TWI599462B - Hold the connector - Google Patents
Hold the connector Download PDFInfo
- Publication number
- TWI599462B TWI599462B TW105138549A TW105138549A TWI599462B TW I599462 B TWI599462 B TW I599462B TW 105138549 A TW105138549 A TW 105138549A TW 105138549 A TW105138549 A TW 105138549A TW I599462 B TWI599462 B TW I599462B
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- TW
- Taiwan
- Prior art keywords
- holder
- opening hole
- flat surfaces
- joint
- mounting portion
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/24—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising with cutting discs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
- B26D7/26—Means for mounting or adjusting the cutting member; Means for adjusting the stroke of the cutting member
- B26D7/2614—Means for mounting the cutting member
- B26D7/2621—Means for mounting the cutting member for circular cutters
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Forests & Forestry (AREA)
- Mining & Mineral Resources (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Dicing (AREA)
Description
本發明係關於一種用於保持下端具備刀輪(亦稱為刻劃輪)之保持具的保持具接頭。本發明之保持具接頭，使用於藉由一邊將刀輪按壓於基板表面一邊進行刻劃以對基板加工出刻劃線(分斷用之槽)、進行分斷(裂斷)之基板加工裝置，尤其適合使用於形成曲線之刻劃線之基板加工裝置。 The present invention relates to a holder joint for holding a holder having a cutter wheel (also referred to as a scoring wheel) at its lower end. The holder joint of the present invention is used for a substrate processing apparatus which performs scribing (slots for breaking) and cutting (cracking) a substrate by pressing the cutter wheel against the surface of the substrate while scribing the substrate It is especially suitable for use in a substrate processing apparatus for forming a curved line.
一直以來，已知有一種在由玻璃、矽、陶瓷、半導體等之脆性材料構成之基板或貼合基板(以下簡稱為「基板」)之表面，利用刀輪形成沿刻劃預定線之刻劃線、或從分斷預定線加以完全分斷等之基板加工裝置(例如參照專利文獻1、專利文獻2)。 Conventionally, a surface of a substrate or a bonded substrate (hereinafter simply referred to as a "substrate") made of a brittle material such as glass, tantalum, ceramics, or a semiconductor has been known, and a scribe is formed along a predetermined line by a cutter wheel. A substrate processing apparatus such as a line or a complete division from a predetermined line (see, for example, Patent Document 1 and Patent Document 2).
圖7，係顯示下述專利文獻等中揭示之習知的基板加工裝置之立體圖。 Fig. 7 is a perspective view showing a conventional substrate processing apparatus disclosed in the following patent documents and the like.
基板加工裝置B，具備載置作為加工對象之基板W並保持之水平的平台31。平台31，可藉由內藏馬達之旋轉驅動部32於水平面內旋動，且構成為可沿水平之軌道33、33於Y方向移動。此Y方向之移動，係藉由利用馬達34進行旋轉之螺旋軸35進行。 The substrate processing apparatus B includes a stage 31 on which the substrate W to be processed is placed and held. The platform 31 is rotatable in a horizontal plane by a rotary drive unit 32 of the built-in motor, and is configured to be movable in the Y direction along the horizontal rails 33 and 33. This movement in the Y direction is performed by a screw shaft 35 that is rotated by the motor 34.
而且，具備有夾著平台31設置之一對支柱36、36、與以連接該等支柱36、36之方式於X方向水平延伸之導引棒37的橋架38，設置 成跨越平台31上。在導引棒37，設置有於X方向水平延伸之導件39，且刻劃頭40被配置成可沿導件39於X方向移動。刻劃頭40往X方向之移動係藉由馬達41之驅動進行。此外，在刻劃頭40透過保持具接頭10將具備刀輪21之保持具20安裝成可裝卸，在刻劃頭40之內部，裝入可使保持具接頭10升降之升降機構(省略圖示)。 Further, a bridge 38 having a pair of pillars 36 and 36 disposed on the platform 31 and a guide bar 37 extending horizontally in the X direction by connecting the pillars 36 and 36 is provided. Into the platform 31. In the guide bar 37, a guide 39 extending horizontally in the X direction is provided, and the scribing head 40 is configured to be movable in the X direction along the guide 39. The movement of the scribing head 40 in the X direction is performed by the driving of the motor 41. Further, the holder 40 having the cutter wheel 21 is detachably attached to the scribe head 40 through the holder joint 10, and an elevating mechanism for lifting the holder joint 10 is attached to the inside of the scribe head 40 (omitted from illustration ).
