TWI578004B - Automatic test equipment and method thereof - Google Patents

Automatic test equipment and method thereof Download PDF

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TWI578004B
TWI578004B TW104109626A TW104109626A TWI578004B TW I578004 B TWI578004 B TW I578004B TW 104109626 A TW104109626 A TW 104109626A TW 104109626 A TW104109626 A TW 104109626A TW I578004 B TWI578004 B TW I578004B
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test
tested
pin
switch group
coupled
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TW201634944A (en
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蔡紫蕾
黃逸勇
李政諺
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致茂電子股份有限公司
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自動測試設備及方法 Automatic test equipment and method

本發明係關於一種自動測試設備及方法,特別是一種使用測量單元的自動測試設備及方法。 The present invention relates to an automatic test apparatus and method, and more particularly to an automatic test apparatus and method using a measurement unit.

自動測試設備係利用自動化的機制對半導體產品、電子電路裝置及印刷電路板等進行測試。其中,測量單元為自動測試設備常見的一個重要元件。測量單元的功用主要為提供測試信號給待測物,以便進行相關參數的量測。常見的模式如Force Voltage and Measure current(VFIM),可用於開路/短路測試。又如Force Current and Measure Voltage(IFVM),可用於漏電測試。待測物則是透過多個接腳可插拔地與測量單元耦接,以進行測試。 Automated test equipment uses automated mechanisms to test semiconductor products, electronic circuit devices, and printed circuit boards. Among them, the measurement unit is an important component common to automatic test equipment. The function of the measuring unit is mainly to provide a test signal to the object to be tested in order to measure the relevant parameters. Common modes such as Force Voltage and Measure current (VFIM) can be used for open/short test. Another example is Force Current and Measure Voltage (IFVM), which can be used for leakage test. The object to be tested is pluggably coupled to the measuring unit through a plurality of pins for testing.

然而,由於待測物越來越多樣化,其運作也越來越精密,相對的就需要功能更強大的自動測試設備與方法來因應日益複雜的測試需求。因此,如何有效運用自動測試設備中的測量單元,以提供更有彈性且更有效率的自動測試環境,則為研發人員應解決的問題之一。 However, as the DUT is becoming more diverse and its operations are becoming more sophisticated, relatively more powerful automated test equipment and methods are needed to meet the increasingly complex testing needs. Therefore, how to effectively use the measurement unit in the automatic test equipment to provide a more flexible and efficient automatic test environment is one of the problems that developers should solve.

本發明在於提供一種自動測試設備,以提升自動測試的彈性及效率。 The present invention provides an automatic test device to improve the flexibility and efficiency of automated testing.

本發明所揭露的自動測試設備,用於測試至少第一待測物以及第二待測物,自動測試設備包括第一測試模組、第二測試模組及控制模組。其中第一測試模組包括第一開關組及第一測量單元,第一測量單元耦接第一開關 組。第一開關組包括至少第一接腳,第一接腳可插拔地耦接第一待測物。第二測試模組則包括第二開關組及第二測量單元,第二測量單元耦接第二開關組。第二開關組包括至少第二接腳及第三接腳,第二接腳可插拔地耦接第一待測物,第三接腳可插拔地耦接第二待測物。至於控制模組則耦接第一測試模組及第二測試模組,並依據測試排程表控制第一測試模組及第二測試模組,使得第一測試模組及第二測試模組在排程模式下對第一待測物及第二待測物進行測試。其中排程模式為循序模式、並行模式、或並聯模式。 The automatic testing device disclosed in the present invention is configured to test at least a first object to be tested and a second object to be tested, and the automatic testing device comprises a first testing module, a second testing module and a control module. The first test module includes a first switch group and a first measurement unit, and the first measurement unit is coupled to the first switch group. The first switch group includes at least a first pin, and the first pin is pluggably coupled to the first object to be tested. The second test module includes a second switch group and a second measurement unit, and the second measurement unit is coupled to the second switch group. The second switch group includes at least a second pin and a third pin. The second pin is detachably coupled to the first object to be tested, and the third pin is detachably coupled to the second object to be tested. The control module is coupled to the first test module and the second test module, and controls the first test module and the second test module according to the test schedule table, so that the first test module and the second test module The first object to be tested and the second object to be tested are tested in the scheduling mode. The scheduling mode is sequential mode, parallel mode, or parallel mode.

根據上述本發明所揭露的自動測試設備,可依據測試排程表,有效地利用多個測試模組對多個待測物進行測試。其不僅優化了測試模組使用,亦提供了測試環境的擴充性。 According to the automatic test equipment disclosed in the above invention, a plurality of test modules can be effectively tested by using a plurality of test modules according to the test schedule. It not only optimizes the use of test modules, but also provides scalability for the test environment.

以上關於本發明內容的說明及以下實施方式的說明係用以示範與解釋本發明的原理,並且提供本發明的專利申請範圍更進一步的解釋。 The above description of the present invention and the following description of the embodiments are intended to illustrate and explain the principles of the invention, and to provide a further explanation of the scope of the invention.

1‧‧‧自動測試設備 1‧‧‧Automatic test equipment

10a~10n、20、40a、40b、40c、60a、60b、60c、60d‧‧‧測試模組 10a~10n, 20, 40a, 40b, 40c, 60a, 60b, 60c, 60d‧‧‧ test modules

100a~100n、200、400a、400b、400c‧‧‧開關組 100a~100n, 200, 400a, 400b, 400c‧‧‧ switch group

102a~102n、202、402a、402b、402c‧‧‧測量單元 102a~102n, 202, 402a, 402b, 402c‧‧‧measurement unit

1000a~1000n、2000a、P1~P96、P’1~P’128‧‧‧接腳 1000a~1000n, 2000a, P 1 ~P 96 , P' 1 ~P' 128 ‧‧‧ pins

12、32、42、52、62‧‧‧控制模組 12, 32, 42, 52, 62‧‧‧ control modules

2002a‧‧‧開關 2002a‧‧‧Switch

320、620‧‧‧狀態機 320, 620‧‧‧ state machine

322、622‧‧‧排程單元 322, 622‧‧‧ scheduling unit

44、46、64、66‧‧‧待測物 44, 46, 64, 66‧‧‧ test objects

524、624‧‧‧指令執行單元 524, 624‧‧‧ instruction execution unit

第1圖為本發明一實施例之自動測試設備的架構圖。 FIG. 1 is a block diagram of an automatic test equipment according to an embodiment of the present invention.

