TWI567622B - A jumper structure in a touch sensor and a fabricating method thereof, as well as a capacitive touch panel using the jumper structure. - Google Patents
A jumper structure in a touch sensor and a fabricating method thereof, as well as a capacitive touch panel using the jumper structure. Download PDFInfo
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Description
本發明涉及一種使用於電容式觸控面板的觸控感測器的構造及其製造方法，特別是一種觸控感測器的跨接線、製造方法及使用該跨接線的電容式觸控面板。The invention relates to a structure of a touch sensor used in a capacitive touch panel and a manufacturing method thereof, in particular to a jumper of a touch sensor, a manufacturing method thereof and a capacitive touch panel using the jumper.
現有的觸控面板係在一基板表面佈設感應區，藉由感應區感應手指或其替代物(如觸控筆)的位置實現觸控的目的。觸控面板的技術種類甚多，依偵測方式及其結構可區分為電阻式、電容式、電磁式、紅外線式和表面聲波式，其中又以電容式觸控面板為目前的主流產品。已知的一種電容式觸控面板係在一透明基板(如玻璃基板)的表面沿著第一方向(如X軸方向)和第二方向(如Y軸方向)分別設置數個互相平行的第一方向電極和數個互相平行的第二方向電極，第一方向電極和第二方向電極在透明基板的表面互相交錯排列，第一方向電極和第二方向電極係採用透明的導電材料如氧化銦錫(indium tin oxide, ITO)製作，手指觸碰基板時藉由交錯的第一方向電極和第二方向電極產生一電訊號，再將電訊號傳送至一運算電路，通過運算電路即可得知手指和基板碰觸的座標位置。類似的技術包括已公開的美國專利6970160、5880411以及中國發明專利CN102253781A、CN102253782A。The existing touch panel is provided with a sensing area on the surface of the substrate, and the sensing area senses the position of the finger or its substitute (such as a stylus) to achieve the purpose of touch. There are many kinds of touch panel technologies. According to the detection method and its structure, it can be divided into resistive, capacitive, electromagnetic, infrared and surface acoustic wave. Among them, capacitive touch panels are the mainstream products. A known capacitive touch panel is provided with a plurality of mutually parallel segments on a surface of a transparent substrate (such as a glass substrate) along a first direction (such as an X-axis direction) and a second direction (such as a Y-axis direction). a directional electrode and a plurality of mutually parallel second directional electrodes, the first directional electrode and the second directional electrode are staggered on the surface of the transparent substrate, and the first directional electrode and the second directional electrode are made of a transparent conductive material such as indium oxide. Made of indium tin oxide (ITO), when a finger touches the substrate, an electrical signal is generated by the interleaved first direction electrode and the second direction electrode, and then the electrical signal is transmitted to an arithmetic circuit, and the operation circuit can be known. The coordinate position where the finger and the substrate touch. Similar technologies include the published US patents 6,970,160, 5,804,411 and the Chinese invention patents CN102253781A, CN102253782A.
已知電容式觸控面板的第一方向電極和第二方向電極在透明基板的設置方式可分為兩種，其中一種方式係將第一方向電極和第二方向電極分別設置於透明基板的兩個相對表面，如前述已公開的美國專利6970160和5880411即屬此種設計；另一種方式係將第一方向電極和第二方向電極設置於透明基板的同一側表面，在第一方向電極和第二方向電極之間的交錯位置設置有透明的一電絕緣層，配合跨過電絕緣層的一種具有導電性的跨接線構成一種「架橋」構造，令第一方向電極和第二方向電極能彼此交錯設置而且不會在交錯位置發生短路，如前述已公開的中國發明專利CN102253781A、CN102253782A即屬此種設計，前述架橋構造用於跨越電絕緣層的跨接線所使用的材質包含金屬(metal)，如前述的中國發明專利CN102253781A即採用金屬架橋；另一種跨接線所使用的材質係為透明導電材料，如前述的中國發明專利CN102253782A即採用ITO材質製作跨接線。It is known that the arrangement of the first direction electrode and the second direction electrode of the capacitive touch panel in the transparent substrate can be divided into two types, one of which is to set the first direction electrode and the second direction electrode on the transparent substrate respectively. The opposite surfaces, such as the previously disclosed U.S. Patents 6,970,160 and 5,804,410, are of such a design; the other is to provide the first direction electrode and the second direction electrode on the same side surface of the transparent substrate, in the first direction electrode and The staggered position between the two-direction electrodes is provided with a transparent electrically insulating layer, and a conductive jumper that spans the electrically insulating layer forms a "bridge" structure, so that the first direction electrode and the second direction electrode can mutually The staggered arrangement does not cause a short circuit at the staggered position. The above-mentioned disclosed Chinese invention patents CN102253781A, CN102253782A belong to the design, and the material used for the jumper structure across the electrically insulating layer comprises metal. As mentioned above, the Chinese invention patent CN102253781A uses a metal bridge; the other material used for the jumper is a transparent guide. Materials, such as the aforementioned Chinese patent CN102253782A i.e. using jumper ITO material production.
