TWI630347B - Combustion type purification device for exhaust gas - Google Patents
Combustion type purification device for exhaust gas Download PDFInfo
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Abstract
本發明提供一種廢氣的燃燒式淨化裝置，可抑制或者防止通氣性的側面壁的裂紋、崩解、缺口等，該裝置具有如下結構：為了防止固體顆粒狀氧化物堆積於燃燒室內的側面壁，因而將側面壁設為具有通氣性陶瓷壁的側面壁，經由該通氣性的側面壁將含氧氣體噴出到燃燒室。 The present invention provides a combustion type purification apparatus for exhaust gas which can suppress or prevent cracking, disintegration, chipping, and the like of a gas permeable side wall. The apparatus has a structure in which solid particulate oxide is prevented from being deposited on a side wall in a combustion chamber, Therefore, the side wall is a side wall having a gas permeable ceramic wall, and the oxygen-containing gas is discharged to the combustion chamber through the air permeable side wall.
在如前述那樣的廢氣的燃燒式淨化裝置中，設置用於對作為燃燒室的側面壁的陶瓷壁從背後以及下方進行支撐的金屬支撐體。或者，將燃燒室的側面壁的上部設為通氣性陶瓷壁，將燃燒室的側面壁的下部設為通氣性的金屬壁。 In the combustion type purification apparatus of the exhaust gas as described above, a metal support for supporting the ceramic wall as the side wall of the combustion chamber from the back and below is provided. Alternatively, the upper portion of the side wall of the combustion chamber is referred to as a permeable ceramic wall, and the lower portion of the side wall of the combustion chamber is made of a permeable metal wall.
Description
本發明關於一種用於使由半導體製造程序排出的廢氣中所含的有害成分進行燃燒而去除的燃燒式淨化裝置。更具體關於一種燃燒式淨化裝置，其藉由在火焰以及氧氣的存在下在高溫下使由半導體製造程序排出的有害成分進行接觸、燃燒，從而變成無害的物質或者可容易無害化的物質。 The present invention relates to a combustion type purification apparatus for removing harmful components contained in exhaust gas discharged from a semiconductor manufacturing process. More specifically, the present invention relates to a combustion type purification apparatus which is brought into contact with and burned at a high temperature in the presence of a flame and oxygen at a high temperature to become a harmless substance or a substance which can be easily rendered harmless.
隨著近年的半導體工業的發展，在半導體製造程序中使用了非常多種類的氣體。然而，這些氣體中，對於人體以及環境而言有害的物質多，必須在排出到工廠外之前進行淨化。將這些氣體(有害成分)進行燃燒而分解處理的燃燒式淨化方法是無論廢氣的組成、物性皆可適用的便利方法，特別是在高濃度、大流量的情況下，與乾式淨化方法、濕式淨化方法相比較而言是高效的。 With the development of the semiconductor industry in recent years, a very wide variety of gases have been used in semiconductor manufacturing processes. However, among these gases, there are many substances that are harmful to the human body and the environment, and must be purified before being discharged outside the factory. The combustion type purification method in which these gases (hazardous components) are burned and decomposed is a convenient method that can be applied regardless of the composition and physical properties of the exhaust gas, particularly in the case of high concentration and large flow rate, and dry purification method, wet type. The purification method is relatively efficient.
在燃燒式淨化方法中進行如下的處理：藉由將包含有害成分的廢氣以及丙烷、LPG、LNG等燃料氣體、空氣或者氧氣、視需要還有惰性氣體在燃燒室中混合、燃燒，將有害成分轉化為無害的氧化物或者可容易 無害化的物質。歷來使用的一般的燃燒式淨化裝置由如下部件構成：用於使有害成分進行燃燒的燃燒室，用於將包含處理對象的有害成分的廢氣、燃料氣體、空氣等含氧氣體導入到燃燒室的各配管、噴嘴，以及用於將燃燒後的氣體從燃燒室排出的配管等。另外，有時候會在燃燒室的氣體排出口附近具有用於噴出冷卻水以冷卻高溫廢氣的噴霧噴嘴。 In the combustion purification method, the treatment is carried out by mixing exhaust gas containing harmful components and fuel gas such as propane, LPG, or LNG, air or oxygen, and optionally an inert gas in a combustion chamber, and burning harmful components. Converted to harmless oxides or can be easily Harmless substance. A conventional combustion type purification apparatus conventionally used is composed of a combustion chamber for burning a harmful component, and an oxygen-containing gas such as exhaust gas, fuel gas, or air containing a harmful component to be processed, is introduced into a combustion chamber. Each pipe, nozzle, and piping for discharging the burned gas from the combustion chamber. Further, there is a case where a spray nozzle for discharging cooling water to cool the high-temperature exhaust gas is sometimes provided in the vicinity of the gas discharge port of the combustion chamber.
利用這樣結構的燃燒式淨化裝置，有害成分燃燒，將燃燒處理後的廢氣從排出口排出並釋放到大氣中，或者送向下一個處理裝置。然而，在處理對象的有害成分是例如矽烷、磷化氫、胂、二硼烷那樣的氣體的情況下，藉由燃燒而各自生成矽、磷、砷、硼的固體顆粒狀氧化物(粉化物)，其大部分通過燃燒室內，由後續程序進行處理，但是一部分堆積於燃燒室內的側面壁，其附著面積、厚度伴隨著燃燒時間的經過而增加。其結果，妨礙有害成分與燃料氣體、空氣、氧氣等的均勻混合從而阻礙完全燃燒，不僅發生燃燒溫度的降低、處理對象的有害成分的分解率的降低，而且在粉化物的堆積量多的情況下有可能發生失火之虞。 With the combustion type purification apparatus having such a structure, the harmful components are burned, and the exhaust gas after the combustion treatment is discharged from the discharge port and released into the atmosphere, or sent to the next processing device. However, in the case where the harmful component to be treated is a gas such as decane, phosphine, hydrazine or diborane, solid particulate oxide (powder) of bismuth, phosphorus, arsenic or boron is formed by combustion. Most of it passes through the combustion chamber and is processed by a subsequent procedure. However, a part of the side wall deposited in the combustion chamber has an adhesion area and a thickness which increase with the passage of the burning time. As a result, the harmful mixture is prevented from being uniformly mixed with the fuel gas, the air, the oxygen gas, or the like, and the complete combustion is inhibited, and not only the decrease in the combustion temperature but also the decrease in the decomposition rate of the harmful component to be treated, and the accumulation amount of the powder are large. There is a possibility of fire.
因此，如專利文獻1~5那樣開發了一種燃燒式淨化裝置，其中，將燃燒室的側面設為由陶瓷、燒結金屬等所構成的通氣性的材料，在其外周設置空氣、惰性氣體等的壓力氣體流路，經由側面壁將該壓力氣體噴出到燃燒室，從而防止固體顆粒狀氧化物堆積於燃燒室的側面壁。 Therefore, as disclosed in Patent Documents 1 to 5, a combustion type purification apparatus has been developed in which a side surface of a combustion chamber is made of a gas permeable material made of ceramics, sintered metal or the like, and air, an inert gas or the like is provided on the outer periphery thereof. The pressurized gas flow path ejects the pressurized gas to the combustion chamber via the side wall, thereby preventing solid particulate oxide from accumulating on the side wall of the combustion chamber.
[專利文獻1]日本特開平10-54534號公報 [Patent Document 1] Japanese Patent Laid-Open No. Hei 10-54534
[專利文獻2]日本特開平10-61934號公報 [Patent Document 2] Japanese Patent Laid-Open No. Hei 10-61934
[專利文獻3]日本特開2005-98680號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2005-98680
[專利文獻4]日本特開2006-194544號公報 [Patent Document 4] Japanese Patent Laid-Open Publication No. 2006-194544
如前述那樣的燃燒式淨化裝置中，在將燃燒室的側面壁製成通氣性的陶瓷的情況下，可製成對火焰的耐熱性、對有害成分的耐腐蝕性優於金屬等其它材料的側面壁。但是，陶瓷存在有脆弱的缺點，受到火焰等的影響而產生裂紋(裂縫、破裂)，發生崩解或者缺口，因而有時會對燃燒式淨化裝置本身、後續程序的裝置造成不良影響。因此，本發明想要解決的問題在於提供：在使用了通氣性的陶瓷作為燃燒室的側面壁的燃燒式淨化裝置中，可抑制或者防止燃燒室的側面壁的裂紋、崩解、缺口等的手段等。 In the combustion type purification apparatus as described above, when the side wall of the combustion chamber is made of a permeable ceramic, the heat resistance to the flame and the corrosion resistance to harmful components can be made better than other materials such as metal. Side wall. However, ceramics have the disadvantage of being fragile, and cracks (cracks, cracks) are generated by the influence of flames and the like, and disintegration or chipping occurs, which may adversely affect the combustion type purification apparatus itself and subsequent devices. Therefore, the problem to be solved by the present invention is to provide a combustion type purifying apparatus using a gas permeable ceramic as a side wall of a combustion chamber, thereby suppressing or preventing cracking, disintegration, chipping, etc. of the side wall of the combustion chamber. Means, etc.