第2圖為本發明一實施例之測試模組的架構圖。 FIG. 2 is a structural diagram of a test module according to an embodiment of the present invention.

第3圖為本發明一實施例之控制模組的架構圖。 FIG. 3 is a structural diagram of a control module according to an embodiment of the present invention.

第4圖為本發明一實施例之待測物測試示意圖。 FIG. 4 is a schematic diagram of test of a test object according to an embodiment of the present invention.

第5圖為本發明一實施例之控制模組的架構圖。 FIG. 5 is a structural diagram of a control module according to an embodiment of the present invention.

第6圖為本發明一實施例之待測物測試示意圖。 FIG. 6 is a schematic diagram of test of a test object according to an embodiment of the present invention.

第7圖為本發明一實施例之自動測試方法流程圖。 Figure 7 is a flow chart of an automatic test method according to an embodiment of the present invention.

請參照第1圖,係為本發明一實施例之自動測試設備的架構圖。自動測試設備1係用於對多個待測物進行測試,包括多個測試模組(10a、10b、...及10n)及控制模組12。其中,控制模組12耦接多個測試模組(10a、10b、...及10n)。上述多個測試模組(10a、10b、...及10n)中的測試模組10a包 括開關組100a及測量單元102a,開關組100a包括多個接腳1000a,多個接腳1000a係用以可插拔地耦接於待測物。測試模組10b包括開關組100b及測量單元102b,開關組100b包括多個接腳1000b,多個接腳1000b亦用以可插拔地耦接於待測物。同理,測試模組10n包括開關組100n及測量單元102n,開關組100n包括多個接腳1000n,多個接腳1000n亦用以可插拔地耦接於待測物。控制模組12根據測試排程表在測試過程,藉由控制各開關組(100a、100b、...及100n)的導通狀態,將各接腳(1000a、1000b、...及1000n)與各測量單元(102a、102b、...及102n)適時地導通,以對待測物進行測試。於一個例子中,所述測量單元可以是精確測量單元(Precision Measurement Unit,PMU),本實施例並不以此為限。 Please refer to FIG. 1 , which is a structural diagram of an automatic test equipment according to an embodiment of the present invention. The automatic test equipment 1 is used for testing a plurality of test objects, including a plurality of test modules (10a, 10b, ..., and 10n) and a control module 12. The control module 12 is coupled to the plurality of test modules (10a, 10b, ..., and 10n). Test module 10a package in the above plurality of test modules (10a, 10b, ..., and 10n) In the switch group 100a and the measuring unit 102a, the switch group 100a includes a plurality of pins 1000a, and the plurality of pins 1000a are configured to be pluggably coupled to the object to be tested. The test module 10b includes a switch group 100b and a measuring unit 102b. The switch group 100b includes a plurality of pins 1000b. The plurality of pins 1000b are also pluggably coupled to the object to be tested. Similarly, the test module 10n includes a switch group 100n and a measurement unit 102n. The switch group 100n includes a plurality of pins 1000n. The plurality of pins 1000n are also pluggably coupled to the object to be tested. The control module 12 controls each of the pins (1000a, 1000b, ..., and 1000n) by controlling the conduction state of each of the switch groups (100a, 100b, ..., and 100n) according to the test schedule during the test process. Each of the measuring units (102a, 102b, ..., and 102n) is turned on in time to test the object to be tested. In an example, the measurement unit may be a Precision Measurement Unit (PMU), and the embodiment is not limited thereto.

舉例來說,為了對第一待測物以及第二待測物進行測試,可利用多個測試模組10a(第一測試模組),將其第一接腳可插拔地耦接第一待測物。並利用測試模組10b(第二測試模組),將其第二接腳可插拔地耦接第一待測物,並將第二測試模組的第三接腳可插拔地耦接第二待測物。控制模組依據測試排程表控制第一測試模組及第二測試模組,使得第一測試模組及第二測試模組在排程模式下對第一待測物及第二待測物進行測試,其中排程模式為循序模式、並行模式、或並聯模式。上述的循序模式係指在每個測試期間,各待測物透過不同的單一測試模組中的測量單元進行測試,且測量單元僅與單一接腳導通。而上述的並行模式則是指在每個測試期間,各待測物可透過不同的多個測試模組中的測量單元進行測試,但測量單元僅與單一接腳導通。再者,上述的並聯模式係指在每個測試期間,僅對單一待測物進行測試,但待測物可透過多個測試模組中的測量單元進行測試,且測量單元可與多個接腳導通。 For example, in order to test the first object to be tested and the second object to be tested, a plurality of test modules 10a (first test modules) may be used, and the first pins thereof may be pluggably coupled to the first Analyte. And using the test module 10b (the second test module), the second pin is pluggably coupled to the first object to be tested, and the third pin of the second test module is pluggably coupled The second object to be tested. The control module controls the first test module and the second test module according to the test schedule table, so that the first test module and the second test module face the first object to be tested and the second object to be tested in the scheduling mode Test, where the scheduling mode is sequential mode, parallel mode, or parallel mode. The above sequential mode means that each test object is tested through a measurement unit in a different single test module during each test, and the measurement unit is only turned on with a single pin. The parallel mode described above means that each test object can be tested through a measurement unit in a plurality of different test modules during each test, but the measurement unit is only turned on with a single pin. Furthermore, the parallel mode described above means that only a single object to be tested is tested during each test, but the object to be tested can be tested through a measurement unit in a plurality of test modules, and the measurement unit can be connected to multiple devices. The foot is turned on.