由於使用者對視覺及操作便利性的需求提升，以及技術的日漸成熟，愈來愈多的產品都開始使用電容式觸控面板，而且對電容式觸控面板的品質要求也越來越高，比如要求使用ITO 材質製作前述的跨接線，以避免使用金屬跨接線在視覺上存在可見的問題。由於在架橋構造所在位置的電絕緣層具有一高度，致使跨接線必須跨過電絕緣層用於進行電性連接，所以跨接線在電絕緣層的兩邊均存在＂爬坡”的現象，由於ITO的物理性質比較脆弱，在“爬坡”位置很容易斷裂或損壞進而影響電容式觸控面板的功能。另一方面，由於採用ITO製作的跨接線的寬度一般都會比較寬(一般是金屬跨接線之寬度的10倍以上)，這樣會導致順著ITO跨接線的方向目視時，會在某一個比較低的角度範圍上，發現ITO跨接線在“爬坡”位置比較亮，而產生ITO 跨接線可見的問題。Due to the increasing demand for visual and operational convenience and the maturity of technology, more and more products are beginning to use capacitive touch panels, and the quality requirements for capacitive touch panels are getting higher and higher. For example, the use of ITO materials is required to make the aforementioned jumper wires to avoid visual problems with metal jumpers. Since the electrically insulating layer at the location of the bridging structure has a height such that the jumper must cross the electrically insulating layer for electrical connection, the jumper has a "climbing" phenomenon on both sides of the electrically insulating layer due to ITO The physical properties are relatively fragile, and it is easy to break or damage in the "climbing" position and thus affect the function of the capacitive touch panel. On the other hand, the width of the jumper made of ITO is generally wider (usually more than 10 times the width of the metal jumper), which will result in a lower angle when viewed in the direction of the ITO jumper. Over the range of angles, the ITO jumper was found to be brighter at the "climbing" position, creating problems with ITO jumpers.
為了解決上述先前技術存在的問題，本發明之一目的旨在提出一種觸控感測器的跨接線、製造方法及使用該跨接線的電容式觸控面板，透過對電容式觸控面板的跨接線的構造改進，改善採用ITO材質之跨接線在爬坡部的位置容易斷裂以及可視問題，另一方面也提昇了製程的良率。In order to solve the above problems in the prior art, an object of the present invention is to provide a jumper of a touch sensor, a manufacturing method thereof, and a capacitive touch panel using the jumper, through a cross-section of the capacitive touch panel The structure of the wiring is improved, and the position of the ITO material jumper in the climbing portion is easily broken and the visual problem is improved, and the yield of the process is also improved.
為實現上述目的，本發明提出之一觸控感測器的跨接線係跨越間隔相鄰的二個第二感測器之間的一電絕緣層，並且電性連接二個該第二感測器，所述的跨接線包括：透明並具有導電性的一第一跨接部和金屬材質的一第二跨接部，該第一跨接部覆蓋於該電絕緣層，該第二跨接部分別在該第一跨接部的兩端和該第一跨接部電性連接並且跨過該電絕緣層的兩端電性連接於二個相鄰的該第二感測器。In order to achieve the above object, the present invention provides that the jumper of the touch sensor spans an electrically insulating layer between two adjacent second sensors, and electrically connects the two second sensings. The jumper includes: a first bridging portion that is transparent and electrically conductive, and a second bridging portion of a metal material, the first bridging portion covering the electrically insulating layer, the second bridging The two ends of the first bridging portion are electrically connected to the first bridging portion and electrically connected to two adjacent second sensors across the two ends of the electrically insulating layer.
在本發明的一方面，包含數個該第二跨接部，該些第二跨接部的一端電性連接該第一跨接部，該些第二跨接部的另一端電性連接相鄰的該第二感測器，任二相鄰的該第二跨接部係間隔排列。In one aspect of the present invention, the second bridging portion is electrically connected to the first bridging portion, and the other end of the second bridging portions is electrically connected to each other. The second sensor adjacent to each other, and any two adjacent second bridging portions are arranged at intervals.
本發明的一方面包含該觸控感測器的跨接線的製造方法，該跨接線係跨越在第二方向間隔相鄰的二個第二感測器之間的一電絕緣層，並且電性連接二個該第二感測器，所述方法的一實施例包括下列步驟：One aspect of the present invention includes a method of fabricating a jumper of the touch sensor, the jumper spanning an electrically insulating layer between two adjacent second sensors spaced apart in a second direction, and electrically Connecting the two second sensors, an embodiment of the method includes the following steps:
在一電絕緣層上方形成跨接線構造的一第一跨接部，該第一跨接部係為一種透明導電材質，該第一跨接部在該第二方向的兩端與該電絕緣層之兩端的爬坡部之間具有一間隙； 以及Forming a first bridging portion of the jumper structure over an electrically insulating layer, the first bridging portion being a transparent conductive material, the first bridging portion and the electrically insulating layer at both ends of the second bridging portion a gap between the climbing portions at both ends;
在該第一跨接部與該電絕緣層之兩端的爬坡部之間的該間隙處形成金屬材質的一第二跨接部，且該第二跨接部分別與該第一跨接部和相鄰的該第二感測器電性連接。Forming a second bridging portion of a metal material at the gap between the first bridging portion and the climbing portion at both ends of the electrically insulating layer, and the second bridging portion and the first bridging portion respectively The second sensor is electrically connected to the adjacent one.
