TWI587995B - Compact direct drive spindle - Google Patents
Compact direct drive spindle Download PDFInfo
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- TWI587995B TWI587995B TW101125100A TW101125100A TWI587995B TW I587995 B TWI587995 B TW I587995B TW 101125100 A TW101125100 A TW 101125100A TW 101125100 A TW101125100 A TW 101125100A TW I587995 B TWI587995 B TW I587995B
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Description
本例示性實施例是有關於機器人系統的驅動,特別是有關於機器人系統的主軸傳動。 This exemplary embodiment is related to the drive of the robotic system, and in particular to the spindle drive of the robotic system.
現有的真空機器人是使用磁性流體式或唇狀密封件來將馬達及編碼器與真空隔離開,或者在Brooks MAGNATRAN®產品中透過一障壁將馬達定子隔離開,但是將磁鐵轉子及編碼器直接設置於該真空環境內。在這二種情形中,馬達是設置在伸縮囊下方,並以軸桿將馬達連接至機器臂連桿上。 Existing vacuum robots use magnetic fluid or lip seals to isolate the motor and encoder from vacuum, or isolate the motor stator through a barrier in Brooks MAGNATRAN® products, but set the magnet rotor and encoder directly In this vacuum environment. In both cases, the motor is placed under the bellows and the motor is coupled to the robot arm link by a shaft.
採用一種將定子設置在固定的內柱上,並將轉子設置在定子外側的顛倒式驅動設計應該會有好處。 It would be advantageous to have an inverted drive design in which the stator is placed on a fixed inner column and the rotor is placed outside the stator.
下面的說明將配合所附圖式來解說前述本文所揭露之實施例的態樣及其它的特徵。 The following description will explain the aspects of the embodiments disclosed herein and other features in conjunction with the drawings.
第1圖是具有根據本文所揭露之實施例的特徵的基板處理裝置的示意圖。雖然下文中將配合圖式來說明本文所揭露之實施例的態樣,但可以理解的,本所揭露的這些實施例的態樣亦能以多種其它的型式來實施。另外,任何適當尺寸、形狀、或型式的元件或材料均可使用。再者,雖然文所揭露之實施例的態樣是針對真空機器人的背景來說 明,但應注意到文所揭露之實施例的態樣也包含任何一者使用驅動馬達的情形。 1 is a schematic illustration of a substrate processing apparatus having features in accordance with embodiments disclosed herein. Although the embodiments of the embodiments disclosed herein are described in conjunction with the drawings, it will be understood that aspects of the embodiments disclosed herein can be implemented in various other forms. In addition, any suitable size, shape, or type of component or material can be used. Furthermore, although the aspects of the embodiments disclosed herein are directed to the context of a vacuum robot It should be noted that the aspect of the embodiments disclosed herein also encompasses the use of any one of the drive motors.
第1圖中所示的基板處理裝置100是一結合根據本文所揭露之實施例態樣的特徵的代表性基板處理器具。在此例中,該處理裝置100是顯示成具有通用批量處理器具的架構。在其它態樣中,該器具可以具有所需的任何配置,例如該器具可建構成能對基板進行單一步驟處理作業,或具有如第2圖中所示之線性或直角座標式配置。在再另外的態樣中,此基板處理裝置可具有任何所需的型式,例如分類器、堆疊器、度量器具等。在該裝置100內處理的基板S可以是任何適當的基板,包括但不限於液晶顯示面板、太陽能面板、半導體晶圓,如200mm、300mm、450mm直徑的晶圓,或是任何其它所需直徑的基板,或是具有適合於由基板處理裝置100處理之任何適當形狀、大小、及厚度的任何其它型式的基板,例如一胚料基板,或是性質類似於基板的物品,例如某些尺寸或特定質量。 The substrate processing apparatus 100 shown in FIG. 1 is a representative substrate processing apparatus incorporating features in accordance with embodiments of the present disclosure. In this example, the processing device 100 is shown as having a general purpose batch processor. In other aspects, the appliance can have any configuration desired, such as the appliance can be constructed to perform a single step processing operation on the substrate, or have a linear or right angle coordinate configuration as shown in FIG. In still other aspects, the substrate processing apparatus can have any desired pattern, such as a classifier, stacker, metrology apparatus, and the like. The substrate S processed in the device 100 may be any suitable substrate including, but not limited to, a liquid crystal display panel, a solar panel, a semiconductor wafer, such as a 200 mm, 300 mm, 450 mm diameter wafer, or any other desired diameter. a substrate, or any other type of substrate having any suitable shape, size, and thickness suitable for processing by substrate processing apparatus 100, such as a blank substrate, or an article having properties similar to a substrate, such as certain dimensions or specificities quality.
在一態樣中,該裝置100基本上具有一前區段105,其可形成例如一迷你環境,以及一相鄰接的氣氛隔離或密封區段110,其可與外部環境隔離密封,以供維持一受控制的密封氣氛,其可以例如設置用來做為一真空室。在其它的態樣中,該密封氣氛區段可供保持一惰性氣體(例如N2)或任何其它環境密封及/受控制的氣氛。 In one aspect, the apparatus 100 basically has a front section 105 that can form, for example, a mini environment, and an adjacent atmosphere isolation or sealing section 110 that can be sealed from the external environment for A controlled sealed atmosphere is maintained which can be provided, for example, as a vacuum chamber. In other aspects, the seal portion for holding an atmosphere of inert gas (e.g. N 2) or any other atmosphere, environmental sealing and / controlled.
前區段105一般可以具有例如一個或多個基板固持匣盒115,以及一前端機器人120。前區段105也可具有例 如其它的工作站或區段,例如對準器162或緩衝區,設置於其內。區段110可以具有一個或多個處理模組125及一真空機械臂130。處理模組125可以是任何的型式,例如材料置放、蝕刻、烘烤、拋光、離子植入清潔等。可以理解的,每一模組相對於所需之參考座標系的位置,例如機器人參考座標系,可登錄於控制器170。另外,一個或多個該等模組可處理基板S,而該基板是透過設在基板上的一基板(未顯示)來定位於所需的方位上。基板在處理模組所需的方位亦可登錄於控制器170內。密封區段110亦可具有一個或多個中間腔室,稱為負載閘。第1圖中所示的該裝置100具有二個負載閘,即負載閘135及負載閘140。負載閘135、140係做為介面之用,可以讓基板S通行於前區段105與密封區段110之間而不會破壞密封區段110內所存在的任何環境密封氣氛的完整性。基板處理裝置100通常包括一控制器170,其可控制基板處理裝置100的作動。在一實施例中,控制器可以是一群集式控制架構的一部分,如西元2005年7月11日提出申請之美國專利申請案第11/178,615號中所描述者,該案的內容係透過引述而全部結合於本文內。控制器170具有一處理器173及一記憶體178。除了前面所提及的資訊以外,記憶體178可包括具有移動中基板偏心及失準偵測及更正用技術的程式。記憶體178可進一步包括處理參數,例如處理模組及該裝置之區段105、110的其它部位或工作站的溫度及/或壓力、被處理基板S的暫時性資訊及該等基板的 度量資訊、以及可應用該裝置及基板的這些臨時性數據來決定移動中基板偏心度的程式,例如演算法。 The front section 105 can generally have, for example, one or more substrate holding cassettes 115, and a front end robot 120. The front section 105 can also have an example Other workstations or sections, such as aligners 162 or buffers, are disposed therein. Section 110 can have one or more processing modules 125 and a vacuum robot arm 130. The processing module 125 can be of any type, such as material placement, etching, baking, polishing, ion implantation cleaning, and the like. It will be appreciated that the position of each module relative to the desired reference coordinate system, such as the robot reference coordinate system, may be registered with controller 170. In addition, one or more of the modules can process the substrate S, and the substrate is positioned in a desired orientation through a substrate (not shown) disposed on the substrate. The orientation of the substrate in the processing module can also be registered in the controller 170. The sealing section 110 can also have one or more intermediate chambers, referred to as load gates. The device 100 shown in Figure 1 has two load gates, a load gate 135 and a load gate 140. The load gates 135, 140 serve as interfaces for allowing the substrate S to pass between the front section 105 and the sealing section 110 without damaging the integrity of any environmentally sealed atmosphere present within the sealing section 110. The substrate processing apparatus 100 generally includes a controller 170 that can control the operation of the substrate processing apparatus 100. In an embodiment, the controller may be part of a clustered control architecture, as described in U.S. Patent Application Serial No. 11/178,615, filed on Jul. And all are incorporated herein. The controller 170 has a processor 173 and a memory 178. In addition to the information previously mentioned, the memory 178 can include programs with eccentricity and misalignment detection and correction techniques for moving substrates. The memory 178 can further include processing parameters such as temperature and/or pressure of the processing module and other portions of the device 105, 110 or workstation, temporary information of the substrate S being processed, and the substrate Metric information, and programs that can apply the temporary data of the device and the substrate to determine the eccentricity of the substrate during movement, such as an algorithm.
前端機器人120亦稱為ATM(氣氛)機器人,包括一驅動部150及一個或多個臂部155。至少有一臂部155裝設於驅動部150上。該至少一臂部155可耦接至一腕部160,其則耦接至一個或多個末端作用器165,用以固持一個或多個基板S。末端作用器165係可旋轉地耦接於腕部160。ATM機器人120可用以運送基板至前區段105內任何位置處。例如,ATM機器人120可以在基板固持匣盒115、負載閘135、以及負載閘140之間運送基板。ATM機器人120亦可將基板S運入及運離對準器162。驅動部150可接收來自控制器170的命令,並因應之而指示ATM機器人120的徑向、環周、直向、複合、以及其它的運動。 The front end robot 120, also referred to as an ATM (atmosphere) robot, includes a drive portion 150 and one or more arms 155. At least one arm 155 is mounted on the driving portion 150. The at least one arm portion 155 can be coupled to a wrist portion 160 that is coupled to one or more end effectors 165 for holding one or more substrates S. The end effector 165 is rotatably coupled to the wrist 160. The ATM robot 120 can be used to transport the substrate to any location within the front section 105. For example, the ATM robot 120 can transport the substrate between the substrate holding cassette 115, the load gate 135, and the load gate 140. The ATM robot 120 can also transport the substrate S into and out of the aligner 162. The drive portion 150 can receive commands from the controller 170 and, in response thereto, indicate radial, circumferential, straight, composite, and other motions of the ATM robot 120.
真空機械臂130可裝設於區段110的一中心腔室175內。控制器170可動作來循環開口180、185並協調真空機械臂130的運作,以將基板於處理模組125、負載閘135、及負載閘140之間運送。真空機械臂130可包括一驅動部190(將於下文中更詳細說明)及一個或多個末端作用器195。在其它的態樣中,ATM機器人120及真空機械臂130可以是任何適當型式的運送裝置,包括但不限於滑臂式機器人、SCARA(selectively compliant articulated robot arm,選擇性順從關節機器臂)式機器人、關節臂式機器人、蛙腿式裝置、或雙對稱式運送裝置。 Vacuum robot arm 130 can be mounted within a central chamber 175 of section 110. The controller 170 is operable to cycle the openings 180, 185 and coordinate the operation of the vacuum robot arm 130 to transport the substrate between the processing module 125, the load gate 135, and the load gate 140. The vacuum robot arm 130 can include a drive portion 190 (described in more detail below) and one or more end effectors 195. In other aspects, the ATM robot 120 and the vacuum robot arm 130 can be any suitable type of transport device, including but not limited to a sliding arm robot, SCARA (selectively compliant articulated robot arm) robot. , articulated arm robot, frog leg device, or dual symmetrical transport device.
