它態樣中，任何適合馬達及/或適合驅動傳動可被使用，諸如例如，直接線性馬達、線性壓電電動馬達、線性電感馬達、線性同步馬達、電刷或無刷線性馬達、線性步進馬達、線性伺服馬達、磁阻馬達等。適合線性馬達的實例係說明於以下專利，例如，2011年10月31日申請案名為“具有Z運動和關節臂的線性真空機器人”之美國專利申請案號13/286,186、2011年6月13日申請案名為“基板處理設備”之美國專利申請案號13/159,034、2011年3月8日發出案名為“用於搬運和處理基板的設備及方法”之美國專利號7,901,539、2012年10月23日發出案名為“用於搬運和處理基板的設備及方法”之美國專利號8,293,066、2013年4月16日發出案名為“具有Z運動和關節臂的線性真空機器人”之美國專利號8,419,341、2009年8月18日發出案名為“基板處理設備”之美國專利號7,575,406、及2011年6月14日發出案名為“基板處理設備”之美國專利號7,959,395，其全部內容併入文中作為參考。 3A to 3G, the drive units 251 and 252 will be described with respect to the drive unit 251. It should be appreciated that the drive portion 252 can be substantially similar to the drive portion 251. As indicated above, the drive portion 251 includes a frame 251F that may be a first frame member 251F1 and a second frame member 251F2 that are sealingly coupled to each other in any suitable manner. In other aspects, the frame can have any suitable configuration and consist of any suitable amount of frame members. The frame 251F can include a hole or opening 251M configured to mount the frame 251F to the bottom member 250 in any suitable manner such that the interior chamber 300P of the drive portion 251 is in sealing communication with the interior chamber 250P of the bottom member 250 to share a common atmosphere environment The internal chambers 250P, 300P are located between the interior of the outer casing 281 of the drive unit 200. In this aspect, the drive portion 251 can be configured to support and drive the two transfer arms 212, 213. In other aspects, the drive portion 251 can be configured to support and drive any suitable amount of transfer arms. The drive portion 251 can include a first linear rail or slide rail 310A, 310B (typically a linear rail or slide rail 310) and a second linear rail or slide rail 311A, 311B (typically The linear rail or slide rail 311) is configured to define the degree of freedom of the independent drive shaft for each of the respective transfer arms 212, 213. In this aspect, the drive portion includes a first drive motor 320 and a second drive motor 321 for driving the respective arms 212, 213 through, for example, a pulley drive drive. Although the motor is illustrated as a rotary motor, in other aspects any suitable motor and/or suitable drive drive can be used, such as, for example, a direct linear motor, a linear piezoelectric electric motor, a linear induction motor, a linear synchronous motor, a brush. Or brushless linear motors, linear stepping motors, linear servo motors, reluctance motors, etc. Examples of suitable linear motors are described in the following patents, for example, U.S. Patent Application Serial No. 13/286,186, filed on Jan. 31, 2011, entitled &quot U.S. Patent Application No. 13/159,034, entitled "Substrate Processing Equipment", and U.S. Patent No. 7,901,539, 2012, entitled "Equipment and Method for Handling and Handling Substrates", issued on March 8, 2011 U.S. Patent No. 8,293,066, entitled "Equipment and Method for Handling and Handling Substrates", issued on October 23, 2013, issued the title of "Linear Vacuum Robot with Z Motion and Articulating Arms" on April 16, 2013 U.S. Patent No. 7,575,406, entitled "Substrate Processing Equipment", and U.S. Patent No. 7,959,395, entitled "Substrate Processing Equipment", issued on June 14, 2011, issued on Aug. 18, 2009, the entire contents of which are incorporated herein by reference. It is incorporated herein by reference.

第一及第二驅動馬達320、321可以是實質相似於驅動馬達280之簡諧驅動而於其它態樣中，驅動馬達320、321可以是任何適合驅動馬達。每一驅動馬達320、 321可具有各別密封320S、321S，諸如磁性流體密封用於密封框架251中的孔，馬達320、321的驅動軸370伸展穿過框架251用於於任何適合方式耦接至各別驅動滑輪332B、333A。驅動滑輪332B、333A可於任何適合方式諸如透過一或數個帶而耦接至各別從動滑輪332A、333B。例如，驅動滑輪332B可透過帶330A、330B耦接至從動滑輪332A。驅動滑輪333A可透過帶331A、331B耦接至從動滑輪333B。帶330A、330B、331A、331B可以是諸如例如，以下所述的任何適合帶，例如，2013年8月26日提出案名為“基本搬運設備”之美國臨時專利申請案號61/869,870，其全部內容併入文中作為參考。如可領會的，文中所述的驅動軸可具有任何適合編碼器，諸如編碼器371、296、371用於檢測各別驅動馬達的位置和傳送一或數個信號至任何適合控制器，諸如例如，控制器110用於控制轉移單元模組104。亦如可領會的，驅動部251、252及底構件250的密封內部容許每一驅動部251、252的驅動馬達320、321位於與有轉移臂210-213操作的環境分開之氣氛環境或不然密封。驅動部251、252及底構件250的密封內部亦可容許自驅動部200至驅動部201的線或管路線。 The first and second drive motors 320, 321 may be substantially similar to the simple drive of the drive motor 280. In other aspects, the drive motors 320, 321 may be any suitable drive motor. Each drive motor 320, The 321 may have respective seals 320S, 321S, such as magnetic fluid seals for sealing the holes in the frame 251, the drive shafts 370 of the motors 320, 321 extending through the frame 251 for coupling to the respective drive pulleys 332B in any suitable manner. , 333A. Drive pulleys 332B, 333A can be coupled to respective driven pulleys 332A, 333B in any suitable manner, such as by one or more straps. For example, drive pulley 332B can be coupled to driven pulley 332A via straps 330A, 330B. The drive pulley 333A is coupled to the driven pulley 333B through the belts 331A, 331B. The belts 330A, 330B, 331A, 331B may be, for example, any suitable belts described below, for example, U.S. Provisional Patent Application No. 61/869,870, filed on Jan. The entire contents are incorporated herein by reference. As can be appreciated, the drive shafts described herein can have any suitable encoder, such as encoders 371, 296, 371 for detecting the position of the respective drive motors and transmitting one or more signals to any suitable controller, such as for example The controller 110 is configured to control the transfer unit module 104. As can also be appreciated, the sealed interior of the drive portions 251, 252 and the bottom member 250 allows the drive motors 320, 321 of each of the drive portions 251, 252 to be located in an atmosphere separate from the environment in which the transfer arms 210-213 operate or otherwise sealed . The sealed interior of the driving portions 251, 252 and the bottom member 250 may also allow a line or tube route from the driving portion 200 to the driving portion 201.

再次參照圖2A-2D及4A-4B，將依據本揭露實施例的態樣關於驅動部252說明轉移臂210-213。於這態樣中，轉移臂210-213具有伸縮組態但於其它態樣中轉移臂210-213可具有任何適合組態。而且於這態樣中每一 驅動部251、252包括二個伸縮臂210-213但於其它態樣中任何適量的轉移臂可被設在每一驅動部251、252上。於這態樣中，每一轉移臂210-213包括底構件210B、211B及末端執行器210E、211E，末端執行器210E、211E可移動地耦接至各別底構件210B、211B。每一底構件210B、211B可具有任何適合傳動可配置用於沿著伸/縮軸驅動末端執行器之內部。底構件的內部可暴露至有轉移臂操作的環境但可包括諸如氣封的任何適合密封用於防止任何粒子進入該環境或接觸搬運在環境內的工件。注意到，文中所述的每一末端執行器包括其中基板在受末端執行器保持時所在之末端執行器配座平面SP(圖2D)。底構件210B可以是透過線性軌310A、310B可移動地耦接至驅動部252以便可相對於驅動部252而移動。底構件211B可以是透過線性軌311A、311B可移動地耦接至驅動部252以便可相對於驅動部252而移動。每一臂210、211具有各別軌所界定的自由度使得線性軌係相互平行所界定之每一轉移臂210及211的自由度(例如，末端執行器的轉移平面係一者設置在另一者上方)。如可領會的，轉移臂212、213具有類似的自由度。亦如可領會的，線性軌為臂211所界定之自由度可以是與線性軌為轉移臂212所界定的自由度同平面(例如，每一轉移臂211、212的末端執行器係位於相同平面)，而線性軌為臂210所界定之自由度可以是與線性軌為轉移臂213所界定的自由度同平面(例如，每一轉移臂210、213的末端執行器係位 於相同平面)。 Referring again to Figures 2A-2D and 4A-4B, transfer arms 210-213 will be described with respect to drive portion 252 in accordance with aspects of the disclosed embodiments. In this aspect, the transfer arms 210-213 have a telescoping configuration but in other aspects the transfer arms 210-213 can have any suitable configuration. And in each of these ways The drive portions 251, 252 include two telescoping arms 210-213 but in any other aspect any suitable amount of transfer arms can be provided on each of the drive portions 251, 252. In this aspect, each of the transfer arms 210-213 includes a bottom member 210B, 211B and end effectors 210E, 211E that are movably coupled to the respective bottom members 210B, 211B. Each of the bottom members 210B, 211B can have any suitable drive configurable for driving the interior of the end effector along the extension/contraction axis. The interior of the bottom member may be exposed to an environment in which the transfer arm operates but may include any suitable seal, such as a gas seal, for preventing any particles from entering the environment or contacting the workpiece being carried within the environment. It is noted that each of the end effectors described herein includes an end effector seating plane SP (Fig. 2D) in which the substrate is held by the end effector. The bottom member 210B may be movably coupled to the drive portion 252 through the linear rails 310A, 310B so as to be movable relative to the drive portion 252. The bottom member 211B may be movably coupled to the driving portion 252 through the linear rails 311A, 311B so as to be movable relative to the driving portion 252. Each arm 210, 211 has a degree of freedom defined by the respective rails such that the linear trajectories are parallel to each other to define the degree of freedom of each of the transfer arms 210 and 211 (eg, the end effector's transfer plane is one set in the other Above). As can be appreciated, the transfer arms 212, 213 have similar degrees of freedom. As can also be appreciated, the degree of freedom defined by the linear track for the arm 211 can be the same as the degree of freedom defined by the linear track for the transfer arm 212 (eg, the end effector of each transfer arm 211, 212 is in the same plane) And the degree of freedom defined by the linear rail for the arm 210 may be the same plane as the degree of freedom defined by the linear rail for the transfer arm 213 (eg, the end effector position of each transfer arm 210, 213) In the same plane).

底構件210B、211B可並列配置在驅動部252上以使底構件210B耦接至帶330A、330B的至少一者，使得當馬達320驅動帶330A、330B時，底構件210B與帶330A、330B的至少一者一起驅動於伸/縮R的方向中。底構件211B係耦接至帶331A、331B的至少一者，使得當馬達321驅動帶331A、331B時，底構件211B與帶331A、331B的至少一者一起驅動於伸/縮R的方向中。於其它態樣中，底構件可具有相對於彼此的任何適合空間配置。 The bottom members 210B, 211B may be juxtaposed on the drive portion 252 to couple the bottom member 210B to at least one of the straps 330A, 330B such that when the motor 320 drives the straps 330A, 330B, the bottom member 210B and the straps 330A, 330B At least one of them is driven together in the direction of the extension/retraction R. The bottom member 211B is coupled to at least one of the belts 331A, 331B such that when the motor 321 drives the belts 331A, 331B, the bottom member 211B is driven together with at least one of the belts 331A, 331B in the direction of the extension/retraction R. In other aspects, the bottom members can have any suitable spatial configuration relative to each other.