在本發明方法的一實施例中，包括：在形成金屬材質的該第二跨接部的同時形成用於電性連接第一方向電極的第一軸向週邊線路，以及用於電性連接第二方向電極的第二軸向週邊線路；因此本發明方法可以在可以在既有制程下，只是通過改進跨接線的構造就能達到避免跨接線斷裂，提升制程良率，以及解決ITO材質之跨接線的＂可見”問題。In an embodiment of the method of the present invention, the method includes: forming a first axial peripheral line for electrically connecting the first direction electrode while forming the second bridging portion of the metal material, and for electrically connecting The second axial peripheral line of the two-direction electrode; therefore, the method of the present invention can avoid the breakage of the jumper, improve the process yield, and solve the cross-section of the ITO material under the existing process, only by improving the structure of the jumper. The "visible" problem of wiring.
在本發明方法的一實施例中，包括：形成氧化金屬材質的該第二跨接部；透過氧化金屬材質的第二跨接部降低第二跨接部的光反射率，避免第二跨接部出現可見的問題。In an embodiment of the method of the present invention, the second bridging portion of the oxidized metal material is formed; the second bridging portion of the oxidized metal material reduces the light reflectivity of the second bridging portion to avoid the second bridging There are visible problems in the department.
在本發明方法的一實施例中，包括：使用低反射率的金屬材質形成該第二跨接部，具有降低第二跨接部的光反射率，避免第二跨接部出現可見問題的功效。In an embodiment of the method of the present invention, the second bridging portion is formed by using a low reflectivity metal material, which has the effect of reducing the light reflectivity of the second bridging portion and avoiding visible problems in the second bridging portion. .
在本發明方法的一實施例中，包括：以黃光製程形成具有多層金屬材質的該第二跨接部，其中該具有多層金屬材質的該第二跨接部的表面係為一抗反射層。In an embodiment of the method of the present invention, the second bridging portion having a plurality of layers of metal material is formed by a yellow light process, wherein the surface of the second bridging portion having the multi-layer metal material is an anti-reflection layer .
本發明的一方面包含使用該跨接線構造的觸控面板，該觸控面板的一實施例構造包括：An aspect of the invention includes a touch panel using the jumper structure, and an embodiment of the touch panel includes:
透明的一基板；a transparent substrate;
一第一方向電極，形成於該基板的一第一表面，該第一方向電極包括在第一方向相互間隔排列的複數個第一感測器，連接第一方向上相鄰之該第一感測器的一第一導線，覆蓋該第一導線的透明的一電絕緣層；以及a first direction electrode is formed on a first surface of the substrate, the first direction electrode includes a plurality of first sensors spaced apart from each other in the first direction, and the first sense is adjacent to the first direction a first wire of the detector covering a transparent electrically insulating layer of the first wire;
一第二方向電極，形成於該基板的該第一表面，該第二方向電極包括在第二方向相互間隔排列的複數個第二感測器及連接第二方向上相鄰之該第二感測器的該跨接線構造，該跨接線構造在該第一導線處與該第一方向電極交錯，該電絕緣層具有電絕緣性並且介於該跨接線構造和該第一導線之間以避免該跨接線構造和該第一導線短路。a second directional electrode formed on the first surface of the substrate, the second directional electrode including a plurality of second sensors spaced apart from each other in the second direction and the second sensation adjacent to the second direction The jumper structure of the detector, the jumper structure being staggered at the first wire with the first direction electrode, the electrically insulating layer being electrically insulating and interposed between the jumper structure and the first wire to avoid The jumper structure is shorted to the first wire.
為明確且充分揭露本發明的技術內容，下文將配合圖式列舉最佳實施例及其實施方式如後。In order to clearly and fully disclose the technical content of the present invention, the preferred embodiments and their embodiments are described below in conjunction with the drawings.
首先請參閱第1圖，為本發明的一實施例構造圖，顯示具有本發明之跨接線構造的觸控面板的平面構造圖；第2圖為第1圖在II-II位置的構造斷面圖，顯示第一方向電極10、第二方向電極20、電絕緣層30和跨接線40的堆疊關係。如第1圖所示，具有本發明之跨接線40的觸控面板包含：設置於第一方向(例如X軸方向)的一第一方向電極10和設置於第二方向(例如Y軸方向)的一第二方向電極20，用於電性連接第一方向電極10和一控制器C的一第一方向週邊線路11，以及用於電性連接第二方向電極20和控制器C的第二方向週邊線路21，第一方向電極10和第二方向電極20設置於透明的一基板50的第一表面51並且互相交錯。其中的第一方向電極10包括：在第一方向相互間隔排列的複數個第一感測器12，連接第一方向上相鄰之該第一感測器12的一第一導線13，覆蓋該第一導線13的一電絕緣層30；其中的第二方向電極20包括：在第二方向相互間隔排列的複數個第二感測器22，其中第二方向電極20的任二個相鄰的第二感測器22分別位於第一方向電極10其中的一第一導線13的兩側。First, please refer to FIG. 1 , which is a structural view showing a planar structure of a touch panel having the jumper structure of the present invention; and FIG. 2 is a structural section of the first figure at the position II-II. The figure shows the stacking relationship of the first direction electrode 10, the second direction electrode 20, the electrically insulating layer 30, and the jumper wires 40. As shown in FIG. 1 , the touch panel having the jumper 40 of the present invention includes: a first direction electrode 10 disposed in a first direction (eg, an X-axis direction) and a second direction (eg, a Y-axis direction) a second direction electrode 20, a first direction peripheral line 11 for electrically connecting the first direction electrode 10 and a controller C, and a second for electrically connecting the second direction electrode 20 and the controller C The direction peripheral line 21, the first direction electrode 10 and the second direction electrode 20 are disposed on the first surface 51 of the transparent substrate 50 and are interlaced with each other. The first direction electrode 10 includes: a plurality of first sensors 12 spaced apart from each other in the first direction, and a first wire 13 of the first sensor 12 adjacent to the first direction is connected to cover the first direction An electrically insulating layer 30 of the first wire 13; wherein the second direction electrode 20 comprises: a plurality of second sensors 22 spaced apart from each other in the second direction, wherein any two adjacent electrodes of the second direction electrode 20 The second sensors 22 are respectively located on two sides of a first wire 13 of the first direction electrode 10.
