TWI624660B - Device handler, and vision inspection method - Google Patents
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Abstract
本發明涉及元件處理器，更具體地，涉及對元件進行視覺檢測的元件處理器及視覺檢測方法。 The present invention relates to a component processor, and more particularly, to a component processor and a visual detection method for visually detecting a component.
本發明揭示的視覺檢測方法，對在表面形成了多個球狀凸出部的元件，執行針對該多個凸出部的視覺檢測，其特徵在於，該方法包括：圖像獲取步驟，獲取對該元件表面的光的入射角為大於0°小於45°的第一入射角之第一入射光的第一圖像，以及對該元件表面的光的入射角為大於45°小於90°的第一入射角之第二入射光的第二圖像，獲取對形成在該元件表面的凸出部的三維第三圖像；三維形狀特性掌握步驟，以該第一圖像及該第二圖像為基準，掌握該凸起部的位置及三維形狀特性，進而存儲為三維形狀特性資訊；外輪廓線插補步驟，以在該三維形狀特性掌握步驟中所存儲的三維形狀特性資訊為基準，對由該三維視覺檢測部所獲取的該第三圖像的三維外輪廓線進行插補。 The visual inspection method disclosed in the present invention executes visual inspection for a plurality of protrusions on an element having a plurality of spherical protrusions formed on a surface, and is characterized in that the method includes an image acquisition step to acquire a pair of A first image of a first incident light having a first incident angle of light greater than 0 ° and less than 45 ° on the surface of the element, and a first image of light incident more than 45 ° and less than 90 ° on the surface of the element A second image of the second incident light at an incident angle to obtain a three-dimensional third image of the protrusion formed on the surface of the element; a three-dimensional shape characteristic grasping step, using the first image and the second image As a reference, grasp the position and three-dimensional shape characteristics of the convex portion, and then store them as three-dimensional shape characteristic information. The outer contour interpolation step is based on the three-dimensional shape characteristic information stored in the three-dimensional shape characteristic grasping step. The three-dimensional outer contour of the third image acquired by the three-dimensional visual detection unit is interpolated.
Description
本發明涉及一種元件處理器，更具體地涉及一種對元件進行視覺檢測的元件處理器及視覺檢測方法。 The present invention relates to a component processor, and more particularly, to a component processor and a visual detection method for visually detecting a component.
半導體元件經過半導體工藝、切割工藝等之後，被裝載到托盤(Customer-tray)等，並得以出廠。在此，於各工藝中，為了提高收益率及提高出廠後的可靠性，執行視覺檢測等。 After a semiconductor device is subjected to a semiconductor process, a dicing process, etc., it is loaded on a tray (Customer-tray), etc., and is shipped from the factory. Here, in each process, in order to improve profitability and reliability after shipment, visual inspection and the like are performed.
對於半導體元件的視覺檢測而言，是檢測引線(lead)或球柵(ball grid)的破損與否，以及檢測裂痕(crack)、刮傷(scratch)等半導體元件的外觀狀態及表面狀態的良好與否。 For the visual inspection of semiconductor devices, it is to detect the damage of lead or ball grid, and to check the appearance and surface conditions of semiconductor devices such as cracks and scratches. Or not.
隨著追加如上所述對半導體元件的外觀狀態及表面狀態的檢測，根據其檢測時間及各模組的配設，整體工藝的執行時間及裝置的大小會受到影響。 With the addition of the above-mentioned detection of the appearance state and surface state of the semiconductor element, the execution time of the overall process and the size of the device will be affected depending on the detection time and the arrangement of each module.
尤其，搭載了多數元件的晶圓、托盤等的裝載模組、用於視覺檢測各元件的一個以上的模組、檢測後根據檢測結果的卸載模組的構成及配置，會導致裝置的大小不同。 In particular, the configuration and configuration of loading modules such as wafers, trays, etc. that carry a large number of components, one or more modules for visually inspecting each component, and an unloading module based on the detection results after inspection may cause different device sizes. .
並且，裝置的大小會限制可以設在元件檢測線內的元件處理 器的數量，或者根據事先確定數量的元件處理器的設置會影響用於元件生產的設置費用。 In addition, the size of the device limits the component processing that can be placed in the component detection line The number of processors, or the setting of a component processor based on a predetermined number of components, affects the setup cost for component production.
本發明的目的在於認識到如上所述的問題而提供一種可以提高視覺檢測可靠性的元件處理器及視覺檢測方法。 An object of the present invention is to recognize the problems described above and provide a component processor and a visual inspection method which can improve the reliability of visual inspection.
本發明的另一目的在於提供一種通過有效配置用於視覺檢測等的模組，從而提高對元件的檢測速度的同時減小裝置的大小，由此最終可以減少元件生產費用的元件處理器及視覺檢測方法。 Another object of the present invention is to provide a component processor and a vision device which can effectively reduce the size of the device while increasing the speed of component detection by effectively configuring a module for visual inspection and the like. Detection method.
本發明的又一目的在於提供一種可以提高針對形成在元件表面的球端子等凸出部的視覺檢測可靠性的視覺檢測方法。 Another object of the present invention is to provide a visual inspection method that can improve the reliability of visual inspection of a protruding portion such as a ball terminal formed on a surface of an element.
本發明是為了達到如上所述的發明目的而提出的，本發明揭示的元件處理器的特徵是包括：裝載部，裝載盛放有多個元件的托盤並進行線性移動；第一底面視覺檢測部，與該裝載部內托盤的輸送方向相垂直地設置在該裝載部的一側，從而對元件執行視覺檢測；第一導軌，配置為與該裝載部中的托盤的移動方向相垂直；第一輸送工具，與該第一導軌相結合而沿著該第一導軌移動，為了執行視覺檢測，將元件從該裝載部拾起而輸送到該第一底面視覺檢測部；第一上面視覺檢測部，與該第一導軌相結合，從而與該第一輸送工具的移動相聯動而移動，當該第一輸送工具移動到該第一底面視覺檢測部時，檢測盛放在該裝載部的托盤裏的元件的上面；卸載部，從該裝載部接收盛放有已執行視覺檢測的元件的托盤，並根據該視覺檢測結果，在相關的托盤對元件進行分類。 The present invention is provided in order to achieve the above-mentioned object of the invention. The component processor disclosed in the present invention is characterized in that it includes: a loading section that loads a tray containing a plurality of components and moves linearly; a first bottom surface visual detection section Is arranged on one side of the loading section perpendicularly to the conveying direction of the tray in the loading section to perform visual inspection of the components; the first guide rail is configured to be perpendicular to the moving direction of the tray in the loading section; first conveying The tool is moved along the first guide rail in combination with the first guide rail, and in order to perform visual inspection, components are picked up from the loading section and transported to the first bottom visual detection section; the first upper visual detection section, and The first guide rail is combined to move in conjunction with the movement of the first conveyance tool. When the first conveyance tool is moved to the first bottom surface visual detection section, components in the tray of the loading section are detected. The unloading unit receives the tray containing the components that have performed the visual inspection from the loading unit, and advances the components on the relevant pallets according to the visual inspection result. Classification.
還可以追加包括：第二導軌，配置為與該第一導軌相平行；第二底面視覺檢測部，與該裝載部內托盤的輸送方向相垂直地設置在該裝載部的一側，從而對元件執行視覺檢測；第二輸送工具，與該第二導軌相結合而沿著該第二導軌移動，並為了執行視覺檢測，從該裝載部拾起元件而輸送到該第二底面視覺檢測部。 It may further include: a second guide rail configured to be parallel to the first guide rail; and a second bottom surface visual detection section disposed on a side of the loading section perpendicularly to a conveying direction of a tray in the loading section, thereby performing component execution Visual inspection; a second conveying tool that moves along the second guide rail in combination with the second guide rail, and in order to perform visual inspection, picks up a component from the loading section and conveys it to the second bottom visual detection section.
還可以追加包括：第一上面視覺檢測部，與所述第二導軌相結合，從而與該第二輸送工具的移動相聯動而移動，當該第一輸送工具移動到該第一底面視覺檢測部時，檢測盛放在該裝載部的托盤裏的元件的上面。 It may further include: a first upper visual detection unit combined with the second guide rail so as to move in conjunction with the movement of the second conveying tool, and when the first conveying tool moves to the first bottom visual detection unit At this time, the upper part of the components contained in the tray of the loading section is detected.
還可以追加包括：第二上面視覺檢測部，與所述第二導軌相結合，從而與該第二輸送工具的移動相聯動而移動，當該第一輸送工具移動到該第一底面視覺檢測部時，檢測盛放在該裝載部的托盤裏的元件的上面。 It may further include: a second upper visual detection unit combined with the second guide rail to move in conjunction with the movement of the second conveying tool, and when the first conveying tool moves to the first bottom visual detection unit At this time, the upper part of the components contained in the tray of the loading section is detected.
還可以追加包括：第三上面視覺檢測部，設置在所述裝載部內托盤的輸送路徑上，從而對元件執行視覺檢測。 It may further include: a third upper visual detection section provided on the conveying path of the tray in the loading section to perform visual inspection on the component.