更進一步來說,控制模組12依據測試排程表控制測試模組,於第一測試期間透過第一接腳將第一測試模組的測量單元導通於第一待測物,於第二測試期間透過第二接腳將第二測試模組的測量單元導通於第一待測物,於第三測試期間透過第三接腳將第二測試模組的測量單元導通於第二待測物, 以對第一待測物與第二待測物進行測試。於實務上,測量單元與接腳之間的導通時間為一預設值,此預設值實質上足以完成對待測物的測試。此外,上述第一測試期間、第二測試期間及第三測試期間可為不同期間或是重合期間。舉例而言,當第一測試期間與第二測試期間重合且不與第三測試期間重合,則控制模組12係以並行模式或並聯模式對第一待測物與第二待測物進行測試。又當第一測試期間與第三測試期間重合且不與第二測試期間重合,則控制模組12係以循序模式對第一待測物與第二待測物進行測試。 Further, the control module 12 controls the test module according to the test schedule, and the measurement unit of the first test module is turned on to the first object to be tested through the first pin during the first test, and the second test is performed. The measuring unit of the second test module is connected to the first object to be tested through the second pin, and the measuring unit of the second test module is connected to the second object to be tested through the third pin during the third test. The first analyte and the second analyte are tested. In practice, the conduction time between the measuring unit and the pin is a preset value, and the preset value is substantially sufficient to complete the test of the object to be tested. In addition, the first test period, the second test period, and the third test period may be different periods or coincidence periods. For example, when the first test period coincides with the second test period and does not coincide with the third test period, the control module 12 tests the first object to be tested and the second object to be tested in the parallel mode or the parallel mode. . When the first test period coincides with the third test period and does not coincide with the second test period, the control module 12 tests the first test object and the second test object in a sequential mode.

請參照第2圖,係為本發明一實施例之測試模組的架構圖。前述測試模組(10a、10b、...及10n)中的每一個測試模組均如測試模組20所示,包括開關組200及測量單元202。開關組200包括多個開關2002a,開關2002a中每個開關的一端耦接測量單元202,開關2002a中每個開關的另一端則耦接接腳2000a中的一接腳。請參照第3圖,係為本發明一實施例之控制模組的架構圖。控制模組32包括狀態機320及排程單元322。其中,排程單元322依據排程模式,以及各接腳與待測物的連接關係,決定多個測試期間中的每個測試期間內每一個測試模組的開關組的導通時序,以產生測試排程表。狀態機320則依據測試排程表於複數個測試狀態間進行切換,以控制開關組的導通及對待測物的測試。於實務上,測試狀態包括了開關斷路、開關導通、數位類比轉換器開啟、類比數位轉換器量測及數位類比轉換器關閉。此外,上述測試排程表亦可由外部產生,並藉由輸入介面提供給控制模組32。 Please refer to FIG. 2, which is an architectural diagram of a test module according to an embodiment of the present invention. Each of the test modules (10a, 10b, ..., and 10n) is shown in the test module 20, and includes a switch group 200 and a measurement unit 202. The switch group 200 includes a plurality of switches 2002a. One end of each switch of the switch 2002a is coupled to the measuring unit 202. The other end of each switch of the switch 2002a is coupled to a pin of the pin 2000a. Please refer to FIG. 3, which is a structural diagram of a control module according to an embodiment of the present invention. The control module 32 includes a state machine 320 and a scheduling unit 322. The scheduling unit 322 determines the turn-on timing of the switch group of each test module in each of the plurality of test periods according to the scheduling mode and the connection relationship between each pin and the object to be tested, to generate a test. schedule. The state machine 320 switches between the plurality of test states according to the test schedule to control the conduction of the switch group and the test of the object to be tested. In practice, the test states include switch open, switch turn-on, digital analog converter turn-on, analog-to-digital converter measurement, and digital analog converter turn-off. In addition, the above test schedule can also be generated externally and provided to the control module 32 through the input interface.

請參照第4圖,係為本發明一實施例之待測物測試示意圖。本測試利用控制模組42耦接並控制測試模組40a、測試模組40b及測試模組40c,測試模組40a包括開關組400a及測量單元402a,開關組400a則提供了32根接腳(P1~P32)。測試模組40b包括開關組400b及測量單元402b,開關組400b亦提供了32根接腳(P33~P64)。測試模組40c則包括開關組400c及測量單元402c,開關組400c也提供了32根接腳(P65~P96)。待測物44可插拔地耦接接腳P1、接腳P2及接腳P33,待測物46則可插拔地耦接接腳P63、接腳P64及接腳 P65Please refer to FIG. 4, which is a schematic diagram of test object testing according to an embodiment of the present invention. The test module 42 is coupled to and controls the test module 40a, the test module 40b and the test module 40c. The test module 40a includes a switch group 400a and a measurement unit 402a, and the switch group 400a provides 32 pins ( P 1 ~ P 32 ). The test module 40b includes a switch block 400b and a measurement unit 402b, and the switch block 400b also provides 32 pins (P 33 ~ P 64 ). The test module 40c includes a switch block 400c and a measurement unit 402c, and the switch block 400c also provides 32 pins (P 65 ~ P 96 ). The object to be tested 44 is detachably coupled to the pin P 1 , the pin P 2 , and the pin P 33 . The object to be tested 46 is detachably coupled to the pin P 63 , the pin P 64 , and the pin P 65 . .

以循序模式為例,所產生的測試排程表可如下表所示。 Taking the sequential mode as an example, the generated test schedule can be as shown in the following table.

依據上表,控制模組42於測試期間1,將待測物44透過接腳P1與測量單元402a導通,並將待測物46透過接腳P63與測量單元402b導通,以對待測物44及待測物46進行測試。接著,控制模組42於測試期間2,將待測物44透過接腳P2與測量單元402a導通,並將待測物46透過接腳P64與測量單元402b導通,以對待測物44及待測物46進行測試。最後,控制模組42於測試期間3,將待測物44透過接腳P33與測量單元402b導通,並將待測物46透過接腳P65與測量單元402c導通,以對待測物44及待測物46進行測試。 Based on the table, the control module 42 during a test, the DUT 44 through pins P 1 and a measurement unit 402a is turned on, and the DUT 46 through the pin P 63 is turned on and the measurement unit 402b to to analytes 44 and the object to be tested 46 are tested. Then, the control module 42 conducts the object to be tested 44 through the pin P 2 and the measuring unit 402a during the test period 2, and conducts the object to be tested 46 through the pin P 64 and the measuring unit 402b to test the object 44 and The analyte 46 is tested. Finally, the control module 42 conducts the object to be tested 44 through the pin P 33 and the measuring unit 402b during the test period 3, and conducts the object to be tested 46 through the pin P 65 and the measuring unit 402c to test the object 44 and The analyte 46 is tested.

再以並行模式為例,所產生的測試排程表可如下表所示。 Taking the parallel mode as an example, the generated test schedule can be as shown in the following table.

