TWI579248B - Method for manufacturing glass substrates - Google Patents
Method for manufacturing glass substrates Download PDFInfo
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- TWI579248B TWI579248B TW105110104A TW105110104A TWI579248B TW I579248 B TWI579248 B TW I579248B TW 105110104 A TW105110104 A TW 105110104A TW 105110104 A TW105110104 A TW 105110104A TW I579248 B TWI579248 B TW I579248B
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- glass
- molded body
- glass substrate
- temperature
- glass ribbon
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/067—Forming glass sheets combined with thermal conditioning of the sheets
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B25/00—Annealing glass products
- C03B25/04—Annealing glass products in a continuous way
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Description
本發明係關於一種玻璃基板之製造方法。 The present invention relates to a method of manufacturing a glass substrate.
用於液晶顯示器及電漿顯示器等平板顯示器(FPD,Flat Panel Display)之玻璃基板係對表面要求較高之平坦度。通常,此種玻璃基板係利用溢流下拉法製造。於溢流下拉法中,如專利文獻1(美國專利第3,338,696號)記載般,流入至成形體之上表面之槽並自槽溢出之熔融玻璃沿著成形體之兩側面流下,並於成形體之下端合流而成形玻璃帶。所成形之玻璃帶一面朝下方被拉伸,一面進行徐冷。將經冷卻之玻璃帶切斷為特定之尺寸而獲得玻璃基板。 Glass substrates for flat panel displays (FPDs, such as liquid crystal displays and plasma displays) require a high degree of flatness on the surface. Usually, such a glass substrate is produced by an overflow down-draw method. In the overflow down-draw method, as described in the patent document 1 (U.S. Patent No. 3,338,696), the molten glass which flows into the groove on the upper surface of the molded body and overflows from the groove flows down along both sides of the formed body, and is formed on the molded body. The lower ends merge to form a glass ribbon. The formed glass ribbon is stretched downward while being cooled. The glass ribbon is obtained by cutting the cooled glass ribbon to a specific size.
[專利文獻1]美國專利第3,338,696號 [Patent Document 1] U.S. Patent No. 3,338,696
於溢流下拉法中,成形體設置於成形爐內之高溫之氛圍下。又,對成形體施加基於自身重量及熔融玻璃之重量之荷重。因此,藉由玻璃基板製造裝置之長年之工作,成形體根據成形體之材質之熱蠕變特性而逐漸蠕變變形。尤其是,成形體之長度方向之中央部容易因蠕變變形朝下方下垂而撓曲。其結果,存在如下問題,即,自成形體之中央部溢出之熔融玻璃之量較自成形體之兩端部溢出之熔融玻璃之 量多,所成形之玻璃帶之寬度方向中央部之厚度增加,而導致作為最終製品之玻璃基板之板厚偏差增加。 In the overflow down-draw method, the formed body is placed in a high-temperature atmosphere in the forming furnace. Further, the molded body is subjected to a load based on its own weight and the weight of the molten glass. Therefore, the molded body is gradually creep-deformed according to the thermal creep property of the material of the molded body by the long-term work of the glass substrate manufacturing apparatus. In particular, the central portion in the longitudinal direction of the molded body is likely to sag downward due to creep deformation and to be deflected. As a result, there is a problem in that the amount of molten glass overflowing from the central portion of the molded body is higher than that of the molten glass overflowing from both end portions of the molded body. When the amount is large, the thickness of the central portion in the width direction of the formed glass ribbon increases, and the variation in the thickness of the glass substrate as the final product increases.
若玻璃基板之板厚偏差變大,則不僅1片玻璃基板內之厚度之偏差變大,而且於複數片玻璃基板之間厚度之偏差亦變大,而導致玻璃基板之品質變得不穩定。於顯示器用面板之製造步驟中,1片玻璃基板內之厚度之偏差有時可藉由TFT(Thin Film Transistor,薄膜電晶體)配線等之圖案形狀之修正而應對。但是,複數片玻璃基板之間之厚度之偏差藉由圖案形狀之修正而難以應對。又,於高精細顯示器用之玻璃基板形成相較先前更細線化及高密度化之圖案,因此,即便具有於先前之顯示器用之玻璃基板不視為問題之程度之板厚偏差,亦有製品品質產生問題之虞。 When the variation in the thickness of the glass substrate is large, not only the variation in the thickness of one glass substrate is large, but also the variation in thickness between the plurality of glass substrates is large, and the quality of the glass substrate is unstable. In the manufacturing process of the panel for a display, the variation in the thickness of one glass substrate may be corrected by the correction of the pattern shape of a TFT (Thin Film Transistor) wiring or the like. However, the variation in the thickness between the plurality of glass substrates is difficult to cope with by the correction of the pattern shape. Further, since a glass substrate for a high-definition display is formed with a pattern which is thinner and higher in density than before, there is a product variation even if the glass substrate for the prior display is not considered to be a problem. Quality is a problem.
又,成形體之蠕變變形係於使用液相溫度較高之玻璃及應變點較高之玻璃之玻璃基板之製造步驟中,因成形體之溫度容易變高而尤其成為問題。又,近年來,推進玻璃基板之大型化,成形體之長度方向之尺寸變長至超過3000mm之程度,因此,有因蠕變變形引起之成形體之撓曲變得更顯著之傾向。 Further, in the production step of using a glass substrate having a glass having a high liquidus temperature and a glass having a high strain point, the creep deformation of the molded body is particularly problematic because the temperature of the molded body is likely to become high. In addition, in recent years, the size of the glass substrate has been increased, and the dimension in the longitudinal direction of the molded article has been increased to more than 3,000 mm. Therefore, the deflection of the molded body due to creep deformation tends to be more remarkable.
因此,本發明之目的在於提供一種可使玻璃基板之板厚偏差減小之玻璃基板之製造方法。 Accordingly, an object of the present invention is to provide a method for producing a glass substrate which can reduce variation in thickness of a glass substrate.
本發明之玻璃基板之製造方法具備成形步驟、搬送步驟、獲取步驟、及控制步驟。成形步驟係向形成於成形體之上表面之供給槽供給熔融玻璃,使自供給槽溢出之熔融玻璃沿著成形體之兩側面流下,並使沿兩側面流下之熔融玻璃於成形體之下端合流而成形玻璃帶。搬送步驟係將於成形步驟中成形之玻璃帶一面朝下方搬送,一面徐冷。獲取步驟係獲取與成形體之形狀相關之形狀資料。控制步驟係根據於獲取步驟中獲取之形狀資料,以玻璃帶之寬度方向之板壓偏差變小之 方式,使用設置於成形體之上方之溫度調整機構而控制溫度分佈。溫度分佈係與成形體之上表面接觸之熔融玻璃之溫度的成形體之供給槽之長度方向之分佈。 The method for producing a glass substrate of the present invention includes a molding step, a transfer step, an acquisition step, and a control step. The forming step supplies the molten glass to the supply grooves formed on the upper surface of the molded body, so that the molten glass overflowing from the supply grooves flows down the both sides of the molded body, and the molten glass flowing down the both sides merges at the lower end of the formed body. And forming a glass ribbon. In the transfer step, the glass ribbon formed in the forming step is conveyed downward while being cooled. The obtaining step acquires shape data related to the shape of the formed body. The control step is based on the shape data obtained in the obtaining step, and the plate pressure deviation in the width direction of the glass ribbon is reduced. In the manner, the temperature distribution is controlled using a temperature adjustment mechanism provided above the molded body. The temperature distribution is a distribution in the longitudinal direction of the supply groove of the molded body at the temperature of the molten glass in contact with the upper surface of the molded body.
又,於本發明之玻璃基板之製造方法中,獲取步驟較佳為獲取成形體之基於蠕變變形之形狀資料。 Further, in the method for producing a glass substrate of the present invention, the obtaining step is preferably to obtain shape data based on creep deformation of the molded body.
又,於本發明之玻璃基板之製造方法中,獲取步驟較佳為至少獲取成形體之上表面之鉛垂方向之位移量作為形狀資料。於該情形時,控制步驟較佳為根據長度方向上之位移量之分佈即形狀分佈而控制溫度分佈。 Further, in the method for producing a glass substrate of the present invention, the obtaining step preferably takes at least the displacement amount in the vertical direction of the upper surface of the molded body as the shape data. In this case, the control step preferably controls the temperature distribution according to the distribution of the displacement amount in the longitudinal direction, that is, the shape distribution.
又,於本發明之玻璃基板之製造方法中,控制步驟較佳為以形狀分佈之位移量越大、則對應之溫度分佈之溫度越高的方式控制溫度分佈。 Further, in the method for producing a glass substrate of the present invention, the control step preferably controls the temperature distribution such that the larger the displacement amount of the shape distribution is, the higher the temperature of the corresponding temperature distribution is.
又,於本發明之玻璃基板之製造方法中,獲取步驟較佳為藉由利用電腦模擬求出形狀之時間變化而獲取形狀資料。 Further, in the method for producing a glass substrate of the present invention, the obtaining step preferably acquires the shape data by obtaining a temporal change in the shape by computer simulation.
又,於本發明之玻璃基板之製造方法中,獲取步驟較佳為根據於搬送步驟中朝下方搬送並徐冷後之玻璃基板之厚度而獲取形狀資料。 Further, in the method for producing a glass substrate of the present invention, it is preferable that the obtaining step acquires the shape data based on the thickness of the glass substrate which is conveyed downward and is cold-cooled in the transporting step.
又,於本發明之玻璃基板之製造方法中,溫度調整機構較佳為具有沿著長度方向設置之複數個發熱體。 Further, in the method for producing a glass substrate of the present invention, the temperature adjustment mechanism preferably has a plurality of heat generating bodies provided along the longitudinal direction.
又,於本發明之玻璃基板之製造方法中,發熱體較佳為於內部具有供冷卻用之流體流動之空間且具有沿與長度方向正交之方向延伸之棒形狀的陶瓷加熱器。 Further, in the method for producing a glass substrate of the present invention, the heating element preferably has a rod-shaped ceramic heater having a space in which a fluid for cooling flows and having a rod shape extending in a direction orthogonal to the longitudinal direction.
本發明之玻璃基板之製造方法可使玻璃基板之板厚偏差減小。 The method for producing a glass substrate of the present invention can reduce the variation in thickness of the glass substrate.
1‧‧‧玻璃基板製造裝置 1‧‧‧Glass substrate manufacturing equipment
2‧‧‧熔融玻璃 2‧‧‧Solid glass
3‧‧‧玻璃帶 3‧‧‧glass ribbon
10‧‧‧熔解槽 10‧‧‧melting tank
20‧‧‧澄清管 20‧‧‧clarification tube
30‧‧‧攪拌裝置 30‧‧‧Agitator
40‧‧‧成形裝置 40‧‧‧Forming device
42‧‧‧爐壁 42‧‧‧ furnace wall
44‧‧‧頂板 44‧‧‧ top board
46‧‧‧上部溫度控制空間 46‧‧‧ Upper temperature control space
48‧‧‧發熱體 48‧‧‧heating body
48a‧‧‧冷卻通路 48a‧‧‧Cooling path
50a‧‧‧移送管 50a‧‧‧Transfer tube
50b‧‧‧移送管 50b‧‧‧Transfer tube
50c‧‧‧移送管 50c‧‧‧Transfer tube
60‧‧‧上部成形空間 60‧‧‧Upper forming space
62‧‧‧成形體 62‧‧‧Formed body
62a‧‧‧下端 62a‧‧‧Bottom
62b‧‧‧供給槽 62b‧‧‧ supply slot
62c‧‧‧上表面 62c‧‧‧ upper surface
62d1‧‧‧第1端部 62d1‧‧‧1st end
62d2‧‧‧第2端部 62d2‧‧‧2nd end
64‧‧‧上部間隔構件 64‧‧‧ upper spacer
70‧‧‧下部成形空間 70‧‧‧ Lower forming space
72‧‧‧冷卻輥 72‧‧‧Cooling roller
74‧‧‧溫度調節單元 74‧‧‧temperature adjustment unit
74a‧‧‧中心部冷卻單元 74a‧‧‧Central cooling unit
74b‧‧‧側部冷卻單元 74b‧‧‧Side cooling unit
76‧‧‧下部間隔構件 76‧‧‧ Lower spacers
80‧‧‧徐冷空間 80‧‧‧Xu cold space
82a~82g‧‧‧下拉輥 82a~82g‧‧‧ Pull down roller
84a~84g‧‧‧加熱器 84a~84g‧‧‧heater
86‧‧‧隔熱構件 86‧‧‧Insulation members
91‧‧‧控制裝置 91‧‧‧Control device
98‧‧‧切斷裝置 98‧‧‧cutting device
172‧‧‧冷卻輥驅動馬達 172‧‧‧Cooling roller drive motor
182‧‧‧下拉輥驅動馬達 182‧‧‧ Pull-down roller drive motor
198‧‧‧切斷裝置驅動馬達 198‧‧‧cutting device drive motor
L‧‧‧最大上表面位移量 L‧‧‧Maximum upper surface displacement
S1‧‧‧熔解步驟 S1‧‧‧ melting step
S2‧‧‧澄清步驟 S2‧‧‧Clarification steps
S3‧‧‧攪拌步驟 S3‧‧‧ stirring step
S4‧‧‧成形步驟 S4‧‧‧ forming steps
S5‧‧‧冷卻步驟 S5‧‧‧ Cooling step
S6‧‧‧切斷步驟 S6‧‧‧ cutting step
圖1係實施形態之玻璃基板之製造方法之流程圖。 Fig. 1 is a flow chart showing a method of manufacturing a glass substrate of an embodiment.