本發明人為了解決這些問題而進行了深入研究，結果發現了如下內容，從而完成了本發明的第1實施形態的廢氣的燃燒式淨化裝置：在如前述那樣的燃燒式淨化裝置中，藉由設置用於從背後以及下方支撐陶瓷壁的金屬支撐體，從而使得由熱導率低的陶瓷所構成的燃燒室的側面整體的溫度與不設置金屬支撐體的情況相比 得以均勻化，使得因裝置的長期使用而導致的裂紋、崩解、缺口等的發生進程變遲緩，並且即使在產生了崩解、缺口的情況下，也可利用金屬支撐體而抑制或者防止陶瓷壁的碎片的流出，可減少對燃燒式淨化裝置、後續程序的裝置造成的不良影響。 The present inventors have conducted intensive studies to solve these problems, and as a result, have found that the combustion type purification apparatus of the exhaust gas according to the first embodiment of the present invention is completed by the combustion type purification apparatus as described above. A metal support for supporting the ceramic wall from the back and below is provided so that the temperature of the entire side surface of the combustion chamber composed of the ceramic having low thermal conductivity is compared with the case where the metal support is not provided. It is uniformized, and the occurrence of cracks, disintegration, notches, and the like due to long-term use of the device becomes slow, and even in the case where disintegration or chipping occurs, the metal support can be used to suppress or prevent the ceramic. The outflow of debris from the wall reduces the adverse effects on the combustion purification unit and the subsequent program.
另外，本發明人等發現了如下內容，從而完成了本發明的第2實施形態的燃燒式淨化裝置：陶瓷壁在長期反覆受到了基於火焰的高溫化和基於從噴霧噴嘴噴出的冷卻水的低溫化的影響的情況下，容易生成裂紋、崩解、缺口等，特別是，藉由將接觸於冷卻水的可能性高的側面壁的下部表面由通氣性陶瓷壁更換為通氣性的金屬壁，從而不損害燃燒室的側面壁整體的耐熱性，即可減少裂紋、崩解、缺口等。 In addition, the inventors of the present invention have found that the combustion type purification apparatus according to the second embodiment of the present invention has been subjected to a high temperature by a flame and a low temperature based on cooling water sprayed from a spray nozzle over a long period of time. In the case of the influence of the chemical, cracks, disintegration, notches, and the like are likely to occur, and in particular, the lower surface of the side wall having a high possibility of coming into contact with the cooling water is replaced with the air-permeable ceramic wall by the air-permeable ceramic wall. The crack, the disintegration, the notch, and the like can be reduced without impairing the heat resistance of the entire side wall of the combustion chamber.
即，本發明是一種廢氣的燃燒式淨化裝置，其具備：使由半導體製造程序排出的廢氣中所含的有害成分進行燃燒的燃燒室；將火焰導入到該燃燒室的噴嘴；將廢氣導入到該燃燒室的噴嘴；構成該燃燒室的側面的通氣性陶瓷壁；設置於該陶瓷壁的外周的含氧氣體流路；將含氧氣體導入於該流路的含氧氣體導入口；以及將燃燒處理後的氣體向外部排出的排出口，其特徵在於，該廢氣的燃燒式淨化裝置藉由設置對構成燃燒室的側面的通氣性陶瓷壁從背後以及下方進行支撐的金屬支撐體而成。 That is, the present invention is a combustion type purification apparatus for exhaust gas, comprising: a combustion chamber that combusts harmful components contained in exhaust gas discharged from a semiconductor manufacturing program; a nozzle that introduces a flame into the combustion chamber; and introduces exhaust gas into the exhaust gas a nozzle of the combustion chamber; an air permeable ceramic wall constituting a side surface of the combustion chamber; an oxygen-containing gas flow path provided on an outer circumference of the ceramic wall; an oxygen-containing gas introduction port for introducing an oxygen-containing gas into the flow path; A discharge port for discharging the gas after the combustion treatment to the outside is characterized in that the combustion type purification device for the exhaust gas is provided by a metal support body that supports the air permeable ceramic wall constituting the side surface of the combustion chamber from behind and below.
另外，本發明是一種廢氣的燃燒式淨化裝置，其具備：使由半導體製造程序排出的廢氣中所含的有 害成分進行燃燒的燃燒室；將火焰導入到該燃燒室的噴嘴；將廢氣導入到該燃燒室的噴嘴；該燃燒室的側面壁；設置於該側面壁的外周的含氧氣體流路；將含氧氣體導入於該流路的含氧氣體導入口；以及燃燒處理後的氣體的排出口和噴霧噴嘴，其特徵在於，燃燒室的側面壁的上部表面是通氣性陶瓷壁，燃燒室的側面壁的下部表面是通氣性的金屬壁。 Further, the present invention is a combustion type purification apparatus for exhaust gas, comprising: a gas contained in an exhaust gas discharged from a semiconductor manufacturing process a combustion chamber in which the component is burned; a nozzle that introduces a flame into the combustion chamber; a nozzle that introduces the exhaust gas into the combustion chamber; a side wall of the combustion chamber; an oxygen-containing gas flow path provided on an outer circumference of the side wall; The oxygen-containing gas is introduced into the oxygen-containing gas introduction port of the flow path; and the discharge port of the gas after the combustion treatment and the spray nozzle are characterized in that the upper surface of the side wall of the combustion chamber is a permeable ceramic wall, and the side of the combustion chamber The lower surface of the wall is a permeable metal wall.
在本發明的第1實施形態的廢氣的燃燒式淨化裝置中，由於在構成燃燒室的側面的通氣性陶瓷壁的背面設置熱導率高的金屬支撐體，因而可使得通氣性陶瓷壁的溫度與不設置金屬支撐體的情況相比變得均勻，可延緩因火焰的影響而導致的陶瓷壁的劣化。其結果，可抑制或者防止陶瓷壁的裂紋、崩解、缺口等的發展。另外，即使在產生了陶瓷壁的崩解、缺口的情況下，也可藉由金屬支撐體而抑制或者防止陶瓷壁的碎片的流出，可抑制或者防止對燃燒式淨化裝置、後續程序的裝置造成的不良影響。 In the combustion type purification apparatus of the exhaust gas according to the first embodiment of the present invention, since the metal support having a high thermal conductivity is provided on the back surface of the air permeable ceramic wall constituting the side surface of the combustion chamber, the temperature of the permeable ceramic wall can be made. It becomes uniform as compared with the case where the metal support is not provided, and deterioration of the ceramic wall due to the influence of the flame can be delayed. As a result, development of cracks, disintegration, notches, and the like of the ceramic wall can be suppressed or prevented. Further, even in the case where the disintegration or the notch of the ceramic wall occurs, the outflow of the ceramic wall fragments can be suppressed or prevented by the metal support, and the combustion type purifying device and the subsequent program can be suppressed or prevented from being caused. Bad effects.
在本發明的第2實施形態的廢氣的燃燒式淨化裝置中，要求耐熱性的側面壁的上部表面由通氣性陶瓷壁所構成，但是關於側面壁的下部表面，代替具有耐開裂性方面的弱點的陶瓷，由耐開裂性優異的金屬壁構成，因而不損害燃燒室的側面壁的耐熱性，即可抑制或者防止由與冷卻水的接觸導致的裂紋、崩解、缺口等。其結果，可抑制或者防止陶瓷壁的碎片的流出，可抑制 或者防止對燃燒式淨化裝置、後續程序的裝置造成的不良影響。本發明特別是在為了實現裝置小型化而在燃燒處理後立即需要進行氣體的冷卻的燃燒式淨化裝置方面發揮效果。 In the combustion type purification apparatus of the exhaust gas according to the second embodiment of the present invention, the upper surface of the side wall requiring heat resistance is composed of a gas permeable ceramic wall, but the lower surface of the side wall is replaced with a weak point in terms of crack resistance. The ceramic is composed of a metal wall excellent in crack resistance, so that the heat resistance of the side wall of the combustion chamber is not impaired, and cracks, disintegration, notches, and the like due to contact with the cooling water can be suppressed or prevented. As a result, the outflow of the ceramic wall fragments can be suppressed or prevented, and the suppression can be suppressed. Or prevent adverse effects on the combustion-type purification device and subsequent programs. In particular, the present invention exerts an effect in a combustion type purification apparatus that requires cooling of a gas immediately after combustion treatment in order to achieve downsizing of the apparatus.