藉由上述構成，成為可藉由一邊將刀輪21按壓於平台31上所載置之基板W、一邊使刀輪21與平台31之一方或雙方移動，以對基板W於X-Y方向進行刻劃以形成刻劃線、將基板W分斷等。 According to the above configuration, one or both of the cutter wheel 21 and the stage 31 can be moved while pressing the cutter wheel 21 against the substrate W placed on the stage 31, thereby dicing the substrate W in the XY direction. The scribe line is formed to separate the substrate W and the like.
圖8~11，顯示保持具20及保持具接頭10之構成。 8 to 11 show the configuration of the holder 20 and the holder joint 10.
保持具20，具備大致圓柱狀之本體部22、與在本體部22之下端以相對本體部22之軸心平行之方式形成之一對平坦面23、23，且在該等一對平坦面23、23之間，形成有與該平坦面23平行之缺口槽24，於此缺口槽24，透過水平之輪軸25將刀輪21安裝成旋轉自如。 The holder 20 has a substantially cylindrical body portion 22, and a pair of flat faces 23, 23 are formed in parallel with the axial center of the body portion 22 at the lower end of the body portion 22, and the pair of flat faces 23 are formed. Between the 23 and 23, a notch groove 24 parallel to the flat surface 23 is formed, and the notch groove 24 is rotatably attached to the cutter wheel 21 through the horizontal wheel shaft 25.
又，本體部22之上部，為用以定位並安裝於保持具接頭10之安裝部26。安裝部26，由切除圓柱狀之本體部22之一部分而形成之平坦的垂直面26a、與連接於該垂直面26a之下端所形成的傾斜面26b構成。傾斜面26b與輪軸25平行形成，藉此，使刀輪21之面向相對於傾斜面26b與下述平行銷15之切線正交。此外，本體部22係以鐵等之磁性體金屬構成。 Further, the upper portion of the main body portion 22 is a mounting portion 26 for positioning and mounting on the holder joint 10. The mounting portion 26 is composed of a flat vertical surface 26a formed by cutting a portion of the cylindrical body portion 22 and an inclined surface 26b formed by connecting the lower end of the vertical surface 26a. The inclined surface 26b is formed in parallel with the wheel axle 25, whereby the surface of the cutter wheel 21 is orthogonal to the tangent of the parallel pin 15 described below with respect to the inclined surface 26b. Further, the main body portion 22 is made of a magnetic metal such as iron.
保持具接頭10，於上部具備與基板加工裝置B之刻劃頭40連結之軸承11，其下部成為用於保持保持具20之保持部12。在保持部12之內部，設置往上下方向延伸之剖面大致圓形之開口孔13，且在內部深處(最上端)安裝有磁鐵14。開口孔13之內徑，形成僅稍微大於所***之保持具 20之本體部22之外徑，在與成為保持具20之安裝部26中的傾斜面26b之背面側的安裝部周面27相對之位置，對開口孔13之內周面設置沿垂直方向之凹狀之背隙加工部16。此外，亦在開口孔13之與背隙加工部16對向之內面，設有為了使安裝部26之***變容易而加大孔徑而成之背隙加工部17。 The holder 10 has a bearing 11 coupled to the scribe head 40 of the substrate processing apparatus B at the upper portion, and a lower portion thereof serves as a holding portion 12 for holding the holder 20. Inside the holding portion 12, an opening hole 13 having a substantially circular cross section extending in the vertical direction is provided, and a magnet 14 is attached to the inner depth (uppermost end). The inner diameter of the opening hole 13 is formed to be only slightly larger than the inserted holder The outer diameter of the main body portion 22 of the 20 is opposed to the mounting portion peripheral surface 27 on the back side of the inclined surface 26b of the mounting portion 26 of the holder 20, and the inner peripheral surface of the opening hole 13 is provided in the vertical direction. A concave back gap processing portion 16. Further, a back gap processing portion 17 in which an aperture is formed in order to facilitate insertion of the mounting portion 26 is provided on the inner surface of the opening hole 13 opposed to the back gap processing portion 16.
