TWI637779B - Air purification system - Google Patents

Air purification system Download PDF

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TWI637779B
TWI637779B TW105116285A TW105116285A TWI637779B TW I637779 B TWI637779 B TW I637779B TW 105116285 A TW105116285 A TW 105116285A TW 105116285 A TW105116285 A TW 105116285A TW I637779 B TWI637779 B TW I637779B
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air
adsorption
temperature
humidity
adsorption unit
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TW105116285A
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TW201709965A (en
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西村健二
山脇正勝
東田一成
笹渕朝禎
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伸和控制工業股份有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/89—Arrangement or mounting of control or safety devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/20—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising free carbon; comprising carbon obtained by carbonising processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/34—Regenerating or reactivating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Air Conditioning Control Device (AREA)
  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Ventilation (AREA)

Abstract

本發明係一種空氣清淨化系統，其課題為提供：作為吸附單元的吸附材，由使用多量的活性碳者，可實現低成本之空氣清淨化系統。 The present invention relates to an air purification system, and an object of the invention is to provide a low-cost air purification system by using a large amount of activated carbon as an adsorption material for an adsorption unit.

解決手段為本發明之空氣清淨化系統係具有可再生吸附能力之2系統之吸附單元，而一方之吸附單元則在吸附處理空氣內的污染物質時，成為呈加以再生另一方的吸附單元之吸附能力之吸附式之空氣清淨化裝置，和控制經由空氣清淨化裝置而加以清淨化之空氣的溫度及濕度之空氣調和裝置，和加以供給經由空氣調和裝置而控制溫度及濕度之空氣的HEPA裝置，其特徵為空氣清淨化裝置之吸附單元之吸附材的70%以上則由活性碳所成，而空氣調和裝置係可將-10℃~80℃範圍之空氣，控制為20℃~27℃之範圍內且40%~50%之濕度，而HEPA裝置係具有除去0.3μm以上之粒子的性能者。 Solution The air purification system of the present invention is an adsorption unit of a system having regenerative adsorption capacity, and the adsorption unit of one of the adsorption units is adsorbed by the adsorption unit of the other side while adsorbing the pollutants in the treatment air. An adsorption air purifying device capable of controlling, and an air conditioning device for controlling the temperature and humidity of the air purified by the air purifying device, and a HEPA device for supplying air for controlling temperature and humidity via the air conditioning device, The air-conditioning device can control the air in the range of -10 ° C to 80 ° C to be in the range of 20 ° C to 27 ° C. The humidity is 40% to 50%, and the HEPA device has the property of removing particles of 0.3 μm or more.

Description

空氣清淨化系統 Air purification system

本發明係有關將自無塵室等所輸送之處裡空氣進行清淨化的空氣清淨化系統。 The present invention relates to an air purification system for purifying air from a place where a clean room or the like is transported.

對於經由本件申請人之日本專利第5303143號(專利文獻1)，係加以揭示有作為具有可再生吸附能力之2系統的吸附單元，而成為一方的吸附單元則呈在吸附處理空氣內的污染物質時，而加以再生另一方的吸附單元之吸附能力之吸附式之空氣清淨化裝置，加以採用3層型式之吸附單元之空氣清淨化裝置。 Japanese Patent No. 5303143 (Patent Document 1) of the present applicant discloses an adsorption unit as a system having a regenerable adsorption capacity, and a single adsorption unit is a pollutant in the adsorption treatment air. In the case of the adsorption type air purification device which regenerates the adsorption capacity of the other adsorption unit, an air purification device using a three-layer type adsorption unit is used.

3層型式之吸附單元係由包含活性碳與固體鹼性物質之吸附材層a，和包含固體酸性物質之吸附材層b，和包含活性碳與固體鹼性物質之吸附材層c所成。構成吸附材層a及吸附材層c之固體鹼性物質係氧化鎂，矽酸鎂，矽酸鈣，海泡石，選自氧化鋁及海泡石之構成，而構成吸附材層b之固體氧化性物質係含有鈦與矽之複合氧化物及氧化釩之構成。 The three-layer type adsorption unit is composed of an adsorption material layer a containing activated carbon and a solid alkaline substance, and an adsorption material layer b containing a solid acidic substance, and an adsorption material layer c containing activated carbon and a solid alkaline substance. The solid alkaline substance constituting the adsorbent layer a and the adsorbent layer c is magnesium oxide, magnesium citrate, calcium citrate, sepiolite, and is composed of alumina and sepiolite, and constitutes a solid of the adsorbent layer b. The oxidizing substance contains a composite oxide of titanium and lanthanum and a composition of vanadium oxide.

此空氣清淨化裝置係可將來自清洗作業空間 的排氣，除去至氨為0.05ppb以下、氮氧化物之NOx為0.1ppb以下、硫氧化物之SOx為0.1ppb以下、氯離子之Cl-為0.1ppb以下、含有胺類之有機性分子狀污染物質係以十六烷換算為2ppb以下為止者。即，該空氣清淨化裝置係極高性能之空氣清淨化裝置。 This air purification unit can be used to clean the work space Exhaust gas is removed to ammonia of 0.05 ppb or less, NOx of nitrogen oxides is 0.1 ppb or less, SOx of sulfur oxides is 0.1 ppb or less, Cl- of chloride ions is 0.1 ppb or less, and organic molecules containing amines The pollutants are in the range of 2 ppb or less in terms of cetane. That is, the air purification device is an extremely high performance air purification device.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利第5303143號 [Patent Document 1] Japanese Patent No. 5303143

[專利文獻2]日本專利第4047639號 [Patent Document 2] Japanese Patent No. 4047639

[專利文獻3]日本專利第4644517號 [Patent Document 3] Japanese Patent No. 4644517

如前述，專利文獻1所揭示之空氣清淨化裝置係為極高性能之空氣清淨化裝置，但吸附單元之成本為高。本件發明者係對於作為吸附單元之吸附材，更多量地使用低成本之活性碳之情況，重複進行銳意檢討。 As described above, the air purification device disclosed in Patent Document 1 is an extremely high-performance air purification device, but the cost of the adsorption unit is high. The inventors of the present invention repeatedly conducted a keen evaluation on the case where a low-cost activated carbon was used in a larger amount as an adsorbent for an adsorption unit.

如根據本件發明者時，在吸附材中，活性碳的量為多之情況，含於吸附處理後之空氣中的活性碳引起之塵埃量變多，而產生必須除去該塵埃。 When the inventors of the present invention have a large amount of activated carbon in the adsorbent, the amount of dust caused by the activated carbon contained in the air after the adsorption treatment increases, and it is necessary to remove the dust.

但本件發明者係由併用為了除去該塵埃之HEPA裝置者，見解到可克服其問題。特別是，由控制吸 附處理後之空氣的溫度及濕度者，見解到可提高經由HEPA裝置之塵埃除去性能，另外，可加長該性能之壽命者。作為該事實之因素係認為因在過低之低濕度中係產生有經由靜電之HEPA裝置的不良狀況，而在過度之高濕度中係產生經由結露或霉菌繁殖等之HEPA裝置的堵塞之故。 However, the inventors of the present invention have found that the HEPA device for removing the dust can be used to overcome the problem. In particular, by suction The temperature and humidity of the treated air are known to improve the dust removal performance via the HEPA device and to extend the life of the performance. As a factor of this fact, it is considered that a problem occurs in a low-humidity HEPA device that passes through static electricity, and in a high humidity, clogging of a HEPA device via condensation or mold growth occurs.

本發明係依據如以上的背景所發明之構成，其課題為提供：作為吸附單元之吸附材而由使用多量的活性碳者，可實現低成本之空氣清淨化系統者。 The present invention has been made in accordance with the above-described background, and it is an object of the invention to provide a low-cost air purification system by using a large amount of activated carbon as an adsorbent for an adsorption unit.

本發明係具備：具有可再生吸附能力之2系統之吸附單元，而一方之吸附單元則在吸附處理空氣內的污染物質時，成為呈加以再生另一方的吸附單元之吸附能力之吸附式之空氣清淨化裝置，和控制經由前述空氣清淨化裝置而加以清淨化之空氣的溫度及濕度之空氣調和裝置，和加以供給經由前述空氣調和裝置而控制溫度及濕度之空氣的HEPA裝置之空氣清淨化系統，其特徵為前述空氣清淨化裝置之前述吸附單元之吸附材的70%以上則由活性碳所成，而前述空氣調和裝置係可將-10℃~80℃範圍之空氣，控制為20℃~27℃之範圍內且40%~50%之濕度，而前述HEPA裝置係具有除去0.3μm以上之粒子的性能，通過前述HEPA裝置之空氣係加以清淨化至氨為5ppb以下、丙酮為10μg/m3以下、氮氧化物之NOx為20 ppb以下、硫氧化物之SOx為20ppb以下為止者。 The present invention comprises: two adsorption units having regenerative adsorption capacity, and one of the adsorption units is an adsorption type air that adsorbs the adsorption capacity of the other adsorption unit when adsorbing the pollutants in the air. a cleaning device, an air conditioning device for controlling the temperature and humidity of the air purified by the air cleaning device, and an air cleaning system for supplying a HEPA device for controlling the temperature and humidity of the air through the air conditioning device It is characterized in that 70% or more of the adsorbing material of the adsorption unit of the air cleaning device is made of activated carbon, and the air conditioning device can control the air in the range of -10 ° C to 80 ° C to 20 ° C. The humidity in the range of 27 ° C and 40% to 50%, and the HEPA device has the property of removing particles of 0.3 μm or more, and is purified by the air system of the HEPA apparatus to 5 ppb or less and 10 μg/m of acetone. 3 or less, the NOx of the nitrogen oxide is 20 ppb or less, and the SOx of the sulfur oxide is 20 ppb or less.

如根據本發明時，作為吸附單元的吸附材，由使用多量的活性碳者，可實現低成本。另外，可經由HEPA裝置而有效果地除去含於吸附處理後之空氣中的活性碳引起之塵埃，且由經由空氣調和裝置而控制吸附處理後之空氣的溫度及濕度者，可提高經由HEPA裝置之塵埃除去性能，另外，可延長該性能之壽命者。 According to the present invention, as the adsorbent material of the adsorption unit, a low cost can be achieved by using a large amount of activated carbon. Further, the dust caused by the activated carbon contained in the air after the adsorption treatment can be effectively removed by the HEPA device, and the temperature and humidity of the air after the adsorption treatment can be controlled by the air conditioner to improve the passage of the HEPA device. The dust removes the performance, and in addition, the life of the performance can be extended.

理想係前述空氣調和裝置係可將-10℃~80℃之範圍的36m3/min以下之空氣，對於20℃~27℃之範圍內的目標溫度而言，以±0.1℃之精確度加以控制，且，對於40%~50%之範圍內的目標溫度而言，以±0.5%之精確度加以控制。 Ideally, the air conditioning device can control air below 36 m 3 /min in the range of -10 ° C to 80 ° C for an accuracy of ± 0.1 ° C for a target temperature in the range of 20 ° C to 27 ° C. And, for a target temperature in the range of 40% to 50%, it is controlled with an accuracy of ±0.5%.