1‧‧‧燃燒室 1‧‧‧ combustion chamber
2‧‧‧將火焰導入到燃燒室的噴嘴 2‧‧‧Injection of the flame into the combustion chamber
3‧‧‧將廢氣導入到燃燒室的噴嘴 3‧‧‧Injection of exhaust gas into the combustion chamber
4‧‧‧燃燒室的側面壁 4‧‧‧ side wall of the combustion chamber
4’‧‧‧通氣性陶瓷壁 4'‧‧‧ ventilated ceramic wall
4”‧‧‧通氣性的金屬壁 4" ‧ ‧ ventilated metal walls
5‧‧‧含氧氣體流路 5‧‧‧Oxygen gas flow path
6‧‧‧含氧氣體的導入口 6‧‧‧Inlet of oxygen-containing gas
7‧‧‧排出口 7‧‧‧Export
8‧‧‧金屬支撐體 8‧‧‧Metal support
8’‧‧‧從背後支撐陶瓷壁的金屬支撐體 8'‧‧‧Metal support supporting the ceramic wall from behind
8”‧‧‧從下方支撐陶瓷壁的金屬支撐體 8"‧‧‧Metal support for supporting ceramic walls from below
8'''‧‧‧從燃燒室側支撐陶瓷壁的金屬支撐體 8'''‧‧‧Metal support for supporting ceramic walls from the combustion chamber side
9‧‧‧孔 9‧‧‧ hole
10‧‧‧線狀的間隙 10‧‧‧Linear gap
11‧‧‧格子窗狀的間隙 11‧‧‧ lattice window gap
12‧‧‧冷卻配管 12‧‧‧Cooling piping
13‧‧‧噴霧噴嘴 13‧‧‧ spray nozzle
13’‧‧‧噴霧噴嘴 13'‧‧‧ spray nozzle
14‧‧‧流量計 14‧‧‧ Flowmeter
15‧‧‧泵 15‧‧‧ pump
16‧‧‧廢氣的燃燒式淨化裝置與洗滌器設備之間的配管 16‧‧‧Pipe between the combustion-type purification device of the exhaust gas and the scrubber unit
17‧‧‧水槽 17‧‧‧Sink
18‧‧‧排水管 18‧‧‧Drainage pipe
19‧‧‧多孔板 19‧‧‧Multiwell plate
20‧‧‧填充材料 20‧‧‧Filling materials
21‧‧‧除霧器 21‧‧‧ defogger
22‧‧‧將處理後的氣體向外部排出的排出口 22‧‧‧ Discharge of the treated gas to the outside
圖1為本發明的第1實施形態的廢氣的燃燒式淨化裝置的一個例子的縱剖面的結構圖；圖2為圖1中的a-a’剖面圖；圖3為本發明的第1實施形態的廢氣的燃燒式淨化裝置的除了圖1以外的一個例子的縱剖面的結構圖；圖4為圖3中的b-b’剖面圖；圖5為本發明的第2實施形態的廢氣的燃燒式淨化裝置的一個例子的縱剖面的結構圖；圖6為圖5中的c-c’剖面圖；圖7為本發明的第2實施形態的廢氣的燃燒式淨化裝置的除了圖5以外的一個例子的縱剖面的結構圖；圖8為圖7中的d-d’剖面圖；圖9為本發明的廢氣的燃燒式淨化裝置的陶瓷壁的例子的部分放大剖面圖；圖10為藉由在本發明的廢氣的燃燒式淨化裝置上結合了水槽以及洗滌器的設備而得到的淨化裝置的一個例子的縱剖面的結構圖。 1 is a cross-sectional view showing an example of a combustion type purification apparatus for an exhaust gas according to a first embodiment of the present invention; FIG. 2 is a cross-sectional view taken along line aa' of FIG. 1, and FIG. 3 is a first embodiment of the present invention; FIG. 4 is a cross-sectional view taken along line bb' of FIG. 3, and FIG. 5 is a cross-sectional view of the second embodiment of the present invention. FIG. 6 is a cross-sectional view taken along line c-c' in FIG. 5; FIG. 7 is a view showing a combustion type purification apparatus of an exhaust gas according to a second embodiment of the present invention, except FIG. FIG. 8 is a cross-sectional view taken along line d-d' in FIG. 7; and FIG. 9 is a partially enlarged cross-sectional view showing an example of a ceramic wall of the combustion type purification apparatus of the present invention; A structural view of a longitudinal section of an example of a purification apparatus obtained by incorporating a water tank and a scrubber apparatus in a combustion type purification apparatus of the present invention.
本發明適用於一種燃燒式淨化裝置，其具備 ：使由半導體製造程序排出的廢氣中所含的有害成分進行燃燒的燃燒室、將火焰導入到該燃燒室的噴嘴、將廢氣導入到該燃燒室的噴嘴、該燃燒室的側面壁、設置於該陶瓷壁的外周的含氧氣體流路、將含氧氣體導入於該流路的含氧氣體導入口、以及將燃燒處理後的氣體向外部排出的排出口。 The invention is applicable to a combustion type purifying device, which is provided a combustion chamber for combusting harmful components contained in exhaust gas discharged from a semiconductor manufacturing program, a nozzle for introducing a flame into the combustion chamber, a nozzle for introducing the exhaust gas into the combustion chamber, a side wall of the combustion chamber, and a side wall An oxygen-containing gas flow path on the outer circumference of the ceramic wall, an oxygen-containing gas introduction port for introducing an oxygen-containing gas into the flow path, and a discharge port for discharging the gas after the combustion treatment to the outside.
作為可利用本發明的廢氣的燃燒式淨化裝置而處理的有害成分，可例示出：胂、磷化氫、矽烷、二矽烷、二氯矽烷、二硼烷、硒化氫、鍺烷(Germane)等氫化物氣體，三氟化硼、三氯化硼、四氟化矽、四氯化矽、四氯化鈦、氯化鋁、四氟化鍺、六氟化鎢等酸性氣體，氨、甲胺、二甲胺、三甲胺、肼等鹼性氣體，全氟碳化物、氫氟碳等鹵化碳等。另外，作為燃料氣體，可使用丙烷氣體、天然氣體等。這些氣體可視需要與氮氣等惰性氣體一起使用。 As a harmful component which can be treated by the combustion type purification apparatus of the exhaust gas of the present invention, hydrazine, phosphine, decane, dioxane, dichlorodecane, diborane, hydrogen selenide, decane (Germane) can be exemplified. Isochemical gas, boron trifluoride, boron trichloride, antimony tetrafluoride, antimony tetrachloride, titanium tetrachloride, aluminum chloride, antimony tetrafluoride, tungsten hexafluoride and other acid gases, ammonia, An alkaline gas such as an amine, dimethylamine, trimethylamine or hydrazine, or a halogenated carbon such as a perfluorocarbon or a hydrofluorocarbon. Further, as the fuel gas, propane gas, natural gas or the like can be used. These gases may be used together with an inert gas such as nitrogen as needed.
以下，基於圖1~圖10詳細說明本發明的廢氣的燃燒式淨化裝置，但是本發明不受限於它們。 Hereinafter, the combustion type purification apparatus of the present invention will be described in detail based on Figs. 1 to 10, but the present invention is not limited thereto.
尚且，圖1為本發明的第1實施形態的廢氣的燃燒式淨化裝置的一個例子的縱剖面的結構圖。圖2是圖1中的a-a’剖面圖。圖3為本發明的第1實施形態的廢氣的燃燒式淨化裝置的除了圖1以外的一個例子的縱剖面的結構圖。圖4是圖3中的b-b’剖面圖。圖5為本發明的第2實施形態的廢氣的燃燒式淨化裝置的一個例子的縱剖面的結構圖。圖6是圖5中的c-c’剖面圖。圖7為本發明的第2實施形態的廢氣的燃燒式淨化裝置的除了圖5以外的一個 例子的縱剖面的結構圖。圖8是圖7中的d-d’剖面圖。圖9為本發明的廢氣的燃燒式淨化裝置的側面壁的例子的部分放大剖面圖。圖10為藉由在本發明的廢氣的燃燒式淨化裝置上結合了水槽以及洗滌器的設備而得到的淨化裝置的一個例子的縱剖面的結構圖。 In addition, FIG. 1 is a structural view of a longitudinal section of an example of a combustion type purification apparatus for an exhaust gas according to a first embodiment of the present invention. Figure 2 is a cross-sectional view taken along line a-a' of Figure 1. 3 is a configuration diagram of a vertical cross section of an example of the combustion type purification apparatus of the exhaust gas according to the first embodiment of the present invention, except for FIG. 1 . Figure 4 is a cross-sectional view taken along line b-b' of Figure 3; Fig. 5 is a configuration diagram showing a longitudinal section of an example of a combustion type purification apparatus for an exhaust gas according to a second embodiment of the present invention. Figure 6 is a cross-sectional view taken along line c-c' of Figure 5; Fig. 7 is a view showing a combustion type purification apparatus for an exhaust gas according to a second embodiment of the present invention, except for Fig. 5; A structural diagram of a longitudinal section of an example. Figure 8 is a cross-sectional view taken along line d-d' of Figure 7. Fig. 9 is a partially enlarged cross-sectional view showing an example of a side wall of a combustion type purification apparatus for an exhaust gas according to the present invention. Fig. 10 is a structural view showing a longitudinal section of an example of a purification apparatus obtained by incorporating a water tank and a scrubber apparatus in the combustion type purification apparatus of the present invention.
以下，對本發明的第1實施形態的廢氣的燃燒式淨化裝置進行詳細說明。 Hereinafter, the combustion type purification apparatus of the exhaust gas according to the first embodiment of the present invention will be described in detail.