進一步地，在開口孔13之內部，在偏離開口孔13之軸心的位置設有延伸於與該軸心正交之方向之定位用平行銷15。該平行銷15，在保持具20之安裝部26***於保持具接頭10之開口孔13時，與安裝部26之傾斜面26b接觸，將傾斜面26b背面側之安裝部周面27按壓於開口孔13之內面，以使保持具20之方向或姿勢固定之方式進行定位。 Further, inside the opening hole 13, a positioning parallel pin 15 extending in a direction orthogonal to the axis is provided at a position deviated from the axis of the opening hole 13. When the attachment portion 26 of the holder 20 is inserted into the opening hole 13 of the holder joint 10, the parallel pin 15 comes into contact with the inclined surface 26b of the attachment portion 26, and presses the attachment portion peripheral surface 27 on the back side of the inclined surface 26b to the opening. The inner surface of the hole 13 is positioned such that the direction or posture of the holder 20 is fixed.
在將保持具20安裝於保持具接頭10時，以將保持具20之安裝部26側***保持具接頭10之開口孔13之方式安裝。當安裝部26***保持具接頭10之開口孔13時，安裝部26之傾斜面26b接觸平行銷15而被定位，且保持具20之上端部被磁鐵14吸引保持。藉此，以保持具20之姿勢自動地朝向固定方向之狀態將保持具20安裝於保持具接頭10。 When the holder 20 is attached to the holder joint 10, the attachment portion 26 side of the holder 20 is inserted into the opening hole 13 of the holder joint 10. When the mounting portion 26 is inserted into the opening hole 13 of the holder joint 10, the inclined surface 26b of the mounting portion 26 is positioned in contact with the parallel pin 15, and the upper end portion of the holder 20 is attracted and held by the magnet 14. Thereby, the holder 20 is attached to the holder joint 10 in a state in which the holder 20 is automatically oriented in the fixed direction.
專利文獻1：日本特開2010-000744號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2010-000744
專利文獻2：日本特開2011-218815號公報 Patent Document 2: Japanese Laid-Open Patent Publication No. 2011-218815
在上述之構成中，由於在與保持具20之安裝部周面27相對之保持具接頭10之開口孔13之內周面，設有沿垂直方向之凹狀之背隙加工部16，因此當安裝部26之傾斜面26b由平行銷15按壓時，如圖11所示，於背隙加工部16之緣部附近，以開口孔13之內周面之二個部位P1、P2與安裝部周面27進行線接觸並加以保持。此時，如圖10(b)所示，較理想為連 結接觸點P1、P2之線與平行銷15平行，且連結接觸點P1、P2與平行銷15之中央接觸點P3的形狀為二等邊三角形，以使平行銷15對保持具20作用之按壓力，在接觸點P1、P2以左右良好地平衡之方式承受。 In the above configuration, since the inner peripheral surface of the opening hole 13 of the holder joint 10 is opposed to the peripheral surface 27 of the mounting portion of the holder 20, the back surface processing portion 16 having a concave shape in the vertical direction is provided. When the inclined surface 26b of the mounting portion 26 is pressed by the parallel pin 15, as shown in Fig. 11, in the vicinity of the edge portion of the backlash processing portion 16, the two portions P1, P2 and the mounting portion are circumferentially formed on the inner peripheral surface of the opening hole 13. Face 27 is in line contact and held. At this time, as shown in Figure 10 (b), it is ideal to connect The line connecting the contact points P1, P2 is parallel to the parallel pin 15, and the shape of the central contact point P3 connecting the contact points P1, P2 and the parallel pin 15 is a equilateral triangle, so that the parallel pin 15 acts on the holder 20. The pressure is received at a good balance between the contact points P1 and P2.
一般而言，在直線之刻劃線之加工時，可維持平行銷15對保持具20作用之按壓力在接觸點P1、P2以左右良好地平衡之方式承受之狀態。然而，在曲線之刻劃線之加工時，由於相對刀輪21之行進方向為橫向之力通過刀輪21施加於保持具20，因此有時會有在刻劃後接觸點P1、P2偏離理想點之情況。 In general, in the processing of the straight line scribe line, the pressing force by which the parallel pin 15 acts on the holder 20 can be maintained in a state where the contact points P1 and P2 are well balanced. However, at the time of the scribing of the curve, since the force in the lateral direction with respect to the traveling direction of the cutter wheel 21 is applied to the holder 20 through the cutter wheel 21, the contact points P1 and P2 may be deviated ideally after scribing. The situation of the point.
一旦產生上述現象，保持具之穩定性即變差，刀輪之位置及朝向產生橫向偏離，而難以以良好精度加工刻劃線。 When the above phenomenon occurs, the stability of the holder is deteriorated, and the position and orientation of the cutter wheel are laterally deviated, and it is difficult to process the score line with good precision.