底構件210B可包括線性軌或滑軌410A、410B，至少部分地配置在末端執行器210E可移動地安裝用於對底構件210B及驅動部252的相對旋轉之底構件的內部內。滑輪410、411、420、421可旋轉地安裝在末端或在各別底構件210B、211B的內部內的任何其它適合位置。一或數個帶(相似於上述)、單連續環帶/皮帶或任何其它適合傳動構件412、422可相互耦接滑輪410、411、420、421的各別者。於一態樣中，每一傳動構件412、422可接地至驅動部252的框架252F以使底構件210B、211B及框架252F之間的相對移動驅動各別傳動構件412、422。末端執行器211E可耦接至傳動構件412以使當底構件211B移動於箭頭R的方向時，末端執行器亦以例如，滑輪410、411所界定之任何適合傳動比相對於底構件211B移動於箭頭R的方向。同樣地，末端執行器 210E可耦接至傳動構件412以使當底構件210B移動於箭頭R的方向時，末端執行器亦以例如，滑輪420、421所界定之任何適合傳動比相對於底構件210B移動於箭頭R的方向。如可領會的，橋接構件400可設在諸如末端執行器211E、212E的末端執行器的一者上以使末端執行器211E、212E可定位在各別驅動部251、252的另一末端執行器210E、213E上方同時容許該等末端執行器彼此通過另一者上下。 The bottom member 210B can include linear rails or rails 410A, 410B that are at least partially disposed within the interior of the bottom member in which the end effector 210E is movably mounted for relative rotation of the bottom member 210B and the drive portion 252. The pulleys 410, 411, 420, 421 are rotatably mounted at the ends or at any other suitable location within the interior of the respective bottom members 210B, 211B. One or more belts (similar to the above), a single continuous belt/belt or any other suitable transmission member 412, 422 may be coupled to each other of the pulleys 410, 411, 420, 421. In one aspect, each of the transmission members 412, 422 can be grounded to the frame 252F of the drive portion 252 to drive the respective transmission members 412, 422 by relative movement between the bottom members 210B, 211B and the frame 252F. The end effector 211E can be coupled to the transmission member 412 such that when the bottom member 211B is moved in the direction of the arrow R, the end effector is also moved relative to the bottom member 211B by any suitable gear ratio defined by, for example, the pulleys 410, 411. The direction of the arrow R. Similarly, the end effector 210E may be coupled to the transmission member 412 such that when the bottom member 210B is moved in the direction of the arrow R, the end effector is also moved to the arrow R relative to the bottom member 210B by any suitable gear ratio defined by, for example, the pulleys 420, 421. direction. As can be appreciated, the bridging member 400 can be disposed on one of the end effectors, such as the end effectors 211E, 212E, such that the end effectors 211E, 212E can be positioned at the other end effector of the respective drive portions 251, 252. Above 210E, 213E, the end effectors are allowed to pass each other up and down.

如上所示，在此說明的轉移臂係解說為伸縮臂(或如下述之滑動臂)僅用於示範性目的。然而，於其它態樣中，轉移臂可以是諸如用於如圖2G所示的線性滑動臂214之任何適合轉移臂。於其它態樣中，該等臂可以是SCARA臂215(圖2H)或具有任何適合臂連桿機構之其它適合臂。臂連桿機構的適合實例可在以下專利中找到，例如，2009年8月25日發出的美國專利號7,578,649、1998年8月18日發出的美國專利號5,794,487、2011年5月24日發出的美國專利號7,946,800、2002年11月26日發出的美國專利號6,485,250、2011年2月22日發出的美國專利號7,891,935、2013年4月16日發出的美國專利號8,419,341及2011年11月10日提出案名為“雙臂機器人”的美國專利申請案號13/293,717和2013年9月5日提出案名為“具有Z運動及關節臂的線性真空機器人”的美國專利申請案號13/861,693，其全部內容併入文中作為參考。於所揭示實施例的態樣中，至少一轉移臂可出自習用 SCARA(選擇順應性關節機器人臂)型設計，其包括上臂、帶從動前臂及帶強制末端執行器，或出自伸縮臂或任何其它適合臂設計。轉移臂的適合實例可在以下專利找到，例如，2008年5月8日提出案名為“具有使用機械開關機構的多移動臂之基板搬運設備”的美國專利申請案號12/117,415及2010年1月19日發出的美國專利號7,648,327，其全部內容併入文中作為參考。轉移臂的操作可相互獨立的(例如，各臂的伸/縮係與其它臂皆為獨立的)，可以是透過失位開關而操作或可以是以任何適合方式操作連結使得該等臂共用至少一共同驅動軸。於其它態樣中，轉移臂可具有任何其它所需配置，諸如蛙腿式臂216(圖2F)組態、跳蛙式臂217(圖2J)組態、雙對稱臂218(圖2I)組態等。轉移臂的適合實例可在以下專利找到，2001年5月15日發出的美國專利號6,231,297、1993年1月19日發出的美國專利號5,180,276、2002年10月15日發出的美國專利號6,464,448、2001年5月1日發出的美國專利號6,224,319、1995年9月5日發出的美國專利號5,447,409、2009年8月25日發出的美國專利號7,578,649、1998年8月18日發出的美國專利號5,794,487、2011年5月24日發出的美國專利號7,946,800、2002年11月26日發出的美國專利號6,485,250、2011年2月22日發出的美國專利號7,891,935及2011年11月10日提出案名為“雙臂機器人”的美國專利申請案號13/293,717和2011年10月11日提 出案名為“同軸驅動真空機器人”的美國專利申請案號13/270,844，其全部內容併入文中作為參考。 As indicated above, the transfer arm described herein is illustrated as a telescopic arm (or a sliding arm as described below) for exemplary purposes only. However, in other aspects, the transfer arm can be any suitable transfer arm such as for the linear slide arm 214 as shown in Figure 2G. In other aspects, the arms can be SCARA arms 215 (Fig. 2H) or other suitable arms having any suitable arm linkage. Suitable examples of arm linkages are found in, for example, U.S. Patent No. 7,578,649 issued on August 25, 2009, U.S. Patent No. 5,794,487 issued on August 18, 1998, issued May 24, 2011 U.S. Patent No. 7,946,800, U.S. Patent No. 6,485,250 issued on November 26, 2002, U.S. Patent No. 7,891,935 issued on Feb. 22, 2011, U.S. Patent No. 8,419,341 issued on April 16, 2013, and November 10, 2011 U.S. Patent Application Serial No. 13/293, the entire disclosure of which is incorporated herein by reference to U.S.S. , the entire contents of which is incorporated herein by reference. In the aspect of the disclosed embodiment, at least one transfer arm can be used from the conventional SCARA (Selected compliant articulated robot arm) type design, including upper arm, with driven forearm and with forced end effector, or from telescopic arm or any other suitable arm design. A suitable example of a transfer arm can be found in the following patents, for example, U.S. Patent Application Serial No. 12/117,415, filed on May 8, 2008, entitled <RTIgt; U.S. Patent No. 7,648,327, issued Jan. 19, the entire disclosure of which is incorporated herein by reference. The operation of the transfer arms can be independent of each other (eg, the extension/retraction of each arm is independent of the other arms), can be operated through a misalignment switch, or can be operatively coupled in any suitable manner such that the arms share at least A common drive shaft. In other aspects, the transfer arm can have any other desired configuration, such as a frog leg arm 216 (Fig. 2F) configuration, a frog arm 217 (Fig. 2J) configuration, and a dual symmetrical arm 218 (Fig. 2I) set. State and so on. Suitable examples of transfer arms are found in U.S. Patent No. 6,231,297 issued May 15, 2001, U.S. Patent No. 5,180,276 issued Jan. 19, 1993, and U.S. Patent No. 6,464,448 issued on October 15, 2002. US Patent No. 6,224,319 issued May 1, 2001, U.S. Patent No. 5,447,409 issued on September 5, 1995, U.S. Patent No. 7,578,649 issued on August 25, 2009, and U.S. Patent No. 5,794,487, US Patent No. 7,946,800 issued on May 24, 2011, US Patent No. 6,485,250 issued on November 26, 2002, US Patent No. 7,891,935 issued on February 22, 2011, and November 10, 2011 U.S. Patent Application Nos. 13/293, 717 and October 11, 2011 for "two-arm robots" U.S. Patent Application Serial No. 13/270,844, the entire disclosure of which is incorporated herein by reference.

現參照圖5A-5E搬運單元模組104’係依據本揭露實施例的態樣予以解說。搬運單元模組104’係實質相似於所述的搬運單元模組104且包括驅動部200、201’。在此，驅動部201’包括具有形成內部室551的框架550F的底構件550。於一態樣中內部室551可包括可移除蓋550C及任何適合密封構件550CS用於在外蓋550C與框架550F配對時密封外蓋550C及框架550F之間的介面。內部室可以是以實質相似於上述的方式與驅動部200的內部相通。於此態樣中驅動部251、252可以是於任何適合方式可移動地安裝至驅動部201’的底構件550以提供驅動部251、252的臂，其具有相對於臂的伸/縮R的軸有斜角之自由度。 Referring now to Figures 5A-5E, the handling unit module 104' is illustrated in accordance with aspects of the present disclosure. The transport unit module 104' is substantially similar to the transport unit module 104 described above and includes drive units 200, 201'. Here, the driving portion 201' includes a bottom member 550 having a frame 550F forming an inner chamber 551. In one aspect, the interior chamber 551 can include a removable cover 550C and any suitable sealing member 550CS for sealing the interface between the outer cover 550C and the frame 550F when the outer cover 550C is mated with the frame 550F. The internal chamber may be in communication with the interior of the drive unit 200 in a manner substantially similar to that described above. In this aspect, the drive portions 251, 252 can be movably mounted to the bottom member 550 of the drive portion 201' in any suitable manner to provide arms of the drive portions 251, 252 having extension/retraction R relative to the arms. The axis has a degree of freedom in beveling.

於一態樣中驅動部可包括伸縮或密封支承構件560、561用於可移動地支承驅動部251、252的各別一者。伸縮構件560、561的每一者可包括間隙構件560S、561S，其係以諸如透過伸縮密封560B、561B之任何適合方式可移動連接至安裝構件560M、561M。安裝構件560M、561M係配置用於於任何適合方式耦接至框架550F以使間隙構件560S、561S穿過各別孔或開口575A、575B至少部分地***內部室551。於一態樣中任何適合密封構件565A、565B可以是配置在安裝構件560M、561M及框架550F之間用於保持內部室551中的密封環境。於一態 樣中伸縮密封560B、561B可以任何適合材料構成且具有任何適合組態以提供軸向支承於例如，間隙構件560S、561S的X及Z方向。於其它態樣中間隙構件560S、561S可以諸如透過至少部分位在內部室551內且與有臂操作的環境密封之線性軌、套管、軸承等之任何適合方式軸向地支承。例如，框架550F可包括配置在內部室551內的一或數個線性軌588A、588B(圖5E)。每一間隙構件560S、561S可固定地安裝至或包括一或數個導軌構件GM1、GM2、GM3、GM4，配置使得間隙構件560S、561S沿著線性軌線性地移動於箭頭599的方向且透過線性軌588A、588B支承於X及Z方向。 In one aspect, the drive portion can include a telescoping or sealing support member 560, 561 for movably supporting each of the drive portions 251, 252. Each of the telescoping members 560, 561 can include gap members 560S, 561S that are movably coupled to the mounting members 560M, 561M in any suitable manner, such as through telescoping seals 560B, 561B. Mounting members 560M, 561M are configured for coupling to frame 550F in any suitable manner such that gap members 560S, 561S are at least partially inserted into interior chamber 551 through respective apertures or openings 575A, 575B. In any aspect, any suitable sealing member 565A, 565B can be a sealed environment disposed between the mounting members 560M, 561M and the frame 550F for retaining the interior chamber 551. One state The sample telescoping seals 560B, 561B can be constructed of any suitable material and have any suitable configuration to provide axial support in the X and Z directions of, for example, the gap members 560S, 561S. In other aspects, the gap members 560S, 561S can be axially supported, such as through any suitable means that are at least partially positioned within the interior chamber 551 and that are sealed with an arm operated ambient linear rail, sleeve, bearing, or the like. For example, frame 550F can include one or more linear rails 588A, 588B (FIG. 5E) disposed within interior chamber 551. Each gap member 560S, 561S may be fixedly mounted to or include one or more rail members GM1, GM2, GM3, GM4 configured such that the gap members 560S, 561S linearly move along the linear rail in the direction of arrow 599 and are linear Rails 588A, 588B are supported in the X and Z directions.