參閱第2圖,其中顯示出另一種結合根據本文所揭露之實施例態樣所具有之特徵的基板處理裝置10的示意平面圖。基板處理裝置10是顯示成具有線性或直角座標式配置,其中基板S係透過一長形輸送腔室於輸送機器人之間傳送。基板處理系統或器具10基本上具有一處理區段13及一界面區段12。該器具10的界面及處理區段互相連接在一起,並可供工件運送於其間。該器具的處理區段13具有處理模組或腔室,基本類似於前面針對第1圖所描述者。該等處理模組是由一工件運送腔室16聯結,可供依據處理協議將工件於該腔室內運送於所需的處理模組之間。該運送腔室具有一運送機器人20,能夠將工件於其內移動並移動至處理模組125。處理模組125及該運送腔室係能做氣氛隔離開,因此它們能夠維持一與外部氣氛做環境密封隔離的受控制氣氛,以將運送腔室內的氣氛保持與處理模組相同,或是適合於工件以一種大致上類似於前面針對第1圖所描述的方式在處理模組之間移轉。該器具的界面區段12在該器具之處理區段13及其受控密封氣氛與器具外部間提供工件的載入/載出界面。適當的環境界面區段的例子可見西元2005年7月11日提出申請之美國專利申請案第11/178,836號,其內容係透過引用而全文結合於本文內。因此該器具界面區段可供在該器具由載具運送的工件自載具卸下而載入該器具內,或是反向作動。該運送腔室可由多個運送腔室模組所組成,其等可以首尾相連而形成例如線性的長形運送腔室。因此,該運送腔室的長 度可透過增加或移除運送腔室模組而改變。該等運送腔室模組可具有能將所需運送腔室模組與運送腔室中相鄰部位隔離開的入口/出口閘閥。類似於區段12的器具界面區段則可沿著該線性長形運送腔室設置於任何所需位置處,以供讓工件在該器具中所需位置處載入或載出。處理模組可沿著運送腔室長度排列配置。處理模組可沿著與腔室長度呈一角度的方式疊置。該等運送腔室模組可具有入口/出口閘閥,以將所需的運送腔室模組與處理模組隔離開。運送系統20是設置穿過運送腔室。多個運送腔室模組每一者均具有一體式的可動臂具,具有裝設於該模組的固定界定/安裝座,以及可移動的末端作用器,可固持並沿著運送腔室及在運送腔室與處理模組之間線性地移動工件。不同運送腔室模組內的運臂部可互相合作,以構成該線性配置式運送系統的至少一部分。運送系統、處理模組、處理區段、界面區段、以該器具的任何其它部位可由控制器400來控制,其係大致上類似於前面所述之控制器170。其內的運送腔室及運送系統係設置成可在運送腔室內界定多道工件行進通道。該等行進通道在運送腔室內可以是共用或專用的,以供前送或退回工件。運送腔室亦可具有中間負載閘,以便詀運送腔室內的不同區段能維持不同的氣氛,並讓工件能在運送腔室內的不同氣氛區段之間運輸。運送腔室可具有入口/出口工站,其中工件可自運送腔室中所需位置處***/取出。例如,入口/出口工站可設置在與界面區段12相對的一側末端或運送腔室中其它所需 的位置處。運送腔室的入口出口工站可透過一遠端器具界面區段12與聯結至運送腔室入口/出口工站的工件快速運輸通道相連通。該快速運輸通道可相對於運送腔室16獨立並可隔離開。該快速運輸通道係連通於一個或多個界面區段12,以便讓工件在界面區段與運輸通道之間運送。工件可透過該快速運輸通道快速地放置於該器具的前方區段內,並在處理後返回界面區段12,而不會影響到該運送腔室,並能減少在製品(WIP,work in process)。該運送腔室亦可具有中間的入口/出口工站,其中多個係與該快速運輸通道連通,故工件可在其間運送。這可使得工件可在製程中所需的部位處***或取出,而不會影響到製程流,如西元2006年5月26日提出申請之美國專利申請案第11/442,511號,其內容係透過引述而全文結合於本文內。 Referring to Figure 2, there is shown a schematic plan view of another substrate processing apparatus 10 incorporating features in accordance with embodiments of the embodiments disclosed herein. The substrate processing apparatus 10 is shown as having a linear or right angle coordinate configuration in which the substrate S is transported between the transport robots through an elongate transport chamber. The substrate processing system or appliance 10 basically has a processing section 13 and an interface section 12. The interface and processing section of the appliance 10 are interconnected and the workpiece is transported therebetween. The treatment section 13 of the appliance has a processing module or chamber substantially similar to that described above with respect to Figure 1. The processing modules are coupled by a workpiece transport chamber 16 for transporting workpieces within the chamber between the desired processing modules in accordance with a processing protocol. The transport chamber has a transport robot 20 that is capable of moving and moving the workpiece into the processing module 125. The processing module 125 and the transport chamber can be isolated from each other, so that they can maintain a controlled atmosphere that is sealed from the outside atmosphere to keep the atmosphere in the transport chamber the same as the processing module, or The workpiece is transferred between processing modules in a manner substantially similar to that described above for FIG. The interface section 12 of the appliance provides a loading/unloading interface for the workpiece between the processing section 13 of the appliance and its controlled sealing atmosphere and the exterior of the appliance. An example of a suitable environmental interface section can be found in U.S. Patent Application Serial No. 11/178,836, filed on Jan. 2011. Thus, the appliance interface section is adapted to be loaded into the appliance by the workpiece transported by the carrier from the carrier, or to be reversely actuated. The transport chamber may be comprised of a plurality of transport chamber modules that may be connected end to end to form, for example, a linear elongated transport chamber. Therefore, the length of the transport chamber The degree can be changed by adding or removing the transport chamber module. The transport chamber modules can have inlet/outlet gate valves that isolate the desired transport chamber module from adjacent locations in the transport chamber. An appliance interface section similar to section 12 can then be placed at any desired location along the linear elongate transport chamber for loading or unloading the workpiece at a desired location in the appliance. The processing modules can be arranged along the length of the transport chamber. The processing module can be stacked at an angle to the length of the chamber. The shipping chamber modules can have inlet/outlet gate valves to isolate the desired shipping chamber module from the processing module. The transport system 20 is disposed through the transport chamber. Each of the plurality of transport chamber modules has an integral movable arm with a fixed delimiter/mount mounted to the module and a movable end effector that can be retained and carried along the transport chamber and The workpiece is moved linearly between the transport chamber and the processing module. The arm portions within the different transport chamber modules can cooperate with each other to form at least a portion of the linear configuration transport system. The transport system, processing module, processing section, interface section, and any other portion of the appliance can be controlled by controller 400, which is generally similar to controller 170 previously described. The transport chamber and transport system therein are configured to define a plurality of workpiece travel passages within the transport chamber. The travel passages may be shared or dedicated within the transport chamber for forward or return to the workpiece. The transport chamber can also have an intermediate load gate so that different sections within the transport chamber can maintain different atmospheres and allow the workpiece to be transported between different atmosphere sections within the transport chamber. The transport chamber can have an inlet/outlet station where the workpiece can be inserted/removed from a desired location in the transport chamber. For example, the inlet/outlet station can be placed at the end opposite the interface section 12 or other desired in the transport chamber The location. The inlet and outlet station of the transport chamber can be in communication with a workpiece rapid transport path coupled to the transport chamber inlet/outlet station via a distal appliance interface section 12. The fast transport lane can be independent and separable relative to the transport chamber 16. The fast transit lane is in communication with one or more interface sections 12 for transporting the workpiece between the interface section and the transport lane. The workpiece can be quickly placed in the front section of the appliance through the rapid transport path and returned to the interface section 12 after processing without affecting the transport chamber and reducing work in process (WIP, work in process) ). The transport chamber can also have an intermediate inlet/outlet station in which a plurality of lines are in communication with the fast transport path so that the workpiece can be transported therebetween. This allows the workpiece to be inserted or removed at a desired location in the process without affecting the process flow, as disclosed in U.S. Patent Application Serial No. 11/442,511, filed on May 26, 2006. The full text is incorporated herein by reference.
界面區段12係直接配接於(如第1圖中所示),而沒有任何中介的負載閘。在其它的態樣中,則可在界面區段12與運送腔室之間設置一負載閘。第2圖中所示的界面區段具有一工件運送器15,用以將工件自配接於裝載埠LP的匣盒115內移動至運送腔室16。該運送器15係設在界面區段腔室14內,係大致上類似於前面所述的運送器150。該界面區段亦可包括工件工站A,例如對準器工站、緩衝工站、度量工站、以及任何其它工件S所需之處理工站。 The interface section 12 is directly mated (as shown in Figure 1) without any intermediate load gates. In other aspects, a load lock can be placed between the interface section 12 and the transport chamber. The interface section shown in FIG. 2 has a workpiece transporter 15 for moving the workpiece from the cassette 115 that is mated to the load cassette LP to the transport chamber 16. The carrier 15 is disposed within the interface section chamber 14 and is generally similar to the carrier 150 previously described. The interface section may also include a workpiece station A, such as an aligner station, a buffer station, a metrology station, and any other processing stations required for the workpiece S.
雖然所揭露之實施例的某些態樣將在一文內配合真空 機器人或運送器來說明,例如第3圖中運送器800,但應瞭解到,所揭露之實施例亦可應用於任何適當的運送器或可在任何適當環境內運作的其它處理裝置(例如對準器等等),該等環境包括但不限於氣氛環境、受控氣氛環境、及/或真空環境。在一態樣中,運送器800可具有例如多個可獨立移動的末端作用器,以供獨立地移動多個工件。第3圖中所示的運送器800係顯示為例如一種多關節連桿臂部,其在例如旋轉、伸出/縮回及/或升降(例如Z軸運動)上可以具有任何適當數量的自由度。其亦應瞭解到,該等具有這些例示性實施例之態樣的運送器可以具有任何適當的架構,包括但不限於滑臂式機器人架構、“蛙腿式”架構機器臂、機器人的SCARA臂架構、關節臂機器人、或雙對稱式運送裝置。可供這些例示性實施例之驅動系統應用的機器臂的適當例子可參見美國專利第4,666,366號、第4,730,976號、第4,909,701號、第5,431,529號、第5,577,879號、第5,720,590號、第5,899,658號、第5,180,276號、第5,647,724號、以及西元2005年6月9日提出申請之美國專利申請案第11/148,871號、西元2008年5月8日提出申請之美國專利申請案第12/117,415號、西元2007年4月6日提出申請之美國專利申請案第11/697,390號、西元2005年7月11日提出申請之美國專利申請案第11/179,762號、西元2011年11月10日提出申請之美國專利申請案第13/293,717號、以及西元2012年3月12日提出申請之美 國專利申請案第13/417,837號,其等的內容係透過引述而全文結合於本文內。 Although certain aspects of the disclosed embodiments will cooperate with vacuum in one article The robot or carrier is illustrated, for example, in the carrier 800 of Figure 3, but it should be understood that the disclosed embodiments are also applicable to any suitable carrier or other processing device that can operate in any suitable environment (e.g., The environment, including but not limited to an atmospheric environment, a controlled atmosphere environment, and/or a vacuum environment. In one aspect, the carrier 800 can have, for example, a plurality of independently movable end effectors for independently moving a plurality of workpieces. The carrier 800 shown in Figure 3 is shown, for example, as a multi-joint link arm that can have any suitable number of freedoms, for example, for rotation, extension/retraction, and/or lifting (e.g., Z-axis motion). degree. It should also be appreciated that the carrier having the aspects of these exemplary embodiments can have any suitable architecture including, but not limited to, a sliding arm robot architecture, a "frog leg" architecture robotic arm, and a SCARA arm of the robot. Architecture, articulated arm robot, or dual symmetrical transport. A suitable example of a robotic arm that can be used in the drive system of these exemplary embodiments can be found in U.S. Patent Nos. 4,666,366, 4,730,976, 4,909,701, 5,431,529, 5,577,879, 5,720,590, 5,899,658, U.S. Patent Application Serial No. 11/148,871, filed on Jun. 9, 2005, and U.S. Patent Application Serial No. 12/117,415, filed on May 8, 2008. U.S. Patent Application Serial No. 11/697,390, filed on Apr. 6, 2005, U.S. Patent Application Serial No. 11/179,762, filed on July 11, 2005, and U.S. Patent Application No. Application Nos. 13/293, 717, and the beauty of the application filed on March 12, 2012 The contents of the patent application No. 13/417,837, the contents of which are incorporated herein by reference in its entirety.
現在參閱第3圖及第4A圖至第4D圖,接下來將根據本文所揭露之態樣來詳細地說明具有本文所揭露實施例之態樣的例示性基板運送裝置800。可以注意到,雖然第3圖及第4A圖至第4D圖中僅顯示出單一根SCARA臂,但本文所揭露之實施例的態樣可以結合於任何適當型式的機器臂,例如前面所述具有任何適當數量機器臂者。在此態樣中,該基板運送裝置包括一框架840、一上臂810、一前臂820、以及至少一末端作用器830。一驅動部1600可至少部分地設置於上臂810內,並且包括至少一驅動馬達1602A、1602B。在此係顯示出二個馬達1602A、1602B做為所設置之疊置驅動馬達,以供例示之用,因此每一驅動馬達1602A、1602B的定子1603A、1603B至少有一部分是位在臂連桿810(例如每一驅動馬達的定子的至少一部分是位在同一臂連桿、或共用臂連桿、或單一臂連桿、或一臂連桿)。該等至少一驅動馬達1602A、1602B的每一者均包括一定子1603A、1603B及一轉子1604A、1604B。定子1603A、1603B可包括定子繞組,其係纏繞於固定在框架上的一固定柱1610上,因此柱1610及定子1603A、1603B會相對於機器臂連桿810、820、830在旋轉上保持固定不動。轉子1604A、1604B可建構成使得該轉子圍繞著各自之定子(例如倒置式驅動馬達),構成一無軸桿馬達,其可提供小型化的設計及較習用軸桿式驅動 裝置為高的扭矩。應注意到,“無軸桿”(shaftless)一詞是指在轉子與由該轉子驅動的構件之間實質上沒有延伸出的構件,其中轉子的高度是大致上等於或小於定子的高度。該定子及轉子可具有一些特性,例如美國專利第7,834,618號及西元2008年6月27日提出申請之美國專利申請案第12/163,993號及西元2008年6月27日提出申請之美國專利申請案第12/163,996號中所描述者,其等係透過引述而全文結合於本文內。 Referring now to Figures 3 and 4A through 4D, an exemplary substrate transport apparatus 800 having aspects of the embodiments disclosed herein will now be described in detail in accordance with the aspects disclosed herein. It may be noted that although only a single root SCARA arm is shown in Figures 3 and 4A through 4D, the aspects of the embodiments disclosed herein may be combined with any suitable type of robotic arm, such as previously described. Any suitable number of robotic arms. In this aspect, the substrate transport device includes a frame 840, an upper arm 810, a forearm 820, and at least one end effector 830. A drive portion 1600 can be at least partially disposed within the upper arm 810 and includes at least one drive motor 1602A, 1602B. Here, two motors 1602A, 1602B are shown as the stacked drive motors provided for illustrative purposes, so that at least a portion of the stators 1603A, 1603B of each of the drive motors 1602A, 1602B are located in the arm link 810. (For example, at least a portion of the stator of each drive motor is located in the same arm link, or a shared arm link, or a single arm link, or an arm link). Each of the at least one drive motors 1602A, 1602B includes a stator 1603A, 1603B and a rotor 1604A, 1604B. The stators 1603A, 1603B may include stator windings that are wound around a fixed post 1610 that is secured to the frame such that the post 1610 and the stators 1603A, 1603B remain stationary relative to the robot arm links 810, 820, 830. . The rotors 1604A, 1604B can be constructed such that the rotor surrounds a respective stator (eg, an inverted drive motor) to form a shaftless motor that provides a compact design and a conventional shaft drive The device is high in torque. It should be noted that the term "shaftless" refers to a member that does not substantially extend between the rotor and the member driven by the rotor, wherein the height of the rotor is substantially equal to or less than the height of the stator. The stator and the rotor may have some characteristics, such as U.S. Patent No. 7,834,618, and U.S. Patent Application Serial No. 12/163,993, filed on Jun. 27, 2008 The descriptions of those described in the '12, 163, 996 are incorporated herein by reference in their entirety.