前述透明的基板50通常係使用下列透明材料其中的任一種製作，所述透明材料包括：玻璃(Glass)、聚碳酸脂(polycarbonate, PC)、聚對苯二甲酸乙二脂(polyethylene terephthalate, PET)、聚甲基丙烯酸甲脂(polymethylmesacrylate, PMMA)、聚碸(Polysulfone, PES) 以及環烯共聚物(cyclic olefin copolymer)。在本發明的一實施例中，基板50為一玻璃平板或塑膠平板。The transparent substrate 50 is usually made of any of the following transparent materials, including: glass, polycarbonate, PC, polyethylene terephthalate (PET). ), polymethylmesacrylate (PMMA), polysulfone (PES), and cyclic olefin copolymer. In an embodiment of the invention, the substrate 50 is a glass plate or a plastic plate.
本發明提出之一觸控感測器的跨接線40係跨越間隔相鄰的二個第二感測器22之間的該電絕緣層30，並且電性連接二個該第二感測器22，本發明提出的跨接線40的構造包括：透明並具有導電性的一第一跨接部41和金屬材質的一第二跨接部42，該第一跨接部41覆蓋於該電絕緣層30，該第二跨接部42分別在該第一跨接部41的兩端通過該電絕緣層30的一爬坡部31並且電性連接於二個相鄰的該第二感測器22。The jumper 40 of the touch sensor spans the electrically insulating layer 30 between the adjacent two second sensors 22 and electrically connects the two second sensors 22 The structure of the jumper wire 40 proposed by the present invention comprises: a first bridging portion 41 which is transparent and electrically conductive, and a second bridging portion 42 of a metal material, the first bridging portion 41 covering the electrically insulating layer 30. The second bridging portion 42 passes through a climbing portion 31 of the electrically insulating layer 30 at both ends of the first bridging portion 41 and is electrically connected to two adjacent second sensors 22 .
第一跨接部41係採用透明的導電材質製作，所述透明的導電材料包括：氧化銦錫(ITO)、氧化銦鋅(IZO)、氧化鎘錫(CTO)、氧化鋁鋅(AZO)、氧化銦鋅錫(ITZO)、氧化鋅(zinc oxide)、氧化鎘(cadmium oxide)、氧化鉿(hafnium oxide, HfO) 、石墨烯(Graphene)、奈米銀線(Ag nanowire)以及奈米碳管(Carbon nanotubes，CNT)其中的任一種。該第二跨接部42係由金屬材料製作，所述的金屬材料包含：鉬、金、銀、銅和鋁其中之任一種。The first bridging portion 41 is made of a transparent conductive material, and the transparent conductive material includes: indium tin oxide (ITO), indium zinc oxide (IZO), cadmium tin oxide (CTO), aluminum zinc oxide (AZO), Indium zinc zinc oxide (ITZO), zinc oxide, cadmium oxide, hafnium oxide (HfO), graphene, Ag nanowire, and carbon nanotubes (Carbon nanotubes, CNT) Any of them. The second bridging portion 42 is made of a metal material, and the metal material includes any one of molybdenum, gold, silver, copper, and aluminum.
請參閱第3圖，為本發明跨接線40的另一種實施例構造圖，其中揭露的跨接線40的構造包括：一第一跨接部41和數個第二跨接部42a和42b，該些第二跨接部42a和42b的一端電性連接該第一跨接部41，該些第二跨接部42a和42b的另一端電性連接相鄰的該第二感測器22，任二相鄰的該些第二跨接部42a和42b係間隔排列；由於金屬材質的該第二跨接部42、42a和42b在物理性質方面會較使用透明的導材料製作的第一跨接部41強韌，而且金屬材質的該些第二跨接部42a和42b的寬度可以比第一跨接部41更小，能夠改善現有採用ITO材質之跨接線在爬坡部的位置容易斷裂以及可視的問題，另一方面也提昇了製程的良率。Referring to FIG. 3, a configuration diagram of another embodiment of the jumper 40 of the present invention, wherein the disclosed jumper 40 is configured to include a first jumper 41 and a plurality of second jumpers 42a and 42b. One ends of the second bridging portions 42a and 42b are electrically connected to the first bridging portion 41, and the other ends of the second bridging portions 42a and 42b are electrically connected to the adjacent second sensor 22, The two adjacent second bridging portions 42a and 42b are spaced apart; since the second bridging portions 42, 42a and 42b of metal material are physically similar to the first bridging made using a transparent guiding material The portion 41 is strong, and the second bridging portions 42a and 42b of the metal material may have a smaller width than the first bridging portion 41, and the existing ITO material jumper can be easily broken at the climbing portion and Visual problems, on the other hand, also improve the yield of the process.