依據上表,控制模組42於測試期間1,將待測物44透過接腳P1與測量單元402a導通,且透過接腳P33與測量單元402b導通,並將待測物46透過接腳P65與測量單元402c導通,以對待測物44及待測物46進行測試。接著,控制模組42於測試期間2,將待測物44透過接腳P2與測量單元402a導通,並將待測物46透過接腳P63與測量單元402b導通,以對待測物44及待測物46進行測試。最後,控制模組42於測試期間3,將待測物46透過接腳P64與測量單元402b導通,以對待測物46進行測試。 Based on the table, the control module 42 during a test, the DUT 44 through pins P 1 and a measurement unit 402a is turned on, and the pin P 33 through the measurement unit 402b turned on, and the object to be detected through the pin 46 P 65 is electrically connected to the measuring unit 402c to test the object to be tested 44 and the object to be tested 46. Then, the control module 42 conducts the object to be tested 44 through the pin P 2 and the measuring unit 402a during the test period 2, and conducts the object to be tested 46 through the pin P 63 and the measuring unit 402b to measure the object 44 and The analyte 46 is tested. Finally, during the test period 3, the control module 42 conducts the object to be tested 46 through the pin P 64 and the measuring unit 402b to test the object to be tested 46.

又若以並聯模式為例,所產生的測試排程表可如下表所示。 If the parallel mode is taken as an example, the generated test schedule can be as shown in the following table.

依據上表,控制模組42於測試期間1,將待測物44透過接腳P1及P2與測量單元402a導通,且透過接腳P33與測量單元402b導通,以對待測物44進行測試。接著,控制模組42於測試期間2,將待測物46透過接腳P63及P64與測量單元402b導通,且透過接腳P65與測量單元402c導通,以對待測物46進行測試。 Based on the table, the control module 421, the DUT 44 through the pins P 1 and P 2 and the measurement unit 402a is turned on during the test, and a through pin P 33 measurement unit 402b is turned on to to analytes 44 test. Then, during the test period 2, the control module 42 conducts the object to be tested 46 through the pins P 63 and P 64 and the measuring unit 402b, and conducts through the pin P 65 and the measuring unit 402c to test the object to be tested 46.

請參照第5圖,係為本發明一實施例之控制模組的架構圖。控制模組52包括指令執行單元524,係用以執行測試指令。舉例來說,欲對第一待測物進行測試,可利用多個測試模組中的第三測試模組。第三測試模組包括第三開關組及第三測量單元,其中第三測量單元耦接第三開關組,且第三開關組包括至少第四接腳,第四接腳則可插拔地耦接第一待測物。指令執行單元524係依據第一測試指令在非排程模式下控制第三開關組,使得第三測試模組於第四測試期間中的第一時間點透過第四接腳將第三測量單元導通於第一待測物,以對第一待測物進行測試。除了依據可利用測試指令控制導通與測試的起始時間點,指令執行單元524更可依據第二測試指令在非排程模式下控制第三開關組,使得第三測試模組於第四測試期間中的第二時間點停止將第三測量單元導通於第一待測物。 Please refer to FIG. 5, which is a structural diagram of a control module according to an embodiment of the present invention. The control module 52 includes an instruction execution unit 524 for executing test instructions. For example, to test the first object to be tested, a third test module of the plurality of test modules can be utilized. The third test module includes a third switch group and a third measurement unit, wherein the third measurement unit is coupled to the third switch group, and the third switch group includes at least a fourth pin, and the fourth pin is pluggably coupled Connect the first object to be tested. The instruction execution unit 524 controls the third switch group in the non-scheduled mode according to the first test command, so that the third test module turns on the third measurement unit through the fourth pin at the first time point in the fourth test period. The first object to be tested is used to test the first object to be tested. In addition to controlling the start time and the test according to the available test instructions, the instruction execution unit 524 can further control the third switch group in the non-scheduled mode according to the second test command, so that the third test module is in the fourth test period. The second time point in the middle stops the conduction of the third measuring unit to the first object to be tested.

於實務上,上述第四測試期間可與前述第一測試期間、第二測試期間或第三測試期間重合。因此,控制模組52可利用上述測試指令,控制測量單元與待測物之間導通的時間長短,並於導通期間供給待測物電源。換句話說,控制模組52可藉由適當的測試指令,使測試模組具有電源供應的功能,以對待測物進行持續的供電,而不受前述排程模式中固定導通時間的限制。此外,上述測試指令可預先儲存於控制模組52,或是藉由輸入介面接收外部的測試指令。本實施例所述之測試指令來源當然不以此為限,於所屬技術領域具有通常知識者,可依照實際測試架構,設計適當測試指令執行機制。 In practice, the fourth test period described above may coincide with the aforementioned first test period, second test period, or third test period. Therefore, the control module 52 can control the length of time between the measurement unit and the object to be tested by using the above test command, and supply the power of the object to be tested during the on period. In other words, the control module 52 can provide the power supply function of the test module by using a suitable test command to continuously supply power to the object to be tested, without being limited by the fixed on-time in the scheduling mode. In addition, the test command may be pre-stored in the control module 52 or receive an external test command through the input interface. The source of the test instructions described in this embodiment is of course not limited thereto. Those having ordinary knowledge in the technical field can design an appropriate test instruction execution mechanism according to the actual test architecture.

請參照第6圖,係為本發明一實施例之待測物測試示意圖。本 測試同時利用排程機制與測試指令執行機制,對待測物進行測試。具體來說,控制模組62耦接並控制測試模組60a、測試模組60b、測試模組60c及測試模組60d,測試模組60a~60d各提供了32根接腳(P’1~P’32、P’33~P’64、P’65~P’96及P’97~P’128)。控制模組62包括狀態機620、排程單元622及指令執行單元624。待測物64可插拔地耦接接腳P’2、接腳P’33及接腳P’63,待測物66則可插拔地耦接接腳P’64、接腳P’66及接腳P’97。於測試執行時,指令執行單元624執行多個測試指令,控制測試模組60a及測試模組60d,使得測試模組60a及測試模組60d分別透過接腳P’2及接腳P’97對待測物64及待測物66供電,詳細機制如前實施例所述,在此不再贅述。再者,排程單元622根據設定的排程模式,產生對應的測試排程表。狀態機620則依據測試排程表於複數個測試狀態間進行切換,以控制測試模組60b及測試模組60c與待測物64及待測物66之間的導通狀態,並控制對待測物的測試。 Please refer to FIG. 6 , which is a schematic diagram of test object testing according to an embodiment of the present invention. This test uses both the scheduling mechanism and the test instruction execution mechanism to test the object to be tested. Specifically, the control module 62 couples and controls the test module 60a, the test module 60b, the test module 60c, and the test module 60d. The test modules 60a to 60d each provide 32 pins (P' 1 ~ P' 32 , P' 33 ~ P' 64 , P' 65 ~ P' 96 and P' 97 ~ P' 128 ). The control module 62 includes a state machine 620, a scheduling unit 622, and an instruction execution unit 624. The object to be tested 64 is detachably coupled to the pin P' 2 , the pin P' 33 and the pin P' 63 , and the object 66 is pluggably coupled to the pin P' 64 and the pin P' 66 . And pin P' 97 . When the test is executed, the instruction execution unit 624 executes a plurality of test instructions, and controls the test module 60a and the test module 60d so that the test module 60a and the test module 60d are treated by the pin P' 2 and the pin P' 97, respectively . The measurement object 64 and the object to be tested 66 are powered. The detailed mechanism is as described in the previous embodiment, and details are not described herein. Furthermore, the scheduling unit 622 generates a corresponding test schedule according to the set scheduling mode. The state machine 620 switches between the plurality of test states according to the test schedule to control the conduction state between the test module 60b and the test module 60c and the object to be tested 64 and the object to be tested 66, and controls the object to be tested. Test.

