TWI588070B - The cassette can be filled with gas carrier - Google Patents
The cassette can be filled with gas carrier Download PDFInfo
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- TWI588070B TWI588070B TW104112895A TW104112895A TWI588070B TW I588070 B TWI588070 B TW I588070B TW 104112895 A TW104112895 A TW 104112895A TW 104112895 A TW104112895 A TW 104112895A TW I588070 B TWI588070 B TW I588070B
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Description
本發明是有關於一種輸送裝置，特別是指一種可對晶圓盒充填氣體的載具。 The present invention relates to a transport device, and more particularly to a carrier that can fill a wafer cassette with a gas.
參閱圖1，是習知的一種晶圓盒1。 Referring to Figure 1, there is a conventional wafer cassette 1.
在半導體製造業會透過用該晶圓盒1來輸送晶圓。一般來說，該晶圓盒1會先在盒內填充保護氣體以防止晶圓質變，再藉由一輸送軌道(圖未示)以自動化的方式將該晶圓盒1送往下一條產線。 In the semiconductor manufacturing industry, wafers are transported by using the wafer cassette 1. Generally, the wafer cassette 1 is filled with a protective gas in the cartridge to prevent wafer quality change, and the wafer cassette 1 is automatically sent to the next production line by a transport track (not shown). .
然而，當產線較忙碌的時候，輸送中的晶圓盒1會停在該輸送軌道等待，若等待時間過長導致盒內氣體逸出而使空氣填入盒內，就會使得盒內的晶圓質變使品質劣化，此時，仍然無法及時補充晶圓盒內的保護氣體。 However, when the production line is busy, the wafer cassette 1 in the transport will stop at the transport track, and if the waiting time is too long, the gas in the box will escape and the air will be filled into the box, which will make the inside of the box The wafer quality deteriorates the quality, and at this time, the shielding gas in the wafer cassette cannot be replenished in time.
此外，在該晶圓盒1送上輸送軌道前，需要預先進行氣體填充的步驟，較耗費人工及時間，增加產線的額外成本。 In addition, before the wafer cassette 1 is transported to the transport track, a gas filling step is required in advance, which is labor-intensive and time-consuming, and increases the additional cost of the production line.
因此，本發明之目的，即在提供一種在輸送過程可對晶圓盒充填氣體的載具。 Accordingly, it is an object of the present invention to provide a carrier that can fill a wafer cassette with a gas during transport.
於是，本發明可對晶圓盒充填氣體的載具，適用於一輸送軌，該晶圓盒包含一充氣口及一排氣口，該載具包含一輸送件、一輸送箱、至少一儲氣瓶，及一氣管單元。 Therefore, the present invention can be applied to a carrier for filling a wafer cassette, and is applicable to a conveying rail. The wafer cassette comprises an inflation port and an exhaust port, and the carrier comprises a conveying member, a conveying box and at least one storage. Gas cylinders, and an air tube unit.
該輸送件滑設於該輸送軌。 The conveying member is slidably disposed on the conveying rail.
該輸送箱包括一連接於該輸送件的本體，一由該本體界定且可供該晶圓盒設置的一容置空間、一連通外界及該容置空間且可供該晶圓盒通過的開口，及二設置於該本體並鄰近該開口且能擋止該晶圓盒的擋止臂，該等擋止臂可在一擋止位置及一非擋止位置間移動，在該擋止位置時，該等擋止臂凸伸於該開口以擋止該晶圓盒，在該非擋止位置時，該等擋止臂未凸伸於該開口，以讓該晶圓盒能通過該開口。 The transport box includes a body connected to the transport member, an accommodating space defined by the body and disposed in the pod, an opening connecting the outside and the accommodating space and allowing the cassette to pass through And two disposed on the body and adjacent to the opening and capable of blocking the stop arm of the wafer cassette, the stop arm being movable between a stop position and a non-stop position, in the stop position The stop arms protrude from the opening to block the wafer cassette. In the non-stop position, the stop arms do not protrude from the opening to allow the wafer cassette to pass through the opening.
該儲氣瓶設置於該箱體且可釋出氣體。 The gas cylinder is disposed in the tank and can release gas.