在此態樣中,該二驅動馬達1602A、1602B是互相疊置在一起。驅動馬達1602A、1602B係可互相疊置在一起,以使其能輕易使用多個馬達來提供任何適當數量的自由度,以驅動任何適當數量的臂連桿。在其它的態樣中,可將任何適當數量的驅動馬達(亦即至少一個或多個)應用於具有任何數量之適當驅動裝置的任何適當架構內,例如但不限於疊置式倒置驅動架構、或直列式倒置驅動架構、或任何其它適當的架構。在此,驅動馬達1603A的轉子1604A是以無軸桿方式耦接至臂連桿810上,因此當轉子1604A旋轉時,臂連桿810會隨之旋轉。例如,轉子1604A可以任何適當的方式裝設於臂連桿810的下方表面。馬達1603B的轉子1604B可包括(無論是與之一體成型或是耦接至其上)一滑輪1605。該滑輪可透過任何適當的傳動構件1605X耦接至一肘滑輪1620。在一態樣中,傳動構件1605X可以是皮帶、條帶、線纜、或任何其它適當的傳動構件。肘滑輪1620是以任何適當的方式適當地 連接至前臂820上,因此當轉子1604B旋轉時,其會使前臂820繞著一肘旋轉軸線EX旋轉。 In this aspect, the two drive motors 1602A, 1602B are stacked one on another. Drive motors 1602A, 1602B can be stacked one on another to enable easy use of multiple motors to provide any suitable number of degrees of freedom to drive any suitable number of arm links. In other aspects, any suitable number of drive motors (ie, at least one or more) can be applied to any suitable architecture having any number of suitable drives, such as, but not limited to, a stacked inverted drive architecture, or Inline inverted drive architecture, or any other suitable architecture. Here, the rotor 1604A of the drive motor 1603A is coupled to the arm link 810 in a shaftless manner, so that when the rotor 1604A rotates, the arm link 810 rotates therewith. For example, the rotor 1604A can be mounted to the underlying surface of the arm link 810 in any suitable manner. The rotor 1604B of the motor 1603B can include a pulley 1605 (either integrally formed or coupled thereto). The pulley can be coupled to an elbow pulley 1620 via any suitable transmission member 1605X. In one aspect, transmission member 1605X can be a belt, strap, cable, or any other suitable transmission member. The elbow pulley 1620 is suitably in any suitable manner Attached to the forearm 820, it causes the forearm 820 to rotate about an elbow axis of rotation EX as the rotor 1604B rotates.
亦參閱第10圖及第11圖,該等倒置式驅動裝置1602A、1602B可包括任何適當的感測器,用以追蹤轉子1604A、1604B的旋轉。在一態樣中,可將任何適當的編碼器1640A、1640B設置在適當的位置處,以供感測各自之轉子1604A、1604B的旋轉。在一態樣中,編碼器1640A、1640B是直接介接於各自之轉子1604A、1604B(例如感測器尺規是整合於轉子內),其中編碼器1640A、1640B是固定不動地設置或垂掛於固定柱1610上,以使得編碼器之感測器系統5500與尺規(或鐵磁性標靶)5555的界面平面是相對於定子1603A、1603B與轉子1604A、1604B之界面平面成一角度設置,因此感測器系統5500可實質上設置於定子1603A、1603B的高度內。僅就舉例而言,感測器系統1500與鐵磁性標靶5555間的界面平面IPSS是顯示成大致上正交於定子1603A、1603B與轉子1604A、1604B間的界面平面IPSR。轉子1604A、1604B可包括任何適當的尺規或鐵磁性標靶5555,例如可供編碼器1640A、1640B之感測器系統5500偵測來做位置測量用的增量尺規1640IN(第4C圖)或絕對尺規1640AB(第4C圖)。 Referring also to Figures 10 and 11, the inverted drive devices 1602A, 1602B can include any suitable sensors for tracking the rotation of the rotors 1604A, 1604B. In one aspect, any suitable encoder 1640A, 1640B can be placed at an appropriate location for sensing the rotation of the respective rotor 1604A, 1604B. In one aspect, the encoders 1640A, 1640B are directly interfaced to the respective rotors 1604A, 1604B (eg, the sensor ruler is integrated into the rotor), wherein the encoders 1640A, 1640B are fixedly mounted or suspended The column 1610 is fixed such that the interface plane of the sensor system 5500 and the ruler (or ferromagnetic target) 5555 of the encoder is disposed at an angle with respect to the interface plane of the stators 1603A, 1603B and the rotors 1604A, 1604B, and thus The detector system 5500 can be disposed substantially within the height of the stators 1603A, 1603B. By way of example only, the interface plane IPSS between the sensor system 1500 and the ferromagnetic target 5555 is shown to be substantially orthogonal to the interface plane IPSR between the stators 1603A, 1603B and the rotors 1604A, 1604B. The rotors 1604A, 1604B can include any suitable ruler or ferromagnetic target 5555, such as an incremental ruler 1640IN that can be used by the sensor system 5500 of the encoders 1640A, 1640B for position measurement (Fig. 4C) Or absolute ruler 1640AB (Fig. 4C).
第10圖顯示出適合配合本文中所揭露之實施例的態樣使用的例示性感測器系統5500。感測器系統5500可以利用任何適當的磁路原理,例如美國專利第7,834,618號 (其內容係透過引述而全文結合於本文內)中所描述者,來讀取增量或絕對位置尺規及/或是自鐵磁性標靶5555至例如感測器系統的參考座標系的距離。鐵磁性標靶5555可具有平直或彎曲表面,或具有任何可附著、埋設、或以其它方式結合於例如前面所討論之尺規之類的該標靶內的適當輪廓。感測器系統5500可包括一鐵磁性元件5505、一磁源5510,例如一永久磁鐵、多個磁性感測器5515、5520、5525、5530、以及調節電路5535。鐵磁性元件5505可外切於磁源5510。在其它的態樣中,鐵磁性元件5505可圍繞著或包覆磁源5510。在至少一例示性實施例中,鐵磁性元件5505可具有杯子的形狀,具有一封閉末端5565及一開放末端5570。磁源5510可具有圓柱狀的形狀,其中磁化方向是平行於鐵磁性元件5505的對稱軸線。磁源5510可以是永久磁鐵、電磁鐵、或是任何適當的磁能來源。磁源5510可由吸力附著於鐵磁性元件內位在鐵磁性元件5505的中心,並可透過使用適當的緊固件固定在定位上,例如黏著劑。在一態樣中,感測器系統5500的設置方位是讓杯子的開放面5570面向著鐵磁性標靶5555。 FIG. 10 shows an exemplary sensor system 5500 suitable for use with the aspects of the embodiments disclosed herein. The sensor system 5500 can utilize any suitable magnetic circuit principle, such as U.S. Patent No. 7,834,618. The content of the incremental or absolute position ruler and/or the distance from the ferromagnetic target 5555 to the reference coordinate system of the sensor system, for example, is described in the text, which is incorporated by reference in its entirety. . The ferromagnetic target 5555 can have a flat or curved surface, or have any suitable contour that can be attached, embedded, or otherwise bonded within the target, such as the ruler discussed above. The sensor system 5500 can include a ferromagnetic element 5505, a magnetic source 5510, such as a permanent magnet, a plurality of magnetic sensors 5515, 5520, 5525, 5530, and an adjustment circuit 5535. The ferromagnetic element 5505 can be circumscribed to the magnetic source 5510. In other aspects, ferromagnetic element 5505 can surround or encase magnetic source 5510. In at least one exemplary embodiment, ferromagnetic element 5505 can have the shape of a cup having a closed end 5565 and an open end 5570. The magnetic source 5510 may have a cylindrical shape in which the magnetization direction is parallel to the axis of symmetry of the ferromagnetic element 5505. Magnetic source 5510 can be a permanent magnet, an electromagnet, or any suitable source of magnetic energy. The magnetic source 5510 can be attached to the ferromagnetic element by suction in the center of the ferromagnetic element 5505 and can be fixed in position by using a suitable fastener, such as an adhesive. In one aspect, the sensor system 5500 is positioned such that the open face 5570 of the cup faces the ferromagnetic target 5555.
第10圖中所示的感測器系統1500可在鐵磁性元件5505與磁源5510之間形成一磁路,使得通量密度能相對於該杯子的軸線或是磁源5510與鐵磁性元件5505之間的任何同心周邊呈對稱狀。鐵磁性元件5505的形狀會影響到磁場的形狀。在鐵磁性元件1505是杯子形狀的態樣 中,磁場是相當受到限制的,會使得對於至鐵磁性標靶之距離5560的變化的靈敏度增加。鐵磁性元件5505的形狀可修剪成為能產生特定形成的磁場。在某些態樣中,鐵磁性元件5505亦可成形為能對感測器系統5500與鐵磁性標靶5555間距離的變化提供特定的靈敏度。 The sensor system 1500 shown in FIG. 10 can form a magnetic circuit between the ferromagnetic element 5505 and the magnetic source 5510 such that the flux density can be relative to the axis of the cup or the magnetic source 5510 and the ferromagnetic element 5505 Any concentric perimeter between them is symmetrical. The shape of the ferromagnetic element 5505 affects the shape of the magnetic field. In the ferromagnetic element 1505 is a cup shape In this case, the magnetic field is quite limited, which increases the sensitivity to changes in the distance 5560 to the ferromagnetic target. The shape of the ferromagnetic element 5505 can be trimmed to produce a specifically formed magnetic field. In some aspects, the ferromagnetic element 5505 can also be shaped to provide a particular sensitivity to changes in the distance between the sensor system 5500 and the ferromagnetic target 5555.
磁性感測器5515、5520、5525、5530係可運作來感測通量密度,並係設置於一種距離鐵磁性元件5505對稱軸線一段固定徑向距離處的軌道上。該等磁性感測器亦可設置成使其等的輸出約略相同。雖然圖中僅顯示出四個磁性感測器,但應理解,任何適當數量的磁性感測器均可使用。磁性感測器5515、5520、5525、5530的輸出信號可供應至任何適當的調節電路5535上。調節電路5535可包括用以處理感測器輸出信號的信號處理電路,以提供例如補償、濾波、雜訊消減、或任何其它適當的信號處理作業。感測器的輸出信號通常會被處理,以提供做為感測器系統的輸出5550。使用額外的感測器可以改善此系統的雜訊免疫力。鐵磁性元件5505亦可做為磁性感測器的磁隔離籠,以便將來自周圍環境的磁干擾減至最小。因此感測器系統5500係建構用來測量磁性感測器所偵測之磁通量密度向量的交變。在一態樣中,感測器系統5500是因設有鐵磁性標靶5555而得以測量磁通量密度向量的交變。 Magnetic sensors 5515, 5520, 5525, 5530 are operable to sense flux density and are disposed on a track at a fixed radial distance from the axis of symmetry of ferromagnetic element 5505. The magnetic sensors can also be arranged such that their outputs are approximately the same. Although only four magnetic sensors are shown in the figures, it should be understood that any suitable number of magnetic sensors can be used. The output signals of magnetic sensers 5515, 5520, 5525, 5530 can be supplied to any suitable conditioning circuit 5535. The conditioning circuit 5535 can include signal processing circuitry to process the sensor output signals to provide, for example, compensation, filtering, noise reduction, or any other suitable signal processing operation. The output signal of the sensor is typically processed to provide an output 5550 as a sensor system. The use of additional sensors can improve the noise immunity of this system. The ferromagnetic element 5505 can also be used as a magnetic isolation cage for the magnetic sensor to minimize magnetic interference from the surrounding environment. Therefore, the sensor system 5500 is constructed to measure the alternating of the magnetic flux density vectors detected by the magnetic sensor. In one aspect, the sensor system 5500 is capable of measuring the alternating magnetic flux density vectors by providing a ferromagnetic target 5555.