每一間隙構件560S、561S包括介面566A、566B，配置於任何適合方式使間隙構件560S、561S與各別驅動部251、252耦接以使間隙構件560S、561S的內部通路IP促進內部室551及各別驅動部251、252的內部室300P之間的氣氛相通同時容許例如，底構件550及各別驅動部251、252之間的線、管線等的通路。如可領會的，任何適合潮落或保持構件597可設在內部室551內用於保持或不然固定通過間隙構件560S、561S的內部通路IP之任何線、管線等的移動側。於一態樣中任何適合密封構件566S可配置於介面566A、566B及各別框架251F、252F之間以使內部室551、300P的內部氣氛可密封自有轉移臂操作的環境中。 Each of the gap members 560S, 561S includes interfaces 566A, 566B disposed in any suitable manner to couple the gap members 560S, 561S with the respective drive portions 251, 252 such that the internal passages IP of the gap members 560S, 561S promote the interior chamber 551 and The atmosphere between the internal chambers 300P of the respective driving units 251 and 252 communicates with each other, and allows, for example, passages between the bottom member 550 and the respective driving portions 251 and 252, such as wires and pipelines. As can be appreciated, any suitable tidal or retaining member 597 can be disposed within the interior chamber 551 for holding or otherwise securing the moving side of any of the lines, lines, etc., through the internal passages IP of the gap members 560S, 561S. In any aspect, any suitable sealing member 566S can be disposed between the interfaces 566A, 566B and the respective frames 251F, 252F such that the internal atmosphere of the interior chambers 551, 300P can be sealed in an environment in which the transfer arm operates.

每一間隙構件560S、561S可包括軸部 560SP、561SP，其形成內部通路IP且穿過孔575A、575B至少部分伸入底構件550的內部室551內。一或數個驅動器510、520可於任何適合方式配置在底構件550內用於將線性運動(例如，於箭頭599的方向沿著Y軸)分給至少一間隙構件560S、561S和耦接至其的驅動部251、252。如可領會的，驅動部251、252於箭頭599方向的移動亦提供安裝至驅動部251、252之轉移臂210-213的移動。於一態樣中驅動器510、520可以是任何適合線性驅動器諸如具有馬達510M、520M、該馬達所驅動的滾珠螺桿510S、520S及沿著滾珠螺桿運送的滾珠螺帽之滾珠螺桿驅動器。滾珠螺帽可集成至或不然耦接至滾珠螺帽轉接器或耦合器510C、520C。耦合器510C、520C係固定地連接至各別間隙構件560S、561S且包括滾珠螺帽用於接合滾珠螺桿以使間隙構件560S、561S係耦接至各別驅動器510、520。於一態樣中耦合器510C、520C係耦接至例如，各別間隙構件560S、561S的一或數個導軌構件GM1、GM2、GM3、GM4同時於其它態樣中耦合器510C、520C可實質直接耦接至或與各別間隙構件560S、561S的軸部560SP、561SP集成。在此，各別驅動器510、520的驅動軸係實質沿著Y軸(例如，實質平行於間隙構件560S、561S的移動599的方向)而配置以使當滾珠螺桿旋轉時，耦合器510C、520C沿著滾珠螺桿移動於箭頭599的方向以移動各別間隙構件560S、561S於箭頭599的方向。雖然驅動器510、520係解說為線性滾珠 螺桿驅動器，於其它態樣中，該等驅動器可以是直接驅動線性馬達、線性壓電電動馬達、線性電感馬達、線性同步馬達、電刷或無刷線性馬達、線性步進馬達、線性伺服馬達、磁阻馬達或任何其它適合線性驅動器。於其它態樣中，旋轉馬達可設置用於透過任何適合傳動構件來驅動間隙構件560S、561S(及位在其上的臂)於箭頭599的方向。 Each gap member 560S, 561S may include a shaft portion 560SP, 561SP, which form an internal passage IP and at least partially extend through the holes 575A, 575B into the interior chamber 551 of the bottom member 550. One or more drivers 510, 520 can be disposed within the bottom member 550 in any suitable manner for imparting linear motion (eg, along the Y-axis along the Y-axis) to the at least one gap member 560S, 561S and to the The drive units 251 and 252 thereof. As can be appreciated, the movement of the drive portions 251, 252 in the direction of arrow 599 also provides for movement of the transfer arms 210-213 mounted to the drive portions 251, 252. In one aspect, the drivers 510, 520 can be any suitable ball drive for a linear actuator such as a ball screw 510S, 520S having the motor 510M, 520M, the motor being driven, and a ball nut transported along the ball screw. The ball nut can be integrated or otherwise coupled to the ball nut adapter or coupler 510C, 520C. Couplers 510C, 520C are fixedly coupled to respective gap members 560S, 561S and include ball nuts for engaging ball screws to couple gap members 560S, 561S to respective drivers 510, 520. In one aspect, the couplers 510C, 520C are coupled to, for example, one or more of the rail members GM1, GM2, GM3, GM4 of the respective gap members 560S, 561S. In other aspects, the couplers 510C, 520C may be substantially Directly coupled to or integrated with the shaft portions 560SP, 561SP of the respective gap members 560S, 561S. Here, the drive shafts of the respective drivers 510, 520 are disposed substantially along the Y-axis (eg, substantially parallel to the direction of movement 599 of the gap members 560S, 561S) such that when the ball screw rotates, the couplers 510C, 520C The ball screw is moved in the direction of arrow 599 to move the respective gap members 560S, 561S in the direction of arrow 599. Although the drivers 510, 520 are illustrated as linear balls Screw drives, in other aspects, the drives can be direct drive linear motors, linear piezoelectric electric motors, linear induction motors, linear synchronous motors, brush or brushless linear motors, linear stepper motors, linear servo motors, Reluctance motor or any other suitable linear drive. In other aspects, the rotary motor can be configured to drive the gap members 560S, 561S (and the arms positioned thereon) in the direction of arrow 599 through any suitable transmission member.

雖然驅動部201’係解說為圖5A-5E中具有二個線性驅動器510、520用於使轉移臂210-213沿著Y軸相對於彼此及/或底構件550移動於箭頭599的方向，於其它態樣中，驅動部201’可配置有一線性驅動器以使僅一驅動部251、252可相對於底構件550及/或其他驅動部251、252沿著Y軸移動。如可領會的，一或數個驅動部251、252的移動提供改變驅動部251、252的伸/縮R1、R2的軸之間的距離D或伸/縮R1、R2的各別軸和旋轉CAX的共同軸之間的距離D1、D2。伸/縮R1、R2的一或數個軸的位移可容許當轉移臂210-213摘選或放置工件至處理站130時，例如搬運模組125A、125B、125C、125D的小面之間的工件保持站位置變化之自動工件對中心及/或獨立工件配置調整。例如，參照圖1B，驅動部200可旋轉底構件550以使伸/縮R1、R2的軸面向處理站130T1、130T2。伸/縮R1、R2的一或數個軸可沿著Y軸移開於箭頭599的方向用於依據任何適合自動工件對中心程序或演算對準伸/縮的軸與工件保持站在一或數個處理 站130T1、130T2內。例如，一或數個感測器123A、123B可配置鄰接各別處理站130T1、130T2用於檢測臂210-213搬運的工件的一或數個特性。該一或數個感測器123A、123B可傳送任何適合信號至例如，任何適合控制器諸如控制器110用於決定工件S的中心。控制器110可控制轉移單元模組104’的一或數個驅動器以使伸/縮R1、R2的各別軸係配置致使工件S的中心與處理站130T1、130T2的工件保持站的預定位置對準。於一態樣中，伸/縮的二軸可位移用於例如轉移模組125A、125B、125C、125D的小面之間的工件保持站位置變化之自動工件對中心及/或獨立工件配置調整。於其它態樣中，線性馬達520可操作以移動驅動部251以使伸/縮R1的唯一軸係位移致使工件S的中心與處理站130T1內的工件保持站的預定位置對準。於另一態樣中，線性馬達510可操作以移動驅動部252以使僅伸/縮R2的軸係與處理站130T2內的工件保持站對準。自動工件對中心的適合實例可在以下文件中找到，例如，2012年9月14日提出案名為“用卡門過濾器的晶圓中心尋找”的美國專利申請案號13/617,333及2011年4月12日發出案名為“以傳送中工件對中心的處理設備”的美國專利號7,925,378、2010年12月28日發出案名為“用電荷耦合裝置的晶圓中心尋找”的美國專利號7,859,685、2012年9月18日發出案名為“用卡門過濾器的晶圓中心尋找”的美國專利號8,270,702、2010年9月7日發出案名為“晶圓中心尋找”的美國專利號7,792,350、 2011年2月22日發出案名為“晶圓中心尋找”的美國專利號7,894,657、2012年2月28日發出案名為“用電荷耦合裝置的晶圓中心尋找”的美國專利號8,125,652、及2012年8月28日發出案名為“用電荷耦合裝置的晶圓中心尋找”的美國專利號8,253,945。其全部內容併入文中作為參考。如可領會的，實質相似於上述的一或數個編碼器510E、520E可設置以檢測驅動馬達510、520的位置及/或臂210-213(及保持在其上的工件)沿著Y軸的位移，用於實現小面之間的工件保持站位置變化之自動工件對中心及/或獨立工件配置調整。 Although the drive portion 201' is illustrated as having two linear actuators 510, 520 in FIGS. 5A-5E for moving the transfer arms 210-213 along the Y axis relative to each other and/or the bottom member 550 in the direction of arrow 599, In other aspects, the drive portion 201' can be configured with a linear actuator such that only one of the drive portions 251, 252 can move along the Y-axis relative to the bottom member 550 and/or other drive portions 251, 252. As can be appreciated, the movement of one or more of the drive sections 251, 252 provides for varying the distance D between the axes of the extensions/contractions R1, R2 of the drive sections 251, 252 or the respective axes and rotations of the extensions/retractions R1, R2. The distance D1, D2 between the common axes of CAX. The displacement of one or more axes of the extension/retraction R1, R2 may permit when the transfer arms 210-213 are picked or placed to the processing station 130, such as between the facets of the handling modules 125A, 125B, 125C, 125D Automatic workpiece-to-center and/or independent workpiece configuration adjustments for workpiece retention station position changes. For example, referring to FIG. 1B, the drive portion 200 can rotate the bottom member 550 such that the axes of the extension/retractions R1, R2 face the processing stations 130T1, 130T2. One or more axes of the extension/retraction R1, R2 may be moved along the Y-axis in the direction of arrow 599 for holding the workpiece in accordance with any axis suitable for automatic workpiece-to-center procedure or calculation of the extension/contraction axis or Several processes Stations 130T1, 130T2. For example, one or more of the sensors 123A, 123B can be configured to abut one of the processing stations 130T1, 130T2 for detecting one or more characteristics of the workpiece being transported by the arms 210-213. The one or more sensors 123A, 123B can transmit any suitable signal to, for example, any suitable controller, such as controller 110, for determining the center of the workpiece S. The controller 110 can control one or more actuators of the transfer unit module 104' such that the respective shafting configurations of the extension/retraction R1, R2 cause the predetermined position of the center of the workpiece S and the workpiece holding station of the processing stations 130T1, 130T2 quasi. In one aspect, the extended/retracted two-axis displacement can be used for automatic workpiece-to-center and/or independent workpiece configuration adjustments such as workpiece holding station position changes between facets of transfer modules 125A, 125B, 125C, 125D. . In other aspects, the linear motor 520 is operable to move the drive portion 251 such that the unique shafting displacement of the extension/retraction R1 causes the center of the workpiece S to align with a predetermined position of the workpiece holding station within the processing station 130T1. In another aspect, the linear motor 510 is operable to move the drive portion 252 to align the shaft system that extends/retracts R2 only with the workpiece holding station within the processing station 130T2. A suitable example of an automated workpiece-to-center can be found in the following documents, for example, U.S. Patent Application Serial No. 13/617,333, filed on September 14, 2012, entitled "Fabric Center Search with Carmen Filters" U.S. Patent No. 7,925,378, entitled "Processing Equipment for Transferring Workpieces to the Center," issued on December 12, and US Patent No. 7,859,685, entitled "Fabric Center Search Using Charge Coupled Devices", issued on December 28, 2010. On September 18, 2012, U.S. Patent No. 8,270,702, entitled "Fabric Center Search with Carmen Filters", issued on September 7, 2010, issued the US Patent No. 7,792,350 entitled "Wafer Center Search". U.S. Patent No. 7,894,657, entitled "Wafer Center Search", issued on February 22, 2011, and U.S. Patent No. 8,125,652, entitled "Fabric Center Search Using Charge Coupler", issued on February 28, 2012, and U.S. Patent No. 8,253,945, entitled "Finding of Wafer Centers Using Charge Coupled Devices", was issued on August 28, 2012. The entire content is incorporated herein by reference. As can be appreciated, one or more encoders 510E, 520E substantially similar to those described above can be configured to detect the position of the drive motors 510, 520 and/or the arms 210-213 (and the workpiece held thereon) along the Y-axis. The displacement is used to achieve automatic workpiece-to-center and/or independent workpiece configuration adjustments for workpiece holding station position changes between facets.