請參照第7圖,係為本發明一實施例之自動測試方法流程圖。本自動測試方法,係用於自動測試設備,以測試至少第一待測物以及第二待測物。自動測試設備包括第一測試模組、第二測試模組以及控制模組。其中第一測試模組包括第一開關組及第一測量單元,第一測量單元耦接第一開關組。第一開關組則包括至少第一接腳,且第一接腳可插拔地耦接第一待測物。又第二測試模組包括第二開關組及第二測量單元,第二測量單元耦接第二開關組。第二開關組則包括至少第二接腳及第三接腳,且第二接腳可插拔地耦接第一待測物,第三接腳可插拔地耦接第二待測物。而控制模組則耦接第一測試模組及第二測試模組。 Please refer to FIG. 7, which is a flowchart of an automatic test method according to an embodiment of the present invention. The automatic test method is used for an automatic test device to test at least a first test object and a second test object. The automatic test equipment includes a first test module, a second test module, and a control module. The first test module includes a first switch group and a first measurement unit, and the first measurement unit is coupled to the first switch group. The first switch group includes at least a first pin, and the first pin is pluggably coupled to the first object to be tested. The second test module includes a second switch group and a second measurement unit, and the second measurement unit is coupled to the second switch group. The second switch group includes at least a second pin and a third pin, and the second pin is detachably coupled to the first object to be tested, and the third pin is detachably coupled to the second object to be tested. The control module is coupled to the first test module and the second test module.

本自動測試方法包括下列步驟,首先,產生測試排程表(S70)。接著,控制模組依據測試排程表控制第一測試模組及第二測試模組,使得第一測試模組及第二測試模組在排程模式下對第一待測物及第二待測物進行測試,其中排程模式為循序模式、並行模式、或並聯模式(S72)。 The automatic test method includes the following steps. First, a test schedule is generated (S70). Then, the control module controls the first test module and the second test module according to the test schedule, so that the first test module and the second test module are in the scheduling mode for the first object to be tested and the second to be tested The object is tested, wherein the scheduling mode is sequential mode, parallel mode, or parallel mode (S72).

在本發明的另一實施例之自動測試方法中,自動測試設備更包 括第三測試模組。第三測試模組包括第三開關組及第三測量單元,其中第三測量單元耦接第三開關組,且第三開關組包括至少第四接腳,第四接腳則可插拔地耦接第一待測物,控制模組包括指令執行單元。除了前述實施例之步驟之外,本實施例更包括以下步驟。首先,指令執行單元依據第一測試指令在非排程模式下控制第三開關組,使得第三測試模組於第四測試期間中的第一時間點透過第四接腳將第三測量單元導通於第一待測物,以對第一待測物進行測試。接著,指令執行單元依據第二測試指令在非排程模式下控制第三開關組,使得第三測試模組於第四測試期間中的第二時間點停止將第三測量單元導通於第一待測物。 In an automatic test method according to another embodiment of the present invention, an automatic test device is further included. Includes the third test module. The third test module includes a third switch group and a third measurement unit, wherein the third measurement unit is coupled to the third switch group, and the third switch group includes at least a fourth pin, and the fourth pin is pluggably coupled Connected to the first object to be tested, the control module includes an instruction execution unit. In addition to the steps of the foregoing embodiments, the embodiment further includes the following steps. First, the instruction execution unit controls the third switch group in the non-scheduled mode according to the first test command, so that the third test module turns on the third measurement unit through the fourth pin at the first time point in the fourth test period. The first object to be tested is used to test the first object to be tested. Then, the instruction execution unit controls the third switch group in the non-scheduled mode according to the second test instruction, so that the third test module stops the third measurement unit from being turned on to the first waiting at the second time point in the fourth test period. Measuring object.

雖然本發明的實施例揭露如上所述,然並非用以限定本發明,任何熟習相關技藝者,在不脫離本發明的精神和範圍內,舉凡依本發明申請範圍所述的形狀、構造、特徵及數量當可做些許的變更,因此本發明的專利保護範圍須視本說明書所附的申請專利範圍所界定者為準。 Although the embodiments of the present invention are disclosed above, it is not intended to limit the present invention, and those skilled in the art, regardless of the spirit and scope of the present invention, the shapes, configurations, and features described in the scope of the present application. And the number of modifications may be made, and the scope of patent protection of the present invention shall be determined by the scope of the patent application attached to the specification.