關於本發明的廢氣的第1實施形態的燃燒式淨化裝置，如圖1、圖2所示那樣，具備：使由半導體製造程序排出的廢氣中所含的有害成分進行燃燒的燃燒室1、將火焰導入到燃燒室1的噴嘴2、將廢氣導入到燃燒室1的噴嘴3、構成燃燒室1的側面的通氣性陶瓷壁4’、設置於陶瓷壁4’的外周的含氧氣體流路5、將含氧氣體導入於流路5的含氧氣體導入口6、以及將燃燒處理後的氣體向外部排出的排出口7，其設置從背後以及下方支撐構成燃燒室1的側面的通氣性陶瓷壁4’的金屬支撐體8(8’、8”)而成。 As shown in FIG. 1 and FIG. 2, the combustion type purification apparatus according to the first embodiment of the present invention includes a combustion chamber 1 for combusting harmful components contained in exhaust gas discharged from a semiconductor manufacturing program. The nozzle 2 into which the flame is introduced into the combustion chamber 1, the nozzle 3 that introduces the exhaust gas into the combustion chamber 1, the permeable ceramic wall 4' constituting the side surface of the combustion chamber 1, and the oxygen-containing gas flow path 5 provided on the outer periphery of the ceramic wall 4' An oxygen-containing gas introduction port 6 for introducing an oxygen-containing gas into the flow path 5, and a discharge port 7 for discharging the gas after the combustion treatment to the outside, and providing a permeable ceramic constituting the side surface of the combustion chamber 1 from the back and the lower side The metal support 8 (8', 8" of the wall 4' is formed.
關於本發明的第1實施形態的廢氣的燃燒式淨化裝置，在燃燒室1的側面設置圓筒狀的由具有通氣性以及隔熱性的陶瓷所構成的側面壁，在燃燒室1中使廢氣接觸於高溫火焰，並且與從陶瓷壁4’供給的空氣等的含氧氣體接觸，從而使廢氣中所含的有害成分進行燃燒(熱分解)。此時，隨著有害成分的種類不同會生成粉化物，但是利用在圖1中箭頭所示那樣的含氧氣體的氣流，可防止粉化物堆積於陶瓷壁4’的表面。 In the combustion type purification apparatus of the exhaust gas according to the first embodiment of the present invention, a side wall of a cylindrical air-permeable and heat-insulating ceramic is provided on the side surface of the combustion chamber 1, and exhaust gas is generated in the combustion chamber 1. It is in contact with a high-temperature flame and is in contact with an oxygen-containing gas such as air supplied from the ceramic wall 4' to burn (thermally decompose) harmful components contained in the exhaust gas. At this time, the powder is generated depending on the type of the harmful component, but the flow of the oxygen-containing gas as indicated by the arrow in Fig. 1 prevents the powder from accumulating on the surface of the ceramic wall 4'.
而且，本發明的第1實施形態的廢氣的燃燒式 淨化裝置具備由金屬支撐體8(8’、8”)從背後以及下方支撐陶瓷壁4’的結構。如圖1所示那樣，金屬支撐體8由從背後支撐陶瓷壁4’的金屬支撐體8’以及從下方支撐陶瓷壁4’的金屬支撐體8”構成。作為金屬支撐體8的材質，只要是金屬則沒有特別限制，可使用碳鋼、鉻鋼、鉬鋼、錳鋼、鎳鋼、不銹鋼等，但是以使用不銹鋼為佳。 Further, the combustion type of the exhaust gas according to the first embodiment of the present invention The purification device is provided with a structure in which the ceramic wall 4' is supported from the back and below by the metal support 8 (8', 8"). As shown in Fig. 1, the metal support 8 is supported by a metal support 4' from the back. 8' and a metal support 8" supporting the ceramic wall 4' from below. The material of the metal support 8 is not particularly limited as long as it is a metal, and carbon steel, chrome steel, molybdenum steel, manganese steel, nickel steel, stainless steel or the like can be used, but stainless steel is preferably used.
另外，金屬支撐體8’通常為圓筒形，金屬支撐體8”通常為圓環狀。關於金屬支撐體8’的表面的形態，只要具有充分的通氣性並且可支撐陶瓷壁4’，那麼沒有特別限制，例如可如後述那樣，製成與陶瓷壁4’的表面的形態相同的或者類似的形態。尚且，金屬支撐體8可利用黏接劑等與陶瓷壁4’固定接觸，但是也可以是全部或者一部分在不固定的狀態下接觸於陶瓷壁4’的形態。金屬支撐體8’以及金屬支撐體8”的厚度通常為0.5~20mm。 In addition, the metal support 8' is generally cylindrical, and the metal support 8" is generally annular. Regarding the shape of the surface of the metal support 8', as long as it has sufficient air permeability and can support the ceramic wall 4', then The shape of the surface of the ceramic wall 4' is the same or similar, as will be described later. For example, the metal support 8 can be fixedly contacted with the ceramic wall 4' by an adhesive or the like, but It may be that all or a part is in contact with the ceramic wall 4' in an unfixed state. The thickness of the metal support 8' and the metal support 8" is usually 0.5 to 20 mm.
在本發明的第1實施形態的廢氣的燃燒式淨化裝置中，如圖3以及圖4所示那樣，可進一步在陶瓷壁4’的下部的燃燒室側表面，設置從燃燒室側支撐陶瓷壁4’的金屬支撐體8'''。由此，在產生了陶瓷壁4’的崩解、缺口的情況下，提高抑制或者防止陶瓷壁4’的碎片向下游側的流出、對燃燒式淨化裝置、後續程序的裝置造成的不良影響的效果。金屬支撐體8'''通常為圓筒狀或者圓環狀，材質、厚度、以及與陶瓷壁4’的接觸狀態也與金屬支撐體8’相同，但是可以是通氣性也可以是非通氣性。 In the combustion type purification apparatus of the exhaust gas according to the first embodiment of the present invention, as shown in FIGS. 3 and 4, the ceramic wall can be further supported from the combustion chamber side on the combustion chamber side surface of the lower portion of the ceramic wall 4'. 4' metal support 8'''. When the disintegration or the notch of the ceramic wall 4' occurs, the flow of the ceramic wall 4' to the downstream side is suppressed or prevented, and the combustion purification apparatus and the subsequent program are adversely affected. effect. The metal support 8''' is generally cylindrical or annular, and the material, the thickness, and the state of contact with the ceramic wall 4' are also the same as those of the metal support 8', but may be air permeable or non-ventilating.
下面，對本發明的第2實施形態的廢氣的燃燒 式淨化裝置進行詳細說明。 Next, the combustion of the exhaust gas according to the second embodiment of the present invention The purification device will be described in detail.
如圖5、圖6所示那樣，本發明的第2實施形態的廢氣的燃燒式淨化裝置具備：使由半導體製造程序排出的廢氣中所含的有害成分進行燃燒的燃燒室1、將火焰導入到該燃燒室的噴嘴2、將廢氣導入到該燃燒室的噴嘴3、該燃燒室的側面壁4、設置於該側面壁的外周的含氧氣體流路5、將含氧氣體導入於該流路5的含氧氣體導入口6、以及燃燒處理後的氣體的排出口7和噴霧噴嘴13，燃燒室的側面壁的上部表面是通氣性陶瓷壁4’，燃燒室的側面壁的下部表面是通氣性的金屬壁4”。 As shown in FIG. 5 and FIG. 6 , the combustion type purification apparatus of the exhaust gas according to the second embodiment of the present invention includes a combustion chamber 1 that burns harmful components contained in exhaust gas discharged from a semiconductor manufacturing program, and introduces a flame. a nozzle 2 to the combustion chamber, a nozzle 3 for introducing the exhaust gas into the combustion chamber, a side wall 4 of the combustion chamber, an oxygen-containing gas flow path 5 provided on the outer periphery of the side wall, and an oxygen-containing gas introduced into the flow The oxygen-containing gas introduction port 6 of the road 5, and the discharge port 7 of the gas after the combustion treatment and the spray nozzle 13, the upper surface of the side wall of the combustion chamber is the permeable ceramic wall 4', and the lower surface of the side wall of the combustion chamber is Aerated metal wall 4".
關於本發明的第2實施形態的廢氣的燃燒式淨化裝置，在燃燒室1的側面設置圓筒狀的具有通氣性以及隔熱性的側面壁4，在燃燒室1中使廢氣接觸於高溫火焰，並且與從側面壁4供給的空氣等的含氧氣體接觸，從而將廢氣中所含的有害成分進行燃燒(熱分解)。此時，根據有害成分的種類不同會生成粉化物，但是利用在圖5中箭頭所示那樣的含氧氣體(包括空氣)的氣流，從而可防止粉化物堆積於燃燒室的側面壁4的表面。 In the combustion type purification apparatus of the exhaust gas according to the second embodiment of the present invention, a cylindrical air-permeable and heat-insulating side wall 4 is provided on the side surface of the combustion chamber 1, and the exhaust gas is brought into contact with the high-temperature flame in the combustion chamber 1. And it is in contact with the oxygen-containing gas of the air supplied from the side wall 4, and the harmful component contained in the exhaust gas is burned (thermal decomposition). At this time, the powder is generated depending on the type of the harmful component, but the gas flow of the oxygen-containing gas (including air) as indicated by the arrow in Fig. 5 is prevented, so that the powder can be prevented from accumulating on the surface of the side wall 4 of the combustion chamber. .