現將參照圖6A及6B，轉移單元模組104”係依據所揭示實施例的態樣而解說。轉移單元模組104”可以是實質相似於上述的轉移單元模組104’。於此態樣中，旋轉驅動部600、601係以實質相似於上述關於驅動部251、252之方式耦接至伸縮構件560、561。一個或多個適合轉移臂605、606(諸如上述關於圖2F-2J的轉移臂或能夠由旋轉馬達所驅動之任何其它適合轉移臂)可以任何適合方式驅動地安裝至每一旋轉驅動部600、601。於此態樣中，每一旋轉驅動部600、601包括框架或外殼600F、601F、第一驅動馬達610及於任何適合方式安裝至框架600F、601F的第二驅動馬達620。馬達配置可以是同軸馬達配置如所示或於其它態樣中，馬達可並列配置。驅動馬達可以是任何適合馬達，諸如例如，壓電電動馬達、電感馬達、同步馬達、電刷或無刷馬達、線性步進馬 達、伺服馬達、磁阻馬達、簡諧驅動馬達等。第一馬達610可包括定子610S及轉子610R。第二馬達620可包括定子620S及轉子620R。於此態樣中，同軸驅動軸總成645係於諸如例如，實質無接觸(例如，諸如具有自軸承馬達)或具有任何適合軸承之任何適合方式至少部份可旋轉支承在框架600F、601F內。同軸驅動軸總成645包括外驅動軸640及內驅動軸650。轉子610R可於任何適合方式耦接至外驅動軸640以使當轉子610R旋轉時，驅動軸640與其旋轉。於其它態樣中，任何適量的驅動馬達可設於每一旋轉驅動部600、601中用於驅動任何適量的驅動軸。於一態樣中轉子610R、620R及驅動軸總成645可以是配置於有轉移臂605、606操作的環境內。諸如罐封之任何適合密封660可配置在定子610S、620S及它們各別的轉子610R、620R之間以使該等定子隔離或密封自有轉移臂605、606操作之環境且係配置在與驅動部200及底構件550的內部共用之氣氛環境內。於其它態樣中一或數個磁性流體密封可設在每一驅動軸640、650周圍用於自自有轉移臂605、606操作之環境而密封轉子210R、220R及定子210S、220S。旋轉驅動部的適合實例可在以下文件中找到，例如，2011年10月11日提出案名為“同軸驅動真空機器人”的美國專利申請案號13/270,844、2012年10月5日提出案名為“用磁性心軸軸承的機器人驅動”的美國專利申請案號13/646,282、1998年2月24日發出案名為“關節臂轉移裝置”的美國專利號5,720,590、 1999年5月4日發出案名為“關節臂轉移裝置”的美國專利號5,899,658、1998年9月29日發出案名為“關節臂轉移裝置”的美國專利號5,813,823、和2012年10月9日發出案名為“用磁性心軸軸承的機器人驅動”的美國專利號8,283,813，其全部內容併入文中作為參考。於其它態樣中，一或數個驅動部600、601(或文中所述251、252、251’、252’、850、851的其它驅動部的任一者)亦可包括Z軸驅動600Z、601Z，配置用以移動相對於其它驅動部600、601的臂附接至其丄的一或數個臂。 Referring now to Figures 6A and 6B, the transfer unit module 104" is illustrated in accordance with the aspects of the disclosed embodiment. The transfer unit module 104" can be substantially similar to the transfer unit module 104' described above. In this aspect, the rotary drive units 600, 601 are coupled to the telescopic members 560, 561 in a manner substantially similar to that described above with respect to the drive portions 251, 252. One or more suitable transfer arms 605, 606 (such as the transfer arms described above with respect to Figures 2F-2J or any other suitable transfer arm that can be driven by a rotary motor) can be drivingly mounted to each of the rotary drive portions 600 in any suitable manner, 601. In this aspect, each of the rotary drive units 600, 601 includes a frame or housing 600F, 601F, a first drive motor 610, and a second drive motor 620 that is mounted to the frames 600F, 601F in any suitable manner. The motor configuration can be a coaxial motor configuration as shown or in other aspects, the motors can be arranged side by side. The drive motor can be any suitable motor such as, for example, a piezoelectric electric motor, an inductive motor, a synchronous motor, a brush or a brushless motor, a linear stepper horse , servo motor, reluctance motor, simple harmonic drive motor, etc. The first motor 610 can include a stator 610S and a rotor 610R. The second motor 620 can include a stator 620S and a rotor 620R. In this aspect, the coaxial drive shaft assembly 645 is at least partially rotatably supported within the frame 600F, 601F in any suitable manner such as, for example, substantially non-contact (e.g., having a self-bearing motor) or having any suitable bearing. . The coaxial drive shaft assembly 645 includes an outer drive shaft 640 and an inner drive shaft 650. Rotor 610R can be coupled to outer drive shaft 640 in any suitable manner such that drive shaft 640 rotates as rotor 610R rotates. In other aspects, any suitable amount of drive motor can be provided in each of the rotary drives 600, 601 for driving any suitable number of drive shafts. In one aspect, the rotors 610R, 620R and the drive shaft assembly 645 can be disposed in an environment in which the transfer arms 605, 606 operate. Any suitable seal 660, such as a can seal, can be disposed between the stators 610S, 620S and their respective rotors 610R, 620R to isolate or seal the environment in which the transfer arms 605, 606 operate and are configured and driven The inside of the unit 200 and the bottom member 550 is shared in an atmosphere. In other aspects, one or more magnetic fluid seals may be provided around each of the drive shafts 640, 650 for sealing the rotors 210R, 220R and the stators 210S, 220S from the environment in which the transfer arms 605, 606 operate. A suitable example of a rotary drive can be found in the following documents, for example, U.S. Patent Application Serial No. 13/270,844, filed on October 11, 2011, entitled "Coaxially Driven Vacuum Robot", filed on October 5, 2012 U.S. Patent No. 3,720,590, entitled "Artic Arm Transfer Device", issued on February 24, 1998, to "Robot-driven with magnetic mandrel bearings", U.S. Patent No. 3,646,282, U.S. Patent No. 5,899,658, filed on May 4, 1999, entitled "Articular Arm Transfer Device", and U.S. Patent No. 5,813,823, filed on September 29, 1998, entitled "Artic Arm Transfer Device", and October 9, 2012 U.S. Patent No. 8,283,813, the disclosure of which is incorporated herein by reference. In other aspects, one or more of the driving units 600, 601 (or any of the other driving units of 251, 252, 251', 252', 850, 851 described herein) may also include a Z-axis driving 600Z, 601Z, configured to move one or more arms attached to the jaws of the other drive portions 600, 601.

現將參照圖7A-7C，轉移單元模組104’’’係依據所揭示實施例的態樣而解說。轉移單元模組104’’’可以是實質相似於上述的轉移單元模組104。於這態樣中，驅動部251’、252’可包括具有實質平行於末端執行器210E-213E的座位平面之滑輪的驅動系統，同時每一臂210-213的驅動馬達320、321係位在底構件201’內。參照圖7A將說明驅動部251’，然而，應瞭解到驅動部252’係實質相似於驅動部251’。驅動部251’包括可具有任何適合尺寸、形狀及/或組態的框架251F’。雖然框架251F’係解說為平板用於示範性目的，於其它態樣中框架251F’可包括任何適合外蓋用於容納驅動傳輸使得該等外蓋係配置用以實質防止驅動傳輸所產生的任何粒子進入有臂操作的環境。框架251F’可包括相似於上述關於各別底構件210B、211B可移動地安裝在其上的轉移單元模組104、104’之任何適合軌或導引構件。每一驅動馬達320、321可包括驅 動軸，其係耦接至各別驅動滑輪733A、733B用於驅動可以是實質相似於上述的各別皮帶或帶740、741。如可領會的，任何適合惰輪734A、734B、735A、735B可被提供且安裝至框架251F’用於引導鄰接各別底構件210B、211B的皮帶或帶740、741以使皮帶或帶可以上述方式固定地耦接或錨定至底構件用於驅動各別臂210、211。亦如可領會的，底構件201’可諸如以外蓋250C適合地密封以使馬達係位於與驅動部200共同的氣氛環境。雖然二個驅動部係顯示安裝至圖7A中的底構件201’，於其它態樣中約二個驅動部可安裝至底構件201’。例如，圖7C解說具有安裝至底部201’的二個臂之單驅動部。如可領會的，圖7C所示的單驅動部可以是實質相似於上述的三軸驅動。於一態樣中，三個軸驅動的一驅動軸可耦接至用於驅動臂210的伸/縮之滑輪，三個軸驅動的一軸可耦接至用於旋轉臂210、211之框架251F’作為一單元，及三個軸驅動的一軸可耦接至用於驅動臂211的伸/縮之滑輪。 Referring now to Figures 7A-7C, the transfer unit module 104''' is illustrated in accordance with the aspects of the disclosed embodiments. The transfer unit module 104''' can be substantially similar to the transfer unit module 104 described above. In this aspect, the drive portions 251', 252' can include a drive system having pulleys substantially parallel to the seating plane of the end effectors 210E-213E, while the drive motors 320, 321 of each of the arms 210-213 are tied Inside the bottom member 201'. The driving portion 251' will be explained with reference to Fig. 7A, however, it should be understood that the driving portion 252' is substantially similar to the driving portion 251'. Drive portion 251' includes a frame 251F' that can have any suitable size, shape, and/or configuration. While the frame 251F' is illustrated as a flat panel for exemplary purposes, in other aspects the frame 251F' may include any suitable cover for accommodating drive transmissions such that the cover structures are configured to substantially prevent any of the drive transmissions from being generated. The particles enter an environment with arm manipulation. The frame 251F' can include any suitable rail or guide member similar to that described above with respect to the transfer unit modules 104, 104' on which the respective bottom members 210B, 211B are movably mounted. Each drive motor 320, 321 can include a drive The moving shaft, coupled to the respective drive pulleys 733A, 733B, for driving the respective belts or belts 740, 741 that may be substantially similar to the above. As can be appreciated, any suitable idler 734A, 734B, 735A, 735B can be provided and mounted to the frame 251F' for guiding the belt or straps 740, 741 adjacent the respective bottom members 210B, 211B such that the belt or belt can be The manner is fixedly coupled or anchored to the bottom member for driving the respective arms 210, 211. As can also be appreciated, the bottom member 201' can be suitably sealed, such as the outer cover 250C, to position the motor in an atmosphere common to the drive unit 200. Although the two drive portions are shown mounted to the bottom member 201' in Fig. 7A, in other aspects about two drive portions can be mounted to the bottom member 201'. For example, Figure 7C illustrates a single drive portion having two arms mounted to the bottom portion 201'. As can be appreciated, the single drive portion illustrated in Figure 7C can be substantially similar to the three-axis drive described above. In one aspect, a drive shaft of the three shaft drives can be coupled to the extension/retraction pulley for driving the arm 210, and one shaft of the three shaft drives can be coupled to the frame 251F for the rotary arms 210, 211. 'As a unit, and one shaft driven by three shafts can be coupled to the extension/retraction pulley for driving the arm 211.