圖2係玻璃基板之製造裝置之模式圖。 Fig. 2 is a schematic view showing a manufacturing apparatus of a glass substrate.
圖3係成形裝置之前視圖。 Figure 3 is a front view of the forming apparatus.
圖4係成形裝置之側視圖。 Figure 4 is a side view of the forming apparatus.
圖5係成形裝置之上部成形空間之附近之前視圖。 Figure 5 is a front elevational view of the vicinity of the forming space of the upper portion of the forming apparatus.
圖6係成形裝置之上部成形空間之附近之側視圖。 Figure 6 is a side view of the vicinity of the upper forming space of the forming apparatus.
圖7係控制裝置之方塊圖。 Figure 7 is a block diagram of the control device.
圖8係藉由獲取部所獲取之成形體之形狀資料之一例。 Fig. 8 is an example of shape data of a molded body obtained by the acquisition unit.
圖9係成形體之應變速度依存於溫度之變化之曲線圖之一例。 Fig. 9 is an example of a graph showing a strain rate of a molded body depending on a change in temperature.
圖10係成形體之應變速度依存於應力之變化之曲線圖之一例。 Fig. 10 is an example of a graph in which the strain rate of the formed body depends on the change in stress.
(1)玻璃基板之製造裝置之構成 (1) Composition of a manufacturing apparatus for a glass substrate
針對本發明之玻璃基板之製造方法之實施形態,一面參照圖式,一面進行說明。圖1係表示本實施形態之玻璃基板之製造方法之一例的流程圖。 Embodiments of the method for producing a glass substrate of the present invention will be described with reference to the drawings. Fig. 1 is a flow chart showing an example of a method of producing a glass substrate of the present embodiment.
如圖1所示,本實施形態之玻璃基板之製造方法主要包括熔解步驟S1、澄清步驟S2、攪拌步驟S3、成形步驟S4、冷卻步驟S5、及切斷步驟S6。 As shown in FIG. 1, the manufacturing method of the glass substrate of this embodiment mainly includes a melting step S1, a clarification step S2, a stirring step S3, a molding step S4, a cooling step S5, and a cutting step S6.
於熔解步驟S1中,對玻璃原料進行加熱而獲得熔融玻璃。熔融玻璃係貯存於熔解槽,以具有所期望之溫度之方式被通電加熱。於玻璃原料中添加澄清劑。就降低環境負荷之觀點而言,使用SnO2作為澄清劑。 In the melting step S1, the glass raw material is heated to obtain molten glass. The molten glass is stored in a melting tank and is electrically heated to have a desired temperature. A clarifying agent is added to the glass raw material. From the viewpoint of reducing environmental load, SnO 2 is used as a clarifying agent.
於澄清步驟S2中,於熔解步驟S1中獲得之熔融玻璃於澄清管之內部流動而將熔融玻璃中所含之氣體去除,藉此,將熔融玻璃澄清。首先,於澄清步驟S2中,使熔融玻璃之溫度上升。熔融玻璃中添加之澄清劑係藉由升溫引起還原反應而釋放氧。熔融玻璃中所含之包含CO2、N2、SO2等氣體成分之泡吸收藉由澄清劑之還原反應所產生之 氧。吸收氧而成長之泡上浮至熔融玻璃之液面,破裂而消失。消失之泡中所含之氣體係釋放至澄清管之內部之氣相空間,並排出至外部大氣。其次,於澄清步驟S2中,使熔融玻璃之溫度降低。藉此,經還原之澄清劑引起氧化反應而吸收熔融玻璃中殘留之氧等氣體成分。 In the clarification step S2, the molten glass obtained in the melting step S1 flows inside the clarification pipe to remove the gas contained in the molten glass, thereby clarifying the molten glass. First, in the clarification step S2, the temperature of the molten glass is raised. The clarifying agent added to the molten glass releases oxygen by a temperature reduction causing a reduction reaction. The bubbles containing gas components such as CO 2 , N 2 , and SO 2 contained in the molten glass absorb oxygen generated by a reduction reaction of a fining agent. The bubble that absorbs oxygen and rises up to the surface of the molten glass, and ruptures and disappears. The gas system contained in the disappearing bubble is released into the gas phase space inside the clarification pipe and discharged to the outside atmosphere. Next, in the clarification step S2, the temperature of the molten glass is lowered. Thereby, the reduced clarifying agent causes an oxidation reaction to absorb a gas component such as oxygen remaining in the molten glass.
於攪拌步驟S3中,對已於澄清步驟S2中被去除氣體之熔融玻璃進行攪拌,而使熔融玻璃之成分均質化。藉此,減少為玻璃基板之脈理等之原因之熔融玻璃之組成之不均。 In the stirring step S3, the molten glass which has been removed in the clarification step S2 is stirred to homogenize the components of the molten glass. Thereby, the unevenness of the composition of the molten glass which is a cause of the pulse of a glass substrate etc. is reduced.
於成形步驟S4中,使用溢流下拉法,自已於攪拌步驟S3中均質化之熔融玻璃連續地成形玻璃帶。 In the forming step S4, the glass ribbon is continuously formed from the molten glass homogenized in the stirring step S3 by using the overflow down-draw method.
於冷卻步驟S5中,將於成形步驟S4中成形之玻璃帶一面朝下方搬送,一面冷卻。於冷卻步驟S5中,以於玻璃帶不產生應變及翹曲之方式,一面調節玻璃帶之溫度,一面使玻璃帶逐漸冷卻。 In the cooling step S5, the glass ribbon formed in the forming step S4 is conveyed downward while being cooled. In the cooling step S5, the glass ribbon is gradually cooled while adjusting the temperature of the glass ribbon so that the glass ribbon is not strained or warped.
於切斷步驟S6中,將於冷卻步驟S5中冷卻後之玻璃帶切斷為特定之尺寸而獲得玻璃基板。其後,進行玻璃基板之端面之研削及研磨、以及玻璃基板之清洗。其後,檢查有無玻璃基板之劃痕等缺陷,並將檢查合格之玻璃基板捆包而作為製品出貨。 In the cutting step S6, the glass ribbon cooled in the cooling step S5 is cut into a specific size to obtain a glass substrate. Thereafter, grinding and polishing of the end surface of the glass substrate and cleaning of the glass substrate are performed. Thereafter, the presence or absence of defects such as scratches on the glass substrate is checked, and the glass substrate which has passed the inspection is bundled and shipped as a product.
圖2係表示本實施形態之玻璃基板製造裝置1之一例之模式圖。玻璃基板製造裝置1具備熔解槽10、澄清管20、攪拌裝置30、成形裝置40、及移送管50a、50b、50c。移送管50a將熔解槽10與澄清管20連接。移送管50b將澄清管20與攪拌裝置30連接。移送管50c將攪拌裝置30與成形裝置40連接。 Fig. 2 is a schematic view showing an example of the glass substrate manufacturing apparatus 1 of the embodiment. The glass substrate manufacturing apparatus 1 includes a melting tank 10, a clarification pipe 20, a stirring device 30, a molding device 40, and transfer pipes 50a, 50b, and 50c. The transfer pipe 50a connects the melting tank 10 to the clarification pipe 20. The transfer pipe 50b connects the clarification pipe 20 to the stirring device 30. The transfer pipe 50c connects the stirring device 30 to the forming device 40.
於熔解步驟S1中於熔解槽10中所獲得之熔融玻璃2係通過移送管50a流入至澄清管20。於澄清步驟S2中於澄清管20澄清後之熔融玻璃2係通過移送管50b流入至攪拌裝置30。於攪拌步驟S3中於攪拌裝置30中攪拌後之熔融玻璃2係通過移送管50c流入至成形裝置40。於成形步驟S4中,藉由成形裝置40自熔融玻璃2連續地成形玻璃帶3。於冷卻步 驟S5中,將玻璃帶3一面朝下方搬送,一面冷卻。於切斷步驟S6中,將經冷卻之玻璃帶3切斷為特定之大小而獲得玻璃基板。玻璃基板之寬度例如為500mm~3500mm,長度例如為500mm~3500mm。玻璃基板之厚度例如為0.2mm~0.8mm。 The molten glass 2 obtained in the melting tank 10 in the melting step S1 flows into the clarification pipe 20 through the transfer pipe 50a. The molten glass 2 which has been clarified in the clarification pipe 20 in the clarification step S2 flows into the stirring device 30 through the transfer pipe 50b. The molten glass 2 stirred in the stirring device 30 in the stirring step S3 flows into the forming device 40 through the transfer pipe 50c. In the forming step S4, the glass ribbon 3 is continuously formed from the molten glass 2 by the forming device 40. Cooling step In step S5, the glass ribbon 3 is conveyed downward while being cooled. In the cutting step S6, the cooled glass ribbon 3 is cut into a specific size to obtain a glass substrate. The width of the glass substrate is, for example, 500 mm to 3500 mm, and the length is, for example, 500 mm to 3500 mm. The thickness of the glass substrate is, for example, 0.2 mm to 0.8 mm.
藉由玻璃基板製造裝置1製造之玻璃基板係作為液晶顯示器、電漿顯示器、有機EL(electroluminescence,電致發光)顯示器等平板顯示器(FPD)用之玻璃基板尤其適合。作為FPD用之玻璃基板,使用無鹼玻璃、含微量鹼之玻璃、低溫多晶矽(LTPS)用之玻璃、或氧化物半導體用之玻璃。作為高精細顯示器用之玻璃基板,使用於高溫時具有較高之黏性及較高之應變點的玻璃。例如,成為高精細顯示器用之玻璃基板之原料之玻璃係於1500℃具有102.5泊之黏性。 The glass substrate produced by the glass substrate manufacturing apparatus 1 is particularly suitable as a glass substrate for a flat panel display (FPD) such as a liquid crystal display, a plasma display, or an organic EL (electroluminescence) display. As the glass substrate for FPD, an alkali-free glass, a glass containing a small amount of alkali, a glass for low-temperature polycrystalline silicon (LTPS), or a glass for an oxide semiconductor is used. As a glass substrate for high-definition displays, it is used for glass having high viscosity and high strain point at high temperatures. For example, a glass which is a raw material of a glass substrate for a high-definition display has a viscosity of 10 2.5 poise at 1500 °C.
於熔解槽10,使玻璃原料熔解,而獲得熔融玻璃2。玻璃原料係以可獲得具有所期望之組成之玻璃基板之方式製備。作為玻璃基板之組成之一例,作為FPD用之玻璃基板較佳之無鹼玻璃含有SiO2:50質量%~70質量%、Al2O3:10質量%~25質量%、B2O3:1質量%~18質量%、MgO:0質量%~10質量%、CaO:0質量%~20質量%、SrO:0質量%~20質量%、BaO:0質量%~10質量%。此處,MgO、CaO、SrO及BaO之含量之合計為5質量%~30質量%。 In the melting tank 10, the glass raw material is melted to obtain molten glass 2. The glass raw material is prepared in such a manner that a glass substrate having a desired composition can be obtained. As an example of the composition of the glass substrate, the alkali-free glass which is preferably a glass substrate for FPD contains SiO 2 : 50% by mass to 70% by mass, Al 2 O 3 : 10% by mass to 25% by mass, and B 2 O 3 : 1 Mass% to 18% by mass, MgO: 0% by mass to 10% by mass, CaO: 0% by mass to 20% by mass, SrO: 0% by mass to 20% by mass, and BaO: 0% by mass to 10% by mass. Here, the total content of MgO, CaO, SrO, and BaO is 5% by mass to 30% by mass.
又,作為FPD用之玻璃基板,亦可使用含微量鹼之玻璃,該玻璃含有微量鹼金屬。含微量鹼之玻璃包含0.1質量%~0.5質量%之R'2O,較佳為包含0.2質量%~0.5質量%之R'2O。此處,R'係選自Li、Na及K中之至少1種。R'2O之含量之合計亦可未達0.1質量%。 Further, as the glass substrate for FPD, a glass containing a small amount of alkali may be used, and the glass contains a trace amount of an alkali metal. The glass containing a trace amount of alkali contains 0.1% by mass to 0.5% by mass of R' 2 O, preferably 0.2% by mass to 0.5% by mass of R' 2 O. Here, R' is at least one selected from the group consisting of Li, Na, and K. The total content of R' 2 O may not be as much as 0.1% by mass.