並且，本發明揭示的視覺檢測方法，對在表面形成了多個球狀凸出部的元件，執行針對所述多個凸出部的視覺檢測，其特徵在於，該方法包括：圖像獲取步驟，獲取對該元件1表面的光的入射角為大於0°小於45°的第一入射角之第一入射光的第一圖像，以及對該元件表面的光的入射角為大於45°小於90°的第一入射角之第二入射光的第二圖像，獲取對形成在該元件表面的該凸出部的三維第三圖像；三維形狀特性掌握步驟，以該第一圖像及該第二圖像為基準，掌握該凸出部的位置及三維形狀特性，進而 存儲為三維形狀特性資訊；外輪廓線插補步驟，以在該三維形狀特性掌握步驟中所存儲的該三維形狀特性資訊為基準，對該第三圖像的三維外輪廓線進行插補。 In addition, the visual inspection method disclosed in the present invention performs visual inspection for the plurality of protrusions on an element having a plurality of spherical protrusions formed on the surface, and the method includes: an image acquisition step To obtain a first image of the first incident light having a first incident angle of light incident on the surface of the element 1 greater than 0 ° and less than 45 °, and an incident angle of light incident on the surface of the element greater than 45 ° A second image of the second incident light at a first incident angle of 90 ° is used to obtain a three-dimensional third image of the protrusion formed on the surface of the element; a three-dimensional shape characteristic grasping step, using the first image and The second image is used as a reference to grasp the position and three-dimensional shape characteristics of the protruding portion, and further It is stored as three-dimensional shape characteristic information; the outer contour line interpolation step is based on the three-dimensional shape characteristic information stored in the three-dimensional shape characteristic grasping step as a reference, and the three-dimensional outer contour line of the third image is interpolated.
該三維形狀特性掌握步驟包括：陰影區域分析步驟，基於在該第一圖像中對應於該凸出部所形成的多個陰影區域，掌握該凸出部的位置，掌握在該第二圖像中對應於該凸出部所形成的多個陰影區域內側是否具有比該陰影區域更亮的區域；特性存儲步驟，在該陰影區域分析步驟中，於該陰影區域具有比該陰影區域更亮的區域時，將在相關凸出部的上端部分具有相對於相關陰影區域而明亮區域大小的扁平部位的資訊存儲到該三維形狀特性資訊中。其中，該外輪廓線插補步驟，以存儲在該三維形狀特性資訊中的、相關凸出部在該凸出部的上端部分具有相對於相關陰影區域而明亮區域大小的扁平部位的資訊為基準，插補由該三維視覺檢測部所獲取的該第三圖像的三維外輪廓線。 The three-dimensional shape characteristic grasping step includes: a shadow area analysis step, grasping the position of the convex portion based on the plurality of shadow areas formed in the first image corresponding to the convex portion, and grasping in the second image Corresponding to whether there is a lighter area inside the multiple shadow areas formed by the protrusion than the shadow area; a characteristic storage step, in the shadow area analysis step, the shadow area has a brighter area than the shadow area; In the case of a region, information on a flat portion having a size of a bright region with respect to the associated shadow region at the upper end portion of the relevant protruding portion is stored in the three-dimensional shape characteristic information. The outer contour interpolation step is based on information stored in the three-dimensional shape characteristic information that the associated protrusion has a flat portion with a size of a bright area relative to the associated shadow area at the upper end portion of the protrusion. , Interpolate the three-dimensional outer contour of the third image obtained by the three-dimensional visual detection unit.
該三維形狀特性掌握步驟包括：以該第一圖像的環部位的大小為基準，將相對於元件表面的該凸出部的中心位置資訊存儲到該三維形狀特性資訊裏的特性存儲步驟。其中，該外輪廓線插補步驟以存儲於該三維形狀特性資訊裏的、相對於元件表面的該凸出部的中心位置為基準，對由該三維視覺檢測部所獲取的該第三圖像的三維外輪廓線可以進行插補。 The three-dimensional shape characteristic grasping step includes: a characteristic storing step of storing the center position information of the protruding portion relative to the element surface into the three-dimensional shape characteristic information based on the size of the ring portion of the first image. Wherein, the outer contour interpolation step is based on the center position of the protruding portion relative to the surface of the component stored in the three-dimensional shape characteristic information as a reference to the third image acquired by the three-dimensional visual detection portion. 3D outer contour lines can be interpolated.
並且，本發明揭示的視覺檢測方法，對在表面形成了多個球狀凸出部的元件，執行針對該多個凸出部的視覺檢測，其特徵在於，該方法包括：圖像獲取步驟，對該元件的表面相對移動的同時，將具有對元件表面的光的入射角為大於0°小於90°的第一入射角的狹縫光照射到元件的表 面，由此根據光三角法來檢測該元件表面上的高度，同時獲取對照射了該狹縫光的元件表面的第一圖像；狹縫光分析步驟，在該圖像獲取步驟所獲取的該第一圖像中，以圖元單位的圖元值為設定值以上的區域內，將於該圖像獲取步驟中檢測的高度為最大的位置指定為該凸出部的頂點位置。 In addition, the visual inspection method disclosed in the present invention performs visual inspection on the elements having a plurality of spherical protrusions formed on the surface, and the method includes: an image acquisition step, While moving the surface of the element relatively, the surface of the element is irradiated with slit light having a first incident angle of light incident on the surface of the element greater than 0 ° and less than 90 °. Surface, thereby detecting the height on the surface of the element according to the light triangle method, and simultaneously acquiring a first image of the surface of the element irradiated with the slit light; the slit light analysis step, In the first image, in a region where the primitive value of the primitive unit is greater than a set value, a position where the height detected in the image obtaining step is the largest is designated as the vertex position of the protruding portion.
該凸出部可以是球端子。 The protrusion may be a ball terminal.
該狹縫光可以為單色光。 The slit light may be monochromatic light.
根據本發明的元件處理器及視覺檢測方法，在對形成在元件的多個球狀凸出部執行視覺檢測時，以對多個球狀凸出部的二維圖像為基準，插補對相關球狀凸出部的形狀圖像，從而提高對三維視覺檢測的可靠性，同時可以顯著提高檢測速度。 According to the component processor and the visual inspection method of the present invention, when performing a visual inspection on a plurality of spherical protrusions formed on a component, the pair is interpolated based on a two-dimensional image of the plurality of spherical protrusions. The shape image of the spherical protrusions is related, thereby improving the reliability of 3D visual detection, and at the same time, the detection speed can be significantly improved.
尤其，在基於第二入射光，即高角第二入射光的第二圖像的形狀中，于中央部分形成明亮區域時，判斷為在球狀凸出部的上部存在扁平的部位，並使用在三維視覺檢測的圖像分析中，從而提高對三維視覺檢測的可靠性，同時可以顯著提高檢測速度。 In particular, in the shape of the second image based on the second incident light, that is, the high-angle second incident light, when a bright area is formed in the central portion, it is determined that a flat portion exists on the upper portion of the spherical protrusion, and is used in In the image analysis of 3D vision inspection, the reliability of 3D vision inspection is improved, and the detection speed can be significantly improved.
並且，以基於第一入射光，即低角第一入射光的第一圖像的環狀為基準，推定球狀凸出部相對於元件表面的中心位置，從而提高對三維視覺檢測的可靠性，同時可以顯著提高檢測速度。 In addition, based on the ring shape of the first image based on the first incident light, that is, the low-angle first incident light, the center position of the spherical protrusion relative to the surface of the element is estimated, thereby improving the reliability of 3D visual detection. At the same time, the detection speed can be significantly improved.
並且，根據本發明的元件處理器，在裝載盛放了多數元件的托盤的裝載部，將用於視覺檢測的視覺檢測模組位於裝載部的一側，當為了視覺檢測而從托盤拾起了元件的第一輸送工具移動到視覺檢測模組時，對盛放在托盤裏的元件的上面執行檢測的上面檢測模組與輸送工具的移動相聯動，進而對元件的上面進行檢測，因此根據模組的有效配置，可以減 小元件處理器的大小。 In addition, according to the component processor of the present invention, a visual inspection module for visual inspection is located on a side of the loading section in a loading section for loading a tray containing a large number of components, and when the tray is picked up from the tray for visual inspection, When the first conveying tool of the component is moved to the visual inspection module, the upper detection module that performs detection on the component contained in the tray is linked with the movement of the conveying tool to further detect the upper surface of the component. Effective configuration of groups can be reduced Small component processor size.
而且，根據本發明的元件處理器，根據模組的有效配置，以相同的大小為基準，可以確保餘量空間，從而可以設置用於追加視覺檢測的追加視覺檢測模組，由此構成為可以追加執行解析度或檢測內容不同的視覺檢測，因此可以追加元件處理器的功能。 In addition, according to the component processor of the present invention, according to the effective configuration of the module, the same size can be used as a reference, and the remaining space can be ensured, so that an additional visual inspection module for additional visual inspection can be provided, thereby being configured so that By performing visual inspections with different resolutions or detection contents, the function of the component processor can be added.
並且，按順序執行視覺檢測及上面檢測，從而提高對元件的檢測效率，由此提升元件處理器的檢測速度，最終可以提高元件處理器的性能。 In addition, the visual inspection and the upper inspection are performed in order to improve the detection efficiency of the component, thereby increasing the detection speed of the component processor, and ultimately improving the performance of the component processor.
而且，根據本發明的元件處理器，隨著裝置大小的變小及性能提高，最終可以顯著降低元件的製造成本。 Moreover, according to the component processor of the present invention, as the device size becomes smaller and the performance is improved, the manufacturing cost of the component can be significantly reduced in the end.