因此，本發明有鑑於上述課題，目的在提供一種在進行曲線之刻劃線之加工時，能夠消除保持具之晃動確實地保持之保持具接頭。 Accordingly, the present invention has been made in view of the above problems, and it is an object of the invention to provide a holder joint which can reliably retain the sway of the holder when the scribe line is processed.
為解決上述課題，本發明中提出了以下的技術性手段。亦即，本發明之保持具接頭，係保持具備有刀輪之保持具，其具備有朝下開口並上下延伸之開口孔、設於該開口孔內之定位構件、配置於該開口孔之內部深處之磁鐵、及於該開口孔之內面以俯視呈V字形之方式左右對稱形成之一對垂直的平坦面；該等左右之平坦面，係在與該定位構件之中央正交之水平假想直線之左右分開形成；***該開口孔之保持具之安裝部周面接觸該等左右之平坦面。 In order to solve the above problems, the following technical means have been proposed in the present invention. In other words, the holder joint of the present invention is provided with a holder having a cutter wheel, and includes an opening hole that opens downward and upward, and a positioning member that is disposed in the opening hole and is disposed inside the opening hole. The magnet in the deep portion and the inner surface of the opening hole are symmetrically formed in a V shape in a plan view to form a pair of vertical flat surfaces; the horizontal flat surfaces are horizontally orthogonal to the center of the positioning member The imaginary straight line is formed separately from the left and right sides; the peripheral surface of the mounting portion of the holder inserted into the open hole contacts the left and right flat surfaces.
此處，該等左右之平坦面所夾之角度為在50~100度之範圍內，較佳為60度。 Here, the angles of the left and right flat faces are in the range of 50 to 100 degrees, preferably 60 degrees.
本發明中，由於在保持具接頭之開口孔之內面，以呈V字 形之方式形成有承受保持具之安裝部周面之左右之平坦面，因此能夠使保持具之安裝部周面之位置以良好精度線接觸安裝於左右之平坦面，且即使是進行曲線之刻劃加工等而使保持具受到橫向之力時，亦能夠使保持具之安裝部周面確實地接觸保持具接頭之左右之平坦面並加以保持。藉此，能夠以良好的精度加工刻劃線。此外，即使在進行直線之刻劃加工時，由於因突發性的力施加所導致的保持具在保持具接頭內之擺動獲得抑制，因此亦能使刻劃精度更為穩定。 In the present invention, since the inner surface of the opening hole of the holder joint is in a V shape Since the shape of the peripheral surface of the mounting portion of the holder is formed, the position of the peripheral surface of the mounting portion of the holder can be attached to the left and right flat surfaces with good precision, and even the curve is engraved. When the holder is subjected to a lateral force by scratching or the like, the peripheral surface of the mounting portion of the holder can be surely brought into contact with and held by the left and right flat surfaces of the holder joint. Thereby, the score line can be processed with good precision. Further, even when the straight line is scribed, since the swing of the holder in the holder joint due to the sudden force application is suppressed, the scoring accuracy can be made more stable.
此外，本發明中，除了上述構成外，較佳為：在該開口孔之內面設置彈性構件，該彈性構件將***該開口孔之保持具彈性按壓向該平坦面之方向。 Further, in the present invention, in addition to the above configuration, it is preferable that an elastic member is provided on the inner surface of the opening hole, and the elastic member elastically presses the holder inserted into the opening hole in the direction of the flat surface.
藉此，以始終朝向平坦面彈性地按壓之狀態保持***於開口孔之保持具之本體部，能夠使保持具***時之穩定性更加提高。 Thereby, the main body portion of the holder inserted into the opening hole is held in a state of being elastically pressed toward the flat surface at all times, and the stability at the time of insertion of the holder can be further improved.
A‧‧‧保持具接頭 A‧‧‧Holding connector
L‧‧‧假想直線 L‧‧‧ imaginary straight line
1‧‧‧軸承 1‧‧‧ bearing
2‧‧‧保持部 2‧‧‧ Keeping Department
3‧‧‧開口孔 3‧‧‧Open hole
4‧‧‧磁鐵 4‧‧‧ magnet
5‧‧‧平行銷 5‧‧‧ parallel sales
6‧‧‧平坦面 6‧‧‧flat surface
7‧‧‧彈性構件 7‧‧‧Flexible components
20‧‧‧保持具 20‧‧‧Holding
21‧‧‧刀輪 21‧‧‧Cutter wheel
22‧‧‧本體部 22‧‧‧ Body Department
26‧‧‧安裝部 26‧‧‧Installation Department
27‧‧‧安裝部周面 27‧‧‧Installation section
圖1，係顯示本發明之保持具接頭與安裝於其之保持具的立體圖。 Figure 1 is a perspective view showing a holder joint of the present invention and a holder attached thereto.
