TWI622538B - Substrate box, substrate transfer box, case cover, substrate transfer system, and substrate transfer method - Google Patents

Substrate box, substrate transfer box, case cover, substrate transfer system, and substrate transfer method Download PDF

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Publication number
TWI622538B
TWI622538B TW102116614A TW102116614A TWI622538B TW I622538 B TWI622538 B TW I622538B TW 102116614 A TW102116614 A TW 102116614A TW 102116614 A TW102116614 A TW 102116614A TW I622538 B TWI622538 B TW I622538B
Authority
TW
Taiwan
Prior art keywords
substrate
case
caster
cover
box
Prior art date
Application number
TW102116614A
Other languages
English (en)
Chinese (zh)
Other versions
TW201408558A (zh
Inventor
Takashi Kambayashi
Akiko Suzuki
Minako Azumi
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of TW201408558A publication Critical patent/TW201408558A/zh
Application granted granted Critical
Publication of TWI622538B publication Critical patent/TWI622538B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D19/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D19/38—Details or accessories
    • B65D19/40—Elements for spacing platforms from supporting surface
    • B65D19/42—Arrangements or applications of rollers or wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D19/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D19/0004—Rigid pallets without side walls
    • B65D19/0053—Rigid pallets without side walls the load supporting surface being made of more than one element
    • B65D19/0055—Rigid pallets without side walls the load supporting surface being made of more than one element forming a continuous plane contact surface
    • B65D19/0067—Rigid pallets without side walls the load supporting surface being made of more than one element forming a continuous plane contact surface the base surface being made of more than one element
    • B65D19/0071—Rigid pallets without side walls the load supporting surface being made of more than one element forming a continuous plane contact surface the base surface being made of more than one element forming discontinuous or non-planar contact surfaces
    • B65D19/0073—Rigid pallets without side walls the load supporting surface being made of more than one element forming a continuous plane contact surface the base surface being made of more than one element forming discontinuous or non-planar contact surfaces and each contact surface having a stringer-like shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D19/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D19/38—Details or accessories
    • B65D19/44—Elements or devices for locating articles on platforms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/20—External fittings
    • B65D25/24—External fittings for spacing bases of containers from supporting surfaces, e.g. legs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2519/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D2519/00004—Details relating to pallets
    • B65D2519/00258—Overall construction
    • B65D2519/00263—Overall construction of the pallet
    • B65D2519/00273—Overall construction of the pallet made of more than one piece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2519/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D2519/00004—Details relating to pallets
    • B65D2519/00258—Overall construction
    • B65D2519/00283—Overall construction of the load supporting surface
    • B65D2519/00293—Overall construction of the load supporting surface made of more than one piece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2519/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D2519/00004—Details relating to pallets
    • B65D2519/00258—Overall construction
    • B65D2519/00313—Overall construction of the base surface
    • B65D2519/00323—Overall construction of the base surface made of more than one piece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2519/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D2519/00004—Details relating to pallets
    • B65D2519/00258—Overall construction
    • B65D2519/00313—Overall construction of the base surface
    • B65D2519/00328—Overall construction of the base surface shape of the contact surface of the base
    • B65D2519/00338—Overall construction of the base surface shape of the contact surface of the base contact surface having a discrete foot-like shape
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00—Technologies for solid waste management
    • Y02W30/50—Reuse, recycling or recovery technologies
    • Y02W30/80—Packaging reuse or recycling, e.g. of multilayer packaging

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Pallets (AREA)
  • Buffer Packaging (AREA)
TW102116614A 2012-05-11 2013-05-10 Substrate box, substrate transfer box, case cover, substrate transfer system, and substrate transfer method TWI622538B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012109605 2012-05-11
JP2012120490 2012-05-28
JP2012163695 2012-07-24

Publications (2)

Publication Number Publication Date
TW201408558A TW201408558A (zh) 2014-03-01
TWI622538B true TWI622538B (zh) 2018-05-01

Family

ID=49550814

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102116614A TWI622538B (zh) 2012-05-11 2013-05-10 Substrate box, substrate transfer box, case cover, substrate transfer system, and substrate transfer method

