TWI562265B - Pressure reducing method and pressure reducing apparatus thereof - Google Patents

Pressure reducing method and pressure reducing apparatus thereof

Info

Publication number
TWI562265B
TWI562265B TW104117695A TW104117695A TWI562265B TW I562265 B TWI562265 B TW I562265B TW 104117695 A TW104117695 A TW 104117695A TW 104117695 A TW104117695 A TW 104117695A TW I562265 B TWI562265 B TW I562265B
Authority
TW
Taiwan
Prior art keywords
pressure reducing
reducing apparatus
reducing method
pressure
reducing
Prior art date
Application number
TW104117695A
Other languages
Chinese (zh)
Other versions
TW201643978A (en
Inventor
Cheng-Yu Tsau
zheng-zhong Huang
Original Assignee
Archers Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Archers Inc filed Critical Archers Inc
Priority to TW104117695A priority Critical patent/TWI562265B/en
Application granted granted Critical
Publication of TWI562265B publication Critical patent/TWI562265B/en
Publication of TW201643978A publication Critical patent/TW201643978A/en

Links

TW104117695A 2015-06-02 2015-06-02 Pressure reducing method and pressure reducing apparatus thereof TWI562265B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW104117695A TWI562265B (en) 2015-06-02 2015-06-02 Pressure reducing method and pressure reducing apparatus thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104117695A TWI562265B (en) 2015-06-02 2015-06-02 Pressure reducing method and pressure reducing apparatus thereof

Publications (2)

Publication Number Publication Date
TWI562265B true TWI562265B (en) 2016-12-11
TW201643978A TW201643978A (en) 2016-12-16

Family

ID=58055990

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104117695A TWI562265B (en) 2015-06-02 2015-06-02 Pressure reducing method and pressure reducing apparatus thereof

Country Status (1)

Country Link
TW (1) TWI562265B (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200403778A (en) * 2002-08-02 2004-03-01 Wafermasters Inc Batch furnace

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200403778A (en) * 2002-08-02 2004-03-01 Wafermasters Inc Batch furnace

Also Published As

Publication number Publication date
TW201643978A (en) 2016-12-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees
MM4A Annulment or lapse of patent due to non-payment of fees