並且，根據本發明的元件處理器及視覺檢測方法，在檢測元件表面的凸出部，尤其球端子的頂點位置時，向元件表面照射狹縫光，並在照射到元件的圖像中，於具有事先設定值以上的圖元值的區域內，將根據狹縫光照射所檢測到的高度為最大的位置，指定為凸出部的頂點位置，由此可以提高反復執行視覺檢測的可信度，以及顯著提高視覺檢測速度。 In addition, according to the component processor and the visual inspection method of the present invention, when detecting a protruding portion on the surface of the component, especially a vertex position of the ball terminal, the slit surface is irradiated with slit light, and an image of the component is irradiated on the component image. In areas with a primitive value greater than a preset value, the position where the height detected by the slit light irradiation is the largest is designated as the vertex position of the protrusion, thereby improving the reliability of repeated visual inspections. , And significantly increase the speed of visual inspection.
1‧‧‧元件 1‧‧‧ components
1a‧‧‧凸出部 1a‧‧‧ protrusion
100‧‧‧裝載部 100‧‧‧Loading Department
2‧‧‧托盤 2‧‧‧ tray
200‧‧‧空托盤部 200‧‧‧Empty Tray Department
310‧‧‧卸載部 310‧‧‧Unloading Department
320‧‧‧卸載部 320‧‧‧Unloading Department
330‧‧‧卸載部 330‧‧‧Unloading Department
410‧‧‧第一底面視覺檢測部 410‧‧‧First Underside Visual Inspection Department
420‧‧‧第一上面視覺檢測部 420‧‧‧First visual inspection department
430‧‧‧第二底面視覺檢測部 430‧‧‧Second Underside Visual Inspection Section
440‧‧‧第二上面視覺檢測部 440‧‧‧Second Upper Visual Inspection Section
450‧‧‧第三上面視覺檢測部 450‧‧‧ The third upper visual inspection department
610‧‧‧第一輸送工具 610‧‧‧First Conveyor
620‧‧‧排序工具 620‧‧‧Sort Tool
630‧‧‧第二輸送工具 630‧‧‧Second Conveyor
680‧‧‧第一導軌 680‧‧‧First rail
681‧‧‧支撐部件 681‧‧‧ support parts
690‧‧‧第二導軌 690‧‧‧Second rail
710‧‧‧二維視覺檢測部 710‧‧‧Two-dimensional visual inspection department
711‧‧‧第一光源部 711‧‧‧First Light Department
712‧‧‧第一圖像獲取部 712‧‧‧First Image Acquisition Department
720‧‧‧三維視覺檢測部 720‧‧‧Three-dimensional visual inspection department
721‧‧‧第二光源部 721‧‧‧Second Light Source Department
722‧‧‧第二圖像獲取部 722‧‧‧Second Image Acquisition Department
圖1係本發明第一實施例之元件處理器一例的平面圖。 FIG. 1 is a plan view showing an example of a component processor according to a first embodiment of the present invention.
圖2a係本發明第一實施例之視覺檢測模組一例的概念圖。 FIG. 2a is a conceptual diagram of an example of a visual inspection module according to the first embodiment of the present invention.
圖2b係示出了圖2a視覺檢測模組的配置的平面圖。 Fig. 2b is a plan view showing the configuration of the visual inspection module of Fig. 2a.
圖3a係示出了圖2a視覺檢測模組的變形例的概念圖。 Fig. 3a is a conceptual diagram showing a modification of the visual inspection module of Fig. 2a.
圖3b係示出了圖3a視覺檢測模組的配置的平面圖。 Fig. 3b is a plan view showing the configuration of the visual inspection module of Fig. 3a.
圖3c係示出了圖3a視覺檢測模組的變形例的概念圖。 Fig. 3c is a conceptual diagram showing a modification of the visual inspection module of Fig. 3a.
圖4係示出了基於本發明視覺檢測方法的三維形狀特性資訊之類型的概念圖。 FIG. 4 is a conceptual diagram showing the type of three-dimensional shape characteristic information based on the visual inspection method of the present invention.
圖5係本發明第二實施例之元件處理器一例的平面圖。 5 is a plan view showing an example of a component processor according to a second embodiment of the present invention.
圖6a至圖8b係本發明視覺檢測方法的執行過程，即示出了根據凸出部位置的狹縫光變化的概念圖，其中，圖6a和圖6b係在經過凸出部的頂點之前。 FIG. 6a to FIG. 8b are the execution process of the visual inspection method of the present invention, that is, a conceptual diagram showing the variation of the slit light according to the position of the protrusion, wherein FIG. 6a and FIG. 6b are before the apex of the protrusion.
圖7a和圖7b係在凸出部的頂點、圖8a和圖8b係在經過凸出部的頂點之後的狹縫光的照射圖案。 7a and 7b are the apex of the convex part, and FIG. 8a and FIG. 8b are the irradiation patterns of the slit light after passing the vertex of the convex part.
圖9係在執行本發明視覺檢測方法的過程中檢測到的凸出部的高度及凸出部實際高度之間的關係圖表。 FIG. 9 is a graph showing the relationship between the height of the protrusions and the actual height of the protrusions during the visual inspection method of the present invention.
以下，參照附圖說明本發明的元件處理器及視覺檢測方法。 Hereinafter, the component processor and the visual inspection method of the present invention will be described with reference to the drawings.
如圖1所示，根據本發明的元件處理器包括：裝載部100，裝載盛放有多個元件1的托盤2並進行線性移動；第一底面視覺檢測部410，與裝載部100內托盤2的輸送方向相垂直地設置在裝載部100的一側，從而對元件1執行視覺檢測；第一導軌680，配置為與裝載部100中的托盤2的移動方向相垂直；第一輸送工具610，與第一導軌680相結合而沿著第一導軌680移動，為了執行視覺檢測，將元件從裝載部100拾起並輸送到第一底面視覺檢測部410；第一上面視覺檢測部420，與第一導軌680相結合，從而與第一輸送工具610的移動相聯動而移動，當第一輸送工具610移動到第一底面視覺 檢測部410時，檢測盛放在裝載部100的托盤2裏的元件1的上面；卸載部310、320、330，從裝載部100接收盛放有已執行視覺檢測的元件1的托盤2，並根據視覺檢測結果，在相關的托盤2對元件1進行分類。 As shown in FIG. 1, the component processor according to the present invention includes a loading section 100 for loading and linearly moving a tray 2 containing a plurality of components 1, and a first bottom surface visual detection section 410 and a tray 2 in the loading section 100. The conveying direction is perpendicular to one side of the loading section 100 so as to perform visual inspection on the component 1. The first guide rail 680 is configured to be perpendicular to the moving direction of the tray 2 in the loading section 100. The first conveying tool 610, Combined with the first guide rail 680 and moved along the first guide rail 680, in order to perform visual inspection, components are picked up from the loading section 100 and transported to the first bottom visual detection section 410; the first upper visual detection section 420, and the first A guide rail 680 is combined to move in conjunction with the movement of the first conveying tool 610. When the first conveying tool 610 moves to the first bottom surface, When the detecting unit 410 detects the top of the component 1 stored in the tray 2 of the loading unit 100, the unloading units 310, 320, and 330 receive from the loading unit 100 the tray 2 containing the component 1 that has been subjected to visual inspection, and Based on the results of the visual inspection, the components 1 are classified in the relevant tray 2.
在此，對於元件1而言，是WL-CSP(Wafer level chip scale package)、SD RAM、Flash RAM、CPU等已執行半導體工藝的元件，只要為在表面形成了球柵等凸出部1a的元件，則都可以成為其對象。 Here, the component 1 is a component that has been subjected to a semiconductor process, such as a WL-CSP (Wafer level chip scale package), SD RAM, Flash RAM, and CPU. As long as a projection 1a such as a ball grid is formed on the surface, Components can be their objects.
該托盤2是裝載8×10等陣列的多個元件1並進行輸送的構成，通常被規範為裝載記憶元件等。 The tray 2 is configured to carry and transport a plurality of elements 1 in an array of 8 × 10 or the like, and is generally standardized to load a memory element or the like.
所述裝載部100是通過裝載來盛放作為檢測對象的元件1並用以執行視覺檢測的構成，其可以具有各種構成。 The loading unit 100 is configured to contain the component 1 as a detection target by loading and perform visual inspection, and may have various structures.
例如，該裝載部100用於輸送以形成在托盤2上的安置槽裏所安置的狀態盛放了多個元件1的托盤2。 For example, the loading section 100 is used to transport a tray 2 in which a plurality of components 1 are stored in a state where the loading section 100 is formed in a placement groove formed on the tray 2.
該裝載部100可以採用各種結構，如圖1及韓國公開專利公報第10-2008-0092671號所示，可以包括：引導部(未圖示)，用於引導裝載了多個元件1的托盤2的移動；驅動部(未圖示)，使得托盤2沿著引導部移動。 The loading section 100 may adopt various structures, as shown in FIG. 1 and Korean Laid-Open Patent Publication No. 10-2008-0092671, and may include a guide section (not shown) for guiding the tray 2 on which a plurality of components 1 are loaded. The drive unit (not shown) moves the tray 2 along the guide unit.
針對該第一底面視覺檢測部410而言，與裝載部100內的托盤2的輸送方向相垂直地設置在裝載部100的一側，對元件1執行2D視覺檢測和3D視覺檢測中的至少一種視覺檢測，其可以採用各種構成。 The first bottom surface visual detection unit 410 is provided on one side of the loading unit 100 perpendicularly to the transport direction of the tray 2 in the loading unit 100, and performs at least one of 2D visual inspection and 3D visual inspection on the component 1. The visual inspection can adopt various configurations.