又,藉由玻璃基板製造裝置1製造之玻璃基板亦可進而含有SnO2:0.01質量%~1質量%(較佳為0.01質量%~0.5質量%)、Fe2O3:0質量%~0.2質量%(較佳為0.01質量%~0.08質量%)。再者,就降低環境負荷之觀點而言,藉由玻璃基板製造裝置1製造之玻璃基板實質 上不含有As2O3、Sb2O3及PbO。 Further, the glass substrate produced by the glass substrate manufacturing apparatus 1 may further contain SnO 2 : 0.01% by mass to 1% by mass (preferably 0.01% by mass to 0.5% by mass), and Fe 2 O 3 : 0% by mass to 0.2%. % by mass (preferably 0.01% by mass to 0.08% by mass). Further, from the viewpoint of reducing the environmental load, the glass substrate produced by the glass substrate manufacturing apparatus 1 does not substantially contain As 2 O 3 , Sb 2 O 3 and PbO.
以具有上述組成之方式製備之玻璃原料係使用原料投入機(未圖示)投入至熔解槽10。原料投入機可使用螺旋送料機進行玻璃原料之投入,亦可使用鏟鬥進行玻璃原料之投入。於熔解槽10,玻璃原料係被加熱至與其組成等對應之溫度而熔解。於熔解槽10,例如,獲得1500℃~1600℃之高溫之熔融玻璃2。於熔解槽10,可藉由於利用鉬、鉑或氧化錫等成形之至少1對電極間流通電流而將電極間之熔融玻璃2通電加熱,又,亦可除通電加熱以外,藉由燃燒器之火焰輔助地對玻璃原料進行加熱。 The glass raw material prepared in the above-described composition is supplied to the melting tank 10 using a raw material dispenser (not shown). The raw material input machine can use a screw feeder to input glass raw materials, and a bucket can also be used to input glass raw materials. In the melting tank 10, the glass raw material is heated to a temperature corresponding to its composition and the like to be melted. In the melting tank 10, for example, a molten glass 2 having a high temperature of 1500 ° C to 1600 ° C is obtained. In the melting tank 10, the molten glass 2 between the electrodes can be electrically heated by a current flowing between at least one pair of electrodes formed by molybdenum, platinum, or tin oxide, or by a burner. The glass material is heated in a flame-assisted manner.
於熔解槽10中所獲得之熔融玻璃2係自熔解槽10通過移送管50a流入至澄清管20。澄清管20及移送管50a、50b、50c係鉑製或鉑合金製之管。於澄清管20,與熔解槽10同樣地設置有加熱器件。於澄清管20,將熔融玻璃2進一步升溫而澄清。例如,於澄清管20,熔融玻璃2之溫度上升至1500℃~1700℃。 The molten glass 2 obtained in the melting tank 10 flows into the clarification pipe 20 through the transfer pipe 50a from the melting tank 10. The clarification pipe 20 and the transfer pipes 50a, 50b, and 50c are pipes made of platinum or platinum alloy. In the clarification pipe 20, a heating device is provided in the same manner as the melting tank 10. In the clarification pipe 20, the molten glass 2 is further heated and clarified. For example, in the clarification pipe 20, the temperature of the molten glass 2 rises to 1500 ° C to 1700 ° C.
於澄清管20中澄清後之熔融玻璃2係自澄清管20通過移送管50b流入至攪拌裝置30。熔融玻璃2係於通過移送管50b時冷卻。於攪拌裝置30,以較通過澄清管20之熔融玻璃2之溫度低之溫度對熔融玻璃2進行攪拌。例如,於攪拌裝置30中,熔融玻璃2之溫度為1250℃~1450℃,熔融玻璃2之黏度為500泊~1300泊。熔融玻璃2係於攪拌裝置30中進行攪拌而均質化。 The molten glass 2 clarified in the clarification pipe 20 flows from the clarification pipe 20 through the transfer pipe 50b to the stirring device 30. The molten glass 2 is cooled while passing through the transfer pipe 50b. In the stirring device 30, the molten glass 2 is stirred at a temperature lower than the temperature of the molten glass 2 passing through the clarification pipe 20. For example, in the stirring device 30, the temperature of the molten glass 2 is 1250 ° C to 1450 ° C, and the viscosity of the molten glass 2 is 500 poise to 1300 poise. The molten glass 2 is homogenized by stirring in the stirring device 30.
已於攪拌裝置30中經均質化之熔融玻璃2係自攪拌裝置30通過移送管50c流入至成形裝置40。熔融玻璃2係於通過移送管50c時,以具有適於熔融玻璃2之成形之黏度之方式冷卻。例如,熔融玻璃2冷卻至1200℃附近。 The molten glass 2 which has been homogenized in the stirring device 30 flows into the forming device 40 from the stirring device 30 through the transfer pipe 50c. The molten glass 2 is cooled so as to have a viscosity suitable for the formation of the molten glass 2 when passing through the transfer pipe 50c. For example, the molten glass 2 is cooled to around 1200 °C.
於成形裝置40,利用溢流下拉法自熔融玻璃2成形玻璃帶3。其次,對成形裝置40之詳細構成及動作進行說明。 In the forming apparatus 40, the glass ribbon 3 is formed from the molten glass 2 by an overflow down-draw method. Next, the detailed configuration and operation of the molding apparatus 40 will be described.
(2)成形裝置之構成 (2) Composition of the forming device
圖3係成形裝置40之前視圖。圖3表示沿著與利用成形裝置40成形之玻璃帶3之表面垂直之方向觀察所得的成形裝置40。圖4係成形裝置40之側視圖。圖4表示沿著與利用成形裝置40成形之玻璃帶3之表面平行之方向觀察所得的成形裝置40。 3 is a front view of the forming device 40. 3 shows the forming device 40 as viewed in a direction perpendicular to the surface of the glass ribbon 3 formed by the forming device 40. 4 is a side view of the forming device 40. 4 shows the resulting forming apparatus 40 as viewed in a direction parallel to the surface of the glass ribbon 3 formed by the forming apparatus 40.
成形裝置40具有被由耐火磚等耐火物構成之爐壁42包圍之空間。該空間係自熔融玻璃2成形玻璃帶3並使玻璃帶3冷卻的空間。該空間包括上部成形空間60、下部成形空間70及徐冷空間80之3個空間。圖5係成形裝置40之上部成形空間60之附近之前視圖。圖6係成形裝置40之上部成形空間60之附近之側視圖。 The forming apparatus 40 has a space surrounded by a furnace wall 42 made of a refractory such as refractory brick. This space is a space in which the glass ribbon 3 is formed from the molten glass 2 and the glass ribbon 3 is cooled. The space includes three spaces of the upper forming space 60, the lower forming space 70, and the undercooling space 80. Figure 5 is a front elevational view of the vicinity of the upper forming space 60 of the forming apparatus 40. Fig. 6 is a side view of the vicinity of the upper forming space 60 of the forming device 40.
成形步驟S4係於上部成形空間60進行。冷卻步驟S5係於下部成形空間70及徐冷空間80進行。上部成形空間60係自攪拌裝置30經由移送管50c供給至成形裝置40之熔融玻璃2成形為玻璃帶3的空間。下部成形空間70係上部成形空間60之下方之空間,且為玻璃帶3急冷至玻璃之徐冷點之附近的空間。徐冷空間80係下部成形空間70之下方之空間,且為玻璃帶3逐漸冷卻之空間。 The forming step S4 is performed in the upper forming space 60. The cooling step S5 is performed in the lower forming space 70 and the quenching space 80. The upper molding space 60 is a space in which the molten glass 2 supplied from the stirring device 30 to the molding device 40 via the transfer pipe 50c is formed into the glass ribbon 3. The lower forming space 70 is a space below the upper forming space 60, and is a space in which the glass ribbon 3 is quenched to a point near the cold spot of the glass. The space below the lower forming space 70 of the X-Cold space 80 is the space in which the glass ribbon 3 is gradually cooled.
成形裝置40主要包括成形體62、複數個發熱體48、上部間隔構件64、冷卻輥72、溫度調節單元74、下部間隔構件76、下拉輥82a~82g、加熱器84a~84g、隔熱構件86、切斷裝置98、及控制裝置91。其次,對成形裝置40之各構成要素進行說明。 The molding apparatus 40 mainly includes a molded body 62, a plurality of heat generating bodies 48, an upper partitioning member 64, a cooling roller 72, a temperature adjusting unit 74, a lower partitioning member 76, pull-down rollers 82a to 82g, heaters 84a to 84g, and a heat insulating member 86. The cutting device 98 and the control device 91. Next, each component of the molding apparatus 40 will be described.
(2-1)成形體 (2-1) Shaped body
成形體62設置於上部成形空間60。成形體62用於使熔融玻璃2溢流而成形玻璃帶3。如圖4所示,成形體62具有類似於楔形之五邊形之剖面形狀。成形體62之剖面形狀之尖端相當於成形體62之下端62a。成形體62為耐火磚製。 The formed body 62 is provided in the upper forming space 60. The molded body 62 is for overflowing the molten glass 2 to form the glass ribbon 3. As shown in Fig. 4, the formed body 62 has a cross-sectional shape similar to a wedge-shaped pentagon. The tip end of the cross-sectional shape of the formed body 62 corresponds to the lower end 62a of the formed body 62. The formed body 62 is made of refractory brick.
於成形體62之上表面62c,沿著成形體62之長度方向形成有供給 槽62b。於成形體62之長度方向之端部,安裝有與供給槽62b連通之移送管50c。供給槽62b係以隨著自與移送管50c連通之一端部朝向另一端部而逐漸變淺的方式形成。以下,如圖3所示,將成形體62之長度方向之一對端部中之與移送管50c連通之側之端部稱為第1端部62d1,將其相反側之端部稱為第2端部62d2。再者,於成形體62之第2端部62d2,設置有用以阻斷供給槽62b中之熔融玻璃2之流動之鉑製導件(未圖示)。 On the upper surface 62c of the molded body 62, a supply is formed along the longitudinal direction of the molded body 62. Slot 62b. A transfer pipe 50c that communicates with the supply groove 62b is attached to an end portion of the molded body 62 in the longitudinal direction. The supply groove 62b is formed to gradually become shallower as it goes from one end to the other end of the transfer tube 50c. Hereinafter, as shown in FIG. 3, the end portion of the one end portion of the longitudinal direction of the molded body 62 that communicates with the transfer pipe 50c is referred to as a first end portion 62d1, and the end portion on the opposite side is referred to as a first portion. 2 end 62d2. Further, a platinum guide (not shown) for blocking the flow of the molten glass 2 in the supply tank 62b is provided in the second end portion 62d2 of the molded body 62.
自攪拌裝置30送至成形裝置40之熔融玻璃2係經由移送管50c流入至成形體62之供給槽62b。熔融玻璃2係於供給槽62b中自第1端部62d1朝向第2端部62d2流動。自成形體62之供給槽62b溢流之熔融玻璃2係沿著成形體62之兩側面流下,並於成形體62之下端62a之附近合流。合流後之熔融玻璃2係藉由重力沿鉛垂方向落下而成形為板狀。藉此,於成形體62之下端62a之附近連續地成形玻璃帶3。所成形之玻璃帶3係沿上部成形空間60流下後,於下部成形空間70及徐冷空間80一面冷卻,一面朝下方被搬送。剛於上部成形空間60成形後之玻璃帶3之溫度為1100℃以上,黏度為25000泊~350000泊。例如,於製造高精細顯示器用之玻璃基板之情形時,藉由成形體62成形之玻璃帶3之應變點為655℃~750℃,較佳為680℃~730℃,於成形體62之下端62a之附近融合之熔融玻璃2之黏度為25000泊~100000泊,較佳為32000泊~80000泊。 The molten glass 2 sent from the stirring device 30 to the molding device 40 flows into the supply groove 62b of the molded body 62 via the transfer pipe 50c. The molten glass 2 flows from the first end portion 62d1 toward the second end portion 62d2 in the supply groove 62b. The molten glass 2 overflowing from the supply groove 62b of the molded body 62 flows down the both sides of the molded body 62, and merges in the vicinity of the lower end 62a of the molded body 62. The molten glass 2 after the joining is formed into a plate shape by dropping in the vertical direction by gravity. Thereby, the glass ribbon 3 is continuously formed in the vicinity of the lower end 62a of the molded body 62. The formed glass ribbon 3 flows down the upper molding space 60, and is cooled while being cooled in the lower molding space 70 and the cold space 80, and is conveyed downward. The glass ribbon 3 just after the upper forming space 60 is formed has a temperature of 1100 ° C or more and a viscosity of 25,000 poise to 350,000 poise. For example, in the case of manufacturing a glass substrate for a high-definition display, the strain point of the glass ribbon 3 formed by the molded body 62 is 655 ° C to 750 ° C, preferably 680 ° C to 730 ° C, at the lower end of the molded body 62. The viscosity of the molten glass 2 fused in the vicinity of 62a is 25,000 poises to 100,000 poises, preferably 32,000 poises to 80,000 poises.
(2-2)發熱體 (2-2) Heating element
如圖5及圖6所示,於成形體62之上方設置有頂板44。頂板44係包含碳化矽之板狀之構件。頂板44固定於爐壁42。頂板44劃分頂板44之上方之上部溫度控制空間46與頂板44之下方之上部成形空間60。上部溫度控制空間46係由爐壁42及頂板44包圍之空間。如圖5所示,於上部溫度控制空間46,沿著成形體62之長度方向等間隔地配置有複數 個發熱體48。 As shown in FIGS. 5 and 6, a top plate 44 is provided above the molded body 62. The top plate 44 is a plate-like member containing tantalum carbide. The top plate 44 is fixed to the furnace wall 42. The top plate 44 divides the upper upper temperature control space 46 of the top plate 44 and the lower upper forming space 60 of the top plate 44. The upper temperature control space 46 is a space surrounded by the furnace wall 42 and the top plate 44. As shown in FIG. 5, in the upper temperature control space 46, plural numbers are arranged at equal intervals along the longitudinal direction of the molded body 62. Heating element 48.