現參照圖8A-9D，轉移單元模組104’’’係依據所揭示實施例的態樣而解說。轉移單元模組104’’’可以是實質相似於上述的轉移單元模組104。於此態樣中，驅動部800、801係配置有單階線性滑動臂810-813。於這態樣中，每一驅動部800、801包括具有密封馬達部860及傳動部853的框架851、852。驅動部800、801將有關驅動部801予以說明但應瞭解到，驅動部800係實質相似且可以是方向相反如圖8A所示。密封馬達部860可包括於固 定安裝至框架851且配置用以容納馬達320、321之外殼或外蓋851C1。外殼851C1可以任何適合密封構件860S而密封至框架以使馬達320、321係配置在共同於驅動部200內的氣氛環境之氣氛環境內。於實質相似於上述的方式中，外殼851C1可包括配置於任何適合方式安裝外殼851C1至密封支承構件560之孔或開口851M，諸如上述。如可領會的，外殼851C1可以任何適合材料構成且配置用以支承(例如，當耦接至密封支承構件560時)、框架851、驅動組件、臂812、813及臂812、813所搬運的任何工件。馬達320、321可於任何適合方式安裝至框架251以使例如，各別馬達320、321的磁性流體密封320S密封驅動軸370延伸穿過的框架851中的各別開口973、974用於保持密封馬達部860內的密封氣氛。 Referring now to Figures 8A-9D, the transfer unit module 104''' is illustrated in accordance with the aspects of the disclosed embodiments. The transfer unit module 104''' can be substantially similar to the transfer unit module 104 described above. In this aspect, the drive units 800 and 801 are provided with single-stage linear slide arms 810-813. In this aspect, each of the driving portions 800, 801 includes frames 851, 852 having a sealed motor portion 860 and a transmission portion 853. The driving portions 800, 801 will be described with respect to the driving portion 801. It should be understood that the driving portions 800 are substantially similar and may be opposite in direction as shown in Fig. 8A. The sealed motor portion 860 can be included in the solid Mounted to the frame 851 and configured to receive the outer casing or outer cover 851C1 of the motors 320,321. The outer casing 851C1 may be sealed to the frame in any suitable sealing member 860S such that the motors 320, 321 are disposed within an atmosphere environment common to the atmosphere within the drive portion 200. In a manner substantially similar to that described above, the outer casing 851C1 can include a hole or opening 851M that is configured to mount the outer casing 851C1 to the seal support member 560 in any suitable manner, such as described above. As can be appreciated, the outer casing 851C1 can be constructed of any suitable material and configured to support (eg, when coupled to the seal support member 560), the frame 851, the drive assembly, the arms 812, 813, and any of the arms 812, 813 carried Workpiece. The motors 320, 321 can be mounted to the frame 251 in any suitable manner such that, for example, the magnetic fluid seals 320S of the respective motors 320, 321 seal the respective openings 973, 974 in the frame 851 through which the drive shaft 370 extends for maintaining a seal The sealing atmosphere in the motor portion 860.

一或數個線性軌或導引構件930、931可於任何適合方式安裝至傳動部853內的框架851以界定至少一臂812、813的獨立驅動軸之自由度。於這態樣中，有二個導軌930、931沿著X軸或臂812、813的伸/縮R的軸而配置，然而，於其它態樣中，任何適量的軌可設置用於導引任何適量的臂。托架或臂支承940、941可安裝至各別軌以便由軌支承且可沿著X軸(例如，沿著伸/縮R的軸)移動。於這態樣中，托架940係可移動地安裝至導軌930以及托架941係可移動地安裝至導軌931。每一托架可包括各別臂812、813固定地附接之臂安裝部940M、941M。托架940、941可於任何適合方式配置以使一托 架940、941係容許透過托架940、941的另一者沿著伸/縮R的軸而通過。托架940可耦接至馬達320及托架941可透過任何適合驅動傳輸耦接至馬達321(或反之亦然)。於一態樣中，驅動滑輪921可耦接至馬達320的軸370以使當軸370旋轉時該驅動滑輪921與其旋轉。惰輪910A、910B可實質配置在導軌930、931的相對端且配置以使一或數個皮帶或帶可至少部分地繞著惰輪910A、910B周圍。亦參照圖9E及9F，一或數個皮帶或帶940B1、940B2(例如，實質相似於上述)可將驅動滑輪920、921耦接至各別托架940、941。例如，參照驅動滑輪921及托架940，第一帶/皮帶940B1可在帶/皮帶940B1的一端BE1固定地耦接至滑輪921。帶/皮帶940B1可至少部分繞著惰輪910A周圍且延伸至托架940使得帶/皮帶940B1的另一相對端BE2係固定耦接至托架940。第二帶/皮帶940B2可在帶/皮帶940B2的一端BE3固定地耦接至滑輪921。帶/皮帶940B2可至少部分繞著惰輪910B周圍且延伸至托架940(例如，自與第一帶/皮帶940B1相對的方向)以使第一及第二帶/皮帶940B1、940B2的一者拉上托架而另一帶/皮帶940B1、940B2推動托架)使得帶/皮帶940B2的另一相對端BE4係固定耦接至托架940。相同的是，至於托架941，第一帶/皮帶941B1可在帶/皮帶941B1的一端固定地耦接至滑輪920。帶/皮帶941B1可至少部分繞著惰輪910A且延伸至托架941使得帶/皮帶941B1的另一相對端係固定耦接至托架941。第 二帶/皮帶941B2可在帶/皮帶941B2的一端固定地耦接至滑輪920。帶/皮帶941B2可至少部分繞著惰輪910B周圍且延伸至托架941(例如，自與第一帶/皮帶941B1相對的方向)以使第一及第二帶/皮帶941B1、941B2的一者拉上托架而另一帶/皮帶941B1、941B2推動托架)使得帶/皮帶941B2的另一相對端係固定耦接至托架941。 One or more linear rails or guide members 930, 931 can be mounted to the frame 851 within the transmission portion 853 in any suitable manner to define the degrees of freedom of the independent drive shafts of the at least one arm 812, 813. In this aspect, there are two guide rails 930, 931 disposed along the X-axis or the axis of the extension/retraction R of the arms 812, 813, however, in other aspects, any suitable amount of rails may be provided for guiding Any amount of arms. Bracket or arm supports 940, 941 can be mounted to the respective rails for movement by the rails and along the X-axis (eg, along the axis of extension/retraction R). In this aspect, the bracket 940 is movably mounted to the rail 930 and the bracket 941 is movably mounted to the rail 931. Each bracket may include arm mounting portions 940M, 941M to which the respective arms 812, 813 are fixedly attached. Brackets 940, 941 can be configured in any suitable manner to enable a tray The brackets 940 and 941 allow the other of the through brackets 940 and 941 to pass along the axis of the extension/retraction R. Bracket 940 can be coupled to motor 320 and bracket 941 can be coupled to motor 321 (or vice versa) via any suitable drive transmission. In one aspect, the drive pulley 921 can be coupled to the shaft 370 of the motor 320 such that the drive pulley 921 rotates as the shaft 370 rotates. The idler pulleys 910A, 910B can be disposed substantially at opposite ends of the rails 930, 931 and configured such that one or more belts or belts can at least partially surround the idlers 910A, 910B. Referring also to Figures 9E and 9F, one or more belts or belts 940B1, 940B2 (e.g., substantially similar to the above) can couple drive pulleys 920, 921 to respective brackets 940, 941. For example, with reference to the drive pulley 921 and the bracket 940, the first belt/belt 940B1 can be fixedly coupled to the pulley 921 at one end BE1 of the belt/belt 940B1. The belt/belt 940B1 can at least partially surround the idler pulley 910A and extend to the bracket 940 such that the other opposite end BE2 of the belt/belt 940B1 is fixedly coupled to the bracket 940. The second belt/belt 940B2 can be fixedly coupled to the pulley 921 at one end BE3 of the belt/belt 940B2. The belt/belt 940B2 can at least partially surround the idler 910B and extend to the bracket 940 (eg, from a direction opposite the first belt/belt 940B1) such that one of the first and second belts/belts 940B1, 940B2 Pulling the bracket while the other belt/belt 940B1, 940B2 pushes the bracket) causes the other opposite end BE4 of the belt/belt 940B2 to be fixedly coupled to the bracket 940. Similarly, as for the bracket 941, the first belt/belt 941B1 can be fixedly coupled to the pulley 920 at one end of the belt/belt 941B1. The belt/belt 941B1 can at least partially surround the idler pulley 910A and extend to the bracket 941 such that the other opposite end of the belt/belt 941B1 is fixedly coupled to the bracket 941. First The two belt/belt 941B2 can be fixedly coupled to the pulley 920 at one end of the belt/belt 941B2. The belt/belt 941B2 can at least partially surround the idler 910B and extend to the bracket 941 (eg, from a direction opposite the first belt/belt 941B1) such that one of the first and second belts/belts 941B1, 941B2 Pulling the bracket while the other belt/belt 941B1, 941B2 pushes the bracket) causes the other opposite end of the belt/belt 941B2 to be fixedly coupled to the bracket 941.

於一態樣中傳動部853可暴露於有臂812、813操作的氣氛但可包括一或數個外蓋以實質防止皮帶/帶、滑輪及/或托架/軌所產生的任何粒子進入該環境且接觸臂812、813所保持的工件。於一態樣中外蓋851C3可放在傳動部853的至少一部分上，諸如在驅動滑輪920、921的至少一部分上。外蓋851C3可包括配置鄰接導軌930、931之密封部998。外蓋851C2亦可放在導軌930、931之上且配置以使托架940、941橫跨它們各別的導軌930、931。外蓋851C2可包括密封部997以使密封部997及998朝向彼此延伸。於一態樣中空間或開口901可設在密封部997、998之間以使托架940、941的臂安裝部940M、941M可延伸穿過空間或開口901用於連接至各別臂812、813且以使各別臂812、813係配置在彼此上方。密封部997、998可形成氣封以實質含有任何粒子在外蓋851C2、851C3內同時容許臂812、813的伸/縮。 In one aspect, the transmission portion 853 can be exposed to the atmosphere in which the arms 812, 813 operate but can include one or more outer covers to substantially prevent any particles generated by the belt/belt, pulley, and/or bracket/rail from entering the The environment is in contact with the workpiece held by the arms 812, 813. In one aspect, the outer cover 851C3 can be placed over at least a portion of the transmission portion 853, such as on at least a portion of the drive pulleys 920, 921. The outer cover 851C3 may include a sealing portion 998 that is disposed adjacent to the guide rails 930, 931. The outer cover 851C2 can also be placed over the rails 930, 931 and configured such that the brackets 940, 941 span their respective rails 930, 931. The outer cover 851C2 may include a sealing portion 997 to extend the sealing portions 997 and 998 toward each other. In one aspect, a space or opening 901 can be provided between the seals 997, 998 such that the arm mounting portions 940M, 941M of the brackets 940, 941 can extend through the space or opening 901 for connection to the respective arms 812, 813 is also such that the respective arms 812 and 813 are disposed above each other. The seals 997, 998 may form a gas seal to substantially contain any particles within the outer cover 851C2, 851C3 while permitting extension/contraction of the arms 812, 813.

於其它態樣中，該一或數個托架可由諸如上述的任何適合線性馬達實質直接驅動。例如，於一態樣中傳動部853可自有臂812、813操作的氣氛使得共同氣氛 環境係以實質相似於以上關於密封馬達部860所述之方式共用在傳動部853及驅動部200之間。導軌930、931可配置在傳動部外部且包括托架940、941和包括密封部997、998的外蓋。每一托架可具有附接至其上的磁性從動件，其係以實質相似於以下文件中所述的方式經由磁性從動件及磁性主動件之間的磁性耦合透過例如傳動部853的壁或外蓋由磁性主動件磁性地驅動，例如，美國專利號7,901,539、8,293,066、8,419,341及美國專利申請案號13/286,186，其全部內容併入文中作為參考。於其它態樣中，每一托架940、941可包括磁性滾筒，其係於實質相似於上述的方式由配置在傳動部853的密封氣氛環境內之一線性陣列的馬達線圈所驅動，例如，美國專利號7,575,406、7,959,395及美國專利申請案號13/159,034，其全部內容併入文中作為參考。 In other aspects, the one or more brackets can be substantially directly driven by any suitable linear motor such as described above. For example, in one aspect, the transmission portion 853 can operate the atmosphere of the arms 812, 813 to make the common atmosphere The environment is shared between the transmission portion 853 and the drive portion 200 in a manner substantially similar to that described above with respect to the sealed motor portion 860. The rails 930, 931 can be disposed outside of the transmission and include brackets 940, 941 and an outer cover including seals 997, 998. Each bracket may have a magnetic follower attached thereto that is transmissive through, for example, the transmission portion 853 via magnetic coupling between the magnetic follower and the magnetic active member in a manner substantially similar to that described in the following document The wall or the outer cover is magnetically driven by a magnetic active member, for example, U.S. Patent Nos. 7,901,539, 8,293,066, 8,419, 341, and U.S. Patent Application Serial No. 13/286,186, the entire disclosure of which is incorporated herein by reference. In other aspects, each of the brackets 940, 941 can include a magnetic roller that is driven by a linear array of motor coils disposed within a sealed atmosphere environment of the transmission portion 853 in a manner substantially similar to that described above, for example, U.S. Patent Nos. 7,575,406, 7, 959, 395, and U.S. Patent Application Serial No. 13/159,034, the entire disclosures of

於一態樣中，每一臂810-813包括末端執行器810E-813E，其係透過實質剛性臂部或末端執行器伸展構件810EM-813EM耦接至各別托架940、941。例如，實質剛性臂部810EM-813EM可以諸如透過機械扣件的任何適合方式固定地耦接至各別托架940、941的各別臂安裝部940M、941M。末端執行器810E-813E於諸如透過機械扣件的任何適合方式固定地耦接至各別實質剛性臂部810EM-813EM。於其它態樣中，實質剛性臂部810EM-813EM及各別末端執行器810E-813E可具有單一件式結構。於其它態樣中，實質剛性臂部810EM-813EM、各別 末端執行器810E-813E及各別托架940、941可具有單一件式結構。 In one aspect, each arm 810-813 includes an end effector 810E-813E that is coupled to a respective bracket 940, 941 through a substantially rigid arm or end effector extension member 810EM-813EM. For example, the substantially rigid arms 810EM-813EM can be fixedly coupled to the respective arm mounting portions 940M, 941M of the respective brackets 940, 941, such as by any suitable means of mechanical fasteners. End effectors 810E-813E are fixedly coupled to respective substantially rigid arms 810EM-813EM in any suitable manner, such as by mechanical fasteners. In other aspects, the substantially rigid arms 810EM-813EM and the respective end effectors 810E-813E can have a single piece construction. In other aspects, the substantially rigid arms 810EM-813EM, each The end effectors 810E-813E and the respective brackets 940, 941 can have a single piece construction.