第11圖顯示出磁性感測器圍繞鐵磁性元件的例示性配置。在此態樣中,磁性感測器是成對設置5610及5615、5620及5625、5630及5635、5640及5645,其方 向是相對於鐵磁性元件5505與磁源5510間之通量密度線呈交錯設置。在此態樣中,每一感測器對均可提供差動輸出信號。加總電路5650及差動調節電路5655構成調節電路5535的一部分,可以差動信號方式來提供感測器系統的輸出信號5550。使用差動輸出可以改善雜訊免疫力,特別是在信號具有低位準、處於不良電磁環中、或是行進一段相當之距離時。例如,以差動信號方式來提感測器系統輸出信號5550可在該輸出信號提供給讀取裝置5660時改善雜訊免疫力。 Figure 11 shows an exemplary configuration of a magnetic sensor surrounding a ferromagnetic element. In this aspect, the magnetic sensor is set in pairs 5610 and 5615, 5620 and 5625, 5630 and 5635, 5640 and 5645, The direction is staggered with respect to the flux density line between the ferromagnetic element 5505 and the magnetic source 5510. In this aspect, each sensor pair can provide a differential output signal. The summing circuit 5650 and the differential regulating circuit 5655 form part of the regulating circuit 5535, which can provide the output signal 5550 of the sensor system in a differential signal manner. The use of differential outputs can improve noise immunity, especially when the signal has a low level, is in a bad electromagnetic loop, or travels a considerable distance. For example, the sensor system output signal 5550 can be improved in a differential signal manner to improve noise immunity when the output signal is provided to the reading device 5660.
在其它的態樣中,磁性感測器並不一定要設置在距對稱軸線相等徑向距離處,因此它們的輸出並不一定是相等的,但能夠適當地處理以產生有效標靶距離。應理解到,任何數量的磁性感測器均可使用,以不成組或是任何適當數量集合成組或配置方式來使用。 In other aspects, the magnetic sensors do not have to be placed at equal radial distances from the axis of symmetry, so their outputs are not necessarily equal, but can be properly processed to produce an effective target distance. It should be understood that any number of magnetic sensors can be used, used in groups or configurations, either in groups or in any suitable number.
回到第10圖,鐵磁性標靶5555一旦設置在感測器系統5500的前方即會改變磁性感測器5515、5520、5525、5530所偵測到的磁通量密度向量,因此而會影響到輸出信號5550。標靶5555與感測器系統間的距離5560會決定感測器系統輸出信號5550的值。感測器系統輸出信號1550會因一個或多個附著於或整合於鐵磁性標靶5555上之尺規所導入之磁通量的變化而改變。 Returning to Fig. 10, once the ferromagnetic target 5555 is placed in front of the sensor system 5500, the magnetic flux density vector detected by the magnetic sensors 5515, 5520, 5525, 5530 is changed, thus affecting the output. Signal 5550. The distance 5560 between the target 5555 and the sensor system determines the value of the sensor system output signal 5550. The sensor system output signal 1550 will change due to changes in the magnetic flux introduced by one or more of the rulers attached to or integrated with the ferromagnetic target 5555.
磁源5510與鐵磁性元件5505的形狀可修改,以得到特定的通量密度型樣或形式,或是將感測器系統輸出信號5550或距離5560最佳化或另外改善之。例如,在某些實 施例中,鐵磁性元件5505及磁源1510中至少有一者的形狀是圓柱狀、圓錐狀、立方體或其它多面體、拋物線體、或任何其它適當的形狀。如前所述,任何數量的感測器均可使用。再者,感測器可具有任何適當的配置,以得到特定的通量密度型樣,或是將感測器系統輸出信號1550或距離1560最佳化。 The shape of magnetic source 5510 and ferromagnetic element 5505 can be modified to achieve a particular flux density pattern or form, or to optimize or otherwise improve sensor system output signal 5550 or distance 5560. For example, in some real In one embodiment, at least one of ferromagnetic element 5505 and magnetic source 1510 is cylindrical, conical, cubic or other polyhedron, parabolic body, or any other suitable shape. As mentioned earlier, any number of sensors can be used. Moreover, the sensor can have any suitable configuration to achieve a particular flux density pattern or to optimize the sensor system output signal 1550 or distance 1560.
感測器系統5500係可應用於本文中所揭露之實施例的態樣內,例如透過一可將標靶轉子或尺規與感測器系統隔離開的非鐵磁性材料壁部。感測器系統5500可應用於真空自動化系統的實施例內。感測器系統5500特別適合用於本文中所揭露之實施例的所有態樣中來測量磁通量、間、以及比例。 The sensor system 5500 can be utilized within the aspects of the embodiments disclosed herein, such as through a wall of non-ferromagnetic material that can isolate the target rotor or ruler from the sensor system. The sensor system 5500 can be applied within an embodiment of a vacuum automation system. The sensor system 5500 is particularly suitable for use in all aspects of the embodiments disclosed herein to measure magnetic flux, interproximal, and ratio.
再次參閱第3圖及第4A圖至第4D圖,可以理解的,在一態樣中,運送裝置800可包括一Z軸驅動裝置800Z,用以將機器臂沿著該臂之旋轉中心軸線X做線性移動。可設置一伸縮囊或其它適當的密封件1699來容納該至少一臂連桿與框架間的相對軸向運動(例如垂直、Z軸),其中該密封件是位在該臂的一側,而驅動馬達1602A、1602B(例如驅動部)則位在該臂的另一側。可以理解的,此種配置方式可以讓固定柱1610的長度與Z軸驅動裝置所提供之z軸行程的長度無關或解耦開。 Referring again to FIG. 3 and FIGS. 4A through 4D, it will be understood that in one aspect, the transport device 800 can include a Z-axis drive 800Z for positioning the robot arm along the central axis of rotation of the arm. Do linear movement. A bellows or other suitable seal 1699 can be provided to accommodate relative axial movement (e.g., vertical, Z-axis) between the at least one arm link and the frame, wherein the seal is on one side of the arm, and Drive motors 1602A, 1602B (eg, drive) are located on the other side of the arm. It will be appreciated that this configuration allows the length of the stud 1610 to be independent or decoupled from the length of the z-axis travel provided by the Z-axis drive.
參閱第4C圖及第4D圖來說明驅動部在臂810內的密封。可以看到的,定子1603A、1603B是與供機器臂以任何適當方式在其內操作的真空環境隔離開的。在一態樣 中,隔離可透過使用任何適當的障壁來達,例如障壁612。在其它的態樣中則可使用任何可將定子1603A、1603B隔離的適當手段。轉子1604A、1604B的磁鐵1604M可以任何適當的方式與真空隔離開。在一態樣中,磁性隔離可透過例如一磁性流體密封件1670來達成。在其它的態樣中,任何適當的磁隔離方式均可用來將轉子磁鐵與供機器臂於其內操作的真空環境隔離開。在再另外的實施例中,可變間隙磁阻馬達可用來消除磁鐵使用上的需求。第4D圖是用來密封供機器臂於其內操作之真空環境的密封件SL位置的例示性圖式。 The sealing of the drive portion in the arm 810 will be described with reference to FIGS. 4C and 4D. As can be seen, the stators 1603A, 1603B are isolated from a vacuum environment in which the robotic arm operates in any suitable manner. In a state The isolation can be achieved by using any suitable barrier, such as barrier 612. In other aspects, any suitable means of isolating the stators 1603A, 1603B can be used. The magnets 1604M of the rotors 1604A, 1604B can be isolated from the vacuum in any suitable manner. In one aspect, magnetic isolation can be achieved, for example, by a magnetic fluid seal 1670. In other aspects, any suitable magnetic isolation can be used to isolate the rotor magnet from the vacuum environment in which the robot arm operates. In still other embodiments, a variable gap reluctance motor can be used to eliminate the need for magnets. Figure 4D is an illustrative diagram for sealing the position of the seal SL for the vacuum environment in which the robot arm operates.
應注意到,本文中所揭露的驅動馬達可應用於任何適當的驅動系統,例如西元2008年7月7日提出申請之美國專利申請案第12/175,278號、西元2011年10月11日提出申請之第13/270,844號、以及西元2011年10月11日提出申請之第13/270,844號中所揭露者,其等的內容均係透過引述而全文結合於本文內。 It should be noted that the drive motor disclosed herein can be applied to any suitable drive system, such as U.S. Patent Application Serial No. 12/175,278, filed on July 7, 2008, and on October 11, 2011. The disclosures of the entire disclosure of the entire disclosure of the entire disclosure of the entire disclosure of the entire disclosure of
現在參閱第5A圖及第5B圖,在本文所揭露之實施例的另一態樣中,其揭露一例示性運送裝置1799的一部分。該例示性運送裝置大致上是類似於前面所描述的運送裝置800,其中該運送裝置包括例如一框架、至少一個或多個無軸桿驅動部、可提供沿著Z軸之運動的Z軸馬達、以及至少一個或多個機器臂。該至少一個或多個驅動部可裝設在該框架上,例如位在肩旋轉軸線X處的框架840,以供旋轉一機器臂的連桿來將臂伸出/縮回。該一個或多 個驅動部可進一步連接至一Z軸馬達/驅動系統,供讓機器臂在Z軸上沿著大致上垂直於臂之伸出/縮回軸線R(第3圖)的方向移動。第5A圖及第5B圖中所示之實施例的例示性態樣包括至少二驅動部1700A及1700B,並具有二機器臂1720A、1720B(其等可以大致上類似於第3圖中所描述的機器臂,其中該臂包括一上臂810、前臂820、以及至少一末端作用器830)。在其它的態樣中,運送裝置1799可包括多於或少於二個的機器臂及驅動部(例如運送裝置1799具有至少一機器臂及至少一驅動部)。在一態樣中,驅動部1700A、1700B是設置或分佈於或“層疊於”臂1720A、1720B,以使得一驅動部1700A大致上設置於臂1720A、1720B之間,而另一驅動部1700B則設置在一臂的另一側,例如位於臂1720B下方(或位於臂1720A上方)。在另一態樣中,驅動部1700A、1700B是至少部分地設置在各自的臂1720A、1720B內。在再另一態樣中,二驅動部1700A、1700B均設置於臂1720A、1720B之間,以使得驅動部1700A、1700B相互間具有鏡像或倒置式架構(例如驅動部1700A自臂1720A的底部連接至該臂,而驅動部1700B則自臂1720B的頂部連接至該臂)。在本文所揭露實施例的其它態樣中,其它的架構亦是可行的一例如只具有一驅動部及一機器臂的架構,或具有二個以上設有二個以上機器臂的驅動部,或具有多個設置在一機器臂之同一平面上之驅動部的直列式架構,或具有一個或多個Z軸驅動裝置之架 構,或是其等的任何組合。在再另一態樣中,任何適當架構的運送裝置均是可行的,只要將第5A圖及第5B圖中的驅動馬達結合於該運送裝置架構內。 Referring now to Figures 5A and 5B, in another aspect of the embodiments disclosed herein, a portion of an exemplary transport device 1799 is disclosed. The exemplary transport device is generally similar to the transport device 800 described above, wherein the transport device includes, for example, a frame, at least one or more shaftless drive portions, and a Z-axis motor that provides motion along the Z-axis. And at least one or more robot arms. The at least one or more drive portions can be mounted on the frame, such as a frame 840 at the shoulder axis of rotation X for rotating a linkage of a robotic arm to extend/retract the arms. One or more The drive portion can be further coupled to a Z-axis motor/drive system for moving the robot arm in a direction generally perpendicular to the arm extension/retraction axis R (Fig. 3) on the Z-axis. The illustrative aspects of the embodiment shown in Figures 5A and 5B include at least two drive portions 1700A and 1700B and have two robotic arms 1720A, 1720B (which may be substantially similar to those depicted in Figure 3). The robotic arm, wherein the arm includes an upper arm 810, a forearm 820, and at least one end effector 830). In other aspects, the transport device 1799 can include more or less than two robotic arms and drive portions (eg, the transport device 1799 has at least one robotic arm and at least one drive portion). In one aspect, the drive portions 1700A, 1700B are disposed or distributed or "laminated" to the arms 1720A, 1720B such that one drive portion 1700A is disposed generally between the arms 1720A, 1720B and the other drive portion 1700B is The other side of the arm is disposed, for example, under the arm 1720B (or above the arm 1720A). In another aspect, the drive portions 1700A, 1700B are at least partially disposed within the respective arms 1720A, 1720B. In still another aspect, the two driving portions 1700A, 1700B are disposed between the arms 1720A, 1720B such that the driving portions 1700A, 1700B have a mirror image or an inverted structure with each other (eg, the driving portion 1700A is connected from the bottom of the arm 1720A). To the arm, the drive portion 1700B is coupled to the arm from the top of the arm 1720B. In other aspects of the embodiments disclosed herein, other configurations are also possible, such as a structure having only one drive portion and one robot arm, or two or more drive portions having more than two robot arms, or An in-line architecture having a plurality of drive sections disposed on the same plane of a robotic arm, or a frame having one or more Z-axis drives Structure, or any combination of them. In still another aspect, any suitably constructed transport device is possible as long as the drive motors of Figures 5A and 5B are incorporated into the transport structure.
在此態樣中,一柱1701固定於框架840上。在本文所揭露之實施例的一態樣中,固定柱1701可以是多段式的(參見第5A圖中的1701A),例如具有耦接在一起的不同區段或部位。固定柱1701A的不同部位可以任何適當方式耦接在一起。在固定柱1701A的不同部位之間可以設置任何適當的密封件,例如密封件1710。在其它的態樣中,固定柱1701可具有一體單件式結構或任何其它適當的架構。該一個或多個機器臂1720A、1720B係以任何適當的方式可旋轉地裝設在固定柱1701上,例如如下文中所描述者。每一機器臂1720A、1720B可包括自身的驅動部,其包括一內轉子1705A、1705B、一定子1703A、1703B、以及一外轉子1704A、1704B。 In this aspect, a post 1701 is secured to the frame 840. In one aspect of the embodiments disclosed herein, the stud 1701 can be multi-segmented (see 1701A in Figure 5A), for example having different sections or locations that are coupled together. Different portions of the stud 1701A can be coupled together in any suitable manner. Any suitable seal, such as seal 1710, can be placed between different portions of the stud 1701A. In other aspects, the stud 1701 can have an integral one-piece construction or any other suitable architecture. The one or more robotic arms 1720A, 1720B are rotatably mounted on the fixed post 1701 in any suitable manner, such as described below. Each of the robot arms 1720A, 1720B can include its own drive portion including an inner rotor 1705A, 1705B, stators 1703A, 1703B, and an outer rotor 1704A, 1704B.
