TWI562281B - Memory device and method of manufacturing the same - Google Patents
Memory device and method of manufacturing the sameInfo
- Publication number
- TWI562281B TWI562281B TW104125860A TW104125860A TWI562281B TW I562281 B TWI562281 B TW I562281B TW 104125860 A TW104125860 A TW 104125860A TW 104125860 A TW104125860 A TW 104125860A TW I562281 B TWI562281 B TW I562281B
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing
- same
- memory device
- memory
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW104125860A TWI562281B (en) | 2015-08-07 | 2015-08-07 | Memory device and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW104125860A TWI562281B (en) | 2015-08-07 | 2015-08-07 | Memory device and method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI562281B true TWI562281B (en) | 2016-12-11 |
TW201707136A TW201707136A (en) | 2017-02-16 |
Family
ID=58227342
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104125860A TWI562281B (en) | 2015-08-07 | 2015-08-07 | Memory device and method of manufacturing the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI562281B (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090166682A1 (en) * | 2007-12-31 | 2009-07-02 | Scheuerlein Roy E | Methods and apparatus for forming memory lines and vias in three dimensional memory arrays using dual damascene process and imprint lithography |
WO2012021433A1 (en) * | 2010-08-13 | 2012-02-16 | Sandisk 3D, Llc | Method for forming a three-dimensional memory array using imprint lithography, mask therefor, and memory device obtained thereby |
TW201530701A (en) * | 2014-01-27 | 2015-08-01 | Macronix Int Co Ltd | Three-dimensional memory and method of forming the same |
-
2015
- 2015-08-07 TW TW104125860A patent/TWI562281B/en active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090166682A1 (en) * | 2007-12-31 | 2009-07-02 | Scheuerlein Roy E | Methods and apparatus for forming memory lines and vias in three dimensional memory arrays using dual damascene process and imprint lithography |
WO2012021433A1 (en) * | 2010-08-13 | 2012-02-16 | Sandisk 3D, Llc | Method for forming a three-dimensional memory array using imprint lithography, mask therefor, and memory device obtained thereby |
TW201530701A (en) * | 2014-01-27 | 2015-08-01 | Macronix Int Co Ltd | Three-dimensional memory and method of forming the same |
Also Published As
Publication number | Publication date |
---|---|
TW201707136A (en) | 2017-02-16 |
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