空氣調和裝置則經由將經由空氣清淨化裝置而加以清淨化之空氣的溫度及濕度，如由此條件而控制之時，更提高經由HEPA裝置之塵埃除去性能，另外，更可延長該性能之壽命者。 The air conditioning device further improves the dust removal performance via the HEPA device by controlling the temperature and humidity of the air purified by the air cleaning device, and the like, and further prolongs the life of the performance. By.

另外，如根據本件發明者，吸附單元係具有8000~10000之範圍的SV值者為佳。當超出此範圍時，吸附性能的壽命係雖延長，但框體則變大。另一方面，當低於此範圍時，雖可小型化而為便利，但吸附性能之壽命則變短。 Further, as in the inventors of the present invention, it is preferable that the adsorption unit has an SV value in the range of 8,000 to 10,000. When this range is exceeded, the life of the adsorption performance is extended, but the frame body becomes large. On the other hand, when it is less than this range, it is convenient to be downsized, but the life of the adsorption performance is shortened.

另外，HEPA裝置係將通過該HEPA裝置之空氣，揮發性有機化合物則至成為10μg/m3以下為止進行清淨化者為佳。 In addition, it is preferable that the HEPA apparatus removes air from the HEPA apparatus and purifies the volatile organic compound until it is 10 μg/m 3 or less.

另外，本發明係具備：具有可再生吸附能力之2系統之吸附單元，而一方之吸附單元則在吸附處理空氣內的污染物質時，成為呈加以再生另一方的吸附單元之吸附能力之吸附式之空氣清淨化裝置，和控制經由前述空氣清淨化裝置而加以清淨化之空氣的溫度及濕度之空氣調和裝置，和加以供給經由前述空氣調和裝置而控制溫度及濕度之空氣的HEPA裝置之空氣清淨化系統，其特徵為前述空氣清淨化裝置之前述吸附單元之吸附材係含有將活性碳作為主成分之55wt%的第1混合材料，和將主成分作為陶瓷之45wt%的第2混合材料，對於前述第1混合材料係包含有70wt%以上的活性碳，而前述空氣調和裝置係可將-10℃~80℃範圍之空氣，控制為20℃~27℃之範圍內且40%~50%之濕度，而前述HEPA裝置係具有除去0.3μm以上之粒子的性能，通過前述HEPA裝置之空氣係加以清淨化至氨為5ppb以下、丙酮為10μg/m3以下、氮氧化物之NOx為20ppb以下、硫氧化物之SOx為20ppb以下為止者。 Further, the present invention includes an adsorption unit having two systems capable of regenerating adsorption capacity, and one of the adsorption units is an adsorption type that adsorbs the adsorption capacity of the other adsorption unit when adsorbing the pollutants in the air. The air cleaning device and the air conditioning device for controlling the temperature and humidity of the air purified by the air cleaning device, and the air cleaning device for supplying the air that controls the temperature and humidity through the air conditioning device The adsorption system of the adsorption unit of the air purification device includes a first mixed material containing 55 wt% of activated carbon as a main component, and a second mixed material containing 45 wt% of a main component as a ceramic component. The first mixed material contains 70% by weight or more of activated carbon, and the air conditioning device can control air in the range of -10 ° C to 80 ° C to be in the range of 20 ° C to 27 ° C and 40% to 50%. Humidity, and the HEPA device has the property of removing particles of 0.3 μm or more, and is purified by the air system of the HEPA device to a nitrogen content of 5 ppb. , Acetone 10μg / m 3 or less, the NOx is 20ppb or less of nitrogen oxides, SOx sulfur oxides by up to 20ppb or less.

另外，本發明係具備：具有可再生吸附能力之2系統之吸附單元，而一方之吸附單元則在吸附處理空氣內的污染物質時，成為呈加以再生另一方的吸附單元之吸附能力之吸附式之空氣清淨化裝置，和控制經由前述空氣清淨化裝置而加以清淨化之空氣的溫度及濕度之空氣調和裝置，和加以供給經由前述空氣調和裝置而控制溫度及濕度之空氣的ULPA裝置之空氣清淨化系統，其特徵為前 述空氣清淨化裝置之前述吸附單元之吸附材係含有將活性碳作為主成分之55wt%的第1混合材料，和將主成分作為陶瓷之45wt%的第2混合材料，對於前述第1混合材料係包含有70wt%以上的活性碳，而前述空氣調和裝置係可將-10℃~80℃範圍之空氣，控制為20℃~27℃之範圍內且40%~50%之濕度，而前述ULPA裝置係具有除去0.1μm以上之粒子的性能，通過前述ULPA裝置之空氣係加以清淨化至氨為5ppb以下、丙酮為10μg/m3以下、氮氧化物之NOx為20ppb以下、硫氧化物之SOx為20ppb以下為止者。 Further, the present invention includes an adsorption unit having two systems capable of regenerating adsorption capacity, and one of the adsorption units is an adsorption type that adsorbs the adsorption capacity of the other adsorption unit when adsorbing the pollutants in the air. The air cleaning device and the air conditioning device for controlling the temperature and humidity of the air purified by the air cleaning device, and the air cleaning device for supplying the ULPA device for controlling the temperature and humidity through the air conditioning device The adsorption system of the adsorption unit of the air purification device includes a first mixed material containing 55 wt% of activated carbon as a main component, and a second mixed material containing 45 wt% of a main component as a ceramic component. The first mixed material contains 70% by weight or more of activated carbon, and the air conditioning device can control air in the range of -10 ° C to 80 ° C to be in the range of 20 ° C to 27 ° C and 40% to 50%. Humidity, and the ULPA device has the property of removing particles of 0.1 μm or more, and is purified by the air system of the ULPA device to a concentration of 5 ppb. , Acetone 10μg / m 3 or less, the NOx is 20ppb or less of nitrogen oxides, SOx sulfur oxides by up to 20ppb or less.

如根據上述之各系統，作為吸附單元之吸附材，由使用含有多量之活性碳及多量的陶瓷之二種的混合材料者，可實現低成本。另外，可經由HEPA裝置或ULPA裝置而有效果地除去含於吸附處理後之空氣中的活性碳引起之塵埃，且由經由空氣調和裝置而控制吸附處理後之空氣的溫度及濕度者，可提高經由HEPA裝置或ULPA裝置之塵埃除去性能，另外，可延長該性能之壽命者。 According to each of the above systems, the adsorbent material as the adsorption unit can be realized at a low cost by using a mixed material containing a large amount of activated carbon and a large amount of ceramic. Further, the dust caused by the activated carbon contained in the air after the adsorption treatment can be effectively removed by the HEPA device or the ULPA device, and the temperature and humidity of the air after the adsorption treatment can be controlled by the air conditioning device. The dust removal performance via the HEPA device or the ULPA device, and the life of the performance can be extended.

在上述之各系統中，對於前述第1混合材料，係包含有20~22wt%之氧化鋁，和4~6wt%之二氧化矽者為佳。 In each of the above systems, it is preferred that the first mixed material contains 20 to 22% by weight of alumina and 4 to 6% by weight of cerium oxide.

另外，前述第2混合材料係作為前述陶瓷，包含二氧化矽或氧化鋁，且作為觸媒，包含6.5wt%~8.5wt%之五氧化二釩者為佳。 Further, the second mixed material is preferably cerium oxide or aluminum oxide as the ceramic, and preferably contains 6.5 wt% to 8.5 wt% of vanadium pentoxide as a catalyst.

如根據本發明時，作為吸附單元的吸附材，由使用多量的活性碳者，可實現低成本。另外，可經由HEPA裝置或ULPA裝置而有效果地除去含於吸附處理後之空氣中的活性碳引起之塵埃，且由經由空氣調和裝置而控制吸附處理後之空氣的溫度及濕度者，可提高經由HEPA裝置或ULPA裝置之塵埃除去性能，另外，可延長該性能之壽命者。 According to the present invention, as the adsorbent material of the adsorption unit, a low cost can be achieved by using a large amount of activated carbon. Further, the dust caused by the activated carbon contained in the air after the adsorption treatment can be effectively removed by the HEPA device or the ULPA device, and the temperature and humidity of the air after the adsorption treatment can be controlled by the air conditioning device. The dust removal performance via the HEPA device or the ULPA device, and the life of the performance can be extended.

100‧‧‧空氣清淨化系統 100‧‧‧Air purification system

101‧‧‧空氣清淨化裝置 101‧‧‧Air purification device

102‧‧‧空氣調和裝置 102‧‧‧Air blending device

103‧‧‧HEPA裝置 103‧‧‧HEPA device

104‧‧‧排氣冷卻單元 104‧‧‧Exhaust cooling unit

圖1係本發明之一實施形態的空氣清淨化系統之概略正面圖。 Fig. 1 is a schematic front view showing an air cleaning system according to an embodiment of the present invention.

圖2係圖1之空氣清淨化系統之概略背面圖。 Figure 2 is a schematic rear view of the air purification system of Figure 1.

圖3係圖1之空氣清淨化系統之概略方塊圖。 Figure 3 is a schematic block diagram of the air purification system of Figure 1.

圖4係顯示圖1之空氣清淨化系統之空氣清淨性能的圖表。 Figure 4 is a graph showing the air purification performance of the air purification system of Figure 1.

圖5係顯示圖1之空氣清淨化裝置之構成之詳細的方塊圖。 Fig. 5 is a detailed block diagram showing the constitution of the air cleaning apparatus of Fig. 1.

圖6係顯示圖1之空氣清淨化裝置之構成例的方塊圖。 Fig. 6 is a block diagram showing a configuration example of the air cleaning device of Fig. 1.

圖7係顯示圖1之空氣調和裝置之其他構成例之方塊圖。 Fig. 7 is a block diagram showing another configuration example of the air blending device of Fig. 1.

以下，參照附加的圖面，詳細說明本發明之一實施形態。圖1係本發明之一實施形態的空氣清淨化系統100之概略正面圖，圖2係圖1之空氣清淨化系統100之概略背面圖，圖3係圖1之空氣清淨化系統100之概略方塊圖。 Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. 1 is a schematic front view of an air cleaning system 100 according to an embodiment of the present invention, FIG. 2 is a schematic rear view of the air cleaning system 100 of FIG. 1, and FIG. 3 is a schematic block of the air cleaning system 100 of FIG. Figure.

如圖1乃至圖3所示，本實施形態之空氣清淨化系統100係具備：吸附所導入之處理空氣內的污染物質而清淨化處理空氣之空氣清淨化裝置101，和控制經由空氣清淨化裝置101所清淨化之空氣的溫度及濕度之空氣調和裝置102，和加以供給經由空氣調和裝置102而控制溫度及濕度之空氣的HEPA裝置103，和冷卻在空氣清淨化系統100之吸附能力的再生時產生之排氣的排氣冷卻單元104。 As shown in FIG. 1 to FIG. 3, the air cleaning system 100 of the present embodiment includes an air cleaning device 101 that adsorbs pollutants in the introduced process air to purify the treated air, and controls the air cleaning device through the air. An air conditioning device 102 for cleaning the temperature and humidity of the purified air, and a HEPA device 103 for supplying air for controlling temperature and humidity via the air conditioning device 102, and for regenerating the adsorption capacity of the air cleaning system 100 An exhaust gas cooling unit 104 that generates exhaust gas.