該氣管單元包括一連通該儲氣瓶及晶圓盒的進氣管，該進氣管具有一對應該充氣口的進氣口。 The air pipe unit includes an intake pipe that communicates with the gas cylinder and the wafer cassette, and the air intake pipe has a pair of air inlets that should be inflated.
本發明之功效在於：藉由該氣管單元的設置，就能夠在運送該晶圓盒時一邊填充氣體，不需要先填充再行輸送，而能夠節省產線運作的時間，達到降低成本的目的。 The utility model has the advantages that the air tube unit can be filled with gas when the wafer cassette is transported, and the filling can be carried out without first filling, and the time for the production line operation can be saved, thereby reducing the cost.
2‧‧‧晶圓盒 2‧‧‧wafer box
21‧‧‧充氣口 21‧‧‧Inflatable mouth
22‧‧‧排氣口 22‧‧‧Exhaust port
3‧‧‧輸送件 3‧‧‧Transport
4‧‧‧輸送箱 4‧‧‧Transport box
41‧‧‧本體 41‧‧‧Ontology
42‧‧‧容置空間 42‧‧‧ accommodating space
43‧‧‧開口 43‧‧‧ openings
44‧‧‧擋止臂 44‧‧‧stop arm
441‧‧‧第一擋止臂 441‧‧‧First stop arm
442‧‧‧第二擋止臂 442‧‧‧second stop arm
45‧‧‧旋轉芯 45‧‧‧Rotating core
46‧‧‧升降器 46‧‧‧ Lifter
5‧‧‧儲氣瓶 5‧‧‧ gas cylinder
6‧‧‧氣管單元 6‧‧‧ tracheal unit
61‧‧‧進氣管 61‧‧‧Intake pipe
611‧‧‧進氣口 611‧‧‧air inlet
612‧‧‧第一閥件段 612‧‧‧First valve section
613‧‧‧第一擋止段 613‧‧‧First stop
62‧‧‧出氣管 62‧‧‧Exhaust pipe
621‧‧‧出氣口 621‧‧‧ outlet
622‧‧‧第二閥件段 622‧‧‧Second valve section
623‧‧‧第二擋止段 623‧‧‧second stop
63‧‧‧軟墊 63‧‧‧A cushion
7‧‧‧氣體閥 7‧‧‧ gas valve
8‧‧‧控制模組 8‧‧‧Control module
81‧‧‧中央處理器 81‧‧‧Central processor
本發明之其他的特徵及功效，將於參照圖式的實施方式中清楚地呈現，其中：圖1是一立體分解圖，說明習知的一種晶圓盒； 圖2是一側視示意圖，說明本發明可對晶圓盒充填氣體的載具的一實施例；圖3是一底視示意圖，說明該實施例的二擋止臂位於一擋止位置；圖4是一類似圖3的視圖，說明該實施例的該等擋止臂位於一非擋止位置；圖5是一局部放大圖，說明該實施例位於其中一擋止臂的軟墊與一晶圓盒相間隔；及圖6是一局部示意圖，說明該實施例的該等軟墊分別密合於該晶圓盒的一充氣口及一排氣口。 Other features and effects of the present invention will be apparent from the following description of the drawings, wherein: FIG. 1 is an exploded perspective view showing a conventional wafer cassette; 2 is a side elevational view showing an embodiment of a carrier capable of filling a wafer cassette with a gas; FIG. 3 is a bottom view showing the second stop arm of the embodiment in a blocking position; 4 is a view similar to FIG. 3, illustrating that the stop arms of the embodiment are in a non-blocking position; FIG. 5 is a partially enlarged view showing the pad and the crystal of one of the stop arms in the embodiment. The round boxes are spaced apart; and FIG. 6 is a partial schematic view showing that the cushions of the embodiment are respectively adhered to an inflation port and an exhaust port of the wafer cassette.