內轉子1705A、1705B可以任何適當的方式可移動地裝設在固定柱1701上,以使得內轉子1705A、1705B能繞著固定柱1701自由轉動。內轉子1705A、1705B係以任何適當方式支撐於固定柱1701上,例如透過軸承1702A、1702B。在本文所揭露之實施例的其它態樣中,該等軸承可以設置於第5A圖及第5B圖所示以外的任何其它適當位置處來支撐內轉子1705A、1705B。內轉子1705A、1705B係可巢套方式設於定子1703A、1703B內,以使得定子1703A、1703B環繞或外切於內轉子1705A、1705B的周邊 (例如與內轉子1705A、1705B同心)並位在相同平面上,以使得內轉子1705A、1705B能夠自由地繞著固定柱1701旋轉。內轉子1705A、1705B係建構成能夠介接於定子,並包括例如適當的介接組件1705A’、1705B’,例如建構成能夠做為內轉子與定子間之介面的磁鐵。 The inner rotors 1705A, 1705B can be movably mounted on the stationary post 1701 in any suitable manner such that the inner rotors 1705A, 1705B can freely rotate about the stationary post 1701. Inner rotors 1705A, 1705B are supported on mounting post 1701 in any suitable manner, such as through bearings 1702A, 1702B. In other aspects of the embodiments disclosed herein, the bearings may be disposed at any other suitable location than shown in Figures 5A and 5B to support the inner rotors 1705A, 1705B. The inner rotors 1705A, 1705B are nested in the stators 1703A, 1703B such that the stators 1703A, 1703B are wrapped around or circumscribed around the inner rotors 1705A, 1705B. (e.g., concentric with the inner rotors 1705A, 1705B) and positioned in the same plane such that the inner rotors 1705A, 1705B are free to rotate about the fixed post 1701. The inner rotors 1705A, 1705B are configured to interface with the stator and include, for example, suitable interface components 1705A', 1705B', for example, to form a magnet that can serve as an interface between the inner rotor and the stator.
再參閱第5A圖及第5B圖,定子1703A、1703B也可以連接至固定柱1701上,在旋轉上是相對於固定柱1701固定不動的。在本文所揭露之實施例的一態樣中,定子1703A、1703B可以任何適當的方式連接至固定柱1701或框架840(第3圖),以使得定子1703A、1703B在旋轉上是相對於固定柱1701固定不動。每一定子1703A、1703B均可是一多段式定子,例如定子1703A、1703B可以是多段式的,包括二組可個別作動的繞組。其一部段,例如定子1703A、1703B的部段A,係建構用來驅動內轉子1705A、1705B。其它的部段,例如定子1703A、1703B的部段B係建構用來驅動外轉子1704A、1704B。每一部段A、B可具有適當的尺寸,以提供轉動各自之臂連桿所需的扭矩。例如,定子部段A可大於定子部段B,以提供足以旋轉直徑小於外轉子1704A、1704B之內轉子1705A、1705B所需的扭矩(例如內轉子與定子介接的部位會具有小於外轉子與定子介接部位的直徑)。在其它的態樣中,部段B可大於部段A,或者部段A及B可具有大致上相同的尺寸。亦應注意到,在一態樣中,繞組部段A、B可藉由將二組線圈互相巢套在一起而構成。在其它 的態樣中,內及外繞組的線圈可做為二個部件互相巢套在一起。定子1703A、1703B的每一部段A、B均由一控制器控制,例如建構用來個別供能給每一部段A、B的控制器170、400,因此定子1703A、1703B的每一部段A、B均可單獨地驅動它們對應的內及外轉子(分別為1705A、1705B及1704A、1704B)。在其它的態樣中,定子1703A、1703B的部段A、B係由任何適當的控制器或控制器們控制,以使得相關的內及外轉子能夠一起或共同被驅動。在本文所揭露之實施例的再另一態樣中,定子1703A及1703B係由二個分別的定子所組成(大致上對應於部段A及B),其中一定子(例如內定子)係配置成能巢套於另一定子(例如外定子)內,以使得外定子大致上圍繞著內定子的周邊。 Referring again to FIGS. 5A and 5B, the stators 1703A, 1703B can also be coupled to the fixed post 1701 and are stationary relative to the fixed post 1701 in rotation. In one aspect of the embodiments disclosed herein, the stators 1703A, 1703B can be coupled to the fixed post 1701 or the frame 840 (Fig. 3) in any suitable manner such that the stators 1703A, 1703B are rotated relative to the stationary post 1701 is fixed. Each of the stators 1703A, 1703B can be a multi-segment stator. For example, the stators 1703A, 1703B can be multi-stage, including two sets of individually actuatable windings. A section thereof, such as section A of stators 1703A, 1703B, is configured to drive inner rotors 1705A, 1705B. Other sections, such as section B of stators 1703A, 1703B, are configured to drive outer rotors 1704A, 1704B. Each section A, B can be sized to provide the torque required to rotate the respective arm link. For example, the stator section A can be larger than the stator section B to provide a torque sufficient to rotate the inner rotor 1705A, 1705B that is smaller than the outer rotors 1704A, 1704B (eg, the inner rotor and stator interface portions will have less than the outer rotor and The diameter of the joint of the stator). In other aspects, section B can be larger than section A, or sections A and B can have substantially the same dimensions. It should also be noted that in one aspect, the winding sections A, B can be constructed by nesting two sets of coils nested together. In other In the case of the inner and outer windings, the two components can be nested together. Each of the segments A, B of the stators 1703A, 1703B is controlled by a controller, such as a controller 170, 400 that is configured to individually energize each segment A, B, thus each of the stators 1703A, 1703B Segments A and B can individually drive their corresponding inner and outer rotors (1705A, 1705B, and 1704A, 1704B, respectively). In other aspects, sections A, B of stators 1703A, 1703B are controlled by any suitable controller or controller to enable the associated inner and outer rotors to be driven together or together. In still another aspect of the embodiments disclosed herein, the stators 1703A and 1703B are comprised of two separate stators (substantially corresponding to sections A and B), wherein the stator (eg, inner stator) is configured The energy nest is nested within another stator (e.g., the outer stator) such that the outer stator substantially surrounds the perimeter of the inner stator.
在本文所揭露之實施例的一態樣中,外轉子1704A、1704B可圍著固定柱1701延伸而大致上包圍之,並大致上圍繞著定子1703A、1703B的周邊,以使得定子1703A、1703B大致上巢套於外轉子1704A、1704B內。外轉子1704A、1704B是進一步設置使其能繞著固定的定子1703A、1703B自由轉動。外轉子1704A、1704B係以任何適當的方式支撐在固定柱1701上,例如使用軸承1702C、1702D,而能自由轉動而與固定柱1701無關。在另外的態樣中,外轉子1704A、1704B具有任何適當的架構,並係裝設於運送裝置1799的任何適當結構上,而能相對於固定柱及/或定子1703A、1703B自由轉動。外轉 子1704A、1704B係建構成界接於定子,並包括例如適當的介面組件1704A’、1704B’例如建構成能夠做為外轉子與定子間之介面的磁鐵。 In one aspect of the embodiments disclosed herein, the outer rotors 1704A, 1704B can extend generally around the fixed post 1701 and substantially surround the perimeter of the stators 1703A, 1703B such that the stators 1703A, 1703B are substantially The upper nest is sleeved in the outer rotors 1704A, 1704B. The outer rotors 1704A, 1704B are further arranged to be freely rotatable about fixed stators 1703A, 1703B. The outer rotors 1704A, 1704B are supported on the fixed post 1701 in any suitable manner, such as using bearings 1702C, 1702D, and are free to rotate regardless of the fixed post 1701. In other aspects, outer rotors 1704A, 1704B have any suitable architecture and are mounted to any suitable structure of transport device 1799 for free rotation relative to fixed posts and/or stators 1703A, 1703B. External turn The sub-structures 1704A, 1704B are constructed to be bound to the stator and include, for example, suitable interface components 1704A', 1704B', for example, to form a magnet that can serve as an interface between the outer rotor and the stator.
應注意到,在本文所揭露之實施例的一態樣中,本文中所描述的轉可以使用永久磁鐵,但在其它的態樣中,如前面所述,轉子亦可建構成磁阻型式的轉子或任何其它適當的轉子型式。具有巢套式轉子及定子的驅動部其它例子可參見美國專利第7,891,935號及西元2011年2月18日提出申請之美國專申請案第13/030,856號,其等的內容係透過引述而全文結合於本文內。 It should be noted that in one aspect of the embodiments disclosed herein, the transitions described herein may use permanent magnets, but in other aspects, as previously described, the rotor may also be constructed to form a magnetoresistive type. Rotor or any other suitable rotor type. Other examples of a drive unit having a nested rotor and a stator can be found in U.S. Patent No. 7,891,935, the entire disclosure of which is hereby incorporated by reference in its entirety in its entirety in In this article.
仍參閱第5A圖及第5B圖,該二驅動部1700A及1700B係配置成一種疊置的架構,以使得在各自之臂的肩部繞著肩部軸線X設置一驅動部。如前所述,驅動部1700A、1700B及臂1720A、1720B可以建構成具有任何適當數量的自由度及任何適當的架構。在一態樣中,該二驅動部1700A及1700B及臂1720A、1720B大致上是互相類似的,因此該等驅動部1700A、1700B將針對臂1720A的驅動部1700A來說明。在一態樣中,內轉子1705A可以任何適當的方式連接至例如一滑輪1707A,以使得內轉子1705A轉動時,滑輪1707A會隨著內轉子1705A旋轉。滑輪1707A可一體結合於內轉子1705A(亦即與轉子形成單件式結構)或以任何適當的方式耦接至內轉子1705A上。當滑輪1707A轉動時,滑輪1707A可透過任何適當的構件1709A來將另一繞著機器臂之肘的肘軸線FX設置的滑 輪1712A轉動,以供將前臂820(第3圖)相對上臂810旋轉。外轉子1704A可以任何適當的方式連接至上臂上。在本文所揭露實施例的一態樣中,外轉子1704A是直接耦接至上臂上,因此當外轉子1704A轉動時,上臂會隨著外轉子1704A轉動。在另外的態樣中,外轉子1704A可透過一臂介面(未顯示)連接至上臂,因此當外轉子1704A轉動時,上臂會透過臂介面而隨著外轉子1704A轉動。如前所述,由於驅動部1700A及1700B是大致上相似的,此種架構亦可應用於驅動部1700B(參見例如內轉子滑輪1707B、傳動件1709B、及肘滑輪1712B,且外轉子1704B可連接至臂1720B的上臂810,以供旋轉該上臂)。在另外的態樣中,任何其它適當的架構均可採用。 Still referring to Figures 5A and 5B, the two drive portions 1700A and 1700B are configured in a stacked configuration such that a drive portion is disposed about the shoulder axis X at the shoulder of the respective arm. As previously mentioned, the drive sections 1700A, 1700B and the arms 1720A, 1720B can be constructed to have any suitable number of degrees of freedom and any suitable architecture. In one aspect, the two drive units 1700A and 1700B and the arms 1720A and 1720B are substantially similar to each other. Therefore, the drive units 1700A and 1700B will be described with respect to the drive unit 1700A of the arm 1720A. In one aspect, inner rotor 1705A can be coupled to, for example, a pulley 1707A in any suitable manner such that when inner rotor 1705A is rotated, pulley 1707A can rotate with inner rotor 1705A. The pulley 1707A can be integrally coupled to the inner rotor 1705A (i.e., form a one-piece construction with the rotor) or coupled to the inner rotor 1705A in any suitable manner. When the pulley 1707A is rotated, the pulley 1707A can be slid through another suitable member 1709A to set another elbow axis FX about the elbow of the robot arm. The wheel 1712A is rotated for rotating the forearm 820 (Fig. 3) relative to the upper arm 810. Outer rotor 1704A can be coupled to the upper arm in any suitable manner. In one aspect of the disclosed embodiment, the outer rotor 1704A is directly coupled to the upper arm such that when the outer rotor 1704A rotates, the upper arm rotates with the outer rotor 1704A. In another aspect, the outer rotor 1704A can be coupled to the upper arm through an arm interface (not shown) such that when the outer rotor 1704A rotates, the upper arm will rotate through the arm interface with the outer rotor 1704A. As previously mentioned, since the drive portions 1700A and 1700B are substantially similar, such an architecture can also be applied to the drive portion 1700B (see, for example, the inner rotor pulley 1707B, the transmission member 1709B, and the toggle pulley 1712B, and the outer rotor 1704B can be connected Up to the upper arm 810 of the arm 1720B for rotating the upper arm). In other aspects, any other suitable architecture may be employed.