具有前述本發明提出之跨接線的觸控面板的一種製造方法，請參閱第4圖繪示的步驟流程圖，包括下列步驟：For a manufacturing method of the touch panel with the jumper provided by the present invention, please refer to the flow chart of the steps shown in FIG. 4, including the following steps:
A.在透明基板50的第一表面51以第一次製程(例如黃光製程)形成第一方向電極10和第二方向電極20(其堆疊結構請見第6A圖)，第一方向電極10包含：在第一方向相互間隔排列的數個第一感測器12、和電性連接在第一方向相鄰之該第一感測器12的第一導線13，其中第二方向電極20包含在第二方向相互間隔排列的數個第二感測器22，其中第二方向電極20的任二個相鄰的第二感測器22分別位於第一方向電極1的第一導線13的兩側；其中用於形成第一方向電極10和第二方向電極20的第一次製程可視第一方向電極10和第二方向電極20採用的材料而定，一般而言包含黃光製程和印刷製程其中的任一種；A. The first direction electrode 10 and the second direction electrode 20 are formed on the first surface 51 of the transparent substrate 50 in a first process (for example, a yellow light process) (the stacking structure thereof is shown in FIG. 6A), and the first direction electrode 10 The method includes: a plurality of first sensors 12 spaced apart from each other in a first direction, and a first wire 13 electrically connected to the first sensor 12 adjacent in the first direction, wherein the second direction electrode 20 includes a plurality of second sensors 22 spaced apart from each other in the second direction, wherein any two adjacent second sensors 22 of the second direction electrode 20 are respectively located at the first wires 13 of the first direction electrode 1 The first process for forming the first direction electrode 10 and the second direction electrode 20 may be determined by materials used for the first direction electrode 10 and the second direction electrode 20, and generally includes a yellow process and a printing process. Any of them;
B.以第二次製程(例如黃光製程或點膠的方式)形成電絕緣層30(其堆疊結構請見第6B圖)，電絕緣層30係由透明電絕緣材料製造，所述的透明電絕緣材料包含氧化矽SiO2和其他等效材料，該電絕緣層30至少覆蓋該第一導線13，並使該第二方向電極20的該第二感測器22的接觸端221外露，該電絕緣層30在該第二方向的兩端分別鄰近該第二感測器22的位置具有一爬坡部31，爬坡部31是一種斜面並且和基板50的第一表面51之間具有一夾角；以及B. forming an electrically insulating layer 30 in a second process (for example, a yellow light process or dispensing) (the stacking structure is shown in FIG. 6B), and the electrically insulating layer 30 is made of a transparent electrically insulating material, the transparent The electrically insulating material comprises yttria SiO2 and other equivalent materials. The electrically insulating layer 30 covers at least the first wire 13 and exposes the contact end 221 of the second sensor 22 of the second directional electrode 20. The insulating layer 30 has a climbing portion 31 at a position adjacent to the second sensor 22 at both ends of the second direction, and the climbing portion 31 is a slope and has an angle with the first surface 51 of the substrate 50. ;as well as
C.在該電絕緣層30上方形成一跨接線40，該跨接線40包含透明並具有導電性的一第一跨接部41和金屬材質的一第二跨接部42(其堆疊結構請見第6C-6D圖)，該第一跨接部42覆蓋於該電絕緣層30，該第一跨接部41在該第二方向的兩端與該電絕緣層30之兩端的爬坡部31之間具有一間隙43，該第二跨接部42形成於該間隙43的位置，該第二跨接部42分別在該第一跨接部41的兩端通過該電絕緣層30的該爬坡部31並且電性連接於二個相鄰的該第二感測器22。C. A jumper wire 40 is formed over the electrically insulating layer 30. The jumper wire 40 includes a first bridging portion 41 that is transparent and electrically conductive, and a second bridging portion 42 of a metal material. 6C-6D), the first bridging portion 42 covers the electrically insulating layer 30, and the climbing portion 31 of the first bridging portion 41 at both ends of the second direction and the two ends of the electrically insulating layer 30 There is a gap 43 between the second bridging portion 42 formed at the gap 43 , and the second bridging portion 42 passes through the electric insulating layer 30 at both ends of the first bridging portion 41 respectively. The slope portion 31 is electrically connected to two adjacent second sensors 22 .
前述步驟C用於形成本發明之跨接線40的一實施例，請參閱第5圖繪示的步驟流程圖，包括下列步驟：The foregoing step C is used to form an embodiment of the jumper 40 of the present invention. Please refer to the flowchart of the steps shown in FIG. 5, including the following steps:
C1.以第三次製程(例如黃光製程)在該電絕緣層30上方形成該第一跨接部41(其堆疊結構請見第6C圖)，該第一跨接部41在該第二方向的兩端與該電絕緣層30之兩端的爬坡部31之間具有一間隙43；以及C1. The first bridging portion 41 is formed over the electrically insulating layer 30 in a third process (for example, a yellow light process) (the stacking structure is shown in FIG. 6C), and the first bridging portion 41 is in the second There is a gap 43 between the two ends of the direction and the climbing portion 31 at both ends of the electrically insulating layer 30;
C2.以第四次製程(例如濺鍍製程)在該第一跨接部41與該電絕緣層30之兩端的爬坡部31之間的該間隙43處形成金屬材質的該第二跨接部42(其堆疊結構請見第6D圖)，該第二跨接部42分別與該第一跨接部41和相鄰的該第二感測器22電性連接，該第二跨接部42分別在該第一跨接部41的兩端通過該電絕緣層30的該爬坡部31並且電性連接於二個相鄰的該第二感測器22。C2. forming the second jumper of the metal material at the gap 43 between the first bridging portion 41 and the climbing portion 31 at both ends of the electrically insulating layer 30 by a fourth process (for example, a sputtering process) The second bridging portion 42 is electrically connected to the first bridging portion 41 and the adjacent second sensor 22, and the second bridging portion is respectively connected to the second bridging portion 41. 42 passes through the climbing portion 31 of the electrically insulating layer 30 at both ends of the first bridging portion 41 and is electrically connected to two adjacent second sensors 22 .
