TWI599454B - Abrasive article and method of use - Google Patents

Abrasive article and method of use Download PDF

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Publication number
TWI599454B
TWI599454B TW105106393A TW105106393A TWI599454B TW I599454 B TWI599454 B TW I599454B TW 105106393 A TW105106393 A TW 105106393A TW 105106393 A TW105106393 A TW 105106393A TW I599454 B TWI599454 B TW I599454B
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Taiwan
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abrasive
annular region
segments
annular
volume
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TW105106393A
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Chinese (zh)
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TW201634181A (en
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塞西爾 Ｏ 梅金
斯里尼瓦桑 拉瑪納斯
拉馬努金 維丹瑟恩
凱利 麥克尼爾
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聖高拜磨料有限公司
聖高拜磨料公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Description

磨料製品及使用方法 Abrasive products and methods of use

以下係針對一種磨料製品，並且特定言之包括黏結磨料區段之磨料製品。 The following is directed to an abrasive article, and in particular includes an abrasive article of a bonded abrasive segment.

過去一個世紀已開發用於各種行業之多種研磨工具，其一般功能為自工件移除材料，包括例如鋸切、鑽孔、拋光、清洗、雕刻及研磨。在電子器件之製造中，藉由研磨機將具有複數個電路諸如IC及LSI之半導體晶圓之背面研磨至預定厚度，隨後將其分成單個晶片。為了有效地研磨該半導體晶圓之背面，通常使用配備有粗磨單元及精磨單元之研磨機。通常，用於進行該粗磨過程之製品為黏結磨料主體或磨石，其藉由將磨料晶粒與陶瓷黏結或金屬黏結材料黏結在一起而獲得。通常將樹脂黏結磨石用於精磨操作。 A variety of abrasive tools have been developed in the past century for a variety of industries, the general function of which is to remove material from the workpiece, including, for example, sawing, drilling, polishing, cleaning, engraving, and grinding. In the manufacture of electronic devices, the back surface of a semiconductor wafer having a plurality of circuits such as ICs and LSIs is ground to a predetermined thickness by a grinder, and then divided into individual wafers. In order to effectively polish the back surface of the semiconductor wafer, a grinder equipped with a rough grinding unit and a refining unit is generally used. Typically, the article used to carry out the rough grinding process is a bonded abrasive body or grindstone obtained by bonding abrasive grains to a ceramic bond or a metal bond material. Resin-bonded grindstones are commonly used for finishing operations.

在一些情況下，降低無機黏結劑之含量且增加孔隙含量，其視為降低陶瓷磨石之表面之釉化或堵塞、磨料結構之碎裂、磨石之不良修整性及其他缺陷。一般而言，藉由在發泡期間使用發泡劑來實現高孔隙率磨石主體，該等發泡劑產生氣泡且因此在最終形成之磨料產品中產生孔隙。 In some cases, reducing the amount of inorganic binder and increasing the pore content is considered to reduce glazing or clogging of the surface of the ceramic grindstone, fragmentation of the abrasive structure, poor dressability of the grindstone, and other defects. In general, high porosity grindstone bodies are achieved by the use of a blowing agent during foaming which creates bubbles and thus creates voids in the final formed abrasive product.

儘管如此，該行業仍需要能夠達成改良研磨效能 之改良磨石材料。 Still, the industry still needs to be able to achieve improved grinding performance. Improved grindstone material.

根據一個態樣，磨料製品包括具有環形表面之主體，該主體包括耦接至該環形表面之磨料區段，其中該等磨料區段限定磨料環形區域及相對於該磨料環形區域之總表面積為不大於24%之磨料表面積百分比。 According to one aspect, an abrasive article includes a body having an annular surface, the body including an abrasive segment coupled to the annular surface, wherein the abrasive segments define an abrasive annular region and a total surface area relative to the abrasive annular region is not Greater than 24% abrasive surface area percentage.

在另一態樣中，磨料製品包括具有環形表面之主體，該主體包括耦接至該環形表面之磨料區段，其中該等磨料區段限定具有內環形區域、外環形區域及安置於該內環形區域與該外環形區域之間之中央環形區域的磨料環形區域，並且其中該內環形區域或外環形區域中之至少一個磨料區段相比於該中央環形區域中之磨料區段具有不同之磨料表面積。 In another aspect, an abrasive article includes a body having an annular surface, the body including an abrasive segment coupled to the annular surface, wherein the abrasive segments define an inner annular region, an outer annular region, and disposed therein An abrasive annular region of the central annular region between the annular region and the outer annular region, and wherein at least one of the inner annular region or the outer annular region has a different abrasive segment than the central annular region Abrasive surface area.

對於另一態樣，磨料製品包括具有環形表面之主體，該主體包括具有第一磨料表面積(ASA1)之耦接至該環形表面之第一磨料區段及具有第二磨料表面積(ASA2)之耦接至該環形表面之第二磨料區段，其中ASA1>ASA2。 In another aspect, an abrasive article includes a body having an annular surface, the body including a first abrasive section having a first abrasive surface area (ASA1) coupled to the annular surface and a coupling having a second abrasive surface area (ASA2) A second abrasive section is attached to the annular surface, wherein ASA1 > ASA2.

對於本文中之一個態樣，磨料製品包括具有環形表面之主體，該主體包括耦接至該環形表面之磨料區段，其中該等磨料區段限定具有內環形區域、外環形區域及安置於該內環形區域與該外環形區域之間之中央環形區域的磨料環形區域，並且其中該內環形區域包含限定第一分佈之第一組磨料區段且該中央區域包含限定第二分佈之第二組磨料區段，其中該第一分佈不同於該第二分佈。 For one aspect herein, an abrasive article includes a body having an annular surface, the body including an abrasive segment coupled to the annular surface, wherein the abrasive segments define an inner annular region, an outer annular region, and disposed thereon An abrasive annular region of the central annular region between the inner annular region and the outer annular region, and wherein the inner annular region includes a first set of abrasive segments defining a first distribution and the central region includes a second set defining a second distribution An abrasive segment, wherein the first distribution is different from the second distribution.

對於另一態樣，磨料製品包括具有環形表面之主體，該主體包括耦接至該環形表面之磨料區段，其中該等磨料區段限定具有環形寬度之磨料環形區域，該環形寬度定義為內環形圓周與外環形圓周之間沿著徑向軸之距離，並且其中至少一個磨料區段在該環形寬度之不大於95%上延伸。 In another aspect, an abrasive article includes a body having an annular surface, the body including an abrasive segment coupled to the annular surface, wherein the abrasive segments define an abrasive annular region having an annular width, the annular width being defined as inner The distance between the annular circumference and the outer annular circumference along the radial axis, and wherein at least one of the abrasive segments extends over no more than 95% of the annular width.

根據另一態樣，磨料製品可包括具有環形表面之主體，該主體可包括耦接至該環形表面之磨料區段。該等磨料區段可限定具有內環形區域、外環形區域及安置於該內環形區域與該外環形區域之間之中央環形區域的磨料環形區域。至少一個磨料區段可跨越該內環形區域、該中央環形區域及該外環形區域。該內環形區域或該外環形區域中之至少一個磨料區段之第一末端部分可能不同於該中央環形區域中之至少一個磨料區段之中央部分。該第一末端部分之縱軸與該中央部分之縱軸之間的角可能小於180度。 According to another aspect, an abrasive article can include a body having an annular surface, the body can include an abrasive segment coupled to the annular surface. The abrasive segments can define an abrasive annular region having an inner annular region, an outer annular region, and a central annular region disposed between the inner annular region and the outer annular region. At least one abrasive segment can span the inner annular region, the central annular region, and the outer annular region. The first end portion of the at least one of the inner annular region or the outer annular region may be different from the central portion of at least one of the central annular regions. The angle between the longitudinal axis of the first end portion and the longitudinal axis of the central portion may be less than 180 degrees.

根據一個態樣，磨料製品包括具有環形表面之主體，該主體包括包含含於黏結材料內之磨料粒子之磨料區段，該等磨料區段耦接至該主體之環形表面且相對於彼此佈置以限定根據接觸面積測試為不大於0.150之正規化最大接觸面積變化(NMCAV)。 According to one aspect, an abrasive article includes a body having an annular surface, the body comprising an abrasive segment comprising abrasive particles contained within the bonding material, the abrasive segments coupled to the annular surface of the body and disposed relative to one another The normalized maximum contact area change (NMCAV) of not more than 0.150 is defined according to the contact area test.

101‧‧‧卡盤 101‧‧‧ chuck

102‧‧‧晶圓 102‧‧‧ wafer

103‧‧‧晶圓 103‧‧‧ wafer

104‧‧‧晶圓 104‧‧‧ wafer

105‧‧‧磨料製品 105‧‧‧Abrasive products

106‧‧‧旋轉方向 106‧‧‧Rotation direction

107‧‧‧旋轉方向 107‧‧‧Rotation direction

200‧‧‧磨料製品 200‧‧‧Abrasive products

201‧‧‧主體 201‧‧‧ Subject

202‧‧‧基材 202‧‧‧Substrate

203‧‧‧磨料區段 203‧‧‧Abrasive section

204‧‧‧內徑 204‧‧‧Inner diameter

205‧‧‧外徑 205‧‧‧ outside diameter

206‧‧‧環形表面 206‧‧‧ring surface

207‧‧‧環形寬度 207‧‧‧ ring width

208‧‧‧環形寬度 208‧‧‧ring width

209‧‧‧長度 209‧‧‧ length

210‧‧‧寬度 210‧‧‧Width

211‧‧‧磨料環形區域 211‧‧‧Abrasive ring area

212‧‧‧外環形壁/外環形表面/外環形圓周 212‧‧‧Outer annular wall/outer annular surface/outer annular circumference

213‧‧‧內環形壁 213‧‧‧ inner ring wall

214‧‧‧內環形圓周 214‧‧‧ inner ring circumference

215‧‧‧袋 215‧‧‧ bags

217‧‧‧內環形表面 217‧‧‧ inner ring surface

220‧‧‧中央開口 220‧‧‧Central opening

290‧‧‧中點 290‧‧‧ midpoint

291‧‧‧徑向軸 291‧‧‧ radial axis

300‧‧‧磨料製品 300‧‧‧Abrasive products

301‧‧‧主體 301‧‧‧ Subject

302‧‧‧基材 302‧‧‧Substrate

303‧‧‧磨料區段 303‧‧‧Abrasive section

306‧‧‧環形表面 306‧‧‧ring surface

307‧‧‧環形寬度 307‧‧‧ ring width

308‧‧‧環形寬度 308‧‧‧ ring width

309‧‧‧長度 309‧‧‧ length

310‧‧‧寬度 310‧‧‧Width

311‧‧‧磨料環形區域 311‧‧‧Abrasion ring area

312‧‧‧外環形表面 312‧‧‧Outer ring surface

313‧‧‧內環形表面 313‧‧‧ inner ring surface

314‧‧‧內環形圓周 314‧‧ inside ring circumference

320‧‧‧外環形區域 320‧‧‧Outer ring area

321‧‧‧第二組磨料區段 321‧‧‧Second group of abrasive segments

322‧‧‧環形寬度 322‧‧‧ring width

330‧‧‧內環形區域 330‧‧‧ inner ring zone

331‧‧‧第一組磨料區段 331‧‧‧First set of abrasive segments

332‧‧‧環形寬度 332‧‧‧ ring width

340‧‧‧中央環形區域 340‧‧‧Central ring area

341‧‧‧環形寬度 341‧‧‧ ring width

351‧‧‧間隔距離 351‧‧‧ separation distance

352‧‧‧間隔距離 352‧‧‧ separation distance

371‧‧‧磨料區段 371‧‧‧Abrasive section

372‧‧‧中點 372‧‧‧ midpoint

373‧‧‧定向角 373‧‧‧ orientation angle

374‧‧‧徑向軸 374‧‧‧ radial axis

375‧‧‧縱軸 375‧‧‧ vertical axis

390‧‧‧中點 390‧‧‧ midpoint

391‧‧‧徑向軸 391‧‧‧ radial axis

400‧‧‧磨料製品 400‧‧‧Abrasive products

401‧‧‧主體 401‧‧‧ Subject

402‧‧‧基材 402‧‧‧Substrate

403‧‧‧磨料區段 403‧‧‧Abrasive section

406‧‧‧環形表面 406‧‧‧ring surface

411‧‧‧磨料環形區域 411‧‧‧Abrasion ring area

412‧‧‧外環形表面 412‧‧‧Outer ring surface

413‧‧‧內環形表面 413‧‧ inside ring surface

414‧‧‧內環形圓周 414‧‧‧ inner ring circumference

420‧‧‧外環形區域 420‧‧‧Outer ring area

421‧‧‧第二類型之磨料區段 421‧‧‧Second type abrasive segment

424‧‧‧中間環形圓周 424‧‧‧ center ring circumference

425‧‧‧中間環形圓周 425‧‧‧ center ring circumference

430‧‧‧內環形區域 430‧‧ Inner ring area

431‧‧‧第一類型之磨料區段 431‧‧‧First type of abrasive section

440‧‧‧中央環形區域 440‧‧‧Central ring area

500‧‧‧磨料製品 500‧‧‧Abrasive products

501‧‧‧主體 501‧‧‧ Subject

502‧‧‧基材 502‧‧‧Substrate

503‧‧‧磨料區段 503‧‧‧Abrasive section

506‧‧‧環形表面 506‧‧‧ring surface

511‧‧‧磨料環形表面 511‧‧‧Abrasive ring surface

512‧‧‧外環形圓周 512‧‧‧outer circular circumference

513‧‧‧內環形表面 513‧‧‧ inner ring surface

514‧‧‧內環形圓周 514‧‧ inside ring circumference

520‧‧‧外環形區域 520‧‧‧Outer ring area

521‧‧‧第三類型之磨料區段 521‧‧‧The third type of abrasive section

530‧‧‧內環形區域 530‧‧ Inner ring area

531‧‧‧第一類型之磨料區段 531‧‧‧First type of abrasive segment

540‧‧‧中央環形區域 540‧‧‧Central ring area

541‧‧‧第二類型之磨料區段 541‧‧‧Second type abrasive segment

701‧‧‧第一磨料製品 701‧‧‧First abrasive products

711‧‧‧最大接觸面積變化 711‧‧‧Maximum contact area change

800‧‧‧磨料製品 800‧‧‧Abrasive products

801‧‧‧主體 801‧‧‧ Subject

803‧‧‧磨料區段 803‧‧‧Abrasive section

806‧‧‧環形表面 806‧‧‧ring surface

811‧‧‧磨料環形區域 811‧‧‧ abrasive ring area

815‧‧‧袋 815‧‧‧ bags

821‧‧‧第三類型之磨料區段 821‧‧‧The third type of abrasive section

831‧‧‧第一類型之磨料區段 831‧‧‧First type of abrasive section

841‧‧‧第二類型之磨料區段 841‧‧‧Second type abrasive segment

900‧‧‧磨料製品 900‧‧‧Abrasive products

901‧‧‧主體 901‧‧‧ Subject

903‧‧‧磨料區段 903‧‧‧Abrasive section

906‧‧‧環形表面 906‧‧‧ring surface

911‧‧‧磨料環形區域 911‧‧‧Abrasion ring area

915‧‧‧袋 915‧‧‧ bags

921‧‧‧第二類型之磨料區段 921‧‧‧Second type abrasive segment

931‧‧‧第一類型之磨料區段 931‧‧‧First type of abrasive segment

1000‧‧‧磨料製品 1000‧‧‧Abrasive products

1001‧‧‧主體 1001‧‧‧ Subject

1003‧‧‧磨料區段 1003‧‧‧Abrasive section

1006‧‧‧環形表面 1006‧‧‧ring surface

1011‧‧‧磨料環形區域 1011‧‧‧Abrasive ring area

1015‧‧‧袋 1015‧‧‧ bags

1021‧‧‧第一末端部分 1021‧‧‧ first end part

1031‧‧‧中央部分 1031‧‧‧Central Part

1100‧‧‧磨料製品 1100‧‧‧Abrasive products

1101‧‧‧主體 1101‧‧‧ Subject

1103‧‧‧磨料區段 1103‧‧‧Abrasive section

1106‧‧‧環形表面 1106‧‧‧ring surface

1111‧‧‧磨料環形區域 1111‧‧‧Abrasive ring area

1115‧‧‧角 1115‧‧‧ corner

1121‧‧‧第一末端部分 1121‧‧‧ first end part

1131‧‧‧中央部分 1131‧‧‧Central Part

1141‧‧‧第二末端部分 1141‧‧‧second end part

藉由參考隨附圖式，可更好地理解本揭示案，且其眾多特徵及優點為熟習此項技術者所顯而易見。 The disclosure will be better understood by reference to the accompanying drawings, and <RTIgt;

圖1包括根據一實施方案之多晶圓研磨操作之圖示。 FIG. 1 includes an illustration of a multi-wafer polishing operation in accordance with an embodiment.

圖2包括磨料製品(習知磨料製品)之俯視圖。 Figure 2 includes a top view of an abrasive article (a conventional abrasive article).

圖3包括根據一實施方案之磨料製品之一部分的俯視圖。 Figure 3 includes a top plan view of a portion of an abrasive article in accordance with an embodiment.

圖4包括根據一實施方案之磨料製品之一部分的俯視圖。 4 includes a top view of a portion of an abrasive article in accordance with an embodiment.

圖5包括根據一實施方案之磨料製品之一部分的俯視圖。 Figure 5 includes a top plan view of a portion of an abrasive article in accordance with an embodiment.

圖6A-6L包括根據實施方案之不同磨料區段之俯視圖。 Figures 6A-6L include top views of different abrasive segments in accordance with an embodiment.

圖7A包括對於接觸面積測試之接觸面積相對於卡盤旋轉角度之曲線的一般化圖示。 Figure 7A includes a generalized graphical representation of the contact area versus contact angle of the chuck for the contact area test.

圖7B-7D包括根據一實施方案使用接觸面積測試用於分析正規化最大接觸面積變化之圖像。 Figures 7B-7D include images for analyzing normalized maximum contact area changes using a contact area test in accordance with an embodiment.

圖8包括根據一實施方案之磨料製品之圖像。 Figure 8 includes an image of an abrasive article in accordance with an embodiment.

圖9包括根據一實施方案之磨料製品之圖像。 Figure 9 includes an image of an abrasive article in accordance with an embodiment.

圖10包括根據一實施方案之磨料製品之圖像。 Figure 10 includes an image of an abrasive article in accordance with an embodiment.

圖11包括根據一實施方案之磨料製品之圖像。 Figure 11 includes an image of an abrasive article in accordance with an embodiment.

圖12包括比較根據本文所述之實施方案之樣品磨料製品的研磨效能與比較性磨料製品之研磨效能的圖。 Figure 12 includes a graph comparing the abrasive performance of a sample abrasive article according to embodiments described herein to the abrasive performance of a comparative abrasive article.

以下係針對磨料製品，且更特定言之，包括可呈區段形式之一或多個黏結磨料製品之磨料製品。該等磨料區段可為包括含於黏結材料之三維基質內之複數個磨料粒子的黏結磨料製品。該黏結磨料製品可能適合研磨工件及材料移除操作。在某些情況下，該黏結磨料製品可特別適合研磨硬質材料，且更特定言之，硬質單晶材料，諸如藍寶石晶圓。 The following are directed to abrasive articles, and more particularly, abrasive articles that may be in the form of one or more bonded abrasive articles in the form of segments. The abrasive segments can be a bonded abrasive article comprising a plurality of abrasive particles contained within a three-dimensional matrix of the bonding material. The bonded abrasive article may be suitable for abrasive workpiece and material removal operations. In some cases, the bonded abrasive article can be particularly suitable for grinding hard materials, and more particularly, rigid single crystal materials, such as sapphire wafers.

本文實施方案之磨料製品可用於某些材料移除操作中。舉例而言，該磨料製品可用於如下材料移除操作中，其中該過程包括藉由相對於複數個晶圓移動該磨料製品，同 時自該複數個晶圓移除材料。在某些情況下，相對於該複數個晶圓移動該磨料製品之過程可包括相對於可固持於固定位置中之該複數個晶圓旋轉該磨料製品。在其他情況下，相對於該複數個晶圓移動該磨料製品之過程可包括相對於可固持於固定位置中之該磨料製品旋轉該複數個晶圓。應理解，在該等過程中，該磨料製品之間之相對移動可包括可包括該磨料製品及/或該複數個晶圓相對於彼此之移動。 Abrasive articles of the embodiments herein can be used in certain material removal operations. For example, the abrasive article can be used in a material removal operation, wherein the process includes moving the abrasive article relative to a plurality of wafers, The material is removed from the plurality of wafers. In some cases, the process of moving the abrasive article relative to the plurality of wafers can include rotating the abrasive article relative to the plurality of wafers that can be held in a fixed position. In other cases, the moving the abrasive article relative to the plurality of wafers can include rotating the plurality of wafers relative to the abrasive article that can be held in a fixed position. It should be understood that in such processes, relative movement between the abrasive articles can include movement of the abrasive article and/or the plurality of wafers relative to one another.

圖1包括根據一實施方案使用磨料製品之多晶圓材料移除過程之圖示。特定言之，該多晶圓材料移除過程包括卡盤101，其包括與其耦接之複數個晶圓102、103及104(亦即，102-104)。如進一步說明，該過程可包括具有本文實施方案之特徵之磨料製品105。在材料移除過程期間，磨料製品105可與該複數個晶圓102-104之一或多個表面接觸且自該複數個晶圓102-104之該等表面移除材料。如所示，卡盤101與磨料製品105可分別在方向106及107上相對於彼此旋轉。圖1中之旋轉方向106及107經提供用於說明，且應理解，可利用卡盤101與磨料製品105之間之其他相對旋轉。 1 includes an illustration of a multi-wafer material removal process using an abrasive article in accordance with an embodiment. In particular, the multi-wafer material removal process includes a chuck 101 that includes a plurality of wafers 102, 103, and 104 (ie, 102-104) coupled thereto. As further illustrated, the process can include an abrasive article 105 having the features of the embodiments herein. During the material removal process, the abrasive article 105 can contact one or more surfaces of the plurality of wafers 102-104 and remove material from the surfaces of the plurality of wafers 102-104. As shown, the chuck 101 and the abrasive article 105 can be rotated relative to one another in directions 106 and 107, respectively. The rotational directions 106 and 107 in FIG. 1 are provided for illustration, and it should be understood that other relative rotations between the chuck 101 and the abrasive article 105 can be utilized.

此外，如圖1中所示，在材料移除操作期間，磨料製品105可與複數個晶圓102-104之單個晶圓之至少一表面接觸。更特定言之，在材料移除過程期間，隨著磨料製品105在卡盤101及複數個晶圓102-104上方旋轉，磨料製品105上之每磨粒之力可以隨著磨料製品105與複數個晶圓102-104之表面之間改變的表面積接觸而改變。不同於單晶圓研磨操作，在多晶圓研磨操作期間黏結磨料材料(例如，黏結磨料 區段)與晶圓102-104之間的接觸面積變化已由本申請人鑒定為一些不令人滿意之結果的原因，包括對晶圓102-104之破壞。隨著行業不斷遷移至多晶圓研磨操作，對於可避免不必要產品破壞之產品之需求迅速增加。 Additionally, as shown in FIG. 1, the abrasive article 105 can be in contact with at least one surface of a single wafer of a plurality of wafers 102-104 during a material removal operation. More specifically, during the material removal process, as the abrasive article 105 is rotated over the chuck 101 and the plurality of wafers 102-104, the force per abrasive grain on the abrasive article 105 can vary with the abrasive article 105 and the plurality The surface area of the wafers 102-104 changes with varying surface area contact. Unlike single wafer grinding operations, bonding abrasive materials during multi-wafer grinding operations (eg, bonded abrasives) The change in contact area between the segments) and the wafers 102-104 has been identified by the Applicant as a cause of some unsatisfactory results, including damage to the wafers 102-104. As the industry moves to multi-wafer grinding operations, the demand for products that avoid unnecessary product damage is rapidly increasing.

圖2包括磨料製品(習知磨料製品)之俯視圖。如所示，磨料製品200可包括主體201，該主體201包括基材202，其可稱為載體。磨料製品200進一步包括黏結至基材202之表面的磨料區段203。磨料區段203通常包含於基材202之袋215內。磨料區段203可黏結於其相應袋215內以促進基材202與磨料區段203之間的合適黏結。為易於理解，圖2中所示之磨料製品200僅為磨料製品之一半。 Figure 2 includes a top view of an abrasive article (a conventional abrasive article). As shown, the abrasive article 200 can include a body 201 that includes a substrate 202, which can be referred to as a carrier. The abrasive article 200 further includes an abrasive section 203 bonded to the surface of the substrate 202. Abrasive section 203 is typically contained within pocket 215 of substrate 202. The abrasive segments 203 can be bonded within their respective pockets 215 to promote proper bonding between the substrate 202 and the abrasive segments 203. For ease of understanding, the abrasive article 200 illustrated in Figure 2 is only one-half of the abrasive article.

基材202可呈具有環形形狀之輪或盤形式，其包括由內徑204及外徑205限定之中央開口220，其延伸穿過外環形壁212之間的主體201之中點290。根據一實施方案，基材202包括具有楔形內環形表面217之內環形壁213，其延伸至磨料區段203所黏結之環形表面206。環形表面206定義為在基材202之內環形表面217與外環形表面212之間延伸之表面。因而，磨料區段203黏結至環形主體201之主表面之一。環形表面206可具有環形寬度207，其定義為沿著環形表面206之徑向距離，諸如基材202之內環形表面217與外環形表面212之間沿著徑向軸291之距離。 The substrate 202 can be in the form of a wheel or disk having an annular shape that includes a central opening 220 defined by an inner diameter 204 and an outer diameter 205 that extends through a point 290 in the body 201 between the outer annular walls 212. According to an embodiment, the substrate 202 includes an inner annular wall 213 having a tapered inner annular surface 217 that extends to the annular surface 206 to which the abrasive segment 203 is bonded. Annular surface 206 is defined as the surface that extends between annular surface 217 and outer annular surface 212 within substrate 202. Thus, the abrasive section 203 is bonded to one of the major surfaces of the annular body 201. The annular surface 206 can have an annular width 207 defined as a radial distance along the annular surface 206, such as the distance between the annular surface 217 and the outer annular surface 212 within the substrate 202 along the radial axis 291.