而且，關於本發明的第2實施形態的廢氣的燃燒式淨化裝置，要求耐熱性的燃燒室的側面壁的上部表面由通氣性陶瓷壁4’構成，容易受到由從噴霧噴嘴噴出的冷卻水導致產生裂紋的影響的燃燒室的側面壁的下部表面由通氣性的金屬壁4”構成。作為陶瓷壁的材質，可使用氧化鋁、二氧化矽、氧化鈦等。另外，作為金屬壁的材質，可使用碳鋼、鉻鋼、鉬鋼、錳鋼、鎳鋼、不銹 鋼等，但是以使用不銹鋼為佳。 Further, in the combustion type purification apparatus of the exhaust gas according to the second embodiment of the present invention, the upper surface of the side wall of the combustion chamber which is required to have heat resistance is constituted by the permeable ceramic wall 4', and is easily caused by the cooling water sprayed from the spray nozzle. The lower surface of the side wall of the combustion chamber in which the influence of the crack is generated is composed of a gas permeable metal wall 4 ′. As the material of the ceramic wall, alumina, cerium oxide, titanium oxide, or the like can be used. Can use carbon steel, chrome steel, molybdenum steel, manganese steel, nickel steel, stainless Steel, etc., but it is better to use stainless steel.
在本發明的第2實施形態的廢氣的燃燒式淨化裝置中，可如圖5所示那樣，製成燃燒室的側面壁4的上部整體為通氣性陶瓷壁4’，燃燒室的側面壁4的下部整體為通氣性的金屬壁4”這樣的結構，除此之外還可如圖7所示那樣，製成側面壁的整體為陶瓷壁4’，僅僅下部表面為金屬壁4”這樣的結構。構成燃燒室的側面壁的下部表面的通氣性的金屬壁4”的高度通常為燃燒室的側面壁4整體的高度的5~30%，以側面壁4整體的高度的10~25%為佳。在本發明中，燃燒室的側面壁4通常為厚度為0.2~50mm的圓筒的形狀，以厚度為5~30mm的圓筒的形狀為佳。 In the combustion type purification apparatus of the exhaust gas according to the second embodiment of the present invention, as shown in Fig. 5, the entire upper portion of the side wall 4 of the combustion chamber may be an air permeable ceramic wall 4', and the side wall 4 of the combustion chamber. The lower portion as a whole has a structure of a gas permeable metal wall 4", and as shown in Fig. 7, the entire side wall is made of a ceramic wall 4', and only the lower surface is a metal wall 4". structure. The height of the permeable metal wall 4" constituting the lower surface of the side wall of the combustion chamber is usually 5 to 30% of the height of the entire side wall 4 of the combustion chamber, preferably 10 to 25% of the overall height of the side wall 4. In the present invention, the side wall 4 of the combustion chamber is generally in the shape of a cylinder having a thickness of 0.2 to 50 mm, and preferably has a shape of a cylinder having a thickness of 5 to 30 mm.
下面，對本發明的第1實施形態以及第2實施形態的廢氣的燃燒式淨化裝置中共通的事項進行詳細說明。 In the following, the matters common to the combustion type purification apparatus of the exhaust gas according to the first embodiment and the second embodiment of the present invention will be described in detail.
在本發明中，作為燃燒室的側面壁4(4’以及4”)的表面的形態，例如可列舉出圖9所示那樣結構。圖9(a)(b)為具有針孔9的壁的部分放大剖面圖，其孔徑(直徑)通常為0.01~3.0mm，以0.02~1.0mm為佳。尚且，孔9不受限於圓形，這樣的情況下的孔的尺寸是與前述的孔徑相當的尺寸。關於孔的排列，也可縱橫規則配置，或者可使用隨機配置的排列方式。圖9(c)是具有線狀的間隙10的壁的部分放大剖面圖，其間隙通常為0.005~2.0mm，以0.01~1.0mm為佳。圖9(d)為具有格子窗狀的間隙11的壁的部分放大剖面圖，關於其間隙，作為換算為正方形的 情況下的一個邊的長度，通常為0.01~3.0mm，以0.02~1.0mm為佳。另外，燃燒室的側面壁4的表面的形態不限於它們，例如在它們之外，可列舉出：將纖維狀的陶瓷或者金屬進行積層而得到的積層體、將多個顆粒狀的陶瓷或者金屬進行積層而得到的積層體、具有細孔的多孔質陶瓷或者多孔質金屬等的形態。 In the present invention, the surface of the side wall 4 (4' and 4") of the combustion chamber is, for example, a structure as shown in Fig. 9. Fig. 9 (a) and (b) are walls having pinholes 9. A partial enlarged sectional view, the aperture (diameter) is usually 0.01 to 3.0 mm, preferably 0.02 to 1.0 mm. Further, the hole 9 is not limited to a circular shape, and the size of the hole in this case is the same as the aforementioned aperture. The size of the holes may be arranged in a vertical or horizontal manner, or a randomly arranged arrangement may be used. Fig. 9(c) is a partially enlarged cross-sectional view of the wall having the linear gap 10, the gap of which is usually 0.005~ 2.0 mm is preferably 0.01 to 1.0 mm. Fig. 9(d) is a partially enlarged cross-sectional view showing the wall of the gap 11 having a lattice window shape, and the gap is converted into a square. The length of one side in the case is usually 0.01 to 3.0 mm, preferably 0.02 to 1.0 mm. Further, the form of the surface of the side wall 4 of the combustion chamber is not limited to these, and examples thereof include a laminate obtained by laminating fibrous ceramics or metal, and a plurality of granular ceramics or metals. A layered body obtained by laminating, a porous ceramic having pores, or a porous metal.
尚且，燃燒室的側面壁4的孔、間隙大於前述範圍的情況下，有可能使得含氧氣體向燃燒室1的氣流發生偏倚，產生氣體流量多的部分和少的部分，並且有可能使得在氣體流量少的部分發生粉化物堆積。另外，小於前述範圍的情況下，有可能在短時間使得孔、間隙被粉化物等堵塞。進一步，關於燃燒室的側面壁4的通氣性部分，在任一個形態中，都以按照空隙率或者氣孔率為50~90%左右的方式設定為佳。在空隙率或者氣孔率不足50%的情況下，可能使粉化物堆積於壁面，空隙率或者氣孔率超過90%的情況下，可能使側面壁的强度降低。 Further, in the case where the hole and the gap of the side wall 4 of the combustion chamber are larger than the above range, there is a possibility that the flow of the oxygen-containing gas to the combustion chamber 1 is biased, and a portion having a large gas flow rate and a small portion are generated, and it is possible to Powder accumulation occurs in a portion where the gas flow rate is small. Further, in the case of less than the above range, the pores and the gap may be clogged with powder or the like in a short time. Further, in any aspect, the air permeable portion of the side wall 4 of the combustion chamber is preferably set so as to have a void ratio or a porosity of about 50 to 90%. When the void ratio or the porosity is less than 50%, the powder may be deposited on the wall surface, and when the void ratio or the porosity is more than 90%, the strength of the side wall may be lowered.
在本發明的廢氣的燃燒式淨化裝置，通常遍及整個如前述那樣的燃燒室的側面壁4的外周都設置含氧氣體流路5。含氧氣體流路5的寬度通常為5~200mm，以10~100mm為佳。在將有害成分進行處理時燃燒室1的溫度變為500~1200℃的高溫，藉由製成這樣的結構，可防止燃燒室1的熱擴散到外部。尚且，含氧氣體流路5的外壁合於燃燒室的側面壁4的形狀，通常為圓筒形。 In the combustion type purification apparatus of the exhaust gas of the present invention, the oxygen-containing gas flow path 5 is generally provided over the entire circumference of the side wall 4 of the combustion chamber as described above. The width of the oxygen-containing gas flow path 5 is usually 5 to 200 mm, preferably 10 to 100 mm. When the harmful component is treated, the temperature of the combustion chamber 1 becomes a high temperature of 500 to 1200 ° C, and by such a configuration, the heat of the combustion chamber 1 can be prevented from being diffused to the outside. Further, the outer wall of the oxygen-containing gas flow path 5 has a shape of a side wall 4 of the combustion chamber, and is generally cylindrical.
另外，在本發明中，用於將含氧氣體導入於流路5的含氧氣體導入口6的方向，係設定成由導入口6 導入的含氧氣體沿著環狀的含氧氣體流路5旋轉這樣的方向。關於含氧氣體導入口6，通常設定在相對於環的切線方向為±30度的角度的範圍內，以按照實質性上在環的切線方向可導入含氧氣體的方式進行設定為佳。藉由製成這樣的結構，使得含氧氣體在流路5內中的任一個部位，都可防止含氧氣體發生滯留、偏流，可將含氧氣體以均勻的流量以及溫度導入到燃燒室1。 Further, in the present invention, the direction for introducing the oxygen-containing gas into the oxygen-containing gas introduction port 6 of the flow path 5 is set to be the introduction port 6 The introduced oxygen-containing gas rotates in the direction along the annular oxygen-containing gas flow path 5. The oxygen-containing gas introduction port 6 is usually set to an angle of ±30 degrees with respect to the tangential direction of the ring, and is preferably set so as to substantially introduce an oxygen-containing gas in the tangential direction of the ring. By forming such a structure, the oxygen-containing gas can prevent the oxygen-containing gas from being retained and deviated in any of the flow paths 5, and the oxygen-containing gas can be introduced into the combustion chamber at a uniform flow rate and temperature. .