發熱體48係包含碳化矽之多孔質之陶瓷加熱器。發熱體48係藉由通電而發熱之棒狀之構件。如圖6所示,發熱體48係沿著與成形體62之長度方向正交且與鉛垂方向正交之方向配置。各發熱體48連接於個別之電源,各發熱體48之輸出可個別地進行控制。發熱體48係藉由輻射對頂板44進行加熱。由發熱體48加熱後之頂板44係藉由輻射對與成形體62之上表面62c接觸之熔融玻璃2進行加熱。 The heating element 48 is a porous ceramic heater containing niobium carbide. The heating element 48 is a rod-shaped member that generates heat by energization. As shown in FIG. 6, the heating element 48 is arranged along a direction orthogonal to the longitudinal direction of the molded body 62 and orthogonal to the vertical direction. Each of the heating elements 48 is connected to an individual power source, and the output of each heating element 48 can be individually controlled. The heating element 48 heats the top plate 44 by radiation. The top plate 44 heated by the heating element 48 heats the molten glass 2 that is in contact with the upper surface 62c of the formed body 62 by radiation.
如圖5及圖6所示,發熱體48於內部具有冷卻通路48a。冷卻通路48a係沿著發熱體48之長度方向形成。冷卻通路48a係供用以使發熱體48冷卻之流體即冷卻流體流動之空間。冷卻流體例如為空氣。各發熱體48之冷卻通路48a連接於個別之冷卻流體供給裝置,冷卻通路48a中之冷卻流體之流量可個別地進行控制。於冷卻流體為空氣之情形時,冷卻流體供給裝置為空氣泵。再者,就抑制爐壁42、頂板44及發熱體48等之因氧化引起之劣化的觀點而言,於使玻璃基板製造裝置1持續3年以上長時間運轉之情形時,較佳為使用氮氣等惰性氣體作為冷卻流體。 As shown in FIGS. 5 and 6, the heating element 48 has a cooling passage 48a therein. The cooling passage 48a is formed along the longitudinal direction of the heating element 48. The cooling passage 48a is a space in which a fluid for cooling the heating element 48, that is, a cooling fluid flows. The cooling fluid is, for example, air. The cooling passage 48a of each heating element 48 is connected to an individual cooling fluid supply device, and the flow rate of the cooling fluid in the cooling passage 48a can be individually controlled. In the case where the cooling fluid is air, the cooling fluid supply device is an air pump. In addition, from the viewpoint of suppressing deterioration due to oxidation of the furnace wall 42, the top plate 44, and the heat generating body 48, etc., when the glass substrate manufacturing apparatus 1 is operated for a long period of three years or more, it is preferable to use nitrogen gas. An inert gas is used as the cooling fluid.
控制裝置91可藉由控制發熱體48之輸出、及發熱體48之冷卻通路48a中之冷卻流體之流量而控制自發熱體48輻射之熱量。控制裝置91可藉由提高發熱體48之輸出或者減少冷卻通路48a中之冷卻流體之流量來使發熱體48之輻射熱量增加而調整頂板44之溫度。又,控制裝置91可藉由降低發熱體48之輸出或者增加冷卻通路48a中之冷卻流體之流量來使發熱體48之輻射熱量減少而調整頂板44之溫度。又,藉由停止發熱體48之輸出並增加冷卻通路48a中之冷卻流體之流量,可使發熱體48之附近之氛圍溫度降低,而藉由對流熱傳導調整頂板44之溫度。控制裝置91係藉由個別地控制各發熱體48之輻射熱量、及個別地調整冷卻通路48a中之冷卻流體之流量,而管理頂板44之溫度分佈, 對接受來自頂板44之輻射熱的與成形體62之上表面62c接觸之熔融玻璃2之溫度分佈進行控制。溫度分佈係成形體62之長度方向之溫度分佈。 The control device 91 can control the amount of heat radiated from the heating element 48 by controlling the output of the heating element 48 and the flow rate of the cooling fluid in the cooling passage 48a of the heating element 48. The control device 91 can adjust the temperature of the top plate 44 by increasing the output of the heating element 48 or reducing the flow rate of the cooling fluid in the cooling passage 48a to increase the radiant heat of the heating element 48. Further, the control device 91 can adjust the temperature of the top plate 44 by reducing the output of the heat generating body 48 or increasing the flow rate of the cooling fluid in the cooling passage 48a to reduce the radiant heat of the heat generating body 48. Further, by stopping the output of the heating element 48 and increasing the flow rate of the cooling fluid in the cooling passage 48a, the temperature of the atmosphere in the vicinity of the heating element 48 can be lowered, and the temperature of the top plate 44 can be adjusted by convective heat conduction. The control device 91 manages the temperature distribution of the top plate 44 by individually controlling the radiant heat of each of the heat generating bodies 48 and individually adjusting the flow rate of the cooling fluid in the cooling passage 48a. The temperature distribution of the molten glass 2 which is in contact with the upper surface 62c of the formed body 62, which receives the radiant heat from the top plate 44, is controlled. The temperature distribution is a temperature distribution in the longitudinal direction of the formed body 62.
(2-3)上部間隔構件 (2-3) Upper spacer member
上部間隔構件64係設置於成形體62之下端62a之附近之一對板狀之隔熱構件。如圖4所示,上部間隔構件64係配置於玻璃帶3之厚度方向之兩側。上部間隔構件64係將上部成形空間60與下部成形空間70間隔開,而抑制熱自上部成形空間60向下部成形空間70移動。 The upper partition member 64 is a pair of plate-shaped heat insulating members provided in the vicinity of the lower end 62a of the molded body 62. As shown in FIG. 4, the upper partition members 64 are disposed on both sides in the thickness direction of the glass ribbon 3. The upper partition member 64 spaces the upper forming space 60 from the lower forming space 70, and suppresses the movement of heat from the upper forming space 60 to the lower forming space 70.
(2-4)冷卻輥 (2-4) Cooling roller
冷卻輥72係設置於下部成形空間70之懸臂式輥。冷卻輥72設置於上部間隔構件64之正下方。如圖3所示,冷卻輥72配置於玻璃帶3之寬度方向之兩側部。如圖4所示,冷卻輥72配置於玻璃帶3之厚度方向之兩側。玻璃帶3係於其寬度方向之兩側部由冷卻輥72夾持。冷卻輥72係使自上部成形空間60送來之玻璃帶3冷卻。 The cooling roller 72 is a cantilever roller that is disposed in the lower forming space 70. The cooling roller 72 is disposed directly under the upper partition member 64. As shown in FIG. 3, the cooling roll 72 is arrange|positioned in the both sides of the width direction of the glass ribbon 3. As shown in FIG. 4, the cooling rolls 72 are disposed on both sides in the thickness direction of the glass ribbon 3. The glass ribbon 3 is held by the cooling roller 72 at both side portions in the width direction. The cooling roll 72 cools the glass ribbon 3 sent from the upper forming space 60.
於下部成形空間70,玻璃帶3之寬度方向之兩側部分別由2對冷卻輥72夾著。藉由將冷卻輥72朝向玻璃帶3之兩側部之表面壓抵,而使冷卻輥72與玻璃帶3之接觸面積變大,有效率地進行利用冷卻輥72對玻璃帶3之冷卻。冷卻輥72係對玻璃帶3賦予對抗下述之下拉輥82a~82g將玻璃帶3朝下方拉伸之力的力。再者,由冷卻輥72之旋轉速度與配置於最上方之下拉輥82a之旋轉速度之差決定玻璃帶3之厚度。 In the lower molding space 70, both side portions in the width direction of the glass ribbon 3 are sandwiched by two pairs of cooling rolls 72. By pressing the cooling rolls 72 toward the surfaces of both side portions of the glass ribbon 3, the contact area between the cooling rolls 72 and the glass ribbon 3 is increased, and the glass ribbon 3 is cooled by the cooling rolls 72 efficiently. The cooling roller 72 applies a force to the glass ribbon 3 against the downward pulling force of the lower rollers 82a to 82g to pull the glass ribbon 3 downward. Further, the thickness of the glass ribbon 3 is determined by the difference between the rotational speed of the cooling roller 72 and the rotational speed of the uppermost lower pulling roller 82a.
冷卻輥72係於內部具有空冷管。冷卻輥72係藉由空冷管而始終冷卻。冷卻輥72係藉由夾住玻璃帶3之寬度方向之兩側部而與玻璃帶3接觸。藉此,熱自玻璃帶3傳遞至冷卻輥72,因此,使玻璃帶3之寬度方向之兩側部冷卻。與冷卻輥72接觸而冷卻後之玻璃帶3之寬度方向之兩側部之黏度例如為109.0泊以上。 The cooling roller 72 has an air cooling tube inside. The cooling roller 72 is always cooled by the air cooling tube. The cooling roller 72 is in contact with the glass ribbon 3 by sandwiching both side portions in the width direction of the glass ribbon 3. Thereby, heat is transmitted from the glass ribbon 3 to the cooling roll 72, and therefore both sides in the width direction of the glass ribbon 3 are cooled. The viscosity of both sides in the width direction of the glass ribbon 3 which is cooled by contact with the cooling roll 72 is, for example, 10 9.0 poise or more.
冷卻輥72與玻璃帶3之間之接觸荷重可由控制裝置91控制。接觸 荷重例如藉由使用彈簧調整冷卻輥72之位置而進行控制。接觸荷重越大,則冷卻輥72壓抵玻璃帶3之力越強。 The contact load between the chill roll 72 and the glass ribbon 3 can be controlled by the control device 91. contact The load is controlled, for example, by adjusting the position of the cooling roller 72 using a spring. The greater the contact load, the stronger the force of the chill roll 72 against the glass ribbon 3.
(2-5)溫度調節單元 (2-5) Temperature adjustment unit
溫度調節單元74設置於下部成形空間70。溫度調節單元74設置於上部間隔構件64之下方且下部間隔構件76之上方。 The temperature adjustment unit 74 is disposed in the lower forming space 70. The temperature adjustment unit 74 is disposed below the upper spacing member 64 and above the lower spacing member 76.
於下部成形空間70,使玻璃帶3冷卻直至玻璃帶3之寬度方向之中心部之溫度降低至徐冷點附近為止。溫度調節單元74係對在下部成形空間70冷卻之玻璃帶3之溫度進行調節。溫度調節單元74係將玻璃帶3加熱或冷卻之單元。如圖3所示,溫度調節單元74包括中心部冷卻單元74a及側部冷卻單元74b。中心部冷卻單元74a係對玻璃帶3之寬度方向之中心部之溫度進行調節。側部冷卻單元74b係對玻璃帶3之寬度方向之兩側部之溫度進行調節。此處,玻璃帶3之寬度方向之中心部係指夾於玻璃帶3之寬度方向之兩側部之間之區域。 In the lower molding space 70, the glass ribbon 3 is cooled until the temperature of the center portion in the width direction of the glass ribbon 3 is lowered to the vicinity of the cold spot. The temperature adjusting unit 74 adjusts the temperature of the glass ribbon 3 cooled in the lower forming space 70. The temperature adjustment unit 74 is a unit that heats or cools the glass ribbon 3. As shown in FIG. 3, the temperature adjustment unit 74 includes a center portion cooling unit 74a and a side portion cooling unit 74b. The center portion cooling unit 74a adjusts the temperature of the center portion of the glass ribbon 3 in the width direction. The side cooling unit 74b adjusts the temperature of both side portions in the width direction of the glass ribbon 3. Here, the center portion in the width direction of the glass ribbon 3 refers to a region sandwiched between both side portions in the width direction of the glass ribbon 3.
於下部成形空間70,如圖3所示,複數個中心部冷卻單元74a及複數個側部冷卻單元74b分別沿著玻璃帶3流下之方向即鉛垂方向配置。中心部冷卻單元74a係以與玻璃帶3之寬度方向之中心部之表面對向之方式配置。側部冷卻單元74b係以與玻璃帶3之寬度方向之兩側部之表面對向之方式配置。 As shown in FIG. 3, in the lower molding space 70, a plurality of central portion cooling units 74a and a plurality of side cooling units 74b are disposed in a vertical direction, that is, a direction in which the glass ribbon 3 flows downward. The center portion cooling unit 74a is disposed to face the surface of the center portion in the width direction of the glass ribbon 3. The side cooling unit 74b is disposed to face the surfaces of both side portions in the width direction of the glass ribbon 3.
溫度調節單元74係由控制裝置91控制。各中心部冷卻單元74a及各側部冷卻單元74b可藉由控制裝置91獨立地進行控制。 The temperature adjustment unit 74 is controlled by the control device 91. Each of the center portion cooling unit 74a and each of the side portion cooling units 74b can be independently controlled by the control device 91.