磨料區段203可耦接至環形表面206且限定磨料環形區域211。磨料環形區域211可定義為包括磨料區段203之環形表面206之部分。亦即，如圖2中所示，磨料區段203 之最內點限定磨料環形區域211之內環形圓周214。此外，磨料環形區域211可由定義為環形表面206之圓周之外環形圓周進一步限定，該外環形圓周包括一或多個磨料區段203之最外點。如圖2所示，磨料環形區域211之外環形圓周可與基材202之外環形圓周212相同。磨料環形區域211可具有環形寬度208，其定義為磨料環形區域211之內環形圓周214至外環形圓周212之間沿著徑向軸290之距離，其自中點291延伸至外環形表面212。 The abrasive section 203 can be coupled to the annular surface 206 and define an abrasive annular region 211. The abrasive annulus region 211 can be defined as including a portion of the annular surface 206 of the abrasive segment 203. That is, as shown in FIG. 2, the abrasive section 203 The innermost point defines an annular circumference 214 within the abrasive annular region 211. Additionally, the abrasive annulus region 211 can be further defined by an annular circumference defined as a circumference of the annular surface 206 that includes the outermost point of the one or more abrasive segments 203. As shown in FIG. 2, the outer circumferential circumference of the abrasive annular region 211 can be the same as the outer annular circumference 212 of the substrate 202. The abrasive annular region 211 can have an annular width 208 defined as the distance between the annular annular portion 214 to the outer annular circumference 212 within the abrasive annular region 211 along the radial axis 290 that extends from the midpoint 291 to the outer annular surface 212.

磨料區段203可具有長度209，其定義為如圖2所提供之俯視圖檢視之磨料區段203之最長尺寸。此外，磨料區段203可具有寬度210，其定義為與磨料區段203之長度209實質上垂直延伸之尺寸。如所示，磨料區段203可具有大於磨料環形區域211之環形寬度208之長度209。此外，磨料區段203可關於基材202之外環形表面212成角度。此外，此等習知製品通常具有25%之磨料表面積百分比及約0.158之NMCAV，其將在本文中更詳細地描述。 The abrasive section 203 can have a length 209 that is defined as the longest dimension of the abrasive section 203 as viewed in plan view as provided in FIG. Additionally, the abrasive section 203 can have a width 210 that is defined as a dimension that extends substantially perpendicular to the length 209 of the abrasive section 203. As shown, the abrasive section 203 can have a length 209 that is greater than the annular width 208 of the abrasive annular region 211. Additionally, the abrasive section 203 can be angled with respect to the outer annular surface 212 of the substrate 202. Moreover, such conventional articles typically have a 25% abrasive surface area percentage and about 0.158 NMCAV, which will be described in more detail herein.

圖3包括根據一實施方案之磨料製品之一部分的俯視圖。如所示，磨料製品300可包括主體301，該主體301包括基材302及耦接至基材302之磨料區段303。基材302可包括在內環形表面313與外環形表面312之間延伸之環形表面306。此外，在圖3之所示實施方案中，磨料製品300可包括在內環形圓周314之間延伸之磨料環形區域311，該內環形圓周314限定環形區域306內與至少一個磨料區段303之最內部分相交之圓形圓周。換言之，該內環形圓周由可與至少 一個磨料區段303上之最內點相交得出之最小圓限定。磨料環形區域311可由外環形圓周312進一步限定，該外環形圓周312限定環形區域306內可與距主體301之中點390最遠之磨料區段點相交得出之最大圓的圓周。 Figure 3 includes a top plan view of a portion of an abrasive article in accordance with an embodiment. As shown, the abrasive article 300 can include a body 301 that includes a substrate 302 and an abrasive section 303 that is coupled to the substrate 302. Substrate 302 can include an annular surface 306 that extends between inner annular surface 313 and outer annular surface 312. Moreover, in the illustrated embodiment of FIG. 3, the abrasive article 300 can include an abrasive annular region 311 extending between the inner annular circumferences 314 that defines the innermost portion of the annular region 306 and the at least one abrasive segment 303. The circular circumference where the inner portions intersect. In other words, the inner annular circumference can be at least The minimum circle defined by the intersection of the innermost points on one abrasive section 303 defines. The abrasive annular region 311 can be further defined by an outer annular circumference 312 that defines a circumference of the largest circle within the annular region 306 that can intersect the point of the abrasive segment furthest from the point 390 in the body 301.

如所示，環形區域306可具有在內環形表面313與外環形表面312之間延伸之環形寬度307。磨料環形區域311可具有環形寬度308，其定義為內環形圓周314與外環形圓周312之間沿著徑向軸390之距離。根據一實施方案，磨料區段303之佈置可能可能不同於習知磨料製品且可促進磨料製品300之改良效能，尤其在多晶圓研磨操作期間。 As shown, the annular region 306 can have an annular width 307 that extends between the inner annular surface 313 and the outer annular surface 312. The abrasive annulus region 311 can have an annular width 308 defined as the distance between the inner annular circumference 314 and the outer annular circumference 312 along the radial axis 390. According to an embodiment, the arrangement of the abrasive segments 303 may be different from conventional abrasive articles and may promote improved performance of the abrasive article 300, particularly during multi-wafer polishing operations.

在一個特定實施方案中，磨料環形區域311可包括內環形區域330、外環形區域320及安置於內環形區域330與外環形區域320之間之中央環形區域340。內環形區域330、外環形區域320及中央環形區域中之每一者可包括特定類型及/或數目之磨料區段，其可促進磨料製品300之改良效能，尤其在多晶圓研磨操作情形中。在一個實施方案中，磨料製品300可包括在磨料環形區域311之內環形區域330內之第一組磨料區段331。內環形區域330可在內環形圓周314與中間環形圓周324之間延伸，該中間環形圓周324限定與第一組磨料區段331之磨料區段之至少一部分相交之最外圓周。 In a particular embodiment, the abrasive annulus region 311 can include an inner annular region 330, an outer annular region 320, and a central annular region 340 disposed between the inner annular region 330 and the outer annular region 320. Each of the inner annular region 330, the outer annular region 320, and the central annular region can include a particular type and/or number of abrasive segments that can promote improved performance of the abrasive article 300, particularly in multi-wafer grinding operations . In one embodiment, the abrasive article 300 can include a first set of abrasive segments 331 within the annular region 330 within the abrasive annulus region 311. The inner annular region 330 can extend between the inner annular circumference 314 and the intermediate annular circumference 324, the intermediate annular circumference 324 defining an outermost circumference that intersects at least a portion of the abrasive segments of the first set of abrasive segments 331.

在另一實施方案中，外環形區域320可包括第二組磨料區段321。外環形區域320可定義為磨料環形區域311在外環形圓周312與中間環形圓周325之間的區域，該中間 環形圓周325限定與第二組磨料區段321之至少一個磨料區段之最內部分相交的圓周。如進一步說明，中央環形區域340可為在中間環形圓周324與中間環形圓周325之間延伸之區域。如進一步說明，該內環形區域可具有環形寬度332，該中央環形區域可具有環形寬度341，且該外環形區域320可具有環形寬度322。如所示，根據一個實施方案，內環形區域330之環形寬度332可與環形寬度340及/或環形寬度322實質上相同。舉例而言，在所示實施方案中，環形寬度322、341及332可將磨料環形區域311分割成基本上相等之三份。儘管如此，應理解，取決於磨料區段之佈置及磨料區段303之尺寸及形狀，環形寬度332、341及322可相對於彼此顯著不同。 In another embodiment, the outer annular region 320 can include a second set of abrasive segments 321 . The outer annular region 320 can be defined as the region of the abrasive annular region 311 between the outer annular circumference 312 and the intermediate annular circumference 325, the middle The annular circumference 325 defines a circumference that intersects the innermost portion of at least one of the abrasive segments of the second set of abrasive segments 321 . As further illustrated, the central annular region 340 can be a region that extends between the intermediate annular circumference 324 and the intermediate annular circumference 325. As further illustrated, the inner annular region can have an annular width 332 that can have an annular width 341 and the outer annular region 320 can have an annular width 322. As shown, according to one embodiment, the annular width 332 of the inner annular region 330 can be substantially the same as the annular width 340 and/or the annular width 322. For example, in the illustrated embodiment, the annular widths 322, 341, and 332 can divide the abrasive annular region 311 into substantially equal three portions. Nonetheless, it should be understood that depending on the arrangement of the abrasive segments and the size and shape of the abrasive segments 303, the annular widths 332, 341, and 322 can be significantly different relative to each other.

根據一實施方案，第一組磨料區段330可限定包括間隔距離352之第一分佈，該間隔距離352為兩個直接相鄰之磨料區段之間沿著內環形圓周314之最短距離。如進一步說明，第二組磨料區段321可限定第二分佈，其可能不同於第一組磨料區段331之第一分佈。此外，第二組磨料區段321可限定間隔距離351，其可為兩個直接相鄰之磨料區段之間沿著第二組磨料區段321內之中間環形圓周325的最近距離。根據一實施方案，第一組磨料區段331內之磨料區段分佈可不同於第二組磨料區段321內之磨料區段分佈。 According to an embodiment, the first set of abrasive segments 330 can define a first distribution comprising a separation distance 352 that is the shortest distance between two directly adjacent abrasive segments along the inner annular circumference 314. As further illustrated, the second set of abrasive segments 321 can define a second distribution that may be different than the first distribution of the first set of abrasive segments 331. Additionally, the second set of abrasive segments 321 can define a separation distance 351 that can be the closest distance between two directly adjacent abrasive segments along the intermediate annular circumference 325 within the second set of abrasive segments 321 . According to an embodiment, the abrasive segment distribution within the first set of abrasive segments 331 can be different than the abrasive segment distribution within the second set of abrasive segments 321 .

根據一實施方案，第一組磨料區段331可具有特定間隔距離352，其相對於第一組磨料區段331內之磨料區段之平均長度具有特定關係。舉例而言，在至少一個實施方案中，第一組磨料區段331可具有至少0.01之間隔距離352 (aL1)，其中aL1代表第一組磨料區段331之磨料區段之平均長度。在另一實施方案中，間隔距離352可為至少0.1(aL1)，諸如至少0.5(aL1)、至少1(aL1)、至少2(aL1)、至少3(aL1)、至少4(aL1)、至少5(aL1)、至少6(aL1)、至少7(aL1)、至少8(aL1)、至少9(aL1)或甚至至少10(aL1)。此外，在一個非限制性實施方案中，間隔距離352可為不大於100(aL1)，諸如不大於90(aL1)、不大於90(aL1)、不大於80(aL1)、不大於70(aL1)、不大於60(aL1)、不大於50(aL1)、不大於40(aL1)、不大於30(aL1)、不大於20(aL1)、不大於15(aL1)、不大於12(aL1)、不大於10(aL1)、不大於9(aL1)、不大於8(aL1)、不大於7(aL1)、不大於6(aL1)、不大於5(aL1)、不大於4(aL1)、不大於3(aL1)、不大於2(aL1)、不大於1(aL1)、不大於0.1(aL1)，諸如不大於0.01(aL1)。應理解，間隔距離352可在包括任何上述最小值及最大值之範圍內。 According to an embodiment, the first set of abrasive segments 331 can have a particular separation distance 352 that has a particular relationship with respect to the average length of the abrasive segments within the first set of abrasive segments 331. For example, in at least one embodiment, the first set of abrasive segments 331 can have a separation distance 352 of at least 0.01 (aL1), where aL1 represents the average length of the abrasive segments of the first set of abrasive segments 331. In another embodiment, the separation distance 352 can be at least 0.1 (aL1), such as at least 0.5 (aL1), at least 1 (aL1), at least 2 (aL1), at least 3 (aL1), at least 4 (aL1), at least 5 (aL1), at least 6 (aL1), at least 7 (aL1), at least 8 (aL1), at least 9 (aL1) or even at least 10 (aL1). Moreover, in one non-limiting embodiment, the separation distance 352 can be no greater than 100 (aL1), such as no greater than 90 (aL1), no greater than 90 (aL1), no greater than 80 (aL1), no greater than 70 (aL1) ), not greater than 60 (aL1), not greater than 50 (aL1), not greater than 40 (aL1), not greater than 30 (aL1), not greater than 20 (aL1), not greater than 15 (aL1), not greater than 12 (aL1) , not greater than 10 (aL1), not greater than 9 (aL1), not greater than 8 (aL1), not greater than 7 (aL1), not greater than 6 (aL1), not greater than 5 (aL1), not greater than 4 (aL1), Not more than 3 (aL1), not more than 2 (aL1), not more than 1 (aL1), not more than 0.1 (aL1), such as not more than 0.01 (aL1). It should be understood that the separation distance 352 can be within a range including any of the above minimum and maximum values.

根據一實施方案，第二組磨料區段321可具有特定間隔距離351，其相對於第二組磨料區段321內之磨料區段之平均長度具有特定關係。舉例而言，在至少一個實施方案中，第二組磨料區段321可具有至少0.01之間隔距離351(aL2)，其中aL2代表第二組磨料區段321之磨料區段之平均長度。在另一實施方案中，間隔距離351可為至少0.1(aL2)，諸如至少0.5(aL2)、至少1(aL2)、至少2(aL2)、至少3(aL2)、至少4(aL2)、至少5(aL2)、至少6(aL2)、至少7(aL2)、至少8(aL2)、至少9(aL2)或甚至至少10(aL2)。此外，在一個非限制性實施方案中，間隔距離351可不大於100(aL2)，諸如不 大於90(aL2)、不大於90(aL2)、不大於80(aL2)、不大於70(aL2)、不大於60(aL2)、不大於50(aL2)、不大於40(aL2)、不大於30(aL2)、不大於20(aL2)、不大於15(aL2)、不大於12(aL2)、不大於10(aL2)、不大於9(aL2)、不大於8(aL2)、不大於7(aL2)、不大於6(aL2)、不大於5(aL2)、不大於4(aL2)、不大於3(aL2)、不大於2(aL2)、不大於1(aL2)、不大於0.1(aL2)，諸如不大於0.01(aL2)。應理解，間隔距離351可在包括任何上述最小值及最大值之範圍內。 According to an embodiment, the second set of abrasive segments 321 can have a particular spacing distance 351 that has a particular relationship with respect to the average length of the abrasive segments within the second set of abrasive segments 321 . For example, in at least one embodiment, the second set of abrasive segments 321 can have a separation distance 351 (aL2) of at least 0.01, wherein aL2 represents the average length of the abrasive segments of the second set of abrasive segments 321 . In another embodiment, the separation distance 351 can be at least 0.1 (aL2), such as at least 0.5 (aL2), at least 1 (aL2), at least 2 (aL2), at least 3 (aL2), at least 4 (aL2), at least 5 (aL2), at least 6 (aL2), at least 7 (aL2), at least 8 (aL2), at least 9 (aL2) or even at least 10 (aL2). Moreover, in one non-limiting embodiment, the separation distance 351 can be no greater than 100 (aL2), such as not Greater than 90 (aL2), not greater than 90 (aL2), not greater than 80 (aL2), not greater than 70 (aL2), not greater than 60 (aL2), not greater than 50 (aL2), not greater than 40 (aL2), not greater than 30 (aL2), not more than 20 (aL2), not more than 15 (aL2), not more than 12 (aL2), not more than 10 (aL2), not more than 9 (aL2), not more than 8 (aL2), not more than 7 (aL2), not more than 6 (aL2), not more than 5 (aL2), not more than 4 (aL2), not more than 3 (aL2), not more than 2 (aL2), not more than 1 (aL2), not more than 0.1 ( aL2), such as not more than 0.01 (aL2). It should be understood that the separation distance 351 can be within a range including any of the above minimum and maximum values.

根據一實施方案，在磨料製品300之一或多個磨料區段303之長度309與磨料環形區域311之環形寬度308之間可存在特定關係。根據一實施方案，磨料製品300可包括具有長度303之至少一個磨料區段，該長度303小於磨料環形區域311之環形寬度308。舉例而言，在一個特定實施方案中，該磨料製品之磨料區段303中之至少一者可具有不大於環形寬度308之95%之長度309。在其他情況下，磨料製品300之至少一個磨料區段303之長度309相對於環形寬度308可能較小，諸如環形寬度308之不大於90%、不大於85%、不大於80%、不大於75%、不大於70%、不大於65%、不大於60%、不大於55%、不大於50%或甚至不大於45%。此外，在一個非限制性實施方案中，磨料區段303中之至少一者可具有長度309，其可為環形寬度308之至少約1%，諸如至少約5%、至少10%、至少15%、至少20%、至少25%、至少30%、至少35%、至少40%、至少45%、至少50%或甚至至少55%。應理解，磨料區段303中之至少一者之長度309相對於環形 寬度308可在包括任何上述最小百分比及最大百分比之範圍內。 According to an embodiment, there may be a particular relationship between the length 309 of one or more abrasive segments 303 of the abrasive article 300 and the annular width 308 of the abrasive annular region 311. According to an embodiment, the abrasive article 300 can include at least one abrasive segment having a length 303 that is less than the annular width 308 of the abrasive annular region 311. For example, in one particular embodiment, at least one of the abrasive segments 303 of the abrasive article can have a length 309 that is no greater than 95% of the annular width 308. In other cases, the length 309 of the at least one abrasive segment 303 of the abrasive article 300 may be small relative to the annular width 308, such as no more than 90%, no greater than 85%, no greater than 80%, no greater than 75 of the annular width 308. %, no more than 70%, no more than 65%, no more than 60%, no more than 55%, no more than 50% or even no more than 45%. Moreover, in one non-limiting embodiment, at least one of the abrasive segments 303 can have a length 309 that can be at least about 1% of the annular width 308, such as at least about 5%, at least 10%, at least 15% At least 20%, at least 25%, at least 30%, at least 35%, at least 40%, at least 45%, at least 50% or even at least 55%. It should be understood that the length 309 of at least one of the abrasive segments 303 is relative to the ring Width 308 can range from any of the above minimum percentages to maximum percentages.

在另一實施方案中，磨料製品300之磨料區段303可包括具有一定長度之最長磨料區段，該長度可相對於環形寬度308具有特定關係。舉例而言，該最長磨料區段可具有小於環形寬度308之長度309，包括例如環形寬度308之不大於95%，諸如環形寬度308之不大於90%、不大於85%、不大於80%、不大於75%、不大於70%、不大於65%、不大於60%、不大於55%或甚至不大於50%。此外，在至少一個非限制性實施方案中，磨料區段303之最長磨料區段可具有長度309，其為環形寬度308之至少10%、諸如至少15%、至少20%、至少25%、至少30%、至少35%、至少40%、至少45%、至少50%、至少55%、至少60%、至少65%或甚至至少70%。應理解，在一個實施方案中，磨料區段303之最長磨料區段可具有長度309，其在包括任何上述最小百分比及最大百分比之範圍內。 In another embodiment, the abrasive section 303 of the abrasive article 300 can include a longest abrasive segment having a length that can have a particular relationship with respect to the annular width 308. For example, the longest abrasive section can have a length 309 that is less than the annular width 308, including, for example, no more than 95% of the annular width 308, such as no more than 90%, no more than 85%, no more than 80% of the annular width 308, Not more than 75%, not more than 70%, not more than 65%, not more than 60%, not more than 55% or even not more than 50%. Moreover, in at least one non-limiting embodiment, the longest abrasive section of the abrasive section 303 can have a length 309 that is at least 10% of the annular width 308, such as at least 15%, at least 20%, at least 25%, at least 30%, at least 35%, at least 40%, at least 45%, at least 50%, at least 55%, at least 60%, at least 65% or even at least 70%. It should be understood that in one embodiment, the longest abrasive section of the abrasive section 303 can have a length 309 that is within the range of any of the minimum and maximum percentages described above.

根據一實施方案，磨料區段303可限定磨料製品300之總磨料表面積。該總磨料表面積可包括所有磨料區段303之二維表面積。舉例而言，如圖3中所示，各磨料區段303可具有如自上而下檢視之長度309及寬度310。因此各磨料區段303具有磨料表面積(ASA)。該總磨料表面積(TASA)為主體301之所有磨料區段303之磨料表面積的總和。此外，主體301可具有磨料環形區域311之總表面積(Aaar)。根據一個實施方案，該等磨料製品可具有特定磨料表面積百分比， 其為磨料區段之總磨料表面積相對於磨料環形區域311之總表面積。亦即，磨料表面積百分比為[(TASA/Aaar)×100%]。根據一實施方案，該磨料製品可具有不大於24%、諸如不大於23%、不大於22%、21%、不大於20%、不大於19%、不大於18%、不大於70%、不大於60%、不大於50%、不大於14%、不大於13%、不大於12%、不大於11%、不大於10%、不大於9%、不大於8%、不大於7%、不大於6%、不大於5%、不大於4%或甚至不大於3%之磨料表面積百分比。此外，在一個非限制性實施方案中，本文實施方案之磨料製品可具有相對於磨料環形區域311之總表面積為至少2%、諸如至少3%、至少4%、至少5%、至少6%、至少7%、至少80%、至少9%、至少10%、至少11%、至少12%、至少13%、至少14%、至少15%、至少16%、至少17%、至少18%、至少19%或甚至至少20%之磨料表面積百分比。應理解，本文實施方案之磨料製品可具有在包括任何上述最小百分比及最大百分比之範圍內之磨料表面積百分比。 According to an embodiment, the abrasive section 303 can define a total abrasive surface area of the abrasive article 300. The total abrasive surface area can include a two-dimensional surface area of all abrasive segments 303. For example, as shown in FIG. 3, each abrasive segment 303 can have a length 309 and a width 310 as viewed from top to bottom. Thus each abrasive section 303 has an abrasive surface area (ASA). The total abrasive surface area (TASA) is the sum of the abrasive surface areas of all of the abrasive segments 303 of the body 301. Further, the body 301 can have a total surface area (Aaar) of the abrasive annular region 311. According to one embodiment, the abrasive articles can have a specific abrasive surface area percentage, It is the total abrasive surface area of the abrasive section relative to the total surface area of the abrasive annular region 311. That is, the abrasive surface area percentage is [(TASA/Aaar) x 100%]. According to an embodiment, the abrasive article may have no more than 24%, such as no more than 23%, no more than 22%, 21%, no more than 20%, no more than 19%, no more than 18%, no more than 70%, no More than 60%, no more than 50%, no more than 14%, no more than 13%, no more than 12%, no more than 11%, no more than 10%, no more than 9%, no more than 8%, no more than 7%, no Abrasive surface area percentage greater than 6%, no greater than 5%, no greater than 4%, or even no greater than 3%. Moreover, in one non-limiting embodiment, the abrasive article of the embodiments herein can have a total surface area relative to the abrasive annulus region 311 of at least 2%, such as at least 3%, at least 4%, at least 5%, at least 6%, At least 7%, at least 80%, at least 9%, at least 10%, at least 11%, at least 12%, at least 13%, at least 14%, at least 15%, at least 16%, at least 17%, at least 18%, at least 19 % or even at least 20% of the abrasive surface area percentage. It should be understood that the abrasive articles of the embodiments herein can have an abrasive surface area percentage in a range including any of the above minimum percentages and maximum percentages.

在其他情況下，磨料環形區域411上之磨料區段或磨料區段403之至少一部分可具有由該磨料區段之長度限定之縱軸，其可關於相關徑向軸成角度。舉例而言，參考圖3，磨料區段371可具有延伸穿過磨料區段371之研磨表面之中點372的縱軸375。徑向軸374可延伸穿過磨料區段371之中點372且限定徑向軸374與縱軸375之間的角373。角373可限定定向角373，其在某些情況下可小於90°，諸如小於80°、小於85°、小於82°、小於80°或甚至小於75°。此外，在其他 情況下，定向角373可為至少1°，諸如至少5°或甚至至少10°。應理解，磨料區段303中之任一者之定向角373可改變以促進改良效能。此外，磨料區段303可相對於彼此具有不同定向角。另外，同一環形區域內之磨料區段303之間或不同環形區域之間的定向角可相對於彼此不同。 In other cases, at least a portion of the abrasive section or abrasive section 403 on the abrasive annulus region 411 can have a longitudinal axis defined by the length of the abrasive section that can be angled with respect to the associated radial axis. For example, referring to FIG. 3, the abrasive section 371 can have a longitudinal axis 375 that extends through a point 372 in the abrasive surface of the abrasive section 371. The radial axis 374 can extend through a point 372 in the middle of the abrasive section 371 and define an angle 373 between the radial axis 374 and the longitudinal axis 375. The angle 373 can define an orientation angle 373 that can be less than 90° in some cases, such as less than 80°, less than 85°, less than 82°, less than 80°, or even less than 75°. Also, in other In this case, the orientation angle 373 can be at least 1°, such as at least 5° or even at least 10°. It will be appreciated that the orientation angle 373 of any of the abrasive segments 303 can be varied to promote improved performance. Furthermore, the abrasive segments 303 can have different orientation angles relative to each other. Additionally, the orientation angles between abrasive segments 303 or between different annular regions within the same annular region may be different relative to each other.

如所指出，主體301可包括磨料區段303。各磨料區段可具有黏結磨料之主體。形成黏結磨料製品之方法可包括形成混合物。該混合物可呈濕或乾形式。此外，該混合物可包括某些組分，包括(但不限於)黏結材料、磨料粒子及填料摻合物。應理解，其他組分可添加至混合物以促進其中組分彼此之適當分散及進一步加工以形成最終形成之黏結磨料製品。 As indicated, the body 301 can include an abrasive section 303. Each abrasive segment can have a body that bonds the abrasive. A method of forming a bonded abrasive article can include forming a mixture. The mixture can be in a wet or dry form. Additionally, the mixture can include certain components including, but not limited to, bonding materials, abrasive particles, and filler blends. It should be understood that other components may be added to the mixture to promote proper dispersion and further processing of the components therein to form a finally formed bonded abrasive article.