尤其，該第一底面視覺檢測部410利用相機、掃描器等，獲取對元件1的底面等外觀圖像，其可以採用各種構成。 In particular, the first bottom surface visual detection unit 410 uses a camera, a scanner, or the like to obtain an external image such as the bottom surface of the element 1, and it can adopt various configurations.
在此，由該第一底面視覺檢測部410所獲取的圖像，利用程 式等進行圖像分析後，將應用於不良與否等視覺檢測。 Here, the image acquired by the first bottom-surface visual detection unit 410 uses a process After the image analysis is performed, it will be applied to visual inspection such as defect.
並且，該第一底面視覺檢測部410根據視覺檢測的種類可以採用各種構成，尤其構成為均能執行2D視覺檢測和3D視覺檢測較好。 In addition, the first bottom surface visual detection unit 410 may adopt various configurations according to the type of visual detection, and in particular, it is better to perform both 2D visual detection and 3D visual detection.
例如，該第一底面視覺檢測部410可以包括二維視覺檢測部710和三維視覺檢測部720。其中，該二維視覺檢測部710包含：第一圖像獲取部712，為了2D視覺檢測，獲取由第一輸送工具610所拾起的元件1的底面圖像；第一光源部711，為使第一圖像獲取部712獲取圖像，向由第一輸送工具610所拾起的元件1的底面照射光。該三維視覺檢測部720包含：第二圖像獲取部722，為了3D視覺檢測，獲取由第一輸送工具610所拾起並輸送的元件1的底面圖像；第二光源部721，為使第二圖像獲取部722獲取圖像，向由第一輸送工具610所拾起並輸送的元件1的底面照射光。 For example, the first bottom surface visual detection section 410 may include a two-dimensional visual detection section 710 and a three-dimensional visual detection section 720. The two-dimensional visual detection unit 710 includes a first image acquisition unit 712 for acquiring a bottom image of the component 1 picked up by the first conveyance tool 610 for 2D visual inspection, and a first light source unit 711 for The first image acquisition unit 712 acquires an image, and irradiates the bottom surface of the element 1 picked up by the first conveyance tool 610 with light. The three-dimensional visual detection unit 720 includes a second image acquisition unit 722 for acquiring a bottom image of the component 1 picked up and transported by the first transport tool 610 for 3D visual inspection, and a second light source unit 721 for the first The two image acquisition sections 722 acquire images and irradiate light to the bottom surface of the element 1 picked up and transported by the first transport tool 610.
尤其，該第一底面視覺檢測部410根據二維視覺檢測部710和三維視覺檢測部720的構成及佈置，可以採用各種構成。 In particular, the first bottom-view detection unit 410 can adopt various configurations depending on the configuration and arrangement of the two-dimensional vision detection unit 710 and the three-dimensional vision detection unit 720.
首先，該第一底面視覺檢測部410可以採用如韓國公開專利公報第10-2010-0122140號的實施例及圖2a和圖2b中所示出的構成。 First, the first bottom surface visual detection unit 410 may adopt an embodiment such as Korean Laid-Open Patent Publication No. 10-2010-0122140 and a structure shown in FIGS. 2a and 2b.
在此，該三維視覺檢測部720的第二光源部721可以具有各種構成，進而可以使用如鐳射一樣的單色光、白色光等。 Here, the second light source section 721 of the three-dimensional visual detection section 720 may have various configurations, and further, monochromatic light such as laser light, white light, or the like may be used.
尤其，當作為測量物件的三維形狀微小時，對於鐳射而言，其散射強而難以檢測，因此使用散射弱的單色光、白色光較好。 In particular, when the three-dimensional shape of the measurement object is small, laser light has strong scattering and is difficult to detect. Therefore, it is better to use monochromatic light and white light with weak scattering.
而且，優選地，該三維視覺檢測部720的第二光源部721向元件1的表面以狹縫形式照射，即照射狹縫光，其可以包括：光導纖維，用於從光源傳遞光；狹縫部，與該光導纖維相連進而向元件1的表面照射狹縫形 狀的光。 Moreover, preferably, the second light source section 721 of the three-dimensional visual detection section 720 irradiates the surface of the element 1 in a slit form, that is, irradiates the slit light, which may include: a light guide fiber for transmitting light from the light source; Connected to the optical fiber to irradiate the surface of the element 1 with a slit shape Shape of light.
另外，當作為測量物件的元件1的大小較大時，會存在用一個相機(掃描器)對元件1表面上的球端子、凸起等凸出部分的高度等難以進行三維檢測的情形。 In addition, when the size of the component 1 as a measurement object is large, it may be difficult to perform three-dimensional detection with a camera (scanner) on the height of a protruding portion such as a ball terminal or a protrusion on the surface of the component 1.
為此，該三維視覺檢測部720可以包括兩個以上的第二圖像獲取部722。 To this end, the three-dimensional vision detection section 720 may include two or more second image acquisition sections 722.
此時，該三維視覺檢測部720可以包括與第二圖像獲取部722分別相對應的光源部721，如圖3a及圖3b所示，可以包括一個光源部721以及以光源部721的中心為基準按點對稱配置的一對第二圖像獲取部722。 At this time, the three-dimensional visual detection section 720 may include a light source section 721 corresponding to the second image acquisition section 722, as shown in FIGS. 3a and 3b, and may include a light source section 721 and a center of the light source section 721 as A pair of point-symmetrically arranged second image acquisition units 722 are referenced.
並且，該第一底面視覺檢測部410，在配置三維視覺檢測部720及二維視覺檢測部710時，以元件1的移動方向為基準，如圖2a及圖2b所示，相互重疊而構成，或者如圖3a至圖3c所示，由二維視覺檢測部710及三維視覺檢測部720按順序而配置。 In addition, when the first bottom surface visual detection unit 410 is arranged with the three-dimensional visual detection unit 720 and the two-dimensional visual detection unit 710, the moving direction of the element 1 is used as a reference, as shown in FIG. 2a and FIG. 2b, and they are configured to overlap each other. Alternatively, as shown in FIGS. 3 a to 3 c, the two-dimensional visual detection unit 710 and the three-dimensional visual detection unit 720 are arranged in this order.
尤其，針對該第一底面視覺檢測部410而言，當按順序配置二維視覺檢測部710及三維視覺檢測部720時，如圖3b所示，可以在三維視覺檢測部720中沿著元件1的移動方向配置一對第二圖像獲取部722，而在一對第二圖像獲取部722之間配置光源部721。 In particular, for the first bottom surface visual detection unit 410, when the two-dimensional visual detection unit 710 and the three-dimensional visual detection unit 720 are sequentially arranged, as shown in FIG. 3b, the three-dimensional visual detection unit 720 may be arranged along the element 1 A pair of second image acquisition sections 722 is disposed in the moving direction of the lens, and a light source section 721 is disposed between the pair of second image acquisition sections 722.
並且，針對該第一底面視覺檢測部410而言，當按順序配置二維視覺檢測部710及三維視覺檢測部720時，如圖3c所示，可以在三維視覺檢測部720沿著元件1的移動方向按順序配置第二圖像獲取部722及光源部721。 In addition, for the first bottom surface visual detection unit 410, when the two-dimensional visual detection unit 710 and the three-dimensional visual detection unit 720 are sequentially arranged, as shown in FIG. 3c, the three-dimensional visual detection unit 720 may The moving direction arranges the second image acquisition section 722 and the light source section 721 in this order.
針對該第一導軌680而言，與裝載部100中托盤2的移動方向 相垂直地配置，並支撐後述的第一輸送工具610及第一上面視覺檢測部420的同時引導其移動，且可以採用各種構成。 With respect to the first guide rail 680, the movement direction of the tray 2 in the loading section 100 The first conveyance tool 610 and the first upper visual detection section 420, which are arranged perpendicularly to each other, support the movement of the first conveyance tool 610 and the first upper visual detection section 420 described later, and can adopt various configurations.
尤其，該第一導軌680設有用於驅動第一輸送工具610及第一上面視覺檢測部420的、線性移動的線性驅動模組，且可移動地結合有用於第一輸送工具610以及第一上面視覺檢測部420均得以結合支撐的支撐部件681，以使第一輸送工具610和第一上面視覺檢測部420相互聯動而移動。 In particular, the first guide rail 680 is provided with a linear driving module for linearly moving the first conveying tool 610 and the first upper visual inspection unit 420, and is movably combined with the first conveying tool 610 and the first upper surface. The visual detection unit 420 can be combined with a supporting member 681 to support the first conveyance tool 610 and the first upper visual detection unit 420 to move in conjunction with each other.
該線性驅動模組使支撐部件681等沿著第一導軌680做線性移動，其可以採用旋轉電機、皮帶和滑輪的組合，螺旋千斤頂(Screw Jack)組合等各種構成。 The linear driving module linearly moves the supporting members 681 and the like along the first guide rail 680. The linear driving module can adopt various configurations such as a combination of a rotary motor, a belt and a pulley, and a screw jack combination.
該支撐部件681用於結合第一輸送工具610和第一上面視覺檢測部420，以使第一輸送工具610和第一上面視覺檢測部420相互聯動而移動，只要能夠沿第一導軌680做線性移動，可採用任意構成。 The supporting member 681 is used to combine the first conveying tool 610 and the first upper visual detection portion 420 so that the first conveying tool 610 and the first upper visual detection portion 420 move in association with each other, as long as it can be linear along the first guide rail 680 The mobile can adopt any structure.