如可自上述所見，各末端執行器810E-813E係獨立地沿著伸/縮R1、R2的各別軸而伸展/收縮。亦可如自以上所見，各驅動部800、801可獨立於驅動部800、801的另一者沿著Y軸獨立地移動以改變伸/縮R1、R2的各別軸之間的距離D或改變伸展/收縮的一或數個軸相對於旋轉CAX的共同軸的距離D1、D2(見圖5A)，以實質相似於上述的方式用於例如轉移模組125A、125B、125C、125D的小面之間的工件保持站位置變化之自動工件對中心及/或獨立工件配置調整。參照圖10A及10B，於一態樣中驅動部800、801的一者可相對於另一驅動部800、801沿著Y軸及/或共同軸CAX移動而另一驅動部800、801具有相對於共同軸CAX的固定距離D1、D2且不可沿著Y軸移動。例如，驅動部800可透過密封支承構件560移動地安裝至底構件550以便透過配置在底構件550內的驅動器510沿著Y軸移動。驅動部801可透過固定支承構件1000固定地安裝至底構件550其中固定支承構件係配置以容許至少密封馬達部860及驅動部200之間的氣氛相通。 As can be seen from the above, each of the end effectors 810E-813E independently stretches/contracts along the respective axes of the extension/retraction R1, R2. Alternatively, as can be seen from the above, each of the driving portions 800, 801 can be independently moved along the Y axis independently of the other of the driving portions 800, 801 to change the distance D between the respective axes of the extension/retraction R1, R2 or Changing the distance D1, D2 of the one or more axes of the extension/contraction relative to the common axis of the rotation CAX (see Fig. 5A) is used in a manner substantially similar to that described above for, for example, the transfer modules 125A, 125B, 125C, 125D Automatic workpiece-to-center and/or independent workpiece configuration adjustments for workpiece position changes between faces. 10A and 10B, in one aspect, one of the driving portions 800, 801 can move relative to the other driving portion 800, 801 along the Y-axis and/or the common axis CAX while the other driving portion 800, 801 has a relative The fixed distances D1, D2 of the common axis CAX are not movable along the Y axis. For example, the driving portion 800 may be movably mounted to the bottom member 550 through the seal support member 560 to move along the Y axis through the driver 510 disposed within the bottom member 550. The driving portion 801 is fixedly attached to the bottom member 550 through the fixed supporting member 1000, wherein the fixed supporting member is configured to allow at least the atmosphere between the sealing motor portion 860 and the driving portion 200 to communicate.

現參照圖11A及11B，驅動部800、801’的一或數個可相對於驅動部800、801’的另一者樞轉用於改變伸/縮R1、R2的軸之間的角β和用於容許自動工件對中心及/或獨立工件配置調整針對例如，轉移模組125A、 125B、125C、125D的小面之間的工件保持站位置變化。例如，可實質相似於上述的一或數個轉移單元模組之轉移單元模組1104可包括實質相似於底構件550的底構件1150。於此態樣中底構件1150可配置以諸如例如，透過固定支承構件1000之任何適合方式用於耦接至驅動部800。底構件1150亦可配置用於與驅動部801’(其可實質相似於上述的驅動部801)耦接。在此，底構件可包括任何適合驅動器1100(其可實質相似於上的驅動器280、320、321、610、620的一或數者)。驅動軸1100D可延伸穿過底構件1150的壁用於耦接外殼851C1’(其可實質相似於上述的外殼851C1)以使驅動部801及臂812、813可繞著共同軸X1樞轉於箭頭T2的方向用於改變角β。如可領會的，驅動部800所保持的一或數個工件可透過例如，旋轉二個驅動部作為繞著軸CAX的單元進行對中心而驅動部801’所保持的一或數個工件可透過繞著軸X1旋轉驅動部800’而進行對中心。 Referring now to Figures 11A and 11B, one or more of the drive portions 800, 801' can be pivoted relative to the other of the drive portions 800, 801' for changing the angle β between the axes of the extension/retraction R1, R2 and Used to allow automatic workpiece centering and/or independent workpiece configuration adjustments for, for example, transfer module 125A, The position of the workpiece holding station between the facets of 125B, 125C, 125D changes. For example, the transfer unit module 1104, which may be substantially similar to the one or more transfer unit modules described above, may include a bottom member 1150 that is substantially similar to the bottom member 550. In this aspect, the midsole member 1150 can be configured to be coupled to the drive portion 800, such as, for example, by any suitable means of securing the support member 1000. The bottom member 1150 can also be configured to couple with the drive portion 801' (which can be substantially similar to the drive portion 801 described above). Here, the bottom member can include any suitable one or more of the drivers 1100 (which can be substantially similar to the upper drivers 280, 320, 321, 610, 620). The drive shaft 1100D can extend through the wall of the bottom member 1150 for coupling the housing 851C1' (which can be substantially similar to the housing 851C1 described above) to pivot the drive portion 801 and the arms 812, 813 about the common axis X1 to the arrow The direction of T2 is used to change the angle β. As can be appreciated, one or more workpieces held by the drive unit 800 can be permeable to one or more workpieces held by the drive unit 801' by, for example, rotating the two drive portions as a unit about the axis CAX. The drive unit 800' is rotated about the axis X1 to perform centering.

於其它態樣中，如可於圖11C中所見，驅動部800’(其可實質相似於驅動部801’)及驅動部801’二者可樞轉地安裝至底構件1150’(其可實質相似於底構件1150)使得各驅動部係配置成透過各別驅動器1100繞著各別軸X1、X2樞轉於各方向T1、T2以改變角β。在此，用於例如，轉移模組125A、125B、125C、125D的小面之間的工件保持站位置變化之自動工件對中心及/或獨立工件配置調整可透過旋轉各驅動部800’、801’達任何預 定量予以執行。於一態樣中，二個驅動部可旋轉作為繞著軸CAX的單元而驅動部800’、801’所保持的一或數個工件可繞著各別軸X1、X2藉由旋轉一或多個驅動部800’、801’而被對中心。 In other aspects, as can be seen in Figure 11C, the drive portion 800' (which can be substantially similar to the drive portion 801') and the drive portion 801' can be pivotally mounted to the base member 1150' (which can be substantially Similar to the bottom member 1150), each drive portion is configured to pivot through the respective drive 1100 about each of the axes X1, X2 in each of the directions T1, T2 to change the angle β. Here, the automatic workpiece-to-center and/or independent workpiece configuration adjustment for changing the position of the workpiece holding station between the facets of the transfer modules 125A, 125B, 125C, 125D, for example, can be rotated through the respective driving portions 800', 801. 'Day any pre Quantitatively enforced. In one aspect, the two drive portions are rotatable as a unit about the axis CAX and one or more workpieces held by the drive portions 800', 801' can be rotated about the respective axes X1, X2 by one or more The drive units 800', 801' are centered.

於其它態樣中，一或數個臂810-813沿著Y軸的移動亦可連同一或數個驅動部800、801的旋轉一起提供。例如，參照圖11D，底構件係配置成透過密封支承構件560與外殼851C1耦接以便可沿著Y軸移動。於其它態樣中外殼851C1可透過固定支承構件1000耦接至底構件1150。樞轉外殼1130(其可實質相似於外殼851C1’)可以實質相似於上述關於圖11A-11C之方式而樞轉地耦接至底構件1150。外殼1130可具有密封支承構件561耦接至其上的孔且可以實質相似於以上關於底構件550所述之方式包括線性驅動馬達1110。驅動部801可以實質相似於上述的方式透過外殼851C1耦接至密封支承構件861。於其它態樣中驅動部800、801二者可於任何適合方式安裝至樞轉外殼1130。 In other aspects, movement of one or more arms 810-813 along the Y-axis may also be provided with rotation of one or more of the drive portions 800, 801. For example, referring to FIG. 11D, the bottom member is configured to be coupled to the outer casing 851C1 through the seal support member 560 so as to be movable along the Y-axis. In other aspects, the outer casing 851C1 can be coupled to the bottom member 1150 through the fixed support member 1000. Pivot housing 1130 (which may be substantially similar to housing 851C1') may be pivotally coupled to bottom member 1150 in a manner substantially similar to that described above with respect to Figures 11A-11C. The outer casing 1130 can have a bore to which the seal support member 561 is coupled and can include a linear drive motor 1110 substantially similar to that described above with respect to the bottom member 550. The driving portion 801 can be coupled to the seal support member 861 through the outer casing 851C1 substantially in a manner similar to that described above. In other aspects, both of the drive portions 800, 801 can be mounted to the pivoting housing 1130 in any suitable manner.

現參照圖12A及12B，於一態樣中驅動部800、801的一或數個密封驅動部外殼1250、1251可配置成繞著共同軸CAX旋轉地耦接至驅動部200以使一或數個驅動部800、801可繞著共同軸CAX樞轉用於改變角β且容許例如轉移模組125A、125B、125C、125D的小面之間的工件保持站位置變化之自動工件對中心及/或獨立工件配置調整。例如，外殼1251(其可能實質相似於上述 的外殼851C1)可實質直接耦接至驅動部200的驅動軸280S以使當驅動軸280S旋轉時外殼1251與驅動軸280S一起旋轉。外殼1250(其可實質相似於上述的外殼851C1)可繞著共同軸CAX旋轉地安裝至外殼1251。例如，任何適合驅動器1200(諸如上述的280、320、321、610、620)可配置在外殼1251內。外殼1251可包括驅動軸1200S延伸穿過其中的孔而外殼1250可包括驅動軸1200S耦接至其上的孔。如可領會的，任何適合密封(諸如上述)可配置在驅動軸周圍在驅動器1200及外殼1251之間和在驅動軸1200S及外殼1250之間用於保持外殼1250、1251及驅動部200內的密封氣氛環境。於一態樣中任何適合軸承1200B亦可設於外殼1250、1251之間而於其它態樣中可不包括軸承使得外殼1250係透過驅動軸1200S和驅動器1200及外殼1251之間的耦合予以支承。在此，驅動器280及驅動器1200可獨立地操作以使驅動部可於任何適合方式繞著共同軸CAX彼此相對樞轉用於改變角β。於其它態樣中一或數個驅動部800、801可沿著Y軸移動。例如，參照圖12C，樞轉外殼1220(其可實質相似於樞轉外殼1130)可設置為使得驅動部800、801的外殼851C1係以實質相似於上述關於圖11D所述之方式透過密封支承構件560耦接至樞轉外殼1220。在此，樞轉外殼1220及/或外殼1250、1251的旋轉容許角β的調整而一或數個驅動部800、801沿著Y軸的移動容許伸/縮R1、R2的軸和將調整的共同軸CAX之間的距離 D1、D2用於自動工件對中心及/或獨立工件配置調整針對例如，轉移模組125A、125B、125C、125D的小面之間的工件保持站位置變化。 12A and 12B, in one aspect, one or more of the sealed drive housings 1250, 1251 of the drive portions 800, 801 can be configured to be rotationally coupled to the drive portion 200 about a common axis CAX to enable one or several The drive units 800, 801 can be pivoted about the common axis CAX for changing the angle β and allowing the automatic workpiece centering of the workpiece holding station position between the facets of the transfer modules 125A, 125B, 125C, 125D, for example, and/or Or independent workpiece configuration adjustments. For example, the outer casing 1251 (which may be substantially similar to the above The outer casing 851C1) may be substantially directly coupled to the drive shaft 280S of the drive portion 200 such that the outer casing 1251 rotates together with the drive shaft 280S when the drive shaft 280S rotates. A housing 1250 (which may be substantially similar to the housing 851C1 described above) is rotatably mounted to the housing 1251 about a common axis CAX. For example, any suitable driver 1200 (such as 280, 320, 321, 610, 620 described above) can be disposed within the housing 1251. The outer casing 1251 can include an aperture through which the drive shaft 1200S extends and the outer casing 1250 can include an aperture to which the drive shaft 1200S is coupled. As can be appreciated, any suitable seal (such as described above) can be disposed about the drive shaft between the driver 1200 and the housing 1251 and between the drive shaft 1200S and the housing 1250 for retaining the seal within the housing 1250, 1251 and the drive portion 200. Atmosphere. In any aspect, any suitable bearing 1200B may be disposed between the outer casings 1250, 1251 and in other aspects may include bearings such that the outer casing 1250 is supported by the coupling between the drive shaft 1200S and the driver 1200 and the outer casing 1251. Here, the driver 280 and the driver 1200 are independently operable to allow the drive portions to pivot relative to each other about the common axis CAX for changing the angle β in any suitable manner. In other aspects, one or more of the drive portions 800, 801 are movable along the Y axis. For example, referring to Figure 12C, the pivoting housing 1220 (which can be substantially similar to the pivoting housing 1130) can be configured such that the housing 851C1 of the drive portions 800, 801 is transparently transmitted through the sealing support member in a manner substantially similar to that described above with respect to Figure 11D. The 560 is coupled to the pivoting housing 1220. Here, the adjustment of the rotation allowable angle β of the pivoting housing 1220 and/or the housing 1250, 1251 and the movement of the one or more driving portions 800, 801 along the Y axis allow the axis of the extension/retraction R1, R2 and the adjustment Distance between common axes CAX D1, D2 are used for automatic workpiece centering and/or independent workpiece configuration adjustments for, for example, workpiece holding station position changes between facets of transfer modules 125A, 125B, 125C, 125D.