另外，關於含氧氣體流路5，也可在廢氣的導入方向(在圖1、圖5中為上下方向)上，劃分為多條流路，控制導入於各條流路的含氧氣體的流量等。在這樣的情況下，關於含氧氣體的旋轉方向，可按照相互為相同的方向的方式設定，也可按照相互為相反方向的方式設定。然而，側面壁是可使得含氧氣體維持流路內的旋轉方向而導入到燃燒室1那樣的結構的情況下，將相鄰的流路內的含氧氣體的旋轉方向按照相互為相反方向的方式設定，從而容易進行燃燒室內的氣體的混合，故較佳。 In addition, the oxygen-containing gas flow path 5 may be divided into a plurality of flow paths in the introduction direction of the exhaust gas (the vertical direction in FIGS. 1 and 5), and the oxygen-containing gas introduced into each of the flow paths may be controlled. Traffic, etc. In such a case, the directions of rotation of the oxygen-containing gas may be set to be the same direction as each other, or may be set to be opposite to each other. However, when the side wall is a structure in which the oxygen-containing gas is introduced into the combustion chamber 1 while maintaining the rotation direction in the flow path, the rotation directions of the oxygen-containing gas in the adjacent flow paths are opposite to each other. Since the mode is set to facilitate the mixing of the gas in the combustion chamber, it is preferable.
在本發明的廢氣的燃燒式淨化裝置中，按照在進入燃燒室1之前將燃料與含氧氣體混合從而進行燃燒的方式設定。在燃料的燃燒之時，火焰的前端可進入也可不進入燃燒室1。另外，如圖1、圖5所示那樣，將廢氣導入到燃燒室1的噴嘴3通常設置於將火焰導入到燃燒室1的噴嘴2的外周側。尚且，在本發明中，除了含氧氣體流路5之外，在將火焰導入到燃燒室1的噴嘴2的周圍，也可設置將含氧氣體導入到燃燒室1的噴嘴。 In the combustion type purification apparatus of the exhaust gas of the present invention, the fuel is mixed with the oxygen-containing gas to be combusted before entering the combustion chamber 1. At the time of combustion of the fuel, the front end of the flame may or may not enter the combustion chamber 1. Further, as shown in FIGS. 1 and 5, the nozzle 3 that introduces the exhaust gas into the combustion chamber 1 is usually provided on the outer peripheral side of the nozzle 2 that introduces the flame into the combustion chamber 1. Further, in the present invention, in addition to the oxygen-containing gas flow path 5, a nozzle for introducing an oxygen-containing gas into the combustion chamber 1 may be provided around the nozzle 2 for introducing the flame into the combustion chamber 1.
在本發明的廢氣的燃燒式淨化裝置中，關於 燃燒處理後的氣體，如圖5、圖10所示那樣，藉著由設置於排出口7的噴霧噴嘴13噴出的冷卻水進行冷卻，然後釋放到大氣中，或者被送入下一個處理程序。此時，由噴霧噴嘴13噴出的冷卻水可能接觸於燃燒室的側面壁4的下部表面。然而，在圖3、圖5、以及圖7所示那樣的燃燒式淨化裝置中，由於燃燒室的側面壁4的下部表面由金屬壁構成，因而不可能產生在陶瓷壁的情況下那樣的裂紋等。 In the combustion type purification apparatus of the exhaust gas of the present invention, As shown in Figs. 5 and 10, the gas after the combustion treatment is cooled by the cooling water sprayed from the spray nozzle 13 provided in the discharge port 7, and then released into the atmosphere or sent to the next processing program. At this time, the cooling water sprayed by the spray nozzle 13 may come into contact with the lower surface of the side wall 4 of the combustion chamber. However, in the combustion type purifying apparatus shown in Figs. 3, 5, and 7, since the lower surface of the side wall 4 of the combustion chamber is composed of a metal wall, it is impossible to generate a crack as in the case of the ceramic wall. Wait.
在將由半導體製造程序排出的廢氣利用本發明的廢氣的燃燒式淨化裝置進行燃燒處理，然後送入下一個處理程序那樣的情況下，在本發明中，也可一併裝備用於實施這樣的處理程序的設備。關於圖10的水槽17以及洗滌器的設備，針對利用本發明的廢氣的燃燒式淨化裝置處理過的廢氣，將處理後的氣體中所含的粉化物進行去除，並且將新生成了的有害成分(可容易無害化的成分)進行去除，在本發明中雖然不是必須的設備，但是以具備這些設備為佳。即，在本發明中，以製成在燃燒室1的排出側設置有粉化物的去除部及/或酸性氣體的去除部的廢氣的燃燒式淨化裝置為佳。 In the case where the exhaust gas discharged from the semiconductor manufacturing process is subjected to combustion treatment by the combustion type purification apparatus of the present invention, and then sent to the next processing program, in the present invention, it is also possible to perform such processing together. Program device. With regard to the water tank 17 and the scrubber apparatus of Fig. 10, the waste gas contained in the treated gas is removed for the exhaust gas treated by the combustion type purification apparatus of the exhaust gas of the present invention, and the newly generated harmful component is removed. The component (which can be easily and harmlessly removed) is removed, and although it is not an essential device in the present invention, it is preferable to provide such a device. In other words, in the present invention, it is preferable to provide a combustion type purifying apparatus in which the exhaust gas of the powder removing portion and/or the acid gas removing portion is provided on the discharge side of the combustion chamber 1.
例如，利用本發明的廢氣的燃燒式淨化裝置，將胂、磷化氫、矽烷、二硼烷等氫化物進行了處理的情況下，藉由燃燒而各自生成砷、磷、矽、硼等的固體顆粒狀氧化物。另外，將三氟化硼、三氯化硼、四氟化矽、四氯化矽、C2F6等鹵化物進行了處理的情況下，新生成氯化氫、氟化氫等酸性氣體(可容易無害化的成分) 。在圖10的淨化裝置中，粉化物主要可藉由源自噴霧噴嘴13的灑水、以及多孔板19上的捕捉從而去除。另外，關於本發明的廢氣的燃燒式淨化裝置與洗滌器設備之間的配管16，以按照容易將粉化物沖洗到水槽17的方式向洗滌器設備側傾斜為佳。 For example, when a hydride such as helium, phosphine, decane or diborane is treated by the combustion type purification apparatus of the exhaust gas of the present invention, arsenic, phosphorus, antimony, boron, or the like is formed by combustion. Solid particulate oxide. In addition, when a halide such as boron trifluoride, boron trichloride, hafnium tetrafluoride, hafnium tetrachloride or C 2 F 6 is treated, an acid gas such as hydrogen chloride or hydrogen fluoride is newly formed (it is easy to be harmless). Ingredients). In the purification apparatus of Fig. 10, the powder is mainly removed by watering from the spray nozzle 13, and catching on the perforated plate 19. Further, the piping 16 between the combustion type purifying apparatus of the exhaust gas of the present invention and the scrubber apparatus is preferably inclined to the scrubber apparatus side so as to easily flush the powder to the water tank 17.
在使用了藉由在本發明的廢氣的燃燒式淨化裝置中結合了水槽17以及洗滌器的設備而得到的圖10所示那樣的淨化裝置的情況下，氯化氫、氟化氫等酸性氣體主要可藉由填充材料20而去除。另外，可藉由除霧器21將水分也一併去除。尚且，在圖10中，12表示冷卻配管，14表示流量計，15表示泵，18表示排水管，22表示將處理後的氣體向外部排出的排出口。 In the case of the purification apparatus shown in FIG. 10 obtained by combining the water tank 17 and the scrubber apparatus in the combustion type purification apparatus of the exhaust gas of the present invention, acid gases such as hydrogen chloride and hydrogen fluoride can be mainly used. The material 20 is filled and removed. In addition, the moisture can also be removed together by the mist eliminator 21. Further, in Fig. 10, reference numeral 12 denotes a cooling pipe, 14 denotes a flow meter, 15 denotes a pump, 18 denotes a drain pipe, and 22 denotes a discharge port for discharging the treated gas to the outside.
接著，藉由實施例更具體說明本發明，但本發明不受限於它們。 Next, the present invention will be more specifically illustrated by the examples, but the invention is not limited thereto.
[實施例1] [Example 1]
(第1實施形態的燃燒式淨化裝置的製作) (Production of the combustion type purification apparatus of the first embodiment)
製作出如圖1、圖2所示那樣的結構的燃燒式淨化裝置，其具有圓筒形的燃燒室1(高度500mm、直徑200mm)、將火焰導入到該燃燒室1的噴嘴2、將廢氣導入到燃燒室1的噴嘴3、構成燃燒室1的側面的氧化鋁製的圓筒形的陶瓷壁4’(厚度15mm)、從背後以及下方支撐陶瓷壁4’的不銹鋼(SUS316)製的金屬支撐體8(厚度5mm)、環狀的含氧氣體流路5(寬度20mm)、含氧氣體導入口6、以及將燃燒後的氣體向外部排出的排出口7。尚且，陶瓷壁4’具有 與直徑10~100μm相當的微多孔，從背後支撐陶瓷壁4’的金屬支撐體8’是具有直徑2mm的孔並且通氣性高於陶瓷壁4’的金屬支撐體。另外，在陶瓷壁4’的內部(厚度方向的中央部)，以50mm間隔在上下方向上設置了九個溫度感測器。 A combustion type purification apparatus having a structure as shown in Figs. 1 and 2 has a cylindrical combustion chamber 1 (having a height of 500 mm and a diameter of 200 mm), and a nozzle 2 for introducing a flame into the combustion chamber 1 The nozzle 3 introduced into the combustion chamber 1, the cylindrical ceramic wall 4' made of alumina (the thickness of 15 mm) constituting the side surface of the combustion chamber 1, and the metal made of stainless steel (SUS316) supporting the ceramic wall 4' from the back and the lower side. The support body 8 (thickness: 5 mm), the annular oxygen-containing gas flow path 5 (width: 20 mm), the oxygen-containing gas introduction port 6, and the discharge port 7 for discharging the burned gas to the outside. Still, the ceramic wall 4' has The microporous body corresponding to a diameter of 10 to 100 μm, the metal support 8' supporting the ceramic wall 4' from the back is a metal support having a hole having a diameter of 2 mm and having a higher air permeability than the ceramic wall 4'. Further, in the inside of the ceramic wall 4' (the central portion in the thickness direction), nine temperature sensors are provided in the vertical direction at intervals of 50 mm.