參閱圖2與圖3，本發明可對晶圓盒充氣的載具之一實施例，適用於一輸送軌(圖未示)，該晶圓盒2包含一充氣口21及一排氣口22，該載具包含一輸送件3、一輸送箱4、一儲氣瓶5、一氣管單元6、一氣體閥7、一控制模組8。 Referring to FIG. 2 and FIG. 3, an embodiment of the carrier for inflating the wafer cassette of the present invention is applicable to a transport rail (not shown), and the wafer cassette 2 includes an inflation port 21 and an exhaust port 22 The carrier comprises a conveying member 3, a conveying box 4, a gas cylinder 5, an air tube unit 6, a gas valve 7, and a control module 8.
該輸送件3滑設於該輸送軌，使得該輸送件3能沿該輸送軌朝下一條產線前進。 The conveying member 3 is slidably disposed on the conveying rail so that the conveying member 3 can advance along the conveying rail toward the next production line.
該輸送箱4包括一連接於該輸送件3的本體41、一由該本體41界定且可供該晶圓盒2設置的一容置空間42、一連通外界及該容置空間42的開口43、二設置於該本體41的左右兩側並鄰近該開口43的擋止臂44、二設置於該本體41並分別介於該本體41及各別的擋止臂44之間的旋轉芯45，及二設置於該本體41且能分別調整該等擋止臂 44高度的升降器46。 The transport box 4 includes a body 41 connected to the transport member 3, an accommodating space 42 defined by the body 41 and disposed in the pod 2, and an opening 43 connecting the outside and the accommodating space 42. And a blocking arm 44 disposed on the left and right sides of the main body 41 adjacent to the opening 43 and two rotating cores 45 disposed on the main body 41 and interposed between the main body 41 and the respective stopping arms 44, And two are disposed on the body 41 and can respectively adjust the stopping arms 44 height lifter 46.
該等擋止臂44可分別被該等旋轉芯45驅動在一擋止位置(見圖3)及一非擋止位置(見圖4)間移動，在該擋止位置時，該等擋止臂44凸伸於該開口，使得該晶圓盒2無法從該容置空間42內通過該開口43，在該非擋止位置時，該等擋止臂44未凸伸於該開口43，使得該晶圓盒2可通過該開口43。該等擋止臂44可被區分為一第一擋止臂441及一第二擋止臂442。 The stop arms 44 are respectively driven by the rotating core 45 to move between a stop position (see FIG. 3) and a non-stop position (see FIG. 4), and in the stop position, the stop positions The arm 44 protrudes from the opening, so that the wafer cassette 2 cannot pass through the opening 43 from the accommodating space 42. In the non-stop position, the stopping arms 44 do not protrude from the opening 43 so that the The wafer cassette 2 can pass through the opening 43. The stop arms 44 can be divided into a first stop arm 441 and a second stop arm 442.
該等升降器46可分別調整該等擋止臂44的高度，以靠近或遠離該晶圓盒2(見圖5及圖6)。 The lifters 46 can adjust the height of the stop arms 44 to approach or away from the wafer cassette 2 (see Figures 5 and 6).
該儲氣瓶5可移除地設置於該輸送箱4的本體41，且可對該晶圓盒2釋出保護氣體，並在氣體用完後重複填充氣體以供再次使用。在本實施例中是採用兩個儲氣瓶5，可以理解的是，僅使用一個儲氣瓶5也可達成本實施例的目的及功效。 The gas cylinder 5 is removably disposed in the body 41 of the transport box 4, and the protective gas can be released to the wafer cassette 2, and the gas is repeatedly filled for reuse after the gas is used up. In the present embodiment, two gas cylinders 5 are used. It will be understood that the use of only one gas cylinder 5 can also achieve the purpose and efficacy of the embodiment.
該氣管單元6包括一連通該等儲氣瓶5、該氣體閥7及該晶圓盒2的進氣管61、一連通該氣體閥7及該晶圓盒2的出氣管62、二分別介於該晶圓盒2與該進氣管61、該出氣管62之間的軟墊63。 The air pipe unit 6 includes an air intake pipe 61 that communicates with the gas cylinders 5, the gas valve 7 and the wafer cassette 2, an air outlet pipe 62 that communicates with the gas valve 7 and the wafer cassette 2, and two separate media. A cushion 63 between the wafer cassette 2 and the intake pipe 61 and the air outlet pipe 62.