圖2，係顯示圖1之保持具接頭之構造的縱剖面圖。 Fig. 2 is a longitudinal sectional view showing the structure of the holder of Fig. 1.
圖3，係圖2中的C-C線剖面圖。 Figure 3 is a cross-sectional view taken along line C-C of Figure 2.
圖4，係顯示圖1之保持具接頭之保持具安裝狀態的縱剖面圖。 Figure 4 is a longitudinal cross-sectional view showing the state in which the holder of the holder of Figure 1 is mounted.
圖5，係圖4中之D-D線剖面的放大圖。 Fig. 5 is an enlarged view of a cross section taken along the line D-D in Fig. 4.
圖6，係顯示本發明之保持具接頭之其他實施例的縱剖面圖與橫剖面圖。 Figure 6 is a longitudinal cross-sectional view and a cross-sectional view showing another embodiment of the holder joint of the present invention.
圖7，係顯示使用保持具接頭之基板加工裝置的立體圖。 Fig. 7 is a perspective view showing a substrate processing apparatus using a holder joint.
圖8，係顯示安裝於保持具接頭之保持具的剖面圖。 Figure 8 is a cross-sectional view showing the holder attached to the holder joint.
圖9，係顯示習知的保持具接頭之構造的縱剖面圖與保持部的仰視圖。 Fig. 9 is a longitudinal sectional view showing the structure of a conventional holder joint and a bottom view of the holding portion.
圖10，係顯示圖9之保持具接頭之保持具安裝狀態的縱剖面圖與E-E線剖面的放大圖。 Fig. 10 is a longitudinal sectional view showing an attached state of the holder of the holder of Fig. 9 and an enlarged view of a cross section taken along the line E-E.
圖11，係顯示習知保持具接頭中之保持具之接觸點的說明圖。 Figure 11 is an explanatory view showing a contact point of a holder in a conventional holder joint.
以下，根據顯示其實施形態之圖式說明本發明之細節。 Hereinafter, the details of the present invention will be described based on the drawings showing the embodiments thereof.
圖1~5，係顯示本發明之保持具接頭A，與其連接之保持具20則與上述圖8之保持具20相同。 1 to 5 show the holder A of the present invention, and the holder 20 connected thereto is the same as the holder 20 of Fig. 8 described above.
保持具接頭A，於上部具備軸承1，其下部為保持保持具20之保持部2，並於上部之軸承1之部分以可旋動之方式安裝於基板加工裝置B(參照圖7)之刻劃頭40。在保持部2內部設有延伸於上下方向之開口孔3，且在內部深處安裝有磁鐵4。 The holder A is provided with a bearing 1 at the upper portion, a lower portion of the holding portion 2 for holding the holder 20, and a portion of the upper bearing 1 is rotatably attached to the substrate processing apparatus B (refer to FIG. 7). Marking 40. An opening hole 3 extending in the vertical direction is provided inside the holding portion 2, and a magnet 4 is attached to the inside.
在開口孔3之內部，在與開口孔3之軸心分開之處，設有延伸於與該軸心正交之方向之定位用平行銷5以作為定位構件。該平行銷5，在保持具20***開口孔3時，與保持具20之傾斜面26b接觸，並將傾斜面26b背面側之安裝部周面27按壓於平坦面6、6，將保持具20定位成其方向或姿勢固定。關於此構成，於以下詳細說明。 Inside the opening hole 3, a positioning parallel pin 5 extending in a direction orthogonal to the axis is provided as a positioning member at a position apart from the axis of the opening hole 3. When the holder 20 is inserted into the opening hole 3, the parallel pin 5 comes into contact with the inclined surface 26b of the holder 20, and the mounting surface peripheral surface 27 on the back side of the inclined surface 26b is pressed against the flat surfaces 6, 6 to hold the holder 20. Position it in its direction or posture. This configuration will be described in detail below.