仍參閱第5A圖及第5B圖,驅動部1700A及1700B可包括任何適當的感測器,以供以類似於前面所述的方式來追蹤驅動部的旋轉。例如,參照驅動部1700A(驅動部1700B可以類似方式建構),一編碼器1741A(亦參見驅動部1700B的編碼器1741B)係設置用來追蹤內轉子1705A的轉動(或者在驅動部1700B的例子中追蹤轉子1705B),而一第二編碼器1740A(亦參見驅動部1700B的編碼器1740B)係建構用來追蹤外轉子1704A的轉動(或者在驅動部1700B的例子中追蹤轉子1704B)。編碼器1740A及1741大致上類似於前面所述的編碼器1640A、1640B。這些編碼器可以設置於運送裝置內的任何適當位置或處所,以便能追蹤旋轉,並係建構成能使用任 何的尺規,包括但不限於絕對尺規、增量尺規、或任何其它適當的尺規。 Still referring to Figures 5A and 5B, the drive portions 1700A and 1700B can include any suitable sensor for tracking the rotation of the drive portion in a manner similar to that previously described. For example, referring to the drive unit 1700A (the drive unit 1700B can be constructed in a similar manner), an encoder 1741A (see also the encoder 1741B of the drive unit 1700B) is provided to track the rotation of the inner rotor 1705A (or in the example of the drive unit 1700B). Tracking rotor 1705B), and a second encoder 1740A (see also encoder 1740B of drive unit 1700B) is configured to track the rotation of outer rotor 1704A (or track rotor 1704B in the example of drive portion 1700B). Encoders 1740A and 1741 are substantially similar to encoders 1640A, 1640B described above. These encoders can be placed at any suitable location or location within the transport device to enable tracking of the rotation and to be constructed to be used. The ruler includes, but is not limited to, an absolute ruler, an incremental ruler, or any other suitable ruler.
驅動部1700A及1700B亦可建構成包含有氣氛/真空密封。例如定子1703A、1703B係與可供機器臂以任何適當的方式於其內作業的真空環境隔離開。例如隔離可由任何適當的障壁來達成,例如障壁1711A、1711B。在本文所揭露之實施例的一態樣中,內轉子1705A、1705B的磁鐵1705A’、1705B’亦可以任何適當的方式與真空環境隔離開,例如如同前面所描述者。在本文所揭露實施例的另一態樣中,外轉子1704A、1704B的磁鐵1705A’、1705B’亦可以任何適當的方式與真空環境隔離開,例如如同前面所描述者。例如,隔離磁鐵1705A’、1705B’、1704A’、及1704B’的手段之一可以是磁性流體密封件S1、S2、S3、及S4,類似於前面所描述的密封件。在本文所揭露實施例的再另一態樣中,所揭示的驅動部亦可使用可變間隙磁阻馬達來消除磁鐵使用上的需求。 The drive units 1700A and 1700B may also be constructed to include an atmosphere/vacuum seal. For example, the stators 1703A, 1703B are isolated from a vacuum environment in which the robotic arm can operate in any suitable manner. For example, the isolation can be achieved by any suitable barrier, such as barriers 1711A, 1711B. In one aspect of the embodiments disclosed herein, the magnets 1705A', 1705B' of the inner rotor 1705A, 1705B can also be isolated from the vacuum environment in any suitable manner, such as as previously described. In another aspect of the embodiments disclosed herein, the magnets 1705A', 1705B' of the outer rotor 1704A, 1704B can also be isolated from the vacuum environment in any suitable manner, such as as previously described. For example, one of the means of isolating the magnets 1705A', 1705B', 1704A', and 1704B' may be magnetic fluid seals S1, S2, S3, and S4, similar to the seals previously described. In still another aspect of the embodiments disclosed herein, the disclosed drive section can also use a variable gap reluctance motor to eliminate the need for magnet use.
顯示於第5A圖及第5B圖中之所揭露之實施例的態樣中,在驅動部內僅揭露二個自由度。但是,在本文所揭露之實施例的其它態樣中,其可以透過在內及外轉子之間將另外的定子及轉子(未顯示)設置成能讓這些另外的定子及轉子增加可為機器臂使用的自由度,而增加驅動部內的自由度。任何適當數量的定子及轉子均可以同心方式設置,並以大致上類似於前面所述的方式巢套。 In the aspect of the disclosed embodiment shown in Figures 5A and 5B, only two degrees of freedom are revealed in the drive. However, in other aspects of the embodiments disclosed herein, it is possible to provide additional stators and rotors (not shown) between the inner and outer rotors to allow the additional stators and rotors to be added to the robotic arms. The degree of freedom of use increases the degree of freedom within the drive. Any suitable number of stators and rotors can be placed concentrically and nested in a manner substantially similar to that previously described.
現在參閱第6圖,其顯示出根據所揭露實施例之態樣 的雙臂運送裝置的一部分。應注意到,驅動馬達與臂間的聯結(例如臂驅動的方式)可以是任何適當的聯結,例如美國專利案第5,720,590號、第5,899,658號、及第5,813,823號中所描述者,其內容係透過引述而全文結合於本文內。在第6圖中顯示出一種垂直相對的SCARA臂架構(前臂及末端作用器並未顯示出,為清楚起見,是以虛線方塊600、601代表),例如西元2011年11月10日提出申請之美國專利申請案第13/293,717及西元2012年3月12日提出申請之第13/417,837號,其內容係透過引述而全文結合於本文內。在此,每一臂2000、2001均大致上類似於前面針對第3圖所描述者,並且包括一驅動部2000D、2001D(每一者均具有例如二個馬達,但在其它的態樣中可以包括多於或少於二個的馬達),大致上類似於前面針對第4A圖至第5B圖之任一者或多者所描述者。例如,在一態樣中,二驅動部2000D、2001D均具有共用的驅動架構(例如該二驅動部均是以前面針對第4A圖至第4D圖所描述之方式建構,或是二驅動部均是以前面針對第5A圖至第5B圖所描述之方式建構)。在另一態樣中,驅動部2000D、2001D則具有不同的架構(例如一驅動部可以前面針對第4A圖至第4D圖所描述之方式建構,而另一驅動部則是以前面針對第5A圖至第5B圖所描述之方式建構)。 Reference is now made to Fig. 6, which shows aspects in accordance with the disclosed embodiments. Part of the arms transport device. It should be noted that the coupling between the drive motor and the arm (e.g., the manner of the arm drive) can be any suitable coupling, as described in U.S. Patent Nos. 5,720,590, 5,899,658, and 5,813,823, the disclosure of which is incorporated herein by reference. The full text is incorporated herein by reference. Figure 6 shows a vertically opposed SCARA arm architecture (forearm and end effectors are not shown, for clarity, represented by dashed squares 600, 601), such as November 10, 2011 application U.S. Patent Application Serial No. 13/ 293, the entire disclosure of which is hereby incorporated by reference in its entirety in its entirety in the entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire Here, each arm 2000, 2001 is substantially similar to that described above with respect to FIG. 3, and includes a driving portion 2000D, 2001D (each having, for example, two motors, but in other aspects A motor comprising more or less than two) is substantially similar to that previously described for any one or more of Figures 4A-5B. For example, in one aspect, the two driving portions 2000D, 2001D each have a common driving architecture (for example, the two driving portions are constructed in the manner described above for FIGS. 4A to 4D, or both driving portions are It is constructed in the manner described above for the 5A to 5B drawings). In another aspect, the driving portions 2000D, 2001D have different architectures (for example, one driving portion can be constructed in the manner described above for FIGS. 4A to 4D, and the other driving portion is directed to the fifth portion. The figure is constructed in the manner described in Figure 5B).
第7圖顯示出另一種雙SCAPA臂架構,其中每一2010、2011(其每一者均大致上類似於前面針對第3圖所 描述者)包括一驅動部2010D、2011D(每一者均具有例如二個馬達,但在其它的態樣中可以包括多於或少於二個的馬達),大致上類似於前面針對第4A圖至第5B圖之任一者或多者所描述者。在此態樣中,臂2010、2011係建構成使每一臂2010、2011的前臂及末端作用器(為清楚起見是以虛線盒600、601表示)均是位在例如上臂的上方,但在其它的態樣中,前臂及末端作用器則是位在各自之上臂的底面。 Figure 7 shows another dual SCAPA arm architecture, each of which is 2010, 2011 (each of which is roughly similar to the previous one for Figure 3). The description includes a drive portion 2010D, 2011D (each having, for example, two motors, but may include more or less than two motors in other aspects), substantially similar to the previous Figure 4A. To those described in any one or more of Figure 5B. In this aspect, the arms 2010, 2011 are constructed such that the forearms and end effectors (denoted by the dashed boxes 600, 601 for clarity) of each arm 2010, 2011 are located, for example, above the upper arm, but In other aspects, the forearm and end effectors are located on the underside of the respective upper arms.
參閱第8圖及第9a圖,其中顯示出根據所揭露實施例之態樣的具有雙臂架構之運送機器臂的一部分。每一臂2020、2021均大致上類似於前面針對第3圖所描述者,並包括二個大致上類似於前面所描述的驅動馬達,除了在此態樣中,該等馬達並非是重直地疊置在一起,而是一起設置於各自之臂連桿所在的相同水平平面內。第9圖顯示出單一臂2030的架構,大致上類似於第8圖中所示者;例如在第8圖中,二臂2020、2021係裝設於一共用軸桿1801上而能繞著肩軸線X轉動,然而在第9圖中,僅有單獨一臂2030裝設在軸桿1801上,除此之外,臂2020、2021、及2030的驅動馬達架構則大致上相同。為例示之用,臂2020、2021、2030的驅動馬達將會針對臂2030來說明。在此態樣中,每一驅動馬達2030A、2030B包括一定子2030SA、2030SB及一轉子2030RA、2030RB,大致上類似於前面所描述者。應注意到,在一態樣中,驅動馬達2030A、2030B可以是可變磁阻馬達,因此不會有磁鐵 暴露於例如供運送機器人於其內作業的真空環境,此外,可以任何適當的方式來設置任何適當密封件來隔離轉子及/或定子的磁性構件。驅動馬達2030A的定子2030SA是固定在軸桿1801上,因此在旋轉上可以保持相對於例如上臂810固定不動。轉子2030RA可以任何適當的方式裝設並固定在上臂810,以使得上臂810及轉子2030RA可一起轉動(例如當定子2030SA驅動轉子2030RA繞著肩軸線X旋轉時,上臂810會隨著轉子2030RA轉動)。驅動馬達2030B的定子2030SB可固定裝設在位於上臂810內的軸桿1900上,因此定子2030SA在旋轉上是相對於軸桿1900固定不動的。轉子2030RB可以任何適當的方式裝設於上臂810上,以供繞著定子2030SB轉動。轉子2030RB可包括一體成型的滑輪(或在其它的態樣中,滑輪可以任何適當的方式附著至轉子上),其將轉子2030RB經由任何適當的傳動裝置連接至肘滑輪1620,以供以一種大致上類似於前面所述的方式驅動前臂820(第3圖)旋轉。例如,肘滑輪可以任何適當的方式固定附著至前臂820上,以使得當肘滑輪1620旋轉時,前臂820會隨其轉動。在其它的態樣中,轉子2030RB可以任何適當方式驅動肘滑輪1620轉動。在本文所揭露的實施例的再一態樣中,任何適當的機器臂架構均可使用。可供施用該等例示性實施例驅動系統的適當機器臂的例子可參見西元2011年10月11日提出申請之美國專利申請案第13/270,844及西元2011年10月11日提出申請之第 13/270,844號,其等的內容係透過引述而全文結合於本文內。 Referring to Figures 8 and 9a, there is shown a portion of a transport robot arm having a dual arm configuration in accordance with an embodiment of the disclosed embodiment. Each arm 2020, 2021 is substantially similar to that previously described with respect to Figure 3, and includes two drive motors substantially similar to those previously described, except that in such a manner, the motors are not vertically Stacked together, but together placed in the same horizontal plane where the respective arm links are located. Figure 9 shows the structure of a single arm 2030, which is substantially similar to that shown in Figure 8; for example, in Figure 8, the two arms 2020, 2021 are mounted on a common shaft 1801 and can be placed around the shoulder. The axis X rotates, however, in Fig. 9, only a single arm 2030 is mounted on the shaft 1801, except that the drive motor architectures of the arms 2020, 2021, and 2030 are substantially the same. As an example, the drive motors of arms 2020, 2021, 2030 will be described with respect to arm 2030. In this aspect, each of the drive motors 2030A, 2030B includes a stator 2030SA, 2030SB, and a rotor 2030RA, 2030RB, substantially similar to those previously described. It should be noted that in one aspect, the drive motors 2030A, 2030B may be variable reluctance motors, so there will be no magnets Exposure to, for example, a vacuum environment for the transport robot to operate therein, in addition, any suitable seal may be provided in any suitable manner to isolate the magnetic members of the rotor and/or stator. The stator 2030SA of the drive motor 2030A is fixed to the shaft 1801 so as to be fixed in rotation relative to, for example, the upper arm 810. The rotor 2030RA can be mounted and secured to the upper arm 810 in any suitable manner such that the upper arm 810 and the rotor 2030RA can rotate together (eg, when the stator 2030SA drives the rotor 2030RA to rotate about the shoulder axis X, the upper arm 810 can rotate with the rotor 2030RA) . The stator 2030SB of the drive motor 2030B can be fixedly mounted on the shaft 1900 located in the upper arm 810, so that the stator 2030SA is fixed in rotation relative to the shaft 1900. Rotor 2030RB can be mounted to upper arm 810 in any suitable manner for rotation about stator 2030SB. The rotor 2030RB can include an integrally formed pulley (or in other aspects, the pulley can be attached to the rotor in any suitable manner) that connects the rotor 2030RB to the toggle pulley 1620 via any suitable transmission for a general The front arm 820 (Fig. 3) is rotated in a manner similar to that previously described. For example, the toggle pulley can be fixedly attached to the forearm 820 in any suitable manner such that when the toggle pulley 1620 is rotated, the forearm 820 can rotate therewith. In other aspects, the rotor 2030RB can drive the toggle pulley 1620 to rotate in any suitable manner. In still another aspect of the embodiments disclosed herein, any suitable robotic arm architecture can be used. An example of a suitable robotic arm that can be used to apply the drive systems of the exemplary embodiments can be found in U.S. Patent Application Serial No. 13/270,844, filed on Oct. 11, 2011, and on 13/270,844, the contents of which are incorporated herein by reference in its entirety.