該第一輸送工具610與第一導軌680相結合而沿著第一導軌680移動，為了執行視覺檢測，從裝載部100拾起元件並輸送到第一底面視覺檢測部410，其可以採用各種構成。 This first conveyance tool 610 moves along the first guide rail 680 in combination with the first guide rail 680. In order to perform visual inspection, the component is picked up from the loading section 100 and conveyed to the first bottom surface visual detection section 410, which can adopt various configurations .
例如，該第一輸送工具610包含用於拾起元件1的一個以上的拾起工具(未圖示)，為了提高檢測速度等，拾起工具按一列或多個列設置複數個較好。 For example, the first conveyance tool 610 includes one or more picking tools (not shown) for picking up the element 1. In order to improve the detection speed and the like, it is preferable that the picking tools are provided in a plurality of rows in one or more rows.
該拾起工具基於真空壓力拾起元件1，其可以採用各種構成。 This pick-up tool is based on a vacuum pressure pick-up element 1 and can have various configurations.
該第一上面視覺檢測部420與第一導軌680相連進而與第一輸送工具610的移動相聯動而移動，當第一輸送工具610移動到第一底面視覺檢測部410時，檢測盛放在裝載部100的托盤2裏的元件1的上面，其可以 採用各種構成。 The first upper visual detection unit 420 is connected to the first guide rail 680 and moves in conjunction with the movement of the first conveying tool 610. When the first conveying tool 610 moves to the first bottom visual detection unit 410, the detection is held in the loading The top of the component 1 in the tray 2 of the section 100, which can Various configurations are adopted.
該第一上面視覺檢測部420獲取盛放在托盤2裏的元件1的圖像，對所獲取的元件1的圖像，尤其對應於經由第一底面視覺檢測部410所獲取的底面而分析元件1的上面的圖像，從而檢測其狀態。 The first upper visual detection section 420 acquires an image of the component 1 stored in the tray 2, and analyzes the component with respect to the acquired image of the component 1, particularly corresponding to the bottom surface obtained through the first bottom surface visual detection section 410. 1 on the top image to detect its status.
尤其，該第一上面視覺檢測部420可以用於檢測文字、標識等表示在元件1上面的標誌。 In particular, the first upper visual detection unit 420 may be used to detect a mark displayed on the element 1 such as a character or a logo.
另外，該第一上面視覺檢測部420對由第一輸送工具610所拾起，並且對在第一底面視覺檢測部410完成檢測之後並裝載到托盤2裏的元件1，執行視覺檢測最為有效。 In addition, the first upper visual inspection unit 420 is most effective for performing visual inspection on the component 1 picked up by the first conveyance tool 610 and the component 1 loaded into the tray 2 after the first lower visual inspection unit 410 completes the inspection.
並且，該第一上面視覺檢測部420根據檢測條件，可以獲取一個元件1或兩個以上元件1的圖像。 In addition, the first upper visual detection unit 420 can acquire images of one element 1 or two or more elements 1 according to detection conditions.
該卸載部310、320、330從裝載部100接收盛放有已完成視覺檢測的元件1的托盤2，並根據該視覺檢測結果，在相關的托盤2對元件1進行分類，其可以採用各種構成。 The unloading sections 310, 320, and 330 receive the trays 2 on the loading section 100 containing the components 1 that have been visually inspected, and classify the components 1 on the relevant trays 2 based on the visual inspection results, which can adopt various configurations .
該卸載部310、320、330具有與裝載部100類似的結構，根據元件1的檢測結果數量，賦予良品(G)，不良1或以上1(R1)，不良2或以上2(R2)等分類等級較好。 The unloading sections 310, 320, and 330 have a structure similar to that of the loading section 100, and are classified according to the number of detection results of element 1 as good (G), defective 1 or more 1 (R1), defective 2 or more 2 (R2), and the like. Good grade.
並且，該卸載部310、320、330可以平行設置為多個卸載托盤部，該卸載托盤部包括：引導部(未圖示)，平行設置在裝載部100的一側；驅動部(未圖示)，使得托盤2沿著引導部移動。 In addition, the unloading portions 310, 320, and 330 may be provided in parallel as a plurality of unloading tray portions. The unloading tray portion includes: a guide portion (not shown) disposed in parallel on one side of the loading portion 100; and a driving portion (not shown) ) So that the tray 2 moves along the guide.
另外，該托盤2在裝載部100與卸載部310、320、330之間，基於托盤輸送裝置(未圖示)得以輸送，還可以追加包括向卸載部310、320、 330供給未裝載元件1的空托盤2的空托盤部200。 In addition, the tray 2 is transported between the loading section 100 and the unloading sections 310, 320, and 330 by a tray conveying device (not shown). 330 is supplied to the empty tray portion 200 of the empty tray 2 on which the component 1 is not loaded.
此時，該空托盤部200可以包括：引導部(未圖示)，平行設置在裝載部100的一側；驅動部(未圖示)，使得托盤2沿著引導部移動。 At this time, the empty tray portion 200 may include: a guide portion (not shown) disposed in parallel to one side of the loading portion 100; and a driving portion (not shown) so that the tray 2 moves along the guide portion.
並且，在該卸載部310、320、330可以單獨設置排序工具(sorting tool)620，以用於在各卸載托盤部之間，根據各卸載托盤部的分類等級，來輸送元件1。 In addition, a sorting tool 620 may be separately provided in the unloading sections 310, 320, and 330 for conveying the component 1 between the unloading tray sections according to the classification level of each unloading tray section.
該排序工具620具有與前述的第一輸送工具610相同或類似的構成，可以採用複數列結構或單列結構。 The sorting tool 620 has the same or similar structure as the aforementioned first conveyance tool 610, and may adopt a complex number structure or a single-line structure.
另外，關於該卸載部310、320、330，說明了以向在裝載部100所裝載的托盤2再次裝載的狀態進行卸載的實施例，但只要是裝載到形成有用於盛放元件1之容器(pocket)的輸送帶(carrier tape)並進行卸載的，包含所謂卷帶包裝模組(tape and reel module)等，能盛放元件1進而進行卸載的結構，則可以採用任意構成。 In addition, the unloading sections 310, 320, and 330 have been described as an example in which the unloading is performed on the tray 2 loaded in the loading section 100. However, as long as the unloading sections 310, 320, and 330 are loaded into a container in which the component 1 is formed ( Any structure can be used for the unloading of a carrier tape in a pocket, including a so-called tape and reel module, which can hold the component 1 and then unload it.
具有如上該構成的元件處理器，在裝載盛放了多數元件1的托盤2的裝載部100，將用於視覺檢測的視覺檢測模組(第一底面視覺檢測部410)位於裝載部100的一側，當為了視覺檢測而從托盤2拾起了元件1的第一輸送工具610移動到視覺檢測模組時，對盛放在托盤2裏的元件1的上面執行檢測的上面檢測模組(第一上面視覺檢測部420)與第一輸送工具610的移動相聯動，進而對元件1的上面進行檢測，因此根據模組的有效配置，可以減小元件處理器的大小。 With the component processor having the above-mentioned structure, in the loading section 100 on which the tray 2 containing a large number of components 1 is loaded, a visual inspection module (a first bottom surface visual inspection section 410) for visual inspection is located in one of the loading sections 100. On the other hand, when the first conveyance tool 610 that picked up the component 1 from the tray 2 for visual inspection is moved to the visual inspection module, the upper inspection module (the first An upper visual detection unit 420) is linked with the movement of the first conveyance tool 610 to detect the upper surface of the component 1. Therefore, according to the effective configuration of the module, the size of the component processor can be reduced.
另外，本發明的元件處理器，根據如上該第一底面視覺檢測部410及第一上面視覺檢測部420的配置而具有空間餘量，因此第一底面視 覺檢測部410和第一上面視覺檢測部420，以及對執行其他種類視覺檢測的追加視覺檢測模組的設置等，可以追加設置用於向元件處理器賦予追加功能的模組。 In addition, the component processor of the present invention has a space margin according to the arrangement of the first bottom visual detection unit 410 and the first top visual detection unit 420 as described above. The visual detection unit 410, the first upper visual detection unit 420, and the setting of additional visual detection modules that perform other types of visual detection can be additionally provided with modules for giving additional functions to the component processor.
例如，本發明的元件處理器，如圖1所示，還可以追加包括：第二導軌690，以該裝載部100的托盤2的輸送方向為基準，與第一導軌680相平行地配置在第一導軌680的後方；第二底面視覺檢測部430，與裝載部100內托盤2的輸送方向相垂直地設置在裝載部100的一側，從而對元件1執行視覺檢測；第二輸送工具630，與第二導軌690相結合而沿著第二導軌690移動，並為了執行視覺檢測，從裝載部100拾起元件而輸送到第二底面視覺檢測部430。 For example, as shown in FIG. 1, the component processor of the present invention may further include a second guide rail 690, which is arranged parallel to the first guide rail 680 in the first guide rail 680 based on the transport direction of the tray 2 of the loading unit 100. The rear of a guide rail 680; the second bottom surface visual detection section 430 is disposed on one side of the loading section 100 perpendicularly to the conveying direction of the tray 2 in the loading section 100 to perform visual inspection on the component 1; the second conveying tool 630, In combination with the second guide rail 690, it moves along the second guide rail 690, and in order to perform visual inspection, the component is picked up from the loading section 100 and transported to the second bottom surface visual detection section 430.