又，在開口孔3之內面，沿垂直方向形成有俯視呈V字形之左右對稱配置之一對平坦面6、6。此等左右之平坦面6、6，如圖3所示，係在與平行銷5之中央正交之水平假想直線L之左右分開形成，並形成為在保持具20***開口孔3時與保持具20之安裝部周面27接觸。該左右之 平坦面6、6所夾之角度α，較佳為形成於50~100度之範圍內。本實施例之情形，相對於***之保持具20之本體部22之直徑5mm，係以60度之角度形成。 Further, on the inner surface of the opening hole 3, one of the right and left symmetrical arrangements in a plan view in the vertical direction is formed in the vertical direction, and the flat surfaces 6 and 6 are formed. The left and right flat faces 6, 6 are formed separately on the left and right sides of the horizontal imaginary straight line L orthogonal to the center of the parallel pin 5, and are formed to be held when the holder 20 is inserted into the opening hole 3, and held. The mounting surface 27 of the mounting portion 20 is in contact with each other. The left and right The angle α between the flat faces 6, 6 is preferably formed in the range of 50 to 100 degrees. The case of this embodiment is formed at an angle of 60 degrees with respect to the diameter 5 mm of the body portion 22 of the inserted holder 20.
在上述之構成中，在將保持具20安裝於保持具接頭A時，如圖4所示，首先，將保持具20之安裝部26側***並安裝於保持具接頭A之開口孔3。藉此，安裝部26之傾斜面26b接觸平行銷5而被定位，且保持具20之上端部被磁鐵4吸引保持。此時，由於係藉由磁鐵4吸住保持具20，因此安裝部26之傾斜面26b被平行銷5按壓。亦即，如圖5所示，傾斜面26b背面側之安裝部周面27以線接觸之方式按壓於配置成V字形之左右之平坦面6、6，藉此以保持具20之姿勢自動地朝向固定方向之狀態將保持具20安裝於保持具接頭A。 In the above configuration, when the holder 20 is attached to the holder joint A, as shown in FIG. 4, first, the attachment portion 26 side of the holder 20 is inserted into and attached to the opening hole 3 of the holder joint A. Thereby, the inclined surface 26b of the mounting portion 26 is positioned in contact with the parallel pin 5, and the upper end portion of the holder 20 is sucked and held by the magnet 4. At this time, since the holder 20 is sucked by the magnet 4, the inclined surface 26b of the attachment portion 26 is pressed by the parallel pin 5. That is, as shown in FIG. 5, the mounting surface peripheral surface 27 on the back side of the inclined surface 26b is pressed in a line contact manner to the flat surfaces 6 and 6 arranged in a V shape, thereby automatically maintaining the posture of the holder 20 The holder 20 is attached to the holder joint A in a state of being oriented in a fixed direction.
另外，在將左右之平坦面6、6所夾之角度α設為60度，將直徑5mm之保持具20之本體部22***保持具接頭A之開口孔3的情形時，連結平坦面6、6中之線接觸點P1、P2與平行銷5之中央接觸點P3而成之形狀成為大致正三角形，以良好的平衡狀態配置各接觸點P1~P3，而能夠穩定地保持保持具20。 Further, when the angle α between the right and left flat surfaces 6 and 6 is 60 degrees, and the main body portion 22 of the holder 20 having a diameter of 5 mm is inserted into the opening hole 3 of the holder joint A, the flat surface 6 is joined. The shape of the line contact points P1 and P2 of the middle of the 6 and the center contact point P3 of the parallel pin 5 is a substantially equilateral triangle, and the contact points P1 to P3 are arranged in a good balance state, whereby the holder 20 can be stably held.
如上所述，由於在開口孔3內面承受保持具20之安裝部周面27的左右平坦面6、6係設成V字形配置，因此能夠使保持具20之安裝部周面27之位置以良好精度線接觸安裝於平坦面6、6，且即使是進行曲線之刻劃加工等而對保持具20施加相對於刀輪21之行進方向為橫向之力的情形時，亦能夠使安裝部周面27確實地接觸左右之平坦面6、6而安裝於保持具接頭A。因此，於曲線之刻劃加工中，不會產生刀輪之橫向偏移、位置 移動等，能以良好精度形成漂亮的刻劃線。 As described above, since the left and right flat surfaces 6 and 6 that receive the peripheral surface 27 of the mounting portion of the holder 20 on the inner surface of the opening 3 are arranged in a V shape, the position of the peripheral surface 27 of the mounting portion of the holder 20 can be made Good-accuracy line contact is attached to the flat surfaces 6 and 6, and even when a force of a lateral direction is applied to the holder 20 with respect to the traveling direction of the cutter wheel 21, the mounting portion can be made to have a circumferential force. The surface 27 is surely contacted to the left and right flat surfaces 6, 6 and attached to the holder joint A. Therefore, in the scribe process of the curve, the lateral offset and position of the cutter wheel are not generated. By moving, etc., beautiful scribe lines can be formed with good precision.