根據本文所揭露之實施例的一個或多個態樣,其提供一基板運送裝置。該基板運送裝置包括一框架、至少一臂連桿,可旋轉地連接至該框架、以及一無軸桿驅動部。該無軸桿驅動部包括疊置的驅動馬達,其以透過一無軸桿界面相對於該框架旋轉該至少一臂連桿,每一該疊置驅動馬達包含一定子,其具有定子線圈,設置於一相對於該框架而固定的固定柱上,以及一轉子,其大致上沿著周圍圍繞該定子,使得該轉子連接至該至少一臂連桿之一個別者上而將該至少一臂連桿之該一個別者相對於該框架旋轉,致使該至少一臂連桿伸出或縮回,其中該疊置驅動馬達設置於該至少一臂連桿上,使得每一定子至少有一部分位在該至少一臂連桿的一共用臂連桿之內。 In accordance with one or more aspects of the embodiments disclosed herein, a substrate transport apparatus is provided. The substrate transport device includes a frame, at least one arm link rotatably coupled to the frame, and a shaftless drive. The shaftless drive unit includes a stacked drive motor that rotates the at least one arm link relative to the frame through a shaftless rod interface, each of the stacked drive motors including a stator having a stator coil. a fixed column fixed relative to the frame, and a rotor substantially surrounding the stator along the circumference such that the rotor is coupled to one of the at least one arm link and the at least one arm is connected Rotating the one of the levers relative to the frame to cause the at least one arm link to extend or retract, wherein the stacked drive motor is disposed on the at least one arm link such that at least a portion of each of the stators is located The at least one arm link is within a common arm link.
根據所揭露實施例的一個或多個態樣,該無軸桿驅動部是大致上設置於該至少一臂連桿之內。 In accordance with one or more aspects of the disclosed embodiments, the shaftless drive portion is disposed generally within the at least one arm link.
根據所揭露實施例的一個或多個態樣,該定子線圈是與真空隔離開。 According to one or more aspects of the disclosed embodiment, the stator coil is isolated from the vacuum.
根據所揭露實施例的一個或多個態樣,該基板運送裝置進一步包括一第二驅動部,至少部分地設置在該框架內,並被建構成可將該至少一臂連桿沿著大致上垂直於包括該至少一臂連桿伸出或縮回方向之平面的方向(例如垂直的Z軸)做線性移動。再者,該至少一臂連桿由一密封件連接至該框架,該密封件可容許該至少一臂連桿與該框 架間的相對軸向運動(例如垂直的Z軸),其中該密封件是設置在該臂部的一側,而該第二驅動部則位在該臂部的相對側。 In accordance with one or more aspects of the disclosed embodiments, the substrate transport apparatus further includes a second drive portion at least partially disposed within the frame and configured to generally extend the at least one arm link The linear movement is made perpendicular to a direction including a plane in which the at least one arm link extends or retracts (for example, a vertical Z axis). Furthermore, the at least one arm link is coupled to the frame by a seal that allows the at least one arm link to the frame A relative axial movement between the shelves (e.g., a vertical Z-axis) wherein the seal is disposed on one side of the arm and the second drive is located on an opposite side of the arm.
根據所揭露實施例的一個或多個態樣,該至少一臂連桿包括一上臂,以可繞著一肩旋轉軸線旋轉的方式連接至該框架、一前臂,以可繞著一肘旋轉軸線旋轉的方式連接至該上臂、以及至少一基板夾持器,以可繞著一腕旋轉軸線旋轉的方式連接至該前臂上,且該至少一驅動馬達包括至少二疊置驅動馬達,其中每一馬達驅動該上臂及該前臂之一個別者旋轉。 In accordance with one or more aspects of the disclosed embodiments, the at least one arm link includes an upper arm coupled to the frame, a forearm for rotation about a shoulder axis of rotation so as to be rotatable about an elbow axis Rotatingly coupled to the upper arm, and at least one substrate holder coupled to the forearm for rotation about a wrist axis of rotation, and the at least one drive motor includes at least two stacked drive motors, each of each The motor drives the upper arm and one of the forearms to rotate individually.
根據所揭露實施例的一個或多個態樣,該至少一臂連桿包括一上臂,以可繞著一肩旋轉軸線旋轉的方式連接至該框架、一前臂,以可繞著一肘旋轉軸線旋轉的方式連接至該上臂、以及至少一基板夾持器,以可繞著一腕旋轉軸線旋轉的方式連接至該前臂上,且該至少一驅動馬達包括至少三疊置驅動馬達,其中每一馬達驅動該上臂、該前臂、及該至少一基板夾持器之一個別者旋轉。 In accordance with one or more aspects of the disclosed embodiments, the at least one arm link includes an upper arm coupled to the frame, a forearm for rotation about a shoulder axis of rotation so as to be rotatable about an elbow axis Rotatingly coupled to the upper arm, and at least one substrate holder coupled to the forearm for rotation about a wrist axis of rotation, and the at least one drive motor includes at least three stacked drive motors, each of each The motor drives the upper arm, the forearm, and one of the at least one substrate holder to rotate individually.
根據所揭露實施例的一個或多個態樣,該至少一臂連桿包括一上臂,以可繞著一肩旋轉軸線旋轉的方式連接至該框架,以及至少一基板夾持器,可移動地裝設在該上臂上,以供沿著該上臂長度的至少一部分做線性移動,且該至少一驅動馬達包括至少二疊置驅動馬達,其中該至少二疊置驅動馬達中的一個可驅動該上臂旋轉,而該至少二疊置驅動馬達中的另一個則可驅動該至少一基板夾持器之一 個別者進行該線性移動。 In accordance with one or more aspects of the disclosed embodiments, the at least one arm link includes an upper arm coupled to the frame for rotation about a shoulder axis of rotation, and at least one substrate holder movably Mounted on the upper arm for linear movement along at least a portion of the length of the upper arm, and the at least one drive motor includes at least two stacked drive motors, wherein one of the at least two stacked drive motors can drive the upper arm Rotating, and the other of the at least two stacked drive motors can drive one of the at least one substrate holder The individual performs this linear movement.
根據所揭露實施例的一個或多個態樣,該無軸桿驅動部包括密封件,用以將該定子與該至少一臂連桿於其中運轉的的環境密封隔離開。再者,每一轉子包括磁鐵,用以界接個別的定子,其中該驅動部包括密封件,用以將該轉子的該磁鐵與該至少一臂連桿於其中運轉的的環境密封隔離開。 In accordance with one or more aspects of the disclosed embodiments, the shaftless drive portion includes a seal for isolating the stator from an environment in which the at least one arm link operates. Furthermore, each rotor includes a magnet for interconnecting individual stators, wherein the drive portion includes a seal for isolating the magnet of the rotor from an environment in which the at least one arm link operates.
根據所揭露實施例的一個或多個態樣,該無軸桿驅動部的高度係解耦於該基板運送裝置的Z軸運動。 In accordance with one or more aspects of the disclosed embodiments, the height of the shaftless drive is decoupled from the Z-axis movement of the substrate transport.
根據所揭露實施例的一個或多個態樣,其提供一基板運送裝置。該基板運送裝置包括一框架、至少一臂連桿,可旋轉地連接至該框架、以及一無軸桿分散式驅動部,大致上設置於該至少一臂連桿內。該無軸桿分散式驅動部包括至少二驅動馬達,其中該至少二驅動馬達中的一個連接至該至少一臂連桿,以將該至少一臂連桿相對於該框架旋轉,且該至少二驅動馬達是沿著一共用水平平面以邊靠邊的方式設置於該至少一臂連桿內。 In accordance with one or more aspects of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport device includes a frame, at least one arm link rotatably coupled to the frame, and a shaftless distributed drive portion disposed substantially within the at least one arm link. The shaftless distributed drive unit includes at least two drive motors, wherein one of the at least two drive motors is coupled to the at least one arm link to rotate the at least one arm link relative to the frame, and the at least two The drive motor is disposed within the at least one arm link along a common horizontal plane.
根據所揭露實施例的一個或多個態樣,每一該至少二驅動馬達包括一定子及一大致上沿著周圍圍繞該定子的轉子。 In accordance with one or more aspects of the disclosed embodiments, each of the at least two drive motors includes a stator and a rotor that substantially surrounds the stator.
根據所揭露實施例的一個或多個態樣,該基板運送裝置進一步包括一第二驅動部,至少部分地設置在該框架內,並被建構成可將該至少一臂連桿沿著大致上垂直於包括該至少一臂連桿伸出或縮回方向之平面的方向做線性移 動。 In accordance with one or more aspects of the disclosed embodiments, the substrate transport apparatus further includes a second drive portion at least partially disposed within the frame and configured to generally extend the at least one arm link Linearly shifting perpendicular to the plane including the plane in which the at least one arm link extends or retracts move.
根據所揭露實施例的一個或多個態樣,其提供一基板運送裝置。該基板運送裝置包括一框架、至少一臂,可旋轉地連接至該框架,並具有至少一上臂及前臂。該基板運送裝置亦包括一無軸桿驅動部,連接至該框架。該無軸桿驅動部包括至少一驅動馬達,該驅動馬達包括一定子,具有至少二巢套式定子線圈、一內轉子,被該定子大致上沿著周圍圍繞、以及一外轉子,大致上沿著周圍圍繞該定子,使得該內轉子連接至該前臂,以供旋轉該前臂,而該外轉子連接至該上臂,以供旋轉該上臂。 In accordance with one or more aspects of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport device includes a frame, at least one arm rotatably coupled to the frame, and having at least one upper arm and a forearm. The substrate transport device also includes a shaftless drive portion coupled to the frame. The shaftless drive unit includes at least one drive motor including a stator having at least two nested stator coils, an inner rotor surrounded by the stator substantially around, and an outer rotor, substantially along Surrounding the stator, the inner rotor is coupled to the forearm for rotating the forearm, and the outer rotor is coupled to the upper arm for rotating the upper arm.
根據所揭露實施例的一個或多個態樣,該基板運送裝置包括一第二驅動部,至少部分地設置在該框架內,並被建構成可將該至少一臂連桿沿著大致上垂直於包括該至少一臂連桿伸出或縮回方向之平面的方向做線性移動。 In accordance with one or more aspects of the disclosed embodiments, the substrate transport apparatus includes a second drive portion at least partially disposed within the frame and configured to vertically extend the at least one arm link Linear movement is made in a direction including a plane in which the at least one arm link extends or retracts.
應理解到,前面的說明僅是針對本文所揭露之實施例的態樣所做的例示性說明而已。熟知此技藝之人士在不脫離本文所揭露之實施例的態樣下,仍可設想出多種的替換及改良。因此本文所揭露之實施例的態樣是要涵蓋這些落入下附申請專利範圍內的替換、改良、及變化。再者,在不同的附屬或獨立項內所界定的不同特徵並不代表無法有利地組合這些特徵來應用,而這樣的組合仍是屬於本發明之態樣的範疇。 It should be understood that the foregoing description is only illustrative of the aspects of the embodiments disclosed herein. A person skilled in the art can devise various alternatives and modifications without departing from the embodiments disclosed herein. Therefore, the embodiments disclosed herein are intended to cover alternatives, modifications, and variations in the scope of the appended claims. Furthermore, the different features defined in the different subordinate or independent items do not necessarily mean that the features are not advantageously combined, and such combinations are still within the scope of the invention.