在適當形成混合物後，形成黏結磨料之方法可包括形成生坯體，該生坯體可為未燒結體，其可經受進一步處理以形成最終形成之黏結磨料。形成該生坯體之合適方法可包括模製、壓製、鑄造、衝壓、印刷及其組合。視情況，生坯體之形成可包括生坯體之乾燥以促進揮發物移除且製備主體以進一步加工。 After the mixture is suitably formed, the method of forming a bonded abrasive can include forming a green body, which can be an unsintered body that can be subjected to further processing to form a finally formed bonded abrasive. Suitable methods of forming the green body can include molding, pressing, casting, stamping, printing, and combinations thereof. Optionally, the formation of the green body can include drying of the green body to facilitate removal of the volatiles and preparation of the body for further processing.

在形成生坯體後，形成黏結磨料製品之方法可藉由加熱生坯體來持續以形成最終形成之黏結磨料體。加熱該生坯體可促進主體之一或多種組分(包括例如黏結材料)之相轉化。在某些情況下，可在至少約375℃至約1000℃之溫度下進行主體之加熱。在更特定情況下，成型方法可包括熱壓，其可包括向生坯體施加熱和壓力，其可單獨或同時施加。 根據一個實施方案，所施加壓力可為至少約0.5噸/平方吋且不大於約3噸/平方吋。 After forming the green body, the method of forming the bonded abrasive article can be continued by heating the green body to form the finally formed bonded abrasive body. Heating the green body promotes phase inversion of one or more components of the body, including, for example, a bonding material. In some cases, heating of the body can be carried out at a temperature of at least about 375 ° C to about 1000 ° C. In more specific cases, the forming process can include hot pressing, which can include applying heat and pressure to the green body, which can be applied separately or simultaneously. According to one embodiment, the applied pressure can be at least about 0.5 tons per square inch and no greater than about 3 tons per square foot.

在加工後，最終形成之磨料製品可包括黏結磨料主體，其包括特定含量之黏結材料、包含於該黏結材料內之特定含量之磨料粒子、包含於該黏結材料內之填料材料及在該黏結磨料主體體積內之一些孔隙。 After processing, the final formed abrasive article can comprise a bonded abrasive body comprising a specific amount of bonding material, a specific amount of abrasive particles contained in the bonding material, a filler material contained in the bonding material, and the bonding abrasive in the bonding material. Some pores within the bulk of the body.

根據一個實施方案，該磨料製品主體可包括具有可促進改良效能之特定平均粒度(Pa)之磨料粒子。舉例而言，在一個實施方案中，該等磨料粒子可具有如藉由加權平均數計算之不大於約150微米之平均粒度。在另一個實施方案中，該等磨料粒子之平均粒度可能較小，諸如不大於約125微米、不大於約100微米、不大於約80微米或甚至不大於約50微米。此外，在另一個非限制性實施方案中，該等磨料粒子之平均粒度可為至少約0.1微米，諸如至少約0.5微米、至少約1微米、至少約5微米或甚至至少約10微米。應理解，該等磨料粒子之平均粒度可在包括任何上述最小值及最大值之範圍內。 According to one embodiment, the abrasive article body can include abrasive particles having a particular average particle size (Pa) that promotes improved performance. For example, in one embodiment, the abrasive particles can have an average particle size of no greater than about 150 microns as calculated by a weighted average. In another embodiment, the average particle size of the abrasive particles may be small, such as no greater than about 125 microns, no greater than about 100 microns, no greater than about 80 microns, or even no greater than about 50 microns. Moreover, in another non-limiting embodiment, the abrasive particles can have an average particle size of at least about 0.1 microns, such as at least about 0.5 microns, at least about 1 micron, at least about 5 microns, or even at least about 10 microns. It should be understood that the average particle size of the abrasive particles can range from any of the above minimum and maximum values.

根據另一個態樣，該等磨料粒子可具有特定縱橫比(l：w)，其為作為最長尺寸之粒子長度(l)相比於作為垂直於該長度之粒子第二最長尺寸之寬度(w)之量測。該等磨料粒子之縱橫比可促進本文磨料製品之特徵及效能。對於至少一個實施方案，該等磨料粒子可具有至少約1.2：1、諸如至少約1.3：1、至少約1.4：1、至少約1.5：1或甚至至少約1.6：1之縱橫比(l：w)。此外，在一非限制性實施方案中，該等磨料粒子可 具有不大於約20：1、諸如不大於約10：1之縱橫比。應理解，該等磨料粒子可具有在包括任何上述最小比率及最大比率之範圍內的縱橫比。 According to another aspect, the abrasive particles can have a specific aspect ratio (l:w) which is the length of the particle as the longest dimension (l) compared to the width of the second longest dimension of the particle perpendicular to the length (w) ) The measurement. The aspect ratio of the abrasive particles can promote the characteristics and performance of the abrasive articles herein. For at least one embodiment, the abrasive particles can have an aspect ratio (l:w) of at least about 1.2:1, such as at least about 1.3:1, at least about 1.4:1, at least about 1.5:1, or even at least about 1.6:1. ). Moreover, in a non-limiting embodiment, the abrasive particles can There is an aspect ratio of no more than about 20:1, such as no more than about 10:1. It should be understood that the abrasive particles can have an aspect ratio that includes any of the minimum and maximum ratios described above.

此外，該等磨料粒子可關於可包含於黏結磨料內之填料粒子具有特定硬度。舉例而言，該等磨料粒子可具有大於精細填料粒子之硬度。在某些情況下，該等磨料粒子可關於莫氏硬度(Mohs hardness)具有至少約7之硬度。在其他實施方案中，該等磨料粒子可具有約7.5、諸如至少約8、至少約8.5或甚至至少約9之莫氏硬度。 In addition, the abrasive particles can have a particular hardness with respect to filler particles that can be included in the bonded abrasive. For example, the abrasive particles can have a hardness greater than that of the fine filler particles. In some cases, the abrasive particles can have a hardness of at least about 7 with respect to Mohs hardness. In other embodiments, the abrasive particles can have a Mohs hardness of about 7.5, such as at least about 8, at least about 8.5, or even at least about 9.

根據一個實施方案，該等磨料粒子可包括無機材料。在某些情況下，該等磨料粒子可包括天然存在之材料。此外，在其他情況下，該等磨料粒子可由合成材料形成。一些例示性磨料粒子可包括如下材料，諸如氧化物、碳化物、氮化物、硼化物、氧碳化物、氧氮化物、氧硼化物、含碳材料、金剛石及其組合。該等磨料粒子可包括超級研磨材料，且更特定言之，可基本上由超級研磨材料組成。對於至少一個實施方案，該等磨料粒子可包括金剛石。而在其他情況下，該等磨料粒子可包括立方氮化硼。根據至少一個非限制性實施方案，該等磨料粒子可基本上由金剛石組成。 According to one embodiment, the abrasive particles may comprise an inorganic material. In some cases, the abrasive particles can include naturally occurring materials. Moreover, in other cases, the abrasive particles can be formed from a composite material. Some exemplary abrasive particles can include materials such as oxides, carbides, nitrides, borides, oxycarbides, oxynitrides, oxyborides, carbonaceous materials, diamonds, and combinations thereof. The abrasive particles can comprise a superabrasive material and, more specifically, can consist essentially of a superabrasive material. For at least one embodiment, the abrasive particles can comprise diamond. In other cases, the abrasive particles can include cubic boron nitride. According to at least one non-limiting embodiment, the abrasive particles can consist essentially of diamond.

在一些實施方案中，該等磨料粒子可包括至少一些含量之多晶金剛石。對於利用包括金剛石之磨料粒子之實施方案，該等磨料粒子可具有特定含量之多晶金剛石。舉例而言，多晶金剛石含量相對於磨料粒子總含量可為至少約20%，諸如至少約25%、至少約30%、至少約40%、至少約 50%、至少約60%、至少約70%、至少約80%或甚至至少約90%。在至少一個實施方案中，該等磨料粒子之基本上所有金剛石為多晶金剛石材料。 In some embodiments, the abrasive particles can include at least some amount of polycrystalline diamond. For embodiments utilizing abrasive particles comprising diamond, the abrasive particles can have a specific amount of polycrystalline diamond. For example, the polycrystalline diamond content can be at least about 20%, such as at least about 25%, at least about 30%, at least about 40%, at least about the total amount of abrasive particles. 50%, at least about 60%, at least about 70%, at least about 80% or even at least about 90%. In at least one embodiment, substantially all of the diamond of the abrasive particles is a polycrystalline diamond material.

根據一個態樣，該等黏結磨料可包括包含於該黏結材料內之填料。該填料可以特定含量存在以促進磨料製品之改良效能。舉例而言，該主體可包括一定含量之填料，其以相對於該黏結材料之總體積為不大於約10體積%之量存在。在其他情況下，該填料之含量可能較小，諸如不大於約9體積%、不大於約8體積%、不大於約7體積%、不大於約6體積%或甚至不大於約5.5體積%。並且此外，在另一非限制性實施方案中，該磨料製品可包括相對於該黏結材料之總體積為至少約0.2體積%、諸如至少約0.5體積%、至少約1體積%、至少約2體積%或甚至至少約3體積%之量存在的填料。應理解，填料之含量可在包括任何上述最小百分比及最大百分比之範圍內存在。 According to one aspect, the bonded abrasives can include fillers contained within the bonding material. The filler may be present in a particular amount to promote improved performance of the abrasive article. For example, the body can include a level of filler present in an amount of no greater than about 10% by volume relative to the total volume of the bonding material. In other cases, the filler may be present in minor amounts, such as no greater than about 9% by volume, no greater than about 8% by volume, no greater than about 7% by volume, no greater than about 6% by volume, or even no greater than about 5.5% by volume. And further, in another non-limiting embodiment, the abrasive article can comprise at least about 0.2% by volume, such as at least about 0.5% by volume, at least about 1% by volume, at least about 2 volumes, relative to the total volume of the bonding material. A filler present in % or even at least about 3% by volume. It will be understood that the filler content may be present in a range including any of the above minimum percentages and maximum percentages.

根據一實施方案，脆性填料可為具有特定莫氏硬度之粒子，諸如不大於約5、不大於約4、不大於約3.5、不大於約3、不大於約2或甚至不大於約1。此外，包含於該黏結材料內之填料可具有至少約0.1、諸如至少約1、至少約1.5或甚至至少約2之莫氏硬度。應理解，該填料可具有在任何上述最小值與最大值之間之範圍內的莫氏硬度。 According to an embodiment, the brittle filler can be particles having a specific Mohs hardness, such as no greater than about 5, no greater than about 4, no greater than about 3.5, no greater than about 3, no greater than about 2, or even no greater than about 1. Further, the filler contained within the bonding material can have a Mohs hardness of at least about 0.1, such as at least about 1, at least about 1.5, or even at least about 2. It should be understood that the filler may have a Mohs hardness in the range between any of the above minimum and maximum values.

根據一實施方案，該黏結磨料主體可具有特定含量之孔隙以促進合適之效能。舉例而言，用作磨料區段之黏結磨料之孔隙率可為相對於主體之總體積不大於約20體積 %。在其他情況下，孔隙率可為不大於約15體積%、不大於約12體積%、不大於約10體積%、不大於約8體積%、不大於約5體積%或甚至不大於約3體積%。此外，在至少一個非限制性實施方案中，相對於黏結磨料之主體之總體積，孔隙率可為至少約0.1體積%，諸如至少約0.5體積%、至少約1體積%或甚至至少約1.5體積%。應理解，該主體可具有在包括任何上述最小百分比及最大百分比之範圍內之孔隙含量。 According to one embodiment, the bonded abrasive body can have a specific amount of pores to promote proper performance. For example, the porosity of the bonded abrasive used as the abrasive section can be no more than about 20 volumes relative to the total volume of the body. %. In other cases, the porosity may be no greater than about 15% by volume, no greater than about 12% by volume, no greater than about 10% by volume, no greater than about 8% by volume, no greater than about 5% by volume, or even no greater than about 3 volumes. %. Moreover, in at least one non-limiting embodiment, the porosity can be at least about 0.1% by volume, such as at least about 0.5% by volume, at least about 1% by volume, or even at least about 1.5 volumes, relative to the total volume of the body of the bonded abrasive. %. It should be understood that the body may have a void content within a range including any of the above minimum percentages and maximum percentages.

根據另一實施方案，磨料主體可具有特定含量之作為閉合孔隙之孔隙。舉例而言，該主體之大多數孔隙可為閉合孔隙，其可由未必彼此連接之離散孔隙限定。在另一實施方案中，該主體內之基本上所有孔隙可為閉合孔隙。 According to another embodiment, the abrasive body can have a specific amount of pores that are closed pores. For example, most of the pores of the body can be closed pores that can be defined by discrete pores that are not necessarily connected to each other. In another embodiment, substantially all of the pores within the body can be closed pores.

在某些情況下，該磨料製品之主體可為具有黏結基質之黏結磨料主體，該黏結基質限定圍繞且含有磨料粒子、填料及孔隙之材料之三維基質。根據一個實施方案，該黏結材料可包括金屬或金屬合金。在特定實施方案中，該黏結材料可包括過渡金屬元素，且更特定言之，可包括過渡金屬元素諸如銅、錫、銀、鎳及其組合。在至少一個實施方案中，該黏結材料可包括青銅，其包括銅及錫之組合。舉例而言，包括青銅之該黏結材料可包括不小於錫含量之銅含量。在其他替代實施方案中，青銅可包括大於錫含量之銅含量。 In some cases, the body of the abrasive article can be a bonded abrasive body having a bonded matrix that defines a three-dimensional matrix of material surrounding and containing abrasive particles, fillers, and pores. According to one embodiment, the bonding material may comprise a metal or a metal alloy. In particular embodiments, the bonding material can include transition metal elements, and more specifically, transition metal elements such as copper, tin, silver, nickel, and combinations thereof. In at least one embodiment, the bonding material can include bronze, which includes a combination of copper and tin. For example, the bonding material including bronze may include a copper content not less than the tin content. In other alternative embodiments, the bronze may include a copper content greater than the tin content.

在一個態樣中，該黏結磨料主體可包括具有如藉由銅及錫之重量或重量百分比量測為至少約0.2之錫/銅比率(Sn/Cu)之黏結材料。在其他實施方案中，青銅可包括至少約0.23、諸如至少約0.25、至少約0.28、至少約0.3、至少約0.33、 至少約0.35、至少約0.38、至少約0.4、至少約0.43、至少約0.45、至少約0.48、至少約0.5、至少約0.53、至少約0.55、至少約0.58、至少約0.6、至少約0.63、至少約0.65、至少約0.68、至少約0.7、至少約0.73、至少約0.75、至少約0.78、至少約0.8或甚至至少約0.9之錫/銅比率。在另一非限制性實施方案中，該黏結材料可包括不大於約0.93、不大於約0.9、不大於約0.88、不大於約0.85、不大於約0.83、不大於約0.8、不大於約0.78、不大於約0.75、不大於約0.73、不大於約0.7、不大於約0.68、不大於約0.65、不大於約0.63、不大於約0.6、不大於約0.58、不大於約0.55、不大於約0.53、不大於約0.5、不大於約0.48、不大於約0.45、不大於約0.43、不大於約0.4、不大於約0.3、不大於約0.2之錫/銅比率。應理解，該黏結材料可包括具有在包括任何上述最小值及最大值範圍內之錫/銅比率的青銅。 In one aspect, the bonded abrasive body can comprise a bond material having a tin/copper ratio (Sn/Cu) of at least about 0.2 as measured by weight or weight percent of copper and tin. In other embodiments, the bronze may comprise at least about 0.23, such as at least about 0.25, at least about 0.28, at least about 0.3, at least about 0.33, At least about 0.35, at least about 0.38, at least about 0.4, at least about 0.43, at least about 0.45, at least about 0.48, at least about 0.5, at least about 0.53, at least about 0.55, at least about 0.58, at least about 0.6, at least about 0.63, at least about A tin/copper ratio of 0.65, at least about 0.68, at least about 0.7, at least about 0.73, at least about 0.75, at least about 0.78, at least about 0.8, or even at least about 0.9. In another non-limiting embodiment, the bonding material can include no greater than about 0.93, no greater than about 0.9, no greater than about 0.88, no greater than about 0.85, no greater than about 0.83, no greater than about 0.8, no greater than about 0.78, Not more than about 0.75, no more than about 0.73, no more than about 0.7, no more than about 0.68, no more than about 0.65, no more than about 0.63, no more than about 0.6, no more than about 0.58, no more than about 0.55, no more than about 0.53, A tin/copper ratio of no greater than about 0.5, no greater than about 0.48, no greater than about 0.45, no greater than about 0.43, no greater than about 0.4, no greater than about 0.3, and no greater than about 0.2. It should be understood that the bonding material can include bronze having a tin/copper ratio in a range including any of the above minimum and maximum values.

在至少一個態樣中，該黏結磨料可包括相對於該黏結磨料主體之總體積為特定含量之黏結材料。舉例而言，該黏結磨料可包括相對於主體之總體積為至少約50體積%之黏結材料，諸如至少約55體積%、至少約60體積%、至少約65體積%、至少約70體積%、至少約75體積%、至少約80體積%、至少約85體積%、至少約90體積%、至少約92體積%、至少約94體積%、至少約96體積%、至少約97體積%或甚至至少約98體積%。此外，在另一非限制性實施方案中，該黏結磨料可包括相對於主體之總體積為不大於約99.5體積%之黏結材料，諸如不大於約99體積%、不大於約98體積%、 不大於約97體積%、不大於約96體積%或甚至不大於約95體積%。應理解，該黏結磨料主體可包括在包括任何上述最小百分比及最大百分比之範圍內之含量的黏結材料。 In at least one aspect, the bonded abrasive can comprise a specific amount of bonding material relative to the total volume of the bonded abrasive body. For example, the bonded abrasive can comprise at least about 50% by volume of the bonding material relative to the total volume of the body, such as at least about 55% by volume, at least about 60% by volume, at least about 65% by volume, at least about 70% by volume, At least about 75% by volume, at least about 80% by volume, at least about 85% by volume, at least about 90% by volume, at least about 92% by volume, at least about 94% by volume, at least about 96% by volume, at least about 97% by volume, or even at least About 98% by volume. Moreover, in another non-limiting embodiment, the bonded abrasive can comprise no more than about 99.5% by volume of bonding material relative to the total volume of the body, such as no greater than about 99% by volume, no greater than about 98% by volume, Not more than about 97% by volume, no more than about 96% by volume, or even no more than about 95% by volume. It should be understood that the bonded abrasive body can include a bonding material in an amount that includes any of the minimum percentages and maximum percentages described above.

在另一實施方案中，用作磨料區段之黏結磨料可包括相對於該黏結磨料主體之總體積為特定含量之磨料粒子。舉例而言，在某些情況下，該黏結磨料主體可包括相對於該主體之總體積為至少約0.1體積%之磨料粒子，諸如至少約0.25體積%磨料粒子、至少約0.5體積%、至少約0.6體積%、至少約0.7體積%、至少約0.8體積%、至少約0.9體積%、至少約1體積%、至少約2體積%、至少約3體積%、至少約4體積%或甚至至少約5體積%。在另一非限制性實施方案中，該黏結磨料可包括相對於該黏結磨料主體之總體積為不大於約15體積%之磨料粒子，諸如不大於約12體積%、不大於約10體積%、不大於約8體積%、不大於約7體積%、不大於約6體積%、不大於約5體積%、不大於約4體積%、不大於約3體積%、不大於約2體積%、不大於約1.5體積%。應理解，相對於黏結磨料主體總體積之磨料粒子含量可在包括任何上述最小百分比及最大百分比之範圍內。 In another embodiment, the bonded abrasive used as the abrasive segment can comprise a specific amount of abrasive particles relative to the total volume of the bonded abrasive body. For example, in some cases, the bonded abrasive body can include at least about 0.1% by volume of abrasive particles relative to the total volume of the body, such as at least about 0.25 volume percent abrasive particles, at least about 0.5 volume percent, at least about 0.6 vol%, at least about 0.7 vol%, at least about 0.8 vol%, at least about 0.9 vol%, at least about 1 vol%, at least about 2 vol%, at least about 3% by volume, at least about 4 vol%, or even at least about 5 volume%. In another non-limiting embodiment, the bonded abrasive can comprise no more than about 15% by volume of abrasive particles, such as no greater than about 12% by volume, no greater than about 10% by volume, relative to the total volume of the bonded abrasive body, Not more than about 8 vol%, not more than about 7% by volume, not more than about 6% by volume, not more than about 5% by volume, not more than about 4% by volume, not more than about 3% by volume, not more than about 2% by volume, not More than about 1.5% by volume. It should be understood that the abrasive particle content relative to the total volume of the bonded abrasive body can range from any of the above minimum percentages to maximum percentages.

該磨料製品可包括有限含量之特定材料，包括例如磷、鋅、銻、鉻、鈷、矽及其組合。舉例而言，在一個實施方案中，前述材料中之任一者之含量相對於黏結材料之總體積可為不大於約1體積%，諸如不大於約0.08體積%，諸如不大於約0.05體積%或甚至不大於約0.01體積%。此外，在某些非限制性實施方案中，該黏結材料可包括痕量，諸如相 對於黏結材料總體積為至少約0.001體積%。 The abrasive article can include a limited amount of a particular material including, for example, phosphorus, zinc, cerium, chromium, cobalt, cerium, and combinations thereof. For example, in one embodiment, the content of any of the foregoing materials may be no greater than about 1% by volume, such as no greater than about 0.08% by volume, such as no greater than about 0.05% by volume, relative to the total volume of the bonding material. Or even no more than about 0.01% by volume. Moreover, in certain non-limiting embodiments, the bonding material can include trace amounts, such as phases The total volume of the bonding material is at least about 0.001% by volume.

在另一實施方案中，該磨料製品可經組態以進行某些材料移除操作。舉例而言，該磨料製品可經組態以接觸且研磨某些晶圓或材料(包括但不限於磷、單晶或多晶材料)基材之表面。在特定情況下，該磨料製品可經組態以研磨特定硬質材料，諸如藍寶石。在其他情況下，本文之磨料製品可經組態用於研磨具有至少約1500-3000kg/mm2之維氏硬度(Vickers hardness)之材料。 In another embodiment, the abrasive article can be configured to perform certain material removal operations. For example, the abrasive article can be configured to contact and grind the surface of a substrate of certain wafers or materials, including but not limited to phosphorous, single crystal or polycrystalline materials. In certain instances, the abrasive article can be configured to grind a particular hard material, such as sapphire. In other instances, the abrasive articles herein can be configured to grind a material having a Vickers hardness of at least about 1500-3000 kg/mm&lt;2&gt;.

圖4包括根據一實施方案之磨料製品之一部分的圖示。如所示，磨料製品400可包括主體401，其包括基材402及耦接至基材402之磨料區段403。如進一步說明，磨料製品400可包括安置於內環形表面413與外環形表面412之間的環形表面406。此外，磨料製品400可包括基於環形表面406上之磨料區段403之定位安置於內環形圓周414與外環形圓周412之間的磨料環形區域411。另外，在一個實施方案中，磨料環形區域411可包括內環形區域430及外環形區域420，及安置於內環形區域430與外環形區域420之間的中央環形區域440。如本文實施方案中所述，內環形區域43可定義為內環形圓周414與中間環形圓周424之間的區域。此外，中央環形區域440可定義為中間環形圓周424與中間環形圓周425之間的區域。最後，外環形區域420可定義為中間環形圓周425與外環形圓周412之間的區域。 4 includes an illustration of a portion of an abrasive article in accordance with an embodiment. As shown, the abrasive article 400 can include a body 401 that includes a substrate 402 and an abrasive section 403 that is coupled to the substrate 402. As further illustrated, the abrasive article 400 can include an annular surface 406 disposed between the inner annular surface 413 and the outer annular surface 412. Additionally, the abrasive article 400 can include an abrasive annular region 411 disposed between the inner annular circumference 414 and the outer annular circumference 412 based on the orientation of the abrasive segments 403 on the annular surface 406. Additionally, in one embodiment, the abrasive annulus region 411 can include an inner annular region 430 and an outer annular region 420, and a central annular region 440 disposed between the inner annular region 430 and the outer annular region 420. As described in the embodiments herein, the inner annular region 43 can be defined as the region between the inner annular circumference 414 and the intermediate annular circumference 424. Additionally, the central annular region 440 can be defined as the region between the intermediate annular circumference 424 and the intermediate annular circumference 425. Finally, the outer annular region 420 can be defined as the region between the intermediate annular circumference 425 and the outer annular circumference 412.