在本發明方法的一實施例中，包括：在以第四次製程形成金屬材質的該第二跨接部42的同時形成用於電性連接第一方向電極10的第一方向週邊線路11，以及用於電性連接第二方向電極20的第二方向週邊線路21；因此本發明方法可以在可以在既有制程下，只是通過改進跨接線的構造就能達到避免跨接線斷裂，提升制程良率，以及解決ITO材質之跨接線的＂可見”問題。In an embodiment of the method of the present invention, the first direction peripheral line 11 for electrically connecting the first direction electrode 10 is formed while forming the second bridging portion 42 of the metal material in a fourth process. And the second direction peripheral line 21 for electrically connecting the second direction electrode 20; therefore, the method of the invention can avoid breakage of the jumper and improve the process in the existing process, only by improving the structure of the jumper. Rate, as well as the "visible" problem of the ITO material's jumper.
請參閱第7圖，在本發明方法的一實施例還包括一形成保護層60的步驟D.，係以一第五次製程形成一保護層60(passivation layer)覆蓋於該第一方向電極10(其堆疊結構請見第6E圖)、該第二方向電極20和該跨接線40的表面，該保護層60係為一種透明絕緣材料，所述的透明絕緣材料包含氧化矽SiO2和其他等效材料，用於保護該第一方向電極10、該第二方向電極20和該跨接線40。Referring to FIG. 7 , an embodiment of the method of the present invention further includes a step D of forming a protective layer 60. The fifth layer is formed with a passivation layer covering the first direction electrode 10 . (The stacking structure is shown in FIG. 6E), the second direction electrode 20 and the surface of the jumper 40, the protective layer 60 is a transparent insulating material, and the transparent insulating material comprises yttria SiO2 and other equivalents. A material for protecting the first direction electrode 10, the second direction electrode 20, and the jumper wire 40.
在本發明方法的一實施例中，其中形成金屬材質的該第二跨接部42的一種實施方式，包括：在形成第二跨接部42的製程中透過控制氧氣量的方式形成一種氧化金屬材質的該第二跨接部42，例如在濺鍍製程中加大通入氧氣量，令金屬材料與氧氣反應生成對應的氧化金屬(所述的氧化金屬意指該金屬材料通過氧化反應後生成的金屬氧化物，在本發明下文中所描述的氧化金屬亦適用)；透過氧化金屬材質的第二跨接部42降低光反射率，避免第二跨接部42出現可見的問題。In an embodiment of the method of the present invention, an embodiment of the second bridging portion 42 in which the metal material is formed includes: forming a metal oxide by controlling the amount of oxygen in the process of forming the second bridging portion 42 The second bridging portion 42 of the material, for example, increases the amount of oxygen introduced during the sputtering process, and reacts the metal material with oxygen to form a corresponding oxidized metal (the oxidized metal means that the metal material is formed by oxidation reaction). The metal oxide, which is also described in the hereinafter of the present invention, is also applicable; the second bridging portion 42 of the oxidized metal material reduces the light reflectance and avoids visible problems with the second bridging portion 42.
在本發明方法的一實施例中，其中形成金屬材質的該第二跨接部的一種實施方式，包括：使用低反射率的金屬材質(例如鋁、鉻和氧化鉻)形成該第二跨接部，具有降低第二跨接部的光反射率，避免第二跨接部出現可見問題的功效。In an embodiment of the method of the present invention, an embodiment of the second bridging portion in which the metal material is formed includes: forming the second bridging using a low reflectivity metal material such as aluminum, chromium, and chromium oxide. The portion has the effect of reducing the light reflectivity of the second bridging portion and avoiding visible problems in the second bridging portion.
在本發明方法的一實施例中，其中形成金屬材質的該第二跨接部42的一種實施方式，包括：形成一種具有多層金屬材質的該第二跨接部42，如第8圖所示係為本發明跨接線40的另一實施例構造斷面圖，其中繪示該第二跨接部42的表面至少具有一抗反射層420，抗反射層420的實施方式可以透過採用低反射率金屬材質和氧化金屬材質其中的任一種方式實現，具有降低第二跨接部42的光反射率，避免第二跨接部42出現可見問題的功效。In an embodiment of the method of the present invention, an embodiment of the second bridging portion 42 in which the metal material is formed includes: forming the second bridging portion 42 having a plurality of layers of metal material, as shown in FIG. A cross-sectional view of another embodiment of the jumper 40 of the present invention, wherein the surface of the second jumper 42 has at least one anti-reflective layer 420, and the anti-reflective layer 420 can be implemented by using a low reflectance. The metal material and the oxidized metal material are realized in any one of the manners, and have the effect of reducing the light reflectance of the second bridging portion 42 and avoiding the visible problem of the second bridging portion 42.