在如前述那樣製作的燃燒式淨化裝置的燃燒室1的下部，在噴霧噴嘴13、燃燒式淨化裝置的右下部，設置了長度300mm、寬度300mm、高度300mm的水槽17，進一步在水槽17的上部設置多孔板19、以聚丙烯樹脂為主材的填充材料20以及具有除霧器21的洗滌器。另外，利用傾斜的配管將燃燒式淨化裝置的下部與水槽連接，並連接流量計14、泵15等，從而完成了圖10所示那樣的裝置。尚且，噴霧噴嘴13按照所噴出的冷卻水不接觸於陶瓷壁4’的方式，與陶瓷壁之間設置充分的距離而設置。 In the lower portion of the combustion chamber 1 of the combustion type purification apparatus produced as described above, the water tank 17 having a length of 300 mm, a width of 300 mm, and a height of 300 mm is provided in the lower right portion of the spray nozzle 13 and the combustion type purification apparatus, and further in the upper portion of the water tank 17. A porous plate 19, a filling material 20 mainly composed of a polypropylene resin, and a scrubber having a mist eliminator 21 are provided. Further, the lower portion of the combustion type purifying device is connected to the water tank by the inclined piping, and the flow meter 14, the pump 15, and the like are connected, thereby completing the apparatus as shown in Fig. 10 . Further, the spray nozzle 13 is provided so as to provide a sufficient distance from the ceramic wall so that the discharged cooling water does not contact the ceramic wall 4'.
(第1實施形態的燃燒式淨化裝置的燃燒處理試驗) (Combustion treatment test of the combustion type purification apparatus of the first embodiment)
向水槽中注入水直至深度成為150mm，然後使泵等運轉，從噴霧噴嘴13以及13’噴出了水。另外，使丙烷(流量15L/min)和空氣(流量440L/min)混合並且燃燒，從噴嘴導入於燃燒室1，同時將空氣從四個含氧氣體導入口各自以37.5L/min、合計以150L/min的流量經由側面壁導入於燃燒室1。接著，將包含作為廢氣的矽烷(流量10L/min)的氮氣(流量490L/min)從四個噴嘴各以125L/min、合計以500L/min導入於燃燒室1，從而進行了燃燒處理。 Water was poured into the water tank until the depth became 150 mm, and then the pump or the like was operated to eject water from the spray nozzles 13 and 13'. Further, propane (flow rate 15 L/min) and air (flow rate 440 L/min) were mixed and burned, introduced into the combustion chamber 1 from the nozzle, and air was introduced from the four oxygen-containing gas introduction ports at a total of 37.5 L/min. A flow rate of 150 L/min is introduced into the combustion chamber 1 through the side wall. Then, nitrogen gas (flow rate: 490 L/min) containing decane (flow rate: 10 L/min) as an exhaust gas was introduced into the combustion chamber 1 at a total of 125 L/min from each of the four nozzles at a rate of 500 L/min, and the combustion treatment was performed.
矽燒的燃燒處理是在燃燒狀態穩定之後進行1小時，為了在這期間確認陶瓷壁4’的溫度分布，因而利用溫度感測器測定出陶瓷壁4’的各測定部位的溫度。其結果可知，在設置於從上數來第3個測定部位測定出最高溫度約780℃，與在最下部的測定部位測定出的最低溫度之差的平均值約為200℃。 The combustion treatment of the simmering was performed for one hour after the combustion state was stabilized. In order to confirm the temperature distribution of the ceramic wall 4' during this period, the temperature of each measurement portion of the ceramic wall 4' was measured by a temperature sensor. As a result, it was found that the average value of the difference between the highest temperature measured at the third measurement site and the lowest temperature measured at the lowest measurement site was about 200 °C.
[實施例2] [Embodiment 2]
(第1實施形態的燃燒式淨化裝置的製作) (Production of the combustion type purification apparatus of the first embodiment)
在實施例1的燃燒式淨化裝置的製作中，將陶瓷壁4’的厚度變更為17mm，將從背後支撐陶瓷壁4’的金屬支撐體8’的厚度變更為3mm，新設置從燃燒室側支撐陶瓷壁4’的金屬支撐體8'''(厚度3mm、高度20mm)，此外與實施例1同樣地操作從而製作出燃燒式淨化裝置。進一步，與實施例1同樣地操作，在燃燒室1的下部設置噴霧噴嘴13，在燃燒式淨化裝置的右側設置洗滌器，從而完成了圖10所示那樣的裝置。 In the production of the combustion type purification apparatus of the first embodiment, the thickness of the ceramic wall 4' is changed to 17 mm, and the thickness of the metal support 8' supporting the ceramic wall 4' from the back is changed to 3 mm, and the new arrangement is from the combustion chamber side. A metal-supporting body 8''' (thickness: 3 mm, height: 20 mm) supporting the ceramic wall 4' was used, and a combustion type purification apparatus was produced in the same manner as in the first embodiment. Further, in the same manner as in the first embodiment, the spray nozzle 13 is provided in the lower portion of the combustion chamber 1, and the scrubber is provided on the right side of the combustion type purifying device, whereby the apparatus shown in Fig. 10 is completed.
(第1實施形態的燃燒式淨化裝置的燃燒處理試驗) (Combustion treatment test of the combustion type purification apparatus of the first embodiment)
在實施例1的燃燒式淨化裝置的燃燒處理試驗中，使用前述的裝置，此外與實施例1同樣地操作，從而進行了燃燒處理試驗。其結果可知，在設置於從上數來第3個測定部位測定出最高溫度約790℃，與在最下部的測定部位測定出的最低溫度之差的平均值約為230℃。與實施例1相較，陶瓷壁4’的最高溫度與最低溫度之差變大了，其原因可認為是，將從背後支撐陶瓷壁4’的金屬支撐體8’ 的厚度設定為與實施例1的情況相比薄了2mm，因而熱傳導惡化。 In the combustion treatment test of the combustion type purification apparatus of the first embodiment, the above-described apparatus was used, and in the same manner as in the first embodiment, the combustion treatment test was performed. As a result, it was found that the average value of the difference between the highest temperature measured at the third measurement site and the lowest temperature measured at the lowest measurement site was about 230 °C. The difference between the highest temperature and the lowest temperature of the ceramic wall 4' becomes larger as compared with the first embodiment, and the reason is considered to be that the metal support 8' of the ceramic wall 4' is supported from the back. The thickness was set to be 2 mm thinner than in the case of Example 1, and thus heat conduction was deteriorated.
[比較例1] [Comparative Example 1]
(燃燒式淨化裝置的製作) (Production of combustion purification device)
在實施例1的燃燒式淨化裝置的製作中，將陶瓷壁4’的厚度設為20mm，沒有設置金屬支撐體8，除此之外，與實施例1同樣地操作從而製作出燃燒式淨化裝置。進一步，與實施例1同樣地操作，在燃燒室1的下部設置噴霧噴嘴13，在燃燒式淨化裝置的右側設置洗滌器，從而完成了圖10所示那樣的裝置。 In the production of the combustion type purification apparatus of the first embodiment, the thickness of the ceramic wall 4' was set to 20 mm, and the metal support body 8 was not provided, and a combustion type purification apparatus was produced in the same manner as in the first embodiment. . Further, in the same manner as in the first embodiment, the spray nozzle 13 is provided in the lower portion of the combustion chamber 1, and the scrubber is provided on the right side of the combustion type purifying device, whereby the apparatus shown in Fig. 10 is completed.
(燃燒式淨化裝置的燃燒處理試驗) (Combustion treatment test of combustion type purification device)
在實施例1的燃燒式淨化裝置的燃燒處理試驗中，使用前述的裝置，此外與實施例1同樣地操作，從而進行了燃燒處理試驗。其結果可知，在設置於從上數來第3個測定部位測定出最高溫度約810℃，與在最下部的測定部位測定出的最低溫度之差的平均值約為300℃。與實施例1以及實施例2相較，陶瓷壁4’的最高溫度與最低溫度之差變大，其原因可認為是，沒有從背後支撐陶瓷壁4’的金屬支撐體8’，因而熱傳導大幅惡化。 In the combustion treatment test of the combustion type purification apparatus of the first embodiment, the above-described apparatus was used, and in the same manner as in the first embodiment, the combustion treatment test was performed. As a result, it was found that the average value of the difference between the highest temperature measured at the third measurement site and the lowest temperature measured at the lowest measurement site was about 300 °C. Compared with the first embodiment and the second embodiment, the difference between the highest temperature and the lowest temperature of the ceramic wall 4' is large, and the reason is that the metal support 8' of the ceramic wall 4' is not supported from the back, and thus the heat conduction is large. deterioration.