(2-6)下部間隔構件 (2-6) lower spacer member
下部間隔構件76係設置於溫度調節單元74之下方之一對板狀之隔熱構件。如圖4所示,下部間隔構件76設置於玻璃帶3之厚度方向之兩側。下部間隔構件76係將下部成形空間70與徐冷空間80於鉛垂方向間隔開,而抑制熱自下部成形空間70向徐冷空間80移動。 The lower partition member 76 is provided in a pair of plate-shaped heat insulating members below the temperature adjusting unit 74. As shown in FIG. 4, the lower partition members 76 are provided on both sides in the thickness direction of the glass ribbon 3. The lower partition member 76 spaces the lower forming space 70 from the cold space 80 in the vertical direction, and suppresses the movement of heat from the lower forming space 70 to the cold space 80.
(2-7)下拉輥 (2-7) pull-down roller
下拉輥82a~82g係設置於徐冷空間80之懸臂式輥。於徐冷空間80,自上方朝向下方隔開間隔配置有下拉輥82a、下拉輥82b、...、下拉輥82f及下拉輥82g。下拉輥82a配置於最上方,下拉輥82g配置於最下方。 The pull-down rolls 82a to 82g are cantilever rolls provided in the cold space 80. In the Xu cold space 80, a pull-down roller 82a, a pull-down roller 82b, ..., a pull-down roller 82f, and a pull-down roller 82g are disposed at intervals from the upper side toward the lower side. The pull-down roller 82a is disposed at the uppermost position, and the pull-down roller 82g is disposed at the lowest position.
如圖3所示,下拉輥82a~82g分別配置於玻璃帶3之寬度方向之兩側部。如圖4所示,下拉輥82a~82g分別配置於玻璃帶3之厚度方向之兩側。即,玻璃帶3之寬度方向之兩側部係自上方朝向下方由2對下拉輥82a、2對下拉輥82b、...、2對下拉輥82f及2對下拉輥82g夾著。 As shown in FIG. 3, the pull-down rolls 82a-82g are respectively arrange|positioned in the both sides of the width direction of the glass ribbon 3. As shown in FIG. 4, the pull-down rolls 82a to 82g are respectively disposed on both sides in the thickness direction of the glass ribbon 3. In other words, the both side portions in the width direction of the glass ribbon 3 are sandwiched by the pair of pull-down rollers 82a, 2, the pair of pull-down rollers 82b, ..., 2, the pair of pull-down rollers 82f, and the pair of pull-down rollers 82g from the upper side toward the lower side.
下拉輥82a~82g係一面夾住通過下部成形空間70之玻璃帶3之寬度方向之兩端部,一面進行旋轉,藉此,將玻璃帶3朝鉛垂方向下方下拉。即,下拉輥82a~82g係用以將玻璃帶3朝下方搬送之輥。 The pull-down rolls 82a to 82g are rotated while sandwiching the both end portions of the glass ribbon 3 passing through the lower molding space 70 in the width direction, thereby pulling the glass ribbon 3 downward in the vertical direction. That is, the pull-down rolls 82a to 82g are rollers for conveying the glass ribbon 3 downward.
各下拉輥82a~82g之角速度可藉由控制裝置91獨立地進行控制。下拉輥82a~82g之角速度越大,則將玻璃帶3朝下方搬送之速度越大。 The angular velocities of the respective pull-down rollers 82a to 82g can be independently controlled by the control device 91. The higher the angular velocity of the pull-down rolls 82a to 82g, the higher the speed at which the glass ribbon 3 is conveyed downward.
(2-8)加熱器 (2-8) heater
加熱器84a~84g設置於徐冷空間80。如圖4所示,於徐冷空間80,自上方朝向下方隔開間隔配置有加熱器84a、加熱器84b、...、加熱器84f及加熱器84g。加熱器84a~84g分別配置於玻璃帶3之厚度方向之兩側。下拉輥82a~82g分別配置於加熱器84a~84g與玻璃帶3之間。 The heaters 84a to 84g are provided in the cold space 80. As shown in Fig. 4, in the cold space 80, a heater 84a, a heater 84b, ..., a heater 84f, and a heater 84g are disposed at intervals from above. The heaters 84a to 84g are disposed on both sides in the thickness direction of the glass ribbon 3, respectively. The pull-down rolls 82a to 82g are disposed between the heaters 84a to 84g and the glass ribbon 3, respectively.
加熱器84a~84g係朝向玻璃帶3之表面輻射熱而加熱玻璃帶3。藉由使用加熱器84a~84g,可對在徐冷空間80朝下方搬送之玻璃帶3之溫度進行調節。藉此,加熱器84a~84g可於玻璃帶3之搬送方向上於玻璃帶3形成特定之溫度分佈。 The heaters 84a to 84g radiate heat toward the surface of the glass ribbon 3 to heat the glass ribbon 3. By using the heaters 84a to 84g, the temperature of the glass ribbon 3 conveyed downward in the cold space 80 can be adjusted. Thereby, the heaters 84a to 84g can form a specific temperature distribution in the glass ribbon 3 in the conveying direction of the glass ribbon 3.
各加熱器84a~84g之輸出可藉由控制裝置91獨立地進行控制。又,加熱器84a~84g亦可沿著玻璃帶3之寬度方向分割為複數個加熱 器次單元(未圖示),且各加熱器次單元之輸出可藉由控制裝置91獨立地進行控制。於該情形時,各加熱器84a~84g可藉由根據玻璃帶3之寬度方向之位置使發熱量變化而於玻璃帶3之寬度方向形成特定之溫度分佈。 The outputs of the heaters 84a-84g can be independently controlled by the control unit 91. Further, the heaters 84a to 84g may be divided into a plurality of heating along the width direction of the glass ribbon 3. The sub-units (not shown), and the outputs of the sub-units of the heaters can be independently controlled by the control unit 91. In this case, each of the heaters 84a to 84g can form a specific temperature distribution in the width direction of the glass ribbon 3 by changing the amount of heat generation according to the position in the width direction of the glass ribbon 3.
再者,於各加熱器84a~84g之附近,設置有測定徐冷空間80之氛圍之溫度之熱電偶(未圖示)。熱電偶例如對玻璃帶3之寬度方向之中心部附近之氛圍溫度與兩側部附近之氛圍溫度進行測定。加熱器84a~84g亦可根據由熱電偶測定之徐冷空間80之氛圍之溫度進行控制。 Further, a thermocouple (not shown) for measuring the temperature of the atmosphere of the quenching space 80 is provided in the vicinity of each of the heaters 84a to 84g. The thermocouple measures, for example, the ambient temperature in the vicinity of the center portion in the width direction of the glass ribbon 3 and the ambient temperature in the vicinity of both side portions. The heaters 84a to 84g can also be controlled according to the temperature of the atmosphere of the cold space 80 measured by the thermocouple.
(2-9)隔熱構件 (2-9) Insulation member
隔熱構件86設置於徐冷空間80。隔熱構件86係設置於沿著玻璃帶3之搬送方向相鄰之2個下拉輥82a~82g之間之高度位置。如圖4所示,隔熱構件86係於玻璃帶3之厚度方向之兩側水平配置之一對隔熱板。隔熱構件86係將徐冷空間80於鉛垂方向間隔開,而抑制徐冷空間80中之鉛垂方向之熱之移動。 The heat insulating member 86 is disposed in the cold space 80. The heat insulating member 86 is disposed at a height position between the two pull-down rolls 82a to 82g adjacent to each other in the conveyance direction of the glass ribbon 3. As shown in FIG. 4, the heat insulating member 86 is disposed horizontally on one of the two sides of the glass ribbon 3 in the thickness direction. The heat insulating member 86 spaces the cold space 80 in the vertical direction, and suppresses the movement of heat in the vertical direction in the cold space 80.
隔熱構件86係以不與朝下方搬送之玻璃帶3接觸之方式設置。又,隔熱構件86係以可調整至玻璃帶3之表面之距離之方式設置。藉此,隔熱構件86抑制隔熱構件86之上方之空間與隔熱構件86之下方之空間之間的熱之移動。 The heat insulating member 86 is provided so as not to be in contact with the glass ribbon 3 that is transported downward. Further, the heat insulating member 86 is provided to be adjustable to the distance from the surface of the glass ribbon 3. Thereby, the heat insulating member 86 suppresses the movement of heat between the space above the heat insulating member 86 and the space below the heat insulating member 86.
(2-10)切斷裝置 (2-10) cutting device
切斷裝置98設置於徐冷空間80之下方之空間。切斷裝置98係將通過徐冷空間80之玻璃帶3每隔特定之尺寸沿著玻璃帶3之寬度方向切斷。通過徐冷空間80之玻璃帶3係冷卻至室溫附近之平坦之玻璃帶3。 The cutting device 98 is disposed in a space below the cold space 80. The cutting device 98 cuts the glass ribbon 3 passing through the cold space 80 at a specific dimension along the width direction of the glass ribbon 3. The glass ribbon 3 of the cold space 80 is cooled to a flat glass ribbon 3 near room temperature.
切斷裝置98係以特定之時間間隔將玻璃帶3切斷。藉此,於玻璃帶3之搬送速度固定之情形時,量產具有與最終製品接近之尺寸之玻璃基板。 The cutting device 98 cuts the glass ribbon 3 at specific time intervals. Thereby, when the conveying speed of the glass ribbon 3 is fixed, the glass substrate which has the size similar to a final product is mass-produced.
(2-11)控制裝置 (2-11) Control device
控制裝置91係主要包括CPU(Central Processing Unit,中央處理單元)、RAM(Random Access Memory,隨機存取記憶體)、ROM(Read Only Memory,唯讀記憶體)及硬碟等之電腦。圖7係控制裝置91之方塊圖。如圖7所示,控制裝置91係與冷卻輥驅動馬達172、溫度調節單元74、下拉輥驅動馬達182、加熱器84a~84g、發熱體48及切斷裝置驅動馬達198連接。冷卻輥驅動馬達172係用以控制冷卻輥72之位置及旋轉速度等之馬達。下拉輥驅動馬達182係用以獨立地控制各下拉輥82a~82g之位置及旋轉速度等之馬達。切斷裝置驅動馬達198係用以控制切斷裝置98將玻璃帶3切斷之時間間隔等之馬達。控制裝置91記憶有用以獲取各構成要素之狀態且控制各構成要素之程式。 The control device 91 mainly includes a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), and a hard disk. FIG. 7 is a block diagram of the control device 91. As shown in FIG. 7, the control device 91 is connected to the cooling roller drive motor 172, the temperature adjustment unit 74, the pull-down roller drive motor 182, the heaters 84a to 84g, the heating element 48, and the cutting device drive motor 198. The cooling roller drive motor 172 is a motor for controlling the position and rotational speed of the cooling roller 72. The pull-down roller drive motor 182 is a motor for independently controlling the position and rotational speed of each of the pull-down rollers 82a to 82g. The cutting device drive motor 198 is a motor for controlling the time interval in which the cutting device 98 cuts the glass ribbon 3 or the like. The control device 91 stores a program for obtaining the state of each component and controlling each component.
控制裝置91可控制冷卻輥驅動馬達172而獲取並調節夾住玻璃帶3之寬度方向之側部之一對冷卻輥72與玻璃帶3之間之接觸荷重。控制裝置91可控制下拉輥驅動馬達182而獲取旋轉之各下拉輥82a~82g之轉矩並調節各下拉輥82a~82g之角速度。控制裝置91可獲取並調節溫度調節單元74之輸出、及各加熱器84a~84g之輸出。控制裝置91係個別地控制各發熱體48之輻射熱量。控制裝置91可控制切斷裝置驅動馬達198而獲取並調節切斷裝置98將玻璃帶3切斷之時間間隔等。 The control device 91 can control the cooling roller drive motor 172 to acquire and adjust the contact load between one of the side portions sandwiching the width direction of the glass ribbon 3 and the cooling roller 72 and the glass ribbon 3. The control device 91 can control the pull-down roller drive motor 182 to obtain the torque of each of the rotating pull-down rollers 82a to 82g and adjust the angular velocities of the respective pull-down rollers 82a to 82g. The control unit 91 can acquire and adjust the output of the temperature adjustment unit 74 and the outputs of the heaters 84a to 84g. The control device 91 individually controls the radiant heat of each of the heat generating bodies 48. The control device 91 can control the cutting device drive motor 198 to acquire and adjust the time interval at which the cutting device 98 cuts the glass ribbon 3, and the like.
(3)成形裝置之動作 (3) Action of the forming device
於上部成形空間60,自攪拌裝置30經由移送管50c送至成形裝置40之熔融玻璃2係供給至形成於成形體62之上表面62c之供給槽62b。自成形體62之供給槽62b溢流之熔融玻璃2係沿著成形體62之兩側面流下,並於成形體62之下端62a之附近合流。於成形體62之下端62a之附近,自合流後之熔融玻璃2連續地成形玻璃帶3。所成形之玻璃帶3被送至下部成形空間70。 In the upper molding space 60, the molten glass 2 sent from the stirring device 30 to the molding device 40 via the transfer pipe 50c is supplied to the supply groove 62b formed on the upper surface 62c of the molded body 62. The molten glass 2 overflowing from the supply groove 62b of the molded body 62 flows down the both sides of the molded body 62, and merges in the vicinity of the lower end 62a of the molded body 62. In the vicinity of the lower end 62a of the formed body 62, the glass ribbon 3 is continuously formed from the molten glass 2 after the joining. The formed glass ribbon 3 is sent to the lower forming space 70.