10‧‧‧基板處理裝置 10‧‧‧Substrate processing unit
12‧‧‧界面區段 12‧‧‧Interface section
13‧‧‧處理區段 13‧‧‧Processing section
14‧‧‧界面區段腔室 14‧‧‧Interface section chamber
15‧‧‧運送器 15‧‧‧Carrier
16‧‧‧工件運送腔室 16‧‧‧Workpiece transport chamber
20‧‧‧運送機器 20‧‧‧Transportation machine
100‧‧‧基板處理裝置 100‧‧‧Substrate processing unit
105‧‧‧前區段 105‧‧‧The former section
110‧‧‧密封區段 110‧‧‧Seal section
115‧‧‧基板固持匣盒 115‧‧‧Substrate holding box
120‧‧‧前端機器人 120‧‧‧ Front-end robot
125‧‧‧處理模組 125‧‧‧Processing module
130‧‧‧真空機械臂 130‧‧‧Vacuum arm
135‧‧‧負載閘 135‧‧‧ load brake
140‧‧‧負載閘 140‧‧‧Load brake
150‧‧‧驅動部 150‧‧‧ Drive Department
155‧‧‧臂部 155‧‧‧arms
160‧‧‧腕部 160‧‧‧ wrist
162‧‧‧對準器 162‧‧‧ aligner
165‧‧‧末端作用器 165‧‧‧End effector
170‧‧‧控制器 170‧‧‧ Controller
173‧‧‧處理器 173‧‧‧ processor
175‧‧‧中心腔室 175‧‧‧ central chamber
178‧‧‧記憶體 178‧‧‧ memory
180‧‧‧開口 180‧‧‧ openings
185‧‧‧開口 185‧‧‧ openings
190‧‧‧驅動部 190‧‧‧ Drive Department
195‧‧‧末端作用器 195‧‧‧End effector
400‧‧‧控制器 400‧‧‧ Controller
600‧‧‧前臂 600‧‧‧Forearm
601‧‧‧末端作用器 601‧‧‧End effector
612‧‧‧障壁 612‧‧ ‧ barrier
800‧‧‧運送器 800‧‧‧Carrier
800Z‧‧‧Z軸驅動裝置 800Z‧‧‧Z-axis drive unit
810‧‧‧上臂 810‧‧‧ upper arm
820‧‧‧前臂 820‧‧‧Forearm
830‧‧‧末端作用器 830‧‧‧End effector
840‧‧‧框架 840‧‧‧Frame
1600‧‧‧驅動部 1600‧‧‧ Drive Department
1602A‧‧‧驅動馬達 1602A‧‧‧Drive motor
1602B‧‧‧驅動馬達 1602B‧‧‧Drive motor
1603A‧‧‧定子 1603A‧‧‧stator
1603B‧‧‧定子 1603B‧‧‧ Stator
1604A‧‧‧轉子 1604A‧‧‧Rotor
1604B‧‧‧轉子 1604B‧‧‧Rotor
1604M‧‧‧磁鐵 1604M‧‧‧ magnet
1605‧‧‧滑輪 1605‧‧‧ pulley
1605X‧‧‧傳動構件 1605X‧‧‧Transmission components
1610‧‧‧柱 1610‧‧ ‧ column
1620‧‧‧肘滑輪 1620‧‧‧Elbow pulley
1640IN‧‧‧增量尺規 1640IN‧‧‧Incremental ruler
1640A‧‧‧編碼器 1640A‧‧‧Encoder
1640AB‧‧‧絕對尺規 1640AB‧‧‧Absolute ruler
1640B‧‧‧編碼器 1640B‧‧‧Encoder
1670‧‧‧磁性流體密封件 1670‧‧‧Magnetic fluid seals
1699‧‧‧密封件 1699‧‧‧Seal
1700A‧‧‧驅動部 1700A‧‧‧Drive Department
1700B‧‧‧驅動部 1700B‧‧‧Drive Department
1701‧‧‧柱 1701‧‧ ‧ column
1701A‧‧‧固定柱 1701A‧‧‧Fixed column
1702A‧‧‧軸承 1702A‧‧‧ Bearing
1702B‧‧‧軸承 1702B‧‧‧ Bearing
1702C‧‧‧軸承 1702C‧‧‧ Bearing
1702D‧‧‧軸承 1702D‧‧‧ bearing
1703A‧‧‧定子 1703A‧‧‧stator
1703B‧‧‧定子 1703B‧‧‧ Stator
1704A‧‧‧外轉子 1704A‧‧‧Outer rotor
1704A’‧‧‧介面組件 1704A’‧‧ Interface components
1704B‧‧‧外轉子 1704B‧‧‧Outer rotor
1704B’‧‧‧介面組件 1704B’‧‧‧Interface components
1705A‧‧‧內轉子 1705A‧‧‧ inner rotor
1705A’‧‧‧磁鐵 1705A’‧‧‧ Magnet
1705B‧‧‧內轉子 1705B‧‧‧ inner rotor
1705B’‧‧‧磁鐵 1705B’‧‧‧ Magnet
1707A‧‧‧滑輪 1707A‧‧‧ pulley
1709A‧‧‧傳動構件 1709A‧‧‧Transmission components
1709B‧‧‧傳動件 1709B‧‧‧ Transmission parts
1710‧‧‧密封件 1710‧‧‧Seal
1711A‧‧‧障壁 1711A‧‧‧Baffle
1711B‧‧‧障壁 1711B‧‧‧Baffle
1712B‧‧‧肘滑輪 1712B‧‧‧Elbow pulley
1720A‧‧‧機器臂 1720A‧‧‧Machine arm
1720B‧‧‧機器臂 1720B‧‧‧Machine arm
1740A‧‧‧編碼器 1740A‧‧‧Encoder
1740B‧‧‧編碼器 1740B‧‧‧Encoder
1741A‧‧‧編碼器 1741A‧‧‧Encoder
1741B‧‧‧編碼器 1741B‧‧‧Encoder
1799‧‧‧運送裝置 1799‧‧‧Transportation device
1801‧‧‧軸桿 1801‧‧‧ shaft
1900‧‧‧軸桿 1900‧‧‧ shaft
2000‧‧‧臂 2000‧‧‧arm
2000D‧‧‧驅動部 2000D‧‧‧Driving Department
2001‧‧‧臂 2001‧‧‧ Arm
2001D‧‧‧驅動部 2001D‧‧‧Driving Department
2010‧‧‧臂 2010‧‧‧ Arm
2010D‧‧‧驅動部 2010D‧‧‧Drive Department
2011‧‧‧臂 2011‧‧‧ Arm
2011D‧‧‧驅動部 2011D‧‧‧Drive Department
2020‧‧‧臂 2020‧‧‧ Arm
2021‧‧‧臂 2021‧‧‧ Arm
2030‧‧‧臂 2030‧‧‧ Arm
2030A‧‧‧驅動馬達 2030A‧‧‧Drive motor
2030B‧‧‧驅動馬達 2030B‧‧‧Drive motor
2030RA‧‧‧轉子 2030RA‧‧‧Rotor
2030RB‧‧‧轉子 2030RB‧‧‧Rotor
2030SA‧‧‧定子 2030SA‧‧‧ Stator
2030SB‧‧‧定子 2030SB‧‧‧ Stator
5500‧‧‧感測器系統 5500‧‧‧Sensor System
5505‧‧‧鐵磁性元件 5505‧‧‧ Ferromagnetic components
5510‧‧‧磁源 5510‧‧‧ Magnetic source
5515‧‧‧磁性感測器 5515‧‧‧Magnetic sensor
5520‧‧‧磁性感測器 5520‧‧‧Magnetic sensor
5525‧‧‧磁性感測器 5525‧‧‧Magnetic sensor
5530‧‧‧磁性感測器 5530‧‧‧Magnetic sensor
5535‧‧‧調節電路 5535‧‧‧Adjustment circuit
5550‧‧‧輸出 5550‧‧‧ output
5555‧‧‧尺規 5555‧‧‧ rule
5560‧‧‧距離 5560‧‧‧ distance
5565‧‧‧封閉末端 5565‧‧‧closed end
5570‧‧‧開放末端 5570‧‧‧Open end
5610‧‧‧磁性感測器 5610‧‧‧Magnetic sensor
5615‧‧‧磁性感測器 5615‧‧‧Magnetic sensor
5620‧‧‧磁性感測器 5620‧‧‧Magnetic sensor
5625‧‧‧磁性感測器 5625‧‧‧Magnetic sensor
5630‧‧‧磁性感測器 5630‧‧‧Magnetic sensor
5635‧‧‧磁性感測器 5635‧‧‧Magnetic sensor
5640‧‧‧磁性感測器 5640‧‧‧Magnetic sensor
5645‧‧‧磁性感測器 5645‧‧‧Magnetic sensor
5650‧‧‧加總電路 5650‧‧‧ total circuit
5655‧‧‧差動調節電路 5655‧‧‧Differential adjustment circuit
5660‧‧‧讀取裝置 5660‧‧‧Reading device
A‧‧‧工件工站 A‧‧‧Working station
EX‧‧‧肘旋轉軸線 EX‧‧‧ elbow axis of rotation
IPSS‧‧‧界面平面 IPSS‧‧‧ interface plane
IPSR‧‧‧界面平面 IPSR‧‧‧ interface plane
LP‧‧‧裝載埠 LP‧‧‧Loader
R‧‧‧伸出/縮回軸線 R‧‧‧Extension/retraction axis
S‧‧‧基板 S‧‧‧Substrate
SL‧‧‧密封件 SL‧‧‧Seal
S1‧‧‧磁性流體密封件 S1‧‧‧Magnetic fluid seals
S2‧‧‧磁性流體密封件 S2‧‧‧Magnetic fluid seals
S3‧‧‧磁性流體密封件 S3‧‧‧Magnetic fluid seals
S4‧‧‧磁性流體密封件 S4‧‧‧Magnetic fluid seals
X‧‧‧旋轉中心軸線 X‧‧‧Rotation center axis
第1圖是具有根據本文所揭露實施例之態樣所具有之特徵的基板處理裝置的示意圖。 1 is a schematic illustration of a substrate processing apparatus having features in accordance with aspects of the embodiments disclosed herein.
第2圖是具有根據本文所揭露實施例之態樣所具有之特徵的基板處理裝置的示意圖。 2 is a schematic illustration of a substrate processing apparatus having features in accordance with aspects of the embodiments disclosed herein.
第3圖是根據本文所揭露實施例之態樣的基板運送裝置的示意圖。 3 is a schematic illustration of a substrate transport apparatus in accordance with aspects of the disclosed embodiments.
第4A圖至第4D圖是根據本文所揭露之實施例之態樣的機器人驅動系統的示意剖面圖。 4A through 4D are schematic cross-sectional views of a robotic drive system in accordance with aspects of the embodiments disclosed herein.
第5A圖是根據本文所揭露實施例之態樣的運送裝置一部分的示意剖面圖。 Figure 5A is a schematic cross-sectional view of a portion of a transport device in accordance with an embodiment of the disclosed embodiments.
第5B圖是第5A圖中根據本文所揭露實施例之態樣的運送裝置一部分的示意剖面圖。 Figure 5B is a schematic cross-sectional view of a portion of the transport device in accordance with an embodiment of the present disclosure in Figure 5A.
第6圖是根據本文所揭露實施例之態樣的運送裝置一部分的示意剖面圖。 Figure 6 is a schematic cross-sectional view of a portion of a transport device in accordance with an embodiment of the presently disclosed embodiments.
第7圖是根據本文所揭露實施例之態樣的運送裝置一部分的示意剖面圖。 Figure 7 is a schematic cross-sectional view of a portion of a transport device in accordance with an embodiment of the presently disclosed embodiments.
第8圖是根據本文所揭露實施例之態樣的運送裝置一部分的示意剖面圖。 Figure 8 is a schematic cross-sectional view of a portion of a transport device in accordance with an embodiment of the presently disclosed embodiments.
第9圖是根據本文所揭露實施例之態樣的運送裝置一部分的示意剖面圖。 Figure 9 is a schematic cross-sectional view of a portion of a transport device in accordance with an embodiment of the presently disclosed embodiments.
第10圖顯示出根據本文所揭露實施例之態樣的例示性感測器系統的一部分。 Figure 10 shows a portion of an exemplary sensor system in accordance with aspects of the embodiments disclosed herein.
第11圖顯示出根據本文所揭露實施例之態樣磁性感測器圍繞鐵磁性元件的例示性配置。 Figure 11 shows an exemplary configuration of a magnetic magnetic sensor surrounding a ferromagnetic element in accordance with an embodiment disclosed herein.
1700A‧‧‧驅動部 1700A‧‧‧Drive Department
1700B‧‧‧驅動部 1700B‧‧‧Drive Department
1701A‧‧‧固定柱 1701A‧‧‧Fixed column
1702A‧‧‧軸承 1702A‧‧‧ Bearing
1702B‧‧‧軸承 1702B‧‧‧ Bearing
1702C‧‧‧軸承 1702C‧‧‧ Bearing
1702D‧‧‧軸承 1702D‧‧‧ bearing
1703A‧‧‧定子 1703A‧‧‧stator
1703B‧‧‧定子 1703B‧‧‧ Stator
1704A‧‧‧外轉子 1704A‧‧‧Outer rotor
1704B‧‧‧外轉子 1704B‧‧‧Outer rotor
1704A’‧‧‧介面組件 1704A’‧‧ Interface components
1704B’‧‧‧介面組件 1704B’‧‧‧Interface components
1705A‧‧‧內轉子 1705A‧‧‧ inner rotor
1705B‧‧‧內轉子 1705B‧‧‧ inner rotor
1705A’‧‧‧磁鐵 1705A’‧‧‧ Magnet
1705B’‧‧‧磁鐵 1705B’‧‧‧ Magnet
1711A‧‧‧障壁 1711A‧‧‧Baffle
1711B‧‧‧障壁 1711B‧‧‧Baffle
1710‧‧‧密封件 1710‧‧‧Seal
1740A‧‧‧編碼器 1740A‧‧‧Encoder
1740B‧‧‧編碼器 1740B‧‧‧Encoder
1741A‧‧‧編碼器 1741A‧‧‧Encoder
1741B‧‧‧編碼器 1741B‧‧‧Encoder
1799‧‧‧運送裝置 1799‧‧‧Transportation device
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TW201738054A (en) | 2017-11-01 |
TW201318794A (en) | 2013-05-16 |
TWI667110B (en) | 2019-08-01 |
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