如圖4之實施方案中所示且根據一個實施方案，磨料製品400可包括可相對於彼此具有不同尺寸之磨料區段 403。舉例而言，磨料區段403可包括第一類型之磨料區段431，其可相對於其他磨料區段(諸如第二類型之磨料區段421)具有不同長度。利用具有不同形狀、尺寸及輪廓之磨料區段可促進改良效能。特定言之，磨料區段403之至少一部分(諸如第一類型之磨料區段431)可相對於磨料區段403之另一部分(諸如第二類型之磨料區段421)具有更大長度。在一個實施方案中，磨料區段403可包括第一磨料區段，諸如第一類型之磨料區段431之磨料區段之一，其限定第一長度(L1)。磨料區段403亦可包括第二磨料區段，諸如第二類型之磨料區段421之磨料區段之一，其可具有第二長度(L2)。在至少一個實施方案中，該第一長度可能不同於該第二長度。此外，在某些情況下，第一長度可大於第二長度。在一個特定實施方案中，第一區段之第一長度及第二區段之第二長度可限定至少1.1：1、諸如至少1.2：1、至少1.5：1、至少2：1、至少3：1、至少4：1、至少5：1、至少6：1、至少7：1、至少8：1、至少9：1、至少10：1之比率(L1：L2)。此外，在至少一個非限制性實施方案中，第一長度與第二長度之比率(L1：L2)可能不大於100：1，諸如不大於90：1、不大於80：1、不大於70：1、不大於60：1、不大於50：1、不大於40：1、不大於30：1、不大於20：1、不大於10：1、不大於8：1、不大於6：1或甚至不大於4：1。應理解，第一長度及第二長度之比率可在包括任何上述最小比率及最大比率之範圍內。 As shown in the embodiment of Figure 4 and according to one embodiment, the abrasive article 400 can include abrasive segments that can have different sizes relative to each other. 403. For example, the abrasive section 403 can include a first type of abrasive section 431 that can have different lengths relative to other abrasive sections, such as the second type of abrasive section 421. Improved performance can be facilitated by the use of abrasive segments having different shapes, sizes and contours. In particular, at least a portion of the abrasive section 403, such as the first type of abrasive section 431, can have a greater length relative to another portion of the abrasive section 403, such as the second type of abrasive section 421. In one embodiment, the abrasive section 403 can include a first abrasive section, such as one of the abrasive sections of the first type of abrasive section 431 that defines a first length (L1). The abrasive section 403 can also include a second abrasive section, such as one of the abrasive sections of the second type of abrasive section 421, which can have a second length (L2). In at least one embodiment, the first length can be different than the second length. Moreover, in some cases, the first length can be greater than the second length. In a particular embodiment, the first length of the first section and the second length of the second section can define at least 1.1:1, such as at least 1.2:1, at least 1.5:1, at least 2:1, at least 3: 1. A ratio of at least 4:1, at least 5:1, at least 6:1, at least 7:1, at least 8:1, at least 9:1, at least 10:1 (L1: L2). Moreover, in at least one non-limiting embodiment, the ratio of the first length to the second length (L1: L2) may be no greater than 100:1, such as no greater than 90:1, no greater than 80:1, no greater than 70: 1. Not more than 60:1, no more than 50:1, no more than 40:1, no more than 30:1, no more than 20:1, no more than 10:1, no more than 8:1, no more than 6:1 or Not even greater than 4:1. It should be understood that the ratio of the first length to the second length may be within a range including any of the above minimum ratios and maximum ratios.

根據另一實施方案，磨料製品400之磨料區段403可基於其尺寸分成單獨之部分或類型，包括例如不同長度 之磨料區段。舉例而言，磨料區段403可包括第一類型之磨料區段431，其可具有平均第一長度(aL1)。磨料製品400可包括第二類型之磨料區段403，其可具有第二平均長度(aL2)。在一種特定情況下，該平均第一長度可能不同於該平均第二長度。根據一個實施方案，該第一平均長度及該第二平均長度可限定至少1.1：1、諸如至少1.2：1、至少1.5：1、至少2：1、至少3：1、至少4：1、至少5：1、至少6：1、至少7：1、至少8：1、至少9：1、至少10：1之比率(aL1：aL2)。此外，在至少一個非限制性實施方案中，平均第一長度與平均第二長度之比率(aL1：aL2)可能不大於100：1，諸如不大於90：1、不大於80：1、不大於70：1、不大於60：1、不大於50：1、不大於40：1、不大於30：1、不大於20：1、不大於10：1、不大於8：1、不大於6：1或甚至不大於4：1。應理解，第一長度與第二長度之比率可在包括範圍內。 According to another embodiment, the abrasive section 403 of the abrasive article 400 can be divided into individual parts or types based on its size, including, for example, different lengths. Abrasive section. For example, the abrasive section 403 can include a first type of abrasive section 431 that can have an average first length (aL1). The abrasive article 400 can include a second type of abrasive segment 403 that can have a second average length (aL2). In one particular case, the average first length may differ from the average second length. According to an embodiment, the first average length and the second average length may define at least 1.1:1, such as at least 1.2:1, at least 1.5:1, at least 2:1, at least 3:1, at least 4:1, at least 5:1, at least 6:1, at least 7:1, at least 8:1, at least 9:1, at least 10:1 ratio (aL1: aL2). Moreover, in at least one non-limiting embodiment, the ratio of the average first length to the average second length (aL1: aL2) may be no greater than 100:1, such as no greater than 90:1, no greater than 80:1, no greater than 70:1, no more than 60:1, no more than 50:1, no more than 40:1, no more than 30:1, no more than 20:1, no more than 10:1, no more than 8:1, no more than 6: 1 or even no more than 4:1. It should be understood that the ratio of the first length to the second length may be within the inclusion range.

根據另一實施方案，不同類型之磨料區段，包括例如第一類型之磨料區段431及第二類型之區段421，可安置於磨料製品400之磨料環形區域411之不同區域中。舉例而言，在一個實施方案中，內環形區域430或外環形區域420包括相對於在同一磨料製品400上使用之另一類型之磨料區段具有不同含量之一或多種類型之磨料區段。特定言之，如圖4中所示，內環形區域430可包括相對於第一類型之磨料區段431之含量為更大含量之第二類型之磨料區段421。值得注意的是，很少且在一些情況下，第一類型之磨料區段431都未安置(部分地或完全地)在內環形區域430內。此外， 在另一實施方案中，第二類型之磨料區段421可安置於外環形區域420中。更特定言之，外環形區域420可包括相對於第一類型之磨料區段431之含量為更大含量之第二類型之磨料區段421。在某些情況下，諸如圖4中所示，外環形區域420可包括相對於第二類型之磨料區段421為含量很少或無之第一類型之磨料區段431。 According to another embodiment, different types of abrasive segments, including, for example, the first type of abrasive segments 431 and the second type of segments 421, can be disposed in different regions of the abrasive annulus region 411 of the abrasive article 400. For example, in one embodiment, inner annular region 430 or outer annular region 420 includes one or more types of abrasive segments having different contents relative to another type of abrasive segment used on the same abrasive article 400. In particular, as shown in FIG. 4, the inner annular region 430 can include a second type of abrasive segment 421 that is greater in content relative to the first type of abrasive segment 431. It is noted that few and in some cases, the first type of abrasive segments 431 are not disposed (partially or completely) within the inner annular region 430. In addition, In another embodiment, a second type of abrasive section 421 can be disposed in the outer annular region 420. More specifically, the outer annular region 420 can include a second type of abrasive segment 421 that is greater in content relative to the first type of abrasive segment 431. In some cases, such as shown in FIG. 4, the outer annular region 420 can include a first type of abrasive segment 431 that is less or absent relative to the second type of abrasive segment 421.

此外，應理解，中央環形區域440可包括相對於彼此且相對於第一及第二類型之磨料區段431及421在其他區域(諸如內環形區域430及外環形區域420)中之含量為特定含量之第一類型之磨料區段431或第二類型之磨料區段421。一個特定實施方案，中央環形區域440可包括相對於第二類型之磨料區段421之含量為更大含量之第一類型之磨料區段431。特定言之，中央環形區域440可能基本上不含第二類型之磨料區段421，諸如圖4中所示。亦即，中央環形區域440可完全僅由第一類型之磨料區段431組成。 Moreover, it should be understood that the central annular region 440 can include a specific amount relative to each other and relative to the first and second types of abrasive segments 431 and 421 in other regions, such as the inner annular region 430 and the outer annular region 420. The first type of abrasive section 431 or the second type of abrasive section 421. In a particular embodiment, the central annular region 440 can include a first type of abrasive segment 431 that is greater in content relative to the second type of abrasive segments 421. In particular, the central annular region 440 may be substantially free of the second type of abrasive segments 421, such as shown in FIG. That is, the central annular region 440 can be composed entirely of only the first type of abrasive segments 431.

至少一個實施方案，相比於與內環形圓周414相交之第一類型之磨料區段431之含量，更大含量之第二類型之磨料區段421可與磨料環形區域411之內環形圓周414相交。對於另一實施方案，相對於與磨料環形區域411之外環形圓周412相交之第一類型之磨料區段431的含量，更大含量之第二類型之磨料區段421可與磨料環形區域411之外環形圓周421相交。此外，在至少一個實施方案中，第一類型之磨料區段431可遠離磨料環形區域411之內環形圓周414及/或外環形圓周412。對於一個實施方案，相比於與內環形 圓周414或外環形圓周412相交之第二類型之磨料區段421之含量，更大含量之第一類型之磨料區段431可遠離內環形圓周414或外環形圓周412。 In at least one embodiment, a greater amount of the second type of abrasive segment 421 can intersect the inner annular circumference 414 of the abrasive annular region 411 as compared to the first type of abrasive segment 431 that intersects the inner annular circumference 414. . For another embodiment, a greater amount of the second type of abrasive segment 421 can be associated with the abrasive annular region 411 relative to the content of the first type of abrasive segment 431 that intersects the annular circumference 412 outside the abrasive annular region 411. The outer annular circumference 421 intersects. Moreover, in at least one embodiment, the first type of abrasive segments 431 can be remote from the inner annular circumference 414 and/or the outer annular circumference 412 of the abrasive annular region 411. For one embodiment, compared to the inner ring The second type of abrasive segments 421 intersecting the circumference 414 or the outer annular circumference 412 may have a greater amount of the first type of abrasive segments 431 that may be remote from the inner annular circumference 414 or the outer annular circumference 412.

根據一實施方案，磨料區段403可包括具有第一磨料表面積ASA1之第一類型之磨料區段431及具有第二磨料表面積(ASA2)之第二類型之磨料區段421。在至少一個實施方案中，ASA1可能大於ASA2。在另一實施方案中，第一及第二類型之磨料區段431及421可限定至少1.1：1、諸如至少1.2：1、至少1.5：1、至少2：1、至少3：1、至少4：1、至少5：1、至少6：1、至少7：1、至少8：1、至少9：1或甚至至少10：1之磨料表面積比率(ASA1：ASA2)。此外，在至少一個非限制性實施方案中，第一及第二類型之磨料區段431及421可限定不大於100：1、諸如不大於90：1、不大於80：1、不大於70：1、不大於60：1、不大於60：1、不大於50：1、不大於40：1、不大於30：1、不大於20：1、不大於10：1、不大於8：1、不大於6：1或甚至不大於4：1之磨料表面積比率(ASA1：ASA2)。應理解，第一及第二類型之磨料區段431及421可限定在包括任何上述最小比率及最大比率之範圍內之磨料表面積比率(ASA1：ASA2)。 According to an embodiment, the abrasive section 403 can include a first type of abrasive section 431 having a first abrasive surface area ASA1 and a second type of abrasive section 421 having a second abrasive surface area (ASA2). In at least one embodiment, ASA1 may be larger than ASA2. In another embodiment, the first and second types of abrasive segments 431 and 421 can define at least 1.1:1, such as at least 1.2:1, at least 1.5:1, at least 2:1, at least 3:1, at least 4 : 1. Abrasive surface area ratio (ASA1: ASA2) of at least 5:1, at least 6:1, at least 7:1, at least 8:1, at least 9:1 or even at least 10:1. Moreover, in at least one non-limiting embodiment, the first and second types of abrasive segments 431 and 421 can define no greater than 100:1, such as no greater than 90:1, no greater than 80:1, no greater than 70: 1. Not more than 60:1, not more than 60:1, no more than 50:1, no more than 40:1, no more than 30:1, no more than 20:1, no more than 10:1, no more than 8:1 Abrasive surface area ratio (ASA1: ASA2) of no more than 6:1 or even no more than 4:1. It should be understood that the first and second types of abrasive segments 431 and 421 can define an abrasive surface area ratio (ASA1: ASA2) that includes any of the above minimum and maximum ratios.

根據一實施方案，相比於包含於中央環形區域440內之一或多個磨料區段，包含於內環形區域430或外環形區域420內之磨料區段可具有不同磨料表面積。本文對包含於特定區域內之磨料區段的提及係提及具有區域之一內之大多數表面積且在特定情況下完全包含於該區域內之磨料區段。更特定言之，如圖4中所示，相比於包含於中央環形區 域440內之第一類型之磨料區段431，內環形區域430內之第二類型之磨料區段421可具有較小表面積。此外，在一個實施方案中，相比於包含於中央環形區域440內之第一類型之磨料區段431，外環形區域420內之第二類型之磨料區段421可具有較小表面積。應理解，對於包含於內環形區域420及外環形區域420內之磨料區段，本文實施方案之磨料製品亦可具有磨料表面積差異。 According to an embodiment, the abrasive segments contained within inner annular region 430 or outer annular region 420 may have different abrasive surface areas than one or more abrasive segments included in central annular region 440. Reference herein to an abrasive segment contained within a particular region refers to an abrasive segment having a majority of the surface area within one of the regions and, in certain instances, completely contained within the region. More specifically, as shown in Figure 4, compared to being included in the central annulus The first type of abrasive section 431 within the region 440, the second type of abrasive section 421 within the inner annular region 430 can have a smaller surface area. Moreover, in one embodiment, the second type of abrasive segments 421 in the outer annular region 420 can have a smaller surface area than the first type of abrasive segments 431 included in the central annular region 440. It should be understood that for abrasive segments contained within inner annular region 420 and outer annular region 420, the abrasive articles of the embodiments herein may also have abrasive surface area differences.

磨料區段403可相對於彼此以特定分佈佈置在磨料環形區域411內，其可促進改良效能。舉例而言，在一個實施方案中，磨料區段403可相對於多個環形區域內之磨料區段安置限定交替模式。更特定言之，該交替模式可能係指磨料區段在外環形區域420與中央環形區域440之間的相對安置。如圖4中所示，第一類型之磨料區段431及第二類型之磨料區段421之佈置圍繞主體401在第一類型之磨料區段431與第二類型之磨料區段421之間沿圓周交替移動。更特定言之，包含於外環形區域420中之第二類型之磨料區段421之至少一個磨料區段可安置於中央環形區域440內之第一類型之磨料區段431之兩個直接相鄰的磨料區段之間。 The abrasive segments 403 can be disposed within the abrasive annulus region 411 with a particular distribution relative to one another, which can promote improved performance. For example, in one embodiment, the abrasive section 403 can define an alternating pattern relative to the abrasive segments within the plurality of annular regions. More specifically, the alternating pattern may refer to the relative placement of the abrasive segments between the outer annular region 420 and the central annular region 440. As shown in FIG. 4, the arrangement of the first type of abrasive section 431 and the second type of abrasive section 421 surrounds the body 401 along the first type of abrasive section 431 and the second type of abrasive section 421. The circumference moves alternately. More specifically, at least one of the abrasive segments 421 of the second type of abrasive segments 421 included in the outer annular region 420 can be disposed in the central annular region 440 and the two adjacent abrasive segments 431 of the first type are directly adjacent Between the abrasive sections.

在另一實施方案中，交替模式亦可用於安置於內環形區域430及中央環形區域440中之磨料區段。舉例而言，如圖4中所示，相比於安置於中央環形區域440內之第一類型之磨料區段431，內環形區域440可包括具有較短長度之第一類型之磨料區段421。此外，中央環形區域440中之第一類型之磨料區段421及內環形區域430中之第二類型之磨料區 段421之佈置圍繞主體401沿圓周交替移動。根據一實施方案，包含於內環形區域430中之第二類型之磨料區段421之至少一個磨料區段可安置於中央環形區域440內之第一類型之磨料區段431之兩個直接相鄰之磨料區段之間。應理解，雖然本文實施方案一般提及給定磨料環形區域內之三個環形區域(亦即，內環形區域、中央環形區域及外環形區域)，但可預期本文實施方案之磨料製品可利用更大數目或更小數目之磨料區域。此外，在使用非圓形工具諸如非圓形基材(包括例如具有多邊形或橢圓形二維形狀之基材)之程度上，本文對圓周之提及應理解為與該等工具同樣相關。此外，對圓周及/或環形區域之提及可應用於該等工具且可修改以具有如由基材之二維形狀及磨料區段之佈置所指示之類似多邊形或橢圓形形狀。 In another embodiment, the alternating mode can also be used for abrasive segments disposed in the inner annular region 430 and the central annular region 440. For example, as shown in FIG. 4, the inner annular region 440 can include a first type of abrasive segment 421 having a shorter length than the first type of abrasive segment 431 disposed within the central annular region 440. . In addition, a first type of abrasive section 421 and a second type of abrasive zone of the inner annular region 430 of the central annular region 440 The arrangement of segments 421 alternates circumferentially around the body 401. According to one embodiment, at least one of the abrasive segments 421 of the second type of abrasive segments 421 included in the inner annular region 430 can be disposed adjacent the two directly adjacent abrasive segments 431 of the first type within the central annular region 440. Between the abrasive sections. It should be understood that while the embodiments herein generally refer to three annular regions within a given abrasive annular region (i.e., inner annular region, central annular region, and outer annular region), it is contemplated that the abrasive articles of the embodiments herein may utilize more A large number or a smaller number of abrasive regions. Moreover, to the extent that a non-circular tool such as a non-circular substrate (including, for example, a substrate having a polygonal or elliptical two-dimensional shape) is used, references herein to the circumference are to be understood as being equally relevant to such tools. Furthermore, references to circumferential and/or annular regions may be applied to the tools and may be modified to have a similar polygonal or elliptical shape as indicated by the two-dimensional shape of the substrate and the arrangement of the abrasive segments.

圖5包括根據一實施方案之磨料製品之一部分的俯視圖。磨料製品500可包括主體501，該主體501包括基材502及耦接至基材502之環形表面506之磨料區段503。圖5之實施方案示出各種類型之磨料區段可用於同一磨粒製品中。基於至少一種磨粒區段特徵，各種類型之磨料區段可能彼此不同，包括(但不限於)磨料粒子之平均粒度、磨粒含量、磨料粒子之最大及/或最小粒度、黏結組合物、黏結含量、平均孔徑、孔隙含量、最小及/或最大孔徑、填料組成、填料之平均粒度、一或多種填料之最大及最小粒度、區段之二維形狀、區段之磨料面積、區段之尺寸、區段之安置、區段之定向角、區段在包括磨料環形區域之一或多個環形區域(例 如，內環形區域、中央環形區域、外環形區域等)之環形表面上的分佈。 Figure 5 includes a top plan view of a portion of an abrasive article in accordance with an embodiment. The abrasive article 500 can include a body 501 that includes a substrate 502 and an abrasive section 503 that is coupled to the annular surface 506 of the substrate 502. The embodiment of Figure 5 shows that various types of abrasive segments can be used in the same abrasive article. Various types of abrasive segments may differ from each other based on at least one abrasive segment feature including, but not limited to, average particle size of the abrasive particles, abrasive content, maximum and/or minimum particle size of the abrasive particles, bonding composition, bonding Content, average pore size, pore content, minimum and/or maximum pore size, filler composition, average particle size of the filler, maximum and minimum particle size of one or more fillers, two-dimensional shape of the segments, abrasive area of the segments, size of the segments , the placement of the segments, the orientation angle of the segments, the segments in one or more annular regions including the abrasive annular region (eg For example, the distribution on the annular surface of the inner annular region, the central annular region, the outer annular region, and the like.

在至少一個實施方案中，磨料製品500可包括在內環形區域530中，其包括如自上向下檢視具有第一二維形狀(包括特別是圓形二維形狀)之第一類型之磨料區段531。此外，該磨料製品可包括實質上包含於中央環形區域540內之第二類型之磨料區段541。相對於內環形區域530內之第一類型之磨料區段531，第二類型之磨料區段541可具有不同之二維形狀。如所示，第二類型之磨料區段541可具有通常矩形之二維形狀。磨料製品500可具有本文實施方案之磨料製品之任何特徵，包括環形表面506、內環形表面513及外環形圓周512與內環形圓周514之間的磨料環形表面511。 In at least one embodiment, the abrasive article 500 can be included in the inner annular region 530, including a first type of abrasive region having a first two-dimensional shape (including, in particular, a circular two-dimensional shape) as viewed from above. Segment 531. Additionally, the abrasive article can include a second type of abrasive segment 541 that is substantially contained within the central annular region 540. The second type of abrasive segments 541 can have different two-dimensional shapes relative to the first type of abrasive segments 531 within the inner annular region 530. As shown, the second type of abrasive section 541 can have a generally rectangular two-dimensional shape. The abrasive article 500 can have any of the features of the abrasive article of the embodiments herein, including an annular surface 506, an inner annular surface 513, and an abrasive annular surface 511 between the outer annular circumference 512 and the inner annular circumference 514.

此外，在一個實施方案中，磨料製品500可包括實質上包含於外環形區域520內且相比於第一及第二類型之磨料區段531及541具有不同二維形狀之第三類型之磨料區段521。第三類型之磨料區段520可具有橢圓形二維形狀。在一個特定實施方案中，磨料區段503可至少包括具有第一二維形狀之第一類型之磨料區段，諸如相對於第二及第三類型之磨料區段541及521可具有不同二維形狀及/或磨料面積之第一類型之磨料區段531。應注意到，磨料區段之二維形狀差異可能係基於區段之尺寸及/或輪廓。應理解，本文對磨料區段長度之提及為提及具有圓形形狀之磨料區段之直徑。根據另一實施方案，該等磨料區段可具有選自由多邊形、不規則多邊形、橢圓形、圓形組成之群之二維形狀、具有自中央區 域延伸之一或多個臂之主體、具有至少一個彎曲部之形狀及其組合。 Moreover, in one embodiment, the abrasive article 500 can comprise a third type of abrasive that is substantially contained within the outer annular region 520 and that has a different two-dimensional shape than the first and second types of abrasive segments 531 and 541. Section 521. The third type of abrasive section 520 can have an elliptical two-dimensional shape. In a particular embodiment, the abrasive section 503 can include at least a first type of abrasive segment having a first two-dimensional shape, such as having two different dimensions relative to the second and third types of abrasive segments 541 and 521. A first type of abrasive segment 531 of shape and/or abrasive area. It should be noted that the two-dimensional shape difference of the abrasive segments may be based on the size and/or contour of the segments. It should be understood that reference herein to the length of the abrasive section refers to the diameter of the abrasive section having a circular shape. According to another embodiment, the abrasive segments may have a two-dimensional shape selected from the group consisting of a polygon, an irregular polygon, an ellipse, and a circle, with a self-centered region. The domain extends one or more of the arms, a shape having at least one bend, and combinations thereof.

更具體言之，圖6A-6L包括可用於本文實施方案之磨料製品中之各種磨料區段的二維圖示。應注意到，圖6A-6L中示出之磨料區段並非詳盡的，且可利用磨料區段之其他形狀。應理解，其可在適當時用於具有各種取向及/或尺寸之各種環形區域中以促進磨料製品之所需效能。 More specifically, Figures 6A-6L include two-dimensional illustrations of various abrasive segments that can be used in the abrasive articles of the embodiments herein. It should be noted that the abrasive segments illustrated in Figures 6A-6L are not exhaustive and other shapes of the abrasive segments may be utilized. It should be understood that it can be used in a variety of annular regions of various orientations and/or sizes as appropriate to promote the desired performance of the abrasive article.

根據另一實施方案，至少一個磨料區段可跨越環形表面之內環形區域、中央環形區域及外環形區域。該至少一個磨料區段可進一步包括位於環形表面之內環形區域或外環形區域中之第一末端部分。該至少一個磨料區段可進一步包括位於環形表面之中央環形區域中之中央部分。該至少一個磨料區段之第一末端部分可能不同於該至少一個磨料區段之中央部分。此外，該第一末端部分可具有縱軸且該中央部分可具有縱軸。 According to another embodiment, the at least one abrasive segment can span the inner annular region, the central annular region, and the outer annular region. The at least one abrasive segment can further include a first end portion located in the annular region or the outer annular region within the annular surface. The at least one abrasive segment can further include a central portion in the central annular region of the annular surface. The first end portion of the at least one abrasive segment may be different from the central portion of the at least one abrasive segment. Furthermore, the first end portion may have a longitudinal axis and the central portion may have a longitudinal axis.

根據某些實施方案，第一末端部分之縱軸可相對於中央部分之縱軸以特定角度定向。舉例而言，第一末端部分之縱軸與中央部分之縱軸之間的角可能小於約180度，諸如小於約170度、小於約160度、小於約150度、小於約140度、小於約130度、小於約120度、小於約110度、小於約100度、小於約90度、小於約85度、小於約80度、小於約75度、小於約70度、小於約65度、小於約60度、小於約55度、小於約50度、小於約45度、小於約40度、小於約35度或甚至小於約30度。根據其他實施方案，第一末端部分 之縱軸與中央部分之縱軸之間的角可為至少約10度，諸如至少約15度、至少約20度、至少約25度、至少約30度、至少約35度、至少約40度、至少約45度、至少約50度、至少約55度或甚至至少約60度。應理解，第一末端部分之縱軸與中央部分之縱軸之間的角可為任何上述最小值或最大值之間的任何值。此外應理解，第一末端部分之縱軸與中央部分之縱軸之間的角可在任何上述最小值及最大值之間的範圍內。 According to certain embodiments, the longitudinal axis of the first end portion can be oriented at a particular angle relative to the longitudinal axis of the central portion. For example, the angle between the longitudinal axis of the first end portion and the longitudinal axis of the central portion may be less than about 180 degrees, such as less than about 170 degrees, less than about 160 degrees, less than about 150 degrees, less than about 140 degrees, less than about 130 degrees, less than about 120 degrees, less than about 110 degrees, less than about 100 degrees, less than about 90 degrees, less than about 85 degrees, less than about 80 degrees, less than about 75 degrees, less than about 70 degrees, less than about 65 degrees, less than about 60 degrees, less than about 55 degrees, less than about 50 degrees, less than about 45 degrees, less than about 40 degrees, less than about 35 degrees, or even less than about 30 degrees. According to other embodiments, the first end portion The angle between the longitudinal axis and the longitudinal axis of the central portion can be at least about 10 degrees, such as at least about 15 degrees, at least about 20 degrees, at least about 25 degrees, at least about 30 degrees, at least about 35 degrees, at least about 40 degrees. At least about 45 degrees, at least about 50 degrees, at least about 55 degrees, or even at least about 60 degrees. It should be understood that the angle between the longitudinal axis of the first end portion and the longitudinal axis of the central portion can be any value between any of the above minimum or maximum values. Furthermore, it should be understood that the angle between the longitudinal axis of the first end portion and the longitudinal axis of the central portion may be in a range between any of the above minimum and maximum values.