1‧‧‧自動測試設備 1‧‧‧Automatic test equipment

10a~10n‧‧‧測試模組 10a~10n‧‧‧ test module

100a~100n‧‧‧開關組 100a~100n‧‧‧ switch group

102a~102n‧‧‧測量單元 102a~102n‧‧‧Measurement unit

1000a~1000n‧‧‧接腳 1000a~1000n‧‧‧ pins

12‧‧‧控制模組 12‧‧‧Control Module

Claims (18)

一種自動測試設備,用於測試至少一第一待測物以及一第二待測物,該自動測試設備包括:一第一測試模組,包括一第一開關組及一第一測量單元,該第一測量單元耦接該第一開關組,該第一開關組包括至少一第一接腳,該第一接腳可插拔地耦接該第一待測物;一第二測試模組,包括一第二開關組及一第二測量單元,該第二測量單元耦接該第二開關組,該第二開關組包括至少一第二接腳及一第三接腳,該第二接腳可插拔地耦接該第一待測物,該第三接腳可插拔地耦接該第二待測物;以及一控制模組,耦接該第一測試模組及該第二測試模組,並依據一測試排程表控制該第一測試模組及該第二測試模組,使得該第一測試模組及該第二測試模組在一排程模式下對該第一待測物及該第二待測物進行測試,其中該排程模式為循序模式、並行模式、或並聯模式;其中該第一開關組包括一第一開關,該第一開關的一端耦接該第一測量單元,另一端耦接該第一接腳,該第二開關組包括一第二開關及一第三開關,該第二開關的一端耦接該第二測量單元,另一端耦接該第二接腳,該第三開關的一端耦接該第二測量單元,另一端耦接該第三接腳。 An automatic test device for testing at least one first test object and a second test object, the automatic test device comprising: a first test module comprising a first switch group and a first measurement unit, The first measurement unit is coupled to the first switch group, the first switch group includes at least one first pin, the first pin is pluggably coupled to the first object to be tested; and a second test module is The second switch unit is coupled to the second switch group, and the second switch group includes at least one second pin and a third pin, the second pin The first test object is detachably coupled to the first test object, and the third test pin is coupled to the second test object; and a control module coupled to the first test module and the second test And controlling the first test module and the second test module according to a test schedule, so that the first test module and the second test module are in the first mode The test object and the second object to be tested are tested, wherein the scheduling mode is a sequential mode, a parallel mode, or a parallel mode The first switch group includes a first switch, one end of the first switch is coupled to the first measurement unit, the other end is coupled to the first pin, and the second switch group includes a second switch and a third The second switch has one end coupled to the second measuring unit and the other end coupled to the second pin. One end of the third switch is coupled to the second measuring unit, and the other end is coupled to the third pin. 如請求項1所述之自動測試設備,其中該控制模組包括一狀態機,該狀態機依據該測試排程表於複數個測試狀態間進行切換,以控制該第一開關組與該第二開關組的導通狀態及對該第一待測物與該第二待測物的測試。 The automatic test device of claim 1, wherein the control module comprises a state machine, wherein the state machine switches between the plurality of test states according to the test schedule to control the first switch group and the second The conduction state of the switch group and the test of the first object to be tested and the second object to be tested. 如請求項1所述之自動測試設備,其中該控制模組包括一排程單元,用以依據該排程模式,決定該第一開關組與該第二開關組的一導通時序,以產生該測試排程表。 The automatic test device of claim 1, wherein the control module includes a scheduling unit configured to determine a turn-on timing of the first switch group and the second switch group according to the scheduling mode to generate the Test the schedule. 如請求項1所述之自動測試設備,其中,在該排程模式下,該第一測量單 元於一第一測試期間透過該第一接腳導通於該第一待測物,該第二測量單元於一第二測試期間透過該第二接腳導通於該第一待測物,該第二測量單元於一第三測試期間透過該第三接腳導通於該第二待測物,其中當該第一測試期間與該第二測試期間重合且不與該第三測試期間重合,該排程模式為並行模式或並聯模式。 The automatic test device of claim 1, wherein in the scheduling mode, the first measurement list The first measuring device is connected to the first object to be tested through the first pin during a first test period, and the second measuring unit is electrically connected to the first object to be tested through the second pin during a second test period. The second measuring unit is electrically connected to the second object to be tested through the third pin during a third test period, wherein the first test period coincides with the second test period and does not coincide with the third test period, the row The mode is parallel mode or parallel mode. 如請求項4所述之自動測試設備,其中當該第一測試期間與該第三測試期間重合且不與該第二測試期間重合,該排程模式為循序模式。 The automatic test device of claim 4, wherein the schedule mode is a sequential mode when the first test period coincides with the third test period and does not coincide with the second test period. 如請求項1所述之自動測試設備,更包括一第三測試模組,該第三測試模組包括一第三開關組及一第三測量單元,該第三測量單元耦接該第三開關組,該第三開關組包括至少一第四接腳,該第四接腳可插拔地耦接該第一待測物,其中該控制模組包括一指令執行單元,用以依據一第一測試指令在一非排程模式下控制該第三開關組,使得該第三測試模組於一第四測試期間中的一第一時間點透過該第四接腳將該第三測量單元導通於該第一待測物,以對該第一待測物進行測試。 The automatic test device of claim 1, further comprising a third test module, the third test module comprising a third switch group and a third measurement unit, the third measurement unit coupled to the third switch The third switch group includes at least one fourth pin, the fourth pin is detachably coupled to the first object to be tested, wherein the control module includes an instruction execution unit for The test command controls the third switch group in a non-scheduled mode, so that the third test module conducts the third measurement unit through the fourth pin at a first time point in a fourth test period. The first object to be tested is tested on the first object to be tested. 如請求項6所述之自動測試設備,其中該指令執行單元更依據一第二測試指令在該非排程模式下控制該第三開關組,使得該第三測試模組於該第四測試期間中的一第二時間點停止將該第三測量單元導通於該第一待測物。 The automatic test device of claim 6, wherein the instruction execution unit further controls the third switch group in the non-scheduled mode according to a second test instruction, so that the third test module is in the fourth test period. The second time point stops the conduction of the third measuring unit to the first object to be tested. 一種自動測試方法,係用於一自動測試設備,以測試至少一第一待測物以及一第二待測物,該自動測試設備包括一第一測試模組、一第二測試模組以及一控制模組,該第一測試模組包括一第一開關組及一第一測量單元,該第一測量單元耦接該第一開關組,該第一開關組包括至少一第一接腳,該第一接腳可插拔地耦接該第一待測物,該第二測試模組,包括一第二開關組及一第二測量單元,該第二測量單元耦接該第二開關組,該第二開關組包括至少一第二接腳及一第三接腳,該第二接腳可插拔地耦接該第一待測物,該第三接腳可插拔地耦接該第二待測物,該控制模組,耦接該第一測試模組及該第二測試模組,包括下列步驟: 產生一測試排程表;以及該控制模組依據該測試排程表控制該第一測試模組及該第二測試模組,使得該第一測試模組及該第二測試模組在一排程模式下對該第一待測物及該第二待測物進行測試,其中該排程模式為循序模式、並行模式、或並聯模式;其中該第一開關組包括一第一開關,該第一開關的一端耦接該第一測量單元,另一端耦接該第一接腳,該第二開關組包括一第二開關及一第三開關,該第二開關的一端耦接該第二測量單元,另一端耦接該第二接腳,該第三開關的一端耦接該第二測量單元,另一端耦接該第三接腳。 