在本發明的一種實施方式，係透過濺鍍製程形成一種具有多層金屬材質的第二跨接部42，如第9圖所示係為本發明跨接線40的另一實施例構造斷面圖，其中繪示第二跨接部42具有三層金屬材質，分別為第一層421的鉬(Mo)、第二層422的鋁(Al)以及第三層423的鉬(Mo)，第一層421位於第二跨接部42的表面，第二層422介於第一層421和第三層423之間，可以由第一層421和第三層423提供保護，而且具有良好的導電率以及低的阻抗。在本發明的一種實施例中，具有多層金屬材質的第二跨接部42的其中至少一層為氧化金屬層，一種較佳實施方式其中的第一層421係為氧化金屬層(例如以氧化鉬製作第一層421)，具有降低第二跨接部42的光反射率，避免第二跨接部42出現可見問題的功效。In one embodiment of the present invention, a second bridging portion 42 having a plurality of layers of metal material is formed by a sputtering process, and FIG. 9 is a cross-sectional view showing another embodiment of the jumper 40 of the present invention. The second bridging portion 42 has three layers of metal materials, namely molybdenum (Mo) of the first layer 421, aluminum (Al) of the second layer 422, and molybdenum (Mo) of the third layer 423, the first layer. 421 is located on the surface of the second bridging portion 42, and the second layer 422 is interposed between the first layer 421 and the third layer 423, and can be protected by the first layer 421 and the third layer 423, and has good electrical conductivity and Low impedance. In one embodiment of the present invention, at least one of the second bridging portions 42 having a plurality of layers of metal is an oxidized metal layer. In a preferred embodiment, the first layer 421 is an oxidized metal layer (for example, molybdenum oxide). The first layer 421) is formed to have the effect of reducing the light reflectivity of the second bridging portion 42 and avoiding visible problems of the second bridging portion 42.
雖然本發明已透過上述之實施例揭露如上，然其並非用以限定本發明，任何熟習相像技藝者，在不脫離本發明之精神和範圍內，當可作些許之更動與潤飾，因此本發明之專利保護範圍須視本說明書所附之請求項所界定者為準。While the present invention has been described above by way of example, the present invention is not intended to limit the invention, and the invention may be modified and modified without departing from the spirit and scope of the invention. The scope of patent protection is subject to the terms of the claims attached to this specification.
10‧‧‧第一方向電極
11‧‧‧第一方向週邊線路
12‧‧‧第一感測器
13‧‧‧第一導線
20‧‧‧第二方向電極
21‧‧‧第二方向週邊線路
22‧‧‧第二感測器
221‧‧‧接觸端
30‧‧‧電絕緣層
31‧‧‧爬坡部
40‧‧‧跨接線
41‧‧‧第一跨接部
42‧‧‧第二跨接部
42a‧‧‧第二跨接部
42b‧‧‧第二跨接部
420‧‧‧抗反射層
421‧‧‧第一層
422‧‧‧第二層
423‧‧‧第三層
43‧‧‧間隙
50‧‧‧基板
51‧‧‧第一表面
60‧‧‧保護層
C‧‧‧控制器10‧‧‧First direction electrode
11‧‧‧First direction peripheral line
12‧‧‧first sensor
13‧‧‧First wire
20‧‧‧second direction electrode
21‧‧‧second direction peripheral line
22‧‧‧Second sensor
221‧‧‧Contact end
30‧‧‧Electrical insulation
31‧‧‧ climbing section
40‧‧‧ Jumper
41‧‧‧ First bridging department
42‧‧‧Second bridging department
42a‧‧‧Second bridging
42b‧‧‧Second bridging
420‧‧‧Anti-reflective layer
421‧‧‧ first floor
422‧‧‧ second floor
423‧‧‧ third floor
43‧‧‧ gap
50‧‧‧Substrate
51‧‧‧ first surface
60‧‧‧Protective layer
C‧‧‧ controller
第1圖，為本發明的一實施例構造圖，顯示具有本發明之跨接線構造的觸控面板的平面構造圖。 第2圖，為第1圖在II-II位置的構造斷面圖，顯示跨接線和電絕緣層的堆疊關係。 第3圖，為本發明跨接線的另一實施例構造圖，顯示第一跨接部和數個第二跨接部電性連接的平面構造圖。 第4圖，為本發明方法的一實施例的步驟流程圖，顯示使用本發明的跨接線構造的觸控面板的製造步驟。 第5圖，為本發明方法的一實施例的步驟流程圖，顯示本發明提出之跨接線構造的製造步驟。 第6A-6E圖，為本發明方法製造觸控面板的連續動作圖，顯示觸控面板的堆疊結構。 第7圖，為本發明方法的另一步驟流程圖，顯示使用本發明的跨接線構造的觸控面板的製造步驟流程。 第8圖，為本發明跨接線的另一實施例構造斷面圖，繪示第二跨接部的表面具有一抗反射層。 第9圖，為本發明跨接線的另一實施例構造斷面圖，繪示第二跨接部為多層金屬的結構。Fig. 1 is a structural view showing an embodiment of the present invention, showing a plan view of a touch panel having the jumper structure of the present invention. Figure 2 is a cross-sectional view of the structure of Figure 1 at position II-II showing the stacking relationship between the jumper and the electrically insulating layer. Fig. 3 is a structural view showing another embodiment of the jumper of the present invention, showing a planar configuration diagram of electrical connection of the first bridging portion and the plurality of second bridging portions. 4 is a flow chart showing the steps of an embodiment of the method of the present invention, showing the manufacturing steps of the touch panel using the jumper structure of the present invention. Figure 5 is a flow chart showing the steps of an embodiment of the method of the present invention showing the manufacturing steps of the jumper structure of the present invention. 6A-6E is a continuous action diagram of the touch panel manufactured by the method of the present invention, showing a stack structure of the touch panel. Figure 7 is a flow chart showing another step of the method of the present invention, showing the flow of manufacturing steps of the touch panel using the jumper structure of the present invention. Figure 8 is a cross-sectional view showing another embodiment of the jumper of the present invention, showing the surface of the second jumper having an anti-reflection layer. Figure 9 is a cross-sectional view showing another embodiment of the jumper of the present invention, showing the structure in which the second jumper is a multi-layer metal.