根據另一實施方案，至少一個磨料區段可進一步包括位於環形表面之內環形區域或外環形區域中之第二末端部分。至少一個磨料區段之第二末端部分可能不同於至少一個磨料區段之第一末端部分及至少一個磨料區段之中央部分。此外，第二末端部分可具有縱軸。 According to another embodiment, the at least one abrasive segment may further comprise a second end portion located in the annular region or the outer annular region within the annular surface. The second end portion of the at least one abrasive segment may be different from the first end portion of the at least one abrasive segment and the central portion of the at least one abrasive segment. Additionally, the second end portion can have a longitudinal axis.

根據某些實施方案，第二末端部分之縱軸可相對於中央部分之縱軸以特定角度定向。舉例而言，第二末端部分之縱軸與中央部分之縱軸之間的角可能小於約180度，諸如小於約170度、小於約160度、小於約150度、小於約140度、小於約130度、小於約120度、小於約110度、小於約100度、小於約90度、小於約85度、小於約80度、小於約75度、小於約70度、小於約65度、小於約60度、小於約55度、小於約50度、小於約45度、小於約40度、小於約35度或甚至小於約30度。根據其他實施方案，第二末端部分之縱軸與中央部分之縱軸之間的角可為至少約10度，諸如至少約15度、至少約20度、至少約25度、至少約30度、至 少約35度、至少約40度、至少約45度、至少約50度、至少約55度或甚至至少約60度。應理解，第二末端部分之縱軸與中央部分之縱軸之間的角可為任何上述最小值或最大值之間的任何值。此外應理解，第二末端部分之縱軸與中央部分之縱軸之間的角可在任何上述最小值及最大值之間的範圍內。 According to certain embodiments, the longitudinal axis of the second end portion can be oriented at a particular angle relative to the longitudinal axis of the central portion. For example, the angle between the longitudinal axis of the second end portion and the longitudinal axis of the central portion may be less than about 180 degrees, such as less than about 170 degrees, less than about 160 degrees, less than about 150 degrees, less than about 140 degrees, less than about 130 degrees, less than about 120 degrees, less than about 110 degrees, less than about 100 degrees, less than about 90 degrees, less than about 85 degrees, less than about 80 degrees, less than about 75 degrees, less than about 70 degrees, less than about 65 degrees, less than about 60 degrees, less than about 55 degrees, less than about 50 degrees, less than about 45 degrees, less than about 40 degrees, less than about 35 degrees, or even less than about 30 degrees. According to other embodiments, the angle between the longitudinal axis of the second end portion and the longitudinal axis of the central portion can be at least about 10 degrees, such as at least about 15 degrees, at least about 20 degrees, at least about 25 degrees, at least about 30 degrees, to Less than about 35 degrees, at least about 40 degrees, at least about 45 degrees, at least about 50 degrees, at least about 55 degrees, or even at least about 60 degrees. It should be understood that the angle between the longitudinal axis of the second end portion and the longitudinal axis of the central portion can be any value between any of the above minimum or maximum values. Furthermore, it should be understood that the angle between the longitudinal axis of the second end portion and the longitudinal axis of the central portion may be in a range between any of the above minimum and maximum values.

根據其他實施方案，至少一個磨料區段之第一末端部分之縱軸可能平行於至少一個磨料區段之第二末端部分之縱軸。根據其他實施方案，第一末端部分之縱軸可能相對於第二末端部分之縱軸以特定角度定向。應理解，由於第一末端部分與第二末端部分可能未必連接，因此確定第一末端部分之縱軸與第二末端部分之縱軸之間的特定角可能需要延伸兩個軸直至它們相交以確定其之間的角。舉例而言，第一末端部分之縱軸與第二末端部分之縱軸之間的角可能小於約90度，諸如小於約85度、小於約80度、小於約75度、小於約70度、小於約65度、小於約60度、小於約55度、小於約50度、小於約45度、小於約40度、小於約35度或甚至小於約30度。根據其他實施方案，第一末端部分之縱軸與第二末端部分之縱軸之間的角可為至少約5度，諸如至少約10度、至少約15度、至少約20度、至少約25度、至少約30度、至少約35度、至少約40度、至少約45度、至少約50度、至少約55度或甚至至少約60度。應理解，第一末端部分之縱軸與中央部分之縱軸之間的角可為任何上述最小值或最大值之間的任何值。此外應理解，第二末端部分之縱軸與 中央部分之縱軸之間的角可在任何上述最小值與最大值之間的範圍內。 According to other embodiments, the longitudinal axis of the first end portion of the at least one abrasive segment may be parallel to the longitudinal axis of the second end portion of the at least one abrasive segment. According to other embodiments, the longitudinal axis of the first end portion may be oriented at a particular angle relative to the longitudinal axis of the second end portion. It will be appreciated that since the first end portion and the second end portion may not necessarily be joined, determining a particular angle between the longitudinal axis of the first end portion and the longitudinal axis of the second end portion may require extending the two axes until they intersect to determine The angle between them. For example, the angle between the longitudinal axis of the first end portion and the longitudinal axis of the second end portion may be less than about 90 degrees, such as less than about 85 degrees, less than about 80 degrees, less than about 75 degrees, less than about 70 degrees, Less than about 65 degrees, less than about 60 degrees, less than about 55 degrees, less than about 50 degrees, less than about 45 degrees, less than about 40 degrees, less than about 35 degrees, or even less than about 30 degrees. According to other embodiments, the angle between the longitudinal axis of the first end portion and the longitudinal axis of the second end portion can be at least about 5 degrees, such as at least about 10 degrees, at least about 15 degrees, at least about 20 degrees, at least about 25 degrees. Degree, at least about 30 degrees, at least about 35 degrees, at least about 40 degrees, at least about 45 degrees, at least about 50 degrees, at least about 55 degrees, or even at least about 60 degrees. It should be understood that the angle between the longitudinal axis of the first end portion and the longitudinal axis of the central portion can be any value between any of the above minimum or maximum values. In addition, it should be understood that the longitudinal axis of the second end portion is The angle between the longitudinal axes of the central portion may be in the range between any of the above minimum and maximum values.

根據其他實施方案，第一末端部分可具有第一磨料表面積PASA1且第二末端部分可具有第二磨料表面積(PASA2)。在至少一個實施方案中，PASA1可能大於PASA2。在另一實施方案中，磨料區段之第一及第二部分可限定至少1.1：1、諸如至少1.2：1、至少1.5：1、至少2：1、至少3：1、至少4：1、至少5：1、至少6：1、至少7：1、至少8：1、至少9：1或甚至至少10：1之磨料表面積比率(PASA1：PASA2)。此外，在至少一個非限制性實施方案中，磨料區段之第一及第二部分可限定不大於100：1、諸如不大於90：1、不大於80：1、不大於70：1、不大於60：1、不大於60：1、不大於50：1、不大於40：1、不大於30：1、不大於20：1、不大於10：1、不大於8：1、不大於6：1或甚至不大於4：1之磨料表面積比率(PASA1：PASA2)。應理解，磨料區段之第一及第二部分可限定在任何上述最小值與最大值之間之任何值的磨料表面積比率(PASA1：PASA2)。此外應理解，磨料區段之第一及第二部分可限定在任何上述最小比率與最大比率之間之任何值的磨料表面積比率(PASA1：PASA2)。 According to other embodiments, the first end portion may have a first abrasive surface area PASA1 and the second end portion may have a second abrasive surface area (PASA2). In at least one embodiment, PASA1 may be greater than PASA2. In another embodiment, the first and second portions of the abrasive segment can define at least 1.1:1, such as at least 1.2:1, at least 1.5:1, at least 2:1, at least 3:1, at least 4:1 An abrasive surface area ratio (PASA1: PASA2) of at least 5:1, at least 6:1, at least 7:1, at least 8:1, at least 9:1, or even at least 10:1. Moreover, in at least one non-limiting embodiment, the first and second portions of the abrasive segment can define no greater than 100:1, such as no greater than 90:1, no greater than 80:1, no greater than 70:1, no More than 60:1, no more than 60:1, no more than 50:1, no more than 40:1, no more than 30:1, no more than 20:1, no more than 10:1, no more than 8:1, no more than 6 :1 or even an abrasive surface area ratio of not more than 4:1 (PASA1: PASA2). It should be understood that the first and second portions of the abrasive section can define an abrasive surface area ratio (PASA1: PASA2) of any value between any of the above minimum and maximum values. It is further understood that the first and second portions of the abrasive section can define an abrasive surface area ratio (PASA1: PASA2) of any value between any of the above minimum and maximum ratios.

根據另一實施方案，磨料區段之第一末端部分相對於中央部分之長度可具有不同長度。利用具有不同形狀、尺寸及輪廓之末端部分及中央部分之磨料區段可促進改良效能。特定言之，磨料區段之中央部分相對於磨料區段之第一末端部分可具有更大長度。在一個實施方案中，第一末端部 分可限定第一末端部分長度(PL1)。中央部分可限定中央部分長度(PLC)。在至少一個實施方案中，該第一末端部分長度可能不同於該中央部分長度。此外，在某些情況下，該中央部分長度可能大於該第一末端部分長度。在一個特定實施方案中，該中央部分長度及該第一末端部分長度可限定至少1.1：1、諸如至少1.2：1、至少1.5：1、至少2：1、至少3：1、至少4：1、至少5：1、至少6：1、至少7：1、至少8：1、至少9：1、至少10：1之比率(PLC：PL1)。此外，在至少一個非限制性實施方案中，該中央部分長度與該第一末端部分長度之比率(PLC：PL1)可能不大於100：1，諸如不大於90：1、不大於80：1、不大於70：1、不大於60：1、不大於50：1、不大於40：1、不大於30：1、不大於20：1、不大於10：1、不大於8：1、不大於6：1或甚至不大於4：1。應理解，該中央部分長度與該第一末端部分長度之比率可在包括任何上述最小比率及最大比率之範圍內。 According to another embodiment, the first end portions of the abrasive segments can have different lengths relative to the length of the central portion. Improved performance can be facilitated by the use of abrasive segments having end portions and central portions of different shapes, sizes and contours. In particular, the central portion of the abrasive section can have a greater length relative to the first end portion of the abrasive section. In one embodiment, the first end portion The minute can define the length of the first end portion (PL1). The central portion can define the central portion length (PLC). In at least one embodiment, the first end portion length may be different than the central portion length. Further, in some cases, the central portion may be longer than the first end portion. In a particular embodiment, the central portion length and the first end portion length can define at least 1.1:1, such as at least 1.2:1, at least 1.5:1, at least 2:1, at least 3:1, at least 4:1 , at least 5:1, at least 6:1, at least 7:1, at least 8:1, at least 9:1, at least 10:1 ratio (PLC: PL1). Moreover, in at least one non-limiting embodiment, the ratio of the length of the central portion to the length of the first end portion (PLC: PL1) may be no greater than 100:1, such as no greater than 90:1, no greater than 80:1 Not more than 70:1, no more than 60:1, no more than 50:1, no more than 40:1, no more than 30:1, no more than 20:1, no more than 10:1, no more than 8:1, no more than 6:1 or even no more than 4:1. It should be understood that the ratio of the length of the central portion to the length of the first end portion may be within a range including any of the above minimum ratios and maximum ratios.

根據另一實施方案，磨料區段之第二末端部分相對於中央部分之長度可具有不同長度。特定言之，磨料區段之中央部分相對於磨料區段之第二末端部分可具有更大長度。在一個實施方案中，該等第二末端部分可限定第一末端部分長度(PL2)。該中央部分可限定中央部分長度(PLC)。在至少一個實施方案中，該第二末端部分長度可能不同於該中央部分長度。此外，在某些情況下，該中央部分長度可能大於該第二末端部分長度。在一個特定實施方案中，該中央部分長度及該第二末端部分長度可限定至少1.1：1、諸如至少 1.2：1、至少1.5：1、至少2：1、至少3：1、至少4：1、至少5：1、至少6：1、至少7：1、至少8：1、至少9：1、至少10：1之比率(PLC：PL2)。此外，在至少一個非限制性實施方案中，該中央部分長度與該第二末端部分長度之比率(PLC：PL2)可能不大於100：1，諸如不大於90：1、不大於80：1、不大於70：1、不大於60：1、不大於50：1、不大於40：1、不大於30：1、不大於20：1、不大於10：1、不大於8：1、不大於6：1或甚至不大於4：1。應理解，該中央部分長度與該第二末端部分長度之比率可在包括任何上述最小比率與最大比率之範圍內。 According to another embodiment, the second end portions of the abrasive segments can have different lengths relative to the length of the central portion. In particular, the central portion of the abrasive section can have a greater length relative to the second end portion of the abrasive section. In one embodiment, the second end portions can define a first end portion length (PL2). The central portion can define a central portion length (PLC). In at least one embodiment, the second end portion length may be different than the central portion length. Further, in some cases, the central portion may be longer than the second end portion. In a particular embodiment, the central portion length and the second end portion length can define at least 1.1:1, such as at least 1.2:1, at least 1.5:1, at least 2:1, at least 3:1, at least 4:1, at least 5:1, at least 6:1, at least 7:1, at least 8:1, at least 9:1, at least Ratio of 10:1 (PLC: PL2). Moreover, in at least one non-limiting embodiment, the ratio of the length of the central portion to the length of the second end portion (PLC: PL2) may be no greater than 100:1, such as no greater than 90:1, no greater than 80:1 Not more than 70:1, no more than 60:1, no more than 50:1, no more than 40:1, no more than 30:1, no more than 20:1, no more than 10:1, no more than 8:1, no more than 6:1 or even no more than 4:1. It should be understood that the ratio of the length of the central portion to the length of the second end portion can be within a range including any of the minimum and maximum ratios described above.

根據另一實施方案，磨料區段之第一末端部分相對於第二末端部分之長度可具有不同長度。利用具有不同形狀、尺寸及輪廓之末端部分之磨料區段可促進改良效能。特定言之，磨料區段之第一末端部分相對於磨料區段之第二末端部分可具有更大長度。在一個實施方案中，該等第一末端部分可限定第一末端部分長度(PL1)。該等第二末端部分可限定第二末端部分長度(PL2)。在至少一個實施方案中，該第一末端部分長度可能不同於該第二末端部分長度。此外，在某些情況下，該第一末端部分長度可能大於該第二末端部分長度。在一個特定實施方案中，該第一末端部分長度及該第二末端部分長度可限定至少1.1：1、諸如至少1.2：1、至少1.5：1、至少2：1、至少3：1、至少4：1、至少5：1、至少6：1、至少7：1、至少8：1、至少9：1、至少10：1之比率(PL1：PL2)。此外，在至少一個非限制性實施方案中，該第一末端部分長度與該第二末端部分長度之比率(PL1：PL2)可能不大於100：1，諸如不大於 90：1、不大於80：1、不大於70：1、不大於60：1、不大於50：1、不大於40：1、不大於30：1、不大於20：1、不大於10：1、不大於8：1、不大於6：1或甚至不大於4：1。應理解，該第一末端部分長度與該第二末端部分長度之比率可在包括任何上述最小比率及最大比率之範圍內。 According to another embodiment, the first end portions of the abrasive segments can have different lengths relative to the length of the second end portions. Improved performance can be facilitated by the use of abrasive segments having end portions of different shapes, sizes and contours. In particular, the first end portion of the abrasive segment can have a greater length relative to the second end portion of the abrasive segment. In one embodiment, the first end portions can define a first end portion length (PL1). The second end portions may define a second end portion length (PL2). In at least one embodiment, the first end portion length may be different than the second end portion length. Further, in some cases, the length of the first end portion may be greater than the length of the second end portion. In a particular embodiment, the first end portion length and the second end portion length can define at least 1.1:1, such as at least 1.2:1, at least 1.5:1, at least 2:1, at least 3:1, at least 4 : 1, at least 5:1, at least 6:1, at least 7:1, at least 8:1, at least 9:1, at least 10:1 ratio (PL1: PL2). Moreover, in at least one non-limiting embodiment, the ratio of the length of the first end portion to the length of the second end portion (PL1:PL2) may be no greater than 100:1, such as no greater than 90:1, no more than 80:1, no more than 70:1, no more than 60:1, no more than 50:1, no more than 40:1, no more than 30:1, no more than 20:1, no more than 10: 1. Not more than 8:1, no more than 6:1 or even no more than 4:1. It should be understood that the ratio of the length of the first end portion to the length of the second end portion may be within a range including any of the above minimum ratios and maximum ratios.

根據另一實施方案，磨料區段之中央部分可具有相對於環形表面之環形寬度之特定長度。舉例而言，至少一個磨料區段之中央部分可具有環形寬度之至少10%、諸如至少15%或至少20%或至少25%或至少30%或至少35%或至少40%或至少45%或至少50%或至少55%或至少60%或至少65%或甚至至少70%之長度。 According to another embodiment, the central portion of the abrasive segment can have a particular length relative to the annular width of the annular surface. For example, the central portion of the at least one abrasive segment can have at least 10% of the annular width, such as at least 15% or at least 20% or at least 25% or at least 30% or at least 35% or at least 40% or at least 45% or At least 50% or at least 55% or at least 60% or at least 65% or even at least 70% of the length.

根據其他實施方案，該等磨料區段之至少一個區段通常為旗形。根據其他實施方案，該等磨料區段通常為旗形。根據其他實施方案，該等磨料區段之至少一個區段通常為z形。根據另一實施方案，該等磨料區段通常為z形。 According to other embodiments, at least one section of the abrasive segments is generally flag shaped. According to other embodiments, the abrasive segments are generally flag shaped. According to other embodiments, at least one section of the abrasive segments is generally z-shaped. According to another embodiment, the abrasive segments are generally z-shaped.

圖7包括根據接觸面積測試之接觸面積相對於卡盤之旋轉角度之曲線的一般化圖示。在多晶圓研磨過程操作期間，由於卡盤之間的定向、晶圓在卡盤上之佈置及磨料製品，與晶圓接觸之磨料表面積改變。本申請案之申請人已注意到，接觸面積之顯著變化可導致晶圓破壞。如圖7A中所示，第一磨料製品701顯示如由接觸面積之峰-峰變化所限定之最大接觸面積變化711。 Figure 7 includes a generalized graphical representation of the curve of the contact area versus the angle of rotation of the chuck according to the contact area test. During operation of the multi-wafer polishing process, the surface area of the abrasive in contact with the wafer changes due to the orientation between the chucks, the placement of the wafer on the chuck, and the abrasive article. Applicants of the present application have noted that significant changes in contact area can result in wafer damage. As shown in FIG. 7A, the first abrasive article 701 exhibits a maximum contact area change 711 as defined by the peak-to-peak variation of the contact area.

接觸面積測試為使用以Python編寫之計算演算法進行之多晶圓研磨過程的標準化模擬。如圖7B中所示產生 如佈置在多晶圓研磨工業中之卡盤上之5個晶圓的標準佈置的縮放圖像(亦即，圍繞卡盤中央之中心點等距間隔之五邊形圖案)，其中白色區域鑒定晶圓且黑色區域鑒定不包括晶圓之區域。白色區域被賦予值1且黑色區域被賦予值0。如圖7C中所示，按比例產生代表磨料製品之磨料環形區域之第二圖像。磨料環形區域之邊緣居中在圖像之中心點上方，其代表如行業中多晶圓研磨操作之代表性卡盤之中心。白色區域被賦予值1且黑色區域被賦予值0。使用該程式，晶圓圍繞卡盤之中心點(亦即，圖像之中心)旋轉，其中角步長為2*pi/(N*50)，其中N代表晶圓數目，其根據標準化接觸面積測試具有值5。 The contact area test is a standardized simulation of a multi-wafer grinding process using a computational algorithm written in Python. Produced as shown in Figure 7B A scaled image of a standard arrangement of five wafers placed on a chuck in a multi-wafer grinding industry (ie, a pentagon pattern equidistantly spaced around the center of the center of the chuck), where white area identification Wafers and black areas identify areas that do not include wafers. The white area is assigned a value of 1 and the black area is assigned a value of 0. As shown in Figure 7C, a second image representative of the abrasive annulus of the abrasive article is produced proportionally. The edge of the abrasive annulus is centered above the center of the image, which represents the center of a representative chuck such as the multi-wafer grinding operation in the industry. The white area is assigned a value of 1 and the black area is assigned a value of 0. Using this program, the wafer is rotated around the center point of the chuck (ie, the center of the image) with an angular step of 2*pi/(N*50), where N represents the number of wafers based on the standardized contact area The test has a value of 5.

使用該程式，對於每個位置，藉由晶圓及磨料環形區域之圖像重疊及相乘來計算磨料環形區域與晶圓之間的總重疊面積。當圖7B及圖7C之圖像之白色區域之間不存在重疊時，相乘值為0(0×0或0×1)。當圖7B及圖7C之兩個圖像之白色區域之間存在重疊時，所得值為1。隨後藉由乘以經由晶圓圖像之至少一次完全旋轉(亦即，360度)對於每個步驟之總重疊面積來計算總磨料重疊面積。在旋轉期間圖像之間之所分析重疊差異之代表性映射提供於圖7D中。隨後將所得總磨料重疊面積乘以磨料製品之磨料表面積百分比，其為磨料環形區域內之磨料區段之總表面積百分比。 Using this program, for each location, the total overlap area between the abrasive annular region and the wafer is calculated by image overlap and multiplication of the wafer and abrasive annular regions. When there is no overlap between the white areas of the images of Figs. 7B and 7C, the multiplication value is 0 (0x0 or 0x1). When there is an overlap between the white areas of the two images of FIGS. 7B and 7C, the resulting value is 1. The total abrasive overlap area is then calculated by multiplying by at least one full rotation (i.e., 360 degrees) of the wafer image for the total overlap area of each step. A representative mapping of the analyzed overlap differences between images during rotation is provided in Figure 7D. The resulting total abrasive overlap area is then multiplied by the abrasive surface area percentage of the abrasive article as a percentage of the total surface area of the abrasive section within the abrasive annulus.

根據一個實施方案，本文實施方案之磨料製品可具有根據接觸面積測試為不大於0.150之正規化最大接觸面積變化(NMCAV)。藉由將根據接觸面積測試之最大接觸面積 變化除以磨料製品之總磨料表面積來計算正規化最大接觸面積變化。該總磨料表面積為磨料製品上之磨料區段之表面積總和。在另一實施方案中，NMCAV可能較小，諸如不大於0.149、不大於0.148、不大於0.147、不大於0.146、不大於0.145、不大於0.144、不大於0.143、不大於0.142、不大於0.141、不大於0.140、不大於0.139、不大於0.138、不大於0.137、不大於0.136、不大於0.135、不大於0.134、不大於0.133、不大於0.132、不大於0.131、不大於0.130、不大於0.129、不大於0.128、不大於0.127、不大於0.126、不大於0.125、不大於0.124、不大於0.123、不大於0.122、不大於0.121、不大於0.120、不大於0.119、不大於0.118、不大於0.117、不大於0.116、不大於0.115、不大於0.114、不大於0.113、不大於0.112、不大於0.111、不大於0.110、不大於0.109、不大於0.108、不大於0.107、不大於0.106、不大於0.105、不大於0.104、不大於0.103、不大於0.102、不大於0.101、不大於0.100、不大於0.095、不大於0.090、不大於0.085、不大於0.080、不大於0.075、不大於0.070、不大於0.065、不大於0.060、不大於0.055、不大於0.050、不大於0.045、不大於0.040、不大於0.035、不大於0.030、不大於0.025、不大於0.020、不大於0.015、不大於0.010或甚至不大於0.005。此外，在至少一個非限制性實施方案中，NMCAV可為至少0.0001，諸如至少0.0002、至少0.0004、至少0.0006、至少0.0008、至少0.001、至少0.005、至少0.01、至少0.02、至少0.04、至少0.05、至少0.06或甚至至少0.07。應理解， NMCAV可在包括任何上述最小值及最大值之範圍內。 According to one embodiment, the abrasive article of the embodiments herein can have a normalized maximum contact area change (NMCAV) of no greater than 0.150 as measured by contact area. By using the maximum contact area tested according to the contact area The change is divided by the total abrasive surface area of the abrasive article to calculate the normalized maximum contact area change. The total abrasive surface area is the sum of the surface areas of the abrasive segments on the abrasive article. In another embodiment, the NMCAV may be small, such as no more than 0.149, no more than 0.148, no more than 0.147, no more than 0.146, no more than 0.145, no more than 0.144, no more than 0.143, no more than 0.142, no more than 0.141, no More than 0.140, no more than 0.139, no more than 0.138, no more than 0.137, no more than 0.136, no more than 0.135, no more than 0.134, no more than 0.133, no more than 0.132, no more than 0.131, no more than 0.130, no more than 0.129, no more than 0.128 No more than 0.127, no more than 0.126, no more than 0.125, no more than 0.124, no more than 0.123, no more than 0.122, no more than 0.121, no more than 0.120, no more than 0.119, no more than 0.118, no more than 0.117, no more than 0.116, no More than 0.115, no more than 0.114, no more than 0.113, no more than 0.112, no more than 0.111, no more than 0.110, no more than 0.109, no more than 0.108, no more than 0.107, no more than 0.106, no more than 0.105, no more than 0.104, no more than 0.103 , not more than 0.102, not more than 0.101, not more than 0.100, not more than 0.095, not more than 0.090, not more than 0.085, not more than 0.080, not more than 0.075, not more than 0.0 70, not more than 0.065, not more than 0.060, not more than 0.055, not more than 0.050, not more than 0.045, not more than 0.040, not more than 0.035, not more than 0.030, not more than 0.025, not more than 0.020, not more than 0.015, not more than 0.010 or Not even greater than 0.005. Further, in at least one non-limiting embodiment, the NMCAV can be at least 0.0001, such as at least 0.0002, at least 0.0004, at least 0.0006, at least 0.0008, at least 0.001, at least 0.005, at least 0.01, at least 0.02, at least 0.04, at least 0.05, at least 0.06 or even at least 0.07. It should be understood that The NMCAV can be within the range including any of the above minimum and maximum values.