於下部成形空間70,玻璃帶3之寬度方向之兩側部係與冷卻輥72接觸而急冷。又,藉由溫度調節單元74對玻璃帶3之溫度進行調節直 至玻璃帶3之寬度方向中心部之溫度降低至徐冷點為止。由冷卻輥72一面朝下方搬送、一面冷卻之玻璃帶3被送至徐冷空間80。 In the lower molding space 70, both side portions in the width direction of the glass ribbon 3 are brought into contact with the cooling roller 72 to be quenched. Moreover, the temperature of the glass ribbon 3 is adjusted by the temperature adjusting unit 74. The temperature in the center portion in the width direction of the glass ribbon 3 is lowered to the point of freezing. The glass ribbon 3 which is conveyed downward by the cooling roller 72 and cooled while being cooled is sent to the cold space 80.
於徐冷空間80,玻璃帶3係一面由下拉輥82a~82g下拉,一面逐漸冷卻。玻璃帶3之溫度係以沿著玻璃帶3之寬度方向形成特定之溫度分佈之方式藉由加熱器84a~84g進行控制。於徐冷空間80,玻璃帶3之溫度係自徐冷點附近逐漸降低至較比應變點低200℃之溫度更低之溫度。 In the cold space 80, the glass ribbon 3 is pulled down by the pull-down rolls 82a to 82g, and gradually cooled. The temperature of the glass ribbon 3 is controlled by the heaters 84a to 84g so as to form a specific temperature distribution along the width direction of the glass ribbon 3. In the cold space 80, the temperature of the glass ribbon 3 gradually decreases from the vicinity of the cold point to a temperature lower than the temperature lower than the strain point by 200 °C.
通過徐冷空間80之玻璃帶3進而冷卻至室溫附近為止,由切斷裝置98切斷為特定之尺寸而獲得玻璃基板。其後,進行玻璃基板之端面之研磨及清洗等。然後,將特定之檢查合格之玻璃基板捆包而作為製品出貨。 The glass ribbon 3 of the cold space 80 is further cooled to near room temperature, and is cut into a specific size by the cutting device 98 to obtain a glass substrate. Thereafter, polishing, cleaning, and the like of the end faces of the glass substrate are performed. Then, the glass substrate which has passed the specific inspection is bundled and shipped as a product.
(4)控制裝置之動作 (4) Action of the control device
控制裝置91係至少記憶並執行包括搬送部、獲取部及控制部之3個程式。 The control device 91 stores and executes at least three programs including a transport unit, an acquisition unit, and a control unit.
搬送部係使用設置於成形體62之下方之下拉輥82a~82g,將藉由成形體62所成形之玻璃帶3於徐冷空間80以特定之搬送速度朝下方搬送。搬送部係控制下拉輥驅動馬達182,對各下拉輥82a~82g之旋轉速度進行調節,藉此,調節玻璃帶3之搬送速度。 In the conveyance unit, the glass ribbons 3 formed by the molded body 62 are conveyed downward at a specific conveyance speed by using the lower rolls 82a to 82g provided below the molded body 62. The conveyance unit controls the pull-down roller drive motor 182 to adjust the rotation speed of each of the pull-down rollers 82a to 82g, thereby adjusting the conveyance speed of the glass ribbon 3.
獲取部係藉由利用電腦模擬求出成形體62之形狀之時間變化而獲取與成形體62之當前之形狀相關之形狀資料。獲取部例如使用有限元素法,藉由模擬求出成形體62之形狀之時間變化,而獲得形狀資料。圖8係藉由獲取部所獲取之成形體62之形狀資料之一例。圖8表示沿著與藉由成形體62所成形之玻璃帶3之表面垂直之方向觀察所得的成形體62。於圖8中,相較於實際,強調地表示成形體62之蠕變變形。於圖8中,以虛線表示未使用之成形體62之形狀、即蠕變變形之前之成形體62之形狀,且以實線表示蠕變變形後之成形體62之當前之 形狀。 The acquisition unit acquires shape data relating to the current shape of the molded body 62 by temporally changing the shape of the molded body 62 by computer simulation. The acquisition unit obtains shape data by, for example, obtaining a time change of the shape of the molded body 62 by simulation using a finite element method. Fig. 8 is an example of the shape data of the molded body 62 obtained by the acquisition unit. Fig. 8 shows the obtained molded body 62 as viewed in a direction perpendicular to the surface of the glass ribbon 3 formed by the formed body 62. In Fig. 8, the creep deformation of the formed body 62 is emphasized in comparison with the actual one. In Fig. 8, the shape of the unused molded body 62, that is, the shape of the molded body 62 before creep deformation, is indicated by a broken line, and the current shape of the molded body 62 after creep deformation is indicated by a solid line. shape.
獲取部係自成形體62之基於蠕變變形之形狀資料,至少獲取成形體62之上表面62c之鉛垂方向之位移量即上表面位移量。於圖8中,上表面位移量係蠕變變形前之上表面62c與蠕變變形後之上表面62c之間之鉛垂方向之尺寸。再者,於圖8中表示成形體62之長度方向上之上表面位移量之最大值即最大上表面位移量L。 The acquisition unit obtains at least the amount of displacement in the vertical direction of the upper surface 62c of the molded body 62, that is, the amount of displacement of the upper surface, from the shape data based on the creep deformation of the molded body 62. In Fig. 8, the upper surface displacement amount is the dimension in the vertical direction between the upper surface 62c before the creep deformation and the upper surface 62c after the creep deformation. In addition, FIG. 8 shows the maximum upper surface displacement amount L which is the maximum value of the surface displacement amount in the longitudinal direction of the molded body 62.
又,獲取部係獲取由玻璃基板形狀測定裝置(未圖示)測定到之玻璃基板之厚度資料。厚度資料係例如藉由玻璃基板製造裝置1所製造之玻璃基板之厚度之寬度方向之分佈。 Moreover, the acquisition unit acquires the thickness data of the glass substrate measured by the glass substrate shape measuring device (not shown). The thickness data is, for example, a distribution in the width direction of the thickness of the glass substrate produced by the glass substrate manufacturing apparatus 1.
控制部係根據藉由獲取部所獲取之成形體62之形狀資料,以玻璃帶3之寬度方向之板厚偏差變小之方式,個別地控制各發熱體48之輻射熱量、及各發熱體48之冷卻通路48a中之冷卻流體之流量,而控制與成形體62之上表面62c接觸之熔融玻璃2之溫度分佈。成形體62之形狀資料例如為成形體62之長度方向上之上表面位移量之分佈即形狀分佈。控制部係以如下方式控制發熱體48,即,根據形狀分佈求得之上表面62c之位移量越大,則溫度分佈之第1端部62d1之溫度越成為更低之值,且溫度分佈之中央部之溫度越成為更高之值。作為根據形狀分佈求得之上表面62c之位移量,例如使用最大上表面位移量L。 The control unit individually controls the radiant heat of each of the heat generating elements 48 and the respective heat generating bodies 48 so that the variation in the thickness of the glass ribbon 3 in the width direction is small, based on the shape data of the molded body 62 obtained by the acquiring unit. The flow rate of the cooling fluid in the cooling passage 48a is controlled to control the temperature distribution of the molten glass 2 which is in contact with the upper surface 62c of the formed body 62. The shape data of the molded body 62 is, for example, a distribution of the surface displacement amount in the longitudinal direction of the molded body 62, that is, a shape distribution. The control unit controls the heating element 48 such that the temperature of the first end portion 62d1 of the temperature distribution becomes lower as the displacement amount of the upper surface 62c is larger, and the temperature distribution is higher. The temperature in the central part becomes a higher value. As the displacement amount of the upper surface 62c obtained from the shape distribution, for example, the maximum upper surface displacement amount L is used.
若熔融玻璃2之溫度分佈之第1端部62d1之溫度變低,則第1端部62d1之供給槽62b之熔融玻璃2之溫度降低,因此,第1端部62d1之供給槽62b之熔融玻璃2之黏度上升。若自供給槽62b溢出之熔融玻璃2之黏度上升,則沿成形體62之兩側面流下之熔融玻璃2之厚度變大,因此,於成形體62之下端62a成形之玻璃帶3之厚度亦變大。因此,若控制發熱體48之輻射熱量而使熔融玻璃2之溫度分佈之第1端部62d1之溫度降低,則玻璃帶3之第1端部62d1側之厚度變大。 When the temperature of the first end portion 62d1 of the temperature distribution of the molten glass 2 is lowered, the temperature of the molten glass 2 in the supply groove 62b of the first end portion 62d1 is lowered. Therefore, the molten glass of the supply groove 62b of the first end portion 62d1 is lowered. The viscosity of 2 increases. When the viscosity of the molten glass 2 overflowing from the supply tank 62b rises, the thickness of the molten glass 2 flowing down along both sides of the molded body 62 becomes large, and therefore the thickness of the glass ribbon 3 formed at the lower end 62a of the molded body 62 also changes. Big. Therefore, when the radiant heat of the heating element 48 is controlled and the temperature of the first end portion 62d1 of the temperature distribution of the molten glass 2 is lowered, the thickness of the first end portion 62d1 side of the glass ribbon 3 becomes large.
又,若熔融玻璃2之溫度分佈之中央部之溫度變高,則寬度方向 中央部之供給槽62b之熔融玻璃2之溫度上升,因此,寬度方向中央部之供給槽62b之熔融玻璃2之黏度降低。藉此,通過供給槽62b之寬度方向中央部之熔融玻璃2之黏度降低,因此,於供給槽62b中熔融玻璃2容易自寬度方向中央部朝向第2端部62d2流動。其結果,朝向第2端部62d2流動之熔融玻璃2之量增加,而自供給槽62b之第2端部62d2溢出之熔融玻璃2之量增加,因此,玻璃帶3之第2端部62d2側之厚度變大。又,藉由寬度方向中央部之供給槽62b之熔融玻璃2之黏度降低,而玻璃帶3之寬度方向中央部之厚度變小。 Further, if the temperature of the central portion of the temperature distribution of the molten glass 2 becomes high, the width direction Since the temperature of the molten glass 2 of the supply groove 62b of the center part rises, the viscosity of the molten glass 2 of the supply groove 62b of the center part of the width direction falls. In this way, the viscosity of the molten glass 2 in the center portion in the width direction of the supply groove 62b is lowered. Therefore, in the supply groove 62b, the molten glass 2 easily flows from the central portion in the width direction toward the second end portion 62d2. As a result, the amount of the molten glass 2 flowing toward the second end portion 62d2 increases, and the amount of the molten glass 2 overflowing from the second end portion 62d2 of the supply groove 62b increases, so that the second end portion 62d2 side of the glass ribbon 3 is increased. The thickness becomes larger. In addition, the viscosity of the molten glass 2 in the supply groove 62b at the center portion in the width direction is lowered, and the thickness of the central portion in the width direction of the glass ribbon 3 is reduced.
因此,藉由如上述般控制與成形體62之上表面62c接觸之熔融玻璃2之溫度分佈,可使玻璃帶3之寬度方向中央部之厚度變小並使玻璃帶3之寬度方向兩端部之厚度變大。 Therefore, by controlling the temperature distribution of the molten glass 2 which is in contact with the upper surface 62c of the molded body 62 as described above, the thickness of the central portion in the width direction of the glass ribbon 3 can be made small and both ends in the width direction of the glass ribbon 3 can be made. The thickness becomes larger.
控制裝置91可藉由搬送部、獲取部及控制部如以下說明般使於徐冷空間80朝下方搬送之玻璃帶3之寬度方向之板厚偏差減小。 The control unit 91 can reduce the variation in the thickness of the glass ribbon 3 conveyed downward in the cold space 80 by the conveyance unit, the acquisition unit, and the control unit as described below.
(5)特徵 (5) Features
於本實施形態中,成形體62設置於上部成形空間60之高溫之氛圍下。於玻璃帶3之成形步驟中,對成形體62施加基於成形體62之重量及供給至供給槽62b之熔融玻璃2之重量之荷重。因此,因玻璃基板製造裝置1之長年之運轉,而使成形體62如圖8所示般根據成形體62之材質之熱蠕變特性逐漸蠕變變形。尤其是,成形體62之長度方向之中央部容易因蠕變變形朝下方下垂而撓曲。於圖8中,最大上表面位移量L係成形體62之長度方向之中央部之上表面位移量。 In the present embodiment, the molded body 62 is provided in an atmosphere of a high temperature in the upper molding space 60. In the molding step of the glass ribbon 3, the weight of the molded body 62 and the weight of the molten glass 2 supplied to the supply tank 62b are applied to the molded body 62. Therefore, the molded body 62 gradually creeps and deforms according to the thermal creep property of the material of the molded body 62 as shown in FIG. 8 due to the long-term operation of the glass substrate manufacturing apparatus 1. In particular, the central portion of the molded body 62 in the longitudinal direction is likely to sag downward due to creep deformation and to be deflected. In FIG. 8, the maximum upper surface displacement amount L is the amount of surface displacement above the central portion in the longitudinal direction of the molded body 62.