13‧‧‧第一導線 13‧‧‧First wire
22‧‧‧第二感測器 22‧‧‧Second sensor
221‧‧‧接觸端 221‧‧‧Contact end
30‧‧‧電絕緣層 30‧‧‧Electrical insulation
31‧‧‧爬坡部 31‧‧‧ climbing section
40‧‧‧跨接線 40‧‧‧ Jumper
41‧‧‧第一跨接部 41‧‧‧ First bridging department
42‧‧‧第二跨接部 42‧‧‧Second bridging department
50‧‧‧基板 50‧‧‧Substrate
51‧‧‧第一表面 51‧‧‧ first surface
60‧‧‧保護層 60‧‧‧Protective layer
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| TWI567622B true TWI567622B (en) | 2017-01-21 |
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| TW104203661U TWM507021U (en) | 2014-05-05 | 2015-03-12 | A jumper structure in a touch sensor and a fabricating method thereof, as well as a capacitive touch panel using the jumper structure |
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| CN105094470B (en) * | 2014-05-05 | 2019-01-22 | 宸鸿科技(厦门)有限公司 | Jumper, manufacturing method and the capacitance type touch-control panel of touch sensing |
| CN107066160A (en) | 2017-05-16 | 2017-08-18 | 京东方科技集团股份有限公司 | Touch base plate and preparation method thereof, display device |
| TWM606252U (en) | 2020-09-30 | 2021-01-01 | 凌巨科技股份有限公司 | Layer jumping structure of reflective display |
| US11907488B2 (en) | 2021-02-26 | 2024-02-20 | Chengdu Boe Optoelectronics Technology Co., Ltd. | Touch structure, touch display panel, and display device |
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| TW201145127A (en) * | 2010-06-04 | 2011-12-16 | Wei-Chuan Chen | Touch panel structure and making the same |
| TW201333794A (en) * | 2011-12-19 | 2013-08-16 | Lg Innotek Co Ltd | Electrode pattern of touch panel |
| CN103425303A (en) * | 2012-05-16 | 2013-12-04 | 宸鸿科技(厦门)有限公司 | Touch panel and touch display device comprising same |
| TWM472242U (en) * | 2013-07-23 | 2014-02-11 | Wintek Corp | Touch panel |
| US20140055405A1 (en) * | 2012-08-23 | 2014-02-27 | Henghao Technology Co. Ltd | Touch electrode device and a method of manufacturing the same |
| TWM507021U (en) * | 2014-05-05 | 2015-08-11 | Tpk Touch Solutions Xiamen Inc | A jumper structure in a touch sensor and a fabricating method thereof, as well as a capacitive touch panel using the jumper structure |
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| CN201352342Y (en) * | 2008-12-19 | 2009-11-25 | 洋华光电股份有限公司 | Improved capacitive touch sensing structure |
| CN201867785U (en) * | 2010-09-08 | 2011-06-15 | 汕头超声显示器有限公司 | Capacitance touch induction device |
| WO2012099394A2 (en) * | 2011-01-19 | 2012-07-26 | Lg Innotek Co., Ltd. | Touch panel and method for manufacturing the same |
| CN103294242B (en) * | 2012-02-25 | 2016-03-02 | 宸鸿科技(厦门)有限公司 | Contact panel and preparation method thereof |
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2014
- 2014-05-05 CN CN201410185952.5A patent/CN105094470B/en active Active
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- 2015-03-12 TW TW104203661U patent/TWM507021U/en not_active IP Right Cessation
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|---|---|---|---|---|
| TW201145127A (en) * | 2010-06-04 | 2011-12-16 | Wei-Chuan Chen | Touch panel structure and making the same |
| TW201333794A (en) * | 2011-12-19 | 2013-08-16 | Lg Innotek Co Ltd | Electrode pattern of touch panel |
| CN103425303A (en) * | 2012-05-16 | 2013-12-04 | 宸鸿科技(厦门)有限公司 | Touch panel and touch display device comprising same |
| US20140055405A1 (en) * | 2012-08-23 | 2014-02-27 | Henghao Technology Co. Ltd | Touch electrode device and a method of manufacturing the same |
| TWM472242U (en) * | 2013-07-23 | 2014-02-11 | Wintek Corp | Touch panel |
| TWM507021U (en) * | 2014-05-05 | 2015-08-11 | Tpk Touch Solutions Xiamen Inc | A jumper structure in a touch sensor and a fabricating method thereof, as well as a capacitive touch panel using the jumper structure |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201543321A (en) | 2015-11-16 |
| CN105094470A (en) | 2015-11-25 |
| CN105094470B (en) | 2019-01-22 |
| TWM507021U (en) | 2015-08-11 |
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