圖8包括根據一實施方案之磨料製品之圖像。磨料製品800可包括主體801，該主體801包括基材802及耦接至基材802之環形表面806之磨料區段803。磨料區段803可包含於袋815內且可黏結至袋815內之基材802。該磨料製品可包括在磨料環形區域811內之多個環形區域中之各種類型的磨料區段，該磨料環形區域811由環形表面806上之磨料區段803之最內及最外點限定。磨料製品800可包括包含第一類型之磨料區段831之內環形區域，該等磨料區段相比於彼此各自具有實質上相同之矩形二維形狀。此外，該磨料製品包括實質上包含於中央環形區域內之第二類型之磨料區段841。第二類型之磨料區段841之各磨料區段可具有通常為矩形之二維形狀，但相比於第一類型之磨料區段831之磨料區段更長。此外，磨料製品800可包括包含第三類型之磨料區段821之外環形區域，該等磨料區段相比於彼此各自可具有實質上相同之矩形二維形狀。第一及第三類型之磨料區段831及821之磨料區段可具有實質上相同之尺寸及形狀，且相比於第二類型之磨料區段831在長度及磨料面積上顯著更小。該磨料製品具有小於24%之磨料表面積百分比及根據接觸面積測試為約0.098之NMCAV。 Figure 8 includes an image of an abrasive article in accordance with an embodiment. The abrasive article 800 can include a body 801 that includes a substrate 802 and an abrasive section 803 that is coupled to the annular surface 806 of the substrate 802. Abrasive section 803 can be included in pocket 815 and can be bonded to substrate 802 within pocket 815. The abrasive article can include various types of abrasive segments in a plurality of annular regions within the abrasive annulus region 811 defined by the innermost and outermost points of the abrasive segments 803 on the annular surface 806. The abrasive article 800 can include an inner annular region comprising a first type of abrasive segments 831 that each have substantially the same rectangular two-dimensional shape as compared to each other. Additionally, the abrasive article includes a second type of abrasive segment 841 that is substantially contained within the central annular region. Each of the abrasive segments of the second type of abrasive segments 841 can have a generally rectangular two-dimensional shape, but is longer than the abrasive segments of the first type of abrasive segments 831. Additionally, the abrasive article 800 can include an annular region that includes a third type of abrasive segment 821, each of which can have substantially the same rectangular two-dimensional shape as compared to each other. The abrasive segments of the first and third types of abrasive segments 831 and 821 can have substantially the same size and shape and are significantly smaller in length and abrasive area than the second type of abrasive segments 831. The abrasive article has a percentage of abrasive surface area of less than 24% and an NMCAV of about 0.098 as measured by contact area.

圖9包括根據一實施方案之磨料製品之圖像。磨料製品900可包括主體901，該主體901包括基材902及耦接至基材902之環形表面906之磨料區段903。磨料區段903可包含於袋915中且可黏結至袋915內之基材902。磨料製品 900可包括在磨料環形區域911內之多個環形區域中之各種類型的磨料區段，該磨料環形區域911由環形表面906上之磨料區段903之最內及最外點限定。磨料製品900可包括包含第一類型之磨料區段931之內環形區域，該等磨料區段相比於彼此各自具有實質上相同之矩形二維形狀。此外，該磨料製品包括實質上包含於外環形區域內之第二類型之磨料區段921。第二類型之磨料區段921之各磨料區段可具有通常為矩形之二維形狀，且特定言之相比於彼此可具有實質上相同之矩形二維形狀。第一及第二類型之磨料區段931及921之磨料區段可具有實質上相同之尺寸及形狀，且藉由實質上不含任何磨料區段之中央環形區域彼此間隔開。該磨料製品具有小於24%之磨料表面積百分比及根據接觸面積測試為約0.098之NMCAV。 Figure 9 includes an image of an abrasive article in accordance with an embodiment. The abrasive article 900 can include a body 901 that includes a substrate 902 and an abrasive section 903 that is coupled to the annular surface 906 of the substrate 902. Abrasive section 903 can be included in pocket 915 and can be bonded to substrate 902 within pocket 915. Abrasive products 900 may include various types of abrasive segments in a plurality of annular regions within the abrasive annulus region 911 that are defined by the innermost and outermost points of the abrasive segments 903 on the annular surface 906. The abrasive article 900 can include an inner annular region comprising a first type of abrasive segments 931 that each have substantially the same rectangular two-dimensional shape as compared to each other. Additionally, the abrasive article includes a second type of abrasive segment 921 that is substantially contained within the outer annular region. Each of the abrasive segments of the second type of abrasive segments 921 can have a generally rectangular two-dimensional shape, and in particular can have substantially the same rectangular two-dimensional shape as compared to each other. The abrasive segments of the first and second types of abrasive segments 931 and 921 can have substantially the same size and shape and are spaced apart from one another by a central annular region that is substantially free of any abrasive segments. The abrasive article has a percentage of abrasive surface area of less than 24% and an NMCAV of about 0.098 as measured by contact area.

圖10包括根據一實施方案之磨料製品之圖像。磨料製品1000可包括主體1001，該主體1001包括基材1002及耦接至基材1002之環形表面1006之磨料區段1003。磨料區段1003可包含於袋1015中且可黏結至袋1015內之基材1002。磨料製品1000可包括多個旗形磨料區段1003，其跨越磨料環形區域1011內之多個環形區域。磨料製品1000可包括內環形區域、中央環形區域及外環形區域。此外，磨料區段1003包括實質上包含於外環形區域內之第一末端部分1021及實質上包含於中央環形區域內之中央部分1031。第一末端部分1021各自具有縱軸且中央部分1031各自具有縱軸。第一末端部分1021之縱軸與中央部分1031之縱軸之間的角 1041小於180度。 Figure 10 includes an image of an abrasive article in accordance with an embodiment. The abrasive article 1000 can include a body 1001 that includes a substrate 1002 and an abrasive segment 1003 that is coupled to the annular surface 1006 of the substrate 1002. Abrasive section 1003 can be included in pouch 1015 and can be bonded to substrate 1002 within pouch 1015. The abrasive article 1000 can include a plurality of flag shaped abrasive segments 1003 that span a plurality of annular regions within the abrasive annulus region 1011. The abrasive article 1000 can include an inner annular region, a central annular region, and an outer annular region. Additionally, the abrasive section 1003 includes a first end portion 1021 substantially contained within the outer annular region and a central portion 1031 substantially contained within the central annular region. The first end portions 1021 each have a longitudinal axis and the central portion 1031 each have a longitudinal axis. The angle between the longitudinal axis of the first end portion 1021 and the longitudinal axis of the central portion 1031 1041 is less than 180 degrees.

圖11包括根據一實施方案之磨料製品之圖像。磨料製品1100可包括主體1101，該主體1101包括基材1102及耦接至基材1102之環形表面1106之磨料區段1103。磨料區段1103可包含於袋1115中且可黏結至袋1115內之基材1102。磨料製品1100可包括多個z形磨料區段1103，其跨越磨料環形區域1111內之多個環形區域。磨料製品1100可包括內環形區域、中央環形區域及外環形區域。此外，磨料區段1103包括實質上包含於外環形區域內之第一末端部分1121、實質上包含於中央環形區域內之中央部分1131及實質上包含於內環形區域內之第二末端部分1141。第一末端部分1121各自具有縱軸，中央部分1131各自具有縱軸且第二末端部分1141各自具有縱軸。第一末端部分1121之縱軸與中央部分1131之縱軸之間的角1151小於180度。第二末端部分1141之縱軸與中央部分1131之縱軸之間的角1161小於180度。 Figure 11 includes an image of an abrasive article in accordance with an embodiment. The abrasive article 1100 can include a body 1101 that includes a substrate 1102 and an abrasive section 1103 that is coupled to the annular surface 1106 of the substrate 1102. Abrasive section 1103 can be included in bag 1115 and can be bonded to substrate 1102 within bag 1115. The abrasive article 1100 can include a plurality of z-shaped abrasive segments 1103 that span a plurality of annular regions within the abrasive annulus region 1111. The abrasive article 1100 can include an inner annular region, a central annular region, and an outer annular region. In addition, the abrasive section 1103 includes a first end portion 1121 substantially contained within the outer annular region, a central portion 1131 substantially contained within the central annular region, and a second end portion 1141 substantially contained within the inner annular region. The first end portions 1121 each have a longitudinal axis, the central portions 1131 each have a longitudinal axis and the second end portions 1141 each have a longitudinal axis. The angle 1151 between the longitudinal axis of the first end portion 1121 and the longitudinal axis of the central portion 1131 is less than 180 degrees. The angle 1161 between the longitudinal axis of the second end portion 1141 and the longitudinal axis of the central portion 1131 is less than 180 degrees.

本文實施方案之磨料製品代表與目前技術狀態之偏離且可特別適合進行多晶圓研磨操作。在比較本發明實施方案之磨料製品與習知磨料製品時，已注意到本文實施方案之磨料製品促進改良之多晶圓研磨操作，其中對晶圓之破壞減少且生產率增加。 Abrasive articles of the embodiments herein deviate from current state of the art and may be particularly suitable for multi-wafer grinding operations. In comparing the abrasive articles of the embodiments of the present invention with conventional abrasive articles, it has been noted that the abrasive articles of the embodiments herein facilitate improved multi-wafer polishing operations in which damage to the wafer is reduced and productivity is increased.

許多不同態樣及實施方案為可能的。本文描述彼等態樣及實施方案中之一些。在閱讀本說明書後，熟習此項技術者應理解，彼等態樣及實施方案僅具說明性且不限制本 發明之範疇。實施方案可為根據如下文列出之任何一或多個實施方案。 Many different aspects and implementations are possible. This document describes some of their aspects and implementations. After reading this specification, those skilled in the art should understand that their aspects and implementations are illustrative only and are not limiting. The scope of the invention. Embodiments can be in accordance with any one or more of the embodiments listed below.

實施方案1. 一種磨料製品，其包含：具有環形表面之主體，該主體包括耦接至該環形表面之磨料區段，其中該等磨料區段限定磨料環形區域及相對於該磨料環形區域之總表面積為不大於24%之磨料表面積百分比。 Embodiment 1. An abrasive article comprising: a body having an annular surface, the body comprising an abrasive segment coupled to the annular surface, wherein the abrasive segments define an abrasive annular region and a total relative to the abrasive annular region The surface area is no more than 24% of the abrasive surface area percentage.

實施方案2. 一種磨料製品，其包含：具有環形表面之主體，該主體包括耦接至該環形表面之磨料區段，其中該等磨料區段限定具有內環形區域、外環形區域及安置於該內環形區域與該外環形區域之間之中央環形區域的磨料環形區域，並且其中該內環形區域或外環形區域中之至少一個磨料區段相比於該中央環形區域中之磨料區段具有不同磨料表面積。 Embodiment 2. An abrasive article comprising: a body having an annular surface, the body comprising an abrasive segment coupled to the annular surface, wherein the abrasive segments define an inner annular region, an outer annular region, and disposed thereon a abrasive annular region of the central annular region between the inner annular region and the outer annular region, and wherein at least one of the inner annular region or the outer annular region is different from the abrasive segment of the central annular region Abrasive surface area.

實施方案3. 一種磨料製品，其包含：具有環形表面之主體，該主體包括：具有第一磨料表面積(ASA1)之耦接至該環形表面之第一磨料區段；具有第二磨料表面積(ASA2)之耦接至該環形表面之第二磨料區段；並且其中ASA1>ASA2。 Embodiment 3. An abrasive article comprising: a body having an annular surface, the body comprising: a first abrasive section coupled to the annular surface having a first abrasive surface area (ASA1); having a second abrasive surface area (ASA2 a second abrasive section coupled to the annular surface; and wherein ASA1 > ASA2.

實施方案4. 一種磨料製品，其包含：具有環形表面之主體，該主體包括耦接至該環形表面之磨料區段，其中該等磨料區段限定具有內環形區域、外環形區域及安置於該內環形區域與該外環形區域之間之中央環形區域的磨料環形區域，並且其中該內環形區域包含限定第一分佈之第一組磨料區段且該中央區域包含限定第二分佈之第二組磨料區 段，其中該第一分佈不同於該第二分佈。 Embodiment 4. An abrasive article comprising: a body having an annular surface, the body comprising an abrasive segment coupled to the annular surface, wherein the abrasive segments define an inner annular region, an outer annular region, and disposed thereon An abrasive annular region of the central annular region between the inner annular region and the outer annular region, and wherein the inner annular region includes a first set of abrasive segments defining a first distribution and the central region includes a second set defining a second distribution Abrasive zone a segment, wherein the first distribution is different from the second distribution.

實施方案5. 一種磨料製品，其包含：具有環形表面之主體，該主體包括耦接至該環形表面之磨料區段，其中該等磨料區段限定具有環形寬度之磨料環形區域，該環形寬度定義為內環形圓周與外環形圓周之間沿著徑向軸之距離，並且其中至少一個磨料區段在該環形寬度之不大於95%上延伸。 Embodiment 5. An abrasive article comprising: a body having an annular surface, the body comprising an abrasive segment coupled to the annular surface, wherein the abrasive segments define an abrasive annular region having an annular width, the annular width defining The distance between the inner annular circumference and the outer annular circumference along the radial axis, and wherein at least one of the abrasive segments extends over no more than 95% of the annular width.

實施方案6. 一種磨料製品，其包含：具有環形表面之主體，該主體包括包含含於黏結材料內之磨料粒子之磨料區段，該等磨料區段耦接至該主體之該環形表面且相對於彼此佈置以限定根據接觸面積測試為不大於0.150之正規化最大接觸面積變化(NMCAV)。 Embodiment 6. An abrasive article comprising: a body having an annular surface, the body comprising an abrasive segment comprising abrasive particles contained in a bonding material, the abrasive segments coupled to the annular surface of the body and opposite The ones are arranged to each other to define a normalized maximum contact area change (NMCAV) of no more than 0.150 according to the contact area test.

實施方案7. 如實施方案1、2、3、4、5及6中之任一項之磨料製品，其中該等磨料區段具有選自由多邊形、不規則多邊形、橢圓形、圓形組成之群之二維形狀、具有自中央區域延伸之一或多個臂之主體、具有至少一個彎曲部之形狀及其組合。 The abrasive article of any one of embodiments 1, 2, 3, 4, 5, and 6, wherein the abrasive segments have a group selected from the group consisting of a polygon, an irregular polygon, an ellipse, and a circle. The two-dimensional shape, the body having one or more arms extending from the central region, the shape having at least one bend, and combinations thereof.

實施方案8. 如實施方案1、2、3、4、5及6中之任一項之磨料製品，其中該等磨料區段包括包含第一二維形狀之第一類型之磨料區段及具有第二二維形狀之第二類型之磨料區段，其中該第一二維形狀在尺寸、輪廓及其組合中之至少一者中不同於該第二二維形狀。 The abrasive article of any one of embodiments 1, 2, 3, 4, 5, and 6, wherein the abrasive segments comprise a first type of abrasive segment comprising a first two-dimensional shape and having A second type of abrasive segment of the second two-dimensional shape, wherein the first two-dimensional shape is different from the second two-dimensional shape in at least one of a size, a profile, and a combination thereof.

實施方案9. 如實施方案1、2、3、4、5及6中之任一項之磨料製品，其中該等磨料區段包括具有第一長度 (L1)之第一磨料區段及具有第二長度(L2)之第二磨料區段，並且其中L1不同於L2。 The abrasive article of any of embodiments 1, 2, 3, 4, 5, and 6, wherein the abrasive segments comprise a first length a first abrasive segment of (L1) and a second abrasive segment having a second length (L2), and wherein L1 is different from L2.

實施方案10. 如實施方案9之磨料製品，其中L1>L2。 Embodiment 10. The abrasive article of Embodiment 9, wherein L1 > L2.

實施方案11. 如實施方案9之磨料製品，其中該等第一及第二磨料區段限定至少1.1：1或至少1.2：1或至少1.5：1或至少2：1或至少3：1或至少4：1或至少5：1或至少6：1或至少7：1或至少8：1或至少9：1或至少10：1之比率(L1：L2)。 The abrasive article of embodiment 9, wherein the first and second abrasive segments define at least 1.1:1 or at least 1.2:1 or at least 1.5:1 or at least 2:1 or at least 3:1 or at least 4:1 or a ratio of at least 5:1 or at least 6:1 or at least 7:1 or at least 8:1 or at least 9:1 or at least 10:1 (L1: L2).

實施方案12. 如實施方案9之磨料製品，其中該等第一及第二磨料區段限定不大於100：1或不大於90：1或不大於80：1或不大於70：1或不大於60：1或不大於50：1或不大於40：1或不大於30：1或不大於20：1或不大於10：1或不大於8：1或不大於6：1或不大於4：1之比率(L1：L2)。 The abrasive article of embodiment 9, wherein the first and second abrasive segments define no greater than 100:1 or no greater than 90:1 or no greater than 80:1 or no greater than 70:1 or no greater than 60:1 or no more than 50:1 or no more than 40:1 or no more than 30:1 or no more than 20:1 or no more than 10:1 or no more than 8:1 or no more than 6:1 or no more than 4: Ratio of 1 (L1: L2).

實施方案13. 如實施方案1、2、3、4、5及6中之任一項之磨料製品，其中該等磨料區段包括包含具有平均第一長度(aL1)之第一類型之磨料區段的第一部分及包含具有平均第二長度(aL2)之第二類型之磨料區段的第二部分，其中該平均第一長度不同於該平均第二長度。 The abrasive article of any of embodiments 1, 2, 3, 4, 5, and 6, wherein the abrasive segments comprise a first type of abrasive region having an average first length (aL1) a first portion of the segment and a second portion comprising a second type of abrasive segment having an average second length (aL2), wherein the average first length is different from the average second length.

實施方案14. 如實施方案13之磨料製品，其中aL1>aL2。 Embodiment 14. The abrasive article of Embodiment 13, wherein aL1 > aL2.

實施方案15. 如實施方案13之磨料製品，其中該平均第一長度及平均第二長度限定至少1.1：1或至少1.2：1或至少1.5：1或至少2：1或至少3：1或至少4：1或至少5：1或至少6：1或至少7：1或至少8：1或至少9：1或至少10：1之比率 (aL1：aL2)。 The abrasive article of embodiment 13, wherein the average first length and the average second length define at least 1.1:1 or at least 1.2:1 or at least 1.5:1 or at least 2:1 or at least 3:1 or at least 4:1 or at least 5:1 or at least 6:1 or at least 7:1 or at least 8:1 or at least 9:1 or at least 10:1 ratio (aL1: aL2).

實施方案16. 如實施方案13之磨料製品，其中該平均第一長度及平均第二長度限定不大於100：1或不大於90：1或不大於80：1或不大於70：1或不大於60：1或不大於50：1或不大於40：1或不大於30：1或不大於20：1或不大於10：1或不大於8：1或不大於6：1或不大於4：1之比率(aL1：aL2)。 The abrasive article of embodiment 13, wherein the average first length and the average second length define no more than 100:1 or no more than 90:1 or no more than 80:1 or no more than 70:1 or no greater than 60:1 or no more than 50:1 or no more than 40:1 or no more than 30:1 or no more than 20:1 or no more than 10:1 or no more than 8:1 or no more than 6:1 or no more than 4: Ratio of 1 (aL1: aL2).

實施方案17. 如實施方案13之磨料製品，其中該磨料環形區域包括內環形區域、外環形區域及安置於該內環形區域與該外環形區域之間的中央環形區域，並且其中該內環形區域或外環形區域包括相比於該等第一類型之磨料區段之含量為更大含量之該等第二類型之磨料區段。 The abrasive article of embodiment 13, wherein the abrasive annular region comprises an inner annular region, an outer annular region, and a central annular region disposed between the inner annular region and the outer annular region, and wherein the inner annular region The outer annular region includes the second type of abrasive segments having a greater amount than the first type of abrasive segments.

實施方案18. 如實施方案13之磨料製品，其中該磨料環形區域包括內環形區域、外環形區域及安置於該內環形區域與該外環形區域之間的中央環形區域，並且其中該中央環形區域包括相比於該等第二類型之磨料區段之含量為更大含量之該等第一類型之磨料區段。 The abrasive article of embodiment 13, wherein the abrasive annular region comprises an inner annular region, an outer annular region, and a central annular region disposed between the inner annular region and the outer annular region, and wherein the central annular region The first type of abrasive segments are included in a greater amount than the second type of abrasive segments.

實施方案19. 如實施方案13之磨料製品，其中相比於該等第一類型之磨料區段之含量，更大含量之該等第二類型之磨料區段與該磨料環形區域之內環形圓周相交。 The abrasive article of embodiment 13 wherein a greater amount of the second type of abrasive segments and the inner annular circumference of the abrasive annular region are compared to the first type of abrasive segments intersect.

實施方案20. 如實施方案13之磨料製品，其中相比於該等第一類型之磨料區段之含量，更大含量之該等第二類型之磨料區段與該磨料環形區域之外環形圓周相交。 The abrasive article of embodiment 13 wherein a greater amount of the second type of abrasive segments and the annular circumference of the abrasive annular region are compared to the first type of abrasive segments intersect.

實施方案21. 如實施方案13之磨料製品，其中相比於該等第二類型之磨料區段之含量，更大含量之該等第 一類型之磨料區段遠離該磨料環形區域之內環形圓周或外環形圓周。 Embodiment 21. The abrasive article of Embodiment 13, wherein the greater amount of the first portion is compared to the content of the second type of abrasive segments One type of abrasive segment is remote from the inner or outer annular circumference of the abrasive annular region.

實施方案22. 如實施方案2、3、4、5及6中之任一項之磨料製品，其中該等磨料區段限定磨料環形區域及相對於該磨料環形區域之總表面積為不大於24%之磨料表面積百分比。 The abrasive article of any one of embodiments 2, 3, 4, 5, and 6, wherein the abrasive segments define an abrasive annular region and a total surface area relative to the abrasive annular region of no greater than 24% Abrasive surface area percentage.

實施方案23. 如實施方案1及22中之任一項之磨料製品，其中該磨料表面積百分比為不大於23%或不大於22%或不大於21%或不大於20%或不大於19%或不大於18%或不大於17%或不大於16%或不大於15%或不大於14%。 The abrasive article of any one of embodiments 1 and 22, wherein the abrasive surface area percentage is no more than 23% or no more than 22% or no more than 21% or no more than 20% or no more than 19% or Not more than 18% or not more than 17% or not more than 16% or not more than 15% or not more than 14%.

實施方案24. 如實施方案1、2、3、4、5及6中之任一項之磨料製品，其中該等磨料區段包括長度小於該磨料環形區域之環形寬度之最長磨料區段，其中該最長磨料區段具有該環形寬度之不大於95%或不大於90%或不大於85%或不大於80%或不大於75%或不大於70%或不大於65%或不大於60%或不大於55%或不大於50%之長度。 The abrasive article of any of embodiments 1, 2, 3, 4, 5, and 6, wherein the abrasive segments comprise a longest abrasive segment having a length less than an annular width of the abrasive annular region, wherein The longest abrasive section has no more than 95% or no more than 90% or no more than 85% or no more than 80% or no more than 75% or no more than 70% or no more than 65% or no more than 60% of the annular width or Not more than 55% or not more than 50% of the length.

實施方案25. 如實施方案24之磨料製品，其中該最長磨料區段具有該環形寬度之至少10%或至少15%或至少20%或至少25%或至少30%或至少35%或至少40%或至少45%或至少50%或至少55%或至少60%或至少65%或至少70%之長度。 The abrasive article of embodiment 24, wherein the longest abrasive segment has at least 10% or at least 15% or at least 20% or at least 25% or at least 30% or at least 35% or at least 40% of the annular width Or at least 45% or at least 50% or at least 55% or at least 60% or at least 65% or at least 70% of the length.

實施方案26. 如實施方案1、3、4、5及6中之任一項之磨料製品，其中該等磨料區段限定具有內環形區域、外環形區域及安置於該內環形區域與該外環形區域之間 之中央環形區域的磨料環形區域，並且其中該內環形區域或外環形區域中之至少一個磨料區段相比於該中央環形區域中之磨料區段具有不同磨料表面積。 The abrasive article of any one of embodiments 1, 3, 4, 5, and 6, wherein the abrasive segments define an inner annular region, an outer annular region, and are disposed in the inner annular region and the outer portion Between annular areas A abrasive annular region of the central annular region, and wherein at least one of the inner annular region or the outer annular region has a different abrasive surface area than the abrasive segment of the central annular region.

實施方案27. 如實施方案2及26中之任一項之磨料製品，其中該內環形區域或外環形區域中之該至少一個磨料區段相比於該中央環形區域中之該磨料區段包含較小表面積。 The abrasive article of any one of embodiments 2 and 26, wherein the at least one abrasive segment of the inner annular region or the outer annular region comprises compared to the abrasive segment of the central annular region Smaller surface area.

實施方案28. 如實施方案1、2、4、5及6中之任一項之磨料製品，其中該主體具有環形表面，其包括具有第一磨料表面積(ASA1)之耦接至該環形表面之第一磨料區段及具有第二磨料表面積(ASA2)之耦接至該環形表面之第二磨料區段，並且其中ASA1>ASA2。 The abrasive article of any of embodiments 1, 2, 4, 5, and 6, wherein the body has an annular surface that includes a first abrasive surface area (ASA1) coupled to the annular surface A first abrasive section and a second abrasive section having a second abrasive surface area (ASA2) coupled to the annular surface, and wherein ASA1 > ASA2.