若成形體62如圖8所示般蠕變變形,則自成形體62之長度方向之中央部溢出之熔融玻璃2之量較自成形體62之長度方向之兩端部溢出之熔融玻璃2之量多。於該情形時,藉由成形體62成形之玻璃帶3之寬度方向中央部之厚度較寬度方向兩端部之厚度大。其結果,有玻璃帶3之寬度方向之板厚偏差變大而作為最終製品之玻璃基板之板厚偏差 增加之虞。尤其是,最大上表面位移量L越大,則成形體62之蠕變變形之程度越大,因此,玻璃帶3之寬度方向之板厚偏差亦變大。 When the molded body 62 is creep-deformed as shown in FIG. 8, the amount of the molten glass 2 overflowing from the center portion in the longitudinal direction of the molded body 62 is larger than that of the molten glass 2 overflowing from both end portions in the longitudinal direction of the molded body 62. More quantity. In this case, the thickness of the central portion in the width direction of the glass ribbon 3 formed by the molded body 62 is larger than the thickness of both end portions in the width direction. As a result, the variation in the thickness of the glass ribbon 3 in the width direction is large, and the thickness deviation of the glass substrate as the final product is large. Increase the number. In particular, the larger the maximum upper surface displacement amount L is, the greater the degree of creep deformation of the molded body 62 is. Therefore, the variation in the thickness of the glass ribbon 3 in the width direction is also large.
本實施形態之玻璃基板製造裝置1係根據成形體62之形狀資料、及玻璃基板之厚度資料,算出為了使玻璃基板之寬度方向之板厚偏差減小而較佳之溫度分佈。溫度分佈係與成形體62之上表面62c接觸之熔融玻璃2之溫度分佈。而且,玻璃基板製造裝置1係根據算出之溫度分佈,個別地控制各發熱體48之輻射熱量、及各發熱體48之冷卻通路48a中之冷卻流體之流量,而實現算出之溫度分佈,藉此,可使因成形體62之蠕變變形引起之玻璃帶3之寬度方向之板厚偏差減小。又,玻璃基板製造裝置1亦可於實現算出之溫度分佈後,再次獲取玻璃基板之厚度資料,並根據所獲取之厚度資料,進一步算出為了使玻璃基板之寬度方向之板厚偏差減小而較佳之溫度分佈。 In the glass substrate manufacturing apparatus 1 of the present embodiment, the temperature distribution in order to reduce the variation in the thickness of the glass substrate in the width direction is calculated based on the shape data of the molded body 62 and the thickness data of the glass substrate. The temperature distribution is a temperature distribution of the molten glass 2 which is in contact with the upper surface 62c of the formed body 62. Further, the glass substrate manufacturing apparatus 1 individually controls the radiant heat of each of the heat generating bodies 48 and the flow rate of the cooling fluid in the cooling passages 48a of the heat generating bodies 48 based on the calculated temperature distribution, thereby realizing the calculated temperature distribution. The thickness deviation in the width direction of the glass ribbon 3 due to the creep deformation of the molded body 62 can be reduced. Further, after the glass substrate manufacturing apparatus 1 realizes the calculated temperature distribution, the thickness data of the glass substrate can be acquired again, and based on the obtained thickness data, it is further calculated to reduce the variation in the thickness direction of the glass substrate in the width direction. Good temperature distribution.
接下來,對藉由熔融玻璃2之溫度分佈之控制而玻璃帶3之寬度方向之板厚偏差減小的理由進行說明。首先,玻璃基板製造裝置1之控制裝置91之獲取部係獲取作為與圖8所示之蠕變變形之成形體62之當前之形狀相關之形狀資料之一種的形狀分佈。又,獲取部獲取玻璃基板之厚度資料。其次,控制裝置91之控制部係基於根據形狀分佈求得之上表面62c之位移量(最大上表面位移量L)、及玻璃基板之厚度資料,決定如於徐冷空間80朝下方搬送之玻璃帶3之寬度方向之板厚偏差成為最小的熔融玻璃2之溫度分佈。具體而言,控制部係以如下方式決定溫度分佈,即,最大上表面位移量L越大,則溫度分佈之第1端部62d1之溫度越成為更低之值,且溫度分佈之中央部之溫度越成為更高之值。 Next, the reason why the variation in the thickness of the glass ribbon 3 in the width direction is reduced by the control of the temperature distribution of the molten glass 2 will be described. First, the acquisition portion of the control device 91 of the glass substrate manufacturing apparatus 1 acquires a shape distribution which is one of the shape data relating to the current shape of the creep-deformed molded body 62 shown in FIG. Further, the acquisition unit acquires the thickness data of the glass substrate. Next, the control unit of the control device 91 determines the glass to be conveyed downward in the cold space 80 based on the displacement amount of the upper surface 62c (the maximum upper surface displacement amount L) and the thickness data of the glass substrate based on the shape distribution. The variation in the thickness of the strip 3 in the width direction is the smallest temperature distribution of the molten glass 2. Specifically, the control unit determines the temperature distribution such that the temperature of the first end portion 62d1 of the temperature distribution becomes lower as the maximum upper surface displacement amount L increases, and the central portion of the temperature distribution The higher the temperature, the higher the value.
繼而,控制裝置91之控制部係以實現所決定之溫度分佈之方式控制發熱體48之輻射熱量。藉由以上步驟,控制裝置91係根據蠕變變形之成形體62之形狀資料,控制發熱體48,從而控制熔融玻璃2之溫 度分佈。 Then, the control unit of the control device 91 controls the radiant heat of the heating element 48 in such a manner as to achieve the determined temperature distribution. By the above steps, the control device 91 controls the heating element 48 based on the shape data of the creep deformed molded body 62, thereby controlling the temperature of the molten glass 2. Degree distribution.
接下來,對如下情況之理由進行說明,即,蠕變變形之成形體62之最大上表面位移量L越大,則由控制部決定之溫度分佈之第1端部62d1之溫度越變更為更低之值,且溫度分佈之中央部之溫度越變更為更高之值。如上所述,最大上表面位移量L越大,則玻璃帶3之寬度方向之板厚偏差越大,且玻璃帶3之寬度方向中央部之厚度越大於寬度方向兩端部之厚度。於該情形時,若個別地調節各發熱體48之輻射熱量而使熔融玻璃2之溫度分佈之第1端部62d1之溫度降低,則根據上述理由,玻璃帶3之第1端部62d1側之厚度變大。又,若個別地調節各發熱體48之輻射熱量而使熔融玻璃2之溫度分佈之中央部之溫度變高,則根據上述理由,玻璃帶3之第2端部62d2側之厚度變大,且玻璃帶3之寬度方向中央部之厚度變小。其結果,玻璃帶3之寬度方向中央部之厚度與寬度方向兩端部之厚度之差變小,而玻璃帶3之厚度於寬度方向上變得均勻。即,玻璃帶3之寬度方向之板厚偏差減小。 Next, the reason for the fact that the temperature of the first end portion 62d1 of the temperature distribution determined by the control unit is changed to be larger as the maximum upper surface displacement amount L of the molded body 62 which is subjected to the creep deformation is changed The value is low, and the temperature in the central portion of the temperature distribution is changed to a higher value. As described above, the larger the maximum upper surface displacement amount L is, the larger the thickness variation of the glass ribbon 3 in the width direction is, and the thickness of the central portion of the glass ribbon 3 in the width direction is larger than the thickness of both end portions in the width direction. In this case, when the radiant heat of each of the heating elements 48 is individually adjusted to lower the temperature of the first end portion 62d1 of the temperature distribution of the molten glass 2, the first end portion 62d1 side of the glass ribbon 3 is used for the above reason. The thickness becomes larger. In addition, when the radiant heat of each of the heat generating bodies 48 is individually adjusted to increase the temperature of the central portion of the temperature distribution of the molten glass 2, the thickness of the second end portion 62d2 side of the glass ribbon 3 is increased for the above reason. The thickness of the central portion in the width direction of the glass ribbon 3 becomes small. As a result, the difference between the thickness of the central portion in the width direction of the glass ribbon 3 and the thickness of both end portions in the width direction becomes small, and the thickness of the glass ribbon 3 becomes uniform in the width direction. That is, the variation in the thickness of the glass ribbon 3 in the width direction is reduced.
又,藉由以自成形體62之上表面62c溢流之熔融玻璃2之溫度(黏度)自第1端部62d1至第2端部62d2變得均勻的方式進行控制,而使玻璃帶3之寬度方向之板厚偏差減小。但是,因成形體62蠕變變形,而使成形之玻璃帶3之寬度方向之中央部變厚。為了使玻璃帶3之寬度方向之中央部之厚度減小,必須使於供給槽62b之第1端部62d1與第2端部62d2之間之中央部流動之熔融玻璃2之黏度降低。因此,相較於第1端部62d1與第2端部62d2之間之中央部,使在位於上游側之第1端部62d1流動的熔融玻璃2之黏性增大,藉此,玻璃帶3之寬度方向之中央部變薄,且玻璃帶3之第1端部62d1側略微變薄。又,相較於第2端部62d2,使在位於上游側之中央部流動之熔融玻璃2之黏性降低,藉此,玻璃帶3之第1端部62d1側變厚,且玻璃帶3之寬度方向之中央部略微變厚。玻璃帶3之寬度方向之中央部之厚度係根據第1端部62d1側 與較第1端部62d1側更靠下游之中央部之溫度分佈而變化。與產生蠕變變形之前之最初之溫度分佈相比,提高供給槽62b之位置口附近之溫度,降低第1端部62d1側之溫度,提高第1端部62d1與第2端部62d2之間之中央部之溫度,並提高第2端部62d2側之溫度,藉此,可抑制產生成形體62之蠕變變形後之玻璃帶3之寬度方向之板厚偏差。 In addition, by controlling the temperature (viscosity) of the molten glass 2 overflowing from the upper surface 62c of the molded body 62 from the first end portion 62d1 to the second end portion 62d2, the glass ribbon 3 is controlled. The thickness deviation in the width direction is reduced. However, the central portion of the formed glass ribbon 3 in the width direction is thickened by the creep deformation of the molded body 62. In order to reduce the thickness of the central portion in the width direction of the glass ribbon 3, it is necessary to lower the viscosity of the molten glass 2 flowing in the central portion between the first end portion 62d1 and the second end portion 62d2 of the supply groove 62b. Therefore, the viscosity of the molten glass 2 flowing in the first end portion 62d1 on the upstream side is increased as compared with the central portion between the first end portion 62d1 and the second end portion 62d2, whereby the glass ribbon 3 is increased. The central portion in the width direction is thinned, and the side of the first end portion 62d1 of the glass ribbon 3 is slightly thinned. In addition, the viscosity of the molten glass 2 flowing in the central portion located on the upstream side is lowered as compared with the second end portion 62d2, whereby the first end portion 62d1 side of the glass ribbon 3 is thickened, and the glass ribbon 3 is thickened. The center portion in the width direction is slightly thicker. The thickness of the central portion in the width direction of the glass ribbon 3 is based on the first end portion 62d1 side. The temperature distribution changes from the central portion downstream of the first end portion 62d1 side. The temperature in the vicinity of the position of the supply groove 62b is increased, the temperature on the side of the first end portion 62d1 is lowered, and the distance between the first end portion 62d1 and the second end portion 62d2 is increased as compared with the initial temperature distribution before the creep deformation is generated. The temperature of the central portion increases the temperature of the second end portion 62d2 side, whereby the variation in the thickness of the glass ribbon 3 in the width direction after the creep deformation of the molded body 62 can be suppressed.
因此,玻璃基板製造裝置1係即便於因成形體62之蠕變變形導致成形體62之長度方向之中央部朝下方下垂而撓曲之情形時,亦可藉由使用發熱體48對與成形體62之上表面62c接觸之熔融玻璃2之溫度分佈進行控制而減小玻璃帶3之寬度方向之板厚偏差。其結果,玻璃基板製造裝置1可使作為最終製品之玻璃基板之板厚偏差減小。 Therefore, the glass substrate manufacturing apparatus 1 can be bent by bending the central portion of the longitudinal direction of the molded body 62 by the creep deformation of the molded body 62, and the molded body can be formed by using the heating element 48. The temperature distribution of the molten glass 2 which is in contact with the upper surface 62c of 62 is controlled to reduce the variation in the thickness of the glass ribbon 3 in the width direction. As a result, the glass substrate manufacturing apparatus 1 can reduce the variation in the thickness of the glass substrate as the final product.