圖6係顯示本發明之保持具接頭之其他實施例。該實施例中，除了上述構成外，亦設有彈性構件7，該彈性構件7係朝向平坦面6、6之方向彈性按壓***保持具接頭A’之開口孔3的保持具20之本體部22，作為此彈性構件7之一例，使用球柱塞來進行說明。 Figure 6 is a view showing another embodiment of the holder joint of the present invention. In this embodiment, in addition to the above configuration, an elastic member 7 is provided which elastically presses the body portion 22 of the holder 20 inserted into the opening hole 3 of the holder joint A' toward the flat faces 6, 6. As an example of the elastic member 7, a ball plunger is used for explanation.
彈性構件(球柱塞)7，係由筒狀之套管7a、以周面之一部分從套管7a之前端突出之狀態伸縮自如地被保持於套管7a之球狀體7b、及始終將該球狀體7b往突出方向彈壓之彈簧7c構成，安裝於保持具接頭A’之開口孔3之開口部附近的與平坦面6、6相反側之內面。 The elastic member (ball plunger) 7 is held by the cylindrical sleeve 7a in a state in which one of the circumferential surfaces protrudes from the front end of the sleeve 7a, and is held by the spherical body 7b of the sleeve 7a, and will always be The spherical body 7b is formed by a spring 7c that is biased in the protruding direction, and is attached to the inner surface of the vicinity of the opening of the opening hole 3 of the holder joint A' on the side opposite to the flat surfaces 6, 6.
亦即，藉由彈性構件7將***開口孔3之保持具20之本體部22彈性按壓向平坦面6、6，能夠提高保持具20***時之穩定性，確實地消除晃動。此外，藉由將彈性構件7之安裝位置設於開口孔3之開口部附近且與平行銷5分開之下方位置，能夠在上方之平行銷5與下方之彈性構件7之上下兩處將保持具20之本體部22壓向平坦面6、6，而能更加地提高將保持具20保持於保持具接頭A’時之穩定性。 That is, the elastic portion 7 elastically presses the main body portion 22 of the holder 20 inserted into the opening hole 3 to the flat surfaces 6, 6, so that the stability of the holder 20 when inserted can be improved, and the sway can be surely eliminated. Further, by arranging the mounting position of the elastic member 7 near the opening of the opening hole 3 and at a position below the parallel pin 5, the upper parallel pin 5 and the lower elastic member 7 can be held at the lower two places. The body portion 22 of 20 is pressed against the flat faces 6, 6, and the stability of holding the holder 20 to the holder joint A' can be further improved.
又，上述實施例中，雖使用球柱塞作為彈性構件7，但亦可取代其而使用如板彈簧等之彈性材。 Further, in the above embodiment, the ball plunger is used as the elastic member 7, but an elastic material such as a leaf spring may be used instead.
此外，作為定位構件，只要在保持具20***保持具接頭10之開口孔13、並被磁鐵4拉起時，能夠將安裝部26背面側之安裝部周面27按壓於開口孔13之內面即可，可取代平行銷而將其設為球等之任意形狀。同樣地，安裝部26之形狀亦可根據定位構件之形狀而變更。 Further, as the positioning member, when the holder 20 is inserted into the opening hole 13 of the holder joint 10 and pulled up by the magnet 4, the mounting portion peripheral surface 27 on the back side of the mounting portion 26 can be pressed against the inner surface of the opening hole 13. In place of the parallel pin, it can be set to any shape such as a ball. Similarly, the shape of the mounting portion 26 may be changed according to the shape of the positioning member.
以上，雖針對本發明之代表性的實施例進行了說明，但本發 明並不一定要特定於上述實施形態，可在達成其目的、不脫離申請專利範圍之範圍內適當地修改、變更。 Although the representative embodiments of the present invention have been described above, the present invention has been described. It is not necessary to be specific to the above-described embodiments, and may be appropriately modified or changed within the scope of achieving the object and without departing from the scope of the patent application.