該第二導軌690以裝載部100的托盤2的輸送方向為基準，與第一導軌680相平行地配置在第一導軌680的後方，其可以具有與第一導軌680類似的構成。 The second guide rail 690 is arranged behind the first guide rail 680 in parallel with the first guide rail 680 based on the conveying direction of the tray 2 of the loading unit 100, and may have a similar structure to the first guide rail 680.
該第二底面視覺檢測部430與裝載部100內托盤2的輸送方向相垂直地設置在裝載部100的一側，從而對元件1執行2D視覺檢測和3D視覺檢測中至少一個追加視覺檢測，其可以具有與第一底面視覺檢測部410類似的構成，且根據視覺檢測的種類及方式，可以採用各種構成。 The second bottom surface visual detection unit 430 is disposed on one side of the loading unit 100 perpendicularly to the conveying direction of the tray 2 in the loading unit 100, so as to perform at least one of 2D visual inspection and 3D visual inspection on the component 1 with additional visual inspection. The configuration may be similar to that of the first bottom surface visual detection unit 410, and various configurations may be adopted depending on the type and method of the visual detection.
例如，該第二底面視覺檢測部430對於微小裂痕、微小刮傷等檢測，通過調整解析度，可以執行2D視覺檢測和3D視覺檢測中的至少一種。 For example, the second bottom surface visual detection unit 430 can perform at least one of 2D visual detection and 3D visual detection by adjusting the resolution for detecting micro-cracks and micro-scratches.
該第二輸送工具630與第二導軌690相結合而沿著第二導軌690移動，為了執行視覺檢測，從裝載部100拾起元件而輸送到第二底面視 覺檢測部430，其可以具有與前述的第一輸送工具610相同或類似的構成。 This second conveyance tool 630 moves along the second guide rail 690 in combination with the second guide rail 690. In order to perform visual inspection, the component is picked up from the loading section 100 and conveyed to the second bottom surface. The sensory detection unit 430 may have the same or similar configuration as the aforementioned first conveyance tool 610.
另外，該第二導軌690，如圖5該，可以追加設置與前述的第一底面視覺檢測部410相聯動而移動及執行檢測的第一上面視覺檢測部420執行類似檢測的後續上面視覺檢測部(未圖示)，即第二上面視覺檢測部440。 In addition, as shown in FIG. 5, the second guide rail 690 may be additionally provided with a first upper visual detection unit 420 that moves and performs detection in association with the first lower visual detection unit 410 described above, and a subsequent upper visual detection unit that performs similar detection. (Not shown), that is, the second upper visual detection unit 440.
即，該第二底面視覺檢測部430及第二上面視覺檢測部440，可以被設置為與第一底面視覺檢測部410及第一上面視覺檢測部420的結合及聯動移動相同或類似。 That is, the second bottom surface visual detection section 430 and the second top surface visual detection section 440 may be set to be the same as or similar to the combination and linkage movement of the first bottom surface visual detection section 410 and the first top visual detection section 420.
換言之，該第一底面視覺檢測部410及第二上面視覺檢測部420的組合，如圖5所示，沿著裝載部100內托盤2的輸送方向可以配置為多個列(圖5中以2列配置)。 In other words, as shown in FIG. 5, the combination of the first bottom visual detection section 410 and the second top visual detection section 420 may be arranged in multiple rows along the conveying direction of the tray 2 in the loading section 100 (indicated by 2 in FIG. 5 Column configuration).
此時，該第一底面視覺檢測部410及第二上面視覺檢測部420，可以沿著與裝載部100內托盤2的輸送方向相垂直的方向配置。 At this time, the first bottom surface visual detection section 410 and the second top surface visual detection section 420 may be arranged along a direction perpendicular to the conveyance direction of the tray 2 in the loading section 100.
並且，為了使該第二上面視覺檢測部420沿著與裝載部100內托盤2的輸送方向相垂直的方向線性移動，可以設置一個以上的導軌680、690。 In addition, in order to linearly move the second upper visual detection unit 420 in a direction perpendicular to the conveyance direction of the tray 2 in the loading unit 100, one or more guide rails 680 and 690 may be provided.
在此，該第二導軌690用於引導第二輸送工具690及第二上面視覺檢測部420的線性移動，其可以具有與第一導軌680類似的構成。 Here, the second guide rail 690 is used to guide the linear movement of the second conveyance tool 690 and the second upper visual detection unit 420, and may have a structure similar to that of the first guide rail 680.
進一步，該第二導軌690可以與第一導軌680構成為一體，此時，第一底面視覺檢測部410及第二上面視覺檢測部420可以配置在第一導軌680的前方側，而第二底面視覺檢測部430及第二上面視覺檢測部440可以配置在第一導軌680的前方側。 Further, the second guide rail 690 may be integrated with the first guide rail 680. At this time, the first bottom surface visual detection unit 410 and the second upper surface visual detection unit 420 may be disposed on the front side of the first rail 680, and the second bottom surface The visual detection unit 430 and the second upper visual detection unit 440 may be disposed on the front side of the first guide rail 680.
該第二底面視覺檢測部430執行與第二底面視覺檢測部430相聯動而移動及執行檢測的第一上面視覺檢測部420類似的檢測，其可以具有與第一上面視覺檢測部420類似的構成，作為執行2D視覺檢測及3D視覺檢測中至少一個視覺檢測的構成，可以採用各種構成。 The second bottom surface visual detection unit 430 performs detection similar to the first bottom surface visual detection unit 420 that moves in association with the second bottom surface visual detection unit 430 to perform detection, and may have a configuration similar to that of the first top visual detection unit 420. As a configuration for performing at least one of the 2D visual detection and the 3D visual detection, various configurations may be adopted.
另外，該元件處理器在第一底面視覺檢測部410及第二上面視覺檢測部420組合的基礎上，如圖5所示，還可以追加包括設置在裝載部100內托盤2的輸送路徑上從而對元件1執行視覺檢測的第三上面視覺檢測部450。 In addition, based on the combination of the first bottom visual detection unit 410 and the second top visual detection unit 420, as shown in FIG. 5, the component processor may further include a conveyance path provided on the tray 2 in the loading unit 100 so that A third upper visual detection section 450 that performs visual inspection on the element 1.
該第三上面視覺檢測部450在裝載部100與卸載部310、320、330之間，於根據托盤輸送裝置(未圖示)輸送托盤2時，為了避免產生干擾，在與裝載部100內托盤2的輸送路徑相垂直的水準方向上，可以線性移動。 The third upper visual detection unit 450 is arranged between the loading unit 100 and the unloading units 310, 320, and 330. When the tray 2 is conveyed by a tray conveying device (not shown), in order to avoid interference, the tray is placed in the loading unit 100. The conveying path of 2 can move linearly in a vertical level.
即，該第三上面視覺檢測部450設置在裝載部100的末端部分，從而根據托盤輸送裝置(未圖示)輸送托盤時，為了避免產生干擾，在裝載部100的一側，即在圖中可向右側移動。 That is, the third upper visual detection portion 450 is provided at the end portion of the loading portion 100, so that when a tray is transported by a tray conveying device (not shown), in order to avoid interference, one side of the loading portion 100, that is, in the figure Can be moved to the right.
另外，該第三上面視覺檢測部450具有與前述的第一上面視覺檢測部420或第二上面視覺檢測部440類似的構成，作為執行2D視覺檢測及3D視覺檢測中至少一個視覺檢測的構成，可以採用各種構成。 In addition, the third upper visual detection unit 450 has a configuration similar to the aforementioned first upper visual detection unit 420 or the second upper visual detection unit 440, and is configured to perform at least one of 2D visual inspection and 3D visual inspection. Various configurations can be adopted.
參照附圖對基於具有如上該構成的元件處理器的視覺檢測進行說明如下。只是，以下描述的視覺檢測方法並非局限在根據本發明實施例的元件處理器的構成。 The visual inspection based on the component processor having the above configuration will be described with reference to the drawings. However, the visual detection method described below is not limited to the configuration of the component processor according to the embodiment of the present invention.
如圖4所示，根據本發明的視覺檢測方法，其特徵在於，對 在表面形成了多個球狀凸出部1a的元件1，執行針對該多個凸出部1a的視覺檢測。 As shown in FIG. 4, the visual inspection method according to the present invention is characterized in that: The element 1 having a plurality of spherical protrusions 1a formed on the surface performs visual inspection on the plurality of protrusions 1a.