An automatic testing method for testing at least one first object to be tested and a second object to be tested, the automatic testing device comprising a first testing module, a second testing module, and a a control module, the first test module includes a first switch group and a first measurement unit, the first measurement unit is coupled to the first switch group, and the first switch group includes at least one first pin, The first test pin is coupled to the first test object, and the second test module includes a second switch group and a second measurement unit. The second measurement unit is coupled to the second switch group. The second switch group includes at least one second pin and a third pin, the second pin is detachably coupled to the first object to be tested, and the third pin is pluggably coupled to the first The second test object, the control module, coupled to the first test module and the second test module, includes the following steps: Generating a test schedule table; and the control module controls the first test module and the second test module according to the test schedule table, such that the first test module and the second test module are in a row The first test object and the second test object are tested in a mode, wherein the scheduling mode is a sequential mode, a parallel mode, or a parallel mode; wherein the first switch group includes a first switch, the first switch One end of the switch is coupled to the first measurement unit, and the other end is coupled to the first pin. The second switch group includes a second switch and a third switch. One end of the second switch is coupled to the second measurement. The other end is coupled to the second pin. One end of the third switch is coupled to the second measuring unit, and the other end is coupled to the third pin. 如請求項8所述之自動測試方法,其中該自動測試設備更包括一第三測試模組,該第三測試模組包括一第三開關組及一第三測量單元,該第三測量單元耦接該第三開關組,該第三開關組包括至少一第四接腳,該第四接腳可插拔地耦接該第一待測物,該控制模組包括一指令執行單元,更包括下列步驟:該指令執行單元依據一第一測試指令在一非排程模式下控制該第三開關組,使得該第三測試模組於一第四測試期間中的一第一時間點透過該第四接腳將該第三測量單元導通於該第一待測物,以對該第一待測物進行測試;以及該指令執行單元依據一第二測試指令在該非排程模式下控制該第三開關組,使得該第三測試模組於該第四測試期間中的一第二時間點停止將該第三測量單元導通於該第一待測物。 The automatic test method of claim 8, wherein the automatic test device further comprises a third test module, the third test module comprising a third switch group and a third measurement unit, the third measurement unit coupled Connected to the third switch group, the third switch group includes at least one fourth pin, the fourth pin is detachably coupled to the first object to be tested, and the control module includes an instruction execution unit, and further includes The following steps: the instruction execution unit controls the third switch group in a non-scheduled mode according to a first test command, so that the third test module transmits the first time point in a fourth test period The fourth measuring unit turns on the third measuring unit to test the first object to be tested, and the instruction executing unit controls the third in the non-scheduled mode according to a second test instruction The switch group is configured to stop the third measurement unit from being electrically connected to the first object to be tested at a second time point in the fourth test period. 一種自動測試設備,用於測試至少一第一待測物以及一第二待測物,該自動測試設備包括:一第一測試模組,包括一第一開關組及一第一測量單元,該第一測量單元耦接該第一開關組,該第一開關組包括至少一第一接腳,該第一接腳可插拔地耦接該第一待測物; 一第二測試模組,包括一第二開關組及一第二測量單元,該第二測量單元耦接該第二開關組,該第二開關組包括至少一第二接腳及一第三接腳,該第二接腳可插拔地耦接該第一待測物,該第三接腳可插拔地耦接該第二待測物;以及一控制模組,耦接該第一測試模組及該第二測試模組,並依據一測試排程表控制該第一測試模組及該第二測試模組,使得該第一測試模組及該第二測試模組在一排程模式下對該第一待測物及該第二待測物進行測試,其中該排程模式為循序模式、並行模式、或並聯模式;其中該控制模組包括一狀態機,該狀態機依據該測試排程表於複數個測試狀態間進行切換,以控制該第一開關組與該第二開關組的導通狀態及對該第一待測物與該第二待測物的測試。 An automatic test device for testing at least one first test object and a second test object, the automatic test device comprising: a first test module comprising a first switch group and a first measurement unit, The first measuring unit is coupled to the first switch group, the first switch group includes at least one first pin, and the first pin is detachably coupled to the first object to be tested; A second test module includes a second switch unit and a second measurement unit, the second measurement unit is coupled to the second switch group, and the second switch group includes at least one second pin and a third port The second pin is detachably coupled to the first object to be tested, and the third pin is detachably coupled to the second object to be tested; and a control module coupled to the first test And the second test module, and the first test module and the second test module are controlled according to a test schedule, so that the first test module and the second test module are in a schedule The first test object and the second test object are tested in a mode, wherein the scheduling mode is a sequential mode, a parallel mode, or a parallel mode; wherein the control module includes a state machine, and the state machine is configured according to the The test schedule is switched between the plurality of test states to control the conduction state of the first switch group and the second switch group and the test of the first object to be tested and the second object to be tested. 如請求項10所述之自動測試設備,其中該第一開關組包括一第一開關,該第一開關的一端耦接該第一測量單元,另一端耦接該第一接腳,該第二開關組包括一第二開關及一第三開關,該第二開關的一端耦接該第二測量單元,另一端耦接該第二接腳,該第三開關的一端耦接該第二測量單元,另一端耦接該第三接腳。 The automatic test device of claim 10, wherein the first switch group includes a first switch, one end of the first switch is coupled to the first measurement unit, and the other end is coupled to the first pin, the second The switch group includes a second switch and a third switch. One end of the second switch is coupled to the second measuring unit, and the other end is coupled to the second pin. One end of the third switch is coupled to the second measuring unit. The other end is coupled to the third pin. 如請求項10所述之自動測試設備,其中該控制模組包括一排程單元,用以依據該排程模式,決定該第一開關組與該第二開關組的一導通時序,以產生該測試排程表。 The automatic test device of claim 10, wherein the control module includes a scheduling unit configured to determine a turn-on timing of the first switch group and the second switch group according to the scheduling mode to generate the Test the schedule. 