本發明，可利用於在藉由一邊將刀輪按壓於基板表面並一邊進行刻劃以對基板加工分斷用之刻劃線、或將基板分斷之基板加工裝置中，用於保持刀輪之保持具的保持具接頭。 The present invention can be used for holding a cutter wheel in a substrate processing apparatus for performing scribe lines for cutting a substrate while being pressed against a surface of a substrate, or for cutting a substrate. The holder of the holder.
2‧‧‧保持部 2‧‧‧ Keeping Department
3‧‧‧開口孔 3‧‧‧Open hole
5‧‧‧平行銷 5‧‧‧ parallel sales
6‧‧‧平坦面 6‧‧‧flat surface
20‧‧‧保持具 20‧‧‧Holding
26b‧‧‧傾斜面 26b‧‧‧Sloping surface
27‧‧‧安裝部周面 27‧‧‧Installation section
P1、P2、P3‧‧‧接觸點 P1, P2, P3‧‧‧ touch points
Claims (3)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015255604A JP6668749B2 (en) | 2015-12-28 | 2015-12-28 | Holder joint |
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| Publication Number | Publication Date |
|---|---|
| TW201722667A TW201722667A (en) | 2017-07-01 |
| TWI599462B true TWI599462B (en) | 2017-09-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW105138549A TWI599462B (en) | 2015-12-28 | 2016-11-24 | Hold the connector |
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| Country | Link |
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| JP (1) | JP6668749B2 (en) |
| KR (1) | KR101895778B1 (en) |
| CN (1) | CN106914994A (en) |
| TW (1) | TWI599462B (en) |
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| JP2019188649A (en) | 2018-04-20 | 2019-10-31 | 三星ダイヤモンド工業株式会社 | Holder unit |
| JP7209349B2 (en) | 2018-04-27 | 2023-01-20 | 三星ダイヤモンド工業株式会社 | Holder unit and pin |
| CN110405954B (en) * | 2018-04-27 | 2022-10-21 | 三星钻石工业股份有限公司 | Retainer unit and pin |
| JP2019209506A (en) | 2018-05-31 | 2019-12-12 | 三星ダイヤモンド工業株式会社 | Holder unit and scribe method |
| JP7357892B2 (en) * | 2018-12-27 | 2023-10-10 | 三星ダイヤモンド工業株式会社 | Holder joint, holder unit, and scribing device |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4948725B2 (en) * | 2000-12-05 | 2012-06-06 | 三星ダイヤモンド工業株式会社 | Chip holder |
| JP2003071789A (en) * | 2001-08-30 | 2003-03-12 | Honda Electronic Co Ltd | Ultrasonic cutter |
| CN102294756B (en) * | 2005-12-01 | 2016-03-16 | 三星钻石工业股份有限公司 | The blade holder replacing options of chalker and chalker |
| CN102320728B (en) * | 2007-06-06 | 2016-06-22 | 三星钻石工业株式会社 | Tip holder |
| JP5353085B2 (en) * | 2008-06-23 | 2013-11-27 | 三星ダイヤモンド工業株式会社 | Holder joint, holder unit, scribe head, and scribe device |
| KR20120052007A (en) * | 2010-11-15 | 2012-05-23 | 신한다이아몬드공업 주식회사 | Scriber holder |
| JP5447994B2 (en) | 2011-07-25 | 2014-03-19 | 三星ダイヤモンド工業株式会社 | Holder joint, scribing head and scribing device |
| JP5906148B2 (en) * | 2012-06-29 | 2016-04-20 | 三星ダイヤモンド工業株式会社 | Chip holder housing |
| JP2014008714A (en) * | 2012-06-29 | 2014-01-20 | Mitsuboshi Diamond Industrial Co Ltd | Tip holder housing |
| JP2014008711A (en) * | 2012-06-29 | 2014-01-20 | Mitsuboshi Diamond Industrial Co Ltd | Tip holder and tip holder housing set |
| CN104129912A (en) * | 2014-07-29 | 2014-11-05 | 北京沃尔德超硬工具有限公司 | Easy-disassembly and dust-proof knife wheel |
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| JP2017119348A (en) | 2017-07-06 |
| TW201722667A (en) | 2017-07-01 |
| KR20170077789A (en) | 2017-07-06 |
| JP6668749B2 (en) | 2020-03-18 |
| CN106914994A (en) | 2017-07-04 |
| KR101895778B1 (en) | 2018-09-07 |
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