並且，根據本發明的視覺檢測方法包括：圖像獲取步驟，獲取對元件1表面的光的入射角為大於0°小於45°的第一入射角之第一入射光的第一圖像，以及對元件1表面的光的入射角為大於45°小於90°的第一入射角之第二入射光的第二圖像，獲取對形成在該元件1表面的該凸出部1a的三維第三圖像；三維形狀特性掌握步驟，以該第一圖像及該第二圖像為基準，掌握該凸出部1a的位置及三維形狀特性，進而存儲為三維形狀特性資訊；外輪廓線插補步驟，以在該三維形狀特性掌握步驟中所存儲的該三維形狀特性資訊為基準，對由該三維視覺檢測部720所獲取的該第三圖像的三維外輪廓線進行插補。 Moreover, the visual inspection method according to the present invention includes an image acquisition step of acquiring a first image of a first incident light at a first incident angle of light having an incident angle of greater than 0 ° and less than 45 ° to the surface of the element 1, and A second image of the second incident light having a first incident angle of light having an incident angle of greater than 45 ° and less than 90 ° to the surface of the element 1 is obtained to obtain a three-dimensional third image of the convex portion 1a formed on the surface of the element 1. Image; the step of grasping the three-dimensional shape characteristic, based on the first image and the second image, grasping the position and the three-dimensional shape characteristic of the protruding portion 1a, and then storing the information as the three-dimensional shape characteristic; outer contour interpolation In the step, the three-dimensional outer contour line of the third image acquired by the three-dimensional visual detection unit 720 is interpolated based on the three-dimensional shape characteristic information stored in the three-dimensional shape characteristic grasping step.
該圖像獲取步驟是獲取對元件1表面的光的入射角為大於0°小於45°的第一入射角(低角)之第一入射光的第一圖像、以及對該元件1表面的光的入射角為大於45°小於90°的第一入射角(高角)之第二入射光的第二圖像，獲取對形成在該元件1表面的該凸出部1a的三維第三圖像的步驟，其可以由如前述元件處理器的第一底面視覺檢測部410等視覺檢測模組所執行。 The image acquisition step is to obtain a first image of a first incident light having a first incident angle (low angle) of light having an incident angle of greater than 0 ° to less than 45 ° on the surface of the element 1 and The second image of the second incident light with the first incident angle (high angle) of the incident angle of light greater than 45 ° and less than 90 ° is obtained, and a three-dimensional third image of the convex portion 1a formed on the surface of the element 1 is acquired. The steps may be performed by a visual inspection module such as the first bottom surface visual inspection unit 410 of the component processor.
換言之，該圖像獲取步驟是為了對形成在元件1表面的球狀凸出部1a執行三維視覺檢測，獲取對高角的二維第一圖像及對低角的二維第二圖像，並獲取對球狀凸出部1a的三維圖像，即第三圖像的步驟。 In other words, the image acquisition step is to perform three-dimensional visual inspection on the spherical protrusions 1a formed on the surface of the element 1 to acquire a two-dimensional first image for a high angle and a two-dimensional second image for a low angle, and A step of obtaining a three-dimensional image of the spherical protrusion 1a, that is, a third image.
該三維形狀特性掌握步驟是以該第一圖像及該第二圖像為基準，掌握該凸出部1a的位置及三維形狀特性，從而作為三維形狀特性資 訊所存儲的步驟，其可以由多種方法來執行。 The three-dimensional shape characteristic grasping step is based on the first image and the second image, and grasps the position and three-dimensional shape characteristics of the protruding portion 1a, so as to obtain three-dimensional shape characteristic information. The steps stored in the message can be performed by various methods.
在該三維形狀特性掌握步驟所存儲的三維形狀特性資訊，是對基於事先被類型化的三維形狀特性的二維圖像，考慮了變化的資訊。 The three-dimensional shape characteristic information stored in the three-dimensional shape characteristic grasping step is information that takes into account changes in a two-dimensional image based on the three-dimensional shape characteristics that have been typed in advance.
例如，當形成在元件1表面的球狀凸出部1a的上面具有扁平部位時，基於高角，即第二入射角的第二圖像中，於陰影區域的中心形成明亮區域。 For example, when the spherical protrusions 1a formed on the surface of the element 1 have flat portions, a bright area is formed at the center of the shadow area in the second image based on the high angle, that is, the second incident angle.
因此，若基於第二入射光的第二圖像中，於陰影區域的中心形成明亮區域，則由於在相關球狀凸出部1a的上面具有扁平的部位，因此在解析三維形狀，即插補外輪廓線時，將之反映進去。 Therefore, if a bright area is formed in the center of the shadow area in the second image based on the second incident light, since the upper part of the related spherical protrusion 1a has a flat portion, the three-dimensional shape is analyzed, that is, interpolation When you outline the outline, reflect it.
為此，該三維形狀特性掌握步驟，包括：陰影區域分析步驟，基於在該第一圖像中對應於該凸出部1a所形成的多個陰影區域，掌握該凸出部1a的位置，掌握在該第二圖像中對應於該凸出部1a所形成的多個陰影區域內側是否具有比該陰影區域更亮的區域；特性存儲步驟，在該陰影區域分析步驟中，於該陰影區域具有比該陰影區域更亮的區域時，將在相關凸出部1a的上端部分具有相對於相關陰影區域而明亮區域大小的扁平部位的資訊存儲到該三維形狀特性資訊中。該外輪廓線插補步驟，以存儲在該三維形狀特性資訊中的、相關凸出部1a在該凸出部1a的上端部分具有相對於相關陰影區域而明亮區域大小的扁平部位的資訊為基準，可以插補由該三維視覺檢測部720所獲取的該第三圖像的三維外輪廓線。 To this end, the three-dimensional shape characteristic grasping step includes a shadow region analysis step of grasping the position of the projection 1a based on a plurality of shadow regions formed in the first image corresponding to the projection 1a, and grasping Whether there is a lighter area than the shadow area inside the plurality of shadow areas corresponding to the protruding portion 1a in the second image; a characteristic storing step, in the shadow area analysis step, the shadow area has When the area is brighter than the shaded area, information on a flat portion having a size of a bright area relative to the shaded area in the upper end portion of the relevant protruding portion 1a is stored in the three-dimensional shape characteristic information. The outer contour interpolation step is based on the information in the three-dimensional shape characteristic information that the related convex portion 1a has a flat portion with a bright area relative to the associated shadow area at the upper end portion of the convex portion 1a. , The three-dimensional outer contour of the third image obtained by the three-dimensional visual detection unit 720 may be interpolated.
作為另一種例子，球狀凸出部1a根據在元件1表面上的凸出程度，其中心低於或高於元件1的表面，由此其中心的位置可以形成為多樣。 As another example, the spherical protrusion portion 1 a has a center lower or higher than the surface of the element 1 according to the degree of protrusion on the surface of the element 1, and thus the position of the center thereof can be formed variously.
在此，根據對元件1表面的球狀凸出部1a的中心位置，在基 於高角，即第一入射光的第二圖像中，環狀的大小及厚度有所不同。 Here, according to the center position of the spherical protrusion 1a on the surface of the element 1, The size and thickness of the ring are different in the high-angle, that is, the second image of the first incident light.
由此，基於根據第一入射光的第二圖像中環狀的大小及厚度，可以推定相對於元件1表面的球狀凸出部1a中心位置，並且在維度形狀解析，即外輪廓線插補時，將之反映進去。 Therefore, based on the size and thickness of the ring in the second image of the first incident light, it is possible to estimate the center position of the spherical protrusion 1a with respect to the surface of the element 1 and analyze the dimensional shape, that is, the outer contour line is inserted Stoppage time, reflect it.
因此，該三維形狀特性掌握步驟包括：以該第一圖像的環部位的大小為基準，將相對於元件1表面的該凸出部1a的中心位置資訊存儲到該三維形狀特性資訊裏的特性存儲步驟。並且，該外輪廓線插補步驟以存儲於該三維形狀特性資訊裏的、相對於元件1表面的該凸出部1a的中心位置為基準，可以對由該三維視覺檢測部720所獲取的該第三圖像的三維外輪廓線進行插補。 Therefore, the three-dimensional shape characteristic grasping step includes: storing the center position information of the protruding portion 1a with respect to the surface of the element 1 in the three-dimensional shape characteristic information based on the size of the ring portion of the first image. Store steps. In addition, the outer contour interpolation step is based on the center position of the protruding portion 1a with respect to the surface of the element 1 stored in the three-dimensional shape characteristic information, and can be used for the obtained by the three-dimensional visual detection unit 720. The three-dimensional outer contour of the third image is interpolated.
另外，該三維外輪廓線插補為，依據第三圖像並且畫出對元件1表面的外輪廓線時，根據LMS(Least Mean Square)方法可以執行對基於第三圖像所解析的球狀凸出部1a中心的半徑。 In addition, the three-dimensional outer contour interpolation is based on the third image and drawing the outer contour on the surface of the element 1. According to the LMS (Least Mean Square) method, the spherical shape analyzed based on the third image can be performed. The radius of the center of the protrusion 1a.
另外，該第一底面視覺檢測部410等是視覺檢測模組，可以對形成於元件1底面的球柵等凸出部的形狀、位置等執行三維視覺檢測，此時，在執行三維視覺檢測時，更加正確檢測球柵等凸出部的形狀、位置較好。 In addition, the first bottom surface visual detection unit 410 and the like are visual detection modules, which can perform three-dimensional visual detection on the shape, position, and the like of a protruding portion such as a ball grid formed on the bottom surface of the element 1. At this time, when performing the three-dimensional visual detection The shape and position of protrusions such as ball grids are detected more accurately.
為此，根據本發明的視覺檢測方法，其特徵在於，如圖6a至圖8b所示，對在表面形成了多數球狀凸出部1a的元件1，執行對多數凸出部1a的視覺檢測。 Therefore, according to the visual inspection method of the present invention, as shown in FIG. 6a to FIG. 8b, the visual inspection of the majority of the protrusions 1a is performed on the element 1 having a plurality of spherical protrusions 1a formed on the surface. .