如請求項10所述之自動測試設備,其中,在該排程模式下,該第一測量單元於一第一測試期間透過該第一接腳導通於該第一待測物,該第二測量單元於一第二測試期間透過該第二接腳導通於該第一待測物,該第二測量單元於一第三測試期間透過該第三接腳導通於該第二待測物,其中當該第一測試期間與該第二測試期間重合且不與該第三測試期間重合,該排程模式為並行模式或並聯模式。 The automatic test device of claim 10, wherein, in the scheduling mode, the first measurement unit conducts the first object to be tested through the first pin during a first test period, the second measurement The second measuring unit is electrically connected to the first object to be tested through the second pin during a second test period, and the second measuring unit is electrically connected to the second object to be tested through the third pin during a third test period. The first test period coincides with the second test period and does not coincide with the third test period, and the schedule mode is a parallel mode or a parallel mode. 如請求項13所述之自動測試設備,其中當該第一測試期間與該第三測試期 間重合且不與該第二測試期間重合,該排程模式為循序模式。 The automatic test device of claim 13, wherein the first test period and the third test period Interspersed and does not coincide with the second test period, which is a sequential mode. 如請求項10所述之自動測試設備,更包括一第三測試模組,該第三測試模組包括一第三開關組及一第三測量單元,該第三測量單元耦接該第三開關組,該第三開關組包括至少一第四接腳,該第四接腳可插拔地耦接該第一待測物,其中該控制模組包括一指令執行單元,用以依據一第一測試指令在一非排程模式下控制該第三開關組,使得該第三測試模組於一第四測試期間中的一第一時間點透過該第四接腳將該第三測量單元導通於該第一待測物,以對該第一待測物進行測試。 The automatic test device of claim 10, further comprising a third test module, the third test module comprising a third switch group and a third measurement unit, the third measurement unit coupled to the third switch The third switch group includes at least one fourth pin, the fourth pin is detachably coupled to the first object to be tested, wherein the control module includes an instruction execution unit for The test command controls the third switch group in a non-scheduled mode, so that the third test module conducts the third measurement unit through the fourth pin at a first time point in a fourth test period. The first object to be tested is tested on the first object to be tested. 如請求項15所述之自動測試設備,其中該指令執行單元更依據一第二測試指令在該非排程模式下控制該第三開關組,使得該第三測試模組於該第四測試期間中的一第二時間點停止將該第三測量單元導通於該第一待測物。 The automatic test device of claim 15, wherein the instruction execution unit further controls the third switch group in the non-scheduled mode according to a second test instruction, so that the third test module is in the fourth test period. The second time point stops the conduction of the third measuring unit to the first object to be tested. 一種自動測試方法,係用於一自動測試設備,以測試至少一第一待測物以及一第二待測物,該自動測試設備包括一第一測試模組、一第二測試模組以及一控制模組,該第一測試模組包括一第一開關組及一第一測量單元,該第一測量單元耦接該第一開關組,該第一開關組包括至少一第一接腳,該第一接腳可插拔地耦接該第一待測物,該第二測試模組,包括一第二開關組及一第二測量單元,該第二測量單元耦接該第二開關組,該第二開關組包括至少一第二接腳及一第三接腳,該第二接腳可插拔地耦接該第一待測物,該第三接腳可插拔地耦接該第二待測物,該控制模組,耦接該第一測試模組及該第二測試模組,包括下列步驟:產生一測試排程表;以及該控制模組依據該測試排程表控制該第一測試模組及該第二測試模組,使得該第一測試模組及該第二測試模組在一排程模式下對該第一待測物及該第二待測物進行測試,其中該排程模式為循序模式、並行模式、或並聯模式;其中該控制模組包括一狀態機,該狀態機依據該測試排程表於複數個 測試狀態間進行切換,以控制該第一開關組與該第二開關組的導通狀態及對該第一待測物與該第二待測物的測試。 An automatic testing method for testing at least one first object to be tested and a second object to be tested, the automatic testing device comprising a first testing module, a second testing module, and a a control module, the first test module includes a first switch group and a first measurement unit, the first measurement unit is coupled to the first switch group, and the first switch group includes at least one first pin, The first test pin is coupled to the first test object, and the second test module includes a second switch group and a second measurement unit. The second measurement unit is coupled to the second switch group. The second switch group includes at least one second pin and a third pin, the second pin is detachably coupled to the first object to be tested, and the third pin is pluggably coupled to the first The second test object, the control module, coupled to the first test module and the second test module, includes the following steps: generating a test schedule; and the control module controls the test schedule according to the test schedule The first test module and the second test module enable the first test module and the second test The group tests the first object to be tested and the second object to be tested in a scheduling mode, wherein the scheduling mode is a sequential mode, a parallel mode, or a parallel mode; wherein the control module includes a state machine, The state machine is based on the test schedule in a plurality of Switching between the test states to control the conduction state of the first switch group and the second switch group and the test of the first object to be tested and the second object to be tested. 如請求項17所述之自動測試方法,其中該自動測試設備更包括一第三測試模組,該第三測試模組包括一第三開關組及一第三測量單元,該第三測量單元耦接該第三開關組,該第三開關組包括至少一第四接腳,該第四接腳可插拔地耦接該第一待測物,該控制模組包括一指令執行單元,更包括下列步驟:該指令執行單元依據一第一測試指令在一非排程模式下控制該第三開關組,使得該第三測試模組於一第四測試期間中的一第一時間點透過該第四接腳將該第三測量單元導通於該第一待測物,以對該第一待測物進行測試;以及該指令執行單元依據一第二測試指令在該非排程模式下控制該第三開關組,使得該第三測試模組於該第四測試期間中的一第二時間點停止將該第三測量單元導通於該第一待測物。 The automatic test method of claim 17, wherein the automatic test device further comprises a third test module, the third test module comprising a third switch group and a third measurement unit, the third measurement unit coupled Connected to the third switch group, the third switch group includes at least one fourth pin, the fourth pin is detachably coupled to the first object to be tested, and the control module includes an instruction execution unit, and further includes The following steps: the instruction execution unit controls the third switch group in a non-scheduled mode according to a first test command, so that the third test module transmits the first time point in a fourth test period The fourth measuring unit turns on the third measuring unit to test the first object to be tested, and the instruction executing unit controls the third in the non-scheduled mode according to a second test instruction The switch group is configured to stop the third measurement unit from being electrically connected to the first object to be tested at a second time point in the fourth test period.
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