空氣清淨化裝置101係具有可再生吸附能力之2系統的吸附單元101a、101b，一方的吸附單元則在吸附處理空氣內之污染物質時，成為呈加以再生另一方之吸附單元的吸附能力之吸附式的空氣清淨化裝置。詳細的構造係後述之，但除了吸附單元之吸附材的70%以上則由活性碳所成的點以外，與日本專利第5303143號(專利文獻1)所揭示之構成相同。另外，本實施形態之吸附單元之SV值係為9000。然而，SV值係空間速度(Space Velocity)者，意味以通過吸附單元之氣體的流量 (m3/h)/在吸附單元之吸附劑的體積(m3)所表示的值者。 The air cleaning device 101 is an adsorption unit 101a and 101b having two systems capable of regenerating adsorption capacity, and one of the adsorption units is adsorbed by the adsorption unit of the other adsorption unit when adsorbing the pollutants in the air. Air purification device. The detailed structure is the same as that disclosed in Japanese Patent No. 5303143 (Patent Document 1), except that 70% or more of the adsorbing material of the adsorption unit is formed of activated carbon. Further, the adsorption unit of the present embodiment has an SV value of 9000. However, the SV value is the space velocity (Space Velocity), which means the value expressed by the flow rate of the gas passing through the adsorption unit (m 3 /h) / the volume of the adsorbent (m 3 ) in the adsorption unit.

空氣調和裝置102係可將-10℃~80℃範圍之空氣，控制為20℃~27℃之範圍內且40%~50%之濕度的裝置。本實施形態之空氣調和裝置102係可將-10℃~80℃之範圍的36m3/min以下之空氣，對於20℃~27℃之範圍內的目標溫度而言，以±0.1℃之精確度加以控制，且，對於40%~50%之範圍內的目標溫度而言，以±0.5%之精確度加以控制。更詳細的構造係後述之，但揭示於日本專利第4047639號(專利文獻2)。 The air conditioning device 102 can control the air in the range of -10 ° C to 80 ° C to a device in the range of 20 ° C to 27 ° C and a humidity of 40% to 50%. The air conditioning apparatus 102 of the present embodiment can set an air of 36 m 3 /min or less in the range of -10 ° C to 80 ° C, and an accuracy of ± 0.1 ° C for a target temperature in the range of 20 ° C to 27 ° C . It is controlled and controlled with an accuracy of ±0.5% for a target temperature in the range of 40% to 50%. A more detailed structure will be described later, but it is disclosed in Japanese Patent No. 4047639 (Patent Document 2).

HEPA裝置103係具有除去0.3μm以上之粒子的性能之HEPA裝置(規格上之除去率係99.99%)。 The HEPA device 103 is a HEPA device (the removal rate in the specification is 99.99%) having the performance of removing particles of 0.3 μm or more.

如根據本實施形態，通過HEPA裝置103之空氣係加以清淨化成氨為5ppb以下、丙酮為10μg/m3以下、氮氧化物之NOx為20ppb以下、硫氧化物之SOx為20ppb以下，揮發性有機化合物為10μg/m3以下。此等數值係作為本發明目的之清淨化後之空氣的要求規格，與有關經由本實施形態之空氣清淨化系統100之實際實驗機的空氣清淨性能之資料合併，加以圖示於圖4。在此，IPA係為異丙醇，而PGMEA係指1-甲氧基-2丙基乙酸酯(醋酸丙二醇甲醚酯)，矽氧烷係指將矽與氧作為架構之化合物，具有Si-O-Si結合(矽氧烷結合)之構成(=矽氧烷類)，而Dopant P.B係指在半導體製造工程所使用之不純物(P：磷、B：硼)。 According to the present embodiment, the air system of the HEPA apparatus 103 is cleaned and purified to have an ammonia content of 5 ppb or less, acetone of 10 μg/m 3 or less, NOx of nitrogen oxides of 20 ppb or less, and SOx of sulfur oxides of 20 ppb or less, and volatile organic compounds. The compound is 10 μg/m 3 or less. These numerical values are combined with the required specifications of the cleaned air as the object of the present invention, and are shown in Fig. 4 together with the data on the air purification performance of the actual experimental machine of the air cleaning system 100 of the present embodiment. Here, IPA is isopropyl alcohol, and PGMEA is 1-methoxy-2-propyl acetate (propylene glycol methyl ether acetate), and siloxane is a compound having ruthenium and oxygen as a structure, and has Si. -O-Si bonding (oxynitride bonding) (=矽 oxyalkylene), and Dopant PB refers to impurities used in semiconductor manufacturing engineering (P: phosphorus, B: boron).

如以上，如根據本實施形態時，作為吸附單元之吸附材，70%以上(例如，75%)為活性碳之故，而可實現低成本。另外，可經由HEPA裝置103而有效果地除去含於吸附處理後之空氣中的活性碳引起的塵埃，而可發揮充分之空氣清淨性能者。然而，對於吸附材係含有70wt%以上之活性碳，和20~22wt%之氧化鋁，和4~6wt%之二氧化矽者為佳。此情況，可有效地抑制成本同時，可確保良好的除去及清淨能力。在本件發明者之銳意的研究中，第1混合材料則含有70wt%以上之活性碳，和21wt%之氧化鋁，和6wt%之二氧化矽之情況，可極有效地抑制成本同時，可確保良好的除去及清淨能力。 As described above, according to the present embodiment, 70% or more (for example, 75%) of the adsorbent as the adsorption unit is activated carbon, and low cost can be achieved. Further, the dust due to the activated carbon contained in the air after the adsorption treatment can be effectively removed by the HEPA device 103, and sufficient air purification performance can be exhibited. However, it is preferred that the adsorbent material contains 70% by weight or more of activated carbon, and 20 to 22% by weight of alumina, and 4 to 6% by weight of cerium oxide. In this case, the cost can be effectively suppressed while ensuring good removal and cleaning ability. In the intensive research of the inventors of the present invention, the first mixed material contains 70% by weight or more of activated carbon, and 21% by weight of alumina, and 6% by weight of cerium oxide, which can extremely effectively suppress the cost while ensuring Good removal and cleaning ability.

更且，由經由空氣調和裝置102而控制吸附處理後之空氣的溫度及濕度者，可提高經由HEPA裝置103之塵埃除去性能，另外，可延長該性能之壽命者。 Further, by controlling the temperature and humidity of the air after the adsorption treatment via the air conditioning device 102, the dust removal performance by the HEPA device 103 can be improved, and the life of the performance can be prolonged.

特別是，本實施形態之空氣調和裝置102係經由可將-10℃~80℃之範圍的36m3/min以下之空氣，對於20℃~27℃之範圍內的目標溫度而言，以±0.1℃之精確度加以控制，且，對於40%~50%之範圍內的目標溫度而言，以±0.5%之精確度加以控制者，可更提高經由HEPA裝置103之塵埃除去性能，另外，更延長該性能之壽命者。 In particular, the air conditioning apparatus 102 of the present embodiment can pass air of 36 m 3 /min or less in the range of -10 ° C to 80 ° C, and ± 0.1 for the target temperature in the range of 20 ° C to 27 ° C. The accuracy of °C is controlled, and for the target temperature in the range of 40% to 50%, the accuracy of ±0.5% can improve the dust removal performance through the HEPA device 103, and more Extend the life of this performance.

然而，在以上的實施形態中，HEPA裝置103係加以置換為具有除去0.1μm以上之粒子的性能之ULPA裝置亦可。此情況，可對應於如手術室高度清淨度之環境 者。 However, in the above embodiment, the HEPA device 103 may be replaced with a ULPA device having a performance of removing particles of 0.1 μm or more. In this case, it can correspond to an environment such as the high degree of cleanliness of the operating room. By.

另外，本件發明者係見解到吸附單元之吸附材則包含將活性碳作為主成分之55wt%的第1混合材料，和將主成分作為陶瓷之45wt%的第2混合材料，對於第1混合材料係含有70wt%以上之活性碳的情況(活性碳則佔第1混合材料之比例為70wt%以上之情況)中，可實現低成本之同時，可有效地吸附空氣中的塵埃者。陶瓷係不但低成本，而在可容易地載持觸媒的點為有益，由使用陶瓷者，可容易地提高吸附單元之清淨效果，並且亦可延長HEPA裝置或ULPA裝置之壽命。陶瓷係二氧化矽或氧化鋁者為佳，而所載持之觸媒係為五氧化二釩者為佳。此情況，第2混合材料係包含6.5wt%~8.5wt%之五氧化二釩者為佳。另一方面，對於前述第1混合材料，係包含有20~22wt%之氧化鋁，和4~6wt%之二氧化矽者為佳。 Further, the inventors of the present invention have disclosed that the adsorbent material of the adsorption unit contains 55 wt% of the first mixed material containing activated carbon as the main component, and the second mixed material of the main component as 45 wt% of the ceramic, for the first mixed material. In the case where 70% by weight or more of activated carbon is contained (in the case where the ratio of the activated carbon to the first mixed material is 70% by weight or more), it is possible to efficiently adsorb dust in the air while achieving low cost. The ceramic system is not only low-cost, but is advantageous in that it can easily carry the catalyst. The use of ceramics can easily improve the cleaning effect of the adsorption unit, and can also extend the life of the HEPA device or the ULPA device. Ceramics such as cerium oxide or aluminum oxide are preferred, and those containing the catalyst are vanadium pentoxide. In this case, it is preferred that the second mixed material contains 6.5 wt% to 8.5 wt% of vanadium pentoxide. On the other hand, it is preferable that the first mixed material contains 20 to 22% by weight of alumina and 4 to 6% by weight of cerium oxide.

如上述，對於第1混合材料，含有20~22wt%之氧化鋁，和4~6wt%之二氧化矽，而第2混合材料則作為陶瓷，含有二氧化矽或氧化鋁，且作為觸媒，包含6.5wt%~8.5wt%之五氧化二釩之情況，可確保丙酮的平衡吸附量則成為16wt%以上之吸附能力。經由此，成為可以簡易之吸附材而充分地確保由在半導體製造設備之無塵室所要求之塵埃除去能力及空氣清淨能力者。然而，在本件發明者之銳意的研究中，第1混合材料則含有70wt%以上之活性碳，和21wt%之氧化鋁，和6wt%之二氧化矽之 情況，可極有效地抑制成本同時，可確保良好的除去及清淨能力。另外，在第2混合材料中成為主成分之陶瓷係在第2混合材料中，以55~90wt%的比例而含有。然而，對於第2混合材料則包含作為陶瓷之二氧化矽的情況，係對於第2混合材料加以含有二氧化鈦亦可。 As described above, the first mixed material contains 20 to 22% by weight of alumina, and 4 to 6% by weight of cerium oxide, and the second mixed material is used as a ceramic containing cerium oxide or aluminum oxide as a catalyst. When 6.5 wt% to 8.5 wt% of vanadium pentoxide is contained, it is ensured that the equilibrium adsorption amount of acetone becomes an adsorption capacity of 16 wt% or more. As a result, it is possible to sufficiently ensure the dust removing ability and the air cleaning ability required by the clean room in the semiconductor manufacturing equipment. However, in the intensive research of the inventors of the present invention, the first mixed material contains 70% by weight or more of activated carbon, and 21% by weight of alumina, and 6% by weight of cerium oxide. In this case, the cost can be extremely effectively suppressed while ensuring good removal and cleaning ability. In addition, the ceramic which is a main component in the second mixed material is contained in the second mixed material in a ratio of 55 to 90% by weight. However, in the case where the second mixed material contains ceramic cerium oxide, titanium dioxide may be contained in the second mixed material.