於一態樣中，參照圖11A-12C，任何適量的控制器110A、110B可配置在文中所述的轉移單元模組內。於一態樣中，可能有用於轉移單元模組內的一或數個驅動器之控制器。這些控制器110A、110B可連接至控制器110或任何其它適合控制器。如上述，於一態樣中，控制器110A、110B可以是群組控制結構的一部分，而於其它態樣中，控制器可具有任何適合結構。 In one aspect, referring to Figures 11A-12C, any suitable amount of controllers 110A, 110B can be disposed within the transfer unit modules described herein. In one aspect, there may be a controller for transferring one or more drivers within the unit module. These controllers 110A, 110B can be connected to the controller 110 or any other suitable controller. As noted above, in one aspect, controllers 110A, 110B can be part of a group control structure, while in other aspects, the controller can have any suitable structure.

依據所揭示實施例的一或數個態樣，一種轉移設備包括：框架；多個臂，連接至該框架，每一臂具有末端執行器及獨立驅動軸用於該多個臂的各別臂相對於其它者的伸展和收縮；線性軌，界定用於至少一臂的伸展和收縮之該獨立驅動軸的自由度；及共同驅動軸，每一臂所共用且配置用以使該多個臂繞著共同樞轉軸而樞轉；其中具有另一驅動軸之該多個臂的至少一者界定相對於該多個臂的其它者之獨立自由度。 In accordance with one or more aspects of the disclosed embodiments, a transfer apparatus includes: a frame; a plurality of arms coupled to the frame, each arm having an end effector and an independent drive shaft for each arm of the plurality of arms a stretch and contraction relative to the others; a linear track defining a degree of freedom of the independent drive shaft for extending and contracting at least one arm; and a common drive shaft shared by each arm and configured to cause the plurality of arms Pivoting about a common pivot axis; at least one of the plurality of arms having another drive axis defines an independent degree of freedom relative to the other of the plurality of arms.

依據所揭示實施例的一或數個態樣，界定該獨立自由度的其它驅動軸係相對於用於伸展和收縮的該軸具有夾角。 In accordance with one or more aspects of the disclosed embodiments, other drive shafts that define the independent degrees of freedom have an angle with respect to the shaft for extension and contraction.

依據所揭示實施例的一或數個態樣，界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係與該末端執行器的配座平面同平面。 In accordance with one or more aspects of the disclosed embodiments, the other drive shaft configurations defining the independent degrees of freedom are such that the independent degrees of freedom are coplanar with the seating plane of the end effector.

依據所揭示實施例的一或數個態樣，界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係相對於其它獨立自由度具有夾角。 In accordance with one or more aspects of the disclosed embodiments, other drive shaft configurations that define the independent degrees of freedom are such that the independent degrees of freedom have an angle with respect to other independent degrees of freedom.

依據所揭示實施例的一或數個態樣，界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係相對於其它獨立自由度平行。 In accordance with one or more aspects of the disclosed embodiments, other drive shaft configurations that define the independent degrees of freedom are such that the independent degrees of freedom are parallel with respect to other independent degrees of freedom.

依據所揭示實施例的一或數個態樣，轉移設備進一步包括第二共同驅動軸，配置用以繞著共同軸共調移動該多個臂。 In accordance with one or more aspects of the disclosed embodiments, the transfer apparatus further includes a second common drive shaft configured to co-adjust the plurality of arms about a common axis.

依據所揭示實施例的一或數個態樣，其它驅動軸執行自動工件對中心。 In accordance with one or more aspects of the disclosed embodiments, the other drive shafts perform automatic workpiece centering.

依據所揭示實施例的一或數個態樣，其它驅動軸執行用於工件保持站位置變化的獨立工件配置調整。 In accordance with one or more aspects of the disclosed embodiments, the other drive shafts perform independent workpiece configuration adjustments for workpiece retention station position changes.

依據所揭示實施例的一或數個態樣，該多個臂係伸縮臂。 The plurality of arm telescoping arms are in accordance with one or more aspects of the disclosed embodiments.

依據所揭示實施例的一或數個態樣，一種轉移設備包括：框架；多個臂，連接至該框架，每一臂具有末端執行器及獨立驅動軸用於該各別臂的伸展和收縮以將工件搬入和搬出一搬運室；線性驅動軸，界定另一自由度，用於至少一臂，其係與該末端執行器的配座平面同平面；及共同驅動軸，每一臂所共用且配置用以使該多個臂繞著共同樞轉軸而樞轉；其中具有另一驅動軸之該多個臂的至少一者界定相對於該多個臂的其它者之獨立自由度。 In accordance with one or more aspects of the disclosed embodiments, a transfer apparatus includes: a frame; a plurality of arms coupled to the frame, each arm having an end effector and an independent drive shaft for extension and contraction of the respective arms To move the workpiece into and out of a handling chamber; the linear drive shaft defines another degree of freedom for at least one arm that is flush with the seating plane of the end effector; and a common drive shaft that is shared by each arm And configured to pivot the plurality of arms about a common pivot axis; wherein at least one of the plurality of arms having the other drive shaft defines an independent degree of freedom relative to the other of the plurality of arms.

依據所揭示實施例的一或數個態樣，界定該 獨立自由度的其它驅動軸係相對於用於伸展和收縮的該軸具有夾角。 Defining the one or more aspects according to the disclosed embodiments Other drive shafts of independent degrees of freedom have an angle with respect to the shaft for extension and contraction.

依據所揭示實施例的一或數個態樣，界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係與該末端執行器的配座平面同平面。 In accordance with one or more aspects of the disclosed embodiments, the other drive shaft configurations defining the independent degrees of freedom are such that the independent degrees of freedom are coplanar with the seating plane of the end effector.

依據所揭示實施例的一或數個態樣，界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係相對於其它獨立自由度具有夾角。 In accordance with one or more aspects of the disclosed embodiments, other drive shaft configurations that define the independent degrees of freedom are such that the independent degrees of freedom have an angle with respect to other independent degrees of freedom.

依據所揭示實施例的一或數個態樣，界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係相對於其它獨立自由度平行。 In accordance with one or more aspects of the disclosed embodiments, other drive shaft configurations that define the independent degrees of freedom are such that the independent degrees of freedom are parallel with respect to other independent degrees of freedom.

依據所揭示實施例的一或數個態樣，轉移設備進一步包括第二共同驅動軸，配置用以繞著共同軸共調移動該多個臂。 In accordance with one or more aspects of the disclosed embodiments, the transfer apparatus further includes a second common drive shaft configured to co-adjust the plurality of arms about a common axis.

依據所揭示實施例的一或數個態樣，該獨立自由度執行自動工件對中心。 In accordance with one or more aspects of the disclosed embodiments, the independent degrees of freedom perform automatic workpiece centering.

依據所揭示實施例的一或數個態樣，該獨立自由度執行用於工件保持站位置變化的獨立工件配置調整。 In accordance with one or more aspects of the disclosed embodiments, the independent degrees of freedom perform independent workpiece configuration adjustments for workpiece retention station position changes.

依據所揭示實施例的一或數個態樣，該多個臂係伸縮臂。 The plurality of arm telescoping arms are in accordance with one or more aspects of the disclosed embodiments.

依據所揭示實施例的一或數個態樣，一種轉移設備包括：框架，形成具有室氣氛的密封室；多個臂，連接該框架且配置在該密封室內，每一臂具有用於伸展和 收縮各別臂的獨立驅動軸；第一驅動部，配置在該密封室外部且連接至該多個臂用於繞著共同軸移動該多個臂；及第二驅動部，配置在該密封室內部，該第二驅動部包括密封外殼配置用以保持不同於該室氣氛的密封氣氛；其中該密封外殼具有第一密封部，包括第一驅動軸用於至少一臂的第一自由度；及第二密封部，與該第一密封部密封相通且包括第二驅動軸用於至少一臂的第二自由度。 In accordance with one or more aspects of the disclosed embodiments, a transfer apparatus includes: a frame forming a sealed chamber having a chamber atmosphere; a plurality of arms coupled to the frame and disposed within the sealed chamber, each arm having a stretch and Shrinking independent drive shafts of the respective arms; a first driving portion disposed outside the sealed chamber and connected to the plurality of arms for moving the plurality of arms about a common axis; and a second driving portion disposed in the sealed chamber The second drive portion includes a sealed outer casing configured to maintain a sealed atmosphere different from the atmosphere of the chamber; wherein the sealed outer casing has a first sealing portion including a first degree of freedom of the first drive shaft for at least one arm; a second seal portion sealingly communicating with the first seal portion and including a second degree of freedom for the at least one arm of the second drive shaft.

依據所揭示實施例的一或數個態樣，該多個臂的至少一者包括第二自由度獨立於用於伸展和收縮各別臂的該驅動軸。 In accordance with one or more aspects of the disclosed embodiments, at least one of the plurality of arms includes a second degree of freedom independent of the drive shaft for extending and retracting the respective arms.

依據所揭示實施例的一或數個態樣，該第二自由度執行自動工件對中心。 In accordance with one or more aspects of the disclosed embodiments, the second degree of freedom performs an automatic workpiece centering.

依據所揭示實施例的一或數個態樣，該第二自由度執行用於工件保持站位置變化的獨立工件配置調整。 In accordance with one or more aspects of the disclosed embodiments, the second degree of freedom performs independent workpiece configuration adjustments for workpiece retention station position changes.

依據所揭示實施例的一或數個態樣，該密封外殼包括開口於該密封外殼中，該第二密封部透過該開口與該第一密封部相通。 In accordance with one or more aspects of the disclosed embodiments, the sealed outer casing includes an opening in the sealed outer casing, and the second sealing portion communicates with the first sealing portion through the opening.

依據所揭示實施例的一或數個態樣，該第一及第二自由度的至少一者係相對於各別臂的伸展和收縮的軸具有夾角。 In accordance with one or more aspects of the disclosed embodiments, at least one of the first and second degrees of freedom has an included angle with respect to an axis of extension and contraction of the respective arms.

依據所揭示實施例的一或數個態樣，該第一及第二自由度的至少一者係與該末端執行器的配座平面同平面。 In accordance with one or more aspects of the disclosed embodiments, at least one of the first and second degrees of freedom is coplanar with the seating plane of the end effector.