實施方案29. 如實施方案3及28中之任一項之磨料製品，其中該主體包含至少1.1：1或至少1.2：1或至少1.5：1或至少2：1或至少3：1或至少4：1或至少5：1或至少6：1或至少7：1或至少8：1或至少9：1或至少10：1之磨料表面積比率(ASA1：ASA2)。 The abrasive article of any of embodiments 3 and 28, wherein the body comprises at least 1.1:1 or at least 1.2:1 or at least 1.5:1 or at least 2:1 or at least 3:1 or at least 4 : 1 or an abrasive surface area ratio of at least 5:1 or at least 6:1 or at least 7:1 or at least 8:1 or at least 9:1 or at least 10:1 (ASA1: ASA2).

實施方案30. 如實施方案3及28中之任一項之磨料製品，其中該主體包含不大於100：1或不大於90：1或不大於80：1或不大於70：1或不大於60：1或不大於60：1或不大於50：1或不大於40：1或不大於30：1或不大於20：1或不大於10：1或不大於8：1或不大於6：1或不大於4：1之磨料表面積比率(ASA1：ASA2)。 The abrasive article of any of embodiments 3 and 28, wherein the body comprises no more than 100:1 or no more than 90:1 or no more than 80:1 or no more than 70:1 or no more than 60 :1 or no more than 60:1 or no more than 50:1 or no more than 40:1 or no more than 30:1 or no more than 20:1 or no more than 10:1 or no more than 8:1 or no more than 6:1 Or an abrasive surface area ratio of not more than 4:1 (ASA1: ASA2).

實施方案31. 如實施方案1、2、3、5及6中之 任一項之磨料製品，其中該等磨料區段限定具有內環形區域、外環形區域及安置於該內環形區域與該外環形區域之間之中央環形區域的磨料環形區域，並且其中該內環形區域包含限定第一分佈之第一組磨料區段並且該中央區域包含限定第二分佈之第二組磨料區段，其中該第一分佈不同於該第二分佈。 Embodiment 31. As in Embodiments 1, 2, 3, 5, and 6 An abrasive article according to any of the preceding claims, wherein the abrasive segments define an abrasive annular region having an inner annular region, an outer annular region, and a central annular region disposed between the inner annular region and the outer annular region, and wherein the inner annular region The region includes a first set of abrasive segments defining a first distribution and the central region includes a second set of abrasive segments defining a second distribution, wherein the first distribution is different from the second distribution.

實施方案32. 如實施方案4及31中之任一項之磨料製品，其中該等第一組磨料區段之間的間隔距離不同於第二組磨料區段之間的間隔距離。 The abrasive article of any of embodiments 4 and 31, wherein the separation distance between the first set of abrasive segments is different than the separation distance between the second set of abrasive segments.

實施方案33. 如實施方案4及31中之任一項之磨料製品，其中該等第一組磨料區段之間的間隔距離為至少0.01(aL1)，其中aL1代表該等第一組磨料區段之平均長度或至少0.1(aL1)或至少0.5(aL1)或至少1(aL1)或至少2(aL1)或至少3(aL1)或至少4(aL1)或至少5(aL1)或至少6(aL1)或至少7(aL1)或至少8(aL1)或至少9(aL1)或至少10(aL1)。 The abrasive article of any one of embodiments 4 and 31, wherein the first set of abrasive segments have a separation distance of at least 0.01 (aL1), wherein aL1 represents the first set of abrasive regions The average length of the segments is at least 0.1 (aL1) or at least 0.5 (aL1) or at least 1 (aL1) or at least 2 (aL1) or at least 3 (aL1) or at least 4 (aL1) or at least 5 (aL1) or at least 6 ( aL1) or at least 7 (aL1) or at least 8 (aL1) or at least 9 (aL1) or at least 10 (aL1).

實施方案34. 如實施方案4及31中之任一項之磨料製品，其中該等第一組磨料區段之間的間隔距離為不大於100(aL1)，其中aL1代表該等第一組磨料區段之平均長度或不大於90(aL1)或不大於90(aL1)或不大於80(aL1)或不大於70(aL1)或不大於60(aL1)或不大於50(aL1)或不大於40(aL1)或不大於30(aL1)或不大於20(aL1)或不大於15(aL1)或不大於12(aL1)或不大於10(aL1)或不大於9(aL1)或不大於8(aL1)或不大於7(aL1)或不大於6(aL1)或不大於5(aL1)或不大於4(aL1)或不大於3(aL1)或不大於2(aL1)或不大於1(aL1)或不大於 0.1(aL1)或不大於0.01(aL1)。 The abrasive article of any of embodiments 4 and 31, wherein the first set of abrasive segments have a separation distance of no greater than 100 (aL1), wherein aL1 represents the first set of abrasives The average length of the segments may be no greater than 90 (aL1) or no greater than 90 (aL1) or no greater than 80 (aL1) or no greater than 70 (aL1) or no greater than 60 (aL1) or no greater than 50 (aL1) or no greater than 40 (aL1) or not greater than 30 (aL1) or not greater than 20 (aL1) or not greater than 15 (aL1) or not greater than 12 (aL1) or not greater than 10 (aL1) or not greater than 9 (aL1) or not greater than 8 (aL1) or not more than 7 (aL1) or not more than 6 (aL1) or not more than 5 (aL1) or not more than 4 (aL1) or not more than 3 (aL1) or not more than 2 (aL1) or not more than 1 ( aL1) or not greater than 0.1 (aL1) or not more than 0.01 (aL1).

實施方案35. 如實施方案4及31中之任一項之磨料製品，其中該等第二組磨料區段之間的間隔距離為至少0.01(aL2)，其中aL2代表該等第二組磨料區段之平均長度或至少0.1(aL2)或至少0.5(aL2)或至少1(aL2)或至少2(aL2)或至少3(aL2)或至少4(aL2)或至少5(aL2)或至少6(aL2)或至少7(aL2)或至少8(aL2)或至少9(aL2)或至少10(aL2)。 The abrasive article of any one of embodiments 4 and 31, wherein the second set of abrasive segments have a separation distance of at least 0.01 (aL2), wherein aL2 represents the second set of abrasive regions The average length of the segments is at least 0.1 (aL2) or at least 0.5 (aL2) or at least 1 (aL2) or at least 2 (aL2) or at least 3 (aL2) or at least 4 (aL2) or at least 5 (aL2) or at least 6 ( aL2) or at least 7 (aL2) or at least 8 (aL2) or at least 9 (aL2) or at least 10 (aL2).

實施方案36. 如實施方案4及31中之任一項之磨料製品，其中該等第二組磨料區段之間的間隔距離為不大於100(aL2)，其中aL2代表該等第二組磨料區段之平均長度或不大於90(aL2)或不大於90(aL2)或不大於80(aL2)或不大於70(aL2)或不大於60(aL2)或不大於50(aL2)或不大於40(aL2)或不大於30(aL2)或不大於20(aL2)或不大於15(aL2)或不大於12(aL2)或不大於10(aL2)或不大於9(aL2)或不大於8(aL2)或不大於7(aL2)或不大於6(aL2)或不大於5(aL2)或不大於4(aL2)或不大於3(aL2)或不大於2(aL2)或不大於1(aL2)或不大於0.1(aL2)或不大於0.01(aL2)。 The abrasive article of any one of embodiments 4 and 31, wherein the second set of abrasive segments have a separation distance of no greater than 100 (aL2), wherein aL2 represents the second set of abrasives The average length of the segments may be no greater than 90 (aL2) or no greater than 90 (aL2) or no greater than 80 (aL2) or no greater than 70 (aL2) or no greater than 60 (aL2) or no greater than 50 (aL2) or no greater than 40 (aL2) or not more than 30 (aL2) or not more than 20 (aL2) or not more than 15 (aL2) or not more than 12 (aL2) or not more than 10 (aL2) or not more than 9 (aL2) or not more than 8 (aL2) or not more than 7 (aL2) or not more than 6 (aL2) or not more than 5 (aL2) or not more than 4 (aL2) or not more than 3 (aL2) or not more than 2 (aL2) or not more than 1 ( aL2) is not more than 0.1 (aL2) or not more than 0.01 (aL2).

實施方案37. 如實施方案1、2、3及4中之任一項之磨料製品，其中該等磨料區段限定具有環形寬度之磨料環形區域，該環形寬度定義為內環形圓周與外環形圓周之間沿著徑向軸之距離，並且其中至少一個磨料區段在該環形寬度之不大於95%上延伸。 The abrasive article of any of embodiments 1, 2, 3, and 4, wherein the abrasive segments define an abrasive annular region having an annular width defined as an inner annular circumference and an outer annular circumference The distance between the radial axes, and wherein at least one of the abrasive segments extends over no more than 95% of the annular width.

實施方案38. 如實施方案5及37中之任一項之磨料製品，其中該至少一個磨料區段在該環形寬度之不大於 90%或該環形寬度之不大於85%或不大於80%或不大於75%或不大於70%或不大於65%或不大於60%或不大於55%或不大於50%或不大於45%上延伸。 The abrasive article of any one of embodiments 5 and 37, wherein the at least one abrasive segment is not greater than the annular width 90% or the annular width is not more than 85% or not more than 80% or not more than 75% or not more than 70% or not more than 65% or not more than 60% or not more than 55% or not more than 50% or not more than 45 % extends.

實施方案39. 如實施方案5及37中之任一項之磨料製品，其中該至少一個磨料區段在該環形寬度之至少1%或該環形寬度之至少5%或至少10%或至少15%或至少20%或至少25%或至少30%或至少35%或至少40%或至少45%或至少50%或至少55%上延伸。 The abrasive article of any of embodiments 5 and 37, wherein the at least one abrasive segment is at least 1% of the annular width or at least 5% or at least 10% or at least 15% of the annular width Or at least 20% or at least 25% or at least 30% or at least 35% or at least 40% or at least 45% or at least 50% or at least 55% over extended.

實施方案40. 如實施方案1、2、3、4及5中之任一項之磨料製品，其中該等磨料區段耦接至該主體之該環形表面且相比於彼此佈置以限定根據接觸面積測試為不大於0.270之正規化最大接觸面積變化(NMCAV)。 The abrasive article of any one of embodiments 1, 2, 3, 4, and 5, wherein the abrasive segments are coupled to the annular surface of the body and are arranged relative to one another to define a contact The area test is a normalized maximum contact area change (NMCAV) of no more than 0.270.

實施方案41. 如實施方案6及40中之任一項之磨料製品，其中該正規化最大接觸面積變化(NMCAV)為不大於0.149、不大於0.148、不大於0.147、不大於0.146、不大於0.145、不大於0.144、不大於0.143、不大於0.142、不大於0.141、不大於0.140、不大於0.139、不大於0.138、不大於0.137、不大於0.136、不大於0.135、不大於0.134、不大於0.133、不大於0.132、不大於0.131、不大於0.130、不大於0.129、不大於0.128、不大於0.127、不大於0.126、不大於0.125、不大於0.124、不大於0.123、不大於0.122、不大於0.121、不大於0.120、不大於0.119、不大於0.118、不大於0.117、不大於0.116、不大於0.115、不大於0.114、不大於0.113、不大於0.112、不大於0.111、不大於0.110、不大 於0.109、不大於0.108、不大於0.107、不大於0.106、不大於0.105、不大於0.104、不大於0.103、不大於0.102、不大於0.101、不大於0.100、不大於0.095、不大於0.090、不大於0.085、不大於0.080、不大於0.075、不大於0.070、不大於0.065、不大於0.060、不大於0.055、不大於0.050、不大於0.045、不大於0.040、不大於0.035、不大於0.030、不大於0.025、不大於0.020、不大於0.015、不大於0.010或甚至不大於0.005。此外，在至少一個非限制性實施方案中，該NMCAV可為至少0.0001。 The abrasive article of any one of embodiments 6 and 40, wherein the normalized maximum contact area change (NMCAV) is no greater than 0.149, no greater than 0.148, no greater than 0.147, no greater than 0.146, no greater than 0.145 , not more than 0.144, not more than 0.143, not more than 0.142, not more than 0.141, not more than 0.140, not more than 0.139, not more than 0.138, not more than 0.137, not more than 0.136, not more than 0.135, not more than 0.134, not more than 0.133, no More than 0.132, no more than 0.131, no more than 0.130, no more than 0.129, no more than 0.128, no more than 0.127, no more than 0.126, no more than 0.125, no more than 0.124, no more than 0.123, no more than 0.122, no more than 0.121, no more than 0.120 , not more than 0.119, not more than 0.118, not more than 0.117, not more than 0.116, not more than 0.115, not more than 0.114, not more than 0.113, not more than 0.112, not more than 0.111, not more than 0.110, not large 0.109, no more than 0.108, no more than 0.107, no more than 0.106, no more than 0.105, no more than 0.104, no more than 0.103, no more than 0.102, no more than 0.101, no more than 0.100, no more than 0.095, no more than 0.090, no more than 0.085 , not more than 0.080, not more than 0.075, not more than 0.070, not more than 0.065, not more than 0.060, not more than 0.055, not more than 0.050, not more than 0.045, not more than 0.040, not more than 0.035, not more than 0.030, not more than 0.025, no More than 0.020, no more than 0.015, no more than 0.010 or even no more than 0.005. Moreover, in at least one non-limiting embodiment, the NMCAV can be at least 0.0001.

實施方案42. 如實施方案6及40中之任一項之磨料製品，其中該NMCAV為至少0.0001、至少0.0002、至少0.0004、至少0.0006、至少0.0008、至少0.001、至少0.005、至少0.01、至少0.02、至少0.04、至少0.05、至少0.06、至少0.07。 The abrasive article of any one of embodiments 6 and 40, wherein the NMCAV is at least 0.0001, at least 0.0002, at least 0.0004, at least 0.0006, at least 0.0008, at least 0.001, at least 0.005, at least 0.01, at least 0.02, At least 0.04, at least 0.05, at least 0.06, at least 0.07.

實施方案43. 如實施方案1、2、3、4、5及6中之任一項之磨料製品，其中該等磨料區段之至少一部分包含相對於相關徑向軸成角度之縱軸。 The abrasive article of any of embodiments 1, 2, 3, 4, 5, and 6, wherein at least a portion of the abrasive segments comprise a longitudinal axis that is angled relative to an associated radial axis.

實施方案44. 如實施方案1、2、3、4、5及6中之任一項之磨料製品，其中該等磨料區段限定關於該等磨料區段在內環形區域及中央環形區域中之安置的交替模式。 The abrasive article of any of the embodiments 1, 2, 3, 4, 5, and 6, wherein the abrasive segments define the inner annular region and the central annular region with respect to the abrasive segments Alternate mode of placement.

實施方案45. 如實施方案1、2、3、4、5及6中之任一項之磨料製品，其中該等磨料區段限定關於該等磨料區段在外環形區域及中央環形區域中之安置的交替模式。 The abrasive article of any of embodiments 1, 2, 3, 4, 5, and 6, wherein the abrasive segments define placement of the abrasive segments in the outer annular region and the central annular region Alternate pattern.

實施方案46. 如實施方案1、2、3、4、5及6中 之任一項之磨料製品，其中該等磨料區段包括包含於黏結材料之三維體積中之磨料粒子之黏結磨料區段。 Embodiment 46. As in embodiments 1, 2, 3, 4, 5, and 6 An abrasive article according to any of the preceding claims, wherein the abrasive segments comprise bonded abrasive segments of abrasive particles contained in a three-dimensional volume of the bonding material.

實施方案47. 如實施方案46之磨料製品，其中該等磨料粒子包含無機材料，其中該等磨料粒子包含天然存在之材料，其中該等磨料粒子包含合成材料，其中該等磨料粒子包含選自由氧化物、碳化物、氮化物、硼化物、氧碳化物、氧氮化物、氧硼化物、含碳材料、金剛石及其組合組成之群的材料，其中該等磨料粒子包含超級研磨材料，其中該等磨料粒子基本上由金剛石組成，其中該等磨料粒子包含具有一定含量之多晶金剛石。 The abrasive article of embodiment 46, wherein the abrasive particles comprise an inorganic material, wherein the abrasive particles comprise a naturally occurring material, wherein the abrasive particles comprise a synthetic material, wherein the abrasive particles comprise an oxidation selected from the group consisting of a material comprising a group of materials, carbides, nitrides, borides, oxycarbides, oxynitrides, oxyborides, carbonaceous materials, diamonds, and combinations thereof, wherein the abrasive particles comprise superabrasive materials, wherein The abrasive particles consist essentially of diamond, wherein the abrasive particles comprise polycrystalline diamond having a certain content.

實施方案48. 如實施方案46之磨料製品，其中各磨料區段包括主體，其包含相對於該主體之總體積為至少約0.1體積%之磨料粒子、至少約0.25體積%、至少約0.5體積%、至少約0.6體積%、至少約0.7體積%、至少約0.8體積%、至少約0.9體積%、至少約1體積%、至少約2體積%、至少約3體積%、至少約4體積%、至少約5體積%之磨料粒子。 The abrasive article of embodiment 46, wherein each abrasive segment comprises a body comprising at least about 0.1% by volume of abrasive particles, at least about 0.25 vol%, at least about 0.5 vol% relative to a total volume of the body At least about 0.6% by volume, at least about 0.7% by volume, at least about 0.8% by volume, at least about 0.9% by volume, at least about 1% by volume, at least about 2% by volume, at least about 3% by volume, at least about 4% by volume, at least About 5% by volume of abrasive particles.

實施方案49. 如實施方案46之磨料製品，其中該等磨料區段各自具有主體，其包含相對於該主體之總體積為不大於約15體積%、不大於約12體積%、不大於約10體積%、不大於約8體積%、不大於約7體積%、不大於約6體積%、不大於約5體積%、不大於約4體積%、不大於約3體積%、不大於約2體積%、不大於約1.5體積%之磨料粒子。 The abrasive article of embodiment 46, wherein the abrasive segments each have a body comprising no greater than about 15% by volume, no greater than about 12% by volume, and no greater than about 10 relative to the total volume of the body % by volume, no more than about 8% by volume, no more than about 7% by volume, no more than about 6% by volume, no more than about 5% by volume, no more than about 4% by volume, no more than about 3% by volume, no more than about 2 volumes %, no more than about 1.5% by volume of abrasive particles.

實施方案50. 如實施方案46之磨料製品，其中該等磨料區段各自包括經組態以研磨非晶形、單晶或多晶材 料之主體，其中該主體經組態以研磨晶圓，其中該主體經組態以研磨藍寶石，其中該主體經組態用於研磨維氏硬度為至少約1500-3000kg/mm2之材料。 The abrasive article of embodiment 46, wherein the abrasive segments each comprise a configuration to grind an amorphous, single crystal or polycrystalline material The body of the material, wherein the body is configured to grind the wafer, wherein the body is configured to grind sapphire, wherein the body is configured to grind a material having a Vickers hardness of at least about 1500-3000 kg/mm2.

實施方案51. 如實施方案46之磨料製品，其中該黏結材料包含包括銅(Cu)及錫(Sn)之青銅，其中該青銅包含以重量計不大於約0.93、不大於約0.9、不大於約0.88、不大於約0.85、不大於約0.83、不大於約0.8、不大於約0.78、不大於約0.75、不大於約0.73、不大於約0.7、不大於約0.68、不大於約0.65、不大於約0.63、不大於約0.6、不大於約0.58、不大於約0.55、不大於約0.53、不大於約0.5、不大於約0.48、不大於約0.45、不大於約0.43、不大於約0.4、不大於約0.3、不大於約0.2之錫/銅比率(Sn/Cu)。 The abrasive article of embodiment 46, wherein the bonding material comprises bronze comprising copper (Cu) and tin (Sn), wherein the bronze comprises no more than about 0.93, no more than about 0.9, no more than about, by weight. 0.88, no greater than about 0.85, no greater than about 0.83, no greater than about 0.8, no greater than about 0.78, no greater than about 0.75, no greater than about 0.73, no greater than about 0.7, no greater than about 0.68, no greater than about 0.65, no greater than about 0.63, no greater than about 0.6, no greater than about 0.58, no greater than about 0.55, no greater than about 0.53, no greater than about 0.5, no greater than about 0.48, no greater than about 0.45, no greater than about 0.43, no greater than about 0.4, no greater than about 0.3, tin/copper ratio (Sn/Cu) not greater than about 0.2.

實施方案52. 如實施方案46之磨料製品，其中各磨料區段包括如下主體，該主體包括相對於該主體之總體積為至少約50體積%、至少約55體積%、至少約60體積%、至少約65體積%、至少約70體積%、至少約75體積%、至少約80體積%、至少約85體積%、至少約90體積%、至少約92體積%、至少約94體積%、至少約96體積%、至少約97體積%、至少約98體積%之該黏結材料。 The abrasive article of embodiment 46, wherein each abrasive segment comprises a body comprising at least about 50% by volume, at least about 55% by volume, at least about 60% by volume, relative to the total volume of the body, At least about 65% by volume, at least about 70% by volume, at least about 75% by volume, at least about 80% by volume, at least about 85% by volume, at least about 90% by volume, at least about 92% by volume, at least about 94% by volume, at least about 96% by volume, at least about 97% by volume, at least about 98% by volume of the bonding material.

實施方案53. 如實施方案46之磨料製品，其中各磨料區段包括如下主體，該主體包含相對於該主體之總體積為不大於約99.5體積%、不大於約99體積%、不大於約98體積%、不大於約97體積%、不大於約96體積%、不大於約95體積%之黏結材料。 The abrasive article of embodiment 46, wherein each abrasive segment comprises a body comprising no greater than about 99.5% by volume, no greater than about 99% by volume, and no greater than about 98 relative to the total volume of the body. 5% by volume, no more than about 97% by volume, no more than about 96% by volume, and no more than about 95% by volume of the bonding material.

實施方案54. 一種磨料製品，其包含：具有環形表面之主體，該主體包括耦接至該環形表面之磨料區段，其中該等磨料區段限定具有內環形區域、外環形區域及安置於該內環形區域與該外環形區域之間之中央環形區域的磨料環形區域，並且其中至少一個磨料區段跨越該內環形區域、該中央環形區域及該外環形區域；其中該內環形區域或該外環形區域中之該至少一個磨料區段之第一末端部分不同於該中央環形區域中之該至少一個磨料區段之中央部分，並且其中該第一末端部分之縱軸與該中央部分之縱軸之間的角小於180度。 Embodiment 54. An abrasive article comprising: a body having an annular surface, the body comprising an abrasive segment coupled to the annular surface, wherein the abrasive segments define an inner annular region, an outer annular region, and disposed thereon a abrasive annular region of the central annular region between the inner annular region and the outer annular region, and wherein at least one abrasive segment spans the inner annular region, the central annular region, and the outer annular region; wherein the inner annular region or the outer a first end portion of the at least one abrasive segment in the annular region is different from a central portion of the at least one abrasive segment of the central annular region, and wherein a longitudinal axis of the first end portion and a longitudinal axis of the central portion The angle between them is less than 180 degrees.

實施方案55. 如實施方案54之磨料製品，其中該至少一個磨料區段進一步包含該內環形區域或該外環形區域中之第二末端部分，並且其中該第二末端部分之縱軸與該中央部分之縱軸之間的角小於180度。 The abrasive article of embodiment 54, wherein the at least one abrasive segment further comprises the inner annular region or the second end portion of the outer annular region, and wherein the longitudinal axis of the second end portion is opposite the central portion The angle between the longitudinal axes of the sections is less than 180 degrees.

實施方案56. 如實施方案55之磨料製品，其中該第一末端部分之縱軸平行於該第二末端部分之縱軸。 The abrasive article of embodiment 55, wherein the longitudinal axis of the first end portion is parallel to the longitudinal axis of the second end portion.

實施方案57. 如實施方案54、55及56中之任一項之磨料製品，其中該至少一個磨料區段之該第一末端部分具有第一磨料表面積(PASA1)並且該至少一個磨料區段之該中央部分具有第二磨料表面積(PASA2)；並且其中PASA1>PASA2。 The abrasive article of any one of embodiments 54, 55, and 56, wherein the first end portion of the at least one abrasive segment has a first abrasive surface area (PASA 1 ) and the at least one abrasive segment The central portion has a second abrasive surface area (PASA 2 ); and wherein PASA 1 > PASA 2 .

實施方案58. 如實施方案54、55及56中之任一項之磨料製品，其中該第一末端部分具有第一長度(PL1)並且該中央部分具有第二長度(PLC)，並且其中PL1不同於PLC。 The abrasive article of any of embodiments 54, 55, and 56, wherein the first end portion has a first length (PL1) and the central portion has a second length (PLC), and wherein the PL1 is different In the PLC.

實施方案59. 如實施方案58之磨料製品，其中PLC>PL1。 Embodiment 59. The abrasive article of Embodiment 58, wherein PLC>PL1.

實施方案60. 如實施方案58之磨料製品，其中該至少一個區段之該第一末端部分及中央部分限定至少1.1：1或至少1.2：1或至少1.5：1或至少2：1或至少3：1或至少4：1或至少5：1或至少6：1或至少7：1或至少8：1或至少9：1或至少10：1之比率(PLC：PL1)。 The abrasive article of embodiment 58, wherein the first end portion and the central portion of the at least one section define at least 1.1:1 or at least 1.2:1 or at least 1.5:1 or at least 2:1 or at least 3 : 1 or a ratio of at least 4:1 or at least 5:1 or at least 6:1 or at least 7:1 or at least 8:1 or at least 9:1 or at least 10:1 (PLC: PL1).

實施方案61. 如實施方案58之磨料製品，其中該至少一個區段之該第一末端部分及中央部分限定不大於100：1或不大於90：1或不大於80：1或不大於70：1或不大於60：1或不大於50：1或不大於40：1或不大於30：1或不大於20：1或不大於10：1或不大於8：1或不大於6：1或不大於4：1之比率(PLC：PL1)。 The abrasive article of embodiment 58, wherein the first end portion and the central portion of the at least one section define no more than 100:1 or no more than 90:1 or no more than 80:1 or no more than 70: 1 or no more than 60:1 or no more than 50:1 or no more than 40:1 or no more than 30:1 or no more than 20:1 or no more than 10:1 or no more than 8:1 or no more than 6:1 or Not more than 4:1 ratio (PLC: PL1).