又,於使用液相溫度較高之玻璃、及應變點較高之玻璃之玻璃基板之製造步驟中,成形體62之蠕變變形因成形體62之溫度容易變高而尤其容易成為問題。又,近年來,推進玻璃基板之大型化,而成形體之長度方向之尺寸變長,因此,有因蠕變變形引起之成形體62之撓曲變得更顯著之傾向。本實施形態之玻璃基板製造裝置1係對設置於成形體62之上方之複數個發熱體48之輻射熱量進行調節而控制與成形體62之上表面62c接觸之熔融玻璃2之溫度分佈,藉此,可有效地減小因成形體62之蠕變變形引起之玻璃帶3之寬度方向之板厚偏差。 Further, in the production step of using a glass substrate having a high liquidus temperature and a glass substrate having a high strain point, the creep deformation of the molded body 62 is particularly likely to be a problem because the temperature of the molded body 62 is likely to become high. In addition, in recent years, the size of the glass substrate is increased, and the size of the molded body in the longitudinal direction is increased. Therefore, the deflection of the molded body 62 due to creep deformation tends to be more remarkable. In the glass substrate manufacturing apparatus 1 of the present embodiment, the radiant heat of the plurality of heat generating bodies 48 provided above the molded body 62 is adjusted to control the temperature distribution of the molten glass 2 that is in contact with the upper surface 62c of the molded body 62. The thickness deviation of the glass ribbon 3 in the width direction caused by the creep deformation of the molded body 62 can be effectively reduced.
(6)變化例 (6) Variations
(6-1)變化例A (6-1) Change A
於實施形態中,玻璃基板製造裝置1之控制裝置91之獲取部係藉由利用電腦模擬求出成形體62之形狀之時間變化而獲取與成形體62之當前之形狀相關之形狀資料。但是,獲取部亦可利用其他方法獲取與成形體62之當前之形狀相關之形狀資料。 In the embodiment, the acquisition unit of the control device 91 of the glass substrate manufacturing apparatus 1 obtains shape data relating to the current shape of the molded body 62 by temporally changing the shape of the molded body 62 by computer simulation. However, the acquisition unit may also acquire shape data related to the current shape of the formed body 62 by other methods.
例如,獲取部亦可根據成形體62之形狀之實測值而獲取形狀資料。於該情形時,必須預先收集與成形體62之形狀之實測值相關之資 料、及與成形體62之使用條件相關之資料並進行分析。成形體62之使用條件係玻璃基板製造裝置1之運轉時間、熔融玻璃2之溫度、熔融玻璃2之黏度、及上部成形空間60之溫度等與成形體62有關之各種參數。獲取部係根據與成形體62之形狀之實測值相關之資料和與成形體62之使用條件相關之資料之相關關係,預測並獲取當前使用之成形體62之形狀資料。 For example, the acquisition unit may acquire the shape data based on the measured values of the shape of the molded body 62. In this case, it is necessary to collect in advance the assets related to the measured values of the shape of the formed body 62. Materials and materials related to the conditions of use of the molded body 62 were analyzed. The conditions of use of the molded body 62 are various parameters relating to the molded body 62 such as the operation time of the glass substrate manufacturing apparatus 1, the temperature of the molten glass 2, the viscosity of the molten glass 2, and the temperature of the upper molding space 60. The acquisition unit predicts and acquires the shape data of the currently used molded body 62 based on the correlation between the data relating to the measured value of the shape of the formed body 62 and the data relating to the use conditions of the molded body 62.
又,獲取部亦可根據藉由成形體62所成形之玻璃帶3之板厚之實測值而獲取形狀資料。於該情形時,獲取部係自玻璃基板製造裝置1之操作開始時獲取與玻璃帶3之寬度方向之板厚之實測值相關之資料,基於根據經時性之板厚之變化量及操作條件所得之分析結果,預測並獲取當前使用之成形體62之形狀資料。 Moreover, the acquisition unit can also acquire the shape data based on the measured value of the thickness of the glass ribbon 3 formed by the molded body 62. In this case, the acquisition unit acquires data relating to the measured value of the thickness of the glass ribbon 3 in the width direction from the start of the operation of the glass substrate manufacturing apparatus 1, based on the amount of change in the thickness according to the temporality and the operating conditions. The obtained analysis results predict and obtain the shape data of the molded body 62 currently in use.
(6-2)變化例B (6-2) Change B
於實施形態中,玻璃基板製造裝置1之控制裝置91之獲取部係藉由利用電腦模擬求出成形體62之形狀之時間變化而獲取與成形體62之當前之形狀相關之形狀資料。但是,獲取部亦可利用其他方法獲取與成形體62之當前之形狀相關之形狀資料。 In the embodiment, the acquisition unit of the control device 91 of the glass substrate manufacturing apparatus 1 obtains shape data relating to the current shape of the molded body 62 by temporally changing the shape of the molded body 62 by computer simulation. However, the acquisition unit may also acquire shape data related to the current shape of the formed body 62 by other methods.
例如,獲取部亦可根據蠕變特性參數而獲取形狀資料。蠕變特性參數係用以再現施加至成形體62之應力、成形體62之溫度、及基於蠕變變形之成形體62之應變速度之間之關係的參數。此處,施加至成形體62之應力係沿著成形體62之長度方向將成形體62壓縮之力。又,假設成形體62之應變速度無關時間而固定。接下來,對蠕變特性參數之決定方法進行說明。 For example, the acquisition unit may also acquire the shape data according to the creep characteristic parameter. The creep characteristic parameter is a parameter for reproducing the relationship between the stress applied to the formed body 62, the temperature of the formed body 62, and the strain rate of the formed body 62 based on the creep deformation. Here, the stress applied to the formed body 62 is a force that compresses the formed body 62 along the longitudinal direction of the formed body 62. Further, it is assumed that the strain rate of the molded body 62 is fixed irrespective of time. Next, a method of determining the creep characteristic parameter will be described.
首先,對施加至成形體62之應力固定之條件下的成形體62之應變速度依存於成形體62之溫度之變化進行測定。圖9係成形體62之應變速度依存於溫度之變化之曲線圖之一例。於圖9中,施加至成形體62之應力之大小為2.0MPa。成形體62之應變速度係例如藉由對利用 成形體62之4點彎曲試驗獲得之成形體62之形狀之變化量進行測定而算出。於圖9中,成形體62之應變速度之測定值係以黑圓點表示。 First, the strain rate of the molded body 62 under the condition that the stress applied to the molded body 62 is fixed depends on the change in the temperature of the molded body 62. Fig. 9 is an example of a graph showing the strain rate of the formed body 62 depending on the change in temperature. In Fig. 9, the magnitude of the stress applied to the formed body 62 was 2.0 MPa. The strain rate of the formed body 62 is utilized, for example, by The amount of change in the shape of the molded body 62 obtained by the four-point bending test of the molded body 62 was measured and calculated. In Fig. 9, the measured values of the strain velocity of the formed body 62 are indicated by black circles.
其次,對成形體62之溫度固定之條件下的成形體62之應變速度依存於施加至成形體62之應力之變化進行測定。圖10係成形體62之應變速度依存於應力之變化之曲線圖之一例。於圖10中,成形體62之溫度為1250℃。成形體62之應變速度係例如藉由利用雷射測定對成形體62之形狀之變化量進行測定而算出。於圖10中,成形體62之應變速度之測定值係以黑圓點表示。 Next, the strain rate of the molded body 62 under the condition that the temperature of the molded body 62 is fixed depends on the change in the stress applied to the molded body 62. Fig. 10 is an example of a graph in which the strain rate of the formed body 62 depends on the change in stress. In Fig. 10, the temperature of the formed body 62 was 1,250 °C. The strain rate of the molded body 62 is calculated, for example, by measuring the amount of change in the shape of the molded body 62 by laser measurement. In Fig. 10, the measured values of the strain velocity of the formed body 62 are indicated by black circles.
其次,根據以下之式(1),決定可再現成形體62之應變速度依存於溫度之變化及依存於應力之變化之測定值的蠕變特性參數A、B、n。 Then, according to the following formula (1), the creep characteristic parameters A, B, and n which determine the strain rate of the reproducible molded body 62 depending on the change in temperature and the measured value depending on the change in stress are determined.
於式(1)中,R為8.314[J/mol‧K],△H為4.500×105[J/mol],ε'為成形體62之應變速度[/hour],σ為施加至成形體62之應力[Pa],T為成形體62之溫度[K]。蠕變特性參數A[/hour]、B[/Pa]及n係以根據式(1)求得之應變速度符合應變速度之測定值之方式決定。於圖9及圖10中,基於所決定之蠕變特性參數根據式(1)所算出之成形體62之應變速度係以中空之方形表示。再者,於圖9及圖10中所使用之蠕變特性參數A、B、n分別為8.648×1012[/hour]、4.491×10-9[/Pa]、9.987×10-1。 In the formula (1), R is 8.314 [J/mol‧K], ΔH is 4.500 × 10 5 [J/mol], ε ' is the strain rate of the formed body 62 [/hour], and σ is applied to the forming The stress [Pa] of the body 62, T is the temperature [K] of the formed body 62. The creep characteristic parameters A[/hour], B[/Pa], and n are determined such that the strain rate obtained according to the formula (1) conforms to the measured value of the strain rate. In FIGS. 9 and 10, the strain rate of the molded body 62 calculated from the equation (1) based on the determined creep characteristic parameter is represented by a hollow square. Further, the creep characteristic parameters A, B, and n used in Figs. 9 and 10 are 8.648 × 10 12 [/hour], 4.491 × 10 -9 [/Pa], and 9.987 × 10 -1 , respectively .
再者,獲取部亦可於決定蠕變特性參數後對蠕變特性參數進行驗證。蠕變特性參數之驗證係例如藉由將成形體62之應變速度之測定系統模型化並利用電腦模擬確認是否已獲得基於所決定之蠕變特性參數之應變速度而進行。 Furthermore, the acquisition unit can also verify the creep characteristic parameters after determining the creep characteristic parameters. The verification of the creep characteristic parameter is performed, for example, by modeling the strain rate measurement system of the formed body 62 and using a computer simulation to confirm whether or not the strain rate based on the determined creep characteristic parameter has been obtained.
而且,獲取部係藉由電腦模擬,使用所決定之蠕變特性參數算 出特定之溫度及應力下之成形體62之應變速度而求出成形體62之形狀之時間變化,藉此,獲取成形體62之形狀資料。 Moreover, the acquisition department is calculated by computer simulation using the determined creep characteristic parameters. The shape change of the shape of the molded body 62 is obtained by determining the time change of the shape of the molded body 62 at a specific temperature and stress rate of the molded body 62.
(6-3)變化例C (6-3) Change C
於實施形態中,玻璃基板製造裝置1之控制裝置91之控制部係使用圖8所示之最大上表面位移量L作為成形體62之形狀資料,並根據最大上表面位移量L決定熔融玻璃2之溫度分佈。但是,控制部亦可使用與成形體62之形狀資料相關之其他參數而決定熔融玻璃2之溫度分佈。 In the embodiment, the control unit of the glass substrate manufacturing apparatus 1 uses the maximum upper surface displacement L shown in FIG. 8 as the shape data of the molded body 62, and determines the molten glass 2 based on the maximum upper surface displacement L. Temperature distribution. However, the control unit may determine the temperature distribution of the molten glass 2 using other parameters related to the shape data of the molded body 62.
例如,控制部亦可根據作為與成形體62之形狀資料相關之參數的沿著與玻璃帶3之表面垂直之方向觀察之情形時的成形體62之上表面62c或下端62a之曲率,而決定熔融玻璃2之溫度分佈。例如,控制部亦可以如下方式決定溫度分佈,即,由於成形體62之上表面62c或下端62a之曲率越大,則因蠕變變形引起之成形體62之撓曲量越大,故而熔融玻璃2之溫度分佈之第1端部62d1之溫度成為更低之值,且溫度分佈之中央部之溫度成為更高之值。 For example, the control unit may determine the curvature of the upper surface 62c or the lower end 62a of the molded body 62 when viewed along a direction perpendicular to the surface of the glass ribbon 3 as a parameter relating to the shape data of the molded body 62. The temperature distribution of the molten glass 2. For example, the control unit may determine the temperature distribution in such a manner that the larger the curvature of the upper surface 62c or the lower end 62a of the molded body 62, the larger the amount of deflection of the molded body 62 due to creep deformation, so that the molten glass The temperature of the first end portion 62d1 of the temperature distribution of 2 becomes a lower value, and the temperature at the central portion of the temperature distribution becomes a higher value.
2‧‧‧熔融玻璃 2‧‧‧Solid glass
3‧‧‧玻璃帶 3‧‧‧glass ribbon
42‧‧‧爐壁 42‧‧‧ furnace wall
44‧‧‧頂板 44‧‧‧ top board
46‧‧‧上部溫度控制空間 46‧‧‧ Upper temperature control space
48‧‧‧發熱體 48‧‧‧heating body
48a‧‧‧冷卻通路 48a‧‧‧Cooling path
50c‧‧‧移送管 50c‧‧‧Transfer tube
60‧‧‧上部成形空間 60‧‧‧Upper forming space
62‧‧‧成形體 62‧‧‧Formed body
62a‧‧‧下端 62a‧‧‧Bottom
62b‧‧‧供給槽 62b‧‧‧ supply slot
62c‧‧‧上表面 62c‧‧‧ upper surface
62d1‧‧‧第1端部 62d1‧‧‧1st end
62d2‧‧‧第2端部 62d2‧‧‧2nd end
64‧‧‧上部間隔構件 64‧‧‧ upper spacer
70‧‧‧下部成形空間 70‧‧‧ Lower forming space
72‧‧‧冷卻輥 72‧‧‧Cooling roller
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