依據所揭示實施例的一或數個態樣，該第一及第二自由度的至少一者係相對於其它獨立自由度具有夾角。 In accordance with one or more aspects of the disclosed embodiments, at least one of the first and second degrees of freedom has an angle with respect to other independent degrees of freedom.

依據所揭示實施例的一或數個態樣，該第一及第二自由度的至少一者係相對於其它獨立自由度而平行。 In accordance with one or more aspects of the disclosed embodiments, at least one of the first and second degrees of freedom is parallel with respect to other independent degrees of freedom.

依據所揭示實施例的一或數個態樣，該第一驅動部包括共同旋轉驅動軸，配置用以使該多個臂繞著共同旋轉軸共調旋轉。 In accordance with one or more aspects of the disclosed embodiments, the first drive portion includes a common rotational drive shaft configured to co-rotate the plurality of arms about a common rotational axis.

依據所揭示實施例的一或數個態樣，該多個臂係伸縮臂。 The plurality of arm telescoping arms are in accordance with one or more aspects of the disclosed embodiments.

應瞭解到，以上說明僅解說所揭示實施例的態樣。各種替代及修改可由熟習此項技藝者想出而不背離所揭示實施例的態樣。因此，所揭示實施例的態樣意欲包含落在附加請球項的範圍內之所有這種替代、修改及變化。而且，不同特徵敘述於相互不同的附屬或獨立項中之僅僅事實並未表示這些特徵的組合不能有利地使用，這種組合保留在本發明的態樣的範圍內。 It should be understood that the above description is only illustrative of the aspects of the disclosed embodiments. Various alternatives and modifications can be devised by those skilled in the art without departing from the scope of the disclosed embodiments. Accordingly, the disclosed embodiments are intended to cover all such alternatives, modifications and Moreover, the mere fact that the various features are recited in mutually different singular or singular items does not mean that the combination of these features is not advantageously used, and such combinations remain within the scope of the invention.

申請專利範圍為以下所請求的： The scope of the patent application is as follows:

Claims (29)

一種轉移設備，包含：框架；多個臂，連接至該框架以繞著共同樞轉軸而樞轉，每一臂具有末端執行器及獨立驅動軸，用於各別臂相對於該多個臂之其它者的伸展和收縮；線性軌，為至少一臂的伸展和收縮界定出該獨立驅動軸的自由度；及共同馬達的共同驅動軸，被每一臂所共用，使得每一臂依附於該共同馬達，且該共同馬達輸出共同力矩，界定出共同於每一臂之該共同驅動軸，使得該共同馬達被配置成藉著該共同驅動軸將該多個臂做為一單元繞著該共同樞轉軸而樞轉；其中該多個臂的至少一者具有另一驅動軸，相對於該多個臂的其它者界定出獨立自由度。 A transfer apparatus comprising: a frame; a plurality of arms coupled to the frame for pivoting about a common pivot axis, each arm having an end effector and an independent drive shaft for each arm relative to the plurality of arms Other extensions and contractions; linear rails defining the freedom of the independent drive shaft for the extension and contraction of at least one arm; and common drive shafts of the common motor, shared by each arm such that each arm is attached to the a common motor, and the common motor outputs a common torque defining a common drive shaft common to each arm such that the common motor is configured to surround the plurality of arms as a unit by the common drive shaft Pivoting the pivot axis; wherein at least one of the plurality of arms has another drive axis defining independent degrees of freedom with respect to the other of the plurality of arms. 如申請專利範圍第1項的轉移設備，其中界定該獨立自由度的其它驅動軸係相對於用於伸展和收縮的該軸具有夾角。 A transfer apparatus according to claim 1, wherein the other drive shafts defining the independent degrees of freedom have an angle with respect to the shaft for stretching and contracting. 如申請專利範圍第1項的轉移設備，其中界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係與該末端執行器的配座平面同平面。 A transfer apparatus according to claim 1, wherein the other drive shaft configuration defining the independent degree of freedom is such that the independent degree of freedom is flush with the seating plane of the end effector. 如申請專利範圍第1項的轉移設備，其中界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係相對於其它獨立自由度具有夾角。 A transfer apparatus according to claim 1, wherein the other drive shaft configuration defining the independent degree of freedom is such that the independent degree of freedom has an angle with respect to other independent degrees of freedom. 如申請專利範圍第1項的轉移設備，其中界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係相對於其它獨立自由度平行。 A transfer apparatus according to claim 1, wherein the other drive shaft configurations defining the independent degrees of freedom are arranged such that the independent degrees of freedom are parallel with respect to other independent degrees of freedom. 如申請專利範圍第1項的轉移設備，進一步包含第二共同驅動軸，配置用以繞著共同軸共調移動該多個臂。 The transfer apparatus of claim 1, further comprising a second common drive shaft configured to co-adjust the plurality of arms about a common axis. 如申請專利範圍第1項的轉移設備，其中其它驅動軸執行自動工件對中心。 For example, the transfer device of claim 1 wherein the other drive shafts perform automatic workpiece centering. 如申請專利範圍第1項的轉移設備，其中其它驅動軸執行用於工件保持站位置變化的獨立工件配置調整。 A transfer apparatus as claimed in claim 1, wherein the other drive shafts perform independent workpiece configuration adjustments for position changes of the workpiece holding station. 如申請專利範圍第1項的轉移設備，其中該多個臂係伸縮臂。 The transfer device of claim 1, wherein the plurality of arm telescopic arms. 一種轉移設備，包含：框架；多個臂，連接至該框架以繞著共同樞轉軸而樞轉，每一臂具有末端執行器及獨立驅動軸，用於各別臂的伸展和收縮以將工件搬入和搬出搬運室；線性驅動軸，為至少一臂界定出另一自由度，其與該末端執行器的配座平面同平面；及共同驅動軸，被每一臂所共用且配置成使該多個臂繞著共同樞轉軸而樞轉；其中該多個臂的至少一者具有另一驅動軸，相對於該多個臂的其它者界定獨立自由度。 A transfer apparatus comprising: a frame; a plurality of arms coupled to the frame for pivoting about a common pivot axis, each arm having an end effector and an independent drive shaft for each arm to extend and contract to move the workpiece Moving in and out of the handling room; the linear drive shaft defining another degree of freedom for at least one arm that is flush with the seating plane of the end effector; and a common drive shaft shared by each arm and configured to The plurality of arms pivot about a common pivot axis; wherein at least one of the plurality of arms has another drive axis defining independent degrees of freedom with respect to the others of the plurality of arms. 如申請專利範圍第10項的轉移設備，其中界定 該獨立自由度的其它驅動軸係相對於用於伸展和收縮的該軸具有夾角。 Such as the transfer equipment of claim 10, which defines The other drive shafts of this independent degree of freedom have an angle with respect to the shaft for extension and contraction. 如申請專利範圍第10項的轉移設備，其中界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係與該末端執行器的配座平面同平面。 A transfer apparatus according to claim 10, wherein the other drive shaft configuration defining the independent degree of freedom is such that the independent degree of freedom is flush with the seating plane of the end effector. 如申請專利範圍第10項的轉移設備，其中界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係相對於其它獨立自由度具有夾角。 A transfer apparatus according to claim 10, wherein the other drive shaft configuration defining the independent degree of freedom is such that the independent degree of freedom has an angle with respect to other independent degrees of freedom. 如申請專利範圍第10項的轉移設備，其中界定該獨立自由度的其它驅動軸係配置以使該獨立自由度係相對於其它獨立自由度平行。 A transfer apparatus according to claim 10, wherein the other drive shaft configuration defining the independent degree of freedom is such that the independent degrees of freedom are parallel with respect to other independent degrees of freedom. 如申請專利範圍第10項的轉移設備，進一步包含第二共同驅動軸，配置用以繞著共同軸共調移動該多個臂。 The transfer apparatus of claim 10, further comprising a second common drive shaft configured to co-adjust the plurality of arms about a common axis. 如申請專利範圍第10項的轉移設備，其中該獨立自由度執行自動工件對中心。 The transfer device of claim 10, wherein the independent degree of freedom performs an automatic workpiece centering. 如申請專利範圍第10項的轉移設備，其中該獨立自由度執行用於工件保持站位置變化的獨立工件配置調整。 A transfer apparatus according to claim 10, wherein the independent degree of freedom performs independent workpiece configuration adjustment for a change in position of the workpiece holding station. 如申請專利範圍第10項的轉移設備，其中該多個臂係伸縮臂。 The transfer device of claim 10, wherein the plurality of arm telescopic arms. 一種轉移設備，包含：密封室，具有室氣氛而框架配置在該密封室內；多個臂，連接該框架以繞著共同樞轉軸而樞轉且配置 在該密封室內，每一臂具有用於伸展和收縮各別臂的獨立驅動軸；第一驅動部，配置在該密封室外部且連接至該多個臂以繞著共同軸移動該多個臂；及第二驅動部，配置在該密封室內部，該第二驅動部包括密封外殼，配置成維持不同於該室氣氛的密封氣氛；其中該密封外殼具有第一密封部，包括第一驅動軸，用於至少一臂的第一自由度；及第二密封部，與該第一密封部密封相通且包括第二驅動軸，用於至少一臂的第二自由度。 A transfer apparatus comprising: a sealed chamber having a chamber atmosphere in which a frame is disposed; a plurality of arms coupled to the frame for pivoting and configuring about a common pivot axis In the sealed chamber, each arm has an independent drive shaft for extending and contracting the respective arms; a first drive portion disposed outside the sealed chamber and coupled to the plurality of arms to move the plurality of arms about a common axis And a second driving portion disposed inside the sealed chamber, the second driving portion including a sealed outer casing configured to maintain a sealing atmosphere different from the atmosphere of the chamber; wherein the sealed outer casing has a first sealing portion including a first driving shaft a first degree of freedom for at least one arm; and a second seal portion sealingly communicating with the first seal portion and including a second drive shaft for a second degree of freedom of the at least one arm. 如申請專利範圍第19項的轉移設備，其中該多個臂的至少一者包括第二自由度，獨立於用於伸展和收縮各別臂的該驅動軸。 A transfer apparatus according to claim 19, wherein at least one of the plurality of arms includes a second degree of freedom independent of the drive shaft for extending and contracting the respective arms. 如申請專利範圍第20項的轉移設備，其中該第二自由度執行自動工件對中心。 The transfer device of claim 20, wherein the second degree of freedom performs an automatic workpiece centering. 如申請專利範圍第20項的轉移設備，其中該第二自由度執行用於工件保持站位置變化的獨立工件配置調整。 The transfer apparatus of claim 20, wherein the second degree of freedom performs an independent workpiece configuration adjustment for a change in position of the workpiece holding station. 如申請專利範圍第19項的轉移設備，其中該密封外殼包括開口於該密封外殼中，該第二密封部透過該開口與該第一密封部相通。 The transfer device of claim 19, wherein the sealed outer casing comprises an opening in the sealed outer casing, and the second sealing portion communicates with the first sealing portion through the opening. 如申請專利範圍第19項的轉移設備，其中該第一及第二自由度的至少一者係相對於各別臂的伸展和收縮的軸具有夾角。 A transfer apparatus according to claim 19, wherein at least one of the first and second degrees of freedom has an angle with respect to an axis of extension and contraction of the respective arms. 如申請專利範圍第19項的轉移設備，其中該第一及第二自由度的至少一者係與該末端執行器的配座平面同平面。 The transfer device of claim 19, wherein at least one of the first and second degrees of freedom is coplanar with a seating plane of the end effector. 如申請專利範圍第19項的轉移設備，其中該第一及第二自由度的至少一者係相對於其它獨立自由度具有夾角。 The transfer device of claim 19, wherein at least one of the first and second degrees of freedom has an angle with respect to other independent degrees of freedom. 如申請專利範圍第19項的轉移設備，其中該第一及第二自由度的至少一者係相對於其它獨立自由度平行。 The transfer device of claim 19, wherein at least one of the first and second degrees of freedom is parallel with respect to other independent degrees of freedom. 如申請專利範圍第19項的轉移設備，其中該第一驅動部包括共同旋轉驅動軸，配置用以使該多個臂繞著共同旋轉軸共調旋轉。 The transfer device of claim 19, wherein the first drive portion comprises a common rotational drive shaft configured to rotate the plurality of arms co-rotating about a common rotational axis. 如申請專利範圍第19項的轉移設備，其中該多個臂係伸縮臂。 The transfer device of claim 19, wherein the plurality of arm telescopic arms.