TWI562281B - Memory device and method of manufacturing the same - Google Patents

Memory device and method of manufacturing the same

Info

Publication number
TWI562281B
TWI562281B TW104125860A TW104125860A TWI562281B TW I562281 B TWI562281 B TW I562281B TW 104125860 A TW104125860 A TW 104125860A TW 104125860 A TW104125860 A TW 104125860A TW I562281 B TWI562281 B TW I562281B
Authority
TW
Taiwan
Prior art keywords
manufacturing
same
memory device
memory
Prior art date
Application number
TW104125860A
Other languages
Chinese (zh)
Other versions
TW201707136A (en
Inventor
Yuan-Chieh Chiu
Shih-Ping Hong
Yao-An Chung
Original Assignee
Macronix Int Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Macronix Int Co Ltd filed Critical Macronix Int Co Ltd
Priority to TW104125860A priority Critical patent/TWI562281B/en
Application granted granted Critical
Publication of TWI562281B publication Critical patent/TWI562281B/en
Publication of TW201707136A publication Critical patent/TW201707136A/en

Links

TW104125860A 2015-08-07 2015-08-07 Memory device and method of manufacturing the same TWI562281B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW104125860A TWI562281B (en) 2015-08-07 2015-08-07 Memory device and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104125860A TWI562281B (en) 2015-08-07 2015-08-07 Memory device and method of manufacturing the same

Publications (2)

Publication Number Publication Date
TWI562281B true TWI562281B (en) 2016-12-11
TW201707136A TW201707136A (en) 2017-02-16

Family

ID=58227342

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104125860A TWI562281B (en) 2015-08-07 2015-08-07 Memory device and method of manufacturing the same

Country Status (1)

Country Link
TW (1) TWI562281B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090166682A1 (en) * 2007-12-31 2009-07-02 Scheuerlein Roy E Methods and apparatus for forming memory lines and vias in three dimensional memory arrays using dual damascene process and imprint lithography
WO2012021433A1 (en) * 2010-08-13 2012-02-16 Sandisk 3D, Llc Method for forming a three-dimensional memory array using imprint lithography, mask therefor, and memory device obtained thereby
TW201530701A (en) * 2014-01-27 2015-08-01 Macronix Int Co Ltd Three-dimensional memory and method of forming the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090166682A1 (en) * 2007-12-31 2009-07-02 Scheuerlein Roy E Methods and apparatus for forming memory lines and vias in three dimensional memory arrays using dual damascene process and imprint lithography
WO2012021433A1 (en) * 2010-08-13 2012-02-16 Sandisk 3D, Llc Method for forming a three-dimensional memory array using imprint lithography, mask therefor, and memory device obtained thereby
TW201530701A (en) * 2014-01-27 2015-08-01 Macronix Int Co Ltd Three-dimensional memory and method of forming the same

Also Published As

Publication number Publication date
TW201707136A (en) 2017-02-16

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