該進氣管61具有一設置於該第一擋止臂441且可對應該晶圓盒2的充氣口21的進氣口611、一介於該氣體閥7及該第一擋止臂441之間的第一閥件段612，及一設置於該第一擋止臂441的第一擋止段613。 The air intake pipe 61 has an air inlet 611 disposed on the first stop arm 441 and corresponding to the air inlet 21 of the wafer cassette 2, and between the gas valve 7 and the first stop arm 441. The first valve member segment 612 and a first stop segment 613 disposed on the first stop arm 441.
該出氣管62具有一設置於該第二擋止臂442且 可對應該晶圓盒2的排氣口22的出氣口621、一介於該氣體閥7及該第二擋止臂442之間的第二閥件段622，及一設置於該第二擋止臂442的第二擋止段623。 The air outlet tube 62 has a second blocking arm 442 disposed thereon. An air outlet 621 corresponding to the exhaust port 22 of the wafer cassette 2, a second valve member segment 622 interposed between the gas valve 7 and the second stop arm 442, and a second stop member The second stop section 623 of the arm 442.
該控制模組8包括一能操作該等旋轉芯45、該等升降器46及該氣體閥7的中央處理器81、一能監控填充氣體流量的流量計(圖未示)及一能偵測該晶圓盒2內溼度的溼度計(圖未示)。 The control module 8 includes a central processing unit 81 capable of operating the rotating core 45, the lifters 46 and the gas valve 7, a flow meter (not shown) capable of monitoring the flow of the filling gas, and a detecting device A hygrometer (not shown) for humidity in the wafer cassette 2.
在本實施例中，該溼度計是用於量測該晶圓盒2內的狀況，以讓該中央處理器81判斷是否需要補充保護氣體，可以理解的是，若要讀取其它種類的參數，該控制模組8也可新增壓力計、溫度計或其它氣體參數的感測器，同樣能達成本實施例的目的及功效。 In this embodiment, the hygrometer is used to measure the condition in the wafer cassette 2, so that the central processing unit 81 determines whether it is necessary to supplement the shielding gas. It can be understood that other kinds of parameters are to be read. The control module 8 can also add a pressure gauge, a thermometer or other gas parameter sensor, and the purpose and effect of the embodiment can be achieved.
本實施例運送該晶圓盒的步驟如下： The steps of transporting the wafer cassette in this embodiment are as follows:
一、參閱圖4，藉由該中央處理器81的操作將該等擋止臂44移動至該非擋止位置。 1. Referring to FIG. 4, the stop arm 44 is moved to the non-blocking position by the operation of the central processing unit 81.
二、將該晶圓盒2從該開口43置入該容置空間42內。 2. The wafer cassette 2 is placed into the accommodating space 42 from the opening 43.
三、參閱圖3及圖5，將該等擋止臂44移動至該擋止位置，並使得該氣管單元6的該進氣口611及該出氣口621分別對應於該晶圓盒2的該充氣口21及該排氣口22。 3. Referring to FIG. 3 and FIG. 5, the stopping arm 44 is moved to the blocking position, and the air inlet 611 and the air outlet 621 of the air tube unit 6 respectively correspond to the wafer cassette 2. The inflation port 21 and the exhaust port 22.
四、參閱圖5及圖6，藉由該等升降器46升高該等擋止臂44並透過該等軟墊63的設置，使得該進氣口611密合該充氣口21，該出氣口621密合該排氣口22，使 氣體不會外洩。 4. Referring to FIG. 5 and FIG. 6, the lifters 46 raise the stop arms 44 and transmit the cushions 63 so that the air inlets 611 are in close contact with the air inlets 21, the air outlets. 621 is closely attached to the exhaust port 22, so that The gas will not leak.
五、參閱圖2及圖3，透過該等儲氣瓶5釋出的保護氣體，就能夠經由該氣管單元6的該進氣管61填充入該晶圓盒2內。 5. Referring to FIGS. 2 and 3, the shielding gas released through the gas cylinders 5 can be filled into the wafer cassette 2 via the gas inlet pipe 61 of the gas pipe unit 6.