如以上那樣，關於本發明的第1實施形態的廢氣的燃燒式淨化裝置，如實施例所示那樣，在構成燃燒室的側面的通氣性陶瓷壁的背面設置熱導率高的金屬支撐體，因而通氣性陶瓷壁的最高溫度與最低溫度之差變小，與不設置金屬支撐體的情況相比溫度得以均勻化。其結果，可延緩因火焰的影響而導致的陶瓷壁的劣化。 As described above, in the combustion type purification apparatus of the exhaust gas according to the first embodiment of the present invention, as shown in the embodiment, a metal support having a high thermal conductivity is provided on the back surface of the air permeable ceramic wall constituting the side surface of the combustion chamber. Therefore, the difference between the highest temperature and the lowest temperature of the permeable ceramic wall becomes small, and the temperature is uniformized compared to the case where the metal support is not provided. As a result, deterioration of the ceramic wall due to the influence of the flame can be delayed.
[實施例3] [Example 3]
(第2實施形態的燃燒式淨化裝置的製作) (Production of the combustion type purification apparatus of the second embodiment)
製作出如圖5、圖6所示那樣的結構的燃燒式淨化裝置，其具有圓筒形的燃燒室1(高度500mm、直徑200mm)、將火焰導入到該燃燒室1的噴嘴2、將廢氣導入到燃燒室1的噴嘴3、燃燒室1的側面壁4(厚度15mm)、環狀的含氧氣體流路5(寬度20mm)、含氧氣體導入口6、以及將燃燒後的氣體向外部排出的排出口7和噴霧噴嘴13。尚且，側面壁4由具有直徑與10~100μm相當的微多孔的通氣性陶瓷壁4’和通氣性的金屬壁4”所構成，通氣性的金屬壁4”的高度是燃燒室的側面壁整體的高度的20%。另外，關於噴霧噴嘴13，為了藉由儘快進行燃燒處理後的氣體的冷卻從而謀求燃燒式淨化裝置的小型化，因而設置於如下的位置，即，使得所噴出的冷卻水不接觸於陶瓷壁4’而接觸於通氣性的金屬壁4”的下部那樣的位置。 A combustion type purification apparatus having a structure as shown in Figs. 5 and 6 has a cylindrical combustion chamber 1 (having a height of 500 mm and a diameter of 200 mm), a nozzle for introducing a flame into the combustion chamber 1, and an exhaust gas. The nozzle 3 introduced into the combustion chamber 1, the side wall 4 of the combustion chamber 1 (thickness: 15 mm), the annular oxygen-containing gas flow path 5 (width: 20 mm), the oxygen-containing gas introduction port 6, and the burned gas to the outside The discharge port 7 and the spray nozzle 13 are discharged. Further, the side wall 4 is composed of a microporous permeable ceramic wall 4' having a diameter corresponding to 10 to 100 μm and a permeable metal wall 4', and the height of the permeable metal wall 4" is the entire side wall of the combustion chamber. 20% of the height. In addition, in order to reduce the size of the combustion type purification apparatus by cooling the gas after the combustion treatment as soon as possible, the spray nozzle 13 is provided at a position where the discharged cooling water does not contact the ceramic wall 4 'Contact the position of the lower part of the permeable metal wall 4'.
在如前述那樣製作的燃燒式淨化裝置的右下部，設置了長度300mm、寬度300mm、高度300mm的水槽17，進一步在水槽17的上部設置了多孔板19、以聚丙烯樹脂為主材的填充材料20、以及具有除霧器21的洗滌器。另外，利用傾斜的配管將燃燒式淨化裝置的下部與水槽連接，在填充材料20的上部設置噴霧噴嘴13’，按照使得水槽17的冷卻水進行循環的方式連接流量計14、泵15等，從而完成了圖10所示那樣的裝置。 In the lower right portion of the combustion type purification apparatus produced as described above, a water tank 17 having a length of 300 mm, a width of 300 mm, and a height of 300 mm is provided, and a perforated plate 19 and a filler material made of a polypropylene resin as a main material are further provided on the upper portion of the water tank 17. 20. A scrubber having a mist eliminator 21. Further, the lower portion of the combustion type purifying device is connected to the water tank by the inclined pipe, the spray nozzle 13' is provided on the upper portion of the filling material 20, and the flow meter 14, the pump 15, and the like are connected so that the cooling water of the water tank 17 is circulated. The device as shown in Fig. 10 is completed.
(第2實施形態的燃燒式淨化裝置的燃燒處理試驗) (Combustion treatment test of the combustion type purification apparatus of the second embodiment)
向水槽中注入水直至深度成為150mm，然後使泵等運轉，而從噴霧噴嘴13以及13’噴出了水。另外，將丙烷(流量15L/min)與空氣(流量440L/min)混合並且燃燒，從噴嘴導入於燃燒室1，同時將空氣從四個含氧氣體導入口各自以37.5L/min、合計以150L/min的流量介由側面壁導入於燃燒室1。接著，將包含作為廢氣的矽烷(流量10L/min)的氮氣(流量490L/min)，從四個噴嘴各以125L/min、合計以500L/min導入於燃燒室1而進行了燃燒處理。將矽烷的燃燒處理進行了20小時，然後從燃燒式淨化裝置取出陶瓷壁4’和金屬壁4”並檢查了表面，但是無法檢測到裂紋等。 Water was poured into the water tank until the depth became 150 mm, and then the pump or the like was operated to eject water from the spray nozzles 13 and 13'. Further, propane (flow rate: 15 L/min) was mixed with air (flow rate: 440 L/min) and burned, and introduced into the combustion chamber 1 from a nozzle while air was introduced from the four oxygen-containing gas introduction ports at a total of 37.5 L/min. A flow rate of 150 L/min is introduced into the combustion chamber 1 through the side wall. Then, nitrogen gas (flow rate: 490 L/min) containing decane (flow rate: 10 L/min) as an exhaust gas was introduced into the combustion chamber 1 at a total of 125 L/min from each of the four nozzles, and the combustion treatment was performed. The combustion treatment of decane was carried out for 20 hours, and then the ceramic wall 4' and the metal wall 4" were taken out from the combustion type purifying device and the surface was inspected, but cracks or the like could not be detected.
[實施例4] [Example 4]
(第2實施形態的燃燒式淨化裝置的製作、燃燒處理試驗) (Production and combustion treatment test of the combustion type purification apparatus of the second embodiment)
在實施例3的燃燒式淨化裝置的製作中，將燃燒室1的側面壁4更換為圖7、圖8所示那樣的結構，除此以外，與實施例3同樣地操作從而製作出燃燒式淨化裝置。另外，與實施例1同樣地操作地設置洗滌器，從而完成了圖10所示那樣的裝置。使用該裝置與實施例3同樣地操作而進行了燃燒式淨化裝置的燃燒處理試驗。其結果，從陶瓷壁4’和金屬壁4”的表面無法檢測到裂紋等。 In the production of the combustion type purification apparatus of the third embodiment, the side wall 4 of the combustion chamber 1 was replaced with the structure shown in Fig. 7 and Fig. 8 except that the combustion type was produced in the same manner as in the third embodiment. Purification device. Further, a scrubber was provided in the same manner as in the first embodiment, and the apparatus as shown in Fig. 10 was completed. Using this apparatus, the combustion treatment test of the combustion type purification apparatus was performed in the same manner as in the third embodiment. As a result, no crack or the like is detected from the surfaces of the ceramic wall 4' and the metal wall 4".
如以上那樣，關於本發明的廢氣的第2實施形態的燃燒式淨化裝置，如實施例所示那樣，由於燃燒室的側面壁的上部表面由陶瓷壁構成，燃燒室的側面壁的下部表面由金屬壁構成，因而不損害燃燒室的側面壁的 耐熱性，即可抑制或者防止裂紋等。 As described above, in the combustion type purification apparatus according to the second embodiment of the exhaust gas of the present invention, as shown in the embodiment, since the upper surface of the side wall of the combustion chamber is made of a ceramic wall, the lower surface of the side wall of the combustion chamber is composed of The metal wall is constructed so as not to damage the side walls of the combustion chamber Heat resistance can suppress or prevent cracks and the like.
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| TW200519328A (en) * | 2003-08-20 | 2005-06-16 | Japan Pionics | Purification device for harmful gas |
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| KR20030024892A (en) * | 2000-08-22 | 2003-03-26 | 가부시키 가이샤 에바라 세이사꾸쇼 | Method and device for combustion type exhaust gas treatment |
| US7736599B2 (en) * | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
| JP4619798B2 (en) * | 2005-01-14 | 2011-01-26 | 日本パイオニクス株式会社 | Hazardous gas purification equipment |
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| US6027334A (en) * | 1994-11-10 | 2000-02-22 | J. Eberspacher Gmbh & Co. | Evaporation burner for a heater |
| TW200519328A (en) * | 2003-08-20 | 2005-06-16 | Japan Pionics | Purification device for harmful gas |
| US7736600B2 (en) * | 2005-10-31 | 2010-06-15 | Applied Materials, Inc. | Apparatus for manufacturing a process abatement reactor |
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