Country Status (5)

Country Link
JP (1) JP6274101B2 (ja)
KR (1) KR101962505B1 (ja)
CN (1) CN104271468B (ja)
TW (1) TWI622538B (ja)
WO (1) WO2013168782A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016033030A (ja) * 2014-07-31 2016-03-10 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス板梱包用パレット
CN105366159B (zh) * 2014-08-30 2017-12-22 姚本海 一种物流软箱及其制造方法
CN106672527A (zh) * 2015-11-10 2017-05-17 国网山东省电力公司枣庄供电公司 一种金属铠装柜搬运移动装置
KR102229465B1 (ko) * 2019-03-20 2021-03-18 이현만 받침대를 지지하는 기판 케이스 운반용 케이스
JP2023012191A (ja) * 2021-07-13 2023-01-25 信越半導体株式会社 クリーンルーム間の搬送物梱包用の梱包材、梱包方法及び搬送方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050057011A1 (en) * 2003-09-15 2005-03-17 Power Geode Technology Co., Ltd. Carrier for wafer boxes
JP2006111039A (ja) * 2004-10-12 2006-04-27 Teiirekkusu:Kk 乳母車用カバー
JP2008007127A (ja) * 2006-06-27 2008-01-17 Sk Electronics:Kk マスクケースの梱包材及びこれを用いたマスクケースの梱包方法
TW201132566A (en) * 2009-12-15 2011-10-01 Shinetsu Chemical Co Glass substrate conveyance case and glass substrate conveyance carriage

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JPH07217251A (ja) * 1994-02-08 1995-08-15 Toyo Tire & Rubber Co Ltd 住宅、体育館用防振ゴム
JP3292429B2 (ja) * 1995-01-20 2002-06-17 ゼオン化成株式会社 搬送コンテナ
JP3107515B2 (ja) * 1996-03-29 2000-11-13 アロン化成株式会社 ごみ収集車のごみ収集装置
JP3477072B2 (ja) * 1998-04-07 2003-12-10 早川ゴム株式会社 建築物の床構造
JP2000109159A (ja) * 1998-09-30 2000-04-18 Fuji Photo Film Co Ltd ガラス乾板輸送用カーゴテナー及び保冷カバー
JP2001221283A (ja) * 2000-02-07 2001-08-17 Taisei Corp 設備機器用支持装置
JP4236535B2 (ja) * 2003-07-31 2009-03-11 旭化成エレクトロニクス株式会社 大型ペリクル収納容器
JP3117369U (ja) 2005-10-05 2006-01-05 Ｈｏｙａ株式会社 フォトマスク基板用輸送ケース
JP4855885B2 (ja) * 2006-09-29 2012-01-18 Ｈｏｙａ株式会社 マスクケース、マスクカセット、パターン転写方法及び表示装置の製造方法
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050057011A1 (en) * 2003-09-15 2005-03-17 Power Geode Technology Co., Ltd. Carrier for wafer boxes
JP2006111039A (ja) * 2004-10-12 2006-04-27 Teiirekkusu:Kk 乳母車用カバー
JP2008007127A (ja) * 2006-06-27 2008-01-17 Sk Electronics:Kk マスクケースの梱包材及びこれを用いたマスクケースの梱包方法
TW201132566A (en) * 2009-12-15 2011-10-01 Shinetsu Chemical Co Glass substrate conveyance case and glass substrate conveyance carriage

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* Cited by examiner, † Cited by third party
Title
Karl-Heinrich Grote, Erik K. Antonsson, "Springer Handbook of Mechanical Engineering", Springer Science & Business Media, Volume 10, Jan 13, 2009, page800 *

Also Published As

Publication number Publication date
JP6274101B2 (ja) 2018-02-07
JPWO2013168782A1 (ja) 2016-01-07
CN104271468A (zh) 2015-01-07
CN104271468B (zh) 2018-01-19
KR20150013515A (ko) 2015-02-05
TW201408558A (zh) 2014-03-01
WO2013168782A1 (ja) 2013-11-14
KR101962505B1 (ko) 2019-03-26

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