六、藉由該氣體閥7的切換就能夠控制對該晶圓盒2的充氣及排氣狀態。 6. The state of inflation and exhaust of the wafer cassette 2 can be controlled by switching of the gas valve 7.
七、經由該輸送件3在該輸送軌滑移，而可將該晶圓盒2維持氣體保護的狀態下輸送至下一產線。 7. The transporting member 3 is slid on the transport rail, and the wafer cassette 2 can be transported to the next production line while maintaining gas protection.
八、透過前述的逆向操作就能夠把該晶圓盒2從該輸送箱4中卸下。 8. The wafer cassette 2 can be detached from the transport box 4 by the reverse operation described above.
如此就能在輸送晶圓盒2的過程一邊充氣，並且能隨時監控該晶圓盒2內的狀況，並適時補充氣體以維持氣體保護的環境，就能夠達到節省時間且能避免晶圓劣化的目的及功效。 In this way, the process of transporting the wafer cassette 2 can be inflated, and the condition in the wafer cassette 2 can be monitored at any time, and the gas can be replenished in time to maintain the gas protection environment, thereby saving time and avoiding wafer deterioration. Purpose and efficacy.
綜上所述，本發明可對晶圓盒充氣的載具，在晶圓盒的輸送過程能對晶圓盒持續充填氣體，防止晶圓質變，而且能節省充氣和運送的時間，故確實能達成本發明之目的。 In summary, the present invention can inflate the wafer cassette, and can continuously fill the wafer cassette during the process of transporting the wafer cassette to prevent wafer quality change, and can save time for inflation and transportation, so it can indeed The object of the invention is achieved.
惟以上所述者，僅為本發明之實施例而已，當不能以此限定本發明實施之範圍，即大凡依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾，皆仍屬本發明專利涵蓋之範圍內。 However, the above is only the embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications made by the patent application scope and the patent specification of the present invention are still It is within the scope of the patent of the present invention.
2‧‧‧晶圓盒 2‧‧‧wafer box
21‧‧‧充氣口 21‧‧‧Inflatable mouth
22‧‧‧排氣口 22‧‧‧Exhaust port
3‧‧‧輸送件 3‧‧‧Transport
4‧‧‧輸送箱 4‧‧‧Transport box
41‧‧‧本體 41‧‧‧Ontology
42‧‧‧容置空間 42‧‧‧ accommodating space
43‧‧‧開口 43‧‧‧ openings
44‧‧‧擋止臂 44‧‧‧stop arm
441‧‧‧第一擋止臂 441‧‧‧First stop arm
442‧‧‧第二擋止臂 442‧‧‧second stop arm
46‧‧‧升降器 46‧‧‧ Lifter
5‧‧‧儲氣瓶 5‧‧‧ gas cylinder
6‧‧‧氣管單元 6‧‧‧ tracheal unit
61‧‧‧進氣管 61‧‧‧Intake pipe
62‧‧‧出氣管 62‧‧‧Exhaust pipe
7‧‧‧氣體閥 7‧‧‧ gas valve
8‧‧‧控制模組 8‧‧‧Control module
81‧‧‧中央處理器 81‧‧‧Central processor
Claims (10)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104112895A TWI588070B (en) | 2015-04-22 | 2015-04-22 | The cassette can be filled with gas carrier |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104112895A TWI588070B (en) | 2015-04-22 | 2015-04-22 | The cassette can be filled with gas carrier |
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| Publication Number | Publication Date |
|---|---|
| TW201637966A TW201637966A (en) | 2016-11-01 |
| TWI588070B true TWI588070B (en) | 2017-06-21 |
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| TW104112895A TWI588070B (en) | 2015-04-22 | 2015-04-22 | The cassette can be filled with gas carrier |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM450053U (en) * | 2012-11-05 | 2013-04-01 | Santa Phoenix Technology Inc | Wafer carrier gas filling device with flow control |
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM450053U (en) * | 2012-11-05 | 2013-04-01 | Santa Phoenix Technology Inc | Wafer carrier gas filling device with flow control |
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| TW201637966A (en) | 2016-11-01 |
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