並且，根據本發明的視覺檢測方法包括：圖像獲取步驟，對元件1的表面相對移動的同時，將具有對元件1表面的光的入射角為大於0° 小於90°的第一入射角的狹縫光照射到元件1的表面，由此根據光三角法來檢測元件1表面上的高度，同時獲取對照射了狹縫光的元件1表面的第一圖像；狹縫光分析步驟，在圖像獲取步驟所獲取的第一圖像中，以圖元單位的圖元值為設定值以上的區域內，將於圖像獲取步驟中檢測的高度為最大的位置指定為該凸出部1a的頂點位置。 Moreover, the visual inspection method according to the present invention includes: an image acquisition step, while moving the surface of the element 1 relatively, the incident angle of light having a surface of the element 1 is greater than 0 ° The slit light having a first incident angle of less than 90 ° is irradiated to the surface of the element 1, thereby detecting the height on the surface of the element 1 according to the light triangulation method, and simultaneously acquiring a first image of the surface of the element 1 having the slit light Image; slit light analysis step, in the first image obtained in the image acquisition step, in a region where the primitive value of the primitive unit is above a set value, the height to be detected in the image acquisition step is the maximum The position of is designated as the vertex position of the projection 1a.
該圖像獲取步驟是對元件1的表面相對移動，同時將具有對元件1表面的光的入射角為大於0°小於90°的第一入射角的狹縫光照射到元件1的表面，由此根據光三角法來檢測元件1表面上的高度，同時獲取對照射了狹縫光的元件1表面的第一圖像的步驟，其可以由各種方法來執行。 The image acquisition step is to relatively move the surface of the element 1, and at the same time, irradiate a slit light having a first incident angle of light incident on the surface of the element 1 at a angle greater than 0 ° to less than 90 ° to the surface of the element 1 by This step of detecting the height on the surface of the element 1 and acquiring a first image of the surface of the element 1 irradiated with the slit light according to the light triangle method can be performed by various methods.
在此，該狹縫光可以由照度值來判別，照射單色光，例如白色光較好。 Here, the slit light can be discriminated by an illuminance value, and monochromatic light such as white light is preferred.
並且，該元件1的表面上的高度，即，形成在元件1表面的球端子、凸起等凸出部1a的高度，可以利用所照射狹縫光，根據光三角法來檢測。 In addition, the height on the surface of the element 1, that is, the height of the projections 1 a such as ball terminals and protrusions formed on the surface of the element 1 can be detected by the light triangle method using the irradiated slit light.
但是，該凸出部1a的高度，如圖9所示，雖然其頂點高，但由於狹縫光的歪曲，在經過了凸出部1a頂點的位置上具有最大值。 However, as shown in FIG. 9, although the height of the protruding portion 1 a is high, the distortion of the slit light has a maximum value at a position passing the vertex of the protruding portion 1 a.
作為參考，圖6a和圖6b示出了在經過凸出部的頂點之前、圖7a和圖7b示出了在凸出部的頂點、圖8a和圖8b示出了在經過凸出部的頂點之後的狹縫光的照射圖案。 For reference, Figs. 6a and 6b show the vertices before passing through the bulges, Figs. 7a and 7b show the vertices at the bulges, and Figs. 8a and 8b show the vertices passing through the bulges. After that, the slit light is irradiated.
這些源於狹縫光照射到凸出部1a時光的歪曲，該種光的歪曲成為檢測凸出部1a頂點位置時的誤差因素，在反復執行視覺檢測時，降低檢測的可靠性。 These originate from the distortion of the light when the slit light hits the protruding portion 1a. This kind of light distortion becomes an error factor when detecting the position of the apex of the protruding portion 1a. When the visual inspection is repeatedly performed, the detection reliability is reduced.
尤其，如球端子等凸出部1a的理想形狀為構成球的一部分形狀，但是當表面一部分存在損傷時，光的歪曲現象被極大化，從而成為視覺檢測時凸出部1a頂點位置的誤差產生原因，以及大幅降低反復執行檢測時的可靠性。 In particular, the ideal shape of the protruding portion 1a such as a ball terminal is a part of the shape of the ball, but when a part of the surface is damaged, the distortion of the light is maximized, which causes an error in the position of the vertex of the protruding portion 1a during visual inspection. Reasons, and greatly reduce the reliability of repeated inspections.
為此，本發明根據狹縫光的照射，利用光三角法來檢測元件1表面上的高度的同時，利用對照射了狹縫光的元件1的圖像，最小化視覺檢測的檢測誤差，同時即便反復執行視覺檢測，也提高了其檢測結果的可信度。 To this end, the present invention uses the light triangle method to detect the height on the surface of the element 1 according to the irradiation of the slit light, and uses the image of the element 1 irradiated with the slit light to minimize the detection error of the visual detection, and Even if the visual inspection is repeatedly performed, the reliability of the inspection result is improved.
為此，在該圖像獲取步驟中，對元件1的表面相對移動的同時，將具有對元件1表面的光的入射角為大於0°小於90°的第一入射角的狹縫光照射到元件1的表面，由此根據光三角法來檢測元件1表面上的高度，同時獲取對照射了狹縫光的元件1表面的第一圖像。 For this reason, in this image acquisition step, while the surface of the element 1 is relatively moved, a slit light having a first incident angle of light incident on the surface of the element 1 is greater than 0 ° and less than 90 ° is irradiated to The surface of the element 1 thus detects the height on the surface of the element 1 according to the light triangulation method, and simultaneously acquires a first image of the surface of the element 1 irradiated with the slit light.
在此，將該元件1的表面上的高度映射(mapping)到與對元件1表面的第一圖像的一個以上圖元相對應的位置，進而進行檢測較好。 Here, it is better to map the height on the surface of the element 1 to a position corresponding to one or more primitives of the first image on the surface of the element 1.
該狹縫光分析步驟是在圖像獲取步驟所獲取的第一圖像中，以圖元單位的圖元值為事先設定值以上的區域內，將於圖像獲取步驟中檢測的高度為最大的位置指定為凸出部1a的頂點位置的步驟，其可以由各種方法來執行。 In the slit light analysis step, in the first image acquired in the image acquisition step, in a region in which the primitive value of the primitive unit is greater than a preset value, the height to be detected in the image acquisition step is the largest. The step of specifying the position of as the vertex position of the protrusion 1a can be performed by various methods.
具體而言，在前述圖像獲取步驟所獲取的第一圖像中，設定以圖元單位的圖元值為事先設定值以上的有效區域。 Specifically, in the first image acquired in the image acquiring step, a valid area in which a primitive value in a primitive unit is equal to or greater than a preset value is set.
並且，在該有效區域內，將在圖像獲取步驟中所檢測的高度為最大的位置，指定為凸出部1a的頂點位置。 Then, within the effective region, a position where the height detected in the image acquisition step is the largest is designated as the vertex position of the protruding portion 1a.
在此，在狹縫光經過了凸出部1a頂點的狀態下，基於光三角法的檢測高度H會繼續增加，但是與照射到元件1表面上的狹縫光相對應的圖元值(照度)具有相對小的值。 Here, in a state where the slit light has passed through the apex of the convex portion 1a, the detection height H by the light triangle method continues to increase, but the pixel value (illumination intensity) corresponding to the slit light irradiated on the surface of the element 1 ) Has a relatively small value.
考慮到這些問題，在該狹縫光分析步驟，計算於圖像獲取步驟所獲取的第一圖像中事先設定值以上的圖元值，從而計算照射到元件1表面上的狹縫光的寬度，並將所計算的狹縫光的寬度為最大的位置指定為凸出部1a的頂點位置。 In consideration of these problems, in this slit light analysis step, the image element value set in advance in the first image acquired in the image acquisition step is calculated to calculate the width of the slit light irradiated onto the surface of the element 1 , And the position where the calculated width of the slit light is the largest is designated as the vertex position of the convex portion 1a.
並且，在該狹縫光分析步驟為，將於圖像獲取步驟所獲取的第一圖像和元件1的大小及第一圖像的圖元大小，彼此進行映射(mapping)。 Moreover, in the slit light analysis step, the size of the first image and the size of the element 1 and the size of the first image obtained in the image acquisition step are mapped to each other.
而且，將該元件1上的實際位置和第一圖像的圖元位置彼此對應之後，由所計算狹縫光的寬度最大位置的圖元的位置，可以計算出元件1上的實際位置。 Furthermore, after the actual position on the element 1 and the primitive position of the first image correspond to each other, the actual position on the element 1 can be calculated from the position of the primitive with the calculated maximum position of the slit light width.
另外，根據本發明的視覺檢測方法，可以由前述的三維視覺檢測部720來執行，但並非局限於由圖1至圖3c、圖5所示的視覺檢測模組來執行，只要是利用狹縫光能夠執行三位元視覺檢測的視覺檢測模組，則可以使用任意模組。 In addition, the visual inspection method according to the present invention may be executed by the aforementioned three-dimensional visual inspection unit 720, but is not limited to be executed by the visual inspection module shown in FIGS. 1 to 3c and 5 as long as it uses a slit Any visual inspection module that can perform three-dimensional vision inspection can be used.
以上，示例性說明了根據本發明的優選實施例，但本發明的範圍並非僅局限在如此特定的實施例上，而是在權利要求中記載的範圍內，可以進行適當變更。 The preferred embodiments according to the present invention have been described above by way of example, but the scope of the present invention is not limited to such specific embodiments, but may be appropriately modified within the scope described in the claims.
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