TWI562265B - Pressure reducing method and pressure reducing apparatus thereof - Google Patents
Pressure reducing method and pressure reducing apparatus thereofInfo
- Publication number
- TWI562265B TWI562265B TW104117695A TW104117695A TWI562265B TW I562265 B TWI562265 B TW I562265B TW 104117695 A TW104117695 A TW 104117695A TW 104117695 A TW104117695 A TW 104117695A TW I562265 B TWI562265 B TW I562265B
- Authority
- TW
- Taiwan
- Prior art keywords
- pressure reducing
- reducing apparatus
- reducing method
- pressure
- reducing
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW104117695A TWI562265B (en) | 2015-06-02 | 2015-06-02 | Pressure reducing method and pressure reducing apparatus thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW104117695A TWI562265B (en) | 2015-06-02 | 2015-06-02 | Pressure reducing method and pressure reducing apparatus thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI562265B true TWI562265B (en) | 2016-12-11 |
TW201643978A TW201643978A (en) | 2016-12-16 |
Family
ID=58055990
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104117695A TWI562265B (en) | 2015-06-02 | 2015-06-02 | Pressure reducing method and pressure reducing apparatus thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI562265B (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200403778A (en) * | 2002-08-02 | 2004-03-01 | Wafermasters Inc | Batch furnace |
-
2015
- 2015-06-02 TW TW104117695A patent/TWI562265B/en not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200403778A (en) * | 2002-08-02 | 2004-03-01 | Wafermasters Inc | Batch furnace |
Also Published As
Publication number | Publication date |
---|---|
TW201643978A (en) | 2016-12-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees | ||
MM4A | Annulment or lapse of patent due to non-payment of fees |