實施方案62. 如實施方案54、55及56中之任一項之磨料製品，其中該等磨料區段限定磨料環形區域及相對於該磨料環形區域之總表面積為不大於24%之磨料表面積百分比。 The abrasive article of any of embodiments 54, 55, and 56, wherein the abrasive segments define an abrasive annular region and a total surface area relative to the abrasive annular region of no more than 24% abrasive surface area percentage .

實施方案63. 如實施方案54、55及56中之任一項之磨料製品，其中該磨料表面積百分比為不大於23%或不大於22%或不大於21%或不大於20%或不大於19%或不大於18%或不大於17%或不大於16%或不大於15%或不大於14%。 The abrasive article of any one of embodiments 54, 55, and 56, wherein the abrasive surface area percentage is no greater than 23% or no greater than 22% or no greater than 21% or no greater than 20% or no greater than 19 % or not more than 18% or not more than 17% or not more than 16% or not more than 15% or not more than 14%.

實施方案64. 如實施方案54、55及56中之任一項之磨料製品，其中該等磨料區段包括長度小於該磨料環形區域之環形寬度之最長磨料區段，其中該最長磨料區段具有 該環形寬度之不大於95%或不大於90%或不大於85%或不大於80%或不大於75%或不大於70%或不大於65%或不大於60%或不大於55%或不大於50%之長度。 The abrasive article of any of embodiments 54, 55, and 56, wherein the abrasive segments comprise a longest abrasive segment having a length less than an annular width of the abrasive annular region, wherein the longest abrasive segment has The annular width is not more than 95% or not more than 90% or not more than 85% or not more than 80% or not more than 75% or not more than 70% or not more than 65% or not more than 60% or not more than 55% or not More than 50% of the length.

實施方案65. 如實施方案54、55及56中之任一項之磨料製品，其中該至少一個磨料區段之中央部分具有該環形寬度之至少10%或至少15%或至少20%或至少25%或至少30%或至少35%或至少40%或至少45%或至少50%或至少55%或至少60%或至少65%或至少70%之長度。 The abrasive article of any one of embodiments 54, 55, and 56, wherein the central portion of the at least one abrasive segment has at least 10% or at least 15% or at least 20% or at least 25 of the annular width % or at least 30% or at least 35% or at least 40% or at least 45% or at least 50% or at least 55% or at least 60% or at least 65% or at least 70% of the length.

實施方案66. 如實施方案54、55及56中之任一項之磨料製品，其中該等磨料區段限定具有環形寬度之磨料環形區域，該環形寬度定義為內環形圓周與外環形圓周之間沿著徑向軸之距離，並且其中至少一個磨料區段在該環形寬度之不大於95%上延伸。 The abrasive article of any of embodiments 54, 55, and 56, wherein the abrasive segments define an abrasive annular region having an annular width defined between an inner annular circumference and an outer annular circumference The distance along the radial axis, and wherein at least one of the abrasive segments extends over no more than 95% of the annular width.

實施方案67. 如實施方案54、55及56中之任一項之磨料製品，其中該等磨料區段耦接至該主體之該環形表面且相對於彼此佈置以限定根據接觸面積測試為不大於0.270之正規化最大接觸面積變化(NMCAV)。 The abrasive article of any one of embodiments 54, 55, and 56, wherein the abrasive segments are coupled to the annular surface of the body and are disposed relative to each other to define no greater than Normalized maximum contact area change (NMCAV) of 0.270.

實施方案68. 如實施方案54、55及56中之任一項之磨料製品，其中該正規化最大接觸面積變化(NMCAV)為不大於0.149、不大於0.148、不大於0.147、不大於0.146、不大於0.145、不大於0.144、不大於0.143、不大於0.142、不大於0.141、不大於0.140、不大於0.139、不大於0.138、不大於0.137、不大於0.136、不大於0.135、不大於0.134、不大於0.133、不大於0.132、不大於0.131、不大於0.130、 不大於0.129、不大於0.128、不大於0.127、不大於0.126、不大於0.125、不大於0.124、不大於0.123、不大於0.122、不大於0.121、不大於0.120、不大於0.119、不大於0.118、不大於0.117、不大於0.116、不大於0.115、不大於0.114、不大於0.113、不大於0.112、不大於0.111、不大於0.110、不大於0.109、不大於0.108、不大於0.107、不大於0.106、不大於0.105、不大於0.104、不大於0.103、不大於0.102、不大於0.101、不大於0.100、不大於0.095、不大於0.090、不大於0.085、不大於0.080、不大於0.075、不大於0.070、不大於0.065、不大於0.060、不大於0.055、不大於0.050、不大於0.045、不大於0.040、不大於0.035、不大於0.030、不大於0.025、不大於0.020、不大於0.015、不大於0.010或甚至不大於0.005。 The abrasive article of any one of embodiments 54, 55, and 56, wherein the normalized maximum contact area change (NMCAV) is no greater than 0.149, no greater than 0.148, no greater than 0.147, no greater than 0.146, no More than 0.145, no more than 0.144, no more than 0.143, no more than 0.142, no more than 0.141, no more than 0.140, no more than 0.139, no more than 0.138, no more than 0.137, no more than 0.136, no more than 0.135, no more than 0.134, no more than 0.133 , not more than 0.132, not more than 0.131, not more than 0.130, Not more than 0.129, not more than 0.128, not more than 0.127, not more than 0.126, not more than 0.125, not more than 0.124, not more than 0.123, not more than 0.122, not more than 0.121, not more than 0.120, not more than 0.119, not more than 0.118, not more than 0.117, not more than 0.116, not more than 0.115, not more than 0.114, not more than 0.113, not more than 0.112, not more than 0.111, not more than 0.110, not more than 0.109, not more than 0.108, not more than 0.107, not more than 0.106, not more than 0.105, Not more than 0.104, not more than 0.103, not more than 0.102, not more than 0.101, not more than 0.100, not more than 0.095, not more than 0.090, not more than 0.085, not more than 0.080, not more than 0.075, not more than 0.070, not more than 0.065, not more than 0.060, not more than 0.055, not more than 0.050, not more than 0.045, not more than 0.040, not more than 0.035, not more than 0.030, not more than 0.025, not more than 0.020, not more than 0.015, not more than 0.010 or even not more than 0.005.

實施方案69. 如實施方案54、55及56中之任一項之磨料製品，其中該NMCAV為至少0.0001、至少0.0002、至少0.0004、至少0.0006、至少0.0008、至少0.001、至少0.005、至少0.01、至少0.02、至少0.04、至少0.05、至少0.06、至少0.07。 The abrasive article of any one of embodiments 54, 55, and 56, wherein the NMCAV is at least 0.0001, at least 0.0002, at least 0.0004, at least 0.0006, at least 0.0008, at least 0.001, at least 0.005, at least 0.01, at least 0.02, at least 0.04, at least 0.05, at least 0.06, at least 0.07.

實施方案70. 如實施方案54、55及56中之任一項之磨料製品，其中該磨料區段之該中央部分之縱軸相對於相關徑向軸成角度。 The abrasive article of any of embodiments 54, 55, and 56, wherein the longitudinal axis of the central portion of the abrasive segment is angled relative to the associated radial axis.

實施方案71. 如實施方案54、55及56中之任一項之磨料製品，其中該等磨料區段包括包含於黏結材料之三維體積中的磨料粒子的黏結磨料區段。 The abrasive article of any of embodiments 54, 55, and 56, wherein the abrasive segments comprise bonded abrasive segments of abrasive particles contained in a three-dimensional volume of the bonding material.

實施方案72. 如實施方案71之磨料製品，其中該等磨料粒子包含無機材料，其中該等磨料粒子包含天然存在之材料，其中該等磨料粒子包含合成材料，其中該等磨料粒子包含選自由氧化物、碳化物、氮化物、硼化物、氧碳化物、氧氮化物、氧硼化物、含碳材料、金剛石及其組合組成之群的材料，其中該等磨料粒子包含超級研磨材料，其中該等磨料粒子基本上由金剛石組成，其中該等磨料粒子包含具有一定含量之多晶金剛石。 The abrasive article of embodiment 71, wherein the abrasive particles comprise an inorganic material, wherein the abrasive particles comprise a naturally occurring material, wherein the abrasive particles comprise a synthetic material, wherein the abrasive particles comprise an oxidation selected from the group consisting of a material comprising a group of materials, carbides, nitrides, borides, oxycarbides, oxynitrides, oxyborides, carbonaceous materials, diamonds, and combinations thereof, wherein the abrasive particles comprise superabrasive materials, wherein The abrasive particles consist essentially of diamond, wherein the abrasive particles comprise polycrystalline diamond having a certain content.

實施方案73. 如實施方案71之磨料製品，其中各磨料區段包括如下主體，該主體包含相對於該主體之總體積為至少約0.1體積%之磨料粒子、至少約0.25體積%、至少約0.5體積%、至少約0.6體積%、至少約0.7體積%、至少約0.8體積%、至少約0.9體積%、至少約1體積%、至少約2體積%、至少約3體積%、至少約4體積%、至少約5體積%之磨料粒子。 The abrasive article of embodiment 71, wherein each abrasive segment comprises a body comprising at least about 0.1% by volume of abrasive particles, at least about 0.25 vol%, at least about 0.5, relative to the total volume of the body. % by volume, at least about 0.6% by volume, at least about 0.7% by volume, at least about 0.8% by volume, at least about 0.9% by volume, at least about 1% by volume, at least about 2% by volume, at least about 3% by volume, at least about 4% by volume At least about 5% by volume of abrasive particles.

實施方案74. 如實施方案71之磨料製品，其中該等磨料區段各自具有如下主體，該主體包含相對於該主體之總體積為不大於約15體積%、不大於約12體積%、不大於約10體積%、不大於約8體積%、不大於約7體積%、不大於約6體積%、不大於約5體積%、不大於約4體積%、不大於約3體積%、不大於約2體積%、不大於約1.5體積%之磨料粒子。 The abrasive article of embodiment 71, wherein the abrasive segments each have a body comprising no greater than about 15% by volume, no greater than about 12% by volume, and no greater than a total volume of the body About 10% by volume, no more than about 8% by volume, no more than about 7% by volume, no more than about 6% by volume, no more than about 5% by volume, no more than about 4% by volume, no more than about 3% by volume, no more than about 2% by volume, not more than about 1.5% by volume of abrasive particles.

實施方案75. 如實施方案71之磨料製品，其中該等磨料區段各自包括經組態以研磨非晶形、單晶或多晶材 料之主體，其中該主體經組態以研磨晶圓，其中該主體經組態以研磨藍寶石，其中該主體經組態用於研磨維氏硬度為至少約1500-3000kg/mm2之材料。 The abrasive article of embodiment 71, wherein the abrasive segments each comprise a body configured to grind an amorphous, single crystal or polycrystalline material, wherein the body is configured to grind a wafer, wherein the The body is configured to grind sapphire, wherein the body is configured to grind a material having a Vickers hardness of at least about 1500-3000 kg/mm&lt;2&gt;.

實施方案76. 如實施方案71之磨料製品，其中該黏結材料包含包括銅(Cu)及錫(Sn)之青銅，其中該青銅包含以重量計不大於約0.93、不大於約0.9、不大於約0.88、不大於約0.85、不大於約0.83、不大於約0.8、不大於約0.78、不大於約0.75、不大於約0.73、不大於約0.7、不大於約0.68、不大於約0.65、不大於約0.63、不大於約0.6、不大於約0.58、不大於約0.55、不大於約0.53、不大於約0.5、不大於約0.48、不大於約0.45、不大於約0.43、不大於約0.4、不大於約0.3、不大於約0.2之錫/銅比率(Sn/Cu)。 The abrasive article of embodiment 71, wherein the bonding material comprises bronze comprising copper (Cu) and tin (Sn), wherein the bronze comprises no more than about 0.93, no more than about 0.9, no more than about, by weight 0.88, no greater than about 0.85, no greater than about 0.83, no greater than about 0.8, no greater than about 0.78, no greater than about 0.75, no greater than about 0.73, no greater than about 0.7, no greater than about 0.68, no greater than about 0.65, no greater than about 0.63, no greater than about 0.6, no greater than about 0.58, no greater than about 0.55, no greater than about 0.53, no greater than about 0.5, no greater than about 0.48, no greater than about 0.45, no greater than about 0.43, no greater than about 0.4, no greater than about 0.3, tin/copper ratio (Sn/Cu) not greater than about 0.2.

實施方案77. 如實施方案71之磨料製品，其中各磨料區段包括如下主體，該主體包括相對於該主體之總體積為至少約50體積%、至少約55體積%、至少約60體積%、至少約65體積%、至少約70體積%、至少約75體積%、至少約80體積%、至少約85體積%、至少約90體積%、至少約92體積%、至少約94體積%、至少約96體積%、至少約97體積%、至少約98體積%之該黏結材料。 The abrasive article of embodiment 71, wherein each abrasive segment comprises a body comprising at least about 50% by volume, at least about 55% by volume, at least about 60% by volume, relative to the total volume of the body, At least about 65% by volume, at least about 70% by volume, at least about 75% by volume, at least about 80% by volume, at least about 85% by volume, at least about 90% by volume, at least about 92% by volume, at least about 94% by volume, at least about 96% by volume, at least about 97% by volume, at least about 98% by volume of the bonding material.

實施方案78. 如實施方案71之磨料製品，其中各磨料區段包括如下主體，該主體包含相對於該主體之總體積為不大於約99.5體積%、不大於約99體積%、不大於約98體積%、不大於約97體積%、不大於約96體積%、不大於約95體積%之黏結材料。 The abrasive article of embodiment 71, wherein each abrasive segment comprises a body comprising no greater than about 99.5% by volume, no greater than about 99% by volume, and no greater than about 98 relative to the total volume of the body. 5% by volume, no more than about 97% by volume, no more than about 96% by volume, and no more than about 95% by volume of the bonding material.

實施方案79. 如實施方案54及55中之任一項之磨料製品，其中該至少一個區段通常為旗形。 The abrasive article of any of embodiments 54 and 55, wherein the at least one section is generally flag shaped.

實施方案80. 如實施方案54、55及56中之任一項之磨料製品，其中該至少一個區段具有通常z形。 The abrasive article of any of embodiments 54, 55, and 56, wherein the at least one section has a generally z-shape.

實施方案81. 一種自複數個基材移除材料之方法，其使用來自實施方案1、2、3、4、5、6、54、55及56中之任一項之磨料製品中之任一者。 Embodiment 81. A method of removing material from a plurality of substrates using any of the abrasive articles from any of Embodiments 1, 2, 3, 4, 5, 6, 54, 55, and 56 By.

實施例 Example

根據本文所述之實施方案製備四個樣品磨料研磨輪(SGW1、SGW2、SGW3及SGW4)。樣品磨料研磨輪SGW1包括佈置於如圖8中所示之通常半分割區段設計中之磨料區段。樣品磨料研磨輪SGW2包括佈置於如圖9中所示之通常完全分割區段設計中之磨料區段。樣品磨料研磨輪SGW3包括設計上通常呈旗形且如圖10中所示佈置之磨料區段。樣品磨料研磨輪SGW4包括設計上通常呈z形且如圖11中所示佈置之磨料區段。 Four sample abrasive grinding wheels (SGW1, SGW2, SGW3, and SGW4) were prepared in accordance with the embodiments described herein. The sample abrasive grinding wheel SGW1 includes an abrasive section disposed in a generally semi-segmented section design as shown in FIG. The sample abrasive grinding wheel SGW2 includes an abrasive section disposed in a generally fully segmented section design as shown in FIG. The sample abrasive grinding wheel SGW3 includes an abrasive section that is generally flag shaped and arranged as shown in FIG. The sample abrasive grinding wheel SGW4 includes an abrasive section that is generally z-shaped and arranged as shown in FIG.

此外製備了比較性磨料研磨輪(CGW1)。比較性磨料研磨輪CGW1包括通常如圖2中所示佈置之直線、單一尺寸磨料區段。 In addition, a comparative abrasive grinding wheel (CGW1) was prepared. The comparative abrasive grinding wheel CGW1 includes a straight, single size abrasive section that is generally arranged as shown in FIG.

藉由根據下表1中所示之參數量測總厚度變化(TTV)來測試磨料研磨輪SGW1、SGW2、SGW3、SGW4及CGW1之研磨效能。 The grinding performance of the abrasive grinding wheels SGW1, SGW2, SGW3, SGW4, and CGW1 was tested by measuring the total thickness variation (TTV) according to the parameters shown in Table 1 below.

藉由樣品磨料研磨輪SGW1、SGW2、SGW3及SGW4中之每一者及比較性磨料研磨輪CGW1達成之研磨效能概述於下表2中。 The grinding performance achieved by each of the sample abrasive grinding wheels SGW1, SGW2, SGW3, and SGW4 and the comparative abrasive grinding wheel CGW1 is summarized in Table 2 below.

圖12示出比較樣品磨料研磨輪SGW1、SGW2、SGW3及SGW4之研磨效能與比較性磨料研磨輪CGW1之研磨效能的圖。如圖12中所示，所有四個樣品磨料研磨輪SGW1、SGW2、SGW3及SGW4顯示相比於比較性磨料研磨輪CGW1改良(亦即，較低)之TTV效能。特定言之，樣品磨料研磨輪SGW2顯示TTV研磨效能相比於比較性磨料研磨輪CGW1之接近2倍改良(亦即，在研磨測試期間TTV小約50%)。此外，樣品磨料研磨輪SGW1、SGW3及SGW4顯示TTV研磨效能相比於比較性磨料研磨輪CGW1之至少3倍改 良(亦即，在研磨測試期間TTV小約66%)。 Fig. 12 is a graph showing the polishing performance of the comparative sample abrasive grinding wheels SGW1, SGW2, SGW3, and SGW4 and the polishing performance of the comparative abrasive grinding wheel CGW1. As shown in Figure 12, all four sample abrasive grinding wheels SGW1, SGW2, SGW3, and SGW4 show improved (i.e., lower) TTV performance compared to the comparative abrasive grinding wheel CGW1. In particular, the sample abrasive grinding wheel SGW2 showed a nearly 2-fold improvement in TTV grinding performance compared to the comparative abrasive grinding wheel CGW1 (i.e., about 50% less TTV during the grinding test). In addition, the sample abrasive grinding wheels SGW1, SGW3 and SGW4 show at least 3 times the TTV grinding performance compared to the comparative abrasive grinding wheel CGW1. Good (ie, TTV is about 66% smaller during the grinding test).

上文揭示之標的物應視為說明性而非限制性的，且隨附申請專利範圍意欲涵蓋所有該等修改、增強及其他實施方案，其處於本發明之真實範疇內。因此，在法律允許之最大程度上，本發明之範疇由以下申請專利範圍及其等效物之最寬泛可允許解釋來確定，且不應由前述詳細描述局限或限制。 The above-disclosed subject matter is to be considered as illustrative and not limiting, and the scope of the invention is intended to cover all such modifications, modifications and other embodiments. The scope of the invention, therefore, is to be construed as limited by the

本揭示案之摘要經提供以符合專利法且在其不會用於解釋或限制申請專利範圍之範疇或含義之理解下提交。另外，在附圖之前述詳細描述中，出於簡化本揭示案之目的，各種特徵可組合在一起或描述於單一實施方案中。本揭示案不應解釋為反映如下意圖：相比於每個申請專利範圍中明確敍述，所主張之實施方案需要更多特徵。相反，如以下申請專利範圍所反映，發明標的物可針對任何所揭示實施方案之少於所有特徵。因此，將以下申請專利範圍併入附圖之詳細描述中，其中每個申請專利範圍自身限定單獨主張之標的物。 The Abstract of the Disclosure is submitted with the understanding that it conforms to the patent law and is not to be construed as limiting or limiting the scope or meaning of the scope of the patent application. In addition, the various features may be combined or described in a single embodiment for the purpose of simplifying the disclosure. The present disclosure is not to be interpreted as reflecting the intention that the claimed embodiments require more features than those explicitly recited in the scope of each application. Rather, the inventive subject matter may be less than all features of any disclosed embodiments, as reflected in the following claims. The scope of the following patent application is hereby incorporated by reference in its entirety in its entirety herein in its entirety

300‧‧‧磨料製品 300‧‧‧Abrasive products

301‧‧‧主體 301‧‧‧ Subject

302‧‧‧基材 302‧‧‧Substrate

303‧‧‧磨料區段 303‧‧‧Abrasive section

306‧‧‧環形表面 306‧‧‧ring surface

307‧‧‧環形寬度 307‧‧‧ ring width

308‧‧‧環形寬度 308‧‧‧ ring width

309‧‧‧長度 309‧‧‧ length

310‧‧‧寬度 310‧‧‧Width

311‧‧‧磨料環形區域 311‧‧‧Abrasion ring area

312‧‧‧外環形表面 312‧‧‧Outer ring surface

313‧‧‧內環形表面 313‧‧‧ inner ring surface

314‧‧‧內環形圓周 314‧‧ inside ring circumference

320‧‧‧外環形區域 320‧‧‧Outer ring area

321‧‧‧第二組磨料區段 321‧‧‧Second group of abrasive segments

322‧‧‧環形寬度 322‧‧‧ring width

330‧‧‧內環形區域 330‧‧‧ inner ring zone

331‧‧‧第一組磨料區段 331‧‧‧First set of abrasive segments

332‧‧‧環形寬度 332‧‧‧ ring width

340‧‧‧中央環形區域 340‧‧‧Central ring area

341‧‧‧環形寬度 341‧‧‧ ring width

351‧‧‧間隔距離 351‧‧‧ separation distance

352‧‧‧間隔距離 352‧‧‧ separation distance

371‧‧‧磨料區段 371‧‧‧Abrasive section

372‧‧‧中點 372‧‧‧ midpoint

373‧‧‧定向角 373‧‧‧ orientation angle

374‧‧‧徑向軸 374‧‧‧ radial axis

375‧‧‧縱軸 375‧‧‧ vertical axis

390‧‧‧中點 390‧‧‧ midpoint

391‧‧‧徑向軸 391‧‧‧ radial axis

Claims (8)

一種磨料製品，其包含：具有環形表面之主體，該主體包括耦接至該環形表面之磨料區段，其中該等磨料區段限定磨料環形區域及相對於該磨料環形區域之總表面積為不大於24%之磨料表面積百分比，且其中該等磨料區段相對於彼此佈置以限定根據一接觸面積測試為不大於0.270之一正規化最大接觸面積變化(NMCAV)。 An abrasive article comprising: a body having an annular surface, the body comprising an abrasive section coupled to the annular surface, wherein the abrasive segments define an abrasive annular region and a total surface area relative to the abrasive annular region is no greater than 24% abrasive surface area percentage, and wherein the abrasive segments are arranged relative to one another to define a normalized maximum contact area change (NMCAV) of no greater than 0.270 as measured by a contact area. 一種磨料製品，其包含：具有環形表面之主體，該主體包括耦接至該環形表面之磨料區段，其中該等磨料區段限定具有內環形區域、外環形區域及安置於該內環形區域與該外環形區域之間之中央環形區域的磨料環形區域，並且其中該內環形區域或外環形區域中之至少一個磨料區段相比於該中央環形區域中之磨料區段具有不同磨料表面積，且其中該等磨料區段相對於彼此佈置以限定根據一接觸面積測試為不大於0.270之一正規化最大接觸面積變化(NMCAV)。 An abrasive article comprising: a body having an annular surface, the body including an abrasive segment coupled to the annular surface, wherein the abrasive segments define an inner annular region, an outer annular region, and are disposed in the inner annular region a abrasive annular region of the central annular region between the outer annular regions, and wherein at least one of the inner annular region or the outer annular region has a different abrasive surface area than the abrasive segment of the central annular region, and Where the abrasive segments are arranged relative to one another to define a normalized maximum contact area change (NMCAV) of no greater than 0.270 as measured by a contact area. 如申請專利範圍第1項及第2項中之任一項之磨料製品，其中該等磨料區段具有選自由多邊形、不規則多邊形、橢圓形、圓形組成之群之二維形狀、具有自中央區域延伸之一或多個臂之主體、具有至少一個彎曲部之形狀及其組合。 The abrasive article of any one of claims 1 to 2, wherein the abrasive segments have a two-dimensional shape selected from the group consisting of a polygon, an irregular polygon, an ellipse, and a circle, having The central region extends the body of one or more arms, has the shape of at least one bend, and combinations thereof. 如申請專利範圍第1項及第2項中之任一項之磨料製品，其中該等磨料區段包括具有第一長度(L1)之第一磨料區段及具有第二長度(L2)之第二磨料區段，並且其中L1不同於L2。 The abrasive article of any of claims 1 to 2, wherein the abrasive segments comprise a first abrasive segment having a first length (L1) and a second length (L2) Two abrasive sections, and wherein L1 is different from L2. 如申請專利範圍第4項之磨料製品，其中L1>L2。 An abrasive article according to item 4 of the patent application, wherein L1>L2. 如申請專利範圍第1項及第2項中之任一項之磨料製品，其中該主體具有環形表面，該主體包括具有第一磨料表面積(ASA1)之耦接至該環形表面之第一磨料區段及具有第二磨料表面積(ASA2)之耦接至該環形表面之第二磨料區段，並且其中ASA1>ASA2。 The abrasive article of any of claims 1 to 2, wherein the body has an annular surface, the body comprising a first abrasive region having a first abrasive surface area (ASA1) coupled to the annular surface And a second abrasive section coupled to the annular surface having a second abrasive surface area (ASA2), and wherein ASA1 > ASA2. 如申請專利範圍第6項之磨料製品，其中該主體包含至少1.1：1且不大於100：1之磨料表面積比率(ASA1：ASA2)。 The abrasive article of claim 6, wherein the body comprises an abrasive surface area ratio (ASA1: ASA2) of at least 1.1:1 and no greater than 100:1. 如申請專利範圍第1項及第2項中之任一項之磨料製品，其中該正規化最大接觸面積變化(NMCAV)至少為0.001且不大於0.150。 The abrasive article of any one of claims 1 to 2, wherein the normalized maximum contact area change (NMCAV) is at least 0.001 and not greater than 0.150.
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