(空氣清淨化裝置101之構造的詳細) (Details of the structure of the air purification device 101)

對於詳細之空氣清淨化裝置101之構成，參照圖5的同時加以說明。圖5係對應於專利文獻1之圖2。 The configuration of the detailed air cleaning device 101 will be described with reference to Fig. 5 . FIG. 5 corresponds to FIG. 2 of Patent Document 1.

在圖5所示之空氣清淨化裝置101(亦稱為分批式TSA裝置10)中，處理空氣係自處理空氣導入口1，流入至除去粒子狀污染物質之高性能過濾片(1)11，之後，歷經第1閥12，流入在吸附模式(A)系統之吸附單元(A)13A。在吸附材單元(A)13A加以吸附除去分子狀污染物質之後，成為超高純度空氣，而流入至加以設置於吸附材單元(A)13A與第2閥15之間之分配器(A)14A。然而，吸附材單元(A)13A係對應於上述之圖1乃至圖3之吸附單元101a。 In the air cleaning device 101 (also referred to as the batch type TSA device 10) shown in Fig. 5, the process air is supplied from the process air introduction port 1 to the high performance filter (1) 11 for removing particulate pollutants. Then, after passing through the first valve 12, it flows into the adsorption unit (A) 13A in the adsorption mode (A) system. After the adsorption material unit (A) 13A adsorbs and removes the molecular pollutants, it becomes ultra-high purity air, and flows into the distributor (A) 14A which is provided between the adsorption material unit (A) 13A and the second valve 15. . However, the adsorbing material unit (A) 13A corresponds to the adsorption unit 101a of Fig. 1 to Fig. 3 described above.

經由分配器(A)，而加以分歧超高純度空氣的一部分，作為再生空氣而加以使用。再生空氣係指在使傳送加熱於吸附模式結束之吸附材單元的空氣(再生空氣)而吸附之不純物脫離之工程(再生模式)中，所使用之空氣。 A part of the ultrahigh-purity air which is divided by the distributor (A) is used as the regeneration air. The reconditioning air is air used in a process (regeneration mode) for transferring the impurities (regeneration mode) in which the adsorbed material is heated (regeneration air) heated in the adsorption mode.

在分配器(A)14A中，吸附模式則為(A) 系統之情況，再生模式係成為(B)系統。在此，自(A)系統通過第2閥15而流動於超高純度空氣送出口16之超高純度空氣，和歷經再生空氣加熱部28而自第2閥15流動於(B)系統之再生空氣的流量比係成為1：1至1：0.05之範圍的特定流量比。然而，由未使用分配器，直接，使用再生空氣導入用送風機而導入大氣亦可。 In the distributor (A) 14A, the adsorption mode is (A) In the case of the system, the regeneration mode is the (B) system. Here, the ultra-high purity air flowing from the (A) system to the ultra-high-purity air delivery port 16 through the second valve 15 and the regeneration from the second valve 15 to the (B) system through the regeneration air heating unit 28 The air flow ratio is a specific flow ratio in the range of 1:1 to 1:0.05. However, it is also possible to introduce the atmosphere by using the air blower for regeneration air, without using a dispenser.

加以分歧，通過分配器(A)14A之超高純度空氣係流動在超高純度空氣導管(A)18A內，歷經第2閥15而流動在超高純度空氣送出導管19而流入至超高純度空氣送出口16。 In the ultra-high purity air duct (A) 18A, the super high-purity air duct (A) 14A flows through the second valve 15 and flows through the ultra-high purity air delivery duct 19 to flow into the ultra-high purity. Air delivery outlet 16.

吸附材單元(A)13A，吸附材單元(B)13B係吸附材之70%以上為活性碳，加以構成為蜂巢狀，但亦可為板狀或薄片狀或粒狀(錠狀)。作為活性碳，可舉出活性焦炭，石墨，碳，活性碳纖維等。然而，吸附材單元(B)13B係對應於上述之圖1乃至圖3之吸附單元101b。 70% or more of the adsorbent unit (A) 13A and the adsorbent unit (B) 13B-based adsorbent are activated carbon, and are formed in a honeycomb shape, but may be in the form of a plate or a flake or a pellet (ingot). Examples of the activated carbon include activated coke, graphite, carbon, activated carbon fiber, and the like. However, the adsorbing material unit (B) 13B corresponds to the adsorption unit 101b of Fig. 1 to Fig. 3 described above.

然而，作為空氣清淨化裝置101之第1閥12及第2閥15，係使用記載於專利第4644517號(專利文獻3)之4端口自動切換閥者為佳。 However, as the first valve 12 and the second valve 15 of the air cleaning device 101, it is preferable to use a 4-port automatic switching valve described in Patent No. 4,445,517 (Patent Document 3).

對於空氣清淨化裝置101(分批式TSA裝置10)之再生操作加以說明。圖5所示之分配器(A)14A中，吸附模式為(A)系統之情況係再生模式係成為(B)系統之故，自(A)系統通過第2閥15而流動至超高純度空氣送出口16之供給空氣，和歷經再生空氣加熱 部28而自第2閥15流動至(B)系統之再生空氣，則以1：1至1：0.05之範圍的流量比加以分配。 The regeneration operation of the air cleaning device 101 (batch type TSA device 10) will be described. In the distributor (A) 14A shown in Fig. 5, in the case where the adsorption mode is (A), the regeneration mode is the (B) system, and the (A) system flows to the ultrahigh purity through the second valve 15. The air supply port 16 supplies air and is heated by the regeneration air. The portion 28 and the regeneration air flowing from the second valve 15 to the (B) system are distributed at a flow ratio in the range of 1:1 to 1:0.05.

再生模式係由加熱時間帶與冷卻時間帶加以構成。在再生模式為加熱時間帶之情況中，由圖5之分配器(A)14A所分歧之再生空氣係歷經再生空氣3方閥20而由再生空氣送風機22加以升壓，流入至再生空氣預熱器24，回收高溫的再生空氣之所有的廢熱。經由此，再生空氣本身係自常溫加以預熱升溫至150~200℃為止。接著，再生空氣係流入至再生空氣加熱器25而加以加熱為200~250℃加以流出，自第2閥15歷經超高純度空氣導管(B)18B與分配器(B)14B而流入至吸附材單元(B)13B。 The regeneration mode consists of a heating time zone and a cooling time zone. In the case where the regeneration mode is the heating time zone, the regeneration air branched by the distributor (A) 14A of Fig. 5 is boosted by the regeneration air blower 22 through the regeneration air 3 square valve 20, and flows into the regeneration air to be warmed up. The device 24 recovers all waste heat of the high temperature regeneration air. As a result, the regeneration air itself is preheated from normal temperature to 150 to 200 ° C. Then, the regeneration air flows into the regeneration air heater 25 and is heated to 200 to 250 ° C to flow out, and flows from the second valve 15 through the ultra-high purity air duct (B) 18B and the distributor (B) 14B to the adsorption material. Unit (B) 13B.

加熱為200~250℃之再生空氣則經由流入至吸附材單元(B)13B之時，而加以加熱吸附材，在前次之循環中，(B)系統則在吸附模式時，在常溫狀態加以吸附於吸附材的氨等之污染物質則加以脫離，混入至高溫狀態之該再生空氣的氣流中。 The regeneration air heated to 200 to 250 ° C is heated to adsorb the material through the time of flowing into the adsorption material unit (B) 13B. In the previous cycle, the (B) system is in the adsorption mode and is in the normal temperature state. Contaminants such as ammonia adsorbed on the adsorbent are separated and mixed into the stream of the regeneration air at a high temperature.

再生空氣中的氨等之污染物質的濃度係與自分配器(A)14A分歧之超高純度空氣中的此等為同等。並且，將此加熱為高溫而使用於脫離之故，吸附平衡分壓係較常溫時之吸附平衡分壓為更降低。加熱為200~250℃之情況，經由熱膨脹，再生空氣之體積流量係成為常溫的清淨空氣之1.61倍至1.78倍，而對於被吸附物質之脫離必要之熱能量係當然作為流動在吸附材層中之再生空氣 量而可賦予充分的流速，而吸附材層中的分子狀污染物質係徹底地加以脫離，自吸附材單元加以排出。 The concentration of the pollutants such as ammonia in the regeneration air is equivalent to that in the ultra-high purity air which is different from the distributor (A) 14A. Further, when this is heated to a high temperature and used for detachment, the adsorption equilibrium partial pressure system is more lowered than the adsorption equilibrium partial pressure at normal temperature. When the heating is 200 to 250 ° C, the volumetric flow rate of the regeneration air is 1.61 to 1.78 times of the clean air at normal temperature via thermal expansion, and the thermal energy necessary for the removal of the adsorbed substance is of course flowing in the adsorption layer. Regeneration air A sufficient flow rate can be imparted to the amount, and the molecular pollutants in the adsorbent layer are completely removed and discharged from the adsorbent unit.

流出吸附材單元(B)13B之再生空氣係歷經第1閥12而由再生空氣預熱器24加以冷卻至60~70℃為止之同時，加以進行預熱常溫的再生空氣之熱交換，自再生空氣排出口27加以排出於排氣冷卻單元104。 The regeneration air that has flowed out of the adsorbent unit (B) 13B is cooled by the regeneration air preheater 24 to 60 to 70 ° C through the first valve 12, and is subjected to preheating and heat exchange of the regeneration air at normal temperature. The air discharge port 27 is discharged to the exhaust gas cooling unit 104.

接著，再生模式則成為冷卻時間帶時，由再生空氣送風機22所升壓之再生空氣係流動在再生空氣預熱器24與再生空氣加熱器25而自第2閥15，經由超高純度空氣導管(B)18B與分配器(B)14B而流入至吸附材單元(B)13B。在再生模式為冷卻時間帶的情況中，係因未加以通電於再生空氣加熱器25之故，流入之再生空氣係保持常溫流動在吸附材單元(B)13B，第1閥12，再生空氣預熱器24，再生空氣排出口27。當然，自加熱時間帶切換為冷卻時間帶之後，常溫的再生空氣則邊冷卻邊流動在再生空氣預熱器24，再生空氣加熱器25，第2閥25，超高純度空氣導管18B，分配器(B)14B、吸附材單元(B)13B，再生空氣預熱器24，再生空氣排出口27。 Next, when the regeneration mode is the cooling time zone, the regeneration air boosted by the regeneration air blower 22 flows through the regeneration air preheater 24 and the regeneration air heater 25 from the second valve 15 via the ultra-high purity air duct. (B) 18B and the distributor (B) 14B flow into the adsorbing material unit (B) 13B. In the case where the regeneration mode is the cooling time zone, since the regeneration air heater 25 is not energized, the inflowing regeneration air is kept flowing at the normal temperature in the adsorption material unit (B) 13B, the first valve 12, and the regeneration air is pre-charged. The heat exchanger 24 is a regeneration air discharge port 27. Of course, after the self-heating time zone is switched to the cooling time zone, the normal temperature regeneration air flows while flowing to the regeneration air preheater 24, the regeneration air heater 25, the second valve 25, the ultra-high purity air pipe 18B, the distributor. (B) 14B, the adsorbent unit (B) 13B, the regeneration air preheater 24, and the regeneration air discharge port 27.

位在吸附模式之(A)系統則切換為再生模式之時點，係作為加熱時間帶，加以通電於再生空氣加熱器25之故，再生空氣係邊加熱邊流動在超高純度空氣導管(A)18A，分配器(A)14A、吸附材單元(A)13A，再生空氣預熱器24，再生空氣排出口27。 When the (A) system in the adsorption mode is switched to the regeneration mode, it is used as a heating time zone and is energized to the regeneration air heater 25, and the regeneration air is heated while flowing in the ultra-high purity air conduit (A). 18A, distributor (A) 14A, adsorbent unit (A) 13A, regeneration air preheater 24, regeneration air discharge port 27.

吸附模式則成為(B)系統時，再生模式係成為(A)系統之故，處理空氣係流動在第1閥12，吸附材單元(B)13B而成為清淨空氣，依分配器(B)14B、第2閥15，超高純度空氣送出口16的順序流動，而在分配器(B)14B所分歧之再生空氣係依再生空氣3方閥20，再生空氣送風機22，再生空氣預熱器24，再生空氣加熱器25，第2閥15，超高純度空氣導管(A)18A，吸附材單元(A)13A，第1閥12，再生空氣預熱器24，再生空氣排出口27的順序流動，而加以處理。 When the adsorption mode is (B), the regeneration mode is (A), the process air flows through the first valve 12, and the adsorption material unit (B) 13B becomes clean air, depending on the distributor (B) 14B. The second valve 15 and the ultra-high-purity air delivery port 16 are sequentially flowed, and the regenerative air diverged in the distributor (B) 14B is a regenerative air 3 square valve 20, a regenerative air blower 22, and a reconditioning air preheater 24 The regenerative air heater 25, the second valve 15, the ultra-high purity air duct (A) 18A, the adsorbent unit (A) 13A, the first valve 12, the regeneration air preheater 24, and the reconditioning air discharge port 27 flow sequentially And deal with it.

(空氣調和裝置102之構造的詳細) (Details of the construction of the air blending device 102)

空氣調和裝置102之構成係與專利文獻2所記載之產業用空調裝置之構成為同一。以下，實質上轉載專利文獻2之內容。 The configuration of the air conditioner 102 is the same as the configuration of the industrial air conditioner described in Patent Document 2. Hereinafter, the contents of Patent Document 2 are substantially reproduced.

經由圖6所示之實施例而說明空氣調和裝置102之構成時，此空氣調和裝置102之冷凍循環係由壓縮機14，油分離器16，凝縮器17，電子膨脹閥18，蓄壓器13加以構成，將此等以配管而連接，循環冷媒而使其形成。冷卻除濕器1係加以配設‧收納於導管上流側之引進空氣導入口22a側，加熱器2，加熱器發熱裝置3，加濕器4，加濕器發熱裝置5亦加以配設‧收納於位置於前述冷卻除濕器1之下流側的導管22中，而送風機11係加濕機4之下流側的導管22則成為其吸入口11a，吐出口11b係與排出調整後之供給空氣的導管下流側之供給空氣排出 口22b連接。 When the configuration of the air conditioner 102 is explained via the embodiment shown in FIG. 6, the refrigeration cycle of the air conditioner 102 is composed of a compressor 14, an oil separator 16, a condenser 17, an electronic expansion valve 18, and an accumulator 13. In the configuration, these are connected by piping, and the refrigerant is circulated and formed. The cooling dehumidifier 1 is disposed and disposed on the side of the inlet air introduction port 22a on the upstream side of the conduit, the heater 2, the heater heating device 3, the humidifier 4, and the humidifier heating device 5 are also disposed. The duct 22 is located in the duct 22 on the lower side of the cooling dehumidifier 1, and the duct 22 on the lower side of the blower 11 is the suction port 11a, and the discharge port 11b is connected to the conduit for discharging the adjusted supply air. Side supply air discharge Port 22b is connected.

引進空氣係如圖6左側之箭頭所示地，加以導入至導管上流側之引進空氣導入口22a內，而在流入至冷卻除濕器1為止之間，經由引進空氣流速感測器34，引進空氣溫度感測器35，引進空氣關係濕度感測器36，加以計測各引進空氣之流速乃至流量，溫度，關係濕度。另一方面，同時，供給空氣係在至送風機11之吐出口11b與供給空氣排出口22b為止之導管下流側內，經由供給空氣溫度感測器8，供給空氣關係濕度感測器6，供給空氣靜壓感測器28，計測各供給空氣的溫度，關係濕度，而輸入至演算手段26。另外，在加以設置有空氣調和裝置102之場所的環境之全壓力係經由設置於空氣調和裝置102之外表面的壓力感測器33而加以計測，輸入至前述演算手段26。 The introduction air is introduced into the introduction air introduction port 22a on the upstream side of the duct as indicated by the arrow on the left side of FIG. 6, and the air is introduced into the cooling dehumidifier 1 via the introduction air flow rate sensor 34. The temperature sensor 35 introduces an air relationship humidity sensor 36 to measure the flow rate of each introduced air and even the flow rate, temperature, and humidity. On the other hand, at the same time, the supply air is supplied to the downstream side of the duct to the discharge port 11b of the blower 11 and the supply air discharge port 22b, and the air-temperature sensor 6 is supplied via the supply air temperature sensor 8, and the air is supplied. The static pressure sensor 28 measures the temperature of each supply air and the humidity, and inputs it to the calculation means 26. Further, the total pressure of the environment in which the air conditioning device 102 is installed is measured via the pressure sensor 33 provided on the outer surface of the air conditioning device 102, and is input to the calculation means 26.

使用所輸入之各種的計測值，經由演算手段26而演算各種值，更且，使用(1)引進空氣的水分量：M1X1/(1+X1)[kg(水)/h]、(2)供給空氣的水分量：M2X2/(1+X2)[kg(水)/h]、(3)引進空氣的溫度：T1[℃]、(4)供給空氣的溫度：T2[℃]、(5)加熱後之空氣的溫度：tA[℃]，演算(X)M1X1/(1+X1)與M2X2/(1+X2)之大小、和(Y)T1與T2-△t之大小。(Z)T1<T2-△t之情況係更加地，演算T1與tA的大小。在此，M1[kg(潮濕空氣)/h]係引進空氣的質量流量、X1[kg(水)/kg(乾燥空氣)]係引進空氣的絶對濕度、M2[kg (潮濕空氣)/h]係供給空氣的質量流量、X2[kg(水)/kg(乾燥空氣)]係供給空氣的絶對濕度。另外，△t係經由安裝於空氣調和裝置之送風機11的使用條件而決定的值，而預先測定值則內藏於前述演算手段中。另外，tA與T2-△t之溫度差係經由加熱器2的性能而決定的值，預先測定值則內藏於前述演算手段中。 Using the various measured values input, various values are calculated by the calculation means 26, and (1) the amount of air introduced into the air is used: M 1 X 1 /(1+X 1 )[kg(水)/h] (2) The amount of water supplied to the air: M 2 X 2 /(1+X 2 )[kg(water)/h], (3) Temperature of the introduced air: T 1 [°C], (4) Air supply Temperature: T 2 [°C], (5) Temperature of heated air: t A [°C], calculation (X) M 1 X 1 /(1+X 1 ) and M 2 X 2 /(1+X 2 The size of the sum, and the magnitude of (Y)T 1 and T 2 -Δt. In the case of (Z) T 1 <T 2 -Δt, the magnitudes of T 1 and t A are calculated more. Here, M 1 [kg (humid air) / h] is the mass flow rate of the introduced air, X 1 [kg (water) / kg (dry air)] is the absolute humidity of the introduced air, M 2 [kg (wet air) /h] is the mass flow rate of the supplied air, X 2 [kg (water) / kg (dry air)] is the absolute humidity of the supplied air. Further, Δt is a value determined by the use condition of the blower 11 attached to the air conditioner, and the previously measured value is included in the calculation means. Further, the temperature difference between t A and T 2 -Δt is a value determined by the performance of the heater 2, and the previously measured value is included in the above calculation means.

從此等之演算結果，引進空氣條件與供給空氣條件的組合係可分類成表4所示之1~5的5種類。另外，消耗能量之處係可分類成表4所示之I~IV。對於各例子，使變換(A)必要之冷卻除濕溫度，(B)必要之冷卻除濕熱量，(C)必要之冷媒蒸發溫度，(D)必要之加熱熱量，(E)必要之加濕熱量的演算值的控制信號輸出，將各控制信號，輸入至壓縮機‧馬達用換流器32，和送風機馬達用換流器31，和電子膨脹閥控制器19，而控制各壓縮機‧馬達15之旋轉數，送風機馬達12之旋轉數，電子膨脹閥18之開度。 From the calculation results of these calculations, the combination of the introduced air conditions and the supplied air conditions can be classified into five types of 1 to 5 shown in Table 4. In addition, the energy consumption can be classified into I to IV shown in Table 4. For each example, the transformation (A) necessary cooling dehumidification temperature, (B) necessary cooling dehumidification heat, (C) necessary refrigerant evaporation temperature, (D) necessary heating heat, (E) necessary humidification heat The control signal output of the calculation value is input to the compressor ‧ motor inverter 32, the blower motor inverter 31, and the electronic expansion valve controller 19, and controls each compressor ‧ motor 15 The number of rotations, the number of rotations of the blower motor 12, and the opening degree of the electronic expansion valve 18.

與將流入至冷卻除濕器1之空氣冷卻至必要的溫度為止同時，因成為經由熱交換而賦予相當於特定的除濕量之熱量於冷媒情況之故，可使在前述冷卻除濕器1中欲除濕之水分量凝縮，而成為可分離。是否可冷卻至必要的溫度為止係使用除濕後空氣溫度感測器23而檢測。 At the same time, the air flowing into the cooling dehumidifier 1 is cooled to a required temperature, and the heat corresponding to the specific dehumidification amount is supplied to the refrigerant via heat exchange, so that the dehumidifier 1 can be dehumidified. The amount of water condenses and becomes separable. Whether or not the temperature can be cooled to a necessary temperature is detected by using the dehumidified air temperature sensor 23.

更且，流出前述冷卻除濕器1，而流入至加熱器2之空氣係由設置於供給空氣排出口22b附近的供給空氣溫度感測器8而檢測，而輸入至演算手段26。經由自該供給空氣溫度感測器8，和該演算手段26，和加熱器發熱裝置3，和加熱器溫度控制器9構成之控制系統，呈成為必要之加熱溫度：tA[℃]地，控制施加於加熱器發熱裝置3之電性量。是否成為必要之加熱溫度係使用加熱後空氣溫度感測器24而檢測。 Further, the cooling dehumidifier 1 flows out, and the air that has flowed into the heater 2 is detected by the supply air temperature sensor 8 provided in the vicinity of the supply air discharge port 22b, and is input to the calculation means 26. The control system constituted by the supply air temperature sensor 8, the calculation means 26, the heater heat generating means 3, and the heater temperature controller 9 is in a necessary heating temperature: t A [° C], The amount of electrical energy applied to the heater heat generating device 3 is controlled. Whether or not the heating temperature is necessary is detected using the heated air temperature sensor 24.

流入至加濕機4之空氣係由設置於供給空氣排出口22b附近的供給空氣關係濕度感測器6而檢測，再輸入至前述演算手段26。經由自該供給空氣關係濕度感測器6，和演算手段26，和加濕器發熱裝置5，和加濕器溫度控制器7構成之控制系統，呈使必要之加濕水分量蒸發‧氣化地，控制施加於加濕器發熱裝置5之電性量。必要之加濕水分量則是否蒸發‧氣化係使用設置於加濕器4內之加濕器溫度感測器25而檢測。流出加濕器4而流入至送風機11之吸入口11a的空氣係由該送風機11進行升壓，歷經吐出口11b而流動在連接至該空氣調和裝置102之排出口為止之導管22內，從排出口22b加以排出而加 以供給至使用點。 The air that has flowed into the humidifier 4 is detected by the supply air relationship humidity sensor 6 provided in the vicinity of the supply air discharge port 22b, and is input to the above-described calculation means 26. The control system formed by the supply air relationship humidity sensor 6, and the calculation means 26, and the humidifier heating device 5, and the humidifier temperature controller 7 is configured to evaporate the necessary humidification water content. Ground, the amount of electrical energy applied to the humidifier heating device 5 is controlled. Whether or not the necessary amount of humidified water evaporates is used. ‧ Gasification is detected using a humidifier temperature sensor 25 provided in the humidifier 4. The air that has flowed out of the humidifier 4 and flows into the suction port 11a of the blower 11 is boosted by the blower 11, and flows through the discharge port 11b and flows into the duct 22 connected to the discharge port of the air conditioner 102. Exit 22b is discharged and added To supply to the point of use.

圖7係顯示在空氣調和裝置之其他的實施例之構成圖。此圖7之空氣調和裝置之冷凍循環係基本上，由和圖6之裝置同樣的機器加以構成，另外，以同樣的配管而加以連接，使冷媒循環。在此空氣調和裝置中，在使導入引進空氣的導管22，在較冷卻除濕器1之流入口為上流位置中，分歧為主流導管39與副流導管40，將引進空氣，在導管22之上流側，呈流動於各導管39，40內地構成的點為不同。 Fig. 7 is a view showing the configuration of another embodiment of the air blending device. The refrigeration cycle of the air conditioning apparatus of Fig. 7 is basically constituted by the same apparatus as that of the apparatus of Fig. 6, and is connected by the same piping to circulate the refrigerant. In this air conditioning apparatus, the duct 22 for introducing the introduced air is divided into the main duct 39 and the sub-flow duct 40 in the upstream position of the inlet of the cooler dehumidifier 1, and air is introduced to flow over the duct 22. The side is different in the point formed by flowing in each of the ducts 39, 40.

對於主流導管39內係加以配置有冷卻除濕器1，但該主流導管39係在前述冷卻除濕器1之流出口與加熱器2之流入口的中間位置中，呈與使前述冷卻除濕器1迂迴之副流導管40之下流端合體地加以構成。引進空氣係如圖7左側的箭頭所示，在加以導入至引進空氣導入口22a內之時點，經由引進空氣流速感測器34，引進空氣溫度感測器35，引進空氣關係濕度感測器36，加以計測各空氣的流速，溫度，關係濕度之後，分歧流入於主流導管39與副流導管40內。 A cooling dehumidifier 1 is disposed in the main conduit 39, but the main flow conduit 39 is in the middle of the flow outlet of the cooling dehumidifier 1 and the inlet of the heater 2, and the cooling dehumidifier 1 is returned. The lower end of the secondary flow conduit 40 is configured to be combined. The introduction air is shown in the arrow on the left side of FIG. 7, and when it is introduced into the introduction air introduction port 22a, the air temperature sensor 35 is introduced via the introduction air flow rate sensor 34, and the air relationship humidity sensor 36 is introduced. After measuring the flow rate of each air, the temperature, and the relationship humidity, the difference flows into the main flow conduit 39 and the auxiliary flow conduit 40.

流動在主流導管39內之空氣係在引進空氣導入口22a中，經由引進空氣流速感測器34，引進空氣溫度感測器35，引進空氣關係濕度感測器36，加以計測各引進空氣的流速乃至流量，溫度，關係濕度之後，流入至冷卻除濕器1。另外，流入至副流導管40內之引進空氣係經由副流導管流速感測器41，加以計測流動在副流導 管40內之空氣的流速乃至流量，而流動在主流導管39及副流導管40內之空氣的流速乃至流量的計測值則加以輸入至演算手段26。另外，在至送風機11之吐出口11b與供給空氣排出口22b為止的導管22內，供給空氣係經由供給空氣溫度感測器8與供給空氣關係濕度感測器6，計測溫度，關係濕度，而輸入至前述演算手段26。然而，環境的全壓力係使用設置於本空氣調和裝置之外表面的壓力感測器33而計測，輸入計測值於演算手段26。 The air flowing in the main flow duct 39 is introduced into the air introduction port 22a, and the air temperature sensor 35 is introduced via the introduction air flow rate sensor 34, and the air relationship humidity sensor 36 is introduced to measure the flow rate of each introduced air. Even after the flow rate, temperature, and humidity, it flows into the cooling dehumidifier 1. In addition, the introduced air flowing into the secondary flow conduit 40 is measured by the secondary flow conduit flow sensor 41, and the flow is measured in the secondary flow conductance. The flow rate of the air in the tube 40 is even a flow rate, and the measured value of the flow rate or flow rate of the air flowing in the main flow conduit 39 and the auxiliary flow conduit 40 is input to the calculation means 26. Further, in the duct 22 to the discharge port 11b of the blower 11 and the supply air discharge port 22b, the supply air is measured by the supply air temperature sensor 8 and the supply air relationship humidity sensor 6, and the temperature and the humidity are measured. It is input to the aforementioned calculation means 26. However, the total pressure of the environment is measured using the pressure sensor 33 provided on the outer surface of the air conditioning apparatus, and the measured value is input to the calculation means 26.

使用所輸入之各種的計測值，經由演算手段26而演算各種值，更且，使用(1)引進空氣的水分量：M1X1/(1+X1)[kg(水)/h]、(2)供給空氣的水分量：M2X2/(1+X2)[kg(水)/h]、(3)引進空氣的溫度：T1[℃]、(4)供給空氣的溫度：T2[℃]、(5)加熱後之空氣的溫度：tA[℃]，演算(X)M1X1/(1+X1)與M2X2/(1+X2)之大小、和(Y)T1與T2-△t之大小，以及(Z)T1<T2-△t之情況係更且，演算T1與tA之大小者係與圖6之實施例的情況相同。 Using the various measured values input, various values are calculated by the calculation means 26, and (1) the amount of air introduced into the air is used: M 1 X 1 /(1+X 1 )[kg(水)/h] (2) The amount of water supplied to the air: M 2 X 2 /(1+X 2 )[kg(water)/h], (3) Temperature of the introduced air: T 1 [°C], (4) Air supply Temperature: T 2 [°C], (5) Temperature of heated air: t A [°C], calculation (X) M 1 X 1 /(1+X 1 ) and M 2 X 2 /(1+X 2 And the size of (Y)T 1 and T 2 -Δt, and (Z)T 1 <T 2 -Δt are more, and the magnitude of T 1 and t A is calculated and FIG. 6 The same is true for the embodiment.

更且，從演算結果，將引進空氣條件與供給空氣條件的組合，表4之1~5的5種類，另外，消耗能量之處係經由表4之I~IV而各自分類，而對於各例子，使變換(A)必要之冷卻除濕溫度，(B)必要之冷卻除濕熱量，(C)必要之冷媒蒸發溫度，(D)必要之加熱熱量，(E)必要之加濕熱量的演算值的控制信號輸出，將各控制信號，輸入至壓縮機‧馬達用換流器32，和送 風機馬達用換流器31，和電子膨脹閥控制器19，而控制各壓縮機‧馬達15之旋轉數，送風機馬達12之旋轉數，電子膨脹閥18之開度者，亦與實施例1之情況相同。 Furthermore, from the calculation results, the combination of the air condition and the supply air condition will be introduced, and the five types of 1-4 of Table 4, and the energy consumption are classified by I to IV of Table 4, and for each example, , to change (A) the necessary cooling dehumidification temperature, (B) necessary cooling dehumidification heat, (C) necessary refrigerant evaporation temperature, (D) necessary heating heat, (E) necessary humidification calorie calculation value Control signal output, input each control signal to the compressor ‧ motor inverter 32, and send The fan motor inverter 31 and the electronic expansion valve controller 19 control the number of rotations of the compressors ‧ the motor 15 , the number of rotations of the blower motor 12 , and the opening of the electronic expansion valve 18 , and the embodiment 1 The situation is the same.

然而，使在主流導管39內而流入至冷卻除濕器1之空氣冷卻至必要的溫度為止，同時，由經由熱交換而賦予相當於特定的除濕量之熱量於冷媒者，可使在前述冷卻除濕器1中欲除濕之水分量凝縮，而可作為分離者，另外，使用除濕後空氣溫度感測器23而檢測是否冷卻至必要之溫度為止者，亦與前述實施例為相同。 However, the air flowing into the cooling dehumidifier 1 in the main flow conduit 39 is cooled to a necessary temperature, and at the same time, by supplying heat corresponding to a specific dehumidification amount to the refrigerant via heat exchange, the above-described cooling and dehumidification can be performed. The amount of water to be dehumidified in the device 1 is condensed, and it can be used as a separator, and the air temperature sensor 23 after dehumidification is used to detect whether or not the temperature is cooled to a necessary temperature, which is the same as in the above embodiment.

更且，流出冷卻除濕器1，而與在下流，流動在副流導管40內之空氣合流的空氣，係流入至加熱器2，但由此時設置於供給空氣排出口22b附近的供給空氣溫度感測器8而檢測，而輸入至演算手段26。將經由自該供給空氣溫度感測器8，和該演算手段26，和加熱器發熱裝置3，和加熱器溫度控制器9構成之控制系統，將流入至加熱器2之空氣，呈成為必要之加熱溫度：tA[℃]地，控制施加於加熱器發熱裝置5之電性量者，及是否成為必要之加熱溫度，使用加熱後空氣溫度感測器24而檢側者，均以前述實施例為相同。 Further, the cooling dehumidifier 1 flows out, and the air which flows in the downstream flow and flows in the auxiliary flow duct 40 flows into the heater 2, but the supply air temperature which is disposed in the vicinity of the supply air discharge port 22b at this time The sensor 8 detects and inputs to the calculation means 26. It is necessary to control the air flowing into the heater 2 via the control system constituted by the supply air temperature sensor 8, the calculation means 26, the heater heat generating means 3, and the heater temperature controller 9. Heating temperature: t A [°C], controlling the electrical quantity applied to the heater heat generating device 5, and whether or not the heating temperature is necessary, and using the heated air temperature sensor 24 to detect the side, the above-mentioned implementation The example is the same.

流入至加濕器4之空氣係由設置於供給空氣排出口22b附近的供給空氣關係濕度感測器6而檢測，再輸入至演算手段26。經由自該供給空氣關係濕度感測器6，和該演算手段26，和加濕器發熱裝置5，和加濕器溫度控制器7加以構成之控制系統，呈使必要之加濕水分量 蒸發‧氣化地，控制施加於加濕器發熱裝置5之電性量者，以及，將必要之加濕水分量則是否蒸發‧氣化，使用設置於加濕器4內之加濕器溫度感測器25而檢測者，亦與前述實施例相同。 The air that has flowed into the humidifier 4 is detected by the supply air relationship humidity sensor 6 provided in the vicinity of the supply air discharge port 22b, and is input to the calculation means 26. The control system constituted by the supply air relationship humidity sensor 6, and the calculation means 26, and the humidifier heating device 5, and the humidifier temperature controller 7 is made to have the necessary humidification water content. Evaporation ‧ gasification, control of the electrical quantity applied to the humidifier heating device 5, and whether or not the necessary humidified water content is evaporated ‧ gasification, using the humidifier temperature set in the humidifier 4 The sensor 25 and the detector are also the same as the previous embodiment.

接著，說明將經由在空氣體調和裝置之各計測手段而所得到之數值為基礎之演算方法時，經由前述各計測手段，(1)環境之全壓力(通常係大氣壓)，(2)引進空氣之流速乃至流量或送風機全壓，(3)引進空氣的溫度，(4)引進空氣的關係濕度係可隨時計測，更且，(5)供給空氣的溫度，(6)供給空氣之關係濕度，(7)供給空氣的靜壓係可隨時設定之故，將此等地值輸入至演算手段，求得引進空氣之質量流量：M1[kg(潮濕空氣)/h]、絕對濕度：X1[kg(水)/kg(乾燥空氣)]、與潮濕空氣之熱含量(以下稱為「熱含量」)：i1[kJ/kg(乾燥空氣)]調整之供給空氣之質量流量：M2[kg(潮濕空氣)/h]、絕對濕度：X2[kg(水)/kg(乾燥空氣)]、熱含量：i2[kJ/kg(乾燥空氣)]。 Next, when the calculation method based on the numerical values obtained by the respective measuring means of the air-conditioning apparatus is described, (1) the total pressure of the environment (normally atmospheric pressure) and (2) the introduction of air through the respective measuring means. The flow rate or even the flow rate or the total pressure of the blower, (3) the temperature of the introduced air, (4) the relationship between the incoming air and the humidity can be measured at any time, and (5) the temperature of the supplied air, (6) the humidity of the supplied air, (7) The static pressure of the supplied air can be set at any time, and the ground value is input to the calculation means to obtain the mass flow rate of the introduced air: M 1 [kg (wet air) / h], absolute humidity: X 1 [kg (water) / kg (dry air)], heat content with humid air (hereinafter referred to as "heat content"): i 1 [kJ / kg (dry air)] adjusted mass flow of supply air: M 2 [kg (wet air) / h], absolute humidity: X 2 [kg (water) / kg (dry air)], heat content: i 2 [kJ / kg (dry air)].

此等數值係經由氣象條件而完全考慮而加以算出的的值。因經由空氣調和裝置，而安裝流速乃至流量感測器者則由困難之情況之故，而如使該送風機之全壓對風量的關係預先內藏於演算手段中時，經由算定在此時刻之該送風機之全壓之時，可得到風量，即流量。在本發明中，係未停止於前述之數值的算出，而經由前述演算手段而進行以下的演算。 These values are values calculated by considering the meteorological conditions. It is difficult to install the flow rate or even the flow sensor through the air conditioning device, and if the relationship between the total pressure and the air volume of the blower is pre-incorporated in the calculation means, it is determined at this time. When the blower is fully pressurized, the air volume, that is, the flow rate can be obtained. In the present invention, the calculation of the numerical value described above is not stopped, and the following calculation is performed via the above-described calculation means.

[1]引進空氣的水分量則較調整之供給空氣的水分量為多，且引進空氣的溫度T1[℃]則為在供給空氣的送風機吸入口之溫度T2-△t[℃]以上之情況，即M1X1/(1+X1)≧M2X2/(1+X2)，且T1≧T2-△t之情況係呈為冷卻除濕，經由以下記述之(1)式，使用演算手段而演算必要之除濕量：△W[kg(水)/h]。△t[℃]係為了經由送風機而斷熱壓縮空氣而產生的溫度上升，經由送風機之使用條件而決定的值。預先，此等測定值係內藏於前述演算手段中。並且，△W係表示必要之除濕量之故，在(1)式中，△W≧0之情況，無須加濕的必要。 [1] The amount of water introduced into the air is greater than the amount of water supplied to the supplied air, and the temperature T 1 of the introduced air is ° 2 ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° ° In the case where M 1 X 1 /(1+X 1 )≧M 2 X 2 /(1+X 2 ), and T 1 ≧T 2 -Δt is cooled and dehumidified, it is described below ( 1), using the calculation method to calculate the necessary amount of dehumidification: △ W [kg (water) / h]. Δt [°C] is a value determined by the use condition of the blower in order to increase the temperature rise of the compressed air by the blower. In advance, these measured values are included in the aforementioned calculation means. Further, ΔW indicates the amount of dehumidification required, and in the case of ΔW ≧ 0 in the formula (1), it is not necessary to humidify.

△W=M1 X1/(1+X1)-M2 X2/(1+X2)‧‧‧‧‧(1) △W=M 1 X 1 /(1+X 1 )-M 2 X 2 /(1+X 2 )‧‧‧‧‧(1)

接著，經由(2)式而演算在冷卻除濕器出口之空氣的絕對濕度：XC[kg(水)/kg(乾燥空氣)]。 Next, the absolute humidity of the air at the outlet of the cooling dehumidifier is calculated by the formula (2): X C [kg (water) / kg (dry air)].

XC=M2 X2/[(M1-△W)(1+X2)-M2 X2]‧‧‧(2) X C =M 2 X 2 /[(M 1 -ΔW)(1+X 2 )-M 2 X 2 ]‧‧‧(2)

更且，經由(3)式而演算在冷卻除濕器出口之空氣中的水蒸氣壓：p[kPa]，接著，在(4)式，演算必要之冷卻除濕溫度，即在冷卻除濕器出口之空氣的溫度：TC[℃]。 Further, the water vapor pressure in the air at the outlet of the cooling dehumidifier is calculated by the formula (3): p [kPa], and then, in the formula (4), the necessary cooling and dehumidifying temperature is calculated, that is, at the outlet of the cooling dehumidifier Air temperature: T C [°C].

pC=πXC/(0.62202+XC)‧‧‧‧‧‧‧‧‧‧‧‧(3) p C =πX C /(0.62202+X C )‧‧‧‧‧‧‧‧‧‧‧ (3)

TC=f-1(pC)‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧(4) T C =f -1 (p C )‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧ (4)

在此，π[kPa]係環境的全壓力，pC[kPa]係在溫度：TC[℃]之飽和水蒸氣壓。pC與TC之關數關係係pC=f(TC)係內藏於演算手段中。(4)式係PC=f(TC)之逆函數。 Here, the total pressure of the π [kPa] system environment, p C [kPa] is the saturated water vapor pressure at a temperature of T C [° C.]. The relationship between the relationship between p C and T C is that p C =f(T C ) is embedded in the calculation method. (4) The inverse of the equation P C =f(T C ).

接著，求取在冷卻除濕器出口之空氣的熱含量：iC[kJ/kg(乾燥空氣)]以(5)式演算必要之冷却除濕熱量、即、冷却除濕熱負荷量：Q1[kJ/h]。 Next, determine the heat content of the air at the outlet of the cooling dehumidifier: i C [kJ/kg (dry air)] Calculate the necessary cooling and dehumidifying heat by the formula (5), that is, cool the dehumidifying heat load: Q 1 [kJ /h].

Q1=M1 i1/(1+X1)-(M1-△W)iC/(1+XC)‧‧‧‧(5) Q 1 =M 1 i 1 /(1+X 1 )-(M 1 -ΔW)i C /(1+X C )‧‧‧‧(5)

如使用Q1時，可決定必要之冷媒循環量，更且，可決定壓縮機‧馬達15之旋轉數之故，無需消耗過剩的能量。即，呈為可省電力化者。 When Q 1 is used, the amount of refrigerant circulation required can be determined, and the number of rotations of the compressor ‧ the motor 15 can be determined without consuming excessive energy. That is, it is considered to be a power-saving person.

此情況，為△W≧0、且、成為TC<T2-△t之故，有加熱的必要，但無須加濕之必要。即，為了加濕之電力係可消耗電力化。 In this case, ΔW ≧ 0 and T C < T 2 - Δt are necessary for heating, but it is not necessary to humidify. That is, the power for humidification can consume power.

必要之冷媒之蒸發溫度：TR[℃]係經由(6)式而求得。 The evaporation temperature of the necessary refrigerant: T R [°C] is obtained by the formula (6).

TR=[T1-TC exp{(S/Q1)(T1-TC)}〕/[1-exp{(S/Q1)(T1-TC)}]‧‧(6) T R =[T 1 -T C exp{(S/Q 1 )(T 1 -T C )}]/[1-exp{(S/Q 1 )(T 1 -T C )}]‧‧( 6)

該(6)式中、S[kJ/h‧℃]係經由冷卻除濕器而訂定之常數，預先，測定值則內藏於前述演算手段中。引進空 氣的溫度T1[℃]係測定值，在冷卻除濕器出口之空氣的溫度：TC[℃]係經由前述(4)式之算出值，必要之冷卻除濕熱量：Q1[kJ/h]係經由前述(5)式之算出值。另外，如前述，tA與T2-△t之溫度差係預先，測定值則內藏於前述演算手段中。 In the formula (6), S[kJ/h‧°C] is a constant set by the cooling dehumidifier, and the measured value is incorporated in the calculation means in advance. The temperature of the introduced air T 1 [°C] is the measured value, and the temperature of the air that cools the outlet of the dehumidifier: T C [°C] is the calculated value of the above formula (4), and the necessary cooling and dehumidification heat: Q 1 [kJ/ h] is the calculated value of the above formula (5). Further, as described above, the temperature difference between t A and T 2 -Δt is in advance, and the measured value is included in the above calculation means.

[2]接著，引進空氣的水分量則較調整之供給空氣的水分量為多，且引進空氣的溫度T1[℃]則為較在供給空氣的送風機吸入口之溫度T2-△t[℃]為低之情況，即M1X1/(1+X1)≧M2X2/(1+X2)，且T1<T2-△t之情況係成為冷卻除濕。並且，經由前述(1)式，演算必要之除濕量：△W[kg(水)/h]。 [2] Next, the water supply amount of air to the amount of moisture introduced air are more adjustments as much, and the introduction of the air temperature T 1 [℃] was compared with the blower supplies air intake temperature the mouth of the T 2 - △ t [ When °C] is low, that is, M 1 X 1 /(1+X 1 )≧M 2 X 2 /(1+X 2 ), and T 1 <T 2 -Δt is the case of cooling and dehumidification. Then, the necessary dehumidification amount is calculated by the above formula (1): ΔW [kg (water) / h].

由如此作為，加以決定T1、T2、TC、tA、X1、X2、XC、△W的值之故，可演算在冷卻除濕器入口之含熱量：i1[kJ/kg(乾燥空氣)]、在冷卻除濕器出口之含熱量：iC[kJ/kg(乾燥空氣)]、在加熱器出口之含熱量：iA[kJ/kg(乾燥空氣)]：在加濕器出口之含熱量：i3[kJ/kg(乾燥空氣)]，隨之，可演算必要之冷卻除濕熱量：Q1[kJ/h]，對於空氣的冷卻必要之熱量：Q11[kJ/h]、對於水分之凝縮必要之熱量：Q12[kJ/h]、必要之加熱熱量：Q2[kJ/h]、必要之加濕熱量：Q3[kJ/h]。然而，前述[1]之情況，未有加濕的必要之故，成為△W=0，而成為Q3=0。 By doing so, the values of T 1 , T 2 , T C , t A , X 1 , X 2 , X C , and ΔW are determined, and the heat content at the inlet of the cooling dehumidifier can be calculated: i 1 [kJ/ Kg (dry air)], heat at the outlet of the cooling dehumidifier: i C [kJ/kg (dry air)], heat at the heater outlet: i A [kJ/kg (dry air)]: in addition Heat content at the outlet of the wetter: i 3 [kJ/kg (dry air)], along with the necessary cooling and dehumidification heat: Q 1 [kJ/h], the heat necessary for the cooling of the air: Q 11 [kJ /h], the heat necessary for moisture condensation: Q 12 [kJ / h], necessary heating heat: Q 2 [kJ / h], necessary humidification heat: Q 3 [kJ / h]. However, in the case of the above [1], if it is not necessary for humidification, ΔW = 0 and Q 3 = 0.

接著，經由(2)式而演算在冷卻除濕器出口之空氣的絕對濕度：XC[kg(水)/kg(乾燥空氣)]。接 著，經由(3)式，演算在冷卻除濕器出口之空氣中的水蒸氣分壓：pC[kPa]，更且，在前述(4)式，演算必要之冷卻除濕溫度：TC[℃]，接著，求得在冷卻除濕器出口之空氣的含熱量：iC[kJ/kg(乾燥空氣)]之後，將必要之冷卻除濕熱量，即，在冷卻除濕之熱負荷量：Q1[kJ/h]，以前述(5)式加以演算。此情況，為△W≧0、且、成為TC<T2-△t之故，有加熱的必要，但未有加濕之必要。即，為了加濕之電力係無須，而可省電力化。並且，與前述同樣，加以賦予S、T1、TC、Q1之故，必要之冷媒溫度：TR[℃]係可以前述(6)式而演算。 Next, the absolute humidity of the air at the outlet of the cooling dehumidifier is calculated by the formula (2): X C [kg (water) / kg (dry air)]. Next, the partial pressure of water vapor in the air at the outlet of the dehumidifier is calculated by the formula (3): p C [kPa], and further, in the above formula (4), the necessary cooling and dehumidifying temperature is calculated: T C [°C ], and then, after cooling the heat of the air at the outlet of the dehumidifier: i C [kJ/kg (dry air)], the necessary cooling and dehumidification heat, that is, the heat load during cooling and dehumidification: Q 1 [ kJ/h] is calculated by the above formula (5). In this case, ΔW ≧ 0 and T C < T 2 - Δt are necessary for heating, but there is no need for humidification. That is, the power for humidification is not required, and power can be saved. Further, in the same manner as described above, S, T 1 , T C , and Q 1 are added , and the necessary refrigerant temperature: T R [° C.] can be calculated by the above formula (6).

以下，由同樣作為，對於[3]引進空氣的水分量則較調整之供給空氣的水分量為少，且引進空氣的溫度：T1[℃]則較在供給空氣之送風機吸入口的溫度T2-△t[℃]為高之情況，即，M1X1/(1+X1)<M2X2/(1+X2)，且T1≧T2-△t之情況，及[4]引進空氣的水分量則較調整之供給空氣的水分量為少，且引進空氣的溫度：T1[℃]則較在供給空氣之送風機吸入口的溫度T2-△t[℃]為低之情況，即，M1X1/(1+X1)<M2X2/(1+X2)，且T1<T2-△t、且、T1≦tA之情況、更且，[5]引進空氣的水分量則較調整之供給空氣的水分量為少，且引進空氣的溫度：T1[℃]則較在供給空氣之送風機吸入口的溫度T2-△t[℃]為低之情況，即，M1X1/(1+X1)<M2X2/(1+X2)，且T1<T2-△t、且、T1>tA之情況進行演算，控制各機器。 Hereinafter, the same is true, the amount of water introduced into the air in [3] is less than the amount of water supplied to the air, and the temperature of the introduced air: T 1 [°C] is higher than the temperature T of the suction port of the blower supplying air. 2 - Δt [°C] is high, that is, M 1 X 1 /(1+X 1 )<M 2 X 2 /(1+X 2 ), and T 1 ≧T 2 -Δt, And [4] the amount of water introduced into the air is less than the amount of water supplied to the supplied air, and the temperature of the introduced air: T 1 [°C] is higher than the temperature of the suction port of the blower supplying air T 2 -Δt [°C ] is low, that is, M 1 X 1 /(1+X 1 )<M 2 X 2 /(1+X 2 ), and T 1 <T 2 -Δt, and T 1 ≦t A In the case, moreover, [5] the amount of water introduced into the air is less than the amount of water supplied to the supplied air, and the temperature of the introduced air: T 1 [°C] is higher than the temperature T 2 of the suction port of the blower supplying air. Δt[°C] is low, that is, M 1 X 1 /(1+X 1 )<M 2 X 2 /(1+X 2 ), and T 1 <T 2 -Δt, and, T 1 In the case of >t A, the calculation is performed to control each machine.

Claims (2)

一種空氣清淨化系統，係具備：具有可再生吸附能力之2系統的吸附單元，成為呈一方的吸附單元在吸附處理空氣內之污染物質時，加以再生另一方之吸附單元的吸附能力之吸附式的空氣清淨化裝置，和控制經由前述空氣清淨化裝置而加以清淨化之空氣的溫度及濕度之空氣調和裝置，和加以供給經由前述空氣調和裝置而加以控制溫度及濕度之空氣的HEPA裝置之空氣清淨化系統，其特徵為前述空氣清淨化裝置之前述吸附單元之吸附材係含有將活性碳作為主成分之55wt%的第1混合材料，和將主成分作為陶瓷之45wt%的第2混合材料，對於前述第1混合材料係包含有70wt%以上的活性碳、和20~22wt%之氧化鋁、和4~6wt%之二氧化矽，第2混合材料係作為前述陶瓷，包含55~90wt%之二氧化矽或氧化鋁，且作為觸媒，包含6.5wt%~8.5wt%之五氧化二釩，前述陶瓷係載持前述五氧化二釩，前述空氣調和裝置係可將-10℃~80℃範圍之空氣，控制為20℃~27℃之範圍內且40%~50%之濕度，前述HEPA裝置係具有除去0.3μm以上的粒子之性能，通過前述HEPA裝置之空氣係加以清淨化至氨為5ppb以下、丙酮為10μg/m3以下、氮氧化物之NOx為20 ppb以下、硫氧化物之SOx為20ppb以下為止者。 An air purification system comprising: an adsorption unit having two systems capable of regenerating adsorption capacity, and an adsorption unit that regenerates adsorption capacity of the other adsorption unit when one adsorption unit adsorbs pollutants in the treatment air. The air cleaning device and the air conditioning device for controlling the temperature and humidity of the air purified by the air cleaning device, and the air for supplying the HEPA device for controlling the temperature and humidity through the air conditioning device A purification system characterized in that the adsorbent material of the adsorption unit of the air purification device contains a first mixed material containing 55 wt% of activated carbon as a main component, and a second mixed material having 45 wt% of a main component as a ceramic. The first mixed material contains 70% by weight or more of activated carbon, and 20 to 22% by weight of alumina, and 4 to 6% by weight of cerium oxide, and the second mixed material is used as the ceramic, and contains 55 to 90% by weight. The cerium oxide or aluminum oxide, and as a catalyst, contains 6.5 wt% to 8.5 wt% of vanadium pentoxide, and the ceramic system carries the vanadium pentoxide. The air conditioning device can control the air in the range of -10 ° C to 80 ° C to be in the range of 20 ° C to 27 ° C and 40% to 50% humidity. The HEPA device has the property of removing particles of 0.3 μm or more. It is purified by the air system of the HEPA apparatus to have an ammonia content of 5 ppb or less, acetone of 10 μg/m 3 or less, NOx of nitrogen oxides of 20 ppb or less, and SOx of sulfur oxides of 20 ppb or less. 一種空氣清淨化系統，係具備：具有可再生吸附能力之2系統的吸附單元，成為呈一方的吸附單元在吸附處理空氣內之污染物質時，加以再生另一方之吸附單元的吸附能力之吸附式的空氣清淨化裝置，和控制經由前述空氣清淨化裝置而加以清淨化之空氣的溫度及濕度之空氣調和裝置，和加以供給經由前述空氣調和裝置而加以控制溫度及濕度之空氣的ULPA裝置之空氣清淨化系統，其特徵為前述空氣清淨化裝置之前述吸附單元之吸附材係含有將活性碳作為主成分之55wt%的第1混合材料，和將主成分作為陶瓷之45wt%的第2混合材料，對於前述第1混合材料係包含有70wt%以上的活性碳、和20~22wt%之氧化鋁、和4~6wt%之二氧化矽，第2混合材料係作為前述陶瓷，包含55~90wt%之二氧化矽或氧化鋁，且作為觸媒，包含6.5wt%~8.5wt%之五氧化二釩，前述陶瓷係載持前述五氧化二釩，前述空氣調和裝置係可將-10℃~80℃範圍之空氣，控制為20℃~27℃之範圍內且40%~50%之濕度，前述ULPA裝置係具有除去0.1μm以上的粒子之性能，通過前述ULPA裝置之空氣係加以清淨化至氨為5ppb以下、丙酮為10μg/m3以下、氮氧化物之NOx為20 ppb以下、硫氧化物之SOx為20ppb以下為止者。 An air purification system comprising: an adsorption unit having two systems capable of regenerating adsorption capacity, and an adsorption unit that regenerates adsorption capacity of the other adsorption unit when one adsorption unit adsorbs pollutants in the treatment air. The air cleaning device and the air conditioning device for controlling the temperature and humidity of the air purified by the air cleaning device, and the air for supplying the ULPA device for controlling the temperature and humidity through the air conditioning device. A purification system characterized in that the adsorbent material of the adsorption unit of the air purification device contains a first mixed material containing 55 wt% of activated carbon as a main component, and a second mixed material having 45 wt% of a main component as a ceramic. The first mixed material contains 70% by weight or more of activated carbon, and 20 to 22% by weight of alumina, and 4 to 6% by weight of cerium oxide, and the second mixed material is used as the ceramic, and contains 55 to 90% by weight. The cerium oxide or aluminum oxide, and as a catalyst, contains 6.5 wt% to 8.5 wt% of vanadium pentoxide, and the ceramic system carries the vanadium pentoxide. The air conditioning device can control the air in the range of -10 ° C to 80 ° C to be in the range of 20 ° C to 27 ° C and 40% to 50% humidity. The ULPA device has the property of removing particles of 0.1 μm or more. It is purified by the air system of the above-mentioned ULPA apparatus to have an ammonia content of 5 ppb or less, acetone of 10 μg/m 3 or less, NOx of nitrogen oxides of 20 ppb or less, and SOx of sulfur